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JP6806448B2 - Pressure sensors with membranes used on the pressure chamber side, and the use of such pressure sensors - Google Patents
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JP6806448B2 - Pressure sensors with membranes used on the pressure chamber side, and the use of such pressure sensors - Google Patents

Pressure sensors with membranes used on the pressure chamber side, and the use of such pressure sensors Download PDF

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JP6806448B2
JP6806448B2 JP2016030181A JP2016030181A JP6806448B2 JP 6806448 B2 JP6806448 B2 JP 6806448B2 JP 2016030181 A JP2016030181 A JP 2016030181A JP 2016030181 A JP2016030181 A JP 2016030181A JP 6806448 B2 JP6806448 B2 JP 6806448B2
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JP2016153790A (en
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ブルナー シモン
ブルナー シモン
ギガー マルティン
ギガー マルティン
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キストラー ホールディング アクチエンゲゼルシャフト
キストラー ホールディング アクチエンゲゼルシャフト
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M15/00Testing of engines
    • G01M15/04Testing internal-combustion engines
    • G01M15/08Testing internal-combustion engines by monitoring pressure in cylinders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24Housings ; Casings for instruments
    • G01D11/245Housings for sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/18Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electromagnetism (AREA)

Description

本発明は、圧力室内、より詳細には内燃機関の燃焼室内の圧力を測定するために圧力室側で用いられる圧力センサの膜、及びそのような圧力センサの使用に関する。 The present invention relates to a film of a pressure sensor used on the pressure chamber side to measure pressure in a pressure chamber, more specifically in a combustion chamber of an internal combustion engine, and the use of such a pressure sensor.

圧力室内、より詳細には内燃機関の燃焼室内の圧力を測定するための圧力センサは、測定要素が配置される中空円筒形のセンサ・ハウジングを含むのが典型的である。圧力室すなわち燃焼室側で、燃焼室をセンサの内部空間から離隔する耐熱性で可撓性の膜によって、センサ・ハウジングは封止される。この膜は、燃焼室内に広がる圧力を直接的又は間接的に測定要素に伝達する。 A pressure sensor for measuring the pressure in the pressure chamber, or more specifically in the combustion chamber of an internal combustion engine, typically includes a hollow cylindrical sensor housing in which the measuring elements are located. On the pressure chamber or combustion chamber side, the sensor housing is sealed by a heat resistant, flexible membrane that separates the combustion chamber from the interior space of the sensor. This membrane directly or indirectly transfers the pressure spreading in the combustion chamber to the measuring element.

高温且つ急速な温度変動を伴う燃焼室すなわち圧力室用のすべての周知の圧力センサの場合に生じる1つの問題は、いわゆる熱衝撃である。圧力室内の温度変化によって引き起こされる、センサ上の、より詳細には膜における熱膨張及び機械的ストレスは、たとえば膜変形に起因する様々な規模の測定誤差をもたらす可能性があり、これは、計算上困難を伴ってのみ訂正され得る。熱衝撃に対して最適化されている周知の膜は、薄肉で平らな設計の、それゆえに限られた耐用年数しか有しないものである。より厚い実施例は膜の耐用年数を向上させることができるが、これはより大きな剛性を生じ、その結果、より深いセンサ感度をもたらす。同時に、熱衝撃の点から見た場合に、周知の膜のより厚い設計はセンサのより好ましくない挙動をもたらす。 One problem that arises in the case of all well-known pressure sensors for combustion chambers or pressure chambers with high temperatures and rapid temperature fluctuations is the so-called thermal shock. Thermal expansion and mechanical stress on the sensor, more specifically in the membrane, caused by temperature changes in the pressure chamber can result in measurement errors of various scales, for example due to membrane deformation, which is calculated. Can only be corrected with difficulty. Well-known films optimized for thermal shock are those with a thin, flat design and therefore have a limited service life. Thicker examples can improve the service life of the membrane, but this results in greater rigidity, resulting in deeper sensor sensitivity. At the same time, in terms of thermal shock, the thicker design of the well-known film results in less favorable behavior of the sensor.

米国特許出願公開第2004/0231425号では、形状の異なる膜を備える圧力センサについて記述される。材料の膨張に起因する測定誤差を低減するために、プランジャと固定縁部の間の膜に折り返されたセグメントすなわち波形のセグメントを設けることが提案される。このセグメントが上向きの1つの領域と下向きの1つの領域とを有する点で、熱膨張によるプランジャの上下運動は減少することが意図される。これらの膜の場合の材料は、通常は均一の厚さのものであるか、又はプランジャの領域の中央で最大値である。 U.S. Patent Application Publication No. 2004/0231425 describes a pressure sensor with films of different shapes. In order to reduce the measurement error due to the expansion of the material, it is proposed to provide a folded segment or corrugated segment in the membrane between the plunger and the fixed edge. It is intended that the vertical movement of the plunger due to thermal expansion is reduced in that this segment has one upward region and one downward region. The material for these membranes is usually of uniform thickness or is maximal in the center of the area of the plunger.

WO2010/040239から、外縁部と内側プランジャとを備える圧力センサ用の膜は周知である。外縁部と内側プランジャとは弾性セグメントによって連結される。米国特許出願公開第2004/0231425号と同様に、この弾性セグメントは上向きの領域と下向きの領域とを有する。熱膨張の結果としての測定誤差を低減するために、中央部に最も薄い場所を有し、そこから材料厚が両側に徐々に増すというような方法で、弾性セグメントの材料厚を変えることがさらに提案された。このことは、熱膨張をより良好に相殺することができる可撓性の膜をもたらす。しかしながら、次第に薄くなる膜によって、その強度は弱まり、そのため耐用年数が短縮することが欠点である。 From WO2010 / 04239, membranes for pressure sensors with an outer edge and an inner plunger are well known. The outer edge and the inner plunger are connected by an elastic segment. Similar to US Patent Application Publication No. 2004/0231425, this elastic segment has an upward region and a downward region. In order to reduce the measurement error as a result of thermal expansion, it is possible to further change the material thickness of the elastic segment by having the thinnest part in the center and gradually increasing the material thickness from there to both sides. was suggested. This results in a flexible film that can better offset the thermal expansion. However, the disadvantage is that the gradually thinner film weakens its strength and thus shortens its useful life.

米国特許出願公開第2004/0231425号U.S. Patent Application Publication No. 2004/0231425 WO2010/040239WO2010 / 04239

本発明の目的は、大きな圧力及び温度変動によって圧力室内で高度のストレスがかかっている間、圧力センサの測定精度/熱衝撃反応及び耐用年数を最適化することである。 An object of the present invention is to optimize the measurement accuracy / thermal shock response and service life of a pressure sensor while a high degree of stress is applied in the pressure chamber due to large pressure and temperature fluctuations.

この目的は、請求項1の特徴を備える圧力センサによって達成される。圧力室内、より詳細には内燃機関の燃焼室内の圧力を測定するための圧力センサは、縦軸及び内部空間を備えるセンサ・ハウジングと、このセンサ・ハウジングの内部空間に配置される測定要素と、回転対称的に設計される膜とを含む。この膜は周縁部を有し、これを介して圧力室側のセンサ・ハウジングの端部に連結、より詳細には溶着され、圧力室側でセンサ・ハウジングの内部を封止する。膜はさらに、測定要素と相互作用する中央プランジャと、可撓性の環状膜とを備える。この環状膜セグメントは、プランジャを膜の周縁部に連結する。断面では、環状膜セグメントは、圧力室側で、一定の材料厚の凸状の円弧として設計される。この凸状の円形の膜は、圧力が弧状構造の堅固性を持続させるので、別の形状の膜よりも外部圧力に対してはるかによく抵抗することができる。もし弧が凹状であれば、この利点は失われるであろう。 This object is achieved by a pressure sensor having the characteristics of claim 1. The pressure sensor for measuring the pressure in the pressure chamber, more specifically in the combustion chamber of the internal combustion engine, includes a sensor housing having a vertical axis and an internal space, and a measuring element arranged in the internal space of the sensor housing. Includes membranes designed to be rotationally symmetric. This film has a peripheral edge, through which it is connected to the end of the sensor housing on the pressure chamber side, more specifically welded, and seals the inside of the sensor housing on the pressure chamber side. The membrane further comprises a central plunger that interacts with the measurement element and a flexible annular membrane. This annular membrane segment connects the plunger to the peripheral edge of the membrane. In cross section, the annular membrane segment is designed as a convex arc of constant material thickness on the pressure chamber side. This convex circular film can resist external pressure much better than other shaped films because the pressure maintains the rigidity of the arcuate structure. If the arc is concave, this advantage will be lost.

圧力室側で、均一の厚さの円弧の径方向内側端点が、円弧の外側端点に比べて縦軸に沿って内部空間の方向に後退して配置されるのが好ましい。このようにして、Aの軸方向に、円弧の最前部が膜のリム領域よりもさらに突き出ることなく円弧が延長することが可能である。 On the pressure chamber side, it is preferable that the radial inner end points of the arc having a uniform thickness are arranged so as to recede in the direction of the internal space along the vertical axis as compared with the outer end points of the arc. In this way, it is possible to extend the arc in the axial direction of A without the foremost portion of the arc protruding further than the rim region of the film.

実際には、回転対称のため、端点はいずれも円形の線上にある。 In reality, due to rotational symmetry, all endpoints are on a circular line.

均一な厚さの円弧として設計される可撓性の膜セグメントを備える膜は、直線部を備える膜と比べてより良い力配分を可能にする。円弧におけるこの均等な力配分は、膜内部のストレスを減少させ、このことは結果として膜の強度に良い影響を及ぼし、それゆえその耐用年数に良い影響を及ぼす。円弧の径方向内側端点/プランジャの圧力室側の表面が後退していると、円弧はより大きな角度(中間点の角度)上に形成され得、このことは円弧の効果をさらに増大させる。後退していることは、所与の円弧の角度(中間点の角度)、たとえば90度の角度、及び円弧の所与の半径において、内側端点が外側端点と同一場所にあるかのように、膜のより小さな外半径を可能にするという利点も有する。シミュレーションは、内側端点が後退していることによって熱衝撃反応も改善され得、且つ、圧電又は圧電抵抗の測定要素であるのが好ましい測定要素の測定誤差が低減され得るということを示している。 Membranes with flexible membrane segments designed as arcs of uniform thickness allow for better force distribution compared to membranes with straight sections. This even distribution of force in the arc reduces stress within the membrane, which in turn has a positive effect on the strength of the membrane and therefore its useful life. If the radial inner endpoint of the arc / the surface of the plunger on the pressure chamber side is retracted, the arc can be formed at a larger angle (the angle of the midpoint), which further enhances the effect of the arc. Retreating means that at a given arc angle (intermediate angle), eg, a 90 degree angle, and a given radius of the arc, the inner endpoint is co-located with the outer endpoint. It also has the advantage of allowing a smaller outer radius of the membrane. The simulation shows that the thermal shock response can be improved by the receding inner endpoint, and the measurement error of the measurement element, which is preferably the measurement element of piezoelectric or piezoelectric resistance, can be reduced.

膜の周縁部は、圧力室側へ、縦軸の方向に円弧の頂点を越えて突出し得るのが好ましい。頂点は、縦方向に見て、圧力室に対して最も突出する円弧の点である。極端な場合には頂点は外部端点と一致し得るが、通例としては2つの端点の間に、但し外側端点により近い所に配置される。圧力室に対応する、周縁部の圧力室側の表面に対して円弧の頂点が縦方向に後退していると、膜の残りの部分に対して隆起する縁部が形成される。圧力センサが組み立てられた状態で、円弧は圧力室の内側壁を越えて突出せず、それゆえ厳しい環境に対して、より詳細には燃焼室においてより保護される。周縁部の表面はまた、縦軸に対して垂直であり得る。シミュレーションは、円弧に対して隆起する周縁によって膜の熱衝撃反応が最適化され得るということも示している。 It is preferable that the peripheral edge of the film can project toward the pressure chamber side in the direction of the vertical axis beyond the apex of the arc. The apex is the point of the arc that protrudes most with respect to the pressure chamber when viewed in the vertical direction. In extreme cases, the vertices can coincide with the outer endpoints, but are typically placed between the two endpoints, but closer to the outer endpoints. When the apex of the arc recedes longitudinally with respect to the pressure chamber side surface of the peripheral edge corresponding to the pressure chamber, a raised edge is formed with respect to the rest of the film. With the pressure sensor assembled, the arc does not protrude beyond the inner wall of the pressure chamber and is therefore more protected in the combustion chamber against harsh environments. The peripheral surface can also be perpendicular to the vertical axis. Simulations also show that the thermal shock response of the film can be optimized by the raised edges with respect to the arc.

頂点又は頂点の反対側において、周縁部の表面は縦軸に沿って内部空間の方向にずらして配置され得る。これらの場合、組み立てられた状態で、膜が圧力室の壁に対して後退して配置されるように、圧力センサは、センサ・ハウジングを燃焼室の壁から封止し、且つ圧力室側で圧力センサの縦軸の方向に円弧の頂点を越えて突出する封止コーン又は保護スリーブを有するのが好ましい。この封止コーン又は保護スリーブはさらに、圧力センサの残りの部分と比較して隆起する周囲縁を形成する。 On the vertices or on the opposite side of the vertices, the peripheral surface may be offset along the vertical axis in the direction of the interior space. In these cases, the pressure sensor seals the sensor housing from the wall of the combustion chamber and on the pressure chamber side so that the membrane is placed retracted relative to the wall of the pressure chamber in the assembled state. It is preferred to have a sealing cone or protective sleeve that projects beyond the apex of the arc in the direction of the vertical axis of the pressure sensor. The sealing cone or protective sleeve further forms a raised peripheral edge compared to the rest of the pressure sensor.

圧力室側で、環状膜セグメントの周縁部への移行において、たとえばU字形、トラフ形又はV字形のリセスなど周囲リセスが形成され得、このことは円弧のさらなる延長すなわちより大きな円弧の角度を可能にする。リセスは、円弧とリセスの間に鋭角を伴わないゆるやかな移行があるという方法で設計されるのが好ましい。リセスは、その径方向外縁部で、周縁部の圧力室側の表面に対して90度から160度、好ましくは120度から130度の鈍角を形成することができる。この移行は、鋭角、曲線的な縁部又は起伏のある縁部の形状であり得る。 On the pressure chamber side, in the transition of the annular membrane segment to the periphery, a peripheral recess can be formed, for example a U-shaped, trough-shaped or V-shaped recess, which allows for a further extension of the arc, i.e. a larger arc angle. To. The recess is preferably designed in such a way that there is a gradual transition between the arc and the recess without an acute angle. The recess can form an obtuse angle of 90 to 160 degrees, preferably 120 to 130 degrees with respect to the pressure chamber side surface of the peripheral edge at its radial outer edge. This transition can be in the form of sharp, curvilinear or undulating edges.

円弧は30度から120度の角度(中間点の角度)にわたることができ、55度から90度の角度であることが好ましい。従来の膜と比較して、このような膜は、類似の測定環境下でより大きな強度を示す。 The arc can span an angle of 30 to 120 degrees (the angle of the midpoint), preferably an angle of 55 to 90 degrees. Compared to conventional membranes, such membranes exhibit greater strength under similar measurement environments.

内部空間側での円弧の内側の延長において、プランジャはアンダーカットを有することができ、これはプランジャの内部空間側で測定要素に作用する表面の拡大につながる。 In the inner extension of the arc on the interior space side, the plunger can have an undercut, which leads to an enlargement of the surface acting on the measurement element on the interior space side of the plunger.

膜の縦軸の方向で、プランジャ及び/又は周縁部は円弧の材料厚より厚く、その結果、環状リングセグメントは最も薄く、それゆえ最も可撓性のあるセグメントとなる。 In the direction of the longitudinal axis of the membrane, the plunger and / or the periphery is thicker than the material thickness of the arc, resulting in the annular ring segment being the thinnest and therefore the most flexible segment.

膜の可能な寸法及び大きさは以下の通り定められ得、それ自体で、又は前述の特徴との任意の組合せで実施され得る。 The possible dimensions and sizes of the membrane can be determined as follows and can be carried out on its own or in any combination with the features described above.

− 一定の材料厚の円弧は、30度から120度、好ましくは55度から90度の角度を包囲する。 -A circular arc of constant material thickness surrounds an angle of 30 to 120 degrees, preferably 55 to 90 degrees.

− リセスは、その径方向外縁部で、周縁部の圧力室側の表面に対して90度から160度、好ましくは120度から130度の鈍角を形成する。 -The recess forms an obtuse angle of 90 to 160 degrees, preferably 120 to 130 degrees with respect to the pressure chamber side surface of the peripheral edge at its radial outer edge.

− 内部空間側で、円弧の延長の外側端点における接線が、センサ・ハウジングの縦軸に対して10度から80度、好ましくは30度から40度の開口角度を包囲する。 -On the interior space side, a tangent at the outer endpoint of the extension of the arc surrounds an opening angle of 10 to 80 degrees, preferably 30 to 40 degrees with respect to the vertical axis of the sensor housing.

− 外側の円弧の半径と膜の外半径との比率は、0.1から0.4、好ましくは約0.25である。膜は、たとえばスチール、鉄ベース、ニッケルベース、コバルトベース又はチタンベースの合金で製作され得、これは大きな強度及び温度耐性を示す。 The ratio of the radius of the outer arc to the outer radius of the film is 0.1 to 0.4, preferably about 0.25. The membrane can be made of, for example, steel, iron-based, nickel-based, cobalt-based or titanium-based alloys, which exhibit high strength and temperature resistance.

本発明はまた、内燃機関の燃焼室内の圧力を測定するための、上述の特徴を備える圧力センサの使用に関する。この圧力センサはまた、内燃衝撃型の用途で、たとえば急速且つ大きな圧力及び温度変化も生じる圧力室内で使用され得る。 The present invention also relates to the use of a pressure sensor with the above features for measuring pressure in the combustion chamber of an internal combustion engine. The pressure sensor can also be used in internal combustion impact applications, for example in pressure chambers where rapid and large pressure and temperature changes also occur.

本発明は、図面に関連して実施例の実例を用いて以下に記述される。 The present invention will be described below with reference to examples of examples in connection with the drawings.

本発明による圧力センサの膜の実施例の第1の形態の断面図である。It is sectional drawing of the 1st Embodiment of the membrane of the pressure sensor by this invention. 本発明による圧力センサの膜の実施例の第2の形態の断面図である。It is sectional drawing of the 2nd Embodiment of the membrane of the pressure sensor by this invention. 本発明による圧力センサの膜の実施例の第3の形態の断面図である。It is sectional drawing of the 3rd Embodiment of the membrane of the pressure sensor by this invention.

図1及び図2において、圧力室内、より詳細には内燃機関の燃焼室内の圧力を測定するための圧力センサ1の膜6の実施例の形態の断面が示される。圧力センサ1は、内部空間4と測定要素5とを備える中空円筒形のセンサ・ハウジング3を含み、測定要素5は、好ましくは、圧電又は圧電抵抗の測定要素であり、内部空間4に配置されている。センサ・ハウジング3及び測定要素5は、部分的にのみ示される。たとえば、電気的連結、又は、センサ・ハウジング上に測定要素を支持することなど、圧力センサの他の要素は示されない。圧力センサ1は、たとえば、エンジン・ブロックの適切な開口に螺合されるか、その他、封止される方法で取り付けられる。図では、圧力室2の内側壁12は、膜6の領域に破線で示される。 1 and 2 show a cross section of an embodiment of a film 6 of a pressure sensor 1 for measuring pressure in a pressure chamber, more specifically in a combustion chamber of an internal combustion engine. The pressure sensor 1 includes a hollow cylindrical sensor housing 3 comprising an internal space 4 and a measuring element 5, which is preferably a piezoelectric or piezoelectric resistance measuring element and is located in the internal space 4. ing. The sensor housing 3 and the measuring element 5 are shown only partially. Other elements of the pressure sensor are not shown, for example, electrical coupling or supporting the measuring element on the sensor housing. The pressure sensor 1 is attached, for example, by being screwed into an appropriate opening in the engine block or otherwise sealed. In the figure, the inner wall surface 12 of the pressure chamber 2 is indicated by a broken line in the region of the membrane 6.

回転対称の膜6は、周縁部7と、中央プランジャ8と、可撓性の環状膜セグメント9とを有する。膜は、周縁部7によって中空円筒形のセンサ・ハウジング3の上縁にしっかりと溶着され、センサ・ハウジング3の内部空間4を圧力室2から封止する。図示される実施例の形態では、膜とセンサ・ハウジングとは、縁部と縁部とが連結される。他の連結、たとえば周方向のシームによる連結も可能である。可撓性の環状膜セグメント9は、周縁部7を中央プランジャ8と連結する。この中央プランジャ8は、測定要素5に相互作用的に連結されており、これによって、圧力室2内の内部圧力の結果として生じる、圧力センサ1の縦軸Aに沿ったプランジャ8の偏位は、測定要素5によって記録され得る。 The rotationally symmetric membrane 6 has a peripheral edge 7, a central plunger 8, and a flexible annular membrane segment 9. The film is firmly welded to the upper edge of the hollow cylindrical sensor housing 3 by the peripheral edge 7, and seals the internal space 4 of the sensor housing 3 from the pressure chamber 2. In the illustrated embodiment, the film and the sensor housing are connected to each other at the edges. Other connections, such as circumferential seams, are also possible. The flexible annular membrane segment 9 connects the peripheral edge 7 with the central plunger 8. The central plunger 8 is interactively connected to the measuring element 5, whereby the displacement of the plunger 8 along the vertical axis A of the pressure sensor 1 resulting from the internal pressure in the pressure chamber 2 is , Can be recorded by measuring element 5.

断面では、環状膜セグメント9は、圧力室側で、軸方向Aにおいて最も高い点としての頂点S1を有する凸状の円弧10として設計される。この円弧10は一定の材料厚を有し、周縁部7又は中央プランジャ8よりも薄い。本質的に平坦なベースを備える中央トラフ13は、プランジャ8の上方に形成され、円弧10によって範囲が定められる。円弧10が中央トラフ13のベースと接触する点において、円弧10は、圧力室側に径方向内側端点P1を有する。周縁部7との連結点において、円弧10は、径方向外側端点P2を有し、内側端点P1は、外側端点P2に対して、縦軸Aに沿って内部空間4の方向にずらして配置される。円弧10の頂点S1は、周縁部7の圧力室側の表面16よりも低く配置されるのが好ましい。周縁部7の内部空間側の表面16は、圧力センサ1が組み立てられた状態で、この表面16が圧力室2の壁12と本質的に同一平面にあり、円弧10が圧力室2内に突出しないように、円弧10を越えて突出するのが好ましい。周縁部7は、周囲縁を形成し、それによって、膜6の残りの部分に対して隆起している。 In cross section, the annular membrane segment 9 is designed as a convex arc 10 on the pressure chamber side with an apex S1 as the highest point in the axial direction A. The arc 10 has a constant material thickness and is thinner than the peripheral edge 7 or the central plunger 8. The central trough 13 with an essentially flat base is formed above the plunger 8 and is ranged by an arc 10. At the point where the arc 10 contacts the base of the central trough 13, the arc 10 has a radial inner end point P1 on the pressure chamber side. At the connection point with the peripheral edge portion 7, the arc 10 has a radial outer end point P2, and the inner end point P1 is arranged so as to be offset in the direction of the internal space 4 along the vertical axis A with respect to the outer end point P2. To. The apex S1 of the arc 10 is preferably arranged lower than the surface 16 on the pressure chamber side of the peripheral edge portion 7. The surface 16 on the internal space side of the peripheral edge portion 7 is in a state where the pressure sensor 1 is assembled, the surface 16 is essentially in the same plane as the wall 12 of the pressure chamber 2, and the arc 10 projects into the pressure chamber 2. It is preferable to project beyond the arc 10 so as not to. The peripheral edge 7 forms a peripheral edge, thereby bulging with respect to the rest of the membrane 6.

図1及び図2から、円弧の一定半径によって、円弧10に包囲される角度α(中間点の角度アルファ)は、内側端点P1又はトラフ13のベースをより下方に移動させるという点で拡大され得ることが分かる。円弧の角度は、図1では約105度であり、図2では約120度である。円弧10の角度αは、圧力室側の周囲リセス11が周縁部7の側で径方向内側に向けて形成されるという設計/深さによっても拡大され得る。通例として、リセス11の最も低い点は、円弧10の外側端点P2と本質的に一致する。 From FIGS. 1 and 2, due to the constant radius of the arc, the angle α surrounded by the arc 10 (the angle alpha of the midpoint) can be magnified in that the base of the inner endpoint P1 or trough 13 is moved further down. You can see that. The angle of the arc is about 105 degrees in FIG. 1 and about 120 degrees in FIG. The angle α of the arc 10 can also be expanded by the design / depth that the peripheral recess 11 on the pressure chamber side is formed radially inward on the peripheral edge 7 side. As a general rule, the lowest point of the recess 11 essentially coincides with the outer endpoint P2 of the arc 10.

図示される実施例の実例では、リセス11は、その径方向外縁部で、周縁部7の圧力室側の表面16に対して好ましくは約135度の鈍角γを形成する。鋭角は移行において形成される。内部空間側で、円弧10の延長の端点、又は環状膜セグメント9の周縁部7への移行における接線は、円筒形のセンサ・ハウジングの縦軸A、又は図示される実施例では縦軸Aに平行して延びる円筒形のセンサ・ハウジング3の内側壁15に対して約30度の開口角度βを包囲する。 In the illustrated embodiment, the recess 11 forms an obtuse angle γ at its radial outer edge, preferably about 135 degrees with respect to the pressure chamber side surface 16 of the peripheral edge 7. Acute angles are formed at the transition. On the internal space side, the end point of the extension of the arc 10 or the tangent line at the transition of the annular membrane segment 9 to the peripheral edge 7 is on the vertical axis A of the cylindrical sensor housing, or on the vertical axis A in the illustrated embodiment. It surrounds an opening angle β of about 30 degrees with respect to the inner wall 15 of the cylindrical sensor housing 3 extending in parallel.

図2における本発明による実施例の形態では、内部空間側での円弧10の内側の延長において、プランジャ8はアンダーカット14を有し、これは内部空間側で測定要素5に作用するプランジャ8の表面積の拡大をもたらす。 In the embodiment according to the present invention in FIG. 2, in the inner extension of the arc 10 on the interior space side, the plunger 8 has an undercut 14, which acts on the measurement element 5 on the interior space side. Brings an increase in surface area.

図1及び図2に示す実施例の形態とは異なり、図3の実施例の形態における膜6は、ほぼ頂点S1の所にある縁部7の表面16を有する。縦軸Aに沿って、この表面16は、さらに内部空間4の方向、及び頂点S1と外側端点P2の間に配置される高さにずらされ得る。このような実施例の形態では、膜が圧力室2の壁12に対して後退して配置されるように、圧力センサ1は、圧力室側で縦軸Aの方向に頂点S1の上部に突出する封止コーン又は保護スリーブ17を有する。 Unlike the embodiments shown in FIGS. 1 and 2, the film 6 in the embodiment of FIG. 3 has a surface 16 of an edge 7 substantially located at the apex S1. Along the vertical axis A, the surface 16 may be further offset in the direction of the interior space 4 and to a height located between the apex S1 and the outer endpoint P2. In such an embodiment, the pressure sensor 1 projects above the apex S1 in the direction of the vertical axis A on the pressure chamber side so that the film is retracted with respect to the wall 12 of the pressure chamber 2. It has a sealing cone or a protective sleeve 17.

1 圧力センサ
2 圧力室
3 センサ・ハウジング
4 内部空間
5 測定要素
6 膜
7 周縁部
8 プランジャ
9 環状膜セグメント
10 円弧
11 リセス
12 圧力室の壁
13 中央トラフ
14 アンダーカット
15 内側壁
16 縁部の表面
17 封止コーン/保護スリーブ
A 縦軸
P1 円弧の径方向内側端点
P2 円弧の径方向外側端点
S1 円弧の頂点
1 Pressure sensor 2 Pressure chamber 3 Sensor housing 4 Internal space 5 Measuring element 6 Membrane 7 Peripheral part 8 Plunger 9 Annular membrane segment 10 Arc 11 Recess 12 Pressure chamber wall 13 Central trough 14 Undercut 15 Inner side wall 16 Edge surface 17 Sealing cone / protective sleeve A Vertical axis P1 Radial inner end point of arc P2 Radial outer end point of arc S1 Apex of arc

Claims (12)

圧力室(2)内、より詳細には内燃機関の燃焼室内の圧力を測定するための圧力センサ(1)であって、前記圧力センサ(1)は、縦軸(A)及び内部空間(4)を備えるセンサ・ハウジング(3)と、前記センサ・ハウジング(3)の前記内部空間(4)に配置される測定要素(5)と、回転対称的に設計される膜(6)であって、前記膜(6)を前記圧力室側で前記センサ・ハウジング(3)の端部に連結する周縁部(7)を有し、前記圧力室側で前記センサ・ハウジング(3)の前記内部空間を封止する、膜(6)とを含み、
前記膜(6)はさらに、前記測定要素(5)と相互作用する中央プランジャ(8)と、前記プランジャ(8)を前記周縁部(7)に連結する可撓性の環状膜セグメント(9)とを備え、
断面で見たときの前記環状膜セグメント(9)は、前記圧力室側で、一定の材料厚の凸状の円弧(10)として設計される、圧力センサ(1)において、
前記プランジャ(8)が、前記縦軸(A)に沿って、前記円弧(10)の前記材料厚よりも厚くなっており、
前記周縁部(7)が、前記縦軸(A)に沿って、前記円弧(10)の前記材料厚よりも厚くなっており、
前記円弧が、30度から120度の角度(α)を包囲することを特徴とする圧力センサ(1)。
A pressure sensor (1) for measuring the pressure in the pressure chamber (2), more specifically in the combustion chamber of the internal combustion engine, wherein the pressure sensor (1) has a vertical axis (A) and an internal space (4). A sensor housing (3) provided with (3), a measuring element (5) arranged in the internal space (4) of the sensor housing (3), and a film (6) designed rotationally symmetrically. The pressure chamber side has a peripheral edge portion (7) that connects the film (6) to the end portion of the sensor housing (3), and the pressure chamber side has the internal space of the sensor housing (3). Containing the membrane (6) and
The membrane (6) further comprises a central plunger (8) that interacts with the measurement element (5) and a flexible annular membrane segment (9) that connects the plunger (8) to the peripheral edge (7). With and
In the pressure sensor (1), the annular membrane segment (9) when viewed in cross section is designed as a convex arc (10) having a constant material thickness on the pressure chamber side.
The plunger (8) is thicker than the material thickness of the arc (10) along the vertical axis (A).
The peripheral edge portion (7) is thicker than the material thickness of the arc (10) along the vertical axis (A).
A pressure sensor (1), wherein the arc surrounds an angle (α) of 30 to 120 degrees.
前記圧力室側で、前記円弧(10)の径方向内側端点(P1)が、前記円弧(10)の径方向外側端点(P2)に比べて前記縦軸(A)に沿って前記内部空間(4)の方向に後退して配置されることを特徴とする、請求項1に記載の圧力センサ。 On the pressure chamber side, the radial inner end point (P1) of the arc (10) is along the vertical axis (A) as compared with the radial outer end point (P2) of the arc (10). The pressure sensor according to claim 1, wherein the pressure sensor is arranged so as to be retracted in the direction of 4). 前記圧力室側で、前記周縁部(7)が前記円弧(10)の頂点(S1)を介して前記縦軸(A)の方向に突出することを特徴とする、請求項1又は2に記載の圧力センサ。 The first or second aspect of the present invention, wherein the peripheral edge portion (7) projects in the direction of the vertical axis (A) via the apex (S1) of the arc (10) on the pressure chamber side. Pressure sensor. 前記圧力室側で、前記環状膜セグメント(9)の前記周縁部(7)への移行において周囲リセス(11)が形成されることを特徴とする、請求項1から3までのいずれか一項に記載の圧力センサ。 Any one of claims 1 to 3, characterized in that a peripheral recess (11) is formed at the transition of the annular membrane segment (9) to the peripheral portion (7) on the pressure chamber side. The pressure sensor described in. 前記円弧が、55度から90度の角度(α)を包囲することを特徴とする、請求項1から4までのいずれか一項に記載の圧力センサ。 The pressure sensor according to any one of claims 1 to 4, wherein the arc surrounds an angle (α) of 55 to 90 degrees. 前記リセス(11)が、その径方向外縁部で、前記周縁部(7)の前記圧力室側の表面(16)に対して90度から160度の鈍角(γ)を形成することを特徴とする、請求項4に記載の圧力センサ。 The recess (11) is characterized in that it forms an obtuse angle (γ) of 90 to 160 degrees with respect to the surface (16) of the peripheral edge portion (7) on the pressure chamber side at its radial outer edge portion. The pressure sensor according to claim 4. 前記リセス(11)が、その径方向外縁部で、前記周縁部(7)の前記圧力室側の表面(16)に対して120度から130度の鈍角(γ)を形成することを特徴とする、請求項4に記載の圧力センサ。 The recess (11) is characterized in that it forms an obtuse angle (γ) of 120 to 130 degrees with respect to the surface (16) of the peripheral edge portion (7) on the pressure chamber side at its radial outer edge portion. The pressure sensor according to claim 4. 前記内部空間で、前記円弧(10)の延長の前記外側端点における接線が、前記センサ・ハウジングの前記縦軸(A)に対して10度から80度の開口角度(β)を形成することを特徴とする、請求項2、又は、請求項2に従属する請求項から7までのいずれか一項に記載の圧力センサ。 In the internal space, the tangent at the outer end point of the extension of the arc (10) forms an opening angle (β) of 10 to 80 degrees with respect to the vertical axis (A) of the sensor housing. The pressure sensor according to any one of claims 2 or 3 to 7, which is dependent on claim 2 . 前記内部空間で、前記円弧(10)の延長の前記外側端点における接線が、前記センサ・ハウジングの前記縦軸(A)に対して30度から40度の開口角度(β)を形成することを特徴とする、請求項2、又は、請求項2に従属する請求項から7までのいずれか一項に記載の圧力センサ。 In the internal space, the tangent at the outer end point of the extension of the arc (10) forms an opening angle (β) of 30 to 40 degrees with respect to the vertical axis (A) of the sensor housing. The pressure sensor according to any one of claims 2 or 3 to 7, which is dependent on claim 2 . 前記内部空間での前記円弧(10)の内側の延長において、前記プランジャ(8)がアンダーカット(14)を有することを特徴とする、請求項1から9までのいずれか一項に記載の圧力センサ。 The pressure according to any one of claims 1 to 9, wherein the plunger (8) has an undercut (14) in the inner extension of the arc (10) in the interior space. Sensor. 前記圧力室側で、前記プランジャ(8)の中央上方に、前記環状膜セグメント(9)によって範囲が定められる中央トラフ(13)が、本質的に平坦なベースを備えて形成されることを特徴とする、請求項1から10までのいずれか一項に記載の圧力センサ。 On the pressure chamber side, above the center of the plunger (8), a central trough (13) ranged by the annular membrane segment (9) is formed with an essentially flat base. The pressure sensor according to any one of claims 1 to 10. 内燃衝撃型の用途の、請求項1から11までのいずれか一項に記載の圧力センサの使用。 Use of the pressure sensor according to any one of claims 1 to 11 for internal combustion impact type applications.
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EP3059567A1 (en) 2016-08-24
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US11002636B2 (en) 2021-05-11
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US20160245721A1 (en) 2016-08-25
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EP3059567B1 (en) 2021-10-20
JP2016153790A (en) 2016-08-25

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