JP6912801B2 - Film-like work suction device - Google Patents

Description

The present invention relates to a film-like work adsorbing device such as a film-like organic EL.

Patent Document 1 discloses a sheet adsorption plate in which a green sheet is vacuum-adsorbed by an adsorption plate and laminated in a step of laminating a ceramic green sheet or the like. Further, Patent Document 2 discloses a suction head for a film-like part.

The invention described in Patent Document 1 provides a sheet suction plate which has a small diameter, has a large number of suction holes, has little variation in the size of the suction holes, and can obtain uniform suction. .. This sheet suction plate has a first plate in which a large number of suction holes penetrating the front and back are dispersedly formed at predetermined pitch intervals, and a frame portion around the surface, and has a grid shape inside the frame portion that communicates with the suction holes. It is characterized in that it is provided with a second plate in which a ventilation groove is formed and a plurality of ventilation holes leading to the back surface are formed at the bottom of the ventilation groove, and the ventilation holes are connected to a vacuum source. ..

There is a problem that a plurality of types of such sheet suction plates must be prepared in order to correspond to various work shapes and work arrangements.

Further, if the work is a very thin film and the size of the work is large, it is difficult to uniformly adsorb the work. As a result, when the work is adsorbed, the film-like work is bent, wrinkled, deformed, or the like. There is a problem that it ends up. Also, when small film-like workpieces are arranged on a tray and adsorbed, if uniform adsorption is not possible and there is a difference in adsorption timing or adsorption force with the adjacent film-like workpiece, the film-like workpiece There is a problem that the posture of the film is disturbed, which also causes the film-like work to bend, wrinkle, and deform.

The suction head described in Patent Document 2 is used when handling a film-shaped component by sucking it, and the suction head has an opening in a portion where the work to be sucked comes into contact with each other during suction. This opening is composed of a plurality of holes having substantially the same size and shape.

Therefore, a plurality of openings for sucking the work are arranged in one suction head, and the plurality of openings are connected to one negative pressure source. Further, there is a portion where the suction hole is not provided between the plurality of openings.

Therefore, when a very thin film-like work is adsorbed, there is a problem that a portion adsorbed on the openings and a non-adsorbed portion between the openings are generated, which easily causes bending, wrinkles, and deformation.

Japanese Unexamined Patent Publication No. 11-267986 Japanese Unexamined Patent Publication No. 6-40596

An object of the present invention is to provide a film-shaped work adsorbing device capable of preventing the work from bending, wrinkling, deforming, etc. when the film-shaped work is adsorbed by a negative pressure.

The present invention is a suction box comprising an etching plate, a downward opening whose lower side is the same size and shape as the etching plate, and an upper bottom portion arranged above the opening at a distance. When n is an integer of 3 or more, the inner space of the suction box and the opening are divided into at least n pieces in the longitudinal direction of the suction box by a partition plate whose upper end is connected to the upper bottom portion. In the center of the n split suction portions whose lower side is a split suction surface and the upper bottom portion behind the split suction portion, a part of the air in the split suction portion is applied. a suction fan 1 group of film-like workpiece is capable adsorbed to the dividing suction surface by issuing intake, and a control device for controlling the suction fan, the divided suction unit and the air is sucked out by the suction fan wherein provided in the partition plate, characterized by having a communication hole that communicates the divided suction portion of both sides, the the the divided adsorbing portion partitioning between the dividing suction portion adjacent to the longitudinal direction The above-mentioned problem is solved by the film-like work adsorbing device.

Further, the present invention comprises an etching plate, a downward opening whose lower side is the same size and shape as the etching plate, and a box-shaped body having an upper bottom portion arranged above the opening at a distance. When n is an integer of 3 or more, the suction box and the inner space of the suction box and the opening are formed by partitioning the suction box into at least n pieces in the longitudinal direction of the suction box by a partition plate, and below each of them. One is provided on each of the n divided suction portions whose sides are the divided suction surfaces and the upper bottom portion behind each of these divided suction portions, and the air in the divided suction portions is sucked out to the divided suction surfaces. The n groups of suction fans capable of sucking a film-like work, a control device for individually controlling the plurality of suction fans , and the etching plate are sandwiched between the divided suction surfaces and together with the etching plate. The n-piece masking sheet is fixed to the divided suction surface together with the etching plate. It has a frame structure having a frame that serves as a peripheral wall of the divided suction portion, and the inside of the frame is a through hole . Similarly, the above-mentioned problems are solved by a film-shaped work adsorbing device characterized by having an adsorption force of 1 / n.

When dividing the longitudinal direction into n pieces, 1 to m pieces in the lateral direction (m is an integer of 2 or more) so that the divided suction surfaces have the same area and shape, for example, a square, a regular hexagon, or an equilateral triangle. It shall be divided into.

The thickness of the film-like work is 0.01 mm to 0.2 mm.

In the film-shaped work suction device according to the present invention, the suction surface of the work in the suction box opened downward is divided by a partition plate, and each constitutes a plurality of divided suction portions forming a divided suction space and a divided suction surface. , A suction fan that sucks the film-like work by sucking the air of these split suction parts and a control device that controls the suction fan are provided, and each split suction part is within the range of the divided suction surface. Since the film-like work of No. 1 is adsorbed at the same time, it has an excellent effect that the adsorbed film-like work can be prevented from bending, wrinkling, and deforming.

An exploded perspective view showing the film-shaped work adsorbing device and the film-shaped work according to the first embodiment of the present invention. An exploded perspective view showing a state in which the film-like work suction device is viewed from below. Enlarged cross-sectional view along line III-III of FIG. Block diagram showing the relationship between the control device and the suction fan in the film-like work suction device The same exploded perspective view as FIG. 2 which shows the film-like work adsorbing apparatus which concerns on Example 2 of this invention. An enlarged cross-sectional view schematically showing the relationship between the suction surface and the film-like work and the masking sheet in the film-like work suction device according to the second embodiment. A cross-sectional view schematically showing a process of adsorbing a film-like work by the film-like work adsorber according to the second embodiment. The same cross-sectional view as FIG. 3 which shows the film-like work adsorbing apparatus which concerns on Example 3 of this invention. Perspective view which shows the film-like work adsorbing apparatus which concerns on Example 3. A cross-sectional view schematically showing an enlarged view of a high-speed adsorption / separation device that adsorbs and separates a film-like work at high speed.

Hereinafter, examples of the present invention will be described in detail with reference to the drawings.

As shown in FIG. 1, the film-shaped work suction device 10 according to the first embodiment of the present invention includes a suction box 20, a split suction portion 24-1 to 24-6, and a suction fan 26-1 to 26-6. It is composed of an etching plate 12, a masking sheet 14, and a control device 30 (see FIG. 4).

Reference numeral 13 in FIG. 1 indicates a film-like work that is adsorbed by the film-like work adsorbing device 10. In the first embodiment, 24 film-shaped workpieces 13 are arranged in 4 × 6 on the tray 15, and every 2 × 2 = 4 sheets are adsorbed on one divided suction unit 24. , 24 film-shaped workpieces 13 are adsorbed at the same time, all or four at a time.

The suction box 20 is composed of a box-like body having a downward opening 21 having the same size and shape as the etching plate 12 and an upper bottom portion 22 arranged above the opening 21 at a lower side.

The divided suction unit 24 is formed by partitioning the inner space and the opening 21 of the suction box 20 in a grid pattern by a partition plate 20A, and three in the longitudinal direction and two in the width direction of the suction box 20, for a total of six. Each lower end surface is a split suction surface 25.

One suction fan 26-1 to 26-6 is provided on the upper bottom portion 22 behind (above) each of the split suction portions 24-1 to 24-6, and sucks the air in the split suction portion 24. As a result, the film-shaped work 13 can be adsorbed on the divided suction surfaces 25-1 to 25-6.

The etching plate 12 has fine through holes having a hole diameter of 0.6 mm formed on the entire surface so as to have an aperture ratio of 50%, and is designed to transmit a uniform suction force.

The masking sheet 14 is used when a large number of small film-shaped workpieces 13 are adsorbed at the same time, is arranged (attached) under the etching plate 12, and is adsorbed on a plurality of divided suction portions 24 together with the etching plate 12. It is arranged as possible.

In the first embodiment, the masking sheet 14 has a frame structure having a frame 14A serving as a peripheral wall of six divided suction surfaces 25 in a state of being adhered (attached) to the opening 21 together with the etching plate 12 in between. The inside of the frame 14A is a through hole 14B, and the size (area and shape) thereof is the same shape and the same position as the split suction surface 25, and the four films arranged in a rice field. The shape work 13 can be adsorbed.

The control device 30 is adapted to individually control the plurality of suction fans 26-1 to 26-6.

The split suction unit 24-1 to 24-6, the split suction surface 25-1 to 25-6, the suction fan 26-1 to 26-6, and the fan motor 27-1 to 27-6 described later are generic names. In this case, it is simply shown as the split suction unit 24, the split suction surface 25, the suction fan 26, and the fan motor 27. The suction fans 26-1 to 26-6 have a suction force of 1/6 of the suction force of the suction source when one masking sheet 14 is sucked by one suction source.

As shown in FIG. 4, the control device 30 includes a fan motor control unit 30A and a sluice valve control unit 30B (details of the sluice valve control unit 30B will be described later).

The suction fans 26-1 to 26-6 are provided with fan motors 27-1 to 27-6, respectively. All of these fan motors 27-1 to 27-6 are individually ON-OFF controlled by the fan motor control unit 30A.

Reference numerals 12-1 to 12-6 in FIG. 1 indicate that the portion adsorbed on the split suction surfaces 25-1 to 25-6 is placed on the upper surface of the etching plate 12 corresponding to the split suction surfaces 25-1 to 25-6. The divided adsorption region shown assuming is shown.

Next, the process of adsorbing the film-like work 13 by the film-like work adsorbing device 10 will be described.

The film-shaped work 13 is arranged side by side on the tray 15 at a suction position on the lower side of the film-shaped work sucking device 10.

When the film-shaped work suction device 10 is lowered from above the film-shaped work 13 and the opening 21 approaches the outer periphery of the film-shaped work 13 to reach a preset gap 16 (see FIG. 3). The fan motors 27-1 to 27-6 of the suction fans 26-1 to 26-6 on the divided suction surfaces 25-1 to 25-6 are turned on by the fan motor control unit 30A. As a result, the 24 film-shaped workpieces 13 arranged in parallel on the tray 15 are simultaneously attracted to the divided suction portions 24-1 to 24-6, four by four.

The split suction unit 24 may be any as long as it can simultaneously suck the four film-shaped workpieces 13 in the split suction regions 12-1 to 12-6 by the split suction surface 25, and the split suction unit 24-1 There may be a time lag in suction between ~ 24-6.

Even if there is a time difference in this way, since it is partitioned by the partition plate 20A, there is no inflow or outflow of suction air between the divided suction portions 24-1 to 24-6. Therefore, the four film-shaped workpieces 13 are simultaneously adsorbed without disturbing the air flow inside the adjacent split suction portions 24, so that the adsorbed film-shaped workpieces 13 are wrinkled, bent, deformed, or the like. Is less likely to occur.

The film-like work 13 adsorbed by the film-like work suction device 10 is conveyed to a predetermined position, and if the fan motor 27 is turned off by the fan motor control unit 30A, the film-like work 13 will be at the predetermined position. It is separated from the split suction surface 25.

When the dimensions and shape of the film-shaped work 13 are changed, only the masking sheet 14 may be changed together with the film-shaped work 13.

In the first embodiment, a plurality of small film-like workpieces are adsorbed, but the film-like workpiece adsorber 10 of the first embodiment is also applied to adsorb one large film-like workpiece. Is. In this case, the masking sheet 14 is unnecessary.

Further, in the film-shaped work suction device 10 in the first embodiment, when the divided suction surface 25 is close to the film-shaped work 13 by the suction box 20 and the lower end surface of the peripheral wall of the opening 21 is close to the film-shaped work 13. In addition, the shape is such that the film-like work 13 faces the upper surface of the film-like work 13 with a gap 16 so as to be in a non-contact state, but the present invention is not limited to this, and the following Example 2 It may be configured as follows.

As shown in FIGS. 5 to 7, the film-shaped work suction device 40 according to the second embodiment is suitable for sucking one large film-shaped work 13A, and the divided suction surface 44 (44-1 to 44-1). Of 44-6), the three split suction surfaces adjacent to the suction box 41 in the longitudinal direction, for example, the split suction surfaces 44-1 to 44-3, are the split suction surfaces 44-2 in the central portion in the longitudinal direction. The curved surface 42 is formed to be continuous upwardly convex so as to be closer to the suction fan 26 side than the split suction surfaces 44-1 and 44-3 on both sides, that is, shallower from the upper bottom portion 22. Reference numeral 43 (43-1 to 43-6) indicates a split adsorption portion.

When sucking one large film-like work 13A, as shown in FIG. 7, first, the suction fan 26-2 (26-5) is driven from the state of (1) to the central portion in the longitudinal direction. On the split suction surface 44-2 (44-5) of the above, the central portion of the tray 15 of the film-shaped work 13A in the longitudinal direction is sucked to the state of (2), and then the suction fan 26-1 (26-4) , 26-3 (26-6) is driven, and the film-like work 13A is sucked on both sides of the central portion in the longitudinal direction of the tray 15 on the split suction surfaces 44-1 and 44-3 on both sides thereof (3). ) State.

In this way, since the divided suction surfaces 44-1 to 44-3 become a continuous straight line, there is an advantage that wrinkles, bending, deformation, etc. are less likely to occur even with one large film-like work 13A that has been sucked. be.

The film-like work adsorbing device 40 can also be used when adsorbing a small film-like work as in Example 1.

Next, the film-like work adsorbing device 60 according to the third embodiment will be described with reference to FIGS. 8 and 9.

In the third embodiment, the same parts as those of the first and second embodiments are designated by the same reference numerals, and the description thereof will be omitted.

The film-shaped work suction device 60 according to the third embodiment includes a suction box 61, a split suction portion 64 (64-1 to 64-6), one suction fan 66, an etching plate 12, and a masking sheet 14. And the control device 70. The lower end surface of the split suction portion 64 (64-1 to 64-6) is a split suction surface 65 (65-1 to 65-6).

The suction box 61 is composed of an opening 21 similar to that of the first and second embodiments, and a box-shaped body having an upper bottom portion 22 arranged above the opening 21 at a distance.

The divided suction unit 64 is formed by partitioning the inner space and the opening 21 of the suction box 61 in a grid pattern by a partition plate 60A, and three in the longitudinal direction and two in the width direction of the suction box 61, for a total of six. , Each lower end surface is a split suction surface 65.

One suction fan 66 is provided on the upper bottom portion 22 behind (upper) the split suction portions 64-2 and 64-5.

In addition, the partition between the divided suction portions 64-1 and 64-2, between 64-2 and 64-3, between 64-4 and 64-5, and between 64-5 and 64-6. Each of the plates 60A is provided with a communication hole 68.

Since the split suction portions 64-1 to 64-6 have the above-mentioned configuration, the suction fan 66 first transmits negative pressure into the split suction portions 64-2 and 64-5 in the central portion to suck air. By being taken out, the film-like work 13 can be first adsorbed on the divided suction surfaces 65-2 and 65-5.

Next, when the split suction surfaces 65-2 and 65-5 are closed by the film-shaped work 13, the negative pressures of the split suction portions 64-2 and 64-5 are split on both sides through the communication holes 68. It is transmitted to the suction portions 64-1 and 64-3, and 64-4 and 64-6, respectively, and then the film-like work 13 is adsorbed on these, so that the film-like work 13 is bent and wrinkled. , Deformation is less likely to occur.

In the third embodiment, when the suction holes for directly communicating with the suction fan 66 from the divided suction portions 64-1 to 64-6 are provided and the areas are the same, the suction fan 66 is provided in the center of the suction box 61. Therefore, the negative pressure generated in the central split suction portions 64-2 and 64-5 is higher than the negative pressure generated in the split suction portions 64-1, 64-3 and 64-4, 64-6 on both sides thereof. Will also grow. As a result, the film-like work 13 is first adsorbed on the split adsorption surfaces 65-2 and 65-5 in the same manner as described above.

The film-like work adsorbing device 60 of Example 3 can also be used for adsorbing one large film-like work 13A as shown in FIGS. 6 and 7.

In Examples 1 to 3 above, the adsorbed film-like work 13 or 13A (indicated only as "13A" in FIG. 10) is separated after being adsorbed by turning off the fan motor 27. This is because it takes some time for the negative pressure in the split suction portion 24 to become a positive pressure, so as shown in FIG. 10, a high-speed suction separation device 50 provided for each split suction portion 24 of the suction box 20 is used. , Can be separated at high speed.

Specifically, the high-speed suction separation device 50 communicates with the split suction portion 24, protrudes upward, is attached to the upper bottom portion 22, and has a suction pipe 52 having a suction fan 26 arranged at the outer end, and the suction pipe. An air intake opening 54 provided on the side surface of the 52, a pressure introduction opening 56 formed in the upper bottom portion 22 at a position separated from the suction pipe 52, a main sluice valve 52A for opening and closing the suction pipe 52, and an air intake opening 54. Consists of an intake opening sluice valve 54A that opens and closes, an introduction opening sluice valve 56A that opens and closes the pressure introduction opening 56, a main sluice valve 52A, an intake opening sluice valve 54A, and a sluice valve control unit 30B that controls the introduction opening sluice valve 56A. Has been done.

The sluice valve control unit 30B opens the main sluice valve 52A when the film-shaped work 13A is sucked, closes the intake opening sluice valve 54A and the introduction opening sluice valve 56A, and when the film-shaped work 13 is separated, the main sluice valve It is configured to close the 52A and open the intake opening sluice valve 54A and the introduction opening sluice valve 56A.

Specifically, as shown in FIG. 10 (1), when the film-shaped work 13A is sucked, the main sluice valve 52A is opened, and the intake opening sluice valve 54A and the introduction opening sluice valve 56A are closed to form the suction pipe 52. The film-like work 13A is adsorbed by rapidly putting the inside of the split suction portion 24 continuous to this into a negative pressure state, and as shown in FIG. 10 (2), the main sluice valve 52A is closed and the intake opening is opened at the time of separation. The sluice valve 54A and the introduction opening sluice valve 56A are opened, atmospheric pressure is introduced into the suction pipe 52 and the split suction portion 24, and the film-like work 13A that is quickly sucked is released and separated.

In the above embodiment, six split suction portions 24 are provided, and the suction surface is composed of six split suction surfaces 25, but the present invention is not limited to this, and the split suction surface is not limited to this. Is provided as long as three or more are provided in the longitudinal direction of the film-shaped work 13 or 13A. In other words, n may be an integer of 3 or more, and n may be provided.

Further, in the embodiment, 24 small film-shaped workpieces 13 are adsorbed at one time, but in the present invention, when the number of film-shaped workpieces is 23 or less including one, 25 or more. It also applies to cases.

Here, n is due to the size of the film-like workpiece and masking sheet to be adsorbed, the area of the dividing suction surface per depends on the rigidity of the film-like workpiece, generally to a 1000cm ² ~2000cm ² Is good.

The reason why it is 1000 cm ² or more is that if the divided suction portion is made smaller than this, the manufacturing cost increases, ^{and if it is 2000 cm 2} or more, the adsorbed film-like work 13 is wrinkled, bent, and deformed on each divided suction surface. This is because there is a problem that such problems are likely to occur.

10, 40, 60 ... Film-like work suction device 12 ... Etching plate 12-1 to 12-6 ... Divided suction area 13, 13A ... Film-like work 14 ... Masking sheet 14A ... Frame 14B ... Through hole 15 ... Tray 16 ... Gap 20, 41, 61 ... Suction box 20A, 60A ... Partition plate 21 ... Opening 22 ... Upper bottom 24 (24-1 to 24-6), 43 (43-1 to 43-6), 64 (64-1 to 64) -6) ... Split suction part 25 (25-1 to 25-6), 44 (44-1 to 44-6), 65 (65-1 to 65-6) ... Split suction surface 26 (26-1 to 26) -6), 66 ... Suction fan 27 (27-1 to 27-6) ... Fan motor 30, 70 ... Control device 30A ... Fan motor control unit 30B ... Gate valve control unit 42 ... Curved surface 50 ... High-speed suction separation device 52 ... Suction pipe 52A ... Main sluice valve 54 ... Air intake opening 54A ... Intake opening sluice valve 56 ... Pressure introduction opening 56A ... Introduction opening sluice valve 68 ... Communication hole

Claims (8)

Etching plate and
The lower side is a suction box composed of a downward opening having the same size and shape as the etching plate, and a box-shaped body having an upper bottom portion arranged above the opening at a distance.
When n is an integer of 3 or more, the inner space of the suction box and the opening are divided into at least n pieces in the longitudinal direction of the suction box by a partition plate whose upper end is connected to the upper bottom portion. , N split suction parts with the lower side of each as a split suction surface,
Wherein the center of the upper base portion behind the dividing suction part, by issuing sucked the air in the dividing suction portion of a part of the n 1 group that is capable adsorbing a film-like workpiece in the divided suction surface With a suction fan
A control device that controls the suction fan and
The partition plate is provided to partition between the split suction portion from which air is sucked by the suction fan and the split suction portion adjacent to the split suction portion in the longitudinal direction, and the split suction portions on both sides thereof are provided. With a communication hole that communicates with
A film-like work adsorbing device characterized by having. Etching plate and
The lower side is a suction box composed of a downward opening having the same size and shape as the etching plate, and a box-shaped body having an upper bottom portion arranged above the opening at a distance.
When n is an integer of 3 or more, the inner space of the suction box and the opening are divided into at least n pieces in the longitudinal direction of the suction box by a partition plate, and the lower side of each is a divided suction surface. N divided suction parts and
An n-group suction fan provided on the upper bottom portion behind each of these split suction portions and capable of sucking a film-like work on the split suction surface by sucking air in the split suction portion. ,
A control device that individually controls the plurality of suction fans, and
A masking sheet that sandwiches the etching plate between the divided suction surface and the etching plate and is fixedly arranged on the plurality of divided suction portions.
Have
The masking sheet has a frame structure having a frame serving as a peripheral wall of the n divided suction portions in a state of being fixed to the divided suction surface together with the etching plate, and the inside of the frame is a through hole.
The suction fan is a film-shaped work suction device having a suction force of 1 / n of the suction force of the suction source when the film-shaped work is sucked by one suction source. In claim 2,
At least three of the split suction surfaces adjacent to the suction box in the longitudinal direction are closer to the suction fan side than the split suction surfaces on both sides of the split suction surface in the central portion in the longitudinal direction. , A film-like work suction device characterized in that it has a curved surface that is continuous upwardly convex so as to be shallow from the upper bottom portion. In claim 3,
The control device is configured to control the suction fan so that the suction fan at the central portion sucks the film-like work before the suction fans at both sides. Work suction device. Oite to claim 1,
The divided suction surface has the size and shape of a plurality of the film-shaped works arranged on the tray, and is configured to suck the plurality of the film-shaped works at the same time. Shape work suction device. In any of claims 2 to 4,
The divided suction surface has the size and shape of a plurality of the film-shaped works arranged on the tray, and is configured to suck the plurality of the film-shaped works at the same time. Shape work suction device. In any of claims 2 to 4, claim 6 .
A film-like work suction device characterized in that both the split suction surface and the masking sheet are formed of a conductive material. In any of claims 1 to 7,
It has a high-speed adsorption separation device provided on the upper bottom portion.
The high-speed suction separation device is provided on a suction pipe that communicates with the split suction portion, projects upward and is attached to the upper bottom portion, and has the suction fan arranged at the outer end, and a side surface of the suction pipe. An air intake opening, a pressure introduction opening formed in the upper bottom portion at a position separated from the suction pipe, a main sluice valve for opening and closing the suction pipe, and an intake opening sluice valve for opening and closing the air intake opening. It comprises an introduction opening sluice valve that opens and closes the pressure introduction opening, the main sluice valve, the intake opening sluice valve, and a sluice valve control unit that controls the introduction opening sluice valve.
The sluice valve control unit opens the main sluice valve and closes the intake opening sluice valve and the introduction opening sluice valve when the film-shaped work is sucked, and closes the main sluice valve when the film-shaped work is separated. A film-like work suction device characterized in that the intake opening sluice valve and the introduction opening sluice valve are opened together with the above.

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