JP6814850B2 - Kiln tools - Google Patents

Description

The present invention relates to a lattice body made of ceramics.

When firing ceramic electronic components and glass, it is common to place the object to be fired on a setter, which is also called a shelf board or a floor board, and fire it. In order to shorten the degreasing / firing time of the object to be fired and increase the number of products manufactured per unit time, it is necessary to rapidly heat and quench the firing process, but conventional ceramic setters do this rapidly. Heat and / or quenching tends to cause defects such as cracks. In addition, defects such as cracks are likely to occur even after repeated use. Further, it has been pointed out that when a metal setter is used, it cannot be used in an oxidizing atmosphere, and in a high temperature region of 1200 ° C. or higher, it is significantly deformed when repeatedly used.

Various two-dimensional mesh-like or three-dimensional mesh-like setters have been proposed for the purpose of solving the above-mentioned problems. For example, Patent Document 1 describes a setter for heat molding, which is made of ceramics containing aluminum nitride as a main component and is made of a perforated plate having a large number of holes penetrating the front and back surfaces. This setter has, for example, a grid-like mesh or a honeycomb-shaped mesh.

Patent Document 2 includes a ceramic long fiber woven fabric and a frame body in which the outer peripheral edge portion of the woven material is fixed, and the frame body is mainly a ceramic fiber molded body obtained by firing ceramic fibers and ceramic particles. A ceramic mesh jig for firing electronic parts is described. Patent Document 3 has continuous pores having a porosity of more than 70% by volume to 98% by volume, a pore diameter of 100 μm to 2000 μm, and an opening area ratio of 20% to 90%, and has a three-dimensional network structure. A setter for degreasing and firing made of porous ceramics is described.

Patent Document 4 has an outer wall, a component mounting surface, and a furnace installation surface, and a partition wall having a thickness of 0.05 mm to 1.0 mm is provided between the component mounting surface and the furnace installation surface. It is a honeycomb structure in which a plurality of ventilation cells partitioned at a pitch of 0.5 mm to 5.0 mm penetrate, and the outer wall surface is also provided with one or more ventilation holes penetrating between the outer walls. A setter for firing is described. Patent Document 5 describes a sheath body made of a nickel net and having a bottom plate and rising portions provided on the entire circumference thereof, a plurality of ceramic rods arranged parallel to each other on the bottom surface of the sheath body, and the rods. A firing sheath is described that covers the sheath and is provided with a nickel net that is welded to the bottom surface of the sheath body to support the rod on the sheath body.

Japanese Unexamined Patent Publication No. 6-207785 Japanese Unexamined Patent Publication No. 2000-304459 Japanese Unexamined Patent Publication No. 2002-293651 Japanese Unexamined Patent Publication No. 2004-150661 Japanese Unexamined Patent Publication No. 2011-117669

However, even if the techniques described in the above patent documents are used, it is not easy to bring the rapid heating and cooling of the object to be fired to a satisfactory level. Moreover, the strength of the setter cannot be sufficiently increased.

An object of the present invention is to provide a ceramic lattice body capable of eliminating various drawbacks of the above-mentioned prior art.

The present invention comprises a plurality of first streaks made of ceramics extending in one direction and a plurality of second streaks made of ceramics extending in a direction intersecting the first streaks. It is a ceramic lattice body that has
At the intersection of the first streak and the second streak, the second streak is arranged on the first streak at any of the intersections.
It provides a ceramic lattice body in which the thickness at the intersection is larger than both the thickness of the first streak and the thickness of the second streak at a portion other than the intersection.

The ceramic lattice body of the present invention can be used repeatedly in a high temperature region, and has sufficient strength even if the thickness is reduced to lower the heat capacity and the air permeability is increased.

FIG. 1 is a perspective view showing an embodiment of the ceramic lattice body of the present invention. FIG. 2 is a sectional view taken along line II-II in FIG. FIG. 3 is a sectional view taken along line III-III in FIG. FIG. 4 is a sectional view taken along line IV-IV in FIG. FIG. 5 is a sectional view taken along line VV in FIG. FIG. 6 is a plan view of the ceramic lattice shown in FIG. FIG. 7 is an SEM photograph of the ceramic lattice body obtained in Example 1 observed from the first surface side. FIG. 8 is an SEM photograph of the ceramic lattice body obtained in Example 1 observed from the second surface side.

Hereinafter, the present invention will be described based on the preferred embodiment with reference to the drawings. FIG. 1 shows an embodiment of the ceramic lattice body of the present invention. The ceramic lattice body (hereinafter, also simply referred to as “lattice body”) 1 shown in the figure has a plurality of first linear portions 10 made of ceramics extending in one direction X. Each of the first streaks 10 extends parallel to each other. Further, the ceramic lattice body 1 has a plurality of second linear portions 20 made of ceramics extending in the Y direction, which is a direction different from the X direction. Each second streak 20 extends parallel to each other. Since the X direction and the Y direction are different directions, the first streak portion 10 and the second streak portion 20 intersect. The crossing angles of the streaks 10 and 20 can be set according to the specific use of the ceramic lattice body 10. For example, the crossing angle of the second streak portion 20 with respect to the first streak portion 10 can be 90 degrees. Alternatively, the crossing angle of the second streak portion 20 with respect to the first streak portion 10 can be changed within the range of 90 degrees ± 10 degrees. The lattice body 1 is formed by the intersection of the plurality of first streaks 10 and the plurality of second streaks 20.

The ceramic lattice body 1 has a plate-like shape having a plurality of through holes 3 defined by the lattice, forming a lattice by intersecting the first streak portion 10 and the second striation portion 20. doing. As shown in FIGS. 2 to 5, the ceramic lattice body 1 has a first surface 1a and a second surface 1b facing the first surface 1a.

The first streak portion 10 has a constant width W1 (see FIG. 2) in a plan view at a position other than the intersection 2 of both streak portions 10 and 20. As shown in FIGS. 2 and 3, the cross-sectional shape of the first linear portion 10 in the thickness direction is a first surface 10a located on the first surface 1a side of the ceramic lattice body 1 and a first surface of the ceramic lattice body 1. It is defined by the second surface 10b located on the two surface 1b side. The first surface 10a of the first linear portion 10 has a flat cross section in the thickness direction of the linear portion 10. The flat surface is substantially parallel to the in-plane direction of the ceramic lattice body 1. On the other hand, the second surface 10b of the first linear portion 10 has a convex curved shape in which the cross section of the linear portion 10 in the thickness direction is from the first surface 1a to the second surface 1b of the ceramic lattice body 1. I am doing.

Like the first streak portion 10, the second streak portion 20 also has a constant width W2 (see FIG. 5) in a plan view at a position other than the intersection 2 of both streak portions 10 and 20. However, in some cases, the width W2 may change along the extending direction of the second streak portion 20. The width W2 may be the same as or different from the width W1 of the first streak portion 10. As shown in FIGS. 4 and 5, the cross-sectional shape of the second streak portion 20 in the thickness direction is the first surface 20a located on the first surface 1a side of the ceramic lattice body 1 and the first surface 20a of the ceramic lattice body 1. It is defined by the second surface 20b located on the two surface 1b side. The first surface 20a of the second streak portion 20 has a flat cross section in the thickness direction of the streak portion 20. The flat surface is substantially parallel to the in-plane direction of the ceramic lattice body 1. On the other hand, the second surface 20b of the second linear portion 20 has a convex curved shape in which the cross section of the linear portion 20 in the thickness direction is from the first surface 1a to the second surface 1b of the ceramic lattice body 1. I am doing. This curved shape may be the same as or different from the curved shape in the first line portion 10.

As shown in FIGS. 3 and 4, the first surface 10a of the first streak portion 10 and the first surface 20a of the second streak portion 20 are flush with each other, and are between the two surfaces 10a and 20a. There is no step in. Since the double-sided surfaces 10a and 20a form the first surface 1a of the ceramic lattice body 1, the fact that the double-sided surfaces 10a and 20a are flush with each other means that the first surface 1a of the lattice body 1 becomes a flat surface. It means that it is. Therefore, when the ceramic lattice body 1 is placed so that its first surface 1a is in contact with the flat mounting surface, the entire area of the first surface 1a is in contact with the mounting surface.

On the other hand, the second surface 1b of the ceramic lattice body 1 has a second surface 10b of the first linear portion 10 having a convex curved surface shape and a second linear portion having the same convex curved surface shape. Since it is composed of the second surface 20b of 20, it is not a flat surface but an uneven surface.

At the intersection 2 of the first streak portion 10 and the second streak portion 20 in the ceramic lattice body 1, both the streak portions 10 and 20 are integrated. By "integrating", when observing the cross section of the intersection 2, the space between the streaks 10 and 20 is a continuous structure as ceramics. The through holes 3 formed in the ceramic lattice body 1 by the intersection of the streaks 10 and 20 have the same dimensions and the same shape. Each through hole 3 has a substantially rectangular shape. The through holes 3 are regularly arranged.

As shown in FIGS. 1, 3 and 4, the intersection 2 between the first line portion 10 and the second line portion 20 is located on the first line portion 10 at any of the intersections 2. 2 streaks 20 are arranged. Then, the thickness at the intersection 2 is larger than either the thickness of the first streak portion or the thickness of the second streak portion at a portion other than the intersection. That is, the thickness of the first streak portion 10 at a position other than the intersection 2 of both streak portions 10 and 20 is T1 (see FIG. 2), and the second streak portion 10 and 20 at a position other than the intersection 2 When the thickness of the streak portion 20 is T2 (see FIG. 5) and the thickness at the intersection is Tc (see FIG. 4), Tc> T1 and Tc> T2. Therefore, on the second surface 1b of the ceramic lattice body 1, the position of the intersection of the two streaks 10 and 20 is the highest.

At the intersection 2 of the first streak portion 10 and the second streak portion 20, the first line located relatively on the first surface side 1a of the two surfaces 1a and 1b of the lattice body 1. A second line portion 20 located relatively on the second surface 1b side is arranged on the line portion 10. When observing the cross-sections of the first and second streaks 10 and 20 in the thickness direction at the parts other than the intersection 2 in the lattice body 1, these streaks 10 and 20 are the first surfaces 10a of them. As described above, the 20a side has a flat shape parallel to the first surface 1a of the lattice body 1. At the same time, the second surfaces 10b and 20b of the lattice body 1 have a curved surface shape that is convex from the first surface 1a to the second surface 1b.

As shown in FIG. 4, the highest position of the second surface 10b in the first line portion 10, that is, the position of the top portion is the same along the extending direction of the first line portion 10. In contrast, as shown in FIG. 3, the highest position of the second surface 20b in the second streak 20, that is, the position of the top, is periodic along the extending direction of the first streak 10. Has changed to. Specifically, the position of the apex is the highest at the intersection 2, the lowest at the position of the midpoint of the adjacent intersections, and the position of the apex is gradually lowered from the intersection 2 to the midpoint M. Then, the position of the apex gradually increases from the midpoint M toward the intersection 2.

When the ceramic lattice body 1 having the above configuration is used, for example, as a setter for firing the body to be fired, if the body to be fired is placed on the second surface 1b of the lattice body 1, the body to be fired can be generated. It comes into contact with the lattice body 1 only at the intersection 2 on the second surface 1b of the lattice body 1. As a result, the contact area between the lattice body 1 and the body to be fired is significantly reduced, which facilitates rapid heating and cooling of the body to be fired. Further, since the lattice body 1 is formed by the intersection of the first and second streak portions 10 and 20 and a plurality of through holes 3 are formed, the heat capacity is small, and from that point as well, the fired body is abruptly fired. Easy to heat and cool. Further, since the lattice body 1 has good air permeability due to the existence of a plurality of through holes 3, it is easy to rapidly cool the body to be fired. Moreover, in the lattice body 1, since the first and second line portions 10 and 20 are integrated at the intersection 2, the lattice body 1 has sufficient strength.

From the viewpoint of making the various advantageous effects described above more remarkable, the thickness T2 of the second streak portion 20 is larger than the thickness T1 of the first streak portion 10 at the portion other than the intersection. It is preferable that it is large. That is, it is preferable that the relationship of Tc> T2> T1 is satisfied. As described above, the position of the second surface 20b on the second line portion 20 varies between the two adjacent intersections 2 and 2, but the thickness T2 of the second line portion 20 is different from that of the second line portion 20. The value is set at the lowest position among the positions of the second surface 20b on the second line portion 20. In the example shown in FIG. 3, the thickness of the second line portion 20 at the position of the midpoint M between the two intersections 2 and 2 is defined as T2.

As described above, it is preferable that T2 is larger than T1, and the value of T2 / T1, which is the ratio of T2 to T1, is preferably 1.1 or more and 10 or less, and 1.5 or more and 3 or less. Is more preferable. The value of T1 itself is preferably 50 μm or more and 1 mm or less, and more preferably 75 μm or more and 500 μm or less. On the other hand, the value of T2 itself is preferably 75 μm or more and 10 mm or less, and more preferably 80 μm or more and 5 mm or less, provided that it is larger than the value of T1.

Further, as described above, the thickness Tc at the intersection 2 is larger than T1 and T2. Therefore, the value of Tc / T1 which is the ratio of Tc to T1 is preferably 1.1 or more and 3 or less, and 1 More preferably, it is 2 or more and 2.5 or less. Further, the value of Tc / T2, which is the ratio of Tc to T2, is preferably 1 or more and 2 or less, and more preferably 1.1 or more and 1.5 or less. The Tc value itself is preferably 0.1 mm or more and 2 mm or less, and more preferably 0.3 mm or more and 1.5 mm or less. The thickness Tc at the intersection 2 is smaller than T1 + T2, which is the sum of T1 and T2.

It is preferable that the first surfaces 10a and 20a of the surfaces of the first linear portion 10 and the second linear portion 20 are smooth. Since the first surfaces 10a and 20a of the linear portions 10 and 20 are smooth, there is an advantage that the fired body is less likely to be scratched when the fired body is placed on the ceramic lattice body 1. There is. Further, there is an advantage that the fired body obtained by firing the fired body is less likely to be caught in the ceramic lattice body 1 and the take-out property is improved. Further, if the body to be fired is a thin tape molded body such as a substrate, the surface state of the setter is transferred to the bottom surface of the body to be fired, so that there is an advantage that the bottom surface of the body to be fired can be finished more smoothly. On the other hand, if the surface roughness is large, there is an advantage that degreasing can proceed smoothly because the gas flow under the fired body is improved when the fired body is placed. Further, if the unevenness is usually large, the sharp convex portion on the surface makes it easy for the object to be fired to be scratched. However, in 10b and 20b, since the apex of the unevenness is an arc, the object to be fired is damaged. There is an advantage that it is hard to stick. From these viewpoints, the surface roughness Ra of the first surface 10a of the first streak portion 10 and the first surface 20a of the second streak portion 20 is preferably 0.01 μm or more and 20 μm or less, and is 0. It is more preferably 0.01 μm or more and 10 μm or less. On the other hand, the surface roughness Ra of the second surface 10b of the first linear portion 10 and the second surface 20b of the second linear portion 20 is preferably 10 μm or more and 300 μm or less, and is 20 μm or more and 100 μm or less. Is even more preferable. Specifically, the surface roughness Ra is measured by the following method. Using a color 3D laser microscope (VK-8710, manufactured by KEYENCE CORPORATION), the measurement was performed at an imaging magnification of 200 times. Regarding the first surface, the surface roughness was measured along the middle line of the first surface 10a or 20a, and the average value was calculated from the 20 measured values and used as Ra. On the other hand, in the second surfaces 10b and 20b, along the middle line of the second surfaces 10b and 20b, straddling the second streak portion 20 and returning to the middle line of the second surfaces 10b and 20b again (FIG. The surface roughness was measured along the X direction in 1), and the average value was calculated from the 20 measured values and used as Ra.

In order to reduce the value of the surface roughness Ra of the first surfaces 10a and 20a of the linear portion, for example, a substrate having a small surface roughness may be used as a substrate to which the paste used for forming the linear portion is applied. Alternatively, a paste having a low viscosity may be used. On the other hand, in order to increase the value of the surface roughness Ra of the second surfaces 10b and 20b of the linear portion, for example, a high-viscosity paste may be used or the nozzle diameter to be discharged may be increased. Just do it. In some cases, the first surface 1a and / or the second surface 1b of the ceramic lattice body 1 may be polished so as to have a predetermined surface roughness. As will be described later, the ceramic lattice body 1 may use a plurality of the lattice bodies 1 and stack them, but in that case, the first surfaces 10a and 20a of the linear portion 10 are laminated. The first surfaces 10a and 20a of the streak portion 10 located on the most 1a surface side of the lattice body, and the roughness thereof are the first surfaces 10a and 20a of the streak portion 10. Similarly, the second surfaces 10b and 20b of the linear portion 10 are the first surfaces 10b and 20b of the linear portion 10 located on the most 1b surface side of the laminated lattice body, and the roughness thereof. Refers to the first surfaces 10b and 20b of the line portion 10.

FIG. 6 shows a plan view of the ceramic lattice body 1. As shown in the figure, the lattice body 1 has a substantially rectangular shape in a plan view of the lattice body because the plurality of first line portions 10 and the plurality of second line portions 20 are substantially orthogonal to each other. A plurality of through holes 3 are formed. The through hole 3 having a substantially rectangular shape has first sides 3a and 3a, which are a set of opposing sides. At the same time, the through hole 3 has second sides 3b, 3b, which are another set of opposite sides. The first sides 3a and 3a are sides corresponding to both side edges 11 and 11 (see FIG. 2) of the first line portion 10. On the other hand, the second sides 3b and 3b are sides corresponding to both side edges 21 and 21 (see FIG. 5) of the second line portion 20. The through hole 3 is defined by these four sides. Then, as shown in FIG. 6, the opposite second sides 3b and 3b are curved inward so as to be close to each other. Since the second sides 3b and 3b are curved inward in this way, there is an advantage that the strength of the ceramic lattice body 1 is further improved. Regarding the first sides 3a and 3a, the sides 3a and 3a are straight lines, but the sides 3a and 3a are also curved inward so as to be close to each other as in the second side 3b. May be good. By doing so, the strength of the ceramic lattice body 1 is further improved. In order to bend the second side 3b inward, for example, the lattice body 1 may be manufactured by a method described later.

The degree of inward direction of the first side 3b is preferably 50 μm or more and 5000 μm or less, and more preferably 100 μm or more and 1500 μm or less in terms of curvature. The curvatures of the two opposing second sides 3b may be the same or different.
Further, the first side 3a is preferably a straight line. Alternatively, it may be an inward curve of 50 μm or more and 5000 μm or less, particularly 100 μm or more and 1500 μm or less in terms of curvature. If the two opposing second sides 3a are inwardly curved, their curvatures may be the same or different.
Both curvatures are measured by the method described below. The appearance of the ceramic lattice body 1 is observed by SEM from the second surface side thereof, and an SEM photograph is taken. Based on this SEM photograph, a tangent line is drawn on the arc of the curved part, both ends of the side to be measured and the contact point are connected with each other by a line, the distance between both ends is a sine L, and the distance between the midpoint between both ends and the contact point is set. When the sine d was used, the radius of curvature was calculated by {(L / 2) ² + d ² / 2d}.

The through hole 3 formed in the ceramic lattice body 1 has an area of 100 μm ² or more and 100 mm ² or less, particularly 2500 μm ² or more and 1 mm ² or less, which reduces the heat capacity of the lattice body 1 and improves the air permeability. It is preferable from the viewpoint of making the lattice body 1 and maintaining the strength of the lattice body 1. Further, the ratio of the total area of the through holes 3 to the apparent area of the ceramic lattice body 1 in a plan view is preferably 1% or more and 80% or less, and more preferably 3% or more and 70% or less. Most preferably, it is 10% or more and 70% or less. This ratio is calculated by cutting the ceramic lattice body 1 into a rectangle of an arbitrary size in a plan view, calculating the total area of the through holes 3 included in the rectangle, and dividing the total by the rectangular area 100. It is calculated by multiplying by. Further, the area of each through hole 3 can be measured by image analysis of the microscopic observation image of the lattice body 1.

In relation to the area of the through hole 3, the width W1 of the first streak portion 10 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. On the other hand, the width W2 of the second strip 20 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. When the widths W1 and W2 are not uniform when viewed along the extending direction of the streaks 10 and 20, the width of the narrowest portion is defined as the widths W1 and W2.

In relation to the widths W1 and W2 of the first and second strips 10 and 20, the pitch P1 between the adjacent first strips 10 is preferably 100 μm or more and 10 mm or less, and 150 μm or more and 5 mm. The following is more preferable. On the other hand, the pitch P2 between the adjacent second strips 20 is preferably 100 μm or more and 10 mm or less, and more preferably 150 μm or more and 5 mm or less.

As the ceramic material constituting the ceramic lattice body 1, various materials can be used. For example, alumina, silicon carbide, silicon nitride, zirconia, mulite, zircon, cordierite, aluminum titanate, magnesium titanate, magnesia, titanium diboronet, boron nitride and the like can be mentioned. These ceramic materials may be used alone or in combination of two or more. In particular, it is preferably made of ceramics containing alumina, mullite, cordierite, zirconia or silicon carbide. When the ceramic lattice body 1 is subjected to rapid heating and cooling, it is particularly preferable to use silicon carbide as the ceramic material. Since silicon carbide may react with the object to be fired, when silicon carbide is used as the ceramic material, it is preferable to coat the surface with a ceramic material having low reactivity such as zirconia. The ceramic material constituting the first streak portion 10 and the ceramic material constituting the second streak portion 20 may be the same or different. From the viewpoint of increasing the integrity of the first and second streaks 10 and 20 at the intersection 2, it is preferable that the ceramic materials constituting both streaks 10 and 20 are the same.

Next, a suitable manufacturing method of the ceramic lattice body 1 of the present embodiment will be described. In this production method, first, a raw material powder of a ceramic material is prepared, and the raw material powder is mixed with a medium such as water and a binder to prepare a paste for producing a streak. The ratio of the raw material powder of the ceramic material in the paste is preferably 30% by mass or more and 75% by mass or less, and more preferably 40% by mass or more and 60% by mass or less. The proportion of the medium in the paste is preferably 15% by mass or more and 60% by mass or less, and more preferably 20% by mass or more and 55% by mass or less. The proportion of the binder in the paste is preferably 1% by mass or more and 40% by mass or less, and more preferably 5% by mass or more and 25% by mass or less.

As the binder, the same binders conventionally used for this type of paste can be used. Examples include polyvinyl alcohol, polyethylene glycol, polyethylene oxide, dextrin, sodium lignin sulfonate and ammonium, carboxymethyl cellulose, ethyl cellulose, hydroxypropyl methyl cellulose, carboxymethyl cellulose, hydroxyethyl cellulose, hydroxyethyl methyl cellulose, sodium alginate and ammonium, epoxy resins, phenols. Resins, gum arabic, polyvinyl butyral, acrylic polymers such as polyacrylic acid and polyacrylamide, thickening polysaccharides such as xanthan gum and guagam, gelling agents such as gelatin, agar and pectin, vinyl acetate resin emulsions, wax emulsions, In addition, inorganic binders such as alumina sol and silica sol can be mentioned. Two or more of these may be mixed and used. The viscosity of the paste is preferably 1 Pa · s or more and 10000 Pa · s or less, and more preferably 50 Pa · s or more and 5000 Pa · s or less at the temperature at the time of coating. The viscosity of the paste is measured using a cone-plate rotary viscometer or rheometer. At this time, a thickener, a flocculant, a thixotropic agent, or the like can be used as the viscosity adjusting agent. Examples of thickeners include proteins such as polyethylene glycol fatty acid ester, alkylallyl sulfonic acid, alkylammonium salt, ethyl vinyl ether / maleic anhydride copolymer, fumed silica, and albumin. In many cases, the binder may be classified as a thickener because of its thickening effect, but if more strict viscosity adjustment is required, the binder is not separately classified as a thickener. Agents can be used. Examples of the flocculant include polyacrylamide, polyacrylic acid ester, aluminum sulfate, polyaluminum chloride and the like. Examples of thixotropic agents include fatty acid amides, polyolefin oxides, and polyether ester-type surfactants. As the solvent for preparing the paste, alcohol, acetone, ethyl acetate and the like are used in addition to water, and two or more kinds of these may be mixed. Further, in order to stabilize the discharge amount, a plasticizer, a lubricant, a dispersant, a sedimentation inhibitor, a PH adjuster and the like may be added. Examples of the plasticizer include glycol-based plasticizers such as trimethylene glycol and tetramethylene glycol, glycerin, butanediol, phthalic acid-based, adipic acid-based, and phosphoric acid-based plasticizers. Examples of the lubricant include hydrocarbons such as liquid paraffin, microwax and synthetic paraffin, higher fatty acids, fatty acid amides and the like. Examples of the dispersant include sodium or ammonium salt of polycarboxylic acid, acrylic acid type, polyacetylene imine, phosphoric acid type and the like. Examples of the sedimentation inhibitor include polyamideamine salts, bentonite, aluminum stearate and the like. Examples of the PH adjusting agent include sodium hydroxide, aqueous ammonia, oxalic acid, acetic acid, hydrochloric acid and the like.

Using the obtained paste, a plurality of linear first coated bodies are formed in parallel with each other on a flat substrate. The first line coating body corresponds to the first line portion 10 in the target lattice body 1. Various coating devices can be used to form the first linear coating body. For example, a dispenser can be used.

Once the first strip coating is formed, then a plurality of strips of the second coating are formed parallel to each other so as to intersect the first strip coating. The second line coating body corresponds to the second line portion 20 in the target lattice body 1. A coating device similar to that of the first linear coating body can be used for forming the second linear coating body. By sequentially forming the first strip coating body and the second strip coating body in this way, the lattice body 1 in which the second strip portion 20 is located on the first strip portion 10 is successful. Well obtained. Further, the second side 3b of the through hole 3 in the lattice body 1 can be curved inward.

In this way, a grid-like precursor formed by two types of linear coating bodies is obtained. The lattice-like precursor is dried to develop shape retention. Drying is performed, for example, by heating the grid-like precursor in the atmosphere at a temperature of 40 ° C. or higher and 80 ° C. or lower. The heating time can be, for example, 0.5 hours or more and 12 hours or less.

The dried lattice-like precursor is peeled from the substrate, degreased in a degreasing furnace, and then placed in a firing furnace for firing. The desired ceramic lattice 1 is obtained by this degreasing and firing. Although degreasing and firing can generally be performed in the atmosphere, it is preferable to use a degreasing furnace or a microwave furnace that circulates the atmosphere as a heating device from the viewpoint of smooth degreasing without causing cracks. Further, the setter preferably has a highly breathable porous shape. Further, as another degreasing method, it is also desirable to apply a method of heating in contact with superheated steam or a supercritical carbon dioxide degreasing method from the viewpoint of promoting degreasing. As the firing temperature, an appropriate temperature may be selected according to the type of raw material powder of the ceramic material. The same applies to the firing temperature.

By the above method, the target ceramic lattice body 1 can be obtained. The ceramic lattice body 1 is suitably used as a setter for degreasing or firing ceramic products such as shelf boards and floor boards, and can also be used as a kiln tool other than the setter, for example, a box or a beam. Further, it can be used for applications other than kiln tools, such as various jigs such as filters and catalyst carriers, and various structural materials. In this case, it is common to place the body to be fired on the second surface 1b, which is the uneven surface of the lattice body 1, but depending on the type of the body to be fired, it is placed on the first surface 1a, which is a flat surface. The body to be fired may be placed. For example, when the firing step in the manufacturing process of the multilayer ceramic capacitor (MLCC) is performed, it is preferable to place the fired body on the first surface 1a which is a flat surface.

Although the present invention has been described above based on the preferred embodiment, the present invention is not limited to the above embodiment. For example, in the ceramic lattice body 1 of the above-described embodiment, the first streak portion 10 and the second streak portion 20 intersect with each other so as to be substantially orthogonal to each other, but the intersection angle of both striae portions 10 and 20 is It is not limited to 90 degrees.

Further, the ceramic lattice body 1 of the above-described embodiment uses two types of linear portions, a first linear portion 10 and a second linear portion 20, but in addition to this, a third linear portion ( (Not shown) may be used.

Further, for the purpose of improving the strength of the ceramic lattice body 1 of the embodiment, an outer frame may be provided on the outer periphery of the lattice body 1. Specifically, at least one of the two ends of the plurality of first linear portions 10 and / or at least one of the two ends of the plurality of second linear portions 20 is outside. It may be connected to the frame. Preferably, both ends of the plurality of first linear portions 10 are connected to the first outer frame, or both ends of the plurality of second linear portions 20 are connected to the second outer frame. Has been done. More preferably, both ends of the plurality of first linear portions 10 are connected to the two first outer frames, respectively, and both ends of the plurality of second linear portions 20 are two second ends. It is connected to the outer frame of. In this case, it is preferable that each end of each first outer frame and each end of each second outer frame are connected in series.

The outer frame can be made of the same material as the first streak 10 and / or the second streak 20. It may be integrally formed with the first streak portion 10 and / or the second streak portion 20. That is, the outer frame may be integrally formed from the same material as the lattice body 1, or may be manufactured separately from the lattice body 1 and joined by a predetermined joining means. With such a form, the strength of the lattice body 1 is increased as described later, and in particular, the spalling resistance and the thermal shock resistance are improved. As a result, the lattice body 1 becomes particularly suitable for applications such as rapid firing of the object to be fired.

The outer frame has the same width as the first line portion 10 or the second line portion 20 in a plan view, or is larger or smaller than the width. In particular, the width of the outer frame is preferably larger than the width of the first streak portion 10 and the second streak portion 20. In particular, in order to effectively improve the spalling resistance, the width of the outer frame is preferably 3 mm or more, and more preferably 6 mm or more. The larger the width of the outer frame, the more it contributes to the improvement of the strength of the lattice body 1 and the improvement of the spalling resistance. However, if the width of the outer frame becomes excessively large, the ratio of the lattice body 1 to the whole decreases, and as a result, the ventilation effect of the lattice body 1 is diminished. From this point of view, the width of the outer frame is preferably 70 mm or less, and more preferably 50 mm or less. Both ends of the plurality of first linear portions 10 are connected to the two first outer frames, respectively, and both ends of the plurality of second linear portions 20 are connected to the two second outer frames. In the case of a series of each, the widths of the two first outer frames may be the same or different. Similarly, the widths of the two second outer frames may be the same or different. Further, the width of the first outer frame and the width of the second outer frame may be the same or different.

The thickness of the outer frame is the same as the thickness of the first line portion 10 or the thickness of the second line portion 20, or is larger or smaller than the thickness. The thickness of the outer frame is preferably 0.3 mm or more, and more preferably 0.5 mm or more, particularly from the viewpoint of improving spalling resistance. The thicker the outer frame, the more it contributes to the improvement of the strength of the lattice body 1 and the improvement of the spalling resistance. However, if the thickness of the outer frame becomes excessively large, the ventilation effect of the lattice body 1 tends to decrease. From this viewpoint, the thickness of the outer frame is preferably 10 mm or less, and more preferably 2 mm or less. Even when the thickness of the outer frame is smaller than the thickness of the lattice body 1, the thickness of the outer frame does not include the thickness of the lattice body 1.

Further, the ceramic lattice body 1 of the above-described embodiment has a single-layer structure, that is, a plurality of first streaks 10 and a plurality of second streaks 20 are only substantially orthogonal to each other. Alternatively, a plurality of the lattice bodies 1 may be used, and they may be laminated and used. In the case of laminating in this way, the dimensions and compositions of Tc, T1 and T2 of each of the lattice bodies 1 may be the same or different. However, in order to further increase the bonding strength and thermal shock strength of the laminated lattice bodies, it is desirable that the ceramics used in each of the laminated lattice bodies 1 have the same composition.

Further, in the above embodiment, the thickness T2 of the second streak portion 20 is larger than the thickness T1 of the first streak portion 10, but instead, the thickness T1 is larger than the thickness T2. It may be increased.

Hereinafter, the present invention will be described in more detail with reference to Examples. However, the scope of the present invention is not limited to such examples. Unless otherwise specified, "part" means "part by mass".

[Example 1]
(1) Preparation of paste for forming a linear coating body 55.6 parts of alumina powder having an average particle size of 0.5 μm, 11.1 parts of polyvinyl alcohol (average degree of polymerization 500) as an aqueous binder, and polyethylene glycol ( 11.1 parts of average molecular weight 200) and 22.2 parts of water were mixed and defoamed to prepare a paste.
(2) Formation of a linear coating body Using the above paste as a raw material, a linear first coating body was formed on a resin substrate using a dispenser, and then a linear second coating body intersecting the resin substrate was formed. .. The crossing angle of both striation coating bodies was 90 degrees. In this way, a grid-like precursor was obtained. The lattice precursor was dried at 50 ° C. for 1 hour.
(3) Solventing step The dried lattice-like precursor was peeled from the resin substrate and then placed in a degreasing furnace. The degreasing temperature was 600 ° C., the temperature rising rate was 5 ° C./hour from room temperature to 300 ° C., 2.5 ° C./hour from 300 ° C. to 600 ° C., and the temperature was maintained at 600 ° C. for 3 hours.
(4) Baking step The degreased grid-like precursor was placed in an atmospheric firing furnace. Firing was performed in this firing furnace to obtain ceramic lattices having the shapes shown in FIGS. 1 to 6. The firing temperature was 1600 ° C. and the firing time was 3 hours. The specifications of the obtained lattice are shown in Table 1 below. In the obtained lattice body, as shown in FIG. 6, the opposite second sides 3b and 3b were curved inward so as to be close to each other. The radius of curvature of the curve was 650 μm on each side. The SEM photographs of the obtained lattice body are shown in FIGS. 7 and 8.

[Example 2]
A lattice body having the shapes shown in FIGS. 1 to 6 was obtained in the same manner as in Example 1 except that the dimensions and the like of the lattice body were set to the values shown in Table 1. In the obtained lattice body, as shown in FIG. 6, the opposite second sides 3b and 3b were curved inward so as to be close to each other. The radius of curvature of the curve was 330 μm on each side.

[Comparative Example 1]
This comparative example is an example in which a nickel net is used as a lattice body. This nickel net is a 32 mesh formed by plain weaving a nickel wire having a thickness of 315 μm and spray-coated with zirconia, and has a thickness of 0.6 mm.

[Comparative Example 2]
This comparative example is an example in which alumina cloth (Nichibi Arc 1111-P manufactured by Nichibi) is used as the lattice body. This alumina cloth is formed by plain weaving alumina fibers having a thickness of 7 μm to form a mesh structure, and has a thickness of 0.7 mm.

[Comparative Example 3]
A solution obtained by dissolving gelatin in hot water (gelatin concentration was 3% with respect to water) was prepared, and this solution was mixed with a pre-prepared alumina jelly. The mixing was carried out so that the mass ratio of alumina to water in the mixed solution was 10:90. This mixed solution was allowed to stand in a refrigerator to gel. The gel was frozen in an ethanol freezer. After the frozen gel was dried (lyophilized), the obtained dried product was degreased and calcined at 1600 ° C. for 3 hours. The lattice body thus obtained had a porosity of 80%, a pore diameter of 50 μm, and a structure in which the pores were oriented in the thickness direction.

[Comparative Example 4]
This comparative example is an example in which a ceramic foam filter (hereinafter referred to as “CFF”) is used instead of the lattice body. This CFF is CS-X grade 30 manufactured by SELEE, has a pore diameter of 815-1010 μm, and has a pore ratio of 75%. Since the strength was relatively low and the pore diameter was large, it was difficult to process the thickness to 2 mm, so the thickness was set to 5 mm.

[Comparative Example 5]
This comparative example is an example in which a regular hexagonal honeycomb structure made of alumina is used instead of the lattice body. This honeycomb structure has a thickness of 2 mm, an aperture ratio of 72%, a cell density of 820 CPSI, and a cell wall thickness of 135 μm.

[Evaluation]
The lattice bodies obtained in Examples and Comparative Examples were subjected to a high temperature repetition test, evaluation of bending strength, air permeability and spalling resistance, and comprehensive evaluation by the following methods. The results are shown in Table 2 below.

[Evaluation of high temperature repetition test]
First, a sample having a length of 100 mm, a width of 100 mm, and a thickness of 2 mm to 5 mm was prepared. A 10φ alumina rod was hung on a brick frame having a V-shaped groove with a 20 mm span on two of the four sides facing each other, and a sample was placed on the brick frame. In an Ar atmosphere, the temperature was raised at 200 ° C./hour, the temperature was maintained at 1300 ° C. for 3 hours, and the furnace was cooled in a furnace five times.
A: There is no major change in appearance, and it can be used continuously.
B: A state in which the shape and color are partially changed, which hinders continuous use.
C: There is a large change in shape and color, making it difficult to continue using.

[Evaluation of bending strength]
Each sample was processed with a width of 10 mm, a 3-point bending test was performed with a span of 30 mm, and the average value of 10 points was used as the bending strength and evaluated according to the following criteria. For the calculation of the bending strength, the value of the thickness measured by observing the cross section of the fractured part was used.
A: 10 MPa or more, the probability of cracking during handling is low.
B: 5-10 MPa, the probability of cracking during handling is rather high.
C: 5 MPa or less, the probability that cracks will occur during handling is extremely high.

[Evaluation of breathability]
The air permeability of the lattice was evaluated using a palm porometer manufactured by Seika Sangyo. A sample having a diameter of 30 mm was prepared, and the air flow rate (L / sec) at a differential pressure of 0.1 kPa (gas permeation test, dry mode) was measured and used as an index of air permeability. Then, the air permeability was evaluated according to the following criteria.
A: 50 L / sec or more: Improvement of degreasing property can be expected.
B: 10-50 L / sec: A slight improvement in degreasing property can be expected.
C: 10 L / sec or less: Improvement of degreasing property cannot be expected so much.

[Evaluation of spalling resistance]
A sample having a length of 100 mm, a width of 100 mm, and a thickness of 2 mm to 5 mm was prepared. Place four columns on the pedestal, set the sample on it, place an alumina plate (bulk specific gravity 3.16, length 65 mm x width 65 mm x thickness 2 mm) on top, and heat it in an atmospheric baking furnace. After heating and holding at a desired temperature for 1 hour or more, the sample was taken out from an electric furnace and exposed to room temperature, and the presence or absence of cracks in the sample was evaluated with the naked eye. When the material is not rigid and the sample cannot be set like alumina cloth, a weight is placed at the four-point end so that it can be held. The set temperature was changed from 250 ° C. to 600 ° C. by 50 ° C., and the upper limit of the temperature at which cracks did not occur was defined as "spolling resistance (1)" and evaluated according to the following criteria.
A: At 600 ° C or higher, the possibility of spalling cracks is relatively low regardless of the load capacity of the product.
B: 400-550 ° C., there is a high possibility that spalling cracks will occur depending on the load capacity of the product.
C: Below 350 ° C, there is a high possibility that spalling cracks will occur regardless of the load capacity of the product.

〔Comprehensive evaluation〕
Based on various evaluations, the suitability as a jig for rapid firing was comprehensively evaluated according to the following criteria.
A: When all are A in various evaluations.
B: When there is at least one B in various evaluations.
C: When there is at least one C in various evaluations.

As is clear from the results shown in Table 2, it can be seen that the lattice bodies obtained in each example have higher strength than each comparative example, and also have good quenching / quenching characteristics. Furthermore, it can be seen that the air permeability is also sufficient.

[Example 3]
In this embodiment, zirconia is used instead of alumina, and an outer frame is provided on the outer periphery of the lattice. Then, the same procedure as in Example 1 was performed except that the dimensions and the like of the lattice body were set to the values shown in Table 3. A rectangular outer frame having a width of 10 mm and a thickness of 1.8 mm was provided on the outer circumference of each lattice. Two of these lattices were prepared and laminated so that the directions of the streaks in them coincided to form a two-layer structure. In this way, a lattice body with an outer frame having a two-layer structure was obtained.

[Example 4]
In Example 3, the width of the outer frame was 10 mm and the thickness was 1.2 mm. Except for this, a lattice body with an outer frame having a two-layer structure was obtained in the same manner as in Example 3.

[Example 5]
In this example, the outer frame was not provided in Example 3. A lattice body having a two-layer structure was obtained in the same manner as in Example 3 except for the above.

[Evaluation]
With respect to the lattice bodies obtained in Examples and Comparative Examples, the spalling resistance was evaluated and the maximum temperatures in the central region and the peripheral region were measured by the following methods. The results are shown in Table 3 below.

[Evaluation of spalling resistance]
A sample having an outer frame provided on a lattice body having a length of 150 mm, a width of 150 mm, and a thickness of 1.4 mm was prepared, four columns were placed, and the sample was set on the sample. Al ₂ O ₃ aggregate whose particle size was adjusted in advance by a sieve having a mesh size of 1000 μm and 500 μm was weighed so as to have a density of 0.35 g / cm ² , and with the outer frame facing up, it was placed on the sample. It was uniformly laid in the central portion 140 mm × 140 mm excluding 5 mm from the periphery and set in an air firing furnace. This Al ₂ O ₃ aggregate is intended for small electronic components such as MLCC. Next, it was heated to a high temperature by an air firing furnace and kept at a desired temperature for 1 hour or more. Then, the sample was taken out from the electric furnace and exposed to room temperature. Then, the presence or absence of cracks in the sample was evaluated with the naked eye. The set temperature for heating the sample was changed while raising the temperature from 250 ° C. to 600 ° C. in increments of 50 ° C., and the upper limit of the temperature at which the sample did not crack was set to "spolling resistance (2)".

[Measurement of maximum temperature in the central and peripheral regions]
The lattice bodies obtained in Examples and Comparative Examples were heated. The heating was performed so that the temperature inside the furnace was 500 ° C. After confirming that the temperature inside the furnace was sufficiently stable, the heated lattice body was taken out from the heating furnace into the atmosphere and rapidly cooled. The time until the temperature of the central portion in the plan view of the lattice body was cooled to about 400 ° C. was measured. Moreover, when the temperature of the central portion in the plan view of the lattice body became about 400 ° C., the lowest temperature in the peripheral portion in the plan view of the lattice body was measured. The temperature was measured by thermography (CPA-640A manufactured by Chino Corporation). The results are shown in Table 3 below. In Table 3, in the case of a lattice body having two layers, Tc, T1 and T2 are counted as the first layer and the second layer from the bottom surface side, that is, the 1a surface side, and the values in each layer are measured and described. ..

As is clear from the results shown in Table 3, the lattice bodies obtained in Examples 3 and 4 have a higher heating temperature, which is a measure of spalling resistance, as compared with Example 5, and have good quenching / quenching characteristics. It turns out that. The reason for this is that, as shown in Table 3, in Examples 3 and 4 having an outer frame, the maximum temperature in the peripheral region is higher and the temperature difference from the maximum temperature in the central region is smaller than in Example 5 without the outer frame. Is presumed to be the cause.
Further, as is clear from the comparison between Example 3 and Example 4, Example 3 having a large outer frame has a maximum temperature in the central region as compared with Example 4 having a smaller outer frame than the same Example. It can be seen that the temperature difference between the temperature and the maximum temperature in the surrounding area is small.

Claims (9)

A ceramic lattice body having a plurality of first streaks made of ceramics extending in one direction and a plurality of second streaks made of ceramics extending in a direction intersecting the first streaks. Consists of
The lattice body has a first surface and a second surface located on the opposite side thereof.
At the intersection of the first streak and the second streak, the second streak located relatively on the first surface side and relatively on the second surface side. Lines are arranged,
The thickness at the intersection is larger than either the thickness of the first streak or the thickness of the second streak at a portion other than the intersection.
When observing the cross-sections of the first and second streaks in the thickness direction at a portion other than the intersection, the first streaks and the second streaks are on the first surface side thereof. It has a flat shape parallel to the surface and is flush with each other, and the second surface side thereof has a curved surface shape that is convex from the first surface to the second surface.
The first surface of the lattice body is a flat surface, and the second surface is an uneven surface.
The lattice body is a kiln tool having a surface roughness Ra on the second surface side of 10 μm or more and 300 μm or less, and a surface roughness Ra on the first surface side of 0.01 μm or more and 20 μm or less. By substantially orthogonalizing the plurality of first streaks and the plurality of second streaks, a plurality of substantially rectangular through holes are formed in the lattice in the plan view of the lattice. Orthogonal
The kiln tool according to claim 1, wherein in the substantially rectangular shape , two opposing sides are curved inward so as to be close to each other in the central region in the longitudinal direction thereof. The kiln tool according to claim 1 or 2, wherein the thickness of the second line portion is larger than the thickness of the first line portion at a portion other than the intersection. The kiln tool according to any one of claims 1 to 3, which is made of ceramics containing alumina, mullite, cordierite, zirconia, silicon nitride or silicon carbide. The kiln tool according to claim 4, wherein the surface is coated with zirconia. The kiln tool according to any one of claims 1 to 5, which is used as a setter for firing a ceramic product. The kiln tool according to any one of claims 1 to 6, wherein an outer frame is provided on the outer periphery. Claim 7 that the outer frame is made of the same material as the first line portion and / or the second line portion, and is integrally formed with the first line portion and / or the second line portion. Kiln tools listed in. The kiln tool according to any one of claims 1 to 8, wherein a plurality of the lattice bodies are used and they are laminated to form a multi-layer structure having two or more layers.