JP6742201B2 - Exposure equipment - Google Patents

Description

The present invention relates to an exposure apparatus that exposes while moving a long photosensitive material (long work) between a supply-side roll and a winding-side roll, and particularly detects in advance the end of the long-size work on the supply-side roll. Exposure apparatus.

In this type of exposure apparatus, an exposure unit is arranged between the supply-side roll and the winding-side roll, and a predetermined exposure pattern is repeatedly exposed on a predetermined region of a long work that moves between both rolls. The long work is temporarily fixed to the supply-side roll (winding core) at its end (the end fixing portion in the transport direction), and is tightly wound around the supply-side roll. Therefore, if the terminal temporary fixing part of the long work comes off the supply-side roll (core) and becomes free from the supply-side roll, the long-work is unsupported and swung, causing damage to the long-work. To do. Further, since the end portion of the long work is not supported and is swung around, the connection work of the supply roll to be set next with the long work is adversely affected.

Therefore, conventionally, some device for detecting the end of the long work on the supply roll is provided, and the end of the long work is detected before the temporary fixing portion of the long work comes off (leaves) from the supply roll. The rotation was stopped, the supply side roll (core around which the long work was wound) was replaced, and the long work on the old and new rolls was connected.

In Patent Document 1, distance-measuring light of a photosensor is emitted from a radial direction toward a supply-side roll (core) around which a long work is wound, and the measured distance is the outer diameter of the core (that is, long work). It proposes a technique for detecting the end of a long work when the outer diameter of the core coincides with that of the core.

Further, Patent Document 2 detects whether or not the long work being conveyed is on the correct conveyance route by detecting the pressure and the flow rate when the long work in the conveyance route is sucked.

JP, 2016-013879, A JP 2002-145478 A

However, the surface of the long work wound on the supply-side roll has undulations and warps, and the tension of the long work is not always constant but changes, so it is difficult to maintain a stable posture. Further, the surface reflectance of a long work (photosensitive material) may be different for each long work, and when the type of work changes, it is difficult to obtain a stable detection result due to the difference in the same reflectance. Therefore, the device of Patent Document 1 has a problem that it is likely to cause erroneous detection. In the prior art of Patent Document 2, it is not possible to detect the end of a long work piece while it remains on the winding core.

Based on the above awareness of the problem, the present invention provides a method in which the rear end temporary fixing portion of the long work is separated from the supply-side roll (core) regardless of the material (surface reflectance) of the long work ( An object of the present invention is to obtain an exposure apparatus capable of reliably detecting the end of a long work (in a state where the terminal temporary fixing portion of the long work is temporarily fixed to the supply-side roll).

According to the present invention, in the state where the terminal temporary fixing portion of the long work is temporarily fixed to the supply-side roll, the one innermost turn (near end) on the winding core of the long work is separated from the winding core. This is done based on the idea of detecting the end.

The present invention includes a supply-side roll around which a long work is wound, and an exposure unit that exposes the long work unrolled from the supply-side roll, and In an exposure apparatus in which the end portion is temporarily fixed to the supply-side roll and is densely wound on the supply-side roll in order from the provisionally fixed end, the end of the long work temporarily fixed to the supply-side roll. From a portion of the supply side roll surface is provided with a work end detection means for detecting that it is separated from the supply side roll surface, the work end detection means detects from the axial center side of the supply side roll Exposure equipment.

The work end detection means is a detection opening opened on the outer peripheral surface of the supply side roll and closed by a long work wound around the supply side roll, and an empty space exerting a negative pressure or a positive pressure on the detection opening. The pressure means and the pressure detection means for detecting that the negative pressure or the positive pressure fluctuates beyond an allowable value. With such a configuration, somewhere in contact with the supply-side roll surface from the terminal end that is temporarily fixed to the supply-side roll of the long work, that is, the portion that is in contact with the detection opening and its periphery, Can be detected from the surface of the supply-side roll.

The work end detection means can be composed of a photoelectric sensor that detects whether or not the long work is in contact with the supply-side roll.

The work end detection means may be composed of a mechanical sensor that detects whether or not the long work is in contact with the supply-side roll.

In one aspect of the present invention, the supply-side roll includes a winding core around which the long work is wound, and a roll shaft that is inserted into and removed from the center of the winding core, and the detection opening is provided in the winding core. A communication passage for spatially connecting the detection opening, the air pressure means, and the pressure detection means is provided in the roll shaft.

In another aspect of the present invention, the supply-side roll includes a core around which the long work is wound, and a roll shaft that is inserted into and removed from the center of the core, and the detection opening is formed in the core. A communication passage is provided in the thickness of the winding core for spatially connecting the detection opening, the air pressure means, and the pressure detection means.

It is preferable that the winding core is provided with an index indicating a temporary fixing position of a terminal end portion of the long work, based on a detection position of the work end detection means.

In the exposure apparatus of the present invention, in the state where the terminal temporary fixing portion of the long work is temporarily fixed to the supply-side roll, one innermost turn (near end) on the winding core of the long work is separated from the winding core. That is, the end of the long work is detected in advance, so that the end of the long work can be surely detected.

FIG. 1 is a side perspective view of the entire exposure apparatus showing an embodiment of the exposure apparatus according to the present invention. FIG. 2 is a sectional view in which a winding core around which a long work is wound is longitudinally cut along an axis of a supply-side roll included in the exposure apparatus of FIG. 1. It is sectional drawing which follows the III-III line of FIG. (A) And (B) is sectional drawing corresponding to FIG. 3 of a different operation state which shows the relationship of the terminal end and near end of a supply side roll. FIG. 4 is a sectional view corresponding to FIG. 2, showing another embodiment of the present invention. It is sectional drawing which follows the VI-VI line of FIG. It is a perspective view which shows an example of the vacuum piping structure of the supply side roll of FIG. 5, FIG. It is a flowchart which shows the example of control of the exposure apparatus by this invention. It is a perspective view of the supply side roll which shows another embodiment of the exposure apparatus by this invention. It is a perspective view of the supply side roll which shows the same another another embodiment. It is a perspective view of the supply side roll which shows the same another another embodiment.

FIG. 1 shows an embodiment in which the present invention is applied to a so-called roll-to-roll type direct exposure apparatus. The exposure apparatus 1 includes a supply unit 10 that supplies the long work W in order from the upstream side to the downstream side in the transport direction of the long work W, and a pattern on the surface of the long work W by exposing a pattern on the electronic circuit. And an winding section 20 for collecting the exposed long work W.

The long work W is obtained by laminating a photosensitive long film (a synthetic resin flexible film having a surface coated with a photoconductor) on a base material of an electronic circuit board (printed circuit board) used in a mobile phone or a mobile device, for example. It was made into a roll. The long work W has a width of 25 to 50 cm and a length of several tens to several hundreds of meters. Below, of the front and back surfaces of the long work W, the surface facing upward in the exposure unit 30 in FIG. 1 is referred to as “front surface”, and the surface facing downward in the drawing is referred to as “back surface”.

In the following, the direction along the carrying direction M is “X”, the width direction of the long work W perpendicular to the carrying direction M is “Y”, and the direction perpendicular to both X and Y (vertical direction) is “Z”. It is represented by. Further, when expressing the positional relationship of the elements in the exposure apparatus 1, the side closer to the supply side roll is called the upstream side, and the side closer to the winding side roll is called the downstream side.

The supply unit 10 includes a supply-side roll (supply-side reel) 11, a guide roller 12, a supply-side dancer roller 13, a guide roller 14, and a supply-side in order from the upstream side to the downstream side in the transport direction of the long work W. A braking roller 15 is provided, and a work supply system for supplying the long work W to the exposure unit 30 is configured. The winding unit 20 includes a winding side braking roller 25, a guide roller 24, a winding side dancer roller 23, a guide roller 22, and a winding side in order from the upstream side to the downstream side in the transport direction of the long work W. A roll (winding side reel) 21 is provided, and constitutes a work winding system for winding the long work W exposed by the exposure unit 30.

The supply-side roll 11 holds the long work W that is wound in a roll shape, and supplies (feeds) the long work W toward the downstream side by rotating about its own rotation axis. ). The winding-side roll 21 rotates around its own rotation axis to wind the long work W supplied from the upstream side into a roll shape and hold it. The supply-side roll 11 and the winding-side roll 21 are provided with a rotation driving means (not shown) that drives the supply-side roll 11 and the winding-side roll 21 to rotate intermittently. The outer diameters of the supply-side roll 11 and the winding-side roll 21 change as the supply amount and the winding amount of the long work W change as the long work W is conveyed.

The guide rollers 12, 14, 22, 24, the supply-side braking roller 15, and the winding-side braking roller 25 bridge the long work W between the supply-side roll 11 and the winding-side roll 21 and rotate respectively. By rotating around the axis, the long work W from the supply-side roll 11 is conveyed toward the winding-side roll 21.

The supply-side braking roller 15 and the winding-side braking roller 25 are arranged such that their respective rotation axes are substantially aligned in the horizontal direction. The supply-side braking roller 15 and the winding-side braking roller 25 are composed of a nip roller composed of two rollers arranged to face each other with the long work W interposed therebetween. These two rollers are movable in the vertical direction (Z direction) by a mechanism (not shown) so as to sandwich or release the long work W.

The supply side braking roller 15 and the winding side braking roller 25 can brake the long work W by nipping the long work W by the nip roller and by applying a brake so that the nip roller does not rotate. On the other hand, the supply side braking roller 15 and the winding side braking roller 25 separate the nip rollers from the front and back surfaces of the long work W so as not to hinder the movement of the long work W when the long work W is released.

Further, the supply side braking roller 15 and the winding side braking roller 25 are respectively provided with a rotation driving means (not shown) for rotationally driving the rollers. While the long work W is sandwiched, the rotation driving means intermittently and rotationally drives the supply-side braking roller 15 and the winding-side braking roller 25 with substantially the same rotation drive amount to wind the supply-side roller 11 and the winding roller. The long work W bridged between the take-up rolls 21 can be intermittently conveyed (frame feed) by a predetermined length. For example, a stepping motor is used as the rotation driving means, and the feed amount and acceleration of the long work W are accurately controlled.

As the supply-side braking roller 15 and the winding-side braking roller 25, instead of a nip roller for sandwiching the long work W, a suction roller having a suction means for sucking the back surface of the long work W may be used. The supply side braking roller 15 and the take-up side braking roller 25 are rotatably driven by the rotation drive means in a state where the back surface of the long work W is attracted, so that the long work W can be conveyed.

Also, the case where both the supply-side braking roller 15 and the winding-side braking roller 25 have the rotation driving means has been illustrated, but when the braking roller conveys the long work W in only one direction, the pull-in side (supply side). The rotation driving means may be provided only to the braking roller (4), and only the brake may be provided to the other braking roller (winding side). In this case, when the pull-in side braking roller is rotationally driven, the other (winding-side) braking roller releases the brake while holding the long work W, and the nip roller rotates along with the movement of the long work W. It is good to do so.

The guide rollers 12, 14, 22, and 24 are auxiliary rollers that guide the long work W supplied (delivered) from the supply-side roll 11 to the downstream side. Among the guide rollers 12, 14, 22, and 24, at least the guide rollers 14 and 24 are arranged such that their rotation axes are arranged in parallel in the same horizontal plane. The guide rollers 12, 14, 22, 24 are provided with flanges (not shown) that prevent the long work W from being displaced in the width direction (the direction perpendicular to the paper surface in FIGS. 1 and 3 and the left-right direction in FIG. 2). You may have.

The supply-side dancer roller 13 and the take-up-side dancer roller 23 move up and down as the long work W is conveyed, and apply tension to the long work W to prevent the long work W from becoming loose or wrinkled. At the same time, it has a function as a buffer for moving the long work W in the exposure unit 30 for scanning exposure in the exposure unit described later.

The exposure unit 30 is arranged between the supply side braking roller 15 and the winding side braking roller 25. The exposure unit 30 includes an exposure stage 31 and an exposure unit 51.

The exposure unit 51 is provided with a plurality of exposure heads (not shown), and is regularly arranged at a position vertically above the long work W by a predetermined distance. A light source and an illumination optical system (not shown) are arranged for each exposure head, and the light emitted from the light source is guided to the corresponding exposure head via the corresponding illumination optical system. Each exposure head includes a DMD (Digital Micro-mirror Device) in which a plurality of micromirrors are two-dimensionally arranged, and an imaging optical system that forms an image of the DMD on a long work. The exposure unit 51 including the DMD is well known.

The exposure stage 31 sucks the back surface of the long work W and holds it flat. The exposure stage 31 can be moved up and down between the upper end position where the exposure stage 31 comes into contact with the back surface of the long work W and the lower end position where the exposure stage 31 is separated from the back surface of the long work W by the elevating drive means 34. Has become. Further, a stage moving unit 32 for scanning the exposure stage 31 is provided. The stage moving unit 32 moves on a rail 33 that is horizontally arranged in parallel with the conveyance direction of the long work W.

In the exposure apparatus 1 described above, the supply side roll 11 around which the long work W is wound is provided with the end detection means (work end detection means) of the long work W. The embodiment will be described with reference to FIGS. As shown in FIGS. 2 and 3, the supply-side roll 11 includes a winding core 11C that winds the long work W, and a roll shaft 11S that is inserted into a central cavity (hollow cylindrical portion) of the winding core 11C. ing. Inner lugs 114 are provided on the outer circumference of the roll shaft 11S at intervals in the circumferential direction so as not to hinder the insertion into the winding core 11C and to ensure the integration with the winding core 11C after the insertion. Such an inscribed lug 114 can be composed of, for example, a balloon body that expands and contracts pneumatically.

As shown in FIGS. 3 and 4, the end portion (winding start end portion) Ws of the long work W is temporarily fixed on the winding core 11C by the temporary fixing tape 111. “Temporary fixing” refers to a fixed state in which the end Ws of the long work W is not easily separated from the surface 11Ca of the winding core 11C when no external force is applied, but is separated when an external force of a certain amount or more is applied. The long work W is tightly wound around the winding core 11C starting from the terminal end (winding start end) Ws fixed to the temporary fixing tape 111. The area (that is, the first winding area, the length of one winding) in contact with the surface 11Ca of the winding core 11C from the terminal end (winding start end) Ws of the long work W is defined as "near end", The symbol "We" is attached. A large number of winding cores 11C in which the long work W is densely wound are prepared outside the exposure apparatus and are supplied to the roll shaft 11S of the exposure apparatus 1. Of course, a set of the roll shaft 11S and the winding core 11C can be prepared as the supply-side roll 11 and the set can be supplied to the exposure apparatus 1. In addition, the winding direction of the long work W around the supply-side roll 11 is drawn oppositely in FIG. 4 and FIG. 1.

An air suction passage 112 is formed in the axis of the roll shaft 11S, and the outer end of the air suction passage 112 is connected to the vacuum pipe 122 shown in FIG. 1 via a rotary joint 119. The vacuum pipe 122 is connected to a vacuum source 124, and a pressure sensor 123 is connected to the vacuum pipe 122. The pressure detected by the pressure sensor 123 is checked by the near end detection circuit 125. The rotary joint 119 is a known rotary joint that can be connected to the vacuum pipe 122 and the vacuum source 124 via the air suction passage 112 regardless of the rotational position of the roll shaft 11S.

An inner end portion of the air suction passage 112 inside the roll shaft 11S reaches a fitting portion with the winding core 11C, and a radial passage 112a communicating with the air suction passage 112 is formed in the roll shaft 11S. The outer end of the radial passage 112a is opened to form a vacuum opening 113. On the other hand, the core 11C is provided with a detection opening 118 that communicates the inside and the outside of the core 11C in the radial direction. An annular seal material 115 is provided between both ends of the winding core 11C and the roll shaft 11S so as to make the outer circumferential surface of the roll shaft 11S and the inner circumferential surface of the winding core 11C airtight. That is, the cylindrical space 120 between the outer peripheral surface of the roll shaft 11S and the inner peripheral surface of the winding core 11C communicates only with the outside through the detection opening 118, and the winding core on which the long work W is tightly wound. The detection opening 118 of 11C is closed by (the near end We of) the long work W, and communication with the outside of the cylindrical space 120 is blocked. The temporary fixing position (position of the temporary fixing tape 111) of the long work W with respect to the winding core 11C (its surface 11Ca) is determined so that a suitable circumferential distance (center angle A in FIG. 4) from the detection opening 118 can be secured. ..

The roll shaft 11S is solid, has a small-diameter drive transmission shaft 11A extending coaxially from one end of the roll shaft 11S, and the drive shaft 11A projects from the winding core 11C of the roll shaft 11S. The portion is pivotally supported by a pair of bearings 11B, and the tip of the drive transmission shaft 11A is connected to the rotary drive mechanism 11D. That is, the roll shaft 11S is axially supported by a cantilever structure in which the rotary joint 119 side is opened.

The above apparatus operates as shown in FIG. A sufficient amount (number of windings) of the long work W exists on the outer periphery of the winding core 11C of the new supply roll 11 (FIG. 3). Therefore, the detection opening 118 of the winding core 11C is blocked by the long work W. When operating the exposure apparatus 1, first, the vacuum source 124 is driven to reduce the pressure in the cylindrical space 120 to a negative pressure (lower than atmospheric pressure) via the vacuum pipe 122, the air suction passage 112, and the radial passage 112a. (Step S11). The pressure in the cylindrical space 120 is measured by the pressure sensor 123. As long as the long work W blocks the detection opening 118, the pressure sensor 123 detects a negative pressure below a certain pressure. The near-end detection circuit 125 determines that an effective long work W is present on the winding core 11C when the pressure detected by the pressure sensor 123 is a negative pressure equal to or lower than a certain pressure. The exposure apparatus 1 of the present embodiment does not detect the radius (diameter) of the supply-side roll 11 (winding core 11C) including the long work W, but the supply-side roll 11, the winding in this embodiment. Somewhere in the long work W that is in contact with the surface 11Ca of the core 11C, more specifically, it is detected that the near end We is separated from the supply side roll 11 (the surface 11Ca of the winding core 11C). It is possible to reliably detect the state before the terminal end portion (winding start end portion) Ws of W is separated from the supply-side roll 11 (the surface 11Ca of the winding core 11C).

The exposure apparatus 1 starts the roll exposure and the operation of conveying the long work W (step-and-repeat operation) (step S13). When the pressure detected by the pressure sensor 123 has not reached the threshold value (less than a certain pressure), the near-end detection circuit 125 determines that the near-end has not been reached, and the exposure apparatus 1 continues the production state, that is, roll exposure. The transport operation of the long work W is continued (S15: NO, S17, S15).

When the long work W on the winding core 11C reaches the last one turn, the long work W (the near end We) that has blocked the detection opening 118 as shown in FIG. ), the detection opening 118 is opened. Then, the cylindrical space 120 receiving the negative pressure of the vacuum source 124 communicates with the atmosphere through the radial passage 112a, the air suction passage 112, and the vacuum pipe 122, and the pressure detected by the pressure sensor 123 rapidly increases. To do. That is, when it is detected that the detection pressure of the pressure sensor 123 exceeds the threshold value (changes beyond the allowable value) (S15: YES), the near end detection circuit 125 causes the long work W to reach the near end We (end). It is determined that it has been done (S19), and roll exposure and conveyance are stopped (S21). The driving of the supply-side roll 11 (roll shaft 11S) and the winding-side roll 21 is stopped.

The exposure apparatus 1 of the present embodiment does not detect the radius (diameter) of the supply side roll 11 (winding core 11C) including the long work W, but the surface of the supply side roll 11 (of the winding core 11C). It is detected from the axial center side of the supply side roll 11 that some of the near end We of the long work W in contact with the surface 11Ca) is separated from the surface of the supply side roll 11, and thus the end portion of the long work W is detected. (Rolling start end portion) It is possible to reliably detect the state before Ws is separated from the surface of the supply-side roll 11, that is, that some part of the near end We is separated from the surface of the supply-side roll 11.

The worker releases the temporary fixing of the long work W with the temporary fixing tape 111 and removes the winding core 11C from the roll shaft 11S. A new winding core 11C, on which the long work W is densely wound, is set on the roll shaft 11S, and the end of the long work W on the old winding core 11C side (the long work W wound on the winding side roll 21). End) of the new winding core 11C and the starting end of the long work W of the new winding core 11C. Then, the operation of the exposure apparatus 1 is restarted.

A plurality of detection openings 118 may be provided. For example, a plurality may be provided at the same position in the circumferential direction and a plurality may be provided at different positions in the circumferential direction. By providing a plurality of long workpieces W, it is possible to more reliably detect that the long work W has been fed from the winding core 11C to the near end We.

5 to 7 are views showing another embodiment of the present invention. The same members as those of the embodiment shown in FIGS. 2 to 6 are designated by the same reference numerals and the description thereof will be omitted. In this embodiment, an air suction path 2112 extending in the axial direction is communicated with the air suction path 2112 in a thick cylindrical wall 130 in which the winding core 2011C is thick (a predetermined thickness in the radial direction). The outer end portion forms a radial passage 2112a that opens to the outer surface of the cylindrical wall 130. The opening of the radial passage 2112a constitutes the detection opening 2118. The air suction passage 2112 protrudes from the winding core 2011C in the axial direction, and a crank passage 131 extending along the extension of the axial center of the roll shaft 2011S is connected to the protruding end. A rotary joint 119 similar to that of the first embodiment is detachably attached to the tip end of the crank passage 131, coaxially with the winding core 2011C.

The temporary fixing position (position of the temporary fixing tape 111) of the long work W with respect to the winding core 2011C (cylindrical wall 130) is determined so that an appropriate circumferential distance (center angle A in FIG. 4) from the detection opening 2118 can be secured. .. On the surface 2011Ca (surface of the supply-side roll 11) of the winding core 2011C (cylindrical wall 130), an index 132 can be provided as shown in FIG. 7 as a guide for this circumferential distance. The index 132 can be composed of a plurality of distance indexes that represent the distance in the circumferential direction from the detection opening 2118. Such an index 132 can be provided on the winding core 11C.

The above-described embodiment shown in FIGS. 5 to 7 indicates that the near end We of the long work W is separated from the surface of the supply-side roll 11 (the surface 2011Ca of the winding core 2011C) from the axial center side of the supply-side roll 11. Since the detection is performed, it is ensured that the end portion (winding start end portion) Ws of the long work W is not separated from the surface of the supply-side roll 11, that is, that somewhere near the end We is separated from the surface of the supply-side roll 11. Can be detected.

The above is the embodiment in which the end of the long work W is detected by the negative pressure, but the detection by the positive pressure is also possible. In the embodiment of the positive pressure detection, when the positive pressure is equal to or higher than a certain value, the long work W exists on the winding cores 11C and 2011C, and when the positive pressure is less than the certain value, the long work W reaches the near end We. Detect.

FIG. 9 shows a light emitting element 141 that emits detection light radially outward on the outer periphery of the roll shaft 11S (on the axial center side of the supply side roll 11) and a light receiving sensor 142 that receives reflected light from the back surface of the long work W. An example in which a photoelectric sensor (optical sensor) 140 having the same is provided is shown. A detection hole 143 is formed in the winding core 11C so as to correspond to the photoelectric sensor 140 and penetrates in the radial direction. When the detection hole 143 is blocked by the near end We portion of the long work W, the light receiving sensor 142 receives the reflected light reflected by the long work W, but the long work W is separated from the roll shaft 2011S and detected. When the hole 143 is opened, the light receiving sensor 142 does not receive the reflected light, and thus the near end We can be detected from the axial center side of the supply side roll 11.

FIG. 10 shows an example in which the same photoelectric sensor 140 as in the example of FIG. 9 is provided on the outer circumference of a cylindrical wall 130 having a wall thickness of the winding core 2011C similar to that of the examples of FIGS. 5 to 7. The photoelectric sensor 140 is provided on the axial center side of the supply side roll 11, and the photoelectric sensor 140 has a light emitting element 141 that emits detection light radially outward and a light receiving sensor 142 that receives reflected light from the back surface of the long work W. However, the point that the near end We is detected from the axial center side of the supply side roll 11 depending on whether or not the reflected light is received is the same as in the example of FIG. 9.

FIG. 11 shows a long strip wound around the outer circumference of the winding core 2011C (cylindrical wall 130) on the outer circumference of the winding core 2011C (on the axial center side of the supply-side roll 11) instead of the photoelectric sensor 140 of the example of FIG. An example in which a micro switch 150 is provided as a mechanical sensor that turns on (turns off) when pressed by the work W is shown. When the long work W is supplied from the winding core 2011C (cylindrical wall 130) and the near end We moves away from the micro switch 150, the state of the micro switch 150 changes from on to off (or vice versa), so that the near end We is It can be detected from the axial side of the supply roll 11.

As the power supply and signal transmission means for the sensor shown in FIGS. 9 to 11, for example, a well-known rotary connection connector (slip ring) can be used.

In the above embodiment, the length of the near-end We portion in the transport direction is described as a length of one roll of the long substrate, but may be any length of one roll or less. For example, the length may be 1/4 roll. The length can be changed depending on the installation position of the detection opening.

The above is an application of the present invention to a direct exposure apparatus using a DMD. However, the present invention is applicable to the long work W wound on the supply roll while the long work W is wound on the winding roll. Any exposure apparatus can be applied to general exposure apparatuses such as a projection type exposure apparatus and a contact type exposure apparatus.

1 Exposure Device 2 Stand 10 Supply Unit 11 Supply Side Roll (Supply Side Reel)
11C 2011C winding core 11Ca 2011Ca surface (supply side roll surface)
11S 2011S Roll shaft 15 Supply side control roller 20 Winding unit 21 Winding side roll (Winding side reel)
25 Winding side braking roller 30 Exposure unit (exposure means)
31 exposure stage 32 stage moving part 33 guide rail 51 exposure unit (exposure means)
111 Temporary fastening tape 112 2112 Air suction passage (communication passage)
112a 2112a Radial passage (communication passage)
113 Vacuum Opening 114 Inner Lug 118 2118 Detection Opening 119 Rotating Joint 120 Cylindrical Space 122 Vacuum Piping 123 Pressure Sensor (Pressure Detection Means)
124 Vacuum source (pneumatic means)
125 near end detection circuit (work end detection means)
130 Cylindrical wall 131 Crank passage 132 Index 140 Photoelectric (light) sensor 141 Light emitting element 142 Light receiving sensor 143 Detection hole 150 Micro switch (mechanical sensor)
W long work (photosensitive substrate)
Ws end part (winding start part)
We Near End

Claims (7)

Supply side roll around which long work is wound,
Exposure means for exposing the long work unrolled from the supply-side roll,
In an exposure apparatus in which the end portion of the supply-side roll of the long work is temporarily fixed to the supply-side roll and is densely wound around the supply-side roll in order from the provisionally fixed end,
On the axial side of the supply-side roll, it is detected that somewhere in contact with the supply-side roll surface from the terminal end of the long work temporarily fixed to the supply-side roll is separated from the supply-side roll surface. Equipped with a work end detection means for
An exposure apparatus characterized by the above. The exposure apparatus according to claim 1,
The work end detection means is a detection opening that is opened on the outer peripheral surface of the supply-side roll and is closed by a long work wound around the supply-side roll, and an empty space that applies negative pressure or positive pressure to the detection opening. An exposure apparatus comprising: a pressure unit; and a pressure detection unit that detects that the negative pressure or the positive pressure fluctuates beyond an allowable value. The exposure apparatus according to claim 1,
The work end detection unit is an exposure apparatus including a photoelectric sensor that detects whether or not the long work is in contact with the supply-side roll. The exposure apparatus according to claim 1,
The work end detection means is an exposure apparatus including a mechanical sensor that detects whether or not the long work is in contact with the supply-side roll. The exposure apparatus according to claim 2,
The supply-side roll comprises a core around which the long work is wound, and a roll shaft that is inserted into and removed from the center of the core,
An exposure apparatus in which the detection opening is provided in the winding core, and a communication path for spatially connecting the detection opening, the air pressure means, and the pressure detection means is provided in the roll shaft. The exposure apparatus according to claim 2,
The supply-side roll comprises a core around which the long work is wound, and a roll shaft that is inserted into and removed from the center of the core,
The detection opening is provided in the winding core, and a communication passage for spatially connecting the detection opening, the air pressure means, and the pressure detection means is provided in the thickness of the winding core. apparatus. The exposure apparatus according to claim 5 or 6,
The said core is an exposure apparatus provided with the parameter|index which shows the temporary fixing position of the terminal part of the said long work based on the detection position of the said work completion detection means.

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