JP6701660B2 - Film thickness inspection device and film thickness inspection method - Google Patents

Description

  The present invention relates to a film thickness inspection device and a film thickness inspection method.

  As a conductive separator for a polymer electrolyte fuel cell, a metal base material coated with a diamond-like carbon (hereinafter referred to as "DLC") thin film is known. The DLC thin film is formed thinly on the surface of a base material made of stainless steel, for example, by using a film forming technique such as sputtering.

  In connection with this, in Patent Document 1 below, the correlation between the thickness of the carbon thin film and the lightness of the carbon thin film (L* value of the L*a*b* color system) is obtained in advance and spectroscopic measurement is performed. A technique for evaluating the film thickness of a carbon thin film by measuring the lightness of the carbon thin film with a colorimeter is disclosed. According to this technique, the film thickness can be evaluated only by measuring the color of the carbon thin film with a spectrocolorimeter, so that the quality control of the carbon thin film such as the DLC thin film can be performed in a short time and at low cost.

JP2012-132876A

  By the way, from the viewpoint of productivity, the inspection step for evaluating the film thickness of the DLC thin film is performed without forming the DLC thin film on the substrate in the vacuum chamber of the sputtering apparatus and then taking out the substrate from the vacuum chamber. Is preferred.

  However, in the vacuum chamber, the metal base material is hooked and held in an unstable state as a measure against thermal expansion during film formation. Further, the metal base material may have a shape error, and the metal base material is deformed by heat or the like in the vacuum chamber. Therefore, the surface of the DLC thin film formed on the base material in the vacuum chamber has a different inclination depending on the area within the surface, and when a predetermined inspection area of the DLC thin film is measured by a spectrocolorimeter, the inclination There is a problem that the colorimetric value changes greatly depending on

  The present invention has been made to solve the above problems. Therefore, an object of the present invention is to provide a film thickness inspecting apparatus and a film thickness inspecting method capable of stably measuring the color of a thin film such as a DLC thin film and stably evaluating the film thickness of the thin film. ..

  The above object of the present invention can be achieved by the following means.

The film thickness inspection device of the present invention has a colorimetric unit, an inclination measuring unit, an adjusting unit, and an evaluating unit. The color measurement unit measures a predetermined area of the carbon thin film formed on the base material. The inclination measuring unit measures the inclination of the predetermined area. The adjustment unit is configured to have the color measurement unit and the base material according to the inclination of the predetermined region measured by the inclination measurement unit so that the color measurement unit has a predetermined inclination angle with respect to the predetermined region. Adjust the relative inclination of and. The evaluation unit obtains a color value of the predetermined region by the color measurement unit whose relative inclination is adjusted by the adjustment unit, and is obtained by a* value and b* value in the L*a*b* color system. The film thickness of the predetermined region of the carbon thin film is evaluated based on the product of
Further, another film thickness inspection apparatus of the present invention is to measure a plurality of colorimetric units that measure a predetermined region of a thin film formed on a base material, and an inclination of each of the predetermined regions of the plurality of colorimetric units. According to the inclination of the predetermined region measured by the inclination measuring unit, the plurality of inclination measuring units to be measured and the plurality of color measurement units each have a predetermined inclination angle with respect to the predetermined region. Each of the colorimetric measuring units and the base member, and the plurality of color measuring units whose relative tilts are adjusted by the adjusting unit. The evaluation unit for evaluating the film thickness of the predetermined region of the carbon thin film based on the product of the a* value and the b* value in the L*a*b* color system, and the predetermined value of the thin film. A plurality of illumination units that irradiate the area with light, and an illumination unit drive unit that changes the respective inclinations of the plurality of illumination units, and the adjustment unit adjusts the respective inclinations of the plurality of color measurement units. According to the inclination of the predetermined region measured by the inclination measuring unit, the colorimetric unit driving unit to be changed and each of the plurality of colorimetric units have a predetermined inclination angle with respect to the predetermined region. A drive control unit that controls the colorimetric unit drive unit to adjust the inclination of each of the plurality of colorimetric units, the drive control unit being illuminated by each of the plurality of illumination units. The illumination unit driving unit is controlled according to the inclination of the predetermined region measured by the inclination measuring unit so that each of the plurality of colorimetric units is located on the optical path of the light regularly reflected by the region. Then, the inclination of each of the plurality of illumination units is adjusted.

According to the film thickness inspection method of the present invention, a color measuring unit for measuring the inclination of a predetermined area of a carbon thin film formed on a base material and measuring the predetermined area has a predetermined inclination angle with respect to the predetermined area. As described above, the relative inclination between the color measurement unit and the base material is adjusted according to the measured inclination of the predetermined region. Then, the film thickness inspection method of the present invention is obtained by measuring the color of the predetermined region by the colorimetric unit whose relative inclination is adjusted, and measuring the color of the predetermined region by the colorimetric unit. The film thickness of the predetermined region of the carbon thin film is evaluated based on the product of the a* value and the b* value in the *a*b* color system.
According to another film thickness inspection method of the present invention, a step (a) of measuring an inclination of a predetermined region of a thin film formed on a base material, and a plurality of color measurement units for measuring the color of the predetermined region each have the predetermined According to the inclination of the predetermined area measured in the step (a), the relative inclination between each of the plurality of colorimetric units and the base material is set so as to have a predetermined inclination angle with respect to the area. In the step (b) of adjusting, the step (c) of measuring the color of the predetermined region by each of the plurality of colorimetric units whose relative inclinations are adjusted in the step (b), and the step (c). The predetermined area of the carbon thin film is based on the product of a* value and b* value in the L*a*b* color system, which is obtained by measuring the predetermined area by each of the plurality of color measurement units. And a step (d) of evaluating the film thickness of the step (b). The inclination of each of the plurality of colorimetric units is adjusted according to the inclination of the predetermined region measured in a), and the predetermined region of the thin film is irradiated with light by a plurality of illumination units, According to the inclination of the predetermined region measured in the step (a) so that each of the plurality of colorimetric units is located on the optical path of the light that is illuminated by the illumination unit of and is specularly reflected in the predetermined region. Then, the inclination of each of the plurality of illumination units is adjusted.

  According to the present invention, since the relative position between the colorimetric part and the predetermined region of the thin film is maintained constant, it is possible to stably measure the color of the predetermined region of the thin film. That is, the film thickness of a thin film such as a DLC thin film can be stably evaluated.

It is a block diagram which shows schematic structure of the manufacturing apparatus of the film structure to which the film thickness inspection apparatus which concerns on the 1st Embodiment of this invention is applied. It is a plane sectional view of a vacuum chamber in the manufacturing apparatus of a film structure. It is a perspective view which shows schematic structure of an illumination drive device and a luminance meter drive device. It is a flowchart which shows the manufacturing process of a film structure. It is a figure which shows an example of the measurement result of the surface shape of a DLC thin film. It is a figure for demonstrating the process which calculates the inclination of the X direction of an inspection area|region. It is a figure for demonstrating the process which calculates the inclination of the Y direction of an inspection area|region. It is a figure for demonstrating the inclination of the some inspection area|region of a DLC thin film. It is a flowchart which shows the procedure of an evaluation process. It is a figure which shows the film thickness of a DLC thin film, and the relationship of a* value and b* value. It is a figure which shows the relationship between the film thickness of a DLC thin film, and L* value and b* value. It is a figure which shows the relationship between the holding state of a base material and the colorimetric result of a DLC thin film. It is a figure which shows the manufacturing apparatus of the film structure which concerns on the 2nd Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the same code|symbol was used for the same member in the figure. Further, the dimensional ratios in the drawings may be exaggerated for convenience of explanation, and may differ from the actual ratios.

(First embodiment)
FIG. 1 is a block diagram showing a schematic configuration of a film structure manufacturing apparatus 10 to which a film thickness inspection apparatus according to a first embodiment of the present invention is applied, and FIG. 2 is a vacuum chamber 130 in the manufacturing apparatus 10. FIG. FIG. 3 is a perspective view showing a schematic configuration of the illumination drive device 230 and the luminance meter drive device 250.

  As shown in FIGS. 1 and 2, the film structure manufacturing apparatus 10 according to the present embodiment includes a film formation processing unit 100 and an inspection processing unit 200. Hereinafter, the film formation processing unit 100 and the inspection processing unit 200 will be described in order.

<Film forming processing section>
As shown in FIG. 1, the film formation processing unit 100 includes a PVD device 110 and a PVD control device 120. As shown in FIG. 2, the PVD device 110 is provided in the vacuum chamber 130.

  The PVD device 110 forms a DLC thin film on the substrate 310. The PVD device 110 deposits DLC on the surface of the base material 310 to form a DLC thin film. As shown in FIG. 2, in the manufacturing apparatus 10 of the present embodiment, two PVD apparatuses 110 are provided on both sides of the vacuum chamber 130 so as to face each other, and the substrate 310 conveyed in the vacuum chamber 130 is provided. DLC thin films are formed on both sides.

  The PVD control device 120 controls the PVD device 110. The PVD control device 120 controls the PVD device 110 to change the film forming conditions (film forming time, applied voltage, amount of argon gas, etc.) of the DLC thin film.

  The vacuum chamber 130 provides a processing space for the substrate 310. The vacuum chamber 130 includes a carry-in area 131, a film formation area 132, a pre-inspection area 133, an inspection area 134, and a carry-out area 135. The substrate 310 carried into the carry-in area 131 is carried to the film forming area 132 by a carrying device (not shown), and the PVD device 110 forms a DLC thin film. The film structure 300 obtained by forming the DLC thin film on the base material 310 is transported to the pre-inspection area 133, and the inclination of the inspection area is measured. The film structure 300 in which the inclination of the inspection area is measured is conveyed to the inspection area 134, and the inspection area is subjected to color measurement. The film structure 300 whose color has been measured in the inspection region is transported to and stored in the carry-out area 135.

<Inspection processing unit>
As illustrated in FIG. 1, the inspection processing unit 200 includes a 3D scanner 210, a lighting device 220, a lighting driving device 230, a color luminance meter 240, a luminance meter driving device 250, a drive control device 260, and a computing device 270. As shown in FIG. 2, the 3D scanner 210, the lighting device 220, the lighting driving device 230, the color luminance meter 240, and the luminance meter driving device 250 are provided in the vacuum chamber 130.

  The 3D scanner 210 measures the inclination of a predetermined area of the DLC thin film. The 3D scanner 210, as an inclination measuring unit, measures the inclination of a predetermined inspection region of the DLC thin film formed on the base material 310. As shown in FIG. 2, in the manufacturing apparatus 10 of the present embodiment, two 3D scanners 210 are provided on both sides of the vacuum chamber 130 so as to face each other, and a window portion 136 provided in the vacuum chamber 130 is interposed therebetween. Then, both sides of the film structure 300 are measured. The 3D scanner 210 is a shape measuring device that projects moire fringes to measure the surface shape of an object.

  The illuminator 220 irradiates a predetermined area of the DLC thin film with light. The illumination device 220 illuminates the inspection area of the DLC thin film formed on the substrate 310 with light at a predetermined illumination angle as an illumination unit. As shown in FIG. 2, in the manufacturing apparatus 10 of the present embodiment, two lighting devices 220 are provided on both sides of the vacuum chamber 130 so as to face each other, and a window portion 137 provided in the vacuum chamber 130 is interposed therebetween. Then, the both surfaces of the film structure 300 are irradiated with light. The lighting device 220 is, for example, a halogen lamp.

  The illumination drive device 230 changes the inclination of the illumination device 220. The illumination drive device 230 changes the position and orientation of the illumination device 220 as an illumination unit drive unit. As shown in FIG. 3, the illumination drive device 230 includes linear drive units 231 and 232 including a motor and a linear guide, and rotation drive units 233 and 234 including a motor, and the position of the illumination device 220 in the XY directions and the XY direction. Change the posture around the axis.

  The color luminance meter 240 measures the color of a predetermined area of the DLC thin film. The color luminance meter 240, as a colorimetric unit, measures the inspection area of the DLC thin film illuminated by the illumination device 220 to obtain the L*a*b* value of the DLC thin film. The color luminance meter 240 is, for example, a spectrocolorimeter, and is arranged on the optical path of the light emitted by the illumination device 220 and specularly reflected in the inspection region. As shown in FIG. 2, in the manufacturing apparatus 10 of the present embodiment, two color luminance meters 240 are provided on both sides of the vacuum chamber 130 so as to face each other, and the window portion 138 provided in the vacuum chamber 130 is provided. The both sides of the film structure 300 are subjected to color measurement through.

  The luminance meter driving device 250 changes the inclination of the color luminance meter 240. The luminance meter driving device 250 changes the position and orientation of the color luminance meter 240 as a colorimetric section driving section. As shown in FIG. 3, the luminance meter driving device 250 includes linear driving units 251 and 252 including a motor and a linear guide and rotation driving units 253 and 254 including a motor, and the position of the color luminance meter 240 in the XY directions. And the attitude around the XY axes is changed.

  The drive control device 260 controls the illumination drive device 230 and the luminance meter drive device 250. As a drive control unit, the drive control device 260 controls the illumination drive device 230 and the luminance meter drive device 250, respectively, and adjusts the positions and orientations of the illumination device 220 and the color luminance meter 240. The drive control device 260 includes a PLC and performs sequence control.

  The arithmetic unit 270 evaluates the film thickness of the DLC thin film. The arithmetic unit 270 functions as an evaluation unit based on the a* value and the b* value of the L*a*b* values obtained by measuring the inspection area of the DLC thin film with the color luminance meter 240. Evaluate the film thickness. The arithmetic device 270 is electrically connected to the PVD control device 120, and feeds back the evaluation result of the film thickness of the DLC thin film to the PVD control device 120. The arithmetic unit 270 is, for example, a computer.

  The film structure manufacturing apparatus 10 configured as described above forms the DLC thin film on the base material 310, evaluates the film thickness of the formed DLC thin film, and manufactures the film structure 300. Hereinafter, the operation of the film structure manufacturing apparatus 10 will be described with reference to FIGS. 4 to 12.

  FIG. 4 is a flowchart showing a manufacturing process of the film structure 300 by the manufacturing apparatus 10. The manufacturing apparatus 10 of the present embodiment sequentially performs a film forming process for forming a DLC thin film and an inspection process for evaluating the film thickness of the DLC thin film on the plurality of base materials 310 carried into the vacuum chamber 130. Thus, the plurality of film structures 300 are continuously manufactured.

  First, the manufacturing apparatus 10 forms a DLC thin film on the base material 310 (step S101). More specifically, the PVD apparatus 110 of the manufacturing apparatus 10 deposits DLC on the base material 310 according to predetermined film forming conditions to form a DLC thin film with a film thickness of about 20 nm. The base material 310 is formed by forming a Cr thin film on a metal base material made of stainless steel, and the DLC thin film is formed on the Cr thin film.

  Next, the manufacturing apparatus 10 measures the surface shape of the DLC thin film (step S102). More specifically, the 3D scanner 210 of the manufacturing apparatus 10 measures the surface shape of the DLC thin film formed on the base material 310 by the process shown in step S101. As a result, as shown in FIG. 5, the surface shape data in which the height Z of the DLC thin film at the XY coordinate position is calculated is acquired.

  Next, the manufacturing apparatus 10 calculates the inclination of the inspection area (step S103). More specifically, the drive control device 260 of the manufacturing apparatus 10 sets a plurality of preset inspection areas SA (see FIG. 8B) based on the surface shape of the DLC thin film measured in the process shown in step S102. ), the inclination of the plane of the inspection area SA is calculated. In the present embodiment, as shown in FIG. 6, the drive control device 260, for example, with respect to one inspection region SA (see FIG. 5) in the central portion of the film structure 300, uses X from the surface shape data in the X direction of the DLC thin film. Calculate the average slope of the direction. Similarly, as shown in FIG. 7, the drive control device 260 calculates an average inclination in the Y direction from the surface shape data in the Y direction of the DLC thin film for one inspection area SA in the central portion of the film structure 300. .

  Next, the manufacturing apparatus 10 determines whether or not the calculation of the inclinations of all the inspection areas is completed (step S104). More specifically, the drive control device 260 of the manufacturing apparatus 10 determines whether or not the calculation of the inclination has been completed for all of the plurality of preset inspection areas SA.

  When it is determined that the calculation of the inclinations of all the inspection areas is completed (step S104: YES), the manufacturing apparatus 10 proceeds to the process of step S105. On the other hand, when determining that the calculation of the inclinations of all the inspection areas is not completed (step S104: NO), the manufacturing apparatus 10 returns to the process of step S103. As a result, the processes of steps S103 to S104 are repeated until the calculation of the inclinations of all the inspection areas SA is completed.

  As described above, according to the processing shown in steps S101 to S104 of FIG. 4, first, the DLC thin film is formed on the base material. Then, the surface shape of the DLC thin film is measured, and the inclinations of the plurality of inspection areas SA of the DLC thin film are calculated. As a result, as shown in FIG. 8, for example, the normal vector VR is calculated for each of the three inspection areas SA.

  Next, the manufacturing apparatus 10 corrects the direction of the color luminance meter 240 (step S105). More specifically, the drive control device 260 of the manufacturing apparatus 10 controls the luminance meter drive unit 250 for one inspection area SA according to the inclination of the area SA calculated in the process shown in step S103, The position and orientation of the color luminance meter 240 are adjusted. As a result, the color luminance meter 240 comes to have a predetermined color measurement angle with respect to one inspection area SA.

  Next, the manufacturing apparatus 10 corrects the orientation of the lighting device 220 (step S106). More specifically, the drive control device 260 of the manufacturing apparatus 10 controls the illumination drive unit 230 for one inspection area SA according to the tilt angle of the area SA calculated in the process shown in step S103, The position and orientation of the lighting device 220 are adjusted. As a result, the illumination device 220 has a predetermined irradiation angle with respect to one inspection area SA.

  Next, the manufacturing apparatus 10 measures the color of the inspection area of the DLC thin film (step S107). More specifically, the color/luminance meter 240 whose position and orientation have been adjusted by the processing shown in step S105 color-measures one inspection area SA of the DLC thin film, and the L*a*b* value of the area SA is measured. To get. In the present embodiment, the color luminance meter 240 on the optical path of the light specularly reflected by the inspection area SA measures the inspection area SA while the illumination device 220 irradiates the inspection area SA of the film structure 300 with light. To color.

  Next, the manufacturing apparatus 10 determines whether or not the color measurement of all the inspection areas has been completed (step S108). More specifically, the drive control device 260 of the manufacturing apparatus 10 determines whether or not the color measurement has been completed for all of the plurality of preset inspection areas SA.

  When determining that the color measurement of all the inspection areas is completed (step S108: YES), the manufacturing apparatus 10 proceeds to the processing of step S109. On the other hand, when determining that the color measurement of all the inspection areas is not completed (step S108: NO), the manufacturing apparatus 10 returns to the process of step S105. As a result, the processes of steps S105 to S108 are repeated until the color measurement of all the inspection areas is completed. For example, after the inclinations of the illumination device 220 and the color luminance meter 240 are adjusted according to the inclination of the next inspection area SA, the positions in the XY directions are changed, and the color of the next inspection area SA is measured.

  As described above, according to the processing shown in steps S105 to S108 of FIG. 4, for each inspection area SA of the DLC thin film, the inclination of the illumination device 220 and the color luminance meter 240 is corrected according to the inclination of the area SA, and the inspection is performed. The area SA is measured in color. With such a configuration, the relative positional relationship between the illumination device 220 and the color/luminance meter 240 and the inspection area SA is always kept constant, so that the color measurement result is stable.

  Next, the manufacturing apparatus 10 executes an evaluation process (step S109). More specifically, the arithmetic unit 270 of the manufacturing apparatus 10 measures the a* value and the b value of the L*a*b* value of each inspection region obtained by measuring the color of the DLC thin film in the process shown in step S107. * The film thickness of the DLC thin film is evaluated based on the value. A detailed description of the evaluation process will be given later.

  Next, the manufacturing apparatus 10 determines whether manufacturing of all the film structures 300 is completed (step S110). More specifically, whether the arithmetic unit 270 of the manufacturing apparatus 10 has completed the film formation process and the inspection process (evaluation process) for all the substrates 310 carried into the carry-in area 131 of the vacuum chamber 130. To judge.

  When it is determined that the manufacture of all the film structures 300 is not completed (step S110: NO), the manufacturing apparatus 10 returns to the process of step S101. As a result, the processes of steps S101 to S110 are repeated until the manufacturing of all the film structures 300 is completed.

  On the other hand, when it is determined that the manufacturing of all the film structures 300 is completed (step S110: YES), the manufacturing apparatus 10 ends the process. Then, the film structure 300 accumulated in the carry-out area 135 of the vacuum chamber 130 is carried out of the vacuum chamber 130.

  As described above, according to the process of the flowchart shown in FIG. 4, after the DLC thin film is formed on the base material 310, the inclination of the inspection region of the DLC thin film is measured. The color of the inspection area is measured while correcting the inclinations of the illumination device 220 and the color luminance meter 240 according to the inclination of the inspection area. Then, the DLC thin film is evaluated based on the a* value and the b* value of the DLC thin film obtained by measuring the color of the inspection region.

  FIG. 9 is a flowchart showing the procedure of the evaluation process shown in step S109 of FIG.

  First, the arithmetic device 270 calculates the product of the a* value and the b* value (step S201). More specifically, the arithmetic device 270 calculates, for each of the plurality of inspection areas of the DLC thin film, among the L*a*b* values obtained by measuring the inspection area by the process shown in step S107 of FIG. , A* value and b* value are calculated.

  Next, the arithmetic device 270 determines whether or not the product of the a* value and the b* value has changed (step S202). More specifically, the arithmetic device 270 determines whether or not the product of the a* value and the b* value calculated in the process shown in step S201 deviates from a predetermined reference value by a predetermined amount or more. Here, the predetermined reference value is a product of the a* value and the b* value of the DLC thin film having a film thickness of a target value (for example, 20 nm), and is determined according to the contamination status of the windows 137 and 138. Is corrected accordingly. The predetermined amount is a trigger amount for starting the process of changing the film forming conditions of the DLC thin film, and is set smaller than the amount corresponding to the allowable range of the film thickness of the DLC thin film.

  When determining that the product of the a* value and the b* value has not changed (step S202: NO), the arithmetic unit 270 determines that the DLC thin film is good (step S203). More specifically, the arithmetic device 270 determines that the thickness of the DLC thin film is good, assuming that the thickness of the DLC thin film is near the target value.

  On the other hand, when determining that the product of the a* value and the b* value has changed (step S202: YES), the arithmetic unit 270 calculates the increase/decrease amount of the film thickness of the DLC thin film (step S204). More specifically, the arithmetic device 270 calculates the amount of increase or decrease from the target value of the film thickness of the DLC thin film based on the product of the a* value and the b* value calculated in the process shown in step S201.

  Then, the arithmetic unit 270 changes the film forming conditions of the DLC thin film (step S205). More specifically, the computing device 270 first feeds back the increase/decrease amount of the film thickness calculated in the process shown in step S204 to the control device 120 of the PVD device 110. Then, the control device 120 of the PVD device 110 controls the PVD device 110 to form the DLC thin film so that the film thickness of the DLC thin film formed on the next substrate 310 by the PVD device 110 approaches the target value. The film condition (for example, film forming time) is changed.

  As described above, according to the process of the flowchart shown in FIG. 9, the film thickness of the DLC thin film is evaluated based on the a* value and the b* value of the DLC thin film. Then, the film forming conditions for the DLC thin film on the subsequent base material 310 are changed as necessary.

  More specifically, the product of the a* value and the b* value of the DLC thin film is compared with a predetermined reference value, and when the product of the a* value and the b* value deviates from the reference value by a predetermined amount or more, the film is The amount of increase or decrease in thickness is calculated. Then, the film forming conditions are changed so that the film thickness of the DLC thin film formed on the subsequent substrate approaches the target value. With such a configuration, the film thickness of the DLC thin film formed on the base material 310 conveyed in the manufacturing apparatus 10 is maintained near the target value, and the generation of defective products is prevented.

  Hereinafter, the inspection process for evaluating the film thickness of the DLC thin film based on the a* value and the b* value of the DLC thin film will be described in detail with reference to FIGS. 10 and 11.

  FIG. 10 is a diagram showing the relationship between the film thickness of the DLC thin film and the a* value and b* value, and FIG. 11 is a diagram showing the relationship between the film thickness of the DLC thin film and the L* value and b* value. is there. The vertical axis of FIG. 10 is the b* value, and the horizontal axis is the a* value. The vertical axis of FIG. 11 is the L* value, and the horizontal axis is the b* value. In FIGS. 10 and 11, the L*a*b* values are measured for the DLC thin films having the film thicknesses of 0 nm, 10 nm, 20 nm, 50 nm, and 80 nm.

  As shown in FIG. 10, the a value and the b* value of the DLC thin film decrease as the film thickness decreases to 80 nm, 50 nm, 20 nm, 10 nm, and 0 nm. Therefore, since the film thickness and the a* value and the b* value show correlation in all regions, it is possible to evaluate the film thickness of about 20 nm using at least one of the a* value and the b* value of the DLC thin film. it can.

  On the other hand, as shown in FIG. 11, the L* value of the DLC thin film increases as the film thickness decreases to 80 nm, 50 nm, and 20 nm, but shows a substantially constant value when the film thickness is 20 nm or less. Therefore, since there is no correlation between the film thickness and the L* value in the region where the film thickness is at least 20 nm or less (more specifically, 30 nm or less), using the L* value of the DLC thin film, the film thickness of about 20 nm is obtained. Can not be evaluated.

  As described above, according to the film structure manufacturing apparatus 10 according to the present embodiment, the film thickness is evaluated based on the a* value and the b* value of the DLC thin film. Can be evaluated correctly.

  FIG. 12 is a diagram showing the relationship between the holding state of the base material and the color measurement result of the DLC thin film. FIG. 12A is a diagram showing a colorimetric value of a DLC thin film on a base material held in an unstable state, and FIG. 12B is a DLC on a base material held in a stable state. It is a figure which shows the colorimetric value of a thin film. The vertical axis of FIG. 12 is the b* value, and the horizontal axis is the a* value. In FIG. 12, nine inspection areas are color-measured for each DLC thin film formed on the three base materials A to C.

  As shown in FIG. 12, the base material held in an unstable state has a larger variation in colorimetric values (a* value and b* value) than the base material held in a stable state. According to the manufacturing apparatus 10 of the present embodiment, the colorimetric values of the DLC thin film on the base material that is held in an unstable state can be maintained in a stable state by correcting the tilts of the illumination device 220 and the color luminance meter 240. It is possible to approach the colorimetric value of the DLC thin film on the substrate held by.

  As described above, the described embodiment has the following effects.

  (A) The inclination of the illumination device and the color luminance meter is corrected according to the inclination of the inspection area of the DLC thin film, and the relative positions of the illumination apparatus and the color luminance meter and the inspection area are maintained constant, so that the inspection area is stable. Can be measured in color. That is, the film thickness of the DLC thin film can be evaluated stably.

  (B) Since the inclinations of the illumination device and the color luminance meter are changed by the illumination driving device and the luminance meter driving device, the relative inclination between the substrate arranged in the vacuum chamber and the illumination device and the color luminance meter is simple. Can be adjusted to.

  (C) Since the color luminance meter is arranged on the optical path of the light that is irradiated by the illumination device and specularly reflected in the inspection area, the energy of the light that enters the color luminance meter becomes strong. As a result, the S/N ratio of the L*a*b* value is improved and the L*a*b* value is stabilized.

  (D) Since the inclination of the inspection area is measured by the 3D scanner in a non-contact manner, the inclination of the inspection area of the DLC thin film on the substrate arranged in the vacuum chamber can be easily measured.

  (E) Since the film thickness is evaluated based on the a* value and the b* value of the DLC thin film, it is possible to correctly evaluate the DLC thin film having a film thickness of about 20 nm.

(Second embodiment)
In the above-described embodiment, the position and orientation of the lighting device and the position and orientation of the color/luminance meter are individually adjusted. However, the position and orientation of the lighting device and the position and orientation of the color luminance meter may be adjusted integrally.

  FIG. 13: is a figure which shows the manufacturing apparatus 10 of the film structure which concerns on the 2nd Embodiment of this invention. The film structure manufacturing apparatus 10 according to the present embodiment includes a drive device 280 that integrally changes the positions and orientations of the illumination device 220 and the color luminance meter 240.

  The driving device 280 includes a linear driving unit and a rotation driving unit, and maintains the relative position between the lighting device 220 and the color luminance meter 240 at a constant level, while maintaining the relative positions of the lighting device 220 and the color luminance meter 240 in the XY directions and the XY axes. Change the posture around you. The drive control device 260 controls the drive device 280 according to the inclination of the inspection area to integrally adjust the inclinations of the illumination device 220 and the color luminance meter 240.

  With such a configuration, the position and orientation of the illumination device 220 and the color/luminance meter 240 are changed by the single drive device 280, so that the device configuration is simplified.

  As described above, the present embodiment described has the following effects in addition to the effects of the first embodiment.

  (F) Since the position and orientation of the illumination device and the color/luminance meter are changed by one driving device, the device configuration is simplified.

  As described above, the film thickness inspection device and the film thickness inspection method of the present invention have been described in the above-described embodiments. However, it goes without saying that the present invention can be appropriately added, modified, and omitted by those skilled in the art within the scope of the technical idea.

  For example, in the above-described embodiment, the film thickness of the DLC thin film was evaluated based on both the a* value and the b* value of the DLC thin film. However, the film thickness of the DLC thin film may be evaluated based on either the a* value or the b* value.

  Further, in the above-described embodiment, the film thickness of the DLC thin film was evaluated using the colorimetric value (L*a*b* value) in the L*a*b* color system. However, the colorimetric value obtained by measuring the color of the DLC thin film is not limited to the L*a*b* value, and the Yxy value or the XYZ value may be acquired to evaluate the film thickness.

  Further, in the above-described embodiment, the inspection area of the DLC thin film was measured by the color luminance meter while the DLC thin film was irradiated with light by the illumination device. However, the inspection area of the DLC thin film may be measured with a color luminance meter without irradiating light with an illuminating device.

  Further, in the above-described embodiment, the inclination of the inspection region of the DLC thin film was measured by using the moire method. However, the method of measuring the inclination of the inspection area is not limited to the moire method, and the inclination of the inspection area may be measured using, for example, the phase shift method.

  Further, in the above-described embodiment, the relative inclinations of the illumination device and the color luminance meter and the base material are adjusted by changing the inclinations of the illumination device and the color luminance meter. However, the relative inclination between the lighting device and the color luminance meter and the base material may be adjusted by changing the inclination of the base material without changing the inclination of the lighting device and the color luminance meter.

  Further, in the above-described embodiment, the film thickness inspection device of the present invention is mounted in the vacuum chamber for film formation. However, the film thickness inspection device of the present invention may be used as a single film thickness inspection device without being mounted in the vacuum chamber for film formation.

  Further, in the above-described embodiment, the case where the DLC thin film formed on the base material is evaluated has been described as an example. However, the present invention is applicable to carbon thin films other than DLC thin films and various thin films other than carbon thin films, and various thin films are formed on various base materials.

10 Membrane structure manufacturing apparatus,
100 film forming processing section,
110 PVD equipment,
120 PVD controller,
130 vacuum chamber,
200 Inspection processing unit (film thickness inspection device),
210 3D scanner (tilt measuring unit),
220 lighting device (lighting unit),
230 Illumination driving device (illumination unit driving unit),
240 color luminance meter (color measurement part),
250 Luminance meter drive (adjustment section, color measurement section drive section),
260 drive control device (adjustment unit, drive control unit),
270 arithmetic unit (evaluation unit),
280 drive device (adjustment unit, illumination unit drive unit, color measurement unit drive unit),
300 membrane structure,
310 substrate.

Claims (12)

A color measuring unit for measuring a predetermined area of the carbon thin film formed on the base material,
An inclination measuring unit for measuring the inclination of the predetermined region,
According to the inclination of the predetermined area measured by the inclination measuring section, the relative area between the color measuring section and the base material is adjusted so that the color measuring section has a predetermined inclination angle with respect to the predetermined area. An adjustment unit that adjusts the tilt,
Based on the product of a* value and b* value in the L*a*b* colorimetric system, which is obtained by measuring the color of the predetermined area by the color measuring section whose relative inclination is adjusted by the adjusting section. And an evaluation unit that evaluates the film thickness of the predetermined region of the carbon thin film,
Film thickness inspecting apparatus having. The adjustment unit,
A colorimetric driving section for changing the inclination of the colorimetric section,
The color measurement unit is controlled according to the inclination of the predetermined region measured by the inclination measurement unit so that the color measurement unit has a predetermined inclination angle with respect to the predetermined region, and the color measurement is performed. The film thickness inspection apparatus according to claim 1, further comprising a drive control unit that adjusts a tilt of the unit. An illumination unit that irradiates the predetermined area of the carbon thin film with light,
An illumination unit drive unit for changing the inclination of the illumination unit,
The drive control unit adjusts the inclination of the predetermined region measured by the inclination measuring unit so that the color measurement unit is located on the optical path of the light that is irradiated by the illumination unit and specularly reflected in the predetermined region. The film thickness inspection apparatus according to claim 2, wherein the illumination unit driving unit is controlled in accordance with the adjustment to adjust the inclination of the illumination unit. The colorimetric unit drive unit and the illumination unit drive unit are integrally configured,
With the colorimetric unit driving unit and the illumination unit driving unit that are integrally configured, while maintaining the relative position of the colorimetric unit and the illumination unit constant, the colorimetric unit and the illumination unit The film thickness inspection apparatus according to claim 3, wherein the inclination is integrally changed.   The film thickness inspection apparatus according to claim 1, wherein the inclination measuring unit measures an inclination of the predetermined area by using a moire method. A plurality of color measurement parts for measuring a predetermined area of the thin film formed on the base material,
An inclination measuring unit that measures the inclination of each of the predetermined regions of the plurality of color measurement units,
According to the inclination of the predetermined region measured by the inclination measuring unit, each of the plurality of color measuring units has a predetermined inclination angle with respect to the predetermined region. An adjusting unit for adjusting a relative inclination with the base material,
The a* value and the b* value in the L*a*b* color system, which are obtained by measuring the color of the predetermined area by each of the plurality of color measurement sections whose relative inclinations have been adjusted by the adjustment section. An evaluation unit that evaluates the film thickness of the predetermined region of the carbon thin film based on the product of
A plurality of illuminating units that irradiate the predetermined region of the thin film with light,
An illumination unit drive unit that changes the inclination of each of the plurality of illumination units,
The adjustment unit,
A colorimetric driving unit that changes the inclination of each of the plurality of colorimetric units,
The colorimetric unit driving unit is controlled according to the inclination of the predetermined region measured by the inclination measuring unit so that each of the plurality of colorimetric units has a predetermined inclination angle with respect to the predetermined region. A drive control unit that adjusts the inclination of each of the plurality of color measurement units,
The drive control unit measures the tilt measurement unit so that each of the plurality of color measurement units is located on the optical path of the light that is illuminated by each of the plurality of illumination units and specularly reflected in the predetermined region. A film thickness inspecting device, which controls the illumination unit drive unit according to the inclination of the predetermined region, and adjusts the inclination of each of the plurality of illumination units. A step (a) of measuring the inclination of a predetermined region of the carbon thin film formed on the substrate,
According to the inclination of the predetermined area measured in the step (a), the color measurement section and the color measurement section for measuring the predetermined area have a predetermined inclination angle with respect to the predetermined area. A step (b) of adjusting a relative inclination with respect to the base material,
A step (c) of color-measuring the predetermined region by the color-measuring unit whose relative inclination is adjusted in the step (b),
Based on the product of the a* value and the b* value in the L*a*b* color system, which is obtained by measuring the color of the predetermined area by the color measuring unit in the step (c), A step (d) of evaluating the film thickness of the predetermined region,
A method for inspecting film thickness.   In the step (b), the colorimetric part of the colorimetric part is adjusted according to the inclination of the predetermined area measured in the step (a) so that the colorimetric part has a predetermined inclination angle with respect to the predetermined area. The film thickness inspection method according to claim 7, wherein the inclination is adjusted. The predetermined area of the carbon thin film is irradiated with light by an illumination unit,
The illumination is performed according to the inclination of the predetermined area measured in the step (a) so that the colorimetric section is located on the optical path of the light emitted by the illumination section and regularly reflected in the predetermined area. The film thickness inspection method according to claim 8, wherein the inclination of the portion is adjusted.   The film thickness inspection method according to claim 9, wherein the inclinations of the color measurement unit and the illumination unit are integrally changed while maintaining a relative position between the color measurement unit and the illumination unit constant.   The film thickness inspection method according to claim 7, wherein in the step (a), the inclination of the predetermined region is measured by using a moire method. A step (a) of measuring the inclination of a predetermined region of the thin film formed on the substrate,
According to the inclination of the predetermined area measured in the step (a), each of the plurality of colorimetric units for measuring the predetermined area has a predetermined inclination angle with respect to the predetermined area. A step (b) of adjusting a relative inclination between each of the colorimetric parts of (1) and the base material;
A step (c) of measuring the color of the predetermined area by each of the plurality of colorimetric units whose relative inclinations are adjusted in the step (b);
On the basis of the product of a* value and b* value in the L*a*b* color system, which is obtained by measuring the predetermined area by each of the plurality of color measurement units in the step (c), A step (d) of evaluating the film thickness of the predetermined region of the carbon thin film,
According to the inclination of the predetermined area measured in the step (a), in the step (b), each of the plurality of colorimetric units has a predetermined inclination angle with respect to the predetermined area. The tilt of each of the multiple color measurement units is adjusted,
The predetermined region of the thin film is irradiated with light by a plurality of illumination units,
The inclination of the predetermined region measured in the step (a) so that each of the plurality of colorimetric units is located on the optical path of the light that is illuminated by the plurality of illumination units and is regularly reflected in the predetermined region. The film thickness inspecting method, wherein the inclination of each of the plurality of illumination units is adjusted in accordance with the above.