JP6842750B2 - Scanning probe microscope and its control method - Google Patents

Description

The present invention relates to a scanning probe microscope and a method for controlling a scanning probe microscope.

The scanning probe microscope uses a sharp probe (probe) to acquire the physical information and chemical properties generated by the interaction between the two when the probe is brought close to the sample, and controls the signal. It is a device that images the three-dimensional shape of the sample surface by scanning the sample surface with a probe.

In recent years, among scanning probe microscopes, a scanning ion-conductance microscope (SICM, hereinafter also referred to as "SICM"), which enables observation of biological samples including living cells and the like, has attracted attention. SIMM uses a glass tube called a nanopipette as a probe, and utilizes the change in ionic current that occurs between the electrode in the nanopipette filled with the electrolyte solution and the electrode in the electrolyte solution in which the sample is immersed. It images the three-dimensional shape of the sample surface and enables observation of soft biological samples in liquid. In particular, the hopping mode, in which scanning is performed while shaking the nanopipette up and down, enables extremely clear imaging of a sample having a complicated shape such as a nerve cell (see, for example, Non-Patent Document 1). ..

Yasufumi Takahashi et al., "Topographic imaging of convoluted surface of live cells by scanning ion conductance microscopy in a standing approach mode", Physical Chemistry Chemical Physics, Vol. 12 (No. 34), September 14, 2010, p10012- 10017

However, although the technique of Non-Patent Document 1 enables clear imaging, there is a problem that the measurement time is long. In particular, in the continuous imaging mode in which the imaging of moving living cells is repeated, it is expected that the time required to obtain one image will be shortened.

Therefore, an object of the present invention is to provide a scanning probe microscope capable of repeating imaging in a shorter measurement time than before in a continuous photographing mode and a control method thereof.

In order to achieve the above object, the scanning probe microscope according to one embodiment of the present invention is orthogonal to the probe, the XY scanner that scans the probe two-dimensionally relative to the sample, and the scanning surface by the XY scanner. A Z scanner that drives the probe in the Z-axis direction and a control unit that images a three-dimensional shape on the surface of the sample by controlling the XY scanner and the Z scanner are provided, and the control unit is a continuous photographing mode that repeats imaging. In, the scanning conditions for at least one of scanning the probe and driving the probe in the Z-axis direction for the next imaging are determined based on the images obtained in the past imaging, and the XY scanner is determined according to the determined scanning conditions. and to repeatedly to perform the following imaging by controlling the Z scanner, identifies the sample area in the obtained image is a region where the sample is present in the past imaging, based on the specified sample area Then, in the next imaging, the measurement area, which is the area to be scanned by the probe, is determined, and the XY scanner is controlled so that the probe scans only in the determined measurement area, which is obtained by past imaging. A region widened by a predetermined width with respect to the sample region of the image is determined as the measurement region .

Further, in order to achieve the above object, the control method of the scanning probe microscope according to one embodiment of the present invention includes a control step of imaging a three-dimensional shape on the surface of a sample by controlling an XY scanner and a Z scanner. In the control step, in a continuous shooting mode in which imaging is repeated, scanning of the probe for the next imaging and scanning of at least one of driving the probe in the Z-axis direction based on the images obtained in the past imaging. determining the condition, to by controlling the XY scanner and the Z scanner in accordance with the determined scanning condition repeatedly to perform the following imaging, it is the region where the sample is present in the image obtained by past imaging The sample region is specified, and based on the identified sample region, the measurement region which is the region to be scanned by the probe in the next imaging is determined, and the probe scans only the determined measurement region. The scanner is controlled, and a region widened by a predetermined width with respect to the sample region of the image obtained in the past imaging is determined as the measurement region .

With such a scanning probe microscope and a control method, in the continuous shooting mode by the scanning probe microscope, the scanning conditions of the probe in the next imaging are determined based on the images obtained in the past imaging. It is possible to repeat the imaging under suitable scanning conditions depending on the standard sample, and the measurement time is shortened as compared with the conventional technique in which the past image is not reused.

INDUSTRIAL APPLICABILITY The present invention provides a scanning probe microscope capable of repeating imaging in a shorter measurement time than before in a continuous photographing mode, and a control method thereof.

Therefore, the practical value of the present invention is extremely high in the present day when the measurement time in continuous imaging of a moving sample such as a living cell is shortened and the development of bioscience is expected.

A block diagram showing a configuration of a scanning probe microscope according to an embodiment. A flowchart showing the basic operation of the scanning probe microscope according to the embodiment in the continuous shooting mode. The figure which shows the setting example of the measurement area in the continuous photography mode by the scanning probe microscope which concerns on embodiment. The figure which shows the setting example of the hopping amount in the continuous shooting mode by the scanning probe microscope which concerns on embodiment. The figure which shows the specific scanning locus of the probe of the scanning probe microscope which concerns on embodiment. The figure which shows an example of the moving image obtained in the continuous shooting mode by the scanning probe microscope which concerns on embodiment. A flowchart showing the operation of the scanning probe microscope according to the modified example of the embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It should be noted that all of the embodiments described below show a specific example of the present invention. The numerical values, shapes, materials, components, arrangement positions and connection forms of the components, steps, the order of steps, etc. shown in the following embodiments are examples, and are not intended to limit the present invention. Further, among the components in the following embodiments, the components not described in the independent claims indicating the highest level concept of the present invention will be described as arbitrary components.

FIG. 1 is a block diagram showing a configuration of a scanning probe microscope 10 according to the present embodiment. In the present embodiment, the scanning probe microscope 10 is a SIMM for observing a sample 22 such as a living cell immersed in an electrolyte solution 21 placed in a container 20, and the probe 11, the XY scanner 12, the Z scanner 13, and the Z scanner 13. It is composed of a scanner controller 14, a current amplifier 15, a pipette electrode 16, a control electrode 17, a voltage source 18, and a control unit 19.

The probe 11 is a glass tube called a nanopipette.

The XY scanner 12 is a device that scans the probe 11 two-dimensionally (on the XY plane) relative to the sample 22, and is, for example, a piezoelectric element.

The Z scanner 13 is a device that drives the probe 11 in the Z-axis direction orthogonal to the scanning plane (XY plane) of the XY scanner 12, and is, for example, a piezoelectric element.

The pipette electrode 16 is an electrode provided in the probe 11 filled with the electrolyte solution 21.

The control electrode 17 is an electrode provided in the electrolyte solution 21 in the container 20 in which the sample 22 is immersed.

The voltage source 18 is a power source that supplies a DC voltage applied between the pipette electrode 16 and the control electrode 17 to generate an ionic current between the electrodes.

The current amplifier 15 is a circuit that amplifies the ionic current flowing between the pipette electrode 16 and the control electrode 17 and measures the ionic current.

By controlling the XY scanner 12, the scanner controller 14 scans the probe 11 two-dimensionally relative to the sample 22, and the ion current measured by the current amplifier 15 is constant (conductance is constant). This is a drive device that drives the probe 11 in the Z-axis direction so as to be close to the sample 22 and maintain a non-contact state by feedback-controlling the Z scanner 13 so as to be.

The control unit 19 scans the probe 11 for the next imaging and drives the probe 11 in the Z-axis direction based on the images obtained in the past imaging in the continuous shooting mode in which the imaging is repeated. It is a device that repeats the next imaging by determining the scanning conditions with respect to the above and controlling the XY scanner 12 and the Z scanner 13 via the scanner controller 14 according to the determined scanning conditions. For example, it is connected to the scanner controller 14. It is a computer device. The computer device includes an input device such as a display and a keyboard, a CPU, a ROM, a RAM, an input / output interface, a hard disk, etc., and the CPU loads a program stored in the hard disk or the like into the RAM and executes the control unit. Demonstrate the function as 19. The control unit 19 has not only a continuous shooting mode but also a shooting mode in which imaging is performed only once.

FIG. 2 is a flowchart showing a basic operation (control step) of the scanning probe microscope 10 shown in FIG. 1 in the continuous photographing mode.

In the continuous shooting mode, the control unit 19 first scans the entire preset two-dimensional region (for example, 128 pixels × 128 pixels) including the sample 22 with the probe 11 and images it as the first shooting (for example, 128 pixels × 128 pixels). S10).

Next, the control unit 19 scans the probe 11 for the next imaging and the Z-axis direction of the probe 11 based on the image obtained in the past imaging (here, the imaging in step S10). The scanning conditions for at least one of the drives of the are determined (S11). Specifically, the control unit 19 performs (1) narrowing down the measurement area and (2) optimizing the hopping amount.

More specifically, in (1) narrowing down the measurement area, the control unit 19 sets the sample area, which is the area where the sample 22 exists in the image obtained in the past imaging (here, the image in step S10). Identify and determine the measurement region, which is the region to be scanned by the probe 11 in the next imaging, based on the identified sample region. At this time, as shown in the setting example of the measurement area in FIG. 3, the control unit 19 uses the sample area 30 (in FIG. 3) of the image obtained in the past imaging (here, imaging in step S10). A region widened by a predetermined width (for example, a size of 5 pixels outward from the contour) with respect to (a)) is determined as a measurement region 31 (a region surrounded by a broken line in FIG. 3B). To do. Note that FIG. 3 shows an example of a sample region 30 ((a) in FIG. 3) and a measurement region 31 ((b) in FIG. 3) using nerve cells as a sample.

Here, as a specific method for specifying the sample region 30, for example, the contour (edge) of the sample can be detected by performing a differential operation on the obtained image in the spatial distribution of the pixel values, or the pixel value can be detected. The sample region 30 is specified by excluding the background color (region of the electrolyte solution 21) specified from the frequency distribution (histogram) for each from the image.

Further, in (2) optimization of the hopping amount, the control unit 19 identifies a sample region in which the sample 22 exists in the image obtained in the past imaging (here, imaging in step S10). Then, based on the specified sample region, the hopping amount, which is the amplitude in driving the probe 11 in the Z-axis direction, is determined in the next imaging. At this time, as shown in the setting example of the hopping amount 11a in FIG. 4, the control unit 19 is in a region including the boundary between the sample region 33 and the region other than the sample region 33 (non-sample regions 34a and 34b) in the image. , The hopping amount 11a is determined so that the hopping amount 11a is larger than the region not including the boundary. The area including the boundary is an area including the boundary and a range separated from the boundary by a predetermined pixel (for example, 3 pixels).

Next, returning to FIG. 2, as the second photographing, the control unit 19 scans the probe 11 with respect to the measurement region and images it according to the scanning conditions determined in step S11 (S12). More specifically, the control unit 19 controls the XY scanner 12 via the scanner controller 14 so that the probe 11 scans only the measurement region narrowed down in step S11. Further, the control unit 19 probes so that the hopping amount is larger in the region including the boundary between the sample region and the region other than the sample region than in the region not including the boundary according to the hopping amount optimized in step S11. The Z scanner 13 is controlled via the scanner controller 14 so that the 11 is driven in the Z-axis direction.

Next, the control unit 19 determines whether or not the shooting has been completed a preset number of times as the continuous shooting mode (S13), and if it is determined that the shooting has been completed as a result (Yes in S13). If it is determined that the continuous shooting mode is finished and the shooting is not finished (No in S13), steps S11 and S12 are repeated again.

In the repetition of steps S11 and S12, in step S11, the scanning of the probe 11 for the next imaging is performed based on the image obtained in the past imaging (here, the imaging in the immediately preceding step S12). And the scanning conditions for at least one of the driving of the probe 11 in the Z-axis direction (S11). Specifically, the control unit 19 performs (1) narrowing down the measurement area and (2) optimizing the hopping amount in the same manner as in the previous process. Then, in step S12, as the third photographing, the control unit 19 scans the probe 11 with respect to the measurement region and images it according to the scanning conditions determined in the immediately preceding step S11 (S12). More specifically, the control unit 19 controls the XY scanner 12 via the scanner controller 14 so that the probe 11 scans only the measurement area narrowed down in the immediately preceding step S11. Further, the control unit 19 makes the hopping amount larger in the region including the boundary between the sample region and the region other than the sample region than in the region not including the boundary according to the hopping amount optimized in the immediately preceding step S11. The Z scanner 13 is controlled via the scanner controller 14 so that the probe 11 is driven in the Z-axis direction.

In this way, in the continuous shooting mode, (1) narrowing down the measurement area and (2) optimizing the hopping amount in the next imaging based on the image obtained in the past (here, immediately before) imaging. The scanning conditions including the above are determined, and the next imaging is performed under the determined scanning conditions.

As a result, the measurement region, which is the region to be scanned by the probe 11 in the next imaging, is determined based on the sample region, which is the region where the sample 22 existed in the past image, and only the determined measurement region is selectively selected. Since the probe 11 is scanned, the measurement time is shortened as compared with the conventional case of scanning the entire fixed two-dimensional region. In particular, in the imaging of nerve cells and the like, the measurement area required for the entire two-dimensional region that can be scanned by the probe 11 is very limited (only a part of the region is the measurement region). Time is greatly reduced.

Further, the hopping amount is increased only at the boundary between the sample region requiring a large hopping amount and the region other than the sample region, and the probe 11 is driven by a fixed hopping amount regardless of the location of the sample 22. In comparison, the measurement time is shortened.

In the explanation of the flowchart shown in FIG. 2, both (S11), (1) narrowing down the measurement area, and (2) optimizing the hopping amount were performed in determining the next scanning condition. , It is not always necessary to perform both, and only one of (1) narrowing down the measurement area and (2) hopping amount may be performed according to the preset setting.

The specific scanning method when the probe 11 selectively scans only the measurement region is as shown in FIG. 5 (solid line and broken line). When the measurement area has a simple shape as shown in FIG. 5A, the probe 11 extends in the X-axis direction only for the measurement area 31 as shown by the solid line shown in FIG. 5A. Is repeated while shifting in the Y-axis direction. When the measurement area has a complicated shape as shown in FIG. 5 (b), the solid line (scanning for measurement) and the broken line (only movement without measurement) shown in FIG. 5 (b). Scanning), scanning in the X-axis direction (including scanning for measurement and scanning only for movement without measurement) is repeated while shifting in the Y-axis direction for the minimum area including the measurement area 31.

FIG. 6 is a diagram showing an example of a moving image obtained in the continuous shooting mode by the scanning probe microscope 10 according to the present embodiment. Here, the hippocampus is used as the sample 22, and the image at the start time ((a) in FIG. 6) and the image at the end time ((b) in FIG. 6) in the moving image obtained in the continuous shooting mode by narrowing down the measurement area. ) Is shown. All images were 15 μm × 15 μm region images, and the movement on the cells was clearly visualized at the imaging rate of 4 minutes / image. From this, it can be said that the continuous shooting mode by narrowing down the measurement area enables the measurement time to be 2 to 4 times faster than the conventional continuous shooting mode in which the measurement area is not narrowed down.

In the explanation of the flowchart shown in FIG. 2, the scanning conditions for the next imaging are determined using only one past image, but the next image is determined by using at least two past images. The scanning conditions in the conversion may be determined.

FIG. 7 is a flowchart showing the operation of the scanning probe microscope according to the modification of the above embodiment, which determines the scanning conditions in the next imaging using at least two past images. This corresponds to a modified example of narrowing down the measurement area (determining the measurement area) in step S11 of FIG. Here, in the continuous shooting mode, the flow of processing for determining the scanning conditions in the next imaging using the past two images is shown.

In this modification, first, the control unit 19 has only a predetermined first width (for example, a size of 5 pixels outward from the contour) with respect to the sample area of the old image of the past two images. By expanding, a provisional measurement area is determined (S20).

Next, the control unit 19 determines whether or not the sample region of the new image of the two past images fits in the provisional measurement region just determined (S21).

As a result, the control unit 19 determines that the provisional measurement area is the final measurement area when it is determined that it fits (Yes in S21), while the control unit 19 determines that it does not fit (No in S21). ), The second width larger than the first width with respect to the sample area of the old image of the past two images (for example, the size of 10 pixels outside the contour, or the sample area of the new image The area expanded by the size that can be covered) is determined as the final measurement area (S22).

As a result, the movement of the sample 22 can be more reliably performed by using the sample area in the oldest image of the two past images as a reference and using the newer image as a confirmation of the measurement area in the next imaging. Can be predicted and an appropriate measurement area can be determined.

As described above, the scanning probe microscope 10 according to the present embodiment has the probe 11, the XY scanner 12 that scans the probe 11 two-dimensionally with respect to the sample 22, and the scanning surface by the XY scanner 12. It includes a Z scanner 13 that drives the probe 11 in the Z-axis direction orthogonal to the XY scanner 12, and a control unit 19 that images a three-dimensional shape on the surface of the sample 22 by controlling the XY scanner 12 and the Z scanner 13. In the continuous shooting mode in which imaging is repeated, the control unit 19 scans the probe 11 for the next imaging and drives the probe 11 in the Z-axis direction based on the images obtained in the past imaging at least one of them. The scanning conditions for the above are determined, and the next imaging is repeated by controlling the XY scanner 12 and the Z scanner 13 according to the determined scanning conditions.

As a result, in the continuous imaging mode by the scanning probe microscope, the scanning conditions of the probe 11 in the next imaging are determined based on the images obtained in the past imaging, so that it is suitable depending on the specific sample 22. It is possible to repeat imaging under various scanning conditions, and the measurement time is shortened as compared with the conventional technique in which past images are not reused.

Further, the control unit 19 should specify the sample region in which the sample 22 exists in the image obtained in the past imaging, and the probe 11 should scan in the next imaging based on the specified sample region. A measurement region, which is a region, is determined, and the XY scanner 12 is controlled so that the probe 11 scans only in the determined measurement region.

As a result, the measurement region, which is the region to be scanned by the probe 11 in the next imaging, is determined based on the sample region, which is the region where the sample 22 existed in the past image, and only the determined measurement region is selectively selected. Since the probe 11 is scanned, the measurement time is shortened as compared with the conventional case of scanning the entire fixed two-dimensional region.

Further, the control unit 19 determines as a measurement region a region widened by a predetermined width with respect to the sample region of the image obtained in the past imaging.

As a result, a region wider than the sample region in the past image becomes the measurement region in the next imaging, so that the entire sample 22 can be observed even in the moving sample 22 such as a living cell.

In addition, the control unit 19 determines the measurement area using at least two images obtained in the past at least two imagings.

As a result, the measurement area in the next imaging is determined using at least two images in the past. Therefore, even if the sample 22 has a movement such as a living cell, the movement of the sample 22 is predicted and then measured. The region can be determined and the entire sample 22 can be observed more reliably.

Further, the control unit 19 determines whether or not the sample area of the new image of the two images fits in the area widened by the first width with respect to the sample area of the old image of the two images. If it does not fit, a region widened by a second width larger than the first width with respect to the sample region of the old image is determined as the measurement region.

As a result, the movement of the sample 22 can be more reliably performed by using the sample area in the oldest image of the two past images as a reference and using the newer image as a confirmation of the measurement area in the next imaging. Can be predicted and an appropriate measurement area can be determined.

Further, the control unit 19 identifies a sample region in which the sample 22 exists in the image obtained in the past imaging, and based on the identified sample region, in the next imaging, the Z-axis direction of the probe 11 The hopping amount, which is the amplitude in driving the probe 11, is determined, and the Z scanner 13 is controlled so that the probe 11 is driven in the Z-axis direction by the determined hopping amount.

As a result, the hopping amount in the next imaging is determined based on the sample region in which the sample 22 has existed in the past image, and the probe 11 is driven in the Z-axis direction by the determined hopping amount, so that the probe 11 is fixed. The measurement time is shortened as compared with the conventional case in which the probe 11 is driven with a standard hopping amount.

Further, the control unit 19 determines the hopping amount so that the hopping amount is larger in the region including the boundary between the sample region and the region other than the sample region in the image than in the region not including the boundary.

As a result, the hopping amount can be increased only at the boundary between the sample region requiring a large hopping amount and the region other than the sample region, and the probe 11 has a fixed hopping amount regardless of the location of the sample 22. The measurement time is shortened as compared with the conventional method of driving.

Further, the control method in the scanning probe microscope 10 according to the present embodiment includes a control step of imaging a three-dimensional shape on the surface of the sample 22 by controlling the XY scanner 12 and the Z scanner 13. The control step relates to at least one of scanning the probe 11 and driving the probe 11 in the Z-axis direction for the next imaging based on the images obtained in the past imaging in the continuous imaging mode in which the imaging is repeated. The scanning conditions are determined (S11), and the next imaging (S12) is repeated by controlling the XY scanner 12 and the Z scanner 13 according to the determined scanning conditions (S11 to S13).

As a result, in the continuous shooting mode, the scanning conditions of the probe 11 in the next imaging are determined based on the images obtained in the past imaging, so that the images are imaged under suitable scanning conditions depending on the specific sample 22. It becomes possible to repeat the conversion, and the measurement time is shortened as compared with the conventional technique in which the past image is not reused.

Although the scanning probe microscope of the present invention has been described above based on the embodiment, the present invention is not limited to this embodiment. As long as the gist of the present invention is not deviated, various modifications that can be conceived by those skilled in the art are applied to the present embodiment, and other embodiments constructed by combining some components in the embodiment are also within the scope of the present invention. Included in.

For example, in the above embodiment, the present invention has been described by taking SIMM as an example, but the present invention is not limited to application to this type of scanning probe microscope (Atomic Force Microscope (AFM)). , Scanning Tunneling Microscope (STM) and other types of scanning probe microscopes.

Further, in the above embodiment, an example of determining the scanning conditions in the next imaging using the immediately preceding one image or the immediately preceding two images has been described, but the past used for determining the scanning conditions has been described. The image of is not limited to the immediately preceding one or two images, and may be an image older than the immediately preceding image, or may be three or more images. Further, when a plurality of past images are used, the scanning condition in the next imaging may be determined by giving a larger weight to the image closer to the immediately preceding image.

Further, the present invention can be realized not only as a scanning probe microscope and a control method thereof, but also as a program having steps included in the control method as shown in the flowchart of FIG. 2, or such a program is stored. It may be realized as a computer-readable recording medium such as a CD-ROM.

The present invention can be used as a scanning probe microscope, for example, as a SIMM for observing a moving biological sample at high speed in a continuous imaging mode.

10 Scanning probe microscope 11 Probe 11a Hopping amount 12 XY scanner 13 Z scanner 14 Scanner controller 15 Current amplifier 16 Pipet electrode 17 Control electrode 18 Voltage source 19 Control unit 20 Container 21 Electrolyte solution 22 Sample 30, 33 Sample area 31 Measurement area 34a , 34b Non-sample area

Claims (6)

With the probe
An XY scanner that scans the probe two-dimensionally relative to the sample,
A Z scanner that drives the probe in the Z-axis direction orthogonal to the scanning surface of the XY scanner, and
A control unit for imaging a three-dimensional shape on the surface of the sample by controlling the XY scanner and the Z scanner is provided.
The control unit
In the continuous shooting mode in which the imaging is repeated, the scanning conditions regarding at least one of the scanning of the probe and the driving of the probe in the Z-axis direction for the next imaging are set based on the images obtained in the past imaging. determined, the XY scanner and to repeatedly to perform the following imaging by controlling the Z scanner in accordance with the determined scanning condition,
The sample region, which is the region where the sample exists, is specified in the image obtained by the past imaging, and the measurement region, which is the region to be scanned by the probe in the next imaging, is determined based on the specified sample region. Then, the XY scanner is controlled so that the probe scans only in the determined measurement area.
A scanning probe microscope in which a region widened by a predetermined width with respect to a sample region of an image obtained by past imaging is determined as the measurement region. Wherein, past using at least two images obtained by imaging at least twice, scanning probe microscope according to claim 1, wherein determining the measurement area. With the probe
An XY scanner that scans the probe two-dimensionally relative to the sample,
A Z scanner that drives the probe in the Z-axis direction orthogonal to the scanning surface of the XY scanner, and
A control unit for imaging a three-dimensional shape on the surface of the sample by controlling the XY scanner and the Z scanner is provided.
The control unit
In the continuous shooting mode in which the imaging is repeated, the scanning conditions regarding at least one of the scanning of the probe and the driving of the probe in the Z-axis direction for the next imaging are set based on the images obtained in the past imaging. The next imaging is repeated by controlling the XY scanner and the Z scanner according to the determined scanning conditions.
The sample region, which is the region where the sample exists, is specified in the image obtained by the past imaging, and the measurement region, which is the region to be scanned by the probe in the next imaging, is determined based on the specified sample region. Then, the XY scanner is controlled so that the probe scans only in the determined measurement area.
The sample area of the new image of the two images is located in the area widened by the first width with respect to the sample area of the old image of the at least two images obtained by at least two imagings in the past. determines whether fit, if it does not fit, that determine the area widened by the large second width greater than the first width to the sample area of the old image as the measurement region
Run査型probe microscope. The control unit identifies a sample region in which the sample exists in an image obtained by past imaging, and drives the probe in the Z-axis direction in the next imaging based on the identified sample region. The scanning probe according to any one of claims 1 to 3 , wherein the hopping amount, which is the amplitude in the above, is determined, and the Z scanner is controlled so that the probe is driven in the Z-axis direction by the determined hopping amount. microscope. With the probe
An XY scanner that scans the probe two-dimensionally relative to the sample,
A Z scanner that drives the probe in the Z-axis direction orthogonal to the scanning surface of the XY scanner, and
A control unit for imaging a three-dimensional shape on the surface of the sample by controlling the XY scanner and the Z scanner is provided.
The control unit
In the continuous shooting mode in which the imaging is repeated, the scanning conditions regarding at least one of the scanning of the probe and the driving of the probe in the Z-axis direction for the next imaging are set based on the images obtained in the past imaging. The next imaging is repeated by controlling the XY scanner and the Z scanner according to the determined scanning conditions.
The control unit
The sample region, which is the region where the sample exists, is specified in the image obtained by the past imaging, and based on the specified sample region, hopping, which is the amplitude in driving the probe in the Z-axis direction in the next imaging, is performed. The amount is determined, and the Z scanner is controlled so that the probe is driven in the Z-axis direction by the determined hopping amount.
In a region including a boundary between the sample area and the area other than the sample area in the image, than the region not including the boundary, so that the amount of the hopping increases, that determine the hopping quantity
Run査型probe microscope. It is a control method in a scanning probe microscope.
The scanning probe microscope
With the probe
An XY scanner that scans the probe two-dimensionally relative to the sample,
A Z scanner that drives the probe in the Z-axis direction orthogonal to the scanning surface of the XY scanner is provided.
The control method is
A control step of imaging a three-dimensional shape on the surface of the sample by controlling the XY scanner and the Z scanner is included.
In the control step,
In the continuous shooting mode in which the imaging is repeated, the scanning conditions regarding at least one of the scanning of the probe and the driving of the probe in the Z-axis direction for the next imaging are set based on the images obtained in the past imaging. determined, the XY scanner and to repeatedly to perform the following imaging by controlling the Z scanner in accordance with the determined scanning condition,
The sample region, which is the region where the sample exists, is specified in the image obtained by the past imaging, and the measurement region, which is the region to be scanned by the probe in the next imaging, is determined based on the specified sample region. Then, the XY scanner is controlled so that the probe scans only in the determined measurement area.
A control method for a scanning probe microscope in which a region widened by a predetermined width with respect to a sample region of an image obtained by past imaging is determined as the measurement region.