JP6843344B2 - Surface roughness measurement system - Google Patents

Description

The present invention relates to a surface roughness measuring system, and more particularly to a surface roughness measuring system including a surface roughness measuring machine for measuring the surface roughness of a work.

Patent Document 1 discloses an example of a surface roughness measuring machine. The surface roughness measuring machine includes a table, a column erected on the table in the Z (vertical) direction, and an X direction (horizontal) drive unit provided on the column. Further, the surface roughness measuring machine includes a stylus and a displacement detector for measuring the displacement of the stylus in the Z direction, and the displacement detector is moved in the X direction by the X-direction drive unit. Further, the X-direction drive unit has a built-in scale or encoder that measures the amount of movement of the displacement detector in the X-direction.

According to the surface roughness measuring machine of Patent Document 1, when the stylus is brought into contact with the surface of the work and the displacement detector is moved in the X direction by the X-direction drive unit in this state, the stylus at a constant pitch in the X direction. The amount of displacement in the Z direction is measured, and measurement data of the work is obtained. By arithmetically processing this measurement data by the data processing unit, the surface roughness of the work is measured on the submicron order.

In such surface roughness measurement by a surface roughness measuring machine, in order to remove the disturbance vibration transmitted to the work, the surface roughness of the work is measured with the surface roughness measuring machine mounted on the vibration isolation table. It is preferable to measure.

As the vibration isolator, a vibration isolator using an air spring is disclosed in Patent Document 2. This vibration isolation table has a mounting board on which a measuring device is mounted, and the mounting board is supported by a plurality of air springs on the base. In the vibration isolation table of Patent Document 2, the vibration received by the base from the installation surface is vibration-isolated by an air spring.

Japanese Unexamined Patent Publication No. 2006-300823 Japanese Patent No. 4235246

However, in a surface roughness measuring machine having a measurement capability on the order of submicrons, even if the vibration generated in the work is minute, a vibration component (vibration data) is added to the measured surface roughness data. There is a problem that accurate measurement results cannot be obtained.

In order to solve such a problem, for example, it is conceivable to mount a surface roughness measuring device on a vibration isolation table as in Patent Document 2 and remove the vibration transmitted to the work before transmitting it to the work. However, it is difficult to completely remove all the vibrations by the vibration isolator, and since minute vibration components that cannot be removed are added to the surface roughness data, there is a limit to the improvement of the measurement accuracy by the vibration isolator. was there.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a surface roughness measurement system capable of obtaining accurate measurement results without being affected by vibration transmitted to a work. And.

In order to achieve the object of the present invention, the surface roughness measuring system of the present invention is different from the surface roughness measuring means for measuring the surface roughness of the work in contact with the surface of the work and the surface roughness measuring means. Acquires vibration measuring means, which is composed of a body and is in contact with the surface of the work to measure the vibration of the work, surface roughness data measured by the surface roughness measuring means, and vibration data measured by the vibration measuring means. Further, it is provided with a measurement data generation means for generating measurement data obtained by removing vibration data from the surface roughness data.

According to the present invention, in addition to the surface roughness measuring means for measuring the surface roughness of the work, a vibration measuring means for measuring the vibration of the work is provided, and the surface roughness data measured by the surface roughness measuring means is used. , The vibration data measured by the vibration measuring means is removed, and the data generated thereby is used as the measurement data. Thereby, according to the present invention, an accurate measurement result can be obtained without being affected by the vibration transmitted to the work.

In one aspect of the present invention, it is preferable that the vibration measuring means measures the vibration of the work at the same time as measuring the surface roughness of the work by the surface roughness measuring means.

According to one aspect of the present invention, the vibration measuring means measures the vibration of the work at the same time as measuring the surface roughness of the work by the surface roughness measuring means, so that more accurate measurement data can be generated.

In one aspect of the present invention, the measurement data generating means determines whether or not there is a correlation between the surface roughness data and the vibration data, and if it is determined that there is a correlation, the vibration data is obtained from the surface roughness data. It is preferable to have a judgment unit that generates the removed measurement data.

According to one aspect of the present invention, it is possible to obtain the vibration data required for generating the measurement data, so that a more accurate measurement result can be obtained.

According to the present invention, accurate measurement results can be obtained without being affected by the vibration transmitted to the work.

Explanatory drawing which shows the whole structure of the surface roughness measurement system of 1st Embodiment Block diagram showing the structure of the data processing unit Flow chart explaining the operation of the surface roughness measurement system of the first embodiment (A) is a waveform diagram of surface roughness data, (B) is a waveform diagram of vibration data, and (C) is a waveform diagram of measurement data obtained by removing vibration data from surface roughness data. Explanatory diagram showing an example of Fourier transform processing and inverse Fourier transform processing Flowchart explaining the specific calculation method of the correlation coefficient Overall configuration diagram showing a first modification of the surface roughness measurement system according to the first embodiment Overall configuration diagram showing a second modification of the surface roughness measurement system according to the first embodiment Overall configuration diagram of the surface roughness measurement system according to the second embodiment Overall configuration diagram of the surface roughness measurement system according to the third embodiment

Hereinafter, the surface roughness measurement system according to the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a schematic explanatory view showing the overall configuration of the surface roughness measurement system 10 of the first embodiment.

The surface roughness measurement system 10 of the first embodiment is a separate body of the drive unit (surface roughness measuring means) 12 that is in contact with the surface of the work W and measures the surface roughness of the work W, and the drive unit 12. A drive unit (vibration measuring means) 14 that is configured and is in contact with the surface of the work W to measure the vibration of the work W, surface roughness data measured by the drive unit 12, and vibration data measured by the drive unit 14. It is composed of a data processing unit (measurement data generation means) 16 for generating measurement data by removing vibration data from the surface roughness data.

The drive unit 12 is a portable surface roughness measuring machine (for example, "SURFCOM 130A" manufactured by Tokyo Seimitsu Co., Ltd.) that is brought to the site and used. The drive unit 12 is provided so as to be movable in the Z direction with respect to the column 28A erected in the Z direction (vertical direction). The column 28A is provided independently of the table 30 on which the work W is placed, and is provided at a position or a member cut off from a vibration source (not shown) that gives vibration to the work W. .. The column 28A may be erected on the table 30.

Although the configuration of the drive unit 12 is well known, the stylus 18 that comes into contact with the surface of the work W, the displacement detector 20 that measures the displacement of the stylus 18 in the Z direction, and the displacement detector 20 together with the stylus 18 are used. It includes an X-direction drive unit 22 that moves in the X-direction (horizontal direction). Further, the X-direction drive unit 22 has a built-in scale (not shown) for measuring the amount of movement of the displacement detector 20 in the X-direction, that is, the amount of movement of the stylus 18 in the X-direction.

According to the drive unit 12, the stylus 18 is brought into contact with the measurement position a on the surface of the work W, and the stylus 18 is moved along the surface of the work W. Specifically, the displacement detector 20 is moved in the X direction by the X-direction drive unit 22. As a result, the amount of displacement of the stylus 18 in the Z direction when the stylus 18 is moved in the X direction by the drive unit 12 is measured together with the amount of movement (position information) of the stylus 18 in the X direction.

The amount of displacement of the stylus 18 in the Z direction and the amount of movement of the stylus 18 in the X direction measured by the drive unit 12 are measured by the cable 24 as surface roughness measurement data (hereinafter referred to as surface roughness data). It is acquired by the data processing unit 16 by wired transmission and converted into a digital format signal by the A / D converter 26 (see FIG. 2) of the data processing unit 16.

On the other hand, the drive unit 14 is provided so as to be movable in the Z direction with respect to the column 28B erected in the Z direction. Like the column 28A, the column 28B is provided independently of the table 30 on which the work W is placed, and is a position or member cut off from a vibration source (not shown) that gives vibration to the work W. It is provided in. The column 28B may be erected on the table 30.

Like the drive unit 12, the drive unit 14 includes a stylus 32 that comes into contact with the surface of the work W, and a displacement detector 34 that measures the displacement of the stylus 32 in the Z direction (vertical direction). .. According to the drive unit 14, the stylus 32 is brought into contact with the measurement position b on the surface of the work W, and the displacement amount of the stylus 18 in the Z direction due to the vibration of the work W is measured by the displacement detector 34. Since the drive unit 14 may be used together as a surface roughness measuring machine as described later, the drive unit 14 has an X-direction drive unit 36 that moves the displacement detector 34 in the X direction, similarly to the drive unit 12. ing. The X-direction drive unit 36 has a built-in scale (not shown) for measuring the amount of movement of the displacement detector 34 in the X-direction, that is, the amount of movement of the stylus 32 in the X-direction.

The amount of displacement of the stylus 32 in the Z direction measured by the drive unit 14 is converted into a digital format signal by the A / D converter 38 (see FIG. 2) built in the drive unit 14 as vibration data of the work W. Will be done. This signal is acquired by the data processing unit 16 by wireless transmission.

FIG. 2 is a schematic block diagram showing the structure of the data processing unit 16.

The data processing unit 16 has the A / D converter 26 described above. The A / D converter 26 converts the surface roughness data measured by the drive unit 12 into a digital format signal at a predetermined sampling period. Further, the A / D converter 38 of the drive unit 14 converts the vibration data measured by the drive unit 14 into a digital format signal at a predetermined sampling period.

The data processing unit 16 has a signal processing unit 46, and the signal processing unit 46 includes a fast Fourier transform (FFT) 40, a vibration component removing unit 42, and an inverse fast Fourier transform (Inverse Fast Fourier). Transform: IFFT) 44 and. Software may be used instead of the signal processing unit 46.

The fast Fourier transformer 40 performs a Fourier transform process on the signal trains sequentially output by the A / D converters 26 and 38 to convert the time domain signal into the frequency domain signal.

The vibration component removing unit 42 acquires the surface roughness data converted by the fast Fourier transformer 40 and the frequency domain signal of the vibration data, and removes the frequency component of the vibration data from the frequency component of the surface roughness data.

The high-speed Fourier inverse converter 44 performs Fourier inverse conversion processing on the output signal of the vibration component removing unit 42 (the signal obtained by removing the frequency component of the vibration data from the frequency component of the surface roughness data) to obtain the frequency domain signal for time. Convert to a region signal.

Based on the time domain signal converted by the high-speed Fourier inverse converter 44, the signal processing unit 46 determines the displacement amount of the stylus 18 at each time indicated by the displacement signal sequence of the stylus 18 and the displacement of the stylus 18 at each time. The measurement data of the work W is generated in association with the movement amount (position information). Then, the signal processing unit 46 calculates the roughness of the work W using the well-known roughness analysis software 48 based on the measurement data, and outputs the roughness analysis result to the display 50 and the printer 52 of the data processing unit 16. Output.

FIG. 3 is a flowchart illustrating the operation of the surface roughness measurement system 10 of the first embodiment.

As shown in FIG. 3, in step S1, the stylus 18 of the drive unit 12 is brought into contact with the measurement position a of the work W, and the stylus 32 of the drive unit 14 is brought into contact with the measurement position b of the work W (see FIG. 1). ).

In step S2, the drive unit 12 and the drive unit 14 are driven at the same time. As a result, the amount of displacement of the stylus 18 in the Z direction when the stylus 18 is moved in the X direction by the drive unit 12 is measured together with the amount of movement of the stylus 18 in the X direction. Then, the amount of displacement of the stylus 18 in the Z direction and the amount of movement of the stylus 18 in the X direction measured by the drive unit 12 are acquired by the data processing unit 16 as surface roughness data, and the A / D converter 26 Converts to a digital format signal.

FIG. 4A shows an example of the waveform of the surface roughness data. Since the vibration component (vibration data) generated in the work W is superimposed on this surface roughness data, when the arithmetic processing is executed based on the surface roughness data of FIG. 4A, the surface is surfaced. It is not possible to obtain accurate measurement results of roughness.

Therefore, as shown in FIG. 1, the surface roughness measurement system 10 of the first embodiment includes a drive unit 14 for individually measuring the vibration of the work W in addition to the drive unit 12 for measuring the surface roughness of the work W. ing.

The drive unit 14 is driven at the same time as the drive unit 12 to measure the amount of displacement of the stylus 32 in the Z direction. That is, the drive unit 14 measures the vibration of the work W at the same time as the surface roughness of the work W is measured by the drive unit 12. Then, the displacement amount of the stylus 32 in the Z direction measured by the drive unit 12 is converted into a digital format signal by the A / D converter 38 of the drive unit 14 as vibration data, and then acquired by the data processing unit 16. Will be done. FIG. 4B shows an example of the waveform of the vibration data.

Returning to FIG. 3, in step S3, the fast Fourier transformer 40 performs a Fourier transform process on the signal sequence sequentially output by the A / D converter 26 and the signal sequence sequentially output by the A / D converter 38. , Converts a time domain signal into a frequency domain signal. Note that FIG. 5 shows an example of the Fourier transform process for converting the time domain signal shown in (A) into the frequency domain signal shown in (B).

Returning to FIG. 3, in step S4, the frequency domain signal of the vibration data is removed from the frequency domain signal of the surface roughness data converted by the fast Fourier transformer 40 by the vibration component removing unit 42. FIG. 4 (C) shows the waveform of the measurement data obtained by removing the vibration data shown in (B) from the surface roughness data shown in (A).

Returning to FIG. 3, in step S5, the fast Fourier inverse transformant 44 performs the Fourier inverse transform process on the output signal of the vibration component removing unit 42 to convert the frequency domain signal into the time domain signal. Note that FIG. 5 shows an example of the inverse Fourier transform process for converting the frequency domain signal shown in (B) into the time domain signal shown in (A).

Returning to FIG. 3, in step S6, the signal processing unit 46 generates measurement data based on the digital displacement signal subjected to the Fourier inverse transform process. This measurement data is data obtained by removing vibration data from the surface roughness data.

In step S7, the data processing unit 16 calculates the roughness of the work W using the well-known roughness analysis software 48 based on the measurement data, and outputs the roughness analysis result to the display 50 and the printer 52.

As described above, according to the surface roughness measurement system 10 of the first embodiment, in addition to the drive unit 12 for measuring the roughness of the work W, the drive unit 14 for measuring the vibration of the work W is provided by the drive unit 12. Since the process of removing the vibration data measured by the drive unit 14 from the measured surface roughness data is performed, an accurate measurement result can be obtained without being affected by the vibration transmitted to the work W. ..

In the surface roughness measuring system 10 of the first embodiment, as a modification of the usage pattern, the driving unit 12 can be used as the vibration measuring means, and the driving unit 14 can be used as the surface roughness measuring means.

As a result, the roughness measurement starting from the measurement position b can be performed by the drive unit 14, and the vibration of the work W at the measurement position a can be measured by the drive unit 12. That is, by using the drive unit 12 as the vibration measuring means and the drive unit 14 as the surface roughness measuring means, the roughness measurement and the vibration measurement can be alternately measured at two measurement positions a and b. It will be possible.

Further, in the first embodiment, the drive unit 12 and the data processing unit 16 are connected by wire, and the drive unit 14 and the data processing unit 16 are wirelessly connected, but the present invention is not limited to this. For example, the drive unit 12 and the data processing unit 16 may be connected wirelessly, and the drive unit 14 and the data processing unit 16 may be connected by wire. Further, the drive units 12 and 14 and the data processing unit 16 may be connected wirelessly, or the drive units 12 and 14 and the data processing unit 16 may be connected by wire. When the drive unit 12 and the data processing unit 16 are wirelessly connected, the A / D converter 26 is built in the drive unit 12 side.

Further, in the first embodiment, the vibration of the work W is measured by the drive unit 14 having the same configuration as the surface roughness measuring machine, but the vibration of the work W is replaced with the drive unit 14 which is the surface roughness measuring machine. A dedicated vibration detection sensor such as an acceleration sensor capable of measuring the above speed may be applied.

Further, in the first embodiment, the two columns 28A and 28B are erected, but the drive units 12 and 14 may be provided on one column so as to be movable in the Z direction.

By the way, in the surface roughness measurement system 10 of the first embodiment, the vibration data is removed from the surface roughness data to obtain the measurement data. In this case, if the vibration data that is not related to the surface roughness data is removed from the surface roughness data, an accurate measurement result cannot be obtained. It is considered that such a problem occurs remarkably as the distance between the measurement positions a and b increases.

Therefore, in the surface roughness measurement system of the second embodiment, the data processing unit 16 determines whether or not there is a correlation between the surface roughness data and the vibration data, and if it is determined that there is a correlation, the surface roughness is determined. The measurement data is generated by removing the vibration data from the data.

In order to determine whether or not there is a correlation between the surface roughness data and the vibration data, the data processing unit 16 includes a calculation unit (determination unit) 43 (see FIG. 2) in the vibration component removing unit 42. The calculation unit 43 calculates the correlation coefficient (ρ) based on the surface roughness data and the vibration data. Then, the signal processing unit (judgment unit) 46 is used when the correlation coefficient (ρ) calculated by the calculation unit 43 is higher than a predetermined value (0.4 to 0.7: 0.5 in this example). , Assuming that the surface roughness data and the vibration data are associated with each other, the measurement data obtained by removing the vibration data from the surface roughness data is generated. That is, the signal processing unit 46 performs a process of removing a component obtained by multiplying the effective frequency of the vibration data by the correlation coefficient from the surface roughness data in the frequency domain converted by the fast Fourier transformer 40.

FIG. 6 is a flowchart illustrating a specific calculation method of the correlation coefficient (ρ) by the calculation unit 43.

According to FIG. 6, in step S10, based on the analysis data A (frequency and amplitude) of the surface roughness data processed by the fast Fourier transformer 40 and the analysis data B (frequency and amplitude) of the vibration data, the following The calculation unit 43 calculates the correlation coefficient (ρ) according to [Equation 1]. This calculation formula calculates the correlation coefficient (ρ) from a sequence of amplitude values of analysis data A and B.

x: Amplitude value of analysis data A y: Amplitude value of analysis data B

If the calculated correlation coefficient (ρ) is 0.5 or more in step S11, it is considered that the correlation is high and the process is continued.

In step S12, the coefficient k is obtained by the following [Equation 2].
[Number 2]
k = C / D
C: Amplitude value of the largest amplitude value of the analysis data A D: Amplitude value of the analysis data B at the frequency that is the largest amplitude value of the analysis data A

In step S13, all the calculated frequency components are used as effective frequencies. In this case, the following calculation of [Equation 3] is performed for each frequency component.
[Number 3]
Ci = Ai-kBi
Ai: Each frequency component of analysis data A Bi: Each frequency component of analysis data B Ci: Measurement data obtained by removing necessary vibration data from the surface roughness data

By performing the above processing, it is possible to generate measurement data by removing necessary vibration data from the surface roughness data measured by the drive unit 12. This makes it possible to obtain more accurate measurement results.

If the calculated correlation coefficient (ρ) is less than 0.5, it is considered that there is no correlation, and arithmetic processing is performed using only the surface roughness data measured by the drive unit 12. Perform remeasurement.

FIG. 7 is an overall configuration diagram showing the surface roughness measurement system 60, which is a first modification of the surface roughness measurement system 10 according to the first embodiment. In explaining the surface roughness measuring system 60, the description of the same or similar members as the surface roughness measuring system 10 shown in FIG. 1 will be omitted.

The difference between the surface roughness measuring system 10 shown in FIG. 1 and the surface roughness measuring system 60 of FIG. 7 is that the driving unit 12 is used as the vibration measuring means and the driving unit 14 is used as the surface roughness measuring means. At the point.

According to the surface roughness measuring system 60 of FIG. 7, the displacement amount of the stylus 18 in the Z direction measured by the driving unit 12 is acquired by the data processing unit 16 as vibration data. Further, the drive unit 14 measures the amount of displacement of the stylus 32 in the Z direction when the stylus 32 is moved in the X direction, together with the amount of movement of the stylus 32 in the X direction. Then, the displacement amount of the stylus 32 in the Z direction and the movement amount of the stylus 32 in the X direction measured by the drive unit 14 are acquired by the data processing unit 16 as surface roughness data.

In the surface roughness measuring system 60 of FIG. 7, the data processing unit 16 acquires the surface roughness data measured by the driving unit 14 and the vibration data measured by the driving unit 12, and the vibration data is obtained from the surface roughness data. Generate measurement data with the above removed.

According to the surface roughness measurement system 60, the roughness measurement starting from the measurement position b can be performed by the drive unit 14, and the vibration of the work W at the measurement position a can be measured by the drive unit 12. ..

FIG. 8 is an overall configuration diagram showing the surface roughness measurement system 70, which is a second modification of the surface roughness measurement system 10 according to the first embodiment. In explaining the surface roughness measuring system 70, the description of the same or similar members as the surface roughness measuring system 10 shown in FIG. 1 will be omitted.

The difference between the surface roughness measurement system 10 shown in FIG. 1 and the surface roughness measurement system 70 in FIG. 8 is that instead of the drive unit 12, the drive unit 14A having the same function as the drive unit 14 is used in the column 28A. It is at the point where it is attached and the point where the surface roughness of the work W is measured by the drive unit 14 and the vibration of the work W is measured by the drive unit 14A.

In the surface roughness measuring system 70 of FIG. 8, the data processing unit 16 wirelessly acquires the surface roughness data measured by the driving unit 14 and the vibration data measured by the driving unit 14A from the surface roughness data. Generate measurement data with vibration data removed.

According to the surface roughness measurement system 70, the roughness measurement starting from the measurement position b can be performed by the drive unit 14, and the vibration of the work W at the measurement position a can be measured by the drive unit 14A. ..

FIG. 9 is an overall configuration diagram of the surface roughness measurement system 80 according to the third embodiment. In explaining the surface roughness measurement system 80, the description of the same or similar members as the surface roughness measurement system 10 shown in FIG. 1 will be omitted.

The difference between the surface roughness measurement system 10 shown in FIG. 1 and the surface roughness measurement system 80 in FIG. 9 is that the drive unit 12 is placed directly on the surface of the work W and that the drive unit 14 is replaced with the drive unit 14. The point is that the vibration sensor 82 is attached to the column 28B.

The vibration sensor 82 includes a stylus 84 that comes into contact with the surface of the work W, and a displacement detector 86 that measures the displacement of the stylus 84 in the Z direction. The vibration sensor 82 is driven at the same time as the drive unit 12 to measure the amount of displacement of the stylus 84 in the Z direction. Then, the displacement amount of the stylus 84 measured by the vibration sensor 82 in the Z direction is converted into a digital format signal as vibration data by an A / D converter (not shown) built in the vibration sensor 82. This signal is acquired by the data processing unit 16 by wireless transmission.

In the surface roughness measurement system 80, the data processing unit 16 acquires the surface roughness data measured by the drive unit 12 and the vibration data measured by the vibration sensor 82, and removes the vibration data from the surface roughness data. Generate measurement data.

According to the surface roughness measurement system 80, the roughness measurement starting from the measurement position a can be performed by the drive unit 12, and the vibration of the work W at the measurement position b can be measured by the vibration sensor 82. ..

FIG. 10 is an overall configuration diagram of the surface roughness measurement system 90 according to the fourth embodiment. In explaining the surface roughness measuring system 90, the description of the same or similar members as the surface roughness measuring system 10 shown in FIG. 1 will be omitted.

The difference between the surface roughness measurement system 10 shown in FIG. 1 and the surface roughness measurement system 90 shown in FIG. 10 is that the drive unit 14 and the vibration sensor 82 shown in FIG. 9 are placed directly on the surface of the work W. At the point.

In the surface roughness measuring system 90, the data processing unit 16 acquires the surface roughness data measured by the driving unit 14 and the vibration data measured by the vibration sensor 82, and removes the vibration data from the surface roughness data. Generate measurement data.

According to the surface roughness measurement system 90, the roughness measurement starting from the measurement position a can be performed by the drive unit 14, and the vibration of the work W at the measurement position b can be measured by the vibration sensor 82. ..

As described by exemplifying the first to fourth embodiments, the surface roughness measuring system of the present invention is a separate body of the surface roughness measuring means for measuring the surface roughness of the work and the surface roughness measuring means. It is equipped with a vibration measuring means for measuring the vibration of the work. Then, the surface roughness measuring system of the present invention acquires the surface roughness data measured by the surface roughness measuring means and the vibration data measured by the vibration measuring means, and removes the vibration data from the surface roughness data. It is provided with a measurement data generation means for generating the measured measurement data.

Since the measurement data generation means of the present invention generates measurement data based on the acquired surface roughness data and vibration data, accurate measurement data can be generated. Further, since the vibration measuring means measures the vibration of the work at the same time as the surface roughness of the work is measured by the surface roughness measuring means, the measurement is based on the surface roughness data and the vibration data measured at different times rather than at the same time. More accurate measurement data can be generated as compared with the case of generating data.

10 ... Surface roughness measurement system, 12 ... Drive unit, 14 ... Drive unit, 14A ... Drive unit, 16 ... Data processing unit, 18 ... Touch needle, 20 ... Displacement detector, 22 ... X direction drive unit, 24 ... Cable , 26 ... A / D converter, 28A ... column, 28B ... column, 30 ... table, 32 ... stylus, 34 ... displacement detector, 36 ... X direction drive unit, 38 ... A / D converter, 40 ... high speed Fourier Transformer, 42 ... Vibration Component Removal Unit, 43 ... Arithmetic Unit, 44 ... Fast Fourier Inverse Transformer, 46 ... Signal Processing Unit, 48 ... Roughness Analysis Software, 50 ... Display, 52 ... Printer, 60 ... Surface Roughness Measurement system, 70 ... surface roughness measurement system, 80 ... surface roughness measurement system, 82 ... vibration sensor, 84 ... stylus, 86 ... displacement detector, 90 ... surface roughness measurement system

Claims (2)

A surface roughness measuring means that is in contact with the surface of the work and measures the surface roughness of the work,
A vibration measuring means that is configured separately from the surface roughness measuring means and that is in contact with the surface of the work to measure the vibration of the work.
Measurement data that acquires surface roughness data measured by the surface roughness measuring means and vibration data measured by the vibration measuring means to generate measurement data obtained by removing the vibration data from the surface roughness data. Generation means and
Equipped with a,
The measurement data generating means determines whether or not there is a correlation between the surface roughness data and the vibration data, and if it is determined that there is a correlation, the vibration data is removed from the surface roughness data. Has a judgment unit that generates measurement data,
Surface roughness measurement system. The vibration measuring means measures the vibration of the work at the same time as measuring the surface roughness of the work by the surface roughness measuring means.
The surface roughness measuring system according to claim 1.