JP6844604B2 - Tracked carrier system - Google Patents

Description

The present invention relates to a tracked carrier system.

A tracked carrier system in which a carrier runs on a track installed on a ceiling or the like and transports a container such as a FOUP (Front Opening Unified Pod) or a reticle pod in which an object to be stored such as a semiconductor wafer or a glass substrate is stored. Is known (for example, Patent Document 1). For the track of such a tracked transport vehicle system, for example, a transport path is formed by joining track members having a predetermined length.

Japanese Unexamined Patent Publication No. 2005-138658

However, in the conventional tracked carrier system, since there is a seam between the track members, vibration occurs when the carrier moves between the track members. In particular, in a transport vehicle that transports a container in which an object to be stored such as a semiconductor wafer or a glass substrate is stored as described above, it is desired to reduce vibration at the time of transfer between track members.

Therefore, an object of the present invention is to provide a tracked transport vehicle system capable of reducing vibration generated when a transport vehicle transfers a track member.

The tracked carrier system of the present invention has a tracked track in which a carrier having a pair of first rollers and a pair of second rollers travels along a track extending by connecting a plurality of track members. In a transport vehicle system, track members are provided between a pair of side surface portions that are provided along the extending direction of the track and guide each of a pair of first rollers, and between a pair of side surface portions and a pair of side surface portions. A first seam that is arranged to face one side and is provided with an auxiliary guide portion that guides one of the pair of second rollers, and is a seam between one side surface portion at a connecting portion of track members adjacent to each other. The portion and the second joint portion, which is a joint between the other side surface portions, are provided so as to be displaced from each other in the extending direction of the track, and the auxiliary guide portion is provided in the width direction intersecting the extending direction. It is provided so as to face the other side surface portion facing the first seam portion, and is provided so as to face one side surface portion facing the second seam portion in the width direction.

In the tracked carrier system of this configuration, when one first roller in the carrier passes through the first seam, the other guide roller faces the other side surface facing the first seam in the width direction. It is guided by the auxiliary guide that is arranged. As a result, the movement of the transport vehicle in the width direction is restricted, so that the posture of the transport vehicle is stabilized. As a result, vibration at the time of rail transfer can be reduced.

In the tracked carrier system of the present invention, the joints of adjacent track members may extend in an oblique direction with respect to the extending direction in a plan view viewed from a direction orthogonal to the extending direction and the width direction. In such a configuration, the gap between the first seam portion and the second seam portion becomes relatively large. In the present invention, even in such a case, the vibration generated when the transport vehicle transfers the track member can be reduced.

In the tracked carrier system of the present invention, a track is formed between a first position for connecting at least one track member to an adjacent track member which is an adjacent track member and a second position separated from the first position by a predetermined distance. Even if a moving mechanism for moving the member, a holding mechanism for holding or releasing the connection state of the track member to the adjacent track member at the first position, and a control device for controlling the moving mechanism to move the track member are further provided. Good. In this configuration, one track member that has moved to a second position separated by a predetermined distance from the first position that can be connected to adjacent track members can be moved to the first position and one track at the first position. It becomes possible to fix the member. As a result, one orbital member that has moved to the second position separated from the first position by a predetermined distance can be returned to the first position without human intervention.

In the tracked transport vehicle system of the present invention, at least one track member may be provided so as to be movable diagonally rearward or diagonally forward in the transport direction of the transport vehicle with respect to adjacent track members. In this configuration, one track member can be moved with a simple configuration and space saving.

According to the present invention, it is possible to reduce the vibration generated when the transport vehicle transfers the track member.

FIG. 1 is a front view showing a tracked transport vehicle system according to an embodiment. FIG. 2 is an enlarged cross-sectional view showing the transport vehicle and the track of FIG. FIG. 3 is a plan view showing a connecting portion of the track member. FIG. 4 is a perspective view showing a movable track and a fixed track included in the tracked carrier system. FIG. 5 is a bottom view showing a movable track and a fixed track located at the first position. FIG. 6 is a bottom view showing a movable track and a fixed track located at the second position. FIG. 7 is a plan view showing a connecting portion of the track member according to the modified example.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicate description will be omitted.

The tracked transport vehicle system 1 is a system for transporting the article F by using the ceiling transport vehicle 10 that can move along the track 2. Article F includes, for example, a container for storing a plurality of semiconductor wafers, a reticle pod for storing a glass substrate, general parts, and the like. Here, for example, in a factory or the like, an example is an tracked transport vehicle system 1 in which a ceiling transport vehicle 10 (hereinafter, simply referred to as “transport vehicle 10”) travels along a track 2 laid on the ceiling or the like. I will explain it by listing it. As shown in FIG. 1, the tracked transport vehicle system 1 mainly includes a plurality of transport vehicles 10, a track 2, a plurality of mounting portions (not shown), and the like.

The transport vehicle 10 travels along the track 2 and transports the article F. The transport vehicle 10 is configured so that the article F can be transferred. The transport vehicle 10 includes a traveling unit 11, a power receiving unit 12, a main body frame 13, a lateral feed unit 14, a θ drive 15, an elevating drive unit 16, and an elevating table that allow the transport vehicle 10 to travel along the track 2. It has 17 and a fall prevention cover 18.

The traveling unit 11 causes the transport vehicle 10 to travel along the track 2. The traveling unit 11 includes a motor 11a, a pair of traveling rollers (first rollers) 11b and 11b, and a pair of side rollers (second rollers) 11c and 11c. The lateral feed unit 14 collectively feeds the θ drive 15, the elevating drive unit 16 and the elevating table 17 in a direction perpendicular to the traveling direction of the track 2. The θ drive 15 rotates at least one of the elevating drive unit 16 and the elevating table 17 within a predetermined angle range in a horizontal plane. The elevating drive unit 16 elevates and elevates the elevating table 17 by winding or feeding out a lifting material such as a wire cable, a rope, and a belt. The elevating table 17 is provided with a chuck so that the article F can be freely gripped or released. A pair of fall prevention covers 18 are provided, for example, in front of and behind the traveling direction of the transport vehicle 10. The fall prevention cover 18 prevents the article F from falling during transportation by infesting claws or the like (not shown).

As shown in FIGS. 1 and 2, the track 2 is laid, for example, near the ceiling, which is an overhead space for an operator. The track 2 is suspended from the ceiling C, for example. The track 2 is a travel path provided for traveling the transport vehicle 10. The track 2 has a first base member 21 fixed to the ceiling C, a track member 22 fixed to the first base member 21, and a feeding portion 23 provided on the inner surface of the track member 22.

The first base member 21 is a plate-shaped member and is fixed to the ceiling C with a bolt or the like. The track member 22 is fixed to the first base member 21 by bolts or the like. The track member 22 includes a top plate portion 22a facing the first base member 21, side surface portions 22b and 22b extending downward from both ends of the top plate portion 22a, and side surface portions 22b and 22b, respectively. It has bottom surface portions 22c and 22c extending in the horizontal direction from the lower end. For example, a guide portion (auxiliary guide portion) 22d is arranged on the branch portion of the track 2 or the upper surface of the bottom surface portions 22c and 22c of the connecting portion 27 of the track member 22.

The traveling portion 11 of the transport vehicle 10 travels in the space S surrounded by the top plate portions 22a, the side surface portions 22b and 22b, and the bottom surface portions 22c and 22c. The motor 11a rotationally drives the traveling roller 11b by the electric power supplied to the power receiving unit 12. The traveling rollers 11b and 11b are driven by the motor 11a and roll on the upper surfaces of the bottom surfaces 22c and 22c of the track member 22. A linear motor or the like may be used instead of the motor that directly rotates and drives the traveling roller. The side rollers 11c and 11c are provided so as to roll in contact with the guide portion 22d described above. The power receiving unit 12 receives electric power from the power feeding unit 23 of the track 2 in a non-contact state.

Next, the configuration of the connecting portion 27 between the track member (one track member) 22 in the fixed track 30 and the track member (adjacent track member) 22 in the movable track 40 will be described with reference to FIG. As described above, the track member 22 is provided along the extending direction of the track 2, and has a pair of side surface portions 22b and 22b that guide each of the pair of traveling rollers 11b and 11b (see FIG. 2) and a pair. It is provided between the side surface portions 22b and 22b and facing one of the pair of side surface portions 22b and 22b, and also includes a guide portion 22d that guides one of the pair of side rollers 11c and 11c (see FIG. 2). ..

At the connecting portion 27 of the track members 22 and 22 adjacent to each other, a first joint portion 28a which is a joint between one side surface portions 22b and a second joint portion 28b which is a joint between the other side surface portions 22b are formed. Will be done. In the present embodiment, the first seam portion 28a and the second seam portion 28b are provided so as to be displaced from each other in the extending direction of the track 2. In other words, it is formed in a state of being displaced back and forth in the transport direction of the transport vehicle 10. Further, in a plan view viewed from a direction orthogonal to the extending direction and the width direction, the joints of the adjacent track members 22 and 22, that is, the joints of the bottom surface portions 22c extend in an oblique direction with respect to the extending direction. The guide portion 22d is provided so as to face the other side surface portion 22b facing the first seam portion 28a in the width direction and to face one side surface portion 22b facing the second seam portion 28b in the width direction. It is provided in.

In the tracked transport vehicle system 1 of the present embodiment, a part of the track 2 of the transport vehicle 10 is provided as a movable track 40 so as to be movable with respect to a fixed track 30 other than the movable track 40. As shown in FIGS. 4 to 6, the tracked carrier system 1 includes a fixed track 30, a movable track 40, a moving mechanism 45, a holding mechanism 70, and a control device 90. The fixed track 30 has the first base member 21 and the track member 22 described above. The fixed track 30 is provided so as not to be movable with respect to the ceiling C. The movable track 40 has the above-mentioned first base member 21, the second base member 41, and the above-mentioned track member 22.

The moving mechanism 45 is movable between the first position P1 (see FIG. 5) for connecting the movable track 40 to the fixed track 30 and the second position P2 (see FIG. 6) separated from the first position P1 by a predetermined distance. Move the orbit 40. The first position P1 of the present embodiment is arranged below the fire prevention shutter SH, that is, the fire prevention shutter SH operated at the time of abnormality comes into contact with the movable track 40 at the first position P1. The second position P2 of the present embodiment is a position where the connection with the fixed track 30 is released, and is a position deviated from below the fire protection shutter SH. That is, the fire protection shutter SH operated at the time of abnormality does not come into contact with the movable track 40 located at the second position P2. The moving mechanism 45 includes a sliding mechanism 42, a first urging member 47, and a driving device 50.

The sliding mechanism 42 is configured so that the second base member 41 can slide with respect to the first base member 21. An example of the sliding mechanism 42 is a linear motion guide. The sliding mechanism 42 enables the movable track 40 to move in the horizontal plane, and also in a direction oblique to the transport direction of the transport vehicle 10 (for example, a predetermined angle α is 20 to 60 degrees: see FIG. 6). Allows movement.

The first urging member 47 urges the movable track 40 in the direction from the first position P1 to the second position P2 (the direction indicated by the white arrow in FIGS. 3 and 5, hereinafter referred to as the “evacuation direction ED”). An example of the first urging member 47 is a constant load spring. One end of the first urging member 47 is fixed to the first base member 21, and the other end is fixed to the second base member 41. The first urging member 47 pulls the movable track 40 in the retracting direction ED by the tensile load in the retracting direction ED.

The drive device 50 moves the movable track 40 against the first urging member 47 in the direction from the second position P2 to the first position P1 (the direction of the black arrow in FIGS. 3 and 5: hereinafter, also referred to as “return direction RD”. Move to). The drive device 50 includes a wire cable 51, a take-up unit 53, a drive unit 55, and a ratchet mechanism 57. One end of the wire cable 51 is connected to the second urging member 71, and the other end is connected to the take-up portion 53. The wire cable 51 is guided by two first pulleys 52a and 52 provided on the fixed track 30 and a plurality of second pulleys 52b and 52b provided on the first base member 21. The winding unit 53 is, for example, a cylindrical member, and is rotationally driven by the driving unit 55. The winding unit 53 winds the wire cable 51 by winding the wire cable 51 around its outer peripheral surface.

The drive unit 55 is, for example, a motor, and applies a rotational force in the direction of winding the wire cable 51 to the winding unit 53. When the wire cable 51 is wound around the winding portion 53, tension is generated, and a pulling force is generated in the return direction RD. The ratchet mechanism 57 prevents the take-up portion 53 from rotating in the unwinding direction of the wire cable 51. That is, the drive device 50 prevents the tension of the wire cable 51 from loosening even if the drive unit 55 no longer applies a rotational force in the winding direction. The ratchet mechanism 57 is a known mechanism composed of, for example, a combination of a gear, a pawl (claw) that engages with the gear, a solenoid that disengages the pawl from the gear, and a battery that operates the solenoid when power is lost. Is.

The holding mechanism 70 holds or releases the connected state of the movable track 40 at the first position P1. The holding mechanism 70 has a stretchable second urging member 71 for positioning the movable track 40 at the first position P1 and a locking member 77. The second urging member 71 is provided on the movable track 40. The locking member 77 is provided on the fixed track 30. When the movable track 40 is pulled in the return direction RD by the wire cable 51, a part of the track member 22 of the movable track 40 comes into contact with (supports) the locking member 77. When the movable track 40 is further pulled by the wire cable 51 while the movable track 40 is pressed against the locking member 77, the second urging member 71 receives a force for urging the movable track 40 in the return direction RD. Occurs. That is, the load acts in the direction in which the movable track 40 is pressed against the locking member 77. As a result, the movable track 40 can be positioned at the first position P1.

The control device 90 controls the operation of the drive device 50. The control device 90 is an electronic control unit including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The control device 90 can be configured as software in which, for example, a program stored in a ROM is loaded into a RAM and executed by a CPU. The control device 90 may be configured as hardware such as an electronic circuit.

The control device 90 controls the drive device 50 to move the movable track 40. The control device 90 controls the drive unit 55 to wind up the wire cable 51. Further, the control device 90 controls the solenoid so as to disengage the ratchet mechanism 57 from engaging with the gear of the pawl when a fire alarm is received from, for example, an automatic fire alarm system.

Next, an operation (evacuation operation) when the movable track 40 is retracted from the first position P1 to the second position P2 will be described. As described above, the movable track 40 is usually stably fixed to the first position P1 by being pressed against the locking member 77 by the urging force of the compression spring (not shown) of the second urging member 71. Has been done. That is, the movable track 40 is connected to the fixed track 30. In such a state, for example, when a fire alarm is input to the control device 90 from an automatic fire alarm system or the like, the engagement of the ratchet mechanism 57 with the gear of the pawl is released by the solenoid, and the tension of the wire cable 51 is loosened. .. When the tension of the wire cable 51 is relaxed, the movable track 40 is pulled in the retracting direction ED by the first urging member 47. As a result, the movable track 40 moves to the second position P2.

Next, the operation (return operation) when the movable track 40 returns from the second position P2 to the first position P1 will be described. For example, the operator operates an operation panel installed on the ground or the like to start a return operation. When the operation panel is operated by the operator, the drive device 50 starts winding the wire cable 51. When tension is generated in the wire cable 51 by winding the wire cable 51, a tensile force is generated on the movable track 40, and the movable track 40 starts moving in the return direction RD.

When the movable track 40 is pulled to the first position P1 by the wire cable 51, the movable track 40 comes into contact with the locking member 77 provided on the fixed track 30. When the movable track 40 comes into contact with the locking member 77, the movement of the movable track 40 in the return direction RD is restricted. Here, the drive device 50 stops the winding of the wire cable 51. The second urging member 71 applies a force that presses the movable track 40 against the locking member 77. As a result, the movable track 40 is stably positioned at the first position P1.

Next, the operation when the transport vehicle 10 travels on the connecting portion 27 will be described. One of the side rollers 11c and 11c of the transport vehicle 10 traveling on the track member 22 travels along the side surface portion 22b. That is, the side roller 11c is guided by the side surface portion 22b. When one side roller 11c passes through the first seam portion 28a, the guide roller 11d provided below the other side roller 11c is guided by the guide portion 22d. As described above, the guide portion 22d is provided so as to face the other side surface portion 22b facing the first seam portion 28a in the width direction. By guiding the guide roller 11d by the guide portion 22d, the side roller 11c is spared from being guided by the side surface portion 22b. That is, the occurrence of vibration due to the side roller 11c passing through the first seam portion 28a can be reduced. Further, since the transport vehicle 10 can be passed through the first seam portion 28a in a stable posture, it is possible to reduce the vibration generated when the transport vehicle 10 transfers to the first seam portion 28a.

The same applies when the other side roller 11c passes through the second seam portion 28b. That is, the guide roller 11d provided below one side roller 11c is guided by the guide portion 22d. As described above, the guide portion 22d is provided so as to face one side surface portion 22b facing the second seam portion 28b in the width direction. By guiding the guide roller 11d by the guide portion 22d, the side roller 11c is spared from being guided by the side surface portion 22b. That is, the occurrence of vibration due to the side roller 11c passing through the second seam portion 28b can be reduced. Further, since the transport vehicle 10 can be passed through the second seam portion 28b in a stable posture, the vibration generated when the transport vehicle 10 transfers to the second seam portion 28b can be reduced.

Next, the operation and effect of the tracked transport vehicle system 1 of the above embodiment will be described. In the tracked transport vehicle system 1 of the above embodiment, when one side roller 11c of the transport vehicle 10 passes through the first seam portion 28a, the other guide roller 11d faces the first seam portion 28a in the width direction. It is guided by a guide portion 22d arranged so as to face the other side surface portion 22b. As a result, the movement of the transport vehicle 10 in the width direction is restricted, so that the posture of the transport vehicle 10 is stabilized. As a result, it is possible to reduce the vibration when changing the orbit.

In the tracked carrier system 1 of the above embodiment, the joints of the adjacent track members 22, 22 extend in an oblique direction with respect to the extending direction in a plan view viewed from a direction orthogonal to the extending direction and the width direction. There is. In such a configuration, the gap G between the side surface portions 22b and 22b in the first seam portion 28a becomes relatively large. Similarly, the gap G between the side surface portions 22b and 22b in the second seam portion 28b is also relatively large. In the tracked transport vehicle system 1 of the above embodiment, even in such a case, the guide roller 11d of the transport vehicle 10 is guided by the guide portion 22d, so that the side roller 11c fits into the gap G. Can be prevented. Further, in the tracked carrier system 1 of the above embodiment, it is possible to prevent the side roller 11c from coming into contact with the acute-angled portion 22f of the track member 22 formed in such a configuration. Therefore, the side roller 11c can be prevented from being damaged and the durability can be improved.

In the tracked carrier system 1 of the present embodiment, a moving mechanism 45 for returning the movable track 40 from the second position P2 to the first position P1 is provided, and the fixed track 30 of the movable track 40 returned to the first position P1 is provided. A holding mechanism 70 for holding the connection state to the device is provided. As a result, the movable track 40 retracted to the second position P2 separated from the first position P1 connectable to the fixed track 30 by a predetermined distance is returned to the first position P1, and the movable track 40 is fixed at the first position P1. Will be possible. As a result, the movable track 40 retracted to the second position P2 separated from the first position P1 by a predetermined distance can be returned to the first position P1 without human intervention.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention.

In the above embodiment, the movable track 40 has been described with reference to an example in which the movable track 40 is configured to move in an oblique direction (diagonally rearward) with respect to the transport direction of the transport vehicle 10 in the horizontal plane. For example, in the horizontal plane. It can be applied to a tracked transport vehicle system configured to move diagonally (diagonally forward) with respect to the transport direction of the transport vehicle 10, or as shown in FIG. 7, in a direction along an extension direction or a width direction. It can be applied to tracked transport vehicle systems that are configured to move in. Also in this case, in the present embodiment, the first seam portion 28a and the second seam portion 28b are provided so as to be displaced from each other in the extending direction of the track 2. In other words, it is formed in a state of being displaced back and forth in the transport direction of the transport vehicle 10. Further, the guide portion 22d is provided so as to face the other side surface portion 22b facing the first seam portion 28a in the width direction intersecting the extending direction, and the guide portion 22d faces the second seam portion 28b in the width direction. It is provided so as to face the side surface portion 22b of the above.

Although the example described by giving an example applied to the connecting portion 27 between the orbital member 22 in the fixed orbit 30 and the orbital member 22 in the movable orbit 40, it may be applied to the connecting portion 27 between the orbital members 22 in the fixed orbit 30. .. Similarly, it may be applied to the connecting portion 27 between the track members 22 in the movable track 40.

In the above embodiment, a constant load spring has been described as an example of the first urging member 47 that urges the movable track 40 in the retracting direction ED, but a weight that urges the movable track 40 in the retracting direction ED by gravity has been described. There may be.

In the above embodiment, an example applied to the track 2 for suspending and traveling the transport vehicle 10 has been described, but the present invention also applies to a tracked system in which the transport vehicle travels on a track arranged on the ground. It is possible.

1 ... Track carrier system, 2 ... Track, 10 ... Ceiling carrier (transport vehicle), 11b ... Traveling roller, 11c ... Side roller (first roller), 11d ... Guide roller (second roller), 22 ... Track Member, 22b ... Side surface, 22c ... Bottom, 22d ... Guide (auxiliary guide), 27 ... Connection, 28a ... First seam, 28b ... Second seam, 30 ... Fixed track, 40 ... Movable track , 45 ... moving mechanism, 47 ... first urging member, 50 ... driving device, 70 ... holding mechanism, 71 ... second urging member, 77 ... locking member, F ... article, G ... gap, P1 ... first Position, P2 ... second position, RD ... return direction, ED ... retract direction.

Claims (4)

A tracked transport vehicle system in which a transport vehicle having a pair of first rollers and a pair of second rollers travels along a track extending by connecting a plurality of track members.
The track member is provided along the extending direction of the track and is provided between a pair of side surface portions that guide each of the pair of first rollers, and between the pair of side surface portions and one of the pair of side surface portions. It is provided with an auxiliary guide portion that is arranged so as to face each other and guides one of the pair of second rollers.
In the connecting portion of the track members adjacent to each other, the first joint portion which is a joint between the side surface portions and the second joint portion which is a joint between the side surface portions are the extending directions of the track. It is provided so that it is offset from each other.
The auxiliary guide portion is provided so as to face the other side surface portion facing the first seam portion in the width direction intersecting the extending direction, and faces the second seam portion in the width direction. A tracked carrier system provided so as to face one of the side surfaces. The tracked carrier according to claim 1, wherein the joints of the adjacent track members extend in an oblique direction with respect to the extending direction in a plan view viewed from a direction orthogonal to the extending direction and the width direction. system. A moving mechanism for moving the track member between a first position for connecting at least one track member to an adjacent track member which is an adjacent track member and a second position separated from the first position by a predetermined distance. When,
A holding mechanism for holding or releasing the connection state of the track member to the adjacent track member at the first position,
The tracked carrier system according to claim 1 or 2, further comprising a control device for controlling the moving mechanism to move the track member. The present invention according to any one of claims 1 to 3, wherein the at least one track member is provided so as to be movable obliquely rearward or diagonally forward in the transport direction of the transport vehicle with respect to the adjacent track member. Track carrier system.

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