Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP6924511B2 - Mass spectrometry method and mass spectrometer - Google Patents
[go: Go Back, main page]

JP6924511B2 - Mass spectrometry method and mass spectrometer - Google Patents

Mass spectrometry method and mass spectrometer Download PDF

Info

Publication number
JP6924511B2
JP6924511B2 JP2019542040A JP2019542040A JP6924511B2 JP 6924511 B2 JP6924511 B2 JP 6924511B2 JP 2019542040 A JP2019542040 A JP 2019542040A JP 2019542040 A JP2019542040 A JP 2019542040A JP 6924511 B2 JP6924511 B2 JP 6924511B2
Authority
JP
Japan
Prior art keywords
ion
mass
ions
target
interfering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019542040A
Other languages
Japanese (ja)
Other versions
JPWO2019054325A1 (en
Inventor
彦北 朱
彦北 朱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Publication of JPWO2019054325A1 publication Critical patent/JPWO2019054325A1/en
Application granted granted Critical
Publication of JP6924511B2 publication Critical patent/JP6924511B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622Ion mobility spectrometry
    • G01N27/623Ion mobility spectrometry combined with mass spectrometry
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Description

本発明は、化学分析手法の一種である質量分析法に関するものである。 The present invention relates to a mass spectrometry method, which is a kind of chemical analysis method.

質量分析法は、分析対象である目的イオンの質量数mと電荷zの比、すなわち質量電荷比m/zに基づいて分析する手法である。目的イオンと同程度の質量電荷比を有する非目的イオンは干渉イオンとなる。目的イオンを正確に分析するためには、非目的イオンの干渉を除去しなければならない。高分解能質量分析計を用いれば、目的イオンを干渉イオンから分離できる。しかし、目的イオンと干渉イオンの質量電荷比がわずかに違う場合では、高分解能質量分析計を用いても、これらの分離が困難である。 The mass spectrometry method is a method of analyzing based on the ratio of the mass number m of the target ion to be analyzed and the charge z, that is, the mass-to-charge ratio m / z. Non-target ions having a mass-to-charge ratio similar to that of the target ions become interfering ions. In order to analyze the target ion accurately, the interference of the non-target ion must be removed. A high-resolution mass spectrometer can be used to separate the target ions from the interfering ions. However, when the mass-to-charge ratios of the target ion and the interfering ion are slightly different, it is difficult to separate them even by using a high-resolution mass spectrometer.

反応セル技術または衝突セル技術では、目的イオンまたは干渉イオンと反応ガス分子を反応させて、目的イオンまたは干渉イオンを別の物質に変換することによって、目的イオンを干渉イオンから分離できる。例えば、目的イオンが32で干渉イオンが16 の場合、どちらも質量電荷比が32である。そこで、3216 の共存下で、3216を反応させて、323216に変換する。そして、質量電荷比が48と32に基づいて321616 から分離すれば、目的イオンが正確に分析できる。反応セル技術では、高分解能質量分析計よりも高い分離効果が得られる。しかしながら、反応セル技術では、既存の反応ガスを利用して十分な反応性が得られない場合がある。例えば、非特許文献1によるとBaとOは反応しない。In the reaction cell technique or the collision cell technique, the target ion or the interfering ion can be separated from the interfering ion by reacting the target ion or the interfering ion with the reaction gas molecule to convert the target ion or the interfering ion into another substance. For example, when the target ion is 32 S + and the interfering ion is 16 O 2 + , the mass-to-charge ratio is 32 in both cases. Therefore, in the coexistence of 32 S + and 16 O 2 + , 32 S + and 16 O 2 are reacted to convert 32 S + to 32 S 16 O +. Then, if the separation mass to charge ratio is 48 and 32 on the basis of 32 S 16 O + from 16 O 2 +, the target ion can be accurately analyzed. The reaction cell technology provides a higher separation effect than a high resolution mass spectrometer. However, in the reaction cell technology, sufficient reactivity may not be obtained by using the existing reaction gas. For example, according to Non-Patent Document 1, Ba + and O 2 do not react.

Gas-phase ion-molecule reactions for resolution of atomic isobars: AMS and ICP-MS perspectives, International Journal of Mass Spectrometry, 2006, 255-256, p.312-327Gas-phase ion-molecule reactions for resolution of atomic isobars: AMS and ICP-MS perspectives, International Journal of Mass Spectrometry, 2006, 255-256, p.312-327

本発明は、このような事情に鑑みてなされたものであり、活性化された反応ガスを目的イオンまたは干渉イオンと反応させ、目的イオンを干渉イオンから分離して、目的イオンの正確な分析ができる質量分析方法と質量分析装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and an activated reaction gas is reacted with a target ion or an interfering ion to separate the target ion from the interfering ion, so that accurate analysis of the target ion can be performed. It is an object of the present invention to provide a mass spectrometric method and a mass spectrometric apparatus capable of performing the same.

本発明の質量分析装置は、目的イオンと干渉イオンが導入される反応セルと、反応セルに接続されたオゾン発生部と、反応セルで目的イオンがオゾンと反応して生じた目的イオン生成物が、質量電荷比に応じて、干渉イオンから分離される質量分離部と、質量分離部で分離された目的イオン生成物の信号強度を計測する計測部とを有する。 In the mass spectrometer of the present invention, a reaction cell into which a target ion and an interfering ion are introduced, an ozone generator connected to the reaction cell, and a target ion product generated by the reaction of the target ion with ozone in the reaction cell. It has a mass separation unit separated from interfering ions according to the mass-to-charge ratio, and a measurement unit for measuring the signal strength of the target ion product separated by the mass separation unit.

本発明の他の質量分析装置は、目的イオンと干渉イオンが導入される反応セルと、反応セルに接続されたオゾン発生部と、目的イオンが、質量電荷比に応じて、反応セルで干渉イオンがオゾンと反応して生じた干渉イオン生成物から分離される質量分離部と、質量分離部で分離された目的イオンの信号強度を計測する計測部とを有する。 In the other mass spectrometer of the present invention, the reaction cell into which the target ion and the interfering ion are introduced, the ozone generating part connected to the reaction cell, and the target ion are interfering ions in the reaction cell according to the mass-to-charge ratio. It has a mass separator separated from the interfering ion product generated by the reaction of the electric charge with ozone, and a measuring section for measuring the signal strength of the target ion separated by the mass separator.

本発明の質量分析方法は、目的イオンおよび干渉イオンにオゾンを供給し、目的イオンとオゾンの反応生成物である目的イオン生成物を得る反応工程と、質量電荷比に応じて、目的イオン生成物を干渉イオンから分離する質量分離工程と、質量分離工程で分離された目的イオン生成物の信号強度を計測する計測工程とを有する。 In the mass spectrometry method of the present invention, ozone is supplied to a target ion and an interfering ion to obtain a target ion product which is a reaction product of the target ion and ozone, and a target ion product is obtained according to a mass-to-charge ratio. It has a mass separation step of separating the ions from the interfering ions and a measurement step of measuring the signal strength of the target ion product separated in the mass separation step.

本発明の他の質量分析方法は、目的イオンおよび干渉イオンにオゾンを供給し、干渉イオンとオゾンとの反応生成物である干渉イオン生成物を得る反応工程と、質量電荷比に応じて、干渉イオン生成物を目的イオンから分離する質量分離工程と、質量分離工程で分離された干渉イオン生成物の信号強度を計測する計測工程とを有する。 In another mass spectrometry method of the present invention, ozone is supplied to the target ion and the interfering ion to obtain an interfering ion product which is a reaction product of the interfering ion and the ozone, and interference is obtained according to the mass-to-charge ratio. It has a mass separation step of separating an ion product from a target ion and a measurement step of measuring the signal intensity of the interference ion product separated in the mass separation step.

本発明によれば、質量分析法において、質量電荷比が干渉イオンと同程度の目的イオンを、干渉イオンから高精度で分離できる。 According to the present invention, in mass spectrometry, a target ion having a mass-to-charge ratio similar to that of an interfering ion can be separated from the interfering ion with high accuracy.

本発明の実施形態に係る質量分析装置の原理図。The principle diagram of the mass spectrometer according to the embodiment of this invention. 質量電荷比に対するBaイオンおよびBaイオン生成物の信号強度を示すグラフ(実施例1)。The graph which shows the signal intensity of Ba ion and Ba ion product with respect to mass charge ratio (Example 1). 質量電荷比に対するCsイオンおよびCsイオン生成物の信号強度を示すグラフ(実施例2)。The graph which shows the signal intensity of Cs ion and Cs ion product with respect to mass charge ratio (Example 2). 質量電荷比に対するSrイオンおよびSrイオン生成物の信号強度を示すグラフ(実施例3)。The graph which shows the signal intensity of Sr ion and Sr ion product with respect to mass charge ratio (Example 3). 質量電荷比に対するRbイオンおよびRbイオン生成物の信号強度を示すグラフ(実施例4)。The graph which shows the signal intensity of Rb ion and Rb ion product with respect to mass charge ratio (Example 4). の信号強度に対するMOの信号強度の比を示すグラフ(実施例5)。The graph which shows the ratio of the signal strength of MO + to the signal strength of M + (Example 5).

図1は、本発明の実施形態に係る質量分析装置の原理を示している。この質量分析装置は、イオンレンズと、第一の質量分離部であるQMS1と、反応セルと、オゾン発生部であるオゾン発生器と、第二の質量分離部であるQMS2と、計測部を備える検出器を有している。イオンレンズは、各種イオンを収束して、QMS1に導入する。QMS1は、質量電荷比m/zに応じて、質量電荷比が同程度の目的イオンおよび干渉イオンを、各種イオンから分離して反応セルに導入する。 FIG. 1 shows the principle of the mass spectrometer according to the embodiment of the present invention. This mass spectrometer includes an ion lens, a QMS1 which is a first mass separator, a reaction cell, an ozone generator which is an ozone generator, a QMS2 which is a second mass separator, and a measurement unit. It has a detector. The ion lens converges various ions and introduces them into QMS1. QMS1 separates target ions and interfering ions having the same mass-to-charge ratio from various ions according to the mass-to-charge ratio m / z and introduces them into the reaction cell.

反応セルは、QMS1で分離された目的イオンと干渉イオンが導入される。オゾン発生器は反応セルに接続されており、取り込んだ酸素ガスOをオゾンOに変換して反応セルに供給する。反応セルでは、目的イオンがOと反応して目的イオン生成物が生じる。なお、目的イオン生成物は、目的イオンと酸素以外の元素を含んでいてもよい。例えば、目的イオン138Ba(m/z=138)がOと反応すると、138Ba16(m/z=155)や138Ba1416 (m/z=200)等の目的イオン生成物が得られる。このように、反応セルに不可避的に存在するHやNも目的イオン生成物の構成元素となり得る。The target ion and the interfering ion separated by QMS1 are introduced into the reaction cell. The ozone generator is connected to the reaction cell, and the taken-in oxygen gas O 2 is converted into ozone O 3 and supplied to the reaction cell. The reaction cell, target ions product occurs react purpose ions and O 3. The target ion product may contain elements other than the target ion and oxygen. For example, when the target ion 138 Ba + (m / z = 138) reacts with O 3 , 138 Ba 16 O 1 H + (m / z = 155) or 138 Ba 14 N 16 O 3 + (m / z = 200). ) Etc., the target ion product is obtained. As described above, H and N inevitably present in the reaction cell can also be constituent elements of the target ion product.

反応セルにOを供給しても目的イオンとほとんど反応しない場合でも、反応セルにOを供給することによって、目的イオンがOと反応して目的イオン生成物が得られる。なお、オゾン発生器が窒素ガスNとOを取り込んで、NOを反応セルに供給してもよい。NOも目的イオンと干渉イオンの一方と反応して、その一方のイオンの質量電荷比を変化させると考えられる。質量電荷比が同程度の目的イオンと干渉イオンの組み合わせとして、CsイオンとBaイオン、BaイオンとCsイオン、SrイオンとRbイオン、およびRbイオンとSrイオン等がそれぞれ例示される。QMS2では、目的イオン生成物が、質量電荷比に応じて、干渉イオンから分離される。検出器では、QMS2で分離された目的イオン生成物の信号強度を計測する。本実施形態に係る質量分析装置は、通常の質量分析装置の反応セルにオゾン発生器を接続して作製してもよい。Even when O 2 is supplied to the reaction cell and hardly reacts with the target ion, by supplying O 3 to the reaction cell, the target ion reacts with O 3 to obtain the target ion product. The ozone generator may take in nitrogen gases N 2 and O 2 and supply NO x to the reaction cell. It is considered that NO x also reacts with one of the target ion and the interfering ion to change the mass-to-charge ratio of the one ion. Examples of combinations of target ions and interfering ions having the same mass-to-charge ratio include Cs ions and Ba ions, Ba ions and Cs ions, Sr ions and Rb ions, and Rb ions and Sr ions, respectively. In QMS2, the target ion product is separated from the interfering ions according to the mass-to-charge ratio. The detector measures the signal strength of the target ion product separated by QMS2. The mass spectrometer according to the present embodiment may be manufactured by connecting an ozone generator to the reaction cell of a normal mass spectrometer.

なお、本実施形態では、質量電荷比が同程度の目的イオンと干渉イオンを反応セルに存在させ、反応セルで目的イオンをOと反応させて目的イオン生成物を得る。そして、目的イオン、すなわち干渉イオンと質量電荷比が大きく異なるようになった目的イオン生成物を、質量電荷比に応じて干渉イオンから分離し、分離された目的イオン生成物の信号強度を計測することで目的イオンを分析する。これに代えて、反応セルで干渉イオンをOと反応させて干渉イオン生成物を得て、干渉イオン、すなわち目的イオンと質量電荷比が大きく異なるようになった干渉イオン生成物から、質量電荷比に応じて目的イオンを分離し、分離された目的イオンを分析してもよい。In the present embodiment, the mass-to-charge ratio of interfering ions and comparable objects ions are present in the reaction cell, to obtain the desired ionic product by reacting the desired ion and O 3 in the reaction cell. Then, the target ion, that is, the target ion product whose mass-to-charge ratio is significantly different from that of the interfering ion is separated from the interfering ion according to the mass-to-charge ratio, and the signal strength of the separated target ion product is measured. By doing so, the target ion is analyzed. Alternatively, the interfering ions in the reaction cell to obtain an interference ion product is reacted with O 3, interfering ions, i.e. from interfering ions product target ions and mass-to-charge ratio is greater different way, the mass to charge The target ions may be separated according to the ratio and the separated target ions may be analyzed.

すなわち、本発明の他の実施形態に係る質量分析装置は、目的イオンと干渉イオンが導入される反応セルと、反応セルにオゾンを供給するオゾン発生部であるオゾン発生器と、目的イオンが、質量電荷比に応じて、反応セルで干渉イオンがオゾンと反応して生じた干渉イオン生成物から分離される質量分離部であるQMS2と、QMS2で分離された目的イオンの信号強度を計測する計測部を備える検出器を有する。 That is, in the mass spectrometer according to another embodiment of the present invention, the reaction cell into which the target ion and the interfering ion are introduced, the ozone generator which is the ozone generator that supplies ozone to the reaction cell, and the target ion are used. Measurement to measure the signal strength of QMS2, which is a mass separator that separates interfering ions from the interfering ion products generated by the reaction of interfering ions with ozone in the reaction cell, and the target ions separated by QMS2, according to the mass-to-charge ratio. It has a detector with a part.

本発明の実施形態に係る質量分析方法は、各実施形態の質量分析装置を使用してもよいし、使用しなくてもよい。本実施形態の質量分析方法は、反応工程と、質量分離工程と、計測工程とを備えている。反応工程では、目的イオンおよび干渉イオンにオゾンを供給し、目的イオンとオゾンの反応生成物である目的イオン生成物を得る。質量分離工程では、質量電荷比に応じて、目的イオン生成物を干渉イオンから分離する。計測工程では、質量分離工程で分離された目的イオン生成物の信号強度を計測する。なお、各実施形態の質量分析装置を使用する場合、反応工程、質量分離工程、および計測工程は、反応セル、QMS2、および検出器でそれぞれ行われる。 The mass spectrometric method according to the embodiment of the present invention may or may not use the mass spectrometric apparatus of each embodiment. The mass spectrometric method of the present embodiment includes a reaction step, a mass separation step, and a measurement step. In the reaction step, ozone is supplied to the target ion and the interfering ion to obtain a target ion product which is a reaction product of the target ion and ozone. In the mass separation step, the target ion product is separated from the interfering ions according to the mass-to-charge ratio. In the measurement step, the signal intensity of the target ion product separated in the mass separation step is measured. When the mass spectrometer of each embodiment is used, the reaction step, the mass separation step, and the measurement step are performed in the reaction cell, the QMS2, and the detector, respectively.

この方法に代えて、目的イオンおよび干渉イオンにオゾンを供給し、干渉イオンとオゾンとの反応生成物である干渉イオン生成物を得て、質量電荷比に応じて目的イオンを干渉イオン生成物から分離し、分離された目的イオンの信号強度を計測してもよい。本実施形態の質量分析方法では、質量電荷比が同程度の目的イオンと干渉イオンの一方をOと反応させて、この一方の質量電荷比を大きく変えるので、目的イオンを干渉イオンから高精度で分離できる。このため、目的イオンに干渉イオンがほとんど混入していない状態で、目的イオンの分析が可能となる。Instead of this method, ozone is supplied to the target ion and the interfering ion to obtain an interfering ion product which is a reaction product of the interfering ion and ozone, and the target ion is extracted from the interfering ion product according to the mass-to-charge ratio. It may be separated and the signal strength of the separated target ion may be measured. The mass spectrometry method of the present embodiment, one mass-to-charge ratios of interfering ions comparable target ions reacted with O 3, since significantly changing the mass-to-charge ratio of the one high precision the desired ions from interfering ions Can be separated by. Therefore, it is possible to analyze the target ion in a state where the target ion is hardly mixed with the interference ion.

実施例1
図1に示すような誘導結合プラズマタンデム四重極質量分析計(ICP−QMS/QMS)(アジレント社、Agilent−8800型ICP−QMS/QMS装置)の反応セルにOを供給できるようにして、以下のようにして元素分析を行った。m/z=138のイオンが通過するようにQMS1を、m/z=2〜260のイオンが通過するようにQMS2をそれぞれ設定した。質量分析用のバリウム標準液と硝酸を混合して、バリウムが1mg/kg、硝酸が2質量%となるような試料液を作製した。
Example 1
Inductively coupled plasma tandem quadrupole mass spectrometer as shown in FIG. 1 (ICP-QMS / QMS) ( Agilent, Agilent-8800 type ICP-QMS / QMS system) so as to be supplied to O 3 in the reaction cell , Elemental analysis was performed as follows. QMS1 was set so that the ions of m / z = 138 would pass through, and QMS2 was set so that the ions of m / z = 2-260 would pass through. A barium standard solution for mass spectrometry and nitric acid were mixed to prepare a sample solution having a barium content of 1 mg / kg and a nitric acid content of 2% by mass.

反応セルにOを含む反応ガスまたはOを1.0mL/分で供給しながら、この試料液をこの装置に投入した。なお、Oを含む反応ガスは、オゾン発生器にOを供給して、Oの濃度を約10質量%にしたものである。すなわち、Oを含む反応ガスは、約10質量%のOと約90質量%のOの混合ガスである。オゾン発生器の稼働と非稼働を切り替えることによって、反応セルにOとOの混合ガス(以下、実施例1から実施例4で単に「O」と記載することがある)またはOのみ(以下、実施例1から実施例4で単に「O」と記載することがある)をそれぞれ供給した。This sample solution was charged into the apparatus while supplying the reaction cell with a reaction gas containing O 3 or O 2 at 1.0 mL / min. The reaction gas containing O 3 is obtained by supplying O 2 to an ozone generator to make the concentration of O 3 about 10% by mass. That is, a reaction gas containing O 3 is the O 3 of about 10% to about 90% by weight of a mixed gas of O 2. By switching between the operation and non-operation of the ozone generator, a mixed gas of O 3 and O 2 (hereinafter, may be simply referred to as “O 3 ” in Examples 1 to 4) or O 2 in the reaction cell. Only (hereinafter, may be simply referred to as "O 2 " in Examples 1 to 4) were supplied.

検出部で計測した信号強度を図2に示す。なお、図2では、2質量%硝酸水溶液の信号強度を引いた値を示している。また、図2では、m/z=2〜260のうち、信号強度が高いm/zを選択して示している。これらは、実施例2から実施例4でも同様である。図2に示すように、Oを供給した場合では、138Ba(m/z=138)の高い信号強度が観測された。これに対して、Oを供給した場合では、138Ba(m/z=138)の信号強度がかなり減少した。Oが高い反応性を備えているからだと考えられる。The signal strength measured by the detection unit is shown in FIG. Note that FIG. 2 shows a value obtained by subtracting the signal intensity of the 2 mass% nitric acid aqueous solution. Further, in FIG. 2, m / z having a high signal strength is selected and shown from m / z = 2 to 260. These are the same in Examples 2 to 4. As shown in FIG. 2, when O 2 was supplied, a high signal strength of 138 Ba + (m / z = 138) was observed. On the other hand, when O 3 was supplied, the signal strength of 138 Ba + (m / z = 138) was considerably reduced. O 3 is considered because have high reactivity.

なお、下記に示すように、反応セルに導入された138Ba(m/z=138)は、Oと反応をしてBaイオン生成物を生成し、質量電荷比が大きく変化した。
138Ba138Ba16 (m/z=154)
138Ba138Ba16 (m/z=155)
138Ba138Ba1416 (m/z=200)
138Ba138Ba1416 (m/z=218)
As shown below, 138 Ba + (m / z = 138) introduced into the reaction cell reacted with O 3 to produce a Ba ion product, and the mass-to-charge ratio changed significantly.
138 Ba +138 Ba 16 O + (m / z = 154)
138 Ba +138 Ba 16 O 1 H + (m / z = 155)
138 Ba +138 Ba 14 N 16 O 3 + (m / z = 200)
138 Ba +138 Ba 14 N 16 O 5 1 H + (m / z = 218)

実施例2
m/z=133のイオンが通過するようにQMS1を設定したことを除いて、実施例1と同様にして、セシウム標準液を含有する試料液の元素分析を行った。その結果を図3に示す。図3に示すように、OとOのいずれを供給した場合でも、133Cs(m/z=133)の高い信号強度が観測された。一方、他の質量電荷比では、信号強度が極めて低かった。
Example 2
Elemental analysis of the sample solution containing the cesium standard solution was performed in the same manner as in Example 1 except that QMS1 was set so that ions of m / z = 133 passed through. The result is shown in FIG. As shown in FIG. 3, a high signal strength of 133 Cs + (m / z = 133) was observed regardless of whether O 3 or O 2 was supplied. On the other hand, at other mass-to-charge ratios, the signal strength was extremely low.

実施例1と実施例2より、BaイオンはOと反応してBaイオン生成物となって質量電荷比が大きく変化したのに対して、CsイオンはOとほとんど反応せずに質量電荷比が変化しなかった。したがって、質量電荷比が同程度のBaイオンとCsイオンが混在する反応セルにOを供給すれば、Baイオンの質量電荷比が大きく変化し、質量電荷比に応じて、Csイオンから分離できる。分離されたBaイオン生成物を分析することによって、Csイオンをほとんど含まないBaイオンの分析結果が得られる。これに代えて、CsイオンをBaイオン生成物から分離して、Baイオンをほとんど含まないCsイオンの分析結果を得てもよい。また、反応セルにOを供給しても、BaイオンとCsイオンを質量電荷比に応じて精度よく分離できないことも確認できた。From Examples 1 and 2, the Ba ion reacts with O 3 to form a Ba ion product and the mass-to-charge ratio changes significantly, whereas the Cs ion hardly reacts with O 3 and has a mass charge. The ratio did not change. Therefore, if supplying O 3 to a reaction cell mass to charge ratio comparable Ba ions and Cs ions are mixed greatly vary the mass to charge ratio of Ba ions according to their mass-to-charge ratio, it can be separated from the Cs ions .. By analyzing the separated Ba ion product, the analysis result of Ba ion containing almost no Cs ion can be obtained. Alternatively, the Cs ion may be separated from the Ba ion product to obtain an analysis result of the Cs ion containing almost no Ba ion. It was also confirmed that even if O 2 was supplied to the reaction cell, Ba ions and Cs ions could not be separated accurately according to the mass-to-charge ratio.

実施例3
m/z=88のイオンが通過するようにQMS1を設定したことを除いて、実施例1と同様にして、ストロンチウム標準液を含有する試料液の元素分析を行った。その結果を図4に示す。図4に示すように、Oを供給した場合では、88Sr(m/z=88)の高い信号強度が観測された。これに対して、Oを供給した場合では、88Sr(m/z=88)の信号強度がかなり減少した。88SrがOと反応して、Srイオン生成物となって質量電荷比が大きく変化したことがわかった。
Example 3
Elemental analysis of the sample solution containing the strontium standard solution was performed in the same manner as in Example 1 except that QMS1 was set so that ions of m / z = 88 could pass through. The result is shown in FIG. As shown in FIG. 4, when O 2 was supplied, a high signal strength of 88 Sr + (m / z = 88) was observed. On the other hand, when O 3 was supplied, the signal strength of 88 Sr + (m / z = 88) was considerably reduced. It was found that 88 Sr + reacted with O 3 to become an Sr ion product and the mass-to-charge ratio changed significantly.

実施例4
m/z=85のイオンが通過するようにQMS1を設定したことを除いて、実施例1と同様にして、ルビジウム標準液を含有する試料液の元素分析を行った。その結果を図5に示す。図5に示すように、OとOのいずれを供給した場合でも、85Rb(m/z=85)の高い信号強度が観測された。一方、他の質量電荷比では、信号強度が極めて低かった。
Example 4
Elemental analysis of the sample solution containing the rubidium standard solution was performed in the same manner as in Example 1 except that QMS1 was set so that ions of m / z = 85 pass through. The result is shown in FIG. As shown in FIG. 5, a high signal strength of 85 Rb + (m / z = 85) was observed regardless of whether O 3 or O 2 was supplied. On the other hand, at other mass-to-charge ratios, the signal strength was extremely low.

実施例3と実施例4より、SrイオンはOと反応してSrイオン生成物となって質量電荷比が大きく変化したのに対して、RbイオンはOとほとんど反応せずに質量電荷比が変化しなかった。したがって、質量電荷比が同程度のSrイオンとRbイオンが混在する反応セルにOを供給すれば、Srイオンの質量電荷比が大きく変化し、質量電荷比に応じて、Rbイオンから分離できる。分離されたSrイオン生成物を分析することによって、Rbイオンをほとんど含まないSrイオンの分析結果が得られる。なお、RbイオンをSrイオン生成物から分離して、Srイオンをほとんど含まないRbイオンの分析結果を得てもよい。また、反応セルにOを供給しても、SrイオンとRbイオンを質量電荷比に応じて精度よく分離できないことも確認できた。From Examples 3 and 4, the Sr ion reacts with O 3 to form an Sr ion product and the mass-to-charge ratio changes significantly, whereas the Rb ion hardly reacts with O 3 and has a mass charge. The ratio did not change. Therefore, if supplying O 3 to a reaction cell mass to charge ratio comparable Sr ions and Rb ions are mixed greatly vary the mass to charge ratio of Sr ions, depending on the mass-to-charge ratio, it can be separated from Rb ions .. By analyzing the separated Sr ion product, the analysis result of Sr ion containing almost no Rb ion can be obtained. The Rb ion may be separated from the Sr ion product to obtain an analysis result of the Rb ion containing almost no Sr ion. It was also confirmed that even if O 2 was supplied to the reaction cell, Sr ions and Rb ions could not be separated accurately according to the mass-to-charge ratio.

実施例5
図1に示す質量分析計のオゾン発生器と反応セルの間の反応ガス導入管にN導入管を接続した。オゾン発生器に流量0.35mL/分でOを供給し、反応ガス導入管に流量0.7mL/分でNを供給した。オゾン発生器を稼働したときには、O、O、およびNの混合ガス(以下、本実施例で単に「O」と記載することがある)が反応セルに導入され、オゾン発生器を稼働しなかったときには、OとNの混合ガス(以下、本実施例で単に「O」と記載することがある)が反応セルに導入された。
Example 5
Connecting the N 2 inlet tube into the reaction gas inlet tube between the ozone generator and the reaction cell of the mass spectrometer shown in FIG. O 2 was supplied to the ozone generator at a flow rate of 0.35 mL / min, and N 2 was supplied to the reaction gas introduction tube at a flow rate of 0.7 mL / min. When the ozone generator is operated, a mixed gas of O 3 , O 2 , and N 2 (hereinafter, may be simply referred to as “O 3 ” in this embodiment) is introduced into the reaction cell, and the ozone generator is operated. When it was not in operation, a mixed gas of O 2 and N 2 (hereinafter, may be simply referred to as “O 2 ” in this embodiment) was introduced into the reaction cell.

反応セルにOまたはOを供給しながら、52Cr55Mn56Fe59Co60Ni72Ge、または77Seの各元素イオンMを含む試料液をこの装置に投入し、QMS1経由で反応セルにMをそれぞれ導入した。反応セルにOとOのどちらを供給したときでも、反応セルでMの一部が酸化物イオンMOとなった。すなわち、例えば52Crの一部が52Cr16となった。そして、QMS2を通過したMとMOの信号強度を検出器でそれぞれ計測した。A sample containing each element ion M + of 52 Cr + , 55 Mn + , 56 Fe + , 59 Co + , 60 Ni + , 72 Ge + , or 77 Se + while supplying O 3 or O 2 to the reaction cell. The liquid was poured into this apparatus, and M + was introduced into the reaction cells via QMS1 respectively. When either O 3 or O 2 was supplied to the reaction cell, a part of M + became oxide ion MO + in the reaction cell. That is, for example 52 Cr + part of becomes 52 Cr 16 O +. Then, the signal intensities of M + and MO + that passed through QMS2 were measured by the detectors, respectively.

各元素Mについて、検出器で測定されたMの信号強度に対するMOの信号強度の比、つまり、MOの信号強度/Mの信号強度(以下単に「MO/M」と記載することがある)を図6に示す。なお、MOは、52Cr1655Mn1656Fe1659Co1660Ni1672Ge16、または77Se16を示している。図6に示すように、反応セルにOを供給したときのMO/Mは、反応セルにOを供給したときのMO/Mの約2倍〜8倍だった。For each element M, the ratio of the signal intensity of MO + to the measured M + signal intensity at the detector, i.e., wherein the MO + signal strength / M + signal strength (hereinafter simply "MO + / M +" (May be done) is shown in FIG. MO + indicates 52 Cr 16 O + , 55 Mn 16 O + , 56 Fe 16 O + , 59 Co 16 O + , 60 Ni 16 O + , 72 Ge 16 O + , or 77 Se 16 O + . ing. As shown in FIG. 6, MO + / M + when O 3 was supplied to the reaction cell was about 2 to 8 times that of MO + / M + when O 2 was supplied to the reaction cell.

これらの結果から、本発明の質量分析装置または質量分析方法を用いることによって、52Cr55Mn56Fe59Co60Ni72Ge、または77Seを分析するときに、これらの各元素イオンと、これらの各元素イオンと同程度の質量電荷比を有する他の元素イオンを分離できる。すなわち、本発明の質量分析装置または質量分析方法を用いることによって、Cr55Mn56Fe59Co60Ni72Ge、または77Seの分析感度の向上が期待できる。 From these results, 52 Cr + , 55 Mn + , 56 Fe + , 59 Co + , 60 Ni + , 72 Ge + , or 77 Se + are analyzed by using the mass spectrometer or mass spectrometry method of the present invention. At the same time, each of these elemental ions can be separated from other elemental ions having a mass-to-charge ratio similar to that of each of these elemental ions. That is, by using the mass spectrometer or mass spectrometry method of the present invention, the analysis sensitivity of 2 Cr + , 55 Mn + , 56 Fe + , 59 Co + , 60 Ni + , 72 Ge + , or 77 Se + is improved. Can be expected.

Claims (7)

目的イオンと干渉イオンが導入される反応セルと、
前記反応セルに接続されたオゾン発生部と、
前記反応セルで前記目的イオンがオゾンと反応して生じ、前記目的イオンと酸素を含む目的イオン生成物が、質量電荷比に応じて、前記干渉イオンから分離される質量分離部と、
前記質量分離部で分離された前記目的イオン生成物の信号強度を計測する計測部と、
を有する質量分析装置。
Reaction cells into which target ions and interfering ions are introduced,
The ozone generator connected to the reaction cell and
In the reaction cell, the target ion is generated by reacting with ozone, and the target ion product containing the target ion and oxygen is separated from the interfering ion according to the mass-to-charge ratio.
A measuring unit that measures the signal intensity of the target ion product separated by the mass separating unit, and a measuring unit.
Mass spectrometer with.
目的イオンと干渉イオンが導入される反応セルと、
前記反応セルに接続されたオゾン発生部と、
前記目的イオンが、質量電荷比に応じて、前記反応セルで前記干渉イオンがオゾンと反応して生じた干渉イオン生成物から分離される質量分離部と、
前記質量分離部で分離された前記目的イオンの信号強度を計測する計測部と、
を有する質量分析装置。
Reaction cells into which target ions and interfering ions are introduced,
The ozone generator connected to the reaction cell and
A mass separation unit in which the target ion is separated from the interference ion product generated by the reaction of the interference ion with ozone in the reaction cell according to the mass-to-charge ratio.
A measuring unit that measures the signal intensity of the target ion separated by the mass separating unit, and a measuring unit.
Mass spectrometer with.
請求項1または2において、
質量電荷比に応じて、前記目的イオンおよび前記干渉イオンを各種イオンから分離して前記反応セルに導入する他の質量分離部をさらに有する質量分析装置。
In claim 1 or 2,
Depending on the mass-to-charge ratio, the target ion and the interfering ion, further comprising a mass spectrometer other mass separation unit introduced before Symbol reaction cell separated from a variety of ions.
目的イオンおよび干渉イオンにオゾンを供給し、前記目的イオンとオゾンの反応生成物であり、前記目的イオンと酸素を含む目的イオン生成物を得る反応工程と、
質量電荷比に応じて、前記目的イオン生成物を前記干渉イオンから分離する質量分離工程と、
前記質量分離工程で分離された前記目的イオン生成物の信号強度を計測する計測工程と、
を有する質量分析方法。
Ozone is supplied to the target ion and interfering ions, Ri reaction products der of the target ions and ozone, the reaction step to obtain the desired ionic product containing the target ion and oxygen,
A mass separation step of separating the target ion product from the interfering ions according to the mass-to-charge ratio,
A measurement step for measuring the signal strength of the target ion product separated in the mass separation step, and a measurement step.
Mass spectrometric method having.
目的イオンおよび干渉イオンにオゾンを供給し、前記干渉イオンとオゾンとの反応生成物である干渉イオン生成物を得る反応工程と、
質量電荷比に応じて、前記干渉イオン生成物を前記目的イオンから分離する質量分離工程と、
前記質量分離工程で分離された前記干渉イオン生成物の信号強度を計測する計測工程と、
を有する質量分析方法。
A reaction step of supplying ozone to a target ion and an interfering ion to obtain an interfering ion product which is a reaction product of the interfering ion and ozone.
A mass separation step of separating the interference ion product from the target ion according to the mass-to-charge ratio,
A measurement step for measuring the signal strength of the interference ion product separated in the mass separation step, and a measurement step.
Mass spectrometric method having.
請求項4または5において、
前記目的イオンがCsイオンとBaイオンの一方で、前記干渉イオンがCsイオンとBaイオンの他方である質量分析方法。
In claim 4 or 5,
A mass spectrometric method in which the target ion is one of Cs ions and Ba ions, and the interference ion is the other of Cs ions and Ba ions.
請求項4または5において、
前記目的イオンがSrイオンとRbイオンの一方で、前記干渉イオンがSrイオンとRbイオンの他方である質量分析方法。
In claim 4 or 5,
A mass spectrometric method in which the target ions are Sr ions and Rb ions while the interfering ions are Sr ions and Rb ions.
JP2019542040A 2017-09-15 2018-09-10 Mass spectrometry method and mass spectrometer Active JP6924511B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017177729 2017-09-15
JP2017177729 2017-09-15
PCT/JP2018/033423 WO2019054325A1 (en) 2017-09-15 2018-09-10 Mass spectrometry method and mass spectrometry device

Publications (2)

Publication Number Publication Date
JPWO2019054325A1 JPWO2019054325A1 (en) 2020-04-02
JP6924511B2 true JP6924511B2 (en) 2021-08-25

Family

ID=65722833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019542040A Active JP6924511B2 (en) 2017-09-15 2018-09-10 Mass spectrometry method and mass spectrometer

Country Status (2)

Country Link
JP (1) JP6924511B2 (en)
WO (1) WO2019054325A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116106395A (en) * 2023-01-09 2023-05-12 北京清谱科技有限公司 A combined application system of an ozone generating device and a mass spectrometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003249431A (en) * 2002-02-25 2003-09-05 Hitachi Ltd Ashing device
JP2010054423A (en) * 2008-08-29 2010-03-11 Nomura Micro Sci Co Ltd Determination method of metal in resist cleaning agent
CN104508475B (en) * 2012-07-31 2018-05-04 莱克公司 Ion mobility spectrometer with high throughput
US20150260684A1 (en) * 2012-11-16 2015-09-17 Dh Technologies Development Pte. Ltd. Method and apparatus for ion mobility spectrometry
US20150380231A1 (en) * 2013-02-18 2015-12-31 Micromass Uk Limited Improved Efficiency and Precise Control of Gas Phase Reactions in Mass Spectrometers Using an Auto Ejection Ion Trap
JP6079515B2 (en) * 2013-09-09 2017-02-15 富士通株式会社 Secondary ion mass spectrometer
JP6237896B2 (en) * 2014-05-14 2017-11-29 株式会社島津製作所 Mass spectrometer
GB201513167D0 (en) * 2015-07-27 2015-09-09 Thermo Fisher Scient Bremen Elemental analysis of organic samples

Also Published As

Publication number Publication date
JPWO2019054325A1 (en) 2020-04-02
WO2019054325A1 (en) 2019-03-21

Similar Documents

Publication Publication Date Title
Naasz et al. Multi-element analysis of single nanoparticles by ICP-MS using quadrupole and time-of-flight technologies
Waraksa et al. Dopants and gas modifiers in ion mobility spectrometry
CA2941565C (en) Systems and methods for detection and quantification of selenium and silicon in samples
Tanimizu et al. Determination of ultra-low 236 U/238 U isotope ratios by tandem quadrupole ICP-MS/MS
US10748753B2 (en) Accelerator mass spectrometry system and associated method
Gall et al. Determination of mass-dependent variations in nickel isotope compositions using double spiking and MC-ICPMS
US10056241B2 (en) Addition of reactive species to ICP source in a mass spectrometer
US10651023B2 (en) Methods in mass spectrometry using collision gas as ion source
Quemet et al. Analysis of twenty five impurities in uranium matrix by ICP-MS with iron measurement optimized by using reaction collision cell, cold plasma or medium resolution
EP2976780A1 (en) Method and device for ionizing particles of a sample gas flow
Manard et al. Exploration of ICP platforms for measuring elemental impurities in uranium ore concentrates
JP7377067B2 (en) Inductively coupled plasma mass spectrometer with mass correction
Rousis et al. Attenuation of interference in collision/reaction cell inductively coupled plasma mass spectrometry, using helium and hydrogen as cell gases–application to multi-element analysis of mastic gum
JP6924511B2 (en) Mass spectrometry method and mass spectrometer
EP2421024A1 (en) Ionisation method for a universal gas analyzer
Hirata et al. A reaction cell as a sample introduction portal for detection of gaseous components in ICP-MS
Zhu et al. Determination of Rubidium by ID-ICP-QMS/QMS with Fluoromethane as the Reaction Cell Gas to Separate Spectral Interference from Strontium
CN119275081A (en) A sampling system and method for a stable isotope mass spectrometer
Soffey et al. Analysis of silicon, phosphorus and sulfur in 20% methanol using the Agilent 8800 Triple Quadrupole ICP-MS

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200708

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20200903

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201015

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201209

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210201

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210721

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210726

R150 Certificate of patent or registration of utility model

Ref document number: 6924511

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250