JP6920038B2 - Loading platform - Google Patents

Description

The present invention relates to a platform used for a microscope or the like, and more particularly to a platform on which a sample or work to be observed or measured can be placed and moved in a horizontal plane.

Conventionally, as a mounting table used for a microscope or the like, an XY stage on which a sample to be observed or measured is placed and can be moved in a horizontal plane is known (see, for example, Patent Document 1).

Generally, the XY stage has a base, a first table arranged on the base, and a second table arranged on the first table. Between the base and the first table, a Y-axis guide is installed to guide the first table so as to be movable in the first direction (for example, the Y-axis direction) with respect to the base. A pair of X-axis guides that movably guide the second table in the second direction (for example, the X-axis direction) orthogonal to the first direction with respect to the first table are installed between them.

As the X-axis guide and the Y-axis guide, a guide mechanism such as a cross roller guide is used. For example, as an X-axis guide, a pair of cross-roller guides are installed along both side edges of the base and the first table in the X-axis direction. Further, as the Y-axis guide, a pair of cross roller guides are installed along both side edges of the first table and the second table in the Y-axis direction.

When a pair of cross roller guides are used for the X-axis guide and the Y-axis guide, each cross roller guide is given a preload in a direction orthogonal to the guide direction in order to guide the table to be guided without rattling. For example, in the X-axis guide between the first table and the second table, a preload is applied to each cross roller guide by pressing the first table and the second table with a pair of cross roller guides sandwiched between them. ..

In the loading platform, an auxiliary table having a movement axis different from the movement axis of the XY stage, such as a swivel table that can rotate around the X axis and the Z axis that intersects the Y axis, with respect to the XY stage as described above. Is known to be combined (see, for example, Patent Document 2).
When the XY stage and the auxiliary table are combined, the auxiliary table is usually supported on the upper surface of the second table arranged on the uppermost side of the XY stage. According to the platform having such a configuration, the sample can be moved in various directions in a plane for observation and measurement.

Japanese Unexamined Patent Publication No. 2010-247245 Japanese Unexamined Patent Publication No. 2011-145468

By the way, it is desired that the mounting table be made thinner in order to reduce the mounting height to a microscope or the like and to secure a viewing area of a sample.
However, when the XY stage having the layer structure of the plurality of tables as described above is thinned, the individual rigidity of the tables of each layer becomes low. In particular, the uppermost second table of the XY stage has a larger hole for the optical path than the other table, so that the rigidity of the second table is further reduced due to the thinning.

As described above, in the X-axis guide between the first table and the second table, the first table and the second table are pressed against each other with the pair of cross roller guides sandwiched between them, thereby preloading each cross roller guide. Giving. Here, a force in the direction in which the pair of cross roller guides are separated from each other or brought close to each other is applied to the second table as a reaction force of the preload, and bending stress is generated.
Therefore, when the rigidity of the second table becomes low, the second table is deformed so that its upper surface becomes concave or convex. Since the auxiliary table is installed on the upper surface of the second table, if the bending deformation becomes remarkable, a part of the second table may push up the auxiliary table from the desired position and displace it unnecessarily. be.

Further, the bending deformation of the second table as described above fluctuates according to the relative position of the second table in the X-axis direction with respect to the first table, which causes the flatness of the auxiliary table to fluctuate. ..
That is, the bending deformation of the second table described above is due to the force received from the first table via the X-axis guide. Therefore, when the second table moves in the X-axis direction and a part of the second table protrudes from the first table, the force from the first table is not applied to the protruding portion, and bending deformation does not occur.
Therefore, in the second table, bending deformation occurs at a portion overlapping with the first table, and bending deformation is eliminated at a portion protruding from the first table. That is, the bending deformation that occurs in the second table fluctuates according to the relative position of the second table in the X-axis direction with respect to the first table.

Due to such fluctuations in bending deformation according to the position of the second table in the X-axis direction, when the second table moves in the X-axis direction, one side of the second table (remains in a state of overlapping with the first table). Only the side) is deformed into a concave or convex shape as described above, and the auxiliary table is pushed up or unnecessarily displaced. At this time, since only one side (the side supported by the deformed portion of the second table) of the auxiliary table is pushed up, the auxiliary table may be tilted with respect to the XY plane, which may affect the measurement result.

Further, when the second table moves in the X-axis direction, the range of bending deformation of the second table changes, so that the range in which the auxiliary table is pushed up also changes. As a result, the height of the sample installation surface of the auxiliary table fluctuates, which may affect the measurement result.

Therefore, if the XY stage is simply thinned, an error may occur in the horizontality and height position of the sample installation surface of the auxiliary table, and this error fluctuates with the movement of the second table and is not stable. The problem arises. As a result, the position accuracy of the sample is lowered, and the reliability of the measurement by the microscope is lowered.

An object of the present invention is to provide a mounting table that can be made thinner while ensuring the position accuracy of the sample mounting surface of the auxiliary table.

The loading platform of the present invention has a holding member, a moving member supported on the upper surface of the holding member and movable along the upper surface, and a pair of moving members installed in parallel on the lower surface of the holding member and separated from each other. It has a guide member that is preloaded so that a force in the direction of the force is applied to the holding member, and the holding member is arranged on the upper surface along the pair of the guide members and abuts on the moving member. It is characterized by having a contact portion and an offset portion arranged in a region outside the contact portion on the upper surface in the direction of the preload and formed lower than the contact portion, respectively.

In the present invention, the holding member is movably supported by a platform base or the like via a pair of guide members. Since the pair of guide members installed on the holding member is preloaded, the pair of guide members can guide the holding member without rattling.
Here, by applying a force in the direction of separating from each other as a preload to the pair of guide members, bending stress (tension on the lower surface side of the holding member and compression on the upper surface side) due to the preload of the pair of guide members is applied to the holding member. Bending stress) is generated. Therefore, if the rigidity of the holding member is lowered due to thinning or the like, the holding member may be deformed so that its upper surface becomes concave and interferes with the moving member.
However, in the present invention, the holding member is formed with a pair of abutting portions and a pair of offset portions, which can prevent interference or influence on the moving member due to bending deformation of the holding member.

In a state where the holding member is not bent and deformed, a region on the upper surface of the holding member at the same height as the contact portion (including the contact portion and not including the offset portion) is in contact with the lower surface of the moving member over the entire surface. , Can support this.
When the holding member is bent and deformed, a preload is applied to the lower surface side of the holding member in a direction in which the pair of guide members are separated from each other. (Both ends in the direction of preload) rise. In this state, the holding member can come into contact with and support the lower surface of the moving member with only a pair of contact portions.
That is, offset portions are formed at both ends of the holding member, and the offset portions are formed lower than other regions on the upper surface of the holding member. Therefore, even if both ends of the holding member are raised, it is possible to avoid contact with the lower surface of the moving member.

Further, since the pair of contact portions that support the moving member are arranged along the pair of guide members, even in a state where the intermediate portion sinks in the holding member and both ends are raised, the original There is no or little change in height from the state of.
Therefore, regardless of whether or not the holding member is deformed, the displacement of the moving member supported by the contact portion in the vertical direction can be suppressed, and the influence on the moving member can be prevented.

As described above, according to the present invention, even if the holding member undergoes bending deformation and the bending deformation fluctuates according to the guide direction position of the holding member, the horizontality and height position of the moving member are kept stable. Can be done. Further, by using the holding member and the moving member of the present invention as the second table and the auxiliary table as described above, the position accuracy of the sample installation surface of the auxiliary table can be ensured.
Therefore, according to the present invention, it is possible to provide a mounting table that can be made thinner while ensuring the position accuracy of the sample installation surface of the auxiliary table.

In the loading platform of the present invention, it is preferable that the pair of the contact portions are arranged at positions directly above the pair of the guide members.
In this configuration, in the state where the holding member is bent and deformed, the height of the pair of abutting portions has the least variation from the original state due to its arrangement. Therefore, the vertical displacement of the moving member supported by the pair of abutting portions can be further suppressed.

In the mounting table of the present invention, the holding member is formed with a pair of recesses lower than the intermediate portion on the outside of the intermediate portion in the preload direction, and the offset portion is formed by the recesses. The contact portion may be formed in a stepped portion between the recessed portion and the intermediate portion in the holding member.

The loading platform of the present invention has a holding member, a moving member supported on the upper surface of the holding member and movable along the upper surface, and a pair of moving members installed in parallel on the lower surface of the holding member and close to each other. It has a guide member that is preloaded so that a directional force is applied to the holding member, and the holding member is arranged on the upper surface of the holding member along the pair of the guide members and abuts on the moving member. It is characterized by having a contact portion and an offset portion arranged in a region inside the pair of contact portions on the upper surface and formed lower than the contact portion.

In the present invention, the holding member is movably supported by the base of the mounting table or the like via the pair of guide members, as in the above-described invention (the preload of the pair of guide members is in the direction of separating from each other). NS. Since the pair of guide members installed on the holding member is preloaded, the pair of guide members can guide the holding member without rattling.
Here, as a preload, a force in a direction close to each other is applied to the pair of guide members, so that the holding member is subjected to bending stress (compression on the lower surface side of the holding member and tension on the upper surface side) due to the preload of the pair of guide members. Bending stress) is generated. Therefore, if the rigidity of the holding member is lowered due to thinning or the like, the holding member may be deformed so that its upper surface becomes convex and may interfere with the moving member.
However, in the present invention, a pair of contact portions and offset portions are formed on the holding member, which can prevent interference or influence on the moving member due to bending deformation of the holding member.

In a state where the holding member is not bent and deformed, a region on the upper surface of the holding member at the same height as the contact portion (including the contact portion and not including the offset portion) is in contact with the lower surface of the moving member over the entire surface. , Can support this.
When the holding member is bent and deformed, a preload is applied to the lower surface side of the holding member in a direction in which the pair of guide members are close to each other. (Both ends in the direction of preload) sinks. In this state, the holding member can come into contact with and support the lower surface of the moving member with only a pair of contact portions.
That is, an offset portion is formed in the intermediate portion of the holding member, and this offset portion is formed lower than other regions on the upper surface of the holding member. Therefore, even if the intermediate portion of the holding member is raised, it is possible to avoid contact with the lower surface of the moving member.

Further, since the pair of abutting portions that support the moving member are arranged along the pair of guide members, even in a state where the holding member has a bending deformation in which the intermediate portion rises and both ends sink. There is no or little change in height from the state of.
Therefore, regardless of whether or not the holding member is deformed, the displacement of the moving member supported by the contact portion in the vertical direction can be suppressed, and the influence on the moving member can be prevented.

As described above, according to the present invention, even if the holding member undergoes bending deformation and the bending deformation fluctuates according to the guide direction position of the holding member, the horizontality and height position of the moving member are kept stable. Can be done. Further, by using the holding member and the moving member of the present invention as the second table and the auxiliary table as described above, the position accuracy of the sample installation surface of the auxiliary table can be ensured.
Therefore, according to the present invention, it is possible to provide a mounting table that can be made thinner while ensuring the position accuracy of the sample installation surface of the auxiliary table.

In the mounting table of the present invention (the preload of the pair of guide members is in a direction in which the preloads are separated from each other), it is preferable that the pair of the contact portions are arranged at positions directly above the pair of the guide members.
In this configuration, in the state where the holding member is bent and deformed, the height of the pair of abutting portions has the least variation from the original state due to its arrangement. Therefore, the vertical displacement of the moving member supported by the pair of abutting portions can be further suppressed.

In the mounting table of the present invention (in which the preload by the pair of guide members is in the direction of separating from each other), the holding member has a pair of protrusions that are higher than the intermediate portion in the direction of the preload and are higher than the intermediate portion. A portion may be formed, the offset portion may be formed by the intermediate portion, and the contact portion may be formed at a step portion between the convex portion and the intermediate portion in the holding member.

According to the present invention, it is possible to provide a mounting table that can be made thinner while ensuring the position accuracy of the sample installation surface of the auxiliary table.

The perspective view which shows the microscope which has the platform of 1st Embodiment of this invention. The exploded perspective view which shows the loading platform of the 1st Embodiment. The perspective view which shows the 1st table and the 2nd table of the 1st Embodiment. FIG. 3 is a cross-sectional view taken along the line S1 of FIG. A partial cross-sectional view showing the vicinity of the guide member of FIG. 4 in an enlarged manner. The perspective view which shows the 1st table and the 2nd table of an existing structure. FIG. 6 is a cross-sectional view taken along the line S2 of FIG. A partial cross-sectional view showing the vicinity of the guide member of FIG. 7 in an enlarged manner. FIG. 2 is a cross-sectional view showing a part of a loading platform according to a second embodiment of the present invention. The partial side view which shows the contact part and the offset part of the 3rd Embodiment of this invention. The partial side view which shows the contact part and the offset part of 4th Embodiment of this invention. The partial side view which shows the contact part and the offset part of the 5th Embodiment of this invention.

Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
In FIG. 1, the loading platform 10 of the first embodiment is attached to the microscope main body 100 and used as a part of the microscope 110. The microscope main body 100 includes a pedestal 111 on which the mounting table 10 is installed, an optical device (not shown) that irradiates light on the sample mounted on the mounting table 10 from below, an objective lens, and a light from the sample. It includes an optical system 113 that receives light through an image lens and forms an image of a sample, a power transmission mechanism 114 for moving the optical system 113 up and down, and the like.

In FIG. 2, the loading platform 10 includes a base 1, a first table 2, a second table 3 as a holding member, and a swivel table 4 as a moving member in this order. Further, the loading platform 10 has a Y-axis guide 5 arranged between the base 1 and the first table 2 and an X-axis guide 6 arranged between the first table 2 and the second table 3. Be prepared.

The base 1 is a metal plate-like member having a through hole 11 for an optical path in an intermediate portion thereof. The base 1 is fixed to the pedestal 111 of the microscope main body 100. A pair of guide mounting portions 13 are formed on the upper surface 12 of the base 1 so as to project upward on both side edges in the X-axis direction. The pair of guide mounting portions 13 extend continuously in parallel with each other along the Y-axis direction.

The first table 2 is a metal plate-shaped member having a through hole 21 for an optical path in the intermediate portion thereof, and is arranged on the upper surface 12 side of the base 1. The through hole 21 is formed larger than the through hole 11.

On the lower surface 22 of the first table 2, a pair of guide mounting portions 23 are formed so as to project downward on both side edges in the X-axis direction. The pair of guide mounting portions 23 extend continuously in parallel with each other along the Y-axis direction. Here, the pair of guide mounting portions 23 of the first table 2 are arranged so as to sandwich the pair of guide mounting portions 13 of the base 1 from the outside in the X-axis direction.

Further, on the upper surface 24 of the first table 2, a pair of guide mounting portions 25 are formed so as to project upward on both side edges in the Y-axis direction. The pair of guide mounting portions 25 extend continuously in parallel with each other along the X-axis direction.

The second table 3 is a holding member of the present invention. The second table 3 is a metal plate-shaped member having a through hole 31 for an optical path in the intermediate portion thereof, and is arranged on the upper surface 24 side of the first table 2. The through hole 31 is formed larger than the through hole 21. Therefore, the second table 3 has a lower rigidity than the first table 2.

On the lower surface 32 of the second table 3, a pair of guide mounting portions 33 are formed so as to project downward on both side edges in the Y-axis direction. The pair of guide mounting portions 33 extend continuously in parallel with each other along the X-axis direction. Here, the pair of guide mounting portions 33 of the second table 3 are arranged so as to sandwich the pair of guide mounting portions 25 of the first table 2 from the outside in the Y-axis direction.

The swivel table 4 is a moving member of the present invention and is used as an auxiliary table to be combined with the XY stage by the first table 2 and the second table 3. Specifically, the swivel table 4 is supported on the upper surface 34 of the second table 3, and can rotate along the upper surface 34 about an axis R provided at an arbitrary position of the second table 3. Is. Further, the swivel table 4 includes a metal frame member 41 and a mounting glass 42 fixed inside the frame member 41. The upper surface of the mounting glass 42 is a sample setting surface 44 on which the sample is placed.

The Y-axis guide 5 is composed of a pair of guide members 50. The pair of guide members 50 are arranged parallel to each other along the Y-axis direction between the base 1 and the first table 2, bear the load of the first table 2, and are first with respect to the base 1. The table 2 is guided so as to be movable in the Y-axis direction.
The guide member 50 is, for example, a cross roller guide, and has a set of two rails 51 and 52 and a roller 53 as a plurality of rolling elements interposed between the rails 51 and 52. Of these two rails 51 and 52, one rail 51 is fixed to the guide mounting portion 13 of the base 1, and the other rail 52 is fixed to the guide mounting portion 23 of the first table 2.

In order for the Y-axis guide 5 to guide the first table 2 without rattling, each of the pair of guide members 50 is given a preload in the X-axis direction orthogonal to the guide direction. Specifically, the guide mounting portion 13 of the base 1 and the guide mounting portion 23 of the first table 2 are pressed against each other with the guide member 50 sandwiched between them, so that the guide member 50 is preloaded.

The X-axis guide 6 is composed of a pair of guide members 60. The pair of guide members 60 are arranged parallel to each other along the X-axis direction between the first table 2 and the second table 3, bear the load of the second table 3, and are placed on the first table 2. On the other hand, the second table 3 is guided so as to be movable in the X-axis direction.
The guide member 60 is, for example, a cross roller guide, and has a set of two rails 61 and 62 and a plurality of rollers 63 interposed between the rails 61 and 62. Of these two rails 61 and 62, one rail 61 is fixed to the guide mounting portion 25 of the first table 2, and the other rail 62 is fixed to the guide mounting portion 33 of the second table 3.

In order for the X-axis guide 6 to guide the second table 3 without rattling, each of the pair of guide members 60 is given a preload in the Y-axis direction orthogonal to the guide direction. Specifically, the guide mounting portion 25 of the first table 2 and the guide mounting portion 33 of the second table 3 are pressed against each other with the guide member 60 sandwiched between them, whereby the guide member 60 is preloaded.

The detailed configuration of the second table 3 will be described with reference to FIGS. 3 and 4. In FIG. 3, the through hole 31 formed in the second table 3 is not shown.

In the second table 3, a pair of recesses 350 are formed at both ends 340 in the Y-axis direction on the upper surface 34. The pair of recesses 350 extend along the X-axis direction and are arranged parallel to each other.

On the upper surface 34 of the second table 3, the inner portion of the pair of recesses 350 is designated as the intermediate portion 341. The recess 350 is formed lower than the intermediate portion 341. The edge 342 (the stepped portion between the intermediate portion 341 and the recess 350) adjacent to the recess 350 in the intermediate portion 341 is a pair of contact portions 36 that abut the swivel table 4 before and after the bending deformation of the second table 3, which will be described later. To form. The pair of abutting portions 36 are respectively arranged directly above the guide member 60, more specifically, directly above the roller 63.
Further, in the second table 3, the pair of recesses 350 form a pair of offset portions 37 formed lower than the pair of contact portions 36.

[Bending deformation of the first embodiment]
The bending deformation of the second table 3 in the present embodiment will be described with reference to FIGS. 3 to 5.
In FIG. 5, the state before the second table 3 is bent and deformed is shown by a two-dot chain line, and the state after the bent and deformed is shown by a solid line, and hatching is omitted.

As described above, the pair of guide members 60 are preloaded between the first table 2 and the second table 3. Here, the first table 2 preloads the pair of guide members 60 in a direction that separates them from each other. Therefore, a force P1 in the direction in which the pair of guide members 60 are separated from each other is applied to the lower side where the pair of guide members 60 are installed in the second table. As a result, the second table 3 is subjected to bending stress in which the lower surface 32 side is pulled and the upper surface 34 side is compressed.

Further, as described above, the second table 3 has a lower rigidity than the first table 2 because the through hole 31 larger than the through hole 21 of the first table 2 is formed. When the rigidity of the second table 3 is further reduced due to the thinning, the second table 3 is deformed so that the upper surface 34 thereof becomes concave due to the bending stress generated by the preload of the pair of guide members 60.

For example, as shown by the alternate long and short dash line in FIG. 5, the upper surface 34 of the second table 3 (including the contact portion 36 and not including the offset portion 37) is in a state where the second table 3 is not bent and deformed. It is flat. In this state, the upper surface 34 of the second table 3 contacts and supports the lower surface 43 of the swivel table 4 over the entire surface.

Further, as shown by solid lines in FIGS. 4 and 5, when the second table 3 is bent and deformed, the intermediate portion 341 of the second table 3 sinks, and both ends of the second table 3 in the Y-axis direction. 340 rises. In this state, only the pair of contact portions 36 of the second table 3 come into contact with and support the lower surface 43 of the swivel table 4.

Such bending deformation of the second table 3 varies depending on the relative position of the second table 3 in the X-axis direction with respect to the first table 2.
That is, the bending deformation of the second table 3 is due to the force received from the first table 2 via the X-axis guide 6. Therefore, as shown in FIG. 3, when the second table 3 moves in the X-axis direction and a part of the second table 3 protrudes from the first table 2, the portion A2 protruding from the second table 3 includes the first table. The force from 2 is not applied, and bending deformation does not occur.

Therefore, in the second table 3, bending deformation occurs in the portion A1 overlapping with the first table 2, and bending deformation is eliminated in the portion A2 protruding from the first table 2. That is, the bending deformation that occurs in the second table 3 fluctuates according to the relative position of the second table 3 in the X-axis direction with respect to the first table 2.

However, in the present embodiment, since the contact portion 36 and the offset portion 37 based on the present invention are formed in the second table 3, the influence of the bending deformation of the second table 3 can be avoided. By avoiding the influence of bending deformation, it is possible to provide a mounting table 10 that can be made thinner while ensuring the positional accuracy of the sample installation surface 44 of the swivel table 4.

6 to 8 show a mounting table 10P which has the same basic configuration as the present embodiment but does not have the contact portion 36 and the offset portion 37 formed according to the present invention in the second table 3.
6 to 8, the loading platform 10P has the same configuration as that of the present embodiment except that the second table 103 does not have the recess 350 (contact portion 36 and offset portion 37). The same components as those in the embodiment are designated by the same reference numerals. Further, in FIG. 8, the state before the second table 103 is bent and deformed is shown by a two-dot chain line, and the state after the bent and deformed is shown in the actual battle, and hatching is omitted.

As shown in FIGS. 7 and 8, in the loading platform 10P, when the upper surface 134 of the second table 103 is bent and deformed so that the upper surface 134 becomes concave, both ends 137 of the second table 103 in the Y-axis direction are raised and the swivel. Push table 4 up from the desired position. As a result, the sample installation surface 44 of the swivel table 4 is unnecessarily displaced.

Further, in the loading platform 10P, as shown in FIG. 6, when the second table 103 moves in the X-axis direction, one side of the second table 103 (the portion A1 overlapping the first table 2) causes the swivel table 4 to move. Push up, and the other side (part A2 protruding from the first table 2) does not push up the swivel table 4. Therefore, since only one side of the swivel table 4 is pushed up, the swivel table 4 is tilted with respect to the XY plane.
Further, when the second table 103 moves in the X-axis direction, the range in which the swivel table 4 is pushed up also changes due to the change in the bending deformation range of the second table 103. As a result, the height of the sample installation surface 44 of the swivel table 4 fluctuates.

On the other hand, in the present embodiment, since the offset portion 37 and the contact portion 36 based on the present invention are formed in the second table 3, such fluctuations in displacement, inclination and height can be avoided in advance. Can be done.
Referring to FIGS. 4 and 5 again, offset portions 37 are formed at both end portions 340 in the Y-axis direction of the second table 3, and the offset portions 37 are formed lower than the abutting portions 36 of the second table 3. Has been done.
Therefore, as described above, even if the second table 3 is bent and deformed and both end portions 340 of the second table 3 in the Y-axis direction are raised, the both end portions 340 come into contact with the lower surface 43 of the swivel table 4. That can be avoided.

Further, in the bending deformation of the second table 3, the intermediate portion 341, which is a region inside the pair of guide members 60, changes the height in the direction (preload direction) orthogonal to the arrangement direction of the guide members 60. It sinks and both ends 340 in the Y-axis direction, which is a region outside the pair of guide members 60, rise. Here, since the pair of abutting portions 36 are arranged along the pair of guide members 60, the height from the original state is the same even when the second table 3 is bent and deformed as described above. There is no or little fluctuation.
Therefore, regardless of whether or not the second table 3 is bent and deformed, the vertical displacement of the swivel table 4 supported by the contact portion 36 can be suppressed, and the influence on the swivel table 4 can be prevented. can.

Further, as described above, since the interference or influence on the swivel table 4 due to the bending deformation of the second table 3 is prevented, the bending deformation of the second table 3 is the position in the X-axis direction with respect to the first table 2. The horizontality and height position of the sample installation surface 44 of the swivel table 4 are kept stable even if it fluctuates according to the above.

[Effect of the first embodiment]
According to the above-described embodiment, the following effects can be obtained.
As described above, in the configuration without the offset portion 37 and the contact portion 36, the measurement result may be affected by interference or influence on the swivel table 4 due to the bending deformation of the second table 103. be.
On the other hand, in the mounting table 10 of the present embodiment, even if the second table 103 is bent and deformed as described above, interference or influence on the swivel table 4 is prevented. Therefore, according to the mounting table 10 of the present embodiment, the thickness can be reduced while ensuring the positional accuracy of the sample installation surface 44 of the swivel table 4.

Further, in the present embodiment, the pair of contact portions 36 are arranged directly above the pair of guide members 60. Therefore, in the state where the bending deformation of the second table 3 occurs, the height of the pair of abutting portions 36 fluctuates the least from the original state due to the arrangement thereof. Therefore, the vertical displacement of the swivel table 4 supported by the pair of contact portions 36 can be further suppressed.

Further, in the present embodiment, the offset portion 37 is formed by the recess 350 formed in the second table 3, and the contact portion 36 is formed at the step portion between the recess 350 and the intermediate portion 341. Therefore, the offset portion 37 and the contact portion 36 can be easily formed.

[Second Embodiment]
The loading platform 10A of the second embodiment of the present invention will be described with reference to FIG. Note that FIG. 9 is a diagram corresponding to FIG. 4 of the first embodiment, and shows a state in which bending deformation occurs in the second table 3.
In the second embodiment, the arrangement relationship between the contact portion 36A and the offset portion 37A and the direction of the force P2 applied to the second table 3 are different from those in the first embodiment, and the other configurations are the same as those in the first embodiment. be. In the second embodiment, the same components as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

In the second table 3 of the second embodiment, a pair of convex portions 351 are formed on both end portions 340 in the Y-axis direction on the upper surface 34. The pair of convex portions 351 extend along the X-axis direction and are arranged parallel to each other.

On the upper surface 34 of the second table 3, the region inside the pair of convex portions 351 is designated as the intermediate portion 343. The convex portion 351 is formed higher than the intermediate portion 343. In addition, in the second table 3, it may be said that the intermediate portion 343 forms a recess lower than the outer side thereof.

The side edges 344 (the stepped portion between the convex portion 351 and the intermediate portion 343) on the inner side of the pair of convex portions 351 in the Y-axis direction come into contact with the swivel table 4 before and after the bending deformation of the second table 3, which will be described later. The contact portion 36A is formed. The pair of contact portions 36A are respectively arranged directly above the guide member 60 of the guide member 60, and more specifically, directly above the roller 63.
Further, on the upper surface 34 of the second table 3, the intermediate portion 343, which is a region inside the pair of convex portions 351, forms an offset portion 37A formed lower than the pair of abutting portions 36A.

Further, in the second embodiment, the pair of guide mounting portions 251 of the first table 2 are arranged so as to sandwich the pair of guide mounting portions 331 of the second table 3 from the outside in the Y-axis direction.
Therefore, the first table 2 preloads the pair of guide members 60 in the directions close to each other. Therefore, a force P2 in the direction in which the pair of guide members 60 are close to each other is applied to the lower side where the pair of guide members 60 are installed in the second table 3. As a result, the second table 3 is subjected to bending stress in which the lower surface 32 side is compressed and the upper surface 34 side is tensioned.
Therefore, when the rigidity of the second table 3 is reduced due to thinning or the like, the upper surface 34 of the second table 3 is deformed so as to be convex due to the bending stress generated by the preload of the pair of guide members 60.

For example, in a state where the second table 3 is not bent and deformed, the upper surfaces (including the pair of abutting portions 36A) of the pair of convex portions 351 of the second table 3 are flat. In this state, the upper surface of the convex portion 351 contacts and supports the lower surface 43 of the swivel table 4 over the entire surface.

Further, in a state where the second table 3 is bent and deformed, the intermediate portion 343 of the second table 3 rises, and both end portions 340 of the second table 3 in the Y-axis direction sink. In this state, the second table 3 contacts and supports the lower surface 43 of the swivel table 4 with only a pair of contact portions 36A.

Therefore, in the second embodiment, the contact portion 36A and the offset portion 37A based on the present invention are formed on the second table 3.
Specifically, an offset portion 37A is formed in the intermediate portion 343 of the second table 3, and the offset portion 37A is formed lower than the contact portion 36A. Therefore, even if the intermediate portion 343 of the second table 3 is raised due to the bending deformation of the second table 3, it is possible to prevent the intermediate portion 343 from coming into contact with the lower surface 43 of the swivel table 4.

Further, in the bending deformation of the second table 3, the intermediate portion 343, which is a region inside the pair of guide members 60, changes the height in the direction orthogonal to the guide direction (preload direction) of the guide member 60. It rises and both ends 340 in the Y-axis direction, which is a region outside the pair of guide members 60, sink. Here, since the pair of abutting portions 36A are arranged along the pair of guide members 60, the height from the original state is the same even when the second table 3 is bent and deformed as described above. There is no or little fluctuation.
Therefore, regardless of whether or not the second table 3 is bent and deformed, the vertical displacement of the swivel table 4 supported by the contact portion 36A can be suppressed, and the influence on the swivel table 4 can be prevented. can.

Further, since the interference or influence on the swivel table 4 due to the bending deformation of the second table 3 is prevented, the bending deformation of the second table 3 fluctuates according to the position in the X-axis direction with respect to the first table 2. Even so, the horizontality and height position of the sample installation surface 44 of the swivel table 4 are kept stable.

Therefore, according to the loading platform 10A of the second embodiment, the thickness can be reduced while ensuring the positional accuracy of the sample installation surface 44 of the swivel table 4 as in the first embodiment.

[Other Embodiments]
The present invention is not limited to each of the above embodiments, and includes the modifications shown below to the extent that the object of the present invention can be achieved.
In the first and second embodiments, recesses 350 are formed on the upper surface 34 of the second table 3, respectively, and the contact portions 36, 36A and the offset portions 37, 37A are formed by utilizing the stepped shape.
However, the contact portion and the offset portion of the present invention may utilize other shapes formed on the upper surface 34 of the second table 3.

As a third embodiment of the present invention, as shown in FIG. 10, the upper surface 34 of the second table 3 may have a notch 352 formed in place of the recess 350 of the first embodiment. In this configuration, the edge 345 adjacent to the notch 352 of the upper surface 34 constitutes the contact portion 36B that abuts on the swivel table 4 before and after the bending deformation of the second table 3. Further, the notch 352 constitutes an offset portion 37B formed lower than the contact portion 36B. The inclined surface exhibited by the notch 352 may have a planar shape or a curved surface shape.
According to such a configuration, as shown by the alternate long and short dash line in FIG. 10, even if the upper surface 34 of the second table 3 is deformed so as to be concave, the second table 3 suppresses the swivel table 4 from being pushed up. can.

As a fourth embodiment of the present invention, as shown in FIG. 11, the upper surface 34 of the second table 3 may have a convex portion 353 formed in place of the concave portion 350 of the first embodiment. The convex portion 353 has a curved surface that curves in the Y-axis direction, and extends continuously or intermittently along the X-axis direction.
As a fifth embodiment of the present invention, as shown in FIG. 12, the upper surface 34 of the second table 3 may have a convex portion 354 formed in place of the concave portion 350 of the first embodiment. The convex portion 354 has a tapered shape and extends continuously or intermittently along the X-axis direction.

In the fourth and fifth embodiments, a part of the convex portions 353 and 354 forms contact portions 36C and 36D that come into contact with the swivel table 4 before and after the bending deformation of the second table 3. Further, the region of the upper surface 34 of the second table 3 outside the convex portions 353 and 354 in the Y-axis direction forms the offset portions 37C and 37D formed lower than the contact portions 36C and 36D.
According to such a configuration, when the upper surface 34 of the second table 3 is deformed so as to be concave as shown by the alternate long and short dash line in FIGS. 11 and 12, the second table 3 pushes up the swivel table 4. Can be suppressed.

In the fourth embodiment and the fifth embodiment, the convex portions 353 and 354 formed on the upper surface 34 of the second table 3 are replaced with the convex portions 351 of the second embodiment instead of the concave portions 350 of the first embodiment. It may be formed. In this case, a part of the convex portions 353 and 354 forms the contact portions 36E and 36F. Further, the inner region of the upper surface 34 of the second table 3 in the Y-axis direction with respect to the pair of convex portions 353 and 354 constitutes the offset portions 37E and 37F formed to be lower than the contact portions 36E and 36F. (See dotted line in FIG. 11 or 12).

The moving member of the present invention is not limited to the swivel table 4 as in each embodiment, and various auxiliary tables can be used. For example, the moving member of the present invention may be an auxiliary table that moves along a moving axis different from the X-axis and the Y-axis in the XY plane.
The guide member of the present invention is not limited to the cross roller guide, and various other types of linear guides and the like can be used.

The platform of the present invention is not limited to a configuration that moves in both the X-axis direction and the Y-axis direction, and may be a configuration that moves in either one direction. For example, in the loading platform 10 of the first embodiment, the X-axis guide 6 and the second table 3 may be omitted, and the first table 2 may be configured to support the swivel table 4. In this case, the pair of guide members of the present invention are the pair of guide members 50 constituting the Y-axis guide 5, and the holding member of the present invention is the first table 2.

The present invention can be used as a platform on which a sample such as a microscope is placed and can move in a horizontal plane.

1 ... base, 2 ... 1st table, 3 ... second table which is a holding member, 4 ... swivel table which is a moving member, 5 ... Y-axis guide, 6 ... X-axis guide, 10, 10A ... loading platform, 34 ... upper surface, 44 ... sample installation surface, 50, 60 ... guide member, 36, 36A to 36F ... contact portion, 37, 37A to 37F ... offset portion, 350 ... concave portion, 351 ... convex portion.

Claims (6)

Holding member and
A moving member that will be supported on the upper surface of the holding member,
A pair of guide members are installed in parallel on the lower surface of the holding member, and a guide member is preloaded so that a force in a direction separating the holding members is applied to the holding member.
Have,
The holding member is
A pair of abutting portions arranged on the upper surface along the pair of guide members and abutting on the moving member,
An offset portion arranged in a region outside the preload direction of the pair of contact portions on the upper surface and formed lower than the contact portion, respectively.
Have a,
The loading platform is characterized in that the moving member is movable with respect to the pair of abutting portions along the upper surface of the holding member. In the loading platform according to claim 1,
A loading platform characterized in that the pair of the contact portions are arranged at positions directly above the pair of the guide members. In the loading platform according to claim 1 or 2.
The holding member is formed with a pair of recesses lower than the intermediate portion on the outside of the intermediate portion in the preload direction, and the offset portion is formed by the recesses.
A mounting table characterized in that the abutting portion is formed in a stepped portion between the recessed portion and the intermediate portion in the holding member. Holding member and
A moving member that is supported on the upper surface of the holding member and can move along the upper surface.
A pair of guide members are installed in parallel on the lower surface of the holding member, and a guide member is preloaded so that a force in a direction close to each other is applied to the holding member.
Have,
The holding member is
A pair of abutting portions arranged on the upper surface along the pair of guide members and abutting on the moving member,
An offset portion arranged in a region inside the pair of contact portions on the upper surface and formed lower than the contact portion.
A loading platform characterized by having. In the loading platform according to claim 4.
A loading platform characterized in that the pair of the contact portions are arranged at positions directly above the pair of the guide members. In the platform according to claim 4 or 5.
The holding member is formed with a pair of convex portions higher than the intermediate portion on the outside of the intermediate portion in the preload direction, and the offset portion is formed by the intermediate portion.
A mounting table characterized in that the contact portion is formed at a step portion between the convex portion and the intermediate portion of the holding member.

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