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JP6901510B2 - Observation method, image processing device, and electron microscope - Google Patents
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JP6901510B2 - Observation method, image processing device, and electron microscope - Google Patents

Observation method, image processing device, and electron microscope Download PDF

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JP6901510B2
JP6901510B2 JP2019027384A JP2019027384A JP6901510B2 JP 6901510 B2 JP6901510 B2 JP 6901510B2 JP 2019027384 A JP2019027384 A JP 2019027384A JP 2019027384 A JP2019027384 A JP 2019027384A JP 6901510 B2 JP6901510 B2 JP 6901510B2
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知洋 春田
知洋 春田
悠太 池田
悠太 池田
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Description

本発明は、観察方法、画像処理装置、および電子顕微鏡に関する。 The present invention relates to an observation method, an image processing apparatus, and an electron microscope.

光学顕微鏡と電子顕微鏡との間で同一箇所を観察可能とする手法が知られている(例えば、特許文献1参照)。 A method is known that enables observation of the same location between an optical microscope and an electron microscope (see, for example, Patent Document 1).

光学顕微鏡観察において、蛍光タンパク質や蛍光色素で特定の細胞や特定のタンパク質などを標識することによって、目的の細胞や目的のタンパク質の局在を観察することができる。このような蛍光タンパク質としては、GFP(green fluorescent protein)が挙げられる。また、このような蛍光色素としては、FITC(Fluorescein isothiocyanate)、DAPI(4',6-diamidino-2-phenylindole)などが挙げられる。 In the observation with an optical microscope, the localization of a target cell or a target protein can be observed by labeling a specific cell or a specific protein with a fluorescent protein or a fluorescent dye. Examples of such a fluorescent protein include GFP (green fluorescent protein). Moreover, as such a fluorescent dye, FITC (Fluorescein isothiocyanate), DAPI (4', 6-diamidino-2-phenylindole) and the like can be mentioned.

しかしながら、これらの蛍光タンパク質や、蛍光色素は、電子顕微鏡用の試料作製との相性が悪い。例えば、試料の固定には、グルタールアルデヒドや、四酸化オスミウムが用いられる。蛍光タンパク質や蛍光色素は、グルタールアルデヒドによる架橋や、四酸化オスミウムによる酸化によって、蛍光が失われる。そのため、試料を固定した後に、蛍光タンパク質や蛍光色素で標識された試料の光学顕微鏡観察を行うことは困難である。 However, these fluorescent proteins and fluorescent dyes are incompatible with the preparation of samples for electron microscopy. For example, glutaraldehyde or osmium tetroxide is used for fixing the sample. Fluorescent proteins and fluorescent dyes lose their fluorescence due to cross-linking with glutaraldehyde and oxidation with osmium tetroxide. Therefore, it is difficult to perform optical microscope observation of a sample labeled with a fluorescent protein or a fluorescent dye after fixing the sample.

また、例えば、DAB(3,3'-diaminobenzidine)反応をする蛍光タンパク質で標識された試料を光学顕微鏡観察し、その後、試料を固定して電子顕微鏡観察を行う手法が知られている。このような蛍光タンパク質としては、アスコルビン酸オキシダーゼ(APEX)や、miniSOG(mini Singlet Oxygen Generator)などが挙げられる。 Further, for example, a method is known in which a sample labeled with a fluorescent protein that undergoes a DAB (3,3'-diaminobenzidine) reaction is observed with an optical microscope, and then the sample is fixed and observed with an electron microscope. Examples of such a fluorescent protein include ascorbic acid oxidase (APEX) and miniSOG (mini Singlet Oxygen Generator).

しかしながら、この手法では、試料を固定した後の試料を光学顕微鏡観察することができない。また、電子顕微鏡の試料作製では、試料の固定後、細胞内の水分の有機溶媒への置換(脱水)、有機溶媒の樹脂への置換(樹脂包埋)、および樹脂の重合が行われる。脱水を行うと試料の収縮が起こり、樹脂の重合を行うと樹脂の収縮による試料の収縮が起こる。そのため、光学顕微鏡像と電子顕微鏡像の位置合わせが困難になる。 However, with this method, it is not possible to observe the sample after fixing the sample with an optical microscope. Further, in the preparation of an electron microscope sample, after the sample is fixed, the intracellular water is replaced with an organic solvent (dehydration), the organic solvent is replaced with a resin (resin embedding), and the resin is polymerized. Dehydration causes shrinkage of the sample, and polymerization of the resin causes shrinkage of the sample due to shrinkage of the resin. Therefore, it becomes difficult to align the optical microscope image and the electron microscope image.

また、架橋や酸化の影響を受けない蛍光色素として、半導体材料からなる量子ドットが存在する。しかしながら、透過電子顕微鏡観察を行う場合、試料を薄片化しなければならない。試料を薄片化すると、蛍光色素の量が少なくなってしまうため、光学顕微鏡観察において十分な蛍光信号を得ることができない。 Further, as a fluorescent dye that is not affected by cross-linking or oxidation, there are quantum dots made of a semiconductor material. However, when performing transmission electron microscopy, the sample must be sliced. When the sample is sliced, the amount of the fluorescent dye is reduced, so that a sufficient fluorescent signal cannot be obtained by observation with an optical microscope.

特開平8−162059号公報Japanese Unexamined Patent Publication No. 8-162059

上記のように、光学顕微鏡および電子顕微鏡で、同じ状態の試料を観察することは困難であった。 As mentioned above, it was difficult to observe a sample in the same state with an optical microscope and an electron microscope.

(1)本発明に係る観察方法の一態様は、
光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として含む試料を作製する工程と、
前記試料を光学顕微鏡で撮影することによって、光学顕微鏡像を取得する工程と、
前記試料を電子顕微鏡で撮影することによって、電子顕微鏡像を取得する工程と、
前記光学顕微鏡像において、複数の前記金属粒子の位置および散乱光の色の情報を取得する工程と、
前記電子顕微鏡像において、複数の前記金属粒子の位置および粒径の情報を取得する工程と、
前記光学顕微鏡像で取得された、複数の前記金属粒子の位置および散乱光の色の情報、および前記電子顕微鏡像で取得された、複数の前記金属粒子の位置および粒径の情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報を求める工程と、
前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の位置合わせを行い、前記光学顕微鏡像と前記電子顕微鏡像を重ねた1つの画像を生成する工程と、
を含み、
前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報を求める工程では、
前記金属粒子の粒径と前記金属粒子の散乱光の色との関係に基づいて、前記光学顕微鏡像における前記金属粒子の散乱光の色から前記金属粒子の粒径を推測し、
推測された前記光学顕微鏡像における前記金属粒子の粒径と位置の情報と、前記電子顕微鏡像における前記金属粒子の粒径と位置の情報と、を照らし合わせて、前記光学顕微鏡像と前記電子顕微鏡像との間で対応する前記金属粒子を見つけ、
対応する前記金属粒子に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率の差、および前記光学顕微鏡像と前記電子顕微鏡像の向きの違いを求め、
前記1つの画像を生成する工程では、
求められた前記光学顕微鏡像と前記電子顕微鏡像の倍率の差に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率を等しくし、
求められた前記光学顕微鏡像と前記電子顕微鏡像の向きの違いに基づいて、前記光学顕微鏡像と前記電子顕微鏡像の向きを揃える
(1) One aspect of the observation method according to the present invention is
A process of preparing a sample containing a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light as markers, and a process of preparing a sample.
The process of acquiring an optical microscope image by photographing the sample with an optical microscope, and
The process of acquiring an electron microscope image by photographing the sample with an electron microscope, and
In the optical microscope image, a step of acquiring information on the positions of a plurality of the metal particles and the color of scattered light, and
A step of acquiring information on the positions and particle sizes of a plurality of the metal particles in the electron microscope image, and
Based on the position and scattered light color information of the plurality of metal particles acquired by the optical microscope image and the position and particle size information of the plurality of metal particles acquired by the electron microscope image. A step of obtaining information for associating the optical microscope image with the electron microscope image, and
Based on the information that associates the optical microscope image with the electron microscope image, the optical microscope image and the electron microscope image are aligned to generate one image in which the optical microscope image and the electron microscope image are superimposed. Process and
Only including,
In the step of obtaining information for associating the optical microscope image with the electron microscope image,
Based on the relationship between the particle size of the metal particles and the color of the scattered light of the metal particles, the particle size of the metal particles is estimated from the color of the scattered light of the metal particles in the optical microscope image.
The optical microscope image and the electron microscope are compared with the estimated particle size and position information of the metal particles in the optical microscope image and the particle size and position information of the metal particles in the electron microscope image. Find the corresponding metal particle with the image and
Based on the corresponding metal particles, the difference in magnification between the optical microscope image and the electron microscope image and the difference in the orientation of the optical microscope image and the electron microscope image were obtained.
In the step of generating one image,
Based on the obtained difference in magnification between the optical microscope image and the electron microscope image, the magnifications of the optical microscope image and the electron microscope image are made equal.
The orientations of the optical microscope image and the electron microscope image are aligned based on the obtained difference in orientation between the optical microscope image and the electron microscope image .

このような観察方法では、光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として用いている。複数の金属粒子は、電子顕微鏡用試料作製の影響を受けずに、光学顕微鏡像および電子顕微鏡像の両方で目印として機能する。したがって、このような観察方法では、光学顕微鏡および電子顕微鏡において、同じ状態の試料を観察することができる。さらに、このような観察方法では、光学顕微鏡像における輝点の色から金属粒子の粒径を推測することができる。したがって、光学顕微鏡像の金属粒子と電子顕微鏡像の金属粒子とを、容易に対応づけることができる。よって、正確に光学顕微鏡像と電子顕微鏡像の位置合わせができる。 In such an observation method, a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light are used as markers. The plurality of metal particles function as markers in both the optical microscope image and the electron microscope image without being affected by the preparation of the electron microscope sample. Therefore, in such an observation method, a sample in the same state can be observed with an optical microscope and an electron microscope. Further, in such an observation method, the particle size of the metal particles can be estimated from the color of the bright spot in the optical microscope image. Therefore, the metal particles of the optical microscope image and the metal particles of the electron microscope image can be easily associated with each other. Therefore, the optical microscope image and the electron microscope image can be accurately aligned.

(2)本発明に係る画像処理装置の一態様は、
光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として含む試料の光学顕微鏡像および前記試料の電子顕微鏡像を取得する画像取得部と、
前記光学顕微鏡像において、複数の前記金属粒子の位置および散乱光の色の情報を取得する第1像情報取得部と、
前記電子顕微鏡像において、複数の前記金属粒子の位置および粒径の情報を取得する第2像情報取得部と、
前記光学顕微鏡像で取得された、複数の前記金属粒子の位置および散乱光の色の情報、および前記電子顕微鏡像で取得された、複数の前記金属粒子の位置および粒径の情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報を求める演算部と、
前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の位置合わせを行い、前記光学顕微鏡像と前記電子顕微鏡像を重ねた1つの画像を生成する画像生成部と、
を含み、
前記演算部は、
前記金属粒子の粒径と前記金属粒子の散乱光の色との関係を示すテーブルを用いて、前記光学顕微鏡像における前記金属粒子の散乱光の色から前記金属粒子の粒径を推測し、
推測された前記光学顕微鏡像における前記金属粒子の粒径と位置の情報と、前記電子顕微鏡像における前記金属粒子の粒径と位置の情報と、を照らし合わせて、前記光学顕微鏡像と前記電子顕微鏡像との間で対応する前記金属粒子を見つけ、
対応する前記金属粒子に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率の差、および前記光学顕微鏡像と前記電子顕微鏡像の向きの違いを求め、
前記画像生成部は、
求められた前記光学顕微鏡像と前記電子顕微鏡像の倍率の差に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率を等しくし、
求められた前記光学顕微鏡像と前記電子顕微鏡像の向きの違いに基づいて、前記光学顕微鏡像と前記電子顕微鏡像の向きを揃える
(2) One aspect of the image processing apparatus according to the present invention is
An image acquisition unit that acquires an optical microscope image of a sample containing a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light and an electron microscope image of the sample as markers.
In the optical microscope image, a first image information acquisition unit that acquires information on the positions of a plurality of the metal particles and the color of scattered light, and
In the electron microscope image, a second image information acquisition unit that acquires information on the positions and particle sizes of the plurality of metal particles, and
Based on the position and scattered light color information of the plurality of metal particles acquired by the optical microscope image and the position and particle size information of the plurality of metal particles acquired by the electron microscope image. An arithmetic unit that obtains information that associates the optical microscope image with the electron microscope image, and
Based on the information that associates the optical microscope image with the electron microscope image, the optical microscope image and the electron microscope image are aligned to generate one image in which the optical microscope image and the electron microscope image are superimposed. Image generator and
Including
The calculation unit
Using a table showing the relationship between the particle size of the metal particles and the color of the scattered light of the metal particles, the particle size of the metal particles was estimated from the color of the scattered light of the metal particles in the optical microscope image.
The optical microscope image and the electron microscope are compared with the estimated particle size and position information of the metal particles in the optical microscope image and the particle size and position information of the metal particles in the electron microscope image. Find the corresponding metal particle with the image and
Based on the corresponding metal particles, the difference in magnification between the optical microscope image and the electron microscope image and the difference in the orientation of the optical microscope image and the electron microscope image were obtained.
The image generation unit
Based on the obtained difference in magnification between the optical microscope image and the electron microscope image, the magnifications of the optical microscope image and the electron microscope image are made equal.
The orientations of the optical microscope image and the electron microscope image are aligned based on the obtained difference in orientation between the optical microscope image and the electron microscope image .

このような画像処理装置では、光学顕微鏡像における輝点の色から金属粒子の粒径を推測することができる。したがって、光学顕微鏡像の金属粒子と電子顕微鏡像の金属粒子とを、容易に対応づけることができる。よって、正確に光学顕微鏡像と電子顕微鏡像の位置合わせができる。 In such an image processing apparatus, the particle size of the metal particles can be estimated from the color of the bright spot in the optical microscope image. Therefore, the metal particles of the optical microscope image and the metal particles of the electron microscope image can be easily associated with each other. Therefore, the optical microscope image and the electron microscope image can be accurately aligned.

(3)本発明に係る電子顕微鏡は、上記の画像処理装置を含む。 (3) The electron microscope according to the present invention includes the above-mentioned image processing apparatus.

このような電子顕微鏡では、光学顕微鏡像における輝点の色から金属粒子の粒径を推測することができる。したがって、光学顕微鏡像の金属粒子と電子顕微鏡像の金属粒子とを、容易に対応づけることができる。よって、正確に光学顕微鏡像と電子顕微鏡像の位置合わせができる。 In such an electron microscope, the particle size of the metal particles can be estimated from the color of the bright spot in the optical microscope image. Therefore, the metal particles of the optical microscope image and the metal particles of the electron microscope image can be easily associated with each other. Therefore, the optical microscope image and the electron microscope image can be accurately aligned.

第1実施形態に係る観察方法の一例を示すフローチャート。The flowchart which shows an example of the observation method which concerns on 1st Embodiment. 第1実施形態に係る観察方法における試料を作製する手法を説明するための図。The figure for demonstrating the method of making a sample in the observation method which concerns on 1st Embodiment. 試料の光学顕微鏡像を模式的に示す図。The figure which shows typically the optical microscope image of a sample. 輝点の座標を求める手法を説明するための図。The figure for demonstrating the method of finding the coordinates of a bright spot. 輝点の座標を求める手法を説明するための図。The figure for demonstrating the method of finding the coordinates of a bright spot. 試料の透過電子顕微鏡像を模式的に示す図。The figure which shows typically the transmission electron microscope image of a sample. 金属粒子の粒径の測定を説明するための図。The figure for demonstrating the measurement of the particle size of a metal particle. 光学顕微鏡像と透過電子顕微鏡像を対応づける情報を求める手法を説明するための図。The figure for demonstrating the method of obtaining the information which associates an optical microscope image with a transmission electron microscope image. 光学顕微鏡像と透過電子顕微鏡像を対応づける情報を求める手法を説明するための図。The figure for demonstrating the method of obtaining the information which associates an optical microscope image with a transmission electron microscope image. 光学顕微鏡像と透過電子顕微鏡像を重ねて生成された画像を模式的に示す図。The figure which shows typically the image generated by superimposing the optical microscope image and the transmission electron microscope image. 電子顕微鏡の構成を示す図。The figure which shows the structure of an electron microscope. ゾウリムシの光学顕微鏡像およびゾウリムシの電子顕微鏡像。Optical microscope image of Paramecium and electron microscope image of Paramecium.

以下、本発明の好適な実施形態について図面を用いて詳細に説明する。なお、以下に説明する実施形態は、特許請求の範囲に記載された本発明の内容を不当に限定するものではない。また、以下で説明される構成の全てが本発明の必須構成要件であるとは限らない。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unreasonably limit the content of the present invention described in the claims. Moreover, not all of the configurations described below are essential constituent requirements of the present invention.

1. 第1実施形態
まず、第1実施形態に係る観察方法について説明する。図1は、第1実施形態に係る観察方法の一例を示すフローチャートである。
1. 1. First Embodiment First, the observation method according to the first embodiment will be described. FIG. 1 is a flowchart showing an example of the observation method according to the first embodiment.

(1)試料作製(S100)
図2は、第1実施形態に係る観察方法における試料を作製する手法を説明するための図である。
(1) Sample preparation (S100)
FIG. 2 is a diagram for explaining a method for producing a sample in the observation method according to the first embodiment.

まず、観察対象物2を準備する。観察対象物2は、例えば、生体試料である。次に、観察対象物2を固定した後、樹脂包埋する。次に、樹脂包埋された観察対象物2を、ミクロトームなどで薄片化する。これにより、観察対象物2の切片が得られる。なお、観察対象物2に対する、固定、染色、樹脂包埋などの前処理の手法や順序は特に限定されない。 First, the observation object 2 is prepared. The observation object 2 is, for example, a biological sample. Next, after fixing the observation object 2, it is embedded in resin. Next, the observation object 2 embedded in the resin is sliced with a microtome or the like. As a result, a section of the observation object 2 is obtained. The method and order of pretreatment such as fixing, dyeing, and resin embedding for the observation object 2 are not particularly limited.

次に、観察対象物2の切片を支持膜4上に配置する。支持膜4は、高分子またはカーボンなどの極めて薄い膜である。次に、粒径の異なる複数の金属粒子6を含む水溶液を作製する。作製した金属粒子6を含む水溶液を、支持膜4上に滴下し、乾燥させる。これにより、支持膜4上に複数の金属粒子6を配置することができる。 Next, a section of the observation object 2 is placed on the support film 4. The support film 4 is an extremely thin film such as a polymer or carbon. Next, an aqueous solution containing a plurality of metal particles 6 having different particle diameters is prepared. The produced aqueous solution containing the metal particles 6 is dropped onto the support film 4 and dried. As a result, a plurality of metal particles 6 can be arranged on the support film 4.

以上の処理により、試料を作製することができる。 A sample can be prepared by the above processing.

第1実施形態では、観察位置を特定するための目印として、光の照射により局在表面プラズモン共鳴を励起する金属粒子6を用いる。金属粒子6の粒径は、例えば、20nm以上1μm以下である。金属粒子6の形状は、例えば、球状である。 In the first embodiment, the metal particles 6 that excite the localized surface plasmon resonance by irradiation with light are used as a mark for specifying the observation position. The particle size of the metal particles 6 is, for example, 20 nm or more and 1 μm or less. The shape of the metal particles 6 is, for example, spherical.

以下、目印として、金属粒子6を用いる理由について説明する。 Hereinafter, the reason why the metal particles 6 are used as the marks will be described.

局在表面プラズモン共鳴による電子の振動は、粒子の粒径や表面構造に依存する。この局在表面プラズモン共鳴による電子の振動により、特定波長の光が強く吸収または散乱される。局在表面プラズモン共鳴による特定波長の光の吸収または散乱により、光学顕微鏡観察において、ナノサイズの金属粒子6を観察することができる。さらに、局在表面プラズモン共鳴は、金属粒子の種類や、粒径、表面構造などに依存して吸収される光の波長を変化させる。そのため、光学顕微鏡観察において、金属粒子6からの散乱光の色から、金
属粒子6の粒径を推測することができる。
The vibration of electrons due to localized surface plasmon resonance depends on the particle size and surface structure of the particles. Due to the vibration of electrons due to this localized surface plasmon resonance, light of a specific wavelength is strongly absorbed or scattered. By absorbing or scattering light of a specific wavelength by localized surface plasmon resonance, nano-sized metal particles 6 can be observed in optical microscope observation. Furthermore, localized surface plasmon resonance changes the wavelength of absorbed light depending on the type of metal particles, particle size, surface structure, and the like. Therefore, in the observation with an optical microscope, the particle size of the metal particles 6 can be estimated from the color of the scattered light from the metal particles 6.

また、目印として金属粒子6を用いることにより、電子顕微鏡観察において吸収散乱コントラストが得られるため、電子顕微鏡像における目印として十分なコントラストが得られる。 Further, by using the metal particles 6 as the mark, the absorption / scattering contrast can be obtained in the electron microscope observation, so that a sufficient contrast can be obtained as the mark in the electron microscope image.

金属粒子6としては、金粒子が好ましい。金粒子は、王水以外の酸やアルカリでは腐食しない。また、細胞毒性が低く、細胞内に入れても悪影響を及ぼす可能性が低い。なお、金粒子として、金ナノアーチンを用いてもよい。また、金属粒子6として、金と銀の合金を用いてもよい。 As the metal particles 6, gold particles are preferable. Gold particles are not corroded by acids or alkalis other than aqua regia. In addition, it has low cytotoxicity and is unlikely to have an adverse effect even if it is put into cells. Gold nanoartin may be used as the gold particles. Further, as the metal particles 6, an alloy of gold and silver may be used.

(2)光学顕微鏡観察(S102)
次に、作製された試料を光学顕微鏡で観察する。光学顕微鏡観察では、暗視野像を観察する。すなわち、光学顕微鏡観察において、試料からの散乱光を観察する。光学顕微鏡において、暗視野像は、金属粒子6からの散乱光の色を確認できるように、カラー撮影可能なカメラで撮影される。なお、試料からの散乱光を確認できれば、光学顕微鏡観察において、明視野像を観察してもよい。
(2) Observation with an optical microscope (S102)
Next, the prepared sample is observed with an optical microscope. In optical microscope observation, a dark field image is observed. That is, in the observation with an optical microscope, the scattered light from the sample is observed. In the optical microscope, the dark field image is taken by a camera capable of color photographing so that the color of the scattered light from the metal particles 6 can be confirmed. If the scattered light from the sample can be confirmed, a bright field image may be observed in the observation with an optical microscope.

図3は、試料の光学顕微鏡像I2(暗視野像)を模式的に示す図である。なお、図3では、便宜上、金属粒子6からの散乱光の色を、ハッチングで表している。すなわち、同じハッチングの金属粒子6は、散乱光が同じ色であることを表している。 FIG. 3 is a diagram schematically showing an optical microscope image I2 (dark field image) of a sample. In FIG. 3, for convenience, the color of the scattered light from the metal particles 6 is represented by hatching. That is, the metal particles 6 having the same hatching indicate that the scattered light has the same color.

図3に示すように、光学顕微鏡像I2では、金属粒子6からの散乱光が観察される。光学顕微鏡の暗視野像では、局在表面プラズモン共鳴の効果により、約20nm程度の小さな金属粒子6からの散乱光であっても観察可能である。光学顕微鏡像I2では、金属粒子6からの散乱光は、輝点として観察される。 As shown in FIG. 3, in the optical microscope image I2, scattered light from the metal particles 6 is observed. In the dark field image of the optical microscope, even scattered light from small metal particles 6 of about 20 nm can be observed due to the effect of localized surface plasmon resonance. In the optical microscope image I2, the scattered light from the metal particles 6 is observed as a bright spot.

(3)輝点の抽出(S104)
次に、光学顕微鏡像I2から輝点を抽出する。すなわち、光学顕微鏡像I2から、金属粒子6を抽出する。具体的には、光学顕微鏡像I2から、各輝点の座標(X,Y)と、各輝点の色の情報と、を取得する。輝点の座標(X,Y)と輝点の色の情報は、光学顕微鏡像における、金属粒子の座標と金属粒子の色(金属粒子からの散乱光の色)の情報といえる。
(3) Extraction of bright spots (S104)
Next, a bright spot is extracted from the optical microscope image I2. That is, the metal particles 6 are extracted from the optical microscope image I2. Specifically, the coordinates (X, Y) of each bright spot and the color information of each bright spot are acquired from the optical microscope image I2. The information on the coordinates (X, Y) of the bright spot and the color of the bright spot can be said to be information on the coordinates of the metal particles and the color of the metal particles (the color of the scattered light from the metal particles) in the optical microscope image.

図4および図5は、輝点の座標を求める手法を説明するための図である。なお、図5には、図4の領域Vの拡大図、および輝点の強度プロファイルを図示している。図5に示すグラフの横軸は光学顕微鏡像の位置であり、縦軸は明るさを表している。 4 and 5 are diagrams for explaining a method for obtaining the coordinates of the bright spot. Note that FIG. 5 shows an enlarged view of the region V of FIG. 4 and an intensity profile of the bright spot. The horizontal axis of the graph shown in FIG. 5 is the position of the optical microscope image, and the vertical axis represents the brightness.

図5に示すように、輝点の明るさが正規分布するものとし、光学顕微鏡像I2における輝点の中心を輝点の座標(X,Y)とする。輝点の座標(X,Y)の情報を金属粒子の座標(X,Y)として、輝点の色の情報を金属粒子の色の情報として記録する。このとき、金属粒子の座標(X,Y)と金属粒子の色の情報を関連付けて記録する。 As shown in FIG. 5, it is assumed that the brightness of the bright spots is normally distributed, and the center of the bright spots in the optical microscope image I2 is defined as the coordinates (X, Y) of the bright spots. The information on the coordinates (X, Y) of the bright spot is recorded as the coordinates (X, Y) of the metal particles, and the information on the color of the bright spot is recorded as the information on the color of the metal particles. At this time, the coordinates (X, Y) of the metal particles and the color information of the metal particles are associated and recorded.

(4)電子顕微鏡観察(S106)
次に、作製された試料を透過電子顕微鏡で観察する。透過電子顕微鏡による観察は、暗視野であってもよいし、明視野であってもよい。
(4) Electron microscope observation (S106)
Next, the prepared sample is observed with a transmission electron microscope. Observation with a transmission electron microscope may be in a dark field or a bright field.

図6は、試料のTEM像I4(明視野像)を模式的に示す図である。図6に示すように、電子線は、金属粒子6によって吸収散乱されるため、TEM像I4では、金属粒子6は黒いドットとして観察される。 FIG. 6 is a diagram schematically showing a TEM image I4 (bright field image) of the sample. As shown in FIG. 6, since the electron beam is absorbed and scattered by the metal particles 6, the metal particles 6 are observed as black dots in the TEM image I4.

(5)金属粒子の抽出(S108)
次に、TEM像I4において、金属粒子6を抽出する。金属粒子6は、TEM像I4において黒いドットとして観察されるため、黒いドットの中心の座標を金属粒子6の座標(x,y)とする。
(5) Extraction of metal particles (S108)
Next, in the TEM image I4, the metal particles 6 are extracted. Since the metal particles 6 are observed as black dots in the TEM image I4, the coordinates of the center of the black dots are set to the coordinates (x, y) of the metal particles 6.

(6)金属粒子の粒径の測定(S110)
次に、TEM像I4において、金属粒子6の粒径(直径)を測定する。
(6) Measurement of particle size of metal particles (S110)
Next, in the TEM image I4, the particle size (diameter) of the metal particles 6 is measured.

図7は、金属粒子6の粒径の測定を説明するための図である。 FIG. 7 is a diagram for explaining the measurement of the particle size of the metal particles 6.

図7に示すように、TEM像I4において、各金属粒子6の粒径を測定する。金属粒子6の粒径の情報は、金属粒子6の座標(x,y)の情報と関連づけて記録する。 As shown in FIG. 7, the particle size of each metal particle 6 is measured in the TEM image I4. The information on the particle size of the metal particles 6 is recorded in association with the information on the coordinates (x, y) of the metal particles 6.

(7)光学顕微鏡像と電子顕微鏡像を対応づける情報の算出(S112)
次に、光学顕微鏡像I2とTEM像I4を対応づける情報を求める。光学顕微鏡像I2とTEM像I4を対応づける情報は、光学顕微鏡像から取得された、複数の金属粒子6の位置および色の情報と、TEM像から取得された、複数の金属粒子6の位置および粒径の情報と、に基づいて求めることができる。
(7) Calculation of information for associating an optical microscope image with an electron microscope image (S112)
Next, the information for associating the optical microscope image I2 with the TEM image I4 is obtained. The information for associating the optical microscope image I2 with the TEM image I4 includes the position and color information of the plurality of metal particles 6 acquired from the optical microscope image, the positions of the plurality of metal particles 6 acquired from the TEM image, and the information. It can be obtained based on the particle size information.

光学顕微鏡像I2における金属粒子6の色、すなわち、金属粒子6からの散乱光の色は、金属粒子6の粒径に依存する。具体的には、金属粒子6の粒径が大きくなるほど、局在表面プラズモン共鳴により長波長の光が金属粒子6に吸収される。そのため、光学顕微鏡像から取得された金属粒子6の色(光の波長)の情報から、金属粒子6の粒径を推測することができる。これを利用して、金属粒子6の粒径および金属粒子6の位置を、2つの画像間で照らし合わせることによって、光学顕微鏡像I2に見られる金属粒子6と、TEM像I4に見られる金属粒子6と、を対応付けることができる。 The color of the metal particles 6 in the optical microscope image I2, that is, the color of the scattered light from the metal particles 6, depends on the particle size of the metal particles 6. Specifically, as the particle size of the metal particles 6 increases, long-wavelength light is absorbed by the metal particles 6 due to localized surface plasmon resonance. Therefore, the particle size of the metal particles 6 can be estimated from the color (wavelength of light) information of the metal particles 6 obtained from the optical microscope image. Utilizing this, by comparing the particle size of the metal particles 6 and the positions of the metal particles 6 between the two images, the metal particles 6 seen in the optical microscope image I2 and the metal particles seen in the TEM image I4 are used. 6 and can be associated with each other.

このようにして、2つの画像間で対応する金属粒子6を見つけることによって、光学顕微鏡像I2における金属粒子6の座標(X,Y)とTEM像I4における金属粒子6の座標(x,y)とが、試料上の同じ位置を示すことがわかる。この結果、光学顕微鏡像I2とTEM像I4を対応づける情報を得ることができる。 By finding the corresponding metal particles 6 between the two images in this way, the coordinates (X, Y) of the metal particles 6 in the optical microscope image I2 and the coordinates (x, y) of the metal particles 6 in the TEM image I4. It can be seen that and indicates the same position on the sample. As a result, information for associating the optical microscope image I2 with the TEM image I4 can be obtained.

図8および図9は、光学顕微鏡像I2とTEM像I4を対応づける情報を求める手法を説明するための図である。 8 and 9 are diagrams for explaining a method for obtaining information for associating the optical microscope image I2 with the TEM image I4.

例えば、図8に示すように、光学顕微鏡像I2とTEM像I4との間で、対応する金属粒子6が2組見つかれば、光学顕微鏡像I2とTEM像I4との間における、倍率の差、および、向きの違いを求めることができる。例えば、図8に示すように、光学顕微鏡像I2において2つの金属粒子6を結ぶベクトルV2を引き、同様に、TEM像I4において2つの金属粒子6を結ぶベクトルV4を引く。ベクトルV2の長さとベクトルV4の長さの差から、2つの画像間の倍率の差を求めることができる。また、ベクトルV2の向き、およびベクトルV4の向きから、2つの画像間の向きの違いを求めることができる。2つの画像間の向きの違いは、例えば、ベクトルV2とベクトルV4とがなす角度で表すことができる。 For example, as shown in FIG. 8, if two sets of corresponding metal particles 6 are found between the optical microscope image I2 and the TEM image I4, the difference in magnification between the optical microscope image I2 and the TEM image I4. And the difference in orientation can be obtained. For example, as shown in FIG. 8, the vector V2 connecting the two metal particles 6 is drawn in the optical microscope image I2, and similarly, the vector V4 connecting the two metal particles 6 is drawn in the TEM image I4. From the difference between the length of the vector V2 and the length of the vector V4, the difference in magnification between the two images can be obtained. Further, the difference in orientation between the two images can be obtained from the orientation of the vector V2 and the orientation of the vector V4. The difference in orientation between the two images can be expressed, for example, by the angle formed by the vector V2 and the vector V4.

また、例えば、図9に示すように、光学顕微鏡像I2とTEM像I4との間で対応する金属粒子6が3組以上見つかれば、光学顕微鏡像I2とTEM像I4との間における、倍率の差、向きの違い、に加えて、像のゆがみを求めることができる。図9に示す例では、光学顕微鏡像I2とTEM像I4との間で対応する金属粒子6が4組あるため、倍率の差
、向きの違い、および像のゆがみを求めることができる。
Further, for example, as shown in FIG. 9, if three or more sets of corresponding metal particles 6 are found between the optical microscope image I2 and the TEM image I4, the magnification between the optical microscope image I2 and the TEM image I4 is increased. In addition to the difference and the difference in orientation, the distortion of the image can be obtained. In the example shown in FIG. 9, since there are four sets of corresponding metal particles 6 between the optical microscope image I2 and the TEM image I4, the difference in magnification, the difference in orientation, and the distortion of the image can be obtained.

光学顕微鏡における光学系の収差と電子顕微鏡における光学系の収差とは異なる。そのため、例えば、光学顕微鏡像I2を基準とした場合、光学顕微鏡像I2に対して、TEM像I4はゆがんでいる。上記のように、光学顕微鏡像I2とTEM像I4との間で対応する金属粒子6が3組以上見つかれば、光学顕微鏡像I2に対して、TEM像I4がどのようにゆがんでいるのかを求めることができる。なお、例えば、TEM像I4を基準として、TEM像I4に対して、光学顕微鏡像I2がどのようにゆがんでいるかを求めてもよい。 The aberration of the optical system in an optical microscope and the aberration of the optical system in an electron microscope are different. Therefore, for example, when the optical microscope image I2 is used as a reference, the TEM image I4 is distorted with respect to the optical microscope image I2. As described above, if three or more sets of corresponding metal particles 6 are found between the optical microscope image I2 and the TEM image I4, it is determined how the TEM image I4 is distorted with respect to the optical microscope image I2. be able to. For example, it may be determined how the optical microscope image I2 is distorted with respect to the TEM image I4 with the TEM image I4 as a reference.

(8)光学顕微鏡像とTEM像の位置合わせ(S114)
次に、光学顕微鏡像I2とTEM像I4を対応づける情報に基づいて、光学顕微鏡像I2とTEM像I4の位置合わせを行い、光学顕微鏡像I2とTEM像I4を重ねて1つの画像とする。
(8) Alignment of optical microscope image and TEM image (S114)
Next, the optical microscope image I2 and the TEM image I4 are aligned based on the information that associates the optical microscope image I2 with the TEM image I4, and the optical microscope image I2 and the TEM image I4 are overlapped to form one image.

例えば、まず、光学顕微鏡像I2とTEM像I4の倍率の差の情報に基づいて、光学顕微鏡像I2とTEM像I4の倍率を調整する。これにより、光学顕微鏡像I2とTEM像I4の倍率を等しくする。また、光学顕微鏡像I2とTEM像I4の向きの違いの情報に基づいて、光学顕微鏡像I2とTEM像I4の向きを調整する。例えば、光学顕微鏡像I2に対してTEM像I4を回転させることで、向きを調整することができる。これにより、光学顕微鏡像I2とTEM像I4を同じ向きにする。また、2つの画像間のゆがみの情報に基づいて、光学顕微鏡像I2とTEM像I4との間のゆがみを補正してもよい。 For example, first, the magnifications of the optical microscope image I2 and the TEM image I4 are adjusted based on the information of the difference in magnification between the optical microscope image I2 and the TEM image I4. As a result, the magnifications of the optical microscope image I2 and the TEM image I4 are made equal. Further, the orientations of the optical microscope image I2 and the TEM image I4 are adjusted based on the information on the difference in orientation between the optical microscope image I2 and the TEM image I4. For example, the orientation can be adjusted by rotating the TEM image I4 with respect to the optical microscope image I2. As a result, the optical microscope image I2 and the TEM image I4 are oriented in the same direction. Further, the distortion between the optical microscope image I2 and the TEM image I4 may be corrected based on the information on the distortion between the two images.

次に、倍率や向き等が調整された光学顕微鏡像I2と、倍率や向き等が調整されたTEM像I4の位置合わせを行い、光学顕微鏡像I2とTEM像I4を重ねて1つの画像とする。 Next, the optical microscope image I2 whose magnification and orientation are adjusted and the TEM image I4 whose magnification and orientation are adjusted are aligned, and the optical microscope image I2 and the TEM image I4 are overlapped to form one image. ..

図10は、光学顕微鏡像I2とTEM像I4を重ねて生成された画像I6を模式的に示す図である。 FIG. 10 is a diagram schematically showing an image I6 generated by superimposing an optical microscope image I2 and a TEM image I4.

図10に示す画像I6は、光学顕微鏡像I2およびTEM像I4の両方の特性を生かした画像となる。 The image I6 shown in FIG. 10 is an image that makes the best use of the characteristics of both the optical microscope image I2 and the TEM image I4.

以上の工程により、光学顕微鏡と透過電子顕微鏡を組み合わせて試料の観察ができる。 Through the above steps, a sample can be observed by combining an optical microscope and a transmission electron microscope.

なお、上記では、光学顕微鏡像とTEM像を取得する場合について説明したが、光学顕微鏡像と組み合わせる像は、電子顕微鏡像であればよい。ここで、電子顕微鏡像は、TEM像、走査電子顕微鏡像(SEM像)、および走査透過電子顕微鏡像(STEM像)を含む。SEM像およびSTEM像においても、TEM像と同様に、金属粒子6の粒径を測定できる。そのため、光学顕微鏡像とSEM像を取得する場合および光学顕微鏡像とSTEM像を取得する場合であっても、光学顕微鏡像とTEM像を取得する場合と同様の処理で、試料の観察が可能である。 In the above description, the case of acquiring the optical microscope image and the TEM image has been described, but the image to be combined with the optical microscope image may be an electron microscope image. Here, the electron microscope image includes a TEM image, a scanning electron microscope image (SEM image), and a scanning transmission electron microscope image (STEM image). In the SEM image and the STEM image, the particle size of the metal particles 6 can be measured in the same manner as in the TEM image. Therefore, even when acquiring the optical microscope image and the SEM image and when acquiring the optical microscope image and the STEM image, it is possible to observe the sample by the same processing as when acquiring the optical microscope image and the TEM image. is there.

また、上記では、観察対象物が生体試料である場合について説明したが、その他の試料についても、上記の生体試料の場合と同様に、光学顕微鏡と電子顕微鏡を組み合わせた観察が可能である。 Further, although the case where the object to be observed is a biological sample has been described above, it is possible to observe other samples by combining an optical microscope and an electron microscope as in the case of the above-mentioned biological sample.

第1実施形態に係る観察方法は、例えば、以下の特徴を有する。 The observation method according to the first embodiment has, for example, the following features.

第1実施形態に係る観察方法は、光の照射により局在表面プラズモン共鳴を励起する複
数の金属粒子を目印として含む試料を作製する工程と、光学顕微鏡像において複数の金属粒子の位置および色の情報を取得する工程と、電子顕微鏡像において複数の金属粒子の位置および粒径の情報を取得する工程と、光学顕微鏡像で取得された複数の金属粒子の位置および色の情報、および電子顕微鏡像で取得された複数の金属粒子の位置および粒径の情報に基づいて、光学顕微鏡像と電子顕微鏡像を対応づける情報を求める工程と、を含む。
The observation method according to the first embodiment includes a step of preparing a sample containing a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light as markers, and a step of preparing a sample containing a plurality of metal particles as markers, and the positions and colors of the plurality of metal particles in an optical microscope image. The step of acquiring information, the step of acquiring the position and particle size information of a plurality of metal particles in an electron microscope image, the position and color information of a plurality of metal particles acquired in an optical microscope image, and the electron microscope image. This includes a step of obtaining information for associating an optical microscope image and an electron microscope image based on the position and particle size information of the plurality of metal particles obtained in.

第1実施形態に係る観察方法では、光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子6を目印として用いている。複数の金属粒子6は、電子顕微鏡用試料作製の影響を受けずに、光学顕微鏡像および電子顕微鏡像の両方で目印として機能する。したがって、第1実施形態に係る観察方法では、光学顕微鏡および電子顕微鏡において、同じ状態の試料を観察することができる。 In the observation method according to the first embodiment, a plurality of metal particles 6 that excite the localized surface plasmon resonance by irradiation with light are used as markers. The plurality of metal particles 6 function as markers in both the optical microscope image and the electron microscope image without being affected by the sample preparation for the electron microscope. Therefore, in the observation method according to the first embodiment, the sample in the same state can be observed with an optical microscope and an electron microscope.

さらに、第1実施形態に係る観察方法では、光学顕微鏡像における輝点の色から金属粒子の粒径を推測することができる。したがって、光学顕微鏡像の金属粒子と電子顕微鏡像の金属粒子とを、容易に対応づけることができる。よって、正確に光学顕微鏡像と電子顕微鏡像の位置合わせができる。 Further, in the observation method according to the first embodiment, the particle size of the metal particles can be estimated from the color of the bright spot in the optical microscope image. Therefore, the metal particles of the optical microscope image and the metal particles of the electron microscope image can be easily associated with each other. Therefore, the optical microscope image and the electron microscope image can be accurately aligned.

第1実施形態に係る観察方法では、光学顕微鏡像は、例えば、暗視野像である。暗視野像では、金属粒子6からの散乱光の色が見やすい。そのため、光学顕微鏡像から金属粒子6の粒径を正確に推測することができる。 In the observation method according to the first embodiment, the optical microscope image is, for example, a dark field image. In the dark field image, the color of the scattered light from the metal particles 6 is easy to see. Therefore, the particle size of the metal particles 6 can be accurately estimated from the optical microscope image.

2. 第2実施形態
次に、第2実施形態に係る画像処理装置について、図面を参照しながら説明する。図11は、電子顕微鏡100の構成を示す図である。電子顕微鏡100は、第2実施形態に係る画像処理装置10を含む。
2. Second Embodiment Next, the image processing apparatus according to the second embodiment will be described with reference to the drawings. FIG. 11 is a diagram showing the configuration of the electron microscope 100. The electron microscope 100 includes the image processing device 10 according to the second embodiment.

電子顕微鏡100は、画像処理装置10と、電子顕微鏡本体20と、を含む。 The electron microscope 100 includes an image processing device 10 and an electron microscope main body 20.

電子顕微鏡本体20は、例えば、透過電子顕微鏡としての機能を有している。すなわち、電子顕微鏡本体20は、電子銃と、試料に電子線を照射する照射系、試料を保持する試料ステージ、試料を透過した電子で像を結像する結像系、および像を撮影する撮像装置を含む。電子顕微鏡本体20では、電子銃から放出された電子線は、照射系によって集束されて試料に照射される。試料に照射された電子線は試料を透過する。結像系によって、試料を透過した電子でTEM像が結像され、TEM像は、撮像装置で撮影される。撮像装置で撮影されたTEM像の画像データは、画像処理装置10に送られ、記憶部124に記憶される。 The electron microscope main body 20 has a function as, for example, a transmission electron microscope. That is, the electron microscope main body 20 includes an electron gun, an irradiation system for irradiating a sample with an electron beam, a sample stage for holding the sample, an imaging system for forming an image with electrons transmitted through the sample, and an imaging system for photographing the image. Includes equipment. In the electron microscope main body 20, the electron beam emitted from the electron gun is focused by the irradiation system and irradiated to the sample. The electron beam irradiated to the sample passes through the sample. The imaging system forms a TEM image with electrons transmitted through the sample, and the TEM image is taken by an imaging device. The image data of the TEM image taken by the image pickup apparatus is sent to the image processing apparatus 10 and stored in the storage unit 124.

画像処理装置10は、操作部120と、表示部122と、記憶部124と、処理部110と、を含む。 The image processing device 10 includes an operation unit 120, a display unit 122, a storage unit 124, and a processing unit 110.

操作部120は、ユーザーによる操作に応じた操作信号を取得し、処理部110に送る処理を行う。操作部120の機能は、例えば、ボタン、キー、タッチパネル型ディスプレイ、マイクなどにより実現できる。 The operation unit 120 acquires an operation signal according to the operation by the user and sends the operation signal to the processing unit 110. The function of the operation unit 120 can be realized by, for example, buttons, keys, a touch panel display, a microphone, and the like.

表示部122は、処理部110によって生成された画像を表示するものである。表示部122の機能は、例えば、LCD(Liquid Crystal Display)などのディスプレイにより実現できる。 The display unit 122 displays the image generated by the processing unit 110. The function of the display unit 122 can be realized by, for example, a display such as an LCD (Liquid Crystal Display).

記憶部124は、処理部110が各種の計算処理や制御処理を行うためのプログラムやデータ等を記憶している。また、記憶部124は、処理部110の作業領域として用いら
れ、処理部110が各種プログラムに従って実行した算出結果等を一時的に記憶するためにも使用される。記憶部124の機能は、例えば、RAM(Random Access Memory)、ROM(Read Only Memory)、およびハードディスクなどにより実現できる。
The storage unit 124 stores programs, data, and the like for the processing unit 110 to perform various calculation processes and control processes. The storage unit 124 is also used as a work area of the processing unit 110, and is also used to temporarily store the calculation results and the like executed by the processing unit 110 according to various programs. The function of the storage unit 124 can be realized by, for example, a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk, or the like.

処理部110は、記憶部124に記憶されているプログラムに従って、各種の制御処理や計算処理を行う。処理部110の機能は、各種プロセッサ(CPU(Central Processing Unit)等)でプログラムを実行することにより実現することができる。処理部110は、画像取得部112と、第1像情報取得部114と、第2像情報取得部116と、演算部118と、画像生成部119と、を含む。 The processing unit 110 performs various control processing and calculation processing according to the program stored in the storage unit 124. The function of the processing unit 110 can be realized by executing a program on various processors (CPU (Central Processing Unit) or the like). The processing unit 110 includes an image acquisition unit 112, a first image information acquisition unit 114, a second image information acquisition unit 116, a calculation unit 118, and an image generation unit 119.

画像取得部112は、光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として含む試料の光学顕微鏡像および当該試料の電子顕微鏡像を取得する。例えば、ユーザーが光学顕微鏡を用いて試料の撮影を行い、得られた光学顕微鏡像I2(図3参照)を記憶部124に記憶させる。画像取得部112は、記憶部124に記憶された光学顕微鏡像I2を読み出して、光学顕微鏡像I2を取得する。また、画像取得部112は、例えば、電子顕微鏡本体20で撮影され、記憶部124に記憶されたTEM像I4(図6参照)を読み出して、TEM像I4を取得する。 The image acquisition unit 112 acquires an optical microscope image of a sample containing a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light as markers and an electron microscope image of the sample. For example, a user photographs a sample using an optical microscope, and stores the obtained optical microscope image I2 (see FIG. 3) in the storage unit 124. The image acquisition unit 112 reads out the optical microscope image I2 stored in the storage unit 124 and acquires the optical microscope image I2. Further, the image acquisition unit 112 acquires the TEM image I4 by reading out the TEM image I4 (see FIG. 6) taken by the electron microscope main body 20 and stored in the storage unit 124, for example.

第1像情報取得部114は、光学顕微鏡像I2において、複数の金属粒子の位置および色の情報を取得する。第1像情報取得部114は、光学顕微鏡像I2において、輝点を抽出し、輝点の座標および輝点の色の情報を取得する。これにより、各金属粒子の位置および色の情報を取得できる。各金属粒子の位置および色の情報は、記憶部124に記録される。 The first image information acquisition unit 114 acquires information on the positions and colors of a plurality of metal particles in the optical microscope image I2. The first image information acquisition unit 114 extracts the bright spots in the optical microscope image I2, and acquires the coordinates of the bright spots and the color information of the bright spots. As a result, information on the position and color of each metal particle can be obtained. Information on the position and color of each metal particle is recorded in the storage unit 124.

第2像情報取得部116は、TEM像I4において、複数の金属粒子の位置および粒径の情報を取得する。第2像情報取得部116は、TEM像I4から金属粒子6に対応するコントラストの部分を抽出する。例えば、TEM像I4が明視野像である場合、金属粒子6は黒いドットとして観察される。そのため、第2像情報取得部116は、黒いドットの座標および黒いドットの粒径の情報を取得する。これにより、各金属粒子の位置および粒径の情報を取得できる。各金属粒子の位置および粒径の情報は、記憶部124に記録される。 The second image information acquisition unit 116 acquires information on the positions and particle sizes of the plurality of metal particles in the TEM image I4. The second image information acquisition unit 116 extracts the contrast portion corresponding to the metal particles 6 from the TEM image I4. For example, when the TEM image I4 is a bright field image, the metal particles 6 are observed as black dots. Therefore, the second image information acquisition unit 116 acquires information on the coordinates of the black dots and the particle size of the black dots. As a result, information on the position and particle size of each metal particle can be obtained. Information on the position and particle size of each metal particle is recorded in the storage unit 124.

演算部118は、光学顕微鏡像I2で取得された、複数の金属粒子6の位置および色の情報、およびTEM像I4で取得された、複数の金属粒子の位置および粒径の情報に基づいて、光学顕微鏡像I2とTEM像I4を対応づける情報を求める。光学顕微鏡像I2とTEM像I4を対応づける情報は、2つの画像間で対応する金属粒子6の位置の情報、2つの画像間の倍率の差の情報、および2つの画像間の向きの違いの情報を含む。さらに、光学顕微鏡像I2とTEM像I4を対応づける情報は、2つの画像間のひずみの情報を含んでいてもよい。 The calculation unit 118 is based on the position and color information of the plurality of metal particles 6 acquired by the optical microscope image I2 and the position and particle size information of the plurality of metal particles acquired by the TEM image I4. Information for associating the optical microscope image I2 with the TEM image I4 is obtained. The information that associates the optical microscope image I2 with the TEM image I4 is information on the position of the corresponding metal particle 6 between the two images, information on the difference in magnification between the two images, and information on the difference in orientation between the two images. Contains information. Further, the information associating the optical microscope image I2 with the TEM image I4 may include information on the strain between the two images.

演算部118は、光学顕微鏡像I2とTEM像I4において、対応する金属粒子6の位置の情報を求める。具体的には、演算部118は、光学顕微鏡像I2における金属粒子6の色の情報から金属粒子6の粒径を推測する。演算部118は、金属粒子6の粒径と金属粒子からの散乱光の色との関係を示すテーブルを用いて、金属粒子6の色から金属粒子6の粒径を推測する。演算部118は、推測された金属粒子6の粒径と位置の情報と、TEM像I4における金属粒子6の粒径と位置の情報と、を照らし合わせて、2つの画像間で対応する金属粒子6を見つける。 The calculation unit 118 obtains information on the positions of the corresponding metal particles 6 in the optical microscope image I2 and the TEM image I4. Specifically, the calculation unit 118 estimates the particle size of the metal particles 6 from the color information of the metal particles 6 in the optical microscope image I2. The calculation unit 118 estimates the particle size of the metal particles 6 from the color of the metal particles 6 by using a table showing the relationship between the particle size of the metal particles 6 and the color of the scattered light from the metal particles. The calculation unit 118 compares the estimated particle size and position information of the metal particle 6 with the information on the particle size and position of the metal particle 6 in the TEM image I4, and the corresponding metal particle between the two images. Find 6.

演算部118は、例えば、図8に示すように、光学顕微鏡像I2において2つの金属粒子6を結ぶベクトルV2と、TEM像I4において2つの金属粒子6を結ぶベクトルV4
の長さの差から、2つの画像間の倍率の差を求める。また、演算部118は、ベクトルV2の向き、およびベクトルV4の向きから、2つの画像間の向きの違いを求める。
For example, as shown in FIG. 8, the calculation unit 118 has a vector V2 connecting two metal particles 6 in the optical microscope image I2 and a vector V4 connecting two metal particles 6 in the TEM image I4.
From the difference in length of, the difference in magnification between the two images is obtained. Further, the calculation unit 118 obtains the difference in orientation between the two images from the orientation of the vector V2 and the orientation of the vector V4.

また、演算部118は、2つの画像間で対応する金属粒子6が3組以上あれば、光学顕微鏡像I2に対するTEM像I4のゆがみを求める。なお、TEM像I4に対する光学顕微鏡像I2のゆがみを求めてもよい。 Further, the arithmetic unit 118 obtains the distortion of the TEM image I4 with respect to the optical microscope image I2 if there are three or more sets of corresponding metal particles 6 between the two images. The distortion of the optical microscope image I2 with respect to the TEM image I4 may be obtained.

画像生成部119は、光学顕微鏡像I2とTEM像I4を対応づける情報に基づいて、光学顕微鏡像I2とTEM像I4の位置合わせを行い、光学顕微鏡像I2とTEM像I4を重ねた1つの画像を生成する。 The image generation unit 119 aligns the optical microscope image I2 and the TEM image I4 based on the information for associating the optical microscope image I2 with the TEM image I4, and superimposes the optical microscope image I2 and the TEM image I4. To generate.

画像生成部119は光学顕微鏡像I2とTEM像I4の倍率の差の情報に基づいて、光学顕微鏡像I2とTEM像I4の倍率を等しくする。また、画像生成部119は、光学顕微鏡像I2とTEM像I4の向きの違いの情報に基づいて、光学顕微鏡像I2とTEM像I4の向きを同じにする。また、光学顕微鏡像I2に対するTEM像I4のゆがみの情報が得られている場合には、光学顕微鏡像I2とTEM像I4との間のゆがみを補正する。画像生成部119は、このようにして等しい倍率、同じ向きとなった光学顕微鏡像I2とTEM像I4の位置合わせを行い、光学顕微鏡像I2とTEM像I4を重ねて1つの画像I6(図10参照)とする。画像生成部119は、生成した画像I6を表示部122に表示させる。 The image generation unit 119 equalizes the magnifications of the optical microscope image I2 and the TEM image I4 based on the information of the difference in magnification between the optical microscope image I2 and the TEM image I4. Further, the image generation unit 119 makes the directions of the optical microscope image I2 and the TEM image I4 the same based on the information of the difference in the orientations of the optical microscope image I2 and the TEM image I4. Further, when the information on the distortion of the TEM image I4 with respect to the optical microscope image I2 is obtained, the distortion between the optical microscope image I2 and the TEM image I4 is corrected. The image generation unit 119 aligns the optical microscope image I2 and the TEM image I4 having the same magnification and the same orientation in this way, and superimposes the optical microscope image I2 and the TEM image I4 to obtain one image I6 (FIG. 10). See). The image generation unit 119 causes the display unit 122 to display the generated image I6.

画像処理装置10は、例えば、以下の特徴を有する。 The image processing device 10 has, for example, the following features.

画像処理装置10では、演算部118は、光学顕微鏡像で取得された複数の金属粒子の位置および色の情報、および電子顕微鏡像で取得された複数の金属粒子の位置および粒径の情報に基づいて、光学顕微鏡像と電子顕微鏡像を対応づける情報を求める。このように、画像処理装置10では、光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として用いているため、光学顕微鏡観察において、輝点の色で金属粒子の粒径を推測することができる。したがって、画像処理装置10では、光学顕微鏡像の金属粒子と電子顕微鏡像の金属粒子とを、容易に対応づけることができる。よって、正確に光学顕微鏡像と電子顕微鏡像の位置合わせができる。 In the image processing apparatus 10, the calculation unit 118 is based on the position and color information of the plurality of metal particles acquired by the optical microscope image and the position and particle size information of the plurality of metal particles acquired by the electron microscope image. Then, the information for associating the optical microscope image with the electron microscope image is obtained. As described above, in the image processing apparatus 10, since a plurality of metal particles that excite the localized surface plasmon resonance by irradiation with light are used as markers, the particle size of the metal particles is determined by the color of the bright spot in the observation with an optical microscope. You can guess. Therefore, in the image processing apparatus 10, the metal particles of the optical microscope image and the metal particles of the electron microscope image can be easily associated with each other. Therefore, the optical microscope image and the electron microscope image can be accurately aligned.

画像処理装置10では、画像生成部119は、光学顕微鏡像と電子顕微鏡像を対応づける情報に基づいて、光学顕微鏡像と電子顕微鏡像の位置合わせを行い、光学顕微鏡像と電子顕微鏡像を重ねた1つの画像を生成する。そのため、画像処理装置10では、光学顕微鏡像I2およびTEM像I4の両方の特性を生かした画像を得ることができる。 In the image processing apparatus 10, the image generation unit 119 aligns the optical microscope image and the electron microscope image based on the information for associating the optical microscope image with the electron microscope image, and superimposes the optical microscope image and the electron microscope image. Generate one image. Therefore, the image processing apparatus 10 can obtain an image that makes the best use of the characteristics of both the optical microscope image I2 and the TEM image I4.

3. 変形例
以下では、上述した第1実施形態に係る観察方法と異なる点について説明し、同様の点については説明を省略する。
3. 3. Modification Examples In the following, points different from the observation method according to the first embodiment described above will be described, and description of the same points will be omitted.

上述した第1実施形態では、金属粒子6を含む水溶液を、支持膜4上の観察対象物2の切片に滴下し、乾燥させることで、金属粒子6を支持膜4上に配置した。複数の金属粒子6を含む試料の作製方法は、これに限定されない。 In the first embodiment described above, the metal particles 6 are placed on the support film 4 by dropping an aqueous solution containing the metal particles 6 onto a section of the observation object 2 on the support film 4 and drying the mixture. The method for preparing a sample containing the plurality of metal particles 6 is not limited to this.

例えば、観察したい細胞や、細胞内小器官、タンパク質などの標識として、金ナノ粒子を用いることができる。金ナノ粒子は、粒径がナノオーダーの金粒子である。金ナノ粒子の表面は様々な装飾が可能であり、金ナノ粒子にタンパク質や基質を結合することもできる。細胞に金ナノ粒子を標識する場合、培地に金ナノ粒子を加え、エンドサイトーシスで細胞内に金ナノ粒子を取り込ませる。また、微小電極を用いて、細胞内に金ナノ粒子をイ
ンジェクションすることもできる。
For example, gold nanoparticles can be used as labels for cells to be observed, organelles, proteins, and the like. Gold nanoparticles are gold particles having a particle size of nano-order. The surface of the gold nanoparticles can be decorated in various ways, and proteins and substrates can be bound to the gold nanoparticles. When labeling cells with gold nanoparticles, gold nanoparticles are added to the medium and the gold nanoparticles are incorporated into the cells by endocytosis. It is also possible to inject gold nanoparticles into cells using microelectrodes.

また、タンパク質に金ナノ粒子を標識する場合、観察対象のタンパク質に対する抗体を作製し、免疫染色を行う。その際に、二次抗体に金ナノ粒子を結合させる。また、タンパク質が酵素の場合、酵素に対する基質に金ナノ粒子を結合させることによっても、標識できる。 When gold nanoparticles are labeled on a protein, an antibody against the protein to be observed is prepared and immunostaining is performed. At that time, the gold nanoparticles are bound to the secondary antibody. If the protein is an enzyme, it can also be labeled by binding gold nanoparticles to a substrate for the enzyme.

また、例えば、ゾウリムシなどの生物に対して、金属粒子を食べさせてもよい。以下、観察対象物がゾウリムシである場合の試料作製方法について説明する。 Further, for example, organisms such as Paramecium may be fed with metal particles. Hereinafter, a sample preparation method when the object to be observed is Paramecium will be described.

まず、ゾウリムシを培養している培地に金ナノ粒子を加える。これにより、ゾウリムシに金ナノ粒子を食べさせることができる。食べられた金ナノ粒子は、ゾウリムシの食胞に蓄えられる。 First, gold nanoparticles are added to the medium in which Paramecium is cultivated. This allows the Paramecium to feed on the gold nanoparticles. The edible gold nanoparticles are stored in the vesicles of Paramecium.

次に、金ナノ粒子を食べたゾウリムシの透過電子顕微鏡用の試料を作製する。例えば、ゾウリムシを、グルタールアルデヒドと四酸化オスミウムで固定し、エタノールシリーズで脱水した後、エポキシ樹脂に包埋する。樹脂包埋されたゾウリムシは、ミクロトームで100nm以下の厚さに切り、その切片を支持膜上に置く。次に、試料切片を、酢酸ウランとクエン酸鉛で2重染色する。以上の工程により、透過電子顕微鏡用の試料を作製することができる。 Next, a sample for a transmission electron microscope of Paramecium that has eaten gold nanoparticles is prepared. For example, Paramecium is fixed with glutaraldehyde and osmium tetroxide, dehydrated with an ethanol series, and then embedded in an epoxy resin. The resin-embedded Paramecium is cut into a thickness of 100 nm or less with a microtome, and a section thereof is placed on a support membrane. The sample section is then double stained with uranium acetate and lead citrate. Through the above steps, a sample for a transmission electron microscope can be prepared.

図12は、ゾウリムシの光学顕微鏡像(暗視野像)およびTEM像である。なお、図12に示す像(a)は光学顕微鏡像(暗視野像)であり、像(b)は(a)と同じ視野のTEM像である。また、像(c)は像(a)の拡大像であり、像(d)は像(b)の拡大像である。像(e)は、像(c)と像(d)を重ね合わせた画像である。 FIG. 12 is an optical microscope image (dark field image) and a TEM image of Paramecium. The image (a) shown in FIG. 12 is an optical microscope image (dark field image), and the image (b) is a TEM image having the same field of view as (a). Further, the image (c) is a magnified image of the image (a), and the image (d) is a magnified image of the image (b). The image (e) is an image in which the image (c) and the image (d) are superimposed.

上記のように、目印としての金ナノ粒子は、試料作製時に、グルタールアルデヒド、四酸化オスミウム、酸化ウラン、クエン酸鉛に曝されている。しかしながら、図12に示す光学顕微鏡像では、ゾウリムシからの散乱光に混じって、金ナノ粒子からのオレンジ色の散乱光が見られる。像(c)においてオレンジ色に光る領域はゾウリムシの食胞であるため、像(d)においてゾウリムシの食胞を特定することができる。 As described above, the gold nanoparticles as markers are exposed to glutaraldehyde, osmium tetroxide, uranium oxide, and lead citrate at the time of sample preparation. However, in the optical microscope image shown in FIG. 12, orange scattered light from the gold nanoparticles can be seen mixed with the scattered light from the paramecium. Since the region glowing orange in the image (c) is the paramecium cyst, the paramecium cyst can be identified in the image (d).

また、像(e)に示すように、金ナノ粒子を目印として用いることによって、光学顕微鏡像とTEM像を正確に位置合わせすることができる。 Further, as shown in the image (e), by using the gold nanoparticles as markers, the optical microscope image and the TEM image can be accurately aligned.

ここで、金粒子を使った標識は、免疫電子顕微鏡法で用いられている。免疫電子顕微鏡法は、細胞や組織を構成する成分の局在を、免疫反応を利用して、電子顕微鏡レベルで可視化する手法である。免疫電子顕微鏡法で用いられる金粒子の粒径は、細胞や組織に浸透させるために、5nm以下のものが用いられる。しかしながら、10nmより小さい金粒子では、散乱光が弱く、光学顕微鏡観察において散乱光を観察できない。 Here, labeling using gold particles is used in immunoelectron microscopy. Immune electron microscopy is a method of visualizing the localization of components that make up cells and tissues at the electron microscope level using an immune response. The particle size of gold particles used in immunoelectron microscopy is 5 nm or less in order to penetrate cells and tissues. However, with gold particles smaller than 10 nm, the scattered light is weak and the scattered light cannot be observed by optical microscope observation.

そのため、観察対象物である細胞や組織に金ナノ粒子標識抗体を浸透させた後に、金ナノ粒子の粒径を大きくしてもよい。 Therefore, the particle size of the gold nanoparticles may be increased after the gold nanoparticles-labeled antibody is impregnated into the cells or tissues to be observed.

まず、培養細胞を固定した後、一次抗体として抗ミトコンドリア抗体を反応させる。次に、培養細胞に、二次抗体として、金コロイド標識抗ウサギIgG抗体を反応させる。金コロイド標識抗ウサギIgG抗体は、金ナノ粒子が抗ウサギIgG抗体に結合したものである。金ナノ粒子の粒径は、5nm以下である。 First, after fixing the cultured cells, an anti-mitochondrial antibody is reacted as a primary antibody. Next, the cultured cells are reacted with a gold colloid-labeled anti-rabbit IgG antibody as a secondary antibody. A gold colloid-labeled anti-rabbit IgG antibody is one in which gold nanoparticles are bound to an anti-rabbit IgG antibody. The particle size of the gold nanoparticles is 5 nm or less.

上記のように培養細胞に対して一次抗体および二次抗体を反応させた後、金ナノ粒子の
粒径を、金増感法によって、大きくする。次に、培養細胞を、脱水、樹脂包埋し、樹脂包埋された細胞を、ウルトラミクロトームなどで薄片化する。このようにして作製された試料切片を、支持膜上に配置する。
After reacting the cultured cells with the primary antibody and the secondary antibody as described above, the particle size of the gold nanoparticles is increased by the gold sensitization method. Next, the cultured cells are dehydrated and resin-embedded, and the resin-embedded cells are sliced with an ultramicrotome or the like. The sample section thus prepared is placed on the support membrane.

以上の工程により、透過電子顕微鏡用の試料を作製することができる。 Through the above steps, a sample for a transmission electron microscope can be prepared.

上記のように、金増感法により金ナノ粒子の粒径を大きくした場合、金ナノ粒子の粒径にばらつきが生じる。そのため、光学顕微鏡像には、色の異なる複数の輝点が観察され、電子顕微鏡像には、粒径が異なる複数の金属粒子が観察される。したがって、光学顕微鏡像の金属粒子と電子顕微鏡像の金属粒子とを、容易に対応づけることができる。よって、正確に光学顕微鏡像と電子顕微鏡像の位置合わせができる。 As described above, when the particle size of the gold nanoparticles is increased by the gold sensitization method, the particle size of the gold nanoparticles varies. Therefore, a plurality of bright spots having different colors are observed in the optical microscope image, and a plurality of metal particles having different particle sizes are observed in the electron microscope image. Therefore, the metal particles of the optical microscope image and the metal particles of the electron microscope image can be easily associated with each other. Therefore, the optical microscope image and the electron microscope image can be accurately aligned.

上記のように、試料に粒径の小さい金属粒子を導入した後に、金属粒子の粒径を大きくすることにより、細胞や組織への浸透性を維持しつつ、光学顕微鏡観察における視認性を高めることができる。 As described above, after introducing metal particles having a small particle size into a sample, the particle size of the metal particles is increased to improve visibility in optical microscope observation while maintaining permeability to cells and tissues. Can be done.

本発明は、実施の形態で説明した構成と実質的に同一の構成(例えば、機能、方法および結果が同一の構成、あるいは目的及び効果が同一の構成)を含む。また、本発明は、実施の形態で説明した構成の本質的でない部分を置き換えた構成を含む。また、本発明は、実施の形態で説明した構成と同一の作用効果を奏する構成又は同一の目的を達成することができる構成を含む。また、本発明は、実施の形態で説明した構成に公知技術を付加した構成を含む。 The present invention includes substantially the same configurations as those described in the embodiments (eg, configurations with the same function, method and result, or configurations with the same purpose and effect). The present invention also includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. The present invention also includes a configuration that exhibits the same effects as the configuration described in the embodiment or a configuration that can achieve the same object. The present invention also includes a configuration in which a known technique is added to the configuration described in the embodiment.

2…観察対象物、4…支持膜、6…金属粒子、10…画像処理装置、20…電子顕微鏡本体、100…電子顕微鏡、110…処理部、112…画像取得部、114…第1像情報取得部、116…第2像情報取得部、118…演算部、119…画像生成部、120…操作部、122…表示部、124…記憶部 2 ... Observation object, 4 ... Support film, 6 ... Metal particles, 10 ... Image processing device, 20 ... Electron microscope main body, 100 ... Electron microscope, 110 ... Processing unit, 112 ... Image acquisition unit, 114 ... First image information Acquisition unit, 116 ... Second image information acquisition unit, 118 ... Calculation unit, 119 ... Image generation unit, 120 ... Operation unit, 122 ... Display unit, 124 ... Storage unit

Claims (7)

光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として含む試料を作製する工程と、
前記試料を光学顕微鏡で撮影することによって、光学顕微鏡像を取得する工程と、
前記試料を電子顕微鏡で撮影することによって、電子顕微鏡像を取得する工程と、
前記光学顕微鏡像において、複数の前記金属粒子の位置および散乱光の色の情報を取得する工程と、
前記電子顕微鏡像において、複数の前記金属粒子の位置および粒径の情報を取得する工程と、
前記光学顕微鏡像で取得された、複数の前記金属粒子の位置および散乱光の色の情報、および前記電子顕微鏡像で取得された、複数の前記金属粒子の位置および粒径の情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報を求める工程と、
前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の位置合わせを行い、前記光学顕微鏡像と前記電子顕微鏡像を重ねた1つの画像を生成する工程と、
を含み、
前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報を求める工程では、
前記金属粒子の粒径と前記金属粒子の散乱光の色との関係に基づいて、前記光学顕微鏡像における前記金属粒子の散乱光の色から前記金属粒子の粒径を推測し、
推測された前記光学顕微鏡像における前記金属粒子の粒径と位置の情報と、前記電子顕微鏡像における前記金属粒子の粒径と位置の情報と、を照らし合わせて、前記光学顕微鏡像と前記電子顕微鏡像との間で対応する前記金属粒子を見つけ、
対応する前記金属粒子に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率の差、および前記光学顕微鏡像と前記電子顕微鏡像の向きの違いを求め、
前記1つの画像を生成する工程では、
求められた前記光学顕微鏡像と前記電子顕微鏡像の倍率の差に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率を等しくし、
求められた前記光学顕微鏡像と前記電子顕微鏡像の向きの違いに基づいて、前記光学顕微鏡像と前記電子顕微鏡像の向きを揃える、観察方法。
A process of preparing a sample containing a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light as markers, and a process of preparing a sample.
The process of acquiring an optical microscope image by photographing the sample with an optical microscope, and
The process of acquiring an electron microscope image by photographing the sample with an electron microscope, and
In the optical microscope image, a step of acquiring information on the positions of a plurality of the metal particles and the color of scattered light, and
A step of acquiring information on the positions and particle sizes of a plurality of the metal particles in the electron microscope image, and
Based on the position and scattered light color information of the plurality of metal particles acquired by the optical microscope image and the position and particle size information of the plurality of metal particles acquired by the electron microscope image. A step of obtaining information for associating the optical microscope image with the electron microscope image, and
Based on the information that associates the optical microscope image with the electron microscope image, the optical microscope image and the electron microscope image are aligned to generate one image in which the optical microscope image and the electron microscope image are superimposed. Process and
Only including,
In the step of obtaining information for associating the optical microscope image with the electron microscope image,
Based on the relationship between the particle size of the metal particles and the color of the scattered light of the metal particles, the particle size of the metal particles is estimated from the color of the scattered light of the metal particles in the optical microscope image.
The optical microscope image and the electron microscope are compared with the estimated particle size and position information of the metal particles in the optical microscope image and the particle size and position information of the metal particles in the electron microscope image. Find the corresponding metal particle with the image and
Based on the corresponding metal particles, the difference in magnification between the optical microscope image and the electron microscope image and the difference in the orientation of the optical microscope image and the electron microscope image were obtained.
In the step of generating one image,
Based on the obtained difference in magnification between the optical microscope image and the electron microscope image, the magnifications of the optical microscope image and the electron microscope image are made equal.
An observation method in which the directions of the optical microscope image and the electron microscope image are aligned based on the obtained difference in orientation between the optical microscope image and the electron microscope image.
請求項1において、
前記金属粒子は、金粒子である、観察方法。
In claim 1,
The observation method, wherein the metal particles are gold particles.
請求項1または2において、
前記光学顕微鏡像は、暗視野像である、観察方法。
In claim 1 or 2,
The observation method, wherein the optical microscope image is a dark field image.
請求項1ないしのいずれか1項において、
前記試料は、前記金属粒子で標識された観察対象物を含む、観察方法。
In any one of claims 1 to 3 ,
The observation method, wherein the sample includes an observation object labeled with the metal particles.
請求項1ないしのいずれか1項において、
前記試料を作製する工程は、
観察対象物を、前記金属粒子で標識する工程と、
前記金属粒子を増感法により大きくする工程と、
を含む、観察方法。
In any one of claims 1 to 4 ,
The step of preparing the sample is
The step of labeling the observation object with the metal particles and
The step of enlarging the metal particles by the sensitization method and
Observation methods, including.
光の照射により局在表面プラズモン共鳴を励起する複数の金属粒子を目印として含む試料の光学顕微鏡像および前記試料の電子顕微鏡像を取得する画像取得部と、
前記光学顕微鏡像において、複数の前記金属粒子の位置および散乱光の色の情報を取得する第1像情報取得部と、
前記電子顕微鏡像において、複数の前記金属粒子の位置および粒径の情報を取得する第2像情報取得部と、
前記光学顕微鏡像で取得された、複数の前記金属粒子の位置および散乱光の色の情報、および前記電子顕微鏡像で取得された、複数の前記金属粒子の位置および粒径の情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報を求める演算部と、
前記光学顕微鏡像と前記電子顕微鏡像を対応づける情報に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の位置合わせを行い、前記光学顕微鏡像と前記電子顕微鏡像を重ねた1つの画像を生成する画像生成部と、
を含み、
前記演算部は、
前記金属粒子の粒径と前記金属粒子の散乱光の色との関係を示すテーブルを用いて、前記光学顕微鏡像における前記金属粒子の散乱光の色から前記金属粒子の粒径を推測し、
推測された前記光学顕微鏡像における前記金属粒子の粒径と位置の情報と、前記電子顕微鏡像における前記金属粒子の粒径と位置の情報と、を照らし合わせて、前記光学顕微鏡像と前記電子顕微鏡像との間で対応する前記金属粒子を見つけ、
対応する前記金属粒子に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率の差、および前記光学顕微鏡像と前記電子顕微鏡像の向きの違いを求め、
前記画像生成部は、
求められた前記光学顕微鏡像と前記電子顕微鏡像の倍率の差に基づいて、前記光学顕微鏡像と前記電子顕微鏡像の倍率を等しくし、
求められた前記光学顕微鏡像と前記電子顕微鏡像の向きの違いに基づいて、前記光学顕微鏡像と前記電子顕微鏡像の向きを揃える、画像処理装置。
An image acquisition unit that acquires an optical microscope image of a sample containing a plurality of metal particles that excite localized surface plasmon resonance by irradiation with light and an electron microscope image of the sample as markers.
In the optical microscope image, a first image information acquisition unit that acquires information on the positions of a plurality of the metal particles and the color of scattered light, and
In the electron microscope image, a second image information acquisition unit that acquires information on the positions and particle sizes of the plurality of metal particles, and
Based on the position and scattered light color information of the plurality of metal particles acquired by the optical microscope image and the position and particle size information of the plurality of metal particles acquired by the electron microscope image. An arithmetic unit that obtains information that associates the optical microscope image with the electron microscope image, and
Based on the information that associates the optical microscope image with the electron microscope image, the optical microscope image and the electron microscope image are aligned to generate one image in which the optical microscope image and the electron microscope image are superimposed. Image generator and
Including
The calculation unit
Using a table showing the relationship between the particle size of the metal particles and the color of the scattered light of the metal particles, the particle size of the metal particles was estimated from the color of the scattered light of the metal particles in the optical microscope image.
The optical microscope image and the electron microscope are compared with the estimated particle size and position information of the metal particles in the optical microscope image and the particle size and position information of the metal particles in the electron microscope image. Find the corresponding metal particle with the image and
Based on the corresponding metal particles, the difference in magnification between the optical microscope image and the electron microscope image and the difference in the orientation of the optical microscope image and the electron microscope image were obtained.
The image generation unit
Based on the obtained difference in magnification between the optical microscope image and the electron microscope image, the magnifications of the optical microscope image and the electron microscope image are made equal.
An image processing device that aligns the directions of the optical microscope image and the electron microscope image based on the obtained difference in orientation between the optical microscope image and the electron microscope image.
請求項に記載の画像処理装置を含む電子顕微鏡。 An electron microscope including the image processing apparatus according to claim 6.
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