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JP6870538B2 - Heat dissipation sheet - Google Patents
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JP6870538B2 - Heat dissipation sheet - Google Patents

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JP6870538B2
JP6870538B2 JP2017165200A JP2017165200A JP6870538B2 JP 6870538 B2 JP6870538 B2 JP 6870538B2 JP 2017165200 A JP2017165200 A JP 2017165200A JP 2017165200 A JP2017165200 A JP 2017165200A JP 6870538 B2 JP6870538 B2 JP 6870538B2
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heat radiating
heat
sheet
plane
base material
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JP2019046844A (en
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裕次 吉田
裕次 吉田
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Toyota Motor Corp
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Description

本発明は、例えば発熱する電子部品からの発熱を外部に放熱するのに好適な放熱シートに関する。 The present invention relates to a heat radiating sheet suitable for radiating heat generated from, for example, a heat-generating electronic component to the outside.

CPUのような自ら発熱する電子部品は、過度に昇温すると適正に作動しなくなる恐れがある。それを回避するために、適宜の冷却デバイスが電子部品とともに用いられる。そのような冷却デバイスの一例として、特許文献1に記載される放熱シートや特許文献2に記載される熱輸送デバイス、さらには特許文献3に記載される放熱装置等が挙げられる。 Electronic components that generate heat by themselves, such as CPUs, may not operate properly if the temperature rises excessively. To avoid this, appropriate cooling devices are used with the electronic components. Examples of such a cooling device include a heat radiating sheet described in Patent Document 1, a heat transport device described in Patent Document 2, and a heat radiating device described in Patent Document 3.

特許文献1に記載の放熱シートは、マトリックス樹脂および熱伝導性フィラーからなる熱伝導性接着剤層とその熱伝導性接着剤層を担持する一方向に延伸したエキスパンドシートより構成されている。特許文献2に記載の熱輸送デバイスは、ハウジング内に封入された作動流体と、ハウジング内に設けられ作動流体の流路を形成するエキスパンドシートと、毛細管構造体とで構成されている。特許文献3に記載の放熱装置は、熱伝導性を有する可撓性の金属シート材で形成した支持枠と、同じシート材で形成した筒状の菱形フィンとを備え、支持枠の内部に、複数の菱形フィンを菱形フィンの稜を連結して1列に配置し、中央部の一つの菱形フィンの一つの稜を支持枠に結合するようにしている。 The heat radiating sheet described in Patent Document 1 is composed of a heat conductive adhesive layer made of a matrix resin and a heat conductive filler and an expanded sheet stretched in one direction supporting the heat conductive adhesive layer. The heat transport device described in Patent Document 2 is composed of a working fluid sealed in a housing, an expanding sheet provided in the housing and forming a flow path of the working fluid, and a capillary structure. The heat radiating device described in Patent Document 3 includes a support frame made of a flexible metal sheet material having thermal conductivity and a cylindrical rhombic fin made of the same sheet material, and is provided inside the support frame. A plurality of rhombic fins are arranged in a row by connecting the ridges of the rhombic fins so that one ridge of one rhombic fin in the central portion is connected to the support frame.

特開2001−291810号公報Japanese Unexamined Patent Publication No. 2001-291810 特開2011−086753号公報Japanese Unexamined Patent Publication No. 2011-086753 特開2006−253601号公報Japanese Unexamined Patent Publication No. 2006-253601

特許文献1に記載される放熱シートにおいても、特許文献2に記載される熱輸送デバイスにおいても、エキスパンドシートは、姿勢保持等の構造部材としての機能と、伝熱性あるいは放熱性を確保する熱伝導パスとしての機能とを備えている。特許文献1および特許文献2にも記載されているように、従来、この種の放熱シート等で用いられるエキスパンドシート10は、図15(a)に示すように、薄板状の金属シート1に、幅Lの間隔で、千鳥状に多列に切り込み2・・を入れ、切り込み2の方向に直交する方向に金属シート1を延伸する(エキスパンドする)ことで形成される。図15(b)は、そのようにして形成された従来のエキスパンドシート10の一例であり、引き延ばすことで前記切り込み2・・の箇所が切り込み2の形成方向に直交する方向に次第に拡開され、その拡開によって前記切り込み2の箇所は菱形の開口部3・・に変形する。 In both the heat dissipation sheet described in Patent Document 1 and the heat transport device described in Patent Document 2, the expand sheet functions as a structural member such as posture holding and heat conduction that secures heat transfer or heat dissipation. It has a function as a path. As described in Patent Document 1 and Patent Document 2, the expanding sheet 10 conventionally used in this type of heat-dissipating sheet or the like is formed on a thin plate-shaped metal sheet 1 as shown in FIG. 15 (a). It is formed by making staggered cuts 2 ... at intervals of width L and stretching (expanding) the metal sheet 1 in a direction orthogonal to the direction of the cuts 2. FIG. 15B is an example of the conventional expanding sheet 10 thus formed, and by stretching the cutout 2 ... Is gradually expanded in a direction orthogonal to the forming direction of the notch 2. Due to the expansion, the portion of the notch 2 is transformed into a diamond-shaped opening 3.

この形態のエキスパンドシート10は、薄板状の金属シート1を延伸したものであり、図15(c)に図15(b)のA−A線での断面図を示すように、連結部4の領域では、隣接する切り込み2、2間の距離Lの2倍(2L)の幅を有しているが、連結部4と連結部4との間であるストランド部5では、隣接する切り込み間の距離Lの幅となっている。 The expanding sheet 10 of this form is a stretched thin plate-shaped metal sheet 1, and as shown in FIG. 15 (c) and a cross-sectional view taken along the line AA of FIG. 15 (b), the connecting portion 4 In the region, the width is twice (2L) the distance L between the adjacent cuts 2 and 2, but in the strand portion 5 between the connecting portion 4 and the connecting portion 4, the gap between the adjacent cuts is reached. It is the width of the distance L.

図16(a)は、このエキスパンドシート10の開口部3にマトリックスとしての樹脂材料11を充填して形成した放熱シート20の平面図であり、図16(b)は、図16(a)のB−B線による断面図、図16(c)は、図16(a)のC−C線による断面図である。図示のように、エキスパンドシート10は全体が樹脂材料11中に埋入しており、エキスパンドシート10の開口部3には樹脂材料11が充填されている。この形態の放熱シート20において、図16(b)に示すように、放熱部材10における前記連結部4は、放熱シート20の厚みSを規制していて、放熱シート20の上面20aと下面20bとの間の全域に亘るようにして、連結部4が位置している。そして、連結部4の上端部4aは放熱シート20の上面20a側に露出してあるいはごく近接して位置しており、連結部4の下端部4bは放熱シート20の下面20b側に露出してあるいはごく近接して位置している。 16 (a) is a plan view of a heat radiating sheet 20 formed by filling the opening 3 of the expanding sheet 10 with a resin material 11 as a matrix, and FIG. 16 (b) is a plan view of FIG. 16 (a). A cross-sectional view taken along the line BB, FIG. 16 (c) is a cross-sectional view taken along the line CC of FIG. 16 (a). As shown in the drawing, the entire expanding sheet 10 is embedded in the resin material 11, and the opening 3 of the expanding sheet 10 is filled with the resin material 11. In the heat radiating sheet 20 of this form, as shown in FIG. 16B, the connecting portion 4 of the heat radiating member 10 regulates the thickness S of the heat radiating sheet 20, and the upper surface 20a and the lower surface 20b of the heat radiating sheet 20. The connecting portion 4 is located so as to cover the entire area between the two. The upper end portion 4a of the connecting portion 4 is exposed to or very close to the upper surface 20a side of the heat radiating sheet 20, and the lower end portion 4b of the connecting portion 4 is exposed to the lower surface 20b side of the heat radiating sheet 20. Or they are located very close to each other.

一方、図16(c)に示すように、前記ストランド部5では、その幅Lが連結部4の幅2Lの1/2であることから、図で上位に位置するストランド部5Uの上端部5aは放熱シート20の上面20a側に露出してあるいはごく近接して位置しているが、その下端部5bは放熱シート20の厚み方向のほぼ中間部に位置していて、放熱シート20の下面20b側には達していない。また、図で下位に位置するストランド部5Dの下端部5bは放熱シート20の下面20b側に露出してあるいはごく近接して位置しているが、その上端部5aは放熱シート20の厚み方向のほぼ中間部に位置していて、放熱シート20の上面20a側には達していない。 On the other hand, as shown in FIG. 16C, since the width L of the strand portion 5 is 1/2 of the width 2L of the connecting portion 4, the upper end portion 5a of the strand portion 5U located higher in the figure is 5a. Is exposed to or very close to the upper surface 20a of the heat radiating sheet 20, but its lower end 5b is located substantially in the middle of the heat radiating sheet 20 in the thickness direction, and the lower surface 20b of the heat radiating sheet 20 is located. It has not reached the side. Further, the lower end portion 5b of the strand portion 5D located at the lower position in the figure is exposed or located very close to the lower surface 20b side of the heat radiating sheet 20, but the upper end portion 5a thereof is located in the thickness direction of the heat radiating sheet 20. It is located substantially in the middle portion and does not reach the upper surface 20a side of the heat radiating sheet 20.

そのために、従来のこの形態の放熱シート20ではエキスパンドシート10における連結部4が位置する部位とストランド部5が位置する部位とでは、熱伝導パスとしての機能に差が出るのを避けられず、結果、放熱シート20全体としてみた場合、放熱部材10による熱伝導パスの形成が不十分とならざるを得ず、高熱伝導化するためには放熱部材10の放熱シート20に占める割合を高めることが必要とされている。このことは、樹脂材料の比率を下げることを意味しており、放熱シート20の柔軟性を犠牲にせざるをえなくなっている。 Therefore, in the conventional heat radiating sheet 20 of this form, it is unavoidable that the function as a heat conduction path differs between the portion of the expanding sheet 10 where the connecting portion 4 is located and the portion where the strand portion 5 is located. As a result, when looking at the heat radiating sheet 20 as a whole, the formation of the heat conduction path by the heat radiating member 10 has to be insufficient, and in order to increase the heat conduction, the ratio of the heat radiating member 10 to the heat radiating sheet 20 can be increased. is necessary. This means that the ratio of the resin material is reduced, and the flexibility of the heat radiating sheet 20 has to be sacrificed.

特許文献3に記載される放熱装置では、直方体状の支持枠内に複数個の筒状の菱形フィンを備えた構成となっており、該菱形フィンによって放熱面あるいは受熱面である天板と底板との間に多数の等しい長さの熱伝導パスが形成される利点があるが、直方体状の支持枠は柔軟性に欠け、特に奥行き方向において十分な柔軟性が得られない不都合がある。したがって、高熱伝導性と放熱シートに必要な柔軟性との両立は困難である。 The heat radiating device described in Patent Document 3 has a configuration in which a plurality of tubular rhombic fins are provided in a rectangular parallelepiped support frame, and the top plate and bottom plate which are heat radiating surfaces or heat receiving surfaces by the rhombic fins. There is an advantage that a large number of heat conduction paths of equal length are formed between the and, but the rectangular parallelepiped support frame lacks flexibility, and has a disadvantage that sufficient flexibility cannot be obtained particularly in the depth direction. Therefore, it is difficult to achieve both high thermal conductivity and the flexibility required for the heat dissipation sheet.

本発明は、上記の事情に鑑みてなされたものであり、所要の柔軟性を保持することができながら、より高い熱伝導性を確保することができる放熱シートを開示することを課題とする。また、前記放熱シートの製造方法を開示することを課題とする。 The present invention has been made in view of the above circumstances, and an object of the present invention is to disclose a heat radiating sheet capable of ensuring higher thermal conductivity while maintaining the required flexibility. Another object of the present invention is to disclose a method for manufacturing the heat radiating sheet.

本発明による放熱シートは、基本的に、樹脂材料と前記樹脂材料より熱伝導率の高い材料でできた面方向への広がりと所要厚みを備えた放熱部材とを含む放熱シートであって、前記放熱部材は、長尺状の平板の短辺側の断面を2つの平行な平面とその間をつなぐ面で構成されるように折り曲げられた放熱基材の適数本が、一方の平面が形成する上面と他方の平面が形成する下面とが互いに平行となるように配列された構成であり、前記放熱部材は、各放熱基材の前記2つの平行な平面を残して全体が前記樹脂材料中に埋入していることを特徴とする。 The heat radiating sheet according to the present invention is basically a heat radiating sheet including a resin material and a heat radiating member made of a material having a higher thermal conductivity than the resin material and having a spread in a plane direction and a required thickness. As for the heat radiating member, one plane is formed by an appropriate number of heat radiating base materials bent so that the cross section on the short side of the long flat plate is composed of two parallel planes and a surface connecting the two parallel planes. The upper surface and the lower surface formed by the other plane are arranged so as to be parallel to each other, and the heat radiating member is entirely contained in the resin material except for the two parallel planes of each heat radiating base material. It is characterized by being embedded.

本発明によれば、高い柔軟性を備え、かつ、柔軟性を犠牲にすることなく、高い熱伝導性を備えた放熱シートが提供される。 According to the present invention, a heat radiating sheet having high flexibility and high thermal conductivity without sacrificing flexibility is provided.

放熱シートで用いる放熱部材の製造に用いる原シートの一例を示す平面図。The plan view which shows an example of the original sheet used for manufacturing the heat-dissipating member used in a heat-dissipating sheet. 放熱部材を構成する放熱基材を製造する一例を示す図。The figure which shows an example which manufactures the heat-dissipating base material which constitutes a heat-dissipating member. 放熱部材を構成する放熱基材の一例を示す図。The figure which shows an example of the heat dissipation base material which constitutes a heat dissipation member. 放熱部材の一例を示す側面図。A side view showing an example of a heat radiating member. 放熱シートを製造する工程を説明する第1の図。The first figure explaining the process of manufacturing a heat dissipation sheet. 放熱シートを製造する工程を説明する第2の図。The second figure explaining the process of manufacturing a heat dissipation sheet. 製造後の放熱シートを示す斜視図。The perspective view which shows the heat dissipation sheet after manufacturing. 製造後の放熱シートを示す側面図。The side view which shows the heat dissipation sheet after manufacturing. 放熱シートの他の実施の形態を示す側面図。The side view which shows the other embodiment of the heat dissipation sheet. 放熱シートのさらに他の実施の形態を示す側面図。FIG. 5 is a side view showing still another embodiment of the heat radiating sheet. 放熱シートのさらに他の実施の形態を示す側面図。FIG. 5 is a side view showing still another embodiment of the heat radiating sheet. 放熱シートのさらに他の実施の形態を示す側面図。FIG. 5 is a side view showing still another embodiment of the heat radiating sheet. 放熱シートのさらに他の実施の形態を示す側面図。FIG. 5 is a side view showing still another embodiment of the heat radiating sheet. 放熱部材の他の例を示す斜視図。The perspective view which shows the other example of a heat radiating member. 従来の放熱シートで用いられている放熱部材であるエキスパンドシートを説明するための図。The figure for demonstrating the expanded sheet which is a heat radiating member used in the conventional heat radiating sheet. 従来の放熱シートを説明するための図。The figure for demonstrating the conventional heat dissipation sheet.

図面を参照しながら、本発明による放熱シートの一実施の形態を説明する。 An embodiment of the heat radiating sheet according to the present invention will be described with reference to the drawings.

[放熱部材]
最初に、この実施の形態の放熱シートで用いる放熱部材100の一例をその製造工程とともに説明する。
放熱部材100は、基本的に、図3に一例を示す形状の放熱基材50の適数本を配列させることで構成される。放熱基材50は、任意の方法で製造することができる。一例として、図1に示すように、面方向に広がりを持つ矩形状の原シート50aを用いる。原シート50aの素材としては、金属、セラミックス、グラファイト等を挙げることができる。金属としては、銅、アルミニウム、金、銀、ニッケル、亜鉛、等を例示できる。セラミックスとしては、アルミナ、シリカ、窒化ホウ素、酸化亜鉛、酸化マグネシウム、等を例示できる。セラミックスを用いる場合は、焼成前のグリーンシートの状態で成形することは、成形が容易なことから好ましい。好ましくは、熱伝導率が10W/m・K以上であるそれらの単一または複合材料である。また、原シート50aの厚みtは、好ましくは10μm〜500μmである。
[Heat dissipation member]
First, an example of the heat radiating member 100 used in the heat radiating sheet of this embodiment will be described together with the manufacturing process.
The heat radiating member 100 is basically configured by arranging an appropriate number of heat radiating base materials 50 having the shape shown in FIG. 3 as an example. The heat radiating base material 50 can be manufactured by any method. As an example, as shown in FIG. 1, a rectangular original sheet 50a having a spread in the plane direction is used. Examples of the material of the raw sheet 50a include metals, ceramics, graphite and the like. Examples of the metal include copper, aluminum, gold, silver, nickel, zinc, and the like. Examples of ceramics include alumina, silica, boron nitride, zinc oxide, magnesium oxide, and the like. When ceramics are used, it is preferable to mold the green sheet before firing because it is easy to mold. Preferably, they are single or composite materials having a thermal conductivity of 10 W / m · K or higher. The thickness t of the original sheet 50a is preferably 10 μm to 500 μm.

最初に、原シート50aを幅wで短冊状にカットする。次に、カットされた長尺状の平板51を、その短辺側の断面がコ字状となるように折り曲げ加工する。具体的には、図3に示すように、互いに平行な第1の平面52と第2の平面53とが第3の平面54でつながれた形状となるように、折り曲げ加工する。この折り曲げ加工によって、1つの放熱基材50が形成される。 First, the original sheet 50a is cut into strips with a width w. Next, the cut long flat plate 51 is bent so that the cross section on the short side thereof is U-shaped. Specifically, as shown in FIG. 3, the bending process is performed so that the first plane 52 and the second plane 53 parallel to each other have a shape connected by the third plane 54. By this bending process, one heat radiating base material 50 is formed.

この折り曲げ加工は手作業で行ってもよいが、図2に示す加工機60を用いることで、容易かつ迅速に行うことができる。加工機60は、周面に凹溝61を持つ第1の回転ロール62と、周面に凸条63を持つ第2の回転ロール64と、2つのロール62と64に回転力を付与する駆動機構(図では示されない)で構成される。第1の回転ロール62の回転軸Oと第2の回転ロール64の回転軸Oは平行であり、第1の回転ロール62の凹溝61内に第2の回転ロール64の凸条63が入り込んでいる。入り込んだ状態で、凹溝61と凸条63との間には、前記原シート50aの厚みtにほぼ等しい隙間が形成されている。 This bending process may be performed manually, but it can be performed easily and quickly by using the processing machine 60 shown in FIG. The processing machine 60 drives the first rotary roll 62 having a concave groove 61 on the peripheral surface, the second rotary roll 64 having the ridge 63 on the peripheral surface, and the two rolls 62 and 64 to apply rotational force. It consists of a mechanism (not shown in the figure). The first rotation axis O 2 of the rotary shaft O 1 and the second rotating roll 64 of the rotary roll 62 of are parallel, projections 63 of the second rotating roll 64 in the groove 61 of the first rotating roll 62 Is intruded. In the inserted state, a gap substantially equal to the thickness t of the original sheet 50a is formed between the concave groove 61 and the ridge 63.

前記カットされた長尺状の平板51を、回転している第1の回転ロール62と第2の回転ロール64との間に、第1の回転ロール6の凹溝61の幅方向の中央と長尺状の平板51の短辺側の中央が一致するようにして差し込む。それにより、長尺状の平板51は送られると同時に、短手方向の断面形状がコ字状に折り曲げられて、図3に示す放熱基材50が形成される。 The cut elongated flat plate 51 is placed between the rotating first rotating roll 62 and the second rotating roll 64 with the center of the concave groove 61 of the first rotating roll 6 in the width direction. Insert the long flat plate 51 so that the centers on the short side of the flat plate 51 coincide with each other. As a result, the long flat plate 51 is fed, and at the same time, the cross-sectional shape in the lateral direction is bent into a U shape to form the heat dissipation base material 50 shown in FIG.

以下の説明では、図3に示すように、互いに平行な第1の平面52と第2の平面53の短手方向をX軸方向、長手方向をY軸方向といい、第1の平面52と第2の平面53とが離間している方向をZ軸方向という。この例において、放熱基材50での、第1の平面52と第2の平面53とが第3の平面54となす角度αは共に90度であり、第1の平面52と第2の平面53のX方向の幅は共にaであり、第3の平面54のZ軸方向の幅はbである。なお、放熱基材50のY軸方向の長さは任意である。 In the following description, as shown in FIG. 3, the lateral direction of the first plane 52 and the second plane 53 parallel to each other is referred to as the X-axis direction, the longitudinal direction is referred to as the Y-axis direction, and the first plane 52. The direction in which the second plane 53 is separated from the second plane 53 is called the Z-axis direction. In this example, the angle α formed by the first plane 52 and the second plane 53 with the third plane 54 in the heat radiating base material 50 is 90 degrees, and the first plane 52 and the second plane 52 are both flat. The width of 53 in the X direction is both a, and the width of the third plane 54 in the Z axis direction is b. The length of the heat radiating base material 50 in the Y-axis direction is arbitrary.

図3に示す放熱基材50の適数本を、図4に示すように、所定の間隔cを置いて、互いに平行に同一平面内に配列することで、放熱部材100とされる。放熱部材100は、各放熱基材50の第1の平面52・・が形成する上面101と、第2の平面53・・が形成する下面102とを有し、上面101と下面102は互いに平行であるとともに、2つの面101、102は、第3の平面54のZ軸方向の距離bだけ、離間している。 As shown in FIG. 4, an appropriate number of heat radiating base materials 50 shown in FIG. 3 are arranged in the same plane in parallel with each other at a predetermined interval c to form a heat radiating member 100. The heat radiating member 100 has an upper surface 101 formed by the first flat surface 52 ... Of each heat radiating base material 50 and a lower surface 102 formed by the second flat surface 53 ..., and the upper surface 101 and the lower surface 102 are parallel to each other. The two surfaces 101 and 102 are separated by a distance b in the Z-axis direction of the third plane 54.

必須ではないが、図4に示す放熱部材100では、適数本の放熱基材50は、隣接する放熱基材50、50の間に幅cの隙間55が形成されるようにして、互いに平行に配置されている。隙間55の幅cは任意であるが、原シート50aの厚みtよりも大きい幅であることが実際的である。また、第1の平面52と第2の平面53のX軸方向の幅aも任意であるが、a>2tであることは実際的である。 Although not essential, in the heat radiating member 100 shown in FIG. 4, an appropriate number of heat radiating base materials 50 are parallel to each other so that a gap 55 having a width c is formed between the adjacent heat radiating base materials 50 and 50. Is located in. The width c of the gap 55 is arbitrary, but it is practical that the width is larger than the thickness t of the original sheet 50a. Further, the width a of the first plane 52 and the second plane 53 in the X-axis direction is also arbitrary, but it is practical that a> 2t.

[樹脂材料300]
前記した放熱部材100を樹脂材料300内に埋入することで、放熱シート200が得られる。樹脂材料300は、樹脂単体でもよく、機能向上のためにフィラーを充填した樹脂であってもよい。樹脂としては、湿気硬化型、常温硬化型(1液タイプ、2液混合タイプのいずれも可)のシリコーン樹脂、エポキシ樹脂、ウレタン樹脂、等の熱硬化型樹脂、あるいは、ポリアミド樹脂、ポリフェニレンサルファイト樹脂、ポリイミド樹脂、等の熱可塑性樹脂を例示できる。フィラーとしては、銅、アルミ、銀、ニッケル、亜鉛、等の金属充填材、アルミナ、シリカ、窒化ホウ素、酸化亜鉛、酸化マグネシウム、グラファイト、等の無機充填材、を例示できる。さらに、前記した放熱部材100の製造に用いる材料を粒子化して前記樹脂材料300に混合した混合材料も用いることができる。
[Resin material 300]
By embedding the heat radiating member 100 in the resin material 300, the heat radiating sheet 200 can be obtained. The resin material 300 may be a simple substance of the resin, or may be a resin filled with a filler for improving the function. As the resin, a heat-curable resin such as a moisture-curable type, a room temperature-curable type (either a one-component type or a two-component mixed type), an epoxy resin, a urethane resin, or the like, a polyamide resin, or polyphenylene sulfide. Examples thereof include thermoplastic resins such as resins and polyimide resins. Examples of the filler include metal fillers such as copper, aluminum, silver, nickel and zinc, and inorganic fillers such as alumina, silica, boron nitride, zinc oxide, magnesium oxide and graphite. Further, a mixed material obtained by atomizing the material used for manufacturing the heat radiating member 100 and mixing it with the resin material 300 can also be used.

[放熱シート200の製造]
放熱部材100を前記の樹脂材料300中に埋入するには任意の方法で行うことができる。図5および図6はその一例を示している。最初に、図5に示すように、底面が平坦面である金型400内に、適数本の放熱基材50を互いに平行にかつ幅cの隙間55が形成されるようにして配置する。それにより、金型400内に、図4に示した形状の放熱部材100が形成される。その上から、前記した樹脂材料300を流し込む。樹脂は、前記隙間55を通って、放熱部材100の内部空間に入り込む。次に、図6に示すように、金型400に蓋401をして高さを整えた後、恒温槽に投入し、樹脂材料300を加熱硬化させる。冷却後に型から取り外すことで、図7に斜視図を、図8に側面図を示す放熱シート200が得られる。
[Manufacturing of heat dissipation sheet 200]
The heat radiating member 100 can be embedded in the resin material 300 by any method. 5 and 6 show an example thereof. First, as shown in FIG. 5, an appropriate number of heat-dissipating base materials 50 are arranged in a mold 400 having a flat bottom surface so as to form a gap 55 parallel to each other and having a width c. As a result, the heat radiating member 100 having the shape shown in FIG. 4 is formed in the mold 400. The resin material 300 described above is poured over the resin material 300. The resin enters the internal space of the heat radiating member 100 through the gap 55. Next, as shown in FIG. 6, the mold 400 is covered with a lid 401 to adjust the height, and then the mold 400 is put into a constant temperature bath to heat-cure the resin material 300. By removing it from the mold after cooling, a heat radiating sheet 200 having a perspective view shown in FIG. 7 and a side view shown in FIG. 8 can be obtained.

[放熱シート200の利点]
この施の形態の放熱シート200では、上面側には放熱部材100を構成する各放熱基材50の第1の平面52が広い面積で位置しており、下面側には放熱部材100を構成する各放熱基材50の第2の平面53が広い面積で位置している。そして、各放熱基材50の前記第1の平面52と第2の平面53は長手方向(Y軸方向)の全長において第3の平面54で接続している。そのために、被着体(発熱体等)との界面での熱伝達を効率的に行うことができ、実用時の熱抵抗を小さくできる。また、前記第3の平面54によって、厚み方向(Z軸方向)に途中で途切れることのない熱伝導パスが形成される。それにより、熱伝導率が達成される。さらに、この形態の放熱シート200は、Y軸方向に延びる前記距離cの隙間55を備えており、X軸に沿う面方向で柔軟に変形することができる。
[Advantages of heat dissipation sheet 200]
In the heat radiating sheet 200 of this embodiment, the first flat surface 52 of each heat radiating base material 50 constituting the heat radiating member 100 is located on the upper surface side in a wide area, and the heat radiating member 100 is formed on the lower surface side. The second plane 53 of each heat radiating base material 50 is located over a large area. The first plane 52 and the second plane 53 of each heat radiation base material 50 are connected by a third plane 54 in the overall length in the longitudinal direction (Y-axis direction). Therefore, heat transfer at the interface with the adherend (heating element or the like) can be efficiently performed, and the thermal resistance in practical use can be reduced. Further, the third plane 54 forms a heat conduction path that is not interrupted in the thickness direction (Z-axis direction). Thereby, thermal conductivity is achieved. Further, the heat radiating sheet 200 of this form is provided with a gap 55 having the distance c extending in the Y-axis direction, and can be flexibly deformed in the surface direction along the X-axis.

なお、前記した樹脂材料300の充填性をよりすぐれたものとするために、放熱基材50を形成する長尺状の平板51の全体にあるいは適宜の部位に、被着体(発熱体等)との接触面積を有意に阻害しない程度に、例えば全体の1vol%以下程度に、直径0.05mm程度の小孔を形成することもできる。 In addition, in order to improve the filling property of the resin material 300 described above, an adherend (heating element, etc.) may be applied to the entire long flat plate 51 forming the heat radiating base material 50 or to an appropriate portion. It is also possible to form a small hole having a diameter of about 0.05 mm so as not to significantly hinder the contact area with, for example, about 1 vol% or less of the whole.

[放熱シートの他の構成]
放熱シート200の全容積に対する放熱部材100の占める体積分率に特に制限はないが、5%以上、80%以下であることが望ましい。5%未満では、熱伝導率を高めることができず放熱材として有用でない。また放熱に寄与しない領域が広くなり、放熱シート内での伝熱ムラが大きくなるため製品内で想定外の高温部ができる可能性がある。80%を超えると、高い熱伝導率の放熱シートとなるが、硬くなりすぎて製品との界面熱抵抗が大きくなり、所望の放熱性能が得られないことが起こりうる。
[Other configurations of heat dissipation sheet]
The volume fraction occupied by the heat radiating member 100 with respect to the total volume of the heat radiating sheet 200 is not particularly limited, but is preferably 5% or more and 80% or less. If it is less than 5%, the thermal conductivity cannot be increased and it is not useful as a heat radiating material. In addition, the area that does not contribute to heat dissipation becomes wider, and the heat transfer unevenness in the heat dissipation sheet increases, so there is a possibility that an unexpectedly high temperature part may be formed in the product. If it exceeds 80%, the heat radiating sheet has a high thermal conductivity, but it may become too hard and the interfacial thermal resistance with the product becomes large, so that the desired heat radiating performance cannot be obtained.

放熱基材50を形成する原シート50aの厚みと放熱シート200の厚みの比は、1:3以上、1:10以下が好ましい。1:3未満であると、圧縮応力に対する放熱部材の厚み方向の柔軟性が低くなり、放熱シートとしての柔軟性が損なわれるため、製品との界面熱抵抗が大きくなり、所望の放熱性能が得られない恐れがある。1:10を超えると、放熱部材の体積分率を上げることができず、高熱伝導化できない。 The ratio of the thickness of the original sheet 50a forming the heat radiating base material 50 to the thickness of the heat radiating sheet 200 is preferably 1: 3 or more and 1:10 or less. If it is less than 1: 3, the flexibility of the heat radiating member in the thickness direction with respect to compressive stress is lowered, and the flexibility of the heat radiating sheet is impaired, so that the interfacial thermal resistance with the product is increased and the desired heat radiating performance is obtained. There is a risk that it will not be possible. If it exceeds 1:10, the volume fraction of the heat radiating member cannot be increased, and high thermal conductivity cannot be achieved.

[他の実施の形態−1]
図9は、放熱シートの他の実施の形態を示している。この放熱シート200aは、放熱シート100の表裏面に絶縁層103を設けた点で、上記した絶縁シート200と相違する。他の構成は、放熱シート200と同じである。絶縁層103の素材には、シリコーン樹脂、エポキシ樹脂、ウレタン樹脂、等の熱硬化型樹脂、あるいは、ポリアミド樹脂、ポリフェニレンサルファイト樹脂、ポリイミド樹脂のような樹脂材料、あるいはアルミナ、シリカ、窒化ホウ素などのセラミックス材料、のような材料を用いることができる。絶縁層103を設けることで、高熱伝導率と絶縁性の双方を確保した放熱シート200aが得られる。
[Other Embodiment-1]
FIG. 9 shows another embodiment of the heat dissipation sheet. The heat radiating sheet 200a is different from the above-mentioned insulating sheet 200 in that the heat radiating sheet 100 is provided with the insulating layers 103 on the front and back surfaces. Other configurations are the same as the heat radiating sheet 200. The material of the insulating layer 103 includes a heat-curable resin such as silicone resin, epoxy resin, urethane resin, a resin material such as polyamide resin, polyphenylene sulfide resin, and polyimide resin, or alumina, silica, boron nitride, and the like. Materials such as ceramics materials can be used. By providing the insulating layer 103, a heat radiating sheet 200a having both high thermal conductivity and insulating properties can be obtained.

[他の実施の形態−2]
図10は、放熱シートのさらに他の実施の形態を示している。この放熱シート200bは、表裏面に絶縁皮膜104を有する放熱基材50を用いて放熱部材100を構成している点で、上記した絶縁シート200と相違する。他の構成は、放熱シート200と同じである。絶縁皮膜104の素材としては、シリコーン樹脂、エポキシ樹脂、ウレタン樹脂、等の熱硬化型樹脂、あるいは、ポリアミド樹脂、ポリフェニレンサルファイト樹脂、ポリイミド樹脂のような樹脂材料、あるいはアルミナ、シリカ、窒化ホウ素などのセラミックス材料、のような材料を用いることができる。この絶縁シート200bでも、放熱部材100自体が絶縁性能を有することで、高熱伝導率と絶縁性の双方を確保することができる。
[Other Embodiment-2]
FIG. 10 shows still another embodiment of the heat dissipation sheet. The heat radiating sheet 200b is different from the above-mentioned insulating sheet 200 in that the heat radiating member 100 is formed by using the heat radiating base material 50 having the insulating film 104 on the front and back surfaces. Other configurations are the same as the heat radiating sheet 200. As the material of the insulating film 104, a thermosetting resin such as silicone resin, epoxy resin, urethane resin, or the like, a resin material such as polyamide resin, polyphenylene sulfide resin, or polyimide resin, or alumina, silica, boron nitride, etc. Materials such as ceramics materials can be used. Even in this insulating sheet 200b, since the heat radiating member 100 itself has an insulating performance, both high thermal conductivity and insulating properties can be ensured.

[他の実施の形態−3]
図11は、放熱シートのさらに他の実施の形態を示している。この放熱シート200cは、放熱部材100cとして、図3に基づき説明した放熱基材50を、同一方向にではなく、2個の放熱基材50が第3の平面54、54同士が対面するようにして配置して放熱基材組50kとし、その適数個を間隔cを置いて平行に配置した構成を持つ放熱部材100cを用いている点で、上記した放熱シート200と相違している。放熱基材組50kにおいて、対面する2つの第3の平面54、54同士は、密着していてもよく、隙間cを有していてもよい。
[Other Embodiment-3]
FIG. 11 shows yet another embodiment of the heat dissipation sheet. In this heat radiating sheet 200c, as the heat radiating member 100c, the heat radiating base material 50 described with reference to FIG. 3 is not oriented in the same direction, but the two heat radiating base materials 50 face each other on the third planes 54 and 54. It differs from the above-mentioned heat-dissipating sheet 200 in that it uses a heat-dissipating member 100c having a structure in which a heat-dissipating base material set 50k is arranged in parallel and an appropriate number of the heat-dissipating base materials are arranged in parallel at intervals c. In the heat radiating base material set 50k, the two third planes 54, 54 facing each other may be in close contact with each other or may have a gap c.

[他の実施の形態−4]
図12は、放熱シートのさらに他の実施の形態を示している。この放熱シート200dは、放熱部材として、図3に示した断面コ字状の放熱基材50ではなく、第1の平面52と第2の平面53とが、垂直な第3の平面54を中央にして互いに反対方向に折り曲げられている放熱基材50dの適数本を互いに平行に配列して形成した放熱部材100dを用いている点で、上記した放熱シート200と相違している。図示される様に、隣接する放熱基材50dにおいて、一方の放熱基材50dの第1の平面52の先端と他方の放熱基材50dの第3の平面54との間、および、一方の放熱基材50dの第2の平面53の先端と他方の放熱基材50dの第3の平面54との間に、間隔cが形成されるように、放熱基材50同士を平行配置することは好ましい態様である。
[Other Embodiment-4]
FIG. 12 shows still another embodiment of the heat dissipation sheet. As the heat radiating member, the heat radiating sheet 200d is not the heat radiating base material 50 having a U-shaped cross section shown in FIG. It differs from the above-mentioned heat-dissipating sheet 200 in that it uses a heat-dissipating member 100d formed by arranging an appropriate number of heat-dissipating base materials 50d that are bent in opposite directions in parallel with each other. As shown, in the adjacent heat radiation base material 50d, between the tip of the first plane 52 of one heat radiation base material 50d and the third plane 54 of the other heat radiation base material 50d, and one of the heat dissipation base materials. It is preferable to arrange the heat radiating base materials 50 in parallel so that a gap c is formed between the tip of the second plane 53 of the base material 50d and the third plane 54 of the other heat radiating base material 50d. It is an aspect.

[他の実施の形態−5]
図13は、放熱シートのさらに他の実施の形態を示している。この放熱シート200eは、放熱部材50eとして、前記第3の平面54が垂直面でなく、斜面となっている放熱基材50eの適数本を平行に配列した放熱部材100eを用いている点で、上記した放熱シート200と相違している。図示の例では、第1の平面52の右端と第2の平面53の左端とを、傾斜する第3の平面54が接続しているが、斜面である放熱基材50eの第1の平面52と第2の平面53との接続部位は、これに限らず、任意である。
[Other Embodiment-5]
FIG. 13 shows still another embodiment of the heat dissipation sheet. The heat radiating sheet 200e uses a heat radiating member 100e in which an appropriate number of heat radiating base materials 50e whose third plane 54 is not a vertical plane but a slope is used as the heat radiating member 50e. , It is different from the heat dissipation sheet 200 described above. In the illustrated example, the right end of the first plane 52 and the left end of the second plane 53 are connected to the inclined third plane 54, but the first plane 52 of the heat radiating base material 50e which is a slope is connected. The connection portion between the surface and the second plane 53 is not limited to this, and is arbitrary.

[他の実施の形態−6]
図14は、放熱部材100のさらに他の形態を示している。ここでは、放熱基材50fとして、図3に基づき説明した放熱基材50に対して、その第1の平面52から第3の平面54への延びる第1のスリット56、および第3の平面54から第2の平面53へ延びる第2のスリット57の適数本が、Y軸方向に直交するようにして、かつY軸方向に適当な間隔を置いて、それぞれ形成されている放熱基材50fを用いている。
[Other Embodiment-6]
FIG. 14 shows still another form of the heat radiating member 100. Here, as the heat radiating base material 50f, the first slit 56 extending from the first plane 52 to the third plane 54 and the third plane 54 with respect to the heat radiating base material 50 described with reference to FIG. A heat-dissipating base material 50f in which an appropriate number of second slits 57 extending from the second plane 53 to the second plane 53 are formed so as to be orthogonal to the Y-axis direction and at appropriate intervals in the Y-axis direction. Is used.

放熱基材50fの適数本を、図14に示すように、互いに平行に、また一定の間隔cを置いて配列することで、放熱部材100fが形成されている。この構成の放熱部材100fを用い、図5および図6に示したと同じようにして、放熱シート200を作製した場合、製造された放熱シート200は、X軸方向およびY軸方向の2方向において、高い柔軟性を備えたものとなる。 As shown in FIG. 14, the heat radiating member 100f is formed by arranging an appropriate number of heat radiating base materials 50f in parallel with each other and at regular intervals c. When the heat radiating sheet 200 is manufactured in the same manner as shown in FIGS. 5 and 6 using the heat radiating member 100f having this configuration, the manufactured heat radiating sheet 200 is produced in two directions, the X-axis direction and the Y-axis direction. It will be highly flexible.

なお、この形態の放熱基材50fは、原シート50aから幅aの長尺状の平板51を切り出すときに、または切り出し後の長尺状の平板51に対して、長尺状の平板51の左右の長辺から所定の間隔を置いて、第1のスリット56と第2の平面53に相当する切欠きを形成しておき、切欠き形成後の長尺状の平板51を折り曲げ加工することで、容易に形成することができる。 The heat radiating base material 50f of this form is formed by cutting a long flat plate 51 having a width a from the original sheet 50a, or with respect to the long flat plate 51 after cutting out. A notch corresponding to the first slit 56 and the second flat surface 53 is formed at a predetermined distance from the left and right long sides, and the long flat plate 51 after the notch is formed is bent. And can be easily formed.

以下、実施例と比較例により、本発明による放熱シート200の優位性を説明する。 Hereinafter, the superiority of the heat radiating sheet 200 according to the present invention will be described with reference to Examples and Comparative Examples.

[実施例品]
放熱基材50の原シート50aとして0.03mm厚の純Cu箔を用いた。前記原シート50aを用いて、図14に示した、幅Mである第1のスリット56および第2のスリット57を備えた形状の放熱基材50fを作製した。ただし、放熱基材50fとして、第1の平面52と第2の平面53のX軸方向での幅aを変えて、3種類の放熱基材50fを用意した。それぞれの放熱基材50fを、図14に示したようにして、互いに平行に配列し、図5および図6に示したと同じようにして、放熱部材100fの体積分率が異なる実施例1〜3の放熱シート200を作製した。樹脂材料300としては、液状シリコーン樹脂を用い、樹脂中に埋入させた後、恒温槽にて加熱硬化させて、放熱シート200とした。なお、具体的な寸法は、表1の実施例1〜3に示した。用いたシリコーン樹脂は、信越化学製KE−1870(付加反応型)であり、硬化条件は150℃×30分、粘度400mPa・s、硬化後硬さ15(デュロメータA)である。
[Example product]
A pure Cu foil having a thickness of 0.03 mm was used as the raw sheet 50a of the heat radiating base material 50. Using the original sheet 50a, a heat radiating base material 50f having a width M and a first slit 56 and a second slit 57 shown in FIG. 14 was produced. However, as the heat radiating base material 50f, three types of heat radiating base materials 50f were prepared by changing the width a of the first plane 52 and the second plane 53 in the X-axis direction. Examples 1 to 3 in which the heat-dissipating base materials 50f are arranged in parallel with each other as shown in FIG. 14 and the volume fractions of the heat-dissipating members 100f are different in the same manner as shown in FIGS. 5 and 6. The heat dissipation sheet 200 of the above was produced. As the resin material 300, a liquid silicone resin was used, embedded in the resin, and then heat-cured in a constant temperature bath to obtain a heat radiating sheet 200. Specific dimensions are shown in Examples 1 to 3 in Table 1. The silicone resin used was KE-1870 (addition reaction type) manufactured by Shin-Etsu Chemical Co., Ltd., and the curing conditions were 150 ° C. × 30 minutes, viscosity 400 mPa · s, and hardness after curing 15 (durometer A).

[比較例品]
同じ素材を用い、先に図15、図16に基づき説明した従来法により、放熱部材10を作製した。放熱部材10の作製時に、引き延ばし量を変え、表1に示す、放熱部材(Cu)の体積分率が異なる比較例1、2の放熱シートを作製した。なお、比較例1、2の傾斜角度は、図16(b)に示す傾斜角度A°である。
[Comparative example product]
Using the same material, the heat radiating member 10 was produced by the conventional method described above based on FIGS. 15 and 16. At the time of producing the heat radiating member 10, the stretching amount was changed, and the heat radiating sheets of Comparative Examples 1 and 2 shown in Table 1 having different volume fractions of the heat radiating member (Cu) were produced. The tilt angle of Comparative Examples 1 and 2 is the tilt angle A ° shown in FIG. 16B.

[特性試験]
実施例品1〜3、比較例品1、2について、定常法により、熱伝導率および熱抵抗を測定した。その結果を表1に示した。
[Characteristic test]
The thermal conductivity and thermal resistance of Examples 1 to 3 and Comparative Examples 1 and 2 were measured by a steady-state method. The results are shown in Table 1.

Figure 0006870538
[注1]傾斜角度αは、図14に示した放熱基材50fでの折り曲げ角度α、但し、比較例での傾斜角度αは、図16(b)での角度A°、
[注2]幅aは、図11に示した放熱基材50fでのX軸方向の幅a、
[注3]隙間cは、図14に示した放熱部材10fでの隙間c、Mは図14に示した放熱基材50fでの第1のスリット56および第2のスリット57の幅、
[注4]熱伝導率は放熱シート単体での放熱性能であり、熱抵抗は部材に挟まれた実用時を想定した放熱性能である。作製した放熱シートを所定のサイズ(φ20mm)にカットし、定常法で測定した。
Figure 0006870538
[Note 1] The tilt angle α is the bending angle α of the heat radiating base material 50f shown in FIG. 14, but the tilt angle α in the comparative example is the angle A ° in FIG. 16 (b).
[Note 2] The width a is the width a in the X-axis direction of the heat radiating base material 50f shown in FIG.
[Note 3] The gap c is the gap c in the heat radiating member 10f shown in FIG. 14, and M is the width of the first slit 56 and the second slit 57 in the heat radiating base material 50f shown in FIG.
[Note 4] The thermal conductivity is the heat dissipation performance of the heat dissipation sheet alone, and the thermal resistance is the heat dissipation performance assuming practical use sandwiched between members. The prepared heat dissipation sheet was cut into a predetermined size (φ20 mm) and measured by a steady method.

[評価]
実施例品と比較例品では、仕上がり厚みがいずれも0.3mmと等しく、さらに、放熱部材と樹脂との体積分率もほぼ等しいにもかかわらず、実施例品は比較例品と比較して、熱伝導率が大きく向上している。また、熱抵抗は、実施例品は、比較例品とそれぞれ比較して、小さくなっている。これは、本実施例で用いている放熱部材が、基本的に図7に示した形状であり、それにより、熱伝導パスが、比較例品と比較して、実質上、多くなった結果である。
[Evaluation]
In the example product and the comparative example product, the finished thickness is equal to 0.3 mm, and the volume fraction of the heat radiating member and the resin is almost the same, but the example product is compared with the comparative example product. , Thermal conductivity is greatly improved. Further, the thermal resistance of the example product is smaller than that of the comparative example product. This is a result that the heat radiating member used in this embodiment basically has the shape shown in FIG. 7, and as a result, the heat conduction path is substantially increased as compared with the comparative example product. is there.

50a…原シート、
50…放熱基材、
51…長尺状の平板、
52…第1の平面、
53…第2の平面、
54…第3の平面、
55…放熱基材間の隙間、
60…加工機、
61…凹溝、
62…第1の回転ロール、
63…凸条、
64…第2の回転ロール、
100…放熱部材、
101…放熱部材の上面、
102…放熱部材の下面、
200…放熱シート、
300…樹脂材料、
400…金型。
50a ... Original sheet,
50 ... Heat dissipation base material,
51 ... Long flat plate,
52 ... First plane,
53 ... Second plane,
54 ... Third plane,
55 ... Gap between heat dissipation base materials,
60 ... Processing machine,
61 ... concave groove,
62 ... First rotary roll,
63 ... Convex,
64 ... Second rotating roll,
100 ... Heat dissipation member,
101 ... The upper surface of the heat radiating member,
102 ... The lower surface of the heat dissipation member,
200 ... Heat dissipation sheet,
300 ... Resin material,
400 ... Mold.

Claims (1)

樹脂材料と前記樹脂材料より熱伝導率の高い材料でできた面方向への広がりと所要厚みを備えた放熱部材とを含む放熱シートであって、
前記放熱部材は、長尺状の平板の短辺側の断面を2つの平行な第1および第2の平面とその間をつなぐ第3の平面で構成されるように折り曲げられた放熱基材の適数本が、前記第1および第2の平面のうち、一方の平面が形成する上面と他方の平面が形成する下面とが互いに平行となるように配列された構成であり、
前記放熱部材は、各放熱基材の前記第1および第2の平面を残して全体が前記樹脂材料中に埋入しており、
前記放熱基材には、前記第1の平面から前記第3の平面に延びる第1のスリットと、前記第3の平面から前記第2の平面へ延びる第2スリットとが、前記放熱基材の長手方向に沿って、交互に形成されていることを特徴とする放熱シート。
A heat-dissipating sheet including a resin material and a heat-dissipating member made of a material having a higher thermal conductivity than the resin material and having a spread in the plane direction and a required thickness.
The heat dissipation member is elongated in the short sides of the flat cross section is the so folded heat radiation substrate composed of two parallel first and second planes third flat surface connecting between An appropriate number of the first and second planes are arranged so that the upper surface formed by one plane and the lower surface formed by the other plane are parallel to each other.
The heat radiating member is entirely embedded in the resin material except for the first and second planes of each heat radiating base material.
The heat radiating base material includes a first slit extending from the first plane to the third plane and a second slit extending from the third plane to the second plane of the heat radiating base material. A heat-dissipating sheet characterized in that it is formed alternately along the longitudinal direction.
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