JP6870513B2 - Board storage container - Google Patents

Description

The present invention relates to a substrate storage container provided with a control body that controls the flow of gas to the container body.

The substrate storage container for accommodating the substrate includes a container main body, a lid for closing the opening of the container main body, and a control body for controlling the flow of gas to the container main body. This control body has a check valve function, and has a valve body and a metal elastic member that opens and closes the valve body (see, for example, Patent Document 1 and Patent Document 2).

Since the check valve function of the control body controls the gas flow in one direction, the control body itself is replaced or the valve body and the elastic member are rearranged according to the gas flow direction. ..

Japanese Unexamined Patent Publication No. 2008-066330 Japanese Unexamined Patent Publication No. 2004-179449

By the way, since pollutants and particles generated from the substrate adhere to the substrate storage container, it is necessary to periodically clean the substrate storage container using a cleaning device. However, during cleaning, a liquid such as water or a cleaning liquid or mist may infiltrate the inside of the control body through the circular opening of the control body, which may take a long time to dry the control body. is there.

Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate storage container provided with a control body capable of suppressing liquids such as water and cleaning liquid or mist from entering the inside during cleaning. To do.

(1) In order to achieve the above object, one aspect of the present invention is to attach the container body for accommodating the substrate, a lid for opening and closing the opening of the container body, and a through hole formed in the container body. A substrate storage container including a control body for controlling the flow of gas to the container body, wherein the control body has a fixed cylinder and a holding cylinder combined with the fixed cylinder, and is fixed. The cylinder has an annular opening that communicates with the outside of the container body, a first wall portion that forms an inner edge of the annular opening, and an annular portion that covers the region of the annular opening inside the fixed cylinder. It has a second wall portion provided on the outer edge of the opening, and either the fixing cylinder or the holding cylinder is fitted in the through hole, and the holding cylinder is inside the container body. It is characterized in that a communicating vent is formed.
(2) In the aspect of (1) above, the second wall portion has the shape of an angel mold for cake having a central opening, and the central opening has a second wall portion between the second wall portion and the second wall portion. The central wall may be inserted so that the two passages are formed.
(3) In the aspect of (2) above, the first wall portion may have an annular protrusion portion that protrudes toward the second wall portion on the outer side in the radial direction from the central opening.
(4) In the embodiment (2) or (3), a first passage extending from the annular opening to the central opening is formed between the first wall portion and the second wall portion. The first passage and the second passage may be communicated with each other through the central opening.
(5) In the aspect of (4) above, the first passage is formed so as to increase in width in a cross-sectional view along the central axis of the annular opening as it goes inward from the annular opening. Even if it has a first region and a second region formed so that the width becomes smaller in a cross-sectional view along the central axis toward the central opening adjacent to the first region. Good.
(6) In the aspect of (1) above, the second wall portion has the shape of an angel mold for cake having a central opening, and an annular guide wall portion is provided in the internal space, and the central opening portion. The central wall portion may be inserted into the body so that a second passage is formed between the second wall portion and the second wall portion.
(7) In the aspect of (6) above, an annular communication passage is formed between the first wall portion and the tip located on the innermost side in the radial direction of the second wall portion, and the communication passage is the said. The annular opening and the central opening may communicate with each other.
(8) In the aspect of (7) above, a third passage is formed between the guide wall portion and the second wall portion, and the third passage faces the outer edge of the annular opening. Between the surface of the guide wall portion and the second wall portion facing the guide wall portion, the width becomes smaller in a cross-sectional view along the central axis of the annular opening toward the inside from the annular opening. The third region formed in the above, one end and the other end communicate with the third region and the annular opening, respectively, and are formed so that the width is uniform in a cross-sectional view along the central axis. It may have 4 regions.
(9) In any one of the above (2) to (8), the central opening includes an enlarged portion having a shape that expands toward the first wall portion side, and the first wall portion includes an enlarged portion. The tip of the facing central wall portion may be located at a height equal to the position where the enlarged portion starts to expand in a cross-sectional view along the central axis of the annular opening.
(10) In any one of the above (2) to (9), the central wall portion may be provided on the fixed cylinder or the holding cylinder.
(11) In any one of the above (2) to (9), the holding cylinder is internally connected to the inner lid cylinder, and the central wall portion is the fixed cylinder, the holding cylinder or the holding cylinder. It may be provided in any one of the inner lid cylinders.
(12) In any one of the above (1) to (11), the control body may have a filter for filtering the gas.

According to the present invention, it is possible to provide a substrate storage container provided with a control body capable of suppressing the infiltration of a liquid such as water or a cleaning liquid or mist into the inside during cleaning.

It is a schematic exploded perspective view which shows the substrate storage container of the embodiment which concerns on this invention. It is sectional drawing which shows the control body. It is sectional drawing which shows the control body attached to the substrate storage container. It is sectional drawing which shows the control body at the time of cleaning a substrate storage container with the opening of a container body facing down. It is sectional drawing which shows the modification of the fixed cylinder which constitutes a control body. It is sectional drawing which shows the modification of the fixed cylinder which constitutes a control body.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are designated by the same reference numerals throughout.

FIG. 1 is a schematic exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention.
As shown in FIG. 1, the substrate storage container 1 is provided between the container body 10 for storing the substrate W, the lid 20 for opening and closing the opening 11 of the container body 10, and the container body 10 and the lid 20. It includes an annular packing 30 and.

The container body 10 is a box-shaped body, and is a front-open type having an opening 11 formed in the front surface. The opening 11 is bent and formed with a step so as to spread outward, and the surface of the step portion is formed on the inner peripheral edge of the front surface of the opening 11 as a sealing surface 12 with which the packing 30 contacts. The container body 10 is preferably a front open type because it is easy to insert a substrate W having a diameter of 300 mm or 450 mm, but it may be a bottom open type in which the opening 11 is formed on the lower surface.

Supports 13 are arranged on the left and right sides of the inside of the container body 10. The support 13 has a function of placing and positioning the substrate W. A plurality of grooves are formed in the support 13 in the height direction to form a so-called groove teeth. The substrate W is placed on two groove teeth on the left and right at the same height. The material of the support 13 may be the same as that of the container body 10, but different materials may be used in order to improve the cleanability and slidability.

Further, a rear retainer (not shown) is arranged behind (inside) the inside of the container body 10. When the lid 20 is closed, the rear retainer is paired with the front retainer described later to hold the substrate W. However, the support 13 does not have a rear retainer as in the present embodiment, but has a front retainer and a substrate by having, for example, a “dogleg” or linear substrate holding portion on the back side of the groove teeth. The substrate W may be held by the holding portion. These supports 13 and rear retainers are provided on the container body 10 by insert molding, fitting, or the like.

The substrate W is supported by the support 13 and housed in the container body 10. An example of the substrate W is a silicon wafer, but the wafer is not particularly limited, and for example, a quartz wafer, a gallium arsenide wafer, or the like may be used.

A robotic flange 14 is detachably provided on the outer surface of the upper portion of the container body 10. The substrate storage container 1 is conveyed by a transfer robot in the factory to a processing apparatus for each process in which the robotic flange 14 is gripped and the substrate W is processed in a clean state.

Further, a manual handle 15 held by an operator is detachably attached to the central portion of the outer surface of both side portions of the container body 10.

An air supply unit 16 and an exhaust unit 17 are provided on the inner bottom surface of the container body 10, and a control body 40 described later is attached to the outer bottom surface of the container body 10. These are obtained by supplying an inert gas such as nitrogen gas or dry air from the air supply unit 16 to the inside of the substrate storage container 1 closed by the lid 20, and discharging the dry air from the exhaust unit 17 as needed. By replacing the gas inside the substrate storage container 1, maintaining an airtight state with low humidity, and blowing off impurities on the substrate W, the cleanliness inside the substrate storage container 1 can be maintained. There is. In addition to supplying gas from the air supply unit 16, the exhaust unit 17 may be connected to a negative pressure (vacuum) generator to forcibly discharge the gas from the exhaust unit 17.

Further, by detecting the gas discharged from the exhaust unit 17, it is possible to confirm whether the inside of the substrate storage container 1 has been replaced with the introduced gas. The air supply unit 16 and the exhaust unit 17 are preferably located outside the position where the substrate W is projected onto the bottom surface, but the quantity and position of the air supply unit 16 and the exhaust unit 17 are limited to those shown in the drawings. Instead, it may be located at the four corners of the bottom surface inside the container body 10. Further, the air supply unit 16 and the exhaust unit 17 may be provided on the side of the lid body 20.

On the other hand, the lid 20 has a substantially rectangular shape and is attached to the front of the opening 11 of the container body 10. The lid 20 has a locking mechanism (not shown), and is locked by fitting a locking claw into a locking hole (not shown) formed in the container body 10. Further, the lid 20 is detachably attached or integrally formed with an elastic front retainer (not shown) for horizontally holding the front peripheral edge of the substrate W in the central portion, but the front retainer is attached to the lid 20. It may be provided by insert molding, fitting, or the like.

Since the front retainer is a portion where the substrate W comes into direct contact with the groove teeth of the support 13 and the substrate holding portion, a material having good cleanability and slidability is used.

The lid 20 is formed with a mounting groove 21 for attaching the packing 30. More specifically, on the surface of the lid 20 on the container body 10 side, a convex portion 22 smaller than the step portion of the opening 11 is formed in an annular shape, so that a mounting groove 21 having a substantially U-shaped cross section is formed in an annular shape. ing. When the lid 20 is attached to the container body 10, the convex portion 22 penetrates deeper than the stepped portion of the opening 11.

Examples of the material of the container body 10 and the lid 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone, and liquid crystal polymer. The thermoplastic resin may be further appropriately added with a conductive agent made of conductive carbon, conductive fiber, metal fiber, conductive polymer, etc., various antistatic agents, an ultraviolet absorber, and the like.

Next, the packing 30 has an annular shape corresponding to the front shape of the lid 20 (and the shape of the opening 11 of the container body 10), and in the present embodiment, it has a rectangular frame shape. However, the annular packing 30 may have a ring shape before being attached to the lid 20.

The packing 30 is arranged between the sealing surface 12 of the container body 10 and the lid 20, and when the lid 20 is attached to the container body 10, the packing 30 is in close contact with the sealing surface 12 and the lid 20 to be a substrate storage container. The airtightness of No. 1 is ensured, the intrusion of dust, moisture, etc. from the outside into the substrate storage container 1 is reduced, and the leakage of gas from the inside to the outside is reduced.

As the material of the packing 30, a thermoplastic elastomer composed of a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc., and an elastic material such as fluorine rubber, ethylene propylene rubber, and silicone-based rubber are used. Can be used. From the viewpoint of modifying adhesion, these materials include fillers made of carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluororesin, and silicone resin. A predetermined amount may be selectively added.

Here, the control body 40 will be described. FIG. 2 is a cross-sectional perspective view showing the control body 40. FIG. 3 is a cross-sectional view showing a control body 40 attached to the container body 10. FIG. 4 is a cross-sectional view showing a control body 40 when cleaning the substrate storage container 1 with the opening 11 of the container body 10 facing downward.

The control body 40 controls the flow of gas to the container body 10, and when attached to the container body 10, communicates with the air supply unit 16 or the exhaust unit 17 via a flow path (not shown).

As shown in FIGS. 2 and 3, the control body 40 has a fixing cylinder 41 fitted from below into the through hole 18 formed by the rib 180 of the container body 10, and the through hole 18 from above via the seal member 44. It has a holding cylinder 42 that is fitted and is detachably combined with the fixed cylinder 41 by screwing from above.

The fixed cylinder 41 is formed in a bottomed cylindrical shape that opens to the inside of the container body 10, and a screw groove 411 for mounting for mounting the holding cylinder 42 is screwed on the inner peripheral surface of the fixed cylinder 41. It is carved. Further, a ring-shaped flange 412 extending in the outer radius direction is provided around the outer peripheral surface of the fixed cylinder 41 so as to come into contact with the opening peripheral edge portion of the rib 180. Further, a bottom portion 413 is provided on one end side of the fixed cylinder 41. The details of the fixed cylinder 41 will be described later.

On the other hand, the holding cylinder 42 is formed in a bottomed cylindrical shape that opens to the outside of the container body 10, and a ring-shaped flange 421 extending in the outer radial direction is provided around the outer peripheral surface of the holding cylinder 42. It is in contact with the peripheral edge of the opening of the through hole 18. Further, a screw groove 422 for attaching to the fixed cylinder 41 is spirally formed on the outer peripheral surface of the holding cylinder 42, and the screw groove 422 is screwed with the screw groove 411 of the fixed cylinder 41. However, the fixing cylinder 41 and the holding cylinder 42 may be attached to each other by other methods such as press fitting or locking instead of screwing.

Further, in the holding cylinder 42, partition ribs 424 for partitioning a plurality of vents 423 for gas flow are arranged in a grid pattern or radially on the inner side of the container body 10 (bottom surface), and the partition ribs 424 A storage space for accommodating the filter 45, which will be described later, is formed on the back surface.

A sealing member 44 is mounted on the outer peripheral surface of the holding cylinder 42 to block outside air and cleaning liquid entering the inside of the container body 10 from between the holding cylinder 42 and the inner peripheral surface of the through hole 18. In addition, the gas leaking from the inside of the container body 10 can be blocked.

By the way, the control body 40 also has an inner lid cylinder 43 which is attached to the inner peripheral wall of the holding cylinder 42 via a seal member 46 and holds the filter 45 between the control body 40 and the holding cylinder 42.

The inner lid cylinder 43 is formed in a bottomed cylindrical shape that opens to the outside of the container body 10, and the filter 45 is placed on the inside of the container body 10. Further, a protrusion is formed on the outer peripheral surface of the inner lid cylinder 43, and by locking with the locking groove formed on the inner peripheral surface side of the holding cylinder 42, the inner lid cylinder 43 becomes the holding cylinder 42. It is connected and attached.

The inner lid cylinder 43 is formed with a cylinder portion 430 whose one end communicates with the inside of the container body 10, and the cylinder portion 430 communicates with a plurality of vents 423.

The fixed cylinder 41, the holding cylinder 42, and the inner lid cylinder 43 described above are molded from, for example, a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or liquid crystal polymer. Further, for the sealing members 44 and 46, for example, an O-ring formed of a material such as fluororubber, NBR rubber, urethane rubber, EPDM rubber, or silicone rubber is used.

The filter 45 filters the gas supplied or discharged, and is a porous film made of ethylene tetrafluoride, polyester fiber, fluororesin, etc., a molecular filtration filter made of glass fiber, etc., and a filter medium such as activated carbon fiber. It is selected from a chemical filter or the like on which a chemical adsorbent is carried.

One or a plurality of filters 45 are held between the holding cylinder 42 and the inner lid cylinder 43. When a plurality of filters 45 are used, they may be of the same type, but it is better to combine filters having different properties because it is possible to prevent contamination of organic substances in addition to particles. preferable. For example, the filter 45 also has a function of suppressing the passage of the liquid so that the liquid such as water or the cleaning liquid does not stay when the container body 10 is washed. Therefore, one of the filters 45 is made of a hydrophobic or hydrophilic material. May be used to further suppress the permeation of the liquid.

Here, the details of the fixed cylinder 41 will be described. Further, as shown in FIGS. 2 and 3, the fixed cylinder 41 is a circular first portion having an annular opening 413a provided at the bottom portion 413 and communicating with the outside of the container body 10 and an inner edge of the annular opening 413a. It has a wall portion 414 and a second wall portion 415 provided on the outer edge of the annular opening 413a so as to cover the region of the annular opening 413a inside the fixed cylinder 41.

As described above, since the region of the annular opening 413a is covered by the second wall portion 415 inside the fixed cylinder 41, a liquid such as water or a cleaning liquid or mist enters the inside of the control body 40 from the annular opening 413a during cleaning. Infiltration can be effectively suppressed, whereby the time for drying the control body 40 can be significantly shortened, and problems due to liquid residue can be eliminated.

The first wall portion 414 is supported by the bottom portion 413 or the second wall portion 415 via a plurality of bridge portions (not shown) provided on the circumference at equal intervals. .. Further, the first wall portion 414 has an annular protrusion 414a protruding toward the second wall portion 415 on its outer edge.

The annular protrusion 414a is formed so that its wall thickness becomes thinner as it protrudes toward the second wall portion 415. That is, the annular protrusion 414a is formed so that the wall thickness of the base end connected to the outer edge of the first wall portion 414 is the thickest and the wall thickness of the most protruding tip is the thinnest. The inner edge of the annular protrusion 414a is located inside the radial direction (hereinafter, referred to as the radial direction) of the central axis O (hereinafter, referred to as the central axis O) of the annular opening 413a with respect to the tip of the annular protrusion 414a. It is formed to do.

The second wall portion 415 is formed so as to have the shape of an angel mold for cake having a central opening 416, and is adjacent to the outer shell portion 415a located on the outer side in the radial direction and the outer shell portion 415a. It has an inner shell portion 415b located inside the outer shell portion 415a in the radial direction.

The outer shell portion 415a extends inward in the radial direction from the base end 415c connected to the bottom portion 413, which is the outer edge of the annular opening 413a, to the apex 415d located on the other end side of the fixed cylinder 41 with respect to the base end 415c. It exists. The inner shell portion 415b extends inward in the radial direction from the apex 415d to the tip 415e located on one end side of the fixed cylinder 41 with respect to the apex 415d. The tip 415e of the second wall portion 415 is formed so as to be located inside the inner edge of the annular protrusion 414a in the radial direction. Therefore, the annular protrusion 414a is located on the outer side in the radial direction with respect to the central opening 416.

A first passage t1 extending from the annular opening 413a to the central opening 416 is formed between the first wall portion 414 and the first facing surface 415f of the second wall portion 415 facing the first wall portion 414. The first passage t1 is for gas flow, and as shown in FIG. 3, the first passage t1 is formed so as to increase in width in a cross-sectional view along the central axis O toward the inside from the annular opening 413a. It has a first region t11 and a second region t12 formed so that the width becomes smaller in a cross-sectional view along the central axis O as it approaches the central opening 416 adjacent to the first region t11. doing.

In a cross-sectional view along the central axis O, the first width d1 (that is, the width from the inner edge of the annular opening 413a to the outer edge thereof), which is the width of one end of the first passage t1, is set to the other of the first passage t1. It is preferable to form the width larger than the second width d2 (that is, the width from the tip 415e of the second wall portion 415 to the first wall portion 414), which is the width of the end.

On the other hand, a central wall portion 417 is inserted into the central opening 416. The central wall portion 417 is supported by the second wall portion 415 via a plurality of bridge portions (not shown) provided on the circumference at equal intervals. For example, the holding cylinder 42 or the inner lid cylinder 43 may be provided.

Further, the central wall portion 417 has a passage forming surface 417a formed so as to be curved corresponding to the second facing surface 415g of the second wall portion 415 facing the central wall portion 417, and a tip 417b facing the first wall portion 414. And have.

Between the second facing surface 415 g of the second wall portion 415 and the passage forming surface 417a of the central wall portion 417, there is a uniform width smaller than the second width d2 in a cross-sectional view along the central axis O. A second passage t2 having a width d4 is formed. The second passage t2 is for gas circulation, and communicates with the first passage t1 through the central opening 416.

The tip 417b of the central wall portion 417 is formed at a position higher than the tip 415e of the second wall portion 415 in a cross-sectional view along the central axis O. That is, the tip 417b of the central wall portion 417 is formed so as to be located on the other end side of the fixed cylinder 41 with respect to the tip 415e of the second wall portion 415.

The central opening 416 includes an enlarged portion 416a having a shape that expands toward the first wall portion 414 side. Further, the tip 417b of the central wall portion 417 is formed so as to be located at a height equal to the position where the enlarged portion 416a starts to expand in a cross-sectional view along the central axis O. Then, in a cross-sectional view along the central axis O, the third width d3, which is the width of the position where the enlarged portion 416a starts to expand, is formed to be larger than the first width d1 and the second width d2.

When the substrate storage container 1 is washed with the opening 11 of the container body 10 facing downward, the annular opening 413a faces sideways as shown in FIG.

When cleaning the substrate storage container 1 with the annular opening 413a facing sideways, liquids such as water and cleaning liquid that infiltrate through the annular opening 413a move toward the central axis O as they move inward from the annular opening 413a. In the cross-sectional view along the line, the momentum of the liquid is weakened by passing through the first region t11 of the first passage t1 having a larger width, so that the liquid moves to the second region t12 of the first passage t1 adjacent to the first region t11. Infiltration of liquid is suppressed.

Next, when a liquid such as water or a cleaning liquid whose momentum is weakened tries to pass through the second region t12 of the first passage t1, the width of the second region t12 is the center in the cross-sectional view along the central axis O. As it becomes smaller toward the opening 416, it becomes difficult to pass through, which makes it difficult to penetrate the central opening 416.

Further, even if a liquid such as water or a cleaning liquid intrudes into the region of the central opening 416, the enlarged portion of the central opening 416 having a width larger than the second width d2 in the cross-sectional view along the central axis O. By passing through the 416a, the momentum of the liquid is further weakened, so that the infiltration of the liquid into the second passage t2 is surely suppressed.

Then, in a cross-sectional view along the central axis O, the fourth width d4 of the second passage t2 is formed to be smaller than the second width d2, so that the liquid such as water or cleaning liquid whose momentum is further weakened becomes more abundant. It becomes difficult to invade the two passages t2.

Further, a liquid such as water or a cleaning liquid that infiltrates from above the annular opening 413a extends inward in the radial direction from the apex 415d to the tip 415e due to gravity, and the inner shell portion 415b of the upper second wall portion 415. And then through the region of the central opening 416, then through the enlarged portion 416a of the central opening 416 without entering the second passage t2, and then from the inner edge of the lower annular protrusion 414a. A lower second wall 415 that moves to the tip of the lower annular protrusion 414a located radially outside the inner edge and then extends radially outward from the apex 415d to the base end 415c. It can pass through the outer shell portion 415a and be discharged from below the annular opening 413a, whereby a liquid such as water or a cleaning liquid can more reliably enter the inside of the control body 40 from the annular opening 413a. It can be suppressed.

(Fixed cylinder of modified example)
Here, the fixed cylinder 41 of the modified example will be described. FIG. 5 is a cross-sectional perspective view showing a modified example of the fixed cylinder 41 constituting the control body 40. FIG. 6 is a cross-sectional view showing a modified example of the fixed cylinder 41 constituting the control body 40.

The fixed cylinder 41 of the modified example will be described focusing on the points different from the fixed cylinder 41 described above with reference to FIGS. 5 and 6, and the description of the points corresponding to the fixed cylinder 41 described above will be omitted.

In the fixed cylinder 41 described above, the first wall portion 414 has an annular protrusion 414a on the outer edge, but in the modified fixed cylinder 41, the first wall portion 414 has an annular protrusion 414a on the outer edge. An annular passage 418 that communicates the annular opening 413a and the central opening 416 is formed between the outer edge of the first wall portion 414 and the tip 415e of the second wall portion 415.

Further, in the fixed cylinder 41 of the modified example, the second wall portion 415 is formed so as to have the shape of an angel mold for cake having a central opening 416, and an annular guide wall portion 419 is provided in the internal space. Has been done. The guide wall portion 419 is supported by the second wall portion 415 via a plurality of bridge portions (not shown) provided on the circumference at equal intervals.

A third passage t3 is formed between the guide wall portion 419 and the first facing surface 415f of the second wall portion 415 facing the guide wall portion 419. The third passage t3 is annular between the surface of the guide wall portion 419 facing the outer edge of the annular opening 413a and the base end 415c side of the first facing surface 415f of the second wall portion 415 facing the surface. A third region t31 formed so that the width becomes smaller in a cross-sectional view along the central axis O as it goes inward from the opening 413a, and one end and the other end become the third region t31 and the annular opening 413a, respectively. In addition to communicating with each other, it has a fourth region t32 formed so as to have a uniform width in a cross-sectional view along the central axis O.

Then, when the substrate storage container 1 is washed, the width of the liquid such as water or the cleaning liquid that infiltrates through the annular opening 413a becomes smaller in the cross-sectional view along the central axis O as it goes inward from the annular opening 413a. By passing through the third region t31 of the third passage t3, the momentum of the liquid is strengthened, so that the liquid is transferred to the first of the guide wall portion 419 forming the third passage t3 and the second wall portion 415 facing the guide wall portion 419. It can be attached to the facing surface 415f.

Next, when the liquid with increased momentum passes through the fourth region t32 of the third passage t3 having a uniform width in a cross-sectional view along the central axis O and is discharged from the annular opening 413a. Since the gas in the central opening 416 is drawn out by the Coanda effect, it is difficult for the liquid to enter the communication passage 418, thereby reliably suppressing the liquid from entering the central opening 416 through the communication passage 418. be able to.

When cleaning the substrate storage container 1, the fourth region t32 of the third passage t3 in which the liquid such as water or cleaning liquid that infiltrates through the annular opening 413a has a uniform width in a cross-sectional view along the central axis O. Similarly, since the gas in the central opening 416 is drawn out by the coranda effect, it becomes difficult for the liquid to infiltrate into the communication passage 418, and then the fourth region t32 and the third passage t3 of the third passage t3 are sequentially subjected to. It is discharged to the outside from the annular opening 413a via the third region t31 of the above.

Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and modifications are made within the scope of the gist of the present invention described in the claims. It can be changed.

1 Board storage container 10 Container body, 11 openings, 12 Sealed surface, 13 Support, 14 Robotic flange, 15 Manual handle, 16 Air supply part, 17 Exhaust part, 18 Through hole, 180 rib 20 Lid, 21 Mounting groove , 22 Convex 30 Packing 40 Control body 41 Fixed cylinder, 41 Fixed cylinder, 411 Screw groove, 412 Flange, 413 Bottom, 413a Ring opening, 414 First wall part, 414a Ring protrusion, 415 Second wall part, 415a Outer shell part, 415b Inner shell part, 415c base end, 415d apex, 415e tip (second wall part), 415f first facing surface, 415g second facing surface, 416 central opening, 416a enlarged part, 417 central wall part 417a Passage forming surface, 417b tip (center wall part), 418 continuous passage, 419 guide wall part 42 holding cylinder, 421 flange, 422 screw groove, 423 vent, 424 compartment rib 43 inner lid cylinder, 430 cylinder part 44 seal Member, 45 filter, 46 Seal member d1 1st width, d2 2nd width, d3 3rd width, d4 4th width t1 1st passage, t11 1st region, t12 2nd region t2 2nd passage t3 3rd passage, t31 3rd region, t32 4th region W substrate

Claims (12)

The container body that stores the board and
A lid that opens and closes the opening of the container body,
A substrate storage container provided with a control body attached to a through hole formed in the container body and controlling the flow of gas to the container body.
The control body
With a fixed cylinder
With a holding cylinder combined with the fixed cylinder,
The fixed cylinder is
An annular opening communicating with the outside of the container body and
The first wall portion forming the inner edge of the annular opening and
It has a second wall portion provided on the outer edge of the annular opening so as to cover the region of the annular opening inside the fixed cylinder.
Either one of the fixed cylinder and the holding cylinder is fitted in the through hole.
A substrate storage container characterized in that the holding cylinder is formed with a vent that communicates with the inside of the container body. The second wall portion has the shape of an angel mold for cake having a central opening.
The substrate storage container according to claim 1, wherein a central wall portion is inserted into the central opening so that a second passage is formed between the central opening and the second wall portion. The substrate storage container according to claim 2, wherein the first wall portion has an annular protrusion portion that protrudes toward the second wall portion on the outer side in the radial direction from the central opening portion. A first passage extending from the annular opening to the central opening is formed between the first wall and the second wall.
The substrate storage container according to claim 2 or 3, wherein the first passage and the second passage communicate with each other through the central opening. The first passage
A first region formed so that the width increases in a cross-sectional view along the central axis of the annular opening as it goes inward from the annular opening.
4. The fourth aspect of the present invention is characterized by having a second region formed so that the width becomes smaller in a cross-sectional view along the central axis toward the central opening adjacent to the first region. The board storage container described in. The second wall portion has the shape of an angel mold for cake having a central opening, and an annular guide wall portion is provided in the internal space.
The substrate storage container according to claim 1, wherein a central wall portion is inserted into the central opening so that a second passage is formed between the central opening and the second wall portion. An annular communication path is formed between the first wall portion and the tip located on the innermost side in the radial direction of the second wall portion.
The substrate storage container according to claim 6, wherein the communication passage communicates between the annular opening and the central opening. A third passage is formed between the guide wall portion and the second wall portion.
The third passage
Between the surface of the guide wall portion facing the outer edge of the annular opening and the second wall portion facing the guide wall portion, along the central axis of the annular opening as it goes inward from the annular opening. A third region formed so that the width becomes smaller in a cross-sectional view,
One end and the other end communicate with the third region and the annular opening, respectively, and have a fourth region formed so as to have a uniform width in a cross-sectional view along the central axis. The substrate storage container according to claim 7. The central opening includes an enlarged portion having a shape that expands toward the first wall portion side.
The tip of the central wall portion facing the first wall portion is characterized in that it is located at a height equal to the position where the enlarged portion starts to expand in a cross-sectional view along the central axis of the annular opening. The substrate storage container according to any one of claims 2 to 8. The substrate storage container according to any one of claims 2 to 9, wherein the central wall portion is provided on the fixed cylinder or the holding cylinder. The inner lid cylinder is connected to the inside of the holding cylinder.
The substrate storage container according to any one of claims 2 to 9, wherein the central wall portion is provided in any one of the fixed cylinder, the holding cylinder, and the inner lid cylinder. .. The substrate storage container according to any one of claims 1 to 11, wherein the control body has a filter for filtering the gas.

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