JP6735577B2 - Seal structure - Google Patents

Description

The present invention relates to a seal structure .

Conventionally, a seal structure using metal seals 43 and 44 as shown in FIGS. 5 and 6 is known (see, for example, FIG. 11 and FIG. 12 of Patent Document 1).
That is, the metal seal 43 shown in FIG. 5 has a substantially rectangular cross-sectional shape having vertically symmetrical small triangular protrusions 47 and 48 that are pressed against two mutually parallel planes 41 and 42, and the two parallel planes. 41 and 42 are formed on a flat surface. (It should be noted that in FIG. 5, the triangular small protrusions 47 and 48 are drawn as if they extremely deeply cut into the planes 41 and 42.)
In the unused state (not shown), the metal seal 44 shown in FIG. 6 has a rectangular cross section and has a first flat surface portion 51 and a second flat surface portion 52. Triangular small convex stripes 49, 50 are provided on the flat surfaces 41, 42. (In FIG. 6, the triangular small convex stripes 49, 50 are drawn as if they extremely deeply cut into the first and second flat surface portions 51, 52.)

In addition, in FIG. 7 showing another conventional example, it shows an unassembled state, the metal seal 45 is a C ring with a spring, and the mating flat surfaces 41 and 42 are flat without small ridges. Is a face. In FIG. 8 showing still another conventional example, the metal seal 46 has a rectangular cross section having flat surface-shaped first and second flat surface portions 51 and 52 (similar to FIG. 6), and On the two flat surfaces 41, 42, small ridges 49, 50 are formed in a protruding shape as a round mountain shape.
As described above, in the conventional seal structure, the metal seals 43, 44, 45 and 46 are vertically symmetrical as shown in FIGS. 5 to 8 and are flat on the mating (mounting) side. 41 and 42 were also vertically symmetrical.

Japanese Utility Model Publication No. 3-91572

Conventionally, as shown in FIGS. 5 to 8, if the two planes 41 and 42 on the mating (mounting) side are vertically symmetrical (with the same shape), there is no problem at all.
However, in a semiconductor manufacturing line or the like, for example, it is necessary to attach a large number of small devices such as a mass flow controller and a pressure gauge to a large-sized device body. As shown in FIG. 5 to FIG. 8, when not symmetrical vertically--that is, one of the two planes 41 and 42 has the small convex line 49 or the small convex line 50 and the other is a flat surface asymmetrical In case of --- occurs.

In the case of asymmetry as described above, the conventional metal seal cannot be used (used), and the mounting-side flat surface 42 of the small device must be replaced with one having a different shape. In a large-sized device body having a connection part, a lot of time loss and labor loss may occur.
Alternatively, it is necessary to confirm in advance the shape of the flat surface 41 of the flow path connecting portion on the main body side of the large apparatus, which causes time loss and labor loss such as going to a factory in a remote place.

Therefore, in the present invention, in a seal structure including a metal seal for sealing between two opposing flat surfaces, the metal seal includes a first flat surface portion and a second flat surface portion that are parallel to each other, and with an overall plan section closed circular small projection is protruded, the second flat section is Ri flat surface shape der entire closed loop of the small convex strip in one of the two planes is projected, The second flat surface portion corresponds to the small ridge, and a sealing flat surface portion in the shape of an entire closed ring is formed on the other of the two flat surfaces, and the first flat surface portion corresponds to the sealing flat surface portion. Of the above-mentioned small projections are assembled in a corresponding manner, and a shallow concave portion is provided in each of the first member and the second member that are connected to each other, and the bottom surface of the concave portion has the above-mentioned two planes. And an outer peripheral surface that forms a seal positioning inner peripheral surface with the inner peripheral surface of the recessed portion and interconnects the outer peripheral edge edges of the first flat surface portion and the second flat surface portion that are entirely closed annular, A positioning fitting surface that fits on the seal positioning inner peripheral surface is formed, and the outer peripheral surface is formed with a large-diameter outer peripheral surface and a small-diameter outer peripheral surface, and the outer peripheral edge of the first plane portion, A chamfer is formed in the corner portion with the small diameter outer peripheral surface for guiding the fitting, and a corner portion between the outer peripheral edge of the second flat surface portion and the large diameter outer peripheral surface is for guiding the fitting. Is chamfered.

Further, the small protrusion having the whole closed ring shape is provided so as to overlap with the small convex strip having the whole closed ring shape when viewed from the axial direction.

According to the present invention, one of the two flat surfaces to be hermetically sealed is provided with a small ridge and the other is formed with a flat surface portion----in the case of asymmetry----which can be mounted and is stable. Can exhibit sealing performance (sealability). Moreover, when the metal seal is fitted into the shallow concave portion, the metal seal can be fitted smoothly while being guided and the assembly (connection) work can be performed easily and quickly.

It is a principal part expanded sectional view which shows one Embodiment of this invention. It is a principal part expanded sectional view which shows other embodiment. It is a figure for demonstrating the usage method and effect|action of a metal seal which concerns on this invention. It is an enlarged cross-sectional explanatory view of a main part. It is a principal part expanded sectional view which shows a prior art example. It is a principal part expanded sectional view which shows another prior art example. It is a principal part expanded sectional view which shows another prior art example. It is a principal part expanded sectional view which shows another prior art example.

Hereinafter, the seal structure according to the present invention will be described in detail based on the illustrated embodiment.
In FIG. 1 or FIG. 2, reference numeral 1 denotes a metal seal that seals between _two opposing planes P ₁ and P ₂ . Specifically, each of the first member 11 and the second member 12 connected to each other is provided with a shallow concave portion 21, 22 and the bottom surface 21A of the lower concave portion 21 constitutes _one plane P ₁ . In addition, the bottom surface (back surface) 22A of the upper concave portion 22 constitutes the other plane P ₂ .
As shown in FIGS. 4 and 1 and 2, the metal seal 1 has a closed circular shape as a whole and has a cross-sectional shape having a first flat surface portion 31 and a second flat surface portion 32 which are parallel to each other. In addition, the first flat surface portion 31 is provided with the small projection 2 having an entirely closed ring shape, and the second flat surface portion 32 is flat and has no small projection. The first plane portion 31 and the second plane portion 32 coincide with a plane orthogonal to the axis L ₀ . That is, it is a plane shape orthogonal to the axis.

By the way, the inner peripheral surfaces of the concave recesses 21 and 22 formed in the first member 11 and the second member 12 form seal positioning inner peripheral surfaces 23 and 24, respectively. In the metal seal 1, the outer peripheral surface 35 connecting the outer peripheral edges 33 and 34 of the first flat surface portion 31 and the second flat surface portion 32 to each other is the inner peripheral surface of the seal positioning of the concave recess portions 21 and 22. Fits on 23 and 24.
In other words, the outer peripheral surface 35 of the metal seal 1 forms the positioning fitting surface 36 that fits into the seal positioning inner peripheral surfaces 23, 24 of the mating concave side recessed portions 21, 22. The recesses 21 and 22 (and the flow path holes 3 and 4) are connected while being centered and positioned so that the axis L ₀ of the metal seal 1 coincides with the axes L ₃ and L ₄ .

By the way, as shown in FIG. 4, the outer peripheral surface 35 of the metal seal 1 is composed of a large-diameter outer peripheral surface 35A and a small-diameter outer peripheral surface 35B via a stepped portion 37.
On _{one of} the two planes P ₁ and P ₂ , a small convex strip 5 having a generally closed ring shape is provided so as to project. In FIG. 1, the small ridge 5 is projected on the plane P ₁ formed by the bottom surface 21A of the recess 21 formed in the first member 11. The flat surface-shaped second flat surface portion 32 of the metal seal 1 corresponds to the small ridges 5 (as shown in FIG. 1). Further, the other of the two planes P ₁ and P ₂ is provided with an overall closed ring-shaped sealing flat surface portion. In FIG. 1, the plane P ₂ formed of the bottom surface 22A of the recess 22 formed in the second member 12 constitutes a sealing flat surface portion (without small ridges), and the sealing flat surface portion is covered with the metal seal 1 The small projections 2 of the first flat surface portion 31 are assembled so as to correspond to each other.

In the embodiment shown in FIG. 1, the inner diameter dimension of the seal positioning inner peripheral surface of the lower concave portion 21 is set larger than the inner diameter dimension of the seal positioning inner peripheral surface 24 of the upper concave portion 22. A large-diameter outer peripheral surface 35A of the metal seal 1 is fitted to the inner peripheral surface 23 having a large inner diameter of the lower concave portion 21, while the large inner peripheral surface 35A of the metal seal 1 is fitted to the inner peripheral surface 23 having a large inner diameter. The small-diameter outer peripheral surface 35B of the metal seal 1 is fitted to the peripheral surface 24.
In this way, the outer peripheral surface 35 of the metal seal 1 is formed with the large diameter outer peripheral surface 35A and the small diameter outer peripheral surface 35B, and the recessed portions 21, 22 recessed in the first member 11 and the second member 12 have large diameter dimensions. By providing a difference in small diameter dimension, the flat surface-shaped second flat surface portion 32 of the metal seal 1 corresponds to the small ridge 5, and the small projection 2 of the first flat surface portion 31 has a flat surface shape. There is an advantage that it is possible to prevent an error during connection (assembly) work, corresponding to the bottom surface 22A.

Next, in FIG. 2, on the plane P _{1 formed} of the bottom surface 21A of the concave portion 21 of the first member 11, the entire flat ring-shaped sealing flat surface (the small convex strips 5 of FIG. 1 are omitted) is formed. The surface portion is formed. The metal seal 1 shown in FIG. 1 is turned upside down with respect to this sealing flat surface portion, and the small protrusions 2 of the first flat surface portion 31 of the metal seal 1 are made to correspond and assembled. Further, a small convex strip 5 is provided on a plane P ₂ formed by the bottom surface 22A above the concave portion 22 of the second member 12. The flat surface-shaped second flat surface portion 32 of the metal seal 1 corresponds to the small ridge 5.
In FIG. 2, the inner diameter dimension of the inner peripheral surface 23 of the lower concave portion 21 is set smaller than the inner diameter dimension of the inner peripheral surface 24 of the upper concave portion 22. The small-diameter outer peripheral surface 35B of the metal seal 1 is fitted to the inner peripheral surface 23 of the lower concave recess portion 21 having the small inner diameter dimension, while the small inner peripheral surface 35B of the upper concave recess portion 22 is fitted to the inner peripheral surface 24 of the large inner diameter dimension. The large-diameter outer peripheral surface 35A of the metal seal 1 is fitted.
In FIG. 2, it is impossible to assemble the metal seal 1 by reversing it from that shown in FIG. That is, the flat surface-shaped second flat surface portion 32 of the metal seal 1 corresponds to the small ridge 5, and the small projection 2 of the first flat surface portion 31 corresponds to the flat surface-shaped bottom surface 21A. ) There is an advantage that it is possible to reliably prevent mistakes during work.

As shown in FIG. 4 and FIGS. 1 and 2, in the metal seal 1, the corners between the outer peripheral edges 33, 34 of the first flat surface portion 31 and the second flat surface portion 32 and the outer peripheral surface 35 are The chamfer 10 is notched so that when the outer peripheral surface 35 of the metal seal 1 is fitted into the inner peripheral surfaces 23 and 24 of the concave recesses 21 and 22, the fitting can be smoothly guided.
In addition, as shown in FIGS. 1 and 2, it is desirable to set the diameter of the top of the small protrusion 2 having a totally closed annular shape and the diameter of the small protrusion 5 having a totally closed annular shape to be equal to each other. .. That is, the small protrusions 2 are provided so as to overlap with the small protrusions 5 when viewed from the direction along the axis L ₀ . In this way, in the connected state, the metal seal 1 is not twisted, and the sealing action can be performed while maintaining the correct cross-section posture.

The material of the metal seal 1 is preferably stainless steel from the viewpoint of corrosion resistance. However, other metals can be freely used depending on the application, the fluid to be sealed, and the like. Further, it is desirable that the material of at least the concave portions 21 and 22 of the first member 11 and the second member 12 is made of stainless steel. However, other metals can be used depending on the application, the fluid to be sealed, and the like. Further, the metal seal 1 according to the present invention has, for example, an annular shape having an outer diameter of 6 mm to 12 mm.
Then, assuming that the radial dimension in the cross section of the metal seal 1 according to the present invention is W and the thickness dimension is T (see FIG. 4), 0.5·W≦T≦1.5·W is satisfied. Is desirable. That is, it is different from a plate-like seal like a so-called gasket.
The conventional metal seals 43, 44, 45, 46 have a symmetrical shape (vertical symmetry) with respect to the mounting surface as shown in FIGS. 5 to 8. However, the metal seal 1 according to the present invention has It can be said that the shape is asymmetrical (vertical asymmetry).

In FIG. 3, an application example of the metal seal 1 according to the present invention will be described, and the operation and advantages of the metal seal 1 of the present invention will be described.
For example, a large number of flow path (pipe) connecting portions 13 are arranged in the large-sized device main bodies M ₁ and M ₂ in a semiconductor manufacturing line, and the shape of the connecting portions 13 is the first member shown in FIG. In the case of having a concave concave portion 21 with a small convex strip 5 as shown by 11 (this is indicated by reference numeral M ₁ ), it has a flat plane P ₁ like the first member 11 shown in FIG. The case (which is indicated by the symbol M ₂ ) coexists.

If it is unclear whether it is an existing large-sized device body in a remote place and which has the code M ₁ or the code M ₂ shown in FIG. 3, the mass flow controller, the pressure gauge, and various small devices can be used. For the replacement work, the small device S ₁ of the flow path connecting portion 15 having the small convex strip 5 shown in the upper left of FIG. 3 should be applied, or the flat plane P ₂ shown in the upper right of FIG. Conventionally, it is not possible to determine whether or not the small device S ₂ of the flow path connecting portion 15 to be applied should be applied.
That is, in the prior art, since vertically symmetrical metal seals as indicated by reference numerals 46 and 43 as shown in FIGS. 5 to 8 have been used, the assembly shown by the arrow D in FIG. 3 is not possible. It was possible, or a combination such as the arrow C in FIG. 3 was impossible.

On the other hand, as shown by being surrounded by a chain double-dashed line G in FIG. 3, a metal seal having both flat surface portions 51 and 52 together with a small device S ₁ having a flow path connecting portion 15 having a small convex strip 5. 46 and the metal seal 1 of the present invention are carried into the large apparatus main bodies M ₁ and M ₂ whose flow path connection portions 13 are unknown, if the metal seal 46 (see arrow A) or the metal seal 1 ( (See arrow D), and connection work can be performed quickly and reliably. In this way, it is possible to omit the trouble of confirming in advance the shape (type) of the flow path connection portion 13 for the large-sized apparatus main bodies M ₁ and M ₂ in the remote place.
Alternatively, as shown by being surrounded by another alternate long and two short dashes line H in FIG. 3, a small device S ₂ having a flow path connecting portion 15 having a flat plane P ₂ may be selected. That is, when such a selection is made, the metal seal 43 having the small protrusions 48 and 47 on the upper and lower surfaces and the metal seal 1 of the present invention are connected to the large device body M _{1 in} which the flow path connecting portion 13 is unknown. , M ₂ can be accommodated by either the metal seal 43 (see arrow B) or the metal seal 1 (see arrow C), so that connection work can be performed quickly and reliably.

In this way, if the combination as surrounded by the two-dot chain line H is carried in, the shape and type of the flow path connecting portion 13 for the large-sized apparatus main bodies M ₁ and M ₂ in the remote place are confirmed in advance. The labor can be omitted. Further, even if all of the flow path connecting portions 13, 13, 15, and 15 provided at the symbols M ₁ , M ₂ , S ₁ , and S ₂ in FIG. 3 are unknown, the metal seal of the present invention is used. If 1 is prepared together with the (conventional product) metal seal 43 and the metal seal 46, it becomes possible to cope with it, and there is also an advantage that troubles in connection work can be prevented and work efficiency can be improved.

In the illustrated embodiment, the stepped portion 37 has the large-diameter outer peripheral surface 35A and the small-diameter outer peripheral surface 35B, but the outer peripheral surface 35 may have no stepped portion 37. Further, the cross-sectional shape of the small protrusion 2 is exemplified as a round mountain shape, but it may be a triangular mountain shape, a trapezoidal shape, a rectangular shape or the like. Further, the cross-sectional shape of the small convex strip 5 is exemplified as a round mountain shape, but it may be a triangular mountain shape, a trapezoidal shape, a rectangular shape or the like.
In addition, in FIGS. 1 and 2, the one-dot chain line indicates the fastening axis of the screw (or bolt), and the first member 11 and the second member 12 are screwed at the position of the one-dot chain line. Or bolts to secure the connection.

1 Metal seal 2 Small protrusion 5 Small ridge
10 chamfer
11 First member
12 Second member
21,22 concave
21A, 22A bottom
23, 24 Seal positioning inner peripheral surface
31 First plane
32 Second flat surface
33,34 outer peripheral edge
35 outer peripheral surface
35A large diameter outer peripheral surface
35B Small diameter outer peripheral surface
36 Positioning surface

Claims (2)

In a seal structure provided with a metal seal (1) for sealing between _two opposed planes (P ₁ ) (P ₂ ) ,
The metal seal (1) includes a first flat surface portion (31) and a second flat surface portion (32) that are parallel to each other, and the first flat surface portion (31) is a small projection (2) having a totally closed annular shape. And the second flat surface portion (32) is flat.
One of the two planes (P ₁ ) (P ₂ ) is provided with a small closed ridge (5) having a generally closed ring shape, and the second flat surface (32) is provided with respect to the small ridge (5). Corresponding to each other, and on the other of the two planes (P ₁ ) and (P ₂ ) is formed an annular ring-shaped sealing flat surface portion, and the first flat surface portion (31) of the first flat surface portion (31) is formed with respect to the sealing flat surface portion. The small protrusions (2) are configured to be assembled correspondingly,
A shallow concave portion (21) (22) is provided in each of the first member (11) and the second member (12) connected to each other, and the bottom surface (21A) of the concave portion (21) (22). (22A) constitutes the above-mentioned two planes (P ₁ ) (P ₂ ) and the inner peripheral surfaces of the concave portions (21) (22) constitute the seal positioning inner peripheral surfaces (23) (24). ,
The outer peripheral surface (35) interconnecting the outer peripheral edges (33) (34) of the first flat surface portion (31) and the second flat surface portion (32), which are wholly closed annular, is the seal positioning inner peripheral surface (23). ) (24) to form a positioning fitting surface (36),
The outer peripheral surface (35) is formed with a large diameter outer peripheral surface (35A) and a small diameter outer peripheral surface (35B) ,
A chamfer (10) for guiding fitting is cut out at a corner between the outer peripheral edge (33) of the first flat surface portion (31) and the small diameter outer peripheral surface (35B),
Moreover, a chamfer (10) for guiding fitting is cut out at a corner between the outer peripheral edge (34) of the second flat surface portion (32) and the large-diameter outer peripheral surface (35A). To
Characteristic seal structure. The sealing structure according to claim 1, wherein the small protrusions (2) having a generally closed annular shape are provided so as to overlap the small protrusions (5) having a generally closed annular shape when viewed from the axial direction .

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