JP6783062B2 - Measuring jig and correction value measuring method - Google Patents

Description

The present invention is a measuring jig provided with a holding portion for holding an electric component to be measured and a moving mechanism for bringing the probe portion into contact with the electric component, and for correcting a measured value of a measured amount of the electric component. it relates to the correction value measurement how to measure the correction value.

As a measuring jig of this kind, a measuring jig disclosed by the applicant in Patent Document 1 below is known. This measuring jig is configured to include a base and an electrode slide mechanism. The electrode slide mechanism supports a holding base for holding the object to be measured, a fixed electrode support that supports the electrode plate that functions as a probe and is fixed to the base, and a fixed electrode support that supports the electrode plate. It is provided with a movable electrode support arranged on a base so as to be movable in the direction of contact and separation, and an urging spring for urging the movable electrode support toward the fixed electrode support. When measuring the object to be measured using this measuring jig, the operating knob attached to the movable electrode support is gripped, and then the movable electrode is supported against the urging force of the urging spring. Slide the body away from the fixed electrode support. At this time, the distance between the tip of the electrode plate supported by the fixed electrode support and the tip of the electrode plate supported by the movable electrode support is widened. Subsequently, the object to be measured is set on the holding base so as to be located between the tips of each electrode plate. Next, while maintaining the gripped state of the operating knob, the force that opposes the urging force of the urging spring is relaxed, and the movable electrode support is slid in a direction close to the fixed electrode support. At this time, the tip of each electrode plate is pressed against the electrode of the object to be measured by the urging force of the urging spring and comes into contact with the electrode. Then, the measurement is started.

Japanese Unexamined Patent Publication No. 2014-20819 (Pages 5-11, Fig. 1-5)

However, the above-mentioned measuring jig disclosed by the applicant has the following problems to be improved. That is, in this measuring jig, the movable electrode support is urged toward the fixed electrode support by the urging spring. Here, in order to accurately measure the measured quantity of the object to be measured, it is necessary to correct the error of the measurement system (for example, the measured quantity such as impedance and capacitance between each electrode plate (each probe portion)). There is. When performing open correction as one of this type of correction, the measured amount is measured by separating each electrode plate by the length of the object to be measured without setting the measured amount, and the measurement is performed. Let the value be the correction value for open correction. However, in the above measuring jig, since the movable electrode support is urged toward the fixed electrode support by the urging spring, it is necessary to separate the electrode plates by the length of the object to be measured. It is necessary to grip the jig and hold the movable electrode support in a state of being separated from the fixed electrode support against the urging force of the urging spring. In such an operation, the separation distance of each electrode plate changes depending on how the movable electrode support is held, so that it becomes difficult to accurately measure the correction value.

On the other hand, as a configuration different from the above-mentioned measuring jig, the applicant applies one of the two probe portions (hereinafter, also referred to as “first probe portion”) in the length direction of the first probe portion via the coil spring. We are developing a measuring jig that is movable and slidable so that the other of the two probe portions (hereinafter, also referred to as "second probe portion") can be brought into contact with and separated from the first probe portion. In this measuring jig, the first probe portion and the second probe portion are separated from each other longer than the length of the object to be measured while the coil spring has a natural length, and the object to be measured is set between the probe portions. Next, the second probe portion is brought close to the first probe portion, and the movement of the second probe portion is stopped when the tips of both probe portions come into contact with the object to be measured while the coil spring has a natural length. Subsequently, the first probe portion is moved in the direction in which the coil spring contracts to remove the object to be measured, and then the first probe portion is returned to the original position (the position where the coil spring has a natural length). As a result, both probe portions can be separated by the length of the object to be measured. However, in this measuring jig, it is necessary to set the object to be measured in order to measure the correction value for open correction. In this case, since a magnifying glass or a microscope is used to set a minute object to be measured, the work is complicated and it is difficult to improve the measurement efficiency of the correction value. Further, when moving the second probe portion, it depends on the operator's sense whether or not each tip portion of both probe portions has come into contact with the object to be measured, so that the correction value may vary. There is also.

The present invention has been made in view of the problem to be improved, and is a measuring jig capable of accurately and efficiently measuring the corrected value for correcting the measured value of the measured amount of the electric component, and the measuring jig. a main object of the present invention to provide a correction value measurement how.

In order to achieve the above object, the measuring jig according to claim 1 has a groove portion on which an electric component to be measured can be placed, and has a holding portion for holding the electric component placed in the groove portion. With at least one of the pair of probe portions as a movement target, the probe portion to be moved is moved in the length direction of the groove portion, and the probe portions to be moved are moved to the pair of contacted portions of the electric component held by the holding portion. The moving mechanism is provided with a moving mechanism that brings the probe parts into contact with each other, and the moving mechanism makes it possible to move the probe part to be moved in the first direction by an urging force in the first direction in which the probe parts are close to each other. For measurement, the measurement is provided with a movement restricting portion that regulates the movement of the probe portion to be moved in the first direction in a state where the tip portions of the probe portions are separated from each other by an arbitrary separation distance. The moving mechanism is a jig, and the moving mechanism is configured to include a probe holding portion that holds the probe portion to be moved and a contact portion that moves together with the probe holding portion, and the movement restricting portion is a support portion. The sleeve is fixed to the support portion and provided with the first scale, and the sleeve is rotatably supported by the sleeve and the amount of protrusion of the tip portion from the support portion changes according to the amount of rotation. A spindle that is formed and restricts the movement of the probe portion to be moved in the first direction when the contact portion comes into contact with the tip portion, and a spindle that is attached to the base end portion of the spindle and said to be the first. second graduations indicating the amount of projection is configured with a thimble provided with Ri 1 scale.

Further, the measuring jig according to claim 2 has a groove portion on which an electric component to be measured can be placed, and has a holding portion for holding the electric component placed in the groove portion and a pair of probe portions. The probe portion of the moving target is moved in the length direction of the groove portion with at least one as the moving target, and the probe portions are brought into contact with a pair of opposed contacted portions in the electric component held by the holding portion. The moving mechanism includes a moving mechanism for moving the probe portion to be moved by an urging force in a first direction in which the probe portions are close to each other, and the moving mechanism is configured to be movable in the first direction. A measuring jig provided with a movement restricting portion that regulates the movement of the probe portion to be moved in the first direction with the tips of the probe portions separated from each other by an arbitrary distance. A cover portion that covers the measurement position where the electrical component is located in the groove when the probe portion comes into contact with each contacted portion of the electrical component is provided, and the cover portion can be rotated by a support shaft. The measurement position is switched between the first state of opening the measurement position and the second state of covering the measurement position by rotating in conjunction with the movement operation of the probe portion to be moved by the movement mechanism. When the probe portion to be moved is maintained in the first state in a state where the probe portion to be moved is located at the initial position and the probe portion comes into contact with each contact portion of the electric component. It is switched to the second state.

Further, the measuring jig according to claim 3 has a groove portion on which an electric component to be measured can be placed, and has a holding portion for holding the electric component placed in the groove portion and a pair of probe portions. The probe portion of the moving target is moved in the length direction of the groove portion with at least one as the moving target, and the probe portions are brought into contact with a pair of opposed contacted portions in the electric component held by the holding portion. The moving mechanism includes a moving mechanism for moving the probe portion to be moved by an urging force in a first direction in which the probe portions are close to each other, and the moving mechanism is configured to be movable in the first direction. A measuring jig provided with a movement restricting portion that regulates the movement of the probe portion to be moved in the first direction with the tips of the probe portions separated from each other by an arbitrary distance. The holding portion is provided with a recess formed so that the bottom surface is formed flat and the bottom surface is defined to have the same depth as the bottom portion of the groove portion and is continuous with a portion of the groove portion other than the measurement position. ing.

Further, in the correction value measuring method according to claim 4, the pair of probe portions connected to the measuring device are brought into contact with each of the pair of contacted portions facing each other in the electrical component, and the contact of the electrical component is measured by the measuring device. It is a correction value measuring method for measuring a correction value for open correction for correcting a measured value of a measured amount, and is placed in the groove portion having a groove portion on which the electrical component to be measured can be placed. A probe for which the electric component is held and a probe for which the probe is to be moved by an urging force in a first direction in which the probe portions in the length direction of the groove are close to each other with at least one of the probe portions as a movement target. A moving mechanism for bringing each probe portion into contact with each contacted portion of the electrical component held by the holding portion so that the portion can be moved in the first direction, and each of the probe portions. The moving mechanism includes a movement restricting portion that regulates the movement of the probe portion of the moving target in the first direction with the tip portions separated from each other by an arbitrary separation distance, and the moving mechanism provides the probe of the moving target. The probe holding portion for holding the portion and the contact portion that moves together with the probe holding portion are provided, and the movement restricting portion is fixed to the supporting portion and the supporting portion and is provided with a first scale. The sleeve is rotatably supported by the sleeve and is formed so that the amount of protrusion of the tip portion from the support portion changes according to the amount of rotation, and the contact portion abuts on the tip portion. Occasionally, a spindle for restricting the movement of the probe portion to be moved in the first direction and a second scale attached to the base end portion of the spindle and indicating the protrusion amount are provided together with the first scale. Using a measuring jig provided with a thimble, the thimble is rotated while visually recognizing the first scale and the second scale in a state where the electrical component is not placed in the groove portion. By rotating the spindle, the tip of the spindle is projected from the support by the amount of protrusion corresponding to the length of the electrical component, and then the probe holding portion of the moving mechanism is moved. By moving the probe portion to be moved held by the probe holding portion together with the abutting portion in the first direction, and then abutting the abutting portion with the tip portion of the spindle. , The movement of the probe portion to be moved in the first direction is restricted, and each tip portion of each probe portion corresponds to the length of the electrical component. After separating by the separation distance, the measuring device is operated to measure the measured value, and the measured measured value is used as the correction value for the open correction.

According to the measuring jig according to the first and third aspects and the measured value measuring method according to the fourth aspect , the probe portions are separated from each other by an arbitrary separation distance from each other. By using a movement control unit that regulates the movement of the probe unit to be moved in the first direction close to each other, the length of each tip of each probe unit can be set to the length of the electrical component without setting the electrical component in the holding unit. It is possible to separate the jigs by a distance corresponding to the distance and to maintain the state reliably. Therefore, according to this measuring jig and the measured value measuring method, the correction value is accurately measured unlike the conventional configuration in which the separation distance between the tips of each probe portion may change. Can be done. Further, according to the measuring jig and the measured value measuring method, the measurement efficiency of the corrected value can be sufficiently improved because it is not necessary to set the electric component in the holding portion in order to measure the corrected value.

Further, according to the measuring jig according to claim 1 and the measured value measuring method according to claim 4 , the sleeve provided with the first scale and the tip rotatably supported by the sleeve according to the amount of rotation. The spindle has a spindle that regulates the movement of the probe part to be moved in the first direction in which the tip part comes into contact with the contact part of the moving mechanism by changing the protruding amount of the part and each probe part is close to each other. By configuring the movement control unit with a thimble that is attached and provided with a second scale that indicates the amount of protrusion together with the first scale, the tip of the spindle is projected by the amount of protrusion corresponding to the length of the electrical component. As a result, the tips of the probe portions can be accurately separated from each other by the length of the electrical component. Therefore, according to this measuring jig and the correction value measuring method, the correction value can be measured more accurately.

Further, according to the measurement jig according to claim 2 , the first state is caused by being rotatably supported by a support shaft and rotating in conjunction with the movement operation of the probe portion to be moved by the movement mechanism. By configuring the cover portion so that it can be switched between the first state and the second state, the cover portion can be moved in a direction parallel to the length direction of the groove portion or orthogonal to the length direction of the groove portion to move the cover portion between the first state and the second state. Since the first state and the second state can be switched with a smaller amount of movement as compared with the configuration for switching between and, the cover portion can be sufficiently miniaturized.

Further, according to the measuring jig according to claim 3 , the bottom surface is formed flat and the bottom surface is defined to have the same depth as the bottom portion of the groove portion so as to be continuous with the portion excluding the measurement position in the groove portion. By forming the holding portion with the recessed portion, the electric component can be slid and moved from the bottom surface of the recessed portion to the bottom portion of the groove portion after the electric component is placed on the bottom surface of the recessed portion. Therefore, according to this measuring jig, even when the electric component is small, the electric component can be easily placed in the groove, and as a result, the measurement efficiency can be sufficiently improved.

It is a perspective view which saw the measuring jig 1 from the front panel 2a side of the main body part 2. It is a perspective view which saw the measuring jig 1 from the back panel 2b side of the main body part 2. It is a perspective view which shows the internal structure of the measuring jig 1. It is a top view which shows the internal structure of the measuring jig 1. It is a perspective view of the state which disassembled the moving mechanism 4. It is a top view of the measuring jig 1. It is 1st explanatory drawing explaining the operation of the measuring jig 1. It is a 2nd explanatory drawing explaining the operation of the measuring jig 1. It is a 3rd explanatory diagram explaining the operation of the measuring jig 1. It is a 4th explanatory diagram explaining the operation of the measuring jig 1. FIG. 10 is a cross-sectional view taken along line XX in FIG. It is a 5th explanatory drawing explaining the operation of the measuring jig 1. FIG. 12 is a cross-sectional view taken along the line YY in FIG.

Hereinafter, a measuring jig, a correction value measuring method, and an embodiment of the correction method will be described with reference to the accompanying drawings.

First, the configuration of the measuring jig 1 shown in FIGS. 1 and 2 as an example of the measuring jig will be described with reference to the drawings. As shown in both figures, the measuring jig 1 includes a main body portion 2, a holding portion 3, a moving mechanism 4, a cover portion 5, a movement restricting portion 6, and probe portions 50a and 50b (see FIG. 3: hereinafter, when not distinguished). (Also referred to as “probe unit 50”), for example, the chip component 100 (an example of an electrical component) to be measured shown in FIG. 10 is held, and the probe unit 50 is brought into contact with the chip component 100 in the held state. It is configured to be possible. In addition, in FIGS. 3 to 5, 7 and 9 to 13, each panel 2b to 2f described later in the main body 2 is shown in a removed state.

As shown in FIGS. 1 and 2, the main body 2 is formed, for example, in the shape of a rectangular parallelepiped box, and is configured to accommodate the holding portion 3 and the moving mechanism 4 inside. Further, a plurality of BNC connectors (BNC plugs) of a connection cable for inputting / outputting an electric signal between the probe unit 50 and the measuring device (not shown) are connected to the front panel 2a of the main body unit 2 (in this example). Four) BNC connectors 10 (BNC receptacles) are arranged.

Further, as shown in FIGS. 1 and 2, the chip component 100 is formed when the holding portion 3 holds the chip component 100 by cutting out a part of the back panel 2b and the top panel 2c in the main body portion 2. An opening 2g is formed for taking in and out. Further, as shown in FIG. 1, the side panel 2e of the main body 2 is formed with a notch 2h for projecting the lever 22 of the component 21c (see FIG. 3) constituting the moving mechanism 4 to the outside of the main body 2. Has been done.

As shown in FIGS. 3 and 4, the holding portion 3 includes a pedestal 11 and a holding member 12. The pedestal 11 is attached to the bottom panel 2d of the main body 2. The holding member 12 is fixed on the pedestal 11. Further, as shown in FIG. 10, a groove portion 13 on which the chip component 100 can be placed is formed on the upper surface of the holding member 12. In this case, the groove portion 13 has a rectangular cross section as shown in FIG. Further, as shown in FIG. 10, a recess 14 is formed on the upper surface of the holding member 12. In this case, the recess 14 is one of the grooves 13 except for the measurement position 13b (see FIG. 12) where the chip component 100 is located in the groove 13 when the probe portions 50a and 50b are in contact with the electrodes 101a and 101b of the chip component 100, respectively. It is formed so as to be continuous with the portion (in this example, the portion on the left side in FIG. 10 from the measurement position 13b). Further, as shown in FIG. 11, the recess 14 is formed so that the bottom surface 14a is formed flat and the depth to the bottom surface 14a is the same as the depth to the bottom portion 13a in the groove portion 13 (that is, with the bottom portion 13a). It is specified (so that it is flush with the bottom surface 14a).

The moving mechanism 4 moves the probe portion 50b in the length direction of the groove portion 13 in the holding portion 3 (direction of arrow A shown in FIG. 3: hereinafter also referred to as “A direction”), and is held by the holding portion 3 (holding portion). The probe portions 50a and 50b are configured to be in contact with the electrodes 101a and 101b (a pair of facing contacted portions: see FIG. 12) of the chip component 100 (mounted in the groove portion 13 of 3), respectively. Specifically, as shown in FIGS. 3 to 5, the moving mechanism 4 includes components 21a to 21h, a lever 22, a bearing 23, a spring 24, and an abutting plate 25 (corresponding to an abutting portion). It is configured.

The component 21a is composed of rails, and as shown in FIGS. 3 to 5, extends in a direction orthogonal to the A direction (direction indicated by arrow B in each figure: hereinafter also referred to as “B direction”). It is fixed to the bottom panel 2d of the main body 2. The component 21b is arranged on the component 21a and is configured to be slidable on the component 21a in the B direction. The component 21c is arranged on the component 21b and fixed with a screw 60 (see FIG. 5). Further, a lever 22 used for a moving operation for moving the probe portion 50b in the A direction is attached to the component 21c. Further, as shown in FIG. 4, the component 21c is provided with an inclined portion 31 that is inclined with respect to the B direction (also inclined with respect to the A direction).

The component 21d is composed of rails and is fixed to the bottom panel 2d of the main body 2 so as to extend in the A direction as shown in FIGS. 3 to 5. The component 21e is arranged on the component 21d and is configured to be slidable in the A direction on the component 21d. The component 21f is arranged on the component 21e and fixed with a screw 60 (see FIG. 5). Further, a bearing 23 is rotatably attached to an end portion of the component 21f (the left end portion in FIGS. 3 to 5).

As shown in FIGS. 3 to 5, the component 21g is arranged on the component 21e and fixed with a screw 60 (see FIG. 5). Further, the component 21g corresponds to the probe holding portion, and is configured to be able to hold the probe portion 50b. The component 21h is fixed to the end of the component 21f (the right end in each drawing). Further, as shown in FIG. 4, the component 21h is provided with an inclined portion 32 that is inclined with respect to the B direction (also inclined with respect to the A direction). Further, a contact plate 25 that comes into contact with the spindle 63 of the movement regulation unit 6, which will be described later, is attached to the component 21h. As an example, the spring 24 is composed of a tension coil spring, and urges the components 21e to 21h in a first direction (direction of arrow A1 shown in FIG. 4) in which the probe portions 50a and 50b are close to each other (pulling direction). To act the urging force of).

In this moving mechanism 4, as shown in FIG. 4, when the component 21c is located on the front panel 2a side (upper side in the figure) (when the lever 22 of the component 21c is located at the position P1). ), A portion parallel to the B direction on the back panel 2b side of the inclined portion 31 of the component 21c (hereinafter, also referred to as “parallel portion 33”) abuts on the bearing 23 attached to the component 21f. There is. In this state, the component parts 21e to 21h are located on the side panel 2e side (left side in the figure), and the tips of the probe portions 50a and 50b are separated from each other.

Further, in the moving mechanism 4, as shown in FIG. 7, when the component 21c is located on the back panel 2b side (lower side in the figure) (the lever 22 of the component 21c is located at the position P2). When), the tip end side of the inclined portion 31 of the component 21c is in contact with the bearing 23. In this state, the component parts 21e to 21h are located on the side panel 2f side (right side in the figure), and the tips of the probe portions 50a and 50b are close to each other. That is, in the moving mechanism 4, the cam mechanism is composed of the component 21c and the bearing 23.

As shown in FIG. 12, the cover portion 5 is a member that covers the measurement position 13b of the groove portion 13 in which the chip component 100 is located when the probe portions 50a and 50b come into contact with the electrodes 101a and 101b of the chip component 100, respectively. It is arranged on the upper surface of the holding member 12 in the holding portion 3. In this case, the cover portion 5 can rotate along a plane parallel to the bottom panel 2d by being pivotally supported by a support shaft 5a (see FIG. 3) arranged in a direction orthogonal to the bottom panel 2d. It is configured in. Further, the cover portion 5 is urged in a direction of rotating clockwise in a plan view by a spring (for example, a torsion coil spring pivotally supported by a support shaft 5a) (not shown). Further, the cover portion 5 has a first state (state shown in FIG. 10) in which the measurement position 13b is opened in conjunction with the movement operation of the probe portion 50b (probe portion to be moved) by the moving mechanism 4, and the measurement position 13b. The second state (state shown in FIG. 12) covering the above is switched. Specifically, the probe portion 50b is maintained in the first state in the state where it is located at the initial position (the state shown in FIGS. 4 and 10), and the probe portions 50a and 50b are respectively attached to the electrodes 101a and 101b of the chip component 100. When it comes into contact (when shown in FIG. 12), it is switched to the second state.

As shown in FIGS. 1, 2 and 6, the movement restricting portion 6 is arranged on the top surface panel 2c of the main body portion 2, and the tip portions of the probe portions 50a and 50b are separated from each other by an arbitrary distance La (). The movement of the probe portion 50b is restricted in the direction of the arrow A1 shown in the figure (the first direction in which the probe portions 50a and 50b are close to each other) while being separated by the distance (see FIG. 9). Specifically, as shown in FIGS. 6 and 8, the movement restricting unit 6 includes a support portion 61, a sleeve 62, a spindle 63, and a thimble 64. The support portion 61 is attached to the top surface panel 2c of the main body portion 2. The sleeve 62 is fixed to the support portion 61. Further, the support portion 61 is provided with a first scale 71.

The spindle 63 is rotatably supported by the sleeve 62, and is formed so that the protrusion amount Lb (see FIGS. 6 and 8) of the tip portion 63a from the support portion 61 changes (increases or decreases) according to the amount of rotation. There is. The thimble 64 is attached to the base end portion 63b of the spindle 63. Further, the thimble 64 is provided with a first scale 71 of the sleeve 62 and a second scale 72 indicating the protrusion amount Lb of the tip portion 63a of the spindle 63. In the movement restricting portion 6, as shown in FIG. 8, the tip portion 63a of the spindle 63 abuts on the abutting plate 25 attached to the component 21h of the moving mechanism 4, thereby causing the arrow A1 shown in the figure. The movement of the probe portion 50b in the direction of (the first orientation in which the probe portions 50a and 50b are close to each other) is restricted. Therefore, by adjusting the protrusion amount Lb of the tip portion 63a of the spindle 63, it is possible to maintain the tip portions of the probe portions 50a and 50b in a state of being separated by an arbitrary separation distance La.

As an example, the probe portions 50a and 50b are probe portions for measuring an amount to be measured by the four-terminal method, and are arranged in a tubular first probe (not shown) and a first probe. Each probe is provided with a rod-shaped second probe (not shown) that can be slightly moved in the length direction via an urging member. Further, in the measuring jig 1, as shown in FIGS. 3 and 4, the probe portion 50a is fixed to the fixing base 51, and the probe portion 50b (probe to be moved) is held by the component 21g of the moving mechanism 4. Then, it is moved in the A direction (the length direction of the groove portion 13). That is, only one of the probe portions 50a and 50b can move in the A direction.

Next, a method of measuring the measured amount of the chip component 100 using the measuring jig 1, a correction value measuring method of measuring a correction value for correcting the measured value of the measured amount, and a correction value thereof. A method of correcting the measured value of the measured quantity using the drawing will be described with reference to the drawings.

First, the BNC connector (BNC plug) of the connection cable (not shown) is connected to the BNC connector 10 arranged on the front panel 2a of the main body 2 of the measuring jig 1 to measure with the measuring device (not shown). Connect to the jig 1. Next, as shown in FIG. 4, the lever 22 of the component 21c in the moving mechanism 4 is positioned at the position P1. In this case, since the component parts 21e to 21h in the moving mechanism 4 are urged by the spring 24 in the direction of the arrow A1 shown in the figure (direction toward the side panel 2f), the bearing 23 attached to the component part 21f is attached. Is in contact with the parallel portion 33 of the component 21c.

In this state, the component parts 21e to 21h are located on the side panel 2e side (left side in FIG. 4), the probe portion 50b is located at the initial position, and the tips of the probe portions 50a and 50b are separated from each other. Further, in this state, as shown in FIG. 4, the cover portion 5 is in the first state of opening the measurement position 13b of the groove portion 13 formed in the holding member 12 of the holding portion 3. Further, the inclined portion 32 of the component 21h abuts on the outer peripheral portion of the cover portion 5 to regulate the clockwise rotation of the cover portion 5 due to the urging force of the spring (not shown). Therefore, the cover portion 5 is maintained in the first state.

Next, the correction value (correction value for open correction) for correcting the error of the measurement system is measured prior to the measurement of the measured quantity of the chip component 100. Specifically, the thimble 64 of the movement regulation unit 6 is rotated (rotated). At this time, the spindle 63 rotates together with the thimble 64, and the amount of protrusion Lb (see FIG. 6) of the tip portion 63a of the spindle 63 from the support portion 61 changes accordingly. Next, the rotation amount of the thimble 64 is adjusted, and the tip is advanced by the protrusion amount Lb corresponding to the length of the chip component 100 to be measured as the separation distance (the length between the electrodes 101a and 101b (a pair of contacted portions)). The portion 63a is projected. In this case, in the movement restricting unit 6, since the protrusion amount Lb of the tip portion 63a is indicated by the first scale 71 provided on the sleeve 62 and the second scale 72 provided on the thimble 64, both scales 71. By rotating the thimble 64 while visually recognizing, 72, it is possible to accurately project the tip portion 63a by the amount of protrusion Lb corresponding to the length of the chip component 100 to be measured.

Subsequently, as shown in FIG. 7, the lever 22 of the component 21c is moved to the back panel 2b side of the main body 2 to be positioned at the position P2. At this time, the inclined portion 31 of the component 21c moves in the direction of the arrow B1 shown in the figure (direction toward the back panel 2b), and accordingly, the contact portion between the bearing 23 and the component 21c is a parallel portion. It moves from 33 to the inclined portion 31, and then moves along the inclined portion 31 in the direction of the arrow A1 shown in the figure. As a result, the components 21e to 21h are moved in the direction of the arrow A1, and the probe portion 50b held by the component 21g is moved in the direction of the arrow A1, that is, in the direction close to the probe portion 50a. Further, as the components 21e to 21h move in the direction of the arrow A1, the contact plate 25 attached to the component 21h also moves in the direction of the arrow A1.

Next, as shown in FIG. 8, when the abutting plate 25 abuts on the tip 63a of the spindle 63 in the movement restricting portion 6, the movement of the component parts 21e to 21h to the arrow A1 is restricted. In this state, as shown in FIG. 9, the tip portions of the probe portions 50a and 50b are separated by a separation distance La corresponding to the length of the chip component 100, and the state is maintained.

In this case, in the measuring jig 1, the tip portion 63a of the spindle 63 of the movement restricting portion 6 is brought into contact with the contact plate 25 of the moving mechanism 4, and the probe portions 50a and 50b are in close proximity to each other in the first orientation. Since the structure restricts the movement of the probe portion 50b to the holding portion 3, the tip portion 63a of the spindle 63 is projected by the protrusion amount Lb corresponding to the length of the chip component 100 without setting the tip component 100 in the holding portion 3. Therefore, it is possible to separate the tip portions of the probe portions 50a and 50b by a separation distance La corresponding to the length of the chip component 100, and to reliably maintain the state. Therefore, in this measuring jig 1, it is not necessary to set the chip component 100 in the holding unit 3 in order to measure the correction value, so that the measurement efficiency of the correction value can be sufficiently improved. ..

On the other hand, as shown in FIG. 7, as the components 21e to 21h move to the arrow A1, the inclined portion 32 of the component 21h and the cover portion 5 are separated from each other (the contact state is released). At this time, the cover portion 5 is rotated clockwise by the urging force of the spring (not shown), and as shown in FIG. 9, the cover portion 5 is switched to the second state of covering the measurement position 13b of the groove portion 13 in the holding portion 3.

Subsequently, the measuring device is operated to measure the measured quantity (impedance and capacitance), and the measured value is used as the correction value for open correction. In this case, in this measuring jig 1, as described above, the tips of the probe portions 50a and 50b are separated from each other by a separation distance La corresponding to the length of the chip component 100, and the state is reliably maintained. It is possible to do. Therefore, with this measuring jig 1, it is possible to accurately measure the correction value for open correction. As described above, the measurement of the correction value for correcting the error of the measurement system is completed.

Next, the measured quantity of the chip component 100 is measured. Specifically, as shown in FIG. 4, the lever 22 is moved to the front panel 2a side of the main body 2 to be positioned at the position P1. At this time, as shown in the figure, the inclined portion 31 of the component 21c moves in the direction of the arrow B2 (direction toward the front panel 2a) shown in the figure, and accordingly, the bearing 23 and the component 21a are brought together. The contact portion moves along the inclined portion 31 in the direction of the arrow A2, and then moves from the inclined portion 31 to the parallel portion 33.

As a result, the components 21e to 21h are moved in the direction of the arrow A2 shown in FIG. 4, and the probe portion 50b held by the component 21g is moved in the direction of the arrow A2, that is, in the direction away from the probe portion 50a. .. Further, as shown in the figure, due to the movement of the component 21h, the inclined portion 32 of the component 21h comes into contact with the outer peripheral portion of the cover portion 5, and the cover portion 5 is rotated counterclockwise. The cover portion 5 is switched from the second state to the first state.

Subsequently, the chip component 100 is set in the groove portion 13 of the holding portion 3. Specifically, first, as shown in FIG. 10, the chip component 100 is placed on the bottom surface 14a of the recess 14 formed in the holding member 12. Next, the chip component 100 is moved from the recess 14 to the groove 13 by pushing the chip component 100 with a rod or the like. In this case, since the bottom surface 14a of the recess 14 and the bottom portion 13a of the groove portion 13 are flush with each other (see FIG. 11), the chip component 100 is slid and moved from the bottom surface 14a to the bottom portion 13a for smooth movement. It is possible to do. It is also possible to place a plurality of chip parts 100 to be measured on the bottom surface 14a of the recess 14 and move the chip parts 100 one by one to the groove portion 13 each time the measurement is performed. That is, the recess 14 can be used as a standby place for the chip component 100 to be moved to the groove 13.

Next, in order to ensure that the probe portions 50a and 50b are in contact with the electrodes 101a and 101b of the chip component 100, the thimble 64 of the movement restricting portion 6 is rotated to correct the protrusion amount Lb of the tip portion 63a of the spindle 63. The protrusion amount Lb set at the time of the measurement of is slightly reduced.

Subsequently, as shown in FIG. 7, the lever 22 of the component 21c is moved to the back panel 2b side of the main body 2 to be positioned at the position P2. At this time, the component parts 21e to 21h are moved in the direction of the arrow A1 shown in the figure, and the probe portion 50b held by the component component 21g is moved in the direction close to the probe portion 50a. As a result, as shown in FIG. 12, the probe portions 50a and 50b come into contact with the electrodes 101a and 101b of the chip component 100, respectively.

On the other hand, as shown in FIG. 7, as the components 21e to 21f move to the arrow A1, the inclined portion 32 of the component 21h and the cover portion 5 are separated from each other, and the cover portion 5 rotates clockwise. , As shown in FIG. 12, it is switched to the second state covering the measurement position 13b of the groove portion 13 in the holding portion 3. In this second state, as shown in FIG. 13, since the upper part of the measurement position 13b is covered by the cover portion 5, even if a force is applied from the probe portions 50a and 50b to the electrodes 101a and 101b, the chip component 100 Can be reliably prevented from popping out of the groove 13 (measurement position 13b).

Subsequently, the measuring device is operated to measure the measured quantity of the chip component 100. In this case, since the chip component 100 is surely prevented from popping out from the groove portion 13, it is possible to reliably measure the measured amount of the chip component 100. Subsequently, the measured value of the measured quantity to be measured is corrected by the above-mentioned correction value. With the above, the measurement of the measured quantity of the chip component 100 is completed.

Next, the chip component 100 for which the measurement has been completed is taken out from the groove portion 13. At this time, as shown in FIG. 4, the lever 22 is moved to the front panel 2a side of the main body 2 to be positioned at the position P1. At this time, as shown in the figure, the inclined portion 31 of the component 21c moves in the direction of the arrow B2 shown in the figure, and accordingly, the contact portion between the bearing 23 and the component 21a becomes the inclined portion 31. It moves along the direction of arrow A2, and then moves from the inclined portion 31 to the parallel portion 33.

As a result, the components 21e to 21h are moved in the direction of the arrow A2 shown in FIG. 4, and the probe portion 50b held by the component 21g is moved in a direction away from the probe portion 50a, which is shown in FIG. As described above, the contact of the probe portions 50a and 50b with respect to the electrodes 101a and 101b of the chip component 100 is released. Further, due to the movement of the component 21h, as shown in FIG. 4, the inclined portion 32 of the component 21h comes into contact with the outer peripheral portion of the cover portion 5, and the cover portion 5 is rotated counterclockwise. The cover portion 5 is switched from the second state to the first state. Next, the chip component 100 is taken out from the opened measurement position 13b. With the above, the measurement of the measured quantity of the chip component 100 is completed.

As described above, according to the measuring jig 1, the correction value measuring method, and the correction method, the probe portions 50a and 50b are separated from each other by an arbitrary separation distance La. By using the movement restricting unit 6 that regulates the movement of the probe unit 50b in the first direction close to each other, the tip portions of the probe units 50a and 50b do not set the chip component 100 in the holding unit 3. Can be separated by a separation distance La corresponding to the length of the chip component 100, and the state can be reliably maintained. Therefore, according to this measuring jig 1, the correction value can be accurately measured unlike the conventional configuration in which the separation distance La between the tip portions of the probe portions 50a and 50b may change. it can. Further, according to the measuring jig 1, it is not necessary to set the chip component 100 in the holding unit 3 in order to measure the correction value, so that the measurement efficiency of the correction value can be sufficiently improved.

Further, according to the measuring jig 1, the correction value measuring method, and the correction method, the sleeve 62 provided with the first scale 71 and the tip portion 63a rotatably supported by the sleeve 62 according to the amount of rotation. With the spindle 63, the protrusion amount Lb changes and the tip portion 63a abuts on the contact plate 25 of the moving mechanism 4 to restrict the movement of the probe portion 50b in the first direction in which the probe portions 50a and 50b are close to each other. The movement restricting portion 6 is provided with a thimble 64 attached to the spindle 63 and provided with a second scale 72 indicating the protrusion amount Lb together with the first scale 71, thereby corresponding to the length of the chip component 100. By projecting the tip 63a of the spindle 63 by the amount of protrusion Lb, the tips of the probe portions 50a and 50b can be accurately separated from each other by the length of the chip component 100. Therefore, according to the measuring jig 1, the correction value measuring method, and the correction method, the correction value can be measured more accurately.

Further, according to the measurement jig 1, the correction value measurement method, and the correction method, the first state and the measurement position in which the measurement position 13b of the groove portion 13 is opened in conjunction with the movement operation of the probe portion 50b by the movement mechanism 4. It is configured to be switchable from the second state covering 13b, and is maintained in the first state in the state where the probe portion 50b is located at the initial position, and the probe portions 50a and 50b are attached to the electrodes 101a and 101b of the chip component 100. By providing the cover portion 5 that can be switched to the second state when each contacts, the measurement position 13b is covered by the cover portion 5 when the probe portions 50a and 50b come into contact with the electrodes 101a and 101b of the chip component 100. Can be done. That is, the cover portion 5 functions as a lid of the groove portion 13, and the lid can be automatically opened and closed in conjunction with the moving operation of the probe portion 50b. In this case, the movement of the chip component 100 in the A direction (the length direction of the groove portion 13) is restricted by the probe portions 50a and 50b, and the movement of the chip component 100 upward of the groove portion 13 is restricted by the cover portion 5. Therefore, according to the measuring jig 1, the correction value measuring method, and the correction method, even if a force is applied to the electrodes 101a and 101b from the probe portions 50a and 50b, the chip component 100 is sure to pop out from the groove portion 13. Can be avoided. Therefore, according to the measuring jig 1, the correction value measuring method, and the correction method, it is possible to reliably prevent the measurement from being interrupted or the chip component 100 from being lost due to the chip component 100 protruding from the groove portion 13.

Further, according to the measuring jig 1, the correction value measuring method, and the correction method, the measuring jig 1 is rotatably supported by the support shaft 5a and rotates in conjunction with the moving operation of the probe portion 50b by the moving mechanism 4. By configuring the cover portion 5 so that the first state and the second state can be switched, the cover portion 5 is covered in a direction parallel to the length direction (A direction) of the groove portion 13 or a direction orthogonal to the length direction of the groove portion 13. Compared with the configuration in which the portion 5 is moved to switch between the first state and the second state, the first state and the second state can be switched with a smaller amount of movement, so that the cover portion 5 is sufficiently miniaturized. be able to.

Further, according to the measuring jig 1, the correction value measuring method and the correction method, the bottom surface 14a is formed flat and the bottom surface 14a is defined to have the same depth as the bottom portion 13a of the groove portion 13, and the measurement in the groove portion 13 is performed. Since the holding portion 3 is provided with the recess 14 formed so as to be continuous with the portion other than the position 13b, after the chip component 100 is placed on the bottom surface 14a of the recess 14, the groove portion is formed from the bottom surface 14a of the recess 14. The chip component 100 can be slid and moved to the bottom 13a of 13. Therefore, according to the measuring jig 1, the correction value measuring method, and the correction method, even when the chip component 100 is small, the chip component 100 can be easily placed in the groove portion 13. The measurement efficiency can be sufficiently improved.

The configuration of the measuring jig is not limited to the above configuration. For example, although the configuration example in which the probe portion 50a is fixed and only the probe portion 50b is moved in the A direction has been described above, a configuration in which both the probe portions 50a and 50b are moved in the A direction can also be adopted. In this case, in this configuration, the tip portions of the probe portions 50a and 50b are provided by providing two movement regulation portions, a movement regulation portion that regulates the movement of the probe portion 50a and a movement regulation portion that regulates the movement of the probe portion 50b. It is possible to maintain a state in which they are separated from each other by an arbitrary separation distance La.

Further, the configuration of the movement regulation unit is not limited to the configuration of the movement regulation unit 6 described above. For example, a rail arranged along the A direction (moving direction of the probe portion 50b) on the top panel 2c of the main body portion 2 and a slide lock that can slide on the rail and at an arbitrary position on the rail. It is also possible to adopt a movement restricting unit which is provided with a slide member and is configured to restrict the movement of the probe unit 50b when the contact plate 25 of the moving mechanism 4 comes into contact with the slide locked slide member. it can.

In addition, the above is an example of measuring only the correction value for open correction as the correction value, but in addition to the correction value for open correction, the correction value for short correction is measured, and the measured value is corrected by both correction values. You can also do it. In this case, when measuring the correction value for short-circuit correction, when the lever 22 of the movement mechanism 4 is positioned at the position P2 by reducing the protrusion amount Lb of the tip portion 63a of the spindle 63 in the movement regulation unit 6. The tips of the probe portions 50a and 50b are brought into contact with each other, the measured amount is measured in this state, and the measured value is used as a correction value for short-circuit correction.

Further, an example in which the cover portion 5 is configured so as to be rotatable along a surface parallel to the bottom panel 2d has been described above. For example, the cover portion 5 is pivotally supported by a support shaft parallel to the bottom panel 2d and centered on the support shaft. Using a cover portion that can rotate so that the tilt angle with respect to the bottom panel 2d increases or decreases, when the tilt angle of the cover portion is 90 ° or more, the measurement position 13b is opened in the first state, and the tilt angle of the cover portion is set. It is also possible to adopt a configuration in which the second state covers the measurement position 13b when is 0 °.

Further, although the configuration example in which the cover portion 5 is rotated in conjunction with the moving operation of the probe portion 50b by the moving mechanism 4 to switch between the first state and the second state has been described above, it is linked to the moving operation of the probe portion 50b. Then, the cover portion 5 is moved in a direction parallel to the A direction (the length direction of the groove portion 13), a B direction (a direction orthogonal to the A direction), and a direction inclined with respect to the A direction and the B direction. , A configuration for switching between the first state and the second state can also be adopted.

Further, although the example of using the probe unit 50 for the 4-terminal method provided with the first probe and the second probe has been described above, the configuration using the probe unit (probe for the 2-terminal method) composed of a single probe is used. It can also be adopted.

Further, the above is an example in which the moving mechanism 4 is configured so as to move the probe portion 50b (components 21e to 21h) in the first direction by the urging force (urging force in the pulling direction) of the spring 24 composed of the tension coil spring. However, the moving mechanism 4 can also be configured to move the probe portion 50b in the first direction by the urging force of the compression coil spring (the urging force in the pressing direction). Further, the moving mechanism 4 can be configured so that the probe portion 50b is moved in the first direction by the urging force of a spring (for example, a leaf spring) other than the coil spring or the urging force of an elastic material such as rubber.

1 Measuring jig 3 Holding part 4 Moving mechanism 5 Cover part 5a Support shaft 6 Movement regulation part 13 Groove part 13a Bottom part 13b Measurement position 14 Recessed part 14a Bottom part 21g Component parts 24 Spring 25 Contact plate 50a, 50b Probe part 61 Support part 62 Sleeve 63 Spindle 63a Tip 63b Base 64 Thimble 71 1st scale 72 2nd scale 100 Chip parts 101a, 101b Electrode La Separation distance Lb Protrusion amount

Claims (4)

A holding portion that has a groove portion on which an electric component to be measured can be placed and holds the electric component placed in the groove portion, and at least one of a pair of probe portions as a moving target in the length direction of the groove portion. A moving mechanism for moving the probe portion to be moved and bringing each probe portion into contact with a pair of opposed contacted portions in the electric component held by the holding portion is provided.
The moving mechanism is configured so that the probe portion to be moved can be moved in the first direction by an urging force in a first direction in which the probe portions are close to each other.
A measuring jig provided with a movement restricting portion that regulates the movement of the probe portion to be moved in the first direction with the tip portions of the probe portions separated from each other by an arbitrary distance. There,
The moving mechanism is configured to include a probe holding portion that holds the probe portion to be moved and a contact portion that moves together with the probe holding portion.
The movement restricting portion includes a support portion, a sleeve fixed to the support portion and provided with a first scale, and a tip portion from the support portion that is rotatably supported by the sleeve and according to the amount of rotation. A spindle formed so as to change the amount of protrusion of the probe to regulate the movement of the probe portion to be moved in the first direction when the contact portion abuts on the tip portion, and a base of the spindle. A measuring jig attached to an end portion and provided with a thimble provided with the first scale and a second scale indicating the amount of protrusion. A holding portion that has a groove portion on which an electric component to be measured can be placed and holds the electric component placed in the groove portion, and at least one of a pair of probe portions as a moving target in the length direction of the groove portion. A moving mechanism for moving the probe portion to be moved and bringing each probe portion into contact with a pair of opposed contacted portions in the electric component held by the holding portion is provided.
The moving mechanism is configured so that the probe portion to be moved can be moved in the first direction by an urging force in a first direction in which the probe portions are close to each other.
A measuring jig provided with a movement restricting portion that regulates the movement of the probe portion to be moved in the first direction with the tip portions of the probe portions separated from each other by an arbitrary distance. There,
A cover portion that covers the measurement position where the electrical component is located in the groove when the probe portion comes into contact with each contacted portion of the electrical component is provided.
The cover portion is rotatably supported by a support shaft, and rotates in conjunction with the movement operation of the probe portion to be moved by the moving mechanism to open the measurement position. It is configured to be switchable from the second state covering the measurement position, and is maintained in the first state in the state where the probe portion to be moved is located at the initial position, and the contacted portions of the electric component. A measuring jig that can be switched to the second state when the probe portions come into contact with each other. A holding portion that has a groove portion on which an electric component to be measured can be placed and holds the electric component placed in the groove portion, and at least one of a pair of probe portions as a moving target in the length direction of the groove portion. A moving mechanism for moving the probe portion to be moved and bringing each probe portion into contact with a pair of opposed contacted portions in the electric component held by the holding portion is provided.
The moving mechanism is configured so that the probe portion to be moved can be moved in the first direction by an urging force in a first direction in which the probe portions are close to each other.
A measuring jig provided with a movement restricting portion that regulates the movement of the probe portion to be moved in the first direction with the tip portions of the probe portions separated from each other by an arbitrary distance. There,
The holding portion is provided with a recess formed so that the bottom surface is formed flat and the bottom surface is defined to have the same depth as the bottom portion of the groove portion and is continuous with a portion of the groove portion other than the measurement position. Measuring jig. For open correction for correcting the measured value of the measured amount of the electrical component measured by the measuring device by bringing the pair of probe portions connected to the measuring device into contact with the pair of opposed portions of the electrical component. It is a correction value measurement method that measures the correction value of
A holding portion having a groove portion on which the electric component to be measured can be placed and holding the electric component mounted on the groove portion, and at least one of the probe portions as a movement target in the length direction of the groove portion. The electric component of the electrical component held by the holding portion so that the probe portion to be moved can be moved in the first direction by an urging force in the first direction in which the probe portions are close to each other. A moving mechanism that brings each probe portion into contact with each contacted portion, and a probe portion to be moved in the first direction with the tip portions of the probe portions separated from each other by an arbitrary distance. The moving mechanism is configured to include a probe holding portion that holds the probe portion to be moved, and a contact portion that moves together with the probe holding portion. The movement restricting portion includes a support portion, a sleeve fixed to the support portion and provided with a first scale, and a tip portion from the support portion that is rotatably supported by the sleeve and according to the amount of rotation. A spindle formed so as to change the amount of protrusion of the probe to regulate the movement of the probe portion to be moved in the first direction when the contact portion comes into contact with the tip portion, and a base of the spindle. Using a measuring jig attached to the end and provided with a thimble provided with the first scale and a second scale indicating the amount of protrusion.
In a state where the electric component is not placed in the groove,
By rotating the thimble and rotating the spindle while visually recognizing the first scale and the second scale, the tip portion of the spindle is projected from the support portion by the length of the electric component. Just stick out
Next, by moving the probe holding portion of the moving mechanism, the probe portion to be moved held by the probe holding portion is moved together with the abutting portion in the first direction.
Subsequently, by bringing the contact portion into contact with the tip portion of the spindle, the movement of the probe portion to be moved in the first direction is restricted, and each tip portion of each probe portion is restricted. Separate them from each other by the separation distance corresponding to the length of the electrical component.
Next, a correction value measuring method in which the measuring device is operated to measure the measured value and the measured measured value is used as the correction value for the open correction.

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