JP6933032B2 - Silicon oxide thin film laminated transparent material - Google Patents
Silicon oxide thin film laminated transparent material Download PDFInfo
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- JP6933032B2 JP6933032B2 JP2017148290A JP2017148290A JP6933032B2 JP 6933032 B2 JP6933032 B2 JP 6933032B2 JP 2017148290 A JP2017148290 A JP 2017148290A JP 2017148290 A JP2017148290 A JP 2017148290A JP 6933032 B2 JP6933032 B2 JP 6933032B2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 141
- 239000010409 thin film Substances 0.000 title claims description 69
- 229910052814 silicon oxide Inorganic materials 0.000 title claims description 56
- 239000012780 transparent material Substances 0.000 title claims description 4
- -1 silane compound Chemical class 0.000 claims description 33
- 229910000077 silane Inorganic materials 0.000 claims description 31
- 239000000377 silicon dioxide Substances 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 24
- 239000011230 binding agent Substances 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 18
- 239000010419 fine particle Substances 0.000 claims description 15
- 229920003023 plastic Polymers 0.000 claims description 11
- 239000004033 plastic Substances 0.000 claims description 11
- 229910021426 porous silicon Inorganic materials 0.000 claims description 11
- 229920000298 Cellophane Polymers 0.000 claims description 6
- 230000001588 bifunctional effect Effects 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 239000002390 adhesive tape Substances 0.000 claims description 4
- 230000007613 environmental effect Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 34
- 238000006482 condensation reaction Methods 0.000 description 19
- 239000002904 solvent Substances 0.000 description 19
- 239000000243 solution Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 14
- 238000006460 hydrolysis reaction Methods 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 13
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 13
- 239000007864 aqueous solution Substances 0.000 description 12
- 239000003377 acid catalyst Substances 0.000 description 11
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 11
- 229920000139 polyethylene terephthalate Polymers 0.000 description 11
- 239000005020 polyethylene terephthalate Substances 0.000 description 11
- 238000003756 stirring Methods 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 9
- 230000007062 hydrolysis Effects 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 238000011002 quantification Methods 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 125000005372 silanol group Chemical group 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 229910008051 Si-OH Inorganic materials 0.000 description 3
- 229910006358 Si—OH Inorganic materials 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 150000003377 silicon compounds Chemical class 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003301 hydrolyzing effect Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- 239000005995 Aluminium silicate Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 125000004423 acyloxy group Chemical group 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000005083 alkoxyalkoxy group Chemical group 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 125000002344 aminooxy group Chemical group [H]N([H])O[*] 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 125000004104 aryloxy group Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- MDLRQEHNDJOFQN-UHFFFAOYSA-N methoxy(dimethyl)silicon Chemical compound CO[Si](C)C MDLRQEHNDJOFQN-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
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- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Laminated Bodies (AREA)
Description
本発明は、酸化ケイ素薄膜積層透明体に関し、詳しくは、プラスチック基材の表面に多孔質酸化ケイ素薄膜を積層して成る酸化ケイ素薄膜積層透明体に関する。 The present invention relates to a silicon oxide thin film laminated transparent body, and more particularly to a silicon oxide thin film laminated transparent body formed by laminating a porous silicon oxide thin film on the surface of a plastic base material.
酸化ケイ素薄膜の形成方法として、例えば、以下の様な、物理蒸着法による方法(通常の真空蒸着、イオンプレーティング、スパッタリング法)と加水分解性シラン化合物を使用する方法が知られている。 As a method for forming the silicon oxide thin film, for example, the following methods by a physical vapor deposition method (ordinary vacuum deposition, ion plating, sputtering method) and a method using a hydrolyzable silane compound are known.
芳香族ポリカーボネート樹脂成形体の上に蒸着により反射防止膜(SiO2等)である薄膜を形成して成り、膜厚が1〜300nmであり、以下に定義する密着性が80%以上である積層膜付成形体(特許文献1)。
密着性:成形板の蒸着面にカッターナイフで1mm間隔の100個の碁盤目を作りニチバン製粘着テープ(商品名“セロテープ”)を圧着し、次いで密着したセロファンテープを直角にかつ急激に剥離した際に剥離せずに残った碁盤目の目数の割合(%)。
A thin film which is an antireflection film (SiO 2 etc.) is formed on an aromatic polycarbonate resin molded product by vapor deposition, and the film thickness is 1 to 300 nm, and the adhesion defined below is 80% or more. Molded body with film (Patent Document 1).
Adhesion: 100 grids at 1 mm intervals were made on the vapor-deposited surface of the molded plate with a cutter knife, Nichiban adhesive tape (trade name "Cellotape") was crimped, and then the adhered cellophane tape was peeled off at a right angle and rapidly. Percentage (%) of the number of grids that remained without peeling.
(1)シリカ微粒子、(2)加水分解性シラン化合物、水、前記ケイ素化合物の加水分解触媒及び溶媒を含有するバインダー液を混合して反応させ前記ケイ素化合物を加水分解し、ついで(3)シラノール基の縮合を促進する硬化触媒を添加して得られる低反射層液を樹脂基材上に被覆し、所定温度で反応硬化させてシリカ微粒子およびバインダーを含有する低反射層を形成させる方法(特許文献2)。 The silicon compound is hydrolyzed by mixing (1) silica fine particles, (2) hydrolyzable silane compound, water, and a binder solution containing the hydrolysis catalyst and solvent of the silicon compound to hydrolyze the silicon compound, and then (3) silanol. A method of coating a resin base material with a low-reflection layer liquid obtained by adding a curing catalyst that promotes condensation of groups, and react-curing at a predetermined temperature to form a low-reflection layer containing silica fine particles and a binder (Patented). Document 2).
酸化ケイ素薄膜の特性はその形成方法により大きく異なり、物理蒸着法により得られる酸化ケイ素薄膜は、緻密であり、屈折率は通常1.46程度であるのに対し、加水分解性シラン化合物を使用して得られる酸化ケイ素薄膜は、多孔質であり、屈折率は具体的な方法によって異なるが通常1.16〜1.42である。 The characteristics of the silicon oxide thin film differ greatly depending on the formation method. The silicon oxide thin film obtained by the physical vapor deposition method is dense and has a refractive index of about 1.46, whereas a hydrolyzable silane compound is used. The resulting silicon oxide thin film is porous and has a refractive index of 1.16 to 1.42, which varies depending on the specific method.
ところで、透明性の高い樹脂の屈折率は通常1.49〜1.78であり、従って、その表面に加水分解性シラン化合物を使用して得られる上記特性の酸化ケイ素薄膜を形成するならば、反射防止フィルム、低反射フィルム等の機能性基材して有用である。 By the way, the refractive index of a highly transparent resin is usually 1.49 to 1.78, so if a silicon oxide thin film having the above characteristics obtained by using a hydrolyzable silane compound is formed on the surface thereof, It is useful as a functional base material such as an antireflection film and a low reflection film.
しかしながら、樹脂基材表面に加水分解性シラン化合物を使用して酸化ケイ素薄膜を形成した場合は、樹脂基材との密着性が十分ではないという問題がある。実際、前記の提案された方法の場合、碁盤目試験JIS K5400に準拠した測定法(ニチバン(株)製のセロハンテープを被膜上に貼り付けた後に、勢い良く引き剥がす方法)の付着性試験の結果は「全面剥離」となっている。 However, when a silicon oxide thin film is formed on the surface of a resin base material by using a hydrolyzable silane compound, there is a problem that the adhesion to the resin base material is not sufficient. In fact, in the case of the above-mentioned proposed method, the adhesion test of the measurement method based on the grid test JIS K5400 (the method of sticking the cellophane tape manufactured by Nichiban Co., Ltd. on the coating and then peeling it off vigorously). The result is "whole peeling".
本発明は、上記実情に鑑みなされたものであり、その目的は、プラスチック基材の表面に多孔質酸化ケイ素薄膜を積層して成り、基材に対する酸化ケイ素薄膜の密着性に優れる酸化ケイ素薄膜積層透明体を提供することにある。 The present invention has been made in view of the above circumstances, and an object of the present invention is to laminate a porous silicon oxide thin film on the surface of a plastic base material, and to laminate a silicon oxide thin film having excellent adhesion to the base material. It is to provide a transparent body.
本発明者らは、上記の課題を達成するため、加水分解性シラン化合物を使用して形成される酸化ケイ素薄膜について鋭意検討を重ねた結果、次の様な知見を得た。 As a result of diligent studies on a silicon oxide thin film formed by using a hydrolyzable silane compound in order to achieve the above-mentioned problems, the present inventors have obtained the following findings.
すなわち、前記の方法におけるバインダーは、シリカ粒子間に作用して酸化ケイ素薄膜を形成すると共に、基材表面に酸化ケイ素薄膜を接着させる作用を有するが、その作用は、その調製法の違いによって得られる反応組成物の性状によって大きく異なり、理想的なバインダーは、−OH基を多量に備えた直鎖状構造に富む反応組成物である。そして、斯かる理想的なバインダーを使用するならば、基材に対する酸化ケイ素薄膜の密着性を顕著に改善することが出来る。 That is, the binder in the above method has an action of acting between the silica particles to form a silicon oxide thin film and an action of adhering the silicon oxide thin film to the surface of the base material, and the action is obtained by the difference in the preparation method. The ideal binder is a reaction composition having a large amount of −OH groups and rich in a linear structure, which varies greatly depending on the properties of the reaction composition to be obtained. Then, if such an ideal binder is used, the adhesion of the silicon oxide thin film to the substrate can be remarkably improved.
本発明は、上記の知見に基づき完成されたものであり、その要旨は、プラスチック基材の表面に屈折率1.16〜1.42の多孔質酸化ケイ素薄膜を積層して成り、以下に定義する多孔質酸化ケイ素薄膜の密着性が80%以上である酸化ケイ素薄膜積層透明体であって、
前記多孔質酸化ケイ素薄膜が、シリカ粒子の不存在下、2官能の加水分解性シラン化合物と加水分解シラン化合物の多量体を加水分解および縮合反応させて得られるシリケートバインダー液と、シリカ微粒子とを含有する酸化ケイ素薄膜形成用塗工液をプラスチック基材に塗布した後、乾燥と硬化を行うことによって形成されることを特徴とする酸化ケイ素薄膜積層透明体に存する。
密着性:JIS K5600に準拠して、付着テープとしてニチバン(株)製の工業用24mmセロテープ(登録商標)を用いて、クロスカット法による付着性試験を行い、マス目の合計に対する剥がれなかったマス目の数の割合(膜残存率)を求める。但し、カットの間隔は5mm、升目の数は25個とする。但し、多孔質酸化ケイ素薄膜の密着性は、酸化ケイ素薄膜積層透明体を、温度60℃、相対湿度95%の環境に設定した環境試験器内に30分保持して耐久性評価を行った後に密着性の低下状態について上記の密着性試験を行う。
The present invention has been completed based on the above findings, and the gist thereof is defined below by laminating a porous silicon oxide thin film having a refractive index of 1.16 to 1.42 on the surface of a plastic base material. A silicon oxide thin film laminated transparent body having an adhesion of 80% or more of a porous silicon oxide thin film.
The porous silicon oxide thin film hydrolyzes and condenses a multimer of a bifunctional hydrolyzable silane compound and a hydrolyzed silane compound in the absence of silica particles to obtain a silicate binder solution and silica fine particles. It exists in a silicon oxide thin film laminated transparent body, which is formed by applying a coating liquid for forming a silicon oxide thin film to be contained on a plastic base material, and then drying and curing the mixture.
Adhesion: In accordance with JIS K5600, an adhesiveness test was conducted by the cross-cut method using an industrial 24 mm cellophane tape (registered trademark) manufactured by Nichiban Co., Ltd. as an adhesive tape, and the cells that did not peel off with respect to the total number of cells. Obtain the ratio of the number of eyes (membrane residual rate). However, the interval between cuts is 5 mm, and the number of squares is 25. However, the adhesion of the porous silicon oxide thin film is determined after the durability of the silicon oxide thin film laminated transparent material is evaluated by holding it in an environmental tester set in an environment of a temperature of 60 ° C. and a relative humidity of 95% for 30 minutes. Perform the above-mentioned adhesion test for the state of reduced adhesion.
以下、本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail.
プラスチック基材としては、フィルム(100μm以下)であってもそれより厚いシートであってもよい。因に、プラスチックスとしては、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリカーボネート(PC)、ポリイミド(PI)、ポリメチルメタクリレート(PMMA)、シクロオレフィンポリマー(COP)等が挙げられる。基材の表面は、表面改質処理したものでも、処理してないものでも、どちらにでも適用できる。 The plastic base material may be a film (100 μm or less) or a thicker sheet. Incidentally, examples of plastics include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), polyimide (PI), polymethylmethacrylate (PMMA), cycloolefin polymer (COP) and the like. The surface of the base material can be applied to either a surface-modified surface or an untreated surface.
屈折率1.16〜1.42の多孔質酸化ケイ素薄膜は、加水分解性シラン化合物を使用する方法によってプラスチック基材表面に積層することが出来る。 The porous silicon oxide thin film having a refractive index of 1.16 to 1.42 can be laminated on the surface of the plastic substrate by a method using a hydrolyzable silane compound.
加水分解性シラン化合物を使用する方法においては、加水分解性シラン化合物を加水分解および縮合反応させて得られる反応組成物より成るバインダー液を使用する。 In the method using a hydrolyzable silane compound, a binder solution composed of a reaction composition obtained by hydrolyzing and condensing the hydrolyzable silane compound is used.
バインダー液の調製においては、2官能の加水分解性シラン化合物から成り且つその少なくとも50重量%が多量体である加水分解性シラン化合物を使用し、シリカ粒子の不存在下、加水分解性シラン化合物を溶解した親水性溶媒溶液中に撹拌条件下で酸触媒水溶液を連続的に滴下して前記の反応を行うのが好ましい。 In the preparation of the binder solution, a hydrolyzable silane compound composed of a bifunctional hydrolyzable silane compound and in which at least 50% by weight is a multimer is used, and the hydrolyzable silane compound is prepared in the absence of silica particles. It is preferable to carry out the above reaction by continuously dropping an acid catalyst aqueous solution into the dissolved hydrophilic solvent solution under stirring conditions.
加水分解性シラン化合物は、アルコキシ基、アルコキシアルコキシ基、アシルオキシ基、アリールオキシ基、アミノキシ基、アミド基、ケトオキシム基、イソシアネート基、ハロゲン原子等の加水分解性基を有するシラン化合物である。 The hydrolyzable silane compound is a silane compound having a hydrolyzable group such as an alkoxy group, an alkoxyalkoxy group, an acyloxy group, an aryloxy group, an aminoxy group, an amide group, a ketooxime group, an isocyanate group and a halogen atom.
上記の中ではアルコキシシラン化合物が好適に使用される。アルコキシ基(−OR)のアルキル基としては、メチル基、エチル基、プロピル基、ブチル基等の低級アルキル基が例示される。加水分解性基の数により、1〜4官能のものが知られている。 Among the above, an alkoxysilane compound is preferably used. Examples of the alkyl group of the alkoxy group (−OR) include lower alkyl groups such as a methyl group, an ethyl group, a propyl group and a butyl group. Depending on the number of hydrolyzable groups, those having 1 to 4 functionalities are known.
アルコキシシラン化合物の代表例としては、ジメチルジメトキシシラン(DMDMS)、メチルトリメトキシシラン(MTMS)、テトラメトキシシラン(TMOS)、ジメチルジエトキシシラン(DMDES)、メチルトリエトキシシラン(MTES)、テトラエトキシシラン(TEOS)等が挙げられる。 Typical examples of alkoxysilane compounds are dimethyldimethoxysilane (DMDMS), methyltrimethoxysilane (MTMS), tetramethoxysilane (TMS), dimethyldiethoxysilane (DMDES), methyltriethoxysilane (MTES), and tetraethoxysilane. (TEOS) and the like.
加水分解性シラン化合物の多量体は上記のような単量体を縮合により多量化重合(オリゴマー化)したものである。この反応においては、先ず、アルコキシ基の加水分解によりシラノール基(−Si−OH)が形成される。同時にアルコール(R−OH)が生成する。次いで、シラノール基の(脱水)縮合によりシロキサン結合(−Si−O−Si−O−)が形成され、この縮合を繰り返してシロキサンオリゴマーが形成される。アルコキシシラン化合物の多量体としては、アルコキシ基の加水分解性、縮合性などの面から、Rがメチル基であるテトラメトキシシランの多量体またはRがエチル基であるテトラエトキシシランの多量体が好ましい。 The multimer of the hydrolyzable silane compound is a multimerized polymer (oligomerized) of the above-mentioned monomers by condensation. In this reaction, first, a silanol group (-Si-OH) is formed by hydrolysis of the alkoxy group. At the same time, alcohol (R-OH) is produced. Next, a siloxane bond (-Si-O-Si-O-) is formed by (dehydration) condensation of silanol groups, and this condensation is repeated to form a siloxane oligomer. As the multimer of the alkoxysilane compound, a multimer of tetramethoxysilane in which R is a methyl group or a multimer of tetraethoxysilane in which R is an ethyl group is preferable from the viewpoint of hydrolyzability and condensability of the alkoxy group. ..
多量体の構造には、直鎖状、分枝状、環状、網目状構造があるが、直鎖状構造を持つものとしてテトラアルコキシシランの多量体を示せば、次の一般式で表される。
[化1]
RO(Si(OR)2O)nR・・・(I)
The structure of the multimer includes a linear structure, a branched structure, a cyclic structure, and a network structure. If the multimer of tetraalkoxysilane is shown as having a linear structure, it is represented by the following general formula. ..
[Chemical 1]
RO (Si (OR) 2 O) n R ... (I)
一般式中、nは多量体の多量化度を表わす。通常入手できる多量体はnが異なる多量体の組成物であり、従って、分子量分布を有する。なお、多量化度は平均したnで表される。 In the general formula, n represents the degree of quantification of the multimer. Usually available multimers are compositions of multimers with different n and therefore have a molecular weight distribution. The degree of quantification is represented by an average of n.
テトラアルコキシシラン等の4官能加水分解性シラン化合物またはその多量体の多量化度を「シリカ分」で表すこともある。「シリカ分」とは、その化合物から生成するシリカ(SiO2)の質量割合であり、その化合物を安定に加水分解し、焼成して生成するシリカの量を測定することにより得られる。また、「シリカ分」はその化合物の1分子に対して生成するシリカの割合を示すものでもあり、次式で計算される値である。
[数1]
シリカ分(質量部)=多量化度×SiO2の分子量/該化合物の分子量
The degree of quantification of a tetrafunctional hydrolyzable silane compound such as tetraalkoxysilane or a multimer thereof may be expressed by "silica content". The "silica content" is the mass ratio of silica (SiO 2 ) produced from the compound, and is obtained by measuring the amount of silica produced by stably hydrolyzing the compound and firing it. Further, "silica content" also indicates the ratio of silica produced to one molecule of the compound, and is a value calculated by the following formula.
[Number 1]
Silica content (parts by mass) = degree of quantification x molecular weight of SiO 2 / molecular weight of the compound
多量化度nは、通常2〜100、好ましくは2〜70、更に好ましくは2〜50である。斯かる多量体は、既に市販されているのでそれを利用するのが簡便である。多量化度nが大きくなるに従い、生成するバインダーの分子量が大きくなり、かつ分子量分布が広くなるため、多量化度nが100を超える多量体は不適切である。 The degree of quantification n is usually 2 to 100, preferably 2 to 70, and more preferably 2 to 50. Since such a multimer is already on the market, it is convenient to use it. As the degree of quantification n increases, the molecular weight of the produced binder increases and the molecular weight distribution becomes wider. Therefore, a multimer having a degree of quantification n exceeding 100 is inappropriate.
加水分解性シラン化合物の多量体の市販品としては、三菱ケミカル社製のMKCシリケートMS51、MKCシリケートMS56、MKCシリケートMS57、MKCシリケートMS56S(いずれもテトラメトキシシランの多量体)、コルコート社製のメチルシリケート51(テトラメトキシシランの多量体)、メチルシリケート53A、エチルシリケート40、エチルシリケート48、多摩化学工業社製のエチルシリケート40、シリケート45(いずれもテトラエトキシシランの多量体)等が挙げられる。 Commercially available products of hydrolyzable silane compound multimers include MKC silicate MS51, MKC silicate MS56, MKC silicate MS57, MKC silicate MS56S (all are tetramethoxysilane multimers) manufactured by Mitsubishi Chemical Co., Ltd., and methyl manufactured by Corcote. Examples thereof include silicate 51 (multimer of tetramethoxysilane), methyl silicate 53A, ethyl silicate 40, ethyl silicate 48, ethyl silicate 40 manufactured by Tama Chemical Industry Co., Ltd., and silicate 45 (all of which are multimers of tetraethoxysilane).
2官能の加水分解性シラン化合物中の多量体比率は好ましくは70重量%以上である。多量体の使用量が少ない場合は、単量体の受ける加水分解および縮合反応により、OH基が減少することや、反応組成物中に分枝状、環状、網目状構造が増加する。 The proportion of multimers in the bifunctional hydrolyzable silane compound is preferably 70% by weight or more. When the amount of the multimer used is small, the hydrolysis and condensation reaction of the monomer reduces the number of OH groups and increases the number of branched, cyclic, and network structures in the reaction composition.
加水分解および縮合反応は逐次に行われ、その(加熱による)反応過程にシリカ粒子が存在すると反応途中に生成した各成分がシリカ粒子表面に吸着する。この吸着は、バインダー成分OH基とシリカ粒子OH基が水素結合や、シロキサン結合が形成された強固な状態であり、バインダーの持つ基材密着性や酸化ケイ素薄膜の強度増加に寄与するOH基が減少することになる。また、シリカ粒子に吸着したバインダー成分が架橋点となり、分岐構造や網目構造を増加させる。これに対して、シリカ粒子の不存在下に調製された反応生成物はOH基を多量に備えた直鎖構造に富んだものとなる。そこで、シリカ粒子の不存在下にバインダー液を調製し、得られたバインダー液とシリカ微粒子とを室温にて混合することにより酸化ケイ素薄膜形成用塗工液を調製する。 The hydrolysis and condensation reactions are carried out sequentially, and if silica particles are present in the reaction process (by heating), each component generated during the reaction is adsorbed on the surface of the silica particles. This adsorption is a strong state in which the OH groups of the binder component and the OH groups of the silica particles are hydrogen-bonded or siloxane bonds are formed, and the OH groups that contribute to the adhesion of the binder to the substrate and the increase in the strength of the silicon oxide thin film are present. It will decrease. In addition, the binder component adsorbed on the silica particles serves as a cross-linking point, which increases the branched structure and the network structure. On the other hand, the reaction product prepared in the absence of silica particles is rich in a linear structure having a large amount of OH groups. Therefore, a binder liquid is prepared in the absence of silica particles, and the obtained binder liquid and silica fine particles are mixed at room temperature to prepare a coating liquid for forming a silicon oxide thin film.
前記の反応は、加水分解性シラン化合物を溶解した親水性溶媒溶液中に撹拌条件下で酸触媒水溶液を連続的に滴下して行う。 The above reaction is carried out by continuously dropping an acid catalyst aqueous solution into a hydrophilic solvent solution in which a hydrolyzable silane compound is dissolved under stirring conditions.
親水性溶媒としては、加水分解性シラン化合物の多量体を溶解し得る限り、特に制限されないが、一般的には、メタノール、エタノール、プロパノール、ブタノール等のアルコール類、エチルセロソルブ、ブチルセロソルブ、プロピルセロソルブ類などのセロソルブ類、エチレングリコール、プロピレングリコール、ヘキシレングリコールなどのグリコール類が使用される。 The hydrophilic solvent is not particularly limited as long as it can dissolve a multimer of the hydrolyzable silane compound, but is generally limited to alcohols such as methanol, ethanol, propanol and butanol, ethyl cellosolve, butyl cellosolve and propyl cellosolve. Cellulosolves such as, ethylene glycol, propylene glycol, glycols such as hexane glycol are used.
親水性溶媒の使用量は、特に制限されないが、バインダー液にシリカ微粒子を混合して調製される酸化ケイ素薄膜形成用塗工液の塗布性を考慮し、加水分解性シラン化合物100重量部に対する割合として、通常0.1〜100重量倍、好ましくは1〜10重量で倍ある。因に、加水分解性シラン化合物の多量体は、前述のように多量化度の異なる成分から成る組成物であり、重合度が高くなるに従い粘度が高くなる。一方、その単量体、例えば、ジメチルジメトキシシランの市販品は、通常99重量%純度の溶液である。 The amount of the hydrophilic solvent used is not particularly limited, but is a ratio to 100 parts by weight of the hydrolyzable silane compound in consideration of the coatability of the coating liquid for forming a silicon oxide thin film prepared by mixing silica fine particles with the binder liquid. It is usually 0.1 to 100 times by weight, preferably 1 to 10 times by weight. Incidentally, the multimer of the hydrolyzable silane compound is a composition composed of components having different degrees of polymerization as described above, and the viscosity increases as the degree of polymerization increases. On the other hand, a commercially available product of the monomer, for example, dimethyldimethoxysilane, is usually a solution having a purity of 99% by weight.
酸触媒水溶液中の酸濃度は、通常0.1〜0.0001重量%、好ましくは0.01〜0.001重量%の範囲である。酸触媒をこのような低濃度の水溶液として使用するならば、反応系内に多量の水が同伴させられることとなり、その結果、競争反応である縮合反応の反応速度を抑制することが出来る。そのため、傾向としては、加水分解で生じたOH基が適切な速度で消失し、OH基を多量に備えた直鎖構造に富む反応組成物が得られ易くなる。 The acid concentration in the acid catalyst aqueous solution is usually in the range of 0.1 to 0.0001% by weight, preferably 0.01 to 0.001% by weight. When the acid catalyst is used as such a low-concentration aqueous solution, a large amount of water is involved in the reaction system, and as a result, the reaction rate of the condensation reaction, which is a competitive reaction, can be suppressed. Therefore, the tendency is that the OH groups generated by hydrolysis disappear at an appropriate rate, and it becomes easy to obtain a reaction composition rich in a linear structure having a large amount of OH groups.
酸触媒の使用量は、親水性溶媒溶液中の加水分解性シラン化合物の加水分解性基(代表的にはアルコキシ基)の総量100モルに対して、通常0.001〜10ミリモル、好ましくは0.01〜10ミリモルである。 The amount of the acid catalyst used is usually 0.001 to 10 mmol, preferably 0, based on 100 mol of the total amount of hydrolyzable groups (typically alkoxy groups) of the hydrolyzable silane compound in the hydrophilic solvent solution. It is 0.01 to 10 mmol.
酸触媒水溶液は連続的に滴下されるが、その滴下速度は反応系内の温度が急上昇しないように適宜選択される。酸触媒水溶液の滴下速度は、親水性溶媒溶液100ml当たり、通常1〜10ml/min、好ましくは3〜5ml/minである。滴下された触媒水溶液は撹拌により直ちに均一に拡散され均一な加水分解が行われる。なお、撹拌方法は通常の化学反応で採用されている方法を採用することが出来る。 The acid catalyst aqueous solution is continuously added dropwise, and the dropping rate is appropriately selected so that the temperature in the reaction system does not rise sharply. The dropping rate of the acid catalyst aqueous solution is usually 1 to 10 ml / min, preferably 3 to 5 ml / min, per 100 ml of the hydrophilic solvent solution. The dropped catalyst aqueous solution is immediately and uniformly diffused by stirring, and uniform hydrolysis is performed. As the stirring method, the method adopted in a normal chemical reaction can be adopted.
加水分解性シラン化合物の加水分解および縮合反応は、実際的には、逐次に且つ並行して行われる。OH基を多量に備えた直鎖構造に富む反応組成物を得るとの観点から、可能な限り加水分解と縮合反応とが各別に行われるように、次の3段階に分けて行う。 The hydrolysis and condensation reactions of the hydrolyzable silane compound are practically carried out sequentially and in parallel. From the viewpoint of obtaining a reaction composition rich in a linear structure having a large amount of OH groups, the hydrolysis and condensation reactions are carried out separately in the following three steps as much as possible.
(1)加水分解反応工程:
撹拌条件下に親水性溶媒溶液に酸触媒水溶液を滴下することによって行う。反応温度は、通常5〜50℃、好ましく10〜40℃である。反応温度が上記範囲未満では加水分解反応が遅くなり過ぎ、上記範囲超過では縮合反応の回避が困難となる。反応温度の制御は、反応器のジャケットに導通される冷媒の温度・循環量や酸触媒水溶液の滴下速度などによって行われる。親水性溶媒の沸点が低い場合は還流条件下に加水分解反応を行う。反応時間は、通常1〜60分、好ましくは5〜30分である。
(1) Hydrolysis reaction step:
This is done by dropping an acid catalyst aqueous solution into a hydrophilic solvent solution under stirring conditions. The reaction temperature is usually 5 to 50 ° C, preferably 10 to 40 ° C. If the reaction temperature is less than the above range, the hydrolysis reaction becomes too slow, and if it exceeds the above range, it becomes difficult to avoid the condensation reaction. The reaction temperature is controlled by the temperature and circulation amount of the refrigerant conducted on the jacket of the reactor, the dropping speed of the acid catalyst aqueous solution, and the like. When the boiling point of the hydrophilic solvent is low, the hydrolysis reaction is carried out under reflux conditions. The reaction time is usually 1 to 60 minutes, preferably 5 to 30 minutes.
加水分解反応は発熱反応であり、反応液は通常1〜15℃温度上昇する。加水分解反応が実質的に完了したことを確認するため、酸触媒水溶液の滴下終了後に反応温度が5〜10℃低下するまで撹拌を続行するのが好ましい。 The hydrolysis reaction is an exothermic reaction, and the temperature of the reaction solution usually rises by 1 to 15 ° C. In order to confirm that the hydrolysis reaction is substantially completed, it is preferable to continue stirring until the reaction temperature drops by 5 to 10 ° C. after the completion of dropping the acid catalyst aqueous solution.
(2)縮合反応工程:
前記工程に引き続き、必要に応じて反応温度を高め、撹拌条件下に行う。反応温度は、通常40〜80℃、好ましく50〜60℃である。反応温度が上記範囲未満では縮合反応が遅くなり過ぎ、上記範囲超過では過剰な縮合反応の回避が困難となる。昇温速度は、通常0.1〜10℃/分とされる。反応時間は、通常1〜120分、好ましくは5〜60分である。
(2) Condensation reaction step:
Following the above steps, the reaction temperature is raised as necessary and the reaction is carried out under stirring conditions. The reaction temperature is usually 40 to 80 ° C, preferably 50 to 60 ° C. If the reaction temperature is less than the above range, the condensation reaction becomes too slow, and if it exceeds the above range, it becomes difficult to avoid an excessive condensation reaction. The heating rate is usually 0.1 to 10 ° C./min. The reaction time is usually 1 to 120 minutes, preferably 5 to 60 minutes.
(3)縮合反応停止工程:
反応液を冷却して縮合反応を停止する。冷却温度は通常10〜30℃である。この際、縮合反応組成物の濃度低減のために親水性溶媒を添加する冷却希釈により縮合反応を停止するのが一層効果的である。なお、親水性溶媒は反応溶媒と同一のものが好適であるが、液性調整のため別の親水性溶媒を使用しても良い。
(3) Condensation reaction termination step:
The reaction solution is cooled to stop the condensation reaction. The cooling temperature is usually 10 to 30 ° C. At this time, it is more effective to stop the condensation reaction by cooling dilution with which a hydrophilic solvent is added in order to reduce the concentration of the condensation reaction composition. The hydrophilic solvent is preferably the same as the reaction solvent, but another hydrophilic solvent may be used for adjusting the liquid property.
親水性溶媒の添加量は、加水分解性シラン化合物、反応に供した親水性溶媒および酸触媒水溶液の総量に対する親水性溶媒の濃度として表した場合、通常50〜150重量%の範囲である。 The amount of the hydrophilic solvent added is usually in the range of 50 to 150% by weight when expressed as the concentration of the hydrophilic solvent with respect to the total amount of the hydrolyzable silane compound, the hydrophilic solvent used for the reaction and the acid catalyst aqueous solution.
前記の冷却希釈による縮合反応停止工程によれば、得られるバインダー液の保存安定性が高くなり、また、各用途の要求に合う濃度に調整し得るバインダー液の調製が可能になる。 According to the above-mentioned step of stopping the condensation reaction by cooling dilution, the storage stability of the obtained binder liquid is improved, and it becomes possible to prepare a binder liquid that can be adjusted to a concentration that meets the requirements of each application.
前上記の縮合反応工程により、得られる反応組成物の重量平均分子量が決定される。重量平均分子量は、通常1000〜5000、好ましくは2000〜4000である。斯かる分子量は均多量化度nが2〜100の多量体に相当する。 The weight average molecular weight of the obtained reaction composition is determined by the above-mentioned condensation reaction step. The weight average molecular weight is usually 1000 to 5000, preferably 2000 to 4000. Such a molecular weight corresponds to a multimer having a degree of equalization n of 2 to 100.
上記の重量平均分子量は、ゲル浸透クロマトグラフィー(GPC)により下記の条件で測定された値である。 The above weight average molecular weight is a value measured by gel permeation chromatography (GPC) under the following conditions.
[溶媒] テトラヒドロフラン
[装置名] TOSOH HLC−8220GPC
[カラム] TOSOH TSKgel Super HM−N(2本)とHZ1000(1本)を接続して使用。
[カラム温度] 40℃
[試料濃度] 0.01質量%
[流速] 0.6ml/min
[較正曲線] PEG(分子量20000、4000、1000、200の4点3次式近似による較正曲線を使用。
[Solvent] Tetrahydrofuran [Device name] TOSOH HLC-8220GPC
[Column] Tosoh TSKgel Super HM-N (2) and HZ1000 (1) are connected and used.
[Column temperature] 40 ° C
[Sample concentration] 0.01% by mass
[Flow velocity] 0.6 ml / min
[Calibration curve] PEG (calibration curve with a molecular weight of 20000, 4000, 1000, 200 by 4-point cubic approximation is used.
前記の反応組成物より成る酸化ケイ素薄膜形成用バインダー液は、実質的に透明であり、カオリン濁度計を用いて測定した結果濁度は10以下である。 The binder liquid for forming a silicon oxide thin film composed of the above reaction composition is substantially transparent, and the turbidity is 10 or less as a result of measurement using a kaolin turbidity meter.
酸化ケイ素薄膜形成用塗工液は、前記で得られたバインダー液とシリカ微粒子とを混合することにより調製される。 The coating liquid for forming a silicon oxide thin film is prepared by mixing the binder liquid obtained above with the silica fine particles.
シリカ微粒子としては、特に制限されず、平均粒子径5〜100nmの球状非凝集シリカ微粒子、平均粒子径が10〜100nmの中空状非凝集シリカ微粒子、平均一次粒径が5〜100nmの鎖状凝集シリカ微粒子の少なくとも一種からなるシリカ微粒子などが挙げられる。これらは、形成される酸化ケイ素薄膜の目的に応じて適宜選択される。 The silica fine particles are not particularly limited, and are spherical non-aggregated silica fine particles having an average particle diameter of 5 to 100 nm, hollow non-aggregated silica fine particles having an average particle diameter of 10 to 100 nm, and chain aggregate having an average primary particle diameter of 5 to 100 nm. Examples thereof include silica fine particles composed of at least one type of silica fine particles. These are appropriately selected according to the purpose of the silicon oxide thin film to be formed.
球状非凝集シリカ微粒子の具体例としては、日産化学工業株式会社製の「スノーテックス(登録商標)−O」、「スノーテックス(登録商標)−O−40」、「スノーテックス(登録商標)−OL」、扶桑化学工業製の「クォートロン(登録商標)−PL−1」、「クォートロン(登録商標)−PL−3」、「クォートロン(登録商標)−PL−7」等が挙げられる。 Specific examples of spherical non-aggregated silica fine particles include "Snowtex (registered trademark) -O", "Snowtex (registered trademark) -O-40", and "Snowtex (registered trademark)-" manufactured by Nissan Chemical Industries, Ltd. "OL", "Quatron (registered trademark) -PL-1", "Quatron (registered trademark) -PL-3", "Quatron (registered trademark) -PL-7", etc. manufactured by Fuso Chemical Industries, Ltd. can be mentioned.
鎖状凝集シリカ微粒子の具体例としては、日産化学工業株式会社製の「スノーテックス(登録商標)−OUP」(平均長さ:40〜100nm)、「スノーテックス(登録商標)−UP」(平均長さ:40〜100nm)、「スノーテックス(登録商標)PS−M」(平均長さ:80〜150nm)、「スノーテックス(登録商標)PS−MO」(平均長さ:80〜150nm)、「スノーテックス(登録商標)PS−S」(平均長さ:80〜120nm)、「スノーテックス(登録商標)PS−SO」(平均長さ:80〜120nm)、「IPA−ST−UP」(平均長さ:40〜100nm)、日本国触媒化成工業株式会社製の「ファインカタロイドF−120」等が挙げられる。 Specific examples of the chain-aggregated silica fine particles include "Snowtex (registered trademark) -OUP" (average length: 40 to 100 nm) and "Snowtex (registered trademark) -UP" (average) manufactured by Nissan Chemical Industry Co., Ltd. Length: 40-100 nm), "Snowtex® PS-M" (average length: 80-150 nm), "Snowtex® PS-MO" (average length: 80-150 nm), "Snowtex (registered trademark) PS-S" (average length: 80 to 120 nm), "Snowtex (registered trademark) PS-SO" (average length: 80 to 120 nm), "IPA-ST-UP" ( (Average length: 40 to 100 nm), "Fine Cataloid F-120" manufactured by Japan Catalytic Chemical Industry Co., Ltd. and the like can be mentioned.
酸化ケイ素薄膜形成用塗工液は、基材に塗布する際の塗工性、塗膜の膜厚や平滑性などを考慮して、適切な濃度に調製される。濃度調整は前述の親水性溶媒の添加により行われるが、この濃度調整はシリカ微粒子を混合する前に行うことも後に行うこともできる。 The coating liquid for forming a silicon oxide thin film is prepared at an appropriate concentration in consideration of coatability when applied to a substrate, film thickness and smoothness of the coating film, and the like. The concentration adjustment is performed by adding the above-mentioned hydrophilic solvent, and this concentration adjustment can be performed before or after mixing the silica fine particles.
酸化ケイ素薄膜は、塗工液の塗布後に乾燥と硬化を行うことによって形成される。 The silicon oxide thin film is formed by drying and curing after applying the coating liquid.
塗工液の塗布は、特に制限されず、ディップコート法、スピンコート法、ダイコート法、スプレーコート法、グラビアコート法、ロールコート法、カーテンコート法、スクリーン印刷法、インクジェット印刷法を挙げることができる。 The application of the coating liquid is not particularly limited, and examples thereof include a dip coating method, a spin coating method, a die coating method, a spray coating method, a gravure coating method, a roll coating method, a curtain coating method, a screen printing method, and an inkjet printing method. can.
塗布膜厚は形成される酸化ケイ素薄膜の目的に応じて適宜選択される。通常50〜5000nmである。 The coating film thickness is appropriately selected according to the purpose of the silicon oxide thin film to be formed. It is usually 50 to 5000 nm.
上記の乾燥は溶媒を除去するために行われ、乾燥温度は通常50〜80℃であり、熱風乾燥機などが好適に使用される。乾燥時間は通常1〜10分、好ましくは1〜5分である。 The above drying is performed to remove the solvent, the drying temperature is usually 50 to 80 ° C., and a hot air dryer or the like is preferably used. The drying time is usually 1 to 10 minutes, preferably 1 to 5 minutes.
上記の硬化処理は、主としてバインダー液に含まれるシラノール基(Si−OH)と基材表面のヒドロキシル基やカルボキシル基などの酸素含有官能基を結合させるために行われ、これにより酸化ケイ素薄膜が形成される。 The above curing treatment is mainly performed to bond the silanol group (Si-OH) contained in the binder solution with an oxygen-containing functional group such as a hydroxyl group or a carboxyl group on the surface of the base material, thereby forming a silicon oxide thin film. Will be done.
上記の硬化処理としては酸素の存在下に紫外線を照射して行う方法が推奨される。紫外線には、近紫外線(near UV、波長200〜380nm)、遠紫外線(波長10〜200nm)及び極端紫外線(extreme UV、波長1〜10nm)が含まれるが、通常は遠紫外線が有効である。紫外線の線源としては、例えば、低圧水銀ランプ、高圧水銀ランプ、エキシマ紫外線(エキシマUV)ランプ、ハライドランプ、レーザー等が挙げられる。紫外線の照射時間は通常1秒〜3分である。 As the above curing treatment, a method of irradiating ultraviolet rays in the presence of oxygen is recommended. Ultraviolet rays include near ultraviolet rays (near UV, wavelength 200 to 380 nm), far ultraviolet rays (wavelength 10 to 200 nm), and extreme ultraviolet rays (extreme UV, wavelength 1 to 10 nm), but far ultraviolet rays are usually effective. Examples of the ultraviolet source include a low-pressure mercury lamp, a high-pressure mercury lamp, an excimer ultraviolet (excimer UV) lamp, a halide lamp, and a laser. The irradiation time of ultraviolet rays is usually 1 second to 3 minutes.
基材としてプラスチックス基材を使用し、酸素の存在下に紫外線を照射して行う硬化処理の場合、基材密着性が顕著に改良された酸化ケイ素薄膜が形成される。その理由は次のように推定される。 In the case of a curing treatment in which a plastic base material is used as a base material and ultraviolet rays are irradiated in the presence of oxygen, a silicon oxide thin film having significantly improved base material adhesion is formed. The reason is presumed as follows.
すなわち、紫外線の作用で発生した活性酸素によりプラスチック基材表面が活性化(改質)され、バインダー液に含まれるシラノール基(Si−OH)と基材表面とが強固に結合される。 That is, the surface of the plastic base material is activated (modified) by the active oxygen generated by the action of ultraviolet rays, and the silanol groups (Si—OH) contained in the binder liquid and the surface of the base material are firmly bonded.
以下、本発明を実施例より更に詳細に説明するが、本発明はその要旨を超えない限り以下の実施例に限定されるものではない。以下の諸例における分析方法は次の通りである。 Hereinafter, the present invention will be described in more detail than the examples, but the present invention is not limited to the following examples as long as the gist of the present invention is not exceeded. The analysis methods in the following examples are as follows.
実施例1
<酸化ケイ素薄膜形成用バインダー液の調製>
(1)加水分解反応工程:
2Lのジャケット付き反応器に、信越シリコーン社製の商品「KBM22」(ジメチルジメトキシシラン含量99重量%)50質量部、三菱ケミカル社製商品「シリケートMS51」(平均多量化度n:7、メチルシリケートオリゴマー含量99.8重量%)200質量部、エタノール500質量部を仕込み、反応上限温度を40℃に設定し、攪拌条件下、0.007重量%の塩酸水溶液330質量部を10分かけて滴下した。この時、発熱反応により5〜10℃反応温度が上昇した。反応温度が5〜10℃低下するまで撹拌を続行した。なお、2官能の加水分解性シラン化合物中の多量体の割合(「KBM22」と「シリケートMS51」の合計量に対するシリケートMS51の割合)は80重量%である。
Example 1
<Preparation of binder liquid for forming silicon oxide thin film>
(1) Hydrolysis reaction step:
A 2L jacketed reactor, Shin-Etsu Silicone Co., Ltd. Product "KBM22" (dimethyl methoxysilane content 99 wt%) 50 parts by mass, Mitsubishi Chemical Corporation, trade "Silicate MS51" (average multimeric degree n: 7, methyl 200 parts by mass of silicate oligomer content (99.8% by weight) and 500 parts by mass of ethanol were charged, the upper limit reaction temperature was set to 40 ° C., and under stirring conditions, 330 parts by mass of a 0.007% by weight hydrochloric acid aqueous solution was applied over 10 minutes. Dropped. At this time, the reaction temperature increased by 5 to 10 ° C. due to the exothermic reaction. Stirring was continued until the reaction temperature dropped by 5-10 ° C. The ratio of the multimer to the bifunctional hydrolyzable silane compound (the ratio of silicate MS51 to the total amount of "KBM22" and "silicate MS51") is 80% by weight.
(2)縮合反応工程:
塩酸水溶液滴下後、撹拌条件下、30分かけて60℃に昇温し、60℃で30分間保持した。その後、室温まで冷却した。
(2) Condensation reaction step:
After dropping the aqueous hydrochloric acid solution, the temperature was raised to 60 ° C. over 30 minutes under stirring conditions, and the temperature was maintained at 60 ° C. for 30 minutes. Then, it cooled to room temperature.
(3)縮合反応停止工程:
冷却後、エタノール1100質量部を混合し、30分攪拌することにより、アルコキシシラン組成物(A)2180質量部を得た。
(3) Condensation reaction termination step:
After cooling, 1100 parts by mass of ethanol was mixed and stirred for 30 minutes to obtain 2180 parts by mass of the alkoxysilane composition (A).
<酸化ケイ素薄膜形成用塗工液の調製>
前記で得られたアルコキシラン組成物(A)2180質量部に、エタノール12000質量部を加え、30分攪拌することにより、アルコキシシラン組成物(B)14180を得た。
<Preparation of coating liquid for forming silicon oxide thin film>
12000 parts by mass of ethanol was added to 2180 parts by mass of the alkoxylan composition (A) obtained above, and the mixture was stirred for 30 minutes to obtain 14180 parts of the alkoxysilane composition (B).
上記で得られたアルコキシシラン組成物(B)14180質量部に球状非凝集シリカ2040質量部(日産化学工業社製の商品「スノーテックスO」)を加え、30分攪拌することにより、酸化ケイ素薄膜形成用塗工液を得た。 A silicon oxide thin film is formed by adding 2040 parts by mass of spherical non-aggregated silica (product "Snowtex O" manufactured by Nissan Chemical Industries, Ltd.) to 14180 parts by mass of the alkoxysilane composition (B) obtained above and stirring for 30 minutes. A coating liquid for forming was obtained.
<酸化ケイ素薄膜積層透明体の製造>
52×76mmにカットした厚み50μmのポリエチレンテレフタレート(PET)フィルム(三菱ケミカル社製のダイヤホイルT600)に、実施例1で得られた酸化ケイ素薄膜形成用塗工液を滴下し、スピンコーター(ミカサ社製の「MS−A150」)で1200rpm、30秒コートすることで薄膜を作製した。
<Manufacturing of silicon oxide thin film laminated transparent material>
The coating liquid for forming a silicon oxide thin film obtained in Example 1 was dropped onto a polyethylene terephthalate (PET) film (diafoil T600 manufactured by Mitsubishi Chemical Co., Ltd.) having a thickness of 50 μm cut into 52 × 76 mm, and a spin coater (Mikasa) was added. A thin film was prepared by coating with "MS-A150" manufactured by the same company at 1200 rpm for 30 seconds.
その後、溶媒を除去するために、定温恒温送風機(ヤマト科学社製)に入れ、70℃、1分で乾燥した。次に、大気下で高圧水銀ランプ(アイグラフィックス社製)を用いて、照度130mW/cm2、積算光量1000mJ/cm2の紫外線を照射することで、厚さ100nmの酸化ケイ素薄膜積層PETを得た。 Then, in order to remove the solvent, it was placed in a constant temperature and constant temperature blower (manufactured by Yamato Kagaku Co., Ltd.) and dried at 70 ° C. for 1 minute. Next, a silicon oxide thin film laminated PET having a thickness of 100 nm was formed by irradiating ultraviolet rays with an illuminance of 130 mW / cm 2 and an integrated light intensity of 1000 mJ / cm 2 in the atmosphere using a high-pressure mercury lamp (manufactured by Eye Graphics). Obtained.
[酸化ケイ素薄膜の屈折率の測定]
上記で得た酸化ケイ素薄膜積層PETの屈折率は、フィルメトリクス株式会社製の光干渉式膜厚測定装置F20により測定を行った。測定において、PET基板の裏面からの反射を抑える為、裏面にデンカ社製のビニテープ(黒)を貼り測定した。
[Measurement of refractive index of silicon oxide thin film]
The refractive index of the silicon oxide thin film laminated PET obtained above was measured by an optical interferometry film thickness measuring device F20 manufactured by Filmometrics Co., Ltd. In the measurement, in order to suppress reflection from the back surface of the PET substrate, a vinyl tape (black) manufactured by Denka Co., Ltd. was attached to the back surface for measurement.
[密着性試験方法]
JIS K5600に準拠して、付着テープとしてニチバン(株)製の工業用24mmセロテープ(登録商標)を用いて、クロスカット法による付着性試験を行い、密着性を評価した。
すなわち、カッターナイフで5mm間隔の25個の碁盤目を作り、セロハンテープを膜表面に貼付け、引き離した後に、膜が剥離せずに残った数を数えて評価した。
なお、酸化ケイ素薄膜は、ガラス質に近い性状であるため、カッターナイフで碁盤目を作る際に亀裂が生じ易く、その正確な密着性試験が困難となるため、JIS K5600の碁盤目の間隔は1mmまたは2mmとなっているが、碁盤目の間隔を5mmに変更した。
マス目の合計(25個)に対する剥がれなかったマス目の数の割合(膜残存率)を求めた。結果を表1に示す。
[Adhesion test method]
Adhesion was evaluated by a cross-cut method using an industrial 24 mm cellophane tape (registered trademark) manufactured by Nichiban Co., Ltd. as an adhesive tape in accordance with JIS K5600.
That is, 25 grids at 5 mm intervals were made with a cutter knife, cellophane tape was attached to the surface of the film, and after the film was separated, the number of the remaining film without peeling was counted and evaluated.
Since the silicon oxide thin film has properties similar to those of glass, cracks are likely to occur when making a grid with a cutter knife, and it is difficult to perform an accurate adhesion test. Although it is 1 mm or 2 mm, the interval between the grids has been changed to 5 mm.
The ratio of the number of squares that did not peel off (membrane residual ratio) to the total number of squares (25) was determined. The results are shown in Table 1.
[耐湿熱性試験]
実施例および比較例で作成した酸化ケイ素薄膜積層PETを、温度60℃、相対湿度95%の環境に設定した環境試験器内(ESPEC社製SH−641)に30分保持し、耐久性評価を行った。密着性の低下状態について上記の密着性試験方法により評価した。結果を表1に示す。
[Moisture resistance test]
The silicon oxide thin film laminated PET prepared in Examples and Comparative Examples was held in an environmental tester (SH-641 manufactured by ESPEC) set in an environment of a temperature of 60 ° C. and a relative humidity of 95% for 30 minutes to evaluate the durability. went. The state of reduced adhesion was evaluated by the above-mentioned adhesion test method. The results are shown in Table 1.
[耐擦傷性試験]
ミルスペックMIL−CCC−C−440に記載のチーズクロスを100g荷重(360g/cm2)で、得られた酸化ケイ素薄膜表面上を5往復させた。擦傷性の評価は、擦傷試験前後のヘイズ値差(%)により行った。ヘイズ値差が小さいほど耐擦傷性が優れていることを示す。ヘイズ値差0.1%程度は目視では傷を確認できない状態であった。
[Scratch resistance test]
The cheesecloth described in MIL-Spec MIL-CCC-C-440 was reciprocated 5 times on the surface of the obtained silicon oxide thin film under a load of 100 g (360 g / cm 2). The scratch resistance was evaluated by the difference in haze value (%) before and after the scratch test. The smaller the difference in haze value, the better the scratch resistance. A haze value difference of about 0.1% was a state in which scratches could not be visually confirmed.
比較例1:
実施例1において、酸化ケイ素薄膜形成用塗工液の調製工程で使用する使用するシリカを鎖状シリカ(日産化学工業社製の商品「スノーテックスOUP」)に変更し、これを加え、加水分解工程、縮合反応工程、縮合反応停止工程を行ない、冷却後、エタノール1100質量部を混合し、30分撹拌し、その後、酸化ケイ素薄膜形成用塗工液の調製工程で使用した量のエタノール12000質量部を加えた以外は、実施例1と同様にして、酸化ケイ素薄膜形成用塗工液を調製した。そして、実施例1と同様にして、厚さ100nmの酸化ケイ素薄膜積層PETを得、酸化ケイ素薄膜の密着性を評価した。結果を表1に示す。
Comparative Example 1:
In Example 1, the silica used in the step of preparing the coating liquid for forming a silicon oxide thin film was changed to chain silica (product "Snowtex OUP" manufactured by Nissan Chemical Industries, Ltd.), and this was added and hydrolyzed. A step, a condensation reaction step, and a condensation reaction termination step are performed, and after cooling, 1100 parts by mass of ethanol is mixed, stirred for 30 minutes, and then 12000 mass of ethanol used in the preparation step of the coating liquid for forming a silicon oxide thin film. A coating liquid for forming a silicon oxide thin film was prepared in the same manner as in Example 1 except that the portion was added. Then, in the same manner as in Example 1, a silicon oxide thin film laminated PET having a thickness of 100 nm was obtained, and the adhesion of the silicon oxide thin film was evaluated. The results are shown in Table 1.
比較例2:
実施例1において、酸化ケイ素薄膜形成用塗工液の調製工程で使用する使用するシリカを鎖状シリカ(日産化学工業社製の商品「スノーテックスOUP」)に変更し、0.007重量%の塩酸水溶液の代わりに同一量の純水を使用した以外は、実施例1と同様にして、酸化ケイ素薄膜形成用塗工液を調製した。そして、実施例1と同様にして、厚さ100nmの酸化ケイ素薄膜積層PETを得、酸化ケイ素薄膜の密着性を評価した。結果を表1に示す。
Comparative Example 2:
In Example 1, the silica used in the step of preparing the coating liquid for forming a silicon oxide thin film was changed to chain silica (product "Snowtex OUP" manufactured by Nissan Chemical Industry Co., Ltd.), and 0.007% by weight was used. A coating liquid for forming a silicon oxide thin film was prepared in the same manner as in Example 1 except that the same amount of pure water was used instead of the aqueous hydrochloric acid solution. Then, in the same manner as in Example 1, a silicon oxide thin film laminated PET having a thickness of 100 nm was obtained, and the adhesion of the silicon oxide thin film was evaluated. The results are shown in Table 1.
比較例3:
実施例1において、酸化ケイ素薄膜形成用塗工液の調製工程で使用する使用するシリカを鎖状シリカ(日産化学工業社製の商品「スノーテックスOUP」)に変更し、「KBM22」50質量部、「シリケートMS51」200質量部を、それぞれ、「KBM22」150質量部、「シリケートMS51」100質量部に変更した以外は、実施例1と同様にして酸化ケイ素薄膜形成用塗工液を調製した。なお、2官能の加水分解性シラン化合物中の多量体の割合は40重量%である。そして、実施例1と同様にして、厚さ100nmの酸化ケイ素薄膜積層PETを得、酸化ケイ素薄膜の密着性を評価した。結果を表1に示す。
Comparative Example 3:
In Example 1, the silica used in the preparation step of the coating liquid for forming a silicon oxide thin film was changed to chain silica (product "Snowtex OUP" manufactured by Nissan Chemical Industries, Ltd.), and 50 parts by mass of "KBM22" was changed. , 200 parts by mass of "Silica MS51" was changed to 150 parts by mass of "KBM22" and 100 parts by mass of "Silica MS51", respectively, and a coating liquid for forming a silicon oxide thin film was prepared in the same manner as in Example 1. .. The proportion of the multimer in the bifunctional hydrolyzable silane compound is 40% by weight. Then, in the same manner as in Example 1, a silicon oxide thin film laminated PET having a thickness of 100 nm was obtained, and the adhesion of the silicon oxide thin film was evaluated. The results are shown in Table 1.
Claims (1)
前記多孔質酸化ケイ素薄膜が、シリカ粒子の不存在下、2官能の加水分解性シラン化合物と加水分解シラン化合物の多量体を加水分解および縮合反応させて得られるシリケートバインダー液と、シリカ微粒子とを含有する酸化ケイ素薄膜形成用塗工液をプラスチック基材に塗布した後、乾燥と硬化を行うことによって形成されることを特徴とする酸化ケイ素薄膜積層透明体。
密着性:JIS K5600に準拠して、付着テープとしてニチバン(株)製の工業用24mmセロテープ(登録商標)を用いて、クロスカット法による付着性試験を行い、マス目の合計に対する剥がれなかったマス目の数の割合(膜残存率)を求める。但し、カットの間隔は5mm、升目の数は25個とする。但し、多孔質酸化ケイ素薄膜の密着性は、酸化ケイ素薄膜積層透明体を、温度60℃、相対湿度95%の環境に設定した環境試験器内に30分保持して耐久性評価を行った後に密着性の低下状態について上記の密着性試験を行う。 A porous silicon oxide thin film having a refractive index of 1.16 to 1.42 is laminated on the surface of a plastic base material, and the adhesion of the porous silicon oxide thin film defined below is 80% or more. The body
The porous silicon oxide thin film hydrolyzes and condenses a multimer of a bifunctional hydrolyzable silane compound and a hydrolyzed silane compound in the absence of silica particles to obtain a silicate binder solution and silica fine particles. A silicon oxide thin film laminated transparent body, which is formed by applying a coating liquid for forming a silicon oxide thin film to be contained on a plastic base material, and then drying and curing the mixture.
Adhesion: In accordance with JIS K5600, an adhesiveness test was conducted by the cross-cut method using an industrial 24 mm cellophane tape (registered trademark) manufactured by Nichiban Co., Ltd. as an adhesive tape, and the cells that did not peel off with respect to the total number of cells. Obtain the ratio of the number of eyes (membrane residual rate). However, the interval between cuts is 5 mm, and the number of squares is 25. However, the adhesion of the porous silicon oxide thin film is determined after the durability of the silicon oxide thin film laminated transparent material is evaluated by holding it in an environmental tester set in an environment of a temperature of 60 ° C. and a relative humidity of 95% for 30 minutes. The above-mentioned adhesion test is performed for the state of reduced adhesion.
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