JP6922227B2 - Polymer actuator and its manufacturing method - Google Patents

Description

The present invention relates to a polymer actuator and a method for manufacturing the same.

Conventionally, a polymer actuator including an electrolyte layer containing a polymer and an ionic liquid and two electrode layers facing each other with the electrolyte layer interposed therebetween has been proposed. When a potential difference is generated between the two electrode layers, the cations contained in the ionic liquid move to the negative electrode layer, and the anions move to the positive electrode layer. Then, each electrode layer expands according to the amount of ions that have entered. As a result, the polymer actuator is deformed.

Regarding such a polymer actuator, for example, Patent Document 1 proposes a polymer actuator in which a porous polymer fiber is contained in an electrode layer. The polymer fibers contain a conductive material, and the conductivity of the electrode layer is ensured by the plurality of polymer fibers coming into contact with each other. Then, the amount of deformation of the electrode layer is increased by allowing ions to enter the voids between the polymer fibers and the pores in the polymer fibers.

Japanese Unexamined Patent Publication No. 2011-12509

However, in the polymer actuator described in Patent Document 1, the conductivity of the electrode layer is ensured by the plurality of polymer fibers coming into contact with each other. Therefore, when ions move by applying a voltage to the electrode layer and enter between the polymer fibers, the plurality of polymer fibers are separated from each other, and the conductivity of the electrode layer is lowered. This also reduces the displacement rate.

In view of the above points, it is an object of the present invention to provide a polymer actuator that suppresses a decrease in conductivity of an electrode layer and a method for manufacturing the same.

In order to achieve the above object, in the invention according to claim 1, the electrolyte layer (13) having a mixture (14) of an ionic liquid (14b) and a polymer (14a) is arranged on one side of the electrolyte layer. The first electrode layer (11) and the second electrode layer (12) arranged on the other surface side of the electrolyte layer are provided, and the first electrode layer and the second electrode layer are a mixture and a conductor (11a). , 12a), and at least one of the first electrode layer and the second electrode layer has a conductor made of a porous metal, and has a surface on the side of the electrolyte layer and a surface on the side opposite to the electrolyte layer. Is electrically connected via a continuous porous metal, and the resistance of the electrode layer in which the conductor is made of the porous metal is 1 × among the first electrode layer and the second electrode layer. 10 ^-3 Ω · m Ru der below.

According to this, even if a voltage is applied to the electrode layer and ions enter the pores inside the porous metal to deform the porous metal, the surface of the electrode layer on the side of the electrolyte layer and the electrolyte layer are still present. The state of being electrically connected to the opposite surface is maintained. Therefore, it is possible to suppress a decrease in the conductivity of the electrode layer.

Further, in the invention according to claim 8, an electrolyte layer (13) having a mixture (14) of an ionic liquid (14b) and a polymer (14a) and a first electrode layer arranged on one surface side of the electrolyte layer. A method for manufacturing a polymer actuator including (11) and a second electrode layer (12) arranged on the other surface side of the electrolyte layer, which includes forming the first electrode layer and a mixture. It comprises casting a liquid onto the first electrode layer and volatilizing the solvent of the cast liquid on the first electrode layer to form an electrolyte layer, and forming a second electrode layer. , At least one of the formation of the first electrode layer and the formation of the second electrode layer is porous in which the surface on the side of the electrolyte layer and the surface on the side opposite to the electrolyte layer are continuous. An electrode layer is formed by casting a mixture inside the porous metal and volatilizing the solvent of the mixture so that the mixture is electrically connected by a conductor (11a, 12a) composed of the metal. The resistance of the electrode layer shall be 1 × 10 ^-3 Ω · m or less .

In this way, an electrolyte layer and a second electrode layer are formed on the first electrode layer, and at least one of the electrode layers is produced by casting a mixture inside the porous metal and volatilizing the solvent. By doing so, it is possible to manufacture a polymer actuator having an electrode layer in which a surface on the side of the electrolyte layer and a surface on the side opposite to the electrolyte layer are electrically connected by a continuous porous metal.

Then, in the polymer actuator manufactured in this way, even if a voltage is applied to the electrode layer and ions enter the pores inside the porous metal to deform the porous metal, the electrolyte layer of the electrode layer The state in which the side surface and the surface opposite to the electrolyte layer are electrically connected is maintained. Therefore, it is possible to suppress a decrease in the conductivity of the electrode layer.

Further, in the invention according to claim 9, an electrolyte layer (13) having a mixture (14) of an ionic liquid (14b) and a polymer (14a) and a first electrode layer arranged on one surface side of the electrolyte layer. A method for manufacturing a polymer actuator including (11) and a second electrode layer (12) arranged on the other surface side of the electrolyte layer, wherein the first flow path (21) and the second flow path (22) are provided. ), And the third flow path (23) is formed inside, and the outlet (23b) of the third flow path is the outlet (21b) of the first flow path and the outlet (22b) of the second flow path. A die (20) arranged between them is prepared, the material of the first electrode layer is supplied to the supply port (21a) of the first flow path, and the supply port (22a) of the second flow path is connected to the first. Supplying the material of the two electrode layers, supplying the material of the electrolyte layer to the supply port (23a) of the third flow path, and supplying the material of the first flow path, the second flow path, and the third flow path. By extruding the materials of the first electrode layer, the second electrode layer, and the electrolyte layer toward the outlet, a laminated structure of the first electrode layer, the electrolyte layer, and the second electrode layer is formed, and the first At least one of the material of the electrode layer and the material of the second electrode layer contains a mixture and a conductor (11a, 12a) composed of a porous metal, and forms a laminated structure. In at least one of the first electrode layer and the second electrode layer, the first surface is electrically connected by a continuous porous metal so that the surface on the side of the electrolyte layer and the surface on the side opposite to the electrolyte layer are electrically connected. electrode layer, second electrode layer, and pushed out the material of the electrolyte layer, by forming a laminated structure, among the first electrode layer and the second electrode layer, conductor of the porous metal by electrode configured layer The resistance shall be 1 × 10 ^-3 Ω · m or less .

Even by such a die method, it is possible to manufacture a polymer actuator having an electrode layer in which a surface on the side of the electrolyte layer and a surface on the side opposite to the electrolyte layer are electrically connected by a continuous porous metal. ..

Then, in the polymer actuator manufactured in this way, even if a voltage is applied to the electrode layer and ions enter the pores inside the porous metal to deform the porous metal, the electrolyte layer of the electrode layer The state in which the side surface and the surface opposite to the electrolyte layer are electrically connected is maintained. Therefore, it is possible to suppress a decrease in the conductivity of the electrode layer.

The reference numerals in parentheses of each of the above means indicate an example of the correspondence with the specific means described in the embodiment described later.

It is sectional drawing of the polymer actuator which concerns on 1st Embodiment. It is a schematic view of the enlarged cross section of the region R in FIG. It is sectional drawing which shows the manufacturing process of a polymer actuator. It is sectional drawing which shows the manufacturing process of a polymer actuator. It is explanatory drawing which shows the operation of a polymer actuator. It is a graph which shows the relationship between the applied voltage and the required time of displacement. It is a graph which shows the relationship between the resistance value of an electrode layer, and the displacement rate. It is sectional drawing which shows the manufacturing process of a polymer actuator.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each of the following embodiments, parts that are the same or equal to each other will be described with the same reference numerals.

(First Embodiment)
The first embodiment will be described. As shown in FIG. 1, the polymer actuator 10 according to the present embodiment includes a first electrode layer 11, a second electrode layer 12, and an electrolyte layer 13. The polymer actuator 10 is formed in a plate shape or a strip shape having, for example, one surface and the other surface that is the opposite surface, the first electrode layer 11 is configured on one surface side, and the second electrode layer is on the other surface side. It is configured. Then, it is used by generating a desired potential difference between the first electrode layer 11 and the second electrode layer 12. The polymer actuator 10 is used, for example, in an air flow control door in an automobile air conditioner.

As shown in FIG. 2, the first electrode layer 11 and the second electrode layer 12 include conductors 11a and 12a. Specifically, the first electrode layer 11 and the second electrode layer 12 are configured by arranging the conductors 11a and 12a in the mixture 14 of the polymer 14a and the ionic liquid 14b, which will be described later, respectively. ..

The conductors 11a and 12a are made of a porous metal having a large number of pores formed therein. For example, this porous metal is an alloy containing any one of copper, aluminum, titanium, nickel, gold, silver, SUS (stainless steel), or copper, aluminum, titanium, nickel, gold, silver, and SUS as a main component. Can be configured. A mixture 14 is formed in the pores inside the porous metals constituting the conductors 11a and 12a, and the ionic liquid 14b described later can enter the mixture 14. The mixture 14 passes through the inside of the pores formed in the porous metal and penetrates the first electrode layer 11 and the second electrode layer 12 in the thickness direction.

The proportion of pores in each of the conductors 11a and 12a may be 40% or more so that the ionic liquid 14b enters the conductors 11a and 12a in a larger amount and the displacement and the generated force of the polymer actuator 10 increase. preferable.

Further, the proportion of the pores is determined in consideration of ensuring the conductivity of the first electrode layer 11 and the second electrode layer 12, and the conductivity of the porous metal material constituting the conductors 11a and 12a is determined. The higher the value, the higher the proportion of pores can be. For example, when the porous metal is made of copper, conductivity can be ensured even if the ratio of pores is 99%.

As described above, the proportion of pores in each of the conductors 11a and 12a is preferably 40% or more and 99% or less. In the present embodiment, the densities of the conductors 11a and 12a are about 10%, and the proportion of the pores is about 90%. The thickness of the first electrode layer 11 and the second electrode layer 12 is preferably 0.01 mm or more and 1 mm or less, and more preferably 0.1 mm or more and 0.5 mm or less, respectively.

As shown in FIG. 2, the electrolyte layer 13 has a structure in which the additive 13a is contained in the mixture 14 of the polymer 14a and the ionic liquid 14b. In the present embodiment, the thickness of the electrolyte layer 13 is 0.1 mm or more and 0.5 mm or less.

The polymer 14a is a medium that enables the movement of the ionic liquid 14b, and the surface is negatively charged. The polymer 14a is composed of, for example, a polymer such as polytetrafluoroethylene perfluorosulfonic acid (Nafion (registered trademark)), polyvinylidene difluoride (PVDF), and polymethyl methacrylate (PMMA).

Of these, the surface of Nafion is negatively charged because it contains ^{SO 3-.} On the other hand, although PVDF and PMMA are not negatively charged, even when the polymer 14a is composed of PVDF and PMMA, the surface of the polymer 14a ^{is negatively charged by adding a composition corresponding to SO 3-of Nafion to the polymer 14a.} Can be charged.

The ionic liquid 14b is a substance used to drive the polymer actuator 10, and is a gap between the polymer 14a and the additive 13a when a potential difference is generated between the first electrode layer 11 and the second electrode layer 12. It is a moving medium that moves. In the present embodiment, the volume occupancy of the ionic liquid 14b in the electrolyte layer 13 is 40% or more and 70% or less.

As the ionic liquid 14b, for example, 1-ethyl-3-methylimidazolium thiocyanic acid can be used. Such an ionic liquid 14b exists in a state of being ionized in the mixture 14, and has a cation composed of 1-ethyl-3-methylimidazolium as represented by the chemical formula 1 and a cation having the chemical formula 2. It is an anion composed of thiocyanic acid as shown. In the present embodiment, 1-ethyl-3-methylimidazolium thiocyanic acid is mentioned as the ionic liquid, but the material may be used as long as it is a liquid that does not volatilize.

The additive 13a is an insulator having an isoelectric point of 7 or less, and is composed of silica in this embodiment. Since the isoelectric point of silica is about 4, and the pH of the ionic liquid 14b is about 7, the additive 13a is negatively charged in the electrolyte layer 13. The additive 13a has a diameter of 1 μm or more and a thickness of the electrolyte layer 13 or less.

The additive 13a plays a role of increasing the amount of negative charge on the wall surface of the path through which the ionic liquid 14b moves to promote the electroosmotic flow described later, and between the first electrode layer 11 and the second electrode layer 12. It plays a role in maintaining the insulation of the. The additive 13a may be composed of another insulating material having an isoelectric point equal to or lower than the pH of the ionic liquid 14b.

Since there is a gap between the polymer 14a and the additive 13a, the ionic liquid 14b can move using the gap between the polymer 14a and the additive 13a as a movement path.

A method for manufacturing the polymer actuator 10 having such a configuration will be described with reference to FIGS. 3 and 4.

In the step shown in FIG. 3A, the conductor 11a is placed in a container made of a resin having a heat resistance of 200 ° C. or higher, such as Teflon (registered trademark) or a polyimide film.

In the step shown in FIG. 3B, a solution obtained by diluting the mixture 14 of the polymer 14a and the ionic liquid 14b with a solvent such as IPA (isopropyl alcohol) is poured into the pores of the conductor 11a, and then the solvent is volatilized. .. As a result, the first electrode layer 11 is formed. At this time, the container made of the resin may be heated at a temperature of 150 ° C. or lower to shorten the volatilization time of the solvent.

If a gap is formed between the container and the conductor 11a in the step shown in FIG. 3A, the solution flows into the gap in the step shown in FIG. 3B, and the first electrode layer 11 An insulating film is formed on the outside of the. This insulating film can also be used as a protective film for the polymer actuator 10. The thickness of the protective film can be controlled by controlling the distance between the container and the conductor 11a.

In the step shown in FIG. 3C, a liquid in which the additive 13a is mixed in the mixture 14 of the polymer 14a and the ionic liquid 14b is cast on the first electrode layer 11 so as to form a flat film. do. Then, by volatilizing the solvent, a structure in which the first electrode layer 11 and the electrolyte layer 13 are laminated is formed. At this time, the container made of resin may be heated at a temperature of 150 ° C. or lower to shorten the volatilization time of the solvent.

In the step shown in FIG. 4A, the conductor 12a is placed on the electrolyte layer 13. In the step shown in FIG. 4B, a solution obtained by diluting the mixture 14 of the polymer 14a and the ionic liquid 14b with a solvent such as IPA is poured into the pores of the conductor 12a, and then the solvent is volatilized. As a result, a structure in which the second electrode layer 12 is laminated on the first electrode layer 11 and the electrolyte layer 13 is formed. At this time, if the amount of the solution poured into the pores of the conductor 12a is larger than the volume of the pores, an insulating film is formed on the outside of the second electrode layer 12a. This insulating film can also be used as a protective film for the polymer actuator 10.

In the present embodiment, after the solution obtained by diluting the mixture 14 with a solvent such as IPA is poured into the pores of the conductor 12a, the diameter of the movement path of the ionic liquid 14b formed between the polymers 14a is 1 μm or less. The container made of resin is heated at a temperature of 150 ° C. or lower so as to be. As a result, the polymer actuator 10 is operated by the electroosmotic flow described later.

Subsequently, the operation of the polymer actuator 10 will be described. As shown in FIG. 5, when no voltage is applied to the first electrode layer 11 and the second electrode layer 12, the polymer actuator 10 is in a flat state without being deformed.

Then, when a potential difference occurs between the first electrode layer 11 and the second electrode layer 12, the polymer actuator 10 becomes convex toward the lower potential side of the first electrode layer 11 and the second electrode layer 12. It transforms to become.

For example, when a positive voltage is applied to the first electrode layer 11 and the second electrode layer 12 is set to the ground potential, the ionic liquid 14b is on the negative side, that is, with the gap between the polymer 14a and the additive 13a as a movement path. It moves to the second electrode layer 12 side. Then, the ionic liquid 14b enters the pores inside the conductor 12a. In the present embodiment, since the diameter of the movement path of the ionic liquid 14b is 1 μm or less, an electroosmotic flow is generated, and cations and anions move toward the second electrode layer 12.

Since the conductor 12a expands and the second electrode layer 12 expands by the amount of the ionic liquid 14b entering, the polymer actuator 10 has a convex shape on the second electrode layer 12 side and a concave shape on the first electrode layer 11 side. Deform.

Similarly, when a positive voltage is applied to the second electrode layer 12 and the first electrode layer 11 is set to the ground potential, the ionic liquid 14b is on the negative side with the gap between the polymer 14a and the additive 13a as a movement path. That is, it moves to the first electrode layer 11 side. Then, the ionic liquid 14b enters the pores inside the conductor 11a. In the present embodiment, since the diameter of the movement path of the ionic liquid 14b is 1 μm or less, an electroosmotic flow is generated, and cations and anions move toward the first electrode layer 11.

Since the conductor 11a expands and the first electrode layer 11 expands by the amount of the ionic liquid 14b entering, the polymer actuator 10 has a convex shape on the first electrode layer 11 side and a concave shape on the second electrode layer 12 side. Deform.

In such an operation, the amount of deformation and the generated force of the polymer actuator 10 change greatly depending on whether or not an electroosmotic flow is generated. The electroosmotic flow is a flow in which cations and anions move toward the negative electrode layer.

When no electroosmotic flow is generated, only cations of the ionic liquid 14b move to the negative electrode layer, and anions move to the positive electrode layer. Then, the negative electrode layer expands according to the amount of cations that have entered the negative electrode layer, and the positive electrode layer expands according to the amount of anions that have entered the positive electrode layer. do.

Therefore, the polymer actuator 10 is deformed so that the larger of the two electrode layers has a convex shape, but the polymer actuator 10 is deformed by the expansion of the electrode layer having the smaller deformation amount. Be hindered.

For example, when the amount of deformation of the negative electrode layer is larger than the amount of deformation of the positive side electrode layer, the deformation of the polymer actuator 10 due to the expansion of the negative side electrode layer is hindered by the expansion of the positive side electrode layer. .. Similarly, when the deformation amount of the positive side electrode layer is larger than the deformation amount of the negative side electrode layer, the deformation of the polymer actuator 10 due to the expansion of the positive side electrode layer is hindered by the expansion of the negative side electrode layer. Be done.

On the other hand, when an electroosmotic flow is generated, cations and anions move toward the negative electrode layer. Then, the negative electrode layer expands according to the amount of the ionic liquid 14b that has entered the negative electrode layer, and the positive electrode layer hardly expands. Therefore, it is suppressed that the deformation of the polymer actuator 10 due to the expansion of the negative electrode layer is hindered by the expansion of the positive electrode layer, and the decrease in the deformation amount and the generating force of the polymer actuator 10 is suppressed.

The effect of this embodiment will be described. For example, if a plurality of metal fine particles are used as the conductor in each electrode layer instead of the porous metal, the distance between the metal fine particles becomes longer due to the expansion of the electrode layer. Tends to increase the resistance value of. For example, when the tip of a polymer actuator having a length of 10 mm is displaced by 3 mm, the resistance value of the convex electrode layer becomes more than twice the original resistance value. Then, as the resistance value of the electrode layer increases, the displacement rate decreases.

On the other hand, in the present embodiment in which the conductors 11a and 12a are made of a porous metal, even if the ions move to the electrode layer and the electrode layer expands, the front surface side and the back surface side of the electrode layer are porous. It remains electrically connected with metal. Therefore, the decrease in the conductivity of the electrode layer is suppressed, and for example, the resistance value of the convex electrode layer can be made less than twice the original resistance value. As a result, it is possible to suppress a decrease in the displacement speed. For example, when the polymer actuator 10 is used for the air flow control door, the change in the displacement speed depending on the displacement region is small, so that the controllability can be improved.

Further, in the present embodiment in which the conductors 11a and 12a are made of a porous metal, the variation in the film thickness of each electrode layer can be reduced as compared with the case where metal fine particles are used as the conductor. Therefore, the number of control items when manufacturing the polymer actuator 10 is reduced.

Further, when the electroosmotic flow does not occur, if the potential difference between the first electrode layer 11 and the second electrode layer 12 is increased, the ionic liquid 14b is electrolyzed and normal driving cannot be performed. It needs to be made small to some extent. For example, the potential difference between the first electrode layer 11 and the second electrode layer 12 needs to be 2 V or less.

On the other hand, in the present embodiment in which the electroosmotic flow is generated, the ionic liquid 14b is not electrolyzed even if the potential difference between the first electrode layer 11 and the second electrode layer 12 is increased, so that the withstand voltage of the electrolyte layer 13 is increased. A large voltage can be applied accordingly. The withstand voltage of the electrolyte layer 13 varies depending on the film thickness and the like, but for example, the withstand voltage of the polymer actuator 10 can be 10 V or more, or 100 V or more.

Further, when the electroosmotic flow is not generated, the displacement amount of the polymer actuator 10 increases when the applied voltage is increased, but the displacement speed does not change so much. On the other hand, when an electroosmotic flow is generated, the moving speed of ions depends on the applied voltage, and as shown in FIG. 6, the displacement speed increases as the applied voltage is increased. The vertical axis of the graph of FIG. 6 shows that when the polymer actuator 10 is held at one end in the longitudinal direction and a voltage is applied, the other end is displaced by a predetermined length in the thickness direction of each layer. Shows the time required for.

As described above, in the polymer actuator 10 of the present embodiment in which the electroosmotic flow is generated, the withstand voltage can be made larger than that of the conventional polymer actuator in which the electroosmotic flow is not generated, so that a high voltage is applied. The displacement speed can be increased.

In order to increase the displacement rate of the polymer actuator 10, it is preferable that the resistivity of each electrode layer is small to some extent.

FIG. 7 shows the measurement results when the resistance value between two points separated by 10 mm in the longitudinal direction was measured with a tester, with the width of each electrode layer in the lateral direction being 2 mm and the thickness being 0.2 mm. From FIG. 7, it can be seen that the displacement speed increases when the resistance value is 25Ω or less. When this resistance value is converted into resistivity based on the width and thickness of each electrode layer, ^{it becomes 1 × 10 -3} Ω · m. Therefore, the resistivity of each electrode layer ^{is preferably 1 × 10 -3} Ω · m or less.

For example, the resistivity of copper is 1.68 × ^10-8 Ω · m. Therefore, when the conductors 11a and 12a are made of copper, the resistivity of each electrode layer is 1 even if the density of the conductors 11a and 12a is about 1%, that is, even if the proportion of the pores is about 99%. × 10 ^-3 Ω ・ m or less.

(Second Embodiment)
The second embodiment will be described. This embodiment is a modification of the manufacturing method of the polymer actuator 10 with respect to the first embodiment, and the other parts are the same as those of the first embodiment. Therefore, only the parts different from the first embodiment will be described. ..

In the first embodiment, the polymer actuator 10 is manufactured by laminating the first electrode layer 11, the electrolyte layer 13, and the second electrode layer 12 in this order, but as shown in FIG. 8, the die method using the die 20 is used. The polymer actuator 10 may be manufactured.

A first flow path 21, a second flow path 22, and a third flow path 23 are formed inside the die 20. The supply ports 21a and 22a of the first and second flow paths 21 and 22 are mixed with the materials of the first and second electrode layers 11 and 12, that is, the conductors 11a and 12a made of the porous metal, respectively. Body 14 is supplied. The material of the electrolyte layer 13, that is, the additive 13a and the mixture 14 are supplied to the supply port 23a of the third flow path 23. Each of the first, second, and third flow paths 21, 22, and 23 has a rectangular cross section.

Further, the outlet 23b of the third flow path 23 is arranged between the outlet 21b of the first flow path 21 and the outlet 22b of the second flow path 22. Specifically, the first, second, and third flow paths 21, 22, and 23 are arranged so that the longitudinal directions of the flow path cross sections coincide with each other, and the third flow path cross section is arranged in the lateral direction in the lateral direction. The second flow path 22 is arranged on the side opposite to the first flow path 21 with respect to the flow path 23. The outlets 21b and 22b of the first and second flow paths 21 and 22 are arranged adjacent to the outlet 23b of the third flow path 23, and the outlets 21b, 22b and 23b are inside the die 20. Is connected at. The connection points of the first, second, and third flow paths 21, 22, and 23 are connected to the outside of the die 20 via the fourth flow path 24.

In order to manufacture the polymer actuator 10 by the die method using such a die 20, first, the materials of the first and second electrode layers 11 and 12 and the electrolyte layer 13 are supplied to the supply ports 21a, 22a and 23a. .. Then, the materials of the first and second electrode layers 11 and 12 and the electrolyte layer 13 are pushed out from the supply ports 21a, 22a and 23a toward the outlets 21b, 22b and 23b. Then, the material flowing out from the outlets 21b, 22b, and 23b forms a laminated structure of the first electrode layer 11, the electrolyte layer 13, and the second electrode layer 12. As shown by the arrow in FIG. 8, this laminated structure flows out of the die 20 through the flow path 24.

In the present embodiment, the amount of the material supplied to the supply ports 21a and 22a, the sizes of the outlets 21b and 22b, and the like are adjusted so that the first and second electrode layers 11 and 12 are on the electrolyte layer 13 side. The surface and the surface opposite to the electrolyte layer 13 are electrically connected by a continuous porous metal.

(Other embodiments)
The present invention is not limited to the above-described embodiment, and can be appropriately modified within the scope of the claims.

For example, in the first and second embodiments, both the conductor 11a and the conductor 12a are made of a porous metal, but only one of the conductors 11a and 12a is made of a porous metal and the other. May be composed of, for example, metal fine particles.

Further, in the first embodiment, the polymer actuator 10 is operated by an electroosmotic flow, but the polymer is polymerized by electrophoresis in which cations move to the negative electrode layer and anions move to the positive electrode layer. The actuator 10 may be operated.

11 1st electrode layer 11a Conductor 12 2nd electrode layer 12a Conductor 13 Electrolyte layer 14 Mixture 14a Polymer 14b Ionic liquid

Claims (10)

An electrolyte layer (13) having a mixture (14) of an ionic liquid (14b) and a polymer (14a),
The first electrode layer (11) arranged on one side of the electrolyte layer and
A second electrode layer (12) arranged on the other surface side of the electrolyte layer is provided.
The first electrode layer and the second electrode layer have the mixture and the conductors (11a, 12a).
At least one of the first electrode layer and the second electrode layer has a conductor made of a porous metal, and a surface on the side of the electrolyte layer and a surface on the side opposite to the electrolyte layer are formed. , Electrically connected via the continuous porous metal ,
Wherein one of the first electrode layer and the second electrode layer, the resistivity of the conductor electrode layer composed of the porous metal, 1 × 10 ^-3 Ω · m der Ru polymer actuator below. A claim that when a potential difference occurs between the first electrode layer and the second electrode layer, the first electrode layer and the second electrode layer are deformed so as to be convex toward the lower potential side. The polymer actuator according to 1. Of the first electrode layer and the second electrode layer, in the electrode layer in which the conductor is made of a porous metal, the mixture passes through the inside of the pores formed in the porous metal. The polymer actuator according to claim 1 or 2, which penetrates the electrode layer in the thickness direction. The porous metal is formed of an alloy containing either copper, aluminum, titanium, nickel, gold, silver, stainless steel, or copper, aluminum, titanium, nickel, gold, silver, or stainless steel as a main component. The polymer actuator according to any one of claims 1 to 3. In the electrolyte layer, a migration path of the ionic liquid is formed between the polymers.
The polymer actuator according to any one of claims 1 to 4 , wherein the moving path has a diameter of 1 μm or less. The polymer actuator according to any one of claims 1 to 5 , wherein the withstand voltage when a voltage is applied to the first electrode layer and the second electrode layer is 10 V or more. The polymer actuator according to any one of claims 1 to 6, wherein the first electrode layer and the second electrode layer have a thickness of 0.1 mm or more and 0.5 mm or less. In addition to the electrolyte layer (13) having a mixture (14) of the ionic liquid (14b) and the polymer (14a), the first electrode layer (11) arranged on one side of the electrolyte layer, and the electrolyte layer. A method for manufacturing a polymer actuator including a second electrode layer (12) arranged on the surface side.
Forming the first electrode layer and
The electrolyte layer is formed by casting a liquid containing the mixture onto the first electrode layer and volatilizing the solvent of the liquid cast on the first electrode layer.
To form the second electrode layer,
At least one of the formation of the first electrode layer and the formation of the second electrode layer is continuous with the surface on the side of the electrolyte layer and the surface on the side opposite to the electrolyte layer. The mixture is cast inside the porous metal so as to be electrically connected by the conductors (11a, 12a) composed of the porous metal, and the solvent of the mixture is volatilized to cause an electrode. A method for manufacturing a polymer actuator in which a layer is formed and the resistivity of the electrode layer is 1 × 10 ^-3 Ω · m or less. In addition to the electrolyte layer (13) having a mixture (14) of the ionic liquid (14b) and the polymer (14a), the first electrode layer (11) arranged on one side of the electrolyte layer, and the electrolyte layer. A method for manufacturing a polymer actuator including a second electrode layer (12) arranged on the surface side.
The first flow path (21), the second flow path (22), and the third flow path (23) are formed inside, and the outlet (23b) of the third flow path is the outlet of the first flow path. To prepare a die (20) arranged between (21b) and the outlet (22b) of the second flow path, and
Supplying the material of the first electrode layer to the supply port (21a) of the first flow path,
Supplying the material of the second electrode layer to the supply port (22a) of the second flow path, and
Supplying the material of the electrolyte layer to the supply port (23a) of the third flow path, and
By extruding the materials of the first electrode layer, the second electrode layer, and the electrolyte layer from the supply port of the first flow path, the second flow path, and the third flow path toward the outlet, the first flow path and the electrolyte layer are extruded. It comprises forming a laminated structure of one electrode layer, the electrolyte layer, and the second electrode layer.
At least one of the material of the first electrode layer and the material of the second electrode layer contains the mixture and a conductor (11a, 12a) composed of a porous metal.
By forming the laminated structure, in at least one of the first electrode layer and the second electrode layer, the surface on the side of the electrolyte layer and the surface on the side opposite to the electrolyte layer are continuous. so as to be electrically connected with porous metal, the first electrode layer, the second electrode layer, and pushed out the material of the electrolyte layer,
By forming the laminated structure, the resistivity of the electrode layer in which the conductor is made of the porous metal among the first electrode layer and the second electrode layer is 1 × 10 ^-3 Ω · m. The following method for manufacturing a polymer actuator. The method for manufacturing a polymer actuator according to claim 8 or 9, wherein the thickness of the first electrode layer and the second electrode layer is 0.1 mm or more and 0.5 mm or less.

Images