JP6869932B2 - Manual valve with erroneous operation prevention cover and erroneous operation prevention cover - Google Patents

Description

The present invention includes a manual valve with an erroneous operation prevention cover and a manual with an erroneous operation prevention cover, which comprises a manual mechanism for bringing the valve body into contact with or separated from the valve seat by rotating the handle, and a lock mechanism for limiting the operation of the manual mechanism. It relates to an erroneous operation prevention cover attached to the valve.

In the semiconductor manufacturing process, a manual valve is used to control the fluid supply to the line connected to the reaction chamber. In recent years, semiconductor manufacturing equipment has become smaller and more integrated, and the distance between various fluid control devices (valves, sensors, etc.) tends to decrease. Therefore, when an operator operates a manual valve or other fluid control device to control the fluid in a certain line, he / she touches the manual valve in the adjacent line and unintentionally changes the valve opening. Can occur.
In order to prevent such a defect, for example, a manual valve provided with a lock mechanism for preventing erroneous operation disclosed in Patent Document 1 is used. This manual valve moves the operating rod inserted into the cylinder member up and down by rotating the handle to open and close the valve body connected to the operating rod. A locking hole is provided so as to pass through the cylinder member and the handle, and by inserting a locking member (for example, a padlock) through the locking hole, the handle is prevented from moving relative to the cylinder member. The operation of the handle can be restricted. Therefore, it is possible to prevent the operator from unintentionally operating the manual valve.

However, the manual valve can insert the padlock only when the positions of the locking holes provided in the cylinder member and the locking holes provided in the handle match, and the handle operation can be restricted. It can be done. That is, the steering wheel operation can be restricted only at a predetermined steering wheel rotation angle, and the steering wheel operation cannot be restricted while the valve opening degree is finely adjusted and the required valve opening degree is maintained.

Therefore, the applicant has proposed a locking mechanism using a locking ring as disclosed in Patent Document 2.
The lock ring is slidably held between the handle and the valve body along the longitudinal direction of the operation rod between the unlock position that enables the handle operation and the lock position that restricts the handle operation. With the lock ring in the unlocked position, rotate the handle until the required valve opening is obtained, and then move the lock ring to the locked position when the required valve opening is obtained. , It is possible to limit the steering wheel operation while maintaining the required valve opening.

Japanese Unexamined Patent Publication No. 2010-255663 Japanese Unexamined Patent Publication No. 2005-344918

However, the above prior art has the following problems.
Applying a lock mechanism with a lock ring may cause you to forget to move the lock ring to the lock position. For example, when an operator tries to operate a manual valve or other fluid control equipment to control fluid in a certain line and touches the manual valve in the next line, the lock ring of the manual valve in the next line is activated. If it has not been moved to the locked position, the valve may be opened or closed unintentionally.

Further, even when the lock ring is located at the locked position and the steering wheel operation is restricted, the possibility that the user tries to operate the steering wheel cannot be excluded because the steering wheel is exposed to the outside. If the user tries to operate the steering wheel forcibly, the rotational force applied to the steering wheel is transmitted to the operating rod connected to the valve body, which may cause a slight deviation in the valve opening degree.

The present invention is for solving the above-mentioned problems, and provides a manual valve capable of preventing forgetting to operate the lock ring and preventing the user from inadvertently operating the steering wheel. With the goal.

In order to solve the above problems, the manual valve with the erroneous operation prevention cover of the present invention has the following configuration.
(1) A lock mechanism in a manual valve with an erroneous operation prevention cover provided with a manual mechanism for bringing the valve body into contact with or separated from the valve seat inside the valve body by rotating the handle and a lock mechanism for limiting the operation of the manual mechanism. Is provided with an operation unit that can move between the first position for releasing the lock mechanism and the second position for enabling the lock mechanism. The manual valve with the erroneous operation prevention cover is replaced with the manual valve with the erroneous operation prevention cover. A hollow cover member to be mounted is provided, the cover member is provided with an insertion piece having a detection portion, and when the insertion piece is attached to the cover member, the detection portion of the insertion piece is a cover member. The handle and the operation part are located inside the hollow of the cover member when the cover member is mounted on the manual valve with the cover to prevent erroneous operation. However, when the operation unit is in the first position, the operation unit is located in the path and the insertion piece cannot be completely attached to the cover member, and when the operation unit is in the second position, the operation is performed. The portion is retracted from the path, and the insertion piece can be completely attached to the cover member.

(2) In the manual valve with the erroneous operation prevention cover described in (1), the cover member is provided with an insertion hole for inserting the insertion piece, the insertion piece is inserted into the insertion hole, and the insertion piece covers the insertion piece. It is characterized in that it is movably held between a temporary fixing position protruding to the outside of the member and a mounting complete position in which the insertion piece is housed inside the cover member.
(3) In the manual valve with the erroneous operation prevention cover according to (1) or (2), the manual mechanism is provided with an operation rod having a valve body connected to one end, and a handle is arranged on the other end side of the operation rod. The manual mechanism is provided with a retaining portion between the handle and the valve body, and the cover member is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle extends. That, the insertion piece is attached to the cover member from the direction orthogonal to the longitudinal direction of the operation rod, the cover member is attached to the manual valve with the erroneous operation prevention cover, and the insertion piece is attached to the cover member. The detection unit is positioned adjacent to the end surface of the stopper on the valve body side, and when a force is applied to the cover member in a direction opposite to the mounting direction of the cover member, the detection unit prevents the cover member from coming off. It is characterized in that it abuts on the end surface of the portion on the valve body side and restricts the movement of the cover member in the direction opposite to the mounting direction.

(4) In the manual valve with the erroneous operation prevention cover according to any one of (1) to (3), the insertion piece is placed on the end surface opposite to the end surface on the side opposite to the mounting side end surface of the insertion piece on the cover member. It is provided with one lock portion, the cover member is provided with a second lock portion located opposite to the first lock portion with the insertion piece attached to the cover member, the first lock portion and the second lock portion. The lock portion is formed with a locking hole that penetrates the first lock portion and the second lock portion with the insertion piece attached to the cover member. It is characterized in that it includes a lock member that is inserted into the locking hole.

(5) In the manual valve with an erroneous operation prevention cover according to any one of (1) to (4), the manual mechanism includes an operation rod having a valve body connected to one end, and is provided on the other end side of the operation rod. The handle is arranged, the operation part has a ring shape, is arranged coaxially with the operation rod on the side where the operation rod of the handle extends, and is the first position along the longitudinal direction of the operation rod. , The insertion piece is attached to the cover member from the direction orthogonal to the central axis of the operation rod, and the cover member is attached to the manual valve with the erroneous operation prevention cover. In the state, when the operation unit is in the first position, the outer peripheral surface of the operation unit interferes with the detection unit, and the insertion piece cannot be completely attached to the cover member, and the operation unit is in the second position. The case is characterized in that the insertion piece for which the operation unit has been mounted can be retracted from the space rotationally projected around the central axis of the operation rod, and the insertion piece can be completely mounted on the cover member. ..

(6) In the manual valve with the erroneous operation prevention cover according to any one of (1) to (5), the manual mechanism is provided with an operation rod to which the valve body is connected to one end, and the cover member is erroneous operation prevention. The end face on the mounting side with the manual valve with cover has an engaging part that engages with the manual valve with erroneous operation prevention cover, and the manual valve with erroneous operation prevention cover has an engaged part that engages with the engaging part. By being provided and the engaging portion and the engaged portion are engaged, the cover member rotates every 90 degrees around the central axis of the operation rod, and a manual valve with an erroneous operation prevention cover is provided. It is characterized in that it can be positioned with respect to.

(7) The erroneous operation prevention cover attached to the manual valve with the erroneous operation prevention cover according to any one of (1) to (6), characterized in that it is composed of a cover member and an insertion piece. To do.

The manual valve with the erroneous operation prevention cover of the present invention has the following actions and effects by having the above configuration.
(1) In a manual valve with an erroneous operation prevention cover provided with a manual mechanism for bringing the valve body into contact with or separated from the valve seat by rotating the handle and a lock mechanism for limiting the operation of the manual mechanism, the lock mechanism releases the lock mechanism. The manual valve with the erroneous operation prevention cover is a hollow type that is attached to the manual valve with the erroneous operation prevention cover. The cover member is provided, the cover member is provided with an insertion piece having a detection portion, and when the insertion piece is attached to the cover member, the insertion piece is constant in the hollow inside of the cover member. The handle and the operation part are located inside the hollow of the cover member, and the operation part is the first in the state where the cover member is held so as to be movable with a path and the cover member is attached to the manual valve with the cover for preventing erroneous operation. When it is in the 1st position, the operation unit is located in the path of the detection unit, and the insertion piece cannot be completely attached to the cover member. When the operation unit is in the 2nd position, the operation unit is the detection unit. The feature is that the insertion piece can be completely attached to the cover member by retracting from the path of the above, so that the insertion piece can be attached to the cover member with the cover member attached to the manual valve with the erroneous operation prevention cover. If the operation unit is in the first position, such as when the operator forgets to move the operation unit (for example, the lock ring) to the second position when trying to install it, the operation unit is located in the path of the detection unit. Therefore, the operation unit hinders the movement of the detection unit, and the operator cannot attach the insertion piece to the cover member.
On the other hand, if the operation unit is moved to the second position, the operation unit is retracted from the path of the detection unit, so that the detection unit is not hindered from moving inside the hollow of the cover member, and the operator Can attach the plug to the cover member.

Therefore, the operator may or may not be in the first position or the second position depending on whether or not the insertion piece can be attached to the cover member with the cover member attached to the manual valve with the erroneous operation prevention cover. It is possible to know. If the insertion piece cannot be attached and the operation unit is found to be in the first position, remove the cover member from the manual valve with the erroneous operation prevention cover, move the operation unit to the second position, and then prevent the cover member from erroneous operation again. It may be attached to the manual valve with a cover, and the manual valve with an erroneous operation prevention cover will not be left unattended when the operation unit is not moved to the second position.
Since the manual valve with the erroneous operation prevention cover is not left unattended when the operation unit is not moved to the second position, let's operate the manual valve and other fluid control equipment to control the fluid in a certain line. Then, when the manual valve with the erroneous operation prevention cover on the adjacent line was touched, the operation part of the manual valve with the erroneous operation prevention cover on the adjacent line was not moved to the second position, so the valve was unintentionally valved. The risk of changing the opening is eliminated.

Also, if only the cover member is simply attached to the manual valve with the erroneous operation prevention cover to prevent erroneous operation, the operation part of the handle and lock mechanism cannot be seen from the outside, so whether or not the lock mechanism is effective after work. In order to confirm this, it is necessary to check the state of the operation unit after removing the cover member, and there is a concern that the work efficiency may deteriorate. However, by providing the insertion piece that can be attached to the cover member only when the lock mechanism is enabled as described above, the insertion piece is attached to the cover member attached to the manual valve with the erroneous operation prevention cover. Then, it becomes possible to determine at a glance that the lock mechanism is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism is effective after the work, and the work efficiency is not deteriorated.

Furthermore, when the cover member is attached to the manual valve with the erroneous operation prevention cover, the handle and the operation portion are located inside the hollow of the cover member, so that the handle and the operation portion are not exposed to the outside.
Since the handle is not exposed to the outside, the operator cannot touch the handle and does not try to operate the handle by force. Therefore, when the operator tries to forcibly operate the steering wheel, a rotational force is applied to the steering wheel, and the rotational force applied to the steering wheel is transmitted to the operation rod connected to the valve body, resulting in a slight deviation in the valve opening. Can be prevented. Further, since the operation unit is not exposed to the outside, the restriction of the manual mechanism is not released carelessly.

(2) In the manual valve with the erroneous operation prevention cover described in (1), the cover member is provided with an insertion hole for inserting the insertion piece, the insertion piece is inserted into the insertion hole, and the insertion piece covers the insertion piece. The insertion piece is characterized in that it is movably held between a temporary fixing position protruding to the outside of the member and a mounting completion position in which the insertion piece is housed inside the cover member. , It is integrated into the insertion hole of the cover member so that it can be moved between the temporary fixing position and the mounting completion position, and even when carrying the erroneous operation prevention cover for mounting on the manual valve with the erroneous operation prevention cover. The insertion piece does not fall off from the cover member.
If the cover member and the insertion piece are not integrated, the insertion piece may be lost or the insertion piece may be forgotten to be attached to the cover member.
However, since the cover member and the insertion piece are integrated as described above, the risk of losing the insertion piece is eliminated. In addition, when the insertion piece is in the temporarily fixed position, it protrudes from the cover member, so that the visibility that the insertion piece is not in the mounting complete position is improved, and there is a risk of forgetting to mount the insertion piece on the cover member. It will be resolved.

If the cover member and the insertion piece are not integrated, the operator must carry the insertion piece and attach it to the cover member after attaching the cover member to the manual valve with the erroneous operation prevention cover. It doesn't become. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the insertion piece.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve with an erroneous operation prevention cover is often also small. If the manual valve with the erroneous operation prevention cover is small, the insertion piece is naturally small, and the work of inserting the insertion piece into the insertion hole becomes a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, such as when a worker is wearing gloves to prevent injury.

If the insertion piece is movably held in the insertion hole of the cover member between the temporary fixing position and the mounting completion position, the operator attaches the cover member to the manual valve with the erroneous operation prevention cover, and then makes a difference. All that is required is to move the insert piece by pushing it from the temporarily fixed position to the mounting completed position.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed if only the insertion piece is moved.

(3) In the manual valve with the erroneous operation prevention cover according to (1) or (2), the manual mechanism is provided with an operation rod having a valve body connected to one end, and a handle is arranged on the other end side of the operation rod. The manual mechanism is provided with a retaining portion between the handle and the valve body, and the cover member is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle extends. That, the detection member is attached to the cover member from the direction orthogonal to the longitudinal direction of the operation rod, the cover member is attached to the manual valve with the erroneous operation prevention cover, and the detection member is attached to the cover member. The detection unit is located adjacent to the end face of the retaining portion on the valve body side, and when a force is applied to the cover member in a direction opposite to the mounting direction of the cover member, the detection unit is used as a retaining portion. It is characterized in that it abuts on the end face on the valve body side and restricts the movement in the direction opposite to the mounting direction of the cover member. Therefore, after the operator moves the operation portion to the second position, the cover member Is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle is extended, and the insertion piece is attached to the cover member from the direction orthogonal to the moving direction of the operation part. The detection unit on one side will be positioned adjacent to the valve body side end surface of the retaining portion that the manual mechanism has between the handle and the valve body. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off from the manual valve with the cover to prevent erroneous operation.
Since the insertion piece can also be used as a lock structure to prevent the cover member from falling off, there is no need to provide a structure for preventing the cover member from falling off or a separate member, which prevents an increase in manufacturing cost and a product. The structure can be simplified.

(4) In the manual valve with the erroneous operation prevention cover according to any one of (1) to (3), the insertion piece is placed on the end surface opposite to the end surface on the side opposite to the mounting side end surface of the insertion piece on the cover member. It is provided with one lock portion, the cover member is provided with a second lock portion located opposite to the first lock portion with the insertion piece attached to the cover member, the first lock portion and the second lock portion. The lock portion is formed with a locking hole that penetrates the first lock portion and the second lock portion with the insertion piece attached to the cover member. Since the insertion piece is provided with a lock member to be inserted into the locking hole, the insertion piece is provided with a first lock portion, and the cover member is provided with a second lock portion, and penetrates the first lock portion and the second lock portion. Since the locking hole is provided so as to be provided, the insertion piece can be fixed in a state of being attached to the cover member by inserting a locking member such as a Nanjing lock into the locking hole.
Further, since the first lock portion is provided on the end face on the side opposite to the end face on the side where the insertion piece is attached to the cover member, for example, when the cover member is a hexahedron, the insertion piece of the cover member is attached. The lock member can be attached to the surface to be attached, and it is not necessary to bother to turn the hand to attach the lock member to the surface opposite to the surface to be attached. Therefore, even in the semiconductor manufacturing process where the work space is limited, the insertion piece can be easily fixed to the cover member.

(5) In the manual valve with the erroneous operation prevention cover according to (1) to (4), the manual mechanism is provided with an operation rod having a valve body connected to one end, and a handle is arranged on the other end side of the operation rod. The operation unit has a ring shape and is arranged coaxially with the operation rod on the side where the operation rod of the handle extends, and the first position and the second position are arranged along the longitudinal direction of the operation rod. The operation unit is mounted on the cover member from the direction orthogonal to the central axis of the operation rod, and the operation unit is mounted on the manual valve with the erroneous operation prevention cover. When the operation unit is in the first position, the outer peripheral surface of the operation unit interferes with the detection unit, and the insertion piece cannot be completely attached to the cover member. When the operation unit is in the second position, the operation unit is The insertion piece that has been completely mounted is retracted from the space that is rotationally projected around the central axis of the operation rod, and the insertion piece can be completely mounted on the cover member. As long as it is from a direction orthogonal to the central axis of the portion, it is possible to reliably prevent forgetting to move the operation portion to the second position regardless of the angle at which the detection member is mounted.

That is, since the operation unit is annular, the distance from the center of the operation unit to an arbitrary point on the outer peripheral surface where the detection unit interferes is always constant, and the position where the detection unit interferes with the outer peripheral surface is the operation rod and the operation. As long as it is from the direction orthogonal to the central axis of the portion, it is constant regardless of the angle at which the detection member is mounted. Therefore, when the operation unit is in the first position, the detection member can be installed at a fixed position regardless of the angle at which the detection member is installed from the direction orthogonal to the operation rod and the central axis of the operation unit. Since it cannot be mounted, it is possible to prevent misidentification of whether or not the detection member can be mounted due to variations in the mounting position depending on the mounting angle.
On the other hand, when the operation unit is in the second position, the insertion piece to which the operation unit has been mounted is retracted from the space rotationally projected around the central axis of the operation rod, so that the central axis of the operation rod and the operation unit is retracted. The detection member can be completely mounted without interference between the detection member and the operation unit, regardless of the angle at which the detection member is mounted, as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the insertion piece is mounted according to the work space of the semiconductor manufacturing line in which the manual valve with the erroneous operation prevention cover is actually arranged.

(6) In the manual valve with an erroneous operation prevention cover according to any one of (1) to (5), the cover member is a manual valve with an erroneous operation prevention cover on the end face on the mounting side with the manual valve with the erroneous operation prevention cover. The manual valve with the erroneous operation prevention cover is provided with an engaged portion that engages with the engaging portion, and the engaging portion and the engaged portion are engaged with each other. By combining, the cover member is characterized in that it can be rotated every 90 degrees around the central axis of the operation rod and can be positioned with respect to the manual valve with the erroneous operation prevention cover, so that erroneous operation prevention can be prevented. Even if the cover is rotated by 90 degrees about the central axis of the operation rod with respect to the manual valve with the erroneous operation prevention cover, it can be attached to and engaged with the manual valve with the erroneous operation prevention cover. Workability is improved as compared with the case where it can be mounted in only one direction.

(7) The erroneous operation prevention cover attached to the manual valve with the erroneous operation prevention cover according to any one of (1) to (6), characterized in that it is composed of a cover member and an insertion piece. Therefore, if the operator tries to attach the insertion piece to the cover member while the cover member is attached to the manual valve with the erroneous operation prevention cover, the operator forgets to move the operation unit (for example, the lock ring) to the second position. When the operation unit is in the first position, the operation unit is located in the path of the detection unit, so that the operation unit hinders the movement of the detection unit, and the operator uses the insertion piece as a cover member. Cannot be installed.
On the other hand, if the operation unit is moved to the second position, the operation unit is retracted from the path of the detection unit, so that the detection unit is not hindered from moving inside the hollow of the cover member, and the operator Can attach the plug to the cover member.

Therefore, the operator may or may not be in the first position or the second position depending on whether or not the insertion piece can be attached to the cover member with the cover member attached to the manual valve with the erroneous operation prevention cover. It is possible to know. If the insertion piece cannot be attached and the operation unit is found to be in the first position, remove the cover member from the manual valve with the erroneous operation prevention cover, move the operation unit to the second position, and then move the cover member to the manual valve again. The manual valve with the erroneous operation prevention cover is not left unattended when the operation unit is not moved to the second position.
Since the manual valve with the erroneous operation prevention cover is not left unattended when the operation unit is not moved to the second position, the manual valve with the erroneous operation prevention cover and other fluid control are used to control the fluid of a certain line by the operator. When trying to operate the device and touching the manual valve with the erroneous operation prevention cover on the adjacent line, the operation part of the manual valve with the erroneous operation prevention cover on the adjacent line was not moved to the second position. The risk of unintentionally changing the valve opening is eliminated.

Also, if only the cover member is simply attached to the manual valve with the erroneous operation prevention cover to prevent erroneous operation, the operation part of the handle and lock mechanism cannot be seen from the outside, so whether or not the lock mechanism is effective after work. In order to confirm this, it is necessary to check the state of the operation unit after removing the cover member, and there is a concern that the work efficiency may deteriorate. However, by providing the insertion piece that can be attached to the cover member only when the lock mechanism is enabled as described above, the insertion piece is attached to the cover member attached to the manual valve with the erroneous operation prevention cover. Then, it becomes possible to determine at a glance that the lock mechanism is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism is effective after the work, and the work efficiency is not deteriorated.

Furthermore, when the cover is attached to the manual valve with the erroneous operation prevention cover, the handle and the operation portion are located inside the hollow of the cover member, so that the handle and the operation portion are not exposed to the outside.
Since the handle is not exposed to the outside, the operator cannot touch the handle and does not try to operate the handle by force. Therefore, when the operator tries to forcibly operate the steering wheel, a rotational force is applied to the steering wheel, and the rotational force applied to the steering wheel is transmitted to the operation rod connected to the valve body, resulting in a slight deviation in the valve opening. Can be prevented. Further, since the operation unit is not exposed to the outside, the restriction of the manual mechanism is not released carelessly.

The erroneous operation prevention cover is integrated so that the insertion piece can move between the temporary fixing position and the mounting completion position in the insertion hole of the cover member, and the erroneous operation prevention cover becomes a manual valve with the erroneous operation prevention cover. The insert does not fall off the cover member when it is carried for mounting.
If the cover member and the insertion piece are not integrated, the insertion piece may be lost or the insertion piece may be forgotten to be attached to the cover member.
However, since the cover member and the insertion piece are integrated as described above, the risk of losing the insertion piece is eliminated. In addition, when the insertion piece is in the temporarily fixed position, it protrudes from the cover member, so that the visibility that the insertion piece is not in the mounting complete position is improved, and there is a risk of forgetting to mount the insertion piece on the cover member. It will be resolved.

If the cover member and the insertion piece are not integrated, the operator must carry the insertion piece and attach it to the cover member after attaching the cover member to the manual valve with the erroneous operation prevention cover. It doesn't become. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the insertion piece.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve with an erroneous operation prevention cover is often also small. If the manual valve with the erroneous operation prevention cover is small, the insertion piece is naturally small, and the work of inserting the insertion piece into the insertion hole becomes a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, such as when a worker is wearing gloves to prevent injury.

Since the insertion piece of the erroneous operation prevention cover is movably held in the insertion hole of the cover member between the temporarily fixed position and the mounting completion position, the operator can use the cover member as a manual valve with the erroneous operation prevention cover. After mounting, it is only necessary to move the insertion piece by pushing it from the temporary fixing position to the mounting completion position.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed if only the insertion piece is moved.

After the operator moves the operation unit to the second position, the erroneous operation prevention cover is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle extends, and the cover member is inserted. By attaching the piece to the cover member from the direction orthogonal to the moving direction of the operation part, the detection part of the insertion piece is adjacent to the valve body side end surface of the retaining part that the manual mechanism has between the handle and the valve body. Will be positioned. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off from the manual valve with the cover to prevent erroneous operation.
Since the insertion piece can also be used as a lock structure to prevent the cover member from falling off, there is no need to provide a structure for preventing the cover member from falling off or a separate member, which prevents an increase in manufacturing cost and a product. The structure can be simplified.

The erroneous operation prevention cover has a first lock portion for the insertion piece, a second lock portion for the cover member, and a locking hole for penetrating the first lock portion and the second lock portion. Therefore, for example, a Nanjing lock. By inserting a lock member such as the above into the locking hole, the insertion piece can be fixed in a state of being attached to the cover member.
Further, since the first lock portion is provided on the end face on the side opposite to the end face on the side where the insertion piece is attached to the cover member, for example, when the cover member is a hexahedron, the insertion piece of the cover member is attached. The lock member can be attached to the surface to be attached, and it is not necessary to bother to turn the hand to attach the lock member to the surface opposite to the surface to be attached. Therefore, even in the semiconductor manufacturing process where the work space is limited, the insertion piece can be easily fixed to the cover member.

The erroneous operation prevention cover ensures that the detection member is prevented from being forgotten to move to the second position of the operation unit from any angle as long as it is from the direction orthogonal to the central axis of the operation rod and the operation unit. Can be done.
That is, since the operation unit is annular, the distance from the center of the operation unit to an arbitrary point on the outer peripheral surface where the detection unit interferes is always constant, and the position where the detection unit interferes with the outer peripheral surface is the operation rod and the operation. As long as it is from the direction orthogonal to the central axis of the portion, it is constant regardless of the angle at which the detection member is mounted. Therefore, when the operation unit is in the first position, the detection member can be installed at a fixed position regardless of the angle at which the detection member is installed from the direction orthogonal to the operation rod and the central axis of the operation unit. Since it cannot be mounted, it is possible to prevent misidentification of whether or not the detection member can be mounted due to variations in the mounting position depending on the mounting angle.
On the other hand, when the operation unit is in the second position, the insertion piece to which the operation unit has been mounted is retracted from the space rotationally projected around the central axis of the operation rod, so that the central axis of the operation rod and the operation unit is retracted. The detection member can be completely mounted without interference between the detection member and the operation unit, regardless of the angle at which the detection member is mounted, as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the insertion piece is mounted according to the work space of the semiconductor manufacturing line in which the manual valve with the erroneous operation prevention cover is actually arranged.

The erroneous operation prevention cover can be attached to and engaged with the manual valve with the erroneous operation prevention cover even if the manual valve with the erroneous operation prevention cover is rotated by 90 degrees about the central axis of the operation rod. Workability is improved as compared with the case where it can be mounted in only one direction.

It is a perspective view of the state which attached the erroneous operation prevention cover 10 to the manual valve 1 with the erroneous operation prevention cover. It is a perspective view of the manual valve 1 with an erroneous operation prevention cover in a state where the erroneous operation prevention cover 10 is not attached. It is a perspective view of the erroneous operation prevention cover 10. It is a front view of the state which attached the erroneous operation prevention cover 10 to the manual valve 1 with the erroneous operation prevention cover. It is a right side view of the state where the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover. FIG. 5 is a cross-sectional view taken along the line AA of FIG. FIG. 5 is a cross-sectional view taken along the line BB of FIG. FIG. 5 is a cross-sectional view taken along the line BB in a state where the detection member 102 is in a temporarily fixed position. FIG. 6 is an enlarged view showing an engaging portion between the diaphragm retainer 21 of FIG. 6 and the body 23. FIG. 4 is a cross-sectional view taken along the line DD of FIG. It is a right side view of the manual valve 1 with an erroneous operation prevention cover in a state where the erroneous operation prevention cover 10 is not attached. FIG. 11 is a cross-sectional view taken along the line CC of FIG. FIG. 5 is a perspective view of a manual valve 1 with an erroneous operation prevention cover showing a state in which the detection member 102 is fixed to the cover member 101 by a padlock 24.

An embodiment of the manual valve 1 with an erroneous operation prevention cover of the present invention will be described in detail with reference to the drawings.
The manual valve 1 with an erroneous operation prevention cover is installed in the semiconductor manufacturing apparatus via the mounting plate 5 to control the fluid supply to the line connected to the reaction chamber.
As shown in FIG. 6, the manual valve 1 with an erroneous operation prevention cover includes a valve portion 2, a manual mechanism 3, and a lock mechanism 4, and further, an erroneous operation prevention cover 10 for covering the handle 31 constituting the manual mechanism 3. Have.
In the manual valve 1 with an erroneous operation prevention cover, the slide nut 33 is rotated about the central axis by the rotation operation of the handle 31, and the operation rod 32 is opened (upward in FIG. 6) and closed by the rotation of the slide nut 33. Since it is moved in the direction (downward in FIG. 6), the valve body 22 connected to the operation rod 32 can be brought into contact with or separated from the valve seat 23a in the valve portion 2 to control the fluid flow rate.

Further, the lock ring 41 constituting the lock mechanism 4 can move between the first position for releasing the lock mechanism 4 and the second position for enabling the lock mechanism 4 on the outer peripheral surface of the slide nut 33. It is held in. When the lock ring 41 is in the first position, the manual valve 1 with the erroneous operation prevention cover can be opened and closed by operating the handle. On the other hand, when the lock ring 41 is in the second position, the slide nut 33 cannot rotate (details will be described later), so that the operation rod 32 is opened (upward in FIG. 6) and closed by operating the handle. It becomes impossible to move in the direction (downward in FIG. 6), and it becomes impossible to open and close the manual valve 1 with the erroneous operation prevention cover.

The erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover after the valve opening or closing operation is completed to cover the handle 31 and prevent the operator from directly touching the handle 31. It is a thing. Further, the detection member 102 attached to the erroneous operation prevention cover 10 makes it possible to detect whether or not the lock ring 41 has been moved to the second position, and the operator can move the lock ring 41 to the second position. Prevents the manual valve 1 with the erroneous operation prevention cover from being left unattended when it is forgotten to move.

Hereinafter, the configuration of the manual valve 1 with the erroneous operation prevention cover will be described in detail.
First, the manual mechanism 3 will be described.
The manual mechanism 3 includes a handle 31, an operation rod 32, a slide nut 33, a slide nut cover 34, a clip 35, and an indicator cover 36.

As shown in FIG. 6, the handle 31 has a substantially cylindrical shape having a through hole 31a in the central portion, and as shown in FIG. 2, a plurality of non-slip protrusions 31b are provided on the outer peripheral surface at equal intervals in the circumferential direction. ing.
An indicator cover 36 made of a transparent body is provided on the upper end surface of the handle 31 so as to close the through hole 31a, and the upper end portion of the operation rod 32 inserted into the through hole 31a is visible.
Therefore, it is possible to grasp the valve opening degree and rotate the handle 31 while referring to the position of the upper end portion of the operation rod 32 that can be visually recognized through the indicator cover 36.

As shown in FIG. 11, a second locking portion 312 hangs down on the lower surface of the handle 31, and both ends of the second locking portion 312 are elastic outward in the radial direction as shown in FIG. Deformable presser portions 312a, 312a. Is formed.
Further, the first locking portion 311 hangs down from the lower surface of the handle 31 so as to face the second locking portion 312, and holds the clip 35.
When the handle 31 is rotated, the clip 35 is held by the first locking portion 311 and the second locking portion 312, so that the clip 35 rotates integrally with the handle 31.

As shown in FIG. 12, the clip 35 has a holding portion 351 and has a substantially C-shaped shape. These sandwiching portions 351 and 351 are elastically deformable in the proximity separation motion direction in which they are separated from each other and return to their original positions.
A second locking portion contact surface 351b that contacts the locking portion contact surface 312b of the second locking portion 312 is formed at the tip of the sandwiching portion 351. Further, on the inner peripheral surface of the holding portion 351, a holding portion contact surface 351a capable of contacting all the outer peripheral surfaces of the engaging portion 33b formed at the upper end of the slide nut 33 is formed. There is.
The sandwiching portions 351 and 351 are sandwiched between a pair of holding portions 312a and 312a of the handle 31, and a predetermined elastic force is applied in the direction of sandwiching the slide nut 33, and the sandwiching portion contact surface 351a is a slide nut. Since the clip 35 is in contact with and sandwiched with all the outer peripheral surfaces of the engaging portion 33b of the 33, the rotational force of the clip 35 that rotates integrally with the handle 31 is transmitted to the slide nut 33.

As shown in FIG. 6, the slide nut 33 has a through hole penetrating in the longitudinal direction in the central portion, and has a substantially cylindrical shape. A female threaded portion 33a is formed on the inner peripheral surface of the through hole, and the female threaded portion 33a is screwed to the male threaded portion 32a of the operating rod 32. Further, the operation rod 32 has a rotation stop portion 32b locked to a part of a diaphragm retainer 21 (not shown) in the circumferential direction so as not to rotate in the slide nut 33.
Therefore, when the slide nut 33 is rotated about the central axis by operating the handle 31, the operation rod 32 is screwed by the male screw portion 32a and the female screw portion 33a, and is screwed in the vertical direction of FIG. 6 relative to the slide nut 33. It is possible to screw in. A valve body 22 is coupled to the lower end of the operation rod 32, and the valve body 22 also moves up and down as the operation rod 32 moves up and down, and valve opening and closing operations are performed.

The slide nut 33 is inserted into a through hole 34c provided in the central portion of the slide nut cover 34. A flange portion 33c is provided at the lower end in FIG. 6, and the step portion 34b of the slide nut cover 34 and the step portion 21d of the diaphragm retainer 21 allow the slide nut 33 to rotate about the central axis. It is held as possible.
The step portion 34b has a protrusion protruding downward in the drawing, and the protrusion is in contact with the upper surface of the flange portion 33c. By bringing the protrusions into contact, the contact area can be minimized, and the slide nut 33 can easily rotate with respect to the slide nut cover 34 and the diaphragm retainer 21.

Further, on the outer peripheral surface between the engaging portion 33b and the flange portion 33c of the slide nut 33, an annular lock ring 41 constituting the lock mechanism 4 can move between the first position and the second position. It is being held. Then, as shown in FIG. 7, an engaging protrusion 41b is provided on the inner peripheral surface of the lock ring 41, and the engaging protrusion 41b is formed with an engaging groove 33d provided on the outer peripheral surface of the slide nut 33. Engaged. Since the engaging protrusion 41b and the engaging groove 33d are engaged, when the slide nut 33 rotates about the axis of the slide nut 33, the lock ring 41 and the slide nut 33 rotate integrally. ..

A tooth portion 34a constituting the lock mechanism 4 is formed on the upper end surface of the slide nut cover 34 in FIG. 6, and can be engaged with the tooth portion 41a of the lock ring 41 of the tooth portion 34a. As shown in FIG. 6, the case where the lock ring 41 is engaged with the tooth portion 34a is the second position of the lock ring 41. In this case, the lock ring 41 is centered on the axis of the lock ring 41. I can't rotate. Since the lock ring 41 cannot rotate, the slide nut 33 integrated with the lock ring 41 cannot rotate about the axis of the slide nut 33. Even if the operator tries to operate the handle 31, the slide nut 33 does not rotate, so that the operation rod 32 screwed to the female screw portion 33a of the slide nut 33 does not move up and down. Since the operation rod 32 does not move up and down, the valve body 22 connected to the operation rod 32 does not move up and down, and the manual valve 1 with the erroneous operation prevention cover does not open and close. ..

Further, when the lock ring 41 is in the second position and the handle 31 is to be rotated, the slide nut 33 cannot rotate, so that a rotational force of a predetermined value or more is applied to the handle 31. When a rotational force of a predetermined value or more is applied to the handle 31, the engaging portion 33b of the slide nut 33 expands the holding portion contact surface 351a of the clip 35, and the holding portions 351 and 351 are elastically deformed in a direction in which they are separated from each other. .. Since the holding portions 351 and 351 are elastically deformed in the direction in which they are separated from each other, the handle 31 and the clip 35 integrated with the handle 31 idle with respect to the slide nut 33, so that the handle 31 is provided with the handle 31. The generated rotational force is not transmitted to the slide nut 33, and the valve opening and closing operations of the manual valve 1 with the erroneous operation prevention cover are not performed.

On the other hand, FIG. 11 shows the first position of the lock ring 41. When the lock ring 41 is in the first position, the tooth portion 41a of the lock ring 41 and the tooth portion 34a of the slide nut cover 34 are disengaged, so that the operator operates the handle 31 to rotate the lock ring 41. When a force is applied, the slide nut 33 rotates to open and close the manual valve 1 with the erroneous operation prevention cover.

The diaphragm retainer 21 constituting the valve portion 2 and the body 23 are located below the slide nut cover 34, and the mounting plate 5 is arranged below the body 23. Then, as shown in FIG. 10, the bolt 50 is inserted into the insertion hole 34e of the slide nut cover 34, the insertion hole 21e of the diaphragm retainer 21, the insertion hole 23g of the body 23, and the insertion hole 5a of the mounting plate 5. Then, by tightening with the nut 51, the slide nut cover 34, the diaphragm retainer 21, the body 23, and the mounting plate 5 are integrated.

Next, the valve portion 2 will be described.
The valve portion 2 includes a body 23, a diaphragm retainer 21, and a valve body 22. Further, the material of the body 23 is made of resin, and a fluorine-based resin having acid resistance is particularly suitable.

The diaphragm retainer mounting end 23e is projected from the upper portion of the body 23, and a valve chamber 23b is formed on the inner surface of the diaphragm retainer mounting end 23e to communicate the inflow path 23c on the input side and the outflow path 23d on the output side. ing. The bottom surface of the valve chamber 23b is the valve seat 23a, the valve body 22 is arranged above the valve seat 23a, and the contact portion 22a of the valve body 22 contacts or separates from the valve seat 23a to control the fluid supply. ..
The valve body 22 has a diaphragm portion 22b having a curved shape that gently bulges upward, and the diaphragm portion 22b elastically deforms as the operation rod 32 moves up and down, causing the valve body 22 to move up and down.
Further, in the valve body 22, the press-fitting portion 22c provided on the outer peripheral portion is press-fitted into the press-fitting groove 23f of the body 23, and the upper end surface is positioned and fixed by the pressing surface 21a of the diaphragm pressing 21.

The diaphragm retainer 21 is engaged with the diaphragm retainer mounting end 23e of the body 23 by a concave groove 21b provided on the lower end surface.
Further, an O-ring 7 is arranged between the concave groove 21b and the inner peripheral surface of the diaphragm holding end 23e so that the permeated gas from the diaphragm portion 22b does not reach the bolt 50. This is because the permeated gas may corrode the bolt 50.

Pressing portions 211 and 211 are formed at two positions on the left and right sides of the lower end of the diaphragm retainer 21 in FIG. 6 so as to face each other, and as shown in FIG. The claw portion 211a is formed.
The distance between the inner surface of the claw portion 211a and the inner surface of the claw portion 211a facing each other is smaller than the outer diameter of the diaphragm retainer mounting end 23e, and when the diaphragm retainer 21 and the body 23 are engaged, the diaphragm is as shown in FIG. The presser foot mounting end 23e pushes the claw portion 211a outward, and the pressing portion 211 is elastically deformed.
The diaphragm retainer mounting end 23e is pressed by the reaction force generated by the elastic deformation of the pressing portion 211, and the diaphragm retainer 21 does not rattle in the rotational direction of the handle 31 with respect to the body 23.

The reason why the diaphragm retainer 21 prevents the operator from rattling in the direction in which the handle is rotated with respect to the body 23 is that the displacement of the diaphragm retainer 21 gives the operator the accuracy of valve closing and valve closing. This is to prevent giving anxiety that there may be an adverse effect.

More specifically, since the flange portion 33c of the slide nut 33 is held by the step portion 21d of the diaphragm retainer 21 and the step portion 34b of the slide nut cover 34, the slide nut 33 is rotated by the rotation operation of the handle 31. Then, due to the frictional force, the rotational force is also transmitted to the diaphragm retainer 21.
As described above, the slide nut cover 34, the diaphragm retainer 21, the body 23, and the mounting plate 5 are integrated by the bolt 50 and the nut 51, and the bolt 50 and the nut 51 are securely fastened. If this is done, the diaphragm retainer 21 will not rattle in the rotational direction even if the above rotational force is applied.
However, the temperature of the fluid used in the semiconductor manufacturing process is as high as about 100 ° C., and the manual valve 1 with the erroneous operation prevention cover is placed at a high temperature. Then, the temperature of the manual valve 1 with the erroneous operation prevention cover is lowered to room temperature so that it can be touched by hand during maintenance. By repeating the temperature cycle of high temperature and normal temperature, the members constituting the manual valve 1 with the erroneous operation prevention cover are repeatedly expanded and contracted, and while the expansion and contraction are repeated, the fastening force between the bolt 50 and the nut 51 is increased. It may decrease. When a rotational force is applied to the diaphragm retainer 21 as described above with the fastening force between the bolt 50 and the nut 51 reduced, the diaphragm is in the direction in which the rotational force is applied (the direction in which the operator rotates the handle). The presser foot 21 will be displaced, giving the operator a sense of insecurity.
Therefore, the pressing portion 211 of the diaphragm retainer 21 presses the diaphragm retainer mounting end 23e of the body 23 so that the diaphragm retainer 21 does not rattle in the rotation direction of the slide nut 33 with respect to the body 23. ..

Further, as shown in FIG. 6, the diaphragm retainer 21 has a through hole 21c in which the operation rod 32 is inserted, and is located between the inner peripheral surface of the through hole 21c and the outer peripheral surface of the operation rod 32. , The O-ring 6 is arranged so that the permeated gas does not reach the bolt 50 from the diaphragm portion 22b. This is because the permeated gas may corrode the bolt 50.

A mounting plate 5 is arranged at the lower end of the body 23, and the manual valve 1 with an erroneous operation prevention cover is installed in the semiconductor manufacturing apparatus via the mounting plate 5 and assembled to the fluid supply line via the joint 8. ..

Next, the erroneous operation prevention cover 10 will be described.
The erroneous operation prevention cover 10 includes a tubular cover member 101 whose one end is closed and the other end is open, and a detection member 102 for preventing the lock ring 41 from being forgotten to move to the second position.

When the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101 and are not exposed to the outside.
Since the handle 31 is not exposed to the outside, the user cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the user tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

The cover member 101 has a through hole 101a in the closed end surface (upper end surface in FIG. 6), and as shown in FIG. 1, a state in which the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover. Then, the indicator cover 36 projects from the through hole 101a. Therefore, even when the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the operator can adjust the valve opening degree with reference to the position of the upper end portion of the operation rod 32 that can be visually recognized through the indicator cover 36. It is possible to grasp.

Further, an engaging portion 101e that engages with the upper end square of the slide nut cover 34 when the cover member 101 is attached to the manual valve 1 with an erroneous operation prevention cover is provided on the square of the end surface of the cover member 101 on the opening side. ing. By engaging the engaging portion 101e with the slide nut cover 34 at the four corners, positioning is performed in the rotational direction about the central axis.

Further, a detection member insertion hole 101c for inserting the detection member 102 is provided on one of the four side surfaces of the cover member 101.
As shown in FIG. 7, the detection member 102 has a detection unit 102a extending into the internal space of the cover member 101 in a state of being attached to the cover member 101, and is formed in a substantially U-shape in a plan view. There is.

Then, the detection member 102 is movably held between the temporary fixing position and the mounting completion position in the detection member insertion hole 101c of the cover member 101, and the detection member 102 and the cover member 101 are integrated. There is.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

Further, assuming that the cover member 101 and the detection member 102 are not integrated, the operator brings the detection member 102 to the cover member 101 after mounting the cover member 101 on the manual valve 1 with the erroneous operation prevention cover. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the detection member 102.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve 1 with the erroneous operation prevention cover is small, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, especially if the worker is wearing gloves to prevent injury.

If the detection member 102 is movably held in the detection member insertion hole 101c of the cover member 101 between the temporarily fixed position and the mounting completion position, and the detection member 102 and the cover member 101 are integrated, the operator After attaching the cover member 101 to the manual valve 1 with the erroneous operation prevention cover, the detection member 102 may be moved by pushing it from the temporary fixing position to the mounting completion position. Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

3 and 8 show temporary fixing positions of the detection member 102. The detection unit 102a is located at a position where it does not interfere with the handle 31 when the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, and the locking projection 102c on the inner surface side of the tip of the detection unit 102a and the tip of the detection unit 102a. Since the detection member 102 is engaged with the detection member insertion hole 101c by the locking projection 102d on the outer surface side of the cover member 102, the detection member 102 is prevented from falling off from the cover member 101.

FIG. 7 shows the mounting completion position where the mounting of the detection member 102 is completed. By pushing the detection member 102 with a finger or the like, the operator can move the detection member 102 from the temporarily fixed position to the mounting complete position. As the detection member 102 is pushed in from the temporarily fixed position, the detection unit 102a moves in a straight path inside the hollow of the cover member 101.

Then, the detection unit 102a detects whether or not the lock ring 41 has been forgotten to move to the second position depending on whether or not the lock ring 41 is located on the straight path that moves inside the hollow of the cover member 101. It is said.
That is, after the operator finishes opening or closing the manual valve 1 with the erroneous operation prevention cover, he forgets to move the lock ring 41 to the second position, and the erroneous operation prevention cover is in the state where the lock ring 41 is in the first position. When the 10 is attached to the manual valve 1 with the erroneous operation prevention cover, as shown in FIG. 10, the detection member 102 and the lock ring 41 are substantially the same in the vertical direction in the drawing. That is, the lock ring 41 is on a straight path in which the detection unit 102a moves inside the hollow of the cover member 101, and in this state, the operator tries to push the lock ring 41 into the mounting completion position in order to mount the detection member 102. Then, the detection unit 102a interferes with the outer peripheral surface of the lock ring 41, and the detection member 102 cannot be attached to the cover member 101.

On the other hand, when the lock ring 41 is in the second position, the lock ring 41 retracts in the downward direction in FIG. 10 from the straight path in which the detection unit 102a moves inside the hollow of the cover member 101, so that the detection member When pushing the 102, the detection unit 102a and the lock ring 41 do not interfere with each other, and the operator can push the detection member 102 to the mounting complete position.

Therefore, the operator determines whether the lock ring 41 is in the first position depending on whether or not the detection member 102 can be attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover. It is possible to know if it is in two positions. If the lock ring 41 is found to be in the first position, the cover member 101 is removed from the manual valve 1 with the erroneous operation prevention cover, the lock ring 41 is moved to the second position, and then the cover member 101 is manually moved with the erroneous operation prevention cover. It suffices to be attached to the valve 1, and the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position.
Therefore, when an operator tries to operate a manual valve 1 with an erroneous operation prevention cover or other fluid control equipment in order to control fluid in a certain line and touches the manual valve 1 with an erroneous operation prevention cover on the adjacent line, the relevant operation is concerned. Since the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line has not been moved to the second position, the possibility that the valve opening degree is unintentionally changed is eliminated.

Further, if only the cover member 101 is simply attached to the manual valve 1 with the erroneous operation prevention cover to prevent erroneous operation, the handle 31 and the lock ring 41 cannot be visually recognized from the outside. Therefore, is the lock mechanism 4 effective after the work? In order to confirm whether or not the cover member 101 is removed, the state of the lock ring 41 must be confirmed, and there is a concern that the work efficiency may be deteriorated. However, by providing the detection member 102 that can be attached to the cover member 101 only when the lock mechanism 4 is enabled as described above, the detection member 102 is attached to the cover member 101 that is attached to the manual valve 1 with the erroneous operation prevention cover. If is attached, it can be determined at a glance that the lock mechanism 4 is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism 4 is effective after the work, and the work efficiency is not deteriorated.

When the detection member 102 is completely attached to the cover member 101, the detection unit 102a is positioned between the handle 31 and the lock ring 41 as shown in FIG.
Since the detection unit 102a is located directly below the retaining unit 312c, a force is applied to the erroneous operation prevention cover 10 in the direction in which the erroneous operation prevention cover 10 comes out of the manual valve 1 with the erroneous operation prevention cover (upward in the figure). When it is added, the detection member 102 comes into contact with the retaining portion 312c, and the erroneous operation prevention cover 10 is restricted from moving in the direction of coming out of the manual valve 1 with the erroneous operation prevention cover. Therefore, it is possible to prevent the erroneous operation prevention cover 10 from falling off from the manual valve 1 with the erroneous operation prevention cover.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

Furthermore, the detection member 102 has a lock portion 102b so as to stand up at a substantially right angle to the side surface of the cover member 101 in a state of being attached to the cover member 101, and the lock portion 102b is for inserting the padlock 24. A locking hole 102e is provided. The cover member 101 has a lock portion 101b so as to face directly below the lock portion 102b in a state where the detection member 102 is attached to the cover member 101, and the lock portion 101b inserts the padlock 24. The locking hole 101d is provided.
The locking holes 101d and the locking holes 102e are arranged at concentric positions with the detection member 102 mounted on the cover member 101, and form one locking hole penetrating the lock portion 101b and the lock portion 102b. To do. By inserting the padlock 24 into the locking hole, the detection member 102 can be fixed to the cover member 101 (see FIG. 13).

Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

Next, the operation of the manual valve 1 with the erroneous operation prevention cover will be described.
First, the operation of the operation rod 32 will be described.
When trying to open or close the valve, first remove the padlock 24 of the erroneous operation prevention cover 10, move the detection member 102 from the mounting complete position to the temporary fixing position, and move the erroneous operation prevention cover 10 from the manual valve 1 with the erroneous operation prevention cover. Remove. Then, the lock ring 41 is moved from the second position to the first position so that the slide nut 33 can rotate.

The handle 31 holds the clip 35 by the first locking portion 311 and the second locking portion 312, and the handle 31 and the clip 35 rotate integrally. Further, since the sandwiching portion 351 of the clip 35 sandwiches the engaging portion 33b of the slide nut 33, when the handle 31 is rotated about the central axis, a rotational force is applied to the slide nut 33 via the clip 35. It is transmitted, and the handle 31, the clip 35, and the slide nut 33 rotate together.
Since the slide nut 33 is rotatably held from the vertical direction of the flange portion 33c by the stepped portion 34b of the slide nut cover 34 and the stepped portion 21d of the diaphragm retainer 21, the slide nut 33 moves in the vertical direction. Is deterred. Further, since the operation rod 32 is screwed into the slide nut 33 so as not to rotate, the slide nut 33 is rotated by operating the handle 31, so that the female screw portion 33a of the slide nut 33 and the operation rod 32 The operating rod 32 can be screwed in the vertical direction of FIG. 6 relative to the slide nut 33 by screw feeding with the male screw portion 32a.

Next, a case of changing from the valve closed state to the valve open state will be described.
In the manual valve 1 with the erroneous operation prevention cover of the present embodiment, the female threaded portion 33a of the slide nut 33 and the male threaded portion 32a of the operating rod 32 are both left-handed, and when the handle 31 is rotated clockwise, the operating rod When the 32 moves to the valve closing side and is rotated counterclockwise, the operating rod 32 moves to the valve opening side.
To open the valve, when the handle 31 is rotated in one direction (counterclockwise), the slide nut 33 and the handle 31 both rotate in the same direction, and the rotation of the slide nut 33 causes the operation rod 32 to open the valve. Move to the side (upper in FIG. 6). As a result, the valve body 22 connected to the operation rod 32 is separated from the valve seat 23a and opened. At this time, the operator grasps the valve opening degree while referring to the upper end portion of the operation rod 32 that can be visually recognized through the indicator cover 36, and rotates the handle 31.

Next, a case where the manual valve 1 with the erroneous operation prevention cover is changed from the valve open state to the valve closed state will be described.
To close the valve, rotate the handle 31 in the other direction (clockwise) with a torque within a predetermined value, and the slide nut 33 and the handle 31 both rotate in the same direction. , The operation rod 32 moves to the valve closing side (lower in FIG. 6). Then, when the valve body 22 connected to the operation rod 32 comes into contact with the valve seat 23a, the manual valve 1 with the erroneous operation prevention cover is closed.

After the valve body 22 comes into contact with the valve seat 23a, when the handle 31 is further rotated, the operation rod 32 comes into contact with the valve body 22 and the valve seat 23a, and the valve closed side of the contact position. It cannot move to (lower in the middle of FIG. 6), and the torque applied to the handle 31 becomes larger than a predetermined value.
When the torque applied to the handle 31 becomes larger than a predetermined value, the engaging portion 33b of the slide nut 33 expands the holding portion contact surface 351a, and the holding portions 351 and 351 are elastically deformed in the direction of being separated from each other and sandwiched. The holding portions 312a and 312a that sandwich the portions 351 and 351 are also elastically deformed in the direction of being separated from each other. When the holding portions 351 and 351 and the pressing portions 312a and 312a are elastically deformed in the direction in which they are separated from each other, the handle 31 and the clip 35 integrated with the handle 31 idle with respect to the slide nut 33. ..
Therefore, even if the operator continues to rotate the handle 31 even after the valve body 22 and the valve seat 23a come into contact with each other, the rotation of the handle 31 is not transmitted to the slide nut 33 and the operation rod 32 is closed. Since the valve body 22 does not screw in the valve direction, the valve body 22 does not excessively press the valve seat 23a, and damage to the valve seat 23a due to the pressing of the valve body 22 can be prevented.

After completing the valve opening or closing operation, the lock ring 41 is moved from the first position to the second position.
By moving the lock ring 41 to the second position, the tooth portion 41a of the lock ring 41 and the tooth portion 34a of the slide nut cover 34 are engaged with each other.
The lock ring 41 is integrated with the slide nut 33 by engaging the engaging projection 41b on the inner peripheral surface of the lock ring 41 and the engaging groove 33d on the outer peripheral surface of the slide nut 33.
When the tooth portion 41a of the lock ring 41 and the tooth portion 34a of the slide nut cover 34 mesh with each other, the slide nut 33 integrated with the lock ring 41 becomes non-rotatable. Therefore, even if the handle 31 is operated, the operation rod 32 does not screw in the valve opening and closing directions, and it is possible to prevent the operator from unintentionally changing the valve opening degree. ..

Further, if the handle 31 is to be rotated while the lock ring 41 is moved to the second position, the slide nut 33 cannot rotate, so that the torque applied to the handle 31 becomes larger than a predetermined value.
When the torque applied to the handle 31 becomes larger than a predetermined value, the engaging portion 33b of the slide nut 33 expands the holding portion contact surface 351a, and the holding portions 351 and 351 are elastically deformed in the direction of being separated from each other and sandwiched. The holding portions 312a and 312a that sandwich the portions 351 and 351 are also elastically deformed in the direction of being separated from each other. When the holding portions 351 and 351 and the pressing portions 312a and 312a are elastically deformed in the direction in which they are separated from each other, the handle 31 and the clip 35 integrated with the handle 31 idle with respect to the slide nut 33. ..
Therefore, even if the operator tries to rotate the handle 31 while the lock ring 41 is moved to the second position, the rotational force applied to the handle 31 is not transmitted to the slide nut 33, and the manual operation with the erroneous operation prevention cover is provided. The valve 1 does not open and close.

After moving the lock ring 41 to the second position, the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover.
The erroneous operation prevention cover 10 in a state where the detection member 102 is temporarily fixed in the detection member insertion hole 101c of the cover member 101 and the detection member 102 and the cover member 101 are integrated (see FIG. 3) is provided with an erroneous operation prevention cover. Cover from above the manual valve 1.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

Further, assuming that the cover member 101 and the detection member 102 are not integrated, the operator brings the detection member 102 to the cover member 101 after mounting the cover member 101 on the manual valve 1 with the erroneous operation prevention cover. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the insertion piece.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve is one small size, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, such as when a worker is wearing gloves to prevent injury.

If the detection member 102 is held in the detection member insertion hole 101c of the cover member 101 and the detection member 102 and the cover member 101 are integrated, the operator attaches the cover member 101 to the manual valve 1 with the erroneous operation prevention cover. After that, it is only necessary to push the detection member 102 from the temporarily fixed position to the mounting completion position and move it.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

In this embodiment, as shown in FIG. 4, the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover in the direction in which the detection member 102 can be seen in the front as shown in FIG. It is also possible to mount the cover member 101 so that the detection member insertion hole 101c is assigned to the back surface side, and mount the detection member 102.
The cover member 101 has an engaging portion 101e projecting from the four corners of the end face on the opening side of the substantially square toward the slide nut cover 34, and the four corners of the upper end of the substantially square of the slide nut cover 34 have an engaging portion 101e. An engaged portion 34d that engages with the engaging portion 101e is provided. Then, the engaging portion 101e engages with the slide nut cover 34 so as to cover the outer peripheral surface of the engaged portion 34d.
Since the engaging portion 101e and the engaged portion 34d are provided at four locations at equal intervals in the circumferential direction about the central axis of the operation rod, the engaging portion 101e and the engaged portion 34d By engaging the cover member 101, the cover member 101 rotates about every 90 degrees around the central axis of the operation rod 32, and can be positioned with respect to the manual valve 1 with the erroneous operation prevention cover.
Therefore, even if the erroneous operation prevention cover 10 is rotated by 90 degrees about the central axis of the operation rod with respect to the manual valve 1 with the erroneous operation prevention cover, it can be attached to and engaged with the manual valve 1 with the erroneous operation prevention cover. Is. Workability is improved as compared with the case where it can be mounted in only one direction.
The engaging portions 101e may be provided at two locations with the central axis of the operating rod 32 symmetrical.

Further, since the lock ring 41 is annular, the distance from the center of the lock ring 41 to an arbitrary point on the outer peripheral surface where the detection unit 102a interferes is always constant, and the position where the detection unit 102a interferes with the outer peripheral surface is always constant. As long as it is from a direction orthogonal to the central axis of the lock ring 41, it is constant regardless of the angle at which the detection member 102 is mounted. Therefore, when the lock ring 41 is in the first position, when the cover member 101 is rotated by 90 degrees as described above, that is, the front side, the right side side, and the back side of the manual valve 1 with the erroneous operation prevention cover, When the detection member 102 is mounted from any direction on the left side surface, the detection member 102 cannot be mounted at a fixed position. Therefore, the position where the detection member 102 cannot be mounted varies depending on the mounting angle. Misidentification can be prevented.
On the other hand, when the lock ring 41 is in the second position, the detection member 102 on which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32, so that the cover member is as described above. When the 101 is rotated by 90 degrees, that is, regardless of the direction of the front side, the right side surface side, the back surface side, or the left side surface side of the manual valve 1 with the erroneous operation prevention cover, the detection member 102 and the detection member 102 The detection member 102 can be completely mounted without interfering with the lock ring 41.
Therefore, the operator can freely select the direction in which the detection member 102 is mounted according to the work space of the semiconductor manufacturing line in which the manual valve 1 with the erroneous operation prevention cover is actually arranged.

Further, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the engaging portions 101e provided at the four corners of the opening side end surface of the cover member 101 engage with the upper end square of the slide nut cover 34. , The cover member 101 is positioned in the rotation direction about the central axis.

After the erroneous operation prevention cover 10 is put on the manual valve 1 with the erroneous operation prevention cover, the erroneous operation prevention cover 10 is completed by moving the detection member 102 from the temporary fixing position to the mounting completion position.
When the detection member 102 is moved to the mounting complete position, the detection unit 102a is extended into the cover member 101, and the detection unit 102a is positioned directly below the second locking portion 312 of the handle 31.
Since the detection unit 102a is located directly below the retaining unit 312c, a force is applied to the erroneous operation prevention cover 10 in the direction in which the erroneous operation prevention cover 10 comes out of the manual valve 1 with the erroneous operation prevention cover (upward in the figure). When it is added, the detection member 102 comes into contact with the retaining portion 312c, and the erroneous operation prevention cover 10 is restricted from moving in the direction of coming out of the manual valve 1 with the erroneous operation prevention cover. Therefore, it is possible to prevent the erroneous operation prevention cover 10 from falling off from the manual valve 1 with the erroneous operation prevention cover.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

When the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, so that the handle 31 and the lock ring 41 are not exposed to the outside.
Since the handle 31 is not exposed to the outside, the operator cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the operator tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

Next, after the operator completes the valve opening or closing operation, he forgets to move the lock ring 41 to the second position, and with the lock ring 41 in the first position, the erroneous operation prevention cover 10 is manually valved with the erroneous operation prevention cover. The case of trying to attach to 1 will be described.
From above the manual valve 1 with the erroneous operation prevention cover, the detection member 102 covers the detection member insertion hole 101c of the cover member 101 with the erroneous operation prevention cover 10 held at the temporarily fixed position.
Even if the detection member 102 is moved from the temporarily fixed position to the mounting complete position after the erroneous operation prevention cover 10 is put on the manual valve 1 with the erroneous operation prevention cover, the detection member 102 and the lock ring 41 still have the detection member 102 and the lock ring 41 as shown in FIG. Since the positions in the vertical direction in the figure are substantially the same, the lock ring 41 is located on a straight path in which the detection unit 102a moves inside the hollow of the cover member 101, and the detection unit 102a is the outer circumference of the lock ring 41. The detection member 102 cannot be attached to the cover member 101 because it interferes with the surface.
In this case, the operator temporarily removes the erroneous operation prevention cover 10 from the manual valve 1 with the erroneous operation prevention cover, moves the lock ring 41 to the second position, and then changes the erroneous operation prevention cover 10 to the manual valve 1 with the erroneous operation prevention cover again. The cover and the detection member 102 are moved from the temporarily fixed position to the mounting complete position.

As described above, the operator can know whether the lock ring 41 is in the first position or the second position depending on whether or not the detection member 102 can be attached to the cover member 101. If the detection member 102 cannot be attached to the cover member 101 and the lock ring 41 is found to be in the first position, the erroneous operation prevention cover 10 is removed from the manual valve 1 with the erroneous operation prevention cover, and the operation unit is moved to the second position. Therefore, the erroneous operation prevention cover 10 may be attached to the manual valve 1 with the erroneous operation prevention cover again, and the manual valve 1 with the erroneous operation prevention cover will not be left in a state where the lock ring 41 is not moved to the second position.
Therefore, when an operator tries to operate a manual valve 1 with an erroneous operation prevention cover or other fluid control equipment in order to control fluid in a certain line and touches the manual valve 1 with an erroneous operation prevention cover on the adjacent line, the relevant operation is concerned. Since the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line has not been moved to the second position, the possibility that the valve opening degree is unintentionally changed is eliminated.

Further, if only the cover member 101 is simply attached to the manual valve 1 with the erroneous operation prevention cover to prevent erroneous operation, the handle 31 and the lock ring 41 cannot be visually recognized from the outside. Therefore, is the lock mechanism 4 effective after the work? In order to confirm whether or not the cover member 101 is removed, the state of the lock ring 41 must be confirmed, and there is a concern that the work efficiency may be deteriorated. However, by providing the detection member 102 that can be attached to the cover member 101 only when the lock mechanism 4 is enabled as described above, the detection member 102 is attached to the cover member 101 that is attached to the manual valve 1 with the erroneous operation prevention cover. If is attached, it can be determined at a glance that the lock mechanism 4 is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism 4 is effective after the work, and the work efficiency is not deteriorated.

When the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101 and are not exposed to the outside.
Since the handle 31 is not exposed to the outside, the user cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the user tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

After the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the detection member 102 is fixed to the cover member 101 by the padlock 24 (see FIG. 13).
The detection member 102 has a lock portion 102b so as to stand up at a substantially right angle to the side surface of the cover member 101 in a state of being attached to the cover member 101, and the lock portion 102b has a locking hole for inserting the padlock 24. It includes 102e. The cover member 101 has a lock portion 101b so as to face directly below the lock portion 102b in a state where the detection member 102 is attached to the cover member 101, and the lock portion 101b inserts the padlock 24. The locking hole 101d is provided.
The locking holes 101d and the locking holes 102e are arranged at concentric positions with the detection member 102 mounted on the cover member 101, and form one locking hole penetrating the lock portion 101b and the lock portion 102b. To do. By inserting the padlock 24 into the locking hole, the detection member 102 can be fixed to the cover member 101.

Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

As described above, according to the manual valve 1 with the erroneous operation prevention cover of the present embodiment,
(1) Locked in a manual valve 1 with an erroneous operation prevention cover provided with a manual mechanism 3 for bringing the valve body 22 into contact with or separated from the valve seat 23a by rotating the handle 31 and a lock mechanism 4 for limiting the operation of the manual mechanism 3. The mechanism 4 includes a lock ring 41 that can move between a first position for releasing the lock mechanism 4 and a second position for enabling the lock mechanism 4, and the manual valve 1 with an erroneous operation prevention cover is erroneously operated. It has a hollow cover member 101 to be mounted on the manual valve 1 with a prevention cover, the cover member 101 includes a detection member 102 having a detection unit 102a, and when the detection member 102 is mounted on the cover member 101. The detection member 102 is held in a state where the detection unit 102a is movably held inside the hollow of the cover member 101 with a constant course, and the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover. The handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, and when the lock ring 41 is in the first position, the lock ring 41 is located on the path of the detection unit 102a and the detection member 102. Can not be completely attached to the cover member 101, and when the lock ring 41 is in the second position, the lock ring 41 can be retracted from the path of the detection unit 102a and the detection member 102 can be completely attached to the cover member 101. Therefore, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover and the detection member 102 is to be attached to the cover member 101, the operator places the lock ring 41 in the second position. When the lock ring 41 is in the first position, such as when the lock ring 41 is forgotten to be moved to, the lock ring 41 is located on the path of the detection unit 102a, so that the lock ring 41 hinders the extension of the detection unit 102a. , The operator cannot attach the detection member 102 to the cover member 101.
On the other hand, if the lock ring 41 is moved to the second position, the lock ring 41 is retracted from the path of the detection unit 102a, so that the detection unit 102a can move to the extension completion point, and the operator can move. The detection member 102 can be attached to the cover member 101.

Therefore, the operator determines whether the lock ring 41 is in the first position depending on whether or not the detection member 102 can be attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover. It is possible to know if it is in two positions. If the lock ring 41 is found to be in the first position, the cover member 101 is removed from the manual valve 1 with the erroneous operation prevention cover, the lock ring 41 is moved to the second position, and then the cover member 101 is manually moved with the erroneous operation prevention cover. It suffices to be attached to the valve 1, and the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position.
Since the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position, the manual valve 1 with the erroneous operation prevention cover or the manual valve 1 with the erroneous operation prevention cover is used to control the fluid of a certain line by the operator. When trying to operate other fluid control equipment and touching the manual valve 1 with the erroneous operation prevention cover on the adjacent line, the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line is moved to the second position. The risk of unintentionally opening or closing the valve because it was not done is eliminated.

Further, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, so that the handle 31 and the lock ring 41 are not exposed to the outside. ..
Since the handle 31 is not exposed to the outside, the operator cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the operator tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

(2) In the manual valve 1 with the erroneous operation prevention cover according to (1), the cover member 101 is provided with a detection member insertion hole 101c into which the detection member 102 is inserted, and the detection member 102 is provided in the detection member insertion hole 101c. The temporary fixing position where the detection member 102 is inserted and the detection member 102 protrudes to the outside of the cover member 101 and the mounting completion position where the detection member 102 is housed inside the cover member 101 are movably held. Therefore, the detection member 102 is integrated into the detection member insertion hole 101c of the cover member 101 so as to be movable between the temporarily fixed position and the mounting completion position, and the erroneous operation prevention cover 10 is erroneously operated. The detection member 102 does not fall off from the cover member 101 even when it is carried for mounting on the manual valve 1 with a prevention cover.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

Further, assuming that the cover member 101 and the detection member 102 are not integrated, after the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the operator carries the detection member 102 to the cover member 101. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the detection member 102.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve is small, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, especially if the worker is wearing gloves to prevent injury.

If the detection member 102 is movably held in the detection member insertion hole 101c of the cover member 101 between the temporarily fixed position and the mounting completion position, the operator can move the cover member 101 to the manual valve 1 with an erroneous operation prevention cover. It is only necessary to move the detection member 102 by pushing it from the temporary fixing position to the mounting completion position after mounting the detection member 102.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

(3) In the manual valve 1 with the erroneous operation prevention cover according to (1) or (2), the manual mechanism 3 includes an operation rod 32 to which the valve body 22 is connected to one end, and is located on the other end side of the operation rod 32. The handle 31 is arranged, the manual mechanism 3 is provided with a retaining portion 312c between the handle 31 and the valve body 22, and the cover member 101 is on the side where the operation rod 32 of the handle 31 extends. The manual valve 1 with the erroneous operation prevention cover is mounted from the opposite direction, the detection member 102 is mounted on the cover member 101 from the direction orthogonal to the longitudinal direction of the operation rod 32, and the cover member 101 is equipped with the erroneous operation prevention cover. With the detection member 102 mounted on the cover member 101 and mounted on the manual valve 1, the detection unit 102a is positioned adjacent to the end surface of the retaining portion 312c on the valve body side, and is a cover member with respect to the cover member 101. When a force is applied in a direction opposite to the mounting direction of the 101, the detection unit 102a abuts on the end surface of the retaining portion 312c on the valve body side and moves in the direction opposite to the mounting direction of the cover member 101. Because it is characterized by limiting
After the operator moves the operation unit to the second position, the cover member is attached to the manual valve from the direction opposite to the side where the operation rod of the handle extends, and the insertion piece is orthogonal to the movement direction of the operation unit. By attaching the insertion piece to the cover member from this direction, the detection portion of the insertion piece is positioned adjacent to the valve body side end surface of the retaining portion that the manual mechanism has between the handle and the valve body. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off the manual valve.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

(4) In the manual valve 1 with an erroneous operation prevention cover according to any one of (1) to (3), the detection member 102 has an end surface opposite to the end surface on the side of mounting the detection member 102 on the cover member 101. The cover member 101 is provided with the lock portion 102b, and the cover member 101 is provided with the lock portion 101b located opposite to the lock portion 102b with the detection member 102 mounted on the cover member 101. With the detection member 102 mounted on the cover member 101, the locking holes 101d and 102e penetrating the lock portions 101b and 102b are formed, and the manual valve 1 with the erroneous operation prevention cover has the locking holes 101d. Since the detection member 102 is provided with the lock portion 102b and the cover member 101 is provided with the lock portion 101b because the Nanjing lock 24 to be inserted through the 102e is provided, the locking holes 101d, Since the 102e is provided, the detection member 102 can be fixed in a state of being attached to the cover member 101 by inserting a lock member such as the Nanjing lock 24 into the locking holes 101d and 102e.
Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

(5) In the manual valve 1 with the erroneous operation prevention cover according to (1) to (4), the manual mechanism 3 includes an operation rod 32 to which the valve body 22 is connected to one end, and is located on the other end side of the operation rod 32. The handle 31 is arranged, the lock ring 41 has a ring shape, and is arranged coaxially with the operation rod 32 on the side where the operation rod 32 of the handle 31 extends, along the longitudinal direction of the operation rod 32. The detection member 102 is mounted on the cover member 101 from a direction orthogonal to the central axis of the operation rod 32, and the cover member 101 is erroneously operated. When the lock ring 41 is in the first position in the state of being mounted on the manual valve 1 with the prevention cover, the outer peripheral surface of the lock ring 41 interferes with the detection unit 102a, and the detection member 102 is mounted on the cover member 101. When it cannot be completed and the lock ring 41 is in the second position, the detection member 102 to which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32 for detection. Since the member 102 can be completely attached to the cover member 101, the detection member 102 can be attached from any angle as long as it is from a direction orthogonal to the central axis of the operation rod 32 and the lock ring 41. , It is possible to surely prevent forgetting to move the lock ring 41 to the second position.

That is, since the lock ring 41 is annular, the distance from the center of the lock ring 41 to an arbitrary point on the outer peripheral surface where the detection unit 102a interferes is always constant, and the position where the detection unit 102a interferes with the outer peripheral surface is fixed. As long as it is from a direction orthogonal to the central axis of the lock ring 41, it is constant regardless of the angle at which the detection member 102 is mounted. Therefore, when the lock ring 41 is in the first position, the detection member 102 moves at a fixed position regardless of the angle from which the detection member 102 is mounted, as long as it is from a direction orthogonal to the central axis of the lock ring 41. Is hindered, so that it is possible to prevent misidentification of whether or not the detection member 102 can be mounted due to a variation in the position where movement is hindered depending on the mounting angle.
On the other hand, when the lock ring 41 is in the second position, the detection member 102 on which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32, so that the central axis of the lock ring 41 is retracted. Regardless of the angle from which the detection member 102 is mounted, the detection member 102 can be mounted without the detection member 102 and the lock ring 41 interfering with each other as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the detection member 102 is mounted according to the work space of the semiconductor manufacturing line in which the manual valve 1 with the erroneous operation prevention cover is actually arranged.

(6) In the manual valve 1 with the erroneous operation prevention cover according to any one of (1) to (5), the cover member 101 has an erroneous operation prevention cover on the end surface on the mounting side with the manual valve 1 with the erroneous operation prevention cover. The manual valve 1 with an erroneous operation prevention cover is provided with an engaged portion 34d that engages with the engaging portion 101e, and the engaging portion 101e is provided. By engaging the engaged portion 34d, the cover member 101 rotates about every 90 degrees around the central axis of the operation rod 32, and is positioned with respect to the manual valve 1 with the erroneous operation prevention cover. Since it is possible, even if the erroneous operation prevention cover 10 is rotated by 90 degrees about the central axis of the operation rod 32 with respect to the manual valve 1 with the erroneous operation prevention cover, the manual valve 1 with the erroneous operation prevention cover 1 It can be attached to and engaged with. Workability is improved as compared with the case where it can be mounted in only one direction.

(7) The erroneous operation prevention cover 10 attached to the manual valve 1 with the erroneous operation prevention cover according to any one of (1) to (6), comprising the cover member 101 and the detection member 102. Therefore, when the detection member 102 is attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover, the operator forgets to move the lock ring 41 to the second position. When the lock ring 41 is in the first position, for example, the lock ring 41 is located on the path of the detection unit 102a, so that the lock ring 41 hinders the movement of the detection unit 102a, and the operator The detection member 102 cannot be attached to the cover member 101.
On the other hand, if the lock ring 41 is moved to the second position, the lock ring 41 is retracted from the path of the detection unit 102a, so that the detection unit 102a can move to the extension completion point, and the operator can move. The detection member 102 can be attached to the cover member 101.

Therefore, the operator determines whether the lock ring 41 is in the first position depending on whether or not the detection member 102 can be attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover. It is possible to know if it is in two positions. If the lock ring 41 is found to be in the first position, the cover member 101 is removed from the manual valve 1 with the erroneous operation prevention cover, the lock ring 41 is moved to the second position, and then the cover member 101 is manually moved with the erroneous operation prevention cover. It suffices to be attached to the valve 1, and the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position.
Since the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position, the manual valve 1 with the erroneous operation prevention cover or the manual valve 1 with the erroneous operation prevention cover is used to control the fluid of a certain line by the operator. When trying to operate other fluid control equipment and touching the manual valve 1 with the erroneous operation prevention cover on the adjacent line, the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line is moved to the second position. The risk of unintentionally opening or closing the valve because it was not done is eliminated.

Further, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, so that the handle 31 and the lock ring 41 are not exposed to the outside. ..
Since the handle 31 is not exposed to the outside, the operator cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the operator tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

The erroneous operation prevention cover 10 is integrated so that the detection member 102 can move between the temporarily fixed position and the mounting completion position in the detection member insertion hole 101c of the cover member 101, and the erroneous operation prevention cover 10 is erroneously operated. The detection member 102 does not fall off from the cover member 101 even when it is carried for mounting on the manual valve 1 with a prevention cover.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

Further, assuming that the cover member 101 and the detection member 102 are not integrated, after the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the operator carries the detection member 102 to the cover member 101. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the detection member 102.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve is small, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, especially if the worker is wearing gloves to prevent injury.

If the detection member 102 is movably held in the detection member insertion hole 101c of the cover member 101 between the temporarily fixed position and the mounting completion position, the operator can move the cover member 101 to the manual valve 1 with an erroneous operation prevention cover. It is only necessary to move the detection member 102 by pushing it from the temporary fixing position to the mounting completion position after mounting the detection member 102.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

For the erroneous operation prevention cover, after the operator moves the operation part to the second position, the cover member is attached to the manual valve from the direction opposite to the side where the operation rod of the handle extends, and the insertion piece is attached to the operation part. By attaching it to the cover member from the direction orthogonal to the moving direction of, the detection part of the insertion piece is positioned adjacent to the valve body side end surface of the retaining part that the manual mechanism has between the handle and the valve body. Will be. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off the manual valve.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

The erroneous operation prevention cover is like a padlock 24 because the detection member 102 is provided with the lock portion 102b, the cover member 101 is provided with the lock portion 101b, and the locking holes 101d and 102e are provided so as to penetrate the lock portions 101b and 102b. By inserting the locking member into the locking holes 101d and 102e, the detection member 102 can be fixed in a state of being mounted on the cover member 101.
Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

The erroneous operation prevention cover ensures that the lock ring 41 is forgotten to move to the second position regardless of the angle from which the detection member 102 is attached, as long as it is from a direction orthogonal to the central axis of the operation rod 32 and the lock ring 41. Can be prevented.

That is, since the lock ring 41 is annular, the distance from the center of the lock ring 41 to an arbitrary point on the outer peripheral surface where the detection unit 102a interferes is always constant, and the position where the detection unit 102a interferes with the outer peripheral surface is fixed. As long as it is from a direction orthogonal to the central axis of the lock ring 41, it is constant regardless of the angle at which the detection member 102 is mounted. Therefore, when the lock ring 41 is in the first position, the detection member 102 moves at a fixed position regardless of the angle from which the detection member 102 is mounted, as long as it is from a direction orthogonal to the central axis of the lock ring 41. Is hindered, so that it is possible to prevent misidentification of whether or not the detection member 102 can be mounted due to a variation in the position where movement is hindered depending on the mounting angle.
On the other hand, when the lock ring 41 is in the second position, the detection member 102 on which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32, so that the central axis of the lock ring 41 is retracted. Regardless of the angle from which the detection member 102 is mounted, the detection member 102 can be mounted without the detection member 102 and the lock ring 41 interfering with each other as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the detection member 102 is mounted according to the work space of the semiconductor manufacturing line in which the manual valve 1 with the erroneous operation prevention cover is actually arranged.

The erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover even if the erroneous operation prevention cover 10 is rotated by 90 degrees about the central axis of the operation rod 32 with respect to the manual valve 1 with the erroneous operation prevention cover. It is possible to match. Workability is improved as compared with the case where it can be mounted in only one direction.

It should be noted that the above embodiment is merely an example and does not limit the present invention in any way. Therefore, as a matter of course, the present invention can be improved and modified in various ways without departing from the gist thereof.
For example, in the above embodiment, the padlock 24 is proposed as the lock member, but the detection member 102 can be fixed in the state of being attached to the cover member 101 by inserting the binding band into the locking holes 101d and 102e. Can be done.

1 Manual valve with erroneous operation prevention cover 3 Manual mechanism 4 Lock mechanism 22 Valve body 23 Body 23a Valve seat 24 Padlock (example of lock member)
32 Operation rod 41 Lock ring (Example of operation unit)
101 Cover member 101c Detection member insertion hole 101b Lock part 101d Locking hole 102 Detection member (example of insertion piece)
102a Detection unit 102b Lock unit 102e Locking hole

Claims (7)

In a manual valve with an erroneous operation prevention cover provided with a manual mechanism that abuts or separates the valve body from the valve seat inside the valve body by rotating the handle and a lock mechanism that limits the operation of the manual mechanism.
The lock mechanism includes an operation unit that can move between a first position for releasing the lock mechanism and a second position for enabling the lock mechanism.
The manual valve with an erroneous operation prevention cover includes a hollow cover member to be attached to the manual valve with an erroneous operation prevention cover.
The cover member includes an insertion piece having a detection unit.
When the insertion piece is attached to the cover member, the insertion piece is held so that the detection unit can move with a constant path inside the hollow of the cover member.
When the cover member is mounted on the manual valve with the erroneous operation prevention cover, the handle and the operation portion are located inside the hollow of the cover member, and the operation portion is in the first position. When the operation unit is located on the path and the insertion piece cannot be completely attached to the cover member, and the operation unit is in the second position, the operation unit retracts from the path. Therefore, the insertion piece can be completely attached to the cover member.
A manual valve with an erroneous operation prevention cover. In the manual valve with an erroneous operation prevention cover according to claim 1,
The cover member is provided with an insertion hole into which the insertion piece is inserted.
The insertion piece is inserted into the insertion hole, and the temporary fixing position where the insertion piece protrudes to the outside of the cover member and the mounting completion position where the insertion piece is housed inside the cover member. Being held movable between,
A manual valve with an erroneous operation prevention cover. In the manual valve with the erroneous operation prevention cover according to claim 1 or 2.
The manual mechanism includes an operation rod to which the valve body is connected to one end, and the handle is arranged on the other end side of the operation rod.
The manual mechanism is provided with a retaining portion between the handle and the valve body.
The cover member shall be attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the extending side of the operation rod of the handle.
The insertion piece shall be attached to the cover member from a direction orthogonal to the longitudinal direction of the operation rod.
With the cover member attached to the manual valve with the erroneous operation prevention cover and the insertion piece attached to the cover member, the detection unit is adjacent to the end surface of the retaining portion on the valve body side. When the cover member is positioned and a force is applied to the cover member in a direction opposite to the mounting direction of the cover member, the detection unit abuts on the end face of the retaining portion and the mounting direction of the cover member. Restricting movement in the opposite direction,
A manual valve with an erroneous operation prevention cover. In the manual valve with an erroneous operation prevention cover according to any one of claims 1 to 3.
The insertion piece is provided with a first lock portion on an end surface of the insertion piece opposite to the end surface of the insertion piece on the side of mounting the cover member on the cover member.
The cover member includes a second lock portion located opposite to the first lock portion with the insertion piece attached to the cover member.
The first lock portion and the second lock portion have locking holes penetrating the first lock portion and the second lock portion in a state where the insertion piece is attached to the cover member. Being formed,
The manual valve with an erroneous operation prevention cover is provided with a lock member to be inserted into the locking hole.
A manual valve with an erroneous operation prevention cover. In the manual valve with an erroneous operation prevention cover according to any one of claims 1 to 4.
The manual mechanism includes an operation rod to which the valve body is connected to one end, and the handle is arranged on the other end side of the operation rod.
The operating portion has a ring shape and is arranged coaxially with the operating rod on the side where the operating rod of the handle extends, and the first position and the operating portion are arranged along the longitudinal direction of the operating rod. Moving between the second position,
The insertion piece shall be attached to the cover member from a direction orthogonal to the central axis of the operation rod.
When the operation unit is in the first position in a state where the cover member is attached to the manual valve with the erroneous operation prevention cover, the outer peripheral surface of the operation unit interferes with the detection unit and the insertion unit is inserted. When the piece cannot be completely attached to the cover member and the operation unit is in the second position, the insertion piece to which the operation unit has been attached is rotationally projected around the central axis of the operation rod. It is possible to evacuate from the space and complete the mounting of the insertion piece on the cover member.
A manual valve with an erroneous operation prevention cover. In the manual valve with an erroneous operation prevention cover according to any one of claims 1 to 5.
The manual mechanism includes an operation rod to which the valve body is connected at one end.
The cover member has an engaging portion that engages with the manual valve with the erroneous operation prevention cover on the end face on the mounting side with the manual valve with the erroneous operation prevention cover.
The manual valve with the erroneous operation prevention cover is provided with an engaged portion that engages with the engaging portion.
When the engaging portion and the engaged portion engage, the cover member rotates every 90 degrees around the central axis of the operating rod to form the manual valve with the erroneous operation prevention cover. On the other hand, positioning is possible,
A manual valve with an erroneous operation prevention cover. An erroneous operation prevention cover attached to the manual valve with the erroneous operation prevention cover according to any one of claims 1 to 6, wherein the erroneous operation prevention cover includes the cover member and the insertion piece.

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