JP6927007B2 - Transfer equipment, transfer method - Google Patents

Description

The present invention relates to a transfer facility for transferring a container containing an article to a processing device for processing the article, and a method for transferring the container.

As the transfer equipment, for example, there is an equipment for transferring a cassette (container) containing a substrate in a chamber which is a processing device (see, for example, Patent Document 1). In the transfer equipment of Patent Document 1, the cassette transfer unit carries the cassette carried by the transport carriage unit into the equipment, and the cassette transfer unit (transfer machine) carries the cassette carried by the cassette transfer unit into the chamber. Reprint. Alternatively, the cassette transfer unit receives the cassette transferred to the chamber, and the cassette transfer unit carries out the cassette received by the cassette transfer unit to the transfer carriage unit.
The cassette carried in by the cassette transfer unit from the transfer carriage unit is placed on a support stand (load receiving table) provided above the chamber before being transferred to the chamber by the cassette transfer unit. Similarly, the cassette received by the cassette transfer unit from the chamber is placed on the support pedestal before being transferred to the transport carriage unit by the cassette transfer unit.
The cassette transfer unit transfers the cassette mounted on the support pedestal to the chamber by grasping the cassette from above and moving it up and down, or mounts the cassette received from the chamber on the support pedestal.

Korean Registered Patent No. 10-1511963

However, in the transfer equipment as described above, when the cassette transfer unit (transfer machine) grips the cassette (container) and moves it up and down, the cassette (container) interferes with the support stand (container). Therefore, in order to avoid interference with the support stand (load receiving stand), it is necessary to perform an operation such as turning the cassette (container). Therefore, there is a problem that it takes time to transfer the cassette (container) between the support stand (load receiving stand) and the chamber (processing device). In addition, the cassette transfer unit (transfer machine) cannot hold the cassette (container) in the positioned state by performing the above operation, and the transfer accuracy of the cassette transfer unit (transfer machine) There was a problem that it got worse.

Therefore, according to the present invention, in a transfer facility for transferring a container containing an article to a processing apparatus for processing an article, a load port of the processing apparatus and a loading platform provided above the load port of the processing apparatus are provided. It is an object of the present invention to provide a transfer facility and a transfer method capable of efficiently transferring a container between.

The problem to be solved by the present invention has been described above, and next, the means for solving this problem will be described.

That is, the transfer equipment of the present invention is a transfer equipment for transferring a container containing the article to a processing device that processes the article, and has a consignment stand provided above the processing device and the above. A transfer machine for transporting the container between the load receiving table and the processing device is provided, and the loading platform, the transfer machine, and the load port of the processing device are arranged at positions where they overlap each other in a plan view. The transfer machine is configured to carry out or carry in the container to the receiving table, and move the container to be carried out or carried in up and down between the receiving table and the processing device. A plurality of mounting portions for mounting the container are provided, and the plurality of mounting portions are on the elevating path of the container when the transfer machine carries in or out the container to the loading platform. When the container is moved up and down by the transfer machine, the container is configured to be movable in a direction avoiding an ascending / descending path of the container and in a direction in which the plurality of mounting portions are separated from each other. ..
In the above configuration, the load receiving table moves between the elevating path of the container and the position avoiding the elevating path of the container according to the elevating and lowering movement of the container by the transfer machine.
In the above configuration, the plurality of mounting portions move in a direction away from each other in accordance with the ascending / descending movement of the container by the transfer machine.

In the transfer equipment of the present invention, the consignment pedestal is configured to be movable in a direction orthogonal to the elevating path of the container.
In the above configuration, the load receiving table moves in a direction orthogonal to the lifting path of the container according to the raising and lowering movement of the container by the transfer machine.

The transfer equipment of the present invention includes a positioning device for positioning the container on the consignment stand in the transfer equipment, and the positioning device is used for the container when the container is moved up and down by the transfer machine. It is configured to be movable in a direction that avoids the ascending / descending path.
In the above configuration, the positioning device moves between the position where the container is positioned and the position where the container is avoided from the elevating path according to the elevating movement of the container by the transfer machine.

The transfer method of the present invention is a transfer method of a container for transferring a container containing the article to a processing device for processing the article, and the container is placed above the processing device. A load receiving table provided with a plurality of mounting portions, a transfer machine for raising and lowering and transporting the container between the load receiving table and the processing device, and a load port of the processing device are positioned so as to overlap each other in a plan view. The container arranged and supported by the consignment pedestal is carried out from the consignment pedestal by the transfer machine, and the plurality of mounting portions of the consignment pedestal are in a direction of avoiding the elevating path of the transfer machine. This is a method in which the transfer machine moves the container carried out from the loading platform up and down by moving the plurality of mounting portions in a direction away from each other.
In the above method, the load receiving table moves between the elevating path of the container and the position avoiding the elevating path of the container according to the elevating and lowering movement of the container by the transfer machine.

According to the transfer equipment and the transfer method of the container of the present invention, when the container is moved up and down between the load receiving table and the load port of the processing device, the load receiving table is moved to a position avoiding the lifting path of the container. Therefore, the container does not interfere with the cradle (the container does not come into contact with the cradle). Therefore, in order to avoid interference with the cradle, it is not necessary to rotate the container when the transfer machine moves the container up and down, and the transfer of the container between the cradle and the load port of the processing device is efficient. Can be done well. Further, since the transfer machine does not need to perform the above operation, the transfer machine can hold the container in a positioned state, and the transfer accuracy of the transfer machine can be improved.

It is a top view of the transfer equipment which concerns on this invention. It is a front view of the transfer equipment. It is a plan view of the transfer equipment, (a) is a plan view when a cassette is placed on a loading platform, and (b) is a plan view when a cassette is moved up and down by a transfer machine. It is a side sectional view of the floating unit in the transfer equipment. It is a side sectional view which shows the outline when the fork unit in the transfer equipment carries out a cassette from a transport carriage. It is a figure which shows the outline before the fork unit in the transfer equipment carries a cassette into the transfer equipment, (a) is the side view, (b) is the plan view. It is a side sectional view which shows the outline when the fork unit in the transfer equipment carries a cassette into the transfer equipment. It is a figure which shows the outline when the transfer machine in the transfer equipment carries out a cassette from a consignment stand, (a) is the side view, (b) is the plan view. It is a front sectional view which shows the outline when the transfer machine in the transfer equipment transfers a cassette to a load port of a vapor deposition apparatus.

The transfer equipment 10 according to the present invention will be described.
As shown in FIGS. 1 and 2, the transfer equipment 10 is a thin-film deposition apparatus 80 (“article”) that performs a thin-film deposition process on a substrate 91 (an example of an “article”) which is a work-in-process product of a semiconductor product or a liquid crystal display element product. This equipment is attached to an example of the processing apparatus), and the cassette 90 (an example of the “container”) accommodating the plate-shaped substrate 91 is transferred to the load port 83 of the vapor deposition apparatus 80. In the transfer equipment 10, the cassette 90 carried into the transfer equipment 10 is transferred to the load port 83 of the vapor deposition apparatus 80, and the cassette 90 carried out from the load port 83 of the vapor deposition apparatus 80 is transferred to the transfer equipment 10. It is carried out to the outside of.
The cassette 90 transported in the transfer equipment 10 is formed of a substantially box-shaped member having one side surface or both side surfaces open thereof, and is configured to accommodate a plurality of substrates 91 inside the cassette 90. The cassette 90 is formed with a plurality of flange portions 92 to be locked to the transfer machine 20 described later on the upper portion thereof. The flange portion 92 is composed of a hook-shaped member provided so as to project from the upper surface of the cassette 90, and is provided at a plurality of locations on the upper surface of the cassette 90.

The transfer equipment 10 is attached above the vapor deposition apparatus 80. The entire apparatus 80 of the thin-film deposition apparatus 80 attached to the transfer equipment 10 is covered with the apparatus housing 81. The apparatus housing 81 has an internal space inside which the vapor deposition apparatus 80 can be stored. The device housing 81 is formed with a cassette carry-in port 82 for carrying the cassette 90 inside, above the device housing 81.
The device housing 81 is provided with a load port 83 for mounting the cassette 90 in its internal space. Specifically, the load port 83 is provided directly below the cassette carry-in port 82 (directly below the transfer machine 20 described later, and on the elevating path of the cassette 90 that is moved up and down by the transfer machine 20).

A fork unit 40 for transporting the cassette 90 to the transfer equipment 10 is provided on the side of the transfer equipment 10 and above the vapor deposition apparatus 80. That is, the cassette 90 is above the vapor deposition apparatus 80 and is carried in or out from the side of the transfer equipment 10.
As shown in FIG. 1, the fork unit 40 mounts the cassette 90 and moves it back and forth in the horizontal direction. The fork unit 40 carries out the cassette 90 from the transport carriage 86 traveling along the carriage traveling rail 85, and carries the carried-out cassette 90 into the transfer equipment 10. Further, the fork unit 40 carries out the cassette 90 from the transfer equipment 10, and transfers the carried-out cassette 90 to the transport carriage 86.
The fork unit 40 swivels a fork 41 having a mounting surface 41a for mounting the cassette 90 on its upper surface, a bending / stretching arm 42 for moving the fork 41 back and forth in the horizontal direction, and a bending / stretching arm 42. It is mainly composed of a swivel table 43 and a swivel table 43.
The fork 41 is composed of a substantially rectangular plate on which the cassette 90 can be placed and transferred. Move in and out.
In the bending / stretching arm 42, the loading / unloading position 45 for loading / unloading the cassette 90 to the transport carriage 86, or the fork unit 40 and the transfer machine 20 move to the loading platform 30 by extending the pair of arms. On the other hand, the fork 41 is horizontally moved to the cassette loading / unloading position 11 for loading / unloading the cassette 90.
As shown in FIG. 1, buffer stations 95 for temporarily storing the cassette 90 are provided on both sides of the fork unit 40. The buffer station 95 is provided with a mounting table 96 for mounting the cassette 90.

As shown in FIGS. 1 and 2, the transfer equipment 10 is provided with a cassette carry-out outlet 14 for carrying out the cassette 90 to the load port 83 of the vapor deposition apparatus 80 at the lower portion thereof. The cassette carry-out port 14 is provided so as to communicate with the cassette carry-in port 82 of the device housing 81.

The transfer equipment 10 is the positioning of the transfer machine 20 which is the transporting part of the cassette 90 in the transfer equipment 10, the consignment pedestal 30 which is the receiving part of the cassette 90 in the transfer equipment 10, and the cassette 90 in the transfer equipment 10. A pusher 25 (an example of a “positioning device”), which is a unit, is provided.
The transfer machine 20, the load receiving table 30, and the load port 83 are arranged at positions where they overlap each other in a plan view. Specifically, the load receiving table 30 and the load port 83 are placed on the elevating path of the cassette 90 by the transfer machine 20 from above (ceiling side) of the transfer facility 10, the transfer machine 20, the load receiving table 30, and the load port 83. Are arranged in the order of.

As shown in FIG. 2, the transfer machine 20 carries out or carries in the cassette 90 to the load receiving table 30, and moves the cassette 90 to be carried out or carried in up and down between the load receiving table 30 and the load port 83. be. The transfer machine 20 is provided above the load port 83, and is arranged at a position overlapping the load receiving table 30 and the load port 83 in a plan view. The transfer machine 20 carries out the cassette 90 carried to the load receiving table 30 by the fork unit 40 from the load receiving table 30, or carries in the cassette 90 carried out from the load port 83 to the receiving table 30. The transfer machine 20 transports the cassette 90 by locking the upper part of the cassette 90 and moving it up and down in the vertical direction above the vapor deposition apparatus 80. The transfer machine 20 is mainly composed of an elevating mechanism 21 for moving the cassette 90 up and down and a locking mechanism 24 for locking the upper part of the cassette 90.

The elevating mechanism 21 supports the locking mechanism 24 in a suspended state by the rotating shaft 22B. The elevating mechanism 21 is composed of a first elevating part 22 that moves the locking mechanism 24 (cassette 90) up and down, and a second elevating part 23 that moves the first elevating part 22 and the locking mechanism 24 (cassette 90) up and down. It is configured. That is, the elevating mechanism 21 elevates and elevates the cassette 90 by two-step elevating movement.
The first elevating part 22 rotates a plurality of elevating belts 22A that suspend and support the locking mechanism 24, a rotating shaft 22B that integrally winds and unwinds the elevating belt 22A, and a rotating shaft 22B. It is mainly composed of the first motor 22C and the like. The first elevating unit 22 rotates the rotating shaft 22B by driving the first motor 22C to wind up and unwind the elevating belt 22A, thereby moving the locking mechanism 24 (cassette 90) up and down. Since the first elevating part 22 moves the locking mechanism 24 (cassette 90) up and down by winding and unwinding the elevating belt 22A, it is possible to easily finely align the cassette 90 with respect to the load port 83. can.
The second elevating part 23 includes a support 23A that rotatably supports both ends of the rotating shaft 22B, a guide body 23B that guides the support 23A rotatably, and a drive belt 23C that moves the support 23A up and down. It is mainly composed of a second motor 23D for rotating the drive belt 23C.
The support 23A is composed of a pair of long members, and the rotation shaft 22B is rotatably supported at the upper end portion erected in the vertical direction, and the lower end portion thereof can be raised and lowered by the guide body 23B. Be guided. The guide body 23B is composed of a pair of elongated members. The drive belt 23C is rotatably bridged between the upper end and the lower end of the guide body 23B. The second motor 23D is provided at the lower end of the guide body 23B.
The second elevating unit 23 drives the second motor 23D to rotate the drive belt 23C, thereby moving the support 23A up and down along the guide body 23B. As a result, the rotating shaft 22B supported by the support 23A moves up and down, and the locking mechanism 24 (cassette 90) supported by the lifting belt 22A moves up and down by the raising and lowering. The second elevating part 23 roughly aligns the cassette 90 with respect to the load port 83 by moving the rotating shaft 22B up and down between a pair of long guide bodies 23B extending in the vertical direction. ..
In this way, the elevating mechanism 21 lowers the cassette 90 to a rough position with respect to the load port 83 by the second elevating part 23, and then brings the cassette 90 closer to the load port 83 by the first elevating part 22. By lowering it to the position, the cassette 90 is aligned with the load port 83.

As shown in FIGS. 1 and 2, the locking mechanism 24 is supported by a plurality of elevating belts 22A and locks the flange portion 92 on the upper part of the cassette 90. The locking mechanism 24 has a locking portion 24A for locking the flange portion 92 of the cassette 90 on the side facing the cassette 90 when the cassette 90 is locked. A plurality of locking portions 24A (4 in FIG. 1) are provided at positions corresponding to the flange portions 92 of the cassette 90. The locking portion 24A is formed of a hook-shaped member that can be locked to the flange portion 92, and the hook-shaped member is configured to be rotatable in a predetermined direction. The locking mechanism 24 supports the cassette 90 in a suspended state by locking the flange portion 92 by the locking portion 24A.

As shown in FIG. 2, the load receiving table 30 is a table that receives the cassette 90 carried into the transfer equipment 10 by the fork unit 40 and the cassette 90 carried out from the load port 83 by the transfer machine 20. The loading platform 30 is located above the load port 83 at a position where the fork 41 of the fork unit 40 conveys the cassette 90 and the transfer machine 20 raises and lowers the cassette 90 at the intersection (cassette loading / unloading position 11). ).
As shown in FIG. 3A, when the fork unit 40 or the transfer machine 20 carries the cassette 90 onto the load receiving table 30, the fork unit 40 or the transfer machine 20 is on the load receiving table 30. When the cassette 90 is carried out, the transfer machine 20 is located on a path for raising and lowering the cassette 90 (lifting path of the cassette 90, cassette loading / unloading position 11). On the other hand, as shown in FIG. 3B, when the transfer machine 20 raises and lowers the cassette 90, the load receiving table 30 moves in a direction avoiding the raising and lowering path of the cassette 90. That is, the load receiving table 30 is configured to be movable according to the ascending / descending movement of the cassette 90 by the transfer machine 20.
As shown in FIGS. 1 to 3, the load receiving table 30 includes a plurality of floating tables 31 (an example of a “mounting portion”) on which the cassette 90 is mounted (four bodies in FIGS. 1 and 3) and a floating table 31. It is composed of a base 32 for supporting the base 32 and a rail 33 for sliding the base 32.

The floating table 31 is at a position where the cassette 90 conveyed by the fork unit 40 can be placed, and at a position where the transfer machine 20 can lock the upper portion of the cassette 90, so that the cassette 90 can be placed evenly. It is placed in a suitable position. The floating unit 50 is provided on the mounting surface 31a of the floating table 31. The floating unit 50 is for receiving and supporting the cassette 90 mounted on the mounting surface 31a so as to be movable in all directions in the horizontal direction. The floating unit 50 is formed in a circular shape and is housed inside a frame body constituting the floating table 31.
As shown in FIG. 4, the floating unit 50 has a structure in which a movable portion 52 provided with a support portion 51 for mounting and supporting the cassette 90 is movably received and supported with respect to the fixed portion 53 in the horizontal direction. Has. The floating unit 50 is provided by a rollable support 56 provided with a movable portion 52 provided with a support portion 51 for supporting an article placed in a state in which a plurality of rolling members 54 are rotatably held by a holder 55. , The fixed portion 53 is movably received and supported in all directions in the horizontal direction and rotatably in a plan view.
The rolling support 56 has a flat fixed portion side contact surface forming member 57a provided on the fixed portion 53 in an upward state and a flat movable portion side contact surface forming member 57a provided on the movable portion 52 in a downward state. A plurality of rolling members 54 are positioned between the members 57b and are movably provided in all directions in the horizontal direction with respect to the movable portion 52 and the fixed portion 53.
The floating unit 50 includes a movable portion returning means KF that returns and moves the movable portion 52 to a reference position for receiving an article in the horizontal direction with respect to the fixed portion 53, and a rolling support 56 in the horizontal direction with respect to the fixed portion 53. It has a support returning means SF for returning and moving to a reference position for receiving a movable portion.
The movable portion returning means KF is a magnet type returning means that moves and urges the movable portion 52 by the magnetic attraction force of the electromagnet 58a, and includes an electromagnet 58a on the fixed portion 53 side, a ferromagnetic material 58b on the movable portion 52 side, and the movable portion 52. Is moved and urged so that the magnets overlap at the same position in the plan view, so that the movable portion 52 is returned to a specific rotation phase in the rotation direction in the plan view.
The support returning means SF is an elastic urging type returning means that utilizes the elastic urging force of the coil spring 59, and is spaced at equal intervals in the circumferential direction on the radial outer side of the annular rolling support 56. A plurality of push-operated coil springs 59 are provided, and the radial outer side of the coil spring 59 is received by a spring receiver 59a provided in a fixed position 53 in a fixed position, and the rolling support 56 is received on the radial inner side. By pushing the rolling support 56 toward the moving portion, the rolling support 56 is returned to the reference position for receiving the movable portion.

As shown in FIGS. 2 and 3, the base 32 is composed of a plurality of base main bodies 32A that support the floating table 31 and a pair of seat plates 32B on which the base main body 32A is placed and supported. Will be done.
The base body 32A is a long member erected on the seat plate 32B, and the floating table 31 is supported on the upper portion thereof.
The seat plate 32B is composed of a rectangular plate-shaped member on which a plurality of base bodies 32A (two in FIG. 3) can be placed. The seat plate 32B is formed with engaging portions slidably engaged with the rail 33 at both ends in the longitudinal direction of the lower surface thereof.

The rail 33 extends horizontally in a direction orthogonal to the elevating path of the cassette 90 and in a direction away from the elevating path of the cassette 90. The rail 33 is laid at a position avoiding the elevating path of the cassette 90 so as not to interfere with the cassette 90 when the cassette 90 is moved up and down by the transfer machine 20. Two rails 33 are arranged in parallel with one seat plate 32B and slidably engage with an engaging portion formed on the lower surface of the seat plate 32B.

In the load receiving table 30, two base bodies 32A are supported by one seat plate 32B, and one floating table 31 is supported by each of the two base bodies 32A. The load receiving table 30 is configured so that the two seat plates 32B are arranged in parallel at predetermined intervals and slidable along the rail 33 so as to move horizontally in a direction away from each other. Specifically, when the fork unit 40 or the transfer machine 20 carries the cassette 90 onto the load receiving table 30, and when the fork unit 40 or the transfer machine 20 carries out the cassette 90 on the load receiving table 30. The two paired seat plates 32B slide along the rail 33 in the direction of approaching each other, and when the transfer machine 20 raises and lowers the cassette 90, the two paired seat plates 32B are separated from each other. It slides along the rail 33 in the direction. By sliding the pair of seat plates 32B constituting the base 32 along the rail 33 in this way, the floating tables 31 which are the mounting portions of the load receiving table 30 can move in the direction away from each other.

As shown in FIGS. 2 and 3, the pusher 25 positions the cassette 90 on the receiving platform 30. The pusher 25 abuts on the corner 90A (side surface of the lower corner) of the cassette 90 mounted on the cradle 30 to regulate the movement of the cassette 90 on the cradle 30 and position the cassette 90. .. The pusher 25 is erected one by one on each of the two seat plates 32B of the base 32, and the cassette 90 placed on the load receiving table 30 is sandwiched between the pusher 25 and the diagonal position of the cassette 90. Placed in the vicinity. The pusher 25 includes a pusher main body portion 25A supported by the seat plate 32B, and an arm portion 25B supported by the pusher main body portion 25A and capable of moving back and forth in the horizontal direction. The arm portion 25B is configured so as to be in contact with the corner portion 90A (side surface of the lower corner portion) of the cassette 90. The pusher 25 fits the arm portion 25B together with the arm portion 25B of the paired pusher 25 into the corner portion 90A (side surface of the lower corner portion) of the cassette 90 so as to sandwich the arm portion 25B from the diagonal position of the cassette 90 on the loading platform 30. By bringing them into contact with each other, the cassette 90 is aligned with a predetermined position. Here, the predetermined position is a position (cassette loading / unloading position 11) in which the transfer machine 20 can be locked and raised / lowered while holding the posture of the cassette 90 on the load receiving table 30. When the transfer machine 20 carries out the cassette 90 from the loading platform 30, the arm portion 25B abuts on the corner portion 90A (side surface of the lower corner portion) of the cassette 90 by extending and moving toward the cassette 90. .. When the cassette 90 is moved up and down by the transfer machine 20, the arm portion 25B moves in a direction avoiding the raising and lowering path of the cassette 90 by performing a contraction movement in a direction away from the cassette 90.

Next, a method of transferring the cassette 90 in the transfer equipment 10 will be described.
As shown in FIG. 5, when the cassette 90 is transported to a predetermined position by the transport carriage 86, the fork unit 40 extends the bending / extending arm 42 to move the fork 41 horizontally with respect to the transport carriage 86. The cassette 90 on the transport carriage 86 is placed and supported on the fork 41.
As shown in FIGS. 6 and 7, when the cassette 90 is mounted on the fork 41, the fork unit 40 bends the bending / extending arm 42 with the cassette 90 mounted on the fork 41 and bends the fork 41. Turn. Further, the fork unit 40 extends the bending / extending arm 42 to horizontally move the fork 41 to the upper part of the loading platform 30 (cassette loading / unloading position 11) of the transfer equipment 10. When the fork unit 40 conveys the cassette 90 to the upper part of the load receiving table 30, the fork 41 is lowered to place the cassette 90 on the load receiving table 30. As a result, the cassette 90 is transferred from the fork unit 40 to the loading platform 30.

As shown in FIGS. 7 and 8, when the cassette 90 is placed on the cradle 30, the fork unit 40 bends the bending / extending arm 42 and horizontally moves the fork 41 to a position away from the cradle 30. Let me. Further, the operation of the floating unit 50 of the load receiving table 30 is released (the movable portion 52 can move in the horizontal direction with respect to the fixed portion 53), and the cassette 90 becomes movable on the load receiving table 30. Subsequently, the arm portion 25B of the pusher 25 extends and moves toward the cassette 90 and comes into contact with the corner portion 90A of the cassette 90. As a result, the cassette 90 is sandwiched diagonally by the pair of arm portions 25B.
The pusher 25 moves the cassette 90 in all directions by expanding and contracting the pair of arm portions 25B with each other. Then, the pusher 25 moves the cassette 90 to a position (cassette loading / unloading position 11) where the locking portion 24A (locking mechanism 24) of the transfer machine 20 can lock the flange portion 92 of the cassette 90. That is, the pusher 25 positions the cassette 90 with respect to the elevating position of the transfer machine 20 by moving the cassette 90 in all directions. When the positioning of the cassette 90 by the pusher 25 is completed, the floating unit 50 operates (the movable portion 52 becomes immovable in the horizontal direction with respect to the fixed portion 53), and the cassette 90 becomes immovable on the load receiving table 30. .. As a result, the cassette 90 is held at the position positioned by the pusher 25, that is, the cassette loading / unloading position 11 on the cradle 30.

When the cassette 90 is held at the cassette loading / unloading position 11, the second elevating unit 23 of the transfer machine 20 is driven, and the locking mechanism 24 of the transfer machine 20 is lowered to the upper position of the cassette 90. Then, the locking portion 24A of the locking mechanism 24 is swiveled in a predetermined direction, so that the flange portion 92 of the cassette 90 is locked by the locking portion 24A. When the flange portion 92 is locked to the locking portion 24A, the operation of the floating unit 50 is released (the movable portion 52 can move horizontally with respect to the fixed portion 53). As a result, the cassette 90 can be moved up and down by the transfer machine 20.
When the operation of the floating unit 50 is released, the pusher 25 contracts and moves the arm portion 25B in the direction away from the cassette 90 (the direction avoiding the elevating path of the cassette 90).
When the arm portion 25B contracts and moves, the base 32 of the load receiving table 30 slides along the rail 33. Specifically, the pair of seat plates 32B located at the cassette loading / unloading position 11 slide horizontally along the rail 33 in the direction away from each other. As a result, the floating table 31 of the load receiving table 30 moves in a direction avoiding the elevating path of the cassette 90, and the elevating path of the cassette 90 by the transfer machine 20 is formed at the position where the floating table 31 has placed the cassette 90. Will be done.

When the floating table 31 of the loading platform 30 is separated from the cassette loading / unloading position 11, the second elevating unit 23 of the transfer machine 20 is driven, and the locking mechanism 24 that locks the cassette 90 descends toward the vapor deposition apparatus 80. .. Specifically, the drive belt 23C is operated by driving the second motor 23D, and the support 23A is lowered along the guide body 23B by the operation of the drive belt 23C. Then, the rotating shaft 22B supported by the support 23A descends together with the support 23A, and the locking mechanism 24 (cassette 90) supported by the elevating belt 22A descends to a predetermined position by the lowering.
As shown in FIG. 9, when the locking mechanism 24 descends to a predetermined position, the driving of the second elevating unit 23 is stopped and the first elevating unit 22 is driven. As a result, the cassette 90 locked to the locking mechanism 24 is transferred to the load port 83 of the vapor deposition apparatus 80. Specifically, when the drive of the second motor 23D is stopped, the first motor 22C is driven and the rotation shaft 22B is rotated. As a result, the elevating belt 22A that suspends and supports the locking mechanism 24 is unwound downward by the rotating shaft 22B, and the locking mechanism 24 (cassette 90) is lowered in accordance with the unwinding.

On the other hand, when the processing on the substrate 91 is completed in the vapor deposition apparatus 80, the locking portion 24A of the locking mechanism 24 locks the flange portion 92 of the cassette 90. Then, the first motor 22C is driven to rotate the rotation shaft 22B. As a result, the elevating belt 22A that suspends and supports the locking mechanism 24 is wound upward by the rotating shaft 22B, and the locking mechanism 24 rises in accordance with the winding, and the cassette 90 is carried out from the load port 83. Will be done. When the locking mechanism 24 rises to a predetermined position, the drive of the first motor 22C is stopped and the second motor 23D is driven. As a result, the drive belt 23C operates, and the drive belt 23C operates to raise the support 23A along the guide body 23B. Then, the rotation shaft 22B supported by the support 23A rises together with the support 23A, and the locking mechanism 24 supported by the elevating belt 22A rises due to the rise.
When the cassette 90 locked to the locking mechanism 24 rises above the load receiving table 30, the base 32 of the load receiving table 30 slides along the rail 33. Specifically, the pair of seat plates 32B separated from the cassette loading / unloading position 11 slide horizontally along the rail 33 in the direction of approaching each other. As a result, the floating table 31 is arranged at the cassette loading / unloading position 11.

When the floating table 31 is arranged at the cassette loading / unloading position 11, the second motor 23D is driven and the locking mechanism 24 is lowered. As a result, the cassette 90 is lowered and placed on the floating table 31. When the cassette 90 is placed on the floating table 31, the locking portion 24A of the locking mechanism 24 rotates in a predetermined direction, so that the locking portion 24A unlocks the flange portion 92. When the locking to the flange portion 92 by the locking portion 24A is released, the fork unit 40 extends the bending / extending arm 42 to horizontally move the fork 41 to the cassette loading / unloading position 11. Subsequently, the fork unit 40 raises the fork 41 to support the cassette 90 mounted on the loading platform 30 by mounting it on the fork 41. Further, the fork unit 40 refracts the bending / extending arm 42 and turns the fork 41 on which the cassette 90 is placed. Then, the fork unit 40 extends the bending / extending arm 42 to horizontally move the fork 41 to the transport carriage 86, and transfers the cassette 90 on the fork 41 to the transport carriage 86.

As described above, in the transfer equipment 10 according to the present invention, when the cassette 90 is moved up and down between the load receiving table 30 and the load port 83, the load receiving table 30 moves to a position avoiding the lifting path of the cassette 90. Therefore, the cassette 90 does not interfere with the load receiving table 30 (the cassette 90 does not come into contact with the load receiving table 30). Therefore, in order to avoid interference with the load receiving table 30, it is not necessary to rotate the cassette 90 when the transfer machine 20 moves the cassette 90 up and down, and the cassette 90 between the load receiving table 30 and the load port 83 does not need to be rotated. The transfer can be done efficiently. Further, since the transfer machine 20 does not need to perform the above operation, the transfer machine 20 can hold the cassette 90 in a positioned state, and the transfer accuracy of the transfer machine 20 can be improved.

In the present embodiment, the articles to be transferred in the transfer equipment 10 are not limited to the cassette 90, and can be transferred between the consignment pedestal 30 and the transfer machine 20. It does not matter if it is an article.
In the present embodiment, the transfer machine 20 moves the cassette 90 up and down in a state where the locking portion 24A of the transfer machine 20 locks the hook-shaped flange portion 92 on the upper part of the cassette 90. The present invention is not limited to this, and for example, the cassette 90 may be moved up and down while the transfer machine 20 grips the side surface of the cassette 90.
In the present embodiment, the transfer machine 20 raises and lowers the cassette 90 by two-step up and down movement by the first elevating part 22 and the second elevating part 23, but the present invention is not limited to this. Only one of the 1 elevating part 22 or the 2nd elevating part 23, that is, the cassette 90 may be moved up and down by a one-step elevating movement. Further, the first elevating part 22 raises and lowers the cassette 90 by winding and unwinding the elevating belt 22A attached to the locking mechanism 24 with respect to the rotating shaft 22B, but the present invention is not limited to this. The cassette 90 may be raised and lowered by raising and lowering the support frame that suspends and supports the locking mechanism 24 with a ball screw.
In the present embodiment, a plurality of floating units 50 are arranged on the mounting surface 41a in a state of being arranged at both ends in the width direction of the fork 41 along the longitudinal direction of the fork 41, but the cassette 90 The arrangement position and the number of the floating units 50 are not limited as long as they can be sufficiently supported on the fork 41.
In the present embodiment, the movable part returning means KF of the floating unit 50 is configured by the magnetic returning means, but the present invention is not limited to this, and the elastic urging type using the elastic urging force of the spring is used. It may be configured by the return means of. Similarly, in the present embodiment, the support returning means SF is configured by the elastic urging type returning means, but it may be configured by the magnet type returning means.
In the present embodiment, the pusher 25 regulates the position of the cassette 90 by abutting on the corner 90A of the cassette 90, but the position of the cassette 90 is not limited to this, but is the side surface of the cassette 90. If the position of the cassette 90 can be regulated at the time of contact, the central portion of the side surface of the cassette 90 may be contacted. Further, although the position of the cassette 90 is regulated by two pushers 25, the position is not limited to this, and the position may be regulated by one or three or more pushers 25.
In the present embodiment, the load receiving table 30 is composed of a plurality of floating tables 31 and a base 32, but the present invention is not limited to this, and the cassette 90 can be placed and moved. If so, it may be composed of one floating table 31 and a base 32 (base main body 32A, seat plate 32B).
In the present embodiment, the plurality of floating tables 31 are configured to be movable in directions away from each other, but the present invention is not limited to this, as long as the floating tables 31 can be moved to a position avoiding the elevating path of the cassette 90. All floating tables 31 may be moved in the same direction. Further, a plurality of floating tables 31 are configured to be movable in a direction horizontally orthogonal to the elevating path of the cassette 90, but the present invention is not limited to this, and the floating table 31 is moved to a position avoiding the elevating path of the cassette 90. If possible, the cassette 90 may be moved diagonally downward from the mounting position (cassette loading / unloading position 11) of the cassette 90 in a direction that is not horizontally orthogonal to the elevating path of the cassette 90.
In the present embodiment, the floating table 31 is moved via the base 32, but the present invention is not limited to this, and the floating table 31 itself may be moved directly.
In the present embodiment, the transfer equipment 10 is equipment attached to the vapor deposition apparatus 80 that performs a vapor deposition process on the substrate 91, but the present invention is not limited to this, and the process is not limited to this. As long as it is a transfer facility for transferring a container containing an article in the device, it may be a device attached to a device other than the vapor deposition device 80.

10 Transfer equipment 20 Transfer machine 30 Consignment stand 80 Evaporation equipment (processing equipment)
83 Load port 90 Cassette (container)
91 Substrate (article)

Claims (4)

A transfer facility that transfers a container containing the article to a processing device that processes the article.
A consignment stand provided above the processing device and
A transfer machine that transports the container between the consignment stand and the processing device, and
With
The loading platform, the transfer machine, and the load port of the processing device are arranged at positions where they overlap each other in a plan view.
The transfer machine is configured to carry out or carry in the container to the receiving table, and move the container to be carried out or carried in up and down between the receiving table and the processing device.
The consignment pedestal includes a plurality of mounting portions on which the container is mounted.
The plurality of mounting portions are
When the transfer machine carries in or out the container to the receiving platform, it is located on the elevating path of the container.
When the container is moved up and down by the transfer machine, the transfer is characterized in that the plurality of mounting portions are movable in a direction away from each other in a direction avoiding an ascending / descending path of the container. Facility. The transfer equipment according to claim 1, wherein the consignment stand is configured to be movable in a direction orthogonal to the elevating path of the container. A positioning device for positioning the container on the cradle is provided.
The transfer according to claim 1 or 2, wherein the positioning device is configured to be movable in a direction avoiding an ascending / descending path of the container when the container is moved up and down by the transfer machine. Facility. A method of transferring a container for transferring a container containing the article to a processing device for processing the article.
A loading platform provided above the processing device and having a plurality of mounting portions on which the container is placed, a transfer machine for moving the container up and down between the receiving table and the processing device, and the processing device. Place the load port and the above in a position where they overlap each other in a plan view.
The container supported by the cradle is carried out from the cradle by the transfer machine.
By moving the plurality of mounting portions of the loading platform in a direction avoiding the elevating path of the transfer machine and in a direction in which the plurality of loading portions are separated from each other , the container carried out from the loading platform is released. A transfer method characterized in that the transfer machine is moved up and down.

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