JP6905365B2 - Gas analyzer and gas analysis method - Google Patents

Description

The present invention relates to a gas analyzer and a gas analysis method, and more particularly to a gas analyzer and a gas analysis method including a plurality of sensor units.

Conventionally, a gas analyzer including a plurality of sensor units is known (see, for example, Patent Document 1).

The above-mentioned Patent Document 1 includes a gas sampling device including a plurality (two) sensor units of a gas detection unit that detects a desired gas component concentration of a gas to be detected and a concentration measurement unit that detects the concentration of the gas to be detected. (Gas analyzer) is disclosed.

JP-A-2015-141132

Here, when the device includes a plurality of (two) sensor units as in the gas sampling device described in Patent Document 1, the responsiveness (speed of response) of the plurality (two) sensor units is high. May differ from each other. In this case, in order to reliably detect the gas component of the detected gas in the sensor unit having low responsiveness (slow response), the amount of detected gas is larger than that in the sensor unit having high responsiveness (fast response). It is considered necessary to shed. However, in the gas sampling device described in Patent Document 1, since the responsiveness of the sensor unit is not taken into consideration, the same amount of gas to be detected is generated in the sensor unit having high responsiveness and the sensor unit having low responsiveness. If it does, a large amount of gas to be detected will flow to the highly responsive sensor unit, and there is a problem that the highly responsive sensor unit is likely to deteriorate.

The present invention has been made to solve the above-mentioned problems, and one object of the present invention is a gas to be detected in both a sensor unit having low responsiveness and a sensor unit having high responsiveness. It is an object of the present invention to provide a gas analyzer and a gas analysis method capable of reliably detecting a component.

The gas analyzer according to the first aspect of the present invention has a higher responsiveness than the first sensor unit for detecting the gas component of the detected gas and the first sensor unit, and can detect the gas component of the detected gas. A second sensor unit for detecting is provided, and when the gas component of the detected gas is detected by the first sensor unit, the detected gas having the total amount of the first detected gas flows through the first sensor unit. When the gas component of the detected gas is detected by the second sensor unit, the detected gas having the total amount of the second detected gas smaller than the first detected gas amount flows through the second sensor unit. A flow path for switching the flow path of the gas to be detected between a first flow path through which the gas to be detected flows through the first sensor section and a second flow path through which the gas to be detected flows through the second sensor section. A switching unit is further provided, and a gas storage unit capable of storing the detected gas with a second amount of detected gas is further provided. In the first flow path, the detected gas is supplied to the first sensor unit via the gas storage unit. Flow, in the second flow path, the detected gas stored in the gas storage unit flows through the second sensor unit, or during the detection operation by the first sensor unit, the detected gas introduction port passes through the first flow path. The detected gas is introduced by the first amount of detected gas, and during the detection operation by the second sensor unit, the detected gas is introduced by the second amount of detected gas from the detected gas introduction port via the second flow path. that it has been configured to be introduced.

In the gas analyzer according to the first aspect of the present invention, as described above, when the gas analyzer detects the gas component of the gas to be detected by the first sensor unit, the first sensor unit detects the gas component first. When the gas to be detected, which is the total amount of gas, flows and the second sensor unit detects the gas component of the gas to be detected, the second sensor unit has a second gas to be detected that is smaller than the amount of the first gas to be detected. The gas to be detected, which is the total amount, is configured to flow. As a result, an appropriate amount of gas to be detected can flow to each of the first sensor unit having low responsiveness and the second sensor unit having high responsiveness, so that a large amount of gas to be detected flows to the second sensor unit. It can be suppressed. As a result, it is possible to prevent both the first sensor unit and the second sensor unit from reliably detecting the gas component of the gas to be detected.

In the gas analyzer according to the first aspect, preferably, the cleaning operation of the first sensor unit by the cleaning gas and the detection operation of the detected gas by the second sensor unit are performed in parallel. With this configuration, cleaning of the first sensor unit with the cleaning gas can be started during the detection operation of the detected gas by the second sensor unit. As a result, it is possible to prevent the next gas analysis operation from being performed due to the incomplete cleaning of the first sensor unit.

In this case, preferably, a first cleaning gas introduction port for cleaning the first sensor unit and a second cleaning gas introduction port for cleaning the second sensor unit are further provided. With this configuration, the first cleaning gas introduction port for cleaning the first sensor unit and the second cleaning gas introduction port for cleaning the second sensor unit are separately provided. 2 Cleaning of the first sensor unit with the cleaning gas can be easily started during the detection operation of the detected gas by the sensor unit.

In the gas analyzer according to the first aspect, preferably, the first sensor unit is a sensor unit having selectivity, and the second sensor unit is a sensor unit having no selectivity. In the specification of the present application, "the sensor unit has selectivity" means that the sensor unit can detect only one gas component, and "the sensor unit does not have selectivity" means that the sensor unit has selectivity. It means that multiple gas components can be detected. With this configuration, an appropriate amount of gas to be detected can flow through each of the first sensor unit having low responsiveness and selectivity and the second sensor unit having high responsiveness and non-selectivity. ..

The gas analysis method according to the second aspect of the present invention includes a step of flowing a detected gas having the total amount of the first detected gas as the total amount to the first sensor unit when the detected gas is detected by the first sensor unit. When the second sensor unit, which has higher responsiveness than the first sensor unit, detects the detected gas, the second sensor unit uses the second detected gas amount, which is smaller than the first detected gas amount, as the total amount. The process of flowing the detected gas and the flow path switching unit allow the detected gas to flow through the flow path of the detected gas, the first flow path through which the detected gas flows through the first sensor section, and the second flow path through which the detected gas flows through the second sensor section. A step of switching to two flow paths and a step of flowing the detected gas to the first sensor unit include a step of flowing the detected gas to the first sensor unit via the gas storage unit in the first flow path. The step of flowing the detected gas to the second sensor unit includes the step of flowing the detected gas stored in the gas storage unit to the second sensor unit in the second flow path, or to the first sensor unit. The step of flowing the detected gas includes a step of introducing the detected gas with the first detected gas amount from the detected gas introduction port through the first flow path during the detection operation by the first sensor unit, and the second step. The step of flowing the detected gas through the sensor unit includes a step of introducing the detected gas with a second amount of detected gas from the detected gas introduction port via the second flow path during the detection operation by the second sensor unit. ..

In the gas analysis method according to the second aspect of the present invention, as described above, when the detected gas is detected by the first sensor unit, the detected gas is detected by the first sensor unit with the total amount of the first detected gas as the total amount. When the gas to be detected is detected by the process of flowing gas and the second sensor unit having higher responsiveness than the first sensor unit, the second sensor unit is detected by the second sensor unit, which is less than the amount of the first detected gas. It includes a step of flowing a detected gas having the total amount of gas as the total amount. As a result, an appropriate amount of gas to be detected can flow to the first sensor unit having low responsiveness and the second sensor unit having high responsiveness, respectively, so that a large amount of gas to be detected can be suppressed from flowing to the second sensor unit. can do. As a result, it is possible to provide a gas analysis method capable of reliably detecting the gas component of the gas to be detected by both the first sensor unit and the second sensor unit.

According to the present invention, as described above, the gas component of the gas to be detected can be reliably detected by both the sensor unit having low responsiveness and the sensor unit having high responsiveness.

It is a figure which shows the gas analyzer by one Embodiment of this invention. It is a figure which shows the gas flow of the CO2 gas analysis state of the gas analyzer by one Embodiment of this invention. It is a figure which shows the gas flow of the flammable gas analysis state of the gas analyzer by one Embodiment of this invention. It is a figure which shows the gas flow in the standby state of the gas analyzer by one Embodiment of this invention.

Hereinafter, embodiments embodying the present invention will be described with reference to the drawings.

(Structure of gas analyzer)
The configuration of the gas analyzer 100 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 4. In this embodiment, an example in which the present invention is applied to the gas analyzer 100 for urban gas analysis will be described. The gas analyzer 100 is used, for example, to analyze whether or not city gas is leaking from a pipe for city gas buried in the ground.

As shown in FIG. 1, the gas analyzer 100 is configured to be capable of detecting flammable gases such as methane gas, ethane gas, and propane gas, which are gas components of city gas. Here, methane gas, which is the main component of city gas, may be naturally generated from the ground. Therefore, it may be difficult to distinguish whether the detected methane gas is derived from city gas or naturally generated by simply detecting methane gas. Therefore, the gas analyzer 100 is configured to be capable of detecting CO2 gas in addition to flammable gases such as methane gas, ethane gas, and propane gas, which are gas components of city gas. When methane gas is naturally generated by fermentation, CO2 (carbon dioxide) gas is also generated together with methane gas. Therefore, by detecting CO2 gas in addition to methane gas, ethane gas, propane gas, etc., which are gas components of city gas, It is possible to more reliably analyze whether or not city gas is leaking.

The gas analyzer 100 includes a first sensor unit 1, a second sensor unit 2, a flow path switching unit 3, and a control unit 4.

The first sensor unit 1 is configured to detect CO2 gas, which is a gas component of the gas to be detected. The first sensor unit 1 has an optical sensor that uses light such as infrared rays, and is configured to detect CO2 gas by the optical sensor. The first sensor unit 1 has selectivity and is configured to be able to detect only CO2 gas.

A detected gas introduction port 5 is provided on the upstream side of the first sensor unit 1. The detected gas introduced from the detected gas introduction port 5 flows through the first sensor unit 1. When analyzing the detected gas, the detected gas is injected into the detected gas introduction port 5 by, for example, a syringe. Further, a cleaning gas introduction port 1a and a cleaning gas control valve 1b are provided on the upstream side of the first sensor unit 1. For example, outside air is introduced into the cleaning gas introduction port 1a as cleaning gas for cleaning the first sensor unit 1. The cleaning gas may be a gas other than the outside air such as nitrogen or purified air. The cleaning gas control valve 1b is provided to control the introduction of the cleaning gas from the cleaning gas introduction port 1a. A first pump 1c and a first exhaust port 1d are provided on the downstream side of the first sensor unit 1. The first pump 1c is a drive source for flowing the detected gas introduced from the detected gas introduction port 5 to the first sensor unit 1. The first exhaust port 1d is an opening for discharging the gas to be detected that has flowed through the first sensor unit 1 to the outside. The cleaning gas introduction port 1a is an example of the "first cleaning gas introduction port" within the scope of the claims.

The second sensor unit 2 is configured to detect flammable gases such as methane, ethane, and propane, which are gas components of the gas to be detected. The second sensor unit 2 has a semiconductor type sensor, and is configured to detect flammable gases such as methane, ethane, and propane by the semiconductor type sensor. The second sensor unit 2 has no selectivity and is configured to be capable of detecting a plurality of gas components such as methane, ethane, and propane.

A detected gas introduction port 5 and a gas component separation unit 2a are provided on the upstream side of the second sensor unit 2. The gas component separation unit 2a is configured to separate gas components such as methane, ethane, and propane among the detected gases for each gas component by causing a flow delay according to the molecular weight of the flammable gas. ing. The gas component separating unit 2a is, for example, a column filled with a separating material for separating flammable gas. The detected gas introduced from the detected gas introduction port 5 and flowing through the gas component separating unit 2a flows into the second sensor unit 2.

Further, on the upstream side of the second sensor unit 2, a carrier gas introduction port 2b, a second pump 2c, a gas purification unit 2d, and a flow rate control unit 2e are provided. A carrier gas for carrying the detected gas introduced from the detected gas introduction port 5 to the second sensor unit 2 is introduced into the carrier gas introduction port 2b. The carrier gas is, for example, the outside air. Further, in the present embodiment, the carrier gas functions as a cleaning gas for cleaning the second sensor unit 2. The second pump 2c is a drive source for flowing the detected gas introduced from the detected gas introduction port 5 to the second sensor unit 2 by the carrier gas introduced from the carrier gas introduction port 2b. The gas purification unit 2d is configured to purify the carrier gas introduced from the carrier gas introduction port 2b. The gas refining unit 2d is filled with activated carbon for refining a carrier gas, for example. The flow rate control unit 2e is configured to control the flow rate of the carrier gas. The flow rate control unit 2e is a mass flow controller that controls the flow rate of the carrier gas by, for example, measuring the mass flow rate of the carrier gas. Further, a second exhaust port 2f is provided on the downstream side of the second sensor unit 2. The second exhaust port 2f is an opening for discharging the gas to be detected that has flowed through the second sensor unit 2 to the outside. The carrier gas introduction port 2b is an example of the "second cleaning gas introduction port" within the scope of the claims.

Further, the second sensor unit 2 has higher responsiveness than the first sensor unit 1. That is, the second sensor unit 2 takes less time to detect the gas component than the first sensor unit 1. Further, the first sensor unit 1 has a lower responsiveness than the second sensor unit 2. That is, the first sensor unit 1 takes longer time to detect the gas component than the second sensor unit 2. In the present embodiment, the first sensor unit 1 has a structure for detecting CO2 gas among the detected gases in a state where the inside is replaced with the detected gas. Since the diffusion of the detected gas inside the first sensor unit 1 is rate-determining, the response of the first sensor unit 1 is lower than that of the second sensor unit 2, and the time required for detecting the gas component is longer than that of the second sensor unit 2.

The flow path switching unit 3 is provided to switch the gas flow path of the gas analyzer 100. For example, the flow path switching unit 3 receives the flow path of the detected gas with the first flow path F1 (see FIG. 2) in which the detected gas flows through the first sensor unit 1 without flowing through the second sensor unit 2. It is provided to switch to the second flow path F2 (see FIG. 3) in which the detection gas flows through the second sensor unit 2 without flowing through the first sensor unit 1. The flow path switching unit 3 has a plurality of (three) three-way valves 3a, and is configured to switch between the first flow path F1 and the second flow path F2 by the plurality of three-way valves 3a.

The control unit 4 is a control circuit that includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like, and controls the operation of the gas analyzer 100. For example, the control unit 4 is configured to control the flow path switching unit 3 so as to switch between the first flow path F1 and the second flow path F2.

Here, in the present embodiment, as shown in FIGS. 2 and 3, when the gas analyzer 100 detects the CO2 gas of the detected gas by the first sensor unit 1, the first sensor unit 1 is the first. When the detected gas flows in the amount of (for example, 58 ml) and the second sensor unit 2 detects flammable gas such as methane, ethane, and propane of the detected gas, the first amount in the second sensor unit 2. The detected gas is configured to flow in a smaller second amount (eg, 2 ml).

Specifically, when the control unit 4 detects the CO2 gas of the detected gas by the first sensor unit 1, the detected gas flows through the first sensor unit 1 in the first flow path F1 in a first amount. As described above, it is configured to control the flow path switching unit 3. Further, when the control unit 4 detects flammable gas such as methane, ethane and propane of the detected gas by the second sensor unit 2, the second sensor unit 2 receives a second amount in the second flow path F2. It is configured to control the flow path switching unit 3 so that the gas to be detected flows.

More specifically, when the gas analyzer 100 is in an analysis state for analyzing the gas to be detected, first, as shown in FIG. 2, the control unit 4 first causes the gas to be detected to flow in the first flow path F1. , It is configured to control the flow path switching unit 3. Then, the detected gas is introduced from the detected gas introduction port 5 in a state where the gas flow path of the detected gas is switched to the first flow path F1. Here, in the present embodiment, a gas storage unit 6 capable of storing a second amount of the detected gas is provided between the detected gas introduction port 5 and the first sensor unit 1 (second sensor unit 2). It is provided. Therefore, in the first flow path F1, the detected gas flows to the first sensor unit 1 via the gas storage unit 6. Further, the detected gas is introduced into the detected gas introduction port 5 in a total amount (for example, 60 ml) of the first amount and the second amount. While the gas to be detected is flowing through the first sensor unit 1, the carrier gas is flowing through the second sensor unit 2.

Then, as shown in FIG. 3, when the detected gas flows through the first sensor unit 1 in the first amount by the first flow path F1, the flow path of the detected gas becomes the second flow path F2. It is configured to control the flow path switching unit 3 so as to switch to. As a result, of the detected gas introduced from the detected gas introduction port 5, the first amount of the detected gas flows to the first sensor unit 1, and the second amount of the detected gas flows into the gas storage unit. It is stored in 6. The control unit 4 is configured to control the gas flow in the second flow path F2 so that the carrier gas flows to the gas storage unit 6, the gas component separation unit 2a, and the second sensor unit 2. .. As a result, in the second flow path F2, the detected gas stored in the gas storage unit 6 in the second sensor unit 2 flows in the second amount by being carried to the carrier gas.

Further, in the present embodiment, the gas analyzer 100 is configured to perform the cleaning operation of the first sensor unit 1 by the cleaning gas and the detection operation of the detected gas by the second sensor unit 2 in parallel. .. That is, when the second sensor unit 2 detects flammable gas such as methane, ethane, and propane as the detected gas, the control unit 4 switches the flow path so that the detected gas flows through the second sensor unit 2. In addition to controlling the unit 3, the cleaning gas control valve 1b is controlled so that the cleaning gas flows through the first sensor unit 1. When the cleaning operation of the first sensor unit 1 by the cleaning gas is completed, the cleaning operation of the first sensor unit 1 by the cleaning gas is performed even during the detection operation of the detected gas by the second sensor unit 2. It will be stopped.

As shown in FIG. 4, when the gas analyzer 100 is in a standby state in which the detected gas is not analyzed, the gas analyzer 100 has a carrier gas flowing through the second sensor unit 2 and a cleaning gas or the like in the first sensor unit 1. It is configured so that gas such as detected gas does not flow. Specifically, the control unit 4 has a flow path switching unit 3 so that the carrier gas flows through the gas storage unit 6, the gas component separation unit 2a, and the second sensor unit 2 and the gas does not flow through the first sensor unit 1. And is configured to control the cleaning gas control valve 1b. As a result, in the standby state, the gas storage unit 6, the gas component separation unit 2a, and the second sensor unit 2 are cleaned.

(Effect of this embodiment)
In this embodiment, the following effects can be obtained.

In the present embodiment, as described above, when the gas analyzer 100 detects the gas component of the gas to be detected by the first sensor unit 1, the gas to be detected flows through the first sensor unit 1 in a first amount. When the gas component of the detected gas is detected by the second sensor unit 2, the detected gas is configured to flow through the second sensor unit 2 in a second amount smaller than the first amount. As a result, an appropriate amount of gas to be detected can flow through each of the first sensor unit 1 having low responsiveness and the second sensor unit 2 having high responsiveness, so that a large amount of gas to be detected is sent to the second sensor unit 2. It can suppress the flow. As a result, both the first sensor unit 1 and the second sensor unit 2 can reliably detect the gas component of the gas to be detected.

Further, in the present embodiment, as described above, in the gas analyzer 100, the flow path of the gas to be detected is the first flow path F1 in which the gas to be detected flows through the first sensor unit 1, and the gas to be detected is the second. A flow path switching unit 3 for switching to the second flow path F2 flowing through the sensor unit 2 is provided. As a result, the flow path of the gas to be detected can be partially shared, so that the flow path of the gas to be detected is provided separately in the first sensor unit 1 and the second sensor unit 2 independently of each other. The device configuration can be simplified as compared with the case.

Further, in the present embodiment, as described above, the gas analyzer 100 includes a gas storage unit 6 capable of storing the detected gas in a second amount. Then, in the first flow path F1, the detected gas flows to the first sensor unit 1 via the gas storage unit 6. Further, in the second flow path F2, the detected gas stored in the gas storage unit 6 flows through the second sensor unit 2. As a result, the detected gas can be flowed to both the sensor units of the first sensor unit 1 and the second sensor unit 2 by only performing the operation of introducing the detected gas into the device once. As a result, it is not necessary to introduce the gas to be detected every time the flow path is switched (for each sensor unit), and the gas analysis operation can be simplified.

Further, in the present embodiment, as described above, the gas analyzer 100 performs the cleaning operation of the first sensor unit 1 by the cleaning gas and the detection operation of the detected gas by the second sensor unit 2 in parallel. Configure to. As a result, cleaning of the first sensor unit 1 with the cleaning gas can be started during the detection operation of the detected gas by the second sensor unit 2. As a result, it is possible to prevent the next gas analysis operation from being performed due to the incomplete cleaning of the first sensor unit 1.

Further, in the present embodiment, as described above, the gas analyzer 100 has a cleaning gas introduction port 1a for cleaning the first sensor unit 1 and a carrier gas introduction port 2b for cleaning the second sensor unit 2. And. As a result, the cleaning gas introduction port 1a for cleaning the first sensor unit 1 and the carrier gas introduction port 2b for cleaning the second sensor unit 2 are separately provided, so that the second sensor unit 2 is provided. The cleaning of the first sensor unit 1 with the cleaning gas can be easily started during the detection operation of the gas to be detected.

Further, in the present embodiment, as described above, the first sensor unit 1 is a sensor unit having selectivity. The second sensor unit 2 is a sensor unit that does not have selectivity. As a result, an appropriate amount of the detected gas can be flowed to each of the first sensor unit 1 having low responsiveness and selectivity and the second sensor unit 2 having high responsiveness and non-selectivity.

[Modification example]
It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. The scope of the present invention is shown by the scope of claims rather than the description of the above-described embodiment, and further includes all modifications (modifications) within the meaning and scope equivalent to the scope of claims.

For example, in the above embodiment, an example in which the present invention is applied to a gas analyzer for city gas analysis is shown, but the present invention is not limited to this. The present invention is a gas analyzer other than the gas analyzer for city gas analysis, as long as it is a gas analyzer including two sensor units, a first sensor unit having low responsiveness and a second sensor unit having high responsiveness. May be applied to. In this case, the first sensor unit may detect a gas component other than the CO2 gas of the gas to be detected, and the second sensor unit detects a gas component other than the flammable gas such as methane, ethane and propane. May be good. For example, the first sensor unit may detect a gas component such as carbon monoxide or hydrogen sulfide by a constant potential electric field type sensor. For example, the second sensor unit may detect a gas component such as hydrogen by a contact combustion type sensor. Further, the first sensor unit does not necessarily have selectivity, and the second sensor unit may have selectivity.

Further, in the above embodiment, the gas analyzer is configured so that the first sensor unit and the second sensor unit have a partially common flow path for the gas to be detected, and the flow path for the gas to be detected. Has been shown as an example in which the first flow path and the second flow path can be switched, but the present invention is not limited to this. For example, the gas analyzer may be provided with separate flow paths for the gas to be detected, which are independent of each other in the first sensor unit and the second sensor unit.

Further, in the above embodiment, an example in which a gas storage unit is provided in the gas analyzer is shown, but the present invention is not limited to this. In the present invention, the gas analyzer does not have to be provided with a gas storage unit. In this case, for example, during the detection operation by the first sensor unit, the detected gas is introduced in the first amount from the detected gas introduction port, and during the detection operation by the second sensor unit, the second from the detected gas introduction port. The detected gas may be introduced in an amount.

Further, in the above embodiment, an example in which the cleaning operation of the first sensor unit by the cleaning gas and the detection operation of the detected gas by the second sensor unit are performed in parallel is shown, but the present invention is not limited to this. .. In the present invention, it is not always necessary to perform the cleaning operation of the first sensor unit by the cleaning gas and the detection operation of the detected gas by the second sensor unit in parallel, and the cleaning operation of the first sensor unit by the cleaning gas and the cleaning operation of the first sensor unit are performed. The operation of detecting the gas to be detected by the second sensor unit may be performed independently of each other.

Further, in the above embodiment, the cleaning gas introduction port for cleaning the first sensor unit and the cleaning gas introduction port (carrier gas introduction port) for cleaning the second sensor unit are provided separately and independently of each other. Although an example is shown, the present invention is not limited to this. In the present invention, the cleaning gas introduction port for cleaning the first sensor unit and the cleaning gas introduction port (carrier gas introduction port) for cleaning the second sensor unit may be the same. For example, the carrier gas inlet of the above embodiment may be a cleaning gas inlet for cleaning the first sensor unit and the second sensor unit.

Further, in the above embodiment, an example in which the first pump for the first sensor unit is provided on the downstream side of the first sensor unit and the second pump for the second sensor unit is provided on the upstream side of the second sensor unit. As shown, the present invention is not limited to this. In the present invention, the position of the pump with respect to the sensor unit may be upstream or downstream with respect to the sensor unit. For example, a first pump for the first sensor unit may be provided on the upstream side of the first sensor unit, and a second pump for the second sensor unit may be provided on the downstream side of the second sensor unit.

Further, in the above embodiment, an example in which the first sensor unit and the second sensor unit are provided one by one is shown, but the present invention is not limited to this. In the present invention, one first sensor unit having low responsiveness and a plurality of second sensor units having high responsiveness may be provided, and a plurality of first sensor units having low responsiveness and a second sensor having high responsiveness may be provided. One unit may be provided, and a plurality of first sensor units having low responsiveness and a plurality of second sensor units having high responsiveness may be provided. In this case, a gas storage unit capable of storing the amount of the detected gas required for detection of each sensor unit is provided, and a flow path for supplying the detected gas from the gas storage unit to each sensor unit is configured. Just do it.

1 1st sensor unit 1a Cleaning gas inlet (1st cleaning gas inlet)
2 2nd sensor unit 2b Carrier gas inlet (2nd cleaning gas inlet)
3 Flow path switching unit 6 Gas storage unit 100 Gas analyzer

Claims (5)

The first sensor unit that detects the gas component of the gas to be detected, and
It is provided with a second sensor unit that has higher responsiveness than the first sensor unit and detects a gas component of the gas to be detected.
When the gas component of the detected gas is detected by the first sensor unit, the detected gas having the total amount of the first detected gas flows through the first sensor unit, and the second sensor unit determines the gas component. When detecting the gas component of the detected gas, the detected gas having a total amount of the second detected gas smaller than the first detected gas amount flows through the second sensor unit. and,
A flow path for switching the flow path of the detected gas between a first flow path through which the detected gas flows through the first sensor section and a second flow path through which the detected gas flows through the second sensor section. With a switching part,
A gas storage unit capable of storing the detected gas with the second amount of the detected gas is further provided, and in the first flow path, the detected gas is supplied to the first sensor unit via the gas storage unit. Flow, in the second flow path, the detected gas stored in the gas storage unit flows through the second sensor unit, or when the detection operation by the first sensor unit is performed, the detected gas introduction port is used. The gas to be detected is introduced with the amount of the gas to be detected through the first flow path, and during the detection operation by the second sensor unit, the gas to be detected is introduced from the gas introduction port to the second flow path. wherein the second detection target gas amount that is organized as gas to be detected is introduced, the gas analyzer. A cleaning operation of the first sensor unit by the cleaning gas, the by the second sensor unit is configured to perform in parallel with the detection operation of the gas to be detected, the gas analyzer according to claim 1. A first cleaning gas inlet for cleaning the first sensor unit and
The gas analyzer according to claim 2 , further comprising a second cleaning gas introduction port for cleaning the second sensor unit. The first sensor unit is a sensor unit having selectivity.
The gas analyzer according to any one of claims 1 to 3 , wherein the second sensor unit is a sensor unit having no selectivity. When the detected gas is detected by the first sensor unit, the step of flowing the detected gas having the total amount of the first detected gas as the total amount to the first sensor unit, and the step of flowing the detected gas to the first sensor unit.
When the detected gas is detected by the second sensor unit having a higher responsiveness than the first sensor unit, the amount of the second detected gas in the second sensor unit is smaller than the amount of the first detected gas. And the process of flowing the detected gas with the total amount of
By the flow path switching unit, the flow path of the detected gas is divided into a first flow path through which the detected gas flows through the first sensor section and a second flow path through which the detected gas flows through the second sensor section. comprising switching a step, to,
The step of flowing the detected gas to the first sensor unit includes a step of flowing the detected gas to the first sensor unit through the gas storage unit in the first flow path, and the second sensor. The step of flowing the detected gas through the unit includes a step of flowing the detected gas stored in the gas storage unit in the second sensor unit in the second flow path, or the first sensor unit. In the step of flowing the gas to be detected, the gas to be detected is introduced from the gas introduction port of the first sensor unit through the first flow path with the amount of the first gas to be detected during the detection operation by the first sensor unit. In the step of flowing the detected gas through the second sensor unit, which includes a step, the second detected gas is detected from the detected gas introduction port via the second flow path during the detection operation by the second sensor unit. A gas analysis method including a step of introducing the gas to be detected by the amount of gas.

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