JP6745024B2 - Three-dimensional coordinate measuring device - Google Patents

Description

The present invention relates to a three-dimensional coordinate measuring device, and more particularly, to a three-dimensional coordinate measuring device for measuring a three-dimensional shape of an object to be measured by moving a measuring probe in three directions of X, Y and Z axes.

In a general three-dimensional coordinate measuring device, a Y carriage that is movable in the front-rear direction (Y-axis direction) is arranged above a surface plate on which an object to be measured is placed. The Y carriage has a columnar X guide spanning along the left-right direction (X axis direction), and the X carriage supports the X carriage so as to be movable in the X axis direction. A columnar Z carriage along the vertical direction (Z axis direction) is movably supported on the X carriage in the Z axis direction, and a measurement probe is attached to the lower end of the Z carriage. As a result, the stylus of the measuring probe is movably supported in the three axial directions of the X, Y, and Z axes.

In such a three-dimensional coordinate measuring apparatus, Patent Document 1 discloses a support structure in which the Y carriage is supported by the left and right side surfaces of the surface plate and the upper surface of the surface plate along the left and right side surfaces via an air pad (air bearing). Has been done.

Further, as described in Patent Document 1, in order to avoid a decrease in the measurement accuracy due to a decrease in the straightness of the surface plate due to the deformation of the surface plate, vibration, etc., as a surface plate, a granite having a high hardness and a large specific gravity Stone materials such as marble and marble are used.

On the other hand, the stone surface plate has a low thermal conductivity, so it is difficult for heat to be transmitted inside, and when the temperature of the outside air around the surface plate (ambient temperature) changes, the temperature inside the surface plate becomes uniform. Temperature gradient occurs over a long period of time. When such a temperature gradient occurs, there is a problem that the surface plate is deformed and the straightness of the surface (upper surface, side surface, etc.) of the surface plate is reduced, and thus the measurement accuracy is reduced. In particular, since the left and right side surfaces of the surface plate are used as guides for the Y carriage, the decrease in the straightness of the left and right side surfaces causes an error in the support angle of the Y carriage, and has a great influence on the measurement result.

Therefore, Patent Document 1 discloses that the surface of the surface plate not used as a guide of the Y carriage, that is, the front and rear side surfaces is covered with a heat insulating member. According to this, the amount of heat entering and exiting from the front and back side surfaces of the surface plate is reduced, so that even if the ambient temperature changes and a temperature gradient occurs inside the surface plate, the generation of the temperature gradient in the Y-axis direction is suppressed. .. Therefore, regardless of changes in the ambient temperature, the straightness on the left and right side surfaces of the surface plate is prevented from decreasing, and the measurement accuracy is suppressed from decreasing.

JP, 2007-33052, A

By the way, as in Patent Document 1, in the area of the surface plate, a measurement area in which a measurement target is placed and measurement is performed, and a guide area for guiding the Y carriage in the Y-axis direction are integrally formed. When it is present, heat generated by a motor or the like of the Y drive mechanism that moves the Y carriage in the Y-axis direction flows into the measurement area via the guide area.

Since the measurement area has a large volume and a large heat capacity (low thermal conductivity), it takes a long time for the surface plate to reach a uniform temperature when heat flows into the measurement area.

Therefore, even if the front and rear side surfaces of the surface plate are covered with a heat insulating member to prevent a temperature gradient from occurring in the Y axis direction of the surface plate due to the influence of the ambient temperature as in Patent Document 1, the temperature is generated by the Y drive mechanism. The heat may cause a temperature gradient in the Y-axis direction. In this case, the straightness of the surface of the guide portion is reduced, and the measurement accuracy is reduced.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a three-dimensional coordinate measuring apparatus capable of suppressing deformation of a surface plate due to heat and performing highly accurate measurement.

In order to achieve the above object, a three-dimensional coordinate measuring apparatus according to one aspect of the present invention has an upper surface perpendicular to the Z axis and a first side surface along the Y axis direction, and an object to be measured is placed on the upper surface. In a three-dimensional coordinate measuring device including a surface plate to be placed and a Y carriage that supports a measurement probe on the upper surface side of the surface plate and is movably arranged in the Y-axis direction, A groove formed along the side surface of the groove, the groove supporting the Y carriage movably in the Y-axis direction by the inner surface of the groove and the first side surface, and the heat insulation covering the side surface of the surface plate different from the first side surface. And a member.

According to this aspect, the heat that enters and exits from the side surface of the surface plate to the inside or outside air of the surface plate is reduced by the heat insulating member, so that even if the ambient temperature of the surface plate changes, the temperature change inside the surface plate It is less likely to occur and deformation of the surface plate is suppressed. Further, even if a temperature change occurs inside the surface plate, the generation of the temperature gradient in the Y-axis direction is suppressed, so that the deterioration of the straightness of at least the first side surface and the inner surface of the groove is suppressed, and the Y carriage Y The movement in the axial direction is accurately performed.

Further, heat generated in the vicinity of the surface plate area (guide area) closer to the first side surface than the groove, for example, heat generated by a motor or the like that moves the Y carriage in the Y-axis direction, or the Y carriage and the surface plate. The grooves prevent the frictional heat and the like from the guide area from flowing into the measurement area of the surface plate on which the measurement target is placed and the measurement is performed. Therefore, the temperature change of the measurement area of the surface plate due to the heat is suppressed, and the deformation of the measurement area of the surface plate is suppressed. At this time, even if a temperature change occurs in the guide region and a temperature gradient occurs in the guide region, since the volume of the guide region is smaller than that of the measurement region, the amount of deformation due to heat is small and the first side face and the inner face of the groove are small. The decrease in straightness is suppressed, and the Y carriage is moved in the Y axis direction with high accuracy.

In the three-dimensional coordinate measuring device according to another aspect of the present invention, it is preferable that the first and second support members and the third and fourth support members are arranged at positions facing each other.

In the three-dimensional coordinate measuring apparatus according to yet another aspect of the present invention, the heat insulating member may be provided on a side surface of the surface plate along the X-axis direction.

In the three-dimensional coordinate measuring device according to still another aspect of the present invention, the Y carriage may have a support portion that slidably moves in the Y-axis direction on the first side surface and the inner surface of the groove.

In the three-dimensional coordinate measuring apparatus according to still another aspect of the present invention, the supporting portion may be provided with a motor that moves the Y carriage in the Y axis direction.

In the three-dimensional coordinate measuring apparatus according to still another aspect of the present invention, the surface plate may be a stone surface plate.

According to the present invention, deformation of the surface plate due to heat can be suppressed and highly accurate measurement can be performed.

A perspective view showing the appearance of a three-dimensional coordinate measuring apparatus to which the present invention is applied The front view which showed the external appearance of the three-dimensional coordinate measuring device to which this invention is applied. Front view of the right side of the surface plate Right side view of the right side of the surface plate Perspective view showing the Y carriage with the cover removed It is a top view showing the upper surface of the surface plate, showing the arrangement of the air pads provided on the Y carriage with respect to the surface plate. FIG. 6 is a right side view showing the right side surface of the surface plate, showing the arrangement of the air pads provided on the Y carriage with respect to the surface plate. The front view which expanded and showed the groove part of the surface plate. FIG. 3 is an enlarged perspective view showing a groove portion of the surface plate and showing a bellows cover. Perspective view showing the Z column removed from the X guide Perspective view showing the Z column removed from the X guide Perspective view showing the Z column removed from the X guide Perspective view showing the support portion of the Z column removed from the X guide Perspective view showing the support portion of the Z column removed from the X guide Schematic diagram showing the positional relationship between the support points where the Y guides of the surface plate support the Y carriage, the scale in the linear encoder, and the measurement area in which the measurement object is placed, from the top surface side of the surface plate. Diagram showing how the surface plate contracts when the ambient temperature decreases Diagram showing how the surface plate contracts when the ambient temperature rises

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 and 2 are a perspective view and a front view showing the appearance of a three-dimensional coordinate measuring apparatus 1 to which the present invention is applied.

The three-dimensional coordinate measuring apparatus 1 shown in these drawings has a surface plate 10 supported on an installation surface (floor surface) via a pedestal 12. The surface plate 10 is integrally formed in a rectangular shape from a stone material such as granite or marble, and has a flat upper surface 10T on which a measurement target is placed. The upper surface 10T is arranged parallel to the X axis and the Y axis, that is, perpendicular to the Z axis. The surface plate 10 is not limited to a stone surface plate.

A gate-shaped Y carriage 14 is installed on the upper surface 10T side of the surface plate 10. The Y carriage 14 is a right Y carriage that is a first support member that is erected upright along the Z-axis direction on each of the right side and the left side of the surface plate 10 when the surface plate 10 is viewed from the front side. 16 and a second Y carriage 18 that is a second support member, and a columnar X guide 20 that extends over the upper ends of the right Y carriage 16 and the left Y carriage 18 and extends along the X axis direction.

A lower end portion of the right Y carriage 16 is movably supported by a Y guide 42, which will be described later, formed along the Y axis direction formed on the surface plate 10. Further, a drive unit that abuts the Y guide 42 is provided at the lower end of the right Y carriage 16, and the right Y carriage 16 moves along the Y guide 42 by the drive force of the drive unit. The lower end of the left Y carriage 18 is slidably supported on the upper surface 10T of the surface plate 10.

As a result, the Y carriage 14 is supported so as to be movable in the Y-axis direction with respect to the surface plate 10, and the right Y carriage 16 is driven by the drive unit at the lower end portion of the right Y carriage 16 and the left Y carriage is used. 18 is moved in the Y-axis direction with the driven side.

A Z column 22 is movably supported by the X guide 20 along the X guide 20. The Z column 22 has a built-in drive unit that abuts the X guide 20, and moves in the X axis direction along the X guide 20 by the drive force of the drive unit.

Inside the Z column 22, a columnar Z carriage 24 extending along the Z axis is movably supported in the Z axis direction (see FIG. 2), and the lower end side of the Z carriage 24 is Z. It projects from the lower end side of the column 22. The Z column 22 has a built-in drive unit that contacts the Z carriage 24, and the drive force of the drive unit moves the Z carriage 24 in the Z-axis direction.

A measurement probe 26 such as a touch probe is attached to the lower end of the Z carriage 24. The measurement probe 26 has, for example, a rod-shaped stylus 28 having a tip sphere, and the measurement probe 26 determines whether or not the tip (tip sphere) of the stylus 28 is in contact with the measurement object or the measurement object at the tip of the stylus 28. The amount of displacement of the stylus 28 caused by the contact with the stylus is detected.

The three-dimensional coordinate measuring apparatus 1 configured as described above is measured by moving the Y carriage 14 in the Y-axis direction, moving the Z column 22 in the X-axis direction, and moving the Z carriage 24 in the Z-axis direction. The stylus 28 of the probe 26 is moved in the X-, Y-, and Z-axis directions to move the tip (tip sphere) of the stylus 28 along the surface of the measurement object placed on the upper surface 10T of the surface plate 10. Then, at that time, the position (movement amount) of the Y carriage 14 in the Y axis direction, the position of the Z column 22 in the X axis direction (movement amount), the position of the Z carriage 24 in the Z axis direction (movement amount), and the stylus 28. The three-dimensional coordinates of each position on the surface of the measuring object are measured by measuring the position (displacement amount) of. Since the processing relating to the measurement of three-dimensional coordinates is well known, detailed description will be omitted.

Next, a Y drive mechanism that supports the Y carriage 14 so as to be movable in the Y axis direction and moves the Y carriage 14 in the Y axis direction will be described.

First, the support means (Y guide mechanism) of the Y carriage 14 in the Y drive mechanism will be described.

3 and 4 are a front view and a right side view showing the right side portion of the surface plate 10 in an enlarged manner.

As shown in FIG. 3, the surface plate 10 has an upper surface 10T and a lower surface 10B that are perpendicular to the Z axis, and a right side surface 10R that is perpendicular to the X axis. A groove 40 is formed along the Y-axis direction near the right side surface 10R of the surface plate 10 and on the upper surface 10T side of the surface plate 10.

In FIGS. 1 and 2, a stretchable covering member such as a bellows cover is installed in the upper opening of the groove 40, and the front and rear side surfaces (the front side surface 10F and the rear side surface 10E) of the surface plate 10 are plate-shaped. The covering members (the heat insulating members 150 and 152 described later) are attached, but the covering members are removed in FIGS. 3 and 4.

The groove 40 has a right side surface 40R and a left side surface 40L that are perpendicular to the X axis, and a bottom surface 40B that is perpendicular to the Z axis and that face each other.

As a result, the right side surface 40R of the groove 40, the right side surface 10R of the surface plate 10, the upper surface 10T of the surface plate 10 between them, and the lower surface 10B of the surface plate 10 extend along the Y-axis direction. The Y guide 42 is formed.

The right side surface 10R of the surface plate 10 and the right side surface 40R and the left side surface 40L of the groove 40 are not necessarily vertical to the X axis as long as they are surfaces formed along the Y axis direction. The bottom surface 10B of the board 10 and the bottom surface 40B of the groove 40 do not necessarily have to be surfaces perpendicular to the Z axis.

In the following, the right side surface 40R of the groove 40 is the left side surface 42L of the Y guide 42, the right side surface 10R of the surface plate 10 is the right side surface 42R of the Y guide 42, and the upper surface 10T of the surface plate 10 between them is the Y guide 42. 42T and the lower surface 10B of the surface plate 10 are referred to as the lower surface 42B of the Y guide 42.

On the other hand, FIG. 5 shows a perspective view of the Y carriage 14 with the covers of the respective parts removed. As shown in FIGS. 4 and 5, the lower end of the right Y carriage 16 has a Y-axis direction. A wide support portion 50 is provided in the.

Further, the supporting portion 50 is formed in a bifurcated shape when viewed from the front side as shown in FIG.

It should be noted that FIGS. 3 and 4 show a state in which the covering member that covers the support portion 50 is removed.

As shown mainly in FIG. 3, the support portion 50 faces the upper surface 42T of the Y guide 42 and is arranged along a direction (horizontal direction) orthogonal to the Z axis, and a base end portion 52. From the right side portion 54 extending from the base end portion 52 in the Z-axis direction to the left side surface 42L of the Y guide 42. And a left side portion 56 disposed on the opposite side.

Further, at the lower end portion of the right side portion 54, support plates 58A, 58A extending in the X-axis direction to a position facing the lower surface 42B of the Y guide 42 are provided as the tip portion 58 of the support portion 50.

Each of the base end portion 52, the right side portion 54, the left side portion 56, and the tip end portion 58 of the support portion 50 can be slid with respect to the Y guide 42 by ejecting air as described below. A plurality of disk-shaped air pads are provided. Further, a disk-shaped air pad that can slide on the upper surface 10T of the surface plate 10 by ejecting air is also provided on the lower end of the left Y carriage 18.

6 and 7 are a top view and a right side view showing the upper surface 10T and the right side surface 10R of the surface plate 10, and the arrangement of the air pads provided on the Y carriage 14 with respect to the surface plate 10 is shown.

In these figures, two air pads 62F and 62E arranged along the upper surface 42T of the Y guide 42 are provided at two locations along the Y-axis direction (on a straight line parallel to the Y-axis) at the base end portion 52 of the support portion 50. Are provided at two positions) and face downward to the upper surface 42T of the Y guide 42.

The two air pads 64F and 64E arranged along the right side surface 42R of the Y guide 42 are provided at two locations (two locations on a straight line parallel to the Y axis) along the Y axis direction on the right side portion 54 of the support portion 50. The Y guide 42 is provided at a position and faces the right side surface 42R of the Y guide 42 and is arranged leftward.

The two air pads 66F and 66E arranged along the left side surface 42L of the Y guide 42 (the right side surface 40R of the groove 40) are provided at two positions (parallel to the Y axis) on the left side portion 56 of the support portion 50 along the Y axis direction. It is provided at two positions on a straight line) and faces the left side surface 42L of the Y guide 42 so as to face right.

The two air pads 68F and 68E (see FIGS. 3 and 7) arranged along the lower surface 42B of the Y guide 42 are located at two points along the Y axis direction (parallel to the Y axis) at the tip portion 58 of the support portion 50. It is provided at two positions (on a straight line) and is arranged facing the lower surface of the Y guide 42 and facing upward.

The air pad 70, which is arranged on the upper surface near the left side surface of the surface plate 10, is provided at the lower end of the left Y carriage 18 and faces downward to face the upper surface 10T of the surface plate 10.

Here, in each of the base end portion 52, the right side portion 54, the left side portion 56, and the tip portion 58 of the support portion 50, the air pads 62F, 64F, 66F, 68F installed on the front side (front side) are in the Y-axis direction. The air pads 62E, 64E, 66E, and 68E that are arranged at substantially the same positions (that is, arranged at positions along the same XZ plane) and are arranged at the rear side (back side) are substantially the same positions in the Y-axis direction. Is located in.

The air pads 64F and 64E installed on the right side portion 54 of the support part 50 and the air pads 66F and 66E installed on the left side portion 56 are arranged at positions facing each other (that is, substantially the same position in the Z-axis direction).

The air pads 62F and 62E installed on the base end portion 52 of the support portion 50 and the air pads 68F and 68E installed on the tip end portion 58 are arranged at positions facing each other (that is, substantially the same position in the X-axis direction). ..

The air pad 70 installed at the lower end of the left Y carriage 18 has a position in the Y axis direction that is the Y axis of the center of gravity of all members (Y carriage 14 and Z column 22) that move in the Y axis direction together with the Y carriage 14. It is arranged at a position that substantially coincides with the position in the direction.

The air pads 62F, 62E, and 70 have a diameter of 110 mm, for example, whereas the air pads 64F, 64E, 66F, and 66E have a diameter smaller than that of the air pads 62F, 62E, and 70, for example, a diameter of 80 mm. .. Further, as the air pads 68F and 68E, those having a diameter smaller than that of the air pads 64F, 64E, 66F and 66E, for example, having a diameter of 60 mm are used.

For reference, the surface plate 10 has a width (width) in the X-axis direction of about 800 mm to about 1000 mm and a width (depth) in the Y-axis direction of about 1200 mm to about 2700 mm, and the Y carriage 14 is The width (height) in the Z-axis direction is about 600 mm to about 800 mm, and the support portion 50 has a width (depth) in the Y-axis direction about 650 mm.

According to the supporting means of the Y carriage 14 configured as described above, the Y carriage 14 can be moved through the air pads 62F, 62E, 64F, 64E, 66F, 66E, 68F, 68E of the supporting portion 50 of the right Y carriage 16 in the Y direction. It is supported by the guide 42 (surface plate 10). That is, the Y carriage 14 is supported by the Y guide 42 by the engagement between the support portion 50 and the Y guide 42. Along with this, the Y carriage 14 is supported on the surface plate 10 (upper surface 10T) via the air pad 70 in the left Y carriage 18.

Further, by ejecting air from the air pads 62F, 62E, 64F, 64E, 66F, 66E, 68F, 68E, 70, the air pads 62F, 62E, 64F, 64E, 66F of the support portion 50 in the right Y carriage 16 are ejected. 66E, 68F, 68E are slidable in the Y-axis direction with respect to the Y guide 42, and the air pad 70 in the left Y carriage 18 is slidable with respect to the upper surface 10T of the surface plate 10.

Therefore, the Y carriage 14 becomes movable in the Y axis direction with respect to the surface plate 10.

Next, the drive means of the Y carriage 14 in the Y drive mechanism will be described.

As shown in FIG. 4, a drive unit 80 is provided on the right side portion 54 of the support unit 50. As shown in FIGS. 6 and 7, the drive unit 80 is arranged at a position approximately in the middle between the two air pads 64F and 64E provided on the right side portion 54 of the support unit 50.

The drive unit 80 is configured by integrally assembling a motor 82, a rotatable roller 84, and a speed reduction mechanism that connects them so that power can be transmitted to the support member. Rotate.

As shown in FIG. 6, the drive unit 80 includes the Y guide 42 at a position where the rotation axis of the roller 84 is parallel to the Z axis and the outer peripheral surface of the roller 84 is substantially in the middle between the two air pads 64F and 64E. The right side surface 42R (right side surface 10R of the surface plate 10) is installed on the right side portion 54 of the supporting portion 50.

Therefore, by driving the motor 82 of the drive unit 80 to rotate the roller 84, the support unit 50 moves along the Y guide 42, and the Y carriage 14 moves in the Y axis direction.

In addition to the drive unit 80, a drive unit that abuts against the left side surface 42L of the Y guide 42 may be provided as the drive unit of the Y carriage 14 so as to face the drive unit 80, for example. You may provide only the drive part which contacts the left side surface 42L of the guide 42.

Next, the position detection means of the Y carriage 14 in the Y drive mechanism will be described.

FIG. 8 is an enlarged front view of the groove 40 portion of the surface plate 10. As shown in the same figure, on the left side surface 40L of the groove 40, for example, a long plate-shaped scale 112 that constitutes the optical linear encoder 110 and is provided with a grid scale is installed along the Y-axis direction. (See FIG. 6).

On the other hand, the left side portion 56 of the support portion 50 is provided with a support member for the optical sensor 114 that constitutes the linear encoder 110, and is arranged at a position facing the scale 112 (see FIG. 6 ). Then, a detection signal corresponding to the grid scale at a position facing the optical sensor 114 is output from the optical sensor 114.

According to the linear encoder 110, when the Y carriage 14 moves in the Y axis direction, the optical sensor 114 moves in the Y axis direction together with the Y carriage 14, and the position where the optical sensor 114 faces the scale 112 changes. At this time, the position of the Y carriage 14 in the Y-axis direction is detected based on the detection signal output from the optical sensor 114.

Next, a covering member that covers the upper opening of the groove 40 and the front side surface 10F and the rear side surface 10E of the surface plate 10 will be described.

FIG. 9 is an enlarged perspective view of the groove 40 portion of the surface plate 10.

As shown in the figure, a right rail 130R and a left rail 130L, which are omitted in FIG. 8, are fixed to the surface plate 10 and arranged at the right edge portion and the left edge portion of the upper opening of the groove 40.

Both the right rail 130R and the left rail 130L extend from the front end (front end) to the rear end (rear end) of the groove 40, and the right rail 130R includes the right side surface 40R (Y guide 42) of the groove 40. The left rail 130L is provided along the left side surface 40L of the groove 40 (see FIG. 6).

Further, the right rail 130R and the left rail 130L have a bilaterally symmetrical shape, and each of them is provided with guide grooves 132R and 132L which are lateral openings and have openings in directions facing each other.

Then, in the upper opening of the groove 40, an expandable and contractible bellows cover 134 is installed in which right and left end edges are fitted and supported by the guide groove 132R of the right rail 130R and the guide groove 132L of the left rail 130L.

The bellows cover 134 is installed separately on the front side bellows cover 134F and the rear side bellows cover 134E (see FIG. 1) with the left side portion 56 of the support portion 50 in the right Y carriage 16 interposed therebetween. The front end of the bellows cover 134F is fixed to the front side surface 10F of the surface plate 10 via a fixing member (not shown) that covers the front side surface 10F of the surface plate 10, and the rear end of the support portion 50. It is fixed to the front surface of the left side portion 56. A front end of the bellows cover 134E installed on the rear side is fixed to the rear surface of the left side portion 56 of the support portion 50, and a rear end of the bellows cover 134E is attached to a rear side surface 10E of the surface plate 10 (a rear surface 10E of the surface plate 10). Is fixed to the surface plate 10 via a covering member (for covering).

According to this, the upper opening of the groove 40 is covered with the bellows cover 134. Then, the bellows cover 134 expands and contracts in the Y-axis direction as the Y carriage 14 (support portion 50) moves in the Y-axis direction, and when the Y carriage 14 moves to the front side, the front side bellows cover 134F contracts. The bellows cover 134E on the rear side extends. When the Y carriage 14 moves to the rear side, the front side bellows cover 134F expands and the rear side bellows cover 134E contracts. Therefore, regardless of the position of the Y carriage 14 in the Y-axis direction, the bellows cover 134 always covers the upper opening of the groove 40.

This prevents the outside air from directly hitting the scale 112 installed inside the groove 40, and also suppresses the temperature change inside the groove 40, so that the scale 112 expands and contracts due to the temperature change of the outside air. Is prevented.

In addition, dust and the like are prevented from entering the inside of the groove 40, the dust and the like adhere to the scale 112, and a measurement error occurs due to a reading error on the grid scale. Further, it is possible to prevent the situation in which dust or the like adheres to the air pads 66F and 66E and the movement of the Y carriage 14 in the Y-axis direction becomes unstable.

A covering member is provided on the front side surface 10F and the rear side surface 10E of the surface plate 10. As shown in FIGS. 6 and 7, the front side surface 10F and the rear side surface 10E of the surface plate 10 are provided with plate-shaped heat insulating members 150 and 152 as covering members for covering substantially the entire surfaces thereof. To be fixed.

As a result, the amount of heat entering and exiting from the front side surface 10F and the rear side surface 10E of the surface plate 10 to and from the inside of the surface plate 10 or the outside air is reduced, so that even if the temperature of the outside air around the surface plate 10 (ambient temperature) changes. The temperature change inside the surface plate 10 is less likely to occur, and deformation of the surface plate 10 is suppressed. Further, as will be described later, even if a temperature change occurs inside the surface plate 10, generation of a temperature gradient in the Y-axis direction is suppressed. Therefore, the decrease in the straightness of the Y carriage 14 is suppressed.

Next, an X drive mechanism that supports the Z column 22 so as to be movable in the X axis direction and moves the Z column 22 in the X axis direction will be described.

First, the support means (X guide mechanism) of the Z column 22 in the X drive mechanism will be described.

FIG. 5 shows the Y carriage 14 with the cover removed as described above, and FIGS. 10, 11, and 12 show the Z column 22 removed from the X guide 20. As shown in these drawings, the Z column 22 is provided with a support part 200 to which various parts are assembled and which corresponds to an X carriage, and the support part 200 has a rectangular column-shaped X guide 20. A rectangular X-guide insertion hole 202 is provided along the X-axis direction to be inserted.

In the support portion 200, air is blown to each of the front surface 202F, the rear surface 202E, the upper surface 202T, and the lower surface 202B (referred to as the front surface 202F of the X guide insertion hole 202) that defines the X guide insertion hole 202 by ejecting air. A disk-shaped air pad that is slidable with respect to 20 is provided.

As shown in FIG. 11, a total of four air pads 210, 210, 210, 210 are arranged on the front surface 202F of the X guide insertion hole 202 at each of four locations which are vertically and horizontally symmetrical, and the X guide insertion hole 202 is provided. It is arranged rearward so as to face the front surface 20F (see FIG. 5) of 20.

As shown in FIG. 12, on the rear surface 202E of the X guide insertion hole 202, a total of three air pads 212, 212, 212 are provided, one at each of the upper two locations and one at the lower location. The front surface is disposed facing the rear surface 20E (see FIG. 5).

On the upper surface 202T of the X guide insertion hole 202, as shown in FIG. 10, a total of two air pads 214, 214, one at each of two left and right positions, are arranged, and the upper surface 20T of the X guide 20 (see FIG. 5). Is arranged facing downward.

As shown in FIG. 11, one air pad 216 is arranged on the lower surface 202B of the X guide insertion hole 202, and is arranged upward facing the lower surface 20B (see FIG. 5) of the X guide 20.

According to the support means of the Z column 22 configured as described above, when the X guide 20 is inserted into the X guide insertion hole 202 of the support part 200, the support part 200 is mediated by the air pads 210, 212, 214, 216. Supported by the X guide 20, the Z column 22 is supported by the X guide 20 via the support portion 200.

Further, by ejecting air from the air pads 210, 212, 214, 216, the air pads 210, 212, 214, 216 of the support part 200 are slidable in the X-axis direction with respect to the X guide 20. ..

Therefore, the Z column 22 becomes movable in the X axis direction.

Subsequently, the drive means of the Z column 22 in the X drive mechanism will be described.

As shown in FIGS. 10 to 12, the rear surface 202E of the X guide insertion hole 202 has the same configuration as the drive unit 80 in the Y drive mechanism described above, and includes the motor 222 and the roller 224 (see FIG. 12). A drive unit 220 is provided. The drive unit 220 is installed on the rear surface 202E of the X guide insertion hole 202 such that the rotation axis of the roller 224 is parallel to the Z axis, and the outer peripheral surface of the roller 224 is above the rear surface 202E of the X guide insertion hole 202. It is installed so as to abut the rear surface 20E (see FIG. 5) of the X guide 20 at a position approximately in the middle between the two installed air pads 212.

Therefore, by driving the motor 222 of the drive unit 220 to rotate the roller 224, the support unit 200 moves along the X guide 20, and the Z column 22 moves in the X axis direction.

The X guide 20 and the support portion 200 are provided with an optical linear encoder similar to the above-described linear encoder 110 in the Y drive mechanism as a position detecting means for the Z column 22 in the X drive mechanism. Has a long plate-shaped scale installed along the X-axis direction, and an optical sensor is arranged on the supporting unit 200 at a position facing the scale.

Next, a Z drive mechanism that supports the Z carriage 24 movably in the Z axis direction and moves the Z carriage 24 in the Z axis direction will be described.

First, the support means (Z guide mechanism) of the Z carriage 24 in the Z drive mechanism will be described.

13 and 14 show a state in which the Z carriage 24 is removed from the support portion 200 of the Z column 22 shown in FIGS. 10 to 12. As shown in these figures, the support portion 200 is shown. In addition, a rectangular Z carriage insertion hole 250 along the Z-axis direction, through which the rectangular pillar-shaped Z carriage 24 is inserted, is provided on the front side of the X guide insertion hole 202.

In the support portion 200, the front surface 250F, the rear surface 250E, the right side surface 250R, and the left side surface 250L that define the Z carriage insertion hole 250 (referred to as the front surface 250F of the Z carriage insertion hole 250, etc.) (see FIG. 14) have air. An air pad that can slide on the Z carriage 24 by being ejected is provided.

In the vicinity of the lower side opening of the Z carriage insertion hole 250, as shown in FIG. 13, a total of four air pads are provided, one on each of the front surface 250F, the rear surface 250E, the right side surface 250R, and the left side surface 250L of the Z carriage insertion hole 250. 260, 262, 264, 266, and each of the air pads 260, 262, 264, 266 includes a front surface 24F, a rear surface 24E, a right side surface 24R, and a left side surface 24L of the Z carriage 24 (see FIG. 12). It is arranged facing backward, forward, leftward, and rightward.

In the vicinity of the upper side opening of the Z carriage insertion hole 250, as shown in FIG. 14, a total of three air pads 260, 262, 264, one on each of the front surface 250F, the rear surface 250E, and the right side surface 10R of the Z carriage insertion hole 250. The air pads 260, 262, and 264 are respectively arranged rearward, frontward, and left facing the front surface 24F, the rear surface 24E, and the right side surface 24R of the Z carriage 24.

On the other hand, two air pads 266 and 266 are arranged on the left side surface 250L of the Z carriage insertion hole 250 near the upper opening of the Z carriage insertion hole 250, and these air pads 266 and 266 face the left side surface 24L of the Z carriage 24. And placed to the right.

According to the support means of the Z carriage 24 configured as described above, when the Z carriage 24 is inserted into the Z carriage insertion hole 250 of the support part 200, the support part 200 causes the air pads 260, 262, 264, 266 to intervene. Supports the Z carriage 24.

In addition, by ejecting air from the air pads 260, 262, 264, 266, the air pads 260, 262, 264, 266 of the support portion 200 are slidable with respect to the Z carriage 24, and the Z carriage 24 moves. It becomes movable in the Z-axis direction.

Next, the drive means of the Z carriage 24 in the Z drive mechanism will be described.

As shown in FIGS. 13 and 14, the front surface 250F of the Z carriage insertion hole 250 has the same configuration as the drive unit 80 in the Y drive mechanism described above, and includes a motor 272 and a roller 274 (see FIG. 14). A driving unit 270 is provided. The driving unit 270 is installed on the front surface 250F of the Z carriage insertion hole 250 such that the rotation axis of the roller 274 is parallel to the X axis, and the outer peripheral surface of the roller 274 is installed on the front surface 250F of the Z carriage insertion hole 250. The Z-carriage 24 is installed so as to contact the front surface 24F of the Z carriage 24 at a position approximately in the middle between the two air pads 260, 260.

Therefore, by driving the motor 272 of the drive unit 270 to rotate the roller 274, the Z carriage 24 moves in the Z axis direction with respect to the support unit 200.

The Z carriage 24 and the supporting portion 200 are provided with an optical linear encoder similar to the above-described linear encoder 110 in the Y drive mechanism as a position detecting means of the Z carriage 24 in the Z drive mechanism. Has a long plate-shaped scale installed along the Z-axis direction, and an optical sensor is arranged on the support section 200 at a position facing the scale.

Further, the cable protection tube 278 shown in FIGS. 10 to 14 is a bendable guide member that inserts and guides the cable inside. The cable of the measurement probe 26 attached to the lower end of the Z carriage 24 is inserted and arranged inside the Z carriage 22 and inside the cable protection tube 278 inside the Z column 22 to prevent interference with other members. ..

In the three-dimensional coordinate measuring device 1 configured as described above, the measurement accuracy of the position (Y coordinate value) of the Y carriage 14 in the Y-axis direction, that is, the improvement of the measurement accuracy of the Y coordinate value of the measurement object is mainly improved. The effect to be achieved will be described.

FIG. 15 shows the positional relationship between the support points at which the Y guide 42 of the surface plate 10 supports the Y carriage 14, the scale 112 in the linear encoder 110, and the measurement area in which the measurement object is arranged. It is the schematic diagram shown from the side.

In the figure, two front and rear support points P1 and P2 present on the left side surface 42L of the Y guide 42 formed on the surface plate 10 indicate positions where the air pads 66F and 66E of the Y carriage 14 (support section 50) contact. , The two front and rear support points P3 and P4 existing on the right side surface 42R of the Y guide 42 indicate the positions where the air pads 64F and 64E of the Y carriage 14 (support section 50) contact, and exist on the right side surface 42R of the Y guide 42. The supporting point P0 (driving point) to be used indicates the position where the roller 84 of the driving unit 80 of the Y carriage 14 (supporting unit 50) contacts (see FIG. 6).

The support points P1 and P2 indicate fixed support points, and the support points P3 and P4 indicate auxiliary support points. That is, the air pads 66F and 66E, which are the fixed support points P1 and P2, cannot move back and forth in the normal direction of the left side surface 42L of the Y guide 42, which is the guide surface on which the support portions 50 of the Y carriage 14 slide. Supported by. On the other hand, the air pads 64F and 64E serving as auxiliary support points P3 and P4 are in the normal direction of the right side surface 42R of the Y guide 42, which is the guide surface on which the support portion 50 of the Y carriage 14 slides. It is supported so as to be able to move forward and backward, and is biased in a direction in which it contacts the right side surface 42R.

As shown in the figure, the scale 112 installed on the left side surface 40L of the groove 40 is arranged between the measurement area and the Y guide 42 provided with the support points P0 to P4. That is, the scale 112 is arranged closer to the measurement area than the air pads 64F, 64E, 66F, 66E of the Y carriage 14 (right Y carriage 16) and the drive unit 80.

Therefore, the right Y carriage 16 which is a support member along the Z-axis direction of the Y carriage 14 does not intervene between the measurement area and the scale 112, and the distance from the measurement area to the scale 112 is short.

Therefore, even if the direction of the X guide 20 of the Y carriage 14 deviates from the X axis direction due to the yawing direction of the Y carriage 14 (direction around the Z axis) or the like, the stylus 28 of the measurement probe 26 in the measurement region is The difference between the Y coordinate value of the position actually arranged and the Y coordinate value of the stylus 28 obtained from the Y coordinate value of the Y carriage 14 measured by the scale 112 (linear encoder 110) becomes small.

Therefore, even if the Y carriage 14 is shaken in the yawing direction, the measurement accuracy of the Y coordinate value of the Y carriage 14, that is, the measurement accuracy of the Y coordinate value of the object to be measured can be improved.

When the roller 84 of the driving unit 80 is pressed against the right side surface 42R of the Y guide 42, the Y guide 42 uses one of the support points P3 and P4 as an auxiliary support point and one support point P0 of the right side surface 42R. , The left side surface 42L is stable in a state of being supported by the two supporting points P1 and P2. As a result, the Y-carriage 14 does not easily shake in the yawing direction.

Further, since the scale 112 is installed on the surface plate 10, as compared with a case where the scale 112 is installed on a Y guide or the like which is separate from the surface plate 10, the influence of thermal deformation of the Y guide and the surface plate and Y surface. The measurement accuracy does not decrease due to the instability of the joint with the guide. Therefore, high measurement accuracy can be maintained continuously.

Further, since the scale 112 is not provided on the peripheral portion of the surface plate 10 (right side surface 10R, left side surface 10L, etc.) but is arranged inside the surface plate 10, the influence of ambient temperature change is small, and the scale 112 The deterioration of accuracy due to expansion and contraction of is suppressed. In particular, since the bellows cover 134 is installed in the upper opening of the groove 40 to shield the inside of the groove 40 from the outside air as described above, it is possible to prevent the outside air from directly contacting the scale 112, and the inside of the groove 40 is prevented. Internal temperature changes are also suppressed. Therefore, expansion and contraction of the scale 112 due to changes in the ambient temperature is reliably suppressed, and it is not necessary to use an expensive material for the scale 112 that does not expand or contract even when the ambient temperature changes, and an inexpensive one can be used. it can.

Further, since the front side surface 10F and the rear side surface 10E of the surface plate 10 are covered with the heat insulating members 150 and 152, the front side surface 10F and the rear side surface 10E of the surface plate 10 are thermally shielded from the outside air. Therefore, the amount of heat that enters and leaves the front surface 10F and the rear surface 10E of the surface plate 10 into and out of the surface plate 10 is reduced.

Here, assuming that the surface plate 10 is one in which the groove 40 is not formed and the heat insulating members 150 and 152 are not provided, the deformation state of the surface plate 10 with respect to the change in ambient temperature will be described. ..

FIG. 16 shows how the surface plate 10 contracts when the ambient temperature of the surface plate 10 decreases. When the ambient temperature decreases, the temperature of the surface plate 10 decreases from the peripheral portion prior to the inside thereof. Therefore, the temperature distribution in the central portion of the surface plate 10 becomes higher than that in the peripheral portion after the ambient temperature decreases and until the inside of the surface plate 10 stabilizes at a uniform temperature. During this time, the right side surface 10R and the left side surface 10L of the surface plate 10 along the Y-axis direction, and the front side surface 10F and the rear side surface 10E along the X-axis direction are in a state where the intermediate portions thereof bulge outward beyond the end portions.

On the contrary, FIG. 17 shows how the surface plate 10 expands when the ambient temperature of the surface plate 10 rises. When the ambient temperature rises, the temperature of the surface plate 10 rises from the peripheral portion prior to the inside thereof. Therefore, the temperature distribution in the central portion of the surface plate 10 becomes lower than that in the peripheral portion after the ambient temperature rises and until the inside of the surface plate 10 stabilizes at a uniform temperature. During this time, the right side surface 10R and the left side surface 10L of the surface plate 10 along the Y-axis direction and the front side surface 10F and the rear side surface 10E along the X-axis direction are in a state in which the intermediate portions are inwardly recessed from the end portions.

Such deformation of the surface plate 10 causes a decrease in straightness of the right side surface 10R and the left side surface 10L along the Y-axis direction. Then, when the Y carriage 14 is moved in the Y axis direction with reference to the right side surface 10R, the Y carriage 14 is shaken in the yawing direction (around the Z axis), and the direction of the X guide 20 of the Y carriage 14 is changed to the X axis. Deviate from the direction. Therefore, the measurement accuracy of the Y coordinate value of the Y carriage 14 deteriorates.

On the other hand, in the surface plate 10 of the present embodiment, since the front side surface 10F and the rear side surface 10E are covered with the heat insulating members 150 and 152, the front side surface 10F and the rear side surface 10E move to the inside or outside air of the surface plate 10. The amount of heat entering and exiting is reduced. Therefore, it is difficult for a temperature change to occur inside the surface plate 10 due to a decrease or an increase in the ambient temperature, and even if the temperature change occurs, the occurrence of a temperature gradient in the Y-axis direction is suppressed.

Therefore, the straightness of the Y guide 42 of the surface plate 10, that is, the straightness of the left side surface 42L, the right side surface 42R, the upper surface 42T, and the lower surface 42B of the Y guide 42 is prevented from decreasing regardless of the change in the ambient temperature.

In addition, in the surface plate 10 of the present embodiment, the measurement area where the measurement object is placed and the measurement is performed, and the area (guide area) of the Y guide 42 that guides the Y carriage 14 in the Y axis direction are grooved. 40 is discontinuous in the X-axis direction. Therefore, heat conduction between the measurement area and the guide area is suppressed, and heat generated near the guide area (Y guide 42), that is, heat generated by the Y drive mechanism, for example, Y Heat generated by the motor or the like of the drive unit 80 of the drive mechanism and frictional heat between the Y guide 42 and the air pads 62F, 62E, 64F, 64E, 66F, 66E68F, 68E flow into the measurement region through the guide region. Is suppressed.

Therefore, it is possible to prevent the temperature of the measurement area of the surface plate 10 from changing due to the heat generated in the vicinity of the guide area, and to suppress the deformation of the measurement area of the surface plate 10. The heat causes a temperature change in the guide region of the surface plate 10, and even if a temperature gradient occurs, the volume of the guide region is small, so that the amount of deformation of the guide region is small and the straightness of the Y guide 42 is affected. Is hardly generated.

From the above, the deformation of the surface plate 10 due to heat is suppressed, and the decrease in the straightness of the Y guide 42 is suppressed, so that the Y carriage 14 is accurately moved in the Y axis direction. Therefore, highly accurate measurement that is not affected by heat becomes possible.

A cover is provided along the right side surface 10R of the surface plate 10 to cover the entire area of the Y guide 42 or the entire area of the Y guide 42 and the groove 40, and the guide area of the surface plate 10 is affected by changes in ambient temperature. Alternatively, the straightness of the Y guide 42 may be maintained without being affected. Further, when the temperature inside the cover rises due to the heat generated from the Y drive mechanism or the like, an air exhaust unit may be provided to discharge the air inside the cover to the outside to keep the temperature inside the cover constant.

As described above, the three-dimensional coordinate measuring apparatus 1 of the above-described embodiment may have a configuration in which the right and left sides are reversed, and the groove 40 and the Y guide 42 are not located along the right side surface 10R of the surface plate 10, but the surface plate. It may be formed at a position along the left side surface of 10.

Further, in the above-described embodiment, the case where the air pad (air bearing) is used as the support member slidably abutting on each surface of the Y guide 42 or the like has been described, but a support member other than the air pad may be used. Good. Further, the arrangement of the supporting member slidably abutting on each surface of the Y guide 42 and the like and the arrangement of the drive unit 80 can be appropriately changed. The support members (air pads 66F, 66E) arranged inside the groove 40 may be slidably arranged on the inner surface of the groove 40 other than the right side surface 40R of the groove 40.

Further, although the scale 112 is installed on the left side surface 40L of the groove 40 in the above-described embodiment, the scale 112 is provided on the inner surface of the groove 40 other than the left side surface 40L (the right side surface 40R of the groove 40, the bottom surface 40B, etc.) along the Y-axis direction. By installing the same effect as described above can be obtained.

Further, in the above embodiment, the bellows cover 134 is used as the covering member that covers the upper opening of the groove 40, but a covering member other than the bellows cover may be used. For example, a covering member made of a stretchable material may cover the upper openings of the grooves 40 on the front side and the rear side of the lower end portion (the left side portion 56 of the support portion 50) of the Y carriage 14 fitted into the groove 40. .. Further, the whole upper opening of the groove 40 is covered with the integrally formed covering member, and the lower end portion (the left side portion 56 of the supporting portion 50) of the Y carriage 14 is inserted into the covering member from the outside of the groove 40. An insertion passage such as a notch may be formed along the groove 40 (Y-axis direction), which is closed except when the lower end portion of the Y carriage 14 is inserted. Furthermore, a configuration may be adopted in which a covering member that covers the upper opening of the groove 40 is not provided.

Further, in the above-described embodiment, the heat insulating members 150 and 152 are provided on the front side surface 10F and the rear side surface 10E of the surface plate 10, but a heat insulating member may be provided on the left side surface 10L of the surface plate 10.

Further, in the above-described embodiment, an optical linear encoder and a position detecting means of the Y carriage 14 for measuring the Y coordinate value of the Y carriage 14, a position detecting means of the Z column 22, and a position detecting means of the Z carriage 24 are used. Although the form using the scale is shown, other types of linear encoders and scales such as magnetic type can be used as well as optical type.

The effects of the above three-dimensional coordinate measuring apparatus 1 will be supplementarily described below.

In the three-dimensional coordinate measuring apparatus 1 of the above-described embodiment, the axis of the roller 84 of the driving unit 80 is arranged in the direction perpendicular to the upper surface 10T of the surface plate 10. Therefore, since the roller 84 comes into contact with the vertical surface of the surface plate 10, dust is not chewed, and the side surface of the surface plate 10 can be used as a reference for accurate measurement.

Further, the roller 84 is driven along the side surface (right side surface 10R) of the surface plate 10. Therefore, even if the surface plate 10 is slightly deformed, the surface plate 10 can be used as a reference for measurement. If the roller 84 moves along another rail different from the surface plate 10, it will not be synchronized with the deformation of the surface plate 10 due to other factors such as thermal expansion of the other rail.

The air pads 64F, 64E, 66F, 66E are also arranged vertically along the side surface of the surface plate 10. Therefore, the position is set based on the surface plate 10 as in the above. In addition, it is possible to reduce a yawing error that shakes left and right with respect to the traveling direction when the Y carriage 14 moves.

Further, the rollers 84 of the drive unit 80 arranged in the vertical direction are arranged so as to be sandwiched by the air pads 66F and 66E similarly arranged in the vertical direction. Therefore, it is possible to reduce the yawing error and the vibration without pinching the posture by sandwiching it with the air pads in the front and rear even when driving suddenly.

Further, the distance (interval) between the support points P1 and P2 on the Y carriage 14 is sufficiently larger than the distance (interval) between the support points P1 and P2 and the drive point P0. Therefore, it is possible to reduce the vibration of the Y carriage 14 and reduce the yawing error in which the moving direction shakes left and right with respect to the moving direction.

Further, the air pads 66F and 66E are arranged so as to be perpendicular to the side surfaces of the groove 40 of the surface plate 10. Therefore, by forming the groove 40 on the surface plate 10 and using the support points P1 and P2 by the air pads 66F and 66E as the side surfaces of the groove 40 of the surface plate 10, the deformation such as thermal expansion of the surface plate 10 is also followed. It can be measured with the platen 10 as a reference.

Further, air pads 66F and 66E facing the support points P3 and P4 by the air pads 64F and 64E are present as support points P1 and P2 on the side surface of the groove 40 of the surface plate 10, and are supported by the Y guide 42 by them. Therefore, the side surface of the surface plate 10 is used as a reference, and the Y carriage 14 is supported only on the drive side (on the right Y carriage 16 side on which the drive unit 80 is arranged) with respect to the driven side (on the left Y carriage 18 side). .. Therefore, the sliding resistance on the driven side becomes negligible, and the yawing error is significantly reduced.

Further, only the air pad 70 in the Z-axis direction is arranged on the driven side of the Y carriage 14, and there is no air pad for suppressing the Y-axis direction. Therefore, the movement in the Y-axis direction follows the drive side without creating extra resistance on the driven side. As a result, vibration can be reduced and yawing can be reduced.

The positions of the air pads 70 in the Z axis direction on the driven side of the X guide 20 and the Y carriage 18 in the Y axis direction are the air pads 66F, 66E (support points P1, P2) on the drive side of the Y carriage 18 or the air pads 64F, 64E. It exists between (support points P3, P4). Therefore, even in a sudden acceleration/deceleration, the moment of the X guide 20 and the measuring portion is only received within the width of the supporting points P1 and P2 (or the supporting points P3 and P4), and there is almost no sliding resistance. As a result, vibration and yawing error are extremely small.

1... Three-dimensional coordinate measuring device, 10... Surface plate, 10B, 20B, 42B, 202B... Lower surface, 10R, 24R, 40R, 42R, 250R... Right side surface, 10T, 20T, 42T, 202T... Upper surface, 12... 14... Y carriage, 16... Right Y carriage, 18... Left Y carriage, 20... X guide, 20E, 24E, 202E, 250E... Rear surface, 20F, 24F, 202F, 250F... Front surface, 22... Z column, 24... Z Carriage, 24L, 40L, 42L, 250L... Left side surface, 26... Measuring probe, 28... Stylus, 40... Groove, 40B... Bottom surface, 42... Y guide, 50, 200... Support portion, 52... Base end portion, 54... Right side part, 56... Left side part, 58... Tip part, 58A... Support plate, 62E, 62F, 64E, 64F, 66E, 66F, 68E, 68F, 70, 210, 212, 214, 216, 260, 262, 264. 266... Air pad, 80, 220, 270... Drive part, 82, 222, 272... Motor, 84, 224, 274... Roller, 110... Linear encoder, 112... Scale, 114... Optical sensor, 130L... Left rail, 130R... Right rail, 132L, 132R... guide groove, 134, 134E, 134F... bellows cover, 150, 152... heat insulating member, 202... X guide insertion hole, 250... Z carriage insertion hole

Claims (1)

A surface plate having an upper surface perpendicular to the Z axis and a first side surface along the Y axis direction, on which the measurement object is placed, and a measurement probe supported on the upper surface side of the surface plate, and , A Y carriage movably arranged in the Y-axis direction,
A groove formed on the surface plate along the first side surface;
A Y guide movably supporting the Y carriage formed between the first side surface and the groove;
A drive unit that abuts on the Y guide and moves the Y carriage;
Equipped with
A three-dimensional coordinate measuring device in which the driving unit includes a roller that abuts a guide side surface of the Y guide, and a motor that is arranged at least at a position facing the guide side surface and that rotates the roller.

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