JP6870532B2 - Temperature measurement sensor film and its manufacturing method, and temperature measurement method for long substrates using the temperature measurement sensor film - Google Patents

Description

The present invention uses a sensor film for measuring the temperature of a long substrate conveyed by a roll-to-roll method when a heat load is applied, a method for manufacturing the same, and the temperature measurement sensor film. The present invention relates to a method for measuring the temperature of a long substrate.

Electronic devices such as liquid crystal panels, notebook computers, digital cameras, and mobile phones use flexible wiring substrates in which wiring circuits having a predetermined circuit pattern are formed on a heat-resistant resin film. This flexible wiring substrate can be produced by patterning a metal film on a resin film with a metal film having a metal film formed on one side or both sides of the resin film by a thin film technique such as photolithography or etching.

The above-mentioned method for producing a resin film with a metal film includes a method of attaching a metal foil to a resin film with an adhesive (a method of producing a three-layer substrate), a method of coating a metal foil with a resin solution, and then drying the film. Known methods include a manufacturing method (casting method), a method of forming a metal film on a resin film by the vacuum film forming method alone, or a combined use of the vacuum film forming method and a wet plating method (metalizing method). ing.

Among the above-mentioned manufacturing methods, in the vacuum film forming method in the metallizing method, a vacuum vapor deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like are used. For example, as a sputtering method, Patent Document 1 discloses a method of forming a conductor layer by sputtering chromium on a polyimide insulating layer and then sputtering copper. Further, in Patent Document 2, a first metal thin film formed by sputtering targeting a copper-nickel alloy and a second metal thin film formed by sputtering targeting copper are laminated on a polyimide film in this order. Materials for flexible circuit boards have been disclosed.

When a metal film is formed on a resin film such as a polyimide film by the above vacuum film forming method to produce a resin film with a metal film, the long resin film is efficiently conveyed while being continuously conveyed by a roll-to-roll method. A vacuum film forming apparatus called a sputtering web coater capable of forming a vacuum film is generally used. For example, Patent Document 3 discloses a unwinding and winding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. When producing a resin film with a metal film by the roll-to-roll method, in order to improve the adhesion of the metal film, the long resin film may be surface-treated by ion beam treatment or the like before film formation. It is heated by a heater and dried.

Japanese Unexamined Patent Publication No. 2-98994 Japanese Patent No. 3447070 Japanese Unexamined Patent Publication No. 62-247073

It is known that a large heat load is applied to the resin film in processes such as sputtering film formation by a sputtering web coater and surface treatment for improving adhesion as shown in Patent Document 3, and in order to investigate the influence thereof, Attempts have been made to measure the temperature of the resin film. As a method for measuring the temperature of a resin film, for example, measurement using a thermolabel (registered trademark) that changes color corresponding to the maximum temperature among those heated to various temperatures may be adopted. In this way, in order to grasp the temperature change of the resin film when the treatment under heat load is applied, the dry state of the resin film, the easiness of wrinkling, and the dimensional change due to the temperature of the resin film are examined. It will be important information above.

However, in the temperature measurement using the thermolabel or the like described above, it was not possible to measure the temperature change over time of the long resin film conveyed by the roll-to-roll method. Therefore, it is conceivable to measure the temperature of the resin film using a thermocouple instead of the thermolabel, but depending on how it is attached, the tension during transportation of the long resin film may become unstable, or the outer peripheral surface of the canroll may be measured. There was a risk that the adhesion of the long resin film to the film would be hindered. The present invention has been made in view of such conventional problems, and measures the temperature change over time of a long resin film that is subjected to a heat-loaded treatment while being conveyed by a roll-to-roll method. It is an object of the present invention to provide a temperature measurement sensor capable of performing.

In order to achieve the above object, the temperature measurement sensor film of the long substrate of the present invention is the length of the long substrate to which a heat load is applied while being conveyed from the unwinding roll to the winding roll by a roll-to-roll method. A temperature measurement sensor film interposed in the middle portion of the direction, which is a long base film longer than the transport distance from the unwinding roll or the winding roll to the portion to be treated, and the base film. It is characterized in that it is composed of a thermocouple composed of at least one pair of thin-film conductive layers extending from one end to the other along the longitudinal direction of the above, and a cover film covering the at least one pair of thermocouples.

Further, the method for measuring the temperature of a long substrate of the present invention is a method for measuring the temperature of a long substrate in which a heat load is applied while being conveyed from a winding roll to a winding roll by a roll-to-roll method. A thermocouple composed of at least one pair of thin-film conductive layers longer than the transport distance from the unwinding roll or the winding roll to the portion to be treated is insulated along the longitudinal direction of the long substrate. To the unwinding roll or the winding roll via an extension that extends to ensure that it is detachably connected to the end opposite the temperature measuring contact of the at least one pair of thermocouples. It is characterized in that the long substrate is conveyed while transmitting a thermocouple to a signal transmitting means provided.

Further, the method for manufacturing the temperature measurement sensor film of the long substrate of the present invention has the same width as that of the long substrate which is subjected to a heat load process while being conveyed from the unwinding roll to the winding roll by a roll-to-roll method. A long base film to be held is prepared, at least one pair of thin conductive layers for thermocouples extending from one end to the other in the longitudinal direction are formed, and the base film after the formation is unwound. Cut off the end of the roll or the take-up roll, leaving a long portion longer than the transport distance to the portion to be treated, and each of the at least one pair of thin conductive layers from the cut end. A temperature measuring contact portion for connecting one end of a pair and a drawer for connecting to the other end opposite to the one end are cut out, and the temperature measuring contact and the drawer are turned over to form a thin film of the long portion. After connecting to both ends of the conductive layer, the long thin conductive layer is covered with a cover film.

According to the present invention, it is possible to measure a time-dependent temperature change of a long substrate conveyed by a roll-to-roll method when a heat-loaded process is applied to the long substrate.

It is a schematic front view of the roll-to-roll type sputtering web coater in which the temperature measurement sensor film which concerns on this invention is preferably used. It is a top view which shows a specific example of the temperature measurement sensor film which concerns on this invention. It is a top view which shows the other specific example of the temperature measurement sensor film which concerns on this invention. It is a top view which shows a specific example of the manufacturing method of the temperature measurement sensor film which concerns on this invention. It is a top view of the temperature measurement sensor film of FIG. 2 and the long substrate on the upstream side and the downstream side thereof. It is a perspective view which shows a specific example of the usage method of the temperature measurement sensor film which concerns on this invention. It is a perspective view which shows the other specific example of the use method of the temperature measurement sensor film which concerns on this invention. It is a perspective view which shows still more specific example of the usage method of the temperature measurement sensor film which concerns on this invention. Shows the temperature change measured by the temperature measurement sensor film of the example interposed in the intermediate portion in the longitudinal direction of the long substrate when the treatment is applied while transporting the long substrate by the roll-to-roll method. It is a graph.

(1) Processing device for long resin film First, a roll-to-roll method (roll-to-roll winding) to which the temperature measurement sensor film of the long substrate of the present invention and the temperature measurement method of the long substrate using the sensor film can be suitably applied. The vacuum film forming apparatus of the formula) will be described. This vacuum film forming apparatus is a transport means composed of various roll groups for transporting a long substrate such as a heat-resistant resin film along a transport path from a unwind roll to a take-up roll in a vacuum chamber. , A drying means for drying the long substrate unwound from the unwinding roll, a surface treatment means for subjecting the dried long substrate with an ion beam or the like, and the surface-treated long substrate. It is mainly composed of a film forming means for winding a substrate around a can roll and performing a sputtering film formation on the front side while cooling from the back side. With this configuration, a long substrate transported from the unwinding roll to the winding roll by a roll-to-roll method is subjected to a series of heat-loaded treatments including a drying step, a surface treatment step, and a film forming step. Can be done.

More specifically with reference to FIG. 1, the vacuum chamber in which the above-mentioned various means constituting the vacuum film forming apparatus is housed includes an unwinding chamber 110a, an ion beam chamber 110b, a film forming chamber 110c, and a winding chamber. It is divided into four chambers 110d. The long substrate F is first unwound from the unwinding roll 111 in the unwinding chamber 110a, and is guided into the heater box 113 via the tension sensor roll 112. A pair of heaters 114a and 114b facing each other with the long substrate F interposed therebetween are housed in the heater box 113, whereby the long substrate F is heated and dried. Since this heat drying is a process in which a heat load is applied to the long substrate F, it is necessary to grasp how much the temperature of the long substrate F rises during heat drying in order to prevent problems caused by this heat load. Is preferable.

The long substrate F heat-dried by the heaters 114a and 114b exits the unwinding chamber 110a via the free roll 115. The long substrate F then enters the ion beam chamber 110b, where it is wound around the outer peripheral surface of the cooling roll 117 via the free roll 116. An ion beam generator 118 provided with an ion beam source is provided so as to face the outer peripheral surface of the cooling roll 117. As a result, the long substrate F is subjected to ion beam treatment on the film-forming surface on the front side while being cooled from the back side. Instead of this ion beam treatment, the surface treatment may be performed by plasma treatment in which a long substrate is treated with oxygen plasma or nitrogen plasma.

In the above ion beam treatment, a plasma discharge is generated in a magnetic field gap to which a strong magnetic field is applied, and cations in the plasma are irradiated to a long substrate as an ion beam by electrolysis with an anode to perform surface treatment. .. On the other hand, in the plasma treatment, for example, oxygen plasma or nitrogen plasma is generated by performing discharge in a reduced pressure atmosphere with a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen to surface-treat a long substrate. .. When the long substrate is a resin film, the surface of the film is modified by surface treatment such as ion beam treatment or plasma treatment, so that the adhesion of the film can be improved in the film forming process of the subsequent step. .. However, since these ion beam treatments and plasma treatments are both processes in which a heat load is applied to the long substrate F, to what extent the long substrate F is used in order to prevent problems caused by this heat load. It is preferable to know whether the temperature rises.

The long substrate F surface-treated by the above ion beam treatment exits the ion beam chamber 110b via the free roll 119 and then enters the film forming chamber 110c. Here, the long substrate F is guided to the rotation-driven can roll 123 via the free roll 120, the tension sensor roll 121, and the front feed roll 122. The cylindrical member constituting the can roll 123 is provided with a flow path through which a refrigerant such as cooling water circulates, and a long substrate F wound around a transport path on the outer peripheral surface of the can roll 123 is placed from the back surface side. It can be cooled.

Magnetron sputtering cathodes 130, 131, 132, 133 as film forming means are provided along the transport path in this order so as to face the outer peripheral surface of the can roll 123. As a result, the long substrate F is continuously subjected to sputtering film formation on the front surface while being cooled from the back surface. Since this sputtering film formation is also a process in which a heat load is applied to the long substrate F, to what extent the long substrate F is heated during the sputtering film formation in order to prevent problems caused by this heat load. It is preferable to grasp whether or not.

The long substrate F that has completed the sputtering film formation on the outer peripheral surface of the can roll 123 leaves the film forming chamber 110c via the rear feed roll 124, the tension sensor roll 125, and the free roll 126. The long substrate F that has left the film forming chamber 110c finally enters the winding chamber 110d, where it is wound by the winding roll 129 via the free roll 127 and the tension sensor roll 128.

When performing sputtering film formation with the vacuum film forming apparatus as described above, first, the pressure inside the vacuum chamber is ^{reduced to about 10 -4} Pa, and then a sputtering gas is introduced to adjust the pressure to about 0.1 to 10 Pa. Is done. A known gas such as argon is used as the sputtering gas in this case, and a gas such as oxygen is further added depending on the purpose. In the film forming chamber 110c, vacuum film formation by CVD (chemical vapor deposition) or vapor deposition may be performed instead of the sputtering process. In this case, instead of the magnetron sputtering cathodes 130 to 133 provided with the plate-shaped target, the film may be formed. Other film forming means are provided.

By controlling the rotation speeds of the unwinding roll 111, the front feed roll 122, the rear feed roll 124, and the can roll 123 based on the tension of the long substrate F measured by each of the tension sensor rolls described above, the length is increased by a predetermined tension. Various processes can be performed while transporting the scale substrate F. The vacuum film forming apparatus shown in FIG. 1 is heat-dried by using heaters 114a and 114b as drying means in the unwinding chamber 110a, but the present invention is not limited to this, and various types that can be used under reduced pressure are used. It may be dried using a known drying means. Further, the vacuum film forming apparatus of FIG. 1 does not show a free roll or a vacuum exhaust facility provided as needed to change the transport direction of the long substrate F.

A resin film with a metal film can be produced by performing sputtering film formation while transporting a resin film as a long substrate F in the above-mentioned vacuum film forming apparatus by a roll-to-roll method. Examples of such a resin film with a metal film include a laminated structure in which a thin film conductive layer also called a seed layer made of a Ni-based alloy or the like and a thick film conductive layer made of Cu or the like are laminated on the surface of the resin film. it can. A flexible wiring board can be obtained by subjecting such a resin film with a metal film having a laminated structure to a patterning process by, for example, a subtractive method. The subtractive method is a method for manufacturing a flexible wiring board by removing a metal film not covered with a resist by etching.

The composition of the seed layer is appropriately determined depending on desired properties such as electrical insulation and migration resistance of the resin film with a metal film, but is generally known such as Ni—Cr alloy, Inconel, Constantan, and Monel. Alloys are used. The thick film conductive layer made of Cu or the like formed on the seed layer can be further thickened by using a general wet plating method. The wet plating method may be performed by forming a metal film only by electroplating or by combining primary plating consisting of electroless plating and secondary plating consisting of electrolytic plating. In addition to forming a metal film, the above-mentioned vacuum film forming apparatus can form an oxide film, a nitride film, a carbide film, etc. In this case as well, a temperature measurement sensor film described later and the same are used. A temperature measuring method can be applied.

A polyethylene terephthalate (PET) film can be used as the resin film used for the resin film with a metal film, but it is more preferable to use a heat-resistant resin film such as a polyimide film. The heat-resistant resin film includes a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, a liquid crystal polymer film, and the like. , It is appropriately selected from the viewpoints of flexibility as a flexible substrate with a metal film, strength required for practical use, electrical insulation suitable as a wiring material, and the like. The temperature measurement sensor film of a specific example of the present invention described later and the long substrate to which the temperature measurement using the same can be suitably applied are not limited to the above resin film, but may be a metal foil or a metal strip. There may be.

(2) Temperature measurement sensor film Next, in the vacuum film forming apparatus as described above, when the long substrate F is conveyed by the roll-to-roll method and various treatments that apply a heat load are applied to the long substrate F. A temperature measurement sensor film of a specific example of the present invention capable of measuring the temperature change of the long substrate F and a temperature measurement method using the same will be described. As shown in FIG. 2, the temperature measurement sensor film 10 of a specific example of the present invention is a long substrate F conveyed in a roll-to-roll manner in a vacuum film forming apparatus such as the sputtering web coater described above in the longitudinal direction. The temperature is measured by interposing in the middle part of.

More specifically, the temperature measurement sensor film 10 of a specific example of the present invention is the same as the long substrate F which is subjected to a heat load process while being conveyed by the roll-to-roll method in the vacuum film forming apparatus described above. A long base film 11 made of, for example, a resin film, which has a width and is longer than the transport distance from the unwinding roll 111 of the vacuum film forming apparatus to a portion where a heat load is applied, and this base film. A cover made of three pairs of thin-film thermocouples 20, 30, 40 extending substantially from one end to the other along the longitudinal direction (MD direction) of 11, and preferably a laminated film covering these thermocouples 20 to 40. It is composed of a film 50. The base film 11 and the cover film 50 preferably have a heat capacity per unit area substantially equal to or less than that of the long substrate F, and therefore their total thickness is equal to or less than that of the long substrate F. Is desirable. Further, the material of the base film 11 is preferably the same as that of the long substrate F.

The number of thermocouples is not limited to three, but may be one or two, or four or more, but if the number of thermocouples is large, the temperature distribution in the width direction of the long substrate F may be increased. It can be grasped in more detail. Further, the length of the base film 11 in the temperature measurement sensor film 10 of one specific example of the present invention assumes the case where the signal transmission means described later is provided on the unwinding roll 111, and the signal transmission means. Is provided on the take-up roll 129, the length of the long base film 11 needs to be longer than the transport distance from the portion where the heat load is applied to the take-up roll 129.

The materials of the thermocouples 20 to 40 are not particularly limited, but in the following description, a case where general chromel and alumel are used as the materials for the positive and negative poles will be described. These three pairs of thermocouples 20 to 40 are the alumel extending portions 21, 31, 41 and the chromel extending portions 22, 32, 42 extending from substantially to the end in the longitudinal direction (MD direction) of the base film 11, respectively. And the temperature measuring contact portions 23, 33, 43 of the alumel connected to the adjacent alumel extending portion and the chromel extending portion at the upstream end portion in the conveying direction, and the alumel at the downstream end portion in the conveying direction. It is composed of alumel drawers 24, 34, 44 and chromel drawers 25, 35, 45 connected to the extension portions 21, 31, 41 and the chromel extension portions 22, 32, 42, respectively.

The alumel drawer portions 24, 34, 44 and the chromel drawer portions 25, 35, 45 extend in the width direction of the base film 11, and the alumel extension portions 21, 31, 41 and the chromel extension portions 21, 31, 41 and the chromel extension portions are extended. The other end of the base film 11 opposite to one end connected to the portions 22, 32, and 42 is aligned with one edge in the width direction of the base film 11. Further, the above-mentioned alumel extending portions 21, 31, 41 and chromel extending portions 22, 32, so that the alumel drawing portions 24, 34, 44 and the chromel drawing portions 25, 35, 45 do not physically interfere with each other. As the 42 is arranged on one edge side in the width direction of the base film 11, the distance between the end portions thereof and the longitudinal end portion of the base film 11 gradually increases.

As described above, the thermocouples 20 to 40 extending substantially from end to end in the longitudinal direction of the base film 11 except for the portion separated from the end portion in the longitudinal direction of the base film 11 are described above. The end portion on the side opposite to the temperature measuring contact portion is located at the edge portion in the width direction of the base film 11, and an extension portion such as a compensating lead wire, which will be described later, is removably connected to this end portion. Therefore, the end portions of these thermocouples 20 to 40 are exposed from the cover film 50. The shape of the cover film is not limited to FIG. 2, and may have a different shape depending on the configuration of the device that applies a heat load to the long substrate F. That is, in order to prevent the problem of short-circuiting of the thermocouples 20 to 40, the length of the cover film in the longitudinal direction rather than the transport distance between the part to be heat-treated and the metal roll in the roll-to-roll transport path. If the length is long, the insulating state is ensured. Therefore, when this condition is satisfied, it is not necessary to cover the downstream end of the thermocouples 20 to 40 in the transport direction as in the cover film 150 shown in FIG.

(3) Method for manufacturing temperature sensor film Next, with reference to FIGS. 4 (a) to 4 (c), regarding the method for manufacturing the temperature sensor film 10 of a specific example of the present invention described above, thermocouples 20 to 40 The case where the material of the above is chromel (+ pole) and alumel (-pole) will be described as an example. First, the transport distance from the unwinding roll to the part where the heat load is applied, which has the same width as the long substrate as the temperature measurement target to which the heat load is applied while transporting by roll-to-roll. Prepare a base film 1 made of, for example, a resin film having a length obtained by adding a temperature measuring contact portion and a cutting portion for a drawer portion, which will be described later.

Since it is preferable that the heat capacity per unit area is small for more accurate temperature measurement, the base film 1 and the cover film 5 to be attached so as to cover the thermocouple formed on the surface thereof are used. It is desirable that the total thickness is equal to or less than the thickness of the long substrate to which the above-mentioned heat-loaded treatment is applied. Further, the length of the base film 1 in the temperature measurement sensor film 10 of one specific example of the present invention assumes the case where the signal transmission means described later is provided on the unwinding roll 111, and the signal transmission means. Is provided on the take-up roll 129, the length of the long base film 1 is set to the transport distance from the part where the heat load is applied to the take-up roll 129 for the temperature measuring contact part and the drawer part, which will be described later. It is necessary to make it longer than the total length of the cutouts.

A thin film extending from one end of the base film 1 in the longitudinal direction as shown in FIG. 4A on one surface of the base film 1 by dry plating alone or by using dry plating and wet plating in combination. It forms three pairs of alumel conductive layers 2A, 3A, 4A and chromel conductive layers 2B, 3B, 4B for thermocouples. Specifically, first, a masking layer having three linear patterns for the alumel conductive layers 2A, 3A, and 4A extending in the longitudinal direction is formed on one side of the base film 1, and a dry method such as sputtering or physical vapor deposition is performed. Three linear alumel conductive layers 2A, 3A, and 4A are formed by a plating method or a combination of the dry plating method and the wet plating method. Next, a masking layer having a linear pattern for the chromel conductive layers 2B, 3B, and 4B is formed in the same manner as described above, and three linear chromels are formed by dry plating alone or by using the dry plating method and the wet plating method in combination. Conductive layers 2B, 3B, and 4B are formed. The order of film formation of the alumel conductive layers 2A, 3A, 4A and the chromel conductive layers 2B, 3B, and 4B may be reversed.

The masking layer may be formed by a general method consisting of resist coating and lithography, or after the pressure-sensitive adhesive sheet is attached to the entire surface of the base film 1, the alumel conductive layers 2A, 3A, 4A or the chromel conductive layers 2B, 3B. Only the film-forming portion of 4B may be removed by a so-called half-cut with a cutter or the like. Further, since it is composed of a simple linear pattern, a masking layer is formed by attaching a band-shaped adhesive tape except for the film-forming portions of the alumel conductive layers 2A, 3A, 4A or the chromel conductive layers 2B, 3B, and 4B. You can also do it.

Alternatively, a roll-to-roll sputtering web coater can be used to form the alumel conductive layers 2A, 3A, 4A and the chromel conductive layers 2B, 3B, 4B. In this case, the sputtered particles for film formation of the alumel conductive layers 2A, 3A, 4A or the chromel conductive layers 2B, 3B, and 4B pass between the outer peripheral surface of the canroll around which the base film 1 is wound during film formation and the target. By arranging a mask member made of, for example, a metal plate having an opening to be formed, the alumel conductive layers 2A, 3A, 4A and the chromel conductive layers 2B, 3B, 4B can be formed without providing the masking layer.

Next, as shown in FIG. 4B, the base film 1 having the alumel conductive layers 2A, 3A, 4A and the chromel conductive layers 2B, 3B, 4B formed above is cut at the positions of the dotted lines. By cutting in this way, a long portion A having the alumel extending portions 21, 31, 41 and the chromel extending portions 22, 32, 42 shown in FIG. 2 and having an oblique portion at one end, and the length thereof. Three alumel pieces each having temperature measuring contact portions 23, 33, 43 connecting each pair of adjacent chromel extending portions and alumel extending portions at the other end portion of the scale portion A opposite to the one end portion. A triangular portion C having an alumel drawer portions 24, 34, 44 and a chromel drawer portions 25, 35, 45 and having an inclined portion having the same inclination angle as the inclined portion of the long portion A is cut out.

Next, as shown in FIG. 4 (c), the above three alumel pieces B are turned inside out, and both ends of the three pairs of the alumel pieces B are placed on the long portion A, respectively, and the adjacent alumel conductive layers for three pairs of thermocouples. And connect to the end of the chromel conductive layer. At that time, it is preferable to attach the alumel piece B to the long portion A with an adhesive tape such as a polyimide heat-resistant tape or an adhesive. Further, the triangular portion C is turned upside down, and the ends of the alumel conductive layer and the chromel conductive layer at the inclined portion are positioned so as to intersect the ends of the alumel conductive layer and the chromel conductive layer at the inclined portion of the elongated portion A, respectively. Overlay those diagonals while aligning. At that time, it is preferable to attach the long portion A and the triangular portion C with an adhesive tape or an adhesive in the same manner as described above. When the alumel piece B or the triangular portion C is attached with an adhesive, the adhesive is applied only to the portion where the conductive portion is not formed so as not to obstruct the energization of the conductive portion.

As a result, thin-film thermocouples 20 to 40 can be formed on one side of the base film 11. By the way, if a metal roll in contact with the surface on the side where the thermocouples 20 to 40 are provided is provided in the transport path from the unwinding roll to the portion where the temperature is measured, the thermocouples 20 to 40 are short-circuited. Will occur and accurate temperature measurement will not be possible. Further, when a metal film is sputtered from above the thermocouples 20 to 40, a short circuit occurs in the same manner. In order to prevent this, a cover film 50 made of, for example, a laminated film, which is preferably made of the same material as the base film 11, is attached to the surface of the base film 11 where the thermocouples 20 to 40 are provided. As will be described later, the ends of the alumel drawers 24, 34, 44 and the chromel drawers 25, 35, 45 are in contact with the extension portions such as the compensating conductors, so these ends are exposed from the cover film 50. As a result, the temperature measurement sensor film 10 as shown in FIG. 2 can be manufactured.

(4) Temperature Measurement Method Using Temperature Measurement Sensor Film Next, the method of using the temperature measurement sensor film 10 described above will be described. First, as shown in FIG. 5, in the temperature measurement sensor film 10 produced above, the upstream side long substrate F1 is located at one end on the side where the temperature measurement contact portions 23, 33, 43 of the thermocouples 20 to 40 are provided. Is connected, and the downstream long substrate F2 is connected to the other end on the opposite side to the one end. The temperature measurement sensor film 10 and the upstream and downstream long substrates F1 and F2 can be connected to each other by using an adhesive tape or an adhesive such as the above-mentioned polyimide heat-resistant tape. Instead of sticking the upstream side and downstream side long substrates F1 and F2 to the temperature measurement sensor film 10 separately prepared as described above, it is directly attached to the intermediate portion in the length direction (MD direction) of the long substrate. The above-mentioned thin-film thermocouples 20 to 40 may be formed, and the cover film 50 may be attached so as to cover the thermocouples 20 to 40.

Next, as shown in FIG. 6, the end portion of the downstream long substrate F2 opposite to the side to which the temperature measurement sensor 10 is connected is attached to the unwind core 61 of the unwind roll to attach the temperature measurement sensor. The upstream and downstream long substrates F1 and F2 are wound around the unwinding core 61 together with the film. In the middle of this winding, the extension portions 62 such as the six compensating conductors that are in contact with the ends of the above-mentioned alumel drawer portions 24, 34, 44 and chromel drawer portions 25, 35, 45 exposed from the cover film 50, respectively. Insert it. As a result, when the temperature measurement sensor film is completely unwound from the unwinding roll, the extension portion 62 is detached from the temperature measurement sensor film 10, so that the transport of the long substrate is not hindered. The extension portion 62 may be easily attached to the exposed portions of the alumel extraction portions 24, 34, 44 and the chromel extraction portions 25, 35, 45 with adhesive tape or the like.

As shown in FIG. 7, the end portion of the extension portion 62 on the side opposite to the side involved in the above-mentioned unwinding roll is a signal transmission means having a built-in contact slip ring that rotates, for example, when unwinding a long substrate. By connecting to 63, it is possible to send a thermoelectromotive force signal of thermocouples 20 to 40 to a measuring instrument (not shown). Further, instead of the contact type, the thermoelectromotive force signal may be sent to the measuring device via the signal transmission means 64 and the receiver 65 built in the non-contact type data transmission device as shown in FIG.

In the above description, the temperature is measured while unwinding the temperature measurement sensor film 10 interposed in the intermediate portion in the transport direction of the long substrate from the unwinding roll, and the thermocouples 20 to 20 shown in FIG. 2 are measured. The lengths of the alumel extending portions 21, 31, 41 and the chromel extending portions 22, 32, 42 in 40 are the transport distances from the unwinding portion of the unwinding roll to the portion to which the heat-loaded treatment is applied, that is, In the case of the vacuum film forming apparatus of FIG. 1, it is necessary to make it longer than the transport distance from the unwinding roll 111 to the magnetron sputtering cathode 133, but the present invention is not limited to this, and the temperature measurement sensor film 10 is wound up. The temperature may be measured while winding on a roll. In this case, the lengths of the alumel extending portions 21, 31, 41 and the chromel extending portions 22, 32, 42 in the thermocouples 20 to 40 shown in FIG. 2 are wound from the portion to which the heat-loaded treatment is applied. It is necessary to make it longer than the transport distance to the take-up roll. For example, in the case of the vacuum film forming apparatus of FIG. 1, it is necessary to make it longer than the transport distance from the position facing the heaters 114a and 114b to the take-up roll 129. ..

By this temperature measurement method, a heater for drying treatment and an ion beam treatment for improving the adhesion strength of a metal film to be formed while transporting a long substrate such as a resin film in a roll-to-roll manner like a sputtering web coater or the like. , And even when heat-bearing treatments such as sputtering film-forming treatments are performed one after another, it is possible to accurately measure the temperature rise of the long substrate due to these heat-loading treatments. Therefore, it is possible to accurately grasp information such as whether the long substrate is in a dry state or in a state where wrinkles are likely to occur when it is conveyed by the roll-to-roll method. Since such a treatment can be performed, a high-quality resin film with a metal film can be produced with a high yield.

A temperature measurement film sensor 10 as shown in FIG. 2 is interposed in an intermediate portion in the longitudinal direction of a long resin film as a long substrate, and the resin film is rolled using a sputtering web coater as shown in FIG. The temperature was measured while transporting by a two-roll method. In the apparatus of FIG. 1, the transport distance from the unwinding roll 111 to the portion to which the ion beam treatment by the ion beam irradiation device 118 is performed is about 3 m in the transport path of the long substrate F, and the ion beam treatment is performed. The transport distance from the part to the top of the outer peripheral surface of the canroll 123 is about 3 m, and since the canroll 123 has a diameter of 0.8 m, the circumference of the outer peripheral surface is about 2.4 m, and the uppermost portion of the outer peripheral surface of the canroll 123. The transport distance from the to the take-up roll 129 is about 4 m. Therefore, the total length of the roll-to-roll transport path of the long substrate F from the unwinding roll 111 to the winding roll 129 is about 12.4 m. In this embodiment, the heaters 114a and 114b in the heater box 113 were not activated. Therefore, the long substrate F is subjected to a heat load treatment by an ion beam treatment by the ion beam irradiation device 118 and a sputtering treatment by the magnetron sputtering cathodes 130 to 133 while being conveyed through the above-mentioned transfer path. That is, the temperature of the long substrate F rises during these ion beam treatments and sputter film formation.

A polyimide film having a length of about 10 m, a width of 500 mm, and a thickness of 12.5 μm is used for the base film 11 of the temperature measurement film sensor 10, and the laminate film as the cover film 50 has a length of about 10 m, a width of 495 mm, and a thickness. A 12.5 μm polyimide film was used. A pair of chromel-almel thermocouples was formed at the center of the width direction. That is, only the thermocouple 30 shown in FIG. 2 was formed, and the thermocouples 20 and 40 on both sides thereof were not formed. A contact slip ring 64 as shown in FIG. 7 was adopted for transmitting the electromotive force of the thermocouple 30. A polyimide film having a length of about 20 m, a film width of 500 mm, and a thickness of 25 μm is connected to the upstream side and the downstream side of the temperature measurement film sensor 10 as lead films with polyimide heat-resistant tape, and the film is wound around the core of the unwinding roll 111. Wearing.

The end portions of the alumel extraction portion 34 and the chromel extraction portion 35 of the thermocouple 30 were exposed from the cover film 50, and a compensating lead wire was sandwiched between these exposed portions. Then, the other end of these compensating conductors on the side opposite to the side sandwiched between the exposed portions was connected to the core shaft of the contact slip ring 64. Then, the wiring 64a extending from the non-rotating side of the contact type slip ring 64 is taken out of the vacuum chamber by the feedthrough terminal and connected to the AD conversion device via the temperature converter (thermocouple voltage amplifier). The data can be imported to the personal computer.

Next, the unwinding chamber 110a, the surface treatment chamber 110b, the film forming chamber 110c, and the winding chamber 110d are ^{exhausted to 1 × 10 -3} Pa, and the resin film F is transported at a transport speed of 1 m / min. However, power was applied to the ion beam irradiation device 118 whose introduction gas was argon and the four magnetron sputtering cathodes 130 to 133. One Ni—Cr target and three Cu targets were attached to the targets of these four magnetron sputtering cathodes 130 to 133, respectively. Further, cooling water at 10 ° C. was circulated inside the cooling roll 117 facing the ion beam irradiation device 118 and the can roll 123 facing the magnetron sputtering cathodes 130 to 133.

In this way, the temperature was measured while transporting by roll-to-roll. The result is shown in FIG. The first peak of the temperature measurement time of 180 seconds shown in the figure is the temperature rise of the resin film due to the ion beam, and the four peaks of the temperature measurement time of 360 to 500 seconds after that are almost the same temperature rise level for spatter film formation. It is the temperature rise of the resin film caused by this. Finally, the temperature drops at the temperature measurement time of 590 seconds because the compensating lead wire has come off from the temperature measurement sensor film. By using the temperature measurement sensor film in this way, it can be seen that the temperature rise due to the heat-loaded process applied to the long substrate conveyed by roll-to-roll can be accurately measured.

1 Base film 5 Laminated film (cover film)
2A, 3A, 4A Alumel conductive layer 2B, 3B, 4B Chromel conductive layer 10 Temperature measurement sensor film 11 Base film 20, 30, 40 Thermocouple 21, 31, 41 Alumel extension part 22, 32, 42 Chromel extension part 23 , 33, 43 Temperature measuring contacts 24, 34, 44 Alumel drawer 25, 35, 45 Chromel drawer 50 Laminated film (cover film)
A long part B alumel piece C triangular part F long substrate (resin film)
F1 upstream long board F2 downstream long board 61 unwinding core 62 extending part 63 signal transmission means (core shaft with built-in contact slip ring)
64 Signal transmission means (core shaft with built-in non-contact data transmission equipment)
65 Transmission equipment Receiver 110a Unwinding room 110b Surface treatment room 110c Film formation room 110d Winding room 111 Unwinding roll 112, 121, 125, 128 Tension sensor roll 113 Heater box 114a, 114b Heater 115, 116, 119, 120, 126, 127 Free roll 117 Cooling roll 118 Ion beam irradiator 122 Front feed roll 123 Can roll 124 Rear feed roll 129 Winding roll 130, 131, 132, 133 Magnetron sputtering cathode

Claims (9)

A temperature measurement sensor film interposed in an intermediate portion in the longitudinal direction of a long substrate to which a heat load is applied while being conveyed from a winding roll to a winding roll by a roll-to-roll method. A long base film longer than the transport distance from the take-up roll to the site to be treated, and at least a pair of thin film conductives extending from end to end along the longitudinal direction of the base film. A temperature measurement sensor film comprising a thermocouple composed of layers and a cover film covering at least one pair of thermocouples. The temperature measurement sensor film according to claim 1, wherein the at least one pair of thermocouples has an end portion opposite to the temperature measurement contact portion exposed from the cover film. The length of the cover film in the longitudinal direction is longer than the transport distance between the portion to be treated and the metal roll for transporting the long substrate, according to claim 1 or 2. The temperature measurement sensor film described. A method for measuring the temperature of a long substrate in which a heat load is applied while being conveyed from a winding roll to a winding roll in a roll-to-roll manner, and the processing is performed from the unwinding roll or the winding roll. A thermocouple composed of at least one pair of thin-film conductive layers longer than the transport distance to the portion to be carried is extended along the longitudinal direction of the long substrate so as to ensure an insulating state, and the at least one pair Thermocouples are transmitted to the unwinding roll or the signal transmitting means provided on the winding roll via an extension portion that is detachably connected to the end opposite to the temperature measuring contact portion of the thermocouple. A method for measuring the temperature of a long substrate, which comprises transporting the long substrate. The method for measuring the temperature of a long substrate according to claim 4, wherein the signal transmission means is a contact type slip ring or a non-contact type data transfer device. The extension portion is made of a conductive wire or a compensating lead wire made of the same material as the at least one pair of thermocouples, and the unwinding roll or the winding of the long substrate on which the at least one pair of thermocouples extends. The method for measuring the temperature of a long substrate according to claim 4 or 5, wherein the end portion of the extending portion is sandwiched between the long substrates when wound around the take-roll. Prepare a long base film having the same width as a long substrate that is subjected to heat load processing while being conveyed from the unwinding roll to the take-up roll by a roll-to-roll method, and from end to end in the longitudinal direction. At least one pair of thin-film conductive layers for thermocouples is formed, and the transport distance from the unwinding roll or the winding roll to the portion to be treated in the base film after the film formation. What is a temperature measuring contact portion and one end portion that cuts off an end portion thereof leaving a longer elongated portion and connects one end portion of each pair of the at least one pair of thin film conductive layers from the cut end portion? Each of the drawers to be connected to the other end on the opposite side is cut out, and these temperature measuring contact portions and the drawers are turned over and connected to both ends of the thin film conductive layer of the long portion, and then the long portion is connected. A method for manufacturing a temperature measurement sensor film, which comprises covering a thin film conductive layer with a cover film. The cover film covers the long portion and the thin film conductive layer of the drawer portion except for the end portion of the drawer portion on the side opposite to the end portion connected to the thin film conductive layer of the long portion. The method for manufacturing a temperature measurement sensor film according to claim 7, characterized in that. The method for manufacturing a temperature measurement sensor film according to claim 7 or 8, wherein the cover film is a laminated film.

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