JP6704764B2 - Infrared processor - Google Patents

Description

The present invention relates to an infrared processing device.

Conventionally, various types of infrared processing devices have been developed as infrared processing devices that perform processing such as drying using infrared rays. For example, Patent Document 1 includes a drying main body serving as a furnace body, an infrared heater that radiates infrared rays to the coating, and an internal air supply device that supplies cold air to the drying main body to cool the coating. A drying oven is described.

JP, 2014-035086, A

By the way, when air is blown from the duct to the processing space in the infrared processing apparatus, the air velocity of the air blow may vary between the end and center of the opening of the duct, and there has been a demand to make the air velocity of the air blow as uniform as possible.

The present invention has been made to solve such a problem, and its main object is to reduce variations in the wind speed of the wind supplied into the processing space.

The present invention has adopted the following means in order to achieve the above-mentioned main object.

The first infrared processing device of the present invention is
A furnace body having a processing space inside,
An infrared heater that radiates infrared rays to the object to be processed in the processing space,
A bottomed tubular member having a first opening inside which has a first flow passage through which gas can flow, and at least the first opening on the outer circumferential surface of the tubular member; Nozzle having a main body part that covers a portion and has a second flow path inside that communicates with the first flow path through the first opening, and a second opening that serves as an outlet from the second flow path to the processing space A duct having a section,
It is equipped with.

In this first infrared processing apparatus, the first opening is provided on the outer peripheral surface of the tubular member having the first flow path inside. Thereby, when the gas flows out from the first flow path to the second flow path in the main body through the first opening, at least a part of the gas hits the inner peripheral surface of the tubular member, etc. At least a part of it is converted into static pressure, and the gas streamlines are in order. As a result, the wind that passes through the second flow path and flows through the processing space from the second opening has reduced variations in wind speed.

In the first infrared processing apparatus of the present invention, the second opening has a longitudinal direction and a lateral direction, and the first opening has an opening whose longitudinal direction is parallel to the longitudinal direction of the second opening. You may have. With this configuration, since the second opening and the first opening are parallel to each other in the longitudinal direction, the wind flowing out from the second opening can more easily reduce the variation in the wind speed in the longitudinal direction.

In the first infrared processing apparatus of the present invention, the second opening has a longitudinal direction and a lateral direction, and the tubular member has an axial direction parallel to the longitudinal direction of the second opening. It may be arranged. In this case, the first opening may have an opening whose longitudinal direction is parallel to the longitudinal direction of the second opening. With this configuration, the axial direction of the tubular member and the longitudinal direction of the first opening are parallel to each other, so that it is easy to increase the length of the first opening in the longitudinal direction.

The second infrared processing device of the present invention is
A furnace body having a processing space inside,
An infrared heater that radiates infrared rays to the object to be processed in the processing space,
A main body part having a first flow passage and a second flow passage in which gas can flow, the first flow passage and the second flow passage are communicated with each other, and the maximum flow passage cross-sectional area of the first flow passage is provided. A duct having a plate-like member forming a first opening having a flow passage cross-sectional area smaller than a value, and a nozzle section having a second opening serving as an outlet from the second flow passage to the processing space,
It is equipped with.

In this second infrared processing apparatus, the presence of the plate-shaped member causes the flow path between the first flow path and the second flow path in the main body portion to be larger than the maximum value of the flow path cross-sectional area of the first flow path. There is a first opening with a small cross-sectional area. With this, when the gas flows from the first flow path to the second flow path through the first opening, at least a part of the gas hits the plate-like member, whereby the dynamic pressure is converted into the static pressure, and The streamlines are in order. As a result, the wind that passes through the second flow path and flows through the processing space from the second opening has reduced variations in wind speed. In this case, the plate-shaped member may form the first opening as a gap with another member (for example, the main body portion), or the plate-shaped member itself is provided with the first opening. May be.

In the second infrared processing apparatus of the present invention, the second opening has a longitudinal direction and a lateral direction, and the first opening has an opening whose longitudinal direction is parallel to the longitudinal direction of the second opening. You may have. With this configuration, since the second opening and the first opening are parallel to each other in the longitudinal direction, the wind flowing out from the second opening can more easily reduce the variation in the wind speed in the longitudinal direction.

In the second infrared processing apparatus of the present invention, the second opening is opened at the front end side of the main body portion in a front direction perpendicular to the gas flow direction in the first opening, and the longitudinal direction is the flow direction. And a first side opening that extends along a left-right direction perpendicular to the front direction, the first opening has a longitudinal direction parallel to the left-right direction, and communicates with a front side region of the first flow path, and the first opening. You may have the left side opening and the right side opening which each connect with the area|region of the left side and the right side of a flow path. By doing so, for example, as compared with the case where the left opening and the right opening are not provided, variations in the wind speed of the wind supplied into the processing space are further reduced.

In the second infrared processing apparatus of the present invention, the plate-shaped member is adjacent to the right end portion of the left-side opening and protrudes toward the first flow path side in parallel with the gas flow direction in the left-side opening. And a plate-shaped right side protrusion that is adjacent to the left end of the right side opening and that protrudes toward the first flow path side in parallel with the gas flow direction in the right side opening. By doing so, at least a part of the gas that does not come into contact with the plate-shaped member and flows out without converting the dynamic pressure into the static pressure hits the left side protruding portion or the right side protruding portion, thereby further reducing the dynamic pressure to the static pressure. Can be converted. Therefore, it is possible to further reduce the variation in the wind speed of the wind supplied into the processing space.

In at least one of the first and second infrared processing devices of the present invention, at least a part of the second flow passage may have a flow passage cross-sectional area larger than that of the first opening. Further, in at least one of the first and second infrared ray processing devices of the present invention, the second opening may have a channel cross-sectional area smaller than a maximum value of the channel cross-sectional area of the second channel. This makes it easy to increase the wind speed of the wind supplied into the processing space.

At least one of the first and second infrared processing devices of the present invention includes a transporting unit that transports the object in the transporting direction in the processing space, and the second opening has a longitudinal direction in the transporting direction. And may be parallel to the width direction of the object to be processed. In this case, the variation in the wind speed in the width direction of the object to be processed is reduced, so that the processing unevenness is less likely to occur on the object to be processed.

FIG. 3 is a vertical cross-sectional view of the infrared processing device 10 of the first embodiment. The perspective view which looked at air supply duct 22 from the upper right front. The front view which looked at the air supply duct 22 from the front. The longitudinal cross-sectional view of the infrared processing apparatus 10B of 2nd Embodiment. The perspective view which looked at air supply duct 22B from the upper right front. FIG. 5 is a BB cross-sectional view of an enlarged portion of the air supply duct 22B of FIG. The perspective view which looked at air supply duct 22B of a modification from the upper right front. Sectional drawing which carried out the cross-sectional view of the air supply duct 22B of a modification from the upper part.

[First Embodiment]
Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a vertical cross-sectional view of an infrared processing device 10 which is an embodiment of the present invention. FIG. 2 is a perspective view of the air supply duct 22 of the air supply device 20 as viewed from the upper right front. FIG. 3 is a front view of the air supply duct 22 seen from the front. The enlarged cross-sectional view of the air supply duct 22 on the upper right side in FIG. 1 corresponds to the AA cross-sectional view of FIG. 3. The partition plate 19 is not shown in FIGS. The infrared processing apparatus 10 performs infrared processing (here, drying) of the coating film 77 as the object to be processed applied on the sheet 75 by using infrared rays, and includes the furnace body 14, the air supply device 20, and An exhaust device 50, an infrared heater 60, a transfer device 70, and a control device 80 are provided. The infrared processing apparatus 10 is a roll-to-roller that continuously conveys a sheet 75 having a coating film 77 formed on its upper surface in the conveying direction (backward) by means of rolls 72 and 73 of a conveying device 70 to dry the coating film 77. It is configured as a roll-type drying oven. In addition, in this embodiment, the up-down direction, the left-right direction, and the front-back direction are as shown in FIGS.

The furnace body 14 is a heat insulating structure formed in a substantially rectangular parallelepiped shape, and has openings 17 and 18 in the front end face 15 and the rear end face 16, respectively. The length of the furnace body 14 from the front end face 15 to the rear end face 16 is, for example, 2 to 10 m. A partition plate 19 is provided inside the furnace body 14. The partition plate 19 is arranged in the horizontal direction and vertically divides the space inside the furnace body 14 into an upper space 14a and a lower space (processing space 14b). The partition plate 19 is made of an infrared transmitting material that transmits at least a part of infrared rays from the infrared heater 60 (for example, near infrared rays having a wavelength of 0.7 μm or more and 4 μm or less). In this embodiment, the partition plate 19 is made of quartz glass that absorbs infrared rays having a wavelength of more than 4 μm and transmits infrared rays having a wavelength of 4 μm or less. The partition plate 19 separates the upper space 14a in which the infrared heater 40 is present from the processing space 14b through which the coating film 77 passes, thereby suppressing overheating of the coating film 77 and from the air supply device 20 into the processing space 14b. Plays a role in rectifying the blast of air. The openings 17 and 18 are open to the processing space 14b. The sheet 75 having the coating film 77 applied on one surface is carried in through the opening 17, travels horizontally in the processing space 14 b, and is carried out through the opening 18.

The air supply device 20 supplies (blasts) gas to the surface (upper surface) side of the coating film 77 in the processing space 14b, cools the sheet 75 and the coating film 77 in the processing space 14b, and evaporates from the coating film 77. It is an apparatus that performs at least one of removing components such as a solvent. The air supply device 20 includes an air supply fan 21 and an air supply duct 22 (corresponding to the duct of the present invention). The air supply fan 21 is arranged outside the furnace body 14 and supplies gas into the air supply duct 22. The air supply fan 21 can adjust the flow rate of gas, and may also adjust the temperature of gas. The gas supplied by the air supply fan 21, in the present embodiment, is cold air that can cool the sheet 75 and the coating film 77 (for example, room temperature or air at 50° C. or lower). The gas supplied from the air supply fan 21 passes through the air supply duct 22 and is supplied into the processing space 14b from the second opening 44 provided on the front side of the air supply duct 22. As shown in FIGS. 2 and 3, the second opening 44 has a rectangular shape having a longitudinal direction and a lateral direction. The longitudinal direction of the second opening 44 is parallel to the left-right direction, and the lateral direction is parallel to the vertical direction. The wind velocity of the gas supplied from the second opening 44 to the processing space 14b is not particularly limited to this, but may be, for example, 1 m/s to 15 m/s.

The air supply duct 22 will be described in detail with reference to FIGS. The air supply duct 22 includes a tubular member 30 having a first opening 34, a body portion 41 surrounding the tubular member 30, and a nozzle portion 43 arranged on the front end side of the body portion 41. The air supply duct 22 is made of metal such as SUS304 or aluminum.

The tubular member 30 is a bottomed tube having a bottom portion 38, as shown in FIG. 2. The tubular member 30 is arranged such that its axial direction is parallel to the longitudinal direction (left-right direction) of the second opening 44. The tubular member 30 penetrates the right side wall of the main body portion 41 in the left-right direction, and also penetrates the furnace body 14 (not shown) and is arranged outside the furnace body 14. The inside of the tubular member 30 is a first flow path 32 through which gas can flow, and the gas supplied from the air supply fan 21 flows through the first flow path 32 from right to left, and the bottom portion 38 side. Flow toward. The tubular member 30 is a tube having a circular cross section, and the first flow path 32 also has a circular flow path cross section (cross section perpendicular to the gas flow direction). A flange 31 is provided on the tubular member 30, and is fixed to the outer wall surface on the right side of the main body 41 by a bolt or the like via the flange 31. It should be noted that the tubular member 30 may have a portion located inside the main body portion 41 and a portion located outside the main body portion 41 integrated with each other or different members. In the case of different members, both members are It may be connected by this flange 31. The bottom portion 38 of the tubular member 30 is in contact with the inner wall surface of the body portion 41, and is fixed to the body portion 41 with a bolt or the like. The tubular member 30 has one or more first openings 33 that serve as outlets of gas from the first flow path 32. The first opening 33 is arranged on the outer peripheral surface (side surface) of the tubular member 30. A plurality of the first openings 33 may be provided, and in this embodiment, four first openings 34 to 37 are provided. The first opening 34 to the first opening 37 are collectively referred to as the first opening 33. Each of the first opening 34 to the first opening 37 has a rectangular shape with rounded corners, and each has a longitudinal direction that is parallel to the longitudinal direction (left-right direction) of the second opening 44. The first opening 34 to the first opening 37 are all located inside the main body portion 41, and are located upstream of the bottom portion 38 in the flow direction of the first flow path 32 (direction from right to left). is doing. The first openings 34, 35 are arranged at the front end of the outer peripheral surface of the tubular member 30, and the gas in the first flow path 32 flows out from the rear to the front. The first opening 34 and the first opening 35 are arranged side by side to each other. The axial direction (gas flow direction) of the first openings 34, 35 is parallel to the front-rear direction. The first openings 36 and 37 are arranged at the rear end of the outer peripheral surface of the tubular member 30, and the gas in the first flow path 32 flows out from the front to the rear. The first opening 36 and the first opening 37 are arranged side by side to each other. The axial direction (gas flow direction) of the first openings 36 and 37 is parallel to the front-rear direction. The first openings 34 to 37 have the same shape and the same size. The first opening 34 and the first opening 36 are plane-symmetric with respect to an imaginary plane that passes through the axis of the tubular member 30 and is parallel to the vertical direction. Similarly, the first opening 35 and the first opening 36 are also plane-symmetric.

The main body portion 41 is a hollow member formed in a substantially rectangular parallelepiped shape (including a cubic shape). The body portion 41 covers at least a portion including the first opening 33 on the outer peripheral surface of the tubular member 30. In the present embodiment, the bottom portion 38 of the tubular member 30 is also arranged in the main body portion 41, and the main body portion 41 has not only the first opening 33 but also the left end portion of the tubular member 30 (where the flange 31 is provided). (Part to bottom 38). A hollow portion (substantially rectangular parallelepiped space) inside the main body 41 serves as a second flow passage 42, and the second flow passage 42 is connected to the first flow passage 32 via the first opening 33 of the tubular member 30. It is in communication.

The nozzle portion 43 is a tube through which gas can flow, and is formed in a rectangular tube shape in this embodiment. The nozzle portion 43 is disposed in the main body portion 41, and is integrally formed with the main body portion 41 in this embodiment. The nozzle portion 43 is disposed at the lower end and the front end of the main body portion 41, and the internal space communicates with the internal space of the main body portion 41. The space inside the nozzle portion 43 is also included in the second flow path 42. The nozzle portion 43 has a second opening 44 that serves as an outlet for gas from the second flow path 42 to the processing space 14b. The second opening 44 is horizontally opened forward at the front end of the nozzle portion 43. As a result, the air supply device 20 supplies gas in the direction opposite to the conveying direction of the sheet 75 (from the rear to the front). As described above, the second opening 44 has a longitudinal direction parallel to the left-right direction and a lateral direction parallel to the up-down direction. The longitudinal direction (left-right direction) of the second opening 44 is perpendicular to the transport direction (front-back direction) of the coating film 77 by the transport device 70 and parallel to the width direction of the coating film 77. The longitudinal direction of the second opening 44 is perpendicular to the vertical direction. The axial direction (gas flow direction) of the second opening 44 is parallel to the front-back direction. The axial direction of the space inside the nozzle portion 43 (the gas flow direction) is also parallel to the front-back direction. The gas flowing through the second flow path 42 flows out from the rear to the front through the second opening 44. The length of the nozzle portion 43 in the front-rear direction (the length in the flow direction in the nozzle portion 43) and the axial direction of the space in the nozzle portion 43 are set so that the gas flowing out from the second opening 44 has a desired direction. Can be adjusted appropriately. For example, the direction of the inner peripheral surface (particularly the upper surface and the lower surface) of the nozzle portion 43 may be inclined so that the axial direction of the space inside the nozzle portion 43 faces upward front or downward front. The left and right width of the second opening 44 (the length in the longitudinal direction of the second opening 44 and the distance between the two two-dot chain lines in FIG. 3) is as shown in FIG. It is larger than the width. The left and right ends of the transported coating film 77 are located in the region between the two ends of the second opening 44 in the longitudinal direction. That is, the coating film 77 is transported while maintaining the positional relationship such that it is included in the region between the two ends of the second opening 44 in the longitudinal direction. As shown in FIGS. 1 and 3, the nozzle portion 43 and the second opening 44 are located below the first opening 33, and further below the portion of the tubular member 30 covered by the body portion 41. Is located in.

Here, the flow passage cross-sectional area (opening area) of the first opening 33 is defined as area S1, the flow passage cross-sectional area (opening area) of the second opening 44 is defined as area S2, and the flow passage cross-sectional area of the first flow passage 32 is defined as The area S3 is defined as the area S3, and the cross-sectional area of the second flow path 42 is defined as the area S4. When the flow path is composed of a plurality of holes, the areas S1 to S4 are all total areas. For example, the area S1 is the total value of the flow passage cross-sectional areas of the first openings 34 to 37. Further, in the present embodiment, the flow passage cross-sectional area of the first flow passage 32 (the area of the circle determined by the inner diameter of the tubular member 30) is constant, but the flow passage cross-sectional area of the first flow passage 32 is along the flow direction. When there is a portion that changes due to the change, the maximum value of the flow passage cross-sectional area in the first flow passage 32 is set as the area S3. The same applies to the area S4. Therefore, in the present embodiment, the area S4 is determined based on the flow passage cross-sectional area inside the main body 41, not the flow passage cross-sectional area inside the nozzle portion 43. Further, the area S4 is defined in the gas path between the first opening 33 and the second opening 44 in the second flow path 42. Therefore, in the present embodiment, the cross-sectional area of the region of the second flow path 42 above the first opening 33 is irrelevant to the area S4. From the above, the area S4 in the present embodiment is, as shown in FIG. 1, the flow passage cross-sectional area (perpendicular to the flowing direction) in the space below the tubular member 30 inside the main body 41 and above the nozzle 43. That is, the area is parallel to the front, back, left and right.

Regarding this area S1 to S4, in this embodiment, S3<S1. However, S3=S1 or S3>S1 may be satisfied. Moreover, in this embodiment, S1<S4. That is, at least a part of the second flow channel 42 has a flow channel cross-sectional area larger than that of the first opening 33. However, S1=S4 may be set, or S1>S4 may be set. Further, in this embodiment, S4>S2. That is, the second opening 44 has a flow passage cross-sectional area smaller than the maximum value of the flow passage cross-sectional area of the second flow passage 42. However, S4=S2 or S4<S2 may be set. Further, in this embodiment, S1>S2. However, S1=S2 and S1<S2 may be satisfied. By adjusting the area S2, that is, the opening area of the second opening 44, the wind speed of the air supplied from the second flow path 42 to the processing space 14b can be adjusted. Therefore, the area S2 may be determined so that the required wind speed can be obtained.

The exhaust device 50 is a device that exhausts the atmospheric gas in the furnace body 14. The exhaust device 50 includes an exhaust fan 51 that exhausts the atmospheric gas in the exhaust duct 52, an exhaust duct 52 that guides the atmospheric gas to the exhaust fan 51, and an exhaust port that serves as an outlet for the atmospheric gas from the processing space 14b to the exhaust duct 52. 54 are provided. The exhaust port 54 is provided at an end portion of the furnace body 14 on the side of the opening 17 that is the loading side of the sheet 75, and is horizontally opened toward the opening 18 side that is the unloading side. The exhaust device 50 draws in the atmospheric gas (mainly the air blown from the air supply device 20 after flowing along the surface of the coating film 77) in the furnace body 14 through the exhaust port 54, and the exhaust fan 51. Is exhausted to the outside of the furnace body 14. The exhaust fan 51 may be connected to, for example, an exhaust pipe (not shown), and is suitable for removing components such as an organic solvent evaporated from the coating film 77 contained in the atmospheric gas in the processing space 14b. The atmospheric gas may be exhausted to the outside of the infrared processing apparatus 10 after performing the processing. Further, the exhaust fan 51 may circulate the atmospheric gas in the exhaust duct 52 as the intake air of the air supply fan 21 without exhausting the atmospheric gas to the outside of the infrared processing device 10.

The infrared heaters 60 are devices that irradiate the coating film 77 passing through the processing space 14b with infrared rays, and a plurality of infrared heaters 60 are installed in the upper space 14a. In the present embodiment, a plurality of infrared heaters 60 (six in the present embodiment) are arranged substantially evenly from the front end face 17 side to the rear end face 18 side. All of the plurality of infrared heaters 60 have the same configuration, and all of them are attached so that the longitudinal direction thereof is orthogonal to the transport direction. The configuration of one infrared heater 30 will be described below.

As shown in the enlarged view of FIG. 1, the infrared heater 60 includes a heater main body 63 formed so that an inner tube 62 surrounds a filament 61 which is a heating element, and an inner tube 62 provided outside the heater main body 63. An outer tube 64 formed so as to surround the outer tube 64 and a reflective layer 65 disposed on the outer surface of the outer tube 64 are provided.

The heater body 63 is configured as a halogen heater in this embodiment. The filament 61 is a heating element that emits infrared rays when heated, and is made of W (tungsten) in this embodiment. Other materials for the filament 61 include Ni-Cr alloy, Mo, Ta, and Fe-Cr-Al alloy. Electric power is supplied to both ends of the filament 61 from a power supply source (not shown). The inner tube 62 is a cylindrical tube, and is made of an infrared transmitting material that transmits at least a part of infrared rays from the filament 61. In the present embodiment, the inner tube 62 is made of the same quartz glass as the partition plate 19. The inside of the inner tube 62 has an atmosphere in which a halogen gas is added to an argon gas.

The outer tube 64 is a tube formed of the above-mentioned infrared ray transmitting material. In this embodiment, the outer tube 64 is made of quartz glass like the inner tube 32.

The reflection layer 65 is formed in a region of the outer peripheral surface of the outer tube 64 including the side (upper side) opposite to the coating film 77 when viewed from the filament 61, and is provided so as to cover only a part of the periphery of the filament 61. There is. In this embodiment, the reflective layer 65 covers the entire upper half of the outer tube 64. The reflection layer 65 is arranged so that the filament 61 is located at the center position of a circle including an arc of its cross section. The reflective layer 65 is formed of an infrared reflective material that reflects at least a part of infrared rays of the electromagnetic waves emitted from the filament 61. Examples of the infrared reflecting material include gold, platinum and aluminum.

The coolant passage 66 is a space between the inner pipe 62 and the outer pipe 64, and the coolant can flow through, for example, a fluid inlet and outlet (not shown) that penetrates the furnace body 14 in the left and right directions. The refrigerant is a fluid such as air. The coolant flowing through the coolant channel 66 plays a role of lowering the temperature of the outer tube 64 and the reflection layer 65, which are the outer surface of the infrared heater 60, and adjusting it to an arbitrary temperature (for example, 200° C. or lower).

The transport device 70 is a mechanism for transporting the coating film 77, and is wound around the roll 72 provided in front of the furnace body 14, the roll 73 provided in the back of the furnace body 14, and the rolls 72, 73. The seat 75 is provided. The sheet 75 is wound around the rolls 72 and 73, and is moved in the transport direction (rearward) in the processing space 14b by the rotation of the rolls 72 and 73. The sheet 75 is not particularly limited, but is a resin sheet, for example, and is made of a PET film in this embodiment. The sheet 75 is not particularly limited, but has a thickness of 10 to 100 μm and a width of 200 to 1000 mm, for example.

The coating film 77 is an object to be processed applied on the upper surface of the sheet 75, and is used as a thin film for MLCC (multilayer ceramic capacitor) after being dried, for example. The coating film 77 contains, for example, ceramic powder or metal powder, an organic binder, and an organic solvent. The thickness of the coating film 77 is not particularly limited, but is, for example, 20 to 1000 μm.

The control device 80 is configured as a microprocessor centered on a CPU. The control device 80 outputs a control signal to each of the air supply fan 21 and the exhaust fan 51 to control the temperature and air volume of the gas blown from the second opening 44 of the air supply duct 22, and the processing space 14b. The amount of exhaust from the exhaust port 54 of the atmosphere is controlled. Further, the control device 80 outputs a control signal to the power supply source of the filament 61 to control the heater output (power consumption) of the filament 61, whereby the temperature of the filament 61 and the infrared rays radiated to the coating film 77 are controlled. Control the radiant intensity. The control device 80 controls the flow rate of the coolant flowing from the coolant supply source (not shown) to the coolant flow path 66 to adjust the temperatures of the outer tube 64 and the reflection layer 65. The control device 80 can adjust the passing time of the sheet 75 and the coating film 77 in the furnace body 14 and the tension applied to the sheet 75 and the coating film 77 by controlling the rotation speeds of the rolls 72 and 73. Further, the control device 80 includes a display operation unit such as a touch panel (not shown), and inputs an instruction from an operator and outputs information to the operator.

Next, the manner in which the coating film 77 is dried by using the control device 80 thus configured will be described. First, for example, when the operator inputs a processing start instruction, the control device 80 energizes the filament 61 to radiate infrared rays and controls the air supply fan 21 and the exhaust fan 51 to blow air into the processing space 14b. And exhaust. As a result, the control device 80 adjusts the temperature and air volume in the processing space 14b so as to be in a predetermined state. Next, the control device 80 rotates the rolls 72 and 73 to start the conveyance of the sheet 75. As a result, the sheet 75 is unwound from the roll 72. A coating film 77 is applied to the upper surface of the sheet 75 by a coater (not shown) immediately before being carried into the processing space 14b through the opening 17. Then, the sheet 75 coated with the coating film 77 is conveyed into the processing space 14b. While the sheet 75 passes through the processing space 14b, the coating film 77 formed on the upper surface of the sheet 75 is irradiated with infrared rays from the infrared heater 60 to evaporate components such as a solvent and dry. At the same time, cold air from the air supply device 20 cools the coating film 77 and the sheet 75, and removes the solvent evaporated from the coating film 77. Then, the coating film 77 is dried to be a thin film and is carried out from the opening 18. The thin film (coating film 77) is wound around the roll 73 together with the sheet 75. Then, the thin film is peeled from the sheet 75, cut into a predetermined shape and laminated to manufacture the MLCC.

When performing the infrared treatment of the coating film 77, the control device 80, for example, has a peak wavelength of infrared rays emitted from the filament 61 in a predetermined wavelength range (for example, wavelengths 1 μm to 4 μm, 2 μm to 3.5 μm). The heater output of the infrared heater 60 is controlled so that the value becomes.

Further, the control device 80 controls the temperature and the flow rate of the air supply fan 21 so that the temperature of the seat 75 becomes a predetermined value. The temperature and the flow rate may be predetermined, or the controller 80 may adjust the temperature and the flow rate based on the temperature detected by the temperature sensor provided in the processing space 14b.

Here, the flow of gas from the air supply fan 21 to the processing space 14b will be described. The gas supplied from the air supply fan 21 passes through the first flow path 32, the first opening 33, the second flow path 42, and the second opening 44 in this order, and is supplied from the second opening 44 to the processing space 14b. It At this time, since the first opening 33 is provided on the outer peripheral surface of the tubular member 30 having the first flow path 32, at least a part of the gas hits the inner peripheral surface of the tubular member 30 and the bottom portion 38. Passes through the first opening 33 and flows out to the second flow path 42. When the gas hits the inner peripheral surface of the tubular member 30 or the bottom portion 38 in this manner, at least a part of the dynamic pressure of the gas is converted into the static pressure, and when the gas flows out from the first opening 33, the flow of the gas is reduced. The line is in order. As a result, the wind that passes through the second flow path 42 and flows from the second opening 44 through the processing space 14b has a reduced variation in wind speed. For example, the variation in the wind speed between both ends and the center of the second opening 44 in the longitudinal direction is reduced. As a result, it is possible to reduce the occurrence of unevenness in the drying of the coating film 77 and to suppress the deterioration of the MLCC quality and the yield, as compared with the case where the wind speed is more uneven.

According to the infrared processing device 10 of the present embodiment described in detail above, the first opening 33 is provided on the outer peripheral surface of the tubular member 30 having the first flow passage 32 therein, so that the second flow passage is formed. The wind that passes through the second opening 44 and flows out from the second opening 44 into the processing space 14b has a reduced variation in wind speed.

The second opening 44 has a longitudinal direction and a lateral direction, and the first opening 33 has first openings 34 to 37 whose longitudinal direction is parallel to the longitudinal direction of the second opening 44. Since the second opening 44 and the first opening 33 (34 to 37) are parallel in the longitudinal direction, the wind flowing out from the second opening 44 is more likely to reduce the variation in the wind speed in the longitudinal direction.

Further, the second opening 44 has a longitudinal direction and a lateral direction, and the tubular member 30 is arranged so that the axial direction is parallel to the longitudinal direction of the second opening 44. Moreover, the first opening 33 has the first opening 34 to the first opening 37 whose longitudinal direction is parallel to the longitudinal direction of the second opening 44 as described above. As a result, the axial direction of the tubular member 30 and the longitudinal direction of the first openings 33 (34 to 37) are parallel to each other, so that it is easy to increase the longitudinal length of the first openings 33 (34 to 37).

Furthermore, at least a part of the second flow passage 42 has a flow passage cross-sectional area larger than that of the first opening 33 (S1<S4). Moreover, since the flow passage cross-sectional area of the second opening 44 is smaller than the maximum value of the flow passage cross-sectional area of the second flow passage 42 (S4>S2), the wind speed of the wind supplied into the processing space 14b is increased. It's easy to do.

Further, the infrared processing apparatus 10 also includes a transfer device 70 that transfers the coating film 77 in the transfer direction within the processing space 14b, and the second opening 44 has a longitudinal direction perpendicular to the transfer direction and a width direction of the coating film 77. Parallel. As a result, variations in the wind speed in the width direction of the coating film 77 are reduced, so that unevenness in the drying process of the coating film 77 is less likely to occur.

[Second Embodiment]
FIG. 4 is a vertical cross-sectional view of the infrared processing device 10B of the second embodiment. FIG. 5 is a perspective view of the air supply duct 22B viewed from the upper right front. FIG. 6 is a BB cross-sectional view of an enlarged portion of the air supply duct 22B of FIG. The enlarged cross-sectional view of the air supply duct 22B at the upper right of FIG. 4 corresponds to the C-C cross-sectional view of FIG. Further, in FIGS. 5 and 6, the partition plate 19 is not shown. The infrared processing device 10B has the same configuration as the infrared processing device 10 of the first embodiment except that the air supply device 20 is replaced by an air supply device 20B. Therefore, the same components as those of the infrared processing device 10 are designated by the same reference numerals and the description thereof will be omitted.

The air supply device 20B includes an air supply fan 21 and an air supply duct 22B (corresponding to the duct of the present invention). The air supply device 20B is similar to the air supply device 20 except that an air supply duct 22B is provided instead of the air supply duct 22.

The air supply duct 22B includes a main body portion 41B, a plate-shaped member 30B, a nozzle portion 43, and a pipe 45B. Like the air supply duct 22, the air supply duct 22B is made of metal such as SUS304 or aluminum.

The main body portion 41B is a hollow member formed in a substantially rectangular parallelepiped shape (including a cubic shape), and has a first flow passage 32B and a second flow passage 42B through which gas can flow. In the present embodiment, as shown in FIG. 5, the ceiling portion of the main body portion 41B is partially inclined in a shape such that the flow passage cross-sectional area of the first flow passage 32B becomes smaller as it goes upward. A pipe 45B is attached to the center of the ceiling portion of the first flow path 32B. The pipe 45B penetrates the ceiling of the furnace body 14 and forms a gas flow path from the air supply fan 21 to the main body 41B (first flow path 32B). The gas supplied from the air supply fan 21 circulates in the pipe 45B from top to bottom and flows toward the first flow path 32B.

The plate-shaped member 30B is a member arranged inside the main body 41B, and partitions the internal space of the main body 41B to partition the first flow path 32B and the second flow path 42B. In the present embodiment, the plate-shaped member 30B is arranged such that the surface (here, the upper surface) facing the first flow path 32B is parallel to the front, rear, left, and right, and the inside of the main body portion 41B is an upper space (first flow path). 32B) and a lower space (second flow path 42B). As shown in FIG. 4, the plate-shaped member 30B penetrates the rear wall of the main body 41B in the front-rear direction. A connection plate 31B is fixed to the outer wall surface on the rear side of the body portion 41B with bolts or the like. By fixing the connection plate 31B and the plate-shaped member 30B with bolts or the like, the plate-shaped member 30B is attached to the main body portion 41B via the connection plate 31B. The plate-shaped member 30B is arranged so as to form at least one first opening 33B which is a gap between the plate-shaped member 30B and the inner peripheral surface of the main body 41B and serves as an outlet for gas from the first flow path 32. The first opening 33B is a gap formed by the main body 41B and the plate-shaped member 30B being separated from each other in a direction perpendicular to the flow direction (vertical direction) of the first flow path 32. As shown in FIGS. 5 and 6, the first opening 33B is located on the second opening 44 side (front side) of the plate-shaped member 30B with its longitudinal direction parallel to the longitudinal direction (left-right direction) of the second opening 44. It has a front opening 34B, a left opening 35B located on the left side of the plate member 30B, and a right opening 36B located on the right side of the plate member 30B. The front side opening 34B, the left side opening 35B, and the right side opening 36B are collectively referred to as a first opening 33B. The first opening 33B connects the first flow passage 32B and the second flow passage 42B. The axial direction (gas flowing direction) of the first opening 33B is parallel to the flowing direction (vertical direction) of the first flow path 32. The front opening 34B is located on the front side of the plate-shaped member 30B and thus communicates with the front region of the first flow path 32B. In other words, when viewed along the flow direction of the first flow path 32B, the front opening 34B is located so as to overlap the front region of the first flow path 32B. Similarly, the left side opening 35B communicates with the left side region of the first flow path 32B. The right side opening 36B communicates with the right side region of the first flow path 32B. In other words, when viewed along the flow direction of the first flow path 32B, the left side opening 35B and the right side opening 36B are positioned so as to respectively overlap the left side area and the right side area of the first flow path 32B. ing. Further, the front opening 34B and the left opening 35B are connected, and the front opening 34B and the left opening 35B are connected. Therefore, the front side opening 34B, the left side opening 35B, and the right side opening 36B are one opening as a whole. Each of the left side opening 35B and the right side opening 36B has a longitudinal direction parallel to the front-rear direction. Each of the front opening 34B, the left opening 35B, and the right opening 36B has a rectangular shape. The left side opening 35B and the right side opening 36B have the same shape and the same size, and are symmetrical.

The nozzle portion 43 is the same as the nozzle portion 43 of the first embodiment. The nozzle portion 43 is arranged at the lower end and the front end of the main body portion 41B. The nozzle portion 43 and the second opening 44 are located below the first opening 33B and below the plate member 30B. The second opening 44 is opened on the front end side of the main body portion 41B in a direction (front direction) perpendicular to the gas flow direction (vertical direction) in the first opening 33B. The gas flowing through the second flow path 42B is supplied from the second opening 44 into the processing space 14b.

Also in the present embodiment, as in the first embodiment, the flow passage cross-sectional area (opening area) of the first opening 33B is set to area S1, and the flow passage cross-sectional area (opening area) of the second opening 44 is set to area S2, The flow channel cross-sectional area of the first flow channel 32B is defined as an area S3, and the flow channel cross-sectional area of the second flow channel 42B is defined as an area S4. It is also the same as in the first embodiment that all the areas S1 to S4 are the total area when the flow path is composed of a plurality of holes. Regarding the areas S3 and S4, the maximum value of the flow passage cross-sectional area and the point where the area S4 is determined in the gas passage between the first opening 33B and the second opening 44 in the second flow passage 42B are also included. , The same as in the first embodiment. Therefore, in the present embodiment, the area S3 is determined based on the flow passage cross-sectional area in the vicinity of the plate member 30B, not in the vicinity of the ceiling of the main body portion 41B of the first flow passage 32B having a small flow passage cross-sectional area (FIG. 4). reference). Further, the area S4 is, similarly to the first embodiment, a flow passage cross-sectional area in a space below the plate-shaped member 30B inside the main body portion 41B and above the nozzle portion 43 (perpendicular to the flow direction, that is, parallel to the front, rear, left and right). Surface area) (see FIG. 4).

Regarding the areas S1 to S4, in the present embodiment, S3>S1. That is, the flow passage cross-sectional area of the first opening 33B is smaller than the maximum value of the flow passage cross-sectional area of the first flow passage 32B. Other size relationships of the areas S1 to S4 can be appropriately adjusted as in the first embodiment. In this embodiment, S1<S4, S4>S2, and S1>S2.

According to the infrared processing device 10B of the present embodiment described in detail above, the presence of the plate-shaped member 30B allows the first flow path between the first flow path 32B and the second flow path 42B in the main body 41B. There is the first opening 33B having a flow passage cross-sectional area smaller than the maximum value of the flow passage cross-sectional area of 32B. Thereby, when the gas flows out from the first flow path 32B through the first opening 33B to the second flow path 42B, at least a part of the gas hits the upper surface of the plate-shaped member 30B, so that at least one of the dynamic pressure is increased. The part is converted to static pressure, and the gas flow lines are in a regular state. As a result, the wind velocity that passes through the second flow path 42B and flows through the processing space 14b from the second opening 44 is reduced in variation.

The second opening 44 has a longitudinal direction and a lateral direction, and the first opening 33B has a front side opening 34B whose longitudinal direction is parallel to the longitudinal direction of the second opening 44. With this configuration, since the second opening 44 and the first opening 34B are parallel to each other in the longitudinal direction, the wind flowing out from the second opening 44 can more easily reduce the variation in the wind speed in the longitudinal direction.

Further, the second opening 44 opens at the front end side of the main body portion 41B toward the front direction perpendicular to the gas flow direction (vertical direction) in the first opening 33B, and the longitudinal direction is the flow direction (vertical direction) and front. Along the left-right direction that is perpendicular to the direction. The first opening 33B communicates with the front opening 34B having a longitudinal direction parallel to the left-right direction and communicating with the front region of the first flow channel 32B, and the left and right regions of the first flow channel, respectively. It has a left side opening 35B and a right side opening 36B. As a result, for example, as compared with the case where the left side opening 35B and the right side opening 36B are not provided, variations in the wind speed of the wind supplied into the processing space 14b are further reduced.

Furthermore, at least a part of the second flow passage 42B has a flow passage cross-sectional area larger than that of the first opening 44B (S1<S4). Further, since the second opening 44 has a flow passage cross-sectional area smaller than the maximum value of the flow passage cross-sectional area of the second flow passage 42B (S4>S2), the wind speed of the wind supplied into the processing space 14b is high. It's easy to do.

In addition, the infrared processing device 10B also includes a transport device 70 that transports the coating film 77 in the transport direction in the processing space 14b, and the second opening 44 has a longitudinal direction perpendicular to the transportation direction and a width direction of the coating film 77. Parallel. As a result, variations in the wind speed in the width direction of the coating film 77 are reduced, so that unevenness in the drying process of the coating film 77 is less likely to occur.

It is needless to say that the present invention is not limited to the above-described embodiment and can be implemented in various modes within the technical scope of the present invention.

For example, in the above-described second embodiment, the plate member 30B may have protrusions on both left and right sides (both sides in the longitudinal direction of the second opening 44). FIG. 7 is a perspective view of the air supply duct 22B of the modified example as viewed from the upper right front. FIG. 8 is a cross-sectional view of the modified air supply duct 22B as viewed from above. In the air supply duct 22B of this modified example, the plate-shaped member 30B includes a left side protruding portion 37B and a right side protruding portion 38B. The left side protrusion 37B and the right side protrusion 38B are rectangular parallelepiped-shaped members whose longitudinal direction is along the front-rear direction. The left side protruding portion 37B and the right side protruding portion 38B are arranged so as to protrude from the plate-shaped member 30B toward the first flow path 32B. The left side protruding portion 37B is adjacent to the right end portion of the left side opening 35B and protrudes in parallel with the gas flow direction (vertical direction) in the left side opening 35B. The right side protruding portion 38B is adjacent to the left end portion of the right side opening 36B and protrudes in parallel with the gas flow direction (vertical direction) in the right side opening 36B. In FIG. 7, the left side protrusion 37B and the right side protrusion 38B are arranged so that the lower surface is in contact with the upper surface of the plate-shaped member 30B, but a part of the right surface of the left side protrusion 37B is the left end of the plate-shaped member 30B. You may arrange|position so that it may contact|connect a surface. Similarly, a part of the left surface of the right protruding portion 38B may be arranged so as to contact the right end surface of the plate-shaped member 30B. Further, the left side protruding portion 37B and the right side protruding portion 38B may be formed integrally with the plate-shaped member 30B. In the air supply duct 22B of this modified example, at least a part of the gas that does not come into contact with the plate member 30B and flows out without converting the dynamic pressure into the static pressure hits the left side protruding portion 37B or the right side protruding portion 38B. Moreover, the dynamic pressure can be converted into static pressure. Therefore, it is possible to further reduce the variation in the wind speed of the wind supplied into the processing space 14b.

In the above-described first embodiment, the tubular member 30 is arranged so that the axial direction is parallel to the longitudinal direction of the second opening 44, but the present invention is not limited to this. For example, the axial direction of the tubular member 30 may be parallel to the vertical direction of FIG. Further, although the longitudinal direction of the first opening 33 is parallel to the axial direction of the tubular member 30, the present invention is not limited to this. Although the longitudinal direction of the first opening 33 is parallel to the longitudinal direction of the second opening 44, the invention is not limited to this. The number, position, and shape of the first openings 33 are not limited to those in the above-described first embodiment. For example, the first opening 33 may have a shape having no longitudinal direction (for example, a circular shape). For example, the first opening 33 may be opened below (in the same direction as the flow direction of the second flow channel 42) or above the tubular member 30, or may be opened in a direction inclined from the front, rear, top, and bottom.

In the above-described first embodiment, the main body portion 41 surrounds not only the first opening 33 but also the entire left end portion (from the portion where the flange 31 is disposed to the bottom portion 38) of the tubular member 30. The invention is not limited to this, and the body portion 41 may surround at least the first opening 33. For example, the end of the tubular member 30 on the bottom 38 side may penetrate the main body 41 and project to the left. Further, in the above-described first embodiment, the bottom portion 38 is attached to the main body portion 41, but the present invention is not limited to this. For example, even if the bottom portion 38 is separated from the main body portion 41 and arranged in the main body portion 41. Good. In this case, an opening communicating with the second flow path 42 may be present in a part of the bottom portion 38. The first opening 33 needs to have at least an opening provided on the outer peripheral surface of the tubular member 30, but if the bottom portion 38 also has an opening that communicates with the second flow path 42, this opening is also a first opening. One opening 33 is included, and the area of this opening is also included in the area S1. Further, the wall portion of the main body portion 41 may also serve as the bottom portion 38 of the tubular member 30.

In the above-described second embodiment, the first opening 33B includes the front opening 34B, the left opening 35B, and the right opening 36B, but it is not particularly limited thereto. One or more of these may be omitted, or the first opening 33B may have an opening other than these. For example, the first opening 33B may have an opening arranged in the front and rear center of the plate-shaped member 30B, or an opening located on the rear side of the plate-shaped member 30B (of the first flow path 32B). The opening may communicate with the rear area), or may have one or more of these openings and the front opening 34B, the left opening 35B, and the right opening 36B. Further, the shape of the first opening 33B is not limited to the rectangular shape, and may be, for example, a circular shape. The number of openings formed as the first openings 33 is not particularly limited as long as it is 1 or more. For example, the front opening 34B may be configured by two openings that are adjacent to each other on the left and right.

In the above-described second embodiment, the plate-shaped member 30B is arranged such that the surface (upper surface) facing the first flow path 32B is parallel to the front, rear, left, and right, but the present invention is not limited to this. For example, the surface of the plate-shaped member 30B facing the first flow path 32B may be curved. In addition, the surface of the plate-shaped member 30B facing the first flow path 32B does not have to have an angle θ1 with the flow direction of the first flow path 32B of 0°, for example, in the second embodiment described above. Although θ1 is 90°, it may be inclined in the range of more than 0° and 90° or less. The inclination direction is not particularly limited, and for example, the front side of the plate member 30B may be inclined downward, or the rear side may be inclined downward.

In the above-described second embodiment, the plate-shaped member 30B has the first opening 33B formed as a gap with another member (main body 41B), but the present invention is not limited to this. The first opening 33B may be arranged (formed) in the plate member 30B itself. Further, although the plate-shaped member 30B is a member different from the main body 41, the plate-shaped member 30B is not limited to this and may be integrally formed with the main body 41. Further, in the second embodiment, the plate-shaped member 30B is a solid plate filled with contents, but may be a hollow plate, for example.

In the above-described first and second embodiments, the second opening 44 has a rectangular shape (longitudinal shape) having a longitudinal direction and a lateral direction, but is not particularly limited thereto, and may have a square shape or a circular shape. You may. Further, the axial direction of the opening of the second opening 44 is not particularly limited, and for example, the axial direction may be parallel to the vertical direction. In this case, for example, the nozzle part 43 may be arranged at the lower ends of the body parts 41 and 41B. Further, although the nozzle portion 43 projects from the main body portions 41 and 41B, the present invention is not limited to this, and the second opening 44 may be formed directly on the wall portion of the main body portions 41 and 41B. In this case, a member of a portion forming the second opening 44 (a peripheral portion of the second opening 44) of the wall portions of the main body portions 41 and 41B corresponds to the nozzle portion 43.

In the above-described first and second embodiments, the partition plate 19 divides the upper space 14a and the processing space 14b, but the partition plate 19 is not particularly limited thereto, and the partition plate 19 may be omitted, for example. Further, although the infrared heater 60 has been described as a so-called linear heater, it may be a planar heater. Further, although the infrared heater 60 is arranged in the furnace body 14, the infrared heater 60 is not limited to this, and infrared rays may be radiated from the outside of the furnace body 14 to the object to be processed.

In the above-described first and second embodiments, the infrared processing devices 10 and 10B are so-called continuous furnaces including the transfer device 70, but the present invention is not limited to this. For example, a batch furnace without the transfer device 70 may be used. Also in the case of the continuous furnace, the transport device 70 is a device that transports the sheet 75 by the rolls 72 and 73 to transport the coating film 77, but is not limited to this. For example, the transfer device may be a belt conveyor or a roller arranged in the processing space 14b.

In the above-described first and second embodiments, in the above-described embodiments, the infrared processing devices 10 and 10B are the devices that perform drying, but the invention is not limited to this, and devices that perform infrared processing that processes an object with infrared light. If The "infrared treatment" includes a treatment for causing a physical change including evaporation, drying, dehydration, etc., a treatment for causing a chemical reaction such as imidization, a treatment for changing a temperature such as a temperature rise, and the like. The gas supplied from the air supply device 20 to the processing space 14b is not particularly limited, and may be, for example, hot air used for heating the object to be processed, or may have the same temperature as the object to be processed. The type of gas is not limited to air and may be, for example, an inert gas.

In the above-described first and second embodiments, the coating film 77 is used as a thin film for MLCC, but the object to be processed is not limited to this and may be any object to be processed by infrared rays. For example, the coating film 77 may be used as a thin film for LTCC (low temperature firing ceramics) or other green sheets. Alternatively, the coating film 77 may be used as a coating film serving as an electrode for a battery such as a lithium ion secondary battery. When the coating film 77 is a coating film that serves as an electrode for a battery, the sheet 75 may be a metal sheet such as aluminum or copper. Further, the object to be treated is not particularly limited to the coating film.

Examples in which the duct of the first infrared processing apparatus and the duct of the second infrared processing apparatus of the present invention are specifically manufactured will be described below as examples. The present invention is not limited to the examples below.

[Example 1]
The case where the air supply duct 22 shown in FIGS. 1 to 3 was manufactured and the air volume of the gas supplied from the air supply fan 21 to the air supply duct 22 was 0.370 Nm ³ /min was set as Example 1. In Example 1, the inner diameter of the tubular member 30 was 47.8 mm. The axial length of the portion of the tubular member 30 covered by the inside of the main body 41 was 240 mm. Each of the first openings 34 to 37 had a size of 110 mm in the longitudinal direction and a size of 15 mm in the lateral direction. The internal space of the main body 41 has a rectangular parallelepiped shape of 76 mm in front and rear, 100 mm in upper and lower, and 240 mm in left and right. The internal space of the nozzle portion 43 was 30 mm in the front and back, 15 mm in the top and bottom, and 240 mm in the left and right. The vertical distance between the lower ends of the first openings 34 to 37 and the upper ends of the second openings 44 was 40 mm. The temperature of the gas supplied to the air supply duct 22 was 24°C.

[Examples 2 to 6]
Examples 2 to 6 are cases in which the same air supply duct 22 as that of the first embodiment is used and the air volume supplied from the air supply fan 21 is variously changed as shown in Table 1.

[Example 1B]
Example 1B was a case where the air supply duct 22B shown in FIGS. 4 to 6 was manufactured and the air flow rate of the gas supplied from the air supply fan 21 to the air supply duct 22B was 1.3 Nm ³ /min. The temperature of the gas supplied to the air supply duct 22B was 24° C. as in the first to sixth embodiments. In Example 1B,
The internal space of the main body 41B was 50 mm in the front and back, 75 mm in the top and bottom (the distance from the bottom surface to the lowermost end of the inclined surface of the ceiling part), and the left and right were 460 mm. The inner diameter of the pipe 45B was 48.6 mm. The plate-shaped member 30B was a plate having a front and rear of 48 mm, a left and right of 390 mm, and a thickness of 1 mm. As a result, the size of the front opening 34B in the lateral direction (front and back) was 2 mm, and the size of the left opening 35B and the right opening 36B in the lateral direction (left and right) was 33.5 mm. The vertical distance from the bottom of the internal space of the main body 41B to the plate-shaped member 30B is 46 mm. The inner space of the nozzle portion 43 was 30 mm in the front and back, 15 mm in the top and bottom, and 460 mm in the left and right.

[Example 2B]
Example 2B was an air supply duct 22B similar to Example 1B except that the front-rear length of the plate-shaped member 30B was reduced and the size of the front side opening 34B in the lateral direction (front-rear direction) was set to 7 mm.

[Example 3B]
The air supply duct 22B of the modified example shown in FIGS. The example 3B is the same as the example 2B except that the plate-shaped member 30B includes the left side protrusion 37B and the right side protrusion 38B. The protrusion height of the left side protrusion 37B and the right side protrusion 38B was 10 mm.

[Comparative Example 1]
A duct similar to that of Example 1B was prepared except that the plate-shaped member 30B was not provided, and was designated as Comparative Example 1.

[Evaluation of variations in wind speed]
With respect to Comparative Example 1, Examples 1 to 6 and Examples 1B to 3B, the wind speed was measured and the variation in the wind speed was evaluated. The wind speed was measured using a medium-high temperature anemomaster anemometer (Model 6162) manufactured by Kanomax. In Examples 1 to 6, the measurement location is located 10 mm forward from the second opening 44, near the left end of the second opening 44 (position 10 mm to the right from the left end of the second opening 44), near the center and right end. The measurement was performed at three points (a position 10 mm left from the right end of the second opening 44). In Comparative Example 1 and Examples 1B to 3B, the measurement location was set at a position 10 mm away from the second opening 44 forward, near the left end of the second opening 44 (position 30 mm to the right from the left end of the second opening 44), The measurement was carried out at five points: left (the midpoint between the vicinity of the left end and the center), center, right (the midpoint between the vicinity of the right end and the center), and near the right end (a position 30 mm left from the right end of the second opening 44). For each of Comparative Example 1, Examples 1 to 6 and Examples 1B to 3B, the average value of the measured wind speed was derived, and the coefficient of variation (%) (=standard deviation/average value×100) was derived. The smaller the coefficient of variation, the smaller the variation in wind speed.

For each of Comparative Example 1, Examples 1 to 6 and Examples 1B to 3B, Table 1 collectively shows the air volume, the measured wind speed, the average value of the wind speed, and the variation coefficient of the wind speed.

As shown in Table 1, in all of Examples 1 to 6 and Examples 1B to 3B, the coefficient of variation was smaller than that of Comparative Example 1, and the variation in wind speed was reduced. In Examples 1 to 6, variations in wind speed were further reduced as compared with any of Examples 1B to 3B. Among Examples 1B to 3B, Example 3B having the left side protruding portion 37B and the right side protruding portion 38B had a smaller variation in wind speed than Examples 1B and 2B not having these.

10 Infrared treatment device, 14 Furnace body, 14a Upper space, 14b Treatment space, 15 Front end face, 16 Rear end face, 17, 18 opening, 19 Partition plate, 20 Air supply device, 21 Air supply fan, 22 Air supply duct, 30 Cylindrical member, 31 flange, 32 first flow passage, 33, 34 to 37 first opening, 38 bottom portion, 41 main body portion, 42 second flow passage, 43 nozzle portion, 44 second opening, 50 exhaust device, 51 exhaust Fan, 52 exhaust duct, 54 exhaust port, 60 infrared heater, 61 filament, 62 inner tube, 63 heater body, 64 outer tube, 65 reflective layer, 66 refrigerant flow path, 70 transfer device, 72, 73 roll, 75 sheet, 77 coating film, 80 control device, 10B infrared treatment device, 20B air supply device, 22B air supply duct 30B plate member, 31B connection plate, 32B first flow path, 33B first opening, 34B front opening, 35B left opening, 36B right side opening, 37B left side protruding part, 38B right side protruding part, 41B main body part, 42B second flow path, 45B piping.

Claims (6)

A furnace body having a processing space inside,
An infrared heater that radiates infrared rays to the object to be processed in the processing space,
A main body part having a first flow passage and a second flow passage in which gas can flow, the first flow passage and the second flow passage are communicated with each other, and the maximum flow passage cross-sectional area of the first flow passage is provided. A duct having a plate-like member forming a first opening having a flow passage cross-sectional area smaller than a value, and a nozzle section having a second opening serving as an outlet from the second flow passage to the processing space,
A pipe that is connected to the main body and that allows a gas to flow vertically into the surface of the plate-shaped member toward the first flow path,
Equipped with
The second opening opens on the front end side of the main body portion in a front direction perpendicular to the gas flow direction in the first opening, and the longitudinal direction is along the flow direction and the left-right direction perpendicular to the front direction. And
The first opening has a longitudinal direction parallel to the left-right direction and a front opening that communicates with a front region of the first flow path, and a left side that communicates with the left and right regions of the first flow path, respectively. An opening and a right side opening,
Infrared processing device. The second opening has a longitudinal direction and a lateral direction,
The first opening has an opening whose longitudinal direction is parallel to the longitudinal direction of the second opening,
The infrared processing device according to claim 1 . The plate-shaped member is adjacent to the right end of the left opening and a plate-shaped left projection that protrudes toward the first flow path side in parallel with the gas flow direction in the left opening, and is adjacent to the left end of the right opening. And a plate-shaped right side protruding portion that protrudes toward the first flow path side in parallel with the gas flow direction in the right side opening,
The infrared processing device according to claim 1 or 2 . At least a part of the second flow passage has a flow passage cross-sectional area larger than that of the first opening,
Infrared processing device according to any one of claims 1-3. The second opening has a flow passage cross-sectional area smaller than the maximum value of the flow passage cross-sectional area of the second flow passage,
Infrared processing device according to any one of claims 1-4. An infrared processing apparatus according to any one of claims 1 to 5
Conveying means for conveying the object to be processed in the processing space in the conveying direction,
Equipped with
A longitudinal direction of the second opening is perpendicular to the carrying direction and parallel to a width direction of the object to be processed;
Infrared processing device.

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