JP6649400B2 - Hydraulic cylinder with integrated booster pump - Google Patents

Description

  The present invention relates to a hydraulic cylinder, and more particularly, to a hydraulic cylinder integrally provided with a booster pump.

  Generally, a booster pump device is configured to operate by attaching a booster pump to a hydraulic oil storage tank, and is operated only by the booster pump even at a low load. Therefore, there is a disadvantage that the operation of the piston rod of the cylinder is delayed and a large amount of energy is consumed.

Also, the hydraulic pressure intensifier (Patent Document 1) is designed so that the piston rod moves forward at a high load at a low load, and outputs a high output at a high load. Therefore, each cylinder must be manufactured in a custom-made type. .

Korean Patent Registration Publication No. 10-0704958

  An object of the present invention is to provide a hydraulic device integrally provided with a booster pump having a high boosting ratio when the hydraulic cylinder is under a high load, together with a booster that is operated at a low boost pressure when the hydraulic cylinder is under a low load. .

  In order to achieve the above object, a hydraulic cylinder integrally provided with a booster pump according to the present invention includes a first pneumatic working chamber on a lower side and a first hydraulic working chamber on an upper side, and a working piston therein. A first pneumatic passage is formed below the first pneumatic working chamber, a second pneumatic passage is formed above the first pneumatic working chamber, and is adjacent to an upper side of the first hydraulic working chamber. And a lower cylinder having a first hydraulic passage and a small-diameter hole in an upper part; a pressure-intensifying piston and a slide-type piston disposed in the lower cylinder; An upper cylinder in which a second hydraulic working chamber is formed, a second pneumatic working chamber is formed on the upper side, and a second hydraulic passage is formed below the second hydraulic working chamber; Enables mutual communication with the third pneumatic passage and the second pneumatic working chamber that communicate with each other A sixth pneumatic passage, a fifth pneumatic passage opened and closed by two check valves, and a fourth compressed air discharge passage for discharging the compressed air in the internal space are formed. A first master valve provided at the upper end of the second pneumatic operating chamber of the upper cylinder; a third pneumatic operating chamber, a third hydraulic operating chamber, and a fourth hydraulic operating chamber. A pump piston is disposed therein, a reverse pneumatic operating chamber is formed on the lower side by the pump piston, a forward pneumatic operating chamber is formed on the upper side, and the third pneumatic operating chamber has a lower part. A second valve rod which is opened and closed by contact of the ninth pneumatic passage with the pump piston, a first valve rod which is opened and closed by contact of the pump piston, and a third hydraulic operating chamber is provided with a third check valve. By A third hydraulic passage that is opened and closed, and a fourth hydraulic passage that is opened and closed by a fourth check valve are formed therein, and the fourth hydraulic working chamber has a fifth hydraulic passage that is opened and closed by a fifth check valve, and a sixth check valve. A second main body having a sixth hydraulic passage opened and closed by a valve formed therein; and an eleventh pneumatic passage communicating with the forward pneumatic working chamber via a first valve rod therein, a ninth air passage A tenth pneumatic passage communicating with the pressure passage, a seventh pneumatic passage enabling mutual communication with the third pneumatic working chamber, and a twelfth air communicating with the first valve rod in the internal space of the second master valve. A thirteenth air pressure passage for allowing compressed air to flow into the internal space of the pressure passage and the second master valve; a second valve spool disposed in the internal space to control a flow of the compressed air; Installed at the upper end of the pneumatic chamber A second master valve.

  In the present invention, the working piston is preferably composed of a working rod, a piston ring, and a guide rod.

  The piston ring may be disposed between the first pneumatic passage and the second pneumatic passage.

  It is preferable that the slide-type piston is slidably disposed along the length direction of the piston rod of the pressure-intensifying piston, and that the slide-type piston is elastically supported by the pressure-intensifying piston by a spring.

  Preferably, the piston rod of the pump piston extends movably into the third pneumatic working chamber, the third hydraulic working chamber, and the fourth hydraulic working chamber.

  The fourth hydraulic passage and the sixth hydraulic passage may be communicably connected to the second hydraulic passage, and the third hydraulic passage and the fifth hydraulic passage may be communicably connected to the first hydraulic passage.

  Preferably, the first valve rod comprises a first pressure spring and the second valve rod comprises a second pressure spring.

  The second main body may include an eighth air pressure passage for supplying compressed air to the second valve rod and a fourteenth compressed air discharge passage for discharging compressed air through the second valve rod.

  The upper cylinder can be arranged in a row above the lower cylinder so as to be in fluid communication.

  The booster piston of the upper cylinder is preferably arranged coaxially with the working piston of the lower cylinder.

  The upper cylinder can be arranged parallel to the lower cylinder.

  The pressure boosting piston of the upper cylinder is preferably arranged on both axes with the working piston of the lower cylinder.

  The fifth pneumatic passage preferably includes two check valves that can be individually opened and closed by a pneumatic forward or reverse flow.

  The features and advantages of the present invention will become more apparent from the following detailed description, taken in conjunction with the accompanying drawings.

  Prior to this, the terms and words used in the specification and claims should not be construed as ordinary and lexicographical meanings, and the inventor describes his invention in the best possible way. Therefore, the terms must be interpreted as meanings and concepts consistent with the technical idea of the present invention based on the principle that the concept of terms can be appropriately defined.

  As described above, according to the description of the present invention, the present invention provides a hydraulic cylinder capable of achieving an energy saving effect because compressed air acts on low load and high load to consume only an appropriate amount of energy. become.

  Since the present invention generates less heat than the existing hydraulic pump, it is possible to reduce the working oil storage space and to design a compact structure. Further, the present invention is configured to continuously provide a high output in order to reduce the pressure pulsation phenomenon.

  Hereinafter, a hydraulic cylinder integrally provided with a booster pump according to the present invention will be described in detail with reference to the accompanying drawings.

  The advantages and features of the present invention, and methods for achieving the same will be apparent through embodiments described in detail below with reference to the accompanying drawings. In this specification, in assigning a reference numeral to a component in each drawing, the same reference numeral indicates the same or similar component throughout the specification. In addition, in the case where a detailed description of a known technology related to this specification might obscure the gist of the present invention, a detailed description thereof will be omitted.

  A hydraulic cylinder integrally provided with a booster pump according to a preferred embodiment of the present invention has the following configuration.

  Referring to FIG. 1, a hydraulic cylinder according to a preferred embodiment of the present invention includes a first main body (no reference numeral) partitioned into an upper cylinder and a lower cylinder, and is arranged in a fluid communication with the first main body. The second main body 30 provided, that is, a booster pump. Here, the first main body part divides the cylinder into upper and lower parts. A pressure-intensifying piston P2 equipped with a spring S is provided in the upper cylinder 20, while a working piston P1 is provided in the lower cylinder 10. ing. In particular, in the hydraulic cylinder according to the preferred embodiment of the present invention, the working piston P1 and the pressure-intensifying piston P2 are arranged coaxially, and the lower cylinder 10 and the upper cylinder 20 are arranged in a line.

  Specifically, the lower cylinder 10 has a first pneumatic operating chamber 110 formed on the lower side and a first hydraulic operating chamber 120 formed on the upper side, and has a small-diameter hole 121 on the upper side. The lower cylinder 10 has a first pneumatic passage H1 adjacent to the lower side, a first hydraulic passage W1 adjacent to the upper side, and a second pneumatic passage between the first pneumatic passage H1 and the first hydraulic passage W1. A passage H2 is formed. The working piston P1 includes a working rod P1-1, a piston ring P1-2, and a guide rod P1-3. Preferably, the piston ring P1-2 is disposed between the first air pressure passage H1 and the second air pressure passage H2. The first pneumatic operating chamber 110 has a pneumatic operating chamber 110a for reverse running formed at a lower portion by the piston ring P1-2, and a pneumatic operating chamber 110b for forward running formed at an upper portion. That is, the first pneumatic passage H1 communicates with the reverse pneumatic operating chamber 110a, and the second pneumatic passage H2 communicates with the forward pneumatic operating chamber 110b. Of course, the first hydraulic passage W1 communicates with the first hydraulic working chamber 120.

  The upper cylinder 20 is disposed above the lower cylinder 10, and is provided so as to be able to communicate with the fluid via a hole 121 of the lower cylinder 10. As shown in the drawing, the upper cylinder 20 has a pressure-intensifying piston P2 disposed therein, a second hydraulic operating chamber 220 formed at a lower part, and a second pneumatic operating chamber 210 formed at an upper part. The second hydraulic working chamber 220 and the second pneumatic working chamber 210 are partitioned by a slide type piston P3. The second hydraulic passage W2 communicates with the second hydraulic working chamber 220 and is disposed below the bottom dead center of the slide piston P3.

  As described above, the upper cylinder 20 includes the pressure-increasing piston P2 in an internal space that defines the second pneumatic operating chamber 210 and the second hydraulic operating chamber 220. The pressure-intensifying piston P2 includes a piston rod P2-1 that extends in the longitudinal direction at a lower portion. The piston rod P2-1 is movably provided in the first hydraulic operating chamber 120 and the second hydraulic operating chamber 220 through the hole 121 of the lower cylinder 10. The free end of the piston rod P2-1 has access to the guide rod P1-3 of the working piston P1. Preferably, the piston rod P2-1 includes a slide piston P3 slidable along the length of the piston rod P2-1. The slide piston P3 is provided on the pressure-intensifying piston P2 via a spring S.

  In particular, the upper end of the upper cylinder 20 includes a first master valve 250 that controls the compressed air to flow into and / or out of the second pneumatic working chamber 210. The first master valve 250 can control the flow of the compressed air by using the first valve spool 260 therein as a control unit. The first master valve 250 has a third pneumatic passage H3, a fourth compressed air discharge passage H4, and a sixth pneumatic passage H6 selectively opened and closed via a first valve spool 260, while two check valves are provided. And a fifth air pressure passage H5 which is opened and closed by 261 and 262. Here, the fifth pneumatic passage H5 of the first master valve 250 includes two check valves 261 and 262 so that the fifth pneumatic passage H5 can be individually opened and closed along the flow direction (forward and reverse) of the pneumatic fluid. For example, the second check valve 262 can be opened and the first check valve 261 can be closed so as to enable the forward flow of discharging the air inside the first master valve 250 to the outside. Alternatively, the second check valve 262 can be closed and the first check valve 261 can be opened so that the external air can flow in the reverse direction and flow into the internal space of the first master valve 250. . The sixth pneumatic passage H6 is formed so as to communicate between the first master valve 250 and the second pneumatic working chamber 210.

  The second main body 30 is provided side by side so as to be in fluid communication with the first main body provided with the first hydraulic operating chamber 120 and the second hydraulic operating chamber 220, and the third pneumatic operating chamber 310 and the third hydraulic operating The chamber 320 and the fourth hydraulic operation chamber 330 are formed inside. The third pneumatic operation chamber 310 has a pneumatic operation chamber 310a for reverse running formed at a lower portion by the pump piston P4, and a pneumatic operation chamber 310b for advance formed at an upper portion. That is, the ninth pneumatic passage H9 communicates with the reverse pneumatic operating chamber 310a, and the eleventh pneumatic passage H11 communicates with the forward pneumatic operating chamber 310b.

  The second main body 30 includes a pump piston P4 disposed in an internal space defined by the third pneumatic operating chamber 310, the third hydraulic operating chamber 320, and the fourth hydraulic operating chamber 330, and the pump piston P4 is provided at a lower part. A piston rod P4-1 is provided extending in the length direction and movably provided in the third pneumatic operating chamber 310, the third hydraulic operating chamber 320, and the fourth hydraulic operating chamber 330. The free end of the piston rod P4-1 extends in the length direction so as to penetrate the fourth hydraulic working chamber 330.

  In particular, the upper end of the second main body 30 is provided with a second master valve 350 that controls the compressed air to flow into and / or out of the third pneumatic working chamber 310. The second master valve 350 uses the second valve spool 360 as a control means therein to control the seventh pneumatic passage H7, the tenth pneumatic passage H10, the eleventh pneumatic passage H11, the twelfth pneumatic passage H12, And the thirteenth air pressure passage H13 is selectively opened and closed to control the flow of compressed air. The second master valve 350 further includes a first valve rod 370 that is disposed above the third pneumatic operation chamber 310 and that can be opened by pressurization by the backward drive of the pump piston P4. The first valve rod 370 is interposed between the seventh pneumatic passage H7, the twelfth pneumatic passage H12, and the upper side of the third pneumatic working chamber 310. The first valve rod 370 has a first pressurizing spring 371 mounted on an upper stage thereof, and the compressed air flowing to the seventh pneumatic passage H7, the compressed air flowing to the twelfth pneumatic passage H12, or the pump piston P4. The seventh pneumatic passage H7 and the twelfth pneumatic passage H12 may be interconnected or closed through pressurization. At the same time, the second main body 30 includes a second valve rod 380 which is disposed below the third pneumatic operating chamber 310 and can be opened by pressurization by the forward drive of the pump piston P4. The second valve rod 380 is interposed between the eighth pneumatic passage H8, the fourteenth compressed air discharge passage H14, and the lower side of the third pneumatic working chamber 310. The second valve rod 380 has a second pressurizing spring 381 attached to a lower portion thereof, and opens and closes the fourteenth compressed air discharge passage H14 by pressurizing the compressed air flowing in the eighth pneumatic passage H8 and / or the pump piston P4. can do.

  Specifically, the second main body 30 allows the second master valve 350 and the third pneumatic operating chamber 310 to communicate with the reverse pneumatic operating chamber 310 a in fluid communication with each other. H10 is formed, and a ninth pneumatic passage H9 is formed below the third pneumatic working chamber 310. The second master valve 350 can receive compressed air from the internal space through the thirteenth air pressure passage H13.

  The eleventh pneumatic passage H11 is formed such that the internal space of the second master valve 350 and the forward pneumatic operating chamber 310b of the third pneumatic operating chamber 310 can communicate with each other.

  The second main body 30 includes a third hydraulic passage W3 and a fourth hydraulic passage W4 formed so that hydraulic oil flows into and out of the third hydraulic operating chamber 320, and the hydraulic oil flows into the fourth hydraulic operating chamber 330. A fifth hydraulic passage W5 and a sixth hydraulic passage W6 formed so as to be inserted thereinto. In the hydraulic cylinder according to the present invention, a fourth check valve 322 is disposed between the second hydraulic passage W2 of the second hydraulic operating chamber 220 and the fourth hydraulic passage W4 of the third hydraulic operating chamber 320, and the second hydraulic operation is performed. The chamber 220 and the third hydraulic working chamber 320 can be opened and closed so that fluid communication is possible. In the hydraulic cylinder according to the present invention, the sixth check valve 332 is disposed between the second hydraulic passage W2 of the second hydraulic operating chamber 220 and the sixth hydraulic passage W6 of the fourth hydraulic operating chamber 330, The hydraulic operating chamber 220 and the fourth hydraulic operating chamber 330 can be opened and closed so that fluid communication is possible.

  In the hydraulic cylinder according to the present invention, the third check valve 321 is disposed between the first hydraulic passage W1 of the first hydraulic operating chamber 120 and the third hydraulic passage W3 of the third hydraulic operating chamber 320, and the first hydraulic operation is performed. The chamber 120 and the third hydraulic operating chamber 320 can be opened and closed so that fluid communication is possible.

  In the hydraulic cylinder according to the present invention, a fifth check valve 331 is disposed between the first hydraulic passage W1 of the first hydraulic operating chamber 120 and the fifth hydraulic passage W5 of the fourth hydraulic operating chamber 330, and The hydraulic operating chamber 120 and the fourth hydraulic operating chamber 330 can be opened and closed so that fluid communication is possible.

  Hereinafter, the drive of a hydraulic cylinder according to a preferred embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a view showing the inside of a hydraulic cylinder according to the present invention when the piston is retracted. The reverse compressed air flows into the reverse pneumatic operating chamber 110a of the first pneumatic operating chamber 110 via the first pneumatic passage H1 to move the operating piston P1 backward, and the third compressed air passes through the third pneumatic passage H3. Then, the first valve spool 260 is operated in the internal space of the first master valve 250. The compressed air in the second pneumatic working chamber 210 is discharged to the fourth compressed air discharge passage H4 via the sixth pneumatic passage H6.

  At this time, the pressure-intensifying piston P2 moves backward by the elastic force of the spring S.

  FIG. 2 is a diagram showing a high-speed forward operation of the hydraulic cylinder according to the present invention at a low load, in which compressed air during forward movement is supplied to the first pneumatic working chamber 110 via the second pneumatic passage H2. The working piston P1 flows into the chamber 110b and advances.

  FIG. 3 is a view showing a low-speed forward operation under high load of the hydraulic cylinder according to the present invention, in which compressed air presses the first valve spool 260 via the fifth pneumatic passage H5 and the first check valve 261 to open the hydraulic cylinder. The air flows into the second pneumatic working chamber 210 along the sixth pneumatic passage H6.

  The compressed air that has flowed into the second pneumatic working chamber 210 advances the pressure-intensifying piston P3, and the working piston P1 moves forward at a high pressure and at a low speed.

  FIG. 4 is a diagram showing a forward state of the pump piston in the hydraulic cylinder in a low-speed forward operation state under a high load. The compressed air flowing into the thirteenth pneumatic passage H13 moves the second valve spool 360 of the second master valve 350 and passes through the eleventh pneumatic passage H11 to the third pneumatic operation chamber 310, particularly to the pneumatic operation for forward operation. It flows into the chamber 310b. The compressed air flowing into the forward pneumatic operating chamber 310b of the third pneumatic operating chamber 310 causes the pump piston P4 to move forward as a result.

  Further, the compressed air in the reverse pneumatic working chamber 310a is discharged to the outside through the ninth pneumatic passage H9, the tenth pneumatic passage H10, and the second valve spool 360. If it can be selected, the compressed air flowing out of the second main body through the second valve spool 360 is discharged through a muffler (no reference numeral). The operating oil in the third hydraulic operating chamber 320 flows into the first hydraulic operating chamber 120 via the third hydraulic passage W3 and the first hydraulic passage W1, and drives the operating piston P1 forward. At this time, the hydraulic oil in the second hydraulic operating chamber 220 flows through the second hydraulic passage W2 to open the sixth check valve 332 while flowing through the second main body, and is stored in the fourth hydraulic operating chamber 330. You.

  FIG. 5 is a diagram showing a backward movement state of the pump piston in the hydraulic cylinder in a low-speed forward operation state under a high load. The compressed air flowing into the thirteenth pneumatic passage H13 moves the second valve spool 360 of the second master valve 350, and passes through the tenth pneumatic passage H10 and the ninth pneumatic passage H9 to the third pneumatic working chamber 310. Into the pneumatic operating chamber 310a for reverse travel. The compressed air that has flowed into the reverse pneumatic operating chamber 310a of the third pneumatic operating chamber 310 moves the pump piston P4 backward.

  FIG. 6 is a vertical sectional view of the hydraulic cylinder according to the present invention driven by the low-speed forward operation under a high load, and shows a forward state of the pump piston.

  FIG. 7 is a longitudinal sectional view showing the backward movement of the hydraulic cylinder according to the present invention.

  FIG. 8 is a longitudinal sectional view showing a hydraulic cylinder according to another embodiment of the present invention. A hydraulic cylinder according to another embodiment of the present invention has a substantially similar structure as a modified example of the hydraulic cylinder shown in FIGS. 1 to 7 except for the arrangement of the pressure-intensifying piston P2 and the working piston P1. I have. As such, descriptions of similar or identical components are omitted to aid in a clear understanding of the present invention.

  As shown in FIG. 8, in a hydraulic cylinder according to another embodiment of the present invention, a working piston P1 and a pressure-intensifying piston P2 are arranged non-coaxially or biaxially, and a lower cylinder 10 and an upper cylinder 20 are arranged in a line. Do not arrange them in parallel. Of course, the lower cylinder 10 and the upper cylinder 20 should be connected in fluid communication.

  In this way, the hydraulic cylinder in which the lower cylinder 10 and the upper cylinder 20 are arranged in parallel and arranged in parallel is generally installed as compared with the first main body extending in the length direction in a single character as shown in FIGS. Energy efficiency can be improved while reducing height and providing a more compact structure.

  As described above, the present invention has been described in detail through specific embodiments. However, this is for the purpose of specifically describing the present invention, and a hydraulic cylinder integrally provided with a booster pump according to the present invention is not limited to these embodiments. It is needless to say that the present invention is not limited to the form, but can be modified or improved by those having ordinary knowledge in the art within the technical idea of the present invention.

  All simple variations and modifications of the present invention fall within the scope of the present invention, and it is obvious that the specific protection scope of the present invention falls within the scope of the appended claims.

1 is a longitudinal sectional view schematically showing an internal configuration of a hydraulic cylinder integrally provided with a booster pump according to a preferred embodiment of the present invention. It is a longitudinal section of the hydraulic cylinder concerning the present invention driven by high-speed advance operation at the time of low load. It is a longitudinal section of the hydraulic cylinder concerning the present invention driven by low-speed advance operation at the time of high load. It is a longitudinal section of a hydraulic cylinder concerning the present invention driven by low load advance operation at the time of high load, and shows a forward state of a pump piston. It is a longitudinal section of the hydraulic cylinder concerning the present invention driven by low load advance operation at the time of high load, and shows a backward state of a pump piston. It is a longitudinal section of a hydraulic cylinder concerning the present invention driven by low load advance operation at the time of high load, and shows a forward state of a pump piston. FIG. 5 is a vertical cross-sectional view showing a reverse operation of the hydraulic cylinder according to the present invention. It is a longitudinal section of a hydraulic cylinder concerning other embodiments of the present invention.

DESCRIPTION OF SYMBOLS 10 Lower cylinder 20 Upper cylinder 30 2nd main-body part 110 1st pneumatic working chamber 120 1st hydraulic working chamber 210 2nd pneumatic working chamber 220 2nd hydraulic working chamber 250 1st master valve 260 1st valve spool 310 3rd Pneumatic operating chamber 320 Third hydraulic operating chamber 330 Fourth hydraulic operating chamber 350 Second master valve 360 Second valve spool 370 First valve rod 380 Second valve rod P1 Working piston P2 Pressure increasing piston P3 Sliding piston P4 Pump piston

Claims (11)

A first pneumatic operating chamber 110 is provided on the lower side, and a first hydraulic operating chamber 120 is provided on the upper side. An operating piston P1 is disposed inside the first pneumatic operating chamber 110, and a first pneumatic passage H1 is provided below the first pneumatic operating chamber 110. Is formed, a second pneumatic passage H2 is formed above the first pneumatic working chamber 110, and a small-diameter hole 121 is formed above the first hydraulic working chamber 120 and the first hydraulic passage W1 adjacent to the upper side of the first hydraulic working chamber 120. A lower cylinder 10 comprising:
A pressure-increasing piston P2 and a slide-type piston P3 are arranged therein, and a second hydraulic working chamber 220 is formed on the lower side by the slide-type piston P3 so as to be in fluid communication with the hole 121, and on the upper side. An upper cylinder 20 in which a second pneumatic operating chamber 210 is formed, and a second hydraulic passage W2 is formed below the second hydraulic operating chamber 220;
Inside the third pneumatic passage H3, which communicates with the first pneumatic passage H1, the sixth pneumatic passage H6, which enables mutual communication with the second pneumatic working chamber 210, and two check valves 261, A fifth air pressure passage H5 that is opened and closed by an air passage 262, and a fourth compressed air discharge passage H4 that discharges compressed air in the internal space are formed, and the first valve spool is disposed in the internal space and controls the flow of the compressed air. A first master valve 250 provided at the upper end of the second pneumatic working chamber 210 of the upper cylinder 20;
The pump includes a third pneumatic operating chamber 310, a third hydraulic operating chamber 320, and a fourth hydraulic operating chamber 330, in which a pump piston P4 is disposed. A third pneumatic operating chamber 310b is formed on the upper side, and the third pneumatic operating chamber 310 is opened and closed by a contact between the ninth pneumatic passage H9 and the pump piston P4 at a lower portion thereof. A first valve rod 370, which is opened and closed by contact with the pump piston P4, and a third hydraulic working chamber 320 is provided with a third hydraulic passage W3 opened and closed by a third check valve 321; A fourth hydraulic passage W4 opened and closed by a fourth check valve 322 is formed therein, and the fourth hydraulic working chamber 330 is opened and closed by a fifth check valve 331. A second hydraulic pressure passage W5 formed therein and a sixth hydraulic passage W6 opened and closed by a sixth check valve 332 formed therein, and the second main body portion 30 therein; and the forward movement through the first valve rod 370 therein. The eleventh pneumatic passage H11 communicating with the pneumatic operating chamber 310b for use, the tenth pneumatic passage H10 interconnecting with the ninth pneumatic passage H9, and the third enabling the mutual communication with the third pneumatic operating chamber 310. The seventh pneumatic passage H7, a twelfth pneumatic passage H12 communicating with the first valve rod 370 in the internal space of the second master valve 350, and a second pneumatic passage allowing the inflow of compressed air into the internal space of the second master valve 350. A thirteenth pneumatic passage H13 is formed, a second valve spool 360 disposed in the internal space to control the flow of compressed air is provided, and a second valve spool 360 provided at an upper end of the third pneumatic working chamber 310 is provided. Sutabarubu 350; only including,
The lower cylinder 10 is communicably connected to the third hydraulic passage W3 and the fifth hydraulic passage W5 of the second main body 30 via the first hydraulic passage W1,
The upper cylinder 20 is connected to the fourth hydraulic passage W4 and the sixth hydraulic passage W6 of the second main body 30 through the second hydraulic passage W2 so as to be able to communicate with each other,
The second body 30 includes an eighth air pressure passage H8 for supplying compressed air to the second valve rod 380, and a fourteenth compressed air discharge passage H14 for discharging compressed air through the second valve rod 380. Prepare,
The piston rod P2-1 of the pressure-increasing piston P2 is configured to be movable to the first hydraulic operating chamber 120 and the second hydraulic operating chamber 220 through the hole 121 of the lower cylinder 10. Hydraulic cylinder with integrated booster pump.   The hydraulic cylinder according to claim 1, wherein the operating piston (P1) includes an operating rod (P1-1), a piston ring (P1-2), and a guide rod (P1-3).   The hydraulic cylinder according to claim 2, wherein the piston ring (P1-2) is disposed between the first air pressure passage (H1) and the second air pressure passage (H2).   The slide type piston P3 is slidably disposed along the length direction of the piston rod P2-1 of the pressure increasing piston P2, and the slide type piston P3 is resiliently supported by the pressure increasing piston P2 by a spring S. A hydraulic cylinder integrally provided with the booster pump according to claim 1.   The piston rod P4-1 of the pump piston P4 is movably extended into the third pneumatic operating chamber 310, the third hydraulic operating chamber 320, and the fourth hydraulic operating chamber 330. A hydraulic cylinder integrally provided with the booster pump according to claim 1. The first valve rod 370 includes a first pressure spring 371,
The hydraulic cylinder according to claim 1, wherein the second valve rod (380) includes a second pressure spring (381).   The hydraulic cylinder according to claim 1, wherein the upper cylinder (20) is arranged in a line above the lower cylinder (10) so as to be in fluid communication with the upper cylinder (10). The hydraulic cylinder according to claim 7 , wherein the booster piston (P2) of the upper cylinder (20) is arranged coaxially with the working piston (P1) of the lower cylinder (10).   The hydraulic cylinder according to claim 1, wherein the upper cylinder (20) is arranged in parallel with the lower cylinder (10).   The hydraulic cylinder according to claim 9, wherein the booster pump (P2) of the upper cylinder (20) is arranged on both axes with the operating piston (P1) of the lower cylinder (10).   The booster pump according to claim 1, wherein the fifth pneumatic passage (H5) includes the two check valves (261, 262) that can be individually opened and closed by a pneumatic forward or reverse flow. Hydraulic cylinder integrally provided.

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