JP6770908B2 - Article processing equipment - Google Patents

Description

The present invention relates to, for example, a processing apparatus and a processing method for an article in which the container is transported to a processing unit for forming a barrier film on the inner surfaces of a plurality of containers, the container is processed, the container is discharged from the processing unit, and the container is further transported. ..

A container such as a plastic container, for example, a PET bottle, has a barrier film, for example, DLC (Diamond Like Carbon) on the inner surface thereof in order to prevent the permeation of oxygen from the outside and the permeation of carbon dioxide from the inside (for example, carbonated drinking water). Such a barrier film containing carbon as a main component and a silica film containing Si as one of the main components are coated.

Patent Document 1 and Patent Document 2 disclose an article processing apparatus that carries in and out the container into the film forming apparatus when the barrier film is formed on the container by the batch type film forming apparatus. In the processing apparatus disclosed in Patent Document 1 and Patent Document 2, the number of containers indexed from the containers continuously conveyed is n, but only 2 n processing units are prepared for film formation processing. To do. The 2n processing units are divided into a first processing unit and a second processing unit, and n containers are alternately processed by the first processing unit and the second processing unit. Then, the container is supplied and discharged to the processing unit that has not been processed by utilizing the waiting time generated by the processing. By doing so, it is sufficient to have n supply / discharge units for supplying and discharging while maintaining the number of processing per unit time, so that the installation space of the transport device including this supply / discharge part can be reduced. It has characteristics.

Japanese Patent No. 5489905 Japanese Patent No. 5574868

An object of the present invention is to provide an article processing apparatus capable of further saving space while enjoying the characteristic portions of Patent Document 1 and Patent Document 2.

The article processing apparatus of the present invention has a circulation path, transports a plurality of processing objects received in the supply / discharge area as a predetermined group of n units, and performs a predetermined first treatment. A transport unit that transports the finished processing object to the supply / discharge area, and a plurality of processing objects that are provided along the circulation path and each perform the first processing on the number of processing objects corresponding to n items forming the group. The first processing unit having the processing unit of No. 1 and the processing target before processing are supplied from the circulation route to the first processing unit, and the processing target that has completed the predetermined processing is discharged from the first processing unit to the circulation route. It is characterized in that it is provided with a mounting unit, and the transport unit transports the object to be processed along a circulation path while changing the interval thereof.

In the article processing apparatus of the present invention, since the transport unit can transport the object to be processed while changing the interval, the interval of the object to be processed is narrowed in the area where a narrow interval is sufficient, and the object to be processed is narrowed in the area where a wide interval is required. Widen the interval. That is, in the region where it is not necessary to widen the interval between the objects to be processed, the interval can be narrowed, so that the transfer path formed by the circulation path can be shortened as compared with the conveyor transfer in which the interval is constant. Therefore, according to the present invention, it is possible to save space in the article processing apparatus.

The transport unit in the present invention transports the processing objects belonging to the group received in the supply / discharge area toward the transfer unit with a wide interval, and receives from the transfer unit, the group that has completed the first processing. The object to be processed belonging to the above can be transported to the supply / discharge area by narrowing the interval.
When the spacing between the objects to be processed in the processing section is wide, it is possible to omit providing a mechanism for widening the spacing in the transfer section by widening the spacing in advance.

In the present invention, the transfer unit includes a plurality of transfer machines corresponding to each of the plurality of processing units, and each of the plurality of transfer machines is provided between the transfer unit and the first processing unit to transfer. The processing object to be transported can be transferred to the corresponding processing unit.
By providing a transfer machine corresponding to each of the processing units, it is not necessary to move the transfer machine, so that the time required for the entire series of processing can be shortened.

In the present invention, each of the transport units travels independently along the circulation path, and a plurality of movers that support the object to be processed, permanent magnets provided on each mover, and along the circulation path. It is preferable that it functions as a linear transfer device including an electromagnetic coil provided.
By using the linear transfer device, it is possible to change the interval of the processing object with high accuracy.

In the present invention, the first processing unit includes a first processing unit provided on the downstream side in the transport direction of the object to be processed, a second processing unit adjacent to the first processing unit, and a third processing unit adjacent to the second processing unit. It is equipped with a processing unit, and the transfer unit is a first transfer machine corresponding to the first processing unit, a second transfer machine corresponding to the second processing unit, and a third transfer corresponding to the third processing unit. It can be equipped with a mounting machine. In this case, the transport unit distributes m (however, m> n) of the objects to be processed received in the supply / discharge area to each n, and the first transfer machine, the second transfer machine, and the third transfer machine. It can be transported to two of the transfer machines.
In this way, by providing the first processing unit to the third processing unit and three processing units and distributing m processing objects to each n pieces, it is possible to realize an article processing apparatus having a high processing capacity.

In the transport unit in the present invention, the first processing unit is used for at least n processing objects between the first processing unit and the second processing unit and between the second processing unit and the third processing unit. A corresponding interval is provided, and the transport unit has a first buffer area corresponding to the interval between the first processing unit and the second processing unit, and a first buffer area corresponding to the interval between the second processing unit and the third processing unit. It can be equipped with two buffer areas.
By providing the first buffer area and the second buffer area in this way, continuous processing of the processing target can be realized by using the first processing unit 61 to the third processing unit and the three processing units.
Specifically, the transport unit transports the processing object before the first processing in the first processing unit to the first transfer machine after waiting for a predetermined time in the second buffer area. The processing object subjected to the first processing by the third processing unit may be waited for a predetermined time in the first buffer area, and then passed through the area corresponding to the first processing unit and transported to the supply / discharge area. ..

In the transport unit of the present invention, the first bypass route that bypasses the portion of the circulation path corresponding to the first processing unit and transports the object to be processed toward the supply / discharge region, and the circulation path corresponding to the third processing unit. A second bypass route for transporting the object to be processed toward the first processing unit, bypassing the portion of the above, can be provided.
By providing the first bypass route and the second bypass route in this way, continuous processing of the processing object can be realized by using the first processing unit to the third processing unit and the three processing units.
Specifically, the transport unit transports the processing object before the first processing in the first processing unit to the first transfer machine after passing through the second bypass path, and then transports the processing object to the first transfer machine for the third processing. The processing object to which the first processing has been performed by the unit may be conveyed to the supply / discharge area by passing through the area corresponding to the first processing unit after passing through the first bypass path.

In the transport section of the present invention, the circulation path includes an outward path from the supply / discharge area to the first processing section and a return path from the passage through the first processing section to the supply / discharge area. A processing object that has been subjected to the first treatment by the first processing unit may be provided with a second processing unit that performs a second treatment different from the first treatment.
By doing so, it is possible to realize a space-saving article processing apparatus capable of sequentially performing two different types of processing on the object to be processed in the process of being conveyed in the circulation path.

When the second processing unit is provided, the object to be processed is a resin container for accommodating a beverage, the first processing unit forms a barrier film on the inner surface of the container, and the transport unit inverts the container. In the transfer section, the container on which the barrier film is formed is inverted from the inverted state and transferred from the transport section to the first treatment section in an upright state, and the barrier is transferred at the first treatment section. The container on which the film was formed was inverted from an upright position and transferred from the first processing section to the transport section, and the second treatment section was transported in an inverted state with the barrier film formed. Compressed air can be blown onto the inner surface of the container.

According to the article processing apparatus of the present invention, since the transport unit can transport the object to be processed while changing the interval, the interval can be narrowed in the region where the interval of the object to be processed does not need to be widened, so that the interval is constant. The transport path consisting of the circulation path can be shortened as compared with the conveyor transport. Therefore, according to the present invention, it is possible to save space in the article processing apparatus.

It is a top view which shows the schematic structure of the barrier film forming apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows the operation of the barrier film forming apparatus of FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the 1st film formation unit, the 2nd film formation unit, and the 3rd film formation unit in the barrier film forming apparatus which concerns on 1st Embodiment in chronological order. It is a top view which shows the schematic structure of the barrier film forming apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows the operation of the barrier film forming apparatus of FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the 1st film-forming unit, the 2nd film-forming unit, and the 3rd film-forming unit in the barrier film forming apparatus which concerns on 2nd Embodiment in time series comparison. It is a figure which shows the operation of the barrier film forming apparatus which concerns on 3rd Embodiment of this invention. It is a figure which shows the operation of the barrier film forming apparatus of FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a figure which shows the operation of the barrier film forming apparatus following FIG. It is a top view which shows an example of the 2nd transfer part in this embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
[First Embodiment]
In this embodiment, as an example, the barrier film forming apparatus 1 shown in FIG. 1 operates as follows to form a DLC (Diamond Like Carbon) film on the inner surface of the container 100 as a processing object. explain. The container 100 corresponds to, for example, a resin bottle filled with a beverage.
The container 100 that has been conveyed by the supply / discharge conveyor 20 formed of the conveyor device is delivered to the linear transfer unit 40 in units of 2 n (m), for example, 6 that are to be supplied or discharged at one time. Although an example in which the container 100 is conveyed in a single row on the supply / discharge conveyor 20 is shown here, the present embodiment can also target a container 100 which is conveyed in a plurality of rows, for example, two rows.
The containers 100 transferred to the linear transport unit 40 are divided into n containers, which is the number of containers formed together in the process of transporting the linear transport unit 40 in the transport direction F, and are supplied to the processing unit 60. To.
A DLC film is formed on the inner surface of the container 100 supplied to the processing unit 60. The processing unit 60 includes a first film forming unit 61, a second film forming unit 62, and a third film forming unit 63, each of which can independently form a film.
The container 100 on which the DLC film is formed is delivered to the linear transport unit 40, and in the process of transporting the linear transport unit 40, compressed air is blown inside by the air cleaner 70 to remove foreign substances inside. Is done.
The container 100 whose internal dust has been removed is conveyed to the supply / discharge area 41 of the linear transfer unit 40, and then is discharged to the supply / discharge conveyor 20.
The barrier film forming device 1 includes a control unit 80 that controls the above operations.
In the barrier film forming apparatus 1, upstream and downstream are defined with reference to the direction in which the container 100 is conveyed. Further, in the linear transport unit 40, the process from receiving the container 100 in the supply / discharge area 41 to passing through the processing unit 60 is defined as the outward route, and the route from passing through the processing unit 60 to the supply / discharge area 41 is defined as the return route. ..

[Supply / discharge conveyor 20]
The supply / discharge conveyor 20 receives the container 100 from the supply source of the container 100 provided on the upstream side thereof, and continuously conveys the container 100 to the supply / discharge area 21. Further, the supply / discharge conveyor 20 receives the container 100 that has undergone the DLC film film forming process in the processing unit 60 and the dust removal process in the air cleaner 70 in the supply / discharge area 21, and conveys the container 100 toward the downstream. Each of the containers 100 is conveyed by the supply / discharge conveyor 20 while being in contact with the containers 100 that are in phase with each other so as not to have a gap. In this embodiment, the container 100 is conveyed on the supply / discharge conveyor 20 in an upright state. In addition, the upright means a state in which the drinking spout of the container 100 faces upward, and the inverted means a state in which the drinking spout faces downward as opposed to the upright.
Here, both the supply of the container 100 to the linear transport section 40 and the discharge from the linear transport section 40 are performed in the supply / discharge area 21, but the supply area and the discharge area may be provided separately. In this case as well, both are combined to form the supply / discharge area 21. The same applies to the supply / discharge area 41 described later.

[First transfer section 30]
The barrier film forming apparatus 1 includes a first transfer unit 30 that transfers the container 100 from the supply / discharge conveyor 20 to the linear transfer unit 40, and transfers the container 100 from the linear transfer unit 40 to the supply / discharge conveyor 20. There is.
As shown in FIG. 1, the first transfer unit 30 includes 2 n (m) (6) grippers 31 that grip the container 100. The first transfer unit 30 includes a mechanism for moving the gripper 31 forward and backward in a direction orthogonal to the direction in which the container 100 is conveyed by the supply / discharge conveyor 20 or the linear transfer unit 40. Further, the first transfer unit 30 transfers the container 100 gripped by the gripper 31 upside down from the supply / discharge conveyor 20 to the linear transfer unit 40 and vice versa. Therefore, the first transfer unit 30 rotates the gripper 31 about the rotation axis C1 parallel to the horizontal direction H. Further, the first transfer unit 30 transfers the container 100 from the supply / discharge conveyor 20 to the linear transfer unit 40 and vice versa while inverting the left and right sides of the container 100. Therefore, the first transfer unit 30 rotates the gripper 31 around another rotation axis C3 parallel to the horizontal direction H. In the case of the present embodiment, since the container 100 is conveyed by the supply / discharge conveyor 20 in an upright posture, the container 100 transferred to the linear transfer unit 40 by the first transfer unit 30 is turned upside down. .. Further, the container 100 is transferred to the linear conveyor 40 in the reverse order of the order in which the supply / discharge conveyor 20 has been conveyed.

The first transfer unit 30 transfers the container 10 from the supply / discharge conveyor 20 to the linear transfer unit 40 without changing the interval between the containers 100 conveyed by the supply / discharge conveyor 20, that is, while maintaining a close contact with each other without gaps. Is reprinted. Even when the container 100 is transferred from the linear transport unit 40 to the supply / discharge conveyor 20, the container 100 is maintained in a dense state.

[Linear transport unit 40]
The linear transport unit 40 transports the container 100 before processing transferred from the first transfer unit 30 to the processing unit 60 in the supply / discharge region 41, and also finishes the film formation process of the DLC film, and finishes the film formation process of the DLC film, and then the processing unit 60. The container 100 discharged from the above is conveyed to the supply / discharge area 41.
As shown in FIG. 1, the linear transport unit 40 is attached to a guide rail 43 forming an endless circulation path, a plurality of movers 45 moved along the guide rail 43, and each mover 45. A gripper (not shown) for gripping the container 100 and a linear motor 47 for moving the mover 45 along the guide rail 43 are provided. Only a part of the mover 45 is shown in FIG.
The guide rail 43 is formed in a track shape, and includes straight portions 43A and 43B facing each other, and curved portions 43C and 43D connecting both ends of the straight portion 43A and the straight portion 43B. In the guide rail 43, the straight portion 43A is provided on the side of the supply / discharge conveyor 20, and the straight portion 43B is provided on the side of the processing portion 60. The supply / discharge area 41 is provided on the side of the straight line portion 43A.

The linear motor 47 includes a permanent magnet 48 fixed to each mover 45 and a large number of electromagnetic coils 49 arranged at equal pitches along the longitudinal direction of the guide rail 43, that is, a so-called moving magnet type linear motor. Make up the motor.

In the linear motor 47, the supply and stop of the current to each of the electromagnetic coils 49 can be independently controlled by the instruction of the control unit 80 to move and stop the respective movers 45. Therefore, the linear transfer unit 40 can change the interval between the containers 100 to be conveyed by changing the interval between the adjacent movers 45. Specifically, at the time of transfer from the first transfer unit 30, the container 100 is in contact with the adjacent container 100, but the first film formation unit 61 and the second film formation unit 62 of the processing section 60 are in contact with each other. At the time of delivery to each of the third film forming unit 63 and the third film forming unit 63, the distance between the adjacent containers 100 is widened. The reason why the spacing between the containers 100 is increased in this way is to match the spacing between the film forming chambers 64 to 66, which is tighter than the state.

[Second transfer section 50]
The barrier film forming apparatus 1 transfers the container 100 from the linear transport unit 40 to the first film forming unit 61, the second film forming unit 62, and the third film forming unit 63 of the processing unit 60, and the barrier film forming apparatus 1 As shown in the above, a second transfer unit 50 for transferring the container 100 from the first film formation unit 61, the second film formation unit 62, and the third film formation unit 63 to the linear transfer unit 40 is provided. The second transfer unit 50 corresponds to the first film formation unit 61, the second film formation unit 62, and the third film formation unit 63, respectively, and corresponds to the first transfer machine 51, the second transfer machine 52, and the third transfer machine. It is equipped with a transfer machine 53.

As shown in FIG. 1, each of the first transfer machine 51, the second transfer machine 52, and the third transfer machine 53 is provided with n (three) grippers 54 and 55 for gripping the container 100. There is. The gripper 54 and the gripper 55 are arranged so as to form a pair at both ends of the support arm 57 so that when one faces the linear transport unit 40, the other faces the processing unit 60. The second transfer unit 50 includes a mechanism for the container 100 to move the grippers 54 and 55 back and forth with respect to the linear transfer unit 40 or the processing unit 60. Further, as shown in FIG. 21, the second transfer unit 50 transfers the container 100 gripped by the grippers 54 and 55 from the linear transfer unit 40 to the processing unit 60 while inverting the top and bottom of the container 100. The reverse transfer can be done at the same time. This transfer can be performed by rotating the gripper 54 and the support arm 57 that supports the gripper 55 around the rotation axis C2 parallel to the horizontal direction H.
In the case of the present embodiment, since the container 100 is conveyed by inverted the linear transport unit 40, the container 100 transferred toward the processing unit 60 by the second transfer unit 50 is turned upside down. The container 100 transferred from the processing unit 60 toward the linear transfer unit 40 in the second transfer unit 50 is turned upside down.

Since the interval of the containers 100 is changed by the linear transfer unit 40, the second transfer unit 50 maintains the interval of the containers 100 conveyed by the linear transfer unit 40 without changing, that is, maintaining a predetermined interval. However, the container 100 is transferred from the linear transport unit 40 to the processing unit 60. Even when the container 100 is transferred from the processing unit 60 to the linear transport unit 40, the distance between the containers 100 is maintained.

[Processing unit 60]
The processing unit 60 forms a DLC film on the inner surface of the container 100 supplied from the second transfer unit 50. The processing unit 60 corresponds to the first processing unit of the present invention.
As shown in FIG. 1, the processing unit 60 includes a first film forming unit 61, a second film forming unit 62, and a third film forming unit 63.
The first film forming unit 61 to the third film forming unit 63 basically have the same configuration, and each includes three film forming chambers 64, 65, 66 as processing elements. A DLC film is formed in the container 100 in a state of being housed in these film forming chambers 64 to 66 in an upright posture.
The first film forming units 61 to the third film forming units 63 are arranged in series in parallel with the transport direction F of the container 100 by the linear portion 43B of the linear transport unit 40. The containers 100 are sequentially supplied to the first film forming unit 61 to the third film forming unit 63 every n (three) to form a DLC film.

The first film forming unit 61 to the third film forming unit 63 arranged in series are between the first film forming unit 61 and the second film forming unit 62, and the second film forming unit 62 and the third film forming unit 62. There is a gap between 63 by the interval L1. The interval L1 has a relationship of L1 ≧ 3D, where D is the diameter of the container 100. That is, the interval L1 has a size of at least three containers 100 or more. By providing the interval L1, the first buffer area 43E and the second buffer area 43F corresponding to the interval L1 are generated in the linear portion 43B of the linear transport portion 40.

The processing unit 60 is an external electrode that surrounds the container 100 when the container 100 is housed in the film forming chambers 64 to 66, and an internal electrode that is inserted into the container 100 housed in the external electrode from the exhaust pipe side and connected to the ground side. , A gas supply means for supplying a medium gas to the internal electrode, a high-frequency power source connected to the external electrode, and the like are provided, but since these configurations are well known, the description thereof is omitted here. The DLC film is generally formed by the following procedure.
(1) The container 100 is supplied into the film forming chambers 64 to 66.
(2) Vacuum the inside of the chamber.
(3) For example, acetylene gas, which is a raw material for the film, is supplied to the inside of the container 100.
(4) Acetylene gas is turned into plasma by high-frequency RF (Radio Frequency: 13.56 MHz) power, and a thin film (DLC film) having a diameter of 10 to 30 nm is deposited on the inner surface of the container 100.
(5) After opening the film forming chambers 64 to 66 to the atmosphere, the container 100 is taken out.

[Air cleaner 70]
The air cleaner 70 removes adhering foreign substances, mainly carbon compound particles, by blowing compressed air onto the inner surface of the container 100 on which the DLC film is formed. The air cleaner 70 corresponds to the second processing unit of the present invention.
As shown in FIG. 1, the air cleaner 70 of the present embodiment is provided on the return path in the straight portion 43A of the linear transport portion 40 to which the container 100 having finished forming the DLC film is conveyed. An air cleaner 70 is provided in the straight portion 43A by utilizing the fact that the container 100 is conveyed in the linear conveying portion 40 in an inverted state, and the container 100 after film formation is conveyed to the supply / discharge region 41 of the linear conveying portion 40. In the meantime, dust is removed by blowing air.
The air cleaner 70 performs dust removal in two stages, a first dust removal stage 71 and a second dust removal stage 72, in order to ensure completeness of foreign matter removal. Each method of dust removal is arbitrary, and dust removal having the same content may be repeated, or dust removal having different contents may be performed. Of course, the present embodiment allows the dust removal to be one step.

[Processing procedure of barrier film forming apparatus 1]
Hereinafter, the processing procedure from forming the DLC film on the container 100 supplied from the supply / discharge conveyor 20 to the dust removal process by the air cleaner 70 will be described with reference to FIGS. 2 to 8. This processing procedure is executed according to an instruction from the control unit 80. In addition, since some elements and reference numerals are omitted in FIGS. 2 to 8, please refer to FIG. 1 as necessary.

As shown in FIGS. 2 (a) and 2 (b), the container 100 (No. 1 to 6) of the first group G1 conveyed to the supply / discharge area 21 by the supply / discharge conveyor 20 is the first transfer unit. It is transferred to the linear transfer unit 40 by 30. By this transfer, the container 100, which was in the upright position on the supply / discharge conveyor 20, is turned upside down in the inverted position. In the present embodiment, the containers 100 are transferred from the supply / discharge conveyor 20 to the linear transfer unit 40 in units of 6 (2n = m). The numbers in the circle indicating the container 100 indicate the order from the beginning of the containers 100 that are continuously transported.

As shown in FIG. 3A, the containers 100 of the first group G1 transferred to the linear transport unit 40 are three (n) containers 100 (No. 1-3) from the beginning by the linear transport unit 40. ) Is transported to the second buffer area 43F. At this time, the first three containers 100 (Nos. 1 to 3) are in close contact with each other without a gap, but the subsequent three containers 100 (Nos. 4 to 6) are spaced apart from each other. The subsequent three (n) containers 100 (Nos. 4 to 6) face the third transfer machine 53 and stand by in preparation for transfer to the third film forming unit 63.
Subsequent containers 100 (Nos. 7 to 12) of the second group G2 are conveyed to the supply / discharge area 21 of the supply / discharge conveyor 20.
As shown in FIG. 3B, the container 100 (Nos. 4 to 6) facing the third transfer machine 53 is gripped by the gripper 54 of the third transfer machine 53, while the subsequent container 100 (No. 7 to 12) is transported to immediately after the container 100 (No. 4 to 6). Containers 100 (Nos. 4 to 6) are in an inverted posture. Further, the containers 100 (Nos. 1 to 3) are on standby in the second buffer area 43F. The container 100 (Nos. 1 to 3) waiting in the second buffer region 43F is subjected to a film forming process by the first film forming unit 61.

The container 100 (Nos. 4 to 6) gripped by the gripper 54 rotates the support arm 57 of the third transfer machine 53 by 180 degrees and advances the gripper 54 toward the third film forming unit 63. As shown in FIG. 4A, the film is loaded into the open film forming chamber 66 of the third film forming unit 63. After sealing the film forming chamber 66, the third film forming unit 63 starts the film forming process of the DLC film from vacuuming as shown in FIG. 4 (b). The procedure from loading into the first film forming unit 61 and the second film forming unit 62 by the first transfer machine 51 and the second transfer machine 52 to the start of film formation is the same. In the following drawings, the notation such as "evacuation" added to the first film forming unit 61 to the third film forming unit 63 indicates the film forming state of the film forming unit.

As shown in FIG. 4A, the container 100 (Nos. 1 to 3) is transferred to the first transfer machine 51 in synchronization with the loading of the container 100 (Nos. 4 to 6) into the film forming chamber 66. When transported to the position facing each other, as shown in FIG. 4 (b), the container 100 (Nos. 1 to 3) is rotated by the first transfer machine 51 and then the first film forming unit 61. Is loaded into the film forming chamber 64 of. After sealing the film forming chamber 64, the first film forming unit 61 starts the film forming process of the DLC film by the procedure described above.
At this time, the three containers 100 (Nos. 7 to 9) from the beginning of the second group G2 are transferred to the second transfer machine 52 corresponding to the second film forming unit 62 as shown in FIG. 4 (b). It is transported to the position facing it.

Next, as shown in FIG. 5A, the container 100 (Nos. 7 to 9) is loaded into the film forming chamber 65 of the second film forming unit 62. At this time, the remaining three containers 100 (Nos. 10 to 12) of the second group G2 stand by in the second buffer area 43F, and the first three containers 100 (No. 10 to 12) in the subsequent third group G3 are further waited. Nos. 13 to 15) are transported to a position facing the third transfer machine 53.

In the container 100 (Nos. 4 to 6) in which the DLC film forming process was started first, after the film forming chamber 66 of the third film forming unit 63 was opened to the atmosphere after a predetermined discharge time, FIG. 5 As shown in (b), it is gripped by the gripper 54 of the third transfer machine 53. In synchronization with this, the waiting container 100 (Nos. 13 to 15) is gripped by the gripper 55 of the third transfer machine 53.

Next, the third transfer machine 53 rotates the support arm 57 by 180 degrees. Then, the containers 100 (Nos. 4 to 6) that have completed the film forming process are transferred to the supply / discharge conveyor 20, and the subsequent containers 100 (Nos. 13 to 15) are transferred to the third film forming unit 63. .. By advancing the gripper 54 and the gripper 55, as shown in FIG. 6A, the container 100 (Nos. 4 to 6) is delivered to the linear transport unit 40 in synchronization with the subsequent container 100 (No. 4 to 6). Nos. 13 to 15) are loaded into the film forming chamber 66 of the third film forming unit 63, and then the film forming process is started.
The containers 100 (Nos. 10 to 12) belonging to the second group G2 are transported to a position facing the first transfer machine 51 corresponding to the first film forming unit 61.

Next, in the container 100 (Nos. 1 to 3) in which the film forming process was started second, after the film forming chamber 64 of the first film forming unit 61 was opened to the atmosphere after a predetermined discharge time had elapsed, FIG. As shown in 6 (b), it is gripped by the gripper 54 of the first transfer machine 51. In synchronization with this, the waiting containers 100 (Nos. 10 to 12) are gripped by the gripper 55 of the first transfer machine 51.
At this time, as shown in FIG. 6B, the containers 100 (Nos. 4 to 6) that have already undergone the film forming process are conveyed to the first buffer region 43E and then stand by. The three containers 100 are in a dense state with narrow intervals. Further, the remaining three containers 100 (Nos. 16 to 18) of the container 100 belonging to the third group G3 are transported to a position facing the second transfer machine 52 corresponding to the second film forming unit 62. There is.

Next, as shown in FIG. 7A, by operating the first transfer machine 51, the container 100 (Nos. 1 to 3) is delivered to the linear transport unit 40, and the container 100 (No. 10) is delivered. ~ 12) is loaded into the film forming chamber 64 of the first film forming unit 61, and then the film forming process is started.
The containers 100 (Nos. 1 to 3) and the containers 100 (Nos. 4 to 6) are arranged in the order in which they were transferred from the supply / discharge conveyor 20 to the linear transfer unit 40. At this point, the film forming process of the container 100 (Nos. 7 to 9) in the second film forming unit 62 has been completed, and the film forming chamber 65 has already been opened to the atmosphere.

After that, as shown in FIG. 7B, the first three containers 100 (Nos. 1 to 3) are conveyed to the first dust removal stage 71 of the air cleaner 70 provided on the transfer path of the linear transfer unit 40. Will be done. Containers 100 (Nos. 1 to 3) are in an inverted posture, and internal dust is removed by blowing compressed air from a downward-facing drinking spout.
At this time, the containers 100 (Nos. 7 to 9) of the second group G2 are delivered to the straight portion 43B of the linear transport portion 40. The container 100 (Nos. 16 to 18) of the third group G3 is subjected to the film forming process in the second film forming unit 62. Further, the containers 100 (Nos. 13 to 15) of the third group G3 have completed the film forming process in the third film forming unit 63 and are gripped by the gripper 55 of the third transfer machine 53. The gripper 54 of the third transfer machine 53 holds the container 100 (Nos. 22 to 24) to be processed next.

After that, as shown in FIG. 8A, while continuing dust removal from the container 100 (Nos. 1 to 3), the subsequent containers 100 (Nos. 4 to 9) are conveyed to the front of the air cleaner 70.
When the dust removal treatment for the containers 100 (Nos. 1 to 3) is completed, as shown in FIG. 8 (b), the containers 100 (Nos. 1 to 3) move out of the air cleaner 70 and the following 6 containers are removed. 100 (Nos. 4 to 9) is transferred to the air cleaner 70 and dust-removed.

By repeating the above procedure, the barrier film forming apparatus 1 forms a DLC film on the container 100 and continuously removes dust from the container 100 by blowing compressed air. FIG. 9 shows the transition of the film forming process in the first film forming unit 61, the second film forming unit 62, and the third film forming unit 63 described above in chronological order.
As shown in FIG. 9, the barrier film forming apparatus 1 is a container in the order of the third film forming unit 63 provided on the upstream side, the first film forming unit 61 provided on the downstream side, and the second film forming unit 62 in the middle. 100 is loaded and the film forming process is performed. In this way, the loading of the container 100 and the film forming process are preceded by the third film forming unit 63 provided on the upstream side, as described above, the subsequent container 100 is placed on the downstream side of the first film forming unit 61. This is to prevent hindering the transfer to the second film forming unit 62.

In FIG. 9, a first buffer area 43E or a second buffer area 43F on which the container 100 stands by is added. As shown in FIG. 9, the container 100 to be film-formed by the third film-forming unit 63 waits for a predetermined time in the first buffer region 43E after the film-forming process is performed, and is waited for a predetermined time in the first film-forming unit 61. The container 100 to be film-formed waits for a predetermined time in the second buffer region 43F while being conveyed to the first film-forming unit 61.
For example, in FIGS. 6 (b) to 7 (a), the container 100 (No. 4 to 6) stands by in the first buffer region 43E. By doing so, interference with the container 100 (No. 1 to 3) delivered to the linear transport unit 40 is avoided, and the container 100 (No. 16 to No. 16 to) transported to the position facing the second transfer machine 52 is avoided. Avoid interference with 18).
Further, for example, in FIGS. 8A and 8B, the container 100 (No. 28 to 30) stands by in the second buffer area 43F. By doing so, interference with the container 100 (Nos. 25 to 27) facing the second transfer machine 52 is avoided, and the container 100 (No. 31) is conveyed to the position facing the third transfer machine 53. Avoid interference with ~ 33).
As described above, the barrier film forming apparatus 1 specifies the order of distribution of the containers 100 to the first film forming unit 61 to the third film forming unit 63, and sets the first buffer area 43E and the second buffer area 43F. By providing the DLC film formation process, the DLC film formation process can be continuously performed for each of n groups.

[Effect of barrier film forming apparatus 1]
Hereinafter, the effects of the barrier film forming apparatus 1 will be described.
<Improvement of production capacity>
As shown in FIG. 9, the barrier film forming apparatus 1 includes three first film forming units 61 to third film forming units 63. For example, the first film forming unit 61 is the container 100 of the first group G1. In the latter half of the film forming process in (Nos. 1 to 3), the film forming of the container 100 (Nos. 7 to 9) of the second group G2 can be started in the second film forming unit 62. Further, in the latter half of the film forming process in the container 100 (No. 7 to 9) of the second group G2 in the second film forming unit 62, the container 100 (No. 7 to 9) of the third group G3 in the third film forming unit 63. The film formation of 13 to 15) can be started.
As described above, according to the barrier film forming apparatus 1, the film forming unit that first performs the film forming process on the container 100 and the film forming unit that subsequently performs the film forming process on the container 100 overlap in time. The film can be formed. Therefore, the film forming time of the film forming unit that performs the film forming process in advance and the film forming unit that subsequently forms the film forming process in the container 100 do not overlap, for example, in the same time as compared with Patent Document 1 and Patent Document 2. The number of films that can be filmed in the container 100 can be increased, that is, the production capacity can be increased. Moreover, while Patent Document 1 and Patent Document 2 distribute the container 100 to the two film forming units, the barrier film forming apparatus 1 distributes the container 100 to the three film forming units. The production capacity can be increased.
As described above, the barrier film forming apparatus 1 realizes the continuous film forming process of the container 100 by the three first film forming units 61 to the third film forming unit 63 in the first buffer region 43E and the third film forming unit 63. This is because the two buffer areas 43F are provided.

Another reason why the barrier film forming apparatus 1 can obtain a high production capacity is that the first transfer machine 51 to the third transfer machine 53 corresponding to each of the first film formation unit 61 to the third film formation unit 63 are provided. Is to be.
That is, it is possible to move one common transfer machine between the first film forming units 61 to the third film forming unit 63, but it takes a considerable amount of time to move between the three film forming units. However, if the first transfer machine 51 to the third transfer machine 53 corresponding to each of the first film formation unit 61 to the third film formation unit 63 is provided, the time required for movement can be saved. be able to.

Further, in the barrier film forming apparatus 1, the linear transport unit 40 receives 6 (2n = m) containers 100 from the supply / discharge conveyor 20 and distributes them to groups of 3 (n) each. By doing so, the production capacity can be increased as compared with the case where the linear transport unit 40 receives the container 100 in units of 3 (n) and transports the containers 100 in that unit.

<Space saving>
Next, the barrier film forming apparatus 1 adopts the linear transport unit 40 to save space as described below.
First, by adopting the linear transport unit 40, the container 100 can be transported while changing the interval between the containers 100. Therefore, the container 100 delivered to the linear transport unit 40 at a narrow interval is transferred to the first film forming unit 61 to 61. When the outbound route is conveyed toward the third film forming unit 63, it can be conveyed while being spread over a wide interval in accordance with the interval of the film forming chambers 64 to 65. Further, the containers 100 formed with the first film forming unit 61 to the third film forming unit 63 can be conveyed toward the supply / discharge area 41 with a narrow interval on the return path. Further, in the first buffer area 43E and the second buffer area 43F, the distance between the containers 100 is narrowed.
As described above, in the region where the interval between the containers 100 does not need to be widened, the interval between the containers 100 can be narrowed, so that the total length of the transfer path 42 can be shortened as compared with the conveyor transfer in which the interval between the containers 100 is constant.

Further, in the barrier film forming device 1 using the linear transport unit 40, the air cleaner 70 is provided on the return path of the transport path 42. Then, in the barrier film forming apparatus 1, since the linear transport unit 40 transports the container 100 in an inverted state, the air cleaner 70 provided in the transport path 42 can realize the dust removal treatment inside the container 100. Further, the space occupied by the barrier film forming apparatus 1 can be reduced as compared with the case where the air cleaner 70 is provided in the region deviated from the transport path 42.
Further, in the barrier film forming apparatus 1, the linear transport unit 40 has a common supply / discharge area for carrying in the container 100 to be film-formed and a region for discharging the container 100 having been film-formed. Region 41 can be created. Therefore, the space occupied by the linear transport unit 40 can be reduced as compared with the case where the carry-in area and the discharge area are provided separately.

Further, in the barrier film forming apparatus 1, the second transfer unit 50 transfers the container 100 from the linear transfer unit 40 to the processing unit 60 by rotating around the rotation axis C2 parallel to the horizontal direction H. .. By doing so, when the production capacity is high, the turning radius can be kept small even when the diameter of the container 100 is large, so that the installation space of the barrier film forming apparatus 1 can be reduced, and the container 100 can be rotated by the gripper 54, It is possible to suppress the deviation from the 55 and the inclination. Assuming that the first transfer machine 51 shown in FIG. 1 is rotated about a rotation axis parallel to the vertical direction, and the number of containers 100 to be gripped in order to increase the production capacity is, for example, five. Compared with the case of three in FIG. 1, the radius of gyration is increased by the increased two. On the other hand, if the rotation axis C2 is parallel to the horizontal direction H as in the present embodiment, it is not necessary to increase the rotation radius even if the number of containers 100 to be gripped increases.

Further, since the second transfer unit 50 has a function of inverting the container 100 upside down, the air cleaner 70 is installed on the return path of the linear transport unit 40 instead of providing an independent container 100 reversing device for the air cleaner 70. Provide. Therefore, the installation space of the barrier film forming apparatus 1 can be reduced as compared with the case where the air cleaner 70 is provided at a position independent of the linear transport unit 40.

In addition, the barrier film forming apparatus 1 can switch the output destination of the high-frequency power supply to three systems by providing the three first film forming units 61 to the third film forming unit 63. Therefore, since the expensive high-frequency power supply is applied to the three first film-forming units 61 to the third film-forming unit 63, it is possible to realize more efficient use of the high-frequency power supply as compared with switching the output destination to two systems.
Further, since the second transfer section 50 quickly inverts the container 100 after the film formation is completed, the foreign matter inside the container 100 freely falls, including the subsequent transport in the return path of the linear transport section 40. This makes it easier to discharge and suppresses foreign matter from entering the inside of the container 100.

[Second Embodiment]
Next, the barrier film forming apparatus 2 according to the second embodiment of the present invention will be described with reference to FIGS. 10 to 15.
The barrier film forming apparatus 2 has the same basic configuration as the barrier film forming apparatus 1 of the first embodiment, except that the configuration of the linear transport unit 140 is different. Therefore, in the following, the configuration of the barrier film forming apparatus 2 will be described focusing on the differences from the barrier film forming apparatus 1. In the barrier film forming apparatus 2 of FIG. 10, the same reference numerals as those of FIG. 1 are used for the same components as those of the barrier film forming apparatus 1.

[Linear transport unit 140]
As shown in FIG. 10, the linear transport section 140 of the barrier film forming apparatus 2 includes a first bypass path 44A and a second bypass path 44B in addition to the straight sections 43A and 43B and the curved sections 43C and 43D.

The first bypass route 44A detours in parallel with the regular route including the straight portion 43B by branching from the straight portion 43B and connecting to the straight portion 43B. Further, the second bypass route 44B branches from the curved portion 43C and connects to the straight portion 43B, thereby bypassing the regular route connecting the curved portion 43C to the straight portion 43B. The first bypass route 44A bypasses the portion of the circulation path corresponding to the first film forming unit 61, and the second bypass route 44B bypasses the portion of the circulation path corresponding to the third film forming unit 63.
The first bypass route 44A and the second bypass route 44B consist of the first film forming unit 61 to the third film forming unit 63 and three units, similarly to the first buffer area 43E and the second buffer area 43F of the first embodiment. The film forming unit is used to perform a function of realizing continuous processing of the object to be processed.

[Processing unit 160]
As shown in FIG. 10, the processing unit 160 has the same components as the processing unit 60 of the barrier film forming apparatus 1, but the distance between the first film forming unit 61 and the second film forming unit 62 and the second film forming are formed. The distance between the unit 62 and the third film forming unit 63 is narrower than that of the processing unit 60. The distance between the first film forming unit 61 to the third film forming unit 63 can be narrowed by providing the first bypass path 44A and the second bypass path 44B with the functions of the first buffer area 43E and the second buffer area 43F. It is based on that.

[Treatment procedure of barrier film forming apparatus 2]
Hereinafter, the processing procedure of the container 100 in the barrier film forming apparatus 2 will be described with reference to FIGS. 11 to 14. In the following, the characteristic procedure in comparison with the barrier film forming apparatus 1 is extracted from the stage where the container 100 (Nos. 1 to 3) is already loaded in the film forming chamber 64 of the first film forming unit 61. explain. Note that some elements and symbols are omitted in FIGS. 11 to 14, so please refer to FIG. 1 as necessary. Further, FIG. 15 shows the transition of the film forming process in the first film forming unit 61, the second film forming unit 62 and the third film forming unit 63 in chronological order, so please refer to them as appropriate.

As shown in FIG. 11A, when the container 100 (Nos. 1 to 3) is loaded in the film forming chamber 64 of the first film forming unit 61, the container 100 (Nos. 4 to 6) is linear. It is at the boundary between the straight portion 43A and the curved portion 43C of the transport portion 40. The containers 100 (Nos. 1 to 3) are transported to a position facing the first transfer machine 51 through a regular route without passing through the first bypass route 44A of the linear transport unit 40. Hereinafter, unless otherwise mentioned, the other container 100 shall be conveyed along the regular route without passing through the first bypass route 44A and the second bypass route 44B.
As shown in FIG. 11 (b), the subsequent container 100 (Nos. 4 to 6) is loaded into the film forming chamber 65 of the second film forming unit 62, and then as shown in FIG. 12 (a). Subsequent containers 100 (Nos. 7 to 9) are loaded into the film forming chamber 66 of the third film forming unit 63. As shown in FIG. 12A, in the barrier film forming apparatus 2, three (n) are formed in the first film forming unit 61, the second film forming unit 62, and the third film forming unit 63 in the order of being conveyed. Container 100 is loaded and a film forming process is performed.

When the film forming process of the containers 100 (Nos. 1 to 3) in the first film forming unit 61 is completed, the subsequent containers 100 (Nos. 10 to 12) are conveyed to a position facing the first transfer machine 51. After that, as shown in FIG. 12 (b), the container 100 (No. 1 to 3) having been subjected to the film forming process is delivered to the linear transport unit 40, and the container 100 (No. 10 to 12) is delivered. ) Is loaded into the film forming chamber 64 of the first film forming unit 61, and then the film forming process is performed.

Next, as shown in FIG. 13 (a), the container 100 (Nos. 4 to 6) having been subjected to the film forming process is delivered to the linear transport unit 40, and the container 100 (No. 13 to 15) is the first. (Ii) The film is loaded into the film forming chamber 65 of the film forming unit 62, and then the film forming process is performed.

Next, as shown in FIG. 13 (b), the container 100 (Nos. 7 to 9) after the film forming process is delivered to the linear transport unit 40, and the container 100 (No. 16 to 18) is the first. (3) The film is loaded into the film forming chamber 66 of the film forming unit 63, and then the film forming process is performed.
At this point, the container 100 (Nos. 19 to 21) to be film-formed by the first film-forming unit 61 is transported to a position facing the first transfer machine 51. As shown by the white arrow in (a), it passes through the first bypass route 44B. That is, the container 100 (No. 7 to 9) that has completed the film forming process stands by at a position facing the third transfer machine 53, and in order to avoid interference with this, the container 100 (No. 19) ~ 21) goes through the second bypass route 44B. At this stage, the containers 100 (Nos. 1 to 6) that have been film-formed are conveyed to the air cleaner 70 to remove dust.
On the other hand, for the container 100 (Nos. 7 to 9) after the film forming process, the container 100 (Nos. 19 to 21) at the position facing the first transfer machine 51 becomes an obstacle, so FIG. 14 (b) ), The container 100 (Nos. 7 to 9) is conveyed to the downstream of the straight portion 43B from the first transfer machine 51 through the first bypass route 44A.
As described above, when the first bypass route 44A and the second bypass route 44B cannot convey the regular route in the linear transport unit 40 due to an obstacle of another container 100 existing on the downstream side of itself. , Provided to overtake the other container 100. As a result, continuous processing of the object to be processed can be realized by using the first film forming unit 61 to the third film forming unit 63 and the three film forming units.

[Effect of barrier film forming apparatus 2]
The barrier film forming apparatus 2 has the same effect as that of the barrier film forming apparatus 1, and also has the following effects.
Since the barrier film forming apparatus 2 provides the first bypass path 44A and the second bypass path 44B instead of providing the first buffer area 43E and the second buffer area 43F, the circulation path of the circulation path is increased by the amount of the two buffer areas. The total extension can be shortened. Therefore, the barrier film forming device 2 can save space more than the barrier film forming device 1.
Further, the barrier film forming apparatus 2 does not need to control the container 100 to stand by in the first buffer region 43E and the second buffer region 43F. In addition, as shown in FIG. 15, the barrier film forming apparatus 2 can distribute the containers 100 conveyed by the supply / discharge conveyor 20 to the first film forming unit 61 and the second film forming unit 62 in that order. (Ii) The transfer unit 50 and the processing unit 60 can be easily controlled.

[Third Embodiment]
Next, the barrier film forming apparatus 3 according to the third embodiment of the present invention will be described with reference to FIGS. 16 to 20.
The barrier film forming apparatus 3 is different from the barrier film forming apparatus 1 of the first embodiment in that the processing unit 60 is composed of two film forming units, a first film forming unit 61 and a second film forming unit 62. Further, the barrier film forming apparatus 3 includes only the first transfer machine 51 having one second transfer unit 50, and the first transfer machine 51 includes the first film formation unit 61 and the second film formation machine 51. It differs from the barrier film forming apparatus 1 in that it reciprocates between the units 62. The first transfer machine 51 distributes the four containers 100 into the first film forming unit 61 and the second film forming unit 62 as one group.
As described above, the barrier film forming apparatus 3 has the same basic configuration as the barrier film forming apparatus 1 except that the number of components is smaller than that of the barrier film forming apparatus 1. Therefore, the processing procedure of the barrier film forming apparatus 3 will be described below. In the barrier film forming apparatus 3, the same reference numerals as those in FIG. 1 are used for the same components as those of the barrier film forming apparatus 1. Further, in the following, a characteristic procedure in comparison with the barrier film forming apparatus 1 will be excerpted and described.

[Treatment procedure of barrier film forming apparatus 3]
The containers 100 (Nos. 1 to 4) are delivered to the supply / discharge area 41 of the linear transport unit 40 as shown in FIG. 16 (a), and then the linear transport unit 40 is delivered as shown in FIG. 16 (b). Is transported to a position facing the first transfer machine 51. The first transfer machine 51 waits for the container 100 (Nos. 1 to 4) to be conveyed at a position corresponding to the first film forming unit 61. Containers 100 (Nos. 1 to 4) are transported from the supply / discharge area 41 to the facing position, or the interval is widened in the process. The containers 100 (Nos. 1 to 4) are loaded into the film forming chamber 64 of the first film forming unit 61 as shown in FIG. 16 (c) by the operation of the first transfer machine 51, and the film forming process is performed. Will be done.

As shown in FIGS. 17 (a) to 17 (c), the subsequent containers 100 (Nos. 5 to 8) are also delivered to the supply / discharge area 41 of the linear transport unit 40 by the linear transport unit 40. It is transported to a position facing the first transfer machine 51. The first transfer machine 51 moves from the position corresponding to the first film forming unit 61 to the position corresponding to the second film forming unit 62, and waits for the container 100 (No. 5 to 8) to be conveyed. are doing. The container 100 (No. 5 to 8) is transported from the supply / discharge area 41 to the facing position, or the interval is widened in the process. The container 100 (Nos. 5 to 4) is loaded into the film forming chamber 65 of the second film forming unit 62 by the operation of the first transfer machine 51, and the film forming process is performed. The first film forming unit 61 and the second film forming unit 62, which have previously performed the film forming process on the container 100 (Nos. 1 to 4), overlap the film forming process in time.

As shown in FIG. 18A, the first transfer machine 51 is the first film forming unit in synchronization with the completion of the film formation of the containers 100 (Nos. 1 to 4) in the first film forming unit 61. While moving to the position corresponding to 61, the subsequent container 100 (Nos. 9 to 12) is conveyed to the position facing the first transfer machine 51. By operating the first transfer machine 51, as shown in FIG. 18B, the containers 100 (Nos. 1 to 4) that have undergone the film forming process are discharged to the linear transport section 40, and the container 100 is discharged. (Nos. 9 to 12) are loaded into the film forming chamber 64 of the first film forming unit 61, and then the film forming process is performed. As shown in FIG. 18 (c), the containers 100 (Nos. 1 to 4) discharged to the linear transport section 40 are transported toward the air cleaner 70 in the linear transport section 40, and are further conveyed to the subsequent container 100 (No. 1 to 4). Nos. 13 to 16) are carried into the linear transport unit 40.

As the procedure progresses, as shown in FIG. 19A, the container 100 (No. 5 to 8) is discharged to the linear transport unit 40 in the second film forming unit 62, and the container 100 (No. 13 to 16) is discharged. It is loaded into the film forming chamber 65 of the second film forming unit 62. After that, as shown in FIG. 19B, the containers 100 (No. 5 to 8) discharged to the linear transport unit 40 are transported to the air cleaner 70, and the subsequent containers 100 (No. 17 to 20) are the first. It is conveyed to a position facing the first transfer machine 51 that has moved to a position corresponding to one film forming unit 61.

The procedure further progresses, and as shown in FIG. 20A, the container 100 (No. 9 to 12) formed in the first film forming unit 61 is discharged to the linear transport unit 40, and the container 100 (No. 9 to 12) is discharged. Nos. 17 to 20) are loaded into the film forming chamber 64 of the first film forming unit 61. After that, as shown in FIG. 20 (b), the container 100 (Nos. 1 to 4) in which the film formation treatment was performed first is conveyed to the supply / discharge area 41 and then transferred to the supply / discharge conveyor 20 (not shown). It is discharged.

[Effect of barrier film forming apparatus 3]
The barrier film forming apparatus 3 can save space in an article processing apparatus having a small production capacity.
Further, the barrier film forming apparatus 3 moves the container 100 between the first film forming unit 61 and the second film forming unit 62 and the linear transfer unit 40 by moving one first transfer machine 51. Although it is mounted, the moving distance is only between the first film forming unit 61 and the second film forming unit 62. Therefore, the time required for the first transfer machine 51 to move is shorter than that for moving between the three first film forming units 61 to 63.

The barrier film forming devices 1 to 3 have been described above as embodiments of the present invention. However, as long as it does not deviate from the gist of the present invention, it is possible to select the configuration described in the above embodiment or change it to another configuration as appropriate.
For example, in the first embodiment and the second embodiment, the linear transport unit 40 receives the container 100 in units of six, distributes the container 100 to three groups, and delivers the container 100 to the second transfer unit 50. This number is just an example. For example, 8 pieces may be made into a group of 4, 10 pieces may be made into a group of 5, and other numbers may be used. Further, other numbers can be adopted for the four pieces in the third embodiment.

Further, in the first embodiment and the second embodiment, the 2n (6) containers 100 received in the supply / discharge area (21, 41) are distributed to each n (3) and the second transfer unit. It is delivered to 50, but the present invention is not limited to this. For example, the six containers 100 in the supply / discharge area (21, 41) can be distributed to each of the four containers and delivered to the second transfer unit 50. In addition, the five containers 100 and the four containers 100 that are alternately received in the supply / discharge areas (21, 41) can be distributed to each of the three containers and delivered to the second transfer unit 50. Further, the four containers 100 received in the supply / discharge area (21, 41) can be distributed to each of the three containers and delivered to the second transfer unit 50. That is, according to the present invention, if a buffer area (43E, 43F) for receiving mn or more is provided between the supply / discharge area (21, 41) and the third processing unit (63), the supply / discharge area The m (however, m> n) processing objects received in (21, 41) can be distributed to each n and transported to the second transfer unit 50.

Further, although a linear motor is used in the first to third embodiments, the present invention does not use any specific means as long as the interval between the containers 100 can be adjusted. For example, a plurality of movers 45, each of which autonomously travels by an electric motor, can be used. However, a linear transfer device using a linear motor is a preferable means for the present invention because it can accurately control the position of the mover 45.

Further, in the embodiment described above, the object to be treated is the container 100, the first treatment is the film formation of DLC, and the second treatment is the dust removal inside the container, but the present invention is not limited to this, and n pieces. It can be widely applied to devices that continuously perform arbitrary processing in units.

1,2,3 Barrier film forming device 20 Supply / discharge conveyor 21,41 Supply / discharge area 30 First transfer section 31 Gripper 40,140 Linear transfer section 43 Guide rail 43A, 43B Straight section 43C, 43D Curved section 43E First buffer Area 43F Second buffer area 44A First bypass route 44B Second bypass route 45 Mover 47 Linear motor 48 Permanent magnet 49 Electromagnetic coil 50 Second transfer section 51 First transfer machine 52 Second transfer machine 53 Third transfer Mounting machine 54, 55 Gripper 57 Support arm 60, 160 Processing unit 61 First film formation unit 62 Second film formation unit 63 Third film formation unit 64, 65, 66 Film formation chamber 70 Air cleaner 71 First dust removal stage 72 Second Dust removal stage 80 Control unit 100 Container

Claims (11)

A plurality of processing objects received in the supply / discharge area having a circulation path are conveyed as a group of n predetermined units, and the processing object that has completed a predetermined first treatment is transported. A transport unit that transports to the supply / discharge area and
A first processing unit provided along the circulation path and having a plurality of processing units, each of which performs the first processing on the number of the processing objects corresponding to the n items constituting the group.
A transfer unit that supplies the processed object before processing from the circulation path to the first processing unit and discharges the processed object that has completed the predetermined processing from the first processing unit to the circulation path. With
The transport unit
The object to be processed is conveyed in the circulation path while changing the interval.
An article processing device characterized in that. The transport unit
The object to be processed belonging to the group received in the supply / discharge area is transported toward the transfer section with a wide interval.
The processing target belonging to the group that has completed the first processing received from the transfer unit is transported to the supply / discharge area with a narrow interval.
The article processing apparatus according to claim 1. The transfer part is
A plurality of transfer machines corresponding to each of the plurality of processing units are provided.
Each of the plurality of transfer machines
The processing object provided between the transport unit and the first processing unit and transported by the transport unit is transferred to the corresponding processing unit.
The article processing apparatus according to claim 1. The transport unit
A plurality of movers, each of which travels independently along the circulation path and supports the object to be processed,
Permanent magnets provided on each of the movers and
It functions as a linear transfer device including an electromagnetic coil provided along the circulation path.
The article processing apparatus according to any one of claims 1 to 3. The first processing unit
A first processing unit provided in order from the downstream side in the transport direction of the processing object, a second processing unit adjacent to the first processing unit, and a third processing unit adjacent to the second processing unit are provided. ,
The transfer part is
A first transfer machine corresponding to the first processing unit, a second transfer machine corresponding to the second processing unit, and a third transfer machine corresponding to the third processing unit are provided.
The transport unit
The m (where m> n) of the objects to be processed received in the supply / discharge area are distributed to each n, and the first transfer machine, the second transfer machine, and the third transfer machine are used. Transport to two of them,
The article processing apparatus according to any one of claims 1 to 4. The first processing unit
At least n intervals corresponding to the processing objects are provided between the first processing unit and the second processing unit, and between the second processing unit and the third processing unit.
The transport unit
A first buffer area corresponding to the interval between the first processing unit and the second processing unit, and a second buffer area corresponding to the interval between the second processing unit and the third processing unit. With,
The article processing apparatus according to claim 5. The transport unit
The processing object before the first processing is performed by the first processing unit is waited for a predetermined time in the second buffer area, and then transported to the first transfer machine.
The processing object that has undergone the first processing in the third processing unit is allowed to wait for the predetermined time in the first buffer area, and then passed through the area corresponding to the first processing unit to supply and discharge. Transport to the area,
The article processing apparatus according to claim 6. The transport unit
A first bypass route that bypasses the portion of the circulation path corresponding to the first processing unit and conveys the processing object toward the supply / discharge region.
It is provided with a second bypass route that bypasses the portion of the circulation path corresponding to the third processing unit and conveys the processing object toward the first processing unit.
The article processing apparatus according to claim 5. The transport unit
The object to be processed before the first processing is performed by the first processing unit is conveyed to the first transfer machine after passing through the second bypass path.
The processed object that has been subjected to the first treatment by the third processing unit is conveyed to the supply / discharge region by passing through the region corresponding to the first processing unit after passing through the first bypass path. To do
The article processing apparatus according to claim 8. The circulation route is
The outbound route from the supply / discharge area to passing through the first processing unit,
A return route from passing through the first processing unit to the supply / discharge area is provided.
The return route includes a second processing unit that performs a second treatment different from the first treatment on the processing object that has been subjected to the first treatment in the first processing unit.
The article processing apparatus according to any one of claims 1 to 9. The object to be treated is a resin container for containing a beverage.
The first processing unit forms a barrier film on the inner surface of the container, and forms a barrier film.
The transport unit transports the container in an inverted state.
The transfer part is
The container on which the barrier film is formed is inverted from an inverted state to be in an upright state, and transferred from the transport section to the first processing section.
The container in which the barrier film was formed in the first treatment section was inverted from an upright position and transferred from the first treatment section to the transport section in an inverted state.
In the second processing section, the barrier film is formed and compressed air is blown onto the inner surface of the container which is conveyed in an inverted state.
The article processing apparatus according to claim 10.

Images