JP6782001B2 - Electrical inspection equipment - Google Patents

Description

The present invention relates to an electrical inspection device.

At a printed circuit board manufacturing site, an electrical inspection head having multiple probes (electrical contacts) is pressed against the printed circuit board, and the probes are brought into contact with the measurement points of the printed circuit board to inspect the electrical characteristics of the printed circuit board. The device is in use. In a conventional electrical inspection device, if the printed circuit board to be inspected has a warp or undulation, the printed circuit board may be misaligned when the electrical inspection head is pressed against the printed circuit board.

Therefore, for example, Japanese Patent Application Laid-Open No. 2010-237061 proposes an electrical inspection apparatus using a tray (plate-like body) having a plurality of through holes for guiding a probe and being pressure-welded to a part of a region of a substrate. .. The publication describes that by pressing a part of a region of a substrate, the displacement of the substrate can be suppressed as compared with the case where the entire substrate is pressed.

In recent years, the wiring density of printed circuit boards has become more and more high, and even when a plate-like body is pressed against a relatively small area of the printed circuit board as described in the above-mentioned publication, the position caused by the warp or waviness of the printed circuit board. Due to the deviation, the probe may deviate from the measurement point of the printed circuit board and the characteristics of the printed circuit board may not be accurately inspected.

JP-A-2010-237061

In view of the above inconvenience, it is an object of the present invention to provide an electrical inspection apparatus capable of contacting a probe with a printed circuit board relatively accurately.

The invention made to solve the above problems includes a head drive mechanism for driving an electrical inspection head having a plurality of probes and an image processing device for acquiring position information of the printed circuit board, and the electrical inspection head is mounted on the printed circuit board. This is an electrical inspection device that makes a plurality of probes come into contact with the printed circuit board from the normal direction so as to face the inspection target portion of the printed circuit board, and has a normal around the inspection target portion of the printed circuit board in a plan view of the printed circuit board. A straightening member that presses in the direction and a straightening member driving mechanism that positions the straightening member in the plane direction of the printed circuit board so as to face the inspection target portion independently of the electrical inspection head and moves the straightening member in the normal direction of the printed circuit board. It is an electric inspection device characterized by being provided.

It is preferable that the pair of the straightening members are arranged so as to face each other with the printed circuit board in between.

After controlling the straightening member driving mechanism so that the straightening member press-contacts the printed circuit board, it is preferable to further include a controller that acquires position information by the image processing device and positions the electrical inspection head.

It is preferable that the straightening member has a frame shape.

The opening area of the straightening member is preferably 1.1 times or more and 10 times or less the area of the contact surface of the electrical inspection head.

It is preferable that the straightening member has a mechanism for applying tension to the printed circuit board by pressure welding.

The electrical inspection device of the present invention includes the pair of straightening members and the straightening member driving mechanism, so that the straightening member presses the periphery of the inspection target portion of the printed circuit board, and then positions the electrical inspection head. Then, it can be pressure-welded to the inspection target portion of the printed circuit board. In this way, the electrical inspection device can remove the warp and waviness of the printed circuit board by pressing the printed circuit board with a straightening member before the electrical inspection head is pressed against the printed circuit board. The printed circuit board does not easily shift when the head is pressed. Therefore, the electrical inspection device can bring the probe into contact with the printed circuit board relatively accurately.

It is a schematic diagram which shows the structure of the electrical inspection apparatus of one Embodiment of this invention. It is a schematic cross-sectional view which shows the detail of the straightening member of the electric inspection apparatus of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.

[Electrical inspection equipment]
In the electrical inspection apparatus according to the embodiment of the present invention shown in FIG. 1, a pair of electrical inspection heads 2 having a plurality of probes 1 are placed facing the front and back of an inspection target portion of the printed circuit board P, and the printed circuit board P is subjected to a method. This device inspects the electrical characteristics of the printed circuit board P by bringing a plurality of probes 1 into contact with each other in the linear direction. The electrical inspection device can be used to inspect the electrical properties of the printed circuit board P, which is flexible and can cause warpage and waviness.

The electrical inspection device includes a head drive mechanism 3 that drives a pair of electrical inspection heads 2, an image processing device 4 that acquires position information of the printed circuit board P, and a plan view around the inspection target portion of the printed circuit board P. A pair of straightening members 5 and a pair of straightening members 5 that are pressure-welded from the front and back in the normal direction are positioned in the plane direction of the printed circuit board P so as to face the inspection target portion independently of the electrical inspection head 2 and printed. It includes a straightening member driving mechanism 6 that moves the straightening member 5 in the normal direction of the substrate P, and a controller 7 that controls the head driving mechanism 3 and the straightening member driving mechanism 6 based on the position information acquired by the image processing device 4. ..

The electrical inspection device may further include a frame (not shown) that supports each component, a member that holds a peripheral edge of the printed circuit board P, and the like.

<Printed circuit board>
The printed circuit board P for inspecting electrical characteristics by the electrical inspection device typically has a plurality of functional parts formed on a flexible sheet-like base material, and finally each functional part is formed. It is assumed that a plurality of electronic components are obtained by cutting out the including part.

Such a printed circuit board P is an inspection target portion in which a relatively small area including individual functional parts or a small number of functional parts is inspected by a pair of electrical inspection heads 2. In other words, the printed circuit board P has a plurality of inspection target portions. Therefore, in the printed circuit board P, the electrical inspection head 2 is repeatedly pressure-welded at different locations, and the electrical characteristics of each inspection target portion are inspected in order.

<Electrical inspection head>
The pair of electrical inspection heads 2 have a guide plate 8 facing the printed circuit board P and each having a plurality of guide holes for guiding the probe 1. In the electrical inspection head 2, the plurality of probes 1 are inserted into the guide holes and held so as to be perpendicular to the guide plate 8 and their respective tips project from the guide plate 8.

The plurality of probes 1 are arranged so as to abut against a plurality of measurement points of the conductive pattern of the printed circuit board P. Since the conductive patterns of the printed circuit board P can be different on the front and back sides, the arrangement of the plurality of probes 1 in the pair of electrical inspection heads 2 may be different from each other.

<Head drive mechanism>
The head drive mechanism 3 may be any as long as it can perform three-dimensional positioning of the electrical inspection head 2, and further, rotational positioning of the electrical inspection head 2 can be performed around an axis in the normal direction of the printed circuit board P. What can be done is preferable.

An articulated robot may be used as the head drive mechanism 3, but it is preferable to adopt a Cartesian coordinate type drive system having a relatively small cost and occupied space. The Cartesian coordinate drive system includes an Cartesian coordinate robot capable of positioning two axes in the plane direction of the printed substrate P, an elevating device arranged at the end of the Cartesian robot, and an elevating device. It can be configured to include a rotational positioning device that can be held and holds the electrical inspection head 2 so that it can be rotationally positioned.

The head drive mechanism 3 may be a pair of mechanisms that independently drive a pair of electrical inspection heads 2, and a single mechanism that drives the pair of electrical inspection heads 2 in a mirror image with the printed circuit board P sandwiched between them. It may be the mechanism of.

<Image processing device>
As the image processing device 4, a known device including a camera that captures a digital image and a processing unit that processes the digital image captured by the camera can be used.

The processing unit of the image processing device 4 may be integrally configured with the controller 7, which will be described later. That is, the processing unit of the image processing device 4 may be a part of a program processed by the computer constituting the controller 7.

The camera of the image processing device 4 may be held independently, but it is preferable that the camera is held by the head drive mechanism 3 so as to be movable at least in the plane direction of the printed circuit board P together with the electrical inspection head 2. By moving the camera of the image processing device 4 together with the electrical inspection head 2, the range of image processing is limited, and the required number of pixels of the camera and the computing power of the processing unit are relatively small. It can be made relatively inexpensive and the inspection cycle of the printed circuit board P can be shortened.

The lower limit of the area of the imaging range of the image processing device 4 by the camera is preferably 1.1 times, more preferably 1.2 times, the area of the contact surface (guide plate 8) of the electrical inspection head 2. On the other hand, the upper limit of the area of the imaging range of the image processing device 4 by the camera is preferably 10 times, more preferably 5 times, the area of the contact surface of the electrical inspection head 2. If the area of the shooting range taken by the camera of the image processing device 4 is less than the lower limit, the position information of the measurement target portion may not be acquired. On the contrary, when the area of the shooting range by the camera of the image processing device 4 exceeds the upper limit, the calculation load of the image processing may be unnecessarily increased.

The position information is acquired by the image processing device 4 by specifying the coordinates of the feature points of the inspection target portion of the printed substrate P in the digital image from the digital images taken by the camera by a known image processing technique. The relative position of the printed substrate P with respect to the inspection target portion, and by extension, the absolute position of the inspection target portion of the printed substrate P is specified.

When a digital image of the printed circuit board P is taken by the camera of the image processing device 4, the position of the printed circuit board P of the camera in the normal direction (distance from the printed circuit board P) is made constant, so that the camera and the printed circuit board P are taken. The absolute amount of the position relative to the inspection target portion in the plane direction can be calculated relatively easily.

The feature point extracted in the image processing may be a portion having a characteristic shape preset in the conductive pattern of the printed circuit board P, or may be a marking provided on the Pronto substrate P exclusively for image processing. ..

<Orthodontic member>
The pair of straightening members 5 face each other with the printed circuit board P in between, and the printed circuit board P is sandwiched by pressing the electrical inspection head 2 of the printed circuit board P around the inspection target portion to be pressed in the normal direction from the front and back. This removes the warp and swell of the part to be inspected.

Therefore, the contact surface of the straightening member 5 with respect to the printed circuit board P is a flat surface parallel to the printed circuit board P.

As the material of the contact surface of the straightening member 5 with respect to the printed circuit board P, a resin or the like having flexibility so as not to damage the printed circuit board P is preferably used.

The planar shape of the portion of the straightening member 5 that abuts on the printed circuit board P may be at least one that abuts on at least two points that sandwich the inspection target portion of the printed circuit board P, but typically, the inspection target portion is omitted. It has a frame shape that surrounds it and allows the electrical inspection head 2 to be inserted inside. If the straightening member 5 has a frame shape, the periphery of the printed circuit board P inspection target portion can be sandwiched over the entire circumference, so that the warp or swell of the printed circuit board P is relatively small regardless of the direction of the warp or swell. It can be reliably removed.

When the straightening member 5 has a frame shape, the lower limit of the opening area is preferably 1.1 times, more preferably 1.2 times, the area of the contact surface (guide plate 8) of the electrical inspection head 2. On the other hand, the upper limit of the opening area of the straightening member 5 is preferably 10 times, more preferably 5 times, the area of the contact surface of the electrical inspection head 2. If the opening area of the straightening member 5 is less than the lower limit, the straightening member 5 may interfere with the electrical inspection head 2 and the electrical inspection head 2 may not be accurately positioned and pressure-welded to the printed circuit board P. .. On the contrary, when the opening area of the straightening member 5 exceeds the upper limit, the printed circuit board P in the opening of the straightening member 5 remains warped or wavy in a plan view, and the printed circuit board P is positioned at the time of pressure welding of the electrical inspection head 2. Due to the deviation, the electrical characteristics of the printed circuit board P may not be accurately inspected.

The specific opening area may be determined according to the flat state of the printed circuit board P. Specifically, when the warp or waviness of the printed circuit board P is relatively large, it is preferable that the opening area of the straightening member 5 is small. On the contrary, when the warp or waviness of the printed circuit board P is relatively small, a plurality of measurement target portions are included in the opening of the straightening member 5, and a plurality of electrical inspections are performed by positioning the straightening member 5 once. As a result, the time required for the electrical inspection of the entire printed circuit board P can be shortened.

The straightening member 5 may not have a movable portion that is simply pressed against the printed circuit board P, but may have a mechanism (tension applying mechanism) that applies tension to the printed circuit board P by pressure welding.

Since the straightening member 5 has a tension applying mechanism, the electrical inspection device can more reliably remove the warp and waviness of the printed circuit board P.

As an example of the configuration of the straightening member 5 having the tension applying mechanism, as shown in FIG. 2, the straightening member main body 9 held by the straightening member driving mechanism 6 described later and the printed circuit board P on the straightening member main body 9 It is provided with a pressure contact body 10 slidably attached in a direction inclined with respect to the normal direction of the above, and a compression spring 11 that projects the pressure contact body 10 toward the printed circuit board P from the straightening member main body 9. Can be done. That is, as the tension applying mechanism, a mechanism that converts the pressure contact force on the printed circuit board P into the tension acting on the printed circuit board P in the plane direction by using a wedge or a linear motion cam can be adopted.

In the tension applying mechanism of FIG. 2, pressure contact bodies 10 having contact surfaces with respect to the printed circuit board P are slidably arranged on each of the four sides of the square frame-shaped straightening member main body 9. Each pressure welding body 10 is provided so as to move away from the opposing pressure welding body 10 when pushed to the opposite side of the printed circuit board P against the elastic force of the compression spring 11.

When the tension applying mechanism is provided, the contact surface of the straightening member 5 with respect to the printed circuit board P is preferably formed of rubber or the like having a large frictional force with respect to the printed circuit board P so that the printed circuit board P does not easily slide in the plane direction.

Further, the tension applying mechanism is provided with the straightening member driving mechanism 6 so as to prevent the contact surface with the printed circuit board P from scratching and damaging the surface of the printed circuit board P, and thus preventing an excessive increase in the distance between the pressure contact bodies 10. A spring may be arranged between the two, or the pressure contact body 10 may be formed of an elastically deformable material.

0.05% is the lower limit of the rate of change (value obtained by dividing the difference between the maximum interval and the minimum interval by the minimum interval) based on the interval before contacting the printed circuit board P at the interval of the opposing pressure welding bodies 10. Preferably, 0.1% is more preferable. On the other hand, the upper limit of the rate of change of the interval between the pressure welding bodies 10 facing each other is preferably 2%, more preferably 1%. If the rate of change in the distance between the pressure welding bodies 10 facing each other is less than the lower limit, the effect of removing the warp or waviness of the printed circuit board P may not be sufficiently promoted. On the contrary, when the rate of change of the interval between the pressure contact bodies 10 facing each other exceeds the upper limit, it may be difficult for the pressure contact body 10 to prevent the surface of the printed circuit board P from being scratched.

<Correcting member drive mechanism>
The straightening member drive mechanism 6 may be any one capable of three-dimensionally positioning the straightening member 5. Further, the straightening member driving mechanism 6 rotates the straightening member 5 around the axis in the normal direction of the printed circuit board P in order to reduce the opening of the straightening member 5 and improve the effect of removing the warp and the waviness of the printed circuit board P. It may be configured to be capable of positioning.

An articulated robot may be used as the correction member drive mechanism 6, but it is preferable to adopt a Cartesian coordinate type drive system having a relatively small cost and occupied space. The Cartesian coordinate drive system includes a Cartesian coordinate robot capable of positioning two axes in the plane direction of the printed substrate P, an elevating device arranged at the end of the Cartesian robot, and an elevating device. It can be configured to include a rotational positioning device that can be held and holds the straightening member 5 so that it can be rotationally positioned.

The head drive mechanism 3 and the straightening member driving mechanism 6 are such that the electric inspection head 2 and the straightening member 5 do not interfere with each other in a state where the head driving mechanism 3 separates the electric inspection head 2 from the printed circuit board P. It is preferably configured so that it can move in the plane direction.

When an orthogonal coordinate type drive system is adopted as the head drive mechanism 3 and the straightening member drive mechanism 6, a linear motion guide for guiding the movement of the printed circuit board P of the head drive mechanism 3 in the plane direction and the printed circuit board P of the straightening member drive mechanism 6 It is preferable to arrange the linear motion guides that guide the movement in the plane direction side by side in the normal direction of the printed circuit board P, and the linear motion guides of the straightening member drive mechanism 6 are more than the linear motion guides of the head drive mechanism 3. It is preferably disposed on the side.

The straightening member driving mechanism 6 may be a pair of mechanisms that independently drive the pair of straightening members 5, or a single straightening member 5 that drives the pair of straightening members 5 in a mirror image across the printed circuit board P. It may be a mechanism, but even in the case of a pair of mechanisms, it is preferable to operate based on the same control signal and move the pair of straightening members 5 so as to always face each other.

<Controller>
The controller 7 controls the straightening member driving mechanism 6 so that the pair of straightening members 5 are pressed against both sides of the printed circuit board P, and then acquires the position information by the image processing device 4 to position the pair of electrical inspection heads 2. To do.

By providing the controller 7, the electrical inspection device does not need to be operated by the operator when performing the operation of pressing the electrical inspection head 2 after removing the warp or waviness of the printed circuit board P, so that it is more accurate and quick. The electrical inspection head 2 can be pressure-welded to the measurement target portion of the printed circuit board P.

As the controller 7, for example, a programmable logic controller, a personal computer, or the like is used.

Further, the controller 7 does not require the use of the image processing device 4, and the printed circuit board P can be sandwiched between the pair of straightening members 5 without the intervention of the operator. It is preferable to store the position information that serves as a reference. In this way, by positioning the straightening member 5 based on the layout information of the conductive pattern of the printed circuit board P stored in advance in the controller 7, it is possible to shorten the processing time and reduce the calculation load of the controller 7.

<Electrical inspection method>
The method of inspecting the electrical characteristics of the printed substrate P using the electric inspection device includes a step of pressing a pair of straightening members 5 around the inspection target portion of the printed substrate P (press welding step) and after this pressing step. A pair of electrical inspection heads 2 are mounted on a printed substrate based on a step of acquiring position information of an inspection target portion of the printed substrate P by the image processing device 4 (position information acquisition step) and the positional information acquired in this position information acquisition step. A step of pressure contacting the inspection target portion of P (head pressure welding process) and a step of measuring the electrical characteristics of the printed substrate P via the probe 1 of the electrical inspection head 2 pressure-welded in this head pressure welding process (measurement step). It can be a method of preparing.

Further, the inspection method using the electric inspection device includes a step (separation step) of separating the pair of electric inspection heads 2 and the straightening member 5 from the printed circuit board P after the measurement step. By this separation step, the electric inspection apparatus can perform the steps from the pressure welding step to the measurement step again. That is, in the inspection method using the electrical inspection device, the electrical inspection heads 2 are sequentially brought into contact with a plurality of measurement target portions of one printed circuit board P by repeating each step from the pressure welding step to the separation step. Inspect its electrical properties.

In the electrical inspection device, it is preferable that the pressure welding process, the position information acquisition process, the head pressure welding process, the measurement process, and the separation process are automatically performed by the program of the controller 7.

(Pressure welding process)
In the pressure welding step, first, a pair of straightening members 5 are moved in the plane direction of the printed circuit board P to face the inspection target portion, and then a pair of straightening members 5 are moved in the normal direction of the printed circuit board P. By pressure contacting, a pair of straightening members 5 sandwich the periphery of the inspection target portion of the printed circuit board P.

The positioning of the printed circuit board P of the straightening member 5 in the pressure welding step in the plane direction may be performed with respect to the position of the inspection target portion predicted based on the design arrangement of the plurality of inspection target portions on the printed circuit board P.

(Location information acquisition process)
In the position information acquisition step, the camera of the image processing device 4 captures an image of the printed circuit board P in the opening in a plan view of the correction member 5, and acquires the position information of the inspection target portion to be inspected.

Therefore, in this position information acquisition step, the electrical inspection head 2 is arranged at a position that does not face the opening of the straightening member 5, so that the measurement target portion of the printed circuit board P in the opening of the straightening member 5 can be confirmed. It is preferable to take an image of the printed circuit board P with the camera of the image processing device 4.

(Head pressure welding process)
In the head pressure welding step, first, a pair of electrical inspection heads 2 are moved in the plane direction of the printed circuit board P so as to face the inspection target portion based on the position information acquired in the position information acquisition step, and then a pair of electrical inspection heads 2 are moved in the plane direction of the printed circuit board P. The electrical inspection head 2 is moved in the normal direction of the printed circuit board P and inserted into each of the openings of the pair of straightening members 5 to press-contact the front and back surfaces of the printed circuit board P.

(Measurement process)
In the measurement step, the electrical characteristics of each part of the circuit of the printed circuit board P are measured by, for example, applying a voltage between the plurality of probes 1 and measuring the current value.

(Separation process)
In the separation step, the pair of electrical inspection heads 2 and the pair of straightening members 5 are separated from the printed circuit board P, and the pair of electrical inspection heads 2 and the pair of straightening members 5 are independently separated from the printed circuit board P in the plane direction. Make it movable to.

<Advantage>
By pressing a pair of straightening members 5 against the printed circuit board P, the electrical inspection device can remove the warp and swell of the measurement target portion of the printed circuit board P, and the electrical inspection is performed with the warp and swell removed. Since the head 2 is pressure-welded, the position of the printed circuit board P does not shift during the pressure-contacting of the electrical inspection head 2. That is, in the electrical inspection device, the printed circuit board P does not shift in position after the position information is acquired by the image processing device 4. Therefore, in the electrical inspection device, the plurality of probes 1 of the electrical inspection head 2 are brought into contact with the measurement points existing in the measurement target portion of the printed circuit board P relatively accurately. Therefore, the electrical inspection device can measure the electrical characteristics of the printed circuit board P relatively reliably.

[Other Embodiments]
The embodiments do not limit the configuration of the present invention. Therefore, it is possible to omit, replace or add components of each part of the embodiment based on the description of the present specification and common general technical knowledge, and all of them are construed as belonging to the scope of the present invention. Should be.

In the electrical inspection device, when the printed circuit board to be inspected is a single-sided substrate having a conductive pattern on only one side, the surface plate on which the printed circuit board is placed and one straightening plate pressed so as to press the printed circuit board against the surface plate. It may be configured to have a member.

The electrical inspection device may include image processing devices on both sides of the printed circuit board, and may position a pair of electrical inspection heads independently of each other based on the position information acquired by each image processing device. It is preferable that the pair of straightening members is controlled based on a single position information so as to accurately face each other via the printed circuit board.

The mechanism for applying tension to the printed circuit board of the straightening member in the electrical inspection device is not limited to a mechanism using a wedge or a linear motion cam, and the portion pressed against the printed circuit board due to elastic deformation of, for example, rubber moves outward. Even if a device that converts the pressure contact force to the printed circuit board in the plane direction using a link mechanism or a gear mechanism, for example, a device that applies tension to the printed circuit board using a power source such as an air cylinder is adopted. Good.

The electrical inspection device may acquire position information by an image processing device in order to position a pair of straightening members that sandwich the printed circuit board in the plane direction of the printed circuit board. In this case, after the printed circuit board is sandwiched between the pair of straightening members, the image processing device is configured to acquire the position information again in order to position the electrical inspection head in the plane direction of the printed circuit board.

The electrical inspection device may inspect only the electrical characteristics of one surface of the printed circuit board. That is, the electrical inspection device may include only one electrical inspection head.

The electrical inspection device may not have a controller, or may perform a part of the pressure welding process, the position information acquisition process, and the head pressure welding process based on the operation of the operator.

The electrical inspection apparatus according to the present invention can be suitably used for electrical inspection of a flexible printed circuit board which has flexibility and can cause warpage or waviness.

1 Probe 2 Electrical inspection head 3 Head drive mechanism 4 Image processing device 5 Straightening member 6 Straightening member drive mechanism 7 Controller 8 Guide plate 9 Straightening member body 10 Pressure welding body 11 Compression spring P printed circuit board

Claims (7)

It is equipped with a head drive mechanism that drives an electrical inspection head having a plurality of probes, and an image processing device that acquires position information of a printed circuit board.
The electrical inspection head directly facing the inspection target portion of the printed circuit board, an electrical inspection apparatus for contacting a plurality of probes from the normal direction with respect to the printed circuit board,
A straightening member having an abutting surface that abuts around the inspection target portion of the printed circuit board in a plan view of the printed circuit board, and pressing the printed circuit board with pressure in the normal direction by the abutting surface .
And a correcting member driving mechanism for moving to position the straightening member directly faces as in the plane direction of the printed circuit board on the inspection target portion independent of the electrical inspection head in the normal direction of the printed circuit board,
Rukoto the straightening member, by the operation of pressing under pressure in the normal direction, the contact surface to slide in a direction parallel to the plane of the printed circuit board, which have a mechanism for applying tension to said printed circuit board An electrical inspection device characterized by. The electrical inspection apparatus according to claim 1, wherein the straightening member includes a pressure contact body that is slidable in a direction in which the straightening member is inclined with respect to the normal direction of the printed circuit board. The straightening member
The straightening member main body on which the pressure contact body is arranged and
With a compression spring that causes the pressure contact body to protrude from the straightening member main body toward the printed circuit board.
The electrical inspection apparatus according to claim 2. The electrical inspection apparatus according to claim 1 , claim 2 or claim 3 , wherein a pair of the straightening members are arranged so as to face each other with the printed circuit board interposed therebetween. Claims 1 to claim further include a controller that controls the straightening member driving mechanism so as to push the printed circuit board with pressure by the straightening member, and then acquires position information by the image processing device to position the electrical inspection head. The electrical inspection apparatus according to any one of 4 . The electrical inspection apparatus according to any one of claims 1 to 5, wherein the straightening member has a frame shape. The electrical inspection apparatus according to claim 6 , wherein the opening area of the straightening member is 1.1 times or more and 10 times or less the area of the contact surface of the electrical inspection head.

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