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JP6914677B2 - Liquid discharge head - Google Patents
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JP6914677B2 - Liquid discharge head - Google Patents

Liquid discharge head Download PDF

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JP6914677B2
JP6914677B2 JP2017046210A JP2017046210A JP6914677B2 JP 6914677 B2 JP6914677 B2 JP 6914677B2 JP 2017046210 A JP2017046210 A JP 2017046210A JP 2017046210 A JP2017046210 A JP 2017046210A JP 6914677 B2 JP6914677 B2 JP 6914677B2
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discharge port
forming member
port forming
substrate
discharge
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JP2018149709A (en
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洋輔 ▲高▼木
洋輔 ▲高▼木
謙児 藤井
謙児 藤井
洋久 藤田
洋久 藤田
飯島 康
康 飯島
千秋 村岡
千秋 村岡
晋平 吉川
晋平 吉川
矢部 賢治
賢治 矢部
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Canon Inc
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Canon Inc
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Description

本発明は、インクなどの液体を吐出する液体吐出ヘッドに関する。 The present invention relates to a liquid ejection head that ejects a liquid such as ink.

従来、紙などの記録媒体に画像の形成を行う画像形成装置として熱転写方式、ワイヤードット方式、感熱方式、インクジェット方式などの画像形成装置が実用化されている。中でもインクジェット方式はランニングコストが安く、記録音が抑えられる記録方式として注目され、幅広い分野で使用されている。インクジェット方式の画像形成装置では、エネルギー発生素子を駆動することにより、基板上に形成された吐出口形成部材の吐出口から液滴を吐出させ、記録媒体の所望の位置に液滴を着弾させることによって画像の形成が行われる。 Conventionally, as an image forming apparatus for forming an image on a recording medium such as paper, an image forming apparatus such as a thermal transfer method, a wire dot method, a heat sensitive method, and an inkjet method has been put into practical use. Among them, the inkjet method is attracting attention as a recording method that has a low running cost and suppresses recording sound, and is used in a wide range of fields. In an inkjet image forming apparatus, by driving an energy generating element, droplets are ejected from the ejection port of an ejection port forming member formed on a substrate, and the droplets are landed at a desired position on a recording medium. The image is formed by.

吐出口形成部材には多数の吐出口が高密度かつ高精度で配置されている。このため、吐出口形成部材は、基板上に感光性有機樹脂材料を積層し、ステッパー等の露光機で露光し、現像することにより形成される。このような製造プロセスで製造される吐出口形成部材は、製造過程での硬化収縮によって変形を生じることがある。ユーザー使用環境においても、エネルギー発生素子が駆動することで吐出口形成部材に加わる熱や、内部に充填される液体による吐出口形成部材の膨潤などにより、吐出口形成部材と基板が変形することがある。吐出口形成部材や基板に変形が生じると、互いに密着されている吐出口形成部材と基板との接合面に、接合面と平行なせん断力や、接合面と垂直な方向の引っ張り力が加わり、吐出口形成部材が基板から剥離する可能性がある。 A large number of discharge ports are arranged in the discharge port forming member with high density and high accuracy. Therefore, the discharge port forming member is formed by laminating a photosensitive organic resin material on a substrate, exposing it with an exposure machine such as a stepper, and developing it. The discharge port forming member manufactured by such a manufacturing process may be deformed due to curing shrinkage during the manufacturing process. Even in the user's usage environment, the discharge port forming member and the substrate may be deformed due to the heat applied to the discharge port forming member due to the driving of the energy generating element and the swelling of the discharge port forming member due to the liquid filled inside. be. When the discharge port forming member or the substrate is deformed, a shearing force parallel to the joint surface or a tensile force in the direction perpendicular to the joint surface is applied to the joint surface between the discharge port forming member and the substrate which are in close contact with each other. The discharge port forming member may peel off from the substrate.

特許文献1には、吐出口形成部材の基板からの剥離を防止するため、基板上に形成された吐出口形成部材に液体供給口に面する1本のスリットが形成された液体吐出ヘッドが開示されている。吐出口形成部材の変形がスリットで吸収されるため、吐出口形成部材と基板の接合面における吐出口形成部材の変形が抑制され、吐出口形成部材の基板からの剥離が生じにくい。 Patent Document 1 discloses a liquid discharge head in which one slit facing the liquid supply port is formed in the discharge port forming member formed on the substrate in order to prevent the discharge port forming member from peeling off from the substrate. Has been done. Since the deformation of the discharge port forming member is absorbed by the slit, the deformation of the discharge port forming member at the joint surface between the discharge port forming member and the substrate is suppressed, and the discharge port forming member is less likely to peel off from the substrate.

特開2012−51235号公報Japanese Unexamined Patent Publication No. 2012-51235

吐出口形成部材の基板からの剥離は特許文献1に記載のスリットによってある程度抑えられるが、樹脂からなる吐出口形成部材が製造工程中に硬化収縮した際、変形による応力がスリットに集中する可能性がある。この場合、スリットの近傍にクラックが生じる可能性がある。また、近年の液体吐出ヘッドは、印刷の高速化のためより長尺化されたり、コストダウンのために基板の端部から吐出口形成部材の吐出口列までの距離を縮小したりすることがある。このような液体吐出ヘッドは基板の剛性が低下し変形しやすくなるため、特許文献1に記載のスリットでは吐出口形成部材の基板からの剥離を十分に抑制できない可能性がある。
本発明は、吐出口形成部材へのクラックの発生と吐出口形成部材の基板からの剥離が生じにくい液体吐出ヘッドを提供することを目的とする。
The peeling of the discharge port forming member from the substrate is suppressed to some extent by the slit described in Patent Document 1, but when the discharge port forming member made of resin is cured and shrunk during the manufacturing process, the stress due to deformation may be concentrated in the slit. There is. In this case, cracks may occur in the vicinity of the slit. Further, in recent years, the liquid discharge head may be made longer to speed up printing, or the distance from the end of the substrate to the discharge port row of the discharge port forming member may be reduced to reduce the cost. be. Since such a liquid discharge head has a reduced rigidity of the substrate and is easily deformed, there is a possibility that the slit described in Patent Document 1 cannot sufficiently suppress the peeling of the discharge port forming member from the substrate.
An object of the present invention is to provide a liquid discharge head in which cracks in the discharge port forming member and peeling of the discharge port forming member from the substrate are unlikely to occur.

本発明の液体吐出ヘッドは基板と、基板上に位置し感光性樹脂で形成された吐出口形成部材と、を有している。吐出口形成部材は、第1の方向に配列し液体が吐出する複数の吐出口を備え、基板との間に、複数の吐出口と連通する複数の圧力室を形成する。基板は、吐出口形成部材との対向面に位置し、第1の方向に延び、複数の圧力室と連通する液体供給口を有している。吐出口形成部材は、液体供給口と対向する面を第1の方向に延びる2本のスリットを有している。2本のスリットは液体供給口の第1の方向に延びる中心線に関し線対称に設けられている。2本のスリット間の吐出口形成部材の厚みは、第1の方向に直交する第2の方向に関する吐出口形成部材の端部における当該吐出口形成部材の厚みと等しい。液体吐出ヘッドはさらに、第1の方向に延びスリットの側壁を形成する梁と、一部の圧力室の前面に位置し梁と分離された第1のフィルタと、梁から他の圧力室の前面まで延びる梁状の第2のフィルタと、を有する。 The liquid discharge head of the present invention has a substrate and a discharge port forming member located on the substrate and formed of a photosensitive resin. The discharge port forming member includes a plurality of discharge ports arranged in the first direction to discharge the liquid, and forms a plurality of pressure chambers communicating with the plurality of discharge ports with the substrate. The substrate has a liquid supply port that is located on a surface facing the discharge port forming member, extends in the first direction, and communicates with a plurality of pressure chambers. The discharge port forming member has two slits extending in a first direction on a surface facing the liquid supply port. The two slits are provided line-symmetrically with respect to the center line extending in the first direction of the liquid supply port. The thickness of the discharge port forming member between the two slits is equal to the thickness of the discharge port forming member at the end of the discharge port forming member in the second direction orthogonal to the first direction. The liquid discharge head further includes a beam extending in the first direction to form a side wall of the slit, a first filter located in front of some pressure chambers and separated from the beam, and the front of the other pressure chamber from the beam. It has a beam-shaped second filter that extends to.

本発明によれば、吐出口形成部材は、液体供給口と対向し第1の方向に延びる複数のスリットを有している。これにより、吐出口形成部材の変形が複数のスリットで吸収され、吐出口形成部材全体の変形が抑制され、吐出口形成部材の基板からの剥離が抑制される。また、複数のスリットを形成することにより、吐出口形成部材の硬化収縮時にスリットに掛かる応力が分散され、吐出口形成部材へのクラックの発生を抑制できる。よって、本発明によれば、吐出口形成部材へのクラックの発生と吐出口形成部材の基板からの剥離が生じにくい液体吐出ヘッドを提供することができる。 According to the present invention, the discharge port forming member has a plurality of slits facing the liquid supply port and extending in the first direction. As a result, the deformation of the discharge port forming member is absorbed by the plurality of slits, the deformation of the entire discharge port forming member is suppressed, and the peeling of the discharge port forming member from the substrate is suppressed. Further, by forming the plurality of slits, the stress applied to the slits at the time of curing and shrinking of the discharge port forming member can be dispersed, and the occurrence of cracks in the discharge port forming member can be suppressed. Therefore, according to the present invention, it is possible to provide a liquid discharge head in which cracks in the discharge port forming member and peeling of the discharge port forming member from the substrate are unlikely to occur.

本発明の第1の実施形態に係る液体吐出ヘッドの斜視図である。It is a perspective view of the liquid discharge head which concerns on 1st Embodiment of this invention. 図1に示す液体吐出ヘッドの記録素子基板の上面図である。It is a top view of the recording element substrate of the liquid discharge head shown in FIG. 図2に示す記録素子基板の部分拡大平面図と断面図である。2 is a partially enlarged plan view and a cross-sectional view of the recording element substrate shown in FIG. 2. 比較例1の液体吐出ヘッドの記録素子基板の平面図と断面図である。It is a top view and the cross-sectional view of the recording element substrate of the liquid discharge head of the comparative example 1. FIG. 比較例2の液体吐出ヘッドの記録素子基板の平面図と断面図である。2 is a plan view and a cross-sectional view of a recording element substrate of the liquid discharge head of Comparative Example 2. 第2の実施形態の記録素子基板の部分拡大平面図と断面図である。It is a partially enlarged plan view and sectional view of the recording element substrate of the 2nd Embodiment.

以下、本発明の実施形態について、図面を参照して説明する。以下に述べる液体吐出ヘッドは、インクジェットプリンタに搭載されインクを吐出するインクジェットヘッドに関するが、本発明の液体吐出ヘッドはインク以外の液体を吐出する用途にも適用することができる。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. The liquid ejection head described below relates to an inkjet head mounted on an inkjet printer and ejecting ink, but the liquid ejection head of the present invention can also be applied to applications other than ink ejection.

(第1の実施形態)
図1は、本発明の第1の実施形態に係る液体吐出ヘッド1を示す斜視図である。図2は図1に示す液体吐出ヘッド1の記録素子基板2の上面図であり、便宜上、記録素子基板2の内部の液体供給口13も示している。液体吐出ヘッド1はプリンタ本体(図示せず)のキャリッジ(図示せず)に搭載され、記録媒体の幅方向に走査されながら記録媒体にインクを吐出し、記録媒体に画像を形成する。インクは、プリンタ本体に装着されるインクタンク(図示せず)から、プリンタ本体内部の供給経路を介して液体吐出ヘッド1のサブタンク(図示せず)に供給され、内部のインク流路を通じて記録素子基板2に供給される。インクを吐出するための電源電圧や駆動信号は、プリンタ本体から液体吐出ヘッド1のコンタクト基板3と電気配線部材4、さらに記録素子基板2のパッド5を介して記録素子基板2に供給される。
(First Embodiment)
FIG. 1 is a perspective view showing a liquid discharge head 1 according to the first embodiment of the present invention. FIG. 2 is a top view of the recording element substrate 2 of the liquid discharge head 1 shown in FIG. 1, and for convenience, the liquid supply port 13 inside the recording element substrate 2 is also shown. The liquid ejection head 1 is mounted on a carriage (not shown) of a printer body (not shown), ejects ink to the recording medium while being scanned in the width direction of the recording medium, and forms an image on the recording medium. Ink is supplied from an ink tank (not shown) mounted on the printer body to a sub tank (not shown) of the liquid ejection head 1 via a supply path inside the printer body, and is a recording element through an internal ink flow path. It is supplied to the substrate 2. The power supply voltage and the drive signal for ejecting ink are supplied from the printer main body to the recording element substrate 2 via the contact substrate 3 of the liquid ejection head 1, the electrical wiring member 4, and the pad 5 of the recording element substrate 2.

図3(a)は図2のA部拡大図であり、図3(b)は図3(a)のA−A線に沿った断面図である。液体吐出ヘッド1の記録素子基板2は、基板6と、基板6上に形成され樹脂材料からなる吐出口形成部材7と、を備えている。
吐出口形成部材7は、インクが吐出する複数の吐出口8からなる吐出口列9を複数備えている(図2参照)。吐出口列9は互いに平行に延び、各吐出口列9の複数の吐出口8は第1の方向Xに配列している。吐出口形成部材7は基板6と対向する複数の凹部を有しており、この複数の凹部は基板6との間に複数の圧力室10を形成する。吐出口形成部材7は感光性有機樹脂材料を基板6上に積層し、ステッパー等の露光機で露光し、現像することにより形成される。
3 (a) is an enlarged view of part A of FIG. 2, and FIG. 3 (b) is a cross-sectional view taken along the line AA of FIG. 3 (a). The recording element substrate 2 of the liquid discharge head 1 includes a substrate 6 and a discharge port forming member 7 formed on the substrate 6 and made of a resin material.
The discharge port forming member 7 includes a plurality of discharge port rows 9 including a plurality of discharge ports 8 for ejecting ink (see FIG. 2). The discharge port rows 9 extend parallel to each other, and the plurality of discharge ports 8 of each discharge port row 9 are arranged in the first direction X. The discharge port forming member 7 has a plurality of recesses facing the substrate 6, and the plurality of recesses form a plurality of pressure chambers 10 with the substrate 6. The discharge port forming member 7 is formed by laminating a photosensitive organic resin material on a substrate 6, exposing it with an exposure machine such as a stepper, and developing it.

基板6は、第1の方向Xに配列しインクに吐出のためのエネルギーを与える複数のエネルギー発生素子11を備えている。本実施形態のエネルギー発生素子11は発熱抵抗素子であるが、圧電素子であってもよい。一つの圧力室10には一つの吐出口8と一つのエネルギー発生素子11が対応している。基板6は、基板6を厚さ方向に貫通する液体供給路12を有している。液体供給路12の吐出口形成部材7との対向部に位置する開口は、第1の方向Xに延び、複数の圧力室10と連通する液体供給口13となっている。すなわち、基板6は、吐出口形成部材7との対向面に位置し、第1の方向Xに延び、複数の圧力室10と連通する液体供給口13を有している。図2に示すように、液体供給口13は2つ設けられ、各液体供給口13の両側にそれぞれ1列の吐出口列9が配置されている。 The substrate 6 includes a plurality of energy generating elements 11 arranged in the first direction X and giving energy for ejection to the ink. The energy generating element 11 of the present embodiment is a heat generation resistance element, but may be a piezoelectric element. One discharge port 8 and one energy generating element 11 correspond to one pressure chamber 10. The substrate 6 has a liquid supply path 12 that penetrates the substrate 6 in the thickness direction. The opening of the liquid supply path 12 facing the discharge port forming member 7 extends in the first direction X and serves as a liquid supply port 13 that communicates with the plurality of pressure chambers 10. That is, the substrate 6 has a liquid supply port 13 that is located on a surface facing the discharge port forming member 7, extends in the first direction X, and communicates with a plurality of pressure chambers 10. As shown in FIG. 2, two liquid supply ports 13 are provided, and one row of discharge port rows 9 is arranged on both sides of each liquid supply port 13.

吐出口形成部材7の液体供給口13と対向する部分(以下、供給口対向部14という)は第1の方向Xに延びる2本のスリット15a,15bを有している。吐出口形成部材7の液体供給口13と対向する部分には、第1の方向Xに延びる第1〜第3の梁16a〜16cが形成されている。第1の梁16aと第2の梁16bとの間に第1のスリット15aが形成されている。第2の梁16bと第3の梁16cとの間に第2のスリット15bが形成されている。第1〜第3の梁16a〜16cはスリット15a,15bの側壁を形成する。換言すれば、吐出口形成部材7の供給口対向部14は中央梁部17を有し、中央梁部17に2本のスリット15a,15bが設けられている。一例では、中央梁部17の幅a、すなわち第1の梁16aの外側側面と第3の梁16cの外側側面との間の距離aは82μmであり、第1のスリット15aと第2のスリット15bの幅bは15μmである。スリットの数は限定されないが、吐出口形成部材7全体の剛性が低下しすぎて吐出口形成部材7が基板6から剥離しやすくならない限り、3つ以上のスリットを形成してもよい。本実施形態では、液体供給口13の第1の方向Xに延びる中心線13Aに関し線対称の位置に1本ずつ、合計2本のスリットが設けられている。これによって、供給口対向部14の剛性が液体供給口13の中心軸13Aに関し両側で均等となり、極端に変形の大きな箇所が生じなくなる。偶数個のスリットを設ける場合は、液体供給口13の中心線13Aに関し対称に配置するのが好ましい。奇数個のスリットを設ける場合は、液体供給口13の中心線13Aに1本のスリットを、そのスリットの中心線が液体供給口13の中心線13Aと一致するように配置し、残りのスリットを液体供給口13の中心線13Aに関し対称に配置することが好ましい。 The portion of the discharge port forming member 7 facing the liquid supply port 13 (hereinafter, referred to as the supply port facing portion 14) has two slits 15a and 15b extending in the first direction X. First to third beams 16a to 16c extending in the first direction X are formed in a portion of the discharge port forming member 7 facing the liquid supply port 13. A first slit 15a is formed between the first beam 16a and the second beam 16b. A second slit 15b is formed between the second beam 16b and the third beam 16c. The first to third beams 16a to 16c form the side walls of the slits 15a and 15b. In other words, the supply port facing portion 14 of the discharge port forming member 7 has a central beam portion 17, and the central beam portion 17 is provided with two slits 15a and 15b. In one example, the width a of the central beam portion 17, that is, the distance a between the outer side surface of the first beam 16a and the outer side surface of the third beam 16c is 82 μm, and the first slit 15a and the second slit The width b of 15b is 15 μm. Although the number of slits is not limited, three or more slits may be formed as long as the rigidity of the entire discharge port forming member 7 is not excessively lowered and the discharge port forming member 7 is easily peeled off from the substrate 6. In the present embodiment, a total of two slits are provided, one at a position symmetrical with respect to the center line 13A extending in the first direction X of the liquid supply port 13. As a result, the rigidity of the supply port facing portion 14 becomes equal on both sides with respect to the central axis 13A of the liquid supply port 13, and a portion having extremely large deformation does not occur. When an even number of slits are provided, it is preferable to arrange them symmetrically with respect to the center line 13A of the liquid supply port 13. When an odd number of slits are provided, one slit is arranged at the center line 13A of the liquid supply port 13 so that the center line of the slit coincides with the center line 13A of the liquid supply port 13, and the remaining slits are provided. It is preferable to arrange the liquid supply port 13 symmetrically with respect to the center line 13A.

さらに、吐出口形成部材7は第1の方向Xに交互に配置された第1のフィルタ18aと第2のフィルタ18bを有する。第1のフィルタ18aは液体供給口13と一部の圧力室10との間に位置する円柱状の構造体である。第2のフィルタ18bは圧力室10と対向する第1及び第3の梁16a,16cから他の圧力室10の前面まで延びる梁状の構造体である。第1のフィルタ18aと第2のフィルタ18bはいずれも圧力室10の前面に位置しており、圧力室10内部へのゴミ等の異物の流入を防止する。圧力室10から第1のフィルタ18aと第2のフィルタ18bまでの距離は同一である。第1のフィルタ18aは吐出口形成部材7の天井部19のみと接続されており、第1及び第3の梁16a,16cから独立ないし分離している。これに対し、第1のフィルタ18aは吐出口形成部材7の天井部19と接続されているだけでなく、第1の梁16aまたは第3の梁16cと一体化されている。このため、吐出口形成部材7全体の剛性が高められ、吐出口形成部材7の基板6からの剥離がさらに生じにくくなる。 Further, the discharge port forming member 7 has a first filter 18a and a second filter 18b alternately arranged in the first direction X. The first filter 18a is a columnar structure located between the liquid supply port 13 and a part of the pressure chamber 10. The second filter 18b is a beam-like structure extending from the first and third beams 16a and 16c facing the pressure chamber 10 to the front surface of the other pressure chamber 10. Both the first filter 18a and the second filter 18b are located in front of the pressure chamber 10 to prevent foreign matter such as dust from flowing into the pressure chamber 10. The distance from the pressure chamber 10 to the first filter 18a and the second filter 18b is the same. The first filter 18a is connected only to the ceiling portion 19 of the discharge port forming member 7, and is independent or separated from the first and third beams 16a and 16c. On the other hand, the first filter 18a is not only connected to the ceiling portion 19 of the discharge port forming member 7, but also integrated with the first beam 16a or the third beam 16c. Therefore, the rigidity of the entire discharge port forming member 7 is increased, and the discharge port forming member 7 is less likely to be peeled from the substrate 6.

インクは液体供給路12の液体供給口13と反対側の開口20から供給され、液体供給路12の液体供給口13を通って圧力室10に供給される。圧力室10内のエネルギー発生素子11を駆動することにより、圧力室10内に気泡が形成される。圧力室10内のインクは気泡によって吐出口8から吐出し、記録媒体に着弾し、画像形成が行われる。 The ink is supplied from the opening 20 on the side opposite to the liquid supply port 13 of the liquid supply path 12, and is supplied to the pressure chamber 10 through the liquid supply port 13 of the liquid supply path 12. By driving the energy generating element 11 in the pressure chamber 10, bubbles are formed in the pressure chamber 10. The ink in the pressure chamber 10 is ejected from the ejection port 8 by air bubbles and lands on the recording medium to form an image.

エネルギー発生素子11の駆動に伴い発生する熱や、吐出口形成部材7の膨潤などによって、基板6と吐出口形成部材7に変形が生じる場合がある。その際、基板6と吐出口形成部材7の接合面に、ある閾値以上の引っ張り応力やせん断応力が加わると、基板6に密着していた吐出口形成部材7が基板6から剥離する可能性がある。吐出口形成部材7の剥離が発生すると、最悪の場合圧力室10へインクが供給されなくなり、吐出不良を生じて記録画像の品位が悪化することがある。 The substrate 6 and the discharge port forming member 7 may be deformed due to the heat generated by driving the energy generating element 11 or the swelling of the discharge port forming member 7. At that time, if a tensile stress or a shear stress equal to or higher than a certain threshold is applied to the joint surface between the substrate 6 and the discharge port forming member 7, the discharge port forming member 7 that has been in close contact with the substrate 6 may be peeled off from the substrate 6. be. When the discharge port forming member 7 is peeled off, in the worst case, ink is not supplied to the pressure chamber 10, and ejection failure may occur and the quality of the recorded image may be deteriorated.

図4には、比較例1の液体吐出ヘッド1の図3と同様の図を示している。吐出口形成部材7の基板6からの剥離を防止するため、吐出口形成部材7の液体供給口13と対向する部位に第1の方向Xに延びる1本のスリット115が形成されている。吐出口形成部材7の変形をスリット115に逃がすことで、吐出口形成部材7の基板6との接合面における変形が抑えられ、吐出口形成部材7の基板6からの剥離が抑制される。しかし比較例1では、製造工程で吐出口形成部材7が硬化収縮した際に、変形により生じる応力がスリット115によって肉厚が減少した吐出口形成部材7の天井部19の薄肉部に集中し、クラックが生じる可能性がある。特に、長尺化された液体吐出ヘッド1など、記録素子基板2の変形がより大きくなる場合にこの現象が生じやすくなる。 FIG. 4 shows a diagram similar to that of FIG. 3 of the liquid discharge head 1 of Comparative Example 1. In order to prevent the discharge port forming member 7 from peeling from the substrate 6, one slit 115 extending in the first direction X is formed at a portion of the discharge port forming member 7 facing the liquid supply port 13. By letting the deformation of the discharge port forming member 7 escape to the slit 115, the deformation of the discharge port forming member 7 at the joint surface with the substrate 6 is suppressed, and the peeling of the discharge port forming member 7 from the substrate 6 is suppressed. However, in Comparative Example 1, when the discharge port forming member 7 is cured and contracted in the manufacturing process, the stress generated by the deformation is concentrated on the thin portion of the ceiling portion 19 of the discharge port forming member 7 whose wall thickness is reduced by the slit 115. Cracks may occur. In particular, this phenomenon is likely to occur when the deformation of the recording element substrate 2 becomes larger, such as the lengthened liquid discharge head 1.

図5には、比較例2の液体吐出ヘッド1の図3と同様の図を示している。比較例2は比較例1に対してスリット215の幅が拡大されている。このため、応力がスリット215内で分散されて緩和され、吐出口形成部材7のクラックが発生しにくい。しかし、吐出口形成部材7の薄肉部が拡大したため、吐出口形成部材7の剛性が低下し、応力が加わった際の変形量が大きくなる。すなわち、ユーザー使用環境において、エネルギー発生素子11の駆動による熱や、吐出口形成部材7の膨潤等が生じた際、吐出口形成部材7に大きな変形が生じやすくなる。その結果、比較例1よりも吐出口形成部材7の基板6からの剥離が発生しやすくなる可能性がある。 FIG. 5 shows a diagram similar to that of FIG. 3 of the liquid discharge head 1 of Comparative Example 2. In Comparative Example 2, the width of the slit 215 is expanded as compared with Comparative Example 1. Therefore, the stress is dispersed and relaxed in the slit 215, and cracks in the discharge port forming member 7 are unlikely to occur. However, since the thin portion of the discharge port forming member 7 is enlarged, the rigidity of the discharge port forming member 7 is reduced, and the amount of deformation when stress is applied is increased. That is, in the user's usage environment, when heat generated by driving the energy generating element 11 or swelling of the discharge port forming member 7 occurs, the discharge port forming member 7 is likely to be greatly deformed. As a result, the discharge port forming member 7 may be more easily peeled from the substrate 6 than in Comparative Example 1.

これに対し、図3に示す実施形態では、供給口対向部14に比較例1と同等の幅のスリットを2本設けている。スリットを2本設けたことにより、吐出口形成部材7が硬化収縮した際に吐出口形成部材7の天井部19の薄肉部に集中する応力が分散される。その結果、比較例1と比べて吐出口形成部材7の天井部19の薄肉部にクラックが生じにくくなる。供給口対向部14の薄肉部以外の部位は比較例1,2と同等の厚さが維持され、かつ複数のスリット15が分散配置されているため、吐出口形成部材7の剛性低下が抑制される。このため、吐出口形成部材7の基板6からの剥離も生じにくい。 On the other hand, in the embodiment shown in FIG. 3, two slits having the same width as that of Comparative Example 1 are provided in the supply port facing portion 14. By providing the two slits, the stress concentrated on the thin portion of the ceiling portion 19 of the discharge port forming member 7 is dispersed when the discharge port forming member 7 is cured and contracted. As a result, cracks are less likely to occur in the thin portion of the ceiling portion 19 of the discharge port forming member 7 as compared with Comparative Example 1. Since the portion of the supply port facing portion 14 other than the thin portion is maintained at the same thickness as in Comparative Examples 1 and 2 and the plurality of slits 15 are dispersedly arranged, the decrease in rigidity of the discharge port forming member 7 is suppressed. NS. Therefore, peeling of the discharge port forming member 7 from the substrate 6 is unlikely to occur.

このように、本実施形態の液体吐出ヘッドは、長尺の記録素子基板など、より変形しやすい記録素子基板で顕在化しやすいクラックと吐出口形成部材7の基板6からの剥離を、吐出口形成部材7の構成変更だけで抑制することができる。従って、本実施形態によれば、コストへの影響を抑えながら液体吐出ヘッドの信頼性を向上させることができる。 As described above, in the liquid discharge head of the present embodiment, cracks that are easily manifested in a recording element substrate that is more easily deformed, such as a long recording element substrate, and peeling of the discharge port forming member 7 from the substrate 6 are formed. It can be suppressed only by changing the configuration of the member 7. Therefore, according to the present embodiment, the reliability of the liquid discharge head can be improved while suppressing the influence on the cost.

(第2の実施形態)
図6には、第2の実施形態に係る液体吐出ヘッド1の図3と同様の図を示している。ここでは第1の実施形態と異なる点のみ説明する。本実施形態では、すべてのフィルタが上述した柱状の第1のフィルタ18aで構成されており、第2のフィルタ18bは設けられていない。本実施形態でも、吐出口形成部材7の供給口対向部14に第1の実施形態と同じ幅の2本のスリット15a,15bが設けられている。本実施形態でも、第1の実施形態同様、クラックと吐出口形成部材7の基板6からの剥離を抑制することができ、コストへの影響を防止しながら液体吐出ヘッド1の信頼性を向上させることができる。
(Second Embodiment)
FIG. 6 shows a diagram similar to that of FIG. 3 of the liquid discharge head 1 according to the second embodiment. Here, only the points different from the first embodiment will be described. In the present embodiment, all the filters are composed of the columnar first filter 18a described above, and the second filter 18b is not provided. Also in this embodiment, two slits 15a and 15b having the same width as those in the first embodiment are provided in the supply port facing portion 14 of the discharge port forming member 7. In the present embodiment as well, as in the first embodiment, cracks and peeling of the discharge port forming member 7 from the substrate 6 can be suppressed, and the reliability of the liquid discharge head 1 is improved while preventing an influence on the cost. be able to.

1 液体吐出ヘッド
6 基板
7 吐出口形成部材
8 吐出口
10 圧力室
11 エネルギー発生素子
13 液体供給口
15a,15b スリット
1 Liquid discharge head 6 Substrate 7 Discharge port forming member 8 Discharge port 10 Pressure chamber 11 Energy generating element 13 Liquid supply port 15a, 15b Slit

Claims (1)

基板と、
前記基板上に位置し感光性樹脂で形成された吐出口形成部材であって、第1の方向に配列し液体が吐出する複数の吐出口を備え、前記基板との間に、前記複数の吐出口と連通する複数の圧力室を形成する吐出口形成部材と、を有し
前記基板は、前記吐出口形成部材との対向面に位置し、前記第1の方向に延び、前記複数の圧力室と連通する液体供給口を有し、
前記吐出口形成部材は、前記液体供給口と対向する面を前記第1の方向に延びる2本のスリットを有し、前記2本のスリットは前記液体供給口の前記第1の方向に延びる中心線に関し線対称に設けられ、前記2本のスリット間の前記吐出口形成部材の厚みは、前記第1の方向に直交する第2の方向に関する前記吐出口形成部材の端部における当該吐出口形成部材の厚みと等しく、
前記第1の方向に延び前記スリットの側壁を形成する梁と、一部の前記圧力室の前面に位置し前記梁と分離された第1のフィルタと、前記梁から他の前記圧力室の前面まで延びる梁状の第2のフィルタと、を有する、液体吐出ヘッド。
With the board
A discharge port forming member located on the substrate and formed of a photosensitive resin, which is provided with a plurality of discharge ports arranged in a first direction to discharge a liquid, and the plurality of discharge ports are provided between the discharge port and the substrate. The substrate has a discharge port forming member forming a plurality of pressure chambers communicating with an outlet, and the substrate is located on a surface facing the discharge port forming member, extends in the first direction, and has the plurality of pressure chambers. Has a liquid supply port that communicates with
Center said discharge port forming member, have a two slits extending said liquid supply port and the surface opposed to said first direction, said two slits extending in the first direction of the liquid supply port The thickness of the discharge port forming member between the two slits, which is provided line-symmetrically with respect to the line, is such that the discharge port is formed at the end of the discharge port forming member in the second direction orthogonal to the first direction. Equal to the thickness of the member,
A beam extending in the first direction to form a side wall of the slit, a first filter located in front of a part of the pressure chamber and separated from the beam, and a front surface of another pressure chamber from the beam. a beam-like second filter extends to have a liquid discharge head.
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