JP6900134B2 - Highly airtight airtight phase corrosion cavity - Google Patents

Description

The present invention relates to the field of semiconductor manufacturing equipment, and particularly to highly airtight and airtight phase corrosion cavities.

In recent years, silicon oxide has been corroded by a vapor phase corrosion method (gas phase hydrogen fluoride). Compared to liquid phase corrosion, gas phase corrosion can (1) release the Memus element without blocking and (2) is unaffected by surface tension, so the diffusion capacity of the reactants is that of the liquid phase. It is four orders higher than the case, which makes it easier for the chemical reaction to proceed, (3) has excellent compatibility with various materials such as aluminum, alumina, and photoresist, and (4) is usually used under vacuum. Therefore, it has an advantage that it can be integrated in a modular assembly device (for example, a physical vapor deposition apparatus) as a surface pre-cleaning module. Hydrogen fluoride vapor phase corrosion is not only used in the manufacture of MEMS components, but is also integrated into the Vapor Phase Decomposition (VPD) as a surface pretreatment cavity. In the metal-contaminated vapor phase decomposition collection system, the following chemical reaction occurs in the hydrogen fluoride vapor phase corrosion cavity, and the natural oxide layer on the bulk silicon surface is decomposed and consumed in the form of vapor phase corrosion, and is hydrophobic. The remaining surface formed by the sex Si—H bond (Si—H) makes it convenient to collect contamination with a special liquid scanning solution.
4HF (gas) + SiO ₂ (solid) → SiF ₄ (gas) ↑ + 2H ₂ O

Depending on whether or not the hydrogen fluoride (HF) source contains water, the vapor phase hydrogen fluoride equipment includes (1) an anhydrous hydrogen fluoride source equipment using HF gas having a purity of 99.99% or more and (2) water content. it can be divided into the vapor phase hydrogen fluoride equipment _{(HF-H 2} O system). Considering the cost of use, VPD equipment is generally equipped with a hydrous HF source system rather than the expensive anhydrous HF gas (purity of 5N or higher). Anhydrous HF equipment must be used for high-end applications (eg, millions of micromirror arrays), but water content is usually not too high for process requirements, especially in the VPD market, given the cost of use. HF source equipment may be used. In the present specification, only the equipment of the hydrous HF source and its hydrogen fluoride vapor phase corrosion cavity (hereinafter, abbreviated as VHF cavity) are considered. Since the vapor phase hydrogen fluoride formed by the hydrous HF source is corrosive, the pipelines, joints and cavities in contact with it need to be antiseptic. Generally, compatible plastics are used for the VHF cavities and pipelines in terms of processing difficulties and subsequent maintenance costs.

Due to the corrosiveness and high toxicity of HF, every time the process of corroding a silicon wafer with HF gas is completed, fluorine-containing highly toxic gas such as _{HF and SiF 4 remaining in the cavity is repeated before opening the cavity.} Needs to be purged. Usually, a high flow rate nitrogen gas (10 to 100 SLM) is introduced into the cavity and extracted from the cavity by an exhaust device, a vacuum pump or the like. However, such nitrogen purging needs to be repeated multiple times to ensure that no fluorine-containing gas remains in the cavity. Since HF and water can form a two-component azeotropic mixture, the remaining HF gas is less likely to be completely removed from the cavity, especially the wet cavity, by a normal gentle purge. From a safety point of view, in general, when purging nitrogen, the flow meter (MFC) is opened to the maximum, the number of purging is increased, and the special gas concentration sensor provided next to the cavity is used to open the cavity. The concentration is monitored and the lower limit of detection of this sensor is set to 3 ppm or less according to the Time weighted average (TWA) standard. If the introduced high flow rate of nitrogen gas (50 SLM or higher) does not match the gas extraction system, the pressure sensor in the cavity ages, or the signal feedback is slow, the pressure in the cavity will reach a certain positive pressure. It will increase. If defects occur in the cavity sealing due to aging of parts, the contained HF gas may leak out of the cavity. If the special gas concentration sensor fails without regular maintenance, HF leakage may not be detected. Therefore, in general, a sudden change in pressure in the cavity is prevented by sacrificing the process time, for example, reducing the maximum nitrogen gas introduction flow rate, reducing the gas extraction amount, and the like. Then, the yield inevitably decreases. Furthermore, since the toughness and mechanical strength of plastics are lower than those of metal materials, it is necessary to control the pressure difference between the inside and outside of the plastic cavity within the allowable range of the cavity of this material during gas filling and gas extraction.

In Non-Patent Document 1, in the VHF cavity of the VPD system, since the bowl-shaped "lid" is directly covered by the cavity peripheral surface, the thickness of the seal ring is increased even if the airtightness is enhanced by the seal ring between the two. In Non-Patent Document 1, such contact is referred to as line surface two-dimensional contact because it is negligibly thin and the portion in contact with the bottom diameter of the "lid" is very thin. Since wafers of various sizes (eg, 4 inches, 6 inches, 8 inches, 12 inches, etc.) need to be processed, the plane contact distance needs to be at least 942 mm (π * 300 mm). Since plastic materials have poorer shape retention than metal and have a contact distance of approximately 1 meter, high-speed purging is likely to increase the risk of bottom leakage by accelerating aging and deformation of the seal ring. .. Therefore, such a design is not the safest design. Furthermore, since this device does not have a filter unit with a fan (Fan-Filter Unit, abbreviated as FFU) and is exposed to the environment as it is, harm to the human body is fatal.

In the airtight design of Patent Document 1, since a sealing ring is similarly provided between the moving parts to seal them, even if the contact area between the cavity and the horizontally movable "door" is very small, they themselves are large. Therefore, in Patent Document 1, such contact is referred to as "face-to-face two-dimensional contact". Compared with the design of Non-Patent Document 1, such a design has an advantage that the length of the seal ring is smaller and therefore the risk of gas leakage in the cavity is also reduced. However, the seal ring, the upper and lower cylinders, and the left and right cylinders are used. Relies heavily on perfect matching. For example, if the upper and lower cylinders are not in the correct positions, there is no airtightness. Also, as the seal ring ages or the door deforms, gas leak problems also occur.

Non-Patent Document 1: Spectrochimica Acta Part B, 56, 2261 (2001), S.A. Pahlke et al.
Patent Document 1: JP49037664B214

In order to solve the above problem, the present invention is a highly airtight airtight phase corrosion cavity including an upper cavity, a lower cavity, and an elevating control device, and the elevating control device controls the vertical movement of the upper cavity. The lower cavity is fixed so as to be connected to the upper cavity, the lower cavity is provided with an air inlet, an exhaust port and a heat plate, and a first seal is provided between the upper cavity and the lower cavity. A highly airtight airtight phase corrosion cavity is provided in which a mechanism is provided, a second seal mechanism is provided between the heating plate and the lower cavity, and a third seal mechanism is provided at the exhaust port.

In the highly airtight air-phase corrosion cavity according to the present invention, preferably, the upper cavity has a circular lid shape, and an upper lid flange perpendicular to a plane having a cavity over the entire circumference is formed on the peripheral edge of the upper cavity. The lower surface of the peripheral edge of the upper cavity outside the upper lid flange is processed so as to have a smooth first sealing surface, the lower cavity has a circular dish shape, and the upper surface of the peripheral edge of the lower cavity is. It is processed so as to have a smooth second sealing surface, a sealing groove is formed on the first sealing surface or the second sealing surface, and the inner wall of the peripheral edge of the lower cavity becomes a smooth third sealing surface. Processed so that the outer wall of the flange of the upper cavity has a smooth fourth sealing surface.

In the highly airtight air-tight phase corrosion cavity according to the present invention, preferably, the first seal surface, the second seal surface, the third seal surface, the fourth seal surface, and the first seal groove are arranged. The first seal member constitutes the first seal mechanism.

In the highly airtight and airtight phase corrosion cavity according to the present invention, the first seal member is preferably a corrosion resistant seal ring.

In the highly airtight air-tight phase corrosion cavity according to the present invention, preferably, the second seal mechanism is provided with the second seal member and the third seal member, the third seal mechanism is provided with the fourth seal member, and the first seal mechanism is provided. The 2 seal member, the 3rd seal member, and the 4th seal member are all corrosion resistant seal rings.

In the highly airtight air-phase corrosion cavity according to the present invention, preferably, the materials of the upper cavity and the lower cavity are perfluoroalkoxy resin (PFA), polytetrafluoroethylene (PTFE), ethylene tetrafluoroethylene (ETFE), and the like. It is one or a combination of one or more of polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), polyvinyl chloride (PVC), polypropylene (PP), and polyetheretherketone (PEEK).

In the highly airtight air-phase corrosion cavity according to the present invention, preferably, the gas phase sources to be introduced are hydrogen fluoride (HF), hydrogen chloride (HCl), hydrogen bromide (HBr), hydrogen iodide (HI), and the like. It is a combination of one or more of xenon difluoride (XeF _2).

In the highly airtight and airtight phase corrosion cavity according to the present invention, the elevating control device preferably includes a drive device and a displacement sensor.

In the highly airtight airtight phase corrosion cavity according to the present invention, preferably, the driving device is a cylinder or an electric cylinder, and the displacement sensor is an optical sensor or a capacitance type proximity sensor.

In the highly airtight and airtight phase corrosion cavity according to the present invention, an exhaust adjusting device is preferably connected to the exhaust port of the lower cavity via the third seal mechanism.

It is a slope view of the state in which the highly airtight airtight phase corrosion cavity according to the present invention is closed. It is a slope view of the state in which the highly airtight airtight phase corrosion cavity according to the present invention is open. It is sectional drawing of the state in which the highly airtight airtight phase corrosion cavity which concerns on this invention is closed. The cross-sectional view of the first seal mechanism to the third seal mechanism in the state where the highly airtight airtight phase corrosion cavity according to the present invention is closed is shown. It is sectional drawing of the 1st seal mechanism of the highly airtight airtight phase corrosion cavity which concerns on this invention. It is sectional drawing of the 2nd seal mechanism of the highly airtight airtight phase corrosion cavity which concerns on this invention. It is sectional drawing of the 3rd seal mechanism of the highly airtight airtight phase corrosion cavity which concerns on this invention.

In order to make the object, technical means and advantages of the present invention easier to understand, the technical means of the examples of the present invention will be clearly and completely described below with reference to the drawings of the examples of the present invention. As can be understood, the specific examples described herein are merely for the interpretation of the present invention and are not intended to limit the present invention. Examples given are only some examples of the present invention, not all examples. All other examples obtained by those skilled in the art based on the examples of the present invention without creative effort are included in the scope of protection of the present invention.

In the present specification, the orientation or positional relationship indicated by the terms "up", "down", "horizontal", "vertical", etc. is the orientation or positional relationship shown in the drawings, which facilitates the description of the present invention. It does not limit the present invention, as it is for the sake of brevity only and does not imply that the device or component always has a particular orientation and is configured and operated in a particular orientation. Also, unless expressly stated and restricted herein, the terms "communication" and "connection" should be understood in a broad sense, eg, fixed connection, removable connection or integral connection. It may be a mechanical connection or an electrical connection, a direct connection or an indirect connection via an intermediate medium, or a communication between both members. For those skilled in the art, certain meanings of the above terms in the present invention can be understood on a case-by-case basis.

FIG. 1 is a slope view of a state in which the highly airtight airtight phase corrosion cavity according to the present invention is closed. FIG. 2 is a slope view of a state in which the highly airtight airtight phase corrosion cavity according to the present invention is open. FIG. 3 is a cross-sectional view of a state in which the highly airtight airtight phase corrosion cavity according to the present invention is closed. FIG. 4 is a cross-sectional view of the first seal mechanism-3rd seal mechanism in a state where the highly airtight airtight phase corrosion cavity according to the present invention is closed. As shown in FIGS. 1 to 4, the highly airtight airtight phase corrosion cavity according to the present invention includes an upper cavity 1, a lower cavity 2, and an elevating control device 3, and the elevating control device 3 is connected to the upper cavity 1. And controls the vertical movement of the upper cavity 1. The lower cavity 2 is fixed, the lower cavity 2 is provided with an air inlet 4, an exhaust port 5, and a heating plate 6, a first sealing mechanism 7 is provided between the upper cavity 1 and the lower cavity 2, and the heating plate 6 is provided. A second seal mechanism 8 is provided between the lower cavity 2 and the lower cavity 2, and a third seal mechanism 9 is provided at the exhaust port 5.

As shown in FIGS. 3, 4 and 5A, in the highly airtight airtight phase corrosion cavity according to the present invention, the upper cavity 1 has a circular crown shape, and the peripheral edge of the upper cavity 1 has a cavity all around. The upper lid flange 10 orthogonal to the flat surface is formed, and the lower surface outside the upper lid flange 10 at the peripheral edge portion of the upper cavity 1 is processed so as to be a smooth first sealing surface 11. The lower cavity 2 has a circular dish shape, and the upper surface of the peripheral edge of the lower cavity 2 is processed so as to have a smooth second sealing surface 12. A ring-shaped first seal groove 13 is formed on the second seal surface 12. Of course, a ring-shaped first seal groove may be formed on the first seal surface 11. The inner wall of the peripheral edge of the lower cavity 2 is processed so as to have a smooth third sealing surface 14, and the outer wall of the flange of the upper cavity is processed to have a smooth fourth sealing surface 15.

As shown in FIG. 5A, the first sealing surface 11, the second sealing surface 12, the third sealing surface 14, the fourth sealing surface 15, and the first sealing member 16 arranged in the first sealing groove 13. Consists of the first seal mechanism 7. Preferably, the first seal member 16 is a corrosion-resistant seal ring (for example, a corrosion-resistant seal ring made of a fluororubber material).

In the highly airtight air-phase corrosion cavity according to the present invention, the materials of the upper cavity 1 and the lower cavity 2 are preferably perfluoroalkoxy resin (PFA), polytetrafluoroethylene (PTFE), ethylenetetrafluoroethylene (ETFE), poly. It is one or a combination of one or more of chlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), polyvinyl chloride (PVC), polypropylene (PP), and polyetheretherketone (PEEK). More preferably, the material of the upper cavity 1 and the lower cavity 2 is polyvinylidene fluoride PVDF.

In the highly airtight and airtight phase corrosive cavity according to the present invention, in order to protect the first seal member 16 from corrosive gas as much as possible, the upper cavity 1 and the lower cavity 2 are closed to each other with the third seal surface 14. It is designed so that the fourth sealing surface 15 and the fourth sealing surface 15 are in close contact with each other without a gap between them. That is, the third sealing surface 14 and the fourth sealing surface 15 are tightly fitted in a state where the upper cavity 1 and the lower cavity 2 are closed. In the process of closing the cavity, a downward force is applied to the upper cavity 1 by the elevating control device 3, and the cavity is closed as a whole by assembling both in combination with the deformation of the upper cavity 1 and the lower cavity 2. It becomes. Further, by using the heating plate 6 or another heating device added near the peripheral edge of the lower cavity, the lower peripheral cavity 2 is heated in advance before the cavity is closed to expand the peripheral edge of the lower cavity 2. , The upper cavity 1 and the lower cavity 2 can be closed smoothly and smoothly. After the upper cavity 1 and the lower cavity 2 are completely closed, heating is stopped and the peripheral edge of the lower cavity 2 is contracted to close the tightly fitted upper cavity 1 and the lower cavity 2, and then the third cavity is closed. The sealing surface 14 and the fourth sealing surface 15 are in an airtight state, whereby the first sealing member 16 can be protected from corrosive gas as much as possible. Similarly, by heating the lower cavity 2 in advance to expand the peripheral edge of the lower cavity 2 before opening the closure of the cavity, the upper cavity 1 and the lower cavity 2 are smoothly separated and the cavity is opened.

As shown in FIGS. 4 and 5B, in the highly airtight airtight phase corrosion cavity according to the present invention, a cavity bottom through hole 25 is provided at the bottom of the dish-shaped lower cavity 2. The heating plate 6 is fixed inside the bottom of the lower cavity 2 and is mechanically and electrically connected to the outside of the cavity through the cavity bottom through hole 25 of the lower cavity 2. A heating plate protective case 17 is attached to the heating plate 6, and the heating plate 16 can be separated from the vapor phase corrosion cavity by the heating plate protective case 17. The lower cavity 2 and the heating plate 6, and the heating plate protective case 17 and the heating plate 6 are connected via a countersunk rivet. A second seal groove 18 and a second seal member 19 are provided between the lower cavity 2 and the heating plate 6, and a third seal groove 20 and a third seal member 21 are provided between the heating plate protective case 17 and the heating plate 6. The second sealing mechanism 8 of the highly airtight airtight phase corrosion cavity according to the present invention is configured. Preferably, the second seal member 19 and the third seal member 21 in the second seal mechanism 8 are corrosion-resistant seal rings (for example, corrosion-resistant seal rings made of fluororubber material).

In the highly airtight and airtight phase corrosion cavity according to the present invention, as shown in FIGS. 4 and 5C, the exhaust control device 22 is fixedly connected to the exhaust port 5 of the lower cavity 2. By providing the fourth seal groove 23 and the fourth seal member 24 between the exhaust port 5 of the lower cavity 2 and the exhaust adjustment device 22, the third seal mechanism 9 of the highly airtight airtight phase corrosion cavity according to the present invention can be provided. It is composed. Preferably, the fourth seal member 24 is a corrosion-resistant seal ring (for example, a corrosion-resistant seal ring made of a fluororubber material).

In the highly airtight and airtight phase corrosion cavity according to the present invention, the elevating control device 4 includes a drive device and a displacement sensor. The drive device may be an air cylinder or an electric cylinder, and the displacement sensor may be an optical displacement sensor or a capacitive displacement sensor. In the present invention, it is preferable that the elevating control device 4 uses a combination of an electric cylinder and an optical transmissive photoelectric sensor.

In the highly airtight air-phase corrosion cavity according to the present invention, the gas phase sources introduced are hydrogen fluoride (HF), hydrogen chloride (HCl), hydrogen bromide (HBr), hydrogen iodide (HI), and difluoride. It is one or a combination of a plurality of xenon (XeF _2).

In the vapor phase corrosion cavity of the prior art, there are three main aspects in which the members of the cavity may be corroded by the corrosive gas in contact with the corrosive gas. First, since the upper cavity is a moving member, the sealing requirement for it is the highest, the sealing between the upper cavity and the lower cavity is the key to sealing the entire cavity, and toxic corrosive gas leaks into the surrounding environment. It has to do with whether it affects the health of the worker. Next, since the heating member is a heat-generating part, the chemical reaction is faster and it reacts with the corrosive gas to be easily corroded. Therefore, when the corrosive gas comes into contact with the heating member, severe corrosion damage occurs and the equipment Life is shortened. Further, if the residual gas channel portion is not sufficiently sealed, that is, the connection between the exhaust port and the exhaust control device is not sufficiently sealed, a part of the corrosive toxic gas may leak to the environment.

In the present invention, by providing the first sealing mechanism 7, the second sealing mechanism 8 and the third sealing mechanism 9, it is guaranteed to the maximum that corrosive toxic gas does not leak into the environment and the inside of the device.

First, in a state where the highly airtight airtight phase corrosion cavity according to the present invention is closed, the first sealing mechanism formed between the upper cavity and the lower cavity is the first sealing surface 11, the second sealing surface 12, and the first. The third seal surface 14, the fourth seal surface 15, and the first seal member 16 arranged in the first seal groove 13 are included. The third sealing surface 14 and the fourth sealing surface 15 are tightly fitted. In this case, since there is no gap between the third sealing surface 14 and the fourth sealing surface 15, there is no possibility that the corrosive toxic gas leaks from the gap, whereby the corrosive gas with respect to the first sealing member 16 Corrosion is prevented and corrosion aging of the first seal member 16 is avoided. Further, even if a corrosive gas leaks from the minute gap due to the existence of a minute gap between the two due to the deformation of the third sealing surface 14 or the fourth sealing surface 15, even if the corrosive gas leaks from the minute gap, the first seal groove 13 is contained. 1 The presence of the seal member 16 further prevents gas from leaking into the external environment and affecting the health of the operator. Such a double seal design maximizes the leakage of corrosive toxic gases. Compared with the conventional gas phase corrosion cavity equipment, the highly airtight airtight phase corrosion cavity according to the present invention has extremely high gas airtightness and reduces the risk to the health of workers due to leakage of corrosive toxic gas. This will extend the life of the equipment.

Further, in the highly airtight air-tight phase corrosion cavity according to the present invention, a second seal groove 18 and a second seal member 19 are provided between the lower cavity 2 and the heating plate 6, and the heating plate protective case 17 and the heating plate 6 are provided. By providing the third seal groove 20 and the third seal member 21 between the two, the second seal mechanism 8 of the highly airtight airtight phase corrosion cavity according to the present invention is configured. By sealing the two positions above and below the heat-generating component in this way, it is possible to prevent the heating plate from being damaged quickly due to corrosion of corrosive gas at a high temperature, and the service life of the equipment is extremely extended.

Further, in the highly airtight and airtight phase corrosion cavity according to the present invention, the exhaust adjusting device 22 is fixedly connected to the exhaust port 5 of the lower cavity 2. By providing the fourth seal groove 23 and the fourth seal member 24 between the exhaust port 5 of the lower cavity 2 and the exhaust adjustment device 22, the third seal mechanism 9 of the highly airtight airtight phase corrosion cavity according to the present invention can be provided. It is composed. That is, in the highly airtight and airtight phase corrosion cavity according to the present invention, the exhaust adjustment device 22 is provided in the exhaust port 5 of the lower cavity 2, and the fourth seal groove 23 and the fourth seal groove 23 and the fourth seal groove 23 are provided between the exhaust port 5 and the exhaust adjustment device 22. A third sealing mechanism 9 composed of the sealing member 24 is provided. Due to the presence of the exhaust control device 22, the corrosive gas in the cavity can be discharged more sufficiently, and the flow rate and speed of gas extraction of the exhaust device can be adjusted according to the actual process conditions. The third seal mechanism 9 provided between the exhaust port 5 and the exhaust control device 22 can prevent corrosive toxic gas from leaking to the atmosphere at the exhaust stage, and improves the airtightness of the gas phase corrosion cavity. Further improve.

The above description is merely a specific embodiment of the present invention, and does not limit the scope of protection of the present invention. Those skilled in the art can easily conceive of changes or substitutions within the technical scope disclosed by the present invention, and these changes or substitutions should be included within the scope of protection of the present invention.

1 Upper cavity,
2 Lower cavity,
3 Lifting control device,
4 Air inlet,
5 Exhaust port,
6 Heating plate,
7 First seal mechanism,
8 Second seal mechanism,
9 Third seal mechanism,
10 Top lid flange,
11 1st seal surface,
12 Second seal surface,
13 1st seal groove,
14 Third seal surface,
15 4th seal surface,
16 1st seal member,
17 Heating plate protective case,
25 Cavity bottom through hole,
18 Second seal groove,
19 Second seal member,
20 Third seal groove,
21 Third seal member,
22 Exhaust control device,
23 4th seal groove,
24 Fourth seal member.

Claims (10)

A highly airtight airtight phase corrosion cavity including an upper cavity, a lower cavity, and an elevating control device.
The elevating control device is connected to the upper cavity so as to control the vertical movement of the upper cavity, the lower cavity is fixed, and the lower cavity is provided with an air inlet, an exhaust port, and a heating plate.
A first sealing mechanism is provided between the upper cavity and the lower cavity, a second sealing mechanism is provided between the heating plate and the lower cavity, and a third sealing mechanism is provided at the exhaust port. Features a highly airtight airtight phase corrosion cavity. The upper cavity has a circular lid shape, and an upper lid flange orthogonal to a plane having a cavity all around is formed on the peripheral edge of the upper cavity, and the lower surface of the upper cavity outside the upper lid flange is smooth. Processed to be the first sealing surface
The lower cavity has a circular dish shape, and the upper surface of the peripheral edge of the lower cavity is processed so as to have a smooth second sealing surface, and a sealing groove is formed on the first sealing surface or the second sealing surface. Being done
The inner wall of the peripheral edge of the lower cavity is processed so as to have a smooth third sealing surface, and the outer wall of the upper lid flange of the upper cavity is processed to have a smooth fourth sealing surface. The highly airtight airtight phase corrosion cavity according to claim 1. It said first sealing surface, the second sealing surface, the third sealing surface, the fourth sealing surface and the first sealing member disposed on the sheet Lumpur groove is to constitute the first sealing mechanism The highly airtight airtight phase corrosion cavity according to claim 2, which is characterized. The highly airtight airtight phase corrosion cavity according to claim 3, wherein the first seal member is a corrosion-resistant seal ring. The second seal mechanism is provided with a second seal member and a third seal member, the third seal mechanism is provided with a fourth seal member, the second seal member, the third seal member, and the fourth seal. The highly airtight airtight phase corrosion cavity according to claim 3, wherein each member is a corrosion-resistant seal ring. The materials of the upper cavity and the lower cavity are perfluoroalkoxy resin (PFA), polytetrafluoroethylene (PTFE), ethylene tetrafluoroethylene (ETFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF). The highly airtight air-phase corrosion cavity according to claim 1, which is a combination of one or more of polyvinylidene chloride (PVC), polypropylene (PP), and polyether ether ketone (PEEK). .. The gas phase source to be introduced is one or more of hydrogen fluoride (HF), hydrogen chloride (HCl), hydrogen bromide (HBr), hydrogen iodide (HI), xenon difluoride (XeF _2). The highly airtight air-phase corrosion cavity according to claim 1, which is a combination of species. The highly airtight airtight phase corrosion cavity according to claim 1, wherein the elevating control device includes a drive device and a displacement sensor. The highly airtight airtight phase corrosion cavity according to claim 8, wherein the drive device is a cylinder or an electric cylinder, and the displacement sensor is an optical sensor or a capacitance sensor. The highly airtight airtight phase corrosion cavity according to claim 1, wherein an exhaust regulating device is connected to the exhaust port of the lower cavity via the third seal mechanism.

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