JP6777551B2 - Connection switching device for measuring device - Google Patents

Description

The present invention corresponds to a method of measuring a selected measurement object and a measuring device via a measuring cable, which is arranged between a measuring cable connected to a plurality of measuring objects and the measuring device. It relates to a connection switching device for a measuring device connected in a connection form.

As this type of connection switching device, a connection switching unit (component provided in the substrate inspection device) disclosed as a background technique in the following Patent Document 1 proposed by the applicant of the present application is generally known. This connection switching unit is configured to include a plurality of switches, and includes a plurality of lead wirings connected to a plurality of measurement targets (plurality of inspection conductors), a measuring device (power supply (DC source or voltage source), ammeter). , A device including an ammeter and a processing unit).

This connection switching unit has four lead wires that are brought into contact with one measurement target selected from a plurality of measurement targets by individually turning on / off a plurality of built-in switches by the processing unit. Is connected to the measuring device in a connection form corresponding to the 4-terminal method (measurement method with the measuring device). As a result, the measuring device can measure the physical quantity (resistance value in this example) of this one measurement target by the four-terminal method.

Japanese Unexamined Patent Publication No. 2009-216616 (pages 2-4, FIG. 4)

However, the connection switching device for the above-mentioned measuring device has the following problems to be improved. That is, there are measuring devices that measure not only by the 4-terminal method such as the above-mentioned measuring device, but also by various measuring methods such as the 2-terminal method and the 4-terminal pairing method. Therefore, it is possible to connect measuring devices of different measuring methods, and the connected measuring devices can be set to the measurement target selected via the lead wiring (measurement cable) in a connection form corresponding to the measuring method of this measuring device. It is preferable that the configuration can be connected, but since the only measuring device that can be connected to the above-mentioned connection switching device is the measuring device that measures by the 4-terminal method, this connection switching device has a measuring method other than the 4-terminal method. There is a problem that it is not possible to connect and use the measuring device to be measured in.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a connection switching device for a measuring device that can be used by connecting a measuring device having a different measuring method and a measuring cable thereof.

In order to achieve the above object, the connection switching device for the measuring device according to claim 1 includes a terminal group for the first device to which the first measuring device for measuring the physical quantity to be measured by the first measuring method can be connected, and the measurement. The terminal group for the second device to which the second measuring device that measures the physical quantity of the target by the second measuring method different from the first measuring method can be connected and the shielded measuring cable connected to the measuring target can be connected. It is composed of a cable terminal group for a plurality of channels and a plurality of switches, and is arranged between the first device terminal group, the second device terminal group, and the cable terminal group, and is the first device. When one measurement method is selected from one measurement method and the second measurement method, and one channel is selected from the plurality of channels, the terminal group for the first device and the terminal for the second device are selected. The device terminal group corresponding to the selected measurement method in the group and each terminal corresponding to the selected one channel in the cable terminal group are included in the device terminal group. The on / off state of the plurality of switches can be switched to a connection form in which the ground terminal to be connected and the shield terminal to which the shield of the measurement cable of the cable terminal group is connected are connected. It is equipped with a scanner unit.

Further, the connection switching device for the measuring device according to claim 2 is the connection switching device for the measuring device according to claim 1, and the scanner unit has a two-terminal method as one of the selected measuring methods. When one end of the measurement target is grounded, the measurement target is not grounded via the measurement cable in the cable terminal group instead of the connection form in which the shield terminal is connected to the ground terminal. The on / off state of the plurality of switches can be switched in a connection form in which the shield terminal is connected to the terminal connected to the side terminal.

Further, the connection switching device for the measuring device according to claim 3 is the connection switching device for the measuring device according to claim 1 or 2, wherein the scanner unit is connected to and disconnected from the grounded chassis while having conductivity. In addition to being provided with a switch, the connection / disconnection switch and the plurality of switches are arranged in the chassis, and when the connection / disconnection switch is in the ON state, the shield terminal is connected to the chassis via the connection / disconnection switch. When the connection switch is off, the shield terminal is disconnected from the chassis.

In the connection switching device for the measuring device according to claim 1, the terminal group for the first device to which the first measuring device can be connected, the terminal group for the second device to which the second measuring device can be connected, and the measuring cable can be connected. To one of the device terminal group and the cable terminal group corresponding to the selected measurement method of the cable terminal group, the first device terminal group, and the second device terminal group. Each corresponding terminal is provided with a scanner unit that can be switched to a connection form in which the grounding terminal included in the device terminal group and the shield terminal of the cable terminal group are connected. ..

Therefore, according to the connection switching device for this measuring device, not only the measuring device of one measuring method and the measuring cable thereof, but also the measuring devices of a plurality of different types of measuring methods and the plurality of types of measuring cables corresponding to each Any one set can be selected and connected for use.

According to the connection switching device for the measuring device according to claim 2, the shield terminal is connected to the terminal in which the scanner unit is connected to the non-grounded side terminal to be measured via the measuring cable in the cable terminal group. Since it is possible to switch to the connection form, a measuring device with the current meter located on the non-grounded side is used, and the shield of the measuring cable is defined to be approximately the same potential as the potential of the current meter in this measuring device (that is,). , While maintaining a higher shielding effect), the current value of the current flowing through the measurement target whose one end is grounded and the voltage value of the voltage between both ends of the measurement target can be measured with high accuracy. Further, this makes it possible to measure the resistance value of the measurement target with higher accuracy.

According to the connection switching device for the measuring device according to claim 3, when the measuring cable is connected by the connection / disconnection switch, the shield terminal (and this shield terminal) to which the shield of the measuring cable in the cable terminal group is connected is connected. (Internal wiring in the connected chassis) can be grounded. As a result, according to this connection switching device, the shield terminal of the cable terminal group (and the inside connected to this shield terminal) is connected due to the connection of the shield of the measurement cable in the potentially indefinite state. It is possible to prevent the occurrence of a situation in which noise such as overvoltage or overcurrent occurs in the wiring), thereby protecting each switch constituting the scanner unit.

It is a block diagram of the connection switching device 1. It is a block diagram of the connection switching device 1 in the state which the measuring device MD1 of the two-terminal method and the measuring cable MC1 are connected. It is a block diagram of the connection switching device 1 in the state which the measuring device MD2 of a four-terminal method and the measuring cable MC2 are connected. It is a block diagram of the connection switching device 1 in the state which the measuring device MD3 of the 4-terminal pair method and the measuring cable MC3 are connected. FIG. 5 is a configuration diagram of a connection switching device 1 when measuring the resistance value of a measurement target 21 whose one end is grounded by connecting another two-terminal pair method measuring device MD4 and a measuring cable MC1.

Hereinafter, embodiments of a connection switching device for a measuring device will be described with reference to the accompanying drawings.

As shown in FIG. 1, the connection switching device 1 as an example of the connection switching device includes a chassis 2 and a connector group for a plurality of types of devices (in this example, the measuring device MD1 measuring by the two-terminal method as an example. Of the three types of measuring devices MD, the measuring device MD2 for measuring by the 4-terminal method and the measuring device MD3 for measuring by the 4-terminal pairing method, the connector group 5 for devices to which the corresponding measuring device MD1 can be connected, and the corresponding measuring device MD2 Three types of connector groups for devices: connector group 6 for devices that can be connected to, and connector group 7 for devices that can connect the corresponding measuring device MD3), and a shielded measuring cable (for measuring device MD1) that is connected to the measurement target. The connectors CN1 and CN2 of the measurement cable MC1 described later, the measurement cable MC2 described later for the measuring device MD2, and the measuring cable MC3 described later for the measuring device MD3; hereinafter also referred to as “measurement cable MC” unless otherwise specified). , CN3 (see FIGS. 2 to 4. Hereinafter, also referred to as “connector CN” unless otherwise specified), a cable connector 8 (one multi-pin connector as an example in this example), a scanner unit 9, and a connector. It includes a disconnect (connect / disconnect) switch 10.

In this example, as an example of the terminals (terminals for connection) constituting the terminal group for the device and the terminal group for the cable, a connector in which the terminals are housed in a housing made of synthetic resin will be described. The terminal for connection is not limited to the form of such a connector, and may be a form of tightening by sandwiching the core wires of the cable one by one with screws, or a form of a banana type plug.

The chassis 2 is formed in a rectangular parallelepiped box as an example by using a conductive material such as a metal material. Further, the chassis 2 is grounded via a grounding cable (not shown) connected to a grounding connection terminal (not shown), and is defined as a ground potential. In addition, in FIGS. 1 to 5, grounding is indicated by a reference numeral G.

As shown in FIG. 2, the device connector group 5 is for voltage detection for connecting a measuring device MD1 (a measuring device having a pair of detection terminals TP1 and TP2 and a guard terminal TPG) for measuring by the two-terminal method. 1st connector 5 _H (hereinafter, also referred to as connector 5 _H ), 2nd connector for voltage detection 5 _L (hereinafter, also referred to as connector 5 _L ) and guard connector 5 _G (grounding connector as a grounding terminal; hereinafter, is constituted by also referred) and the connector 5 _G.

Specifically, connection to connect the measuring device MD1 in switching device 1, as shown in FIG. 2, the detection terminals TP1 measuring apparatus MD1 to the connector 5 _H device connector group 5, also the connector 5 _L in through the respective detecting terminals TP2 measuring apparatus MD1 for example a coaxial cable connected, and the connector 5 _G connecting the guard terminal TPG measuring device MD1 via a single core cables. Further, the measuring device MD1 is configured to include a signal source SG, a voltmeter VM, and an ammeter IM connected as shown in FIG. Therefore, in the measuring device MD1, the pair of detection terminals TP1 and TP2 also function as signal output terminals. Therefore, the connector 5 _H, 5 _L of a pair of voltage detecting devices for connector group 5 also functions as a connector for signal input.

As shown in FIG. 3, the device connector group 6 is a measuring device MD2 (a pair of detection terminals TP1) that measures by a 4-terminal method (specifically, a shielded 4-terminal method (also referred to as a 5-terminal method)). A third connector 6 _AH for voltage detection (hereinafter, also referred to as a connector 6 _AH ) for connecting TP2, a pair of signal output terminals TP3, TP4, and a measuring device provided with a guard terminal TPG), a fourth voltage detection Connector 6 _AL (hereinafter, also referred to as connector 6 _AL ), signal output first connector 6 _BH (hereinafter, also referred to as connector 6 _BH ), signal output second connector 6 _BL (hereinafter, also referred to as connector 6 _BL ) and connector. It is composed of 5 _G. That is, the device connector group 6 has a configuration in which the connector 5 _G is shared with the device connector group 5.

Specifically, when the measuring device MD2 is connected to the connection switching device 1, as shown in FIG. 3, the detection terminal TP1 of the measuring device MD2 is connected to the connector 6 _AH of the device connector group 6, and the connector 6 is connected. The detection terminal TP2 of the measuring device MD2 is connected to the _AL , the signal output terminal TP3 of the measuring device MD2 is connected to the connector 6 _BH, and the signal output terminal TP4 of the measuring device MD2 is connected to the connector 6 _BL via, for example, a coaxial cable. connect and the connector 5 _G connecting the guard terminal TPG measuring apparatus MD2 via a single core cables. Further, the measuring device MD2 is configured to include a signal source SG, a voltmeter VM, and an ammeter IM connected as shown in FIG.

As shown in FIG. 4, the device connector group 7 includes a measuring device MD3 (a pair of detection terminals TP1 and TP2, a pair of signal output terminals TP3 and TP4, and a pair of current detection terminals) for measuring by a 4-terminal pair method. A pair of connectors 6 _AH , 6 _AL , a pair of connectors 6 _BH , 6 _BL , and a first connector 7 _H for current detection (hereinafter, connector 7) for connecting TP5, TP6, and a measuring device equipped with a guard terminal TPG). also referred to as _H), a second connector _{7 L} (hereinafter for current detection, also referred to as a connector _{7 L),} and is composed of a connector _{5 G.} That is, the device connector group 7 has a configuration in which the connector 5 _G is shared with the device connector groups 5 and 6, and the connectors 6 _AH , 6 _AL , 6 _BH , and 6 _BL are shared with the device connector group 6. ..

Specifically, when the measuring device MD3 is connected to the connection switching device 1, as shown in FIG. 4, the detection terminal TP1 of the measuring device MD3 is connected to the connector 6 _AH of the device connector group 6, and the connector 6 is connected. the detection terminal TP2 measuring apparatus MD3 to _AL, also measures the signal output terminal TP3 of the connector _{6 BH} to the measuring apparatus MD3, also a signal output terminal TP4 of the connector _{6 BL} to the measuring apparatus MD3, also in the connector _{7 H} a current detection terminal TP5 apparatus MD3, also the connector ₇ the current detecting terminal TP6 measuring apparatus MD3 is connected for example via a coaxial cable _L, and and the connector ₅ single guard terminal TPG measuring apparatus MD3 is the _G Connect via a core cable or the like. Further, the measuring device MD3 is configured to include a signal source SG, a voltmeter VM, and an ammeter IM connected as shown in FIG.

In the connection switching device 1 of this example, the connector 5 _H constituting the device connector group 5 for connecting the measuring device MD1 so that any one of the measuring devices MD2 and MD3 and the measuring device MD1 can be connected at the same time. , 5 _L is provided separately from the connectors 6 _AH and 6 _AL that form the device connector groups 6 and 7 for connecting the measuring devices MD2 and MD3, but the measuring devices MD1, MD2 and MD3 are used. When it is sufficient to connect only one of the pairs selected from the above, one pair of the connectors 5 _H and 5 _L and the switch SW1 described later, and one of the connectors 6 _AH and 6 _AL and the switch SW 2 described later It can also be configured to omit. In this configuration, the detection terminals TP1, TP2 of the respective measuring devices MD1, MD2, MD3 is connected to the connector left of the connectors ₅ H, _{5 L} and the connector _{6 AH, 6 AL.} Further, in the following, when the detection terminals TP1 and TP2, the signal output terminals TP3 and TP4, the current detection terminals TP5 and TP6 and the guard terminal TPG are not distinguished, they are also simply referred to as terminal TP.

In this connection switching device 1, the maximum number of terminals (6 of the measuring device MD3) excluding the guard terminal TPG among the terminal TPs of the measuring devices MD1 to MD3 connected to the connection switching device 1 is one measurement target. It is the number of wires for one channel connected to the measurement target in order to measure the physical quantity of. As a result, the cable connector 8 to which the measurement cable MC capable of connecting n measurement targets at the same time (that is, the measurement cable MC for n channels (CH1 to CHn) as shown in FIG. 1) can be connected is 6 ×. It is configured to have n terminals and one terminal (one shield terminal SH connected to the shield of the measurement cable MC). The cable connector 8 is composed of a D-sub connector, which is an example of a multi-pin connector.

Further, the cable connector 8 includes the measurement cable MC1 having the configuration shown in FIG. 2 for the measuring device MD1, the measuring cable MC2 having the configuration shown in FIG. 3 for the measuring device MD2, and the configuration shown in FIG. 4 for the measuring device MD3. One measurement cable MC selected from the measurement cables MC3 of the above is connected. In this case, the measurement cable MC1 is a measurement cable corresponding to the two-terminal method, and each channel CH1 of the cable connector 8 in one connector CN1 attached to the measurement cable MC1 and connected to the cable connector 8. CH2, · · ·, total 2 × n pieces connected to (pins (terminals) which can be connected to the connector via the scanner unit 9 as described later ₅ H, _{5 L)} 1 pin and second pin of CHn Wiring (2 x n wires) is applied to the pins, and one pin (terminal) connected to the shield terminal of the connector CN1 is shielded (for example, 2 x n wires constituting the measurement cable MC1). A shield conductor such as a copper braided wire that covers the periphery of the wiring) is connected and configured.

Further, the measurement cable MC2 is a measurement cable corresponding to the 4-terminal method, and each channel CH1 and CH2 of the cable connector 8 in one connector CN2 attached to the measurement cable MC2 and connected to the cable connector 8 , ..., Connected to pins 1 to 4 of CHn (pins (terminals) that can be connected to connectors 6 _AH , 6 _AL , 6 _BH , 6 _BL via the scanner unit 9 as described later). Wiring (4 x n wires) is applied to a total of 4 x n pins, and one pin (terminal) connected to the shield terminal of the connector CN2 is shielded (for example, the measurement cable MC2 is configured). Shielding conductors such as copper braided wires that cover the circumference of 2 × n wires) are connected and configured.

Further, the measurement cable MC3 is a measurement cable corresponding to the 4-terminal pair method, and each channel CH1 of the cable connector 8 in one connector CN3 attached to the measurement cable MC3 and connected to the cable connector 8. Pins 1 to 6 of CH2, ..., CHn (pins that can be connected to connectors 6 _AH , 6 _AL , 6 _BH , 6 _BL , 7 _H , 7 _L via the scanner unit 9 as described later. Wiring (6 x n wires) is applied to a total of 6 x n pins connected to (terminals)), and one pin (terminal) connected to the shield terminal of the connector CN3 is shielded (terminals). For example, a shield conductor such as a copper braided wire that covers the periphery of 6 × n wires constituting the measurement cable MC3) is connected and configured.

The scanner unit 9 is composed of a plurality of switches and is arranged between the connector groups 5, 6 and 7 for each device and the cable connector 8. Further, in the scanner unit 9, one measuring method is selected from a plurality of measuring methods (in this example, a 2-terminal method, a 4-terminal method and a 4-terminal pairing method) used in the measurement by the measuring devices MD1 to MD3. , And when one channel CH is selected from a plurality of channels CH1, CH2, ..., CHn (n. N is an integer of 2 or more), among the connector groups 5, 6 and 7 for each device. To be able to shift to a connection form in which the device connector group corresponding to one selected measurement method and each pin (terminal) of the cable connector 8 corresponding to one selected channel CH are connected. The on / off state of multiple switches is configured to be switchable. The scanner unit 9 in addition to this, in this connection form, the shield terminal which is shielded measuring cable MC is connected is included in each pin of the connector 5 _G and the cable connector 8 contained in the device connector group The on / off state of a plurality of switches can be switched so that the SH is connected to the SH.

Specifically, the scanner unit 9, as shown in FIG. 1, one of the contacts in the two switching circuits (upper contacts in the drawing) is connected to the connector 5 _H, 5 _L 2 pole single throw Switch SW1 and one contact (upper contact in the figure) of the two switch circuits are connected to connectors 6 _AH and 6 _AL . Two-pole single-throw switch SW2 and one of the two switch circuits. The contact (upper contact in the figure) is a 2-pole single-throw switch SW3 connected to the connectors 6 _BH and 6 _BL , and one contact (upper contact in the figure) in the two switch circuits is a connector. and a 7 _{H, 7} of two connected pole single throw the _L switch SW4.

Also, the scanner unit 9, as shown in FIG. 1, the other contact (same in the switch circuit connected to the connector 5 _H of the two switching circuits of the switch SW1 (left side of the switch circuit in the figure) The other contact (lower contact in the figure) in the switch circuit (left switch circuit in the figure) connected to connector 6 _AH of the two switch circuits of the switch SW2 and the lower contact in the figure. one detection line Lv1 contacts) are connected (one voltage detection line), and a switch circuit connected to the connector 5 _L of the two switching circuits of the switch SW1 (the right side of the switch circuit in the figure) other contact (lower contact in the drawing) and two switching circuits other contact in (right switch circuit in the drawing) which is connected to the connector 6 _AL of the switch circuit of the switch SW2 in (the The other detection line Lv2 (the other voltage detection line) to which the lower contact in the figure is connected is arranged.

Further, as shown in FIG. 1, the scanner unit 9 has the other contact (the same) in the switch circuit (the switch circuit on the left side in the figure) connected to the connector 6 _BH of the two switch circuits of the switch SW3. In the switch circuit (the switch circuit on the right side in the figure) connected to the connector 6 _BL of the two switch circuits of the signal output line Lo1 connected to the lower contact in the figure and the switch SW3. The other signal output line Lo2 connected to the other contact (lower contact in the figure) is arranged. Also, the scanner unit 9, the lower contacts in the two switch contacts (FIG connector 7 switching circuit connected to the _H in the other in the (left switch circuit in the figure) of the circuit of the switch SW4 one of the current detection line connected to) Li1, and in the two switches switching circuits (other contact (FIG on the right of the switch circuit) in the figure connected to the connector 7 _L of the circuit of the switch SW4 The other current detection line Li2 connected to the lower contact) is disposed.

Further, as shown in FIG. 1, the scanner unit 9 detects one contact (the right contact in the figure) in one of the two switch circuits (the upper switch circuit in the figure). It is connected to the line Lv1 and the other contact (the contact on the left side in the figure) is connected to the 1st pin in the corresponding channel CH of the cable connector 8 and the other switch circuit of the two switch circuits. One contact (the contact on the right side in the figure) in (the lower switch circuit in the figure) is connected to the detection line Lv2, and the other contact (the contact on the left side in the figure) is the cable connector 8. The two-pole single-throw type switch SWv connected to the second pin in the corresponding channel CH of the above is provided for the number of channels. Hereinafter, these switch SWvs in each channel CH1 to CHn will also be referred to as a voltage detection switch group.

Further, as shown in FIG. 1, in the scanner unit 9, one contact (the right contact in the figure) of one of the two switch circuits (the upper switch circuit in the figure) is a signal. It is connected to the output line Lo1 and the other contact (the contact on the left side in the figure) is connected to the 3rd pin in the corresponding channel CH of the cable connector 8 and the other switch of the two switch circuits. One contact (the right contact in the figure) in the circuit (lower switch circuit in the figure) is connected to the signal output line Lo2, and the other contact (the left contact in the figure) is for the cable. A 2-pole single-throw type switch SWo connected to the 4th pin in the corresponding channel CH of the connector 8 is provided for the number of channels. Hereinafter, these switches SWo in each channel CH1 to CHn will also be referred to as an output switch group.

Further, as shown in FIG. 1, in the scanner unit 9, one contact (the right contact in the figure) of one of the two switch circuits (the upper switch circuit in the figure) is a current. It is connected to the detection line Li1 and the other contact (the contact on the left side in the figure) is connected to the 5th pin in the corresponding channel CH of the cable connector 8 and the other switch of the two switch circuits. One contact (the right contact in the figure) in the circuit (lower switch circuit in the figure) is connected to the current detection line Li2, and the other contact (the left contact in the figure) is for a cable. A 2-pole single-throw type switch SWi connected to the 6th pin in the corresponding channel CH of the connector 8 is provided for the number of channels. Hereinafter, these switches SWi in each channel CH1 to CHn will also be referred to as a current detection switch group.

The scanner unit 9, as shown in FIG. 1, one contact (upper contacts in the drawing) is connected to the connector 5 _H, and the other contact (lower contact in the drawing) cable It is provided with a 1-pole single-throw type switch SWs1 connected to the shield terminal SH of the connector 8. The scanner unit 9, as shown in the figure, one of the contacts (upper contacts in the drawing) is connected to the connector 5 _G, and (lower contacts in the drawing) the other contact cable It is provided with a 1-pole single-throw type switch SWs2 connected to the shield terminal SH of the connector 8.

In the connection switching device 1 of this example, the switches SW1 to SW4, n switches SWv, n switches SWo, n switches SWi, and switches SWs1 and SWs2 constituting the scanner unit 9 are relays, for example. It is composed of semiconductor switch elements such as transistors (bipolar transistor and electric field effect transistor), and its on / off switching control (switching control between connection state and disconnection state) is arranged separately from the connection switching device 1. It is configured to be executed independently based on individual control signals Sco output from a control device 11 such as an installed computer.

As shown in FIG. 1, the connection / disconnection switch 10 has one contact (the contact on the right side in the figure) connected to the chassis 2 (that is, connected to the ground G) and the other contact (the contact in the figure). The contact on the left side) is composed of a one-pole single-throw type switch connected to the shield terminal SH of the cable connector 8. In the connection switching device 1 of this example, the connection / disconnection switch 10 is composed of a manual switch arranged on the surface of the chassis 2 as an example.

Next, the operation of the connection switching device 1 will be described with reference to the drawings. In the following, the measuring device MD1 and the measuring cable MC1 are connected to the connection switching device 1 to measure the physical quantity of the measurement target 21 (in this example, the resistance value of the resistor as an example. The same applies to each of the following embodiments). An embodiment of measuring by the two-terminal method, an embodiment of connecting the measuring device MD2 and the measuring cable MC2 to the connection switching device 1, and measuring the physical quantity (resistance value) of the measurement target 21 by the four-terminal method. The measurement device MD3 and the measurement cable MC3 are connected to the connection switching device 1, and the physical quantity (resistance value) of the measurement target 21 is divided into a 4-terminal pair method and a connection in each embodiment. The operation of the switching device 1 will be described.

First, the operation of the connection switching device 1 when the physical quantity (resistance value) of the measurement target 21 is measured by the two-terminal method will be described with reference to FIG. In this case, as a pre-processing of the measurement, the measurer first executes an operation on the connection / disconnection switch 10 to shift to the on state. As a result, the shield terminal SH of the cable connector 8 (the terminal to which the shield of the measurement cable MC1 is connected when the measurement cable MC1 is connected to the connection switching device 1) and the inside of the chassis 2 connected to the shield terminal SH. Internal wiring is connected to chassis 2 (that is, grounded).

Further, measuring person, as pretreatment of the measurement, then, as shown in FIG. 2, the detection terminals TP1 to the connector 5 _H equipment connector unit 5 of the measurement device MD1, also detection terminal of the measurement device MD1 The TP2 is connected to the connector 5 _L via a coaxial cable, and the guard terminal TPG of the measuring device MD1 is connected to the connector 5 _G via a single core cable. Further, the connector CN1 of the measurement cable MC1 is connected to the cable connector 8, and the channel CH to be used among the channel CHs of the measurement cable MC1 is connected (in this example, all the channels CH1 to CHn are connected as shown in the figure). ) Connect the measurement target 21. Further, the control device 11 can acquire the voltage data Dv indicating the voltage value of the voltage between both ends of the measurement target 21 measured by the measurement device MD1 and the current data Di indicating the current value of the current flowing through the measurement target 21. The measuring device MD1 is connected to the control device 11.

When the connector CN1 is connected to the cable connector 8, it is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH due to the fact that the shield of the measurement cable MC1 in an indefinite state is connected. Noise such as overvoltage or overcurrent may occur in the internal wiring inside the chassis 2, but as described above, the shield terminal SH of the cable connector 8 is grounded, so this is the case. It is possible to prevent the generation of noise in advance, and it is also possible to protect each switch constituting the scanner unit 9.

Further, after the connection of the measuring device MD1 and the measuring cable MC1 to the connection switching device 1 is completed in this way, the measurer executes an operation on the connection / disconnection switch 10 as the final preprocessing of the measurement to turn it off. Move to the state. As a result, the shield terminal SH and the like of the cable connector 8 are separated from the chassis 2, and the grounding is released.

Next, the measurer executes an operation on the control device 11 (an operation on an input unit (not shown) such as a keyboard or an operation panel provided on the control device 11) and is connected to each channel CH of the measurement cable MC1. An instruction to measure the resistance values of n measurement targets 21 by the two-terminal method is input to the control device 11.

As a result, as shown in FIG. 2, the control device 11 first shifts only the switch SW1 to the on state for the switches SW1 to SW4, and turns only the switch SWs2 into the on state for the switches SWs1 and SWs2. The control signal Sco (a signal for selecting the two-terminal method as the measurement method) for shifting is output to the connection switching device 1. As a result, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD1 to one detection line Lv1, connects the detection terminal TP2 to the other detection line Lv2, and connects the guard terminal TPG to the internal wiring (shield). (Wiring connected to the terminal SH) and the shield terminal SH of the cable connector 8 are connected to the shield of the measurement cable MC1.

Next, the control device 11 turns on the switches SWv connected to the 1st pin and the 2nd pin of each channel CH1 to CHn of the cable connector 8 in order from the channel CH1 side for a predetermined time, for example. The control signal Sco (signal for selecting the channel CH) for transition is output to the connection switching device 1. As a result, the connection switching device 1 connects the n measurement targets 21 one by one to the pair of detection lines Lv1 and Lv2 via the switch SWv for a predetermined time in order (that is, the pair of measurement targets 21 via the switch SW1). (Connected to the detection terminals TP1 and TP2 of the measuring device MD1 connected to the detection lines Lv1 and Lv2).

The measuring device MD1 supplies a measurement signal from the signal source SG to each measurement target 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measurement target 21 at the time of supplying this signal. Is measured with a voltmeter VM, voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measurement target 21 when this signal is supplied is measured with an ammeter IM and this current value. The current data Di indicating the above is output to the control device 11. The control device 11 is one measurement target that is actually connected to the measurement device MD1 via the connection switching device 1 of the n measurement targets 21 that are connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and the current data Di for 21 are acquired, the resistance value for the one connected measurement target 21 is calculated based on the acquired data Dv and Di, and the one measurement target 21 is calculated. Memorize in correspondence with.

When the control device 11 measures and stores all the resistance values of the n measurement targets 21, all the switches constituting the scanner unit 9 (the above switches SW1 to SW4, n switches SWv, n). The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1 and SWs2) to the off state is output to the connection switching device 1. As a result, the measurement process of the resistance values of the n measurement targets 21 by the two-terminal method is completed. After that, when the measurer continues to measure the resistance value of the new n measurement targets 21 by the two-terminal method, the measurer replaces the measured n measurement targets 21 with the new n measurement targets 21. Connect to the measurement cable MC1 and repeat the above process. On the other hand, when the measurer finishes the measurement by the two-terminal method, the measurer removes the measurement cable MC1 and the measurement device MD1 from the connection switching device 1.

Next, the operation of the connection switching device 1 when the physical quantity (resistance value) of the measurement target 21 is measured by the four-terminal method will be described with reference to FIG. In this case, as a pre-processing of the measurement, the measurer first executes an operation on the connection / disconnection switch 10 to shift to the on state. As a result, the shield terminal SH of the cable connector 8 (the terminal to which the shield of the measurement cable MC2 is connected when the measurement cable MC2 is connected to the connection switching device 1) and the inside of the chassis 2 connected to the shield terminal SH. Internal wiring is connected to chassis 2 (that is, grounded).

Further, as a pretreatment for measurement, the measurer then, as shown in FIG. 3, attaches the detection terminal TP1 of the measuring device MD2 to the connector 6 _AH of the device connector group 6 and the detection terminal of the measuring device MD2. The TP2 is connected to the connector 6 _AL , the signal output terminal TP3 of the measuring device MD2 is connected to the connector 6 _BH of the device connector group 6, and the signal output terminal TP4 of the measuring device MD2 is connected to the connector 6 _BL via a coaxial cable. connect, and a guard terminal TPG measuring apparatus MD2 connected via a Tanshin cable to the connector 5 _G. Further, the connector CN2 of the measurement cable MC2 is connected to the cable connector 8 and is connected to the channel CH to be used among the channel CHs of the measurement cable MC2 (in this example, all the channels CH1 to CHn are connected as shown in the figure). ) Connect the measurement target 21. Further, the measuring device MD2 is connected to the control device 11 so that the voltage data Dv and the current data Di of the measurement target 21 measured by the measuring device MD2 can be acquired by the control device 11.

When connecting the connector CN2 to the cable connector 8, it is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH in the same manner as when connecting the connector CN1 to the cable connector 8 described above. Noise may occur in the internal wiring inside the chassis 2, but since the shield terminal SH and the like of the cable connector 8 are grounded, it is possible to prevent this noise from occurring, and the scanner It is also possible to protect each switch constituting the unit 9.

Further, after the connection of the measuring device MD2 and the measuring cable MC2 to the connection switching device 1 is completed in this way, the measurer executes an operation on the connection / disconnection switch 10 as the final preprocessing of the measurement to turn it off. Move to the state. As a result, the grounding of the shield terminal SH or the like of the cable connector 8 is released.

Next, the measurer executes an operation on the control device 11 and inputs to the control device 11 an instruction to measure the resistance values of n measurement targets 21 connected to each channel CH of the measurement cable MC2 by the four-terminal method. To do.

As a result, as shown in FIG. 3, the control device 11 first shifts only the switches SW2 and SW3 to the ON state for the switches SW1 to SW4, and turns on only the switches SWs2 for the switches SWs1 and SWs2. A control signal Sco (a signal for selecting the 4-terminal method as the measurement method) for shifting to the state is output to the connection switching device 1. As a result, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD2 to one detection line Lv1, connects the detection terminal TP2 to the other detection line Lv2, and connects the signal output terminal TP3 to one signal. Connect to the output line Lo1, connect the signal output terminal TP4 to the other signal output line Lo2, and connect the guard terminal TPG to the internal wiring (wiring connected to the shield terminal SH) and the shield terminal SH of the cable connector 8. Connect to the shield of the measurement cable MC2 via.

Next, the control device 11 sets the switch SWv connected to the 1st and 2nd pins and the switch SWo connected to the 3rd and 4th pins in each channel CH1 to CHn of the cable connector 8. For example, a control signal Sco (a signal for selecting a channel CH) for sequentially shifting to the ON state for a predetermined time one set at a time from the channel CH1 side is output to the connection switching device 1. As a result, the connection switching device 1 connects the n measurement targets 21 one by one to the pair of detection lines Lv1 and Lv2 via the switch SWv for a predetermined time in order (that is, the pair via the switch SW2). (Connected to the detection terminals TP1 and TP2 of the measuring device MD2 connected to the detection lines Lv1 and Lv2), and connected to the pair of signal output lines Lo1 and Lo2 via the switch SWo (that is, via the switch SW3). Connected to the signal output terminals TP3 and TP4 of the measuring device MD2 connected to the pair of signal output lines Lo1 and Lo2 of the lever).

The measuring device MD2 supplies a measurement signal from the signal source SG to each measurement target 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measurement target 21 at the time of supplying this signal. Is measured with a voltmeter VM, voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measurement target 21 when this signal is supplied is measured with an ammeter IM and this current value. The current data Di indicating the above is output to the control device 11. The control device 11 is one measurement target that is actually connected to the measurement device MD2 via the connection switching device 1 of the n measurement targets 21 connected to each channel CH1 to CHn of the cable connector 8. Each time the voltage data Dv and the current data Di for 21 are acquired, the resistance value for the one connected measurement target 21 is calculated based on the acquired data Dv and Di, and the one measurement target 21 is calculated. Memorize in correspondence with.

When the control device 11 measures and stores all the resistance values of the n measurement targets 21, all the switches constituting the scanner unit 9 (the above switches SW1 to SW4, n switches SWv, n). The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1 and SWs2) to the off state is output to the connection switching device 1. As a result, the measurement process of the resistance values of n measurement targets 21 by the four-terminal method is completed. After that, when the measurer continues to measure the resistance value of the new n measurement targets 21 by the 4-terminal method, the measurer replaces the measured n measurement targets 21 with the new n measurement targets 21. Connect to the measurement cable MC2 and repeat the above process. On the other hand, when the measurer finishes the measurement by the four-terminal method, the measurement cable MC2 and the measurement device MD2 are removed from the connection switching device 1.

Next, with reference to FIG. 4, the operation of the connection switching device 1 when the physical quantity (resistance value) of the measurement target 21 is measured by the 4-terminal pair method will be described. In this case, as a pre-processing of the measurement, the measurer first executes an operation on the connection / disconnection switch 10 to shift to the on state.
As a result, the shield terminal SH of the cable connector 8 (the terminal to which the shield of the measurement cable MC3 is connected when the measurement cable MC3 is connected to the connection switching device 1) and the inside of the chassis 2 connected to the shield terminal SH. Internal wiring is connected to chassis 2 (that is, grounded).

Further, as a pretreatment for the measurement, the measurer then, as shown in FIG. 4, attaches the detection terminal TP1 of the measuring device MD3 to the connector 6 _AH of the device connector group 7 and the detection terminal of the measuring device MD3. The TP2 is connected to the connector 6 _AL of the device connector group 7, the signal output terminal TP3 of the measuring device MD3 is connected to the connector 6 _BH of the device connector group 7, and the signal output terminal TP4 of the measuring device MD3 is connected to the device connector group. Connect the current detection terminal TP5 of the measuring device MD3 to the connector 7 _H of the device connector group 7 to the connector 6 _BL of 7, and the current detection terminal TP6 of the measuring device MD3 to the connector 7 _L of the device connector group 7. each connected via a coaxial cable, and a guard terminal TPG measuring apparatus MD3 is connected via a Tanshin cable to the connector 5 _G. Further, the connector CN3 of the measurement cable MC3 is connected to the cable connector 8. Further, the measurement target 21 is connected to the channel CH to be used among the channel CHs of the measurement cable MC3 (in this example, all the channels CH1 to CHn as shown in the figure), and a return path is formed. The conductor 22 is connected. Further, the measuring device MD3 is connected to the control device 11 so that the voltage data Dv and the current data Di of the measurement target 21 measured by the measuring device MD3 can be acquired by the control device 11.

When connecting the connector CN3 to the cable connector 8, the connector CN1 is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH in the same manner as when the connector CN1 is connected to the cable connector 8. Noise may be generated in the internal wiring inside the chassis 2, but since the shield terminal SH and the like of the cable connector 8 are grounded, it is possible to prevent the generation of this noise, and the scanner. It is also possible to protect each switch constituting the unit 9.

Further, after the connection of the measuring device MD3 and the measuring cable MC3 to the connection switching device 1 is completed in this way, the measurer executes an operation on the connection / disconnection switch 10 as the final preprocessing of the measurement to turn it off. Move to the state. As a result, the grounding of the shield terminal SH or the like of the cable connector 8 is released.

Next, the measurer executes an operation on the control device 11 and gives an instruction to the control device 11 to measure the resistance values of n measurement targets 21 connected to each channel CH of the measurement cable MC3 by the 4-terminal pair method. input.

As a result, as shown in FIG. 4, the control device 11 first shifts only the switches SW2, SW3, and SW4 to the ON state for the switches SW1 to SW4, and only the switches SWs2 for the switches SWs1 and SWs2. Is output to the connection switching device 1 as a control signal Sco (a signal for selecting the 4-terminal pair method as a measurement method) for shifting to the on state. As a result, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD3 to one detection line Lv1, connects the detection terminal TP2 to the other detection line Lv2, and connects the signal output terminal TP3 to one signal. Connect to the output line Lo1, connect the signal output terminal TP4 to the other signal output line Lo2, connect the current detection terminal TP5 to one current detection line Li1, and connect the current detection terminal TP6 to the other current detection line. It is connected to Li2, and the guard terminal TPG is connected to the shield of the measurement cable MC2 via the internal wiring (wiring connected to the shield terminal SH) and the shield terminal SH of the cable connector 8.

Next, the control device 11 has a switch SWv connected to pins 1 and 2 of each channel CH1 to CHn of the cable connector 8, a switch SWo connected to pins 3 and 4, and a pin 5. And the control signal Sco (signal for selecting the channel CH) for shifting the set of switches SWi connected to the 6th pin to the ON state for a predetermined time in order from the channel CH1 side one by one is connected. Output to the switching device 1. As a result, the connection switching device 1 connects the n measurement targets 21 one by one to the pair of detection lines Lv1 and Lv2 via the switch SWv for a predetermined time in order (that is, the pair via the switch SW2). (Connected to the detection terminals TP1 and TP2 of the measuring device MD3 connected to the detection lines Lv1 and Lv2), and connected to the pair of signal output lines Lo1 and Lo2 via the switch SWo (that is, via the switch SW3). It is connected to the signal output terminals TP3 and TP4 of the measuring device MD3 connected to the pair of signal output lines Lo1 and Lo2, and is connected to the pair of current detection lines Li1 and Li2 via the switch SWi (that is,). It is connected to the current detection terminals TP5 and TP6 of the measuring device MD3 connected to the pair of current detection lines Li1 and Li2 via the switch SW4).

The measuring device MD3 supplies a measurement signal from the signal source SG to each measurement target 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measurement target 21 at the time of supplying this signal. Is measured with a voltmeter VM, voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measurement target 21 when this signal is supplied is measured with an ammeter IM and this current value. The current data Di indicating the above is output to the control device 11. The control device 11 is one measurement target that is actually connected to the measurement device MD3 via the connection switching device 1 of the n measurement targets 21 that are connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and the current data Di for 21 are acquired, the resistance value for the one connected measurement target 21 is calculated based on the acquired data Dv and Di, and the one measurement target 21 is calculated. Memorize in correspondence with.

When the control device 11 measures and stores all the resistance values of the n measurement targets 21, all the switches constituting the scanner unit 9 (the above switches SW1 to SW4, n switches SWv, n). The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1 and SWs2) to the off state is output to the connection switching device 1. As a result, the measurement process of the resistance values of the n measurement targets 21 by the 4-terminal pair method is completed. After that, when the measurer continues to measure the resistance value of the new n measurement targets 21 by the 4-terminal pair method, the measurer replaces the measured n measurement targets 21 with the new n measurement targets 21. Is connected to the measurement cable MC3, and the above process is repeated. On the other hand, the measurer removes the measurement cable MC3 and the measurement device MD3 from the connection switching device 1 when the measurement by the 4-terminal pair method is completed.

As described above, in this connection switching device 1, the physical quantity (resistance value in this example) of the measurement target 21 is measured by any one of the first measurement method (in this example, the 2-terminal method, the 4-terminal method, and the 4-terminal pairing method). Of the first device connector group (device connector groups 5 to 7) to which the first measuring device (measuring device measured by the first measuring method among the measuring devices MD1 to MD3) to be measured by (1) can be connected. A second measurement method (in this example, the two-terminal method) in which the physical quantity (resistance value in this example) of the measurement target 21 and the connector group to which the measuring device to be measured by the first measurement method is connected is different from the first measurement method. The second measuring device (the second measuring method of the measuring devices MD1 to MD3) for measuring with the four-terminal method and one of the remaining two methods excluding any one of the above four-terminal pairing methods. The second device connector group to which the measuring device to be measured) can be connected (the connector group to which the measuring device to be measured by the second measuring method among the device connector groups 5 to 7 is connected) and the physical quantity of the measurement target 21 (the measuring device) The third measurement method (in this example, the first measurement method and the second of the two-terminal method, the four-terminal method, and the four-terminal pairing method) in which the resistance value is different from the first measurement method and the second measurement method. A third device connector group (device) to which a third measuring device (measuring device measuring by the third measuring method among the measuring devices MD1 to MD3) to be measured by a third measuring device (one other than the measuring method corresponding to the measuring method) can be connected. The connector group (connector group to which the measuring device to be measured by the third measuring method among the connector groups 5 to 7) and the measuring cables MC1 to MC3 (shielded measuring cable) connected to the measurement target 21 can be connected. One measurement method is selected from the first to third measurement methods by the cable connector 8 for a plurality of channels (channel CH1 to CHn) and the control signal Sco, and one channel from the n channel CHs. When the CH is selected, the device connector group (one of the device connector groups 5 to 7) corresponding to the selected measurement method and the cable connector 8 corresponding to the selected channel CH. 1 and each terminal, a selected one of the measurement cable (measurement cable MC1~MC3 included in each terminal of the guard connector included in the device connector group (grounding connector) 5 _G and the cable connector 8 It is provided with a scanner unit 9 that can switch to a connection form in which a shield terminal SH to which a shield of a measurement cable corresponding to one measurement method is connected is connected.

Therefore, according to this connection switching device 1, not only the measuring device of one measuring method and the measuring cable thereof, but also the measuring device of a plurality of different types of measuring methods (in this example, as an example, the measuring device MD1 of the two-terminal method, Four-terminal method measuring device MD2 and four-terminal paired measuring device MD3 (measurement devices of three different types of measurement methods) and multiple types of measurement cables corresponding to each (in this example, three types of measurement cables MC1 to MC3). Any one set can be selected from the above and connected for use.

In the connection switching device 1, as described above, a set of the 2-terminal method measuring device MD1 and the corresponding measuring cable MC1, a set of the 4-terminal method measuring device MD2 and the corresponding measuring cable MC2, and a 4-terminal It is configured so that one set selected from three sets of the paired measuring device MD3 and the corresponding measuring cable MC3 can be connected, but the two-terminal method measuring device MD1 and its corresponding One set selected from the two sets of the measuring cable MC1 and the measuring device MD2 of the 4-terminal method and the corresponding measuring cable MC2 may be connected. One set selected from two sets of the terminal method measuring device MD1 and the corresponding measuring cable MC1 and the 4-terminal paired measuring device MD3 and the corresponding measuring cable MC3 can be connected. From two sets of a 4-terminal method measuring device MD2 and a corresponding measuring cable MC2 and a 4-terminal paired measuring device MD3 and a corresponding measuring cable MC3. It may be configured so that one selected pair can be connected.

Some of the measuring devices adopting the two-terminal method have an ammeter IM arranged on the ground side like the measuring device MD1 shown in FIG. 2, and some measuring devices MD4 shown in FIG. 5 have an ammeter IM. As described above, there is also a configuration in which the ammeter IM is arranged on the non-grounded side (as shown in the figure, a measuring device for measuring the resistance value of the measurement target 21 whose one end is grounded). In the connection switching device 1 of this example, the measuring device MD4 can also be connected and used. Hereinafter, the operation of the connection switching device 1 when the measuring device MD4 is connected and used will be described with reference to FIG.

First, as a pre-processing for measurement, the measurer first executes an operation on the connection / disconnection switch 10 to shift to the on state. As a result, the shield terminal SH of the cable connector 8 connected to the shield of the measurement cable MC1 by connecting the measurement cable MC1 (measurement cable for the two-terminal method) to the connection switching device 1 and the shield terminal SH are connected to the shield terminal SH. The internal wiring in the chassis 2 is connected to the chassis 2 (that is, grounded).

Further, measuring person, as pretreatment of the measurement, then, as shown in FIG. 5, a detection terminal TP1 to the connector 5 _H equipment connector unit 5 of the measuring apparatus MD4, also detection terminal of the measurement device MD1 The TP2 is connected to the connector 5 _L via a coaxial cable. Further, the connector CN1 of the measurement cable MC1 is connected to the cable connector 8, and the channel CH to be used among the channel CHs of the measurement cable MC1 is connected (in this example, all the channels CH1 to CHn are connected as shown in the figure). ) Connect the measurement target 21. In this case, the non-grounded side terminal (upper terminal in the figure in this example) of the pair of terminals of each measurement target 21 is connected to the detection line Lv1 and the grounded side terminal (in this example, in the same figure). Each measurement target 21 is connected to each channel CH of the measurement cable MC1 so that the lower terminal) is connected to the detection line Lv2. Further, the measuring device MD4 is connected to the control device 11 so that the voltage data Dv and the current data Di of the measurement target 21 measured by the measuring device MD4 can be acquired by the control device 11.

When the connector CN1 is connected to the cable connector 8, it is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH due to the fact that the shield of the measurement cable MC1 in an indefinite state is connected. Noise such as overvoltage and overcurrent may occur in the internal wiring inside the chassis 2, but as described above, the shield terminal SH and the like of the cable connector 8 are grounded. It is possible to prevent the generation of noise in advance, and it is also possible to protect each switch constituting the scanner unit 9.

Further, after the connection of the measuring device MD4 and the measuring cable MC1 to the connection switching device 1 is completed in this way, the measurer executes an operation on the connection / disconnection switch 10 as the final preprocessing of the measurement to turn it off. Move to the state. As a result, the grounding of the shield terminal SH or the like of the cable connector 8 is released.

Next, the measurer executes an operation on the control device 11 (an operation on an input unit (not shown) such as a keyboard or an operation panel provided on the control device 11) and is connected to each channel CH of the measurement cable MC1. An instruction to measure the resistance values of n measurement targets 21 by the two-terminal method is input to the control device 11 under the condition that one terminal of the measurement target 21 is grounded.

As a result, as shown in FIG. 5, the control device 11 first shifts only the switch SW1 to the on state for the switches SW1 to SW4, and turns only the switch SWs1 into the on state for the switches SWs1 and SWs2. A control signal Sco (a signal for selecting a measurement method of measuring the grounded measurement target 21 by the two-terminal method) for shifting is output to the connection switching device 1. As a result, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD4 to one detection line Lv1 and the detection terminal TP2 to the other detection line Lv2. Further, the connection switching device 1 further connects the detection terminal TP1 of the measuring device MD4 to the shield of the measuring cable MC1 via the shield terminal SH of the cable connector 8.

Next, the control device 11 turns on the switches SWv connected to the 1st pin and the 2nd pin of each channel CH1 to CHn of the cable connector 8 in order from the channel CH1 side for a predetermined time, for example. The control signal Sco (signal for selecting the channel CH) for transition is output to the connection switching device 1. As a result, the connection switching device 1 connects the n measurement targets 21 one by one to the pair of detection lines Lv1 and Lv2 via the switch SWv for a predetermined time in order (that is, the pair of measurement targets 21 via the switch SW1). (Connected to the detection terminals TP1 and TP2 of the measuring device MD4 connected to the detection lines Lv1 and Lv2).

The measuring device MD4 supplies a measurement signal from the signal source SG to each measurement target 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measurement target 21 at the time of supplying this signal. Is measured by a voltmeter VM, voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measurement target 21 when this signal is supplied is measured by the current meter IM and this current value. The current data Di indicating the above is output to the control device 11. In this case, in the measuring device MD4 in which the ammeter IM is arranged on the non-grounded side, the shield of the measuring cable MC1 is defined to be substantially the same as the potential of the ammeter IM in the measuring device MD4, so that the shield is higher. It is possible to measure the voltage value of the voltage between both ends of the measurement target 21 and the current value of the current flowing through the measurement target 21 while maintaining the effect.

The control device 11 is one measurement target that is actually connected to the measurement device MD1 via the connection switching device 1 of the n measurement targets 21 that are connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and the current data Di for 21 are acquired, the resistance value for the one connected measurement target 21 is calculated based on the acquired data Dv and Di, and the one measurement target 21 is calculated. Memorize in correspondence with.

When the control device 11 measures and stores all the resistance values of the n measurement targets 21, all the switches constituting the scanner unit 9 (the above switches SW1 to SW4, n switches SWv, n). The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1 and SWs2) to the off state is output to the connection switching device 1. As a result, the measurement process of the resistance values of the n measurement targets 21 by the two-terminal method is completed.

As described above, in the connection switching device 1, when the selected measurement method is the two-terminal method, the scanner unit 9 is in the case of the measurement by the two-terminal method using the measuring device MD1 shown in FIG. 2 described above. topology (i.e., topology shield terminal SH is connected to the guard connector 5 _G) in place of the measurement target 21 via a measuring cable MC1 of the terminals of the cable connector 8 as shown in FIG. 5 Multiple switches (switches SW1 to SW4, n switches SWv, n) have a connection form in which the shield terminal SH is connected to the terminal connected to the non-grounded terminal (pin 1 of each channel CH in FIG. 5). The switch SWo, n switches SWi, and switches SWs1 and SWs2) can be switched on and off.

Therefore, according to the connection switching device 1, the measuring device MD4 defines the shield of the measuring cable MC1 to be substantially the same as the potential of the current meter IM in the measuring device MD4 (that is, a state in which a higher shielding effect is maintained). ), The current value of the current flowing through the measurement target 21 whose one end is grounded can be measured with high accuracy together with the voltage value of the voltage between both ends of the measurement target 21, and as a result, the measurement target 21 in the control device 11 It is possible to measure the resistance value of the above with higher accuracy.

Further, in the connection switching device 1, the scanner unit 9 includes a grounded chassis 2 (that is, defined by the ground potential) and a connection / disconnection switch 10, and when the connection / disconnection switch 10 is in the ON state, the connection / disconnection switch 10 is provided. The shield terminal SH is connected to the chassis 2 via the disconnect switch 10, while the shield terminal SH is disconnected from the chassis 2 when the disconnect switch 10 is in the off state.

Therefore, according to the connection switching device 1, when connecting various measurement cables MC1 to MC3, they are connected to the shield terminal SH of the cable connector 8 to which the shields of these measurement cables MC1 to MC3 are connected and the shield terminal SH. The internal wiring in the chassis 2 can be grounded via the connection / disconnection switch 10. As a result, according to the connection switching device 1, the shields of the measurement cables MC1 to MC3 in an indefinite potential state are connected to the shield terminal SH of the cable connector 8 and the shield terminal SH. It is possible to prevent the occurrence of noise such as overvoltage and overcurrent in the internal wiring in the connected chassis 2, and thereby protect each switch constituting the scanner unit 9. it can.

Further, in the connection switching device 1, the pair of connectors 5 _H and 5 _L are connected to the pair of detection lines Lv1 and Lv2 via the switch SW1 and the pair of connectors 6 _AH and 6 _AL are connected to the pair of detection lines Lv1 and Lv2 via the switch SW2, respectively. It has a configuration to be used. Therefore, according to this connection switching device 1, as shown by the broken line in FIG. 2, the 4-terminal method measuring device MD2 and the 4-terminal paired measuring device MD3 are connected at the same time as the 2-terminal method measuring device MD1. It can also be used. As a result, according to the connection switching device 1, the measurement cable MC2 is used when the measuring device MD2 is connected at the same time as the measuring device MD1, while the measuring device MD3 is connected at the same time as the measuring device MD1. By using the cable MC3, the physical quantity (resistance value) of the measurement target 21 connected to each channel CH can be switched between the 2-terminal method and the 4-terminal method (or 4-terminal pair method) for each measurement target 21. Can be measured.

Further, although the example of measuring the resistance value as the physical quantity of the measurement target 21 has been described, the physical quantity is not limited to the resistance value and may be, for example, impedance, capacitance and inductance. Further, although the example in which the switches SW1, SW2, SW3, SW4, SWv, SWo, and SWi are configured by one 2-pole single-throw type switch has been described, the switch should be configured by two 1-pole single-throw type switches. You can also.

1 Connection switching device 2 Chassis 5, 6, 7 Device connector group 8 Cable connector 9 Scanner part MC1, MC2, MC3 Measurement cable MD1, MD2, MD3, MD4 Measuring device SH shield terminal SW1 to SW4, SWv, SWo, SWi , SWs1, SWs2 switch

Claims (3)

A group of terminals for the first device to which the first measuring device for measuring the physical quantity to be measured by the first measuring method can be connected, and
A second device terminal group to which a second measuring device that measures the physical quantity of the measurement target by a second measuring method different from the first measuring method can be connected, and
Cable terminals for multiple channels to which a shielded measurement cable connected to the measurement target can be connected, and
The first measuring method and the second measuring method are composed of a plurality of switches and are arranged between the terminal group for the first device, the terminal group for the second device, and the terminal group for the cable. When one measurement method is selected from the above and one channel is selected from the plurality of channels, the selected one of the terminal group for the first device and the terminal group for the second device is selected. The device terminal group corresponding to the measurement method and each terminal corresponding to the selected one channel in the cable terminal group are the grounding terminal included in the device terminal group and the cable terminal group. For a measuring device including a scanner unit capable of switching on / off states of the plurality of switches in a connection form connected in a state where the shield terminal of the measuring cable is connected to the shield terminal of the measuring cable. Connection switching device. When one of the selected measurement methods is the two-terminal method and one end of the measurement target is grounded, the scanner unit replaces the connection form in which the shield terminal is connected to the ground terminal. The on / off state of the plurality of switches can be switched to a connection form in which the shield terminal is connected to the terminal connected to the non-grounded side terminal to be measured via the measurement cable in the cable terminal group. The connection switching device for the measuring device according to claim 1, which is configured in the above. The scanner unit includes a conductive and grounded chassis and a connection / disconnection switch, and the connection / disconnection switch and the plurality of switches are arranged in the chassis, and the connection / disconnection switch is in the ON state. The connection switching device for a measuring device according to claim 1 or 2, wherein the shield terminal is sometimes connected to the chassis via the connection switch, and the shield terminal is disconnected from the chassis when the connection switch is off. ..

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