JP6881968B2 - Method for manufacturing light source equipment, lithography equipment, and articles - Google Patents

Description

The present invention relates to a light source device, a lithography device, and a method for manufacturing an article.

In the manufacture of semiconductor devices and flat panel displays, lithography equipment such as exposure equipment that forms patterns by exposing a substrate is used.

In an exposure apparatus, a substrate is exposed using light emitted from a light source such as a mercury lamp, and when the light source emits light, the temperature of the light source rises. Therefore, it is necessary to cool the light source in order to suppress damage to the light source due to a temperature rise.

Patent Document 1 discloses a structure in which a light source having a structure in which a heat pipe is enclosed cools the light source by cooling a heat radiating plate attached to the heat pipe. Further, Patent Document 2 discloses a light source and a light source device having a structure in which cooling fins for heat dissipation are attached to a base portion of a light source and a refrigerant is blown onto the cooling fins from a plurality of nozzle ports to cool the light source. ..

As described above, Patent Document 1 and Patent Document 2 disclose a light source device for suppressing a temperature rise.

Japanese Unexamined Patent Publication No. 2000-75496 Japanese Unexamined Patent Publication No. 2003-17003

In a mercury lamp used as a light source, mercury enclosed inside as a luminescent substance evaporates due to heating by electric discharge. When all the mercury evaporates, the illuminance of the light from the mercury lamp becomes stable and becomes a steady state.

However, when the mercury lamp is cooled at the stage of evaporating mercury, the evaporation of mercury is suppressed, and there is a problem that it takes time for the illuminance of the light from the mercury lamp to reach a stable state.

Therefore, an object of the present invention is to provide a light source device, a lithography device, and a method for manufacturing an article, which can shorten the time until the light source becomes a steady state.

The light source device as one aspect of the present invention that solves the above problems is a light source device having a light source that irradiates light, and includes a cooling means that cools the light source by blowing a refrigerant onto the light source from an outlet, and the above. It includes a support portion that supports the cooling means , and has an adjusting portion that adjusts the direction in which the refrigerant is blown out. The expansion of the support portion causes the outlet to move and the direction in which the refrigerant is blown out changes. The flow rate of the refrigerant sprayed on the light source changes.

According to the present invention, it is possible to provide a light source device, a lithography device, and a method for manufacturing an article, which can shorten the time until the light source becomes a steady state.

It is a figure which showed the exposure apparatus. It is a figure which showed the light source device and the light source. It is a figure which showed the light source device, the nozzle, and the support part which concerns on Example 1. FIG. It is a figure which showed the spray pattern of a nozzle and the flow rate distribution of a refrigerant. It is a figure which showed the flow rate distribution of the light source apparatus and the refrigerant which concerns on Example 1. FIG. It is a figure which showed the flow rate distribution of the light source apparatus and the refrigerant which concerns on Example 1. FIG. It is a figure which showed the flow rate distribution of the light source apparatus and the refrigerant which concerns on Example 1. FIG. It is a figure which showed the light source apparatus which concerns on Example 2. It is a figure which showed the light source apparatus which concerns on Example 2. It is a figure which showed the light source apparatus and bellows which concerns on Example 3. FIG. It is a figure which showed the light source device and elastic hinge which concerns on Example 4. FIG. It is a figure which showed the light source apparatus which concerns on Example 5. It is a figure which showed the light source device, the nozzle, and the support part which concerns on Example 6. It is a figure which showed the light source device, the nozzle, and the plate member which concerns on Example 7. FIG. It is a figure which showed the light source device, the nozzle, and the working part which concerns on Example 8.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In the following examples, an example in which an exposure apparatus is used as the lithography apparatus will be described. In each figure, the same members are designated by the same reference numbers, and duplicate description will be omitted.

FIG. 1 is a diagram showing an exposure apparatus. The exposure apparatus includes a light source device 1, an illumination optical system 2, and a projection optical system 3. The light emitted from the light source device 1 illuminates the mask 4 on which the pattern is formed via the illumination optical system 2. The light that illuminates the mask 4 exposes the substrate 5 via the projection optical system 3.

FIG. 2 is a diagram showing a light source device and a light source. In FIG. 2A, the light source device 1 includes a light source 10, an elliptical mirror 11, and a nozzle 12 (cooling means). In addition to the mercury lamp, the light source 10 may be a light source such as a metal halide lamp or a sodium lamp in which the temperature of the luminescent substance inside rises and the luminescent substance evaporates. Further, in FIG. 2B, the light source 10 includes a first base portion 101, a cathode portion 102, a light emitting portion 103, an anode portion 104, a second base portion 105, and a lead wire 106. The light emitting portion 103 in the center of the light source 10 covers the cathode portion 102 and the anode portion 104 with a glass container. A luminescent substance such as mercury is sealed inside the light emitting unit 103. Further, the cathode portion 102 and the anode portion 104 are arranged to face each other in the light emitting portion 103, and the cathode portion 102 and the anode portion 104 are connected to a lead wire 106 which is a metal conductor. The lead wire 106 is connected to a power source (not shown) to supply electricity from the power source to the cathode portion 102 and the anode portion 104.

For example, when a luminescent substance such as mercury is a liquid at room temperature, the light source 10 emits light in a state where the luminescent substance is heated and evaporated by discharging between the cathode portion 102 and the anode portion 104. Here, if the light source 10 is cooled while the luminescent substance is evaporating, it takes time to evaporate the luminescent substance. On the other hand, when the light emitting substance evaporates and the light source 10 emits light due to electric discharge, the temperature of the light emitting unit 103 rises. Therefore, when the light source 10 emits light for a long time, the glass container of the light emitting unit 103 accumulates thermal stress. It may be damaged. Therefore, it is necessary to cool the light source 10 while the light source 10 is emitting light. Further, if the temperature of the light source 10 is detected by using a temperature sensor or the like and the flow rate of the refrigerant sprayed on the light source 10 is controlled, a temperature sensor, a control device or the like is required.

FIG. 3 is a diagram showing a light source device, a nozzle, and a support portion according to the first embodiment. The nozzle 12 shown in FIG. 3A includes an outlet 120 for blowing out a refrigerant, a first pipe 121, and a second pipe 122. Although only one nozzle 12 is shown for simplification, a plurality of nozzles 12 may be arranged in the light source device 1. Further, although the form in which the second base portion 105 is cooled by the refrigerant blown out by the nozzle 12 is shown, other parts of the light source 10 such as the light emitting portion 103 and the first base portion 101 are cooled. Is also good.

The outlet 120 has an opening for blowing out the refrigerant, and the flow rate distribution of the refrigerant can be changed by changing the shape of the opening. The flow rate distribution of the refrigerant will be described later. Further, the refrigerant may include air, a gas such as water vapor, or a liquid such as water. The outlet 120 is connected to a refrigerant supply device (not shown) via pipes such as the first pipe 121 and the second pipe 122. Refrigerant is supplied from the supply device, and the refrigerant is blown out from the opening of the outlet 120 through the pipes such as the first pipe 121 and the second pipe 122. Since it is necessary to fix the position of the outlet 120, the first pipe 121 is made of a highly rigid material. For example, it is desirable that it is covered with a coating of a metal material. Further, since the shape of the second pipe 122 needs to be freely changed, it is desirable that the second pipe 122 is, for example, a fluorine-based resin that is resistant to heat and light.

Here, the flow rate distribution of the refrigerant will be described. FIG. 4 is a diagram showing a nozzle spray pattern and a refrigerant flow rate distribution. The spray pattern represents a region where the refrigerant spreads in a plane orthogonal to the direction in which the refrigerant is blown out by the nozzle 12, which is separated from the outlet 120 of the nozzle 12 by a predetermined distance. FIG. 4A shows a case where the flow rate distribution of the refrigerant has a convex distribution. The spray pattern on the left shows the spread of the refrigerant in the plane. On the plane, when the x-axis and the y-axis are taken in the directions orthogonal to each other with the center of the spray pattern as the origin, the flow rate distribution on the right shows the flow rate distribution of the refrigerant on the y-axis. In the convex distribution, the flow rate at the center of the spray pattern is high, and the flow rate decreases as the distance from the center increases.

Further, FIG. 4B shows a case where the flow rate distribution of the refrigerant has a trapezoidal distribution. Similar to FIG. 4A, the spray pattern on the left shows the spread of the refrigerant in the plane, and the flow rate distribution on the right shows the flow rate distribution of the refrigerant on the y-axis. In the trapezoidal distribution, the flow rate is constant near the center of the spray pattern. In addition, the flow rate exceeds a certain range and decreases as the distance from the center increases.

Here, the description returns to FIG. 3 (a). The support portion 13 (adjustment portion) includes a mounting member 130, a first support member 131, and a second support member 132. A nozzle 12 is attached to the attachment member 130 and is supported by the first support member 131 and the second support member 132, respectively. Further, it is desirable that the material of the mounting member 130 is a material having a small coefficient of linear expansion. Not only a metallic material but also a non-metallic material such as ceramic may be used.

The first support member 131 and the second support member 132 are fixed to the housing of the light source device 1 at an end portion different from the end portion fixed to the mounting member 130. Further, the first support member 131 and the second support member 132 are made of materials having different coefficients of linear expansion. For example, the first support member 131 may be made of aluminum, and the second support member 132 may be made of stainless steel having a coefficient of linear expansion smaller than that of aluminum.

3 (b) and 3 (c) are enlarged views of the nozzle 12 and the support portion 13. In FIG. 3B, the lengths of the first support member 131 and the second support member 132 in the X direction are L ₁ and L ₂ , respectively, and the length of the mounting member 130 in the Y direction is L _c . Further, the coefficient of linear expansion of the first support member 131 and the second support member 132 is α ₁ and α ₂ (α ₁ > α ₂ ), respectively, and the temperature change of the first support member 131 and the second support member 132 is Δt. To do. The direction θ in which the refrigerant is blown out by the nozzle 12 in FIG. 3C is represented by the following equation (1).
sin θ = (L ₁ α ₁ Δt−L ₂ α ₂ Δt) / L _c (1)
However, before the light source 10 emits light, Δt = 0 and θ = 0.

_{Further, assuming} that θ is a minute angle and the distance from the mounting member 130 to the outlet 120 of the nozzle 12 is L n, the distance d to which the outlet 120 of the nozzle 12 moves is expressed by the following equation (2). To.
d = L _n · sin θ ··· (2)

Therefore, the change in the flow rate can be obtained from the direction θ in which the refrigerant is blown out by the nozzle 12 and the flow rate distribution of the refrigerant.

The difference in length between the first support member 131 and the second support member 132 in the X direction is large, and the mounting member 130 is deformed to connect the first support member 131 and the second support member 132 of the mounting member 130. Sometimes a part cannot be considered a straight line. In such a case, the deformed shape of the mounting member 130 may be obtained by an experiment or simulation, and θ with respect to the temperature change Δt may be obtained in advance. Further, when the mounting member 130 is deformed, it is desirable to select a material that is not easily fatigued and broken even if it is repeatedly deformed. For example, stainless steel used for the spring may be selected.

FIG. 5 is a diagram showing the flow rate distribution of the light source device and the refrigerant according to the first embodiment. Further, in FIG. 5A, a graph of the flow rate distribution of the nozzle 12 before the light from the light source 10 becomes a steady state and the refrigerant blown out by the nozzle 12 is shown. Before the light from the light source 10 becomes a steady state, the temperature of the first support member 131 and the second support member 132 does not rise due to the light from the light source 10, and the temperature of the first support member 131 and the second support member 132 rises. It is in a state of not expanding due to. In this state, the flow rate of the refrigerant blown out by the nozzle 12 hitting the second base portion 105 is small. A state in which the refrigerant having a flow rate in the range A in the flow rate distribution of the refrigerant shown in FIG. 5B hits the second base portion 105.

FIG. 6 is a diagram showing the flow rate distribution of the light source device and the refrigerant according to the first embodiment. Further, in FIG. 6A, a graph of the flow rate distribution of the nozzle 12 after the light from the light source 10 is in a steady state and the refrigerant blown out by the nozzle 12 is shown. After the light from the light source 10 becomes a steady state, the temperature of the first support member 131 and the second support member 132 rises due to the light from the light source 10, and the first support member 131 and the second support member 132 Inflate. When the illuminance of the light from the light source 10 becomes constant, the temperature and expansion amount of the first support member 131 and the second support member 132 also become constant, and the nozzle 12 becomes a constant direction. In this state, the flow rate of the refrigerant blown out by the nozzle 12 hitting the second base portion 105 is higher than that before the light source 10 emits light. A state in which the refrigerant having a flow rate in the range B in the flow rate distribution of the refrigerant shown in FIG. 6B hits the second base portion 105.

FIG. 7 is a diagram showing the flow rate distribution of the light source device and the refrigerant according to the first embodiment. FIG. 7A shows a graph of the flow rate distribution of the nozzle 12 after the light from the light source 10 is in a steady state and the refrigerant blown out by the nozzle 12. The difference from FIG. 6 is that the flow rate distribution of the refrigerant is a trapezoidal distribution. Even in the case of the trapezoidal distribution, the flow rate of the refrigerant blown out by the nozzle 12 hitting the second base portion 105 is higher than that before the light source 10 emits light. Further, in the steady state, the refrigerant having a flow rate in the range C in the flow rate distribution of the refrigerant shown in FIG. 7B is in contact with the second base portion 105. Therefore, it is possible to reduce the change in the flow rate of the refrigerant with respect to the change in the temperature of the first support member 131 and the second support member 132, and it is possible to stably cool the second base portion 105.

As described above, according to the exposure apparatus according to the first embodiment, the light emitted from the light source 10 causes the first support member 131 and the second support member 132 to expand due to the temperature rise, and the refrigerant is blown out by the nozzle 12. Changes, and the flow rate of the refrigerant that hits the second base portion 105 increases. Therefore, the light source can be cooled more easily.

Next, the exposure apparatus according to the second embodiment will be described. Matters not mentioned here may follow Example 1.

8 and 9 are views showing the light source device according to the second embodiment. The first support member 131 constituting the support portion 13 in FIG. 8 is subjected to a surface treatment that promotes light absorption. For example, black chrome plating is applied and surface treatment is performed so that the surface of the first support member 131 becomes black. Further, for example, the surface roughness of the first support member 131 may be roughened by a blast treatment or the like in which small particles are sprayed onto the surface of the object to roughen the surface. By these surface treatments, the light absorption rate of the first support member 131 is increased, and the temperature is likely to increase. Therefore, the coefficient of linear expansion of the first support member 131 is larger than that in the case where the surface treatment that promotes the absorption of light is not performed, and the direction θ in which the refrigerant is blown out by the nozzle 12 can be increased.

The surface of the second support member 132 that constitutes the support portion 13 in FIG. 9 is subjected to a surface treatment that suppresses the absorption of light. For example, by performing a mirror surface treatment that reflects light on the surface of the second support member 132, the light absorption rate of the second support member 132 is lowered, and the temperature is less likely to rise. Therefore, the coefficient of linear expansion of the second support member 132 is smaller than that in the case where the surface treatment that suppresses the absorption of light is not performed, and the direction θ in which the refrigerant is blown out by the nozzle 12 can be increased.

Further, the first support member 131 that has been subjected to a surface treatment that promotes the absorption of light and the second support member 132 that has been subjected to a surface treatment that suppresses the absorption of light may be combined.

As described above, according to the exposure apparatus according to the second embodiment, the light emitted from the light source 10 causes the first support member 131 and the second support member 132 to expand due to the temperature rise, and the refrigerant is blown out by the nozzle 12. Changes, and the flow rate of the refrigerant that hits the second base portion 105 increases. Further, by applying surface treatment to the first support member 131 and the second support member 132, the direction θ in which the refrigerant is blown out by the nozzle 12 can be increased. Therefore, the light source can be cooled more easily.

Next, the exposure apparatus according to the third embodiment will be described. Matters not mentioned here may follow Example 1.

FIG. 10 is a diagram showing a light source device and bellows according to the third embodiment. The first support member 131 constituting the support portion 13 in FIG. 10A uses a bellows that can expand and contract by enclosing a fluid inside. FIG. 10B is an enlarged view of the bellows. The bellows has a bellows-like outer shape and is designed so that the volume of the fluid enclosed inside expands and expands due to temperature changes. Since the first support member 131 using the bellows can be designed so that its linear expansion coefficient is larger than the linear expansion coefficient of a metal such as aluminum, the direction θ in which the refrigerant is blown out by the nozzle 12 can be increased. The fluid to be sealed inside the bellows is, for example, a gas such as air or a liquid such as oil.

As described above, according to the exposure apparatus according to the third embodiment, the first support member 131 and the second support member 132 expand due to the temperature rise due to the light emitted from the light source 10, and the refrigerant is blown out by the nozzle 12. Changes, and the flow rate of the refrigerant that hits the second base portion 105 increases. Further, by using the bellows as the first support member 131, the direction θ in which the refrigerant is blown out by the nozzle 12 can be increased. Therefore, the light source can be cooled more easily.

Next, the exposure apparatus according to the fourth embodiment will be described. Matters not mentioned here may follow Example 1.

FIG. 11 is a diagram showing a light source device and an elastic hinge according to the fourth embodiment. An elastic hinge 135 is formed between the first support member 131 and the second support member 132 that form the support portion 13 in FIG. 11A and the attachment member 130. The elastic hinge 135 is configured to allow the mounting member 130 to rotate around the Z axis. FIG. 11B is an enlarged view of the elastic hinge 135. When the first support member 131 expands due to a temperature rise, the angle between the contact surface of the mounting member 130 and the contact surface of the first support member 131 of the elastic hinge 135 changes. Similarly, when the second support member 132 expands due to a temperature rise, the angle between the contact surface of the mounting member 130 and the contact surface of the second support member 132 in the elastic hinge 135 changes. These changes in angle allow the mounting member 130 to rotate about the Z axis. In particular, when the difference between the linear expansion coefficients of the first support member 131 and the second support member 132 is large, the direction θ in which the refrigerant is blown out by the nozzle 12 can be easily changed. Therefore, when the difference between the linear expansion coefficients of the first support member 131 and the second support member 132 is larger than that of the first embodiment, the elastic hinge 135 is configured in the support portion 13 according to the second and third embodiments. It is valid.

As described above, according to the exposure apparatus according to the fourth embodiment, the light emitted from the light source 10 causes the first support member 131 and the second support member 132 to expand due to the temperature rise, and the refrigerant is blown out by the nozzle 12. Changes, and the flow rate of the refrigerant that hits the second base portion 105 increases. Further, by using the elastic hinge 135, when the difference between the linear expansion coefficients of the first support member 131 and the second support member 132 is large, the direction θ in which the refrigerant is blown out by the nozzle 12 can be easily changed.

Next, the exposure apparatus according to the fifth embodiment will be described. Matters not mentioned here may follow Example 1.

FIG. 12 is a diagram showing a light source device according to the fifth embodiment. The support portion 13 in FIG. 12 is composed of a first support member 131 and a mounting member 130. The second support member 132 in Examples 1 to 4 is not configured, and the attachment member 130 is extended in the X direction. That is, the mounting member 130 has an L-shape and is fixed to the housing of the first support member 131 and the light source device 1. As the first support member 131 expands due to the temperature rise, the direction in which the refrigerant is blown out by the nozzle 12 changes. Here, the coefficient of linear expansion of the mounting member 130 is assumed to be sufficiently smaller than that of the first support member 131. Further, at least one of the mounting member 130, the first support member 131, and the housing of the light source device 1 may be fixed via the elastic hinge 135 in the fourth embodiment.

As described above, according to the exposure apparatus according to the fifth embodiment, the light emitted from the light source 10 causes the first support member 131 to expand due to the temperature rise, and the direction in which the refrigerant is blown out by the nozzle 12 changes. 2 The flow rate of the refrigerant that hits the base 105 increases. Further, due to the configuration in which the mounting member 130 is fixed to the housing of the first support member 131 and the light source device 1, when the difference in expansion between the first support member 131 and the second support member 132 is large, the nozzle 12 can easily be used. The direction θ at which the refrigerant is blown out can be changed.

Next, the exposure apparatus according to the sixth embodiment will be described. Matters not mentioned here may follow Example 1.

FIG. 13 is a diagram showing a light source device, a nozzle, and a support portion according to the sixth embodiment. The support portion 13 in FIG. 13A has four support members. FIG. 13B is an enlarged view of the nozzle 12 and the support portion 13 according to the sixth embodiment. The mounting member 130 has a cross shape, and the first support member 131, the second support member 132, the third support member 133, and the fourth support member 134 are attached to the four cross-shaped tips of the mounting member 130, respectively. Is fixed via an elastic hinge 136. The elastic hinge 136 is configured so that the mounting member 130 can rotate in two directions, the Y direction and the Z direction.

By designing the coefficient of linear expansion of the first support member 131 to the fourth support member 134, it is possible to give a degree of freedom to the movement locus of the outlet 120 of the nozzle 12. For example, according to the specifications, the light source 10 can be effectively cooled by making the trajectory so that the refrigerant is applied from the portion where the upper limit temperature is low.

Further, in order to design the linear expansion coefficient of the first support member 131 to the fourth support member 134, each material may be changed, the surface treatment according to the second embodiment may be applied, or the bellows according to the third embodiment may be used. can do.

As described above, according to the exposure apparatus according to the fifth embodiment, the light emitted from the light source 10 causes the first support member 131 to the fourth support member 134 to expand due to the temperature rise, and the refrigerant is blown out by the nozzle 12. Changes, and the flow rate of the refrigerant that hits the second base portion 105 increases. Further, the light source 10 can be effectively cooled by adjusting the coefficient of linear expansion of the first support member 131 to the fourth support member 134.

Next, the exposure apparatus according to the seventh embodiment will be described. Matters not mentioned here may follow Example 1.

FIG. 14 is a diagram showing a light source device, a nozzle, and a plate member according to the seventh embodiment. In FIG. 14A, a plate member 140 (adjustment portion) made of materials having different linear expansion coefficients is arranged at the tip of the outlet 120 of the nozzle 12. The plate member 140 may be attached to the outlet 120 of the nozzle 12, or may be attached to the housing of the light source device 1 by an attachment member (not shown).

FIG. 14A shows a state before the light is irradiated from the light source 10, and the plate member 140 does not expand due to the temperature rise. In this state, the blowing direction of the refrigerant blown out from the nozzle 12 has not changed, or the blowing direction of a part of the refrigerant has only changed slightly.

In FIG. 14B, the light from the light source 10 is in a steady state, and the plate member 140 is expanded due to the temperature rise. In this state, the shape is deformed due to the difference in the amount of expansion of the materials having different linear expansion coefficients. Further, the refrigerant blown out from the nozzle 12 hits the plate member 140, the blowing direction of the refrigerant changes in the direction of the second base portion 105, and the flow rate of the refrigerant blown to the second base portion 105 increases.

As described above, according to the exposure apparatus according to the seventh embodiment, the plate member 140 expands due to the temperature rise due to the light emitted from the light source 10, and the direction in which the refrigerant blown out by the nozzle 12 is blown out changes. The flow rate of the refrigerant that hits the second base portion 105 increases.

Next, the exposure apparatus according to the eighth embodiment will be described. Matters not mentioned here may follow Example 1.

FIG. 15 is a diagram showing a light source device, a nozzle, and an action unit according to the eighth embodiment. In FIG. 15A, an action unit 15 (adjustment unit) for applying a force to the first pipe 121 or the second pipe 122 of the nozzle 12 is arranged. The action unit 15 includes an action member 151 that expands due to a temperature rise and exerts a force on the first pipe 121 or the second pipe 122, and an attachment member 150 that attaches the action member 151 to the housing of the light source device 1. The mounting member 150 is preferably made of a material having a small coefficient of linear expansion.

FIG. 15A shows a state before the light is irradiated from the light source 10, and the working member 151 is not expanded due to the temperature rise. In this state, no force is applied to the first pipe 121 or the second pipe 122 of the nozzle 12, and the blowing direction of the refrigerant blown out from the nozzle 12 has not changed.

In FIG. 15B, the light from the light source 10 is in a steady state, and the working member 151 expands due to the temperature rise to apply a force to the first pipe 121 or the second pipe 122. In this state, the nozzle 12 changes the direction in which the refrigerant is blown out, and the direction in which the refrigerant is blown out changes in the direction of the second base portion 105.

As described above, according to the exposure apparatus according to the eighth embodiment, the light emitted from the light source 10 causes the working member 151 to expand due to the temperature rise, and the direction in which the refrigerant blown out by the nozzle 12 is blown out changes. The flow rate of the refrigerant that hits the second base portion 105 increases.

(Manufacturing method of goods)
As an article, for example, a method for manufacturing a device (semiconductor device, magnetic storage medium, liquid crystal display element, etc.), a color filter, a hard disk, or the like will be described. Such a manufacturing method includes a step of forming a pattern on a substrate (wafer, glass plate, film-like substrate, etc.) using an exposure apparatus. Such a manufacturing method further includes a step of processing a patterned substrate. The treatment step may include removing the residual film of the pattern. It may also include other well-known steps such as etching the substrate with the pattern as a mask. The method for producing an article in the present embodiment is advantageous in at least one of the performance, quality, productivity and production cost of the article as compared with the conventional method.

Although the preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and modifications can be made within the scope of the gist thereof. As an example of the lithography apparatus, an exposure apparatus that forms a pattern by exposing a substrate has been described, but the present invention is not limited to the exposure apparatus. Further, as an example of the lithography apparatus, an apparatus such as a drawing apparatus that draws on a substrate with a charged particle beam (electron beam, ion beam, etc.) via a charged particle optical system and forms a pattern on the substrate may be used. .. Further, as an example of the lithography apparatus, an imprint apparatus may be used in which an imprint material (resin or the like) on a substrate is molded (molded) by a mold to form a pattern on the substrate. Further, in the manufacture of articles such as devices such as a coating device for applying a photosensitive medium on the surface of a substrate and a developing device for developing a substrate on which a pattern is transferred, steps other than the steps performed by the lithography device as described above are performed. The manufacturing equipment to be carried out may also be included.

Further, Examples 1 to 8 can be carried out not only individually but also in any combination of Examples 1 to 8.

Claims (10)

A light source device having a light source that irradiates light.
A cooling means for cooling the light source by blowing a refrigerant from the outlet to the light source,
It includes a support portion that supports the cooling means , and has an adjustment portion that adjusts the blowing direction of the refrigerant.
A light source device characterized in that the flow rate of the refrigerant sprayed on the light source changes as the outlet moves due to the expansion of the support portion and the direction in which the refrigerant blows out changes. The light source device according to claim 1 , wherein the support portion includes a mounting member for mounting the cooling means and a support member for supporting the mounting member, and the outlet moves due to expansion of the support member. .. It said support member is made of a linear expansion coefficient of different members, the expansion amount due to a rise in temperature according to claim 2, wherein the outlet by different in each of the plurality of members are moved Light source device. The second or third aspect of the present invention, wherein the support member is composed of a plurality of members having different light absorption rates, and the outlet moves due to a difference in the amount of expansion due to a temperature rise among the plurality of members. Light source device. A light source device having a light source that irradiates light.
A cooling means for cooling the light source by blowing a refrigerant from the outlet to the light source,
It includes an acting part that exerts a force on the cooling means, and has an adjusting part that adjusts the blowing direction of the refrigerant.
A feature is that the outlet is moved by applying a force to the cooling means due to the expansion of the acting portion, and the flow rate of the refrigerant blown to the light source is changed by changing the blowing direction of the refrigerant. Light source device. A light source device having a light source that irradiates light.
A cooling means for cooling the light source by blowing a refrigerant onto the light source,
It has an adjusting unit that adjusts the direction in which the refrigerant is blown out.
By absorbing the light from the light source, the temperature of the adjusting unit rises, and by expanding the adjusting unit, the direction in which the refrigerant is blown out changes, so that the flow rate of the refrigerant blown onto the light source changes. A featured light source device. The light source device according to any one of claims 1 to 6 , wherein the luminescent substance evaporates as the temperature of the luminescent substance inside the light source rises. The light source device according to claim 7 , wherein the light source includes a mercury lamp. A lithographic apparatus that forms a pattern on a substrate and includes the light source apparatus according to any one of claims 1 to 8. A step of forming a pattern on a substrate by using the lithography apparatus according to claim 9.
A method for producing an article, which comprises a step of processing the substrate on which the pattern is formed in the step.

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