JP6850583B2

JP6850583B2 - socket

Info

Publication number: JP6850583B2
Application number: JP2016208030A
Authority: JP
Inventors: 山本　次男; 次男山本
Original assignee: Yokowo Co Ltd
Current assignee: Yokowo Co Ltd
Priority date: 2016-10-24
Filing date: 2016-10-24
Publication date: 2021-03-31
Anticipated expiration: 2036-10-24
Also published as: TW201817102A; JP2018071991A; WO2018078946A1

Description

本発明は、例えば半導体集積回路等の被測定デバイスの検査に使用するソケットに関する。 The present invention relates to sockets used for inspecting devices under test, such as semiconductor integrated circuits.

半導体集積回路等の検査対象物の検査を行う場合において、検査対象物と測定器側の検査用基板とを電気的に接続するために、複数のコンタクトプローブを絶縁支持体によって並列支持したソケットが使用される。図７は、従来のケルビン測定用のソケットの一端の拡大断面図である。ケルビン測定とは、電流供給用プローブ及び電圧監視用プローブを検査対象物の電極、例えば電極バンプに当接させて電気的特性を測定するものである（必要に応じて下記特許文献２参照）。 When inspecting an inspection object such as a semiconductor integrated circuit, a socket in which a plurality of contact probes are supported in parallel by an insulating support is provided in order to electrically connect the inspection object and the inspection board on the measuring instrument side. used. FIG. 7 is an enlarged cross-sectional view of one end of a conventional socket for Kelvin measurement. The Kelvin measurement is a measurement of electrical characteristics by bringing a current supply probe and a voltage monitoring probe into contact with an electrode of an inspection object, for example, an electrode bump (see Patent Document 2 below if necessary).

図７のソケットは、２つのコンタクトプローブ８０１を絶縁支持体９００で並列支持した構成であり、コンタクトピッチＰ１は、次式で示される。
Ｐ１＝Ａ＋（Ｂ×２）＋（Ｃ×２）＋（Ｄ×２） …式１
ただし、
Ａ：絶縁支持体９００の最小肉厚
Ｂ：絶縁支持体９００とフランジ部８１２の側面との隙間（クリアランス）
Ｃ：フランジ部８１２と先端側円柱部８２４との半径差
Ｄ：先端側円柱部８２４の側面（隣の先端側円柱部８２４と最も距離が近い側面）から先端面の山の頂点までの距離
※Ｄの距離は、隣り合うコンタクトプローブ８０１同士を結ぶ方向に沿う距離である。先端側円柱部８２４の回転角度次第ではゼロになることもある。 The socket of FIG. 7 has a configuration in which two contact probes 801 are supported in parallel by an insulating support 900, and the contact pitch P1 is represented by the following equation.
P1 = A + (B × 2) + (C × 2) + (D × 2)… Equation 1
However,
A: Minimum wall thickness of the insulating support 900 B: Gap (clearance) between the insulating support 900 and the side surface of the flange portion 812.
C: Radial difference between the flange portion 812 and the tip-side columnar portion 824 D: Distance from the side surface of the tip-side columnar portion 824 (the side surface closest to the adjacent tip-side columnar portion 824) to the top of the mountain on the tip surface * The distance D is a distance along the direction connecting the adjacent contact probes 801 to each other. Depending on the rotation angle of the tip-side cylindrical portion 824, it may become zero.

特開２０１２−１４９９２７号公報Japanese Unexamined Patent Publication No. 2012-149927 特開２００８−４５９８６号公報Japanese Unexamined Patent Publication No. 2008-45986

上記式１において、一例として、Ａ＝４０μｍ、Ｂ＝１０μｍ、Ｃ＝１５μｍ、Ｄ＝０として計算すると、Ｐ１＝９０μｍとなる。式１において、Ｃに対応するフランジ部８１２の出っ張りは、コンタクトピッチＰ１に直接影響しており、狭ピッチ化の妨げとなっている。なお、上記の長さＡ〜ＤのうちＡとＢは、設計上ゼロにすることは不可能である。 In the above formula 1, as an example, when calculated with A = 40 μm, B = 10 μm, C = 15 μm, and D = 0, P1 = 90 μm. In the formula 1, the protrusion of the flange portion 812 corresponding to C directly affects the contact pitch P1 and hinders the narrowing of the pitch. Of the above lengths A to D, A and B cannot be set to zero by design.

本発明はこうした状況を認識してなされたものであり、その目的は、従来と比較してコンタクトピッチを狭めることの可能なソケットを提供することにある。 The present invention has been made in recognition of such a situation, and an object of the present invention is to provide a socket capable of narrowing the contact pitch as compared with the conventional one.

本発明のある態様は、ソケットである。このソケットは、
絶縁支持体と、
前記絶縁支持体に並列支持された２つのコンタクトプローブと、を備え、
各コンタクトプローブは、
第１及び第２プランジャーと、
前記第１及び第２プランジャーを互いに離れる方向に付勢するスプリングと、を有し、
前記第１プランジャーは、自身の前記絶縁支持体からの抜けを防止するためのフランジ部を有し、
前記絶縁支持体は、前記２つのコンタクトプローブの前記フランジ部の間が空間となっている。 One aspect of the invention is a socket. This socket is
Insulation support and
Two contact probes supported in parallel with the insulating support.
Each contact probe
With the 1st and 2nd plungers
It has a spring that urges the first and second plungers in a direction away from each other.
The first plunger has a flange portion for preventing its own from coming off from the insulating support.
The insulating support has a space between the flange portions of the two contact probes.

前記第１及び第２プランジャーの基端側、並びに前記スプリングを収容する導電性チューブを備え、前記導電性チューブの外径が前記フランジ部の外径よりも小さくてもよい。 The base end side of the first and second plungers and a conductive tube for accommodating the spring may be provided, and the outer diameter of the conductive tube may be smaller than the outer diameter of the flange portion.

本発明のもう１つの態様は、ソケットである。このソケットは、
絶縁支持体と、
前記絶縁支持体に並列支持された２つのコンタクトプローブと、を備え、
各コンタクトプローブは、
第１及び第２プランジャーと、
前記第１及び第２プランジャーを互いに離れる方向に付勢するスプリングと、
前記第１及び第２プランジャーの基端側、並びに前記スプリングを収容する導電性チューブと、を有し、
前記第１プランジャー及び前記導電性チューブは一体にストローク動作するように相互に組み合わされ、
前記導電性チューブは、自身及び前記第１プランジャーの前記絶縁支持体からの抜けを防止するためのフランジ部を有し、
前記絶縁支持体は、前記２つのコンタクトプローブの前記フランジ部の間が空間となっている。 Another aspect of the present invention is a socket. This socket is
Insulation support and
Two contact probes supported in parallel with the insulating support.
Each contact probe
With the 1st and 2nd plungers
A spring that urges the first and second plungers in a direction away from each other,
It has a proximal end side of the first and second plungers, and a conductive tube for accommodating the spring.
The first plunger and the conductive tube are combined with each other so as to perform stroke operation integrally.
The conductive tube has a flange portion for preventing the conductive tube from coming off from the insulating support of itself and the first plunger.
The insulating support has a space between the flange portions of the two contact probes.

前記絶縁支持体は、
各コンタクトプローブの前記第１プランジャーの先端側をガイドする２つの第１ガイド穴を有する第１絶縁支持体と、
各コンタクトプローブの前記第２プランジャーの先端側をガイドする２つの第２ガイド穴を有する第２絶縁支持体と、を有し、
前記２つの第１ガイド穴間の距離が、前記２つの第２ガイド穴間の距離よりも小さくてもよい。 The insulating support is
A first insulating support having two first guide holes for guiding the tip end side of the first plunger of each contact probe.
Each contact probe has a second insulating support having two second guide holes that guide the tip side of the second plunger.
The distance between the two first guide holes may be smaller than the distance between the two second guide holes.

前記２つのコンタクトプローブが、前記第１プランジャーの先端側に向かって互いに近づくように斜めに傾いていてもよい。 The two contact probes may be tilted obliquely toward the tip end side of the first plunger so as to approach each other.

前記第１プランジャーは、先端に接触部を有する円柱部を有し、
前記円柱部の外周面よりも前記フランジ部が径方向外側に突出し、
前記絶縁支持体は、前記円柱部をガイドする、前記フランジ部よりも小径の丸穴を有してもよい The first plunger has a cylindrical portion having a contact portion at the tip thereof, and has a cylindrical portion.
The flange portion protrudes radially outward from the outer peripheral surface of the cylindrical portion, and the flange portion protrudes outward in the radial direction.
The insulating support may have a round hole having a diameter smaller than that of the flange portion that guides the cylindrical portion.

前記第１プランジャーが検査対象物との接続用で、前記第２プランジャーが検査用基板との接続用であってもよい。 The first plunger may be for connecting to the inspection object, and the second plunger may be for connecting to the inspection substrate.

前記フランジ部は、前記第１プランジャーの長さ方向と垂直な断面が円形であってもよい。 The flange portion may have a circular cross section perpendicular to the length direction of the first plunger.

前記フランジ部が、前記コンタクトプローブの最外周面を成してもよい。 The flange portion may form the outermost peripheral surface of the contact probe.

なお、以上の構成要素の任意の組合せ、本発明の表現を方法やシステムなどの間で変換したものもまた、本発明の態様として有効である。 Any combination of the above components and a conversion of the expression of the present invention between methods, systems and the like are also effective as aspects of the present invention.

本発明によれば、従来と比較してコンタクトピッチを狭めることの可能なソケットを提供することができる。 According to the present invention, it is possible to provide a socket capable of narrowing the contact pitch as compared with the conventional one.

図１（Ａ）は、本発明の実施の形態１に係るソケット１の正断面図。図１（Ｂ）は、図１（Ａ）の状態からソケット１を検査用基板９にセットした状態の正断面図。図１（Ｃ）は、図１（Ｂ）の状態から検査対象物８をソケット１にセットした状態の正断面図。FIG. 1A is a normal cross-sectional view of the socket 1 according to the first embodiment of the present invention. FIG. 1 (B) is a front sectional view of a state in which the socket 1 is set on the inspection board 9 from the state of FIG. 1 (A). FIG. 1 (C) is a normal cross-sectional view of a state in which the inspection object 8 is set in the socket 1 from the state of FIG. 1 (B). 図１（Ｃ）の要部拡大図。An enlarged view of a main part of FIG. 1 (C). 本発明の実施の形態２に係るソケット２の正断面図。FIG. 5 is a normal cross-sectional view of the socket 2 according to the second embodiment of the present invention. 図４（Ａ）は、本発明の実施の形態３に係るソケット３の正断面図。図４（Ｂ）は、図４（Ａ）の状態からソケット３を検査用基板９にセットした状態の正断面図。図４（Ｃ）は、図４（Ｂ）の状態から検査対象物８をソケット３にセットした状態の正断面図。FIG. 4A is a normal cross-sectional view of the socket 3 according to the third embodiment of the present invention. FIG. 4B is a normal cross-sectional view of a state in which the socket 3 is set on the inspection board 9 from the state of FIG. 4A. FIG. 4C is a normal cross-sectional view of a state in which the inspection object 8 is set in the socket 3 from the state of FIG. 4B. 図４（Ｃ）の要部拡大図。FIG. 4 (C) is an enlarged view of a main part. 本発明の実施の形態４に係るソケット４の正断面図。FIG. 5 is a normal cross-sectional view of the socket 4 according to the fourth embodiment of the present invention. 従来のケルビン測定用のソケットの一端の拡大断面図。An enlarged cross-sectional view of one end of a conventional Kelvin measurement socket.

以下、図面を参照しながら本発明の好適な実施の形態を詳述する。なお、各図面に示される同一または同等の構成要素、部材等には同一の符号を付し、適宜重複した説明は省略する。また、実施の形態は発明を限定するものではなく例示であり、実施の形態に記述されるすべての特徴やその組み合わせは必ずしも発明の本質的なものであるとは限らない。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The same or equivalent components, members, etc. shown in the drawings are designated by the same reference numerals, and redundant description will be omitted as appropriate. Moreover, the embodiment is not limited to the invention but is an example, and all the features and combinations thereof described in the embodiment are not necessarily essential to the invention.

（実施の形態１）
図１（Ａ）は、本発明の実施の形態１に係るソケット１の正断面図である。図１（Ａ）により、上下方向を定義する。ソケット１は、ケルビン測定用であり、絶縁支持体５によって並列支持された相互に同一構成の２本のコンタクトプローブ７の一方を電流供給用プローブ、他方を電圧監視用プローブとして使用する。図１（Ａ）は、コンタクトプローブ７が絶縁支持体５に対して上限位置にある状態を示している。 (Embodiment 1)
FIG. 1A is a front sectional view of the socket 1 according to the first embodiment of the present invention. The vertical direction is defined by FIG. 1 (A). The socket 1 is for Kelvin measurement, and one of two contact probes 7 having the same configuration supported in parallel by the insulating support 5 is used as a current supply probe and the other is used as a voltage monitoring probe. FIG. 1A shows a state in which the contact probe 7 is in the upper limit position with respect to the insulating support 5.

絶縁支持体５は、第１絶縁支持体としてのリテーナ５ａ、ピンブロック５ｂ、及び第２絶縁支持体としてのピンプレート５ｃの三部品（いずれも例えば樹脂成形体）を組み合わせたものである。リテーナ５ａに形成された第１ガイド穴としての貫通穴５ｄ、ピンブロック５ｂに形成された貫通穴５ｅ、及びピンプレート５ｃに形成された貫通穴５ｆに、コンタクトプローブ７が貫通され、コンタクトプローブ７の姿勢を保持する。貫通穴５ｆの下端部は、第２ガイド穴としての小径穴部５ｇとなっている。貫通穴５ｄ〜５ｆは、小径穴部５ｇも含め、いずれも丸穴であって、ドリルにより高い位置精度で形成可能である。リテーナ５ａの貫通穴５ｄのピッチは、ピンブロック５ｂの貫通穴５ｅのピッチ及びピンプレート５ｃの貫通穴５ｆピッチよりも狭い。貫通穴５ｄ間の隔壁５ｉの肉厚は、フランジ部１２同士が接触しない範囲で最も小さい幅であり、図７に示す従来例の該当部分の肉厚と比較して薄い。貫通穴５ｄ〜５ｆは、コンタクトプローブ７を斜めにすることができるだけの余裕を持った内径寸法となっている。リテーナ５ａとピンブロック５ｂとの間には、空間５ｈが設けられる。空間５ｈは、後述の第１プランジャー１０のフランジ部１２のストローク範囲を包含する上下方向長さを有する。 The insulating support 5 is a combination of three parts (for example, a resin molded body) of a retainer 5a as a first insulating support, a pin block 5b, and a pin plate 5c as a second insulating support. The contact probe 7 is penetrated through the through hole 5d as the first guide hole formed in the retainer 5a, the through hole 5e formed in the pin block 5b, and the through hole 5f formed in the pin plate 5c, and the contact probe 7 is formed. Hold the posture of. The lower end of the through hole 5f is a small diameter hole portion 5g as a second guide hole. The through holes 5d to 5f, including the small-diameter hole portion 5g, are all round holes and can be formed with high position accuracy by a drill. The pitch of the through hole 5d of the retainer 5a is narrower than the pitch of the through hole 5e of the pin block 5b and the pitch of the through hole 5f of the pin plate 5c. The wall thickness of the partition wall 5i between the through holes 5d is the smallest width in a range where the flange portions 12 do not contact each other, and is thinner than the wall thickness of the corresponding portion of the conventional example shown in FIG. The through holes 5d to 5f have an inner diameter that allows the contact probe 7 to be slanted. A space 5h is provided between the retainer 5a and the pin block 5b. The space 5h has a vertical length including the stroke range of the flange portion 12 of the first plunger 10, which will be described later.

コンタクトプローブ７は、第１プランジャー１０と、第２プランジャー２０と、導電性チューブ３０と、スプリング３５と、を有する。第１プランジャー１０は、図１（Ｃ）に示す検査対象物８との接続部品であり、銅又は銅合金等の導電性金属体からなる。第２プランジャー２０は、図１（Ｃ）に示す検査用基板９との接続部品であり、銅又は銅合金等の導電性金属体からなる。導電性チューブ３０は、第１プランジャー１０の基端側、第２プランジャー２０の基端側、及びスプリング３５を内部に収容する部品であり、銅又は銅合金等の導電性金属体からなる。スプリング３５は、例えばピアノ線やステンレス線等の一般的な導体金属材質で形成されたコイルスプリングであり、第１プランジャー１０及び第２プランジャー２０を互いに離れる方向に付勢し、第１プランジャー１０及び第２プランジャー２０に対して検査対象物８及び検査用基板９との接触力を与える。検査対象物８は、例えば電極が所定間隔で配列された半導体集積回路であり、図示の場合、電極バンプ８ａが所定間隔で配列されたものである。検査用基板９は、不図示の測定器側に接続される電極パッド９ａを所定間隔で有するものである。 The contact probe 7 has a first plunger 10, a second plunger 20, a conductive tube 30, and a spring 35. The first plunger 10 is a connecting part with the inspection object 8 shown in FIG. 1C, and is made of a conductive metal body such as copper or a copper alloy. The second plunger 20 is a connecting component to the inspection substrate 9 shown in FIG. 1C, and is made of a conductive metal body such as copper or a copper alloy. The conductive tube 30 is a component that internally accommodates the base end side of the first plunger 10, the base end side of the second plunger 20, and the spring 35, and is made of a conductive metal body such as copper or a copper alloy. .. The spring 35 is a coil spring formed of a general conductor metal material such as a piano wire or a stainless wire, and urges the first plunger 10 and the second plunger 20 in a direction away from each other to prepare the first plan. The jar 10 and the second plunger 20 are provided with a contact force with the inspection object 8 and the inspection substrate 9. The inspection object 8 is, for example, a semiconductor integrated circuit in which electrodes are arranged at predetermined intervals, and in the case of drawing, electrode bumps 8a are arranged at predetermined intervals. The inspection board 9 has electrode pads 9a connected to the measuring instrument side (not shown) at predetermined intervals.

第１プランジャー１０は、先端側から順に、先端側円柱部１１、フランジ部１２、及び基端側円柱部１３を有する。先端側円柱部１１の先端は、ここでは八つ割り形状の接触部１１ａとされている。先端側円柱部１１は、リテーナ５ａの貫通穴５ｄを貫通し、貫通穴５ｄにガイドされる。フランジ部１２は、貫通穴５ｄよりも大径であり、第１プランジャー１０がリテーナ５ａから上方に抜けるのを防止する。フランジ部１２は、第１プランジャー１０の長さ方向と垂直な断面が円形である。ここでは、フランジ部１２は円柱形状である。フランジ部１２の外周面は、コンタクトプローブ７の最外周面を成す。フランジ部１２は、リテーナ５ａとピンブロック５ｂとの間の空間５ｈに位置する。フランジ部１２の下面は、導電性チューブ３０の上端と係合（当接）する。基端側円柱部１３は、導電性チューブ３０の内側に位置する。基端側円柱部１３は、長さ方向中間部に部分的に小径化されたくびれ部１３ａを有する。くびれ部１３ａは、導電性チューブ３０の凸部３０ａと係合し、これにより第１プランジャー１０と導電性チューブ３０は一体にストローク動作するように相互に組み合わされる。 The first plunger 10 has a tip-side columnar portion 11, a flange portion 12, and a proximal end-side columnar portion 13 in this order from the tip end side. Here, the tip of the tip-side cylindrical portion 11 is a contact portion 11a having an eight-piece shape. The tip-side cylindrical portion 11 penetrates the through hole 5d of the retainer 5a and is guided by the through hole 5d. The flange portion 12 has a diameter larger than that of the through hole 5d, and prevents the first plunger 10 from coming out of the retainer 5a upward. The flange portion 12 has a circular cross section perpendicular to the length direction of the first plunger 10. Here, the flange portion 12 has a cylindrical shape. The outer peripheral surface of the flange portion 12 forms the outermost outer peripheral surface of the contact probe 7. The flange portion 12 is located in the space 5h between the retainer 5a and the pin block 5b. The lower surface of the flange portion 12 engages (contacts) with the upper end of the conductive tube 30. The base end side cylindrical portion 13 is located inside the conductive tube 30. The base end side cylindrical portion 13 has a constricted portion 13a whose diameter is partially reduced in the intermediate portion in the length direction. The constricted portion 13a engages with the convex portion 30a of the conductive tube 30, whereby the first plunger 10 and the conductive tube 30 are combined with each other so as to perform a stroke operation integrally.

第２プランジャー２０は、先端側から順に、先端側円柱部２１及び基端側円柱部２２を有する。先端側円柱部２１の先端は、テーパー状に先細り形状とされた接触部２１ａとなっている。先端側円柱部２１は、ピンプレート５ｃの小径穴部５ｇを貫通し、小径穴部５ｇにガイドされる。基端側円柱部２３は、導電性チューブ３０の内側に位置する。基端側円柱部２３は、先端側円柱部２１よりも大径であり、導電性チューブ３０の絞り部３０ｂと係合することで、第２プランジャー２０が導電性チューブ３０から下方に抜けるのを防止する。 The second plunger 20 has a tip-side columnar portion 21 and a proximal end-side columnar portion 22 in this order from the tip end side. The tip of the tip-side cylindrical portion 21 is a contact portion 21a having a tapered shape. The tip-side cylindrical portion 21 penetrates the small-diameter hole portion 5g of the pin plate 5c and is guided by the small-diameter hole portion 5g. The base end side cylindrical portion 23 is located inside the conductive tube 30. The base end side cylindrical portion 23 has a larger diameter than the tip end side cylindrical portion 21, and by engaging with the throttle portion 30b of the conductive tube 30, the second plunger 20 is pulled out downward from the conductive tube 30. To prevent.

導電性チューブ３０は、内側に突出する所定数の凸部３０ａを有する。凸部３０ａは、例えば導電性チューブ３０の外周面をポンチで打撃して形成され、ここでは周方向に９０度間隔で４個設けられる。凸部３０ａは、第１プランジャー１０のくびれ部１３ａと係合し、導電性チューブ３０を第１プランジャー１０と一体にストローク可能とする。導電性チューブ３０の下端部は、絞り部３０ｂとなっている。絞り部３０ｂは、第２プランジャー２０の基端側円柱部２２よりも小径となるように例えば絞り加工によって径が絞られた部分である。導電性チューブ３０の上端は、第１プランジャー１０のフランジ部１２の下端面と係合（当接）する。導電性チューブ３０は、ピンプレート５ｃの小径穴部５ｇよりも大径であり、ピンプレート５ｃから下方に抜けない。導電性チューブ３０の外径は、第１プランジャー１０の外径以下である（図示の例では同外径）。スプリング３５は、導電性チューブ３０内にあり、上端が第１プランジャー１０の基端側円柱部１３の下端面と係合（当接）し、下端が第２プランジャー２０の基端側円柱部２２の上端面と係合（当接）する。 The conductive tube 30 has a predetermined number of convex portions 30a protruding inward. For example, the convex portions 30a are formed by hitting the outer peripheral surface of the conductive tube 30 with a punch, and here, four convex portions 30a are provided at intervals of 90 degrees in the circumferential direction. The convex portion 30a engages with the constricted portion 13a of the first plunger 10 so that the conductive tube 30 can be stroked integrally with the first plunger 10. The lower end of the conductive tube 30 is a drawing portion 30b. The drawing portion 30b is a portion whose diameter is reduced by, for example, drawing so as to have a diameter smaller than that of the base end side cylindrical portion 22 of the second plunger 20. The upper end of the conductive tube 30 engages (contacts) with the lower end surface of the flange portion 12 of the first plunger 10. The conductive tube 30 has a larger diameter than the small diameter hole portion 5g of the pin plate 5c, and does not come out downward from the pin plate 5c. The outer diameter of the conductive tube 30 is equal to or less than the outer diameter of the first plunger 10 (the same outer diameter in the illustrated example). The spring 35 is inside the conductive tube 30, the upper end of which engages (contacts) with the lower end surface of the base end side cylinder portion 13 of the first plunger 10, and the lower end of which is the base end side cylinder of the second plunger 20. Engages (contacts) with the upper end surface of the portion 22.

図１（Ｂ）は、図１（Ａ）の状態からソケット１を検査用基板９にセットした状態の正断面図である。ピンプレート５ｃの下面は、検査用基板９の上面と接触する。また、第２プランジャー２０の先端側円柱部２１の接触部２１ａが検査用基板９の電極パッド９ａと接触し、第２プランジャー２０は、図１（Ａ）に示す突出状態からスプリング３５の付勢力に抗して後退する。図１（Ｂ）に示すように、リテーナ５ａの２つの貫通穴５ｄ間の距離Ｌ１は、ピンプレート５ｃの２つの小径穴部５ｇ間の距離Ｌ２よりも小さい。これにより、２つのコンタクトプローブ７は、第１プランジャー１０の先端側に向かって（上方に向かって）、互いに近づくように斜めに傾いている。 FIG. 1B is a normal cross-sectional view of a state in which the socket 1 is set on the inspection board 9 from the state of FIG. 1A. The lower surface of the pin plate 5c comes into contact with the upper surface of the inspection substrate 9. Further, the contact portion 21a of the tip-side cylindrical portion 21 of the second plunger 20 comes into contact with the electrode pad 9a of the inspection substrate 9, and the second plunger 20 is moved from the protruding state shown in FIG. 1A to the spring 35. Retreat against the force. As shown in FIG. 1 (B), the distance L1 between the two through holes 5d of the retainer 5a is smaller than the distance L2 between the two small diameter hole portions 5g of the pin plate 5c. As a result, the two contact probes 7 are inclined toward the tip end side (upward) of the first plunger 10 so as to approach each other.

図１（Ｃ）は、図１（Ｂ）の状態から検査対象物８をソケット１にセットした状態の正断面図である。図２は、図１（Ｃ）の要部拡大図である。第１プランジャー１０の先端側円柱部１１の接触部１１ａが検査対象物８の電極バンプ８ａと接触し、第１プランジャー１０は、図１（Ｂ）に示す突出状態から、スプリング３５の付勢力に抗して、導電性チューブ３０を伴って後退する。図１（Ｃ）に示す状態では、コンタクトプローブ７により検査対象物８の電極バンプ８ａと検査用基板９の電極パッド９ａとが電気的に接続され、検査対象物８の検査が可能となる。 FIG. 1C is a normal cross-sectional view of a state in which the inspection object 8 is set in the socket 1 from the state of FIG. 1B. FIG. 2 is an enlarged view of a main part of FIG. 1 (C). The contact portion 11a of the tip-side cylindrical portion 11 of the first plunger 10 comes into contact with the electrode bump 8a of the inspection object 8, and the first plunger 10 is attached with the spring 35 from the protruding state shown in FIG. 1 (B). Against the force, it recedes with the conductive tube 30. In the state shown in FIG. 1C, the electrode bump 8a of the inspection object 8 and the electrode pad 9a of the inspection substrate 9 are electrically connected by the contact probe 7, and the inspection object 8 can be inspected.

図２に示すように、本実施の形態におけるコンタクトピッチＰ２は、リテーナ５ａの２つの貫通穴５ｄ間の隔壁５ｉの厚さＡ（加工上の最小肉厚以上かつフランジ部１２同士が接触しない範囲で最も小さい幅）と同等以下、ないし厚さＡに先端側円柱部１１と隔壁５ｉとの間のクリアランスの２倍を足した長さ以下に狭められていて、図７に示す従来例と比較して狭ピッチ化を実現できる。なお、図７に示す従来例のコンタクトピッチＰ１の式１のＤに対応する、先端側円柱部１１の側面から先端面の山の頂点までの距離は、本実施の形態及び図７に示す従来例のいずれにおいても制御範囲外のため考慮しない。 As shown in FIG. 2, the contact pitch P2 in the present embodiment is the thickness A of the partition wall 5i between the two through holes 5d of the retainer 5a (the range equal to or more than the minimum wall thickness in processing and the flange portions 12 do not contact each other). It is narrowed to a length equal to or less than (the smallest width) or less than the thickness A plus twice the clearance between the tip-side columnar portion 11 and the partition wall 5i, and is compared with the conventional example shown in FIG. This makes it possible to achieve a narrower pitch. The distance from the side surface of the tip-side cylindrical portion 11 to the apex of the mountain on the tip surface, which corresponds to D of Equation 1 of the conventional example contact pitch P1 shown in FIG. 7, is the distance between the present embodiment and the conventional contact pitch P1 shown in FIG. In any of the examples, it is out of the control range and is not considered.

本実施の形態において、図７に示す従来例と同様に、２つの第１プランジャー１０のフランジ部１２間に隔壁を設けようとすると、当該隔壁はリテーナ５ａの２つの貫通穴５ｄ間の隔壁５ｉよりも薄くする必要があるため、隔壁５ｉを加工上の最小肉厚にすると、フランジ部１２間の隔壁を加工することができない（隔壁が成立しない）。これに対し本実施の形態では、フランジ部１２間を空間５ｈとし、コンタクトプローブ７を斜めに傾けることで、導電性チューブ３０間の隔壁５ｊを成立可能としている。隔壁５ｊの成立可能高さは、コンタクトプローブ７の傾き具合、導電性チューブ３０の外径、及び隔壁５ｊの肉厚によって変化する。なお、フランジ部１２間の隔壁が存在しないため、フランジ部１２同士が接触してショートしないための条件として、隔壁５ｉの厚さＡは、先端側円柱部１１とフランジ部１２の半径差Ｃに対して、Ａ＞Ｃ×２を満たす必要がある。 In the present embodiment, as in the conventional example shown in FIG. 7, when a partition wall is provided between the flange portions 12 of the two first plungers 10, the partition wall is a partition wall between the two through holes 5d of the retainer 5a. Since it is necessary to make the partition wall thinner than 5i, if the partition wall 5i is set to the minimum wall thickness in processing, the partition wall between the flange portions 12 cannot be processed (the partition wall cannot be formed). On the other hand, in the present embodiment, the space between the flange portions 12 is set to 5h, and the partition wall 5j between the conductive tubes 30 can be formed by tilting the contact probe 7 at an angle. The height of the partition wall 5j that can be formed varies depending on the inclination of the contact probe 7, the outer diameter of the conductive tube 30, and the wall thickness of the partition wall 5j. Since there is no partition wall between the flange portions 12, the thickness A of the partition wall 5i is set to the radius difference C between the tip side cylindrical portion 11 and the flange portion 12 as a condition for the flange portions 12 to come into contact with each other and not short-circuit. On the other hand, it is necessary to satisfy A> C × 2.

ソケット１の組立方法は、次のとおりである。第１の方法では、リテーナ５ａとピンブロック５ｂをネジ止め等により相互に固定しておき、コンタクトプローブ７をピンブロック５ｂの下面側から貫通穴５ｅ,５ｄに挿入し、その後コンタクトプローブ７が貫通穴５ｆを貫通するようにピンプレート５ｃをピンブロック５ｂの下面にネジ止め等により固定する。第２の方法では、ピンブロック５ｂとピンプレート５ｃをネジ止め等により相互に固定しておき、コンタクトプローブ７をピンブロック５ｂの上面側から貫通穴５ｅ,５ｆに挿入し、その後コンタクトプローブ７が貫通穴５ｄを貫通するようにリテーナ５ａをピンブロック５ｂの上面にネジ止め等により固定する。第２の方法の場合、ピンブロック５ｂとピンプレート５ｃは別部品ではなく一体成形品であってもよい。 The method of assembling the socket 1 is as follows. In the first method, the retainer 5a and the pin block 5b are fixed to each other by screwing or the like, the contact probe 7 is inserted into the through holes 5e and 5d from the lower surface side of the pin block 5b, and then the contact probe 7 penetrates. The pin plate 5c is fixed to the lower surface of the pin block 5b by screwing or the like so as to penetrate the hole 5f. In the second method, the pin block 5b and the pin plate 5c are fixed to each other by screwing or the like, and the contact probe 7 is inserted into the through holes 5e and 5f from the upper surface side of the pin block 5b, and then the contact probe 7 is inserted. The retainer 5a is fixed to the upper surface of the pin block 5b by screwing or the like so as to penetrate the through hole 5d. In the case of the second method, the pin block 5b and the pin plate 5c may be integrally molded products instead of separate parts.

本実施の形態によれば、下記の効果を奏することができる。 According to this embodiment, the following effects can be obtained.

(1) リテーナ５ａとピンブロック５ｂとの間に空間５ｈを設け、２つのコンタクトプローブ７の第１プランジャー１０のフランジ部１２間に隔壁が無い構成とし、かつ２つのコンタクトプローブ７が上方に向かって互いに近づくように斜めに傾いているため、導電性チューブ３０間の隔壁５ｊを設けながら、図２に示すようにコンタクトピッチＰ２をリテーナ５ａの２つの貫通穴５ｄ間の隔壁５ｉの厚さＡと同等以下に狭めることができる（先端側円柱部１１とフランジ部１２との半径差をコンタクトピッチＰ２から排除し、狭ピッチ化が可能となる）。 (1) A space 5h is provided between the retainer 5a and the pin block 5b so that there is no partition wall between the flange portions 12 of the first plunger 10 of the two contact probes 7, and the two contact probes 7 are upward. Since they are inclined diagonally so as to approach each other, the contact pitch P2 is set to the thickness of the partition wall 5i between the two through holes 5d of the retainer 5a as shown in FIG. 2 while providing the partition wall 5j between the conductive tubes 30. It can be narrowed to the same level as or less than A (the radius difference between the tip-side cylindrical portion 11 and the flange portion 12 can be excluded from the contact pitch P2, and the pitch can be narrowed).

(2) コンタクトプローブ７の姿勢が傾いた状態で安定するため、従来のように絶縁支持体５との間の隙間の範囲でどのような姿勢になるか不定の構成と比較して、先端側円柱部１１の先端位置が高精度に定められ、接点が安定化する。これにより、接点が電極バンプ８ａの側方寄りとなって電極バンプ８ａの側面を削ることを抑制できる。 (2) Since the posture of the contact probe 7 is stable in an inclined state, the tip side is compared with the conventional configuration in which the posture is indefinite within the range of the gap between the contact probe 7 and the insulating support 5. The tip position of the cylindrical portion 11 is determined with high accuracy, and the contacts are stabilized. As a result, it is possible to prevent the contacts from being closer to the side of the electrode bump 8a and scraping the side surface of the electrode bump 8a.

(3) コンタクトプローブ７は、長さ方向と垂直な断面が円形であって方向性が無いため、製造容易であると共に、コンタクトプローブ７を絶縁支持体５に組み合わせる作業性も良い。また、コンタクトプローブ７に回転方向の力が加わっても絶縁支持体５を傷つけるリスクが小さい。 (3) Since the contact probe 7 has a circular cross section perpendicular to the length direction and has no directionality, it is easy to manufacture and the workability of combining the contact probe 7 with the insulating support 5 is also good. Further, even if a force in the rotational direction is applied to the contact probe 7, the risk of damaging the insulating support 5 is small.

（実施の形態２）
図３は、本発明の実施の形態２に係るソケット２の正断面図である。本実施の形態のソケット２は、実施の形態１のものと比較して、導電性チューブ３０がフランジ部１２よりも小径となっている点で相違し、その他の点で一致する。導電性チューブ３０をフランジ部１２より小径とすることで、導電性チューブ３０がピンブロック５ｂの隔壁５ｊの上端エッジ部やピンプレート５ｃの貫通穴５ｆの内面と干渉することを抑制できる。本実施の形態も、実施の形態１と同様の効果を奏することができる。 (Embodiment 2)
FIG. 3 is a front sectional view of the socket 2 according to the second embodiment of the present invention. The socket 2 of the present embodiment is different from that of the first embodiment in that the conductive tube 30 has a smaller diameter than the flange portion 12, and is the same in other respects. By making the conductive tube 30 smaller in diameter than the flange portion 12, it is possible to prevent the conductive tube 30 from interfering with the upper end edge portion of the partition wall 5j of the pin block 5b and the inner surface of the through hole 5f of the pin plate 5c. The present embodiment can also have the same effect as that of the first embodiment.

（実施の形態３）
図４（Ａ）は、本発明の実施の形態３に係るソケット３の正断面図である。図４（Ｂ）は、図４（Ａ）の状態からソケット３を検査用基板９にセットした状態の正断面図である。図４（Ｃ）は、図４（Ｂ）の状態から検査対象物８をソケット３にセットした状態の正断面図である。図５は、図４（Ｃ）の要部拡大図である。 (Embodiment 3)
FIG. 4A is a front sectional view of the socket 3 according to the third embodiment of the present invention. FIG. 4B is a normal cross-sectional view of a state in which the socket 3 is set on the inspection board 9 from the state of FIG. 4A. FIG. 4C is a normal cross-sectional view of a state in which the inspection object 8 is set in the socket 3 from the state of FIG. 4B. FIG. 5 is an enlarged view of a main part of FIG. 4 (C).

本実施の形態のソケット３では、第１プランジャー１０が中空であり、不図示のスプリングが第１プランジャー１０内にある。絶縁支持体はピンブロック５ｂとピンプレート５ｃの二部品構成であり、第１プランジャー１０の先端側円柱部１１はピンブロック５ｂの貫通穴５ｅにガイドされる。第１プランジャー１０の基端側円柱部１３は、基端が絞り部１３ｂとされ、実施の形態１の導電性チューブ３０の絞り部３０ｂ（図１（Ａ））と同様に、第２プランジャー２０の抜けを防止する。空間５ｈは、ピンブロック５ｂとピンプレート５ｃとの間に設けられる。ピンブロック５ｂの貫通穴５ｅとピンプレート５ｃの小径穴部５ｇは同軸であり、２つのコンタクトプローブ７は互いに略平行（上下方向と平行）に支持される。 In the socket 3 of the present embodiment, the first plunger 10 is hollow, and a spring (not shown) is inside the first plunger 10. The insulating support is composed of two parts, a pin block 5b and a pin plate 5c, and the tip-side cylindrical portion 11 of the first plunger 10 is guided by a through hole 5e of the pin block 5b. The base end of the base end side cylindrical portion 13 of the first plunger 10 is a throttle portion 13b, and the second plan is the same as the throttle portion 30b (FIG. 1 (A)) of the conductive tube 30 of the first embodiment. Prevent the jar 20 from coming off. The space 5h is provided between the pin block 5b and the pin plate 5c. The through hole 5e of the pin block 5b and the small diameter hole portion 5g of the pin plate 5c are coaxial, and the two contact probes 7 are supported substantially parallel to each other (parallel to the vertical direction).

図５に示すように、本実施の形態におけるコンタクトピッチＰ３は、ピンブロック５ｂの隔壁５ｊの厚さＡ（例えば加工上の最小肉厚）と、先端側円柱部１１と隔壁５ｊとの間の隙間Ｂにより、Ｐ３＝Ａ＋（Ｂ×２）と表される。コンタクトピッチＰ３は、図７に示す従来例のコンタクトピッチＰ１（式１）と異なり、先端側円柱部１１とフランジ部１２の半径差（フランジ部１２の出っ張り長）が入らない分、狭ピッチ化されている。本実施の形態のその他の点は、実施の形態１と同様である。 As shown in FIG. 5, the contact pitch P3 in the present embodiment is between the thickness A of the partition wall 5j of the pin block 5b (for example, the minimum wall thickness in processing) and the tip-side columnar portion 11 and the partition wall 5j. The gap B represents P3 = A + (B × 2). Unlike the conventional contact pitch P1 (Equation 1) shown in FIG. 7, the contact pitch P3 is narrowed by the amount that the radius difference between the tip-side cylindrical portion 11 and the flange portion 12 (the protruding length of the flange portion 12) does not enter. Has been done. Other points of this embodiment are the same as those of the first embodiment.

（実施の形態４）
図６は、本発明の実施の形態４に係るソケット４の正断面図である。本実施の形態のソケット４では、実施の形態１と異なり、第１プランジャー１０はフランジ部１２を有さず、導電性チューブ３０がフランジ部３１を有する。絶縁支持体はピンブロック５ｂとピンプレート５ｃの二部品構成であり、第１プランジャー１０の先端側円柱部１１はピンブロック５ｂの貫通穴５ｅにガイドされる。空間５ｈは、ピンブロック５ｂとピンプレート５ｃとの間に設けられる。ピンブロック５ｂの貫通穴５ｅとピンプレート５ｃの小径穴部５ｇは同軸であり、２つのコンタクトプローブ７は互いに略平行（上下方向と平行）に支持される。第２プランジャー２０の先端側円柱部２１の中間部に設けられたテーパー部（傾斜部）２１ｂは、検査時における第２プランジャー２０の傾きを低減する役割を持つ。本実施の形態のその他の点は、実施の形態１と同様である。本実施の形態の狭ピッチ化の効果は、実施の形態３と同様である。 (Embodiment 4)
FIG. 6 is a front sectional view of the socket 4 according to the fourth embodiment of the present invention. In the socket 4 of the present embodiment, unlike the first embodiment, the first plunger 10 does not have the flange portion 12, and the conductive tube 30 has the flange portion 31. The insulating support is composed of two parts, a pin block 5b and a pin plate 5c, and the tip-side cylindrical portion 11 of the first plunger 10 is guided by a through hole 5e of the pin block 5b. The space 5h is provided between the pin block 5b and the pin plate 5c. The through hole 5e of the pin block 5b and the small diameter hole portion 5g of the pin plate 5c are coaxial, and the two contact probes 7 are supported substantially parallel to each other (parallel to the vertical direction). The tapered portion (inclined portion) 21b provided in the middle portion of the distal end side cylindrical portion 21 of the second plunger 20 has a role of reducing the inclination of the second plunger 20 at the time of inspection. Other points of this embodiment are the same as those of the first embodiment. The effect of narrowing the pitch of the present embodiment is the same as that of the third embodiment.

以上、実施の形態を例に本発明を説明したが、実施の形態の各構成要素や各処理プロセスには請求項に記載の範囲で種々の変形が可能であることは当業者に理解されるところである。 Although the present invention has been described above by taking the embodiment as an example, it will be understood by those skilled in the art that various modifications can be made to each component and each processing process of the embodiment within the scope of the claims. By the way.

空間５ｈは、ピンブロック５ｂの貫通穴５ｅ及び隔壁５ｊの上方となる部分に形成されていればよく、その他の部分、すなわち貫通穴５ｅ及び隔壁５ｊ以外の部分の上方においてはピンブロック５ｂはリテーナ５ａの下面に接触するまで延ばされてもよい。 The space 5h may be formed in a portion above the through hole 5e and the partition wall 5j of the pin block 5b, and the pin block 5b is a retainer in the other portion, that is, above the portion other than the through hole 5e and the partition wall 5j. It may be extended until it comes into contact with the lower surface of 5a.

１〜４ソケット、５絶縁支持体、５ａリテーナ、５ｂピンブロック、５ｃピンプレート、５ｄ貫通穴（第１ガイド穴）、５ｅ,５ｆ貫通穴、５ｇ小径穴部（第２ガイド穴）、５ｈ空間、５ｉ,５ｊ隔壁、７コンタクトプローブ、８検査対象物、８ａ電極バンプ、９検査用基板、９ａ電極パッド、１０第１プランジャー、１１先端側円柱部、１１ａ接触部、１２フランジ部、１３基端側円柱部、１３ａくびれ部、１３ｂ絞り部、２０第２プランジャー、２１先端側円柱部、２１ａ接触部、２１ｂテーパー部（傾斜部）、２２基端側円柱部、３０導電性チューブ、３０ａ凸部、３０ｂ絞り部、３１フランジ部 1-4 Sockets, 5 Insulated Supports, 5a Retainers, 5b Pin Blocks, 5c Pin Plates, 5d Through Holes (1st Guide Holes), 5e, 5f Through Holes, 5g Small Diameter Holes (2nd Guide Holes), 5h Space 5, 5i, 5j partition wall, 7 contact probe, 8 inspection object, 8a electrode bump, 9 inspection substrate, 9a electrode pad, 10 1st plunger, 11 tip side cylinder part, 11a contact part, 12 flange part, 13 units End side cylinder part, 13a constriction part, 13b throttle part, 20 second plunger, 21 tip side cylinder part, 21a contact part, 21b taper part (inclined part), 22 base end side cylinder part, 30 conductive tube, 30a Convex part, 30b drawing part, 31 flange part

Claims

Insulation support and
Two contact probes supported in parallel with the insulating support.
Each contact probe
With the 1st and 2nd plungers
A spring that urges the first and second plungers in a direction away from each other,
It has a proximal end side of the first and second plungers, and a conductive tube for accommodating the spring .
The first plunger has a flange portion for preventing its own from coming off from the insulating support.
The insulating support has a space between the flange portions of the two contact probes .
The insulating support is
A retainer having two first guide holes for guiding the tip end side of the first plunger of each contact probe.
A pin plate having two second guide holes for guiding the tip end side of the second plunger of each contact probe.
It has a pin block between the retainer and the pin plate and having two through holes through which each contact probe penetrates.
The engagement region of the conductive tube and the first plunger, located in the space between the retainer and the pin block, socket.

Before the outer diameter of Kishirube conductive tube is smaller than the outer diameter of the flange portion, the socket according to claim 1.

Insulation support and
Two contact probes supported in parallel with the insulating support.
Each contact probe
With the 1st and 2nd plungers
A spring that urges the first and second plungers in a direction away from each other,
It has a proximal end side of the first and second plungers, and a conductive tube for accommodating the spring.
The first plunger and the conductive tube are combined with each other so as to perform stroke operation integrally.
The conductive tube has a flange portion for preventing the conductive tube from coming off from the insulating support of itself and the first plunger.
The insulating support has a space between the flange portions of the two contact probes .
The insulating support is
A pin block having two first guide holes for guiding the tip end side of the first plunger of each contact probe.
Each contact probe has a pin plate with two second guide holes that guide the tip side of the second plunger.
The engagement region of the conductive tube and said second plunger, you located in the space between said pin block the pin plate, the socket.

The distance between the front SL two first guide hole, the smaller than the distance between the two second guide holes, a socket according to any one of claims 1 to 3.

The socket according to claim 4, wherein the two contact probes are inclined obliquely toward the tip end side of the first plunger so as to approach each other.

The first plunger has a cylindrical portion having a contact portion at the tip thereof, and has a cylindrical portion.
The flange portion protrudes radially outward from the outer peripheral surface of the cylindrical portion, and the flange portion protrudes outward in the radial direction.
The socket according to any one of claims 1 to 5, wherein the insulating support has a round hole having a diameter smaller than that of the flange portion, which guides the cylindrical portion.

The socket according to any one of claims 1 to 6, wherein the first plunger is for connecting to an inspection object and the second plunger is for connecting to an inspection board.

The socket according to any one of claims 1 to 7, wherein the flange portion has a circular cross section perpendicular to the length direction of the first plunger.

The socket according to any one of claims 1 to 8, wherein the flange portion forms the outermost peripheral surface of the contact probe.

Insulation support and
Two contact probes supported in parallel with the insulating support.
Each contact probe
With the 1st and 2nd plungers
It has a spring that urges the first and second plungers in a direction away from each other.
The first plunger has a flange portion for preventing its own from coming off from the insulating support.
The insulating support has a space between the flange portions of the two contact probes.
A socket in which the distance between the outer peripheral surfaces of the flange portions of the two contact probes is such that a partition wall due to the insulating support cannot be provided.

Insulation support and
Two contact probes supported in parallel with the insulating support.
Each contact probe
With the 1st and 2nd plungers
A spring that urges the first and second plungers in a direction away from each other,
It has a proximal end side of the first and second plungers, and a conductive tube for accommodating the spring.
The first plunger and the conductive tube are combined with each other so as to perform stroke operation integrally.
The conductive tube has a flange portion for preventing the conductive tube from coming off from the insulating support of itself and the first plunger.
The insulating support has a space between the flange portions of the two contact probes.
A socket in which the distance between the outer peripheral surfaces of the flange portions of the two contact probes is such that a partition wall due to the insulating support cannot be provided.