JP6680647B2 - Coating die head and coating equipment - Google Patents

Description

  The present disclosure relates to a coating die head and a coating device.

  Conventionally, a member entirely made of metal such as stainless steel is generally used as a coating die head. For example, Patent Document 1 proposes a coating die head (coating nozzle) in which a base material is made of stainless metal and a cemented carbide coating layer is provided at a nozzle tip portion facing a workpiece.

International Publication No. 2007/049349

  In such a conventional coating die head, since the base material is made of metal such as stainless steel and has a large specific gravity, the coating die head becomes heavy, and there is a problem that it is not easy to attach and detach. It was In addition, since the coating layer of cemented carbide is formed by thermal spraying, it is not possible to sufficiently reduce the voids such as microcracks and pores in the coating layer, and particles that have fallen out of the voids during the coating operation (below , Also referred to as shredding.) Was mixed in the coating liquid. When a coating liquid containing a large amount of shredded particles is used, the coating film becomes a film with many impurities and low quality.

  In view of the above problems, it is an object of the present disclosure to provide a coating die head and a coating device that are lighter in weight than metal and contain less impurities in the coating liquid.

  The coating die head of the present disclosure is a columnar body extending from a first end to a second end, and a main body made of a first ceramic sintered body having a third end protruding in a direction intersecting the axis of the columnar body. And a slit portion extending from the inside toward the third end while extending from the first end side to the second end side inside the main body. The slit portion has a tip member made of a second ceramic sintered body having a fracture toughness higher than that of the first ceramic sintered body, at least in a portion facing the third end.

  Further, the coating apparatus of the present disclosure includes the coating die head having the above configuration and a coating liquid supply mechanism.

  The coating die head of the present disclosure is relatively light and has a small amount of impurities mixed into the coating liquid.

An example of the embodiment of the coating die head of the present disclosure is shown, (a) is a perspective view, (b) is a perspective view including a cross section taken along line AA ′ in (a), and (c) is a perspective view. It is an enlarged view of the B section in (b), and (d) is an enlarged view of the C section in (b). FIG. 7A is a perspective view showing another example of the embodiment of the coating die head of the present disclosure, FIG. 9B is a perspective view including a cross section taken along line DD ′ in FIG. 8A is an enlarged view of an E portion in FIG. 7B, and FIG. 8D is an enlarged view of an F portion in FIG. FIG. 16A is a perspective view, FIG. 16B is a perspective view including a cross section taken along line GG ′ in FIG. 16A, and FIG. 14C is a perspective view showing another example of the embodiment of the coating die head. It is an enlarged view of the H section in (b), (d) is an enlarged view of the J section in (b).

  Hereinafter, a plurality of examples of the embodiment of the present disclosure will be described in detail with reference to FIGS. 1 to 3. However, in all the drawings of the present specification, the same reference numerals will be given to the same parts and description thereof will be appropriately omitted unless confusion occurs.

  The coating die head shown in FIGS. 1 to 3 is a columnar body extending from the first end E1 to the second end E2, and intersects the axis of the columnar body (direction extending from the first end E1 to the second end E2). A body 1 made of a first ceramic sintered body having a third end E3 protruding in the direction is provided. Here, the protruding direction of the third end E3 can be rephrased as being toward the workpiece.

  The coating die head shown in FIGS. 1 to 3 is to be coated inside the main body 1 and extends from the first end E1 side to the second end E2 side and from the inside toward the third end E3. A slit portion s for discharging the coating liquid toward the object is provided. Further, the slit portion s is provided with a tip member 2 (2a, 2b) made of a second ceramic sintered body having a fracture toughness higher than that of the first ceramic sintered body at least at a portion facing the third end E3. ing.

  1 and 2, the main body 1 has a first main body portion 1a and a second main body portion 1b, and a facing surface 42 of the first main body portion 1a and the second main body portion 1b has a slit portion. It also serves as the inner surface 12 of s. Further, in the example shown in FIGS. 1 to 3, the coating die head includes side plates 5a and 5b on the first end E1 side and the second end E2 side, respectively, and these side plates 5a and 5b are, for example, bolts. It is attached to the main body 1 by (not shown).

Here, reference numeral 3 shown in FIGS. 1 (b), 2 (b) and 3 (b) is a reservoir for supplying the coating liquid supplied from the outside to the slit s. In the example shown in FIG. 1B and FIG. 2B, the storage part 3 is formed by combining the recess formed in the first main body part 1a and the second main body part 1b. The storage portion 3 may be formed by combining the recess formed in the second main body portion 1b and the first main body portion 1a, and is formed in each of the first main body portion 1a and the second main body portion 1b. The storage part 3 may be formed by a combination of recesses.

The length of the tip member 2 forming the slit portion s in the direction from the third end E3 (L ′) of the main body 1 to the storage portion 3 (L) is constant from the first end E1 to the second end E2. May be. When such a configuration is satisfied, the variation in the supply amount of the coating liquid is small, so that the variation in the coating film thickness can be suppressed.

  The interval of the slit portions s is, for example, 40 μm or more and 600 μm or less, and the length of the slit portions s (the length from the first end E1 to the second end E2) is, for example, 0.1 m or more and 3 m or less. The width of the part s (the length from the third end E3 (L ′) to the storage part 3 (L)) is, for example, 5 mm or more and 100 mm or less.

The fourth end E4 side opposite to the third end E3 is closed between the first main body portion 1a and the second main body portion 1b, and between the facing surfaces 42 of the first main body portion 1a and the second main body portion 1b. The member 6 is located so that the coating liquid does not flow out from the fourth end E4 side. The fourth end E4 can be called a rear end if the third end E3 for discharging the coating liquid is a front end. In the following, the third end E3 is a front end and the fourth end E4 is a rear end. May be listed. In the example shown in FIG. 1 (b) and FIG. 2 (b), in the first main body portion 1 a, the slit portion s 12 located on the front end side and the rear end side of the storage portion 3 and the facing surface 42 are Located on the same plane.

  Further, in the second main body portion 1b, the inner surface 12 of the slit portion s located on the front end side, the inner surface of the storage portion 3 located on the rear end side, and the counter surface 42 located on the rear end side are coplanar. That is, the closing member 6 also functions as a spacer for forming the slit portion s, and the thickness of the closing member 6 and the interval between the slit portions s are substantially the same. The closing member 6 in the present embodiment is connected from the storage portion 3 to the rear end and is in contact with the entire facing surfaces 42 of the first main body portion 1a and the second main body portion 1b. In addition, if the coating liquid does not flow out, the blocking member 6 does not necessarily have to be in contact with the entire facing surfaces 42 of the first main body portion 1a and the second main body portion 1b, and a space is formed between the facing surfaces 42. It may be arranged.

  The portion (front end surface 11) of the slit portion s of the coating die head that faces the third end E3 is a portion that is close to the object to be coated, and is a portion that is easily cracked or chipped by contact. In particular, the corner portion 30, which is a portion extending from the tip surface 11 to the inner surface 12 of the slit portion s, is likely to be cracked or chipped due to a collision with the workpiece. Further, when the slurry which is the coating liquid contains powder having a relatively high hardness, it can be said that the tip end surface 11 including the corner portion 30 is a portion that is easily worn. In the case of the present embodiment, since the tip end members 2a and 2b are made of the second ceramic sintered body having a higher fracture toughness than the first ceramic sintered body forming the main body 1, the coating die head is, for example, a coating target. Even when it comes into contact with an object, damage or the like due to this contact is suppressed. In order to reduce the abrasion powder generated by the coating liquid during the coating operation, it is preferable that the inner surface 12 of the slit portion s is formed by the surfaces of the tip members 2a and 2b.

The fracture toughness is indicated as a fracture toughness value K _IC measured by the IF method specified in JIS R 1607-2010. The fracture toughness value K _IC of the main body 1 made of the first ceramic sintered body is preferably in the range of 3 MPa · m ^0.5 or more and less than 4 MPa · m ^0.5 . The second ceramic fracture toughness value of the tip member 2 made of a sintered body _{K IC} is 4 MPa ^{· m 0.5} or more 8 MPa ^{· m 0.5} or less is preferably in the range of.

  The first main body portion 1a and the second main body portion 1b are made of a first ceramic sintered body made of an aluminum oxide sintered body or a silicon carbide sintered body, and the tip member 2 is made of a zirconium oxide sintered body. It is preferably made of a second ceramic sintered body made of either a silicon nitride sintered body or a sialon sintered body.

  These ceramic sintered bodies have a smaller specific gravity than, for example, stainless steel, and a coating die head using these ceramic sintered bodies is relatively light and easy for an operator to handle.

  The first ceramic sintered body made of an aluminum oxide sintered body or a silicon carbide sintered body is relatively inexpensive and lightweight, but has high mechanical strength. Therefore, the coating die head including the main body 1 made of the aluminum oxide sintered body or the silicon carbide sintered body has relatively high mechanical strength and relatively light weight, and can be manufactured at relatively low cost. .

  The second ceramic sintered body made of any one of the zirconium oxide sintered body, the silicon nitride sintered body and the sialon sintered body is relatively inexpensive and has many other abrasion resistance ceramic sintered bodies. High compared to. Therefore, when the coating liquid contains a powder of a metal having a relatively high hardness, it is possible to suppress abrasion due to contact with the coating liquid during the coating operation.

When the first body 1a and the second body 1b are made of an aluminum oxide sintered body, the tip member 2 is, for example, a zirconium oxide sintered body, a silicon nitride sintered body, or a sialon sintered body. , Silicon carbide sintered body, silicon carbonitride sintered body, titanium carbide sintered body, titanium nitride sintered body or titanium carbonitride sintered body, or aluminum oxide with titanium carbide, titanium nitride and oxide You may use the composite sintered body etc. which consist of at least any one of zirconium.

  When the first main body portion 1a and the second main body portion 1b are made of a silicon carbide based sintered material, the tip member 2 is, for example, a silicon nitride based sintered material, a sialon based sintered material, or a silicon carbonitride based material. Sintered body, titanium carbide sintered body, titanium nitride sintered body or titanium carbonitride sintered body, or composite sintered body composed of aluminum oxide and at least one of titanium carbide, titanium nitride and zirconium oxide May be used.

  Here, the composite sintered body is, for example, 60% by mass or more and 70% by mass or less of aluminum oxide, and at least one of titanium carbide, titanium nitride and zirconium oxide is 30% by mass or more and 40% by mass or less of ceramic fired. It is a union.

  In addition, in the first ceramic sintered body, for example, “to be an aluminum oxide sintered body” means that aluminum oxide occupies 80% by mass or more of 100% by mass of the components constituting the first ceramic sintered body. Say.

  In addition, in the second ceramic sintered body, for example, "a zirconium oxide sintered body" means that zirconium oxide occupies 80% by mass or more of 100% by mass of the components constituting the second ceramic sintered body. Say.

The content of each component constituting the first ceramic sintered body and the second ceramic sintered body was determined by using an X-ray diffractometer (XRD), and then the fluorescent X-ray analyzer (XRF) was used. The content of the element can be obtained using the above and converted into the identified component. For example, in XRD, when the aluminum oxide is identified, after obtaining the content of Al by XRF, in terms of _Al 2 _{O 3,} the content of _Al 2 _{O 3} obtained by this conversion is 80 wt% If it is above, the object is an aluminum oxide sintered body.

  Further, it is preferable that the tip member 2 is made of a zirconium oxide sintered body, and the ratio of tetragonal crystals in the crystal structure of zirconium oxide is 80% or more.

  When such a configuration is satisfied, stress-induced transformation is unlikely to occur even if stress is repeatedly applied to the tip member 2, so that mechanical strength is less likely to decrease.

  The ratio of the tetragonal crystals was measured by irradiating the zirconium oxide sintered body with CuKα rays using XRD and measuring the diffraction angle 2θ in the range of 20 to 80 °. From the obtained X-ray diffraction pattern, the Rietveld method It is calculated by using

  The tip member 2 is made of a zirconium oxide sintered body, contains yttrium oxide as a stabilizer, further contains silicon and titanium, and the content of silicon and titanium converted into oxides is 0.1% by mass, respectively. The following is preferable.

  When such a configuration is satisfied, even if the tip member 2 is repeatedly exposed to a coating liquid having a high temperature, the volume of the grain boundary phase containing the oxides of silicon and titanium occupies a small amount, so that oxidation occurs in this grain boundary phase. Yttrium is less likely to form a solid solution, improving durability at high temperatures.

  The second ceramic sintered body forming the tip member 2 is preferably a zirconium oxide sintered body and has an average crystal grain size of 1 μm or less (excluding 0 μm).

  When such a configuration is satisfied, the voids between the crystal particles are reduced, the variation in viscosity caused by the infiltration of the coating liquid into the voids can be suppressed, and stable coating can be performed.

  In order to obtain the average crystal grain size of the second ceramic sintered body, first, the fracture surface of the second ceramic sintered body is polished until it becomes a mirror surface, and thermal etching is performed. The surface obtained by thermal etching is used as a measurement surface, and an image is obtained by photographing with a scanning electron microscope at a magnification of 5000 to 10000 times. Centering on an arbitrary point in the image, for example, 6 straight lines each having a length of 8 μm are drawn at 30 ° intervals, and the number of crystals existing on these 6 straight lines is the total of these straight lines. It can be obtained by dividing by the length.

  Further, it is preferable that the tip member 2 has an exposed surface exposed to at least a part of the inner surface 12 of the slit portion s, and the arithmetic average roughness Ra of this exposed surface is 0.5 μm or less. Here, the exposed surface of the tip member 2 is a part of the inner surface 12 of the slit portion s. When the arithmetic mean roughness Ra of the exposed surface of the tip member 2 is 0.5 μm or less, the exposed surface has few irregularities and pores that are likely to be shed, so that shedding does not occur even when subjected to vibration or the like. It is less likely to occur, and it is possible to more reliably suppress the mixing of impurities into the coating liquid and thus the defects in the coating work. In the inner surface 12 of the slit portion s, it is preferable that the area ratio of the exposed surface of the tip member 2 is high.

  In particular, the arithmetic mean roughness Ra on the exposed surface of the tip member 2 is preferably 0.4 μm or less. The arithmetic mean roughness Ra is a stylus type surface roughness meter according to JIS B 0601-2013 (ISO 4287: 1997, Amd.1: 2009), and the measurement length is 5 mm and the cutoff value is It is an average value of values measured at 5 points with 0.8 mm, the tip radius of the stylus of 2 μm, and the scanning speed of the stylus of 0.5 mm / sec.

  Further, it is preferable that a bonding layer (not shown) containing a resin as a main component is located between the main body 1 and the tip member 2. That is, it is preferable that the tip end members 2a and 2b are joined to the first main body portion 1a and the second main body portion 1b via a joining layer containing a resin as a main component. When such a configuration is satisfied, a bonding layer agent containing a resin as a main component is filled between the first main body portion 1a, the second main body portion 1b and the tip end members 2a, 2b and bonded, so that the first main body portion is bonded. It is possible to suppress the formation of voids (gap) between the portion 1a and the second main body portion 1b and the tip end members 2a and 2b. This suppresses the ingress of the coating liquid that occurs when there is a gap (gap) between the first main body portion 1a, the second main body portion 1b and the tip end members 2a, 2b, and thus coating such as variation in thickness. It is possible to suppress defects in the film. As the adhesive containing resin as a main component, for example, an epoxy-based organic adhesive can be used.

  Here, the main component in the bonding layer means a component occupying 80% by mass or more of the components constituting the bonding layer, and can be identified and quantified by gas chromatography-mass spectrometry.

  Further, the tip members 2a and 2b may be fastened to the main body 1 by fastening members. Examples of the fastening with the fastening member include fastening with bolts. When fastened with bolts or the like, the long-term reliability of the fastening state between the tip end members 2a, 2b and the first main body portion 1a and the second main body portion 1b can be further improved, and the coating can be continuously performed over a relatively large number of times. You can repeat the process. In particular, it is preferable that the joining using the joining layer using the adhesive and the fastening using the fastening member are used together.

As described above, in the embodiment shown in FIGS. 1 and 2, the main body 1 includes the pair of first main body portion 1a and second main body portion 1b. According to such a configuration, the coating work can be performed. After repeating, the first main body portion 1a and the second main body portion 1b can be periodically disassembled, and the opposing surfaces can be polished to improve the flatness. Reliability can be further improved.

  Further, in this case, as shown in FIG. 2, inside the main body 1, from the third end E3 to the fourth end E4 which is the end along the facing surface of the first main body portion 1a and the second main body portion 1b. It is preferable that the rear end member 4 (4a, 4b) is further provided at the portion to be processed. The rear end members 4a and 4b form at least a part of the rear end (fourth end E4) surface 41 and at least a part of the facing surface 42. Then, it is preferable that the main component of the rear end members 4a, 4b is made of the same ceramic sintered body as the ceramic sintered body of the front end members 2a, 2b.

  With such a configuration, for example, when the inner surface 12 of the slit portion s of the main body 1 is polished by the above-described maintenance or the like, the wear resistance of the front end members 2a and 2b and the rear end members 4a and 4b located on the same plane are maintained. Since the abrasion resistance is the same level, it is easy to suppress uneven wear and the like in this polishing. That is, in the polishing at the time of maintenance, the inner surface 12 having less waviness and good flatness can be obtained without setting special polishing conditions, so that the coating liquid can be applied in a state in which the variation in the supply amount is suppressed. Can be supplied to the work piece.

  For the same reason, the slit portion is also formed on the rear end (fourth end E4) side of the slit portion s of the one main body portion 1 (the first main body portion 1a or the second main body portion 1b) having the concave portion which becomes the storage portion 3. It is preferable that an intermediate member made of a ceramic sintered body that constitutes a part of the inner surface 12 of s is attached.

In addition, when the main body 1 is formed of one ceramic sintered body as in the embodiment shown in FIG. 3, when the main surface 1 is used for an application requiring less maintenance such as polishing of the inner surface 12 of the slit portion s. It may be.

  Such coating die heads include various coatings typified by, for example, a heat-sensitive film, a conductive film, a low-reflection conductive film, an anti-ultraviolet film, an anti-electromagnetic wave film, a protective film or a magnetic film on the surface of an article to be coated. It can be used for a coating device or the like for forming a. In the coating apparatus using the coating die head of each of the above-mentioned embodiments, maintenance of the coating die head is relatively easy, and damage such as cracks and chips of the coating die head does not easily occur, There are few impurities.

  Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. It goes without saying that the present invention may be modified and changed in various ways without departing from the scope of the present invention.

1 Main Body 1a First Main Body 1b Second Main Body E1 First End E2 Second End E3 Third End E4 Fourth End 2 (2a, 2b) Tip Member 3 Reservoir (Recess)
4 (4a, 4b) Rear end members 5a, 5b Side plate 6 Closing member 12 Inner surface 30 of slit portion 42 Corner portion 42 Opposing surface s Slit portion

Claims (13)

A main body made of a first ceramic sintered body, which is a columnar body extending from the first end to the second end, and having a third end protruding in a direction intersecting the axis of the columnar body,
The inside of the main body is provided with a slit portion extending from the inside toward the third end while extending from the first end side to the second end side.
The coating die head having a tip member made of a second ceramic sintered body having a fracture toughness higher than that of the first ceramic sintered body, at least in a portion facing the third end of the slit portion. The first ceramic sintered body is made of an aluminum oxide sintered body or a silicon carbide sintered body,
The coating die head according to claim 1, wherein the second ceramic sintered body is made of a zirconium oxide sintered body, a silicon nitride sintered body, or a sialon sintered body.   The second ceramic sintered body is made of the zirconium oxide sintered body, and a ratio of tetragonal crystals is 80% or more in the zirconium oxide crystals contained in the zirconium oxide sintered body. Alternatively, the coating die head according to claim 2.   The second ceramic sintered body is composed of the zirconium oxide sintered body, contains yttrium oxide as a stabilizer, further contains silicon and titanium, the content of the silicon and titanium converted into oxides. The coating die head according to any one of claims 1 to 3, wherein the content of each is 0.1% by mass or less.   The coating according to claim 1, wherein the second ceramic sintered body is composed of the zirconium oxide sintered body and has an average crystal grain size of 1 μm or less (excluding 0 μm). Industrial die head.   The said tip member has an exposed surface exposed to at least one part of the inner surface of the said slit part, and the arithmetic mean roughness (Ra) in this exposed surface is 0.5 micrometer or less, Either of Claim 1 thru | or 5. A coating die head as described in Crab.   The coating die head according to claim 1, wherein a bonding layer containing a resin material as a main component is located between the main body and the tip member.   The coating die head according to claim 1, wherein the tip member is fastened to the main body by a fastening member. The main body has a first main body portion and a second main body portion,
The coating die head according to any one of claims 1 to 8, wherein a facing surface between the first main body portion and the second main body portion also serves as an inner surface of the slit portion. Inside the main body, a rear end member is provided from the third end to a portion facing a fourth end that is a terminating end along the facing surfaces of the first main body portion and the second main body portion,
The coating die head according to claim 9, wherein the rear end member is made of the second ceramic sintered body.   The coating die head according to any one of claims 1 to 10, wherein the main body includes a storage portion that is connected to the slit portion.   The coating die head according to any one of claims 1 to 11, wherein a length of the tip member in the direction from the third end to the storage portion is constant from the first end to the second end. . A coating die head according to any one of claims 1 to 12,
A coating device comprising a coating liquid supply mechanism.

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