JP6923828B2 - Wire electric discharge machine - Google Patents

Description

The present invention relates to a technique for a wire electric discharge machine.

Conventionally, there is a wire saw technique for arranging a plurality of workpieces and cutting them at the same time.

In Patent Document 1, in the wire saw technology, a work cutting area and a wire skipping area are provided, and two wire skipping rollers are arranged in the wire skipping area to make the wire absent in the wire skipping area. The technology to do is disclosed.

Japanese Unexamined Patent Publication No. 2010-2536664

However, in Patent Document 1, when two wire skipping rollers are arranged in the wire skipping area and the wire is to be absent in the wire skipping area, the wire skipping roller is provided at any place. , It is not disclosed at all whether it is necessary to provide a wire skipping area.

As in Patent Document 1, when the wire skipping roller is provided outside the plurality of main rollers orbiting the plurality of main rollers, the tension of the wire by the wire skipping roller provided outside is connected to one. would affect the wire, as a result, the tension of the wire in the cutting zone of word over click is no longer uniform, Te wire array governor Ratsui is juxtaposed wire, travels a plurality of guide rollers The problem that it ends up occurs.
An object of the present invention is to provide a mechanism for reducing wire rows, which are juxtaposed wires, from being scattered and running on a plurality of guide rollers.

The present invention is a wire discharge processing device for slicing a plurality of workpieces with a wire row which is a parallel wire, and a plurality of guides for forming and traveling the wire row by orbiting one connected wire. Between the roller and the plurality of guide rollers, the traveling direction of some of the wires arranged side by side is changed to a direction intersecting the traveling direction of the other wires arranged side by side. It is characterized by comprising a wire skipping means for forming a wire skipping region having a wire spacing wider than the spacing of other wires provided.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a mechanism for reducing a wire row, which is a wire arranged side by side, from being scattered and running on a plurality of guide rollers.

The figure which looked at the wire electric discharge machining apparatus of this invention from the front direction of the apparatus. It is a figure which looked at the wire skipping mechanism of this invention from the front of the wire electric discharge machining apparatus. It is a figure which looked at the wire skipping mechanism of this invention from the upper part of the wire electric discharge machining apparatus. It is a figure which looked at the wire skipping mechanism of this invention from the bottom of the wire electric discharge machining apparatus. It is a figure which saw from the bottom of the wire electric discharge machining apparatus, the proper arrangement position of the wire skipping mechanism of this invention, and the operation which rotates with the running of a wire. It is a figure which looked at the wire skipping mechanism of this invention from the right side of the wire electric discharge machine. It is a figure which looked at the guide roller of this invention from the right side of the wire electric discharge machine. It shows the traveling direction of a wire and the relative position of a V-groove when the wire skipping mechanism of the present invention is not provided, and is a view seen from the bottom of the wire electric discharge machine.

FIG. 1 will be described.

FIG. 1 is a diagram showing a configuration of a wire electric discharge machining system according to the present invention. The wire electric discharge machining system includes a wire electric discharge machining device 1, a power supply device 2, and a machining liquid supply device 12. It goes without saying that the configuration of each mechanism shown in FIG. 1 is an example, and there are various configuration examples depending on the purpose and application.

The wire electric discharge machining system can slice a workpiece, which is a work piece, into a thin plate at intervals of parallel wire rows by electric discharge machining. The present invention relates to a wire electric discharge machine that processes a work with a wire row arranged side by side. In the wire electric discharge machine 1, a work feed unit 3 driven by a servomotor is provided on the upper part of the wire row and is provided in the vertical direction. You can move the work (also called wire) to. In this embodiment, the work is fed downward to perform electric discharge machining, but as a modification, the work may be moved upward to perform electric discharge machining by providing the work feed unit 3 at the lower part of the wire row. ..

The power supply device 2 discharges the work by applying a pulse voltage between the wires arranged side by side and the poles of the work. The power supply device 2 moves the work feed unit 3 to an appropriate distance where discharge is efficiently generated between the poles according to the state of discharge (voltage between poles) detected by the discharge servo control circuit that controls the servomotor. The discharge gap (distance between poles) is controlled to be maintained at an appropriate distance, the work and the wire row are relatively positioned, and the discharge processing of the work is repeated little by little until the slice is completed.

The power supply device 2 applies a pulse voltage for electric discharge machining to the wire from a machining power supply (not shown) via the power supply 104. Furthermore, in order to adapt to conditions such as short circuits that occur between poles, the discharge servo control circuit sends a servo control signal to the work feed unit 3 so that the discharge gap (inter-pole distance) is kept at an appropriate distance so that short circuits do not occur. send.

The wire electric discharge machining device 1 is connected to the power supply device 2 via a wiring 11 for the machining power supply, and the wire electric discharge machining device 1 uses the electric power (product of the machining voltage and the machining current) supplied from the power supply device 2. , EDM the work.

The machining fluid supply device 12 uses a pump (not shown) to cool the workpieces and wires due to the heat generated between the poles, and to remove the machining debris remaining between the poles after the discharge into the machining tank 6. In addition to sending the liquid, it removes the processing debris accumulated in the processing liquid, controls the conductivity (1 μS to 250 μS) by ion exchange, and controls the liquid temperature (around 20 ° C). Water is mainly used, but electric discharge machining oil can also be used.

The main rollers 8 and 9 are formed with a large number of V-grooves having a predetermined pitch so that the work can be sliced to a desired thickness and a predetermined number of pitches so that the work can be sliced to a desired number of sheets. A required number of tension-controlled wires from the wire supply bobbin (not shown) are wound around the two main rollers and sent to the take-up bobbin (not shown). The traveling speed of the wire at this time is, for example, about 100 m / min to 900 m / min.

By rotating the two main rollers 8 and 9 in the same direction and at the same speed, one wire sent from the wire feeding part (not shown) covers the outer circumference of the main rollers (two). By circling, the wires can be arranged in a plurality of rows and run in the same direction. The wire is a single connected wire, which is unwound from the feeding portion and spirally wound many times (up to about 2000 times) on the outside of the main roller while being fitted into the V groove on the outer peripheral surface of the main roller. After that, it is wound up by a winding bobbin.

In this embodiment, the figures of the two main rollers 8 and 9 are shown for convenience, but the number of main rollers is three or more, and one is sent from the wire feeding portion (not shown). The wires may be arranged in a plurality of rows and run in the same direction by orbiting the outer circumference of the main roller (three or more).
In this way, one connected wire orbits the outer circumferences of the left and right guide rollers, so that the arranged wire rows run in the same direction (traveling means).

The main rollers 8 and 9 have a structure in which metal is used for the central shaft and the outside is covered with a resin material. By covering the outside with a resin material in this way, even when one wire orbits the outer circumference of the main roller at high speed, the wire does not separate from the V-groove and does not jump out of each V-groove. I am doing it.

A power supply 104 is provided in the lower part of the outer side of the wire orbit of the main roller 8.9 to supply the pulse voltage from the power supply device 2 to the wire, and the power supply 104 collectively collects the pulse voltage in a wire row. It is a power supply for supplying power.

In the case of this batch power supply, by contacting a wire row (for example, 10 to 100 wires) in which one power supply electron 104 is arranged side by side, one wire row (for example, 10 to 100 wires) is contacted. It is only necessary to provide a processing power supply, and the cost is low even when power is supplied to a large number of wires (100 wires, etc.).

As a modification, an individual pulse voltage may be supplied to each wire (1 wire) by contacting each wire in the wire row arranged side by side for each power supply. It is necessary to provide an individual processing power supply for each wire (1 wire), and when power is supplied to a large number of wires (100 wires, etc.), the cost increases due to the individual processing power supply.
Since the material of the power supply 104 is required to be resistant to mechanical wear and have conductivity, cemented carbide or the like is preferable.
The work is attached to the work feed unit 3 on the outer upper part of the wire orbit of the main roller 8.9, and the work is moved downward to perform electric discharge machining.

A machining tank 6 for storing the machining fluid is provided in the central portion inside the wire orbit of the main roller 8.9, and the wire and the work are immersed in the machining fluid during electric discharge machining to discharge the work. Cools the part and removes machining debris.

The machining power supply (not shown) in the power supply device 2 supplies the machining voltage V set to supply the machining current I required for electric discharge machining, and the machining voltage V is set to an arbitrary voltage. be able to.

The pole-to-pole voltage is a voltage value between the wire and the work when discharge occurs, and when an appropriate pole-to-pole voltage is reached, the wire discharges to the work between the poles. The interpole current is the value of the current that flows between the wire and the work when a discharge occurs.

The power supply 104 supplies power to the wire row in a lump sum. In this embodiment, a case is shown in which a pulse voltage is applied from a power supply 104 arranged at one place on the lower outside of the wire orbit of the main roller 8.9 to perform electric discharge machining. The wire current flowing through the wire from the power supply 104 to the poles by the power supply 104 supplied at one place is divided into two paths on the left and right sides of the main rollers 8 and 9 and flows between the poles.

The work feed unit 3 is a device provided with a mechanism for moving the work fixed by the conductive adhesive 300 in the vertical direction, and the work feed unit 3 moves downward (in the direction of gravity) with the work fixed. By moving in stages, the work can be gradually brought closer to the wire row.

The processing tank 6 is a container for storing the processing liquid. The processing liquid is, for example, deionized water having a high resistance value. The presence of a high-resistance machining fluid between the poles of the wire and the work causes a good discharge between the wire and the work, making it possible to slice the work.

As shown in FIG. 7, a plurality of rows of V-grooves for winding the wire are formed on the surfaces of the main rollers 8 and 9, and the wire is wound around the V-grooves. After the wire is wound around the V-groove, the main rollers 8 and 9 are both rotated right or left, so that one connected wire runs as a wire row.

The material of the wire is an electric conductor, and when the power supply 104 to which the pulse voltage is applied comes into contact with the wire, power is supplied to the wire, and a wire current flows through the wire. By generating an electric discharge between the poles in this way, the work can be scraped to produce a thin plate-shaped work piece (for example, a wafer or the like). The main component of the material of the wire is iron, the diameter of the wire is about 0.12 mm, and the cross-sectional area is about 0.06 × 0.06 × π mm2.

The power supply 104 is fixed to the power supply unit 10. The power supply unit 10 can move the position of the entire power supply unit 10 in the direction of gravity in order to adjust the contact pressure between the power supply 104 and the wire.

In the present specification, the vertical corresponds to the upward direction and the downward direction in the gravity direction, respectively, the left and right correspond to the left and right when viewed from the front of the wire electric discharge machine, and the front and rear correspond to the wire electric discharge. The front and back surfaces of the machining apparatus when viewed from above will be described.
The block 5 is a part of the housing of the wire electric discharge machine 1. A work feed unit 3 is welded to the block 5.
FIG. 2 will be described.
It is a figure which looked at the wire skipping mechanism of this invention from the front of the wire electric discharge machining apparatus 1.

In the figure, the first surface is the surface formed by the upper wire row on the slicing side in this embodiment. Further, the second surface indicates a surface formed by the lower wire row, which is the non-slicing side in this embodiment.
The arrow indicates the direction in which one connected wire travels, and the wire is on the supply bobbin side and the OUT side is on the take-up bobbin side on the IN side.
FIG. 3 will be described.
It is a figure which looked at the wire skipping mechanism of this invention from the upper part of the wire electric discharge machining apparatus 1.
In other words, you are looking at the first side.

When viewed from the upper part of the wire electric discharge machine 1, a part of the wire row in the first plane described with reference to FIG. 2 is set to have a wider spacing than the wire row spacing. There are no wire rows in the area.

This partial area is defined as a wire nonexistent area. Furthermore, the wire row next to the wire absent region is defined as the work cutting region. The three work cutting areas are wire rows divided into a plurality of pieces.

By preventing the wire row from existing in this partial region, a plurality of workpieces (workpieces A to C) arranged side by side in the direction intersecting the wire row as shown in FIGS. 3 and 4 are simultaneously discharged. When processed, the cut pieces of the wafer sliced from both ends of each work are prevented from colliding with the wire row and damaging the wire row.
FIG. 4 will be described.
It is a figure which looked at the wire skipping mechanism of this invention from the lower part of the wire electric discharge machining apparatus 1.
In other words, you are looking at the second side.

In order to provide the wire absent region in the first plane of FIG. 3, the wire row is set in the traveling direction of one connected wire running in a part of the wire row in the second plane. It is necessary to change from the traveling direction of. This partial area is defined as a wire skipping area.
In this embodiment, four wire skipping mechanisms (wire skipping means) are provided in order to create two wire skipping regions in the second plane.

As can be seen from the compositions of FIGS. 2 and 4, the traveling direction of one connected wire changes in the orbital plane orbiting the left and right guide rollers due to the two wire skipping mechanisms per wire skipping area. You can see that.

By incorporating the wire skipping mechanism in the orbital plane in this way, the tension fluctuation of the wire newly generated by the installation of the wire skipping mechanism is reduced as compared with the case where the wire skipping mechanism is provided outside the orbital track as in the prior art. Therefore, since the wire rows of the work cutting regions run with uniform tension, there is an effect that the difference between the work cutting regions becomes small.

As a result, it is not necessary to additionally install a tension control mechanism for reducing the tension fluctuation of the newly generated wire, and the cost is lower than that for providing the wire skipping mechanism on the outside of the orbit.
As described above, a pair (two) of wire skipping mechanisms are arranged per wire skipping area.

In this way, by appropriately adjusting the relative position or relative distance of the pair of wire skipping mechanisms in the wire skipping region, the traveling direction (or traveling angle) of one connected wire is changed to the traveling direction desired by the user. The width of the wire absent region can be arbitrarily set on the first surface.

Further, as shown in FIG. 5, by appropriately adjusting the position of the end portion of one wire skipping mechanism so as to match the groove bottom (or the center of the groove) of the V groove of the guide roller, the wires become parallel. Since the wire runs straight toward the groove bottom (or the center of the groove) of the V-groove, the frictional force against the V-groove is reduced at the portion where the wire and the V-groove contact, so that the V-groove depends on the running direction of the wire. Damage to the wire can be reduced.

As shown in FIG. 8, if the wire skipping mechanism of the present invention is not attached, the position of the V groove around which one connected wire is wound is simply shifted by the required number of grooves to forcibly shift the traveling direction of the wire. When the wire is changed diagonally, a frictional force from an oblique direction is applied to the V-groove forcibly hooked by the wire, so that the frictional force increases only in the hooked V-groove.

Then, only the V-groove gradually expands in the width direction of the V-groove, and finally only the V-groove is gradually cut in the groove bottom direction. As a result of being cut toward the bottom of the groove, the length of the outer circumference of the orbit is shortened by that V-groove, and the length of the outer circumference of the orbit is shortened. A defect occurs and only one wire does not discharge.

It should be noted that each wire skipping mechanism is fixed to the lower housing 203 by screwing or the like so as not to move. Further, as described above, a slide rail (not shown) or the like is provided so that each wire skipping mechanism can be arranged at an appropriate position in the width direction of the V-groove so that a portion fixed by screwing or the like can be slid.
FIG. 5 will be described.
It is a figure which saw from the bottom of the wire electric discharge machining apparatus, the proper arrangement position of the wire skipping mechanism of this invention, and the operation which rotates with the running of a wire.
The rotation direction of the wire skipping mechanism is the same as the traveling direction of the wire because the traveling wire rotates the rotating portion 201.
FIG. 6 will be described.
It is a figure which looked at the wire skipping mechanism of this invention from the right side surface of the wire electric discharge machining apparatus 1.

Each wire skipping means is configured as a unit in which the parts of the rotating portion 201 that rotates as the wire travels and the parts of the holding portion 202 that holds the rotating portion are combined.
The holding portion 202 is fixed to the lower housing 203 by screwing or the like.

Even when a plurality of works (works A to C) are arranged side by side as shown in FIG. 6, as the work feed unit 3 descends, the number of work cutting areas is the same as the number of works A to C. Therefore, the works A to C are sliced at the same time in each work cutting region.

As described above, the holding portion 202 connected to the rotating portion 201 is connected to a part of the lower housing 203 of the wire electric discharge machine to fix the arrangement position of one wire skipping.
As can be seen from FIGS. 5 and 6, the arrangement position of the wire skipping is fixed so that the surface of the rotating portion 201 stands perpendicular to the orbital plane.

Further, the surface of the rotating portion 201 is a columnar surface having a width, and the traveling wire rotates the rotating portion 201 at an arbitrary place in the surface of the cylindrical column having a width, so that the traveling wire rotates on the orbital plane. Can be maintained at all times.
FIG. 7 will be described.
It is a figure which looked at the guide roller of this invention from the right side surface of the wire electric discharge machining apparatus 1.

This figure shows a guide roller with no wire wound around it. A large number of rows of V-grooves are formed in the guide roller in the width direction, and a large number of rows of groove bottoms can be seen.

1 Wire electric discharge machining device 2 Power supply device 3 Work feed unit 6 Machining tank 8 Guide roller 9 Guide roller 104 Power supply 201 Rotating part 202 Holding part 203 Lower housing 204 Guide roller housing 205 Rotating shaft of guide roller

Claims (5)

A wire electric discharge machine that slices a plurality of workpieces with a row of wires that are arranged side by side.
A plurality of guide rollers that form and run the wire row by orbiting one connected wire, and
Among the plurality of guide rollers, the traveling direction of some of the wires arranged side by side is changed to a direction intersecting the traveling direction of the other wires arranged side by side, and the wires are arranged side by side. A wire skipping means that forms a wire skipping area with a wire spacing wider than the other wire spacing,
A wire electric discharge machine characterized by being provided with. In the wire skipping means, the traveling directions of some of the wires are arranged side by side on an orbit between the plurality of guide rollers in which the one connected wire orbits the plurality of guide rollers. The wire discharge processing apparatus according to claim 1, wherein the wire is changed in a direction intersecting the traveling direction of another wire. The wire skipping means is
A rotating part that rotates with the running of the one connected wire, and
A holding portion that is connected to the rotating portion and holds the rotating shaft of the rotating portion,
With
The holding portion is fixed by a fixing portion connected to the wire electric discharge machine, and is fixed.
The rotating portion is provided so that the rotation axis of the rotating portion that comes into contact with the wire is perpendicular to the wire row, and the surface of the rotating portion is in contact with a part of the wires. The wire discharge processing apparatus according to claim 1 or 2, wherein the traveling direction of some of the wires is changed to a direction intersecting the traveling direction of the other wires arranged side by side. The wire processing apparatus according to claim 3, further comprising an adjusting portion for adjusting a relative position between the bottom of the V-groove of the guide roller and the rotating portion. The rotating portion includes a pair of rotating portions for forming the wire skipping region.
Each of the pair of rotating portions is characterized in that by contacting the part of the wires, the traveling direction of the part of the wires is changed to a direction intersecting the traveling directions of the other wires arranged side by side. The wire discharge processing apparatus according to claim 3 or 4.

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