JP6825812B2 - Alignment stage and processing equipment equipped with it - Google Patents

Description

The present invention relates to an alignment stage for imitating a workpiece machined by a rotary tool to imitate a rotary tool, and a machining apparatus including the alignment stage.

Conventionally, an alignment stage for correcting the deviation of the work has been proposed (see, for example, Patent Document 1).

In the alignment stage of Patent Document 1, a base having a convex spherical surface is arranged on a centering table having a concave spherical surface, and the base slides with respect to the centering table so that the base moves in a predetermined direction. It is configured to remain perpendicular to it. Further, the alignment stage of Patent Document 1 is provided with a rotation stopper for the centering table of the base.

Japanese Patent No. 5053949

However, in the alignment stage of Patent Document 1, the rotation stop hinders the movement of the base for correcting the deviation, and the deviation cannot be sufficiently corrected. Further, the alignment stage of Patent Document 1 can only slightly correct the misalignment in the horizontal direction.

Therefore, an object of the present invention is to provide an alignment stage that does not require a rotation stopper and that can sufficiently correct the displacement of the work, and a processing apparatus provided with the alignment stage.

In order to solve the above problems, the alignment stage of the embodiment of the present invention is an alignment stage for supporting a work and automatically aligning the work, and is a first partial cylindrical inner surface extending along a first direction. A first plate having a concave surface, a first convex surface arranged on the first plate and having a shape along the first concave surface on the first plate side, and the first convex surface on a side opposite to the first plate side. A second plate having a second concave surface having a partial cylindrical inner surface shape extending along a second direction orthogonal to the direction, and a shape arranged on the second plate and along the second concave surface on the second plate side. A third plate having a second convex surface having the surface is provided.

The first concave surface of the first plate and the second concave surface of the second plate are formed of a porous sintered body, and from the first concave surface of the first plate to the first convex surface of the second plate. The compressed gas may be configured to be releasable toward the second plate, and the compressed gas may be releasable from the second concave surface of the second plate toward the second convex surface of the third plate.

The first concave surface of the first plate and the first convex surface of the second plate are in contact with each other via a lubricant, and the second concave surface of the second plate and the second convex surface of the third plate are in contact with each other. May come into contact with each other via a lubricant.

It is provided with an urging means for urging the second plate to return to the initial position with respect to the first plate, and an urging means for urging the third plate to return to the initial position with respect to the second plate. Is also good.

The machining apparatus according to the embodiment of the present invention includes a rotary tool that is rotationally driven, a work that is machined by the rotary tool, and the alignment stage that supports the work and automatically aligns the work.

According to the present invention, it is possible to provide an alignment stage and a processing apparatus provided with the alignment stage, which does not require a rotation stop and can sufficiently correct the displacement of the work.

The schematic diagram of the processing apparatus provided with the alignment stage which concerns on this embodiment is shown. A side view of a partial cross section when the alignment stage is viewed from the Y direction is shown. A side view of a partial cross section when the alignment stage is viewed from the X direction is shown. (A) shows a perspective view of the first to third plates, and (b) shows an exploded perspective view of the first to third plates. The plan view of the 1st plate and the 2nd plate is shown. The figure for demonstrating the automatic alignment of a workpiece with respect to a rotary tool by an alignment stage is shown.

The alignment stage 1 according to the embodiment of the present invention will be described with reference to the drawings.

The alignment stage 1 is used in the processing device 10 for machining the work 14 by the rotary tool 12, and causes the horizontal position deviation of the central axis A of the work 14 and the vertical inclination angle deviation with respect to the rotation axis C of the rotary tool 12. It is a centering mechanism that absorbs.

FIG. 1 shows a schematic view of a processing apparatus 10 including an alignment stage 1 according to the present embodiment. The processing apparatus 10 is, for example, an apparatus for performing roller burnishing processing.

<Overall configuration of processing device 10>
As shown in FIG. 1, the processing apparatus 10 includes a motor 11, a rotary tool 12, an alignment stage 1, and a fixture 13. The rotary tool 12 is rotationally driven in the predetermined direction R by the motor 11. The rotary tool 12 is, for example, roller burnishing and is provided so as to be movable in the vertical direction. The fixture 13 is, for example, a lever chuck, which is provided on the third upper surface 4A of the third plate 4 of the alignment stage 1 and fixes the work 14 to be machined. The work 14 is a cylindrical bush in the present embodiment and has an inner peripheral surface 14a.

<Alignment stage 1>
Next, the configuration of the alignment stage 1 will be described with reference to FIGS. 1 to 5. The left-right direction of the alignment stage 1 shown in FIG. 1 is defined as the X direction, the direction orthogonal to the paper surface is defined as the Y direction, and the vertical direction is defined as the Z direction. The Y direction corresponds to the first direction, and the X direction corresponds to the second direction.

FIG. 2 shows a partial cross-sectional side view of the alignment stage 1 when viewed from the Y direction. FIG. 3 shows a partial cross-sectional side view of the alignment stage 1 when viewed from the X direction. FIG. 4A shows a perspective view of the first to third plates 2 to 4, and FIG. 4B shows an exploded perspective view of the first to third plates 2 to 4. FIG. 5 shows a plan view of the first plate 2 and the second plate 3.

As shown in FIGS. 2 and 3, the alignment stage 1 includes a first plate 2, a second plate 3, a third plate 4, a plurality of support posts 5, and a plurality of tension springs 6. The first plate 2, the second plate 3, and the third plate 4 are laminated from the bottom in this order.

<First plate 2>
As shown in FIGS. 2 to 4, the first plate 2 is installed on an installation table (not shown) and includes a first plate base portion 2A and a first sintering portion 2B.

The first plate base 2A is made of stainless steel or the like and has a substantially flat plate shape. A first recess 2d is formed in the first plate base 2A. The first recess 2d is formed so as to open to the first upper surface 2C of the first plate base 2A and the first side surfaces 2E and 2E orthogonal to the Y direction. Insertion holes 2g are formed at two locations on the first and second side surfaces 2F and 2F orthogonal to the X direction in the first plate base 2A. Each insertion hole 2g is formed at an end portion in the Y direction on each 1-2 side surface 2F. A first air supply hole 2h extending along the X direction is formed on the 1st-2 side surface 2F. An air supply tube of an air supply pump (not shown) is connected to the first air supply hole 2h. Two air supply grooves 2i are formed in the first recess 2d of the first plate base 2A. As shown in FIG. 5, the two air supply grooves 2i form a rectangular ring having different sizes and communicate with the first air supply hole 2h.

As shown in FIGS. 2 to 4, the first sintered portion 2B is provided in the first recess 2d of the first plate base portion 2A. The first sintered portion 2B is made of a porous sintered body, and a first concave surface 2J having a partial cylindrical inner surface extending along the Y direction is formed on the second plate 3 side. The first concave surface 2J has a predetermined radius of curvature. The first sintered portion 2B is formed by sintering a metal powder such as copper powder, stainless steel powder, aluminum powder or the like in which a solid lubricant such as graphite is dispersed, or an alloy powder at a high temperature to form a porous sintered plate material. After that, the sintered plate material is laminated on the first recess 2d of the first plate base 2A, heated and compressed, both are diffused, and the sintered plate material is cut so as to have a predetermined radius of curvature. The compressed air supplied from the air supply pump (not shown) is supplied to the first sintered portion 2B via the first air supply hole 2h and the air supply groove 2i, and is supplied from the first concave surface 2J of the first sintered portion 2B. It is uniformly discharged toward the second plate 3.

<2nd plate 3>
The second plate 3 is arranged on the first plate 2 and includes a second plate base 3A and a second sintered portion 3B.

The second plate base 3A is made of stainless steel or the like and has a substantially flat plate shape. A second recess 3d is formed on the second upper surface 3C of the second plate base 3A. The second recess 3d is formed so as to open to the second upper surface 3C of the second plate base 3A and the second side surfaces 3E and 3E orthogonal to the X direction. Insertion holes 3g are formed at two locations on the 2-1 side surfaces 3E, 3E and the 2-2 side surfaces 3F and 3F orthogonal to the Y direction in the second plate base 3A. Each insertion hole 3g is formed at an end portion in the X direction or the Y direction on each of the 2-1 side surface 3E and the 2-2 side surface 3F. Each insertion hole 3g formed in the 2-1 side surface 3E of the second plate base 3A is located above each insertion hole 2g formed in the 1-2 side surface 2F of the first plate 2. On the other side 2-2 side surface 3F, a second air supply hole 3h extending along the Y direction is formed. An air supply tube of an air supply pump (not shown) is connected to the second air supply hole 3h. Two air supply grooves 3i are formed in the second recess 3d of the second plate base 3A. As shown in FIG. 5, the two air supply grooves 3i form a rectangular ring having different sizes and communicate with the second air supply hole 3h. In FIG. 5, the reference numbers in parentheses correspond to the reference numbers of the components of the second plate 3.

On the first plate 2 side of the second plate base 3A, a partially cylindrical first convex surface 3J extending along the Y direction is formed. The radius of curvature of the first convex surface 3J is substantially equal to the radius of curvature of the first concave surface 2J of the first plate 2. Therefore, the first convex surface 3J and the first concave surface 2J are aligned with each other. The second plate 3 is installed with respect to the first plate 2 so that the first convex surface 3J of the second plate 3 is aligned with the first concave surface 2J of the first plate 2. Therefore, the second plate 3 is swingable and movable along the Y direction with respect to the first plate 2 about the central axis extending along the Y direction of the first convex surface 3J having a partially cylindrical surface shape. Therefore, the second plate 3 can move with respect to the first plate 2 with two degrees of freedom (Y direction, θy direction).

The second sintered portion 3B is provided in the second recess 3d of the second plate base portion 3A. The second sintered portion 3B is made of a porous sintered body, and a second concave surface 3K having a partial cylindrical inner surface extending along the X direction is formed on the third plate 4 side. The second concave surface 3K has a predetermined radius of curvature. The second sintered portion 3B is formed in the same manner as the first sintered portion 2B of the first plate 2. The compressed air supplied from the air supply pump (not shown) is supplied to the second sintered portion 3B via the second air supply hole 3h and the air supply groove 3i, and is supplied from the second concave surface 3K of the second sintered portion 3B. It is uniformly discharged toward the third plate 4.

<Third plate 4>
The third plate 4 is arranged on the second plate 3, is made of stainless steel or the like, and has a substantially flat plate shape. A plurality of mounting holes 4b for screwing bolts for mounting the fixture 13 to the third plate 4 are formed on the third upper surface 4A of the third plate 4. Insertion holes 4d are formed at two locations on the 3-1 side surfaces 4C and 4C orthogonal to the Y direction in the third plate 4. Each insertion hole 4d is formed at an end portion in the X direction on each of the 3-1 side surfaces 4C and 4C. Further, each insertion hole 4d is located above each insertion hole 3g formed on the 2nd-2 side surface 3F of the second plate 3.

On the second plate 3 side of the third plate 4, a partially cylindrical second convex surface 4E extending along the X direction is formed. The radius of curvature of the second convex surface 4E is configured to be substantially equal to the radius of curvature of the second concave surface 3K of the second plate 3. Therefore, the second convex surface 4E and the second concave surface 3K are aligned with each other. The third plate 4 is installed with respect to the second plate 3 so that the second convex surface 4E of the third plate 4 is aligned with the second concave surface 3K of the second plate 3. Therefore, the third plate 4 is swingable and movable along the X direction with respect to the second plate 3 about the central axis extending along the X direction of the second convex surface 4E having a partially cylindrical surface shape. Therefore, the third plate 4 can move with respect to the second plate 3 with two degrees of freedom (X direction, θx direction). As a result, the first to third plates 2 to 4 provide an alignment stage 1 having four degrees of freedom (X direction, Y direction, θx direction, θy direction).

Each support post 5 is inserted into each insertion hole 2g, 3g, 4d and fixed to the first to third plates 2 to 4. Each tension spring 6 corresponding to the urging means is attached to the pair of support posts 5 arranged along the Z direction. Specifically, in the first plate 2 and the second plate 3, a plurality of support posts provided on the 1-2 side surfaces 2F, 2F of the first plate 2 and the 2-1 side surfaces 3E, 3E of the second plate 3 A plurality of tension springs 6 are mounted on the 5. In this way, since the first plate 2 and the second plate 3 are connected to each other by the plurality of tension springs 6, even if the second plate 3 is displaced with respect to the first plate 1, the plurality of tension springs 6 The second plate 3 returns to the initial position due to the urging force of. The initial position of the second plate 3 is that the 2-1 side surfaces 3E and 3E of the second plate 3 are relative to the 1-2 side surfaces 2F and 2F of the first plate 2, and the second plate 3 is the first position. 2-2 Side surfaces 3F and 3F are positions of the first plate 2 with respect to the first plate 2 of the second plate 3 which is flush with respect to the first side surfaces 2E and 2E of the first plate 2.

Further, in the second plate 3 and the third plate 4, a plurality of support posts 5 provided on the 2-2 side surfaces 3F and 3F of the second plate 3 and the 3-1 side surfaces 4C and 4C of the third plate 4 , A plurality of tension springs 6 are mounted. As a result, even if the third plate 4 is displaced with respect to the second plate 3, the third plate 4 returns to the initial position due to the urging force of the plurality of tension springs 6. The initial position of the third plate 4 is that the 3-1 side surfaces 4C and 4C of the third plate 4 are relative to the 2-2 side surfaces 3F and 3F of the second plate 3, and the X of the third plate 4 is The 3-2 side surfaces 4F and 4F orthogonal to the direction are positions with respect to the second plate 3 of the third plate 4 which is flush with respect to the 2-1 side surfaces 3E and 3E of the second plate 3.

Next, the operation of the alignment stage 1 when the work 14 is machined by the processing device 10 will be described with reference to FIG.

FIG. 6 is a diagram for explaining automatic alignment of the work 14 with respect to the rotary tool 12 by the alignment stage 1 in the present embodiment.

In FIG. 6A, since the right angle between the unshown installation table on which the alignment stage 1 is installed and the rotation axis C of the rotary tool 12 is not precise, the central axis A of the inner peripheral surface 14a of the work 14 is the rotary tool. The rotation axis C of 12 is in a state of being deviated and angled in the XY plane. Since the compressed air is uniformly discharged from the first concave surface 2J of the first plate 2 toward the first convex surface 3J of the second plate 3, the first concave surface 2J of the first plate 2 and the second plate 3 An air layer 7 is formed between the first convex surface 3J and the air layer 7. Therefore, the first concave surface 2J of the first plate 2 and the first convex surface 3J of the second plate 3 are in a non-contact state. Similarly, the air layer 8 is also formed between the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4. Therefore, the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4 are in a non-contact state.

In the state of the rotary tool 12 and the work 14 shown in FIG. 6A, the rotary tool 12 driven by rotation is lowered to insert the rotary tool 12 into the inner peripheral surface 14a of the work 14. The pressing force of the rotary tool 12 on the work 14 is transmitted to the alignment stage 1 via the fixture 13. As a result, the alignment stage 1 operates so that the central axis A of the inner peripheral surface 14a of the work 14 does not deviate from the rotation axis C of the rotary tool 12.

For example, as shown in FIG. 6B, in order to eliminate the deviation of the XY plane of the central axis A of the inner peripheral surface 14a of the work 14 with respect to the rotation axis C of the rotary tool 12, the second plate 3 is 1 The plate 2 is displaced (moved) along the Y direction, and the third plate 4 is displaced (moved) along the X direction on the second plate 3. Further, in order to eliminate the displacement of the inclination angle of the central axis A of the inner peripheral surface 14a of the work 14 with respect to the rotation axis C of the rotary tool 12 in the vertical direction, the second plate 3 is formed on the first concave surface 2J of the first plate 2. It is displaced (swinged) along the line, and the third plate 4 is displaced (swinged) with the displacement of the second plate 3.

In this way, the work 14 can be traced along the rotary tool 12, and the central axis A of the work 14 can be positioned coaxially with the rotary axis C of the rotary tool 12.

When the roller burnishing process of the inner peripheral surface 14a of the work 14 by the rotary tool 12 is completed and the rotary tool 12 is separated from the work 14, the second plate 3 and the third plate 4 are moved by the urging force of the plurality of tension springs 6. Return to their initial position.

<Effect>
As described above, the alignment stage 1 of the present embodiment is arranged on the first plate 2 and the first plate 2 having the first concave surface 2J having a partial cylindrical inner surface shape extending along the Y direction, and is arranged on the first plate 2 side. A second having a first convex surface 3J having a shape along the first concave surface 2J and a second concave surface 3K having a partial cylindrical inner surface shape extending along the X direction orthogonal to the Y direction on the opposite side of the first plate 2 side. A plate 3 and a third plate 4 arranged on the second plate 3 and having a second convex surface 4E having a shape along the second concave surface 3K on the side of the second plate 3 are provided.

According to such a configuration, the second plate 3 is swingable and moves along the Y direction with respect to the first plate 2 about the central axis extending along the Y direction of the first convex surface 3J having a partially cylindrical surface shape. It is possible, and the third plate 4 is swingable and movable along the X direction with respect to the second plate 3 about the central axis extending along the X direction of the second convex surface 4E having a partially cylindrical surface shape. is there. As a result, the first to third plates 2 to 4 can provide the alignment stage 1 having four degrees of freedom (X direction, Y direction, θx direction, θy direction), and correct the deviation of the work 14 with respect to the rotary tool 12. can do. In particular, the alignment stage 1 according to the present embodiment can correct the misalignment of the central axis A of the work 14 even if the misalignment in the horizontal direction is relatively large. Further, since the rotation stop is not required, the movement of the alignment stage 1 for correcting the deviation of the work 14 is not hindered, and the deviation of the work 14 can be sufficiently corrected.

Further, the first concave surface 2J of the first plate 2 and the second concave surface 3K of the second plate 3 are formed of a porous sintered body, and the first concave surface 2J of the first plate 2 to the first convex surface of the second plate 3 are formed. The compressed air is configured to be discharged toward 3J, and the compressed air is configured to be discharged from the second concave surface 3K of the second plate 3 toward the second convex surface 4E of the third plate 4. According to such a configuration, between the first concave surface 2J of the first plate 2 and the first convex surface 3J of the second plate 3, the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4 By making the contact between the work 14 and the work 14, the deviation of the work 14 can be corrected with an extremely small force.

Further, the first plate 2 and the second plate 3 are connected to each other by a plurality of tension springs 6, and the second plate 3 and the third plate 4 are connected to each other by a plurality of tension springs 6. According to such a configuration, the urging force of the plurality of tension springs 6 can prevent the second plate 3 from separating from the first plate 2 and the third plate 4 from the second plate 3, and the second plate 3 can be prevented from being separated from the second plate 3. The position of the second plate 3 with respect to the first plate 2 and the position of the third plate 4 with respect to the second plate 3 can be returned to the initial positions.

The present invention is not limited to the above-described embodiment, and many modifications can be made within the scope of the gist thereof.

For example, the first plate 2 and the second plate 3 are entirely made of stainless steel or the like without providing the first sintered portion 2B on the first plate 2 and the second sintered portion 3B on the second plate 3. The 1 concave surface 2J and the 2nd concave surface 3K are formed, and the 1st concave surface 2J of the 1st plate 2 and the 1st convex surface 3J of the 2nd plate 3 are brought into contact with each other via a lubricant to form the 2nd plate 2 The second concave surface 3K and the second convex surface 4E of the third plate 4 may be configured to come into contact with each other via a lubricant.

The first plate 2 and the second plate 3 are entirely made of stainless steel or the like without providing the first sintered portion 2B on the first plate 2 and the second sintered portion 3B on the second plate 3, and the first concave surface. 2J and the second concave surface 3K may be formed, and a plurality of air discharge holes may be formed in each of the first concave surface 2J and the second concave surface 3K. Then, compressed air is discharged from the plurality of air discharge holes toward the first convex surface 3J of the second plate 3 and the second convex surface 4E of the third plate 4, and the first concave surface 2J and the second plate 2 of the first plate 2 are discharged. An air layer may be formed between the first convex surface 3J of the plate 3 and between the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4.

A tension spring 6 is used as the urging means for urging the second plate 3 and the third plate 4 to return to the initial position, but for example, rubber or a magnet may be used. Further, the gas supplied from the air supply pump (not shown) is not limited to air, and may be an inert gas such as nitrogen.

1: Alignment stage, 2: 1st plate, 2J: 1st concave surface, 3: 2nd plate, 3J: 1st convex surface, 4: 3rd plate, 4E: 2nd convex surface, 6: tension spring, 10: processing equipment , 12: Rotating tool, 14: Work

Claims (4)

It is an alignment stage for supporting the work and automatically aligning it.
A first plate having a first concave surface in the shape of a partial cylinder extending along the first direction,
A first convex surface arranged on the first plate and having a shape along the first concave surface on the first plate side and a second direction orthogonal to the first direction on the side opposite to the first plate side. A second plate having a second concave surface on the inner surface of a partial cylinder extending along the
A third plate arranged on the second plate and having a second convex surface having a shape along the second concave surface on the second plate side,
A first urging means that connects the second plate and the first plate to each other and urges the second plate to return to the initial position with respect to the first plate.
An alignment stage comprising a second urging means for connecting the third plate and the second plate to each other and urging the third plate to return to an initial position with respect to the second plate . The first concave surface of the first plate and the second concave surface of the second plate are formed of a porous sintered body.
The compressed gas can be discharged from the first concave surface of the first plate toward the first convex surface of the second plate.
The alignment stage according to claim 1, wherein the compressed gas can be discharged from the second concave surface of the second plate toward the second convex surface of the third plate. The first concave surface of the first plate and the first convex surface of the second plate are in contact with each other via a lubricant.
The alignment stage according to claim 1, wherein the second concave surface of the second plate and the second convex surface of the third plate are in contact with each other via a lubricant. Rotating tools that are driven to rotate,
And a alignment stage according to any one of claims 1 to 3 for automatically aligning and supporting a word phrase is processed by the rotating tool, machining device.

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