JP6664751B2 - 基板アセンブリの製造方法、基板アセンブリ、及び基板アセンブリを電子部品に取り付ける方法 - Google Patents
基板アセンブリの製造方法、基板アセンブリ、及び基板アセンブリを電子部品に取り付ける方法 Download PDFInfo
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Description
第1の面及び第2の面を有した基板を準備する工程と、
基板の第1の面に接触材料層を塗布する工程と、
少なくとも、基板とは反対方向に面する接触材料層の面の一部分に、予備固定剤を塗布する工程と、を含む。
基板の第1の面が電子部品に面するように、基板アセンブリと少なくとも1つの電子部品とを互いに位置決めすることと、
接触材料層の面の少なくとも一部分に予備固定剤を塗布することによって、少なくとも1つの電子部品と基板アセンブリとをあらかじめ固定することと、
基板アセンブリを少なくとも1つの電子部品に取り付けることと、を含む。
11 基板
12 第1の面
13 第2の面
15 接触材料層
16 接触材料層の第1の面
18 予備固定剤
19 縁
20 担体
25 切欠き
30、30´ 電子部品
31 電子部品の第1の面
32 電子部品の第2の面
40 ノズル
bS 基板の全幅
bR 縁の幅
Claims (15)
- 電子部品(30、30´)に取り付ける基板アセンブリ(10、10´、10´´)を製造する方法であって、
第1の面(12)及び第2の面(13)を有する基板(11)を準備する工程と、
前記基板(11)の前記第1の面(12)に接触材料層(15)を塗布する工程と、
少なくとも、前記基板(11)とは反対方向に面する接触材料層(15)の面(16)の一部分に、予備固定剤(18)を塗布する工程と、
を含み、前記基板(11)の前記第1の面(12)が担体(20)に面するように、前記接触材料層(15)が塗布され、前記予備固定剤(18)が塗布された前記基板(11)を前記担体(20)上に配置し、前記予備固定剤(18)が、少なくとも前記担体(20)と接着結合されることを特徴とする、前記方法。 - 前記基板(11)が、金属板、又は金属バンド部分、又はリードフレーム、又はDCB基板若しくはPCB基板である
ことを特徴とする、請求項1に記載の方法。 - 準備される前記基板(11)、又は基板ブランクに、金(Au)若しくはニッケル‐金(NiAu)、又は銀(Ag)若しくはニッケル‐銀(NiAg)、又はニッケル‐パラジウム‐金(NiPdAu)を含む材料が、亜鉛めっきによって、少なくとも1つの面(12、13)に被覆される、又は、前記材料は、化学めっきによって前記基板又は基板ブランクの少なくとも1つの面に塗布されることを特徴とする、請求項1又は2に記載の方法。
- 前記基板(11)に塗布される前記接触材料層(15)の層厚さが、10〜150μmであることを特徴とする、請求項1から3の何れか一項に記載の方法。
- 前記接触材料層(15)が塗布された後、前記基板(11)は、側縁を有さないか、又は接触材料層(15)が塗布されていない側縁(19)を有し、前記側縁(19)の幅(bR)が、前記基板(11)の全幅(bS)の20%以下の幅である
ことを特徴とする、請求項1から4の何れか一項に記載の方法。 - 前記基板(11)の側縁(19)の少なくとも一部分が、前記担体(20)に取り付けられた状態において、切り離され、及び/又は、前記基板(11)が、前記担体(20)に取り付けられた状態において、構築され及び/又は分離される
ことを特徴とする、請求項1から5の何れか一項に記載の方法。 - 前記側縁(19)の切り離し、及び/又は前記基板(11)の構築、及び/又は前記基板(11)の分離が、レーザによって行われる
ことを特徴とする、請求項6に記載の方法。 - 前記側縁(19)が切り離されるとき、及び/又は前記基板(11)が構築されるとき、及び/又は前記基板(11)が分離されるとき、前記接触材料層(15)及び/又は前記予備固定剤(18)の少なくとも一部分が、取り外され、及び/又は構築され、及び/又は分離されることを特徴とする、請求項6又は7に記載の方法。
- 前記接触材料層(15)の接触材料が、焼結助剤と、金属粒子と、を含み、前記予備固定剤(18)が、同じ焼結助剤を含むことを特徴とする、請求項1から8の何れか一項に記載の方法。
- 電子部品(30、30´)に取り付ける基板アセンブリ(10、10´、10´´)であって、金属板、又は金属バンド部分、又はリードフレーム、又はDCB基板若しくはPCB基板である、第1の面(12)と第2の面(13)とを有する基板(11)を備え、前記基板(11)の前記第1の面(12)の少なくとも一部分に、接触材料層(15)が塗布され、前記基板(11)とは反対方向に面する接触材料層(15)の面(16)の少なくとも一部分に、予備固定剤(18)が塗布され、担体(20)が、少なくとも前記予備固定剤(18)と接着結合されることを特徴とする、基板アセンブリ(10、10´、10´´)。
- 前記接触材料層(15)の接触材料が、焼結助剤と、金属粒子を含み、前記予備固定剤(18)が、同じ焼結助剤を含むことを特徴とする、請求項10に記載の基板アセンブリ(10、10´、10´´)。
- 前記基板(11)に、金(Au)若しくはニッケル‐金(NiAu)、又は銀(Ag)若しくはニッケル‐銀(NiAg)、又はニッケル‐パラジウム‐金(NiPdAu)を含む材料が、亜鉛めっきによって、少なくとも1つの面(12、13)に被覆される、又は、前記材料は、化学めっきによって前記基板又は基板ブランクの少なくとも1つの面に塗布されることを特徴とする、請求項10又は11に記載の基板アセンブリ(10、10´、10´´)。
- 前記基板(11)の前記第1の面(12)が、接触材料層(15)により完全に覆われるか、又は、前記基板は、接触材料層(15)が塗布されていない側縁(19)を有し、前記側縁(19)の幅(bR)が、前記基板(11)の全幅(bS)の20%以下の幅であることを特徴とする、請求項10から12の何れか一項に記載の基板アセンブリ(10、10´、10´´)。
- 少なくとも1つの電子部品(30、30´)を、基板アセンブリ(10、10´、10´´)に取り付ける方法であって、
基板(11)の第1の面(12)が前記少なくとも1つの電子部品(30、30´)に面するように、前記基板アセンブリ(10、10´、10´´)と前記少なくとも1つの電子部品(30、30´)とを互いに位置決めすることと、
接触材料層(15)の面(16)の少なくとも一部分に予備固定剤(18)を塗布することによって、前記少なくとも1つの電子部品(30、30´)と前記基板アセンブリ(10、10´、10´´)とをあらかじめ固定することと、
前記基板アセンブリ(10、10´)を前記少なくとも1つの電子部品(30、30´)に取り付けることと、を含み、
前記基板(11)が、前記基板アセンブリ(10、10´、10´´)と前記電子部品(30、30´)とが互いに位置決めされる前に、塗布された接触材料層(15)及び塗布された予備固定剤(18)とともに、担体(20)から取り外されることを特徴とする、方法。 - 少なくとも1つの電子部品(30、30´)への取り付け時に、前記基板アセンブリ(10、10´、10´´)が、前記少なくとも1つの電子部品とともに、焼結され、及び/又は加圧され、及び/又ははんだ付けされ、及び/又は接着結合される
ことを特徴とする、請求項14に記載の方法。
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| EP15188966.4A EP3154079A1 (de) | 2015-10-08 | 2015-10-08 | Verfahren zum verbinden einer substratanordnung mit einem elektronikbauteil mit verwendung eines auf eine kontaktierungsmaterialschicht aufgebrachten vorfixiermittels, entsprechende substratanordnung und verfahren zu ihrem herstellen |
| PCT/EP2016/073102 WO2017060140A2 (de) | 2015-10-08 | 2016-09-28 | Verfahren zum herstellen einer substratanordnung, substratanordnung und verfahren zum verbinden einer substratanordnung mit einem elektronikbauteil |
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| EP3553812B1 (de) * | 2018-04-11 | 2025-12-31 | Heraeus Electronics GmbH & Co. KG | Substratanordnung zur verbindung mit einem elektronikbauteil |
| WO2019208072A1 (ja) * | 2018-04-27 | 2019-10-31 | 日東電工株式会社 | 半導体装置製造方法 |
| EP3611761A1 (de) * | 2018-08-13 | 2020-02-19 | Heraeus Deutschland GmbH & Co KG | Verfahren und metallsubstrat zum kontaktieren eines leistungshalbleiters durch ein kontaktierungsmittel mit zumindest einem kontaktierungsfreien bereich als belastungsreduzierende struktur |
| EP3627544A1 (de) * | 2018-09-20 | 2020-03-25 | Heraeus Deutschland GmbH & Co. KG | Substratanordnung zum verbinden mit zumindest einem elektronikbauteil und verfahren zum herstellen einer substratanordnung |
| DE102018221148A1 (de) | 2018-12-06 | 2020-06-10 | Heraeus Deutschland GmbH & Co. KG | Verfahren zum Herstellen eines Substratadapters und Substratadapter zum Verbinden mit einem Elektronikbauteil |
| US11497112B2 (en) | 2020-12-11 | 2022-11-08 | Toyota Motor Engineering & Manufacturing North America, Inc. | Driver board assemblies and methods of forming a driver board assembly |
| DE102021207267A1 (de) | 2021-07-09 | 2023-01-12 | Heraeus Deutschland GmbH & Co. KG | Als temporäres Fixiermittel verwendbare Zusammensetzung |
| JP7790187B2 (ja) * | 2022-02-15 | 2025-12-23 | 日本電気株式会社 | 半導体装置の製造装置、製造方法及び製造プログラム並びに半導体装置 |
| EP4443487A1 (de) | 2023-04-04 | 2024-10-09 | Heraeus Electronics GmbH & Co. KG | Substratanordnung mit oberflächenstruktur |
| EP4443488A1 (de) | 2023-04-04 | 2024-10-09 | Heraeus Electronics GmbH & Co. KG | Substratanordnung mit oberflächenstruktur |
| DE102023124260B3 (de) | 2023-09-08 | 2024-12-05 | Danfoss Silicon Power Gmbh | Baugruppe aufweisend eine Fixierschnittstelle zum Anhaften mindestens eines elektronischen Bauteils an eine Befestigungsseite eines Basiselements oder eine Sinterungsschicht vor einem Sintern und Verfahren zur Herstellung |
| EP4700826A1 (de) | 2024-08-23 | 2026-02-25 | Heraeus Electronics GmbH & Co. KG | Substratanordnung, verfahren zur herstellung einer elektronischen baugruppe und elektronische baugruppe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3928753B2 (ja) * | 1996-08-06 | 2007-06-13 | 日立化成工業株式会社 | マルチチップ実装法、および接着剤付チップの製造方法 |
| US20050127134A1 (en) * | 2003-09-15 | 2005-06-16 | Guo-Quan Lu | Nano-metal composite made by deposition from colloidal suspensions |
| JP2006202938A (ja) * | 2005-01-20 | 2006-08-03 | Kojiro Kobayashi | 半導体装置及びその製造方法 |
| DE102006033073B3 (de) * | 2006-07-14 | 2008-02-14 | Danfoss Silicon Power Gmbh | Verfahren zur Schaffung einer hitze- und stoßfesten Verbindung des Baugruppen-Halbleiters und zur Drucksinterung vorbereiteter Halbleiterbaustein |
| DE102008034946B4 (de) * | 2008-07-26 | 2016-05-19 | Semikron Elektronik Gmbh & Co. Kg | Herstellungsverfahren eines Edelmetallverbindungsmittels |
| JP5158904B2 (ja) * | 2010-03-19 | 2013-03-06 | 古河電気工業株式会社 | 導電接続部材、及び導電接続部材の作製方法 |
| DE102010021765B4 (de) | 2010-05-27 | 2014-06-12 | Semikron Elektronik Gmbh & Co. Kg | Herstellungsverfahren zur Anordnung zweier Verbindungspartner mittels einer Niedertemperatur Drucksinterverbindung |
| DE102010021764B4 (de) * | 2010-05-27 | 2014-09-25 | Semikron Elektronik Gmbh & Co. Kg | Verfahren zur Niedertemperatur Drucksinterverbindung zweier Verbindungspartner |
| DE102010030317B4 (de) * | 2010-06-21 | 2016-09-01 | Infineon Technologies Ag | Schaltungsanordnung mit Shuntwiderstand |
| DE102010044329A1 (de) | 2010-09-03 | 2012-03-08 | Heraeus Materials Technology Gmbh & Co. Kg | Kontaktierungsmittel und Verfahren zur Kontaktierung elektrischer Bauteile |
| CN103250235A (zh) * | 2010-12-01 | 2013-08-14 | 日立化成株式会社 | 带粘接剂层的半导体晶片、半导体装置的制造方法及半导体装置 |
| HUE028880T2 (en) | 2011-09-20 | 2017-01-30 | Heraeus Deutschland Gmbh & Co Kg | Paste and process for connecting electronic components with a carrier |
| JP5971909B2 (ja) * | 2011-09-21 | 2016-08-17 | 古河電気工業株式会社 | 導電性ペースト、及び該導電性ペーストを焼成して得られる接合体 |
| DE102012201935A1 (de) * | 2012-02-09 | 2013-08-14 | Robert Bosch Gmbh | Verbindungsanordnung eines elektrischen und/oder elektronischen Bauelements |
| DE102012202281A1 (de) * | 2012-02-15 | 2013-08-22 | Infineon Technologies Ag | Halbleiteranordnung für Druckkontaktierung |
| DE102012202727B4 (de) * | 2012-02-22 | 2015-07-02 | Vectron International Gmbh | Verfahren zur Verbindung eines ersten elektronischen Bauelements mit einem zweiten Bauelement |
| DE112012006750B4 (de) * | 2012-07-30 | 2026-01-08 | Erich Thallner | Substratverbund, Verfahren und Vorrichtung zum Bonden von Substraten |
| DE102012109156A1 (de) * | 2012-09-27 | 2014-03-27 | Osram Opto Semiconductors Gmbh | Bauteilanordnung und Verfahren zum Herstellen von elektrischen Bauteilen |
| WO2014061545A1 (ja) | 2012-10-15 | 2014-04-24 | 積水化学工業株式会社 | 有機無機ハイブリッド粒子、導電性粒子、導電材料及び接続構造体 |
| JP5664679B2 (ja) * | 2013-03-07 | 2015-02-04 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
| DE102014104272A1 (de) * | 2014-03-26 | 2015-10-01 | Heraeus Deutschland GmbH & Co. KG | Träger und Clip jeweils für ein Halbleiterelement, Verfahren zur Herstellung, Verwendung und Sinterpaste |
| DE102014109766B3 (de) * | 2014-07-11 | 2015-04-02 | Heraeus Deutschland GmbH & Co. KG | Verfahren zum Herstellen eines Substratadapters, Substratadapter und Verfahren zum Kontaktieren eines Halbleiterelements |
| DE202015001441U1 (de) * | 2015-02-24 | 2015-03-18 | Vincotech Gmbh | Leistungshalbleitermodul mit kombinierten Dickfilm- und Metallsinterschichten |
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| EP3940758A2 (de) | 2022-01-19 |
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| US10622331B2 (en) | 2020-04-14 |
| CN108604555B (zh) | 2022-03-08 |
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| JP2018530166A (ja) | 2018-10-11 |
| EP3940758A3 (de) | 2022-08-10 |
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| TW201909292A (zh) | 2019-03-01 |
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