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JP6906902B2 - How to clean the glass plate - Google Patents
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JP6906902B2 - How to clean the glass plate - Google Patents

How to clean the glass plate Download PDF

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JP6906902B2
JP6906902B2 JP2016104636A JP2016104636A JP6906902B2 JP 6906902 B2 JP6906902 B2 JP 6906902B2 JP 2016104636 A JP2016104636 A JP 2016104636A JP 2016104636 A JP2016104636 A JP 2016104636A JP 6906902 B2 JP6906902 B2 JP 6906902B2
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cleaning
cleaned
glass plate
cleaning member
suction
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JP2017209628A (en
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仁之 早川
仁之 早川
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早川 篤志
早川 篤志
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Description

本発明は、サファイアガラス等のガラス板の洗浄方法に関するものである。 The present invention relates to a method for cleaning a glass plate such as sapphire glass.

一般に、ガラス基板等のガラス板は、ガラス板の被洗浄面と直交する軸線を中心に回転されるブラシを用いて洗浄される。ところが、この洗浄方法においては、ブラシの回転中心部と外周部との間の速度差が大きいために、均一な洗浄作用を得ることができない。 Generally, a glass plate such as a glass substrate is cleaned by using a brush that is rotated about an axis orthogonal to the surface to be cleaned of the glass plate. However, in this cleaning method, a uniform cleaning action cannot be obtained because the speed difference between the rotation center portion and the outer peripheral portion of the brush is large.

それ以外に、特許文献1〜3に開示された洗浄方法が公知になっている。
特許文献1に開示された洗浄方法は、ガラス板の被洗浄面と平行な軸線を中心に回転されるブラシを用いるものである。
Other than that, the cleaning methods disclosed in Patent Documents 1 to 3 are known.
The cleaning method disclosed in Patent Document 1 uses a brush that is rotated about an axis parallel to the surface to be cleaned of the glass plate.

特許文献2に開示された洗浄方法は、ガラス板の被洗浄面に対し平行方向に400〜600Hz(ヘルツ)で往復振動する洗浄用ブラシ毛を前記被洗浄面に接触させるものである。 The cleaning method disclosed in Patent Document 2 is to bring a cleaning brush bristles reciprocating at 400 to 600 Hz (hertz) in a direction parallel to the surface to be cleaned of a glass plate into contact with the surface to be cleaned.

特許文献3に開示された洗浄方法は、ガラス板の被洗浄面に対して少なくとも40〜60KPa(キロパスカル)の圧力で洗浄用ロールブラシのブラシ毛が接触されるものである。 In the cleaning method disclosed in Patent Document 3, the brush bristles of the cleaning roll brush are brought into contact with the surface to be cleaned of the glass plate at a pressure of at least 40 to 60 KPa (kilopascal).

特開平5−228449号公報Japanese Unexamined Patent Publication No. 5-228449 特開2011−158656号公報Japanese Unexamined Patent Publication No. 2011-158656 特開2011−147879号公報Japanese Unexamined Patent Publication No. 2011-147879

特許文献1に開示された洗浄方法においては、ブラシがガラス板の被洗浄面と平行な軸線を中心に回転されるものであるため、ブラシ毛が被洗浄面に一方向側から接触することになる。このため、被洗浄面の凹凸が微細であっても、その凹凸においてブラシ毛の回転方向後方側には、ほとんど接触されない面,いわば洗い残し面が存在することになり、高洗浄度を達成できないものであった。 In the cleaning method disclosed in Patent Document 1, since the brush is rotated about an axis parallel to the surface to be cleaned of the glass plate, the brush bristles come into contact with the surface to be cleaned from one direction. Become. For this reason, even if the unevenness of the surface to be cleaned is fine, there is a surface that is hardly touched, so to speak, an unwashed surface on the rear side of the brush bristles in the rotation direction, and a high degree of cleaning cannot be achieved. It was a thing.

特許文献2に開示された洗浄方法においては、洗浄用ブラシ毛が被洗浄面に対する接触状態でその被洗浄面に対して平行方向に400〜600Hzで往復振動するものであるため、被洗浄面上において洗浄用ブラシ毛の移動方向が小刻みに反転される。従って、移動方向反転部が無数に形成されて、被洗浄面上には洗浄ムラが形成されるだけではなく、移動方向反転部において被洗浄面の性状が傷つき等によって変化し、均一な性状の被洗浄面を得ることができないおそれがあった。 In the cleaning method disclosed in Patent Document 2, since the cleaning brush bristles reciprocate at 400 to 600 Hz in the direction parallel to the surface to be cleaned in a state of contact with the surface to be cleaned, the brush bristles to be cleaned reciprocate on the surface to be cleaned. In, the moving direction of the cleaning brush bristles is reversed in small steps. Therefore, innumerable moving direction reversing portions are formed, and not only cleaning unevenness is formed on the surface to be cleaned, but also the properties of the surface to be cleaned change due to scratches or the like in the moving direction reversing portion, and the properties are uniform. There was a risk that the surface to be cleaned could not be obtained.

また、洗浄用ブラシ毛が高い振動数で往復するため、その振動によってガラス板が割れるおそれがあるばかりでなく、ガラス板の被洗浄面が多数回擦過されて、前記と同様に、性状が変化したり、コーティングが剥離したりする場合もある。 In addition, since the brush bristles for cleaning reciprocate at a high frequency, not only the glass plate may be cracked due to the vibration, but also the surface to be cleaned of the glass plate is rubbed many times, and the properties change as described above. Or the coating may peel off.

特許文献3に開示された洗浄方法においては、ロールブラシを100〜300rpmで回転させるとともに、ガラス板をブラシ毛の移動方向と同じ方向に移動させて洗浄を行うことが開示されている。従って、この特許文献3の洗浄方法は、前記特許文献1と同様に高洗浄度を達成することが困難である。 In the cleaning method disclosed in Patent Document 3, it is disclosed that the roll brush is rotated at 100 to 300 rpm and the glass plate is moved in the same direction as the brush bristles to perform cleaning. Therefore, it is difficult for the cleaning method of Patent Document 3 to achieve a high degree of cleaning as in Patent Document 1.

本発明の目的は、ガラス板を有効に洗浄できる洗浄方法を提供することにある。 An object of the present invention is to provide a cleaning method capable of effectively cleaning a glass plate.

上記の目的を達成するために、本発明においては、洗浄液を供給しながらガラス板の被洗浄面を洗浄するための洗浄方法において、前記被洗浄面より低硬度の繊維を集合させた洗浄部材を前記被洗浄面上において直線的に移動させるとともに、洗浄面を外れた位置において移動方向を反転させて往復させることにより、前記洗浄部材によって被洗浄面を洗浄することを特徴とするものである。ここで、直線的に移動させるということは、洗浄部材が回転されたり、特許文献2のように振動されたりすることなく、洗浄部材を一方向及びその逆方向に直線移動させることを指す。 In order to achieve the above object, in the present invention, in a cleaning method for cleaning the surface to be cleaned of a glass plate while supplying a cleaning liquid, a cleaning member in which fibers having a hardness lower than that of the surface to be cleaned is assembled. It is characterized in that the surface to be cleaned is cleaned by the cleaning member by linearly moving on the surface to be cleaned and reciprocating by reversing the moving direction at a position off the surface to be cleaned. Here, the linear movement means that the cleaning member is linearly moved in one direction and the opposite direction without being rotated or vibrated as in Patent Document 2.

以上の洗浄方法によれば、ガラス板の被洗浄面は直線的に移動される洗浄部材によって一方向に洗浄されて、清浄化される。このため、被洗浄面と平行な面内において回転される洗浄部材とは異なり、被洗浄面の凹凸が微細であっても、洗浄されない部分が生じることはなく、従って、被洗浄面全体が洗浄される。また、洗浄部材が被洗浄面上で反転されたり、短時間に短い振幅で多数回振動されたりする場合とは異なり、被洗浄面の性状が変化したり、ガラス板が割れたりすることを回避できる。そして、洗浄部材を構成する繊維が適度に折れて、洗浄によって被洗浄面から除去された異物とともに、洗い流される。 According to the above cleaning method, the surface to be cleaned of the glass plate is cleaned in one direction by a cleaning member that moves linearly. Therefore, unlike the cleaning member that is rotated in a plane parallel to the surface to be cleaned, even if the unevenness of the surface to be cleaned is fine, there is no portion that is not cleaned. Therefore, the entire surface to be cleaned is cleaned. Will be done. Also, unlike the case where the cleaning member is inverted on the surface to be cleaned or vibrated many times with a short amplitude in a short time, the properties of the surface to be cleaned are prevented from changing and the glass plate is prevented from breaking. can. Then, the fibers constituting the cleaning member are appropriately broken and washed away together with the foreign matter removed from the surface to be cleaned by cleaning.

本発明によれば、ガラス板の被洗浄面を適切に洗浄できるという効果を発揮する。 According to the present invention, the effect that the surface to be cleaned of the glass plate can be appropriately cleaned is exhibited.

実施形態の洗浄方法が実施される洗浄装置の斜視図。The perspective view of the cleaning apparatus in which the cleaning method of an embodiment is carried out. 図1の洗浄装置の平面図。The plan view of the cleaning apparatus of FIG. 洗浄液の循環経路を示す簡略図。The simplified figure which shows the circulation path of a cleaning liquid. 吸引エア発生に関する構成を示す簡略図。The simplified figure which shows the structure about the suction air generation. 洗浄部材とガラス板との関係を示す断面図。The cross-sectional view which shows the relationship between a cleaning member and a glass plate. 洗浄部材とガラス板との関係を図5とは異なる位置で切断して示す断面図。FIG. 5 is a cross-sectional view showing the relationship between the cleaning member and the glass plate cut at a position different from that in FIG. 実施形態の洗浄部材の斜視図。The perspective view of the cleaning member of an embodiment. 変更例の洗浄部材の斜視図。The perspective view of the cleaning member of the modified example. テストピースの分光透過率を示すグラフ。The graph which shows the spectral transmittance of a test piece. テストピースの表面応力値を示す表。A table showing the surface stress values of the test piece.

以下、本発明を具体化した洗浄方法の実施形態を説明する。
はじめに、洗浄方法を実施するための洗浄装置の構成を説明する。
図1〜図4に示すように、装置フレーム11の下部には洗浄液タンク12が、上部には洗浄槽13が設置されている。そして、洗浄液タンク12内の洗浄液L,例えばアルコール系洗浄剤よりなる洗浄液Lが洗浄槽13内に供給されて、ガラス板Gの表面の被洗浄面Fの洗浄に供された後に洗浄液タンク12内に回収される。従って、洗浄液Lが洗浄液タンク12と洗浄槽13との間において循環される。
Hereinafter, embodiments of a cleaning method embodying the present invention will be described.
First, the configuration of the cleaning device for carrying out the cleaning method will be described.
As shown in FIGS. 1 to 4, a cleaning liquid tank 12 is installed in the lower part of the apparatus frame 11, and a cleaning tank 13 is installed in the upper part. Then, the cleaning liquid L in the cleaning liquid tank 12, for example, the cleaning liquid L made of an alcohol-based cleaning agent is supplied into the cleaning tank 13 and used for cleaning the surface F to be cleaned on the surface of the glass plate G, and then in the cleaning liquid tank 12. Will be collected. Therefore, the cleaning liquid L is circulated between the cleaning liquid tank 12 and the cleaning tank 13.

洗浄液タンク12内は、隔壁14により第1室15と第2室16とに区画され、第1室15内の洗浄液Lが隔壁14をオーバーフローして第2室16内に流れ落ちる。
洗浄槽13内には洗浄枠17が設置され、この洗浄枠17内には多孔質材よりなる吸着盤18が設けられている。吸着盤18の中央部には複数の吸着孔182が形成されている。この吸着盤18の上面にガラス板Gが載置されて、吸着孔182に作用する負圧によって吸着盤18の上面に吸着される。吸着孔182はガラス板Gの載置エリア内に配置されている。
The inside of the cleaning liquid tank 12 is divided into a first chamber 15 and a second chamber 16 by a partition wall 14, and the cleaning liquid L in the first chamber 15 overflows the partition wall 14 and flows down into the second chamber 16.
A cleaning frame 17 is installed in the cleaning tank 13, and an adsorption plate 18 made of a porous material is provided in the cleaning frame 17. A plurality of suction holes 182 are formed in the central portion of the suction plate 18. A glass plate G is placed on the upper surface of the suction plate 18, and is attracted to the upper surface of the suction plate 18 by the negative pressure acting on the suction holes 182. The suction hole 182 is arranged in the mounting area of the glass plate G.

前記第2室16と洗浄枠17の上部との間には、ポンプ19とフィルタ20とを介在させた供給路21が連結されている。また、洗浄槽13の下部と第1室15との間には回収路22が連結されている。そして、洗浄液タンク12の第2室16内の洗浄液Lがポンプ19により洗浄枠17内に供給されて、ガラス板Gの洗浄に供される。洗浄枠17内の洗浄液Lは洗浄枠17の上縁から洗浄槽13内にオーバーフローされて、その洗浄槽13から回収路22を経て洗浄液タンク12の第1室15内に落下回収される。さらに、洗浄液Lは、隔壁14をオーバーフローされて第2室16に流れ落ちる。このようにして、前記のように、洗浄液Lが洗浄液タンク12と洗浄枠17内との間において循環される。 A supply path 21 in which a pump 19 and a filter 20 are interposed is connected between the second chamber 16 and the upper part of the cleaning frame 17. Further, a collection path 22 is connected between the lower part of the washing tank 13 and the first chamber 15. Then, the cleaning liquid L in the second chamber 16 of the cleaning liquid tank 12 is supplied into the cleaning frame 17 by the pump 19 and is used for cleaning the glass plate G. The cleaning liquid L in the cleaning frame 17 overflows from the upper edge of the cleaning frame 17 into the cleaning tank 13, and is dropped and collected from the cleaning tank 13 into the first chamber 15 of the cleaning liquid tank 12 via the collection path 22. Further, the cleaning liquid L overflows the partition wall 14 and flows down to the second chamber 16. In this way, as described above, the cleaning liquid L is circulated between the cleaning liquid tank 12 and the cleaning frame 17.

前記吸着盤18の下部室183には上流側吸気管23の漏斗状体231が接続されている。上流側吸気管23にはトラップ24の上部が接続され、このトラップ24の上部には、下流側吸気管25が接続されている。下流側吸気管25は、ブロワ26を有する通気管27に接続されている。そして、ブロワ26の駆動によって通気管27内にエア流が生じ、そのエア流に基づくエジェクタ効果により、吸着盤18の吸着孔182から上流側吸気管23,トラップ24,下流側吸気管25及び通気管27に到る吸引エア流が生じる。この吸引エア流による吸着作用を利用して、吸着盤18の上面にガラス板Gが吸着保持される。このとき、吸引エア流に含まれる洗浄液Lがトラップ24内において分離される。 The funnel-shaped body 231 of the upstream intake pipe 23 is connected to the lower chamber 183 of the suction plate 18. The upper part of the trap 24 is connected to the upstream side intake pipe 23, and the downstream side intake pipe 25 is connected to the upper part of the trap 24. The downstream intake pipe 25 is connected to a ventilation pipe 27 having a blower 26. Then, an air flow is generated in the ventilation pipe 27 by driving the blower 26, and due to the ejector effect based on the air flow, the upstream side intake pipe 23, the trap 24, the downstream side intake pipe 25 and the passage from the suction hole 182 of the suction plate 18 A suction air flow that reaches the trachea 27 is generated. The glass plate G is suction-held on the upper surface of the suction plate 18 by utilizing the suction action of the suction air flow. At this time, the cleaning liquid L contained in the suction air flow is separated in the trap 24.

トラップ24の下部にはドレン管28が接続され、このドレン管28の内部には、フロート弁29が設けられている。ドレン管28は、前記洗浄液タンク12の第1室15の上部位置に接続されている。そして、トラップ24内において分離された洗浄液Lは、自重によってドレン管28を介して第1室15内に落下される。このとき、トラップ24内が負圧である場合には、フロート弁29が閉じて水の逆流が阻止される。 A drain pipe 28 is connected to the lower part of the trap 24, and a float valve 29 is provided inside the drain pipe 28. The drain pipe 28 is connected to the upper position of the first chamber 15 of the cleaning liquid tank 12. Then, the cleaning liquid L separated in the trap 24 is dropped into the first chamber 15 via the drain pipe 28 by its own weight. At this time, if the pressure inside the trap 24 is negative, the float valve 29 closes to prevent the backflow of water.

前記装置フレーム11の上面において前記洗浄槽13と隣接する位置には、図示しない駆動機構によって往復動される作動アーム31が設けられ、その作動アーム31の先端には支持部材32が固定されている。支持部材32の下面には凹状の支持部33が形成され、この支持部33には洗浄部材34がその下半部を突出させた状態で保持される。図7に示すように、この洗浄部材34は、軟鉄よりなる繊維を不織布状をなすように不規則に絡み合わせて、全体として円柱状にしたものであって、その太さは、直径0.02〜0.5mm(ミリメートル)程度であり、0.05〜0,1mm程度が好ましい。る。そして、駆動機構による駆動に基づいて、作動アーム31がその長さ方向に沿って往復動されて、洗浄部材34がその長さ方向と直交する方向に往復動される。なお、駆動機構は、モータによって回転されるクランク機構や、エアシリンダ等が採用される。 An actuating arm 31 reciprocated by a drive mechanism (not shown) is provided on the upper surface of the device frame 11 adjacent to the washing tank 13, and a support member 32 is fixed to the tip of the actuating arm 31. .. A concave support portion 33 is formed on the lower surface of the support member 32, and the cleaning member 34 is held in the support portion 33 in a state in which the lower half portion thereof is projected. As shown in FIG. 7, the cleaning member 34 is formed by irregularly entwining fibers made of soft iron so as to form a non-woven fabric to form a columnar shape as a whole, and the thickness thereof is 0. It is about 02 to 0.5 mm (millimeter), preferably about 0.05 to 0.1 mm. NS. Then, based on the drive by the drive mechanism, the operating arm 31 is reciprocated along its length direction, and the cleaning member 34 is reciprocated in a direction orthogonal to its length direction. As the drive mechanism, a crank mechanism rotated by a motor, an air cylinder, or the like is adopted.

次に、ガラス板Gの表面の被洗浄面Fを洗浄部材34を用いて洗浄する洗浄方法について説明する。
通常、ガラス板Gは、モース硬度で4.5〜6.5であり、軟鉄は、同じくモース硬度で4〜5である。そして、本実施形態においては、ガラス板Gがモース硬度で5であり、洗浄部材34を構成する軟鉄の繊維がモース硬度で4である。洗浄部材34の繊維は、ガラス板Gより低硬度である必要があり、モース硬度において、ガラス板Gの硬度に対して10〜30パーセント低硬度であることがよく、10〜20パーセント低硬度であることがさらによい。また、図6に示すように、洗浄部材34の軸線方向の長さは、被洗浄面Fの幅Dより長く形成されている。
Next, a cleaning method for cleaning the surface to be cleaned F on the surface of the glass plate G using the cleaning member 34 will be described.
Usually, the glass plate G has a Mohs hardness of 4.5 to 6.5, and the soft iron has a Mohs hardness of 4 to 5. In the present embodiment, the glass plate G has a Mohs hardness of 5, and the soft iron fibers constituting the cleaning member 34 have a Mohs hardness of 4. The fibers of the cleaning member 34 need to have a lower hardness than the glass plate G, and the Mohs hardness is often 10 to 30% lower than the hardness of the glass plate G, and 10 to 20% lower in hardness. It's even better to have. Further, as shown in FIG. 6, the length of the cleaning member 34 in the axial direction is formed to be longer than the width D of the surface F to be cleaned.

ガラス板Gは、吸着盤18の上面に吸着保持される。このとき、ガラス板Gの大きさが吸着盤18の外枠181の内法より小さい場合には、そのガラス板Gが外枠181の内法形状と同じ外形状の保持枠35内に保持される。ガラス板Gの大きさが吸着盤18の外枠181の内法と同じ形状である場合には、ガラス板Gは外枠181を用いることなく単独で吸着盤18の上面に吸着保持される。以下の洗浄方法においては、外枠181を用いるものとする。 The glass plate G is suction-held on the upper surface of the suction plate 18. At this time, if the size of the glass plate G is smaller than the inner method of the outer frame 181 of the suction plate 18, the glass plate G is held in the holding frame 35 having the same outer shape as the inner method of the outer frame 181. NS. When the size of the glass plate G is the same as that of the inner method of the outer frame 181 of the suction plate 18, the glass plate G is independently attracted and held on the upper surface of the suction plate 18 without using the outer frame 181. In the following cleaning method, the outer frame 181 shall be used.

従って、外枠181内に保持されたガラス板Gは、その外枠181とともに吸着盤18の外枠181内に吸着保持される。
この状態で、駆動機構によって作動アームを往復動させることにより、洗浄部材34をガラス板Gの被洗浄面F上においてその被洗浄面Fと平行な面内で、かつ洗浄部材34の軸線341と直交する方向に往復動させる。そして、この場合、洗浄部材34の往復動ストロークSは、被洗浄面Fの長さ(図5の左右方向寸法)を越えるものとする。従って、洗浄部材34は、被洗浄面F上において反転されることなく、被洗浄面F外において反転される。このため、被洗浄面Fは洗浄部材34によって一方向及びその逆方向に洗浄される。また、被洗浄面Fに対する洗浄部材34の圧力は、高くする必要はなく、例えば、被洗浄面Fに対する圧力が30〜150N(ニュートン)程度でよく、40〜70N程度がさらによい。また、往復動の速度は、秒速10〜20cm(センチメートル)程度でよく、13〜16cm程度がさらによい。
Therefore, the glass plate G held in the outer frame 181 is sucked and held in the outer frame 181 of the suction plate 18 together with the outer frame 181.
In this state, by reciprocating the operating arm by the drive mechanism, the cleaning member 34 is placed on the surface F of the glass plate G to be cleaned, in a plane parallel to the surface F to be cleaned, and with the axis 341 of the cleaning member 34. Reciprocate in the orthogonal direction. Then, in this case, the reciprocating stroke S of the cleaning member 34 is assumed to exceed the length of the surface F to be cleaned (the dimension in the left-right direction in FIG. 5). Therefore, the cleaning member 34 is not inverted on the surface F to be cleaned, but is inverted outside the surface F to be cleaned. Therefore, the surface F to be cleaned is cleaned by the cleaning member 34 in one direction and vice versa. Further, the pressure of the cleaning member 34 with respect to the surface to be cleaned F does not need to be increased. For example, the pressure with respect to the surface to be cleaned F may be about 30 to 150 N (Newton), more preferably about 40 to 70 N. The reciprocating speed may be about 10 to 20 cm (centimeter) per second, and more preferably about 13 to 16 cm.

このような条件で洗浄液L中において洗浄部材34を往復動させれば、ガラス板Gの被洗浄面Fが洗浄部材34によって洗浄されて清浄化される。この場合、洗浄部材34の洗浄動作が直線的な往復動の動作であるため、被洗浄面Fの微細な凹凸は、被洗浄面Fと平行な面内において回転される洗浄部材とは異なり、洗浄されない部分が生じることなく、全体が均一に洗浄される。 If the cleaning member 34 is reciprocated in the cleaning liquid L under such conditions, the surface F to be cleaned of the glass plate G is cleaned and cleaned by the cleaning member 34. In this case, since the cleaning operation of the cleaning member 34 is a linear reciprocating operation, the fine irregularities of the surface to be cleaned F are different from the cleaning member rotated in a plane parallel to the surface to be cleaned F. The whole is uniformly washed without any unwashed parts.

そして、洗浄部材34を構成する鉄繊維が適度に折れて、洗浄によって被洗浄面Fから除去された異物とともに、洗い流される。また、洗浄部材34の反転位置が被洗浄面F外であるため、ガラス板Gに不要な振動が生じることはなく、ガラス板Gが割れたり、被洗浄面Fに洗浄されない部分が残ったりおそれはない。さらに、被洗浄面Fに対する洗浄部材34の接触圧力が低く、かつ、洗浄部材34の移動速度が速すぎないため、被洗浄面Fの性状が変化するおそれもない。以上のように、被洗浄面Fが変質したり、ガラス板Gが割れたりすることなく、被洗浄面Fを効果的に洗浄できる。 Then, the iron fibers constituting the cleaning member 34 are appropriately broken and washed away together with the foreign matter removed from the surface F to be cleaned by cleaning. Further, since the inverted position of the cleaning member 34 is outside the surface to be cleaned F, unnecessary vibration does not occur in the glass plate G, the glass plate G may be cracked, or an uncleaned portion may remain on the surface to be cleaned F. It's not. Further, since the contact pressure of the cleaning member 34 with respect to the surface to be cleaned F is low and the moving speed of the cleaning member 34 is not too fast, there is no possibility that the properties of the surface to be cleaned F will change. As described above, the surface F to be cleaned can be effectively cleaned without deteriorating the surface F to be cleaned or breaking the glass plate G.

従って、本実施形態においては、以下の効果がある。
(1)洗浄部材34の洗浄動作が直線的な往復動であるため、特許文献1や特許文献2に記載の洗浄方法とは異なり、被洗浄面F全体が均一に洗浄され、その結果、被洗浄面F上の異物が適切に除去される。
Therefore, in this embodiment, there are the following effects.
(1) Since the cleaning operation of the cleaning member 34 is a linear reciprocating motion, unlike the cleaning methods described in Patent Document 1 and Patent Document 2, the entire surface F to be cleaned is uniformly cleaned, and as a result, the surface to be cleaned F is uniformly cleaned. Foreign matter on the cleaning surface F is appropriately removed.

(2)洗浄部材34を構成する鉄繊維が適度に折れるため、被洗浄面Fに対してダメージが与えられることを抑制できるとともに、洗浄によって被洗浄面Fから除去された異物が折れた鉄繊維とともに洗い流される。 (2) Since the iron fibers constituting the cleaning member 34 are appropriately broken, it is possible to suppress damage to the surface F to be cleaned, and the iron fibers in which foreign matter removed from the surface F to be cleaned by cleaning is broken. It is washed away with.

(3)洗浄部材34の反転位置が被洗浄面F外であるため、ガラス板Gに不要な振動が生じることはなく、特許文献2に記載の洗浄方法とは異なり、ガラス板Gが割れたり、被洗浄面Fに洗浄されない部分が残ったりするおそれはない。 (3) Since the inverted position of the cleaning member 34 is outside the surface to be cleaned F, unnecessary vibration does not occur in the glass plate G, and unlike the cleaning method described in Patent Document 2, the glass plate G may crack. , There is no possibility that an uncleaned portion remains on the surface F to be cleaned.

(4)被洗浄面Fに対する洗浄部材34の接触圧力が低く、かつ、洗浄部材34の移動速度が速すぎないため、被洗浄面Fの性状が変化するおそれもない。
(変更例)
なお、本発明は前記実施形態に限定されるものではなく、以下のような態様で具体化することができる。
(4) Since the contact pressure of the cleaning member 34 with respect to the surface to be cleaned F is low and the moving speed of the cleaning member 34 is not too fast, there is no possibility that the properties of the surface to be cleaned F will change.
(Change example)
The present invention is not limited to the above embodiment, and can be embodied in the following aspects.

・洗浄部材34として前記実施形態とは異なる材質のものを使用すること。例えば、鉄以外の金属であるアルミニウム、アルミニウム合金、マグネシウム、銀、亜鉛、黄銅等や、硬質合成樹脂等の硬質繊維を不規則に集合させたものを用いること。 -Use a cleaning member 34 made of a material different from that of the above embodiment. For example, use a metal other than iron such as aluminum, aluminum alloy, magnesium, silver, zinc, brass, etc., or an irregularly assembled hard fiber such as a hard synthetic resin.

・洗浄部材34として前記実施形態とは異なる形状のものを使用すること。例えば、図8に示すように、繊維を不規則に集合させた平板状のものを使用すること。
・洗浄部材34の往復動位置が洗浄部材34の軸線方向に移動できる洗浄装置を用いること。このような洗浄装置を用いることにより、被洗浄面F外において洗浄部材34をその軸線方向に移動させることにより、洗浄部材34の軸線方向寸法より幅の広いガラス板Gを洗浄できる。
-Use a cleaning member 34 having a shape different from that of the above embodiment. For example, as shown in FIG. 8, use a flat plate in which fibers are irregularly assembled.
-Use a cleaning device that can move the reciprocating position of the cleaning member 34 in the axial direction of the cleaning member 34. By using such a cleaning device, the cleaning member 34 can be moved in the axial direction outside the surface F to be cleaned, so that the glass plate G having a width wider than the axial dimension of the cleaning member 34 can be cleaned.

・ガラス板Gはコーティングを有し、洗浄はそのコーティング面に対して行なうこと。この場合、洗浄部材34を構成する繊維は、コーティング面より低硬度のものを用いること。 -Glass plate G has a coating, and cleaning should be performed on the coated surface. In this case, the fibers constituting the cleaning member 34 should have a hardness lower than that of the coated surface.

(実施例)
以下に、前記実施形態の実施例及び比較例を説明する。
本実施形態は、テストピースとして3枚の強化ガラス板Gを用いた。これらの強化ガラス板Gの硬度は、モース硬度で5である。これらの各テストピースをn−ヘキサンにより前処理洗浄を行なった。
(Example)
Hereinafter, examples and comparative examples of the above-described embodiment will be described.
In this embodiment, three tempered glass plates G are used as test pieces. The hardness of these tempered glass plates G is 5 in Mohs hardness. Each of these test pieces was pretreated and washed with n-hexane.

そして、各テストピースの表面全体に対して、ゼブラ株式会社製の油性マーカー(商品名:マッキー極太)の赤色を塗布し、塗布後、常温下において24時間放置した。
その後、1枚のテストピース(以下、Aピースという)に対して、前記実施形態の洗浄方法により洗浄を行なって実施例とした。他の1枚のテストピース(以下、Bピースという)に対して、ナトリウム水により超音波洗浄を行って比較例1とした。残りの1枚のテストピース(以下、Cピースという)に対して炭化水素系洗浄剤により超音波洗浄を行なって比較例2とした。さらなる詳細は以下の通りである。
Then, a red color of an oil-based marker (trade name: McKee Thick) manufactured by Zebra Co., Ltd. was applied to the entire surface of each test piece, and after the application, the mixture was left at room temperature for 24 hours.
Then, one test piece (hereinafter referred to as A piece) was washed by the washing method of the above embodiment to obtain an example. The other test piece (hereinafter referred to as B piece) was ultrasonically cleaned with sodium water to obtain Comparative Example 1. The remaining one test piece (hereinafter referred to as C piece) was ultrasonically cleaned with a hydrocarbon-based cleaning agent to obtain Comparative Example 2. Further details are as follows.

実施例(Aピース):液温摂氏15度のアルコール系洗浄剤中において、2分間ずつ2回洗浄を行なった。洗浄部材34は、直径0.1mmの軟鉄よりなり、硬度がモース硬度4の繊維を不織布状をなすように不規則に絡み合わせて、全体として円柱状にしたものである。この洗浄部材34をAピースの表面に対して50N(ニュートン)の圧力で押し当てて、Aピースの表面に沿って秒速15cmの速度で往復移動させた。往復移動の反転位置は、Aピースの表面の端部から側方へ1mm外れた位置である。 Example (A piece): Washing was performed twice for 2 minutes each in an alcohol-based detergent having a liquid temperature of 15 degrees Celsius. The cleaning member 34 is made of soft iron having a diameter of 0.1 mm, and fibers having a hardness of Mohs hardness 4 are irregularly entwined so as to form a non-woven fabric to form a columnar shape as a whole. The cleaning member 34 was pressed against the surface of the A piece at a pressure of 50 N (Newton) and reciprocated along the surface of the A piece at a speed of 15 cm per second. The reversing position of the reciprocating movement is a position 1 mm away from the end of the surface of the A piece.

比較例1(Bピース):液温摂氏15度の水酸化ナトリウム25%の洗浄液中において5分間ずつ2回超音波(100ボルト,150ワット。25キロヘルツ)洗浄を行なった。 Comparative Example 1 (B piece): Ultrasonic washing (100 volts, 150 watts, 25 kHz) was performed twice for 5 minutes each in a washing solution containing 25% sodium hydroxide at a liquid temperature of 15 degrees Celsius.

比較例2(Cピース):液温摂氏15度のイソパラフィン系炭化水素洗浄液中において、5分間ずつ2回超音波(100ボルト,150ワット。25キロヘルツ)洗浄を行なった。 Comparative Example 2 (C piece): Ultrasonic washing (100 volts, 150 watts, 25 kHz) was performed twice for 5 minutes each in an isoparaffin-based hydrocarbon cleaning solution at a liquid temperature of 15 degrees Celsius.

そして、株式会社島津製作所社製の分光光度計(製品名:SolidSpec-3700DUV)を用いて、前記3枚の各ピースの分光透過率を測定した。その測定結果を図9に示す。図9から明らかなように、実施例のAピースにおいては、比較例1のBピース及び比較例2のCピースと比べると、高い分光透過率を示した。しかも、実施例の洗浄時間は、比較例1及び比較例2の洗浄時間の40%と短いが、このように短くても、前記のように高い透過率を示した。従って、実施例によれば、洗浄に要する作業時間を大幅に短縮できることを示している。 Then, the spectral transmittance of each of the three pieces was measured using a spectrophotometer (product name: SolidSpec-3700DUV) manufactured by Shimadzu Corporation. The measurement result is shown in FIG. As is clear from FIG. 9, the A piece of Example showed higher spectral transmittance than the B piece of Comparative Example 1 and the C piece of Comparative Example 2. Moreover, the cleaning time of Examples was as short as 40% of the cleaning time of Comparative Example 1 and Comparative Example 2, but even if it was so short, it showed high transmittance as described above. Therefore, according to the examples, it is shown that the working time required for cleaning can be significantly shortened.

ここで、実施例において、洗浄部材34によるAピースへの圧力が29Nに低下すると、分光透過率の低下が認められた。また、実施例において、Aピースに対する洗浄部材34の移動速度が秒速10cmを下回ると、分光透過率の低下が認められた。 Here, in the examples, when the pressure on the A piece by the cleaning member 34 decreased to 29N, a decrease in the spectral transmittance was observed. Further, in the examples, when the moving speed of the cleaning member 34 with respect to the A piece was less than 10 cm per second, a decrease in the spectral transmittance was observed.

また、株式会社ルケオ社製の屈折計型ガラス表面応力計(製品名:FSM-6000LE)を用いて、実施例,比較例1及び比較例2で洗浄した各ピースの表面応力測定を行なった。その測定結果を図10に示す。図10から明らかなように、実施例,比較例1及び比較例2により洗浄された各ピースの表面応力値には、ほとんど差がなく、強度差は無視できる程度のものである。従って、軟鉄で擦過洗浄を行なって、仮に強度低下が認められたとしても、その低下は、誤差の範囲内であると思われる。 Further, the surface stress of each piece washed in Example, Comparative Example 1 and Comparative Example 2 was measured using a refractometer type glass surface stress meter (product name: FSM-6000LE) manufactured by Luceo Co., Ltd. The measurement result is shown in FIG. As is clear from FIG. 10, there is almost no difference in the surface stress values of the pieces washed by Example, Comparative Example 1 and Comparative Example 2, and the strength difference is negligible. Therefore, even if a decrease in strength is observed after scraping with soft iron, the decrease is considered to be within the margin of error.

また、実施例において、Aピースに対する前記圧力が150Nをオーバーすると、表面応力値が強度低下側に移行することが認められた。さらに、Aピースに対する洗浄部材34の移動速度が秒速20cmをオーバーすると、前記と同様に、表面応力値が強度低下側に移行することが認められた。 Further, in the examples, it was found that when the pressure on the A piece exceeds 150 N, the surface stress value shifts to the strength lowering side. Further, when the moving speed of the cleaning member 34 with respect to the A piece exceeds 20 cm per second, it was confirmed that the surface stress value shifts to the strength lowering side in the same manner as described above.

(他の技術的思想)
前記実施形態から把握される技術的思想は以下の通りである。
(A)板状の被洗浄体を保持可能にした吸着盤と、硬質繊維を不規則に集合させた洗浄部材を保持する支持部材と、その洗浄部材を前記被洗浄体の外側で反転させながら直線的に往復動させて、洗浄部材によって被洗浄体の表面を洗浄させる駆動機構と、前記洗浄部材による洗浄位置に洗浄液を供給する供給機構とを有する洗浄装置。
(Other technical ideas)
The technical idea grasped from the above embodiment is as follows.
(A) A suction plate that can hold a plate-shaped object to be cleaned, a support member that holds a cleaning member in which hard fibers are irregularly assembled, and the cleaning member are inverted on the outside of the object to be cleaned. A cleaning device having a drive mechanism that linearly reciprocates to clean the surface of the object to be cleaned by a cleaning member, and a supply mechanism that supplies a cleaning liquid to a cleaning position by the cleaning member.

(B)前記洗浄液を循環させる循環路を備え、その循環路には洗浄液を濾過するフィルタを設けた前記技術的思想(A)項に記載の洗浄装置。 (B) The cleaning apparatus according to the technical idea (A), which is provided with a circulation path for circulating the cleaning solution and is provided with a filter for filtering the cleaning solution in the circulation path.

34…洗浄部材、F…被洗浄面、G…ガラス板。 34 ... Cleaning member, F ... Surface to be cleaned, G ... Glass plate.

Claims (3)

洗浄液を洗浄槽内に供給しながら前記洗浄液中でガラス板の被洗浄面を洗浄するための洗浄方法において、
前記ガラス板を吸着盤の上面に吸着保持し、前記被洗浄面より低硬度の鉄または鉄系金属よりなる繊維を不織布状をなすように絡み合わせて円柱状に形成するとともに軸線方向の長さが前記被洗浄面の幅より長く形成した洗浄部材を支持部材に回転不能に保持させ、前記洗浄部材を前記被洗浄面上において直線的に移動させるとともに、前記被洗浄面を外れた位置において移動方向を反転させて往復させることにより、前記洗浄部材によって被洗浄面を洗浄するガラス板の洗浄方法。
In the cleaning method for cleaning the surface to be cleaned of the glass plate in the cleaning liquid while supplying the cleaning liquid into the cleaning tank.
The glass plate is attracted and held on the upper surface of the suction plate, and fibers made of iron or iron-based metal having a lower hardness than the surface to be cleaned are entangled to form a non-woven fabric to form a columnar shape and a length in the axial direction. Holds the cleaning member formed longer than the width of the surface to be cleaned by the support member so as not to rotate , and moves the cleaning member linearly on the surface to be cleaned and at a position off the surface to be cleaned. A method for cleaning a glass plate in which the surface to be cleaned is cleaned by the cleaning member by reversing the direction and reciprocating.
前記洗浄部材を長さ方向と直交する方向に移動させて洗浄する請求項1に記載のガラス板の洗浄方法。 The method for cleaning a glass plate according to claim 1, wherein the cleaning member is moved in a direction orthogonal to the length direction to be cleaned. 前記洗浄部材による被洗浄面に対する移動速度が秒速10〜20センチメートルである請求項1または2に記載のガラス板の洗浄方法。 The method for cleaning a glass plate according to claim 1 or 2 , wherein the moving speed of the cleaning member with respect to the surface to be cleaned is 10 to 20 centimeters per second.
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