JP6888151B2 - Surveying device leveling device and leveling table - Google Patents

Description

The present invention relates to a leveling device of a surveying device and a leveling table used in the leveling device .

Precision machines and surveying devices are equipped with a leveling device in order to set the device in a highly accurate horizontal posture. The leveling device tilts the mounting table on which the surveying device main body is installed on two horizontal axes to make it horizontal.

A screw feeding device is used as a device for tilting. When a screw feed device is used for a mechanism in which the movable part tilts, the screw feed device gives a straight displacement to the movable part, and the movable part tilts due to the straight displacement. A relative inclination occurs in the connecting portion due to the inclination of the movable portion. Therefore, the connecting portion is required to have a function of absorbing the relative inclination and the displacement due to the inclination.

Conventionally, in a structure capable of tilting on two horizontal axes, a rotating shaft and a bearing have been provided for each axis. Further, as a method of connecting the tilting portion and the straight traveling portion, a universal joint or the like has been considered, but it cannot be said that it is a small and easy connecting method.

Japanese Unexamined Patent Publication No. 2000-149467

The present invention provides a leveling device for a surveying device having a simple configuration and a leveling table used for the leveling device .

The present invention comprises a ring-shaped main body frame, an X-axis frame concentrically provided inside the main body frame and tiltably provided about the X-axis with respect to the main body frame, and above the X-axis frame. A Y-axis frame provided concentrically with the X-axis frame and tiltably provided about a Y-axis orthogonal to the X-axis in the same plane, and the X-axis frame includes the above-mentioned X-axis frame. The first and second shafts are provided so that the required amount rises so as to overlap with the main body frame and extends toward both outer peripheral sides along the X axis, and the first and second shafts of the main body frame are provided. Conical first and second ball receiving holes are provided in the portions facing the portions, respectively, and first conical holes facing the first ball receiving holes are provided on the lower surface of the first shaft portion. A first steel ball is interposed between the first ball receiving hole and the first conical hole, and a first V groove parallel to the X axis is formed on the lower surface of the second shaft portion. A second steel ball is interposed between the first V-groove and the second ball receiving hole, and a conical first on the Y-axis at the peripheral edge of the X-axis frame. A third and fourth ball receiving holes are provided, and a second conical hole facing the third ball receiving hole is provided on the lower surface of the Y-axis frame, and the third ball receiving hole and the second conical hole are provided. A third steel ball is interposed between them, and a second V-groove is provided on the lower surface of the Y-axis frame so as to face the fourth ball receiving hole and parallel to the Y-axis. A fourth steel ball is interposed between the ball receiving hole and the second V-groove, and the first and second steel balls are provided on the X-axis, and the third and fourth steel balls are provided. The steel balls are provided on the Y-axis, the X-axis frame is tiltable around the first and second steel balls, and the Y-axis frame is the third and fourth steel balls. It relates to a leveling table configured to be tiltable in the center.

The present invention also relates to a leveling table in which the surveying apparatus main body is attached to the upper surface of the Y-axis frame.

Further, in the present invention, the leveling table, the first fixed leg portion extending downward from the main body frame, the second fixed leg portion extending downward from the X-axis frame, and the lower portion from the X-axis frame. It is provided between the first tilting leg portion extending to, the second tilting leg portion extending downward from the Y-axis frame, and the first fixed leg portion and the first tilting leg portion. A screw feeding device and a screw feeding device provided between the second fixed leg portion and the second tilting leg portion are provided, and both screw feeding devices are a screw rod rotated by a motor, respectively. A nut screwing into the screw rod is provided, and a V-groove is formed at the tip of the tilting leg portion toward the center of rotation of the tilting leg portion, and from the tip along the center of the V-groove. A notch is formed, the screw rod inserts the notch in a non-contact manner, the nut has a spherical surface concentric with the axis of the nut, the spherical surface contacts the V-groove, and the tilting leg and the said. A detent that restrains the rotation of the nut is provided between the nuts, and a spring that brings the spherical surface into contact with the V-groove is provided between the tilting leg and the nut, and the tip of the tilting leg is provided. The present invention relates to a leveling device of a surveying device configured to give a displacement of a circular orbit centered on the tilting leg portion.

The present invention also relates to a leveling device of a surveying device provided so that the direction of action of the spring force is inclined with respect to the axial center of the screw rod.

The present invention also relates to a leveling device of a surveying device provided so that the component force of the spring force generates a rotational force around the axial center of the screw rod in the nut. ..

Further, the present invention relates to a leveling device of a surveying device in which two springs are provided by sandwiching the screw rod and the two springs are set so that the spring forces are different.

The present invention also relates to a leveling device for a surveying device provided so that the direction of action of the spring force is inclined with respect to a plane including the axis of the screw rod.

Further, in the present invention, the turning pin has a turning pin provided at the tip of the tilting leg portion and a slit groove formed in the nut, and the turning pin is slidable in the slit groove. It is related to the leveling device of the surveying device fitted to.

Further, in the present invention, the turning stop has a turning pin provided at the tip end portion of the tilting leg portion and a pin projecting from the nut in a direction orthogonal to the axis of the screw rod. The present invention relates to a leveling device of a surveying device in which the turning pin and the pin are brought into contact with each other.

According to the present invention, a ring-shaped main body frame, an X-axis frame concentrically provided inside the main body frame and tiltably provided about the X-axis with respect to the main body frame, and the X-axis frame. A Y-axis frame provided concentrically with the X-axis frame and tiltably provided about a Y-axis orthogonal to the X-axis in the same plane is provided on the X-axis frame. The first and second shaft portions are provided so as to rise by a required amount so as to overlap with the main body frame and extend toward both outer peripheral sides along the X axis, and the first and second shaft portions of the main body frame are provided. First and second ball receiving holes having a conical shape are provided in the portion facing the shaft portion of the above, and the first conical hole facing the first ball receiving hole is provided on the lower surface of the first shaft portion. Is provided, a first steel ball is interposed between the first ball receiving hole and the first conical hole, and a first V parallel to the X axis is provided on the lower surface of the second shaft portion. A groove is formed, a second steel ball is interposed between the first V-groove and the second ball receiving hole, and a conical shape is formed on the Y-axis at the peripheral edge of the X-axis frame. The third and fourth ball receiving holes are provided, and a second conical hole facing the third ball receiving hole is provided on the lower surface of the Y-axis frame, and the third ball receiving hole and the second cone are provided. A third steel ball is interposed between the holes, and a second V-groove is provided on the lower surface of the Y-axis frame so as to face the fourth ball receiving hole and parallel to the Y-axis. A fourth steel ball is interposed between the ball receiving hole 4 and the second V-groove, and the first and second steel balls are provided on the X-axis, and the third and third steel balls are provided. The steel ball of No. 4 is provided on the Y-axis, the X-axis frame is tiltable about the first and second steel balls, and the Y-axis frame is the third and fourth steels. Since it is configured to tilt freely around the sphere, it is not necessary to use a rotation axis as the center of tilt, the structure is simplified, and the Y-axis frame tilts around the X-axis and around the Y-axis. And since the X-axis and the Y-axis are in the same plane, the tilting operation becomes simple. Further, the main body frame, the X-axis frame, and the Y-axis frame may be assembled in sequence, and unlike a tilting table using a shaft and a bearing, complicated assembly and accuracy improvement are not required.

Further, according to the present invention, the leveling table, the first fixed leg portion extending downward from the main body frame, the second fixed leg portion extending downward from the X-axis frame, and the X-axis frame. Between the first tilting leg portion extending downward from, the second tilting leg portion extending downward from the Y-axis frame, and the first fixed leg portion and the first tilting leg portion. A screw feeding device provided and a screw feeding device provided between the second fixed leg portion and the second tilting leg portion are provided, and both screw feeding devices are screws rotated by a motor. A rod and a nut screwed into the screw rod are provided, and a V-groove is formed at the tip of the tilting leg portion toward the rotation center of the tilting leg portion, and from the tip to the center of the V-groove. A notch is formed along the notch, the screw rod inserts the notch in a non-contact manner, the nut has a spherical surface concentric with the axial center of the nut, the spherical surface contacts the V groove, and the tilting leg portion. A detent that restrains the rotation of the nut is provided between the nut and the nut, and a spring that brings the spherical surface into contact with the V-groove is provided between the tilting leg and the nut. Since the tip portion is configured to give a displacement of a circular orbit centered on the tilting leg portion, the displacement given by the screw feeding device is directly transmitted to the tilting leg portion via the nut. It has the excellent effect of being extremely simplified in structure.

It is a perspective view of the leveling apparatus provided with the screw feed apparatus of this Example. (A) is a view taken along the arrow A in FIG. 1, and (B) is a view taken along the arrow B in FIG. (A) is a view taken along the arrow C in FIG. 1, and (B) is a view taken along the arrow D in FIG. It is the AB arrow view of FIG. It is a perspective view which looked at the Y-axis frame from below. It is a bottom view of a leveling device. (A), (B), and (C) are explanatory views of the tilting operation of the Y-axis frame by the Y-axis screw feeding device. (A) and (B) are explanatory views showing an example of a spring action acting between a nut and a lower end portion.

Hereinafter, examples of the present invention will be described with reference to the drawings.

The case where the screw feeding device according to the embodiment of the present invention is used as the feeding device of the leveling device will be described.

1 to 3 show a leveling device 1 provided with the screw feeding device of the present embodiment, and FIG. 2 in the figure shows a main body frame which is a fixing portion of the leveling device 1, and the main body frame 2 Has a substantially ring shape, and the X-axis frame 3 is concentrically provided inside the main body frame 2, and the Y-axis frame 4 is concentrically provided on the X-axis frame 3. Bosses 5 are provided at required locations on the upper surface of the Y-axis frame 4, and at four locations in the figure shown in FIG. A device to be leveled, for example, a fitting portion for mounting the main body of the surveying device and an upper case are attached to the boss 5.

The X-axis frame 3 is tiltable around the X-axis 12 (rotatable within a predetermined angle range), and the Y-axis frame 4 is tiltable with respect to the X-axis frame 3 around the Y-axis 13. (Rotable within a predetermined angle range). The X-axis 12 and the Y-axis 13 are set so as to be orthogonal to each other and exist in the same plane.

A first fixed leg portion 7 extends downward from the lower surface of the main body frame 2, and an X-axis screw feeding device 8 is provided at the lower end of the first fixed leg portion 7. A second fixed leg portion 9 extends downward from the lower surface of the X-axis frame 3, and a Y-axis screw feeding device 10 is provided at the lower end of the second fixed leg portion 9. The first fixed leg portion 7 may be integrally molded with the main body frame 2 by die casting or the like, or may be attached to the main body frame 2 as a separate part. Similarly, the second fixed leg portion 9 may be integrally molded with the X-axis frame 3 by die casting, or may be attached to the X-axis frame 3 as a separate part.

Next, a support mechanism for tiltably supporting the X-axis frame 3 and the Y-axis frame 4 will be described.

The X-axis frame 3 is provided with shaft portions 15 and 16 having a semicircular cross section, which rises by a required amount and then extends toward the outer peripheral side along the X-axis 12. The shaft portions 15 and 16 overlap with the main body frame 2.

FIG. 2A is a view taken along the arrow A of FIG. 1, in which a bearing boss 17 is projected from a portion of the main body frame 2 facing the shaft portion 15, and the bearing boss 17 has a conical third shape. A 1-ball bearing hole 18 is bored. A first conical hole 19 is bored at a position facing the first ball receiving hole 18 on the lower surface of the shaft portion 15, and a steel ball 21 is formed between the first ball receiving hole 18 and the first conical hole 19. Is installed.

FIG. 2B is a view taken along the arrow B of FIG. 1, in which a bearing boss 22 is projected from a portion of the main body frame 2 facing the shaft portion 16, and the bearing boss 22 has a conical third shape. A 1-ball bearing hole 23 is bored. A first V groove 24 is engraved in parallel with the X axis 12 at a position facing the first ball receiving hole 23 on the lower surface of the shaft portion 16, and the first V groove 24 and the first ball receiving hole 23 are formed. A steel ball 25 is interposed between them.

The steel balls 21 and 25 are located on the X-axis 12, and the first V groove 24 is a processing error between the first ball receiving holes 18 and 23 or a dimensional error of a molded part and the first ball receiving hole 23 and the said. It absorbs machining errors between the first V-grooves 24 or dimensional errors of molded parts. Therefore, assembling to the main body frame 2 only requires mounting the X-axis frame 3 on the main body frame 2 via the steel balls 21 and 25. A spring (not shown) is provided between the X-axis frame 3 and the main body frame 2, and the steel balls 21 and 25 meet the X-axis frame 3 and the main body frame 2 at a required surface pressure. It is held stable during.

The support mechanism of the Y-axis frame 4 is the same as the support mechanism of the X-axis frame 3.

FIG. 3 (A) is a view taken along the arrow C of FIG. 1, and FIG. 3 (B) is a view taken along the arrow D of FIG.

Bearing bosses 26 and 27 are provided on the Y-axis 13 at the peripheral edge of the X-axis frame 3, and conical second ball receiving holes 28 and 29 are bored in the bearing bosses 26 and 27, respectively. .. A second conical hole 30 is formed at a position facing the second ball receiving hole 28 of the Y-axis frame 4, and a Y-axis 13 is formed at a position facing the second ball receiving hole 29 of the Y-axis frame 4. A V-groove 31 is engraved in parallel with the above.

A steel ball 32 is interposed between the second ball receiving hole 28 and the second conical hole 30, and a steel ball 33 is interposed between the second ball receiving hole 29 and the V groove 31. Will be done.

The steel balls 32 and 33 are located on the Y-axis 13, and the V-groove 31 has a machining error regarding the second ball receiving hole 28, the second ball receiving hole 29, the second conical hole 30, and the V-groove 31. Or absorb the dimensional error of the molded part.

To assemble the Y-axis frame 4, it is only necessary to place the Y-axis frame 4 on the X-axis frame 3 via the steel balls 32 and 33. A spring (not shown) is provided between the X-axis frame 3 and the Y-axis frame 4, and the steel balls 32 and 33 form the X-axis frame 3 and the Y-axis frame 4 at a required surface pressure. It is held stable during.

Next, the X-axis screw feeding device 8 and the Y-axis screw feeding device 10 will be described with reference to FIGS. 4 to 7.

Since the X-axis screw feed device 8 and the Y-axis screw feed device 10 have the same configuration, the Y-axis screw feed device 10 will be described below.

The Y-axis screw feeding device 10 has a fixing bracket 35 fixed to the second fixing leg 9 as a frame member.

A screw rod 37 is rotatably provided between the end plates 35a and 35b of the fixing bracket 35. A driven gear 38 is fixed to an end portion of the screw rod 37 that penetrates the end plate 35a.

A motor 39 is attached to the end plate 35a. As the motor 39, a motor capable of controlling the rotation angle such as a pulse motor is used.

A drive gear 41 is fixed to the output shaft of the motor 39, and an intermediate gear 42 is provided between the drive gear 41 and the driven gear 38 (see FIG. 6). The large-diameter gear 42a of the intermediate gear 42 meshes with the drive gear 41, and the small-diameter gear 42b of the intermediate gear 42 meshes with the driven gear 38. Thus, the rotation of the motor 39 is decelerated by the gear trains of the drive gear 41, the intermediate gear 42, and the driven gear 38, and is transmitted to the screw rod 37.

A nut 43 is screwed into the screw rod 37. Further, the tilting leg portion 44 integrally molded with the Y-axis frame 4 extends vertically downward with the Y-axis frame 4 horizontal, and the lower end portion 44a of the tilting leg portion 44 engages with the nut 43. To do.

The surface of the nut 43 that comes into contact with the lower end portion 44a is a spherical surface that is concentric with the axial center of the nut 43. Further, a V groove 44b extending in a direction toward the rotation center of the tilting leg portion 44 (vertical direction in this embodiment) is formed in the lower end portion 44a, and the tapered surface forming the V groove 44b is the nut 43. Contact with. Further, a slit-shaped notch 45 is formed from the lower end of the lower end portion 44a at the center of the tilting leg portion 44 (see FIG. 5). The width of the notch 45 is larger than the diameter of the screw rod 37, and even when the screw rod 37 is inserted in a non-contact manner and the tilting leg portion 44 is tilted, the lower end portion 44a and the screw rod 37 interfere with each other. It is designed not to be done.

The lower end portion 44a is provided with a turning pin 46 that projects in the horizontal direction while the Y-axis frame 4 is horizontal. A slit groove 47 is formed in the nut 43 in parallel with the axis of the screw rod 37, and the turning pin 46 is slidably fitted in the slit groove 47. The turning pin 46 and the slit groove 47 form a turning that restrains the relative rotation between the tilting leg 44 and the nut 43.

The nut 43 is provided with spring hooks 48a and 48b protruding in the horizontal direction, and springs 49a and 49b are stretched between the spring hooks 48a and 48b and the lower end portion 44a (see FIG. 6).

The springs 49a and 49b bring the nut 43 and the lower end portion 44a into close contact with each other with a predetermined surface pressure so that the tilting leg portion 44 follows the displacement of the nut 43.

The displacement of the springs 49a and 49b is due to the tilting of the tilting leg 44 with respect to the nut 43, and is slight. Therefore, it is not necessary to consider the increase / decrease of the spring force with respect to the displacement of the spring in the design of the springs 49a and 49b, and the design of the springs 49a and 49b becomes easy.

Next, as shown in FIGS. 8 (A) and 8 (B), the spring action applied by the spring 49a between the spring hook 48a and the lower end portion 44a, and the spring 49b the spring hook. The action direction of the spring force and the spring force is set, or at least one of the action directions of the spring force and the spring force is set so as to be different from the spring action applied between the 48b and the lower end portion 44a. Needless to say, various methods other than the above description can be considered as methods for differentiating the spring action of the springs 49a and 49b.

By making the spring action of the spring 49a different from the spring action of the spring 49b, the spring force with respect to the spring hooks 48a and 48b becomes asymmetric with respect to the screw rod 37. Therefore, the acting direction of the resultant force of the springs 49a and 49b is not parallel to the axial center of the screw rod 37 (the direction is inclined with respect to the axial center).

The resultant force of the springs 49a and 49b applies a rotational force in a direction in which the axial center of the nut 43 is inclined with respect to the axial center of the screw rod 37. Due to this rotational force, the nut 43 rotates relative to the screw rod 37 by a gap, so to speak, a state in which one side hits the nut 43, and backlash and rattling between the nut 43 and the screw rod 37 are suppressed. To.

That is, the springs 49a and 49b bring the nut 43 and the lower end portion 44a into close contact with each other and suppress backlash and rattling between the nut 43 and the screw rod 37.

The X-axis screw feed device 8 tilts the X-axis frame 3 about the X-axis 12, and the Y-axis frame 4 itself tilts around the Y-axis 13 by the Y-axis screw feed device 10. The Y-axis frame 4 tilts in two horizontal axes.

As shown in FIG. 5, a sensor support member 51 is provided integrally with the Y-axis frame 4 on the back surface of the Y-axis frame 4, and the sensor support member 51 has an X-axis in a direction orthogonal to the X-axis 12. A tilt sensor 53 is provided, and a Y-axis tilt sensor 54 is provided in a direction orthogonal to the Y-axis 13.

By driving the X-axis screw feed device 8 and the Y-axis screw feed device 10 so that the X-axis tilt sensor 53 and the Y-axis tilt sensor 54 detect horizontal, leveling by the leveling device 1 is performed. Is executed.

The operation of the X-axis screw feed device 8 and the Y-axis screw feed device 10 will be further described with reference to FIGS. 7 (A) to 7 (C). 7 (A) to 7 (C) show the case where the Y-axis frame 4 is tilted, but the same applies to the case where the X-axis frame 3 is tilted.

FIG. 7A shows a state in which the Y-axis frame 4 is tilted to the right side (the right side is lowered) in the drawing.

The screw rod 37 is rotated clockwise by the motor 39 via the driven gear 38. Since the rotation of the nut 43 is restrained by the turning pin 46, the nut 43 is displaced to the left (when the screw rod 37 is a right-handed screw).

Since the nut 43 and the lower end portion 44a are connected by the springs 49a and 49b, the lower end portion 44a is displaced to the left integrally with the nut 43, and the tilting leg portion 44 is centered on the Y axis 13. Rotate clockwise.

To return the Y-axis frame 4 from the right-tilted state of FIG. 7 (A) to the horizontal state shown in FIG. 7 (B), the screw rod 37 is rotated counterclockwise. The nut 43 is displaced to the right, the lower end 44a is moved to the right, and the Y-axis frame 4 becomes horizontal. The horizontality of the Y-axis frame 4 is detected by the X-axis tilt sensor 53.

Further, in order to make the inclination to the left shown in FIG. 7C, the screw rod 37 is further rotated counterclockwise. The nut 43 further moves to the right, the tilting leg 44 tilts counterclockwise around the Y-axis 13, and the Y-axis frame 4 tilts to the left.

Thus, the tilting leg 44 tilts following the linear displacement of the nut 43. Further, since the nut 43 comes into contact with the V groove 44b on a spherical surface, the linear displacement of the nut 43 is smoothly converted into the rotational displacement of the tilting leg portion 44.

Further, since the spherical surface of the nut 43 engages with the V-groove 44b, slippage is allowed in the longitudinal direction of the V-groove 44b, and displacement is constrained in the width direction of the V-groove 44b. To. Therefore, the rotational displacement of the tilting leg 44 is regulated by the linear movement of the nut 43, resulting in an accurate circular orbit.

An example of the action of the springs 49a and 49b will be described with reference to FIGS. 8A and 8B.

First, in FIG. 6, the spring forces of the spring 49a and the spring 49b are made different. For example, when the spring force of the spring 49a is made stronger than that of the spring 49b, a rotational force in the clockwise direction acts on the paper surface of FIG. 6 and the nut 43 acts on the screw rod 37. The backlash and rattling between the screw rod 37 and the nut 43 are suppressed.

Next, as shown in FIG. 8A, the springs 49a, 49b, or one of the springs 49a and 49b are attached so as to be inclined with respect to the plane including the axial center of the screw rod 37. The spring force acts in a direction in which the screw rod 37 is inclined with respect to the axial center, and the nut 43 has a rotational force M centered on the screw rod 37 due to the component force of the spring force orthogonal to the axial center. It works (Fig. 8 (B)). What restrains the rotation of the nut 43 is the engagement between the turning pin 46 and the slit groove 47, and the turning pin 46 always hits the slit groove 47 in one direction from one direction.

Therefore, the backlash and rattling between the turning pin 46 and the slit groove 47 are also suppressed by the spring action of the springs 49a and 49b. In the above embodiment, two springs are used, but one spring may be used.

Thus, the screw feeding device having a simple structure can give a displacement to the tilting member without backlash and rattling.

Further, the backlash and rattling between the screw rod 37 and the nut 43, and the backlash and rattling between the nut 43 and the turning pin 46 can be suppressed by a set of springs, and the parts and structure for removing the backlash can be suppressed. You don't have to. Therefore, the number of parts is small, and it is possible to significantly reduce the size.

Needless to say, a separate spring may be provided in order to apply the rotational force M to the nut 43.

Further, regarding the engagement between the turning pin 46 and the nut 43, instead of providing the slit groove 47 in the nut 43, the nut 43 is provided in the radial direction (direction orthogonal to the axial center of the screw rod 37). A protruding engaging pin may be provided, and the engaging pin may be brought into contact with the turning pin 46 to stop the nut 43.

Further, the turning pin 46 may be provided on the nut 43, a groove extending in the vertical direction may be formed in the tilting leg portion 44, and the turning pin 46 and the groove may be engaged with each other. The point is that when the contact position between the nut 43 and the tilting leg 44 changes due to the tilting of the tilting leg 44, rotational displacement does not occur between the turning pin 46 and the nut 43. It suffices if it is a joint relationship.

Further, in the above embodiment, the screw feeding device is provided below the main body frame 2, the X-axis frame 3, and the Y-axis frame 4 shown as the tilted body, but even if it is provided above the tilted body, it may be provided. It can be implemented in the same manner even if it is provided on the lateral side, and it can be implemented as a device that gives a rotational displacement in a predetermined angle range.

1 Leveling device 2 Main body frame 3 X-axis frame 4 Y-axis frame 7 1st fixed leg 8 X-axis screw feed device 9 2nd fixed leg 10 Y-axis screw feed device 12 X-axis 13 Y-axis 35 Fixing bracket 37 Screw Rod 38 Driven gear 39 Motor 41 Drive gear 43 Nut 44 Tilt leg 44a Lower end 44b V groove 45 Notch 46 Stop pin 47 Slit groove 48a, 48b Spring hook 49a, 49b Spring 51 Sensor support member 53 X-axis tilt sensor 54 Y Axis tilt sensor

Claims (9)

A ring-shaped main body frame, an X-axis frame concentrically provided inside the main body frame and tiltably provided about the X-axis with respect to the main body frame, and the X-axis on the X-axis frame. A Y-axis frame provided concentrically with the frame and tiltably provided about a Y-axis orthogonal to the X-axis in the same plane is provided, and the X-axis frame includes the main body frame and an overcoat. The first and second shaft portions are provided so as to wrap and extend toward both outer peripheral sides along the X axis, and face the first and second shaft portions of the main body frame. First and second ball receiving holes having a conical shape are provided in each portion, and a first conical hole facing the first ball receiving hole is provided on the lower surface of the first shaft portion. A first steel ball is interposed between the ball receiving hole 1 and the first conical hole, and a first V groove parallel to the X axis is formed on the lower surface of the second shaft portion. A second steel ball is interposed between the first V-groove and the second ball receiving hole, and the third and fourth cones on the Y-axis at the peripheral edge of the X-axis frame. A second conical hole facing the third ball receiving hole is provided on the lower surface of the Y-axis frame, and between the third ball receiving hole and the second conical hole. A third steel ball is interposed, and a second V-groove is provided on the lower surface of the Y-axis frame so as to face the fourth ball receiving hole and parallel to the Y-axis. A fourth steel ball is interposed between the second V-groove, the first and second steel balls are provided on the X-axis, and the third and fourth steel balls are said. Provided on the Y-axis, the X-axis frame is tiltable around the first and second steel balls, and the Y-axis frame is tiltable around the third and fourth steel balls. A leveling table configured in. The leveling table according to claim 1, wherein the surveying apparatus main body is attached to the upper surface of the Y-axis frame. The leveling table according to claim 1, a first fixed leg portion extending downward from the main body frame, a second fixed leg portion extending downward from the X-axis frame, and a lower portion from the X-axis frame. It is provided between the first tilting leg portion extending to, the second tilting leg portion extending downward from the Y-axis frame, and the first fixed leg portion and the first tilting leg portion. A screw feeding device and a screw feeding device provided between the second fixed leg portion and the second tilting leg portion are provided, and both screw feeding devices are a screw rod rotated by a motor, respectively. A nut screwing into the screw rod is provided, and a V-groove is formed at the tip of the tilting leg portion toward the center of rotation of the tilting leg portion, and from the tip along the center of the V-groove. A notch is formed, the screw rod inserts the notch in a non-contact manner, the nut has a spherical surface concentric with the axis of the nut, the spherical surface contacts the V-groove, and the tilting leg and the said. A detent that restrains the rotation of the nut is provided between the nuts, and a spring that brings the spherical surface into contact with the V-groove is provided between the tilting leg and the nut, and the tip of the tilting leg is provided. A leveling device for a surveying device configured to give a displacement of a circular orbit centered on the tilting leg portion. The leveling device for a surveying device according to claim 3 , wherein the spring is provided so that the direction of action of the spring force is inclined with respect to the axial center of the screw rod. The leveling device for a surveying device according to claim 3 , wherein the spring is provided so that a component force of the spring force generates a rotational force around the axial center of the screw rod in the nut. The leveling device for a surveying device according to claim 3 , wherein two springs are provided by sandwiching the screw rod, and the two springs are set so that the spring forces are different. The leveling device for a surveying device according to claim 3 , wherein the spring is provided so that the direction of action of the spring force is inclined with respect to a plane including the axial center of the screw rod. The rotation preventing includes a rotation prevention pin provided at the distal end portion of the tilting legs, and a slit groove formed in the nut, the rotation prevention pin in the slit groove is fitted slidably claims Item 3. The leveling device for the surveying device according to item 3. The detent has a detent pin provided at the tip of the tilting leg portion and a pin projecting from the nut in a direction orthogonal to the axis of the screw rod, and the detent pin and the detent pin are provided. The leveling device for the surveying device according to claim 3 , wherein the pin is brought into contact with the pin.

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