JP6772664B2 - Roll-to-roll type surface treatment equipment and film formation method and film formation equipment using this - Google Patents

Description

The present invention is a roll-to-roll type surface treatment apparatus comprising two or more can rolls that are wound around an outer peripheral surface to cool a long base material conveyed by roll-to-roll in a vacuum chamber. The present invention relates to a film forming method and a film forming apparatus using the above.

A flexible wiring board in which a wiring circuit is formed on a resin film is used in electronic devices such as liquid crystal panels, notebook computers, digital cameras, and mobile phones. This flexible wiring board can be manufactured by patterning a metal film on a resin film with a metal film having a metal film formed on one side or both sides of the resin film by a thin film technique such as photolithography or etching. In recent years, the wiring circuit pattern of a flexible wiring board has tended to become finer and denser, and along with this, a resin film with a metal film is required to be flat and wrinkle-free.

The above-mentioned method for producing a resin film with a metal film includes a method of attaching a metal foil to a resin film with an adhesive (a method of producing a three-layer substrate), a method of coating a metal foil with a resin solution, and then drying the film. Known methods include a manufacturing method (casting method), a method of forming a metal film on a resin film by the vacuum film forming method alone, or a combined use of the vacuum film forming method and a wet plating method (metalizing method). ing.

Among the above-mentioned manufacturing methods, in the vacuum film forming method in the metallizing method, a vacuum vapor deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like are used. For example, as a sputtering method, Patent Document 1 discloses a method of forming a conductor layer by sputtering a chromium layer on a polyimide insulating layer and then sputtering copper, and Patent Document 2 discloses a copper-nickel alloy. A material for a flexible circuit board in which a first metal thin film formed by target sputtering and a second metal thin film formed by targeting copper sputtering are laminated on a polyimide film in this order is disclosed. There is.

When a metal film is formed on a resin film such as a polyimide film by the above vacuum film forming method to produce a resin film with a metal film, the long resin film is efficiently conveyed while being continuously conveyed by a roll-to-roll method. A device for forming a vacuum film is generally used. When sputtering film formation is performed with this vacuum film forming apparatus, the sputtering method generally has excellent adhesion, but the heat load applied to the resin film is larger than that of the vacuum film deposition method, so that the resin film is wrinkled during film formation. There was something. Therefore, in this vacuum film forming apparatus, while the long resin film is conveyed from the unwinding roll to the take-up roll in the vacuum chamber by roll-to-roll, the long resin film is applied to the outer peripheral surface of the can roll provided in the conveying path. A sputtering web coater that continuously forms a vacuum film while wrapping and cooling the film is used.

For example, Patent Document 3 discloses a unwinding and winding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding and winding type vacuum sputtering apparatus is equipped with a cooling roll that plays the role of a can roll, and further, a long resin film is formed by a sub roll provided at least on the film feeding side or the feeding side of the cooling roll. Control is performed so that it adheres to the cooling roll.

However, as described in Non-Patent Document 1, since the outer peripheral surface of the canroll is not flat when viewed microscopically, the outer peripheral surface of the canroll and the long resin film conveyed in contact with the outer peripheral surface thereof. There are gaps (gap portions) that are separated from each other via a vacuum space. For this reason, the heat of the long resin film generated during the film formation may not be efficiently transferred to the canroll, which causes wrinkles to be generated in the long resin film.

In order to solve this problem, a sputtering web coater proposes a technology that releases gas from the outer peripheral surface of the can roll to increase the thermal conductivity of the gap between the outer peripheral surface and the long resin film compared to vacuum. Has been done. For example, Patent Document 4 discloses a technique for providing a large number of micropores serving as gas discharge holes on the outer peripheral surface of the canroll, and Patent Document 5 discloses gas discharge holes on the outer peripheral surface of the canroll. A technique for providing a groove is disclosed. Further, there is also known a method in which the canroll itself is made of a porous body and the micropores of the porous body itself are used as gas discharge holes.

According to Non-Patent Document 2, when the released gas is argon gas and the gas pressure is 500 Pa, the distance between the outer peripheral surface of the canroll and the resin film is about 40 μm or less in the molecular flow region. The thermal conductance of the gap is described as 250 (W / m ² · K). In the range of the molecular flow region, the more gas molecules in this gap, that is, the higher the gas pressure, the higher the heat transfer efficiency due to the gas molecular flow.

By the way, when forming a film on both sides of a long resin film with the above sputtering web coater, first, the long resin film is conveyed in one direction from the unwinding roll to the winding roll, and the film is formed only on one surface. After that, the long resin film formed on only one side of the film is removed from the take-up roll, set on the take-up roll, and the long resin film is conveyed from the take-up roll to the take-up roll again in one direction to the other side. A film is formed on the surface of the surface.

However, this method has poor production efficiency because it is necessary to open the inside of the vacuum chamber to the atmosphere once after the single-sided film formation. Therefore, as shown in Patent Documents 6, 7 and 8, it has been proposed to form a film using a film forming apparatus provided with two can rolls, thereby unidirectionally from the unwinding roll to the winding roll. It is possible to continuously form a film on both the front surface and the back surface of the resin film by transporting the resin film only once.

Japanese Unexamined Patent Publication No. 2-98994 Japanese Patent No. 3447070 Japanese Unexamined Patent Publication No. 62-247073 International Publication No. 2005/001157 U.S. Pat. No. 3414048 Japanese Unexamined Patent Publication No. 2013-049914 Japanese Unexamined Patent Publication No. 2013-049915 Japanese Unexamined Patent Publication No. 2013-04991

"Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data," 2000 Society of Vacuum Coaters, 43rd. Annual Technical Conference Proceeding, Denver, April 15-20, 2000, p.335 "Improvement of Web Condition by the Deposition Drum Design," 2000 Society of Vacuum Coaters, 50th. Annual Technical Conference Proceeding (2007), p.749

As shown in Patent Documents 6, 7 and 8 described above, when a long substrate conveyed by a roll-to-roll method is film-formed by a vacuum film forming apparatus having two or more can rolls, these can rolls are used. In order to bring the long base material into close contact with the outer peripheral surface and cool it, tension sensor rolls and drive rolls for feeding and sending the long base material are provided immediately upstream and downstream of each can roll, respectively. ing. In this case, for example, the drive roll for sending out the can roll on the upstream side may affect the tension on the sending side of the can roll on the downstream side to increase the fluctuation, and as a result, the long base material and the can. Microslip may occur between the roll and the outer peripheral surface, and fine scratches may occur on the surface of the long base material.

The present invention has been made in view of the above-mentioned conventional problems, and surface treatment is performed on a long base material conveyed by a roll-to-roll method using a surface treatment apparatus having two or more canrolls. In this case, the purpose is to prevent the tension control of one of the canrolls adjacent to each other on the upstream side and the downstream side from affecting the other.

As a result of diligent research to achieve the above object, the present inventor wraps a long base material, which is transported by roll-to-roll in a vacuum chamber, around the outer peripheral surfaces of two or more can rolls and cools them. In a roll-to-roll type surface treatment device that performs surface treatment on both sides or one side of a long base material by one-way roll-to-roll transfer, a tension cut mechanism is provided between can rolls adjacent to each other on the upstream side and the downstream side. As a result, it has been found that the problem of scratches caused by the above-mentioned microslip can be suppressed, and the present invention has been completed.

That is, the roll-to-roll surface treatment device of the present invention is a surface treatment device for a long base material that is conveyed along a roll-to-roll transfer path in a vacuum chamber, and the long base material is placed on the outer peripheral surface. It has at least two canrolls that are wound and cooled by a refrigerant that circulates inside, and surface treatment means that are provided at positions facing the outer peripheral surfaces of each of the at least two canrolls. A tension cut means is provided in the transport path between the canroll located on the most upstream side of the canrolls and the first canroll on the downstream side thereof, and the canroll located on the most upstream side and the canroll The first can roll is characterized in that a motor-driven delivery roll and a motor-driven feed roll are provided , respectively.

According to the present invention, it is possible to prevent the tension control of one of the canrolls adjacent to each other on the upstream side and the downstream side from affecting the other, so that the tension control can be stabilized in each canroll. This makes it possible, so that the long base material can be reliably adhered to the outer peripheral surface of each can roll. As a result, it is possible to prevent the problem of scratches on the long base material due to microslip, and it is possible to efficiently and uniformly cool the long base material during surface treatment under a heat load, so that wrinkles are formed. Occurrence can be suppressed.

It is a front view of the roll-to-roll type vacuum film forming apparatus of 1st Embodiment of this invention. It is a vertical cross-sectional view of the canroll with an outgassing mechanism provided in the vacuum film forming apparatus of FIG. It is a process flow diagram which shows a specific example of the gas supply system of the gas rotary joint which the can roll of FIG. 2 has. It is a front view of the roll-to-roll type vacuum film forming apparatus of the 2nd Embodiment of this invention. It is a front view of the roll-to-roll type vacuum film forming apparatus of the 3rd Embodiment of this invention. It is a front view of the roll-to-roll type vacuum film forming apparatus of 4th Embodiment of this invention.

[First Embodiment]
Hereinafter, as a first embodiment of the roll-to-roll type long substrate surface treatment apparatus of the present invention, referring to FIG. 1, a vacuum film forming apparatus for continuously performing a dry film formation on a long substrate. Will be picked up and explained. The vacuum film forming apparatus of FIG. 1 is also referred to as a sputtering web coater, and a long resin film F as a long base material conveyed in a vacuum chamber 10 by a roll-to-roll method is formed on the outer peripheral surfaces of two can rolls. It is a film forming apparatus capable of continuously performing a sputtering film forming process in which a heat load is applied to the front surface while being wound around the film and cooled from the back surface side.

The vacuum chamber 10 includes a first film forming chamber 10a for forming a film on the first surface of the long resin film F, a second film forming chamber 10b for forming a film on the second surface, and winding after the film formation. It is divided into a winding chamber 10c and a partition plate, and the partition plate is provided with a slit through which the long resin film F passes. Various vacuum devices (not shown) such as a dry pump, a turbo molecular pump, and a cryocoil are provided in the first film forming chamber 10a and the second film forming chamber 10b, and the pressure to reach the atmosphere during sputtering film formation. After depressurizing to about 10 ^-4 Pa, the pressure can be adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the vacuum chamber 10 are not particularly limited as long as they can withstand the above-mentioned decompression state.

In the vacuum chamber 10, various roll groups that define a roll-to-roll transfer path of the long resin film F, and a film forming means for performing a film forming process on the long resin film F are provided. These various roll groups include a pair of unwinding rolls 11 and 27, and a motor-driven first can roll 17 (1st) that winds and cools a long resin film F unwound from the unwinding roll 11. (Notation), a second can roll 23 (notation as 2nd), a tension sensor roll (notation as TP), a motor drive roll (notation as M), and other free rolls.

The roll-to-roll transport path defined by the various roll groups described above will be specifically described. Among the roll-to-roll transport paths from the unwinding roll 11 to the take-up roll 27, in the first film forming chamber 10a. The long resin film F unwound from the unwinding roll 11 includes a free roll 30a, a first tension sensor roll 12, a first driving roll 13, a free roll 30b, a second tension sensor roll 14, a free roll 30c, and a first. The first feed roll 15 and the first feed tension sensor roll 16 are fed to the first can roll 17 via this order. The first can roll 17 is conveyed counterclockwise along the outer peripheral surface and is subjected to a film forming process by the film forming means, and then passed through the first delivery tension sensor roll 18 and then by the first delivery roll 19. 1 Can roll 17 is sent out from the outer peripheral surface.

In the first tension sensor roll 12 described above, the tension of the long resin film F immediately after being unwound from the unwinding roll 11 is measured, and based on this measured value, the tension is located immediately upstream and downstream thereof, respectively. The AC servomotor for rotationally driving the unwinding roll 11 and the first driving roll 13 is, for example, torque-controlled or speed-controlled. As a result, the long resin film F is unwound from the unwinding roll 11 while the tension is maintained at a predetermined set value.

Further, the tension of the long resin film F fed to the first can roll 17 is measured by the first feed tension sensor roll 16 provided immediately upstream of the first can roll 17, and is based on this measured value. Then, the peripheral speed difference between the motor-driven first feed roll 15 and the first can roll 17 located immediately upstream and downstream thereof is adjusted. Similarly, the first delivery tension sensor roll 18 provided immediately downstream of the first can roll 17 measures the tension of the long resin film F fed from the first can roll 17, and this measured value. Based on the above, the peripheral speed difference between the motor-driven first can roll 17 and the first delivery roll 19 located immediately upstream and downstream thereof is adjusted. A long feeding / sending mechanism composed of these two drive rolls and two tension sensor rolls located on the upstream side and the downstream side of the first can roll 17 is provided on the outer peripheral surface of the first can roll 17. It becomes possible to stably adhere the resin film F.

The long resin film F delivered from the first delivery roll 19 is sent to the tension cut drive roll 20 located substantially in the center of the roll-to-roll transport path via the free rolls 30d and 30e. As will be described later, the tension cut drive roll 20 has a structure in which the long resin film F does not substantially slip on the outer peripheral surface. Therefore, the tension of the long resin film F on the upstream side and the downstream side of the long resin film F. The tension of the long resin film F on the side is not affected by the tension fluctuation.

The long resin film F sent out from the tension cut drive roll 20 leaves the first film forming chamber 10a and enters the second film forming chamber 10b after passing through the free roll 30f. The long resin film F that has entered the second film forming chamber 10b passes through 30 g of free rolls and 30 hours, and then passes through the second feed roll 21 and the second feed roll 21 and the second feed feed mechanism in the same manner as the above-mentioned feed and feed mechanism of the first can roll 17. It is fed to the second can roll 23 while the tension on the feeding side is adjusted by the build-in tension sensor roll 22.

After the film formation process is performed by the film forming means while being conveyed clockwise along the outer peripheral surface by the second can roll 23, the delivery side is carried out by the second delivery tension sensor roll 24 and the second delivery roll 25. While adjusting the tension of the second can roll 23, it is sent out from the outer peripheral surface of the second can roll 23, passes through the free roll 30i, and then exits the second film forming chamber 10b and enters the winding chamber 10c. The long resin film F that has entered the winding chamber 10c has passed through the free roll 30j, the pre-winding tension sensor roll 26, and the free roll 30k, and then before winding due to the tension measured by the pre-winding tension sensor roll 26. The film is wound by the winding roll 27 while the tension of the film is controlled.

In this way, on the outer peripheral surfaces of the two can rolls that are continuously provided, the length of contact with the outer peripheral surfaces of these two can rolls is long by wrapping the long resin film F in opposite directions. The surfaces of the scale resin film F can be reversed from each other. In addition, the first, second, third, and fourth magnetron sputtering cathodes 41, 42, 43, and 44 are used as dry film forming means at positions facing the outer peripheral surface of the first canroll 17 on the upstream side. The fifth, sixth, seventh, and eighth magnetron sputtering cathodes 45, 46, 47, and 48 are provided along the same order in this order at positions facing the outer peripheral surface of the second canroll 23 on the downstream side. It is provided in this order along. As a result, it is possible to form a film on both sides of the long resin film by transporting only one direction of roll-to-roll. When a plate-shaped target as shown in FIG. 1 is used, nodules (growth of foreign matter) may occur on the target. If this becomes a problem, nodules are not generated and the target usage efficiency is increased. A tall cylindrical rotary target may also be used.

By the way, in general, the long resin film F absorbs a small amount of moisture even if it has been dried by undergoing a drying step or the like before film formation, and it is received from the film forming means at the time of sputtering film formation on the first surface. Moisture and the like absorbed in the long resin film F evaporate due to the heat load. The evaporated water is released into the gap portion between the outer peripheral surface of the first can roll 17 and the long resin film F. Due to this so-called self-gas release, the gap portion is not completely evacuated and there are molecules that contribute to heat conduction.

On the other hand, at the time of sputtering film formation on the second surface, since the first film formation surface has already been applied to the long resin film in contact with the outer peripheral surface of the second canroll 23, the above self-gas release does not occur and the gap During that time, it becomes almost a vacuum. That is, in the first can roll 17, it is not necessary to actively introduce gas into the gap between the outer peripheral surface and the long resin film F, but in the second can roll 23, the outer peripheral surface and the long resin film are not actively introduced. It is desirable to actively introduce gas into the gap between F and F.

Therefore, the vacuum film forming apparatus of the first embodiment is provided with a gas discharge mechanism for discharging gas from the outer peripheral surface of the second canroll 23 on the downstream side. The gas release mechanism of the second canroll 23 will be described with reference to FIG. The second can roll 23 is made of a metal cylindrical member 1, and the outer peripheral surface 1a serves as a transport path around which the long resin film F is wound. The inside of the cylindrical member 1 has a so-called jacket roll structure 2, and a temperature-controlled refrigerant such as cooling water flows into the flow path 2a formed by the jacket roll structure 2. The refrigerant in the flow path 2a is circulated with a refrigerant cooling device (not shown) outside the vacuum chamber 10 via a rotating shaft 3 having a double piping structure located on the central axis O of the cylindrical member 1. Bearings 3a are provided on the outer peripheral portions of both ends of the rotating shaft 3, thereby rotatably supporting the cylindrical member 1.

A plurality of gas introduction paths 4 extending in the central axis O direction are provided on the outer peripheral wall thickness portion of the cylindrical member 1 over the entire circumference at equal intervals in the circumferential direction. Each gas introduction path 4 is provided with a plurality of gas discharge holes 5 that open on the outer peripheral surface 1a side at equal intervals in the central axis O direction. A gas rotary joint 6 is attached to one end of the cylindrical member 1, so that gas from a gas supply source (not shown) outside the vacuum chamber 10 can be distributed and supplied to the plurality of gas introduction paths 4 described above. ing. By such a mechanism, gas is formed in the gap portion between the outer peripheral surface of the second can roll 23 and the long resin film F wound around the outer peripheral surface of the second can roll 23 through the plurality of gas introduction paths 4 and the gas discharge holes 5 communicating with each of them. Is released, which can improve the thermal conductivity of the gap portion.

The number of the gas introduction paths 4 and the number of the gas discharge holes 5 provided in each gas introduction path 4 are the area of the long resin film F covering the outer peripheral surface of the second can roll 23, the tension of the long resin film F, and so on. It can be appropriately determined depending on the amount of gas released to the gap portion, the capacity of the exhaust pump provided in the vacuum chamber 10, and the like. The inner diameter of the gas discharge hole 5 is as long as the gas can be satisfactorily introduced into the gap portion (gap) formed between the outer peripheral surface of the second can roll 23 and the long resin film F wound around the outer peripheral surface. Although not particularly limited, it is preferable to provide a large number of gas discharge holes 5 having an extremely small inner diameter at a narrow pitch in that the thermal conductivity can be made uniform over the entire outer peripheral surface of the second can roll 23.

Further, when the inner diameter of the gas discharge hole 5 is large, the cooling efficiency is improved in the portion of the long resin film F wound around the second can roll 23 that faces the gas discharge hole 5 and the portion that does not face the gas discharge hole 5. Differences may occur. Therefore, in general, an inner diameter of about 30 μm to 1000 μm is preferable. However, since it is difficult to process a large number of holes having an extremely small inner diameter at a narrow pitch, in reality, small holes having an inner diameter of about 150 to 500 μm are provided on the outer peripheral surface of the second canroll 23 at a pitch of 5 to 10 mm. Is more preferable.

Next, the gas rotary joint 6 that distributes and supplies gas to the plurality of gas introduction paths 4 described above will be described. The gas rotary joint 6 is composed of an annular rotating ring unit 6a fixed to one end of the cylindrical member 1 and rotating together with the cylindrical member 1 and an annular stationary ring unit 6b that does not rotate, and these are mutually formed. It is designed to slide on the sliding surface of. The above-mentioned rotating shaft 3 protrudes from the central opening of these annular ring units 6a and 6b. It is preferable to dispose a known gas sealing means on this sliding surface.

The rotating ring unit 6a is provided with the same number of gas distribution paths 7 as the gas introduction paths 4 in a radial pattern, and each of these gas distribution paths 7 communicates with the gas introduction path 4 via a connecting pipe 7a. It should be noted that the number of gas introduction paths 4 and the number of gas distribution paths 7 do not match, and each of the plurality of adjacent gas introduction paths 4 is connected to the gas distribution path 7 of the rotary ring unit 6a by collecting them with a collecting pipe. You may. The other end of the gas distribution path 7 on the side opposite to the side connected to the gas introduction path 4 is open on the sliding surface with the stationary ring unit 6b. On the other hand, the stationary ring unit 6b is provided with one gas supply path 8, and one end thereof is connected to a gas supply pipe 8a from a gas supply source (not shown) outside the vacuum chamber 10. The other end of the gas supply path 8 on the side opposite to the side connected to the gas supply pipe 8a is an end portion of the sliding surface with the rotating ring unit 6a where the gas distribution path 7 described above opens on the sliding surface. It is open so as to face the. As a result, the gas can be distributed and supplied to the plurality of gas introduction paths 4.

By the way, in the so-called non-wrapping region where the long resin film F is not wound on the outer peripheral surface of the second can roll 23, the gas discharge hole 5 is open to the vacuum chamber 10 as it is, so that it is located in this non-wrapping portion. It is preferable not to introduce gas into the gas introduction path 4. As a method of not supplying gas to a part of the gas introduction paths 4, a method of providing a valve in each gas distribution path 7 in the rotating ring unit 6a and opening and closing electrically or electromagnetically according to the angular position thereof and the like. Can be considered. Alternatively, there is a method of mechanically opening and closing by utilizing the rotation of the rotating ring unit 6a. Of these, the latter method is preferable because it is simple. As a specific example of the latter method, for example, the gas supply path 8 opened at the sliding surface described above so that the gas is introduced only into the gas distribution path 7 communicating with the gas introduction path 4 located outside the non-lap region. Examples include a method in which the shape of the end portion is not an annular shape but a substantially C-shaped opening groove, and as shown in FIG. 2, a method in which the annular opening groove is partially closed with a closing material 8b such as Teflon packing. ..

By using the gas rotary joint 6 having the above structure, the gas supply to the gas introduction path 4 is cut off in the non-wrapping region, which is the region where the long resin film F is not wound around the outer peripheral surface of the second can roll 23. , It is possible to prevent wasteful gas from being released from the gas discharge hole 5 into the vacuum chamber 10. Therefore, it is possible to suppress an adverse effect on the pressure control in the vacuum chamber 10 and to stably maintain the gas pressure of the gas introduced into the gas introduction path 4 at a predetermined pressure. Further, since the electromagnetic valve and the compressed air valve are not used, it is not necessary to provide complicated wiring and piping in the second can roll 23.

The structure of the gas rotary joint 6 is not limited to the structure in which the rotating ring unit 6a and the stationary ring unit 6b slide on each other on a sliding surface perpendicular to their central axes as described above. For example, the structure may be such that the inner peripheral surface of the large-diameter annular rotating ring unit is in sliding contact with the outer peripheral surface of the small-diameter annular stationary ring unit. In this case, one end of the gas distribution path is opened on the inner peripheral surface of the rotating ring unit. , The outer peripheral surface of the stationary ring unit may be provided with an opening groove of a gas supply path extending in the circumferential direction only in an angular range corresponding to a region other than the non-wrap region. Further, the gas rotary joint may be attached not only to one side of the can roll but also to both sides.

As described above, when the long resin film F is conveyed while discharging the gas from the gas discharge holes provided on the outer peripheral surface of the can roll to the gap portion, the long resin film resists the pressure of the released gas. The resistance force that presses F against the outer peripheral surface of the can roll is obtained by dividing the tension in the transport direction of the long resin film F by the radius of the can roll. By adjusting the gas pressure in the gap so as not to exceed this drag, the gap between the outer peripheral surface of the canroll and the long resin film can be made almost zero, and the concave portion of the micro uneven portion on the outer peripheral surface can be made almost zero. Is filled with gas, and the long resin film comes into contact with the uneven portion mainly at the convex portion. When the gas pressure in the gap portion exceeds the drag force, the gap between the gap portions is widened, and gas starts to leak from both edges in the width direction of the long resin film. In this case, the gas pressure does not rise more than a certain amount due to the leakage of gas.

When the gas pressure in the gap portion increases and the gap between the gap portions increases in this way, the frictional force between the outer peripheral surface of the can roll with the gas discharge mechanism and the long resin film F wrapped around the outer peripheral surface decreases. As a result, the tension of the long resin film F may be adversely affected. On the other hand, in the vacuum film forming apparatus of the first embodiment, the tension cut drive roll 20 is provided as described above, and the tensions on the upstream side and the downstream side do not interfere with each other with this as a boundary. Therefore, the long resin film F wound around the outer peripheral surface of the second can roll 23 is not affected by the tension control of the long resin film F on the delivery side of the first can roll 17. .. Therefore, problems such as scratches on the long resin film F are less likely to occur.

The tension cut drive roll 20 is not particularly limited as long as the grip force of the long resin film F on the outer peripheral surface is higher than that of other rolls. For example, the roll portion may be a rubber drive roll or a metal. A combination of a plastic roll and a rubber nip roller that comes into contact with the outer peripheral surface thereof may be used. In order to secure a higher grip, a tread pattern may be formed on the outer peripheral surface by grooving. The specific hardness, nip pressure, holding angle (wrap angle around which the long substrate wraps around the outer peripheral surface), etc. of these rubbers should be adjusted appropriately while observing the operation results when the vacuum film forming apparatus is actually operated. Just do it.

It is more preferable to control the gas pressure in the gap portion by the gas supplied from the gas supply pipe 8a from the gas supply source. In this case, it is difficult to directly measure the gap pressure between the outer peripheral surface of the second can roll 23 and the long resin film F wound around the outer peripheral surface, so that the gas pressure in the gap portion is as shown in FIG. A vacuum gauge P such as a diaphragm vacuum gauge is attached to the gas supply path 8 which can be estimated to have almost the same pressure as the pressure gauge P, and the piezo valve PV is operated by the control device CPU so that the value measured by the vacuum gauge P becomes the set value. It is preferable to perform feedback control.

In this case, the pressure measured by the vacuum gauge P and the cascade control may be performed so that the gas supply flow rate measured by the mass flow meter MFM becomes constant. If the amount of gas is such that it is discharged into the gap portion, it can be exhausted by the vacuum pump provided in the vacuum chamber 10. Further, if the gas introduced into the gap portion is the same as the gas in the sputtering atmosphere, the sputtering atmosphere will not be polluted. Next, a method for producing a resin film with a metal film using the vacuum film forming apparatus according to the first embodiment of the present invention described above will be described.

(1) First, in the unwinding zone of the first film forming chamber 10a, a predetermined tension is maintained by controlling the speed of the tension sensor roll 12, the unwinding roll 11 immediately upstream and downstream thereof, and the first driving roll 13. While unwinding the long resin film F from the unwinding roll 11. In the first film forming chamber 10a, a drying zone having a reduced pressure atmosphere is provided as needed, and the unwound long resin film F is passed through the drying zone to allow moisture to be formed during the film forming process on the first surface. May be dried so as not to evaporate excessively. A carbon heater or the like may be installed in this drying zone to apply a heat load to enhance the drying effect.

(2) Next, in the film forming zone of the first film forming chamber 10a, the long resin film F is wound around the outer peripheral surface of the first canroll 17 and is wound around the four magnetron sputtering cathodes 41 to 44 facing the outer peripheral surface. A film is formed on the first surface of the long resin film F by the attached target. At that time, on the upstream side of the first can roll 17, the tension of the long resin film F measured by the first feed tension sensor roll 16 is controlled by the motor-driven first feed roll 15 so as to reach a predetermined set value. On the downstream side, the motor-driven first delivery roll 19 controls so that the tension of the long resin film F measured by the first delivery tension sensor roll 18 becomes a predetermined set value.

(3) By controlling the tension of the long resin film F in the first can roll 17, the tension of the long resin film F wound around the second can roll 23 in the wake is not affected by the motor drive. The tension cut drive roll 20 conveys the tension while preventing the tension fluctuation of one of the upstream side and the downstream side from affecting the other. A rubber roll made of fluororubber such as Viton (registered trademark) is used for the roll portion of the tension cut drive roll 20, and the arrangement of both free rolls 30e and 30f immediately upstream and downstream thereof is adjusted. It is preferable to secure a holding angle of 180 ° or more on the tension cut drive roll 20.

(4) Next, in the film forming zone of the second film forming chamber 10b, four magnetron sputtering cathodes 45 to 48 facing the outer peripheral surface while winding the long resin film F around the outer peripheral surface of the second can roll 23. A film is formed on the second surface of the long resin film F by the target attached to the film. At that time, on the upstream side of the second can roll 23, the tension of the long resin film F measured by the feed tension sensor roll 22 is controlled by the motor-driven feed roll 21 so as to be a predetermined set value, and is controlled on the downstream side. Then, the transmission roll 25 driven by the motor controls the tension of the long resin film F measured by the delivery tension sensor roll 24 so that the tension becomes a predetermined set value.

(5) Finally, in the winding zone of the winding chamber 10c, the tension of the long resin film F is measured by the tension sensor roll 26, and winding is performed so that the measured value becomes a predetermined set value. A near roll (not shown) may be arranged upstream of the take-up roll 27, whereby the take-up wrinkle can be effectively reduced.

By roll-to-roll transporting the long resin film F in only one direction by the above method, a length with a metal film in which a film made of, for example, a Ni-based alloy and a Cu film are laminated on both sides of the long resin film F. A shaku resin film can be produced. The resin film with a metal film having such a laminated structure becomes a flexible wiring board by patterning the metal film by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the Cu film) not covered with a resist by etching.

The film made of the Ni alloy or the like is called a seed layer, and its composition is selected according to desired properties such as electrical insulation and migration resistance of the resin film with a metal film. For example, various known alloys such as Ni—Cr alloy, Inconel, Constantan, and Monel can be used. If it is desired to further thicken the metal film (Cu film) of the long resin film with a metal film produced by the dry film formation, the metal film may be further thickened by a wet plating method. In this case, there are a method of increasing the film thickness only by electroplating and a method of combining electroless plating of primary plating and electrolytic plating of secondary plating. In any case, the wet plating treatment is not particularly limited, and a general wet plating method can be adopted.

Examples of the resin film used for the resin film with a metal film include a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, and a liquid crystal polymer film. Among these, polyethylene terephthalate (PET) and polyimide can be used because they have flexibility as a flexible substrate with a metal film, strength required for practical use, and electrical insulation suitable as a wiring material. Film is preferred. In the above specific example, the case where a metal film made of a Ni—Cr alloy and Cu is laminated on a long resin film has been described, but the present invention is not limited to this, and an oxide film, a nitride film, a carbide film, etc. May be formed.

Since the vacuum film deposition apparatus shown in FIG. 1 performs a sputtering film deposition process on the long resin film F as a process for applying a heat load, the magnetron sputtering cathodes 41 to 48 are provided as described above. The process that applies a heat load is not limited to this, and an apparatus having other surface treatments such as CVD (chemical vapor deposition) or vacuum vapor deposition may be used. In this case, the surface treatment means for them will be provided in place of the plate-shaped target. Further, both the first and second canrolls may be provided with an outgassing mechanism.

As described above, the surface treatment apparatus according to the first embodiment of the present invention prevents the tension control of one of the two canrolls adjacent to each other on the upstream side and the downstream side from affecting the other. Therefore, it becomes possible to stabilize the tension control in each can roll. Therefore, it is possible to prevent problems such as scratches caused by microslip. Further, in the downstream canroll where self-gas release cannot be expected, the gap between the outer peripheral surface and the long base material can be made substantially constant by providing the gas release mechanism on the outer peripheral surface. As a result, the thermal conductance of the gap portion can be made almost uniform over the entire surface, and the temperature of the long base material can be kept uniform during pretreatment, film formation, and other heat-loaded treatments. It is possible to suppress the occurrence of wrinkles.

As described above, when a can roll with an outgassing mechanism is used, gas is present in the gap formed between the outer peripheral surface of the can roll and the long base material, so that the outer peripheral surface of the can roll and the long base material are formed. The grip between the and is lower than that of a canroll without an outgassing mechanism. Therefore, a more remarkable effect can be obtained in a roll-to-roll surface treatment device equipped with a can roll with one or more gas release mechanisms, and a high-quality metal suitable as a flexible wiring board for LCD TVs, mobile phones, etc. A resin film with a film can be produced with a high yield.

[Second Embodiment]
Next, a second embodiment of the surface treatment apparatus of the present invention will be described with reference to FIG. In the surface treatment apparatus of FIG. 4, the direction in which the long resin film F is wound around the outer peripheral surface of the downstream canroll of the two canrolls can be selected as either clockwise or counterclockwise. As a result, it is possible to form a film on only one side of the long resin film F or on both sides by roll-to-roll transfer in only one direction.

Specifically, in the vacuum film forming apparatus of FIG. 2, the long resin film F unwound from the unwinding roll 111 includes a free roll 130a, a first tension sensor roll 112, a first driving roll 113, and a free roll. Rolls 130b, 130c, 130d, 130e, 130f, a second tension sensor roll 114, a free roll 130 g, a first feed roll 115, and a first feed tension sensor roll 116 are passed through the first can roll 117 in this order. After being fed and subjected to a film forming process by the film forming means while being conveyed along the outer peripheral surface thereof, the outer peripheral surface of the first can roll 117 is subjected to the first delivery tension sensor roll 118 and the first delivery roll 119. Is sent out from.

The long resin film F delivered from the first delivery roll 119 is sent to the tension cutter drive roll 120 located substantially in the center of the roll-to-roll transfer path after passing through the free rolls 130h, 130i, 130j, and 130k. .. Here, the long resin film so that the tension of the long resin film F on the upstream side and the tension of the long resin film F on the downstream side of the drive roll 120 for the tension cutter do not affect each other due to the tension fluctuation. Transport while firmly gripping F so that it does not slip on the outer peripheral surface. The long resin film F sent out from the tension cutter drive roll 120 is sent to the branching free roll 130l, which is the branching point of the path, and is either the path A shown by the solid line or the path B shown by the dotted line. It is distributed to.

In the solid line path A, the long resin film F fed out from the free roll 130l passes through the free rolls 130m and 130n, and then the right side drive roll 125 is similar to the above-described first can roll 117 feeding / delivering mechanism. And, after being sent to the second can roll 123 by the right side tension sensor roll 124 and subjected to the film forming process by the film forming means while being conveyed along the outer peripheral surface thereof, the left side tension sensor roll 122 and the left side drive roll 121 are used to perform the film formation process. 2 It is sent out from the outer peripheral surface of the can roll 123, and is directly wound by the first winding roll 127 via the free rolls 130o and 130p, the first pre-winding tension sensor roll 126, and the free rolls 130q and 130r1 to r3.

On the other hand, in the dotted path B, the long resin film F sent out from the free roll 130l is sent to the second can roll 123 by the left side drive roll 121 and the left side tension sensor roll 122 after passing through the free roll 130o. After the film formation process is performed by the film forming means while being conveyed in the direction opposite to the path A along the outer peripheral surface, the film is sent out from the outer peripheral surface of the second can roll 123 by the right side tension sensor roll 124 and the right side drive roll 125. , Free rolls 130n, 130s, second pre-winding tension sensor roll 128, and free rolls 130t, 130u1 to u3, and is wound by the second winding roll 129. The long resin film F fed from the free roll 130s is fed to the first pre-winding tension sensor roll 126 via the free rolls 130v, 130w, 130p, so that the long resin film F formed in the path B is formed. Can also be wound with the first winding roll 127.

In the vacuum film forming apparatus of the second embodiment, when a Ni—Cr film as a seed layer and a Cu film on the seed layer are formed on both sides of the long resin film F by roll-to-roll transfer in one direction. , Ni-Cr targets are installed on the first magnetron sputtering cathode 141 located around the first canroll 117 and the eighth magnetron sputtering cathode 148 arranged around the second canroll 123, and the other six magnetrons. By installing a Cu target on the sputtering cathode, a film can be formed in the same manner as in the first embodiment. Further, when the Ni—Cr film of the seed layer and the Cu film on the seed layer are formed on only one side by unidirectional film transfer, the first and second magnetron sputtering cathodes 141 located around the first canroll 117 are formed. By installing a Ni—Cr target at 142 and installing a Cu target on the other six magnetron sputtering cathodes, a film can be formed in the same manner as in the first embodiment. As described above, the vacuum film forming apparatus of the second embodiment of the present invention is capable of forming a film on both sides of a long base material or forming a film on only one side only by one-way roll-to-roll transfer. Becomes possible.

[Third Embodiment]
Next, a third embodiment of the surface treatment apparatus of the present invention will be described with reference to FIG. Similarly to that of the second embodiment, the surface treatment apparatus of the third embodiment also selects the direction in which the long resin film F is wound around the outer peripheral surface of the downstream canroll of the two canrolls. You can do it. In the vacuum film forming apparatus of the third embodiment, among the roll-to-roll transfer paths, the first half of the roll-to-roll transfer path of winding the film around the outer peripheral surface of the first can roll 217 is the path of the second embodiment described above. Since it has the same configuration as the one, the description is omitted. Of the three-digit codes shown in FIGS. 4 and 5, those having the same value excluding the hundreds digit correspond to each other.

Explaining the latter half of the path of winding the film around the outer peripheral surface of the second can roll 223 to form a film, the long resin film F delivered from the first delivery roll 219 has passed through free rolls 230h, 230i, 230j, and 230k. After that, it is sent to the tension cutter drive roll 220 located substantially in the center of the roll-to-roll transfer path. Here, the long resin film so that the tension of the long resin film F on the upstream side and the tension of the long resin film F on the downstream side of the drive roll 220 for the tension cutter do not affect each other due to the tension fluctuation. Transport while firmly gripping F so that it does not slip on the outer peripheral surface. The long resin film F sent out from the tension cutter drive roll 220 is sent to the branching free roll 230m, which is the branching point of the path, via the free roll 230l, and is shown by the path A shown by the solid line or the dotted line. It is distributed to one of the routes B.

In the solid line path A, the long resin film F sent out from the free roll 230 m passes through the free rolls 230n and 230o, and then has the left side drive roll 221 and the left side as in the sending and sending mechanism of the first can roll 217. After being sent to the second can roll 223 by the tension sensor roll 222 and subjected to a film forming process by the film forming means while being conveyed along the outer peripheral surface thereof, the second can is performed by the right tension sensor roll 224 and the right drive roll 225. It is sent out from the outer peripheral surface of the roll 223, and is directly wound by the first take-up roll 227 via the free rolls 230p, 230q, 230r, the first pre-winding tension sensor roll 226, and the free rolls 230s, 230t1 to t3.

On the other hand, in the dotted path B, the long resin film F sent out from the free roll 230 m passes through the free rolls 230n, 230q and 230p, and then becomes the second can roll 223 by the right side drive roll 225 and the right side tension sensor roll 224. After being fed and subjected to a film forming process by the film forming means while being conveyed along the outer peripheral surface in the direction opposite to the path A, the outer periphery of the second can roll 223 is carried out by the left tension sensor roll 222 and the left drive roll 221. It is sent out from the surface and is wound by the second winding roll 229 via the free rolls 230o, 230n, 230v, the second pre-winding tension sensor roll 228, and the free rolls 230w, 230x1 to x3. The long resin film F fed from the free roll 230o is wound around the free roll 230n counterclockwise, and then sent out to the first pre-winding tension sensor roll 226 via the free rolls 230y, 230z, and 230r. The long resin film F formed on the path B can be wound by the first winding roll 227.

In the vacuum film forming apparatus of the third embodiment, when a Ni—Cr film as a seed layer and a Cu film on the seed layer are formed on both sides of the long resin film F by roll-to-roll transfer in one direction. , Ni-Cr targets are installed on the first magnetron sputtering cathode 241 located around the first canroll 217 and the second magnetron sputtering cathode 246 arranged around the second canroll 223, and the other six magnetrons. By installing a Cu target on the sputtering cathode, a film can be formed in the same manner as in the first embodiment. Further, when the Ni—Cr film of the seed layer and the Cu film on the seed layer are formed on only one side by unidirectional film transfer, the first and second magnetron sputtering cathodes 241 located around the first canroll 217 are formed. By installing a Ni—Cr target at 242 and installing a Cu target on the other six magnetron sputtering cathodes, a film can be formed in the same manner as in the first embodiment. As described above, the vacuum film forming apparatus of the third embodiment of the present invention is capable of forming a film on both sides of a long base material or forming a film on only one side only by one-way roll-to-roll transfer. Becomes possible.

[Fourth Embodiment]
Next, a fourth embodiment of the surface treatment apparatus of the present invention will be described with reference to FIG. Similarly to the surface treatment apparatus of the second and third embodiments described above, the surface treatment apparatus of the fourth embodiment also has a long resin film F on the outer peripheral surface of the downstream can roll of the two can rolls. You can select the direction to wrap the. In the vacuum film forming apparatus of the fourth embodiment, among the roll-to-roll transfer paths, the first half of the roll-to-roll transfer paths, which are wound around the outer peripheral surface of the first can roll 317 to form a film, are the above-mentioned second and third paths. Since the configuration is the same as that of the embodiment, the description thereof will be omitted. It should be noted that among the three-digit codes shown in FIGS. 4, 5 and 6, those having the same value excluding the hundreds digit correspond to each other.

Explaining the latter half of the path of winding the film around the outer peripheral surface of the second can roll 223 to form a film, the long resin film F delivered from the first delivery roll 319 has passed through free rolls 330h, 330i, 330j, and 330k. After that, it is sent to the tension cutter drive roll 320 located substantially in the center of the roll-to-roll transfer path. Here, the long resin film so that the tension of the long resin film F on the upstream side and the tension of the long resin film F on the downstream side of the drive roll 320 for the tension cutter do not affect each other due to the tension fluctuation. Transport while firmly gripping F so that it does not slip on the outer peripheral surface. The long resin film F sent out from the tension cutter drive roll 320 is sent to the branching freeroll 330m, which is the branching point of the path, via the freeroll 330l, and the lower path A or the dotted line shown by the solid line here. It is distributed to one of the upper paths B indicated by.

In the lower path A, the long resin film F passes through the free rolls 330n _A and 330o _A , and then has the lower feed roll 321 _A and the lower feed roll 321 _A and the same as the above-described first can roll 317 feed / deliver mechanism. Lower feed tension sensor roll 322 _A feeds to the second can roll 323, and while being conveyed along the outer peripheral surface thereof, a film forming process is performed by a film forming means described later, and then the lower feed tension sensor roll It is delivered from the outer peripheral surface of the second can roll 323 by the 324 _A and the lower delivery roll 325 _A.

On the other hand, in the upper path B, the long resin film F passes through the free rolls 330n _B and 330o _B , and then the upper feeding roll 321 _B and the upper feeding roll 321 _B and the same as the above-described first can roll 317 feeding / sending mechanism. After being fed to the second can roll 323 by the upper feed tension sensor roll 322 _B and subjected to a film forming process by a film forming means described later while being conveyed along the outer peripheral surface thereof, the upper feed tension sensor roll 324 _B And is delivered from the outer peripheral surface of the second can roll 323 by the upper delivery roll 325 _B.

The long resin film F formed through these paths A or B is wound on the same take-up roll 27. That is, the long resin film F formed on the path _A passed through the free rolls 330p _A and 330q _A , and then the long resin film F formed on the path _B passed through the free rolls 330p _B and 330q _B. After that, the film is wound by the winding roll 327 via the free roll 330r shared by the path A and the path B, the tension sensor roll 326 before winding, and the free rolls 330s and 330t1 to t3.

In the vacuum film forming apparatus of the fourth embodiment, when a Ni—Cr film as a seed layer and a Cu film on the seed layer are formed on both sides of the long resin film F by unidirectional roll-to-roll transfer. , Ni-Cr targets are installed on the first magnetron sputtering cathode 341 located around the first canroll 317 and the second magnetron sputtering cathode 346 arranged around the second canroll 323, and the other six magnetrons. By installing a Cu target on the sputtering cathode, a film can be formed in the same manner as in the first embodiment. Further, when the Ni—Cr film of the seed layer and the Cu film on the seed layer are formed on only one side by unidirectional film transfer, the first and second magnetron sputtering cathodes 341 located around the first canroll 317 are formed. By installing Ni—Cr targets at 342 and Cu targets at the other six magnetron sputtering cathodes, a film can be formed in the same manner as in the first embodiment. As described above, the vacuum film forming apparatus of the fourth embodiment of the present invention is capable of forming a film on both sides of a long base material or forming a film on only one side only by one-way roll-to-roll transfer. Becomes possible. Further, since it is not necessary to provide two sets of winding rolls as in the second and third embodiments, the size of the apparatus can be reduced, and the wound rolls can be easily replaced and maintained.

As described above, the vacuum film forming apparatus has been taken up as a specific example of the roll-to-roll type long substrate processing apparatus of the present invention, but the processing apparatus for the long substrate of the present invention is not limited to this. Instead, the surface of the long base material may be modified by subjecting the long base material to a heat load treatment such as plasma treatment or ion beam treatment in a vacuum chamber under a reduced pressure atmosphere. The plasma treatment is to treat a long substrate by generating oxygen plasma or nitrogen plasma by discharging in a reduced pressure atmosphere with, for example, a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen. In the ion beam treatment, a plasma discharge is generated in a magnetic field gap in which a strong magnetic field is applied under a reduced pressure atmosphere, and the cations in the plasma are electrolyzed by an anode to irradiate the target object (long substrate) as an ion beam. It is a process to do.

A vacuum film forming apparatus (sputtering web coater) shown in FIG. 1 was used to form a film on both sides of the long resin film F. For the long resin film F, a PET film "Cosmo Shine (registered trademark)" manufactured by Toyobo Co., Ltd. having a width of 600 mm, a length of 1000 m, and a thickness of 50 μm was used. Further, for the two can rolls 17 and 23, a cylindrical member having a jacket roll structure made of stainless steel having a diameter of 800 mm and a width of 800 mm was used, and the outer peripheral surface thereof was plated with hard chrome. For both the first can roll and the second can roll, 360 gas introduction paths 4 having an inner diameter of 4 mm are formed in the outer peripheral wall thickness portion of the cylindrical member, and each gas introduction path 4 has an inner diameter of 0.2 mm at intervals of 10 mm. 47 gas discharge holes 5 were provided. It should be noted that the gas discharge holes 5 are provided only in the region on the outer peripheral surface on which the long resin film F is wound, which is inside the position 20 mm inward from both ends in the width direction.

When this can roll with a gas release mechanism is mounted on a vacuum film forming apparatus and the long resin film F is wound and conveyed, the angle range of the non-wrapped region where the long resin film F does not contact is about 90 °. The number of gas introduction paths 4 located within the angular range of this non-lap region is 90. Therefore, the shape of the end portion where the gas supply path 8 of the stationary ring unit 6b of the gas rotary joint 6 opens on the sliding surface with the rotating ring unit 6a is wrapped by about 270 ° excluding about 90 ° of the non-wrapping region. A substantially C-shaped groove that opens only in the angular range of the region.

Since it was difficult in manufacturing to connect 360 gas introduction paths 4 to the gas distribution path 7 of the rotating ring unit 6a of the gas rotary joint 6 on a one-to-one basis, one for every ten gas introduction paths 4. The gas collecting pipe was collectively connected to the gas distribution path 7. That is, 36 gas collecting pipes were connected to the rotary joint 6. Further, a pressure gauge (trade name: Baratron vacuum gauge) was attached to the gas supply path 8 of the stationary ring unit 6b to control the pressure in the gap portion.

For the tension cut drive roll 20, a rubber roll made of Viton (registered trademark) having a hardness of 80 ° measured by a durometer is used, and the positions of the free rolls 30e and 30f immediately upstream and downstream thereof are adjusted to hold the hugging angle. Was 180 °. The tension cut drive roll 20 is driven at the same peripheral speed as the first can roll 17, which is a speed reference roll.

In order to form a Ni-Cr film as a seed layer and a Cu film on it as a metal film on the PET film (resin film), the first magnetron sputtering cathode 41 and the second canroll 23 around the first canroll 17 are formed. A Ni—Cr target was installed on the fifth magnetron sputtering cathode 45 around the magnetron, and a Cu target was installed on the other magnetron sputtering cathodes. By adjusting the input power of these sputtering cathodes, a Ni—Cr layer having a film thickness of 30 nm and a Cu layer having a film thickness of 90 nm can be formed even if the transport speed is changed.

The PET film was set on the unwinding roll 11, the tip of the PET film was pulled out, and the PET film was attached to the winding roll 27 via the first can roll 17 and the second can roll 23. The tension of the unwinding roll 11 and the winding roll 27 was set to 100 N, and the tension before and after the first can roll 17 and the second can roll 23 was set. Cooling water controlled to 0 ° C. was circulated outside the vacuum chamber 10 to the first can roll 17 and the second can roll 23. Further, 300 sccm of argon gas was introduced, and the film was formed by controlling the power applied to each cathode to 20 kW.

In this state, the vacuum chamber 10 is exhausted to 5 Pa by a plurality of dry pumps, and then exhausted to 3 × 10 ^-3 Pa by using a plurality of turbo molecular pumps and a cryocoil, and the transfer of the long resin film F is started. did. After the start of this transportation, in each of the first can roll 17 and the second can roll 23, the tension of the long resin film F fed to the outer peripheral surface and the pressure of the gas discharged from the gas discharge holes are variously changed. A film was formed.

For comparison, a film was formed in the same manner as described above except that a metal free roll was used instead of the tension cut drive roll 20. Then, the tension fluctuation value of the tension sensor roller used for tension control was monitored in the feeding and sending mechanism of each can roll during film formation. After the film formation, the long resin film F was removed from the take-up roll 27 and visually inspected for scratches. The results are shown in Table 1 below.

As can be seen from Table 1 above, when the tension cut drive roll 20 is used, the length is fed to the outer peripheral surfaces of the first can roll 17 (first CR) and the second can roll 23 (second CR). When the tension of the resin film F and the gas pressure discharged from the gas discharge holes are variously changed, the tension fluctuation range can be suppressed to less than 3%, and the long resin film F after film formation can be visually observed. In the inspection, the long resin film F was not scratched. On the other hand, when the tension cut drive roll 20 is not used, the tension fluctuation width is 3% or more in each case, and the long resin film F is visually inspected after the film formation. Scratches were observed in some places. When the tension cut drive roll 20 was not used, the gas pressure of the released gas from the gas release mechanism of the can roll may become unstable.

1 Cylindrical member 2 Jacket roll structure 3 Rotating shaft 3a Bearing 4 Gas introduction path 5 Gas discharge hole 6 Gas rotary joint 7 Rotating ring unit 8 Static ring unit 7a Gas distribution path 8a Gas supply path 9 Gas supply piping 10 Vacuum chamber 11 winding Out Roll 12 1st Tension Sensor Roll 13 1st Drive Roll 14 2nd Tension Sensor Roll 15 1st Feed Roll 16 1st Feed Tension Sensor Roll 17 1st Can Roll 18 1st Delivery Tension Sensor Roll 19 1st Delivery Roll 20 Central drive roll 21 2nd feed roll 22 2nd feed tension sensor roll 23 2nd can roll 24 2nd feed tension sensor roll 25 2nd feed roll 26 Pre-wind tension sensor roll 27 Winding Rolls 30a, 30b, 30c, 30d, 30e, 30f, 30g, 30h, 30i, 30j, 30k Free rolls 41, 42, 43, 44, 45, 46, 47, 48 Magnetron sputtering cathode 111, 211, 311 Unwinding rolls 112, 212, 312 1st tension sensor roll 113, 213, 313 1st drive roll 114, 214, 314 2nd tension sensor roll 115, 215, 315 1st feed roll 116, 216, 316 1st feed tension sensor Rolls 117, 217, 317 1st can roll 118, 218, 318 1st delivery tension sensor roll 119, 219, 319 1st delivery roll 120, 220, 320 Central drive roll 121, 221, 321 _A , 321 _B Left side drive roll 122, 222, 222 _A , 322 _B Left side tension sensor roll 123, 223, 323 Second can roll 124, 224, 324 _A , 324 _B Right side tension sensor roll 125, 225, 325 _A , 325 _B Right side drive roll 126, 226, 326 1st pre-winding tension sensor roll 127, 227, 327 1st winding roll 128, 228, 328 2nd pre-winding tension sensor roll 129, 229, 329 2nd winding roll 130a, 130b, 130c, 130d, 130e, 130f, 130g, 130h, 130i, 130j, 130k, 130l, 130m, 130n, 130o, 130p, 130q, 130 r1-r3, 130s, 130t, 130u1-u3, 130v, 130w Freeroll 141, 142, 143, 144, 145, 146, 147, 148 Magnetron Sputtering Cathodes 230a, 230b, 230c, 230d, 230e, 230f, 230g, 230h , 230i, 230j, 230k, 230l, 230m, 230n, 230o, 230p, 230q, 230r1 to r3, 230s, 230t1 to t3, 230u, 230v, 230w, 230x1 to x3, 230y, 230z free rolls 241, 242, 243, 244, 245, 246, 247, 248 Magnetron Sputtering Cathodes 330a, 330b, 330c, 330d, 330e, 330f, 330g, 330h, 330i, 330j, 330k, 330l, 330m, 330n _A , 330n _B , 330o _A , 330o _B , 330p _A , 330p _B , 330q _A , 330q _B , 330r, 330s, 330t1-t3 Freeroll 341, 342, 343, 344, 345, 346, 347, 348 Magnetron Sputtering Cathode PV Piezo Valve MFM Mass Flow Meter P Pressure Sensor (Pressure Detection) means)
CPU controller F long resin film

Claims (12)

A surface treatment device for a long base material that is transported along a roll-to-roll transfer path in a vacuum chamber, in which the long base material is wound around an outer peripheral surface and cooled by a refrigerant that circulates inside. A can roll having a can roll and a surface treatment means provided at a position facing the outer peripheral surface of each of the at least two can rolls, and a can roll located on the most upstream side of the at least two can rolls. A tension cut means is provided in the transport path between the and the first can roll on the downstream side thereof, and the motor-driven delivery roll is provided for the can roll located on the most upstream side and the first can roll, respectively. A roll-to-roll surface treatment device characterized in that a feed roll driven by a motor is provided . The roll according to claim 1, wherein the tension cutting means is either a combination of a metal drive roll and a nip roll that abuts on the outer peripheral surface thereof, or a roll portion is a rubber drive roll. Two-roll type surface treatment device. The first can roll according to claim 1 or 2, wherein at least the first can roll includes an outgassing mechanism for supplying gas to a gap between its outer peripheral surface and a long base material wrapped around the outer peripheral surface thereof. Roll-to-roll surface treatment equipment. A plurality of gas introduction paths extending in the rotation axis direction provided in the outer peripheral wall thickness portion of the can roll at substantially equal intervals in the circumferential direction, and a plurality of these gas discharge mechanisms. Each of the gas introduction paths is composed of a plurality of gas discharge holes provided on the outer peripheral surface side at substantially equal intervals along the rotation axis direction, and the long base material of the plurality of gas introduction paths is The roll-to-roll type surface treatment apparatus according to claim 3, wherein gas is not supplied to the gas introduction path located in the non-wrapping region where the gas is not wound. A roll-to-roll vacuum film forming apparatus according to any one of claims 1 to 4, wherein the surface treating means of the roll-to-roll surface treating apparatus is a dry film forming means. The roll-to-roll vacuum film forming apparatus according to claim 5, wherein the dry film forming means is a sputtering cathode. In the vacuum chamber, the long base material is transported along the transport path by roll-to-roll, and the long base material is provided on the outer peripheral surface of at least two can rolls in which the refrigerant circulates inside the transport path. This is a surface treatment method for a long base material, in which the surface is treated by a surface treatment means provided at a position facing the outer peripheral surface.
A motor-driven delivery roll and a motor-driven feed roll are provided for the canroll located on the most upstream side of the at least two canrolls and the first canroll on the downstream side thereof , respectively. The roll-to-roll is characterized in that the tension fluctuation of one of the upstream side and the downstream side of the intermediate point of the transport path between the two can rolls does not affect the other. Roll-type surface treatment method. The roll-to-roll according to claim 7, wherein the intermediate point is either a metal drive roll having a nip roll that abuts on the outer peripheral surface, or a rubber drive roll. Method surface treatment equipment. At least in the first can roll, the gas is discharged from the outer peripheral surface and the long base material is conveyed in a state where the gas is present in the gap between the outer peripheral surface and the long base material wrapped around the outer peripheral surface. The roll-to-roll type surface treatment method according to claim 7, which is characterized. A plurality of gas introduction paths extending in the rotation axis direction provided on the outer peripheral wall thickness portion of the canroll at substantially equal intervals in the circumferential direction and extending over the entire circumference of the gas from the outer peripheral surface. It is performed by a gas discharge mechanism provided in each of the plurality of gas introduction paths and composed of a plurality of gas discharge holes opened on the outer peripheral surface side at substantially equal intervals along the rotation axis direction. The roll-to-roll surface treatment method according to claim 9, wherein gas is not supplied to the gas introduction path located in the non-wrapped region where the long base material is not wound. A roll-to-roll vacuum film forming method, characterized in that the surface treatment means according to any one of claims 7 to 10 is a dry film forming means. The roll-to-roll vacuum film forming method according to claim 11, wherein the dry film forming means is a sputtering cathode.

Images