JP6727691B2 - Ultrasonic measuring device and fluid monitoring system - Google Patents

Description

The present invention relates to an ultrasonic measuring device and a fluid monitoring system for measuring the state of a fluid in a container such as a reaction tank or a pipe.

There is a demand for a technique for measuring the state of fluid in a container such as a reaction tank or piping.

Here, specific examples of the container include a process container such as a reaction tank or a mixing tank used in a food plant or a chemical plant, and a pipe through which a raw material fluid flows. In addition, pipes and storage containers installed in oil plants and crude oil mines are also examples.

A fluid such as a liquid is contained in the inside (internal space) of such a container. The fluid may be a “multiphase fluid” in which substances other than a liquid phase such as a gas phase such as bubbles and a solid phase such as a reaction product are mixed. In such a multi-phase fluid, there is a demand to obtain information such as presence/absence, size, position, etc. of different phases such as bubbles and reaction products.

There is also a demand for obtaining information such as non-uniformity of temperature in the fluid.

Such a state relating to the position of a different phase in the fluid (spatial distribution) and the non-uniformity of the physical quantity (spatial distribution) is called a “fluid state”.

There is a tomography method as a method of detecting a fluid state in a fluid.

The X-ray tomography method irradiates an object to be measured with X-rays from various directions to measure the X-ray attenuation rate, and measures the density distribution inside the object as an image from the attenuation rate information. Is. The X-ray tomography method is applied in the medical field, industrial field, and the like.

The ultrasonic tomography method uses an ultrasonic beam instead of X-rays. This is a measurement technique in which an object to be measured is irradiated with ultrasonic beams from various directions and the state inside the object is measured from the attenuation rate of the ultrasonic waves. Since the ultrasonic tomography method does not require a large-scale device such as an X-ray source, it has an advantage that it can be measured by a small measuring device as compared with the X-ray tomography method.

The ultrasonic tomography method is described in Patent Document 1.

The technique described in Patent Document 1 is an ultrasonic tomography method in which a living body tissue such as a human body is a measurement target, and ultrasonic waves after passing through the living body tissue to be measured using an ultrasonic beam spreading in a fan shape. Signal is detected, and the information of the measurement target is obtained from the received signal.

Further, Patent Document 2 describes an image processing method using ultrasonic waves.

In the technique described in Patent Document 2, an ultrasonic signal is transmitted to an observed object, a plurality of scattered wave signals from the observed object are received at different positions, and the position of a secondary sound source of the scattered wave signal is detected. Then, position information is generated and a tomographic image of the observed object is displayed.

U.S. Pat. No. 4,105,018

JP-A-8-54379

However, when the ultrasonic tomography method described in Patent Document 1 and Patent Document 2 is applied to measurement targeting a fluid inside a container having a vessel wall, the following new problems occur. The inventors have found out.

The problem is that in the measurement target where the sound velocity in the vessel wall of the container and the sound velocity of the fluid in the inner space of the vessel are significantly different, refraction of the ultrasonic beam occurs at the interface between the vessel wall and the inner space, and This means that it is difficult to spread the beam in a fan shape.

As an example, consider the case where water is put as a fluid in a steel container often used in plants.

The sonic velocity in water is 1480 m/sec, while in steel the sonic velocity is 5900 m/sec. Since the sound velocity in the fluid is greatly different from that in the container wall, the ultrasonic beam is refracted at the interface between the container wall and the fluid, the angle is changed, and the divergence angle of the fan-shaped ultrasonic beam is reduced.

In ultrasonic tomography, when the divergence angle of the fan-shaped ultrasonic beam becomes small, the image quality of the peripheral portion of the measurement target deteriorates.

As described above, when an attempt is made to measure the state of the fluid in the container having the vessel wall by ultrasonic tomography, a new problem arises.

In the biological tissues targeted by the inventions described in Patent Documents 1 and 2, the difference in sound velocity between the skin and muscles is small, so the ultrasonic waves travel straight. Even if the living tissue is a fluid containing water as a main component, the speed of sound of the skin surrounding the fluid is almost the same as that of water, so that when the ultrasonic beam is incident from the outside of the skin, the ultrasonic beam travels substantially straight. That is, from the viewpoint of refraction of ultrasonic waves, the skin is not regarded as a “container” and is a measurement target that has substantially no vessel wall.

The present invention has been made in view of the above problems, and an object thereof is to suppress the deterioration of image quality by using an ultrasonic probe provided outside the container wall for the state of the fluid in the container having the container wall. It is to realize an ultrasonic measuring device and a fluid monitoring system capable of highly accurate measurement.

In order to achieve the above object, the present invention is configured as follows.

In an ultrasonic measurement device, a transverse wave probe is installed at an oblique angle with respect to the normal to the vessel wall of the container in which the fluid to be measured is contained, and is installed at an angle perpendicular to the vessel wall of the container. A transverse wave probe having a longitudinal wave probe and comprising a plurality of probe units arranged outside the container, and a measurement circuit section to which the plurality of probe units are connected. Also, the ultrasonic wave generated from the longitudinal wave probe is received, and the fluid state of the measurement target fluid contained in the container is measured.

A fluid monitoring system includes the ultrasonic measurement device, an abnormality detection unit connected to the measurement circuit unit, and a monitoring display unit that displays an abnormality detection signal output by the abnormality detection unit.

ADVANTAGE OF THE INVENTION According to this invention, the state of the fluid in the container which has a vessel wall can suppress the deterioration of image quality using the ultrasonic probe provided outside the vessel wall, and an ultrasonic measuring device which can be measured highly accurately. A fluid monitoring system can be realized.

1 is a schematic configuration diagram of an ultrasonic measurement device that is Embodiment 1 of the present invention. It is a figure for demonstrating the subject in the probe unit different from this invention. It is the figure which showed the relationship between the in-wall refraction angle and the internal space refraction angle. It is a schematic block diagram of the probe unit used in Example 1 of the present invention. It is a figure which shows the relationship of the refraction angle of the ultrasonic wave in Example 1 of this invention. FIG. 3 is a diagram showing wiring in the probe unit according to the first embodiment of the present invention. It is a figure which shows the structure of the measurement circuit part in Example 1 of this invention. FIG. 3 is a diagram schematically showing how a received signal is obtained in Example 1 of the present invention. FIG. 6 is a diagram showing a configuration of a measurement circuit unit used in the second embodiment. It is a flowchart which shows the operation process of the measurement circuit part of Example 2 of this invention. It is explanatory drawing of the difference between SV wave and SH wave. It is a schematic block diagram of the ultrasonic measuring device which is Example 3 of this invention. It is a schematic structure side view of the ultrasonic measuring device which is Example 4 of the present invention. It is a schematic block diagram of the ultrasonic measuring device which is Example 5 of this invention. It is a schematic block diagram of the ultrasonic measuring device which is Example 6 of this invention. 6 is a graph showing a relationship between a sound velocity ratio c2/c1 based on a fluid sound velocity and a critical angle.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

(Example 1)
FIG. 1 is a schematic configuration diagram of an ultrasonic measurement device that is Embodiment 1 of the present invention.

In FIG. 1, a container 510 containing a fluid to be measured has a vessel wall 512. The inside of the vessel wall 512 is called “inside the vessel wall”, and the space surrounded by the vessel wall 512 is called “internal space”. For example, in the case of the stainless container wall 512, the inside of the container wall 512 is stainless steel. The internal space 514 contains the fluid to be measured.

The container wall 512 of the container 510 may be an open system. That is, a part of the vessel wall 512 may be opened and the internal space 514 may be connected to the outside of the container 510. For example, an open aquarium is also included in container 510 herein.

The “outside of the container” or “outside of the vessel wall” means a space on the opposite side of the inner space 514 among the spaces separated by the vessel wall 512.

Here, specific examples of the container include a process container such as a reaction tank or a mixing tank used in a food plant or a chemical plant, and a pipe through which a raw material fluid flows. In addition, pipes and storage containers installed in oil plants and crude oil mines are also examples.

A fluid such as a liquid is contained in the inside (internal space) of such a container. The fluid may be a “multiphase fluid” in which substances other than a liquid phase such as a gas phase such as bubbles and a solid phase such as a reaction product are mixed. In such a multi-phase fluid, there is a demand to obtain information such as presence/absence, size, position, etc. of different phases such as bubbles and reaction products.

In the present specification, the “fluid state” means a state relating to the position (spatial distribution) of a different phase in a fluid and the non-uniformity of physical quantities (spatial distribution).

As a specific example of the fluid state, there is information such as presence/absence, size and position of different phases such as bubbles and reaction products in the multi-phase fluid. As another specific example, there is information on the nonuniformity (spatial distribution) of physical quantities such as the temperature in the fluid.

There is a tomography method as a method of detecting a fluid state in a fluid.

A plurality of probe units 20 are installed outside the container wall 512 of the container 510.

The plurality of probe units 20 are connected to a measurement circuit unit described later via cables (not shown in FIG. 1).

(Example of configuration of probe unit different from the present invention)
Next, the outline of the configuration of the probe unit different from the present invention will be described, and the problem thereof will be described.

FIG. 2 is a diagram for explaining a problem in the probe unit different from the present invention. An ultrasonic probe 121 is installed outside the vessel wall 512 of the container. The ultrasonic probe 121 generates a fan-shaped ultrasonic beam. That is, the ultrasonic probe 121 has beam components of various angles. The ultrasonic beam emitted from the ultrasonic probe 121 passes through the inside of the vessel wall 512 and enters the internal space of the container.

Now, let us consider how the beam component that enters the vessel wall at the in-wall refraction angle θ2 is refracted.

The refraction angle in the wall is θ2, and the refraction angle in the internal space 514 is θ1. As shown in FIG. 2, the in-wall refraction angle θ2 is the beam angle within the vessel wall 512, and the refraction angle θ1 in the inner space 514 is the refraction angle when the ultrasonic beam is incident on the inner space 514.

As shown in FIG. 2, each refraction angle is an angle based on the normal line 600 of the surface of the vessel wall 512 (referred to as a vessel wall normal line).

The sound velocity in the vessel wall 512 is c2, and the sound velocity in the fluid contained in the internal space 514 is c1. Then, the relationship of the following expression (1) is established according to Snell's law.

As a typical example, consider a case where the material of the vessel wall 512 is steel (sonic velocity c2=5900 m/sec) and the fluid is water (sonic velocity c1=1480 m/sec).

FIG. 3 is a diagram showing the relationship between the in-wall refraction angle θ2 and the internal space refraction angle θ1 by using the above expression (1). It can be seen from FIG. 3 that the internal space refraction angle θ1 remains at 14.5° even when incident at θ2=90°. The incidence of the in-wall refraction angle θ2 of 90° means that the ultrasonic beam causes total internal reflection at the interface between the instrument wall 512 and the interior 514. That is, in this case, the maximum value that the internal space refraction angle θ1 can take is 14.5°, and refraction angles beyond that cannot be taken.

The maximum value that the internal space refraction angle θ1 can take is referred to as the internal space emission angle θ1max. From the above consideration, it can be seen that in the measurement target including the vessel wall 512, the spread of the ultrasonic beam incident on the internal space 514 inside the container is limited to the internal space emission angle θ1max.

The internal space emission angle θ1max is also called a critical angle and is calculated by the following equation (2).

Here, c1 is the sound velocity of the fluid in the internal space, and c2 is the sound velocity of the longitudinal wave in the vessel wall.

FIG. 16 is a graph showing the relationship between the sound velocity ratio c2/c1 based on the fluid sound velocity and the critical angle (internal space emission angle) θ1max, where the vertical axis represents the critical angle θ1max and the horizontal axis represents the sound velocity ratio c2. /C1 is shown.

In FIG. 16, when the sound velocity ratio c2/c1 of the fluid sound velocity reference is 1.1, the critical angle θ1max is 72°, and a sufficiently expanded beam required for ultrasonic tomography can be obtained. However, when the sound velocity ratio c2/c1 becomes 1.3 or more (c2/c1≧1.3), the critical angle θ1max becomes 50° or less, and the beam divergence amount is limited.

That is, a problem occurs when a value obtained by dividing the longitudinal wave sound velocity c2 in the container wall by the sound velocity c1 of water, that is, the sound velocity ratio c2/c1 exceeds 1.3. The present invention realizes an ultrasonic measuring device and a fluid monitoring system that enable measurement with sufficient beam divergence even in such a case.

Here, consider the case of a living tissue that is a measurement target in the techniques described in Patent Documents 1 and 2.

The sound velocity of the tissue in the living body is almost the same as that of water (c1=1480 m/sec), and is about c1=1480 m/sec. The in-vivo tissue is covered with muscles and skin. Since the sound velocity of muscle is 1533 m/sec and the sound velocity of skin is 1518 m/sec, the sound velocity ratio c2/c1 based on the fluid sound velocity is 1.05 or less.

Therefore, as can be seen from FIG. 16, a sufficiently divergent beam required for ultrasonic tomography is obtained. Therefore, no problem occurs.

On the other hand, consider an example of a container used for industrial purposes.

As a fluid in the internal space, water (sound velocity c1=1480 m/sec) is considered as a typical example. When the material of the container is steel, the longitudinal wave sound velocity c2 is 5900 m/sec, so the sound velocity ratio is c2/c1=4. When the material of the container is acrylic, the longitudinal wave sound velocity c2 is 2730 m/sec, and therefore the sound velocity ratio c2/c1=1.8.

As described above, when the ultrasonic tomography is used to measure from the outside of the container used for industrial purposes, the critical angle (internal space emission angle) θ1max is restricted.

In ultrasonic tomography, when the divergence angle of the beam becomes small, the number of ultrasonic lines along the periphery of the observation area decreases. Therefore, there is a problem that the image quality in the peripheral portion of the observation area is deteriorated. Specifically, a decrease in resolution, an increase in noise, and the occurrence of artifacts occur.

As described above, when ultrasonic tomography is applied to the fluid existing in the inner space 514 of the vessel wall 512, the divergence angle of the ultrasonic beam is limited by the refraction phenomenon at the interface between the vessel wall 512 and the inner space 514. The inventors have come up with such a problem.

(Structure of the probe unit of the present invention)
The configuration of the probe unit 20 according to the first embodiment of the present invention will be described below.

FIG. 4 is a schematic configuration diagram of the probe unit 20 used in the first embodiment. In FIG. 4, the probe unit 20 includes a transverse wave probe 31a (first transverse wave probe), 31b (second transverse wave probe) that transmits and receives transverse wave ultrasonic waves, and a longitudinal wave ultrasonic wave. And a longitudinal wave probe 34 for transmitting and receiving.

In FIG. 4, dotted lines are shown inside the container wall 512 of the container 510 containing the fluid to be measured, inside the shear wave probes 31a and 31b, and inside the shoe 40 of the longitudinal wave probe 34. It shows a path of ultrasonic waves from the transverse wave probe 31a.

A longitudinal wave of an ultrasonic wave is a wave in which the displacement of atoms constituting a medium due to the wave is the same as the traveling direction of the sound wave. Longitudinal waves are compressional waves.

On the other hand, a shear wave of an ultrasonic wave is a wave in which atoms constituting a medium are displaced in a direction perpendicular to the traveling direction of the sound wave. Transverse waves are also called shear waves.

In this specification, a transverse wave probe is defined as a probe that generates and receives an ultrasonic wave containing a transverse wave component. That is, in the transverse wave probes 31a and 31b, the emitted ultrasonic waves may include transverse wave components, and the emitted ultrasonic waves may also include longitudinal wave components.

There are two types of transverse waves, SV waves and SH waves, depending on the geometrical relationship with the surface of the vessel wall 512. FIG. 11 is an explanatory diagram of the difference between the SV wave and the SH wave.

In FIG. 11, the traveling direction of ultrasonic waves is indicated by a dotted line. The polarization direction of the transverse wave is perpendicular to the surface of the device wall 512 is called an SV wave (Vertically polarized shear wave). The solid line arrow in FIG. 11 indicates the polarization direction of the SV wave.

On the other hand, one in which the polarization direction of the transverse wave is parallel to the surface of the container wall 512 is called an SH wave (Horizontally polarized shear wave). The SH wave is polarized in the direction perpendicular to the paper surface (direction from the back surface to the front surface) in FIG.

In the present invention, it is desirable to use the transverse wave of the SV wave, that is, the transverse wave whose polarization direction is perpendicular to the surface of the device wall 512.

The reason is as follows.

A fluid such as a liquid is contained in the internal space 514 of the container 510, and ultrasonic waves propagate as longitudinal waves in the fluid. When the transverse ultrasonic waves inside the vessel wall 512 enter the internal space 514 of the container 510, they are converted into longitudinal waves by mode conversion. In this mode conversion, a component in which the polarization direction of the transverse wave is perpendicular to the surface of the device wall 512 is converted into a longitudinal wave in the internal space 514. Therefore, the ultrasonic wave can be efficiently incident on the internal space 514 by using the transverse wave including many polarization components perpendicular to the surface of the vessel wall 512.

A piezoelectric element is a specific configuration of the transverse wave probes 31a and 31b. In addition, a magnetostrictive element or an electromagnetic ultrasonic element (Electro-Magnetic Acoustic Transducer, EMAT) may be used as the transverse wave probes 31a and 31b. In Example 1, a piezoelectric element was used.

The longitudinal wave probe 34 is installed in the normal direction of the device wall 512. That is, the longitudinal wave probe 34 is installed outside the vessel wall 512 at a vertical angle to the surface of the vessel wall 512. In this specification, this is referred to as "installing the probe at a normal incident angle".

In the present specification, the installation at the “vertical incident angle” may be that the incident ultrasonic wave includes a component perpendicular to the device wall 512. The ultrasonic beam emitted from the ultrasonic probe has a spatial spread. Therefore, even if the ultrasonic probe is obliquely installed, if the ultrasonic beam entering the container wall 512 includes the component in the direction normal to the container wall 512, the ultrasonic probe is installed at the “vertical incident angle”. Considered a longitudinal wave probe. A longitudinal wave probe is defined as a probe that generates and receives ultrasonic waves containing longitudinal waves.

On the other hand, the transverse wave probe is installed outside the vessel wall 512 at an oblique angle with respect to the normal to the vessel wall 512. In this specification, this is referred to as “installing the probe at an oblique incident angle”.

The longitudinal wave probe 34 and the transverse wave probes 31a and 31b are installed on the shoe 40. The shoe 40 is installed on the vessel wall 512 of the container 510 in which the measurement target is stored. In the first embodiment, the shoe 40 is made of the same material as the vessel wall 512 of the container 510. However, in the present invention, the shoe 40 may be made of a material different from that of the container wall 512 of the container 510.

(Action)
Next, the operating principle of the present invention will be described below.

Consider an ultrasonic beam that is incident on the vessel wall from the transverse wave probes 31a and 31b at an in-wall refraction angle θ2.

FIG. 5 shows the relationship between the in-wall refraction angle θ2 and the internal space refraction angle θ1 when the material of the container wall 512 of the container 510 is steel. The vertical axis of FIG. 5 represents the internal space refraction angle θ1, and the horizontal axis represents the in-wall refraction angle θ2.

In the case of the probe unit different from the present invention, the internal space refraction angle θ1 was 14.5° at the maximum as shown in FIGS. 2 and 3, but in the case of the configuration of the first embodiment, FIG. As can be seen from the above, the internal space refraction angle θ1 can be increased to 28°.

The reason why the internal space refraction angle θ1 becomes large (widens) is that transverse ultrasonic waves are used. That is, in the case of transverse ultrasonic waves, the sound velocity is c2S=3200 m/sec, which is lower than the longitudinal wave sound velocity c2L=5900 m/sec, and is close to the sound velocity of the fluid (water in the first embodiment) in the internal space 514. This is because

Table 1 shows the longitudinal and transverse wave sonic velocities in some materials (steel, aluminum, acrylic).

As can be seen from Table 1, for many materials the shear wave velocity is about half the longitudinal wave velocity.

Therefore, when the transverse wave probes 31a and 31b installed at the oblique incidence angle are used, the internal space refraction angle θ1 can be increased, and the internal space emission angle θ1max can be increased.

The second point of the configuration of the present invention is that the longitudinal wave probe 34 installed at the vertical incident angle is combined. The transverse wave probes 31a and 31b installed at an oblique incidence angle cannot generate a beam having an internal space refraction angle θ1=0, that is, a beam incident in the normal direction of the device wall 512.

Therefore, the longitudinal wave probe 34 installed at the vertical incident angle can generate a beam whose internal space refraction angle θ1 is close to zero.

At the vessel wall-fluid interface, the transverse wave in the vessel wall 512 becomes a longitudinal wave in the fluid due to the mode conversion. The longitudinal wave in the vessel wall 512 remains in the fluid as well.

Therefore, the ultrasonic waves generated by the ultrasonic probe unit 20 having the configuration of the first embodiment according to the present invention are longitudinal ultrasonic waves in the fluid.

By doing so, it is possible to generate an ultrasonic beam with a large internal space emission angle θ1max.

Thereby, in ultrasonic tomography, a good image can be obtained even in the peripheral area of the observation area.

The above description has described the probe unit 20 on the transmission side. However, the probe unit on the receiving side has the same configuration as the probe unit on the transmitting side, and the effects of the present invention are the same for the probe unit on the receiving side. That is, also for the probe unit on the receiving side, a transverse wave probe installed at an oblique angle with respect to the normal to the vessel wall of the container 510 and a longitudinal wave probe installed at an angle perpendicular to the vessel wall. With tentacles.

On the receiving side, the ultrasonic beam enters the wall 512 from the internal space 514. At this time, if the internal space refraction angle θ1 is larger than the critical angle θ1max (that is, the internal space emission angle), total reflection occurs, and the ultrasonic wave does not reach the receiving side probe, so that the signal cannot be detected. The critical angle θ1max is determined by the above equation (2) on the receiving side as well. In the configuration of the present invention, the transverse ultrasonic wave in the vessel wall is received by the transverse wave probe. As described above, the sound velocity of the transverse ultrasonic wave is slower than that of the longitudinal wave, and thus the critical angle θ1max becomes large. Therefore, the effect of expanding the range of the receivable internal space refraction angle θ1 can be obtained.

The transverse ultrasonic waves in the vessel wall are generated by mode conversion when the longitudinal ultrasonic waves in the internal space enter the vessel wall.

Therefore, when the probe unit 20 having the configuration of the present invention is used, the ultrasonic waves reach the receiving-side probe even for a larger internal space refraction angle θ1.

(Installation in container)
FIG. 6 is a diagram showing wiring in the probe unit 20 according to the first embodiment of the present invention. In FIG. 6, the transverse wave probes 31a and 31b are electrically connected by a common wiring and are both connected to a transverse wave probe terminal 61, and the longitudinal wave probe 34 is connected to a longitudinal wave probe terminal 62. It As described above, the probe unit 20 includes two terminals, the transverse wave probe terminal 61 and the longitudinal wave probe terminal 62.

The probe unit 20 shown in FIG. 6 is installed on the outer surface of the vessel wall 512 of the container 510 to be measured as shown in FIG. The number of probe units 20 varies depending on the accuracy of information to be obtained by tomography, but is typically about 16 to 130. In the first embodiment, 32 probe units 20 are installed.

The transverse wave probe terminals 31a and 31b and the longitudinal wave probe terminal 34 of each probe unit 20 are connected to a measurement circuit unit described later by a cable. In addition, in FIG. 1, the illustration of the transverse wave probe terminal 61, the longitudinal wave probe terminal 62, and the cable is omitted.

(Definition of terms)
In this specification, terms are defined as follows.

Ns indicates the number of probe units 20.

The nth probe unit is called “channel n”. The probe unit 20 that transmits ultrasonic waves is called a transmission channel. Although the transmission channel changes sequentially, the probe unit 20 that transmits at a certain point is the transmission channel n1. The probe unit located at a position facing the channel n1 at that time is defined as the facing channel n0.

At that time, the probe unit 20 that receives ultrasonic waves is called a reception channel n2. There are a plurality of n2. More specifically, assuming that Ms defines the number of reception channel ranges, (2Ms+1) from the channel (n0-Ms) to the channel (n0+Ms) centering on the opposite channel n0 is the reception channel n2. To work as.

A fluid has a component of only the longitudinal wave of ultrasonic waves and does not have a transverse wave component, and is defined as containing a liquid and a gas.

Moreover, the container is solid, and the value obtained by dividing the longitudinal sound velocity c2 in the container wall by the sound velocity c1 of water exceeds 1.3 is defined as the container.

In the first embodiment, the number Ns of the probe units 20 is 32 and the number Ms of the receiving channel range is set to Ms=5. That is, the ultrasonic beam transmitted by a certain transmission channel n1 is received by (2Ms+1)=11 reception channels n2.

(Structure of measurement circuit section)
FIG. 7 is a diagram showing the configuration of the measurement circuit unit 200 according to the first embodiment of the present invention.

The measurement circuit unit 200 includes a multiplexer unit 210, a transverse wave transmission unit 221, a longitudinal wave transmission unit 224, a plurality of transverse wave reception units 241, a plurality of longitudinal wave reception units 244, a timing control unit 260, and a signal processing unit. And 270.

The cable from each probe unit 20 is connected to the multiplexer unit 210 of the measurement circuit unit 200. The transverse wave probe terminal of the first probe unit 20 is connected to the terminal 1-L, and the longitudinal wave probe terminal is connected to 1-S. Hereinafter, the same applies to the probe unit Ns, which are connected to 2-L, 2-S,..., (Ns)-L, (Ns)-S, respectively.

As described above, in the first embodiment, the number of probe units 20 is Ns=32 and the number of reception channel ranges is Ms=5.

Although the transmission channel n1 changes sequentially, here, the operation of the signal processing unit 270 will be described taking the case of the transmission channel n1=1 as an example. In the first embodiment, since the number Ns of the probe units 20 is 32, the counter channel n0=17 (positioned 17th from the transmission channel n0). The reception channels n2 are in the range of (n0-Ms) to (n0+Ms), that is, 11 in the range of channels 12 to 22.

The wiring is performed as follows by appropriately wiring in the multiplexer unit 210.

The transverse wave transmitters (TS) 221 are wired to the transverse wave probes 31a and 31b of the probe unit 20 of the channel 1, and the longitudinal wave transmitter (TL) 224 is wired to the longitudinal wave probe 34. The receiving circuits RS-1 to RS-M0 of the transverse wave receiving unit 241 are wired to the transverse wave probes 31a and 31b of the probe unit 20 of the channels 12 to 22 respectively, and the longitudinal wave receiving unit is provided to the longitudinal wave probe 34. 244 reception circuits RL-1 to RL-M0 are wired.

The transverse wave transmission unit (TS) 221 or the longitudinal wave transmission unit (TL) 224 is excited by a trigger signal from the timing control unit 260, and ultrasonic waves are transmitted from the probes 31a, 31b, and 34 of the channel 1. The transverse wave transmitter (TS) 221 and the longitudinal wave transmitter (TL) 224 may be excited at the same time.

Then, the reception circuits RS-1 to RS-M0 of the transverse wave reception unit 241 or the reception circuits RL-1 to RL-M0 of the longitudinal wave reception unit 244 are after the delay time set by the control signal of the timing control unit 260. , Gets the waveform or amplitude value of the received signal. The transverse wave receiving unit 241 has M0 receiving circuits RS-1 to RS-M0, and the longitudinal wave receiving unit 244 also has M0 receiving circuits RL-1 to RL-M0. Here, M0=2Ms+1=11.

The received signal waveforms acquired by the transverse wave reception unit 241 and the longitudinal wave reception unit 244 are sent to the signal processing unit 270, and signal settling processing such as noise removal and signal processing such as analog-digital conversion are performed. Then, it is sent to the feature extraction unit 271.

The feature extraction unit 271 extracts the feature amount of the received signal at an appropriate delay time. Examples of the characteristic amount include the amplitude value and phase of the signal. The extracted signal feature amount is stored in the memory unit 272 for each transmission channel and reception channel. Further, the signal feature amount extracted by the feature extraction unit 271 is transmitted to the display unit 273 outside the measurement circuit 200 and displayed. In this case, the feature extraction unit 271 can also be configured to image the fluid state from the signal feature amount and supply an image signal representing the fluid state to the display unit 273. In that case, the signal processing unit 270 and the feature extraction unit 271 constitute a fluid state imaging unit.

The delay time for extracting the characteristic amount of the received signal is set to an appropriate value in advance by using the path length of the ultrasonic waves and the sound velocity. Since the path length differs depending on the reception channel, the preset delay time also differs for each reception channel.

In the first embodiment, the amplitude value is extracted as the signal feature amount. In addition, in the first embodiment, the distribution of the gas phase (void) in the fluid is calculated by the image reconstruction processing known by tomography, using the information of the amplitude value in each combination of the transmission channel and the reception channel. To do.

Further, when the phase is extracted as the signal feature amount, the spatial distribution of the sound velocity in the fluid can be obtained by image reconstruction processing using tomography. Since the speed of sound changes depending on the temperature of the fluid, the temperature distribution in the fluid can be obtained from the sound speed distribution.

Further, the sonic velocity has a relationship between the fluid density ρ and the bulk modulus K as shown in the following equation (3).

Therefore, by obtaining the sound velocity distribution, it is possible to obtain the density distribution and the bulk elastic modulus distribution in the fluid.

FIG. 8 is a diagram schematically showing how a received signal is obtained according to the first embodiment of the present invention.

In the example shown in FIG. 8, the transmission channel is n1=1, and the probe unit 20 in the position facing the transmission channel is the channel n0=17. The number of receiving channels is Ms=5 on both sides of the channel n0. That is, the reception channels are channels 12 to 22.

As shown in FIG. 8, the propagation path length of the ultrasonic wave in the fluid in the receiving channel differs depending on the relative positional relationship between the transmitting channel and the receiving channel, so the delay time (gate delay time) to be observed is Depends on the channel.

In the configuration of the measurement circuit unit 200 according to the first embodiment illustrated in FIG. 7, the number of the receiving units 241 and 244 is 2×M0=2×(2Ms+1), and the receiving units independent of each other are provided. There is an advantage that 2×M0 reception channels can be received by one transmission of the ultrasonic beam and a signal can be received in a short time.

Next, the transmission channel n1=2 is set, the reception channel center is set to n0=18, and the channels (n0-Ms) to (n0+Ms) are set as the reception channel. Then, the signal feature amount is extracted by the same operation as described above and stored in the memory unit 272.

By repeating the above procedure while changing the transmission channel n1, the actual measurement data of the reception signal characteristic amount is acquired for each combination of the transmission channel and the reception channel.

Using this data, an image reconstruction algorithm is used to obtain an image of the distribution of the gas phase in the fluid on the display unit 273.

As described above, according to the first embodiment of the present invention, the transverse wave probes 31a, 31b are obliquely provided from the outside of the vessel wall 512 of the container 510 containing the measurement fluid with respect to the normal line of the vessel wall 512. To generate and receive the ultrasonic wave of the transverse wave toward the inside of the container 510, and generate and receive the ultrasonic wave of the longitudinal wave toward the inside of the container 510 by the longitudinal wave probe 34 from the normal direction of the vessel wall 512. Since it is configured to maintain the divergence angle of the ultrasonic beam satisfactorily, it realizes an ultrasonic measuring device that can measure the state of the fluid in the container having the vessel wall with high accuracy while suppressing the deterioration of the image quality. can do.

(Example 2)
Second Embodiment Next, a second embodiment according to the present invention will be described with reference to FIGS.

The configuration of the probe unit 20 used in the second embodiment and the installation configuration on the measurement target are the same as those in the first embodiment. The second embodiment is characterized in that the number of circuits of the measurement circuit unit 200 is reduced and the low cost ultrasonic measurement apparatus and fluid monitoring system are provided.

FIG. 9 is a diagram showing the configuration of the measurement circuit unit 200A used in the second embodiment.

In FIG. 9, the measurement circuit unit 200A includes a multiplexer unit 210, a transmission unit 220, a reception unit 240, a timing control unit 260, and a signal processing unit 270. Furthermore, the feature extraction unit 271 and the memory unit 272 are provided. Although not shown in FIG. 9, a display unit 273 is connected to the feature extraction unit 271 outside the measurement circuit unit 200A as in FIG.

The cable of each probe unit 20 is connected to the multiplexer unit 210 of the measurement circuit unit 200A. The transverse wave probe terminals 31a and 31b of the first probe unit 20 are connected to the terminal 1-L, and the longitudinal wave probe terminal 34 is connected to the terminal 1-S. Hereinafter, similarly to the probe unit Ns, the terminals 2-L, 2-S,..., (Ns)-L, (Ns)-S are connected.

In the second embodiment, the number of probe units 20 is Ns=32, and the number of receiving channels is Ms=5.

In the second embodiment, the receiving unit 240 has two functions of a transverse wave receiving unit and a longitudinal wave receiving unit, and can receive the transverse wave and the longitudinal wave. Specifically, the receiving unit 240 includes M0=(2Ms+1) receiving circuits R-1 to R-M0.

The transmitter 220 has two functions of a transverse wave transmitter and a longitudinal wave transmitter, and can transmit a transverse wave and a longitudinal wave.

FIG. 10 is a flowchart showing the operation process of the measurement circuit unit 200A in the second embodiment.

In the second embodiment, there are two steps, a transverse wave receiving step 611 and a longitudinal wave receiving step 614.

The operation in the combination of the transmission channel n1=1, the opposite channel n0=17, and the reception channel n2=(n0-Ms) to (n0+Ms)=12 to 22 will be described.

First, the operation of the transverse wave reception step 611 is performed. In step 611, the transmitter 220 is connected to the transverse wave probes 31a and 31b of the transmission channel n1 (selected probe unit among the plurality of probe units). For each reception channel, the receiving circuits R-1 to R-M0 (a plurality of other probe units other than the selected one probe unit) of the receiver 240 are connected to the transverse wave probes 31a and 31b. To do. In this state, the same operation as that of the first embodiment (transmission and reception of transverse ultrasonic waves) is performed, the reception signal characteristic amount of each reception channel is stored in the memory unit 272, and displayed on the display unit 273.

Next, the process proceeds to longitudinal wave reception step 614. In this step 614, the transmission circuit (T) 220 is connected to the longitudinal wave probe 34 of the transmission channel n1. For each reception channel, the longitudinal wave probe 34 is connected to the receiver circuits R-1 to R-M0. In this state, the same operation as that of the first embodiment (transmission and reception of longitudinal ultrasonic waves) is performed, the reception signal characteristic amount of each reception channel is stored in the memory unit 272, and displayed on the display unit 273.

Next, the transmission channel is changed to a combination of n1=2, opposite channel n0=18, and reception channel n2=(n0-Ms) to (n0+Ms)=13 to 23, and similarly, the transverse wave reception step 611 and the longitudinal wave reception are performed. Repeat the receiving step 614.

It goes without saying that the effects of the second embodiment can be obtained even if the order of the transmission channels n1 is changed appropriately. Further, the longitudinal wave receiving step 614 may be performed first, and then the transverse wave receiving step 611 may be performed.

Further, in the transverse wave reception step 611, the transmission channel n1 is switched (scanned) to perform the measurement, and then, in the longitudinal wave reception step 614, the transmission channel is switched (scanned) to perform the measurement. ..

As described above, according to the configuration of the second embodiment, the same effect as that of the first embodiment can be obtained, and the number of circuits of the measurement circuit unit 200 can be reduced to about half as compared with the first embodiment. There is an effect that it is possible to realize a low-cost ultrasonic measuring device.

(Example 3)
Next, a third embodiment of the present invention will be described with reference to FIG.

FIG. 12 is a schematic configuration diagram of an ultrasonic measurement device that is Embodiment 3 of the present invention. The ultrasonic measuring device according to the third embodiment includes a transmitting probe unit 20T and a plurality of receiving probe units 20R. The transmission probe unit 20T may be one.

The transmitting probe unit 20T and the receiving probe unit 20R are supported by a fixture 411, and this fixture 411 is installed on the outer peripheral side of the container 510 containing the fluid to be measured. The transmitting probe unit 20T and the receiving probe unit 20R are supported on the inner peripheral side of the fixture 411. The ultrasonic measuring device according to the third embodiment includes a rotating mechanism 412, and the fixing mechanism 411 is rotated by the rotating mechanism 412. As a result, the transmitting probe unit 20T and the receiving probe unit 20R supported by the fixture 411 rotate on the outer peripheral side of the container 510. Ultrasonic waves are transmitted from the transmitting probe unit 20T at a certain rotational position of the fixture 411, and ultrasonic signals are received by the plurality of receiving probe units 20R.

Next, by rotating the fixture 411 by the rotating mechanism 412, the transmitting probe unit 20T is arranged at another rotating position, and ultrasonic signals are transmitted/received. By repeating this, it is possible to acquire the ultrasonic feature amount signal necessary for tomography.

The other configurations of the third embodiment can be the same as those of the first or second embodiment.

According to the configuration of the third embodiment, it is possible to reduce the number of probe units, and it is possible to realize a low-cost ultrasonic measuring device and fluid monitoring system.

Furthermore, in the third embodiment, it is more preferable to include the rotational position sensor 413.

The rotational position sensor 413 may be any sensor that measures the rotational position (rotation angle) of the fixture 411. In the third embodiment, an optical sensor can be used. Specifically, a slit pattern is printed on the side surface of the fixture 411, and the number of slits crossed during rotation of the fixture 411 is counted by an optical means such as a laser or a light emitting diode. Thereby, the rotational position of the fixture 411 can be accurately measured.

As the rotational position sensor 413, some sensors such as a magnetic sensor are known in addition to the optical sensor, and those means may be used.

According to the third embodiment, the same effects as those of the first and second embodiments can be obtained, and the rotational position sensor 413 is used to determine the rotational position of the fixture 411, that is, the probe units 20T and 20R. Accurately detecting the rotational position of is effective in accurately measuring the spatial distribution of the characteristic amount of the target fluid.

The information detected by the rotation position sensor 413 may be fed back to the rotation mechanism 412 to improve the accuracy of the rotation operation. Alternatively, the information detected by the rotational position sensor 413 may be input to the measurement circuit unit 200 or 200A to reflect the highly accurate rotational position information when performing image reconstruction.

(Example 4)
Next, a fourth embodiment of the present invention will be described with reference to FIG.

FIG. 13 is a schematic configuration side view of an ultrasonic measurement device that is Embodiment 4 of the present invention. In the fourth embodiment, the pipe 510A is used as a container for containing the fluid to be measured, and the flow rate of the fluid flowing in the pipe 510A is measured.

In FIG. 13, a plurality of ultrasonic probe units 20 are installed outside the pipe 510A. The ultrasonic probe unit 20 has the same configuration as that of the first embodiment. The measurement circuit unit 200 according to the first embodiment or the measurement circuit unit 200A according to the second embodiment is applied to the measurement circuit unit. Although FIG. 13 is a side view and is difficult to understand, a plurality of ultrasonic probe units 20 are installed along the circumference of the pipe 510A as in the case shown in FIG.

Further, a flow rate measurement ultrasonic probe 322 is installed in the pipe 510A. If necessary, the flow rate measurement ultrasonic probe 322 is installed in the pipe 510A using the shoe 340.

In FIG. 13, the transmission path of the ultrasonic beam is schematically shown by a dotted arrow.

In the flow rate measurement, ultrasonic waves are transmitted from the flow rate measurement ultrasonic probe 322, and a signal reflected by bubbles in the fluid in the pipe 510A is received by the flow rate measurement ultrasonic probe 322. The velocity of the fluid can be detected by examining the phase change of the received signal. This is a flow measurement method known as an ultrasonic Doppler method. In the fourth embodiment, the flow rate can be measured using this method. The operation of checking the phase change of the received signal and detecting the velocity of the fluid can be executed by the feature extraction unit 271 of the measurement circuit unit 200 or 200A.

In addition to this, as a flow rate measuring method, there is also known a method of measuring the propagation time of ultrasonic waves in the upstream direction and the downstream direction of the fluid flow between two probes and measuring the flow velocity of the fluid from the difference. However, this method may be used.

Also in the fourth embodiment, the same effects as those of the first and second embodiments can be obtained, and the following effects can be obtained.

In the fourth embodiment, the ultrasonic probe 322 for flow rate measurement measures the flow velocity of the liquid phase to be measured, and the probe unit 20 for tomography is used to measure the spatial distribution of the gas phase. Then, from the spatial distribution of the gas phase, the gas-liquid ratio, that is, the ratio of the gas phase to the pipe cross-sectional area is obtained. Accurate flow rate can be measured for gas-liquid two-phase flow by integrating the measured flow velocity and gas-liquid ratio.

(Example 5)
Next, a fifth embodiment of the present invention will be described with reference to FIG.

FIG. 14 is a schematic configuration diagram of an ultrasonic measurement device that is Embodiment 5 of the present invention.

The fifth embodiment is an example in which a fluid in a reaction vessel 510B used in a chemical plant or the like is a measurement target.

In FIG. 14, the raw material is introduced into the reaction vessel 510B from the raw material pipe 531 and the product after the reaction is taken out from the product pipe 532.

A plurality of ultrasonic probe units 20 are installed outside the reaction container 510. Although FIG. 14 is a side view and is difficult to understand, a plurality of ultrasonic probe units 20 are installed along the circumference of the reaction vessel 510B as shown in FIG. Then, each of the plurality of probe units 20 is connected to the measurement circuit unit 200.

The configuration of the measurement circuit unit 200 is the same as that of the first embodiment, but the configuration of the measurement circuit unit 200A of the second embodiment is also possible.

In the fifth embodiment, the reception signal (ultrasonic wave) measured by the ultrasonic probe 20 is supplied to the characteristic extraction unit 271 of the measurement circuit unit 200, and the phase is extracted as the signal characteristic amount. Based on the extracted phase, the spatial distribution of sound velocity in the fluid in the reaction vessel 510B can be known. Accordingly, it is possible to measure the spatial distribution of the product that is the fluid in the reaction vessel 510B.

The feature extraction unit 271 stores the extracted phase as a signal feature amount in the memory unit 272 and supplies it to the display unit 273.

The spatial distribution of the product in the reaction vessel 510B may be calculated by the feature extraction unit 271 or may be calculated by the external display unit 273 and the calculated spatial distribution may be displayed as an image.

Also in Example 5, the same effects as in Examples 1 and 2 can be obtained, and the spatial distribution of the product in the reaction vessel 510B can be measured.

(Example 6)
Next, a fluid monitoring system that is Embodiment 6 of the present invention will be described using FIG.

The sixth embodiment is a fluid monitoring system that uses the ultrasonic measurement apparatus of the fifth embodiment to monitor the fluid state of the fluid inside the fluid device and detect the occurrence of an abnormality.

The fluid device is a device containing a fluid such as a liquid, and specifically includes a reaction container used in a chemical plant or a food plant, a pipe used in a plant or the like. In Example 6, an example of a reaction container will be described as a fluid device.

FIG. 15 shows an example in which a fluid monitoring system 550 is installed in a reaction vessel 510B similar to that in the fifth embodiment.

In FIG. 15, a plurality of ultrasonic probe units 20 are installed outside the reaction container 510B. Although it is difficult to understand because FIG. 15 is a side view, a plurality of ultrasonic probe units 20 are installed along the circumference of the reaction vessel 510B as in the case shown in FIG. Each of the plurality of probe units 20 is connected to the measurement circuit unit 200.

In the sixth embodiment, the configuration of the measurement circuit unit 200 is similar to that of the first or second embodiment (measurement circuit 200A).

In the sixth embodiment, the phase is measured as the signal characteristic amount. As described in the fifth embodiment, the spatial distribution of the sound velocity can be known based on the phase. Thereby, the spatial distribution of the product in the reaction vessel 510B can be measured.

The measurement result of the spatial distribution of the product is sent from the measurement circuit unit 200 to the abnormality detection unit 551. The abnormality detection unit 551 monitors whether the measured spatial distribution has an abnormality. Known methods of detecting an abnormality include a method using a threshold, a method using a machine learning method, and a method for calculating an abnormal characteristic value from a spatial distribution.

The database unit 552 is connected to the abnormality detection unit 551 as necessary. The abnormality detection unit 551 can execute the abnormality detection by the machine learning method using the information of the database unit 552.

The abnormality detection unit 551 outputs an abnormality detection signal 555. The abnormality detection signal 555 is transmitted to the monitor display unit 553, and the occurrence of abnormality is displayed at the time of abnormality.

The components included in the fluid monitoring system 550 of the sixth embodiment are an ultrasonic measurement device (probe unit 20, measurement circuit unit 200), an abnormality detection unit 551, and a monitoring display unit 553.

If necessary, the fluid monitoring system 550 further includes a fluid device controller 558, and the abnormality detection signal from the abnormality detector 551 is also transmitted to the fluid device controller 558. The fluid device control unit 558 controls the treatment process related to the fluid device, that is, the reaction container 510B in the sixth embodiment. For example, the flow rate of the raw material in the raw material pipe 531, the operation of the product pipe 532, the temperature of the reaction vessel 510B, and the like are controlled.

The fluid monitoring system 550 can further include the database unit 552 described above.

The monitor display unit 553 may also serve as the control display unit of the fluid device control unit 558. As an example, an in-screen area for notifying the occurrence of an abnormality is provided in the terminal screen of the fluid device control unit 558, and the occurrence of the abnormality is notified there.

According to the sixth embodiment of the present invention, the ultrasonic measuring device of the fifth embodiment, the abnormality detection unit 551, and the monitor display unit 553 are provided, and the state of the fluid in the reaction container having the vessel wall is reduced in image quality. It is possible to realize a fluid monitoring system capable of suppressing the above and measuring and monitoring with high accuracy.

The fluid monitoring system 550 of the sixth embodiment can be applied not only to the reaction container 510B but also to the containers and piping shown in the first to fourth embodiments.

In the first to sixth embodiments of the present invention described above, the probe unit 20 is configured to include two transverse wave probes 31a and 31b, but is configured to include only one transverse wave probe. You can also

In the present invention, the proposed embodiments may be carried out alone, or in some cases, a plurality of embodiments may be combined and carried out.

The present invention can be embodied in various other forms without departing from the spirit or the main characteristics thereof.

Needless to say, the examples described in the present specification are merely examples and should not be construed as limiting.

10... Ultrasonic measuring device, 20... Ultrasonic probe unit, 31a, 31b... Transverse wave probe, 34... Longitudinal wave probe, 40... Shoe, 61... -Transverse wave probe terminal, 62... Longitudinal wave probe terminal, 200, 200A... Measuring circuit section, 210... Multiplexer section, 220... Transmitting section, 221... Transverse wave transmitting section, 224...longitudinal wave transmitter, 240...receiver, 241...transverse wave receiver, 244...longitudinal wave receiver, 260...timing controller, 270...signal processor, 271 ... Feature extraction unit, 272... Memory unit, 273... Display unit, 411... Fixing device, 412... Rotation mechanism, 413... Rotation position sensor, 510, 510A, 510B... -Container, 512... Instrument wall, 514... Inner space, 516... Instrument wall outer space, 550... Fluid monitoring system, 551... Abnormality detection section, 553... Monitoring display section

Claims (13)

A transverse wave probe installed at an oblique angle with respect to the normal to the vessel wall of the container in which the fluid to be measured is stored, and a longitudinal wave probe installed at an angle perpendicular to the vessel wall of the vessel. And a plurality of probe units arranged outside the container,
A measurement circuit unit to which the plurality of probe units are connected,
An ultrasonic measuring device, comprising: an ultrasonic wave measuring device configured to receive ultrasonic waves generated from the transverse wave probe and the longitudinal wave probe, and measure a fluid state of a measurement target fluid contained in the container. The ultrasonic measuring device according to claim 1,
Each of the plurality of probe units includes a first shear wave probe and a second shear wave probe, and the first shear wave probe and the second shear wave probe are common. An ultrasonic measuring device characterized in that it is electrically connected by wiring. The ultrasonic measuring device according to claim 1,
The measurement circuit unit includes a transverse wave transmitter, a longitudinal wave transmitter, a transverse wave receiver, a longitudinal wave receiver, and a multiplexer unit, and is selected by the multiplexer unit of the plurality of probe units. The transverse wave probe of the selected probe unit is driven by the transverse wave transmitter, and the longitudinal wave probe of the selected probe unit is driven by the longitudinal wave transmitter. Ultrasonic measuring device. The ultrasonic measuring device according to claim 1,
A fixture for supporting the plurality of probe units,
An ultrasonic measurement device, comprising: a rotation mechanism that rotates the fixture. The ultrasonic measuring device according to claim 1,
An ultrasonic measuring device, further comprising: an ultrasonic probe for measuring a flow velocity of the fluid to be measured. The ultrasonic measuring device according to claim 1,
The ultrasonic measurement device according to claim 1, wherein the measurement circuit includes a fluid state imaging unit that images the fluid state of the measurement target fluid based on the ultrasonic waves received from the plurality of probe units. The ultrasonic measuring device according to claim 6,
The ultrasonic measurement device further comprising a display unit that displays a fluid state of the measurement target fluid imaged by the fluid imaging unit. The ultrasonic measuring device according to claim 1,
The measurement circuit unit includes a transmitter that transmits a transverse wave and a longitudinal wave, a receiver that receives the transverse wave and a longitudinal wave, and a multiplexer unit,
By the multiplexer unit,
A transmitting unit that transmits the transverse wave and the longitudinal wave is connected to the transverse wave probe of the one selected probe unit of the plurality of probe units, and other than the selected one probe unit. The receiving unit for receiving the transverse wave and the longitudinal wave is connected to the transverse wave probe of the other plurality of probe units, transmission and reception of transverse wave ultrasonic waves are performed,
A transmitting unit that transmits the transverse wave and the longitudinal wave is connected to the longitudinal wave probe of the selected one probe unit, and the transverse wave and the longitudinal wave probe of the plurality of other probe units are connected to the longitudinal wave probe. An ultrasonic measuring device, wherein a receiving unit for receiving a longitudinal wave is connected to transmit and receive a longitudinal ultrasonic wave. The ultrasonic measuring device according to claim 1,
The container is a reaction container, the fluid to be measured is a product of the raw material introduced into the reaction container, the measurement circuit unit measures the phase of the ultrasonic waves received by the probe unit, An ultrasonic measuring device characterized by measuring the spatial distribution of the product. An ultrasonic measuring device according to claim 1 or 6,
An abnormality detection unit connected to the measurement circuit unit,
A monitoring display unit that displays an abnormality detection signal output by the abnormality detection unit,
A fluid monitoring system comprising: The ultrasonic measurement device according to any one of claims 1, 2, 3, 5, 6, 7, 8, and 9,
The ultrasonic wave measuring device, wherein the transverse wave probe generates and receives transverse wave ultrasonic waves, and the longitudinal wave probe generates and receives longitudinal wave ultrasonic waves. The ultrasonic measurement device according to any one of claims 1 to 8,
The ultrasonic measurement device, wherein the fluid to be measured is a liquid. The ultrasonic measurement device according to any one of claims 1 to 8,
The ultrasonic measuring device, wherein the container is solid, and a value obtained by dividing the longitudinal wave sound velocity in the container wall by the sound velocity of water exceeds 1.3.

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