JP6773103B2 - Scribe method and scribe head unit for brittle material substrates - Google Patents

Description

The present invention relates to a method for scribing a brittle material substrate and a scribing head unit for scribing a brittle material substrate such as a glass substrate or a silicon wafer by a diamond point.

Conventionally, a scribing wheel or a scribing tool using a diamond point made of a single crystal diamond has been used for scribing a glass substrate or a silicon wafer. For glass substrates, scribing wheels that roll with respect to the substrate have been mainly used, but due to the advantages of improving the strength of the substrate after scribe, the use of diamond points, which are fixed blades, has also been considered. It's coming. Patent Documents 1 and 2 propose a point cutter for scribing a substrate having a high hardness such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a cut point on the ridgeline of a pyramid and a tool having a conical tip are used.

Japanese Unexamined Patent Publication No. 2003-183040 Japanese Unexamined Patent Publication No. 2005-079529

When scribing a glass substrate using a scribing tool using a diamond point as a tool, there is a problem that the life of the diamond point is short and the glass substrate is damaged after scribing several tens of meters.

The present invention has been made to solve the above problems, and improves the durability of a scribing tool using diamond points when dividing a brittle material substrate, prolongs the life, and reduces the frequency of replacement. It is an object of the present invention to provide a scribing head unit capable of performing a scribing method and a scribing method using the scribing head unit.

In order to solve this problem, in the method of scribing a brittle material substrate of the present invention, the brittle material substrate is cleaned along a line having a predetermined width including a scheduled scribing line, and a diamond is used on the scheduled scribing line. By pressing the point of the brittle material substrate and moving the brittle material substrate and the scribing tool relative to each other , a trench line, which is a groove due to plastic deformation, is formed on the surface of the brittle material substrate, and a crack is formed along the trench line. It scribbles by causing .

In order to solve this problem, the scribe head unit of the present invention presses the points of the scribing tool against the brittle material substrate with a predetermined load and moves them relatively, thereby causing plastic deformation on the surface of the brittle material substrate. A scribing head unit that forms a trench line that is a groove, and has a scribing tool that has one or more points using diamonds, a tool holder that is attached to the scribing head unit and fixes the scribing tool, and the above. In front of the tool holder, a foreign matter removing means for removing foreign matter on the brittle material substrate along the scheduled scribe line is provided.

Wherein said foreign substance removing means includes a foreign matter removing holder, a foreign matter removing member provided at a lower end of the foreign substance removal holder may be provided with a.

According to the present invention having such characteristics, first of all, a brittle material substrate. Clean the scheduled scribing line and scribble with a scribing tool with diamond points . As a result, foreign matter that has adhered to the brittle material substrate from the beginning or that is generated during scribe is not caught in the brittle material substrate and the scribing tool, and the wear and damage of the points can be reduced and the durability is reduced . effect that Ru can be greatly improved.

FIG. 1 is a plan view and a side view showing an example of a scribing tool used for a tool holder according to an embodiment of the present invention. FIG. 2 is a perspective view of the tool holder according to the present embodiment. FIG. 3 is a front view and a side view showing an example of the scribe head unit according to the first embodiment of the present invention. FIG. 4 is a flowchart showing a method of dividing a glass substrate according to the embodiment of the present invention. FIG. 5 is a plan view of the glass substrate according to the embodiment of the present invention. FIG. 6 is an enlarged view of a planned scribe line of a glass substrate according to the embodiment of the present invention. FIG. 7 is a cross-sectional view of a trench line and a crack line formed in the scribe method according to the embodiment of the present invention. FIG. 8 is a diagram showing a trench line and an assist line of the glass substrate according to the present embodiment. FIG. 9 is a front view and a side view showing a scribe head unit according to a second embodiment of the present invention. FIG. 10 is a front view and a side view showing a scribe head unit according to a third embodiment of the present invention. FIG. 11 is a front view and a side view showing a scribe head unit according to a fourth embodiment of the present invention. FIG. 12 is a front view and a side view showing a scribe head unit according to a fifth embodiment of the present invention. FIG. 13 is a front view showing a scribe head unit according to a sixth embodiment of the present invention. FIG. 14 is a front view showing a scribe head unit according to a seventh embodiment of the present invention. FIG. 15 is a front view and a side view showing a scribe head unit according to an eighth embodiment of the present invention. FIG. 16 is a front view and a side view showing a scribe head unit according to a ninth embodiment of the present invention. FIG. 17 is a front view showing a scribe head unit according to a tenth embodiment of the present invention.

Next, an embodiment of the present invention will be described. First, FIG. 1 is a plan view and a side view showing an example of a multipoint diamond tool (hereinafter, simply referred to as a diamond tool) 10, which is a scribing tool held in a tool holder of the scribe head unit of the present embodiment. The diamond tool 10 is based on a polygonal prism consisting of any number of sides that are of constant thickness and rotationally symmetric. In this embodiment, the base 11 of a quadrangular prism having a constant thickness is made of single crystal diamond and has a through hole 12 at the center thereof. Ridges 13a to 13d parallel to the axis passing through the through hole 12 (the axis perpendicular to the paper surface in FIG. 1A) are evenly formed on the outer peripheral surface of the quadrangle on the base 11.

By the way, in the present embodiment, as shown in FIG. 1, the base 11 is polished like a chamfer from both bottom surfaces of the square pillars at the four corners toward the ridgeline where the outer peripheral surfaces intersect. That is, as shown in FIG. 1 (b), the first inclined surfaces 14a to 14d are formed by polishing from the four corners of the bottom surface on the right side of the base 11 toward the ridgeline of the base 11. At this time, the base 11 is polished so that the angle formed by the side sandwiching the ridgeline and the inclined surface is equal, that is, the inclined surface becomes an isosceles triangle with one end of the ridgeline as the apex. Such an inclined surface can be easily formed by laser machining or machining. Further, after laser processing, further mechanical polishing may be performed to obtain a more precise polished surface. In this way, four points P1 to P4 are formed on the right side in the side view of the base as shown in FIG. 1B, with the intersection of each ridge line 13a to 13d and the first inclined surface 14a to 14d as the apex. Can be done. At this time, the inclined surfaces 14a to 14d of the base 11 are top surfaces. Here, the top surface means a surface that is in contact with two outer peripheral surfaces forming a ridge line and shares one end of the ridge line.

Next, the second inclined surfaces 15a to 15d are formed by polishing from the other bottom surface of the base 11 toward the outer periphery of the base 11 in the same manner. At this time, polishing is performed so that the total polishing range of the first inclined surface and the second inclined surface does not exceed the thickness of the base so that the ridge line remains between the first inclined surface and the second inclined surface. To do. In this way, four points P5 to P8 are formed on the left side in the side view of the base as shown in FIG. 1 (b) with the intersection of each ridge line 13a to 13d and the second inclined surface 15a to 15d as points. Can be done. By setting both ends of the ridge lines 13a to 13d as points P1 to P8 in this way, it is possible to form eight points on the outer circumference of the quadrangular diamond tool 10.

Next, the tool holder will be described. FIG. 2 is a perspective view showing the assembly of the tool holder. As shown in FIG. 2, the tool holder main body 21 constituting the main part of the tool holder 20 includes a rectangular parallelepiped holder holding portion 22a and a tool mounting portion 22b having a shape in which the upper half of the rectangular parallelepiped is cut out at the tip thereof. It consists of. As shown in FIG. 2, the holder holding portion 22a is provided with through holes 23a, 23b and 24a, 24b for mounting for fixing the tool holder to the scribe head unit. Further, the tool mounting portion 22b has a thickness adjusting groove 25 that is cut out at a position close to the holder holding portion 22a and is perpendicular to the longitudinal direction. As shown in FIG. 2, the tip portion has inclined surfaces 26a and 26b notched from the left and right, and inclined surfaces 26c notched from below. Further, a screw groove 27 is provided in the substantially central portion of the tool mounting portion 22b perpendicular to the central axis. A tool holding groove 28 having a constant depth along the central axis in the longitudinal direction of the tool holder body 21 is formed on the surface of the tool mounting portion 22b through the screw groove 27, and the tool holding groove 28 is outward at the tip portion. It is open at an angle of about 90 °. In other words, the tool holding groove 28 becomes wider toward the tip, and the angle at which the extension lines of the inner wall of the groove intersect is 90 °. It is assumed that the thickness adjusting groove 25 and the tool holding groove 28 have the same depth. Here, the region of the tool holding groove 28 opened at 90 ° is a holding region for holding the above-mentioned quadrangular diamond tool 10 and projecting the tip portion thereof to the outside.

A holder retainer 30 is attached to the upper part of the tool attachment portion 22b. The holder holder 30 has a substantially rectangular parallelepiped shape and is attached to the recess of the tool mounting portion 22b to form a rectangular parallelepiped tool holder 20. Inclined surfaces 31a and 31b corresponding to the inclined surfaces 26a and 26b of the tool mounting portion 22b are provided on the left and right sides of the tip portion of the holder retainer 30, and inclined surfaces 31c corresponding to the inclined surfaces 26c are provided on the upper surface. Further, a through hole 32 is provided in the central portion.

When holding the diamond tool 10 in the tool holder 20, first, as a thickness adjusting member, a thickness adjusting pin 33 having the same diameter as the thickness of the diamond tool 10 is inserted into the thickness adjusting groove 25, and then the tool holding groove. The diamond tool 10 is fitted into the 28, and the holding member 30 is covered with the diamond tool 10 protruding, and the diamond tool 10 is fixed by tightening the screw 34. In this way, the lower surface of the holder retainer 30 is always in parallel with the surface of the tool mounting portion 22b, so that the diamond tool 10 can be securely fixed to the tip.

FIG. 3 is a front view and a side view showing a state in which the tool holder 20 having the diamond tool 10 is attached to the scribe head unit. The scribe head unit 40A is configured such that the plate-shaped head plate 41 itself moves up and down as a whole by a slide mechanism (not shown). An air cylinder 42 for scribe load is fixed to the head plate 41. A rod 42a projects from the lower end of the air cylinder 42 so as to be expandable and contractible. As shown in FIG. 3B, a guide mechanism 43 and a slide portion 44 are provided below the rod 42a of the head plate 41, and the slide portion 44 is pressed downward with a predetermined load. The guide mechanism 43 holds the slide portion 44 so as to be vertically movable. The slide portion 44 is provided with an L-shaped plate 45. The plate 45 moves up and down together with the slide portion 44, but the lower limit is regulated by the stopper 46. A tool holder 20 is fixed to the plate 45 in an oblique direction by passing screws 47a and 47b through the through holes 23b and 24b. Then, the scribe can be performed by moving the scribe head unit 40A in the direction of the arrow A.

A foreign matter removing holder 51 is provided on the block 50 at the right end of the head plate 41. As shown in FIG. 3B, the rectangular parallelepiped block 50 projects the foreign matter removing holder and the lubricant supply holder described later from the head plate 41 to the left so as to be in the same position as the diamond tool when viewed from the side surface. It is a thing. Like the tool holder, the foreign matter removing holder 51 has a rectangular parallelepiped shape and is vertically fixed, and a sponge 52 is attached to the tip thereof. The sponge 52 is a foreign matter removing member that contacts the substrate immediately before scribing and removes foreign matter adhering to the scheduled scribing line when the scribing head unit 40A is moved in the direction of arrow A. Here, the foreign matter removing holder 51 and the sponge 52, which is a flexible foreign matter removing member at the tip thereof, constitute a foreign matter removing means attached to the scribe head unit 40A.

A lubricant supply holder 53 is attached to the block 50 adjacent to the foreign matter removing holder 51. Like the foreign matter removing holder 51, the lubricant supply holder 53 has a rectangular parallelepiped shape and is vertically fixed, and a sponge 54 is attached to the tip thereof. Lubricant is supplied to the sponge 54 from a lubricant supply unit (not shown) via a lubricant supply pipe 55. The sponge 54 is a lubricant application member that applies a lubricant on a scheduled scribe line immediately before scribe. Here, it is assumed that the supply amount and the supply timing of the lubricant are commanded by the supply unit mounted on the scribe device. Here, the lubricant supply holder 53 and the sponge 54, which is a flexible coating member at the tip thereof, constitute a lubricant coating means attached to the scribe head unit 40A.

Next, a method of dividing the glass substrate, which is a brittle material substrate, by using the scribe head unit 40A of the present embodiment will be described with reference to the flowchart of FIG. 4 and the plan view of the glass substrate of FIG. First, in step S1, a glass substrate 60 having a flat surface SF is prepared. When scribing the glass substrate 60, one point P1 of the diamond tool 10 of the tool holder 20 attached at an angle is fixed so as to be in contact with the glass substrate 60, and the scribing head unit 40A is fixed to the glass substrate 60. It is pushed down near one side 60a and moved in the direction of arrow A in the figure, and slid to a position close to the other side 60b of the planned division line. When the scribe head unit 40A is moved in this way, the foreign matter on the scheduled scribing line is removed by the sponge 52 attached to the foreign matter removing holder 51. That is, as shown in step S2 of FIG. 4, cleaning is performed along the scheduled scribe line. At this time, as shown in FIG. 6A as an enlarged view of the scheduled scribe line SIL1, cleaning is performed on a line having a predetermined width so as to include the scheduled scribe line SIL1 in the center. By cleaning the scheduled scribing line in this way, foreign matter is not caught between the glass substrate 60 and the cutting edge during scribing, and damage to the points of the diamond tool can be reduced.

Next, as shown in FIG. 6B, the lubricant is thinly applied to the portion cleaned with respect to the scribe scheduled line SIL1 by the sponge 54 of the lubricant supply holder 53 (step S3). Then, by scribing with the diamond tool of the scribe head held in the holder 20, a trench line TL1 is formed along the scheduled scribe line SIL1 as shown in FIG. 5 (step S4). At this time, since the diamond tool 10 is not rotated, scribe can be performed at the same point. Actually, by moving the scribe head unit 40A, steps S2 to S4 proceed almost at the same time. In this way, the wear of the diamond tool points can be significantly reduced due to the lubricating effect of the lubricant, and the life of the diamond tool can be extended. For example, the point of the diamond tool was worn at several tens of meters when the lubricant was not applied, but when the lubricant is applied, the durability can be maintained for several thousand meters.

As shown in FIG. 7A showing the cross section of the circular portion of FIG. 5A, the trench line is formed by scribes only grooves due to plastic deformation on the surface SF of the glass substrate 60, and cracks are formed in the thickness direction. Is a line that does not occur. Therefore, it is possible to perform scribing for forming a trench line under wider scribing conditions, such as setting a load lower than that for forming a normal scribing line that causes cracks. Further, in the present embodiment, the side 60a is on the upstream side of the scribe and the side 60b is on the downstream side.

Similarly, the scribe head unit 40A is moved from left to right along the scheduled scribe lines SIL2 to SIL6 on the surface SF of the glass substrate 60. As a result, the sponge 52 of the foreign matter removing holder 51 removes the foreign matter on the scheduled scribing line, the lubricant is applied by the sponge 54 of the lubricant supply holder 53, and the scribe is further performed by the diamond tool 10. In this way, five more trench lines TL2 to TL6 are formed parallel to the trench line T1.

Next, as shown in FIG. 8, the assist line AL1 is formed so as to intersect each trench line. The assist line AL1 is preferably formed on the downstream side of each trench line, that is, at a position close to the side 60b. As shown in FIG. 1, the assist line AL1 may be formed by using a scribing tool having a diamond cutting edge or by rolling a scribing wheel. In the present embodiment, the assist line is a crack line in which cracks are formed.

When the assist line AL1 is formed in this way, the glass substrate 60 is divided along the assist line AL1 along the assist line AL1. At this time, a crack is generated from the position where the already formed trench lines TL1 to TL6 and the assist line AL1 intersect, as shown in FIG. 7B, and the crack extends to the upstream side of each trench line TL1 to TL6 (step). S5). Therefore, the trench lines TL1 to TL6 change to crack lines CL1 to CL6 with cracks below them.

After that, in step S6 of FIG. 4, the glass substrate 60 can be divided into a desired shape by dividing the glass substrate 60 along the crack lines CL1 to CL6.

Further, in the present embodiment, the assist line is formed and separated along the assist line to generate a crack, but the process may not involve the separation of the assist line. In this case, when the assist line is formed, a crack is formed along the trench line. Further, a step of forming a crack by sliding the diamond tool in the opposite direction at the end of the trench line without forming an assist line, or a step of extending the trench line and passing the diamond tool through the edge of the substrate. By performing the above, cracks can be generated along the trench line.

When the point P1 in contact with the substrate deteriorates due to wear, the point P5 can be used by removing the tool holder from the scribe head unit and rotating it 180 ° to switch the front and back. Alternatively, once the diamond tool 10 is removed from the tool holder 20, it is rotated 90 ° and fixed to the tool holder 20 again, and another point, for example, point P2 is brought into contact with the glass substrate 60 to clean the scheduled scribe line in the same manner. Apply lubricant and scribe.

Next, another embodiment of the scribe head unit having a function of removing foreign matter and applying a lubricant will be described. 9 to 17 show the scribe head units of the second to tenth embodiments, and the same parts as those of the above-described embodiments have the same reference numerals. As shown in FIG. 9, in the scribe head unit 40B of the second embodiment, the sponge 54 provided at the tip of the lubricant supply holder 53 is used as a sponge for applying the lubricant and removing foreign matter. Is also used. In this way, the foreign matter removing holder 51 and the sponge 52 are not required, and the structure can be simplified. In this case, the block 50 may be made smaller.

FIG. 10 is a front view showing an example of the scribe head unit 40C according to the third embodiment of the present invention. As shown in this figure, the foreign matter removing holder 51 is mounted on the flat plate-shaped support plate 70. Like the block 50, the support plate 70 projects the foreign matter removing holder 51 from the head plate 41 to the left so as to be in the same position as the diamond tool when viewed from the side surface. The sponge 52 fixed to the tip of the foreign matter removing holder 51 is the same as that of the first embodiment. An inkjet unit 72 is provided on the support plate 71 adjacent to the support plate 71. The inkjet unit 72 applies the lubricant to the surface of the glass substrate 60 in a pulsed manner from the discharge port 73, and the supply amount and timing are commanded by the control unit of the scribe device. In this embodiment, as in the first embodiment described above, the foreign matter removing holder 51 and the sponge 52 at the tip thereof remove foreign matter from the scheduled scribing line, and then a lubricant is applied to scribble. it can. Here, the inkjet unit 72 constitutes a lubricant applying means for applying the lubricant to the glass substrate.

FIG. 11 is a front view and a side view showing the scribe head unit 40D according to the fourth embodiment. In this embodiment, the sponge 74 is attached around the lubricant discharge port 73 at the tip of the above-mentioned inkjet unit 72. In this way, even if the supply of the lubricant is pulsed, the lubricant can be applied by the sponge 74 with a constant width along the scheduled scribe line as shown in FIG. 6 (b).

FIG. 12 is a front view and a side view showing the scribe head unit 40E according to the fifth embodiment. In this embodiment, the sponge 74 is used as a sponge for applying a lubricant and removing foreign substances. In this way, the foreign matter removing holder 51 and the sponge 52 are not required, and the structure can be simplified.

Next, FIG. 13 is a front view showing the scribe head unit 40F according to the sixth embodiment. In this scribe head unit, the lubricant supply pipe 55 is not connected to the lubricant supply holder 53, and only the sponge 54 is held. Then, the sponge 54 is immersed in the lubricant by periodically moving and lowering so that the lubricant supply holder 53 of the scribe head unit 40F is located directly above the lubricant tank 56 holding the lubricant. Raise the scribe head unit 40F. Then, the scribe head unit 40F is moved in the direction of the arrow A to apply the lubricant in the same manner as in the first embodiment.

Next, FIG. 14 is a front view showing the scribe head unit 40G according to the seventh embodiment. Also in this embodiment, the lubricant supply pipe is not connected to the lubricant supply holder 53, and the foreign matter removing holder 51 and the sponge 52 are omitted. Similar to the sixth embodiment, the present embodiment is such that the sponge 54 is periodically immersed in the lubricant tank 56 to apply the lubricant, and further, the sponge is also used as a sponge for removing foreign matter. Is. As a result, the sponge 54 can wipe off the scheduled scribe line and apply the lubricant.

Next, FIG. 15 is a front view and a side view showing the scribe head unit 40H according to the eighth embodiment. In the present embodiment, the lubricant supply pipe 55 is fixed by the holder 80 at a position adjacent to the tool holder 20 without applying the lubricant to the scribe scheduled line using a sponge or the like, and the soft tube 81 is attached to the tool holder 20. Make contact. In this embodiment, the lubricant is naturally dropped by its own weight and transmitted through the tool holder 20, and the lubricant is supplied from the tip of the diamond tool 10 to the scribe scheduled line to apply the lubricant.

Next, FIG. 16 is a front view and a side view showing the scribe head unit 40I according to the ninth embodiment of the present invention. Also in this embodiment, the lubricant supply pipe 55 is fixed by the holder 80 at a position adjacent to the tool holder 20, and the sponge 82 is used to contact the tool holder 20 and the lubricant is applied by the tool holder 20. Is.

Further, FIG. 17 is a front view showing the scribe head unit 40J according to the tenth embodiment of the present invention. As shown in this figure, the scribe head unit 40J is provided with a foreign matter removing holder 51 and a sponge 52 via a block 50, but the lubricant supply holder 53 and the sponge 54 are omitted. Then, the diamond tool 10 of the tool holder 20 is periodically permeated directly into the lubricant tank 56, whereby the lubricant is applied to the scheduled scribe line. Here, in the scribe head units 40F, 40G and 40J according to the sixth, seventh and tenth embodiments having the lubricant tank 56, the lubricant tank 56 constitutes a part of the lubricant applying means.

In each of the above-described embodiments, as shown in FIG. 1, a scribing tool having a plurality of points made of diamond is used, but the outer periphery of the polygon is polished from the thickness direction or the outer peripheral direction to form a plurality of points. The formed scribing tool may be used, or a quadrangular pyramid trapezoidal or conical scribing tool may be used.

Here, as shown in FIG. 4, the assist line is formed after the trench line is formed, but the step of removing the lubricant applied to the scribe scheduled line after forming the trench line by wiping or the like is included. May be good.

Alternatively, the point portion of the diamond tool may be cleaned after scribing a certain distance. In cleaning, air blow may be blown to the point portion of the cutting edge, or air may be sucked from the point portion. Further, the point portion may be ultrasonically cleaned, or the lubricant or foreign matter may be removed with a sponge or the like for cleaning. When removing the lubricant, a mat may be provided at the end of the substrate, and the cleaning may be performed by passing the mat through the mat with a scribing tool.

In each of the above-described embodiments, the sponge is used as the foreign matter removing member and the lubricant coating member, but a flexible member that achieves the same function as this, such as felt, can be used.

In the third, fourth, and fifth embodiments described above, the lubricant is applied directly to the substrate from the discharge port 73 of the inkjet unit or to soak into the sponge or felt before scribing, but the lubricant is used. A liquid having a low viscosity, for example, a lubricating oil, an alcohol such as ethanol, a surfactant, a known lubricant such as water can be used.

Further, in the eighth to tenth embodiments of the above-described embodiments, in addition to the above-mentioned low-viscosity liquid, a highly viscous milky liquid in which a lubricant component and a liquid oil component are dispersed in the liquid. Can be used. In this case, even if it is thick, it can be spread on the substrate by its own weight and can be supplied to the scheduled scribe line. Further, in the first, second, sixth and seventh embodiments, the lubricant is a paste-like liquid in addition to the above-mentioned low-viscosity liquid and high-viscosity liquid, that is, the lubricant liquid is contained in the liquid. An oil-dispersed paste, wax, or cream may be used. The paste-like lubricant does not flow on the substrate by its own weight, but can be applied with a sponge, felt, or the like and supplied onto the scheduled scribe line.

Further, in each of the above-described embodiments, the substrate is scribed by moving the scribe head unit, but foreign matter is removed, lubricant is applied, and scribe is performed by fixing the scribe head unit and moving the substrate. You may.

Further, in the first and sixth embodiments described above, the foreign matter removing holder and the lubricant supply holder are attached adjacent to each other in the same block, but the foreign matter removing holder and the lubricant are attached as in the fourth embodiment. Each supply holder may be attached to the support plate individually.

INDUSTRIAL APPLICABILITY The present invention can minimize the wear of the diamond point when scribing the brittle material substrate by the scribing tool having the diamond point, and can be effectively used in the scribing device using the diamond point.

10 Multipoint diamond tool 11 Base 12 Through hole 13a to 13d Ridge line 14a to 14d First inclined surface 15a to 15d Second inclined surface 20 Tool holder 21 Tool holder body 22a Holder holding part 22b Tool holding part 23a, 23b, 24a , 24b Through hole 25 Thickness adjustment groove 26a, 26b, 26c, 31a, 31b, 31c Inclined surface 27 Thread groove 28 Tool holding groove 30 Holder retainer 33 Thickness adjustment pin 34 Screw 40A-40J Sponge head unit 41 Head plate 42 Air Cylinder 43 Guide mechanism 44 Slide part 45 Plate 50 Block 51 Foreign matter removal holder 52 Sponge 53 Lubricant supply holder 54 Sponge 55 Lubricant supply pipe 56 Lubricant tank 60 Glass substrate 70, 71 Support plate 72 Inkjet unit 73 Discharge port 74 Sponge 80 Holder 81 Tube 82 Sponge P1 to P8 Point SIL1 to SIL6 Sliced scheduled line TL1 to TL6 Trench line AL Assist line CL1 to CL6 Crack line

Claims (4)

Clean the brittle material substrate along a line of a predetermined width including the scheduled scribe line.
By pressing the point of the scribing tool using diamond on the scheduled scribe line and moving the brittle material substrate and the scribing tool relatively , a trench line which is a groove due to plastic deformation is formed on the surface of the brittle material substrate. A method of scribing a brittle material substrate that scribs by causing cracks along the trench line . The method for scribing a brittle material substrate according to claim 1, which comprises a step of cleaning the points of the scribing tool after finishing the scribing. A scribe head unit that forms a trench line, which is a groove due to plastic deformation, on the surface of the brittle material substrate by pressing the points of the scribing tool against the brittle material substrate with a predetermined load and moving them relatively.
A scribing tool with one or more points using diamonds,
A tool holder for fixing the scribing tool and
A scribe head unit provided in front of the tool holder with a foreign matter removing means for removing foreign matter on a brittle material substrate along a scheduled scribe line. The foreign matter removing means
Foreign matter removal holder and
The scribe head unit according to claim 3 , further comprising a foreign matter removing member provided at the lower end of the foreign matter removing holder.

Images