JP6868435B2 - Graph display device, graph display method, board processing system, board processing method, and graph display program - Google Patents

Description

The present invention relates to a technique for graphing data.

In the semiconductor manufacturing process, a substrate processing device that performs various processes on the semiconductor substrate along the manufacturing process is used. Such a device usually has a plurality of parameters indicating the state of the device. It is common practice to graph a plurality of time series data corresponding to the plurality of parameters and present them to the operator so that the operator of the device can grasp the state of the device. The operator visually compares each graph and grasps the state of the device by grasping the timing of change of each parameter and the like.

As a graph display device for displaying such a graph, Patent Document 1 discloses a graph display device that displays a graph of time-series data recording a time change of a state value indicating a state of an industrial device. The display device superimposes a graph of time-series data of state values corresponding to two events that occur at different timings on a drawing area in which a time axis and a state value axis indicating a state value are defined. To do. In order to make it easier to compare the state values of the two events when displaying the two graphs, the display device shifts the occurrence timing of one event so that the occurrence timings of the two events match. Draw each graph.

Japanese Unexamined Patent Publication No. 2009-271585

When each of the plurality of parameters has, for example, two types of signal values, the time series data of each of the plurality of parameters becomes binary data. FIG. 14 is a diagram showing a graph in which 10 binary time series data are displayed in parallel by a linear graph according to a comparison technique. FIG. 13 is a diagram in which each graph of 10 binary data displayed in parallel in FIG. 14 is superimposed and displayed on one coordinate as in the method of Patent Document 1. When the signal values of a plurality of parameters change at the same time, the lines of the graphs overlap as shown in FIG. Therefore, the timing of change of each signal value cannot be accurately determined.

Further, in the example of FIG. 14, since the number of parameters is relatively small, all the graphs can be displayed in parallel in the display area and listed. However, in an actual device, it may be necessary to compare each graph of dozens of parameters at the same time. In this case, all the graphs cannot be displayed in the display area at the same time, the listability of all the graphs is lacking, and it becomes difficult to observe and compare the top and bottom graphs at the same time.

Further, when comparing multi-valued time series data by displaying them in parallel, as shown in FIG. 15, it is necessary to lengthen the numerical axis (vertical axis) as compared with the case of binary data, so once. The number of graphs that can be displayed in is further limited. Therefore, when the number of time series data is large, the difficulty of comparison between graphs is further increased due to the lack of listability in the graph display.

The present invention has been made to solve such a problem, and when comparing a plurality of time series data in a graph, while improving the listability of the plurality of graphs, each time is based on each graph. It is an object of the present invention to provide a graph display technique capable of easily comparing the change timing of series data.

In order to solve the above problem, the graph display device according to the first aspect has a time-series data acquisition unit that acquires a plurality of time-series data and each time-series data acquired by the time-series data acquisition unit. The boundary detection unit that detects each boundary where the signal value changes in the time-series data, and each section of the time-series data that is separated by the boundary corresponding to the time-series data. The signal value specifying unit that specifies the signal value included in the section, and the start time and end time of each section when the section of the time series data is converted into the time on the time series for each time series data. Is expressed by each position of both ends in the longitudinal direction along the time axis, and each band-shaped region arranged in a row along the time axis and the section of the time series data by the signal value specifying unit. It is provided with a display processing unit for displaying each signal value indicated by characters so as to overlap the corresponding band-shaped area among the band-shaped areas, and a band-shaped graph including the band-shaped area on a predetermined display. The display processing unit displays each band-shaped graph on the display so that the band-shaped graphs corresponding to the time-series data are arranged in the width direction, and the display processing unit displays the time-series data with respect to the time-series data. If the time-series data is binary data, the characters correspond to the respective sections of the time-series data so that the respective signal values overlap with the corresponding band-shaped areas of the respective band-shaped areas corresponding to the time-series data. in invalidates the signal value display function of displaying on the display, activate the signal value indication if the time series data is 3 or more values data.
The graph display device according to the second aspect is the graph display device according to the first aspect, and the display processing unit has a large number of three or more values including zero in the time-series data for each time-series data. In the case of value data, for the section of the time-series data that takes non-zero as the signal value, enable the function of displaying the signal value of the section in the band-shaped region corresponding to the section, and signal. For the section where zero is taken as the value, the function of displaying the signal value of the section in the band-shaped area corresponding to the section is invalidated.
In the graph display device according to the third aspect, the signal value of the time-series data acquisition unit that acquires a plurality of time-series data and each time-series data acquired by the time-series data acquisition unit changes in the time-series data. A signal that specifies the signal value included in the boundary detection unit that detects each boundary and the section in which the time-series data is divided by the boundary corresponding to the time-series data for each time-series data. For the value specifying unit and each time-series data, both ends in the longitudinal direction along the time axis are the start time and end time of each section when the sections of the time-series data are converted into time on the time series. Each of the strip-shaped regions arranged in a row along the time axis and each of the sections of the time-series data are specified by the signal value specifying unit while being represented by each position of the portion. Each signal value indicated by characters so as to overlap the corresponding band-shaped area of the band-shaped area, and a display processing unit for displaying a band-shaped graph including the band-shaped area on a predetermined display are provided, and the display processing unit includes the display processing unit at each time. Each band-shaped graph is displayed on the display so that the band-shaped graphs corresponding to the series data are arranged in the width direction, and the display processing unit has a large number of three or more values of the time-series data for each time-series data. In the case of value data, if each section of the time-series data includes a section shorter than a predetermined period when converted to time on the time-series, the time-series data Each of the time-series data includes on the coordinates with the horizontal axis along the longitudinal direction of the strip graph as the time axis and the vertical axis as the signal value axis by disabling the function of displaying the corresponding strip graph on the display. A linear graph in which each point corresponding to the signal value is connected in chronological order is displayed on the display.

The graph display device according to the fourth aspect is a graph display device according to any one of the first to third aspects, and the display processing unit converts each time-series data into the time-series data. At least one of the colors and patterns of the strip-shaped regions adjacent to each other among the strip-shaped regions of the corresponding strip-shaped graph is made different.

The graph display device according to the fifth aspect is the graph display device according to the fourth aspect, and the display processing unit describes each of the strip-shaped graphs corresponding to the time series data with respect to the time series data. The color of the strip-shaped region is changed alternately in the order of arrangement of each strip-shaped region.

The graph display device according to the sixth aspect is the graph display device according to the fifth aspect, and the display processing unit attaches the plurality of time-series data to the strip-shaped graph corresponding to the time-series data. One of the two types of colors to be used is set as a common achromatic color over the plurality of time series data.

The graph display device according to the seventh aspect is the graph display device according to the sixth aspect, and the display processing unit attaches the plurality of time-series data to the strip-shaped graph corresponding to the time-series data. Of the two types of colors, the other color other than the one is chromatic, and the chromatic colors corresponding to the plurality of time-series data are attached to the adjacent band graphs. The two chromatic colors are different.

The substrate processing system according to the eighth aspect includes a graph display device according to any one of the first to seventh aspects and a substrate processing apparatus that performs predetermined processing on the substrate, and the substrate processing apparatus. Outputs a plurality of time-series data obtained by sequentially sampling each signal value of a plurality of parameters indicating the state in time, and the graph display device outputs a plurality of time-series data output by the board processing device. The band-shaped graph is displayed for each of the plurality of time-series data acquired by the time-series data acquisition unit.

In the graph display method according to the ninth aspect, for each time-series data acquisition step of acquiring a plurality of time-series data and each time-series data acquired in the time-series data acquisition step, the signal value in the time-series data is For the boundary detection step for detecting each changing boundary and for each section of the time-series data, the signal value included in the section is specified for each section in which the time-series data is separated by the boundary corresponding to the time-series data. For the signal value specifying step and each time-series data, the start time and end time of each section when the each section of the time-series data is converted into the time on the time series is in the longitudinal direction along the time axis. In addition to being represented by each position of both end portions, each band-shaped region arranged in a row along the time axis and each section of the time series data are specified by the signal value specifying step, and the said Each of the display processing steps includes a display processing step for displaying a band-shaped graph including each signal value indicated by characters so as to overlap the corresponding band-shaped area in each band-shaped area on a predetermined display. as arranged in the respective strip-like graph width direction corresponding to the time-series data, the respective strip-like graph Ri step der to be displayed on said display, said display processing step, the respective time-series data, the time-series data If it is binary data, the signal value corresponding to each section of the time-series data is displayed on the display in characters so as to overlap the corresponding band-shaped area of the band-shaped areas corresponding to the time-series data. deactivate the signal value display function of displaying, Ru step der to enable the signal value indication if the time series data is 3 or more values data.
The graph display method according to the tenth aspect is the graph display method according to the ninth aspect, and in the display processing step, for each time-series data, the time-series data includes three or more values including zero. In the case of value data, for the section of the time-series data that takes non-zero as the signal value, enable the function of displaying the signal value of the section in the band-shaped region corresponding to the section, and signal. This is a step of disabling the function of displaying the signal value of the section in the band-shaped region corresponding to the section for the section taking zero as the value.
In the graph display method according to the eleventh aspect, for each time-series data acquisition step of acquiring a plurality of time-series data and each time-series data acquired in the time-series data acquisition step, the signal value in the time-series data is For the boundary detection step for detecting each changing boundary and for each section of the time-series data, the signal value included in the section is specified for each section in which the time-series data is separated by the boundary corresponding to the time-series data. For the signal value specifying step and each time-series data, the start time and end time of each section when the each section of the time-series data is converted into the time on the time series is in the longitudinal direction along the time axis. In addition to being represented by each position of both end portions, each band-shaped region arranged in a row along the time axis and each section of the time series data are specified by the signal value specifying step, and the said Each of the display processing steps includes a display processing step for displaying a band-shaped graph including each signal value indicated by characters so as to overlap the corresponding band-shaped area in each band-shaped area on a predetermined display. A step of displaying each band-shaped graph on the display so that the band-shaped graphs corresponding to the time-series data are arranged in the width direction. In the display processing step, the time-series data is 3 for each time-series data. In the case of multi-valued data equal to or greater than the value, if each section of the time-series data includes a section shorter than a predetermined period when converted to time on the time-series, the relevant section is applicable. The function of displaying the strip graph corresponding to the time series data on the display is disabled, and the time series is on coordinates with the horizontal axis along the longitudinal direction of the strip graph as the time axis and the vertical axis as the signal value axis. This is a step of displaying a linear graph in which each point corresponding to each signal value included in the data is connected in chronological order on the display.

The graph display method according to the twelfth aspect is the graph display method according to any one of the ninth to eleventh aspects, and the display processing step converts each time-series data into the time-series data. This is a step of making at least one of the colors and patterns of the strip-shaped regions adjacent to each other in the strip-shaped regions of the corresponding strip-shaped graph different from each other.

The graph display method according to the thirteenth aspect is the graph display method according to the twelfth aspect, and the display processing step is for each of the time-series data in the strip-shaped graph corresponding to the time-series data. This is a step of alternately changing the color of the strip-shaped region in the order of arrangement of the strip-shaped regions.

The graph display method according to the fourteenth aspect is the graph display method according to the thirteenth aspect, and the display processing step is attached to the strip-shaped graph corresponding to the time-series data with respect to the plurality of time-series data. This is a step of making one of the two types of colors common achromatic color over the plurality of time series data.

The graph display method according to the fifteenth aspect is the graph display method according to the fourteenth aspect, and the display processing step attaches the plurality of time-series data to the strip-shaped graph corresponding to the time-series data. Of the two types of colors, the other color other than the one is chromatic, and the chromatic colors corresponding to the plurality of time-series data are attached to the adjacent band graphs. This is a step to make the two chromatic colors different.

The substrate processing method according to the sixteenth aspect is a substrate processing method including the graph display method according to any one of the ninth to fifteenth aspects, and a predetermined processing is performed on the substrate by a predetermined substrate processing apparatus. The graph display method further includes a substrate processing step to be performed and an output step of outputting a plurality of time-series data obtained by sequentially sampling each signal value of a plurality of parameters indicating the state of the substrate processing apparatus in time. This is a method of acquiring a plurality of time series data output in the output step in the time series data acquisition step and displaying the strip graph for each of the plurality of time series data.

The graph display program according to the seventeenth aspect is a graph display program that displays time series data as a graph by being executed by a computer, and the program is a plurality of time series on a computer provided with a CPU and a memory. A time-series data acquisition step for acquiring data, a boundary detection step for detecting each boundary in which a signal value changes in the time-series data for each time-series data acquired in the time-series data acquisition step, and a boundary detection step for each time. Regarding the series data, for each section in which the time series data is divided by the boundary corresponding to the time series data, the signal value specifying step for specifying the signal value included in the section, and the time series data for each time series data When each section of the series data is converted into time on the time series, the start time and end time of each section are expressed by the positions of both ends in the longitudinal direction along the time axis, and the time axis is used. Each band-shaped area arranged in a row along the line is specified for each section of the time-series data by the signal value specifying step, and is written in characters so as to overlap the corresponding band-shaped area in each band-shaped area. Each of the indicated signal values and a display processing step of displaying the band-shaped graph including the signal values on a predetermined display are executed, and in the display processing step, the band-shaped graphs corresponding to the time-series data are arranged in the width direction. as, Ri step der displaying the respective strip-like graph on the display, the display processing step, the respective time-series data, if the time series data is binary data, each of the time-series data The signal value display function for displaying each signal value corresponding to the section on the display in characters so as to overlap the corresponding band-shaped area among the band-shaped areas corresponding to the time-series data is disabled, and the time-series data There Ru step der to enable the signal value indication if multi-value data of three or more values.
The graph display program according to the eighteenth aspect is a graph display program that displays time series data as a graph by being executed by a computer, and the program is a plurality of time series on a computer provided with a CPU and a memory. A time-series data acquisition step for acquiring data, a boundary detection step for detecting each boundary in which a signal value changes in the time-series data for each time-series data acquired in the time-series data acquisition step, and a boundary detection step for each time. Regarding the series data, for each section in which the time series data is divided by the boundary corresponding to the time series data, the signal value specifying step for specifying the signal value included in the section, and the time series data for each time series data When each section of the series data is converted into time on the time series, the start time and end time of each section are expressed by the positions of both ends in the longitudinal direction along the time axis, and the time axis is used. Each band-shaped area arranged in a row along the line is specified for each section of the time-series data by the signal value specifying step, and is written in characters so as to overlap the corresponding band-shaped area in each band-shaped area. Each of the indicated signal values and a display processing step of displaying the band-shaped graph including the signal values on a predetermined display are executed, and in the display processing step, the band-shaped graphs corresponding to the time-series data are arranged in the width direction. As described above, it is a step of displaying each strip-shaped graph on the display, and the display processing step is a time series of the time series data in the case where the time series data is multi-valued data of three or more values. If each of the sections of the data includes a section shorter than a predetermined period when converted into time on the time series, the strip graph corresponding to the time series data is displayed on the display. The time series corresponds to each signal value included in the time series data on the coordinates where the horizontal axis along the longitudinal direction of the strip graph is the time axis and the vertical axis is the axis of the signal value. This is a step of displaying a linear graph connected in order on the display.

According to the invention according to any of the first, third , ninth, eleventh, seventeenth , and eighteenth aspects, for each time series data, each boundary in which the signal value changes is detected in the time series data. For each section in which the time series data is separated by each boundary, the signal value included in the section is specified. Then, each band-shaped graph corresponding to each time-series data is displayed on the display so as to be arranged in the width direction. The strip graph includes each strip region corresponding to each interval of the corresponding time series data and each signal value indicated by characters so as to overlap the corresponding strip region. Each band-shaped region expresses the start time and end time when the corresponding section is converted into time on the time series by each position of both ends in the longitudinal direction along the time axis, and is arranged in a row along the time axis. Are arranged in. Therefore, each band-shaped graph can be displayed without overlapping with each other by reducing the area required for these displays, so that the listability can be improved. Further, for each band graph, the change of the signal value of the time series data corresponding to the band graph and its timing can be easily performed by the boundary of each band region included in the band graph and each signal value indicated by characters. Therefore, it is possible to easily compare the timing of changes in signal values between each time-series data based on each band-shaped graph.

According to the invention according to the fourth or twelfth aspect, at least one of the colors and patterns of the strip-shaped regions adjacent to each other among the strip-shaped regions of the strip-shaped graph corresponding to the time-series data is different for each time-series data. , It becomes easy to grasp the boundary of the strip-shaped regions adjacent to each other.

According to the invention according to the fifth or thirteenth aspect, for each time-series data, the color of each band-shaped area of the band-shaped graph corresponding to the time-series data is alternately changed in the order of arrangement of the band-shaped areas. , Colors that are easily distinguishable from each other can be adopted as the two colors of the two adjacent band-shaped regions. This makes it easier to grasp the boundaries of the strip-shaped regions adjacent to each other.

According to the invention according to the sixth or fourteenth aspect, for a plurality of time series data, one of the two types of colors attached to the strip graph corresponding to the time series data is spread over the plurality of time series data. Since a common achromatic color is used, it is possible to give uniformity to the entire strip-shaped graph and reduce the types of colors used.

According to the invention according to the seventh or fifteenth aspect, for a plurality of time series data, other than one of the two types of colors attached to the strip graph corresponding to the time series data, which is regarded as a common achromatic color. The other color is chromatic, and of the chromatic colors corresponding to the plurality of strip graphs corresponding to the plurality of time series data, the two chromatic colors attached to the strip graphs adjacent to each other are different. Therefore, it becomes easy to identify adjacent strip graphs.

According to the invention according to the first, ninth or seventeenth aspect, for each time series data, the time series data is binary data in which the signal value can be easily recognized without displaying the signal value by characters. If there is, since each signal value corresponding to each section is not displayed, it can be easily recognized that the time series data is binary data by looking at the strip graph, and the signal value by the corresponding strip graph can be easily recognized. The display of the strip graph can be simplified while facilitating the grasp of changes.

According to the invention according to the second or tenth aspect, for each time-series data, if the time-series data is multi-valued data having three or more values including zero, it is included in each section of the time-series data. For a section that takes non-zero as a signal value, the signal value of the section is displayed in the band-shaped area corresponding to the section, and for a section that takes zero as a signal value, the signal value of the section is not displayed in the corresponding band-shaped area. .. Even if the signal value is not displayed in the section where the signal value is zero, the operator observing the graph is unlikely to feel a sense of discomfort. Therefore, it is possible to simplify the display of the strip graph while facilitating the grasp of the change in the signal value by the strip graph.

According to the invention according to the third or eleventh aspect, for each time series data, when the time series data is multi-valued data of three or more values, the time series is included in each section of the time series data. If a section shorter than a predetermined period is included when converted to the above time, the horizontal axis along the longitudinal direction of the strip graph is used as the time axis instead of the strip graph corresponding to the time series data. , A linear graph in which each point corresponding to each signal value included in the time series data is connected in chronological order at coordinates with the vertical axis as the axis of the signal value is displayed on the display. Therefore, since the display of the signal value in characters in the short strip-shaped region is suppressed, the display of the strip-shaped graph having poor visibility due to the overlapping of the signal value displays is suppressed.

According to the invention according to the eighth or sixteenth aspect, a plurality of times in which each signal value of a plurality of parameters indicating the state is sequentially sampled in time from a substrate processing apparatus that performs a predetermined process on the substrate. The series data is output, and the strip graph is displayed for each of the plurality of time series data.

It is the schematic plan view which shows typically the substrate processing system which concerns on embodiment. It is a flowchart which shows an example of the operation of the substrate processing apparatus of FIG. It is a flowchart which shows an example of the operation of the graph display device of FIG. It is a flowchart which shows an example of the operation of the graph display device of FIG. It is a flowchart which shows an example of the operation of the graph display device of FIG. It is a flowchart which shows an example of the operation of the graph display device of FIG. It is a figure which shows an example of the strip-shaped graph displayed by the graph display device of FIG. It is a figure which converted the strip-shaped graph of FIG. 7 into the graph which concerns on the comparative technique. It is a figure which shows an example of the strip-shaped graph displayed by the graph display device of FIG. It is a figure which converted the strip-shaped graph of FIG. 9 into the graph which concerns on the comparative technique. It is a figure which shows an example of the linear graph displayed by the graph display device of FIG. It is a figure which shows an example of the band-shaped graph and the linear graph displayed by the graph display device of FIG. It is a figure which shows the graph which concerns on the comparative technique. It is a figure which shows the graph which concerns on the comparative technique. It is a figure which shows the graph which concerns on the comparative technique.

Hereinafter, embodiments will be described with reference to the drawings. The following embodiments are examples that embody the present invention, and are not examples that limit the technical scope of the present invention.

<1. Board processing system 200>
FIG. 1 is a schematic plan view schematically showing a substrate processing system 200 according to an embodiment. The substrate processing system 200 includes a substrate processing device 100 and a graph display device 150. The board processing device 100 outputs a plurality of time series data. The plurality of time-series data are data obtained by sampling the signal values of the plurality of parameters indicating the state of the substrate processing apparatus 100 sequentially in time and at regular intervals. The graph display device 150 acquires the plurality of time-series data by the time-series data acquisition unit 12, and displays a strip graph for each of the plurality of time-series data.

<2. Substrate processing device 100>
The configuration of the substrate processing apparatus 100 according to the embodiment will be described with reference to FIG. The substrate processing apparatus 100 is a system that processes a plurality of substrates W such as semiconductor wafers. The surface shape of the substrate W is, for example, substantially circular. The substrate processing apparatus 100 includes a plurality of substrate processing units 1. The substrate processing apparatus 100 can continuously process the substrates W one by one in each substrate processing unit 1, and also processes a plurality of substrates W in parallel by the plurality of substrate processing units 1. You can also.

The substrate processing device 100 is a control unit that controls a plurality of cells (processing blocks) arranged side by side, specifically, an indexer cell 110 and a processing cell 120, and each operation mechanism included in the plurality of cells 110 and 120. 130 and. The substrate processing device 100 is mounted on a floor surface or the like of a factory or the like via a plurality of legs.

<Indexer cell 110>
The indexer cell 110 is a cell for passing the unprocessed substrate W received from outside the apparatus to the processing cell 120 and carrying the processed substrate W received from the processing cell 120 out of the apparatus. The indexer cell 110 includes a carrier stage 111 on which a plurality of carriers C are placed, and a substrate transfer device (transfer robot) IR that carries in and out the substrate W for each carrier C.

On the carrier stage 111, a carrier C accommodating a plurality of unprocessed substrates W is carried in from the outside of the apparatus by OHT (Overhead Hoist Transfer) or the like and placed on the carrier stage 111. The unprocessed substrate W is taken out from the carrier C one by one and processed in the apparatus, and the processed substrate W for which the processing in the apparatus is completed is stored in the carrier C again. The carrier C containing the processed substrate W is carried out of the apparatus by OHT or the like. In this way, the carrier stage 111 functions as a substrate integration unit for accumulating the unprocessed substrate W and the processed substrate W. The carrier C may be a FOUP (Front Opening Unified Pod) in which the substrate W is housed in a closed space, or the SMIF (Standard Mechanical Inter Face) pod or the housed board W is exposed to the outside air. It may be OC (Open Cassette).

The transfer robot IR has a plurality of hands (for example, four) capable of holding the substrate W in a horizontal posture (a posture in which the main surface of the substrate W is horizontal) and a plurality of hands by supporting the substrate W from below. It is equipped with a plurality of arms that move each of them. The transfer robot IR takes out the unprocessed substrate W from the carrier C mounted on the carrier stage 111, and passes the taken out substrate W to the transfer robot CR (described later) at the substrate delivery position P. Further, the transfer robot IR receives the processed substrate W from the transfer robot CR at the substrate delivery position P, and stores the received substrate W in the carrier C placed on the carrier stage 111. The transfer robot IR can deliver the substrate W by using a plurality of hands at the same time.

<Processing cell 120>
The processing cell 120 is a cell for processing the substrate W. The processing cell 120 includes a plurality of substrate processing units 1 and a transfer robot CR that carries in and out the substrate W to and from the plurality of substrate processing units 1. The transfer robot CR and the control unit 130 are substrate transfer devices. Here, a plurality of (for example, three) substrate processing units 1 are laminated in the vertical direction to form one substrate processing apparatus group 10. Then, a plurality of (four in the illustrated example) substrate processing apparatus groups 10 are installed in a cluster shape (tuft shape) so as to surround the transfer robot CR. Therefore, the plurality of substrate processing units 1 are arranged around the transfer robot CR, respectively. The substrate processing unit 1 detachably holds a substrate arranged on the upper side (upper side in the vertical direction) of a spin chuck (not shown) by the spin chuck, and rotates the spin chuck around a predetermined rotation axis a1 while rotating the substrate. Is subjected to a predetermined treatment (for example, chemical treatment, rinsing treatment, drying treatment, etc.).

The transfer robot CR is a robot that transfers the substrate W while cantilevering it. The transfer robot CR takes out the processed board W from the designated board processing unit 1 and passes the taken out board W to the transfer robot IR at the board delivery position P. Further, the transfer robot CR receives the unprocessed substrate W from the transfer robot IR at the substrate delivery position P, and conveys the received substrate W to the processing position of the designated substrate processing unit 1. Like the transfer robot IR, the transfer robot CR also has a plurality of (for example, four) hands and a plurality of arms for moving the plurality of hands. The transfer robot CR can transfer the substrate W by using a plurality of hands at the same time.

Each substrate processing unit 1 includes a chamber (“housing”) 121 that forms a processing space inside. The chamber 121 is formed with a carry-in / out port 122 for the transfer robot to insert its hand into the chamber 121. The carry-in / out port 122 is provided with a shutter (not shown) that can be opened / closed under the control of the control unit 130. The shutter is opened when the substrate W is carried in and out of the chamber 121, and is closed during the processing of the substrate W. The substrate processing unit 1 is arranged so as to face the carry-in / out port in the space where the transfer robot is placed.

<Control unit 130>
The control unit 130 controls the operations of the transfer robot IR, the transfer robot CR, and the group of substrate processing units 1. As the hardware configuration of the control unit 130, for example, the same configuration as that of a general computer can be adopted. That is, the control unit 130 is, for example, a CPU (not shown) that performs various arithmetic processes, a ROM (not shown) that is a read-only memory that stores basic programs, and a RAM (not shown) that is a read / write memory that stores various information. It is configured by connecting a memory device (not shown) and a storage device (not shown) for storing programs, various data, recipes, etc. to a bus line (not shown). By executing the program, the CPU of the control unit 130 controls each part of the board processing device 100 in an integrated manner, and causes the board processing device 100 to process the board W according to the recipe.

<3. Graph display device 150>
The configuration of the graph display device 150 according to the embodiment will be described with reference to FIG. The graph display device 150 displays a plurality of strip graphs corresponding to a plurality of time series data in parallel on the display 141, that is, displays the strip graphs on the display so that the plurality of strip graphs are arranged in the width direction. ..

As the hardware configuration of the graph display device 150, the same configuration as that of a general computer can be adopted. That is, the graph display device 150 contains, for example, a CPU 11 that performs various arithmetic processes, a ROM 22 that is a read-only memory that stores basic programs, a RAM 23 that is a read / write memory that stores various information, a program PG, and various data. The magnetic disk 24 to be stored is electrically connected to the bus line 29. A display 141 such as a liquid crystal panel and an input unit 142 such as a keyboard are also electrically connected to the bus line 29.

In the graph display device 150, various functional units are realized by performing arithmetic processing by the CPU 11 as the main control unit according to the procedure described in the program PG. Specifically, the CPU 11 operates as each functional unit such as a time-series data acquisition unit 12, a boundary detection unit 13, a signal value identification unit 14, and a display processing unit 15. Some or all the functional parts realized in the graph display device 150 may be realized by hardware by a dedicated logic circuit or the like. Each of the functional units temporarily or permanently stores the calculation results and the like performed by each of them in the RAM 23 or the magnetic disk 24, and appropriately refers to the various calculation results and the like stored in the RAM 23 or the magnetic disk 24. ..

The time-series data acquisition unit 12 acquires a plurality of time-series data output by the board processing apparatus 100. The boundary detection unit 13 detects each boundary in which the signal value changes in the time-series data for each time-series data acquired by the time-series data acquisition unit 12. The signal value specifying unit 14 specifies the signal value included in the section for each section in which the time series data is divided by each boundary corresponding to the time series data.

The display processing unit 15 displays a plurality of strip graphs corresponding to the plurality of time series data in parallel on the display 141, that is, the plurality of strip graphs are arranged along the width direction without overlapping each other. Display the strip graph on the display. In other words, the display processing unit 15 causes the display 141 to display a band-shaped graph corresponding to the time-series data for each time-series data. The width of each strip graph is preferably substantially the same. Further, from the viewpoint of increasing the number of band-shaped graphs to be displayed to improve the listability, the two band-shaped graphs adjacent to each other may be arranged without a gap or with a slight gap. preferable.

<4. Parameters of the substrate processing device 100>
The substrate processing apparatus 100 has, for example, a plurality of parameters indicating the state thereof. The board processing device 100 outputs the signal values taken by each of the plurality of parameters sequentially in time, that is, the board processing device 100 outputs a plurality of time series data corresponding to the plurality of parameters.

For example, each substrate processing unit 1 of the substrate processing apparatus 100 includes a nozzle (not shown) for discharging a processing liquid to the substrate W to be processed. The substrate processing apparatus 100 includes a processing liquid supply source (not shown) for supplying the processing liquid to each nozzle of each substrate processing unit 1, and the processing liquid supply source and each nozzle are connected by individual pipes. .. Each pipe is provided with an on-off valve (not shown) and a control valve (not shown).

The on-off valve takes two states, an open state and a closed state, according to the control of the control unit 130. When the on-off valve is in the open state, the processing liquid is supplied to the nozzle from the processing liquid supply source, and when the on-off valve is in the closed state, the processing liquid is not supplied to the nozzle. The substrate processing apparatus 100 has, for example, an open / closed state of each on-off valve of each substrate processing unit 1 as each parameter defining the state of the substrate processing apparatus 100.

The opening degree of the control valve can be set to an arbitrary opening degree between the maximum opening degree and the minimum opening degree. The control unit 130 can discretely change the opening degree of the control valve to a multi-step opening degree of three or more steps according to the recipe, and sets the opening degree of the control valve to the maximum opening degree and the minimum opening degree. It can also be changed continuously between. The substrate processing apparatus 100 has, for example, an opening degree discretely or continuously set for each control valve of each substrate processing unit 1 as each parameter defining the state of the substrate processing apparatus 100.

In the above description, a case where one substrate processing unit 1 includes one on-off valve and a control valve has been described as an example, but one substrate processing unit 1 supplies a chemical solution to, for example, the upper peripheral edge of the substrate W. Then, each substrate processing unit 1 supplies a plurality of fluids to the substrate W in parallel, such as supplying nitrogen gas as a purging gas to the central portion of the upper surface of the substrate W and supplying a rinse liquid to the lower surface of the substrate W. May be done. In such a case, a plurality of on-off valves and a plurality of control valves are provided for one substrate processing unit 1. The substrate processing apparatus 100 has, for each substrate processing unit 1, the open / closed state of each of the plurality of on-off valves and the opening / closing state of each of the plurality of control valves as parameters.

<Example of a parameter with a binary signal value>
As a parameter in which the signal value takes two values, for example, the open / closed state of the on-off valve described above can be mentioned. The substrate processing apparatus 100 can adopt the open / closed state of each of the plurality of on-off valves included in the substrate processing apparatus 100 as a plurality of parameters having binary signal values. The plurality of parameters may be open / closed states of a plurality of on-off valves included in one substrate processing unit 1. Further, the plurality of substrate processing units 1 may each include an on-off valve, and a plurality of parameters may be in the open / closed state of the plurality of on-off valves. The substrate processing device 100 outputs, for example, "1" when each on-off valve is in the open state and "0" when each on-off valve is in the closed state as a signal value of each of the ballometers. The signal value taken by the binary time series data is not limited to the combination of "1" and "0". The substrate processing apparatus 100 can output the binary time series data. The time series data is binary data.

FIG. 8 shows, as an example of time-series data of parameters in which the signal value takes two values, three time-series data showing the open / closed state of the three on-off valves included in the substrate processing apparatus 100 are shown by a linear graph according to the comparison technique. It is a figure displayed in parallel. In the example of the graph of FIG. 8, since only three time series data are shown, it is easy to compare each data, but the substrate processing apparatus 100 actually has, for example, a large number of 12 to 24 pieces. Each substrate processing unit 1 has a large number of on-off valves. Therefore, it is not easy to list a plurality of time-series data of the binary values by the parallel display as shown in FIG. Further, when the plurality of time series data are superimposed and displayed on one coordinate, the lines corresponding to the signal values changing at the same time overlap among the plurality of graphs corresponding to the plurality of time series data, and the signal values are overlapped. It becomes difficult to grasp the timing of the change of.

<Examples of parameters with multi-valued signal values>
For example, the opening degree of the control valve described above can be adopted as a parameter in which the signal value takes a multi-value of three or more values. The substrate processing apparatus 100 outputs time-series data of signal values indicating the opening degrees of the plurality of control valves included in the substrate processing apparatus 100 as multi-valued time-series data of three or more values. The time series data is multi-valued data having three or more values.

Further, the recipe executed by each substrate processing unit 1 of the substrate processing apparatus 100 usually consists of a plurality of steps. Each substrate processing unit 1 executes each step constituting the recipe sequentially in time. When the substrate processing unit 1 processes each step, the rotation speed of the substrate W is, for example, a rotation speed corresponding to each step. Each rotation speed usually takes a discrete value. Each substrate processing unit 1 of the substrate processing apparatus 100 has the rotation speed of the substrate W as a parameter, and the time series data of the rotation speed of the substrate W according to the step being executed is a time series of three or more values. Output as data.

Further, each board processing unit 1 of the board processing device 100 has a signal indicating a step being executed as a parameter, and outputs each signal value indicating each step to be sequentially executed as time series data. For example, when the recipe is composed of nine steps of steps 1 to 9, each substrate processing unit 1 is, for example, an integer of 1 to 9 corresponding to steps 1 to 9 (“step number”). The integer corresponding to the step being executed is output sequentially according to each step. The time-series data including each of the integers is a multi-valued time-series data having three or more values indicating the step being executed. The substrate processing unit 1 outputs, for example, an integer 0 during the period when none of the steps are executed.

FIG. 10 shows time-series data (upper graph of FIG. 10) showing each step executed by one board processing unit 1 included in the board processing device 100 as an example of time-series data of parameters in which signal values take multiple values. And the time series data (lower graph of FIG. 10) showing the opening degree of the control valve of the other substrate processing unit 1 as a percentage are shown in parallel by a linear graph according to the comparison technique.

The two substrate processing units 1 execute different recipes from each other, and the timing at which the signal value of each time series data changes is different except for some timings.

In the two graphs shown in FIG. 10, since each step of the recipe executed by each substrate processing unit 1 continues for a certain period of time, the two graphs have a step-like shape. The substrate processing apparatus 100 can also output multi-valued time-series data (also referred to as "step-shaped multi-valued time-series data") in which the signal value changes in a step-like manner. The time-series data is multi-valued data that changes stepwise with the passage of time.

<Example of multi-valued parameters whose signal values change continuously>
The substrate processing apparatus 100 has, for example, the temperature of the processing liquid in each substrate processing unit 1, the concentration of the processing liquid, the temperature of the substrate W, and the like as parameters that take a multi-valued signal value that continuously changes with the passage of time. Then, each parameter is measured with a measuring instrument (not shown), and each time series data corresponding to each parameter is output.

FIG. 11 is a diagram showing an example of a plurality of linear graphs displayed on one coordinate by the graph display device 150. More specifically, FIG. 11 shows a plurality of multi-valued time-series data output by the substrate processing device 100, and the graph display device 150 displays each data including continuously changing multi-valued signal values. It is graphed and displayed on one coordinate. When displaying a graph, the graph display device 150 can also display each time-series data as a linear graph on common coordinates as shown in FIG. 11 by using a general method. In this way, the substrate processing apparatus 100 can also output multi-valued time-series data (also referred to as "continuous multi-valued time-series data") in which the signal value changes continuously. The time-series data is multi-valued data that changes continuously with the passage of time.

<5. Operation of board processing device 100>
FIG. 2 is a flowchart showing an example of an operation performed by the substrate processing apparatus 100 under the control of the control unit 130.

In the example of FIG. 2, the substrate processing apparatus 100 first starts outputting a plurality of time-series data (step S10 of FIG. 2). The plurality of time-series data are data obtained by sequentially sampling each signal value of a plurality of parameters indicating the state of the substrate processing apparatus 100 in time. The substrate processing device 100 acquires and outputs each signal value based on the control value of the control unit 130 or the measurement value by the measuring instrument. The substrate processing device 100 may sequentially output each signal value, and the graph display device 150 may input each signal value to sample each signal value. The sampling performed by the substrate processing device 100 or the graph display device 150 is preferably performed at regular intervals.

Each of the plurality of time-series data indicates the state of the board processing device 100, and the binary time-series data described in the explanation column of the parameters of the board processing device 100 and the step-like multi-valued time-series data. And one of three types of time series data, that is, continuous multi-value time series data. The substrate processing apparatus 100 may output time series data different from these time series data.

The substrate processing apparatus 100 carries the unprocessed substrate W in the carrier C into the chamber 121 of the substrate processing unit 1 by the transfer robot IR and the transfer robot CR (step S20), and determines the substrate W in accordance with the recipe. Perform the process (step S30). When the processing of the substrate W is completed, the substrate processing apparatus 100 carries out the processed substrate W from the chamber 121 by the transfer robot IR and the transfer robot CR (step S40) and stores the processed substrate W in the carrier C. The control unit 130 determines whether or not the processing of all the substrates W in all the carriers C is completed (step S50), and if not, repeats the processing of steps S20 to S40, and again in step S50. Judgment processing is performed.

As a result of the determination in step S50, when the processing of all the substrates W is completed, the substrate processing apparatus 100 ends the output of the plurality of time series data (step S60). As a result, the substrate processing apparatus 100 ends the operation shown in FIG.

<6. Operation of graph display device>
<6-1. Overall operation of graph display processing>
FIG. 3 is a flowchart showing an example of the overall operation of the graph display process of the graph display device 150. The graph display device 150 acquires a plurality of time series data output by the board processing device 100 by the time series data acquisition unit 12, and displays a strip graph or a linear graph for each of the plurality of time series data.

The graph display device 150 is electrically connected to the board processing device 100, and the time series data acquisition unit 12 of the graph display device 150 inputs a plurality of time series data output by the board processing device 100. Acquire a plurality of time series data (step S70 in FIG. 3). The time-series data acquisition unit 12 may acquire a plurality of time-series data by sampling the signal values of each parameter output by the board processing apparatus 100. Each parameter to be displayed in the graph is determined, for example, by storing a definition file for defining each parameter in the magnetic disk 24 and having the time series data acquisition unit 12 read each parameter from the definition file. .. All the time series data output by the board processing device 100 may be the target of the graph display, or some of the time series data output by the board processing device 100 may be the target of the graph display. May be. The substrate processing device 100 specifies, for example, the generation time of each signal value included in each time series data and the generation time of each signal value included in each time series data, such as the generation time and sampling interval of the first signal value included in each time series data. The information necessary for the above is also output to the graph display device 150, and the CPU 11 can acquire the generation time of each signal value based on the information and each time series data.

The CPU 11 of the graph display device 150 analyzes a plurality of time series data acquired by the time series data acquisition unit 12 (“analysis process”) (step S80 in FIG. 3), and displays the plurality of time series data in a graph (step S80 in FIG. 3). "Graph display processing") (step S90 in FIG. 3).

<6-2. Time series data analysis processing>
FIG. 4 is a flowchart showing an example of an operation in which each functional unit realized by the CPU 11 executes an analysis process (step S80 in FIG. 3) of a plurality of time-series data acquired by the time-series data acquisition unit 12.

In the process of step S80, first, the CPU 11 executes the program PG to select one of the plurality of time-series data acquired by the time-series data acquisition unit 12 as the time-series data of interest ( Step S110 in FIG. 4).

The boundary detection unit 13 detects each boundary in which the signal value changes in the time-series data of interest (step S120 in FIG. 4). The signal value specifying unit 14 specifies the signal value of each section in which the time-series data of interest is divided by each boundary (step S130 in FIG. 4).

For each section included in the time-series data of interest, each signal value included in the section takes the same value. Further, each section is identified as, for example, the i-th section (i is a section number, i = 1 to n, and n = the number of sections in the time series data of interest).

In the process of step S120, the boundary detection unit 13 detects the boundary according to a predetermined detection rule. The detection rule is, for example, a rule that adopts the other signal value when the signal value changes from one signal value to another signal value as the boundary. The one signal value is the signal value of the i-th section. The other signal value is a signal value of the (i + 1) section adjacent to the i-th section.

For each detected boundary, the boundary detection unit 13 provides information that can identify the boundary (“boundary identification information”) among the i-th section and the (i + 1) section in which the boundary is separated, for example, the (i + 1) th section. It is stored in the magnetic disk 24 in association with the section number of the section. Further, at the time of the storage, the boundary detection unit 13 also associates each detected boundary with a data number that identifies the time-series data of interest in the plurality of time-series data.

The boundary identification information is, for example, the position (“arrangement order”) of the other signal value in the time series data of interest when the signal value changes from one signal value to another signal value described above, or the one signal. It is the time (“timing”) when the value changes to the other signal value. The boundary detection unit 13 uses, for example, the position (“arrangement order”) of the first signal value of the time-series data of interest in the time-series data of interest as the boundary identification information of the first section (“first section”), or The time of occurrence (“timing”) of the signal value is adopted.

In the process of step S130, the signal value specifying unit 14 specifies the signal value of each section in which the time-series data of interest is divided by each boundary detected by the boundary detecting unit 13, and associates it with the section number of each section to form a magnetic disk. Store in 24. Further, at the time of the storage, the boundary detection unit 13 associates each specified signal value with a data number that identifies the time-series data of interest.

When the process of step S130 is completed, the CPU 11 determines whether or not the check by the process of steps S120 to S130 is completed for all the time series data (step S140 of FIG. 4). As a result of the determination, if the check of all the time series data is not completed, the CPU 11 newly selects another time series data as the data of interest from the plurality of time series data (step S110), and the boundary. The detection unit 13 and the signal value identification unit 14 repeat the processes of steps S120 and S130, and the CPU 11 again determines the step S140.

If the check of all the time series data is completed as a result of the determination in step S140, the CPU 11 ends the analysis process (step S80) of the plurality of time series data, and shifts the process to step S90 in FIG.

By the process of step S80, the boundary detection unit 13 detects each boundary in which the signal value changes in the time-series data for each time-series data acquired by the time-series data acquisition unit 12. The signal value specifying unit 14 specifies the signal value included in each time-series data for each section in which the time-series data is divided by each boundary corresponding to the time-series data.

<6-3. Graph display processing of time series data>
5 and 6 show an example of an operation in which each function unit realized by the CPU 11 executes a graph display process (step S90 in FIG. 3) of a plurality of time series data acquired by the time series data acquisition unit 12. It is a flowchart.

The display processing unit 15 can display each band-shaped graph corresponding to each time-series data on the display 141 so as to be arranged in the width direction. That is, the display processing unit 15 can display the band-shaped graph corresponding to the time-series data on the display 141 for each time-series data.

The strip graph includes each strip region corresponding to each interval of the corresponding time series data and each signal value indicated by characters so as to overlap the corresponding strip region. Each band-shaped region expresses the start time and end time when the corresponding section is converted into time on the time series by each position of both ends in the longitudinal direction along the time axis, and is arranged in a row along the time axis. Are arranged in.

In the process of step S90, first, the CPU 11 executes the program PG to select one of the plurality of time-series data acquired by the time-series data acquisition unit 12 as the time-series data of interest ( Step S210 in FIG. 5). The display processing unit 15 enables the band-shaped graph display function for the time-series data of interest (step S212 in FIG. 5). To enable or disable the band-shaped graph display function, for example, the display processing unit 15 (CPU 11) enables or disables a variable in the program PG that determines whether or not the code that realizes the band-shaped graph display function can be executed. It is done by setting the value according to the invalidation. The band-shaped graph display function may be enabled or disabled by the configuration of the program PG itself.

The display processing unit 15 determines whether or not the time-series data of interest is binary data (step S220 in FIG. 5). The display processing unit 15 makes the determination, for example, by examining each signal value of the time-series data of interest. Further, since it can be determined in advance whether the time-series data of the parameter is binary data or multi-valued data based on the characteristics of the parameters corresponding to the index-of-focus series data, the identification information indicating the identification is provided for each parameter. The set binary / multi-value setting file may be stored in the magnetic disk 24, and the display processing unit 15 may read the setting file and perform the determination.

If the result of step S220 is that the time-series data of interest is binary data, the display processing unit 15 sets each signal value corresponding to each section of each of the above-mentioned sections included in the time-series data of interest to the time-series data. The signal value display function of displaying characters on the display 141 so as to overlap the corresponding band-shaped area among the band-shaped areas corresponding to the above is disabled (step S230 in FIG. 5). To enable or disable the signal value display function, for example, the display processing unit 15 (CPU 11) enables or disables a variable in the program PG that determines whether or not the code that realizes the signal value display function can be executed. It is done by setting the value according to the invalidation. The activation or invalidation of the signal value display function may be realized by the configuration of the program PG itself.

The display processing unit 15 displays each band-shaped area corresponding to each section on the display 141 (step S240 in FIG. 5). Each band-shaped region expresses the start time and the end time when the corresponding section is converted into time on the time series (case) by each position of both end portions in the longitudinal direction along the time axis. In addition, each band-shaped region is arranged in a row along the time axis.

As a result of the determination in step S220, when the time-series data of interest is not binary data (that is, it is multi-valued data of three or more values), the display processing unit 15 sets each section of the time-series data of interest for a predetermined period. It is determined whether or not there is a shorter interval (step S260 in FIG. 6). The predetermined period is, for example, a period corresponding to (corresponding to) the longest display length of the display lengths of each signal value displayed in characters of a predetermined size in each band-shaped area corresponding to each section. To. The predetermined period may be set to a period of a predetermined length regardless of the display length of each signal value. The predetermined period (more specifically, the length of the predetermined period) is preset and stored in the magnetic disk 24 so that the display processing unit 15 can refer to it.

As a result of the determination in step S260, when each section of the time-of-focus time series data has a section shorter than a predetermined period, the display processing unit 15 displays a band-shaped graph corresponding to the time-of-focus time-series data on the display 141. The linear graph corresponding to the time series data of interest is displayed on the display 141 (step S270 in FIG. 6). In the linear graph, the horizontal axis along the longitudinal direction of the strip graph is the time axis, and the vertical axis is the axis of the signal value. It is a connected graph. After displaying the linear graph, the display processing unit 15 shifts the processing to step S250 of FIG.

As a result of the determination in step S260, if there is no section shorter than a predetermined period in each section of the time series data of interest, the display processing unit 15 sets the time series of interest according to the setting in step S212 of FIG. 5 described above. Display a strip graph of data. In the display processing, the display processing unit 15 first activates the signal value display function of each section (step S280 in FIG. 6). The display processing unit 15 may display a linear graph for all the multi-valued time series data without performing the determination in step S260, for example. Further, the display processing unit 15 multi-values based on a file that defines whether each multi-value time series data (each parameter) is to be displayed by a strip graph or a linear graph. The type of graph of each time series data of may be determined.

The display processing unit 15 selects the section of interest from each section of the time-series data of interest (step S290 in FIG. 6). The display processing unit 15 displays the band-shaped region corresponding to the section of interest on the display 141 (step S300 in FIG. 6).

The display processing unit 15 determines whether or not the signal value in the section of interest is zero (step S310 in FIG. 6). As a result of the determination, if the signal value is zero, the display processing unit 15 invalidates the signal value display function for the section of interest (step S320 in FIG. 6), and shifts the processing to step S340 in FIG.

As a result of the determination in step S310, when the signal value of the section of interest is not zero, the display processing unit 15 displays the signal value of the section of interest in characters in the corresponding band-shaped region (step S330 in FIG. 6), and performs the process in FIG. Step S340 of. Note that the display processing unit 15 may display the signal value of the section of interest in characters in the corresponding band-shaped region regardless of the signal value of the section of interest without performing the determination in step S310.

The display processing unit 15 determines whether or not the display or the end of each strip-shaped region corresponding to all the sections of the time-series data of interest is determined (step S340 in FIG. 6). As a result of the determination, if the display is not completed for all the sections, the display processing unit 15 newly selects the section of interest (step S290), repeats the processes of step S300 and the following, and again in step S340. Make a judgment.

As a result of the determination in step S340, if the display is completed for all the sections, the display processing unit 15 shifts the processing to step S250 in FIG.

In step S250 of FIG. 5, the display processing unit 15 determines whether or not the graph display is completed for all the time series data. As a result of the determination, if the graph display is not completed for all the time series data, the display processing unit 15 newly selects the time series data of interest (step S210), and repeats the processing of step S212 and subsequent steps. , The determination of step S250 is performed again.

As a result of the determination in step S250, if the graph display is completed for all the time series data, the CPU 11 ends the operation shown in FIG.

In the process of step S90 of FIG. 3 (FIGS. 5 and 6), the display processing unit 15 corresponds to each section of the time-series data if the time-series data is binary data for each time-series data. The signal value display function for displaying each signal value in characters on the display 141 so as to overlap the corresponding band-shaped area among the band-shaped areas corresponding to the time-series data is disabled, and the time-series data has many values of 3 or more. If it is value data, enable the signal value display function. The display processing unit 15 may also enable the signal value display function for binary time series data to display each signal value corresponding to each band-shaped region.

As described above, for each time-series data, when the time-series data is multi-valued data having three or more values including zero, the display processing unit 15 does not use it as a signal value in each section of the time-series data. For the section that takes zero, enable the function of displaying the signal value of the section in the band-shaped area corresponding to the section. The display processing unit 15 may invalidate the function of displaying the signal value of the section in the band-shaped area corresponding to the section for the section where zero is taken as the signal value, and displays the signal value in the band-shaped area. Zero may be displayed as a signal value with the function enabled.

In addition, for each time-series data, when the time-series data is multi-valued data with three or more values, when converted to time on the time-series in each section of the time-series data, from a predetermined period. If a short section is included, the display processing unit 15 disables the function of displaying the strip graph corresponding to the time series data on the display 141, and the horizontal axis along the longitudinal direction of the strip graph is the time axis. A linear graph in which each point corresponding to each signal value included in the time series data is connected in chronological order at coordinates with the vertical axis as the axis of the signal value is displayed on the display 141.

<6-4. Display mode of strip graph>
FIG. 7 shows three strip graphs G1 to G3 generated and displayed by the graph display device 150. The three strip graphs G1 to G3 are generated by the graph display device 150 from the three time series data corresponding to the three linear graphs K1 to K3 according to the comparison technique shown in FIG. 8 and displayed on the display 141. is there. In the graphs of FIGS. 7 to 12, the horizontal axis is the time axis.

The three time-series data corresponding to the strip graphs G1 to G3 in FIG. 7 are binary data, respectively, as shown in the three linear graphs K1 to K3 in FIG. When the time-series data acquisition unit 12 of the graph display device 150 acquires the three time-series data from the graph display device 150 as a plurality of time-series data for graph display, the display processing unit 15 displays the graph of the time-series data of interest. In the display, the signal value display function of each section of the time-series data of interest is disabled (step S230 in FIG. 5), and only the band-shaped region is displayed as shown in the strip graphs G1 to G3 (step in FIG. 5). S240). The band-shaped graph G1 of FIG. 7 shows the first two band-shaped areas R1 and R2 in the time-series order and the boundary B1 of the band-shaped areas R1 and R2 in each band-shaped area. The boundary B1 is the boundary between two adjacent sections corresponding to the band-shaped regions R1 and R2.

FIG. 9 shows two strip graphs G4 and G5 generated and displayed by the graph display device 150. The two strip graphs G4 and G5 are those generated by the graph display device 150 from the two time series data corresponding to the two linear graphs K4 and K5 according to the comparison technique shown in FIG. 10 and displayed on the display 141. is there.

The two time-series data corresponding to the band-shaped graphs G4 and G5 in FIG. 9 are step-shaped multi-valued time-series data, respectively, as shown in the two linear graphs K4 and K5 in FIG. In both of the two time-series data, each section separated by each boundary is longer than a predetermined period required for displaying a signal value in characters in each corresponding band-shaped region.

Therefore, when the time-series data acquisition unit 12 of the graph display device 150 acquires the two time-series data from the graph display device 150 as a plurality of time-series data for graph display, each of the two time-series data. In the graph display, the display processing unit 15 performs the processing of step S280 after the determination in step S260 of FIG. The display processing unit 15 enables the signal value display function of each section of the time-series data of interest in the graph display of the time-series data of interest among the two time-series data (step S280 in FIG. 6), and corresponds to the section of interest. The band-shaped region to be displayed is displayed (step S300 in FIG. 5).

Here, as shown in FIG. 10, the signal value in the first section of the time series data corresponding to the linear graph K1 is zero. Therefore, in the display of the strip graph G5 corresponding to the time series data, the display processing unit 15 disables the signal value display function for the first section (step S320 in FIG. 6), and the strip shape of the first section. The signal value "0" is not displayed in the area, and the signal value of the other section is displayed in the band-shaped area corresponding to the other section without disabling the signal value display function for the other section ( Step S330 in FIG. 6). By these processes, the display processing unit 15 displays the strip graphs G4 and G5 of FIG. Even in the first section where the signal value is zero, the signal value "0" may be displayed in the band-shaped region of the section without disabling the signal display function.

FIG. 11 is a diagram showing six linear graphs K6 to K11 as an example of the linear graph displayed by the graph display device 150. As can be seen from the linear graphs K6 to K11 in FIG. 11, each time series data corresponding to the linear graphs K6 to K11 is continuous multi-valued time series data. Therefore, in the graph display processing of each time series data corresponding to the linear graphs K6 to K11, the display processing unit 15 has a period shorter than a predetermined period in each section of the time series data of interest as a result of the determination in step S260. Is determined to exist, and a linear graph of the time-series data of interest is displayed on the display 141 (step S270 in FIG. 6). As a result, the display processing unit 15 displays the linear graphs K6 to K11 on one coordinate for each time series data.

Further, the graph display device 150 is used from the substrate processing device 100, for example, the three linear graphs K1 to K3 in FIG. 8, the two linear graphs K4 and K5 in FIG. 9, and the six linear graphs K6 in FIG. In some cases, 11 time-series data corresponding to ~ K11 may be acquired as a plurality of time-series data to be displayed in a graph. In this case, for example, as shown in FIG. 12, the graph display device 150 displays the strip graphs G1 to G5 in parallel, and displays the linear graphs K6 to K11 on one coordinate. The display processing unit 15 displays each graph so that the display areas of the strip graphs G1 to G5 and the display areas of the linear graphs K6 to K11, which are displayed in parallel, do not overlap on the display 141.

For example, the display order (arrangement order) of the corresponding graphs for all the parameters of the substrate processing device 100 is determined in advance and stored in the magnetic disk 24, and the graph display device 150 corresponds to a part or all of the parameters. When displaying the time-series data (for example, 11 time-series data corresponding to the strip graphs G1 to G5 and the linear graphs K6 to K11) as a graph, the display processing unit 15 follows the display order set for each parameter. Is displayed on the display 141. That is, the display processing unit 15 displays each band-shaped graph corresponding to each time series data so as to be arranged in the width direction according to a preset display order. Further, the display processing unit 15 displays each linear graph corresponding to each time series data at one coordinate as shown in FIG. 12, for example.

The display processing unit 15 preferably makes at least one of the colors and patterns of the strip-shaped regions adjacent to each other among the strip-shaped regions of the strip-shaped graph corresponding to the time-series data different for each time-series data.

In the example of FIG. 7, in the strip graph G1, achromatic colors and green (chromatic colors) are alternately arranged for each strip region, and in the strip graph G2, achromatic colors and orange (chromatic colors) are alternately arranged. In the strip graph G3, achromatic colors and red colors (chromatic colors) are arranged alternately.

In the example of FIG. 8, in the strip graph G4, achromatic colors and pink colors (chromatic colors) are alternately arranged for each strip region, and in the strip graph G5, achromatic colors and blue (chromatic colors) are alternately arranged. ..

Further, preferably, for each time-series data, the display processing unit 15 alternately changes the color of each band-shaped area of the band-shaped graph corresponding to the time-series data in the order of arrangement of the band-shaped areas.

As shown in FIGS. 7 and 8, the display processing unit 15 sets one color of one of the two types of colors attached to the strip graph corresponding to the time series data for a plurality of time series data. Use a common achromatic color across the series data. As the achromatic color, for example, white or an achromatic color having the same color as the background is adopted.

Further, as shown in FIGS. 7 and 8, the display processing unit 15 preferably uses one of the two colors attached to the strip graph corresponding to the time series data for the plurality of time series data. The other color other than is chromatic, and the two chromatic colors attached to the adjacent strip graphs among the chromatic colors corresponding to the plurality of strip graphs corresponding to the plurality of time series data are made different. As shown in FIGS. 7, 9, and 11, when the display processing unit 15 displays a plurality of strip graphs in parallel, the display processing unit 15 preferably prefers the chromatic colors displayed on each strip graph. Is set based on a predetermined color scheme such as, for example, Color Universal Design.

For each time-series data, each boundary where the signal value changes in the time-series data is detected by any of the graph display device, the graph display method, and the computer that executes the graph display program according to the above embodiment. Then, the signal value included in the section is specified for each section in which the time series data is separated by each boundary. Then, each band-shaped graph corresponding to each time-series data is displayed on the display 141 so as to be arranged in the width direction. The strip graph includes each strip region corresponding to each interval of the corresponding time series data and each signal value indicated by characters so as to overlap the corresponding strip region. Each band-shaped region expresses the start time and end time when the corresponding section is converted into time on the time series by each position of both ends in the longitudinal direction along the time axis, and is arranged in a row along the time axis. Are arranged in. Therefore, each band-shaped graph can be displayed without overlapping with each other by reducing the area required for these displays, so that the listability can be improved. Further, for each band graph, the change of the signal value of the time series data corresponding to the band graph and its timing can be easily performed by the boundary of each band region included in the band graph and each signal value indicated by characters. Therefore, it is possible to easily compare the timing of changes in signal values between each time-series data based on each band-shaped graph.

Further, in any of the graph display device according to the present embodiment and the graph display method according to the present embodiment, for each time-series data, the strip-shaped regions of the strip-shaped graphs corresponding to the time-series data are adjacent to each other. Since at least one of the colors and patterns of the is different, it is easy to grasp the boundary of the band-shaped regions adjacent to each other.

Further, in any of the graph display device and the graph display method according to the present embodiment, for each time-series data, the colors of the band-shaped regions of the strip-shaped graph corresponding to the time-series data alternate in the order of arrangement of the strip-shaped regions. Since it is changed to, it is possible to adopt a color that can be easily distinguished from each other as two colors of two adjacent band-shaped regions. This makes it easier to grasp the boundaries of the strip-shaped regions adjacent to each other.

Further, in any of the graph display device and the graph display method according to the present embodiment, for a plurality of time series data, one color of one of the two types of colors attached to the strip graph corresponding to the time series data is a plurality of colors. Since it is a common achromatic color over the time series data of, it is possible to give uniformity to the whole of a plurality of strip graphs and reduce the types of colors used.

Further, regardless of the graph display device and the graph display method according to the present embodiment, a plurality of time series data are regarded as a common achromatic color among the two types of colors attached to the strip graph corresponding to the time series data. The other color other than one of the colors is chromatic, and the two chromatic colors attached to the adjacent strip graphs among the chromatic colors corresponding to the plurality of strip graphs corresponding to the plurality of time series data are different. .. Therefore, it becomes easy to identify adjacent strip graphs.

Further, in any of the graph display device and the graph display method according to the present embodiment, for each time series data, the time series data is a binary value that makes it easy to recognize the signal value even if the signal value is not displayed by characters. If it is data, each signal value corresponding to each section is not displayed. Therefore, by looking at the strip graph, it is possible to easily recognize that the time series data is binary data, and the signal by the corresponding strip graph can be easily recognized. The display of the strip graph can be simplified while facilitating the grasp of the change in the value.

Further, in any of the graph display device and the graph display method according to the present embodiment, when the time series data is multi-valued data having three or more values including zero, the time series data For the section where the signal value is non-zero, the signal value of the section is displayed in the band-shaped region corresponding to the section, and for the section where the signal value is zero, the signal value of the section corresponds. Not displayed in the strip area. Even if the signal value is not displayed in the section where the signal value is zero, the operator observing the graph is unlikely to feel a sense of discomfort. Therefore, it is possible to simplify the display of the strip graph while facilitating the grasp of the change in the signal value by the strip graph.

Further, in any of the graph display device and the graph display method according to the present embodiment, for each time series data, when the time series data is multi-valued data having three or more values, each section of the time series data If a section shorter than a predetermined period is included when converted to time on a time series, the horizontal direction along the longitudinal direction of the band-shaped graph is replaced with the band-shaped graph corresponding to the time-series data. A linear graph is displayed on the display 141 in which points corresponding to each signal value included in the time series data are connected in chronological order at coordinates with the axis as the time axis and the vertical axis as the axis of the signal value. Therefore, since the display of the signal value in characters in the short strip-shaped region is suppressed, the display of the strip-shaped graph having poor visibility due to the overlapping of the signal value displays is suppressed.

Further, by any of the substrate processing system and the substrate processing method according to the present embodiment as described above, each signal value of a plurality of parameters indicating the state is timed from the substrate processing apparatus that performs predetermined processing on the substrate. A plurality of time series data sampled sequentially are output, and a strip graph is displayed for each of the plurality of time series data.

Although the present invention has been shown and described in detail, the above description is exemplary and not limiting in all embodiments. Therefore, in the present invention, the embodiments can be appropriately modified or omitted within the scope of the invention.

200 Board processing system 100 Board processing device 10 Board processing device group 1 Board processing unit G1 to G5 Strip graph R1, R2 Strip region B1 Boundary K6 to K11 Linear graph PG program W board

Claims (18)

A time-series data acquisition unit that acquires multiple time-series data,
For each time-series data acquired by the time-series data acquisition unit, a boundary detection unit that detects each boundary in which the signal value changes in the time-series data, and a boundary detection unit.
For each time-series data, for each section in which the time-series data is divided by the boundary corresponding to the time-series data, a signal value specifying unit that specifies the signal value included in the section, and a signal value specifying unit.
For each time-series data, the start time and end time of each section when the sections of the time-series data are converted into time on the time series are determined by the positions of both ends in the longitudinal direction along the time axis. In addition to expressing each, each band-shaped region arranged in a row along the time axis is specified for each section of the time-series data by the signal value specifying unit, and corresponds to each of the band-shaped regions. A display processing unit that displays a band-shaped graph including each signal value indicated by characters so as to overlap the band-shaped area to be displayed on a predetermined display.
With
The display processing unit
Each band-shaped graph is displayed on the display so that the band-shaped graphs corresponding to the time-series data are arranged in the width direction .
The display processing unit
For each time-series data, if the time-series data is binary data, the signal values corresponding to the sections of the time-series data correspond to the band-shaped regions corresponding to the time-series data. to deactivate the signal value display function of displaying on the display a character so as to overlap with the band-like region, you activate the signal value indication if the time series data is 3 or more values data, the graph display device .. The graph display device according to claim 1.
The display processing unit
Regarding each of the time-series data, when the time-series data is multi-valued data having three or more values including zero, the section of the time-series data in which the signal value is non-zero is the section. Enables the function of displaying the signal value of the section in the band-shaped area corresponding to the section, and disables the function of displaying the signal value of the section in the band-shaped area corresponding to the section for the section taking zero as the signal value. Graph display device. A time-series data acquisition unit that acquires multiple time-series data,
For each time-series data acquired by the time-series data acquisition unit, a boundary detection unit that detects each boundary in which the signal value changes in the time-series data, and a boundary detection unit.
For each time-series data, for each section in which the time-series data is divided by the boundary corresponding to the time-series data, a signal value specifying unit that specifies the signal value included in the section, and a signal value specifying unit.
For each time-series data, the start time and end time of each section when the sections of the time-series data are converted into time on the time series are determined by the positions of both ends in the longitudinal direction along the time axis. In addition to expressing each, each band-shaped region arranged in a row along the time axis is specified for each section of the time-series data by the signal value specifying unit, and corresponds to each of the band-shaped regions. A display processing unit that displays a band-shaped graph including each signal value indicated by characters so as to overlap the band-shaped area to be displayed on a predetermined display.
With
The display processing unit
Each band-shaped graph is displayed on the display so that the band-shaped graphs corresponding to the time-series data are arranged in the width direction.
The display processing unit
For each time-series data, when the time-series data is multi-valued data with three or more values, from a predetermined period when converted to time on the time-series in each of the sections of the time-series data. If a short section is included, the function of displaying the strip graph corresponding to the time series data on the display is disabled, the horizontal axis along the longitudinal direction of the strip graph is the time axis, and the vertical axis is the vertical axis. A graph display device that displays on the display a linear graph in which points corresponding to each signal value included in the time series data are connected in chronological order on coordinates with the signal value as the axis. The graph display device according to any one of claims 1 to 3.
The display processing unit
A graph display device for differentiating at least one of the colors and patterns of the strip-shaped regions adjacent to each other among the strip-shaped regions of the strip-shaped graph corresponding to the time-series data. The graph display device according to claim 4.
The display processing unit
A graph display device for alternately changing the color of each band-shaped region of the band-shaped graph corresponding to the time-series data in the order of arrangement of the band-shaped regions. The graph display device according to claim 5.
The display processing unit
A graph display device for setting one of the two types of colors attached to the band-shaped graph corresponding to the time-series data as an achromatic color common to the plurality of time-series data. The graph display device according to claim 6.
The display processing unit
Regarding the plurality of time-series data, of the two types of colors attached to the strip graph corresponding to the time-series data, the other color other than the one is chromatic and corresponds to the plurality of time-series data. A graph display device that makes two chromatic colors attached to adjacent strip graphs different from each other among the chromatic colors corresponding to a plurality of strip graphs. The graph display device according to any one of claims 1 to 7.
A board processing device that performs predetermined processing on the board, and
With
The substrate processing apparatus outputs a plurality of time-series data obtained by sequentially sampling each signal value of a plurality of parameters indicating the state in time.
The graph display device is a board processing system that acquires a plurality of time series data output by the board processing device by the time series data acquisition unit and displays the strip graph for each of the plurality of time series data. Time series data acquisition step to acquire multiple time series data,
For each time-series data acquired in the time-series data acquisition step, a boundary detection step for detecting each boundary in which the signal value changes in the time-series data, and a boundary detection step.
For each time-series data, for each section in which the time-series data is delimited by the boundary corresponding to the time-series data, a signal value specifying step for specifying the signal value included in the section, and a signal value specifying step.
For each time-series data, the start time and end time of each section when the sections of the time-series data are converted into time on the time series are determined by the positions of both ends in the longitudinal direction along the time axis. In addition to expressing each, each band-shaped region arranged in a row along the time axis is specified for each section of the time-series data by the signal value specifying step, and corresponds to each of the band-shaped regions. A display processing step of displaying a band-shaped graph including each signal value indicated by characters so as to overlap the band-shaped area to be displayed on a predetermined display.
With
The display processing step is
Wherein as each strip chart corresponding to the respective time-series data are arranged in the width direction, Ri step der displaying the respective strip-like graph on the display,
The display processing step is
For each time-series data, if the time-series data is binary data, the signal values corresponding to the sections of the time-series data correspond to the band-shaped regions corresponding to the time-series data. deactivate the signal value display function of displaying on the display a character so as to overlap with the band-like region, Ru steps der to enable the signal value indication if the time series data is 3 or more values data , Graph display method. The graph display method according to claim 9.
The display processing step is
Regarding each of the time-series data, when the time-series data is multi-valued data having three or more values including zero, the section of the time-series data in which the signal value is non-zero is the section. Step of enabling the function of displaying the signal value of the above in the band-shaped area corresponding to the section, and disabling the function of displaying the signal value of the section in the band-shaped area corresponding to the section for the section taking zero as the signal value. The graph display method. Time series data acquisition step to acquire multiple time series data,
For each time-series data acquired in the time-series data acquisition step, a boundary detection step for detecting each boundary in which the signal value changes in the time-series data, and a boundary detection step.
For each time-series data, for each section in which the time-series data is delimited by the boundary corresponding to the time-series data, a signal value specifying step for specifying the signal value included in the section, and a signal value specifying step.
For each time-series data, the start time and end time of each section when the sections of the time-series data are converted into time on the time series are determined by the positions of both ends in the longitudinal direction along the time axis. In addition to expressing each, each band-shaped region arranged in a row along the time axis is specified for each section of the time-series data by the signal value specifying step, and corresponds to each of the band-shaped regions. A display processing step of displaying a band-shaped graph including each signal value indicated by characters so as to overlap the band-shaped area to be displayed on a predetermined display.
With
The display processing step is
This is a step of displaying each band-shaped graph on the display so that the band-shaped graphs corresponding to the time-series data are arranged in the width direction.
The display processing step is
For each time-series data, when the time-series data is multi-valued data with three or more values, from a predetermined period when converted to time on the time-series in each of the sections of the time-series data. If a short section is included, the function of displaying the strip graph corresponding to the time series data on the display is disabled, the horizontal axis along the longitudinal direction of the strip graph is the time axis, and the vertical axis is the vertical axis. A graph display method, which is a step of displaying a linear graph in which points corresponding to each signal value included in the time series data are connected in chronological order on coordinates with the signal value as an axis. The graph display method according to any one of claims 9 to 11.
The display processing step is
A graph display method, which is a step of making at least one of the colors and patterns of the band-shaped regions adjacent to each other among the band-shaped regions of the band-shaped graph corresponding to the time-series data different from each other for each time-series data. The graph display method according to claim 12.
The display processing step is
A graph display method, which is a step of alternately changing the color of each band-shaped region of the band-shaped graph corresponding to the time-series data for each time-series data in the order of arrangement of the band-shaped regions. The graph display method according to claim 13.
The display processing step is
A graph, which is a step of making one of the two types of colors attached to the strip graph corresponding to the time series data achromatic color common to the plurality of time series data. Display method. The graph display method according to claim 14.
The display processing step is
Regarding the plurality of time-series data, of the two types of colors attached to the strip graph corresponding to the time-series data, the other color other than the one is chromatic and corresponds to the plurality of time-series data. A graph display method, which is a step of differentiating two chromatic colors attached to adjacent strip graphs among the chromatic colors corresponding to a plurality of strip graphs. A substrate processing method comprising the graph display method according to any one of claims 9 to 15.
A substrate processing step of performing a predetermined process on a substrate by a predetermined substrate processing device, and
An output step for outputting a plurality of time-series data obtained by sequentially sampling each signal value of a plurality of parameters indicating the state of the substrate processing device in time.
With more
The graph display method is a method of acquiring a plurality of time series data output in the output step in the time series data acquisition step and displaying the strip graph for each of the plurality of time series data. Method. A graph display program that displays time-series data as a graph by being executed by a computer, and the program is a computer equipped with a CPU and a memory.
Time series data acquisition step to acquire multiple time series data,
For each time-series data acquired in the time-series data acquisition step, a boundary detection step for detecting each boundary in which the signal value changes in the time-series data, and a boundary detection step.
For each time-series data, for each section in which the time-series data is delimited by the boundary corresponding to the time-series data, a signal value specifying step for specifying the signal value included in the section, and a signal value specifying step.
For each time-series data, the start time and end time of each section when the sections of the time-series data are converted into time on the time series are determined by the positions of both ends in the longitudinal direction along the time axis. In addition to expressing each, each band-shaped region arranged in a row along the time axis is specified for each section of the time-series data by the signal value specifying step, and corresponds to each of the band-shaped regions. A display processing step of displaying a band-shaped graph including each signal value indicated by characters so as to overlap the band-shaped area to be displayed on a predetermined display.
To execute,
The display processing step is
Wherein as each strip chart corresponding to the respective time-series data are arranged in the width direction, Ri step der displaying the respective strip-like graph on the display,
The display processing step is
For each time-series data, if the time-series data is binary data, the signal values corresponding to the sections of the time-series data correspond to the band-shaped regions corresponding to the time-series data. deactivate the signal value display function of displaying on the display a character so as to overlap with the band-like region, Ru steps der to enable the signal value indication if the time series data is 3 or more values data , Graph display program. A graph display program that displays time-series data as a graph by being executed by a computer, and the program is a computer equipped with a CPU and a memory.
Time series data acquisition step to acquire multiple time series data,
For each time-series data acquired in the time-series data acquisition step, a boundary detection step for detecting each boundary in which the signal value changes in the time-series data, and a boundary detection step.
For each time-series data, for each section in which the time-series data is delimited by the boundary corresponding to the time-series data, a signal value specifying step for specifying the signal value included in the section, and a signal value specifying step.
For each time-series data, the start time and end time of each section when the sections of the time-series data are converted into time on the time series are determined by the positions of both ends in the longitudinal direction along the time axis. In addition to expressing each, each band-shaped region arranged in a row along the time axis is specified for each section of the time-series data by the signal value specifying step, and corresponds to each of the band-shaped regions. A display processing step of displaying a band-shaped graph including each signal value indicated by characters so as to overlap the band-shaped area to be displayed on a predetermined display.
To execute,
The display processing step is
This is a step of displaying each band-shaped graph on the display so that the band-shaped graphs corresponding to the time-series data are arranged in the width direction.
The display processing step is
For each time-series data, when the time-series data is multi-valued data with three or more values, from a predetermined period when converted to time on the time-series in each section of the time-series data. If a short section is included, the function of displaying the strip graph corresponding to the time series data on the display is disabled, the horizontal axis along the longitudinal direction of the strip graph is the time axis, and the vertical axis is the vertical axis. A graph display program, which is a step of displaying a linear graph in which points corresponding to each signal value included in the time series data are connected in chronological order on the coordinates having the signal value as the axis.

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