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JP6793086B2 - Residual stress measurement method - Google Patents
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JP6793086B2 - Residual stress measurement method - Google Patents

Residual stress measurement method Download PDF

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JP6793086B2
JP6793086B2 JP2017078700A JP2017078700A JP6793086B2 JP 6793086 B2 JP6793086 B2 JP 6793086B2 JP 2017078700 A JP2017078700 A JP 2017078700A JP 2017078700 A JP2017078700 A JP 2017078700A JP 6793086 B2 JP6793086 B2 JP 6793086B2
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stress value
residual stress
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利英 福井
利英 福井
弘行 高枩
弘行 高枩
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Kobe Steel Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/25Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons

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Description

本発明は、被検査体の残留応力を測定する方法に関するものである。 The present invention relates to a method for measuring the residual stress of an object to be inspected.

従来、非破壊で被検査体の残留応力を測定する方法として、特許文献1等に見られるように、X線回折法や音弾性法が知られている。X線回折法は、被検査体に照射されたX線の回折の結果に基づいて当該被検査体の残留応力の状態を評価する方法である。音弾性法は、被検査体に入射した超音波(表面SH波等)が受信されるまでの時間に基づいて当該被検査体の残留応力の状態を評価する方法である。 Conventionally, as a method for measuring the residual stress of an inspected object in a non-destructive manner, an X-ray diffraction method and a sound elasticity method are known as seen in Patent Document 1 and the like. The X-ray diffraction method is a method of evaluating the state of residual stress of the subject to be inspected based on the result of diffraction of X-rays applied to the subject to be inspected. The sound elasticity method is a method of evaluating the state of residual stress of the subject to be inspected based on the time until the ultrasonic waves (surface SH waves or the like) incident on the subject to be inspected are received.

特開2007−178157号公報Japanese Unexamined Patent Publication No. 2007-178157

X線回折法では、被検査体の残留応力の値(絶対値)の測定が可能であるが、被検査体の極表層(表面から数μmの範囲)しか評価できず、また、X線回折法に用いる装置のセッティングや残留応力の計測に比較的多くの時間を要する。一方、音弾性法は、X線回折法に比べて計測時間が短く、また、被検査体の表面から深い範囲の評価が可能であるものの、計測結果から残留応力の絶対値を得るためには、被検査体の材料に起因する各パラメータ(音速や音弾性定数)の事前測定が必要となる。なお、各パラメータ(音速や音弾性定数)は、一般的に、被検査体と同じ条件で応力が印加される前のサンプルにより初期音速が測定され、さらに応力の付与に応じた音速の変化を測定することにより求められる。 The X-ray diffraction method can measure the residual stress value (absolute value) of the object to be inspected, but can only evaluate the polar surface layer (range of several μm from the surface) of the object to be inspected, and X-ray diffraction. It takes a relatively large amount of time to set the equipment used in the method and measure the residual stress. On the other hand, the sound elasticity method has a shorter measurement time than the X-ray diffraction method, and although it is possible to evaluate a deep range from the surface of the object to be inspected, in order to obtain the absolute value of the residual stress from the measurement result, , It is necessary to measure each parameter (sound velocity and sound elasticity constant) due to the material of the object to be inspected in advance. For each parameter (sound velocity and sound elastic constant), the initial sound velocity is generally measured by a sample before stress is applied under the same conditions as the object to be inspected, and the change in sound velocity according to the application of stress is obtained. Obtained by measuring.

本発明の目的は、音弾性法によって被検査体の残留応力の絶対値を算出するのに必要な被検査体の各パラメータ(音速や音弾性定数)の事前測定をすることなく、比較的短時間で被検査体の残留応力の絶対値を測定することが可能な残留応力測定方法を提供することである。 An object of the present invention is to be relatively short without prior measurement of each parameter (sound velocity and sound elastic constant) of the inspected object required to calculate the absolute value of the residual stress of the inspected object by the sound elastic method. It is an object of the present invention to provide a residual stress measuring method capable of measuring the absolute value of the residual stress of an inspected object in time.

前記課題を解決する手段として、本発明は、被検査体の残留応力を測定する方法であって、X線回折法によって、前記被検査体又は前記被検査体と同材料からなる被試験体の特定の部位の残留応力の値である残留応力値を測定する残留応力値測定工程と、音弾性法によって、前記特定の部位の応力の値であって前記残留応力値と相関を有する換算応力値を測定する換算応力値測定工程と、前記残留応力値測定工程で測定された前記残留応力値と前記換算応力値測定工程で測定された前記換算応力値とに基づいて前記換算応力値を前記残留応力値に変換する校正係数を算出する校正係数算出工程と、前記被検査体の複数の部位を前記音弾性法で測定することにより得られた各換算応力値を前記校正係数に基づいてそれぞれ残留応力値に校正する校正工程と、を含む、残留応力測定方法を提供する。 As a means for solving the above-mentioned problems, the present invention is a method for measuring the residual stress of an inspected object, wherein the inspected object or an inspected object made of the same material as the inspected object is subjected to an X-ray diffraction method. A conversion stress value that is a value of the stress of the specific part and has a correlation with the residual stress value by the residual stress value measuring step of measuring the residual stress value which is the value of the residual stress of a specific part and the sound elasticity method. The converted stress value is determined based on the converted stress value measuring step for measuring the above, the residual stress value measured in the residual stress value measuring step, and the converted stress value measured in the converted stress value measuring step. A calibration coefficient calculation step for calculating a calibration coefficient to be converted into a stress value, and each converted stress value obtained by measuring a plurality of parts of the inspected object by the sound elasticity method are retained based on the calibration coefficient. Provided is a method for measuring residual stress, which includes a calibration step of calibrating to a stress value.

本残留応力測定方法では、被検査体又は被試験体の特定の部位をX線回折法及び音弾性法の2つの方法で測定することにより、その部位の残留応力値及びそれと相関のある換算応力値が求まるので、これら残留応力値と換算応力値とに基づいて換算応力値を残留応力値に変換する校正係数が算出される。よって、X線回折法よりも短時間で計測可能な音弾性法によって被検査体の複数の部位を測定することにより、その測定で得られた各換算応力値を前記校正係数を用いることによって残留応力値に近似することが可能となる。したがって、本残留応力測定方法では、音弾性法によって被検査体の残留応力の絶対値を算出するのに必要な被検査体の各パラメータ(音速や音弾性定数)の事前測定をすることなく、X線回折法のみで被検査体の複数の部位を測定する場合よりも短時間で、かつ、X線回折法による測定と同程度の精度で被検査体の複数の部位の残留応力値を求めることができる。 In this residual stress measuring method, a specific part of the test object or the test object is measured by two methods, an X-ray diffraction method and a sound elastic method, and the residual stress value of the part and the converted stress correlating with the residual stress value are measured. Since the value is obtained, the calibration coefficient for converting the converted stress value into the residual stress value is calculated based on the residual stress value and the converted stress value. Therefore, by measuring a plurality of parts of the object to be inspected by the sound elasticity method that can be measured in a shorter time than the X-ray diffraction method, each converted stress value obtained by the measurement remains by using the calibration coefficient. It is possible to approximate the stress value. Therefore, in this residual stress measurement method, each parameter (sound velocity and sound elasticity constant) of the test object required to calculate the absolute value of the residual stress of the test object by the sound elasticity method is not measured in advance. Obtain the residual stress value of a plurality of parts of an inspected object in a shorter time than when measuring a plurality of parts of an inspected object only by the X-ray diffractometry and with the same accuracy as the measurement by the X-ray diffractometry. be able to.

この場合において、前記残留応力値測定工程及び前記換算応力値測定工程では、前記被検査体の前記特定の部位が測定されることが好ましい。 In this case, in the residual stress value measuring step and the converted stress value measuring step, it is preferable that the specific portion of the inspected object is measured.

このようにすれば、校正工程における測定対象である被検査体と同一の被検査体の測定結果に基づいて校正係数が求められるので、校正係数の精度が高まる。よって校正工程における校正の精度が高まる。 In this way, the calibration coefficient is obtained based on the measurement result of the same object to be inspected as the object to be measured in the calibration step, so that the accuracy of the calibration coefficient is improved. Therefore, the accuracy of calibration in the calibration process is improved.

また、記残留応力値測定工程では、前記残留応力値として、前記特定の部位について当該部位の表面から前記音弾性法で用いられる超音波が伝播する深さの範囲の複数の部位について前記X線回折法で測定された各残留応力値の平均値を測定することが好ましい。 Further, in the step of measuring the residual stress value, the X-ray is used as the residual stress value for a plurality of parts in the range of the depth range in which the ultrasonic waves used in the sound elasticity method propagate from the surface of the specific part. It is preferable to measure the average value of each residual stress value measured by the diffraction method.

このようにすれば、校正係数算出工程において用いられる残留応力値が換算応力値測定工程で用いられる超音波の伝播深さに対応する値となるので、校正係数算出工程において前記特定の部位の表層(音弾性法で用いられる超音波が伝播する深さよりも浅い部位)の残留応力値に基づいて校正係数が算出される場合に比べ、校正係数の精度が高まる。よって、校正工程における校正の精度が高まる。この方法は、被検査体の表面から音弾性法で用いられる超音波が伝播する深さの範囲において残留応力値に勾配がある場合に特に有効である。 In this way, the residual stress value used in the calibration coefficient calculation step becomes a value corresponding to the propagation depth of the ultrasonic waves used in the conversion stress value measurement step, so that the surface layer of the specific portion in the calibration coefficient calculation step The accuracy of the calibration coefficient is higher than that in the case where the calibration coefficient is calculated based on the residual stress value (the part shallower than the depth at which the ultrasonic waves propagate in the sound elasticity method). Therefore, the accuracy of calibration in the calibration process is improved. This method is particularly effective when there is a gradient in the residual stress value in the range of the depth at which the ultrasonic waves used in the sound elasticity method propagate from the surface of the object to be inspected.

また、前記換算応力値測定工程では、前記換算応力値として、互いに異なる周波数を有する複数の超音波を用いることにより前記特定の部位の異なる深さについて前記音弾性法で複数の値を測定することと、各測定値に基づいて前記特定の部位の深さと前記換算応力値との関係を示す応力値関数を求めることと、を行い、前記校正係数算出工程では、前記残留応力値と前記応力値関数において深さがゼロのときの換算応力値とに基づいて前記校正係数を算出することが好ましい。 Further, in the converted stress value measuring step, a plurality of values are measured by the sound elasticity method for different depths of the specific portion by using a plurality of ultrasonic waves having different frequencies as the converted stress values. And, based on each measured value, a stress value function indicating the relationship between the depth of the specific portion and the converted stress value is obtained, and in the calibration coefficient calculation step, the residual stress value and the stress value are performed. It is preferable to calculate the calibration coefficient based on the converted stress value when the depth is zero in the function.

この態様では、校正係数算出工程において前記応力値関数において深さがゼロのときの換算応力値と残留応力値とに基づいて校正係数が算出されることにより、前記特定の部位について音弾性法によって単一の周波数で測定された換算応力値と前記残留応力値とに基づいて校正係数が算出される場合、つまり、互いに異なる深さにおける各応力値に基づいて校正係数が算出される場合に比べ、校正係数の精度が高まる。したがって、校正工程における校正の精度が高まる。 In this embodiment, in the calibration coefficient calculation step, the calibration coefficient is calculated based on the converted stress value and the residual stress value when the depth is zero in the stress value function, so that the specific portion is subjected to the sound elasticity method. Compared to the case where the calibration coefficient is calculated based on the converted stress value measured at a single frequency and the residual stress value, that is, the case where the calibration coefficient is calculated based on each stress value at different depths. , The accuracy of the calibration coefficient is improved. Therefore, the accuracy of calibration in the calibration process is improved.

以上のように、本発明によれば、音弾性法によって被検査体の残留応力の絶対値を算出するのに必要な被検査体の各パラメータ(音速や音弾性定数)の事前測定をすることなく、比較的短時間で被検査体の残留応力の絶対値を測定することが可能な残留応力測定方法を提供することができる。 As described above, according to the present invention, each parameter (sound velocity and sound elasticity constant) of the test object required to calculate the absolute value of the residual stress of the test object by the sound elasticity method is measured in advance. It is possible to provide a residual stress measuring method capable of measuring the absolute value of the residual stress of the object to be inspected in a relatively short time.

本発明の第1実施形態の残留応力測定方法の残留応力値測定工程及び換算応力値測定工程を示す概略図である。It is a schematic diagram which shows the residual stress value measurement process and the conversion stress value measurement process of the residual stress value measurement method of 1st Embodiment of this invention. 上記残留応力測定方法の校正工程で測定する対象である被検査体とその測定点との関係を示す概略図である。It is a schematic diagram which shows the relationship between the body to be inspected which is the object of measurement in the calibration process of the said residual stress measurement method, and the measurement point. 本発明の第2実施形態の残留応力測定方法の残留応力値測定工程の概略を示す図である。It is a figure which shows the outline of the residual stress value measuring process of the residual stress measuring method of 2nd Embodiment of this invention. 本発明の第3実施形態の残留応力測定方法の換算応力値測定工程の概略を示す図である。It is a figure which shows the outline of the conversion stress value measurement process of the residual stress measurement method of 3rd Embodiment of this invention. 測定深さと応力値との関係を示すグラフである。It is a graph which shows the relationship between a measurement depth and a stress value.

以下、本発明の好ましい実施形態について、図面を参照しながら説明する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

(第1実施形態)
本発明の第1実施形態の残留応力測定方法について、図1及び図2を参照しながら説明する。本残留応力測定方法は、残留応力値測定工程と、換算応力値測定工程と、校正係数算出工程と、校正工程と、を含んでいる。
(First Embodiment)
The method for measuring residual stress according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2. This residual stress measuring method includes a residual stress value measuring step, a converted stress value measuring step, a calibration coefficient calculation step, and a calibration step.

残留応力値測定工程では、図1に示されるように、X線回折法によって、被検査体1の特定の部位の残留応力の値(絶対値)である残留応力値σが測定される。 In the residual stress value measuring step, as shown in FIG. 1, the residual stress value σ, which is the residual stress value (absolute value) of a specific portion of the inspected object 1, is measured by the X-ray diffraction method.

換算応力値測定工程では、図1に示されるように、音弾性法によって、前記被検査体1の特定の部位(残留応力値測定工程で測定した部位と同じ部位)の換算応力値σ′が測定される。換算応力値σ′は、残留応力値σと相関を有する応力の値である。具体的に、残留応力値σは、換算応力値σ′と後述する校正係数kとの積によって表される。なお、本実施形態の測定方法を適用せず、通常の音弾性法のみで測定する場合には、換算応力値σ′は、被検査体1に応力が印加される前の状態(無応力状態)における初期音速や、被検査体1の材料に起因する音弾性定数(印加する応力に応じた音速の変化の割合)に基づいて残留応力値σに変換されることが可能である。本実施形態の換算応力値測定工程では、被検査体1の表面ないしその近傍の領域(以下、「表面領域」と称する。)を伝播する表面波(表面SH波やレーリー波)によって換算応力値σ′が測定される。具体的に、この換算応力値σ′は、送信部10から送信された超音波が表面波として受信部20に伝播するまでの時間に基づいて算出される。なお、表面領域は、被検査体1の表面から表面波の約1〜2波長の深さに相当する領域を意味する。 In the converted stress value measuring step, as shown in FIG. 1, the converted stress value σ'of the specific part of the object 1 to be inspected (the same part as the part measured in the residual stress value measuring step) is obtained by the sound elasticity method. Be measured. The converted stress value σ'is a stress value having a correlation with the residual stress value σ. Specifically, the residual stress value σ is represented by the product of the converted stress value σ ′ and the calibration coefficient k described later. When the measurement method of the present embodiment is not applied and only the normal sound elasticity method is used for measurement, the converted stress value σ'is the state before stress is applied to the inspected object 1 (non-stress state). ), And the sound elasticity constant (rate of change in sound velocity according to the applied stress) caused by the material of the object 1 to be inspected, can be converted into the residual stress value σ. In the converted stress value measuring step of the present embodiment, the converted stress value is converted by a surface wave (surface SH wave or Rayleigh wave) propagating on the surface of the object 1 to be inspected or a region in the vicinity thereof (hereinafter, referred to as “surface region”). σ'is measured. Specifically, this converted stress value σ'is calculated based on the time until the ultrasonic wave transmitted from the transmitting unit 10 propagates as a surface wave to the receiving unit 20. The surface region means a region corresponding to a depth of about 1 to 2 wavelengths of a surface wave from the surface of the object 1 to be inspected.

校正係数算出工程では、残留応力値測定工程で測定された残留応力値σと換算応力値測定工程で測定された換算応力値σ′とに基づいて校正係数kを算出する。校正係数kは、換算応力値σ′を残留応力値σに変換する係数である。例えば、図2の測定点AにおいてX線回折法によって測定された残留応力値σと同測定点Aにおいて音弾性法により測定された換算応力値σ′とに基づいて、σ=k×σ′の関係式が得られる。 In the calibration coefficient calculation step, the calibration coefficient k is calculated based on the residual stress value σ measured in the residual stress value measuring step and the converted stress value σ ′ measured in the converted stress value measuring step. The calibration coefficient k is a coefficient for converting the converted stress value σ ′ into the residual stress value σ. For example, σ = k × σ ′ based on the residual stress value σ measured by the X-ray diffraction method at the measurement point A in FIG. 2 and the converted stress value σ ′ measured by the sound elasticity method at the same measurement point A. The relational expression of is obtained.

校正工程では、図2に示されるように、被検査体1の複数の(図2では5つの)部位A〜Eを前記音弾性法で測定するとともに、その測定で得られた各換算応力値σ′を校正係数kに基づいてそれぞれ残留応力値σに校正する。これにより、被検査体1の複数の部位A〜Eにおける残留応力値σが得られる。 In the calibration step, as shown in FIG. 2, a plurality of (five in FIG. 2) parts A to E of the object 1 to be inspected are measured by the sound elasticity method, and each converted stress value obtained by the measurement is measured. σ ′ is calibrated to the residual stress value σ based on the calibration coefficient k. As a result, the residual stress values σ at the plurality of parts A to E of the inspected body 1 can be obtained.

以上に説明したように、本実施形態の残留応力測定方法では、被検査体1の特定の部位をX線回折法及び音弾性法の2つの方法で測定することにより、その部位の残留応力値σ及びそれと相関のある換算応力値σ′が求まるので、これら残留応力値σと換算応力値σ′とに基づいて換算応力値σ′を残留応力値σに変換する校正係数kが算出される。よって、X線回折法よりも短時間で計測可能な音弾性法によって被検査体1の複数の部位A〜Eを測定することにより、その測定で得られた各換算応力値σ′を校正係数kを用いることによって残留応力値σに近似することが可能となる。したがって、本残留応力測定方法では、音弾性法によって被検査体1の残留応力の絶対値を算出するのに必要な被検査体1の事前測定をすることなく、X線回折法のみで被検査体1の複数の部位A〜Eを測定する場合よりも短時間で、かつ、X線回折法による測定と同程度の精度で被検査体1の複数の部位A〜Eの残留応力値σを求めることができる。 As described above, in the residual stress measuring method of the present embodiment, the residual stress value of the specific portion of the object 1 to be inspected is measured by two methods, the X-ray diffraction method and the sound elasticity method. Since σ and the converted stress value σ ′ that correlates with it are obtained, the calibration coefficient k that converts the converted stress value σ ′ into the residual stress value σ is calculated based on these residual stress value σ and the converted stress value σ ′. .. Therefore, by measuring a plurality of parts A to E of the inspected object 1 by the sound elasticity method that can be measured in a shorter time than the X-ray diffraction method, each converted stress value σ'obtained by the measurement is a calibration coefficient. By using k, it becomes possible to approximate the residual stress value σ. Therefore, in this residual stress measurement method, the inspected object 1 is inspected only by the X-ray diffraction method without performing the preliminary measurement of the inspected object 1 necessary for calculating the absolute value of the residual stress of the inspected object 1 by the sound elasticity method. The residual stress value σ of the plurality of parts A to E of the inspected body 1 can be measured in a shorter time than when measuring the plurality of parts A to E of the body 1 and with the same accuracy as the measurement by the X-ray diffraction method. Can be sought.

なお、残留応力値測定工程において、被検査体1の複数の部位(例えば、図2における測定点A及び測定点B)の残留応力値σの平均値が算出され、換算応力値測定工程において、被検査体1の前記複数の部位の換算応力値σ′の平均値が算出され、校正係数算出工程において、前記残留応力値σの平均値と前記換算応力値σ′の平均値とに基づいて校正係数kが算出されてもよい。 In the residual stress value measuring step, the average value of the residual stress value σ of a plurality of parts (for example, measurement point A and measurement point B in FIG. 2) of the object 1 to be inspected is calculated, and in the converted stress value measuring step, The average value of the converted stress values σ'of the plurality of parts of the inspected object 1 is calculated, and in the calibration coefficient calculation step, based on the average value of the residual stress value σ and the average value of the converted stress value σ'. The calibration coefficient k may be calculated.

また、被検査体1と同じ材料からなりかつ同じ応力状態にある被試験体をX線回折法及び音弾性法で測定することによって校正係数kが算出され、校正工程においてその校正係数kが用いられてもよい。つまり、残留応力値測定工程において、前記被試験体の特定の残留応力値σが算出され、換算応力値測定工程において、被試験体の前記特定の部位(残留応力値測定工程で測定した部位と同じ部位)の換算応力値σ′が算出され、校正係数算出工程において、前記残留応力値σと前記換算応力値σ′とに基づいて校正係数kが算出され、校正工程において、被検査体1の複数の部位A〜Eが音弾性法で測定されるとともに、その測定で得られた各換算応力値σ′が校正係数kに基づいてそれぞれ残留応力値σに校正されてもよい。このことは、以下の第2実施形態及び第3実施形態においても同様である。 Further, the calibration coefficient k is calculated by measuring the test object made of the same material as the test object 1 and in the same stress state by the X-ray diffraction method and the sound elasticity method, and the calibration coefficient k is used in the calibration process. May be done. That is, in the residual stress value measuring step, the specific residual stress value σ of the test piece is calculated, and in the converted stress value measuring step, the specific part of the test piece (the part measured in the residual stress value measuring step). The converted stress value σ'of the same part) is calculated, and the calibration coefficient k is calculated based on the residual stress value σ and the converted stress value σ'in the calibration coefficient calculation step. A plurality of parts A to E may be measured by the sound elasticity method, and each converted stress value σ ′ obtained by the measurement may be calibrated to a residual stress value σ based on the calibration coefficient k. This also applies to the following second and third embodiments.

(第2実施形態)
次に、本発明の第2実施形態の残留応力測定方法について説明する。なお、第2実施形態では、第1実施形態と異なる部分についてのみ説明を行い、第1実施形態と同じ工程、作用及び効果の説明は省略する。
(Second Embodiment)
Next, the method for measuring the residual stress according to the second embodiment of the present invention will be described. In the second embodiment, only the parts different from the first embodiment will be described, and the description of the same steps, actions and effects as in the first embodiment will be omitted.

図3に示されるように、本実施形態では、残留応力値測定工程において、残留応力値σとして、被検査体1の特定の部位について当該部位の表面から音弾性法で用いられる超音波(表面波)が伝播する深さ(本実施形態では表面波の1波長分の深さ)の範囲の複数の部位についてX線回折法で測定された各残留応力値σの平均値σaveを測定する。 As shown in FIG. 3, in the present embodiment, in the residual stress value measuring step, as the residual stress value σ, ultrasonic waves (surface) used by the sound elastic method from the surface of the specific portion of the inspected object 1 from the surface of the portion. The average value σave of each residual stress value σ measured by the X-ray diffractometry is measured for a plurality of parts in the range of the propagation depth (in this embodiment, the depth of one wavelength of the surface wave).

具体的には、図3に示されるように、まずは、X線回折法によって被検査体1の表面の残留応力値σを測定する。その後、被検査体1の表面から第1深さd1分だけ電解研磨によって被検査体1を研磨する。そして、再びX線回折法によって新出面の残留応力値σを測定する。この操作を複数回繰り返すことにより、音弾性法で用いられる超音波(表面波)が伝播する深さの範囲の複数の部位についてX線回折法で測定された各残留応力値σの平均値σaveを算出する。 Specifically, as shown in FIG. 3, first, the residual stress value σ on the surface of the object 1 to be inspected is measured by the X-ray diffraction method. After that, the object 1 to be inspected is polished by electrolytic polishing for a first depth of d1 from the surface of the object 1 to be inspected. Then, the residual stress value σ of the new surface is measured again by the X-ray diffraction method. By repeating this operation multiple times, the average value σave of each residual stress value σ measured by the X-ray diffraction method for a plurality of parts in the range of the depth at which ultrasonic waves (surface waves) used in the sound elasticity method propagate. Is calculated.

そして、校正係数算出工程では、その平均値σaveと換算応力値測定工程において音弾性法によって測定された換算応力値σ′とに基づいて校正係数kを算出する。 Then, in the calibration coefficient calculation step, the calibration coefficient k is calculated based on the average value σave and the converted stress value σ ′ measured by the sound elasticity method in the converted stress value measuring step.

以上のように、本実施形態では、校正係数算出工程において前記平均値σaveが用いられる。すなわち、校正係数算出工程において用いられる残留応力値が換算応力値測定工程で用いられる超音波の伝播深さに対応する値となる。このため、校正係数算出工程において前記特定の部位の表層(音弾性法で用いられる超音波が伝播する深さよりも浅い部位)の残留応力値σに基づいて校正係数kが算出される場合に比べ、校正係数kの精度が高まる。よって、校正工程における校正の精度が高まる。本実施形態の測定方法は、被検査体1の表面から音弾性法で用いられる超音波が伝播する深さの範囲において残留応力値に勾配がある場合に特に有効である。 As described above, in the present embodiment, the average value σave is used in the calibration coefficient calculation step. That is, the residual stress value used in the calibration coefficient calculation step is a value corresponding to the propagation depth of the ultrasonic wave used in the converted stress value measurement step. Therefore, compared to the case where the calibration coefficient k is calculated based on the residual stress value σ of the surface layer of the specific part (the part shallower than the depth at which the ultrasonic waves propagate in the sound elasticity method) in the calibration coefficient calculation step. , The accuracy of the calibration coefficient k is improved. Therefore, the accuracy of calibration in the calibration process is improved. The measuring method of the present embodiment is particularly effective when there is a gradient in the residual stress value in the range of the depth at which the ultrasonic waves used in the sound elasticity method propagate from the surface of the object 1 to be inspected.

(第3実施形態)
次に、本発明の第3実施形態の残留応力測定方法について説明する。なお、第3実施形態においても、第1実施形態と異なる部分についてのみ説明を行い、第1実施形態と同じ工程、作用及び効果の説明は省略する。
(Third Embodiment)
Next, the method for measuring the residual stress according to the third embodiment of the present invention will be described. Also in the third embodiment, only the parts different from those in the first embodiment will be described, and the description of the same steps, actions and effects as in the first embodiment will be omitted.

図4に示されるように、本実施形態では、換算応力値測定工程において、換算応力値σ′として、互いに異なる周波数を有する複数の超音波(表面波)を用いることにより前記特定の部位の異なる深さについて音弾性法で複数の換算応力値σ′を測定することと、各測定値に基づいて前記特定の部位の深さと換算応力値σ′との関係を示す応力値関数F(図5を参照)を求めることと、を行う。なお、周波数が低い程、表面波は被検査体1の表面から深い範囲を伝播するので、互いに異なる複数の周波数の表面波によって前記特定の部位を測定することにより、被検査体1の表層近傍における応力勾配を把握すること(前記応力値関数Fを求めること)ができる。具体的には、前記特定の部位に対し、送信部10から第1周波数の表面波を送信し、これを受信部20で受信する。この伝播時間に基づいて換算応力値σ′1を測定する。次に、第1周波数よりも低い又は高い周波数を有する表面波を送信部10から送信し、これを受信部20で受信する。この伝播時間に基づいて換算応力値σ′2を測定する。そして、各換算応力値σ′に基づいて前記応力値関数Fを算出する。 As shown in FIG. 4, in the present embodiment, in the converted stress value measuring step, the specific parts are different by using a plurality of ultrasonic waves (surface waves) having different frequencies as the converted stress value σ'. A stress value function F (FIG. 5) showing the relationship between the depth of the specific part and the converted stress value σ'by measuring a plurality of converted stress values σ'for the depth by the sound elasticity method and based on each measured value. See) and to do. The lower the frequency, the deeper the surface wave propagates from the surface of the inspected object 1. Therefore, by measuring the specific part by the surface waves of a plurality of different frequencies, the vicinity of the surface layer of the inspected object 1 It is possible to grasp the stress gradient in (the stress value function F is obtained). Specifically, the transmission unit 10 transmits a surface wave of the first frequency to the specific portion, and the reception unit 20 receives the surface wave. The converted stress value σ'1 is measured based on this propagation time. Next, a surface wave having a frequency lower or higher than the first frequency is transmitted from the transmitting unit 10, and this is received by the receiving unit 20. The converted stress value σ'2 is measured based on this propagation time. Then, the stress value function F is calculated based on each converted stress value σ'.

続いて、校正係数算出工程では、前記応力値関数Fにおいて深さがゼロのときにおける換算応力値σ′と残留応力値測定工程においてX線回折法によって測定された残留応力値σとに基づいて校正係数kを算出する。 Subsequently, in the calibration coefficient calculation step, the converted stress value σ ′ when the depth is zero in the stress value function F and the residual stress value σ measured by the X-ray diffraction method in the residual stress value measurement step are used. Calculate the calibration coefficient k.

ここで、X線回折法では、被検査体1の極表層の部位(実質的に深さがゼロと評価可能な部位)の残留応力値が測定される。よって、前記応力値関数Fにおいて深さがゼロのときの換算応力値σ′と残留応力値σとに基づいて校正係数kが算出されることにより、前記特定の部位について音弾性法によって単一の周波数で測定された換算応力値σ′と前記残留応力値σとに基づいて校正係数kが算出される場合、つまり、互いに異なる深さにおける各応力値に基づいて校正係数kが算出される場合に比べ、校正係数kの精度が高まる。したがって、校正工程における校正の精度が高まる。 Here, in the X-ray diffraction method, the residual stress value of the portion of the polar surface layer of the object 1 to be inspected (the portion whose depth can be evaluated as substantially zero) is measured. Therefore, in the stress value function F, the calibration coefficient k is calculated based on the converted stress value σ ′ when the depth is zero and the residual stress value σ, so that the specific portion is single by the sound elasticity method. When the calibration coefficient k is calculated based on the converted stress value σ ′ measured at the frequency of, and the residual stress value σ, that is, the calibration coefficient k is calculated based on the stress values at different depths. Compared with the case, the accuracy of the calibration coefficient k is improved. Therefore, the accuracy of calibration in the calibration process is improved.

なお、換算応力値測定工程では、3以上の互いに異なる周波数の表面波によって測定された複数の換算応力値σ′に基づいて前記応力値関数Fが求められてもよい。このようにすれば、より校正係数kの精度が高まる。 In the converted stress value measuring step, the stress value function F may be obtained based on a plurality of converted stress values σ'measured by three or more surface waves having different frequencies. By doing so, the accuracy of the calibration coefficient k is further improved.

次に、第2実施形態の残留応力値測定工程について、図3を参照しながら説明する。この実施例では、被検査体1として鋼材が用いられ、また、換算応力値測定工程では、5MHzの周波数を有する超音波が用いられた。音弾性法で用いられる超音波(表面波)の被検査体1の伝播深さは、被検査体1の表面から約1波長分の範囲である。この実施例では、被検査体1として鋼材が用いられるため、表面波の伝播範囲は、被検査体1の表面から約0.6mmの深さの範囲となる。 Next, the residual stress value measuring step of the second embodiment will be described with reference to FIG. In this embodiment, a steel material was used as the object 1 to be inspected, and an ultrasonic wave having a frequency of 5 MHz was used in the conversion stress value measuring step. The propagation depth of the ultrasonic wave (surface wave) used in the sound elasticity method of the inspected object 1 is in the range of about one wavelength from the surface of the inspected object 1. In this embodiment, since the steel material is used as the inspected object 1, the propagation range of the surface wave is in the range of about 0.6 mm from the surface of the inspected object 1.

この実施例の残留応力値測定工程では、まず、X線回折法によって被検査体1の特定の部位の表面の残留応力値σが測定された。この測定結果は、−300MPaであった。なお、この部位には圧縮応力が印加されているため、残留応力値はマイナスの値となった。 In the residual stress value measuring step of this example, first, the residual stress value σ of the surface of the specific portion of the inspected object 1 was measured by the X-ray diffraction method. The result of this measurement was −300 MPa. Since compressive stress was applied to this part, the residual stress value became a negative value.

次に、被検査体1の表面から第1深さd1(この実施例では150μm)だけ電解研磨によって被検査体1が研磨された。そして、その新出面の残留応力値σが測定された。この測定結果は、−250MPaであった。同様に、被検査体1の表面から第2深さd2(この実施例では300μm)の部位における残留応力値は、−200MPaであり、被検査体1の表面から第3深さd3(この実施例では450μm)の部位における残留応力値は、−150MPaであり、被検査体1の表面から第4深さd4(この実施例では600μm)の部位における残留応力値は、−100MPaであった。これより、被検査体1の前記特定の部位における残留応力値の平均値σaveは、−200MPaとなった。なお、測定点の位置や数は、上記の例に限られない。 Next, the object 1 to be inspected was polished by electrolytic polishing to a depth d1 (150 μm in this example) from the surface of the object 1 to be inspected. Then, the residual stress value σ of the new surface was measured. The result of this measurement was -250 MPa. Similarly, the residual stress value at the site of the second depth d2 (300 μm in this example) from the surface of the inspected object 1 is −200 MPa, and the third depth d3 from the surface of the inspected object 1 (this implementation). In the example, the residual stress value at the site of 450 μm) was −150 MPa, and the residual stress value at the site at the fourth depth d4 (600 μm in this example) from the surface of the inspected object 1 was −100 MPa. From this, the average value σave of the residual stress value at the specific portion of the inspected object 1 was −200 MPa. The position and number of measurement points are not limited to the above example.

以上より、被検査体1の特定の部位の残留応力値σとして表面波が伝播する深さの範囲の平均値σaveが求められることにより、前記特定の部位の表面の残留応力値σに基づいて校正係数kが算出される場合に比べ、校正係数kの精度が高まることが確認された。 From the above, the average value σave of the range of the depth at which the surface wave propagates is obtained as the residual stress value σ of the specific part of the object 1 to be inspected, and based on the residual stress value σ of the surface of the specific part. It was confirmed that the accuracy of the calibration coefficient k is higher than that when the calibration coefficient k is calculated.

続いて、第3実施形態の換算応力値測定工程について、図4及び図5を参照しながら説明する。この実施例においても、被検査体1として鋼材が用いられた。 Subsequently, the converted stress value measuring step of the third embodiment will be described with reference to FIGS. 4 and 5. Also in this example, a steel material was used as the inspected body 1.

この実施例の換算応力値測定工程では、5MHzの周波数を有する超音波(表面波)と2MHzの周波数を有する超音波(表面波)とによって前記特定の部位の換算応力値σ′が測定された。5MHzの周波数を有する超音波(表面波)による換算応力値σ′の測定値は、被試験体1の表面からの深さが約0.6mmの位置の値であり、−500MPaであった。2MHzの周波数を有する超音波(表面波)による換算応力値σ′の測定値は、被試験体1の表面からの深さが約1.5mmの位置の値であり、−400MPaであった。これより、前記応力値関数Fが求められた。 In the converted stress value measuring step of this embodiment, the converted stress value σ'of the specific part was measured by ultrasonic waves (surface waves) having a frequency of 5 MHz and ultrasonic waves (surface waves) having a frequency of 2 MHz. .. The measured value of the converted stress value σ'by an ultrasonic wave (surface wave) having a frequency of 5 MHz was a value at a position where the depth from the surface of the test object 1 was about 0.6 mm, and was −500 MPa. The measured value of the converted stress value σ'by an ultrasonic wave (surface wave) having a frequency of 2 MHz was a value at a position where the depth from the surface of the test object 1 was about 1.5 mm, and was −400 MPa. From this, the stress value function F was obtained.

次に、校正係数算出工程では、前記応力値関数Fにおいて深さがゼロのときの換算応力値σ′(この実施例では約−567MPa)と、残留応力値測定工程で測定された残留応力値σ(この実施例では−700MPa)と、に基づいて校正係数kが算出された。 Next, in the calibration coefficient calculation step, the converted stress value σ'(about −567 MPa in this example) when the depth is zero in the stress value function F and the residual stress value measured in the residual stress value measurement step. The calibration coefficient k was calculated based on σ (-700 MPa in this example).

以上より、応力値関数Fにおいて深さがゼロのときの換算応力値σ′と残留応力値σとに基づいて校正係数kが算出されることにより、前記特定の部位について音弾性法によって単一の周波数で測定された換算応力値σ′(−400MPaや−500MPa等)と前記残留応力値σ(−700MPa)とに基づいて校正係数kが算出される場合に比べ、校正係数kの精度が高まることが確認された。 From the above, the calibration coefficient k is calculated based on the converted stress value σ ′ and the residual stress value σ when the depth is zero in the stress value function F, so that the specific portion is single by the sound elasticity method. The accuracy of the calibration coefficient k is higher than that when the calibration coefficient k is calculated based on the converted stress value σ'(-400 MPa, -500 MPa, etc.) and the residual stress value σ (-700 MPa) measured at the frequency of. It was confirmed that it would increase.

なお、今回開示された実施形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく特許請求の範囲によって示され、さらに特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれる。 It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. The scope of the present invention is shown by the scope of claims rather than the description of the above-described embodiment, and further includes all modifications within the meaning and scope equivalent to the scope of claims.

例えば、換算応力値測定工程では、換算応力値σ′として、X線回折法で測定された残留応力値σと相関を有する伝播時間比が測定されてもよい。伝播時間比は、表面SH波が送信部10から受信部20まで伝播する時間のレーリー波が送信部10から受信部20まで伝播する時間に対する割合を意味する。 For example, in the converted stress value measuring step, the propagation time ratio having a correlation with the residual stress value σ measured by the X-ray diffraction method may be measured as the converted stress value σ'. The propagation time ratio means the ratio of the time for the surface SH wave to propagate from the transmitting unit 10 to the receiving unit 20 to the time for the Rayleigh wave to propagate from the transmitting unit 10 to the receiving unit 20.

1 被検査体
10 送信部
20 受信部
1 Inspected object 10 Transmitter 20 Receiver

Claims (3)

被検査体の残留応力を測定する方法であって、
X線回折法によって、前記被検査体又は前記被検査体と同材料からなる被試験体の特定の部位の残留応力の値である残留応力値を測定する残留応力値測定工程と、
音弾性法によって、前記特定の部位の応力の値であって前記残留応力値と相関を有する換算応力値を測定する換算応力値測定工程と、
前記残留応力値測定工程で測定された前記残留応力値と前記換算応力値測定工程で測定された前記換算応力値とに基づいて前記換算応力値を前記残留応力値に変換する校正係数を算出する校正係数算出工程と、
前記被検査体の複数の部位を前記音弾性法で測定することにより得られた各換算応力値を前記校正係数に基づいてそれぞれ残留応力値に校正する校正工程と、を含み、
前記残留応力値測定工程では、前記残留応力値として、前記特定の部位について当該部位の表面から前記音弾性法で用いられる超音波が伝播する深さの範囲の複数の部位について前記X線回折法で測定された各残留応力値の平均値を測定する、残留応力測定方法。
It is a method of measuring the residual stress of the object to be inspected.
A residual stress value measuring step of measuring a residual stress value which is a residual stress value of a specific part of the test object or a test body made of the same material as the test object by an X-ray diffraction method.
A conversion stress value measurement step of measuring a conversion stress value which is a stress value of the specific part and has a correlation with the residual stress value by a sound elasticity method.
A calibration coefficient for converting the converted stress value into the residual stress value is calculated based on the residual stress value measured in the residual stress value measuring step and the converted stress value measured in the converted stress value measuring step. Calibration coefficient calculation process and
It includes a calibration step of calibrating each converted stress value obtained by measuring a plurality of parts of the object to be inspected by the sound elasticity method to a residual stress value based on the calibration coefficient.
In the step of measuring the residual stress value, as the residual stress value, the X-ray diffraction method is performed on a plurality of parts in a depth range in which the ultrasonic waves used in the sound elasticity method propagate from the surface of the specific part. A method for measuring residual stress, which measures the average value of each residual stress value measured in.
被検査体の残留応力を測定する方法であって
X線回折法によって、前記被検査体又は前記被検査体と同材料からなる被試験体の特定の部位の残留応力の値である残留応力値を測定する残留応力値測定工程と
音弾性法によって、前記特定の部位の応力の値であって前記残留応力値と相関を有する換算応力値を測定する換算応力値測定工程と
前記残留応力値測定工程で測定された前記残留応力値と前記換算応力値測定工程で測定された前記換算応力値とに基づいて前記換算応力値を前記残留応力値に変換する校正係数を算出する校正係数算出工程と
前記被検査体の複数の部位を前記音弾性法で測定することにより得られた各換算応力値を前記校正係数に基づいてそれぞれ残留応力値に校正する校正工程と、を含み
前記換算応力値測定工程では、前記換算応力値として、互いに異なる周波数を有する複数の超音波を用いることにより前記特定の部位の異なる深さについて前記音弾性法で複数の値を測定することと、各測定値に基づいて前記特定の部位の深さと前記換算応力値との関係を示す応力値関数を求めることと、を行い
前記校正係数算出工程では、前記残留応力値と前記応力値関数において深さがゼロのときの換算応力値とに基づいて前記校正係数を算出する、残留応力測定方法。
It is a method of measuring the residual stress of the object to be inspected .
A residual stress value measuring step of measuring a residual stress value which is a residual stress value of a specific part of the test object or a test body made of the same material as the test object by an X-ray diffraction method .
A conversion stress value measurement step of measuring a conversion stress value which is a stress value of the specific part and has a correlation with the residual stress value by a sound elasticity method .
A calibration coefficient for converting the converted stress value into the residual stress value is calculated based on the residual stress value measured in the residual stress value measuring step and the converted stress value measured in the converted stress value measuring step. Calibration coefficient calculation process and
It includes a calibration step of calibrating each converted stress value obtained by measuring a plurality of parts of the object to be inspected by the sound elasticity method to a residual stress value based on the calibration coefficient .
In the converted stress value measuring step, a plurality of values are measured by the sound elasticity method for different depths of the specific portion by using a plurality of ultrasonic waves having different frequencies as the converted stress values. Based on each measured value, the stress value function indicating the relationship between the depth of the specific part and the converted stress value is obtained, and
In the calibration coefficient calculation step, a residual stress measuring method for calculating the calibration coefficient based on the residual stress value and the converted stress value when the depth is zero in the stress value function .
請求項1又は2に記載の残留応力測定方法において、
前記残留応力値測定工程及び前記換算応力値測定工程では、前記被検査体の前記特定の部位が測定される、残留応力測定方法。
In the residual stress measuring method according to claim 1 or 2.
Wherein in the residual stress measuring step and the conversion stress value measuring step, the Ru is measured the specific site of the test subject, the residual stress measuring method.
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