JP6933557B2 - Test equipment - Google Patents

Description

The present invention relates to a test device for a light emitting device.

The reliability of a light emitting device such as an LED (Light Emitting Diode) is evaluated by a long-term energization test. For example, a test device is used in which a plurality of light emitting devices and light receiving units are arranged in an array so that a plurality of light emitting devices can be tested at the same time. In order to ensure that the output light of each light emitting device is incident only on the corresponding light receiving portion, a pipe-shaped member partitions the adjacent light emitting device and the light receiving portion (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2011-237350

It is preferable that a plurality of light emitting devices can be simultaneously tested with a simpler configuration.

The present invention has been made in view of these problems, and one of its exemplary purposes is to simplify the configuration of a test device capable of simultaneously testing a plurality of light emitting devices.

The test apparatus according to an aspect of the present invention is provided at a position facing a holding portion for holding a plurality of light emitting devices to be tested and a corresponding light emitting device, and measures the intensity of output light of each light emitting device. A plurality of through holes are arranged between a plurality of light receiving units, a plurality of light emitting devices, and a plurality of light receiving units, and allow light to pass through the light output from each light emitting device toward the light receiving unit corresponding to each light emitting device. It is provided with a shielding plate to be provided.

According to this aspect, by arranging a shielding plate provided with a plurality of through holes between the plurality of light emitting devices and the plurality of light receiving portions, the output light of each light emitting device can be incident on the corresponding light receiving portion. According to this aspect, a structure simpler than a structure in which adjacent light emitting devices and light receiving portions are partitioned by a pipe-shaped member can be realized.

The shielding plate may shield the light output from each light emitting device toward a light receiving unit different from the light receiving unit corresponding to each light emitting device.

The aspect ratio h / w of the opening depth h and the opening diameter w of the plurality of through holes is equal to or greater than the ratio d / p of the distance d from each light emitting device to the opposing light receiving portion and the pitch p of the adjacent light receiving portions. May be good.

The shield plate has a uniform thickness, and a plurality of through holes may be provided at regular intervals.

The shielding plate is a first shielding plate, the through hole is a first through hole, and the test device is arranged between a plurality of light emitting devices and a plurality of light receiving portions, and a plurality of second through holes are provided. A second shielding plate to be provided may be further provided. Each light receiving unit may measure the intensity of the light that has passed through both the first through hole and the second through hole in the light output from each light emitting device.

The first shielding plate and the second shielding plate can be relatively displaced between the communication position where the first through hole and the second through hole overlap and the non-communication position where the first through hole and the second through hole do not overlap. It may be configured to be.

According to the present invention, it is possible to simplify the configuration of a test device capable of simultaneously testing a plurality of light emitting devices.

It is a figure which shows schematic structure of the test apparatus which concerns on embodiment. It is a top view which shows the structure of a light-shielding plate. It is a figure which shows schematic structure of the test apparatus which concerns on a comparative example. It is a figure which shows schematic structure of the test apparatus which concerns on a modification. It is a figure which shows schematic structure of the test apparatus which concerns on a modification.

Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In the description, the same elements are designated by the same reference numerals, and duplicate description will be omitted as appropriate.

FIG. 1 is a diagram schematically showing the configuration of the test apparatus 10 according to the embodiment. The test apparatus 10 includes a first substrate 12, a second substrate 14, a first spacer 16, a second spacer 18, a plurality of holding portions 20 (20a, 20b, 20c, 20d), and a plurality of light receiving portions 24. (24a, 24b, 24c, 24d) and a shielding plate 30 are provided. The test device 10 is a device for collectively executing an energization test of a plurality of light emitting devices 22a, 22b, 22c, 22d.

The light emitting devices 22a to 22d (collectively referred to as light emitting devices 22) to be tested are UV-LEDs (Ultra Violet-Light Emitting Diodes) that output deep ultraviolet light. The light emitting device 22 is configured to output deep ultraviolet light having a peak wavelength or a center wavelength in the range of 200 nm to 360 nm. As such an ultraviolet light LED, for example, one using aluminum gallium nitride (AlGaN) is known.

The first substrate 12 is a mounting substrate on which a plurality of holding portions 20 are mounted. One holding unit 20 is configured to hold one light emitting device 22. The holding unit 20 has a terminal connected to the electrode of the light emitting device 22, and supplies a driving current for driving the light emitting device 22 through the terminal. The holding unit 20 is connected to an external power source (not shown).

The plurality of holding portions 20 are arranged side by side on the first substrate 12, for example, arranged in a row (one-dimensional array shape) or a matrix shape (two-dimensional array shape) at equal intervals. In one embodiment, the plurality of holding portions 20 are arranged in a 4 × 10 matrix. It should be noted that one holding unit may be configured to hold a plurality of light emitting devices 22.

The second substrate 14 is a mounting substrate on which a plurality of light receiving units 24 are mounted. The light receiving unit 24 includes a photoelectric conversion element such as a photodiode, and measures the intensity of the output light of the light emitting device 22 held by the holding unit 20. The plurality of light receiving units 24a to 24d are provided at positions facing the corresponding light emitting devices 22a to 22d. For example, the first light receiving unit 24a is provided at a position facing the first light emitting device 22a held by the first holding unit 20a.

The shielding plate 30 is arranged between the plurality of light emitting devices 22a to 22d and the plurality of light receiving units 24a to 24d. The shielding plate 30 has a first main surface 31 and a second main surface 32 on the opposite side of the first main surface 31. The shielding plate 30 is arranged so that the first main surface 31 and the plurality of light emitting devices 22a to 22d face each other, and the second main surface 32 and the plurality of light receiving portions 24a to 24d face each other.

The shielding plate 30 is made of a metal material or a resin material. The surface of the shielding plate 30 is preferably configured to have a low reflectance with respect to the light of the output wavelength of the light emitting device 22 to be tested. When the test object is a UV-LED, it is preferable to use a metal material such as stainless steel (SUS) having a low ultraviolet light reflectance. When a material having a high ultraviolet light reflectance such as aluminum (Al) is used for the shielding plate 30, it is preferable to coat the surface with a material having a low ultraviolet light reflectance (for example, black paint).

The shielding plate 30 is fixed by the columnar first spacer 16 and the second spacer 18. The first spacer 16 is provided between the first substrate 12 and the shielding plate 30, and keeps the distance between the first substrate 12 and the shielding plate 30 constant. The second spacer 18 is provided between the second substrate 14 and the shielding plate 30, and keeps the distance between the second substrate 14 and the shielding plate 30 constant. The first spacer 16 and the second spacer 18 are provided at the four corners of the test apparatus 10, for example, and are fixed to the first substrate 12, the second substrate 14, or the shielding plate 30 via fastening members such as screws and bolts. NS.

FIG. 2 is a plan view showing the configuration of the shielding plate 30. The shielding plate 30 has a plurality of through holes 34. In the illustrated example, the plurality of through holes 34 are provided at regular intervals in a triangular lattice pattern. The opening shape of the through hole 34 is circular. In the modified example, the through hole 34 may have a rectangular shape or a cross shape. Further, not all the through holes 34 have the same shape, and for example, circular and cross-shaped through holes may be combined. Mounting holes 36 through which screws, bolts, and the like for fixing the first spacer 16 and the second spacer 18 are inserted are provided at the four corners of the shielding plate 30.

As shown in FIG. 1, the plurality of through holes 34 extend in a direction in which the light emitting device 22 and the light receiving unit 24 face each other (also referred to as facing directions). Among the output lights of the plurality of light emitting devices 22a to 22d, the shielding plate 30 allows the light component traveling in the opposite direction in which the through hole 34 extends to pass through. Therefore, the shielding plate 30 allows the light output from the light emitting devices 22a to 22d to pass toward the light receiving units 24a to 24d corresponding to each light emitting device. For example, the output light of the first light emitting device 22a passes through the through hole 34 and is incident on the corresponding first light receiving unit 24a. Similarly, the output light of the second light emitting device 22b passes through the through hole 34 and is incident toward the corresponding second light receiving unit 24b, and the output light of the third light emitting device 22c passes through the through hole 34. It is incident on the corresponding third light receiving unit 24c, and the output light of the fourth light emitting device 22d passes through the through hole 34 and is incident on the corresponding fourth light receiving unit 24d.

The shielding plate 30 shields the light component of the output lights of the plurality of light emitting devices 22a to 22d that travels diagonally with respect to the facing direction in which the through hole 34 extends. As a result, the shielding plate 30 shields the light output from the light emitting devices 22a to 22d toward the light receiving unit different from the light receiving unit corresponding to each light emitting device. The shielding plate 30 shields the light directed to the light receiving portion provided next to the corresponding light receiving portion. For example, the shielding plate 30 shields the light from the first light emitting device 22a toward the second light receiving unit 24b and the light from the second light emitting device 22b toward the first light receiving unit 24a and the third light receiving unit 24c. As a result, it is possible to prevent light output from a light emitting device different from the corresponding light emitting device from incident on the light receiving units 24a to 24d, and to individually measure the intensity of the output light of each light emitting device 22a to 22d.

The angle of light that can be shielded by the shielding plate 30 depends on the opening depth h of the plurality of through holes 34 and the aspect ratio h / w of the opening diameter w. The larger the aspect ratio h / w of the through hole 34, the more preferably the light having a smaller angle with respect to the facing direction in which the through hole 34 extends can be blocked. The aspect ratio h / w of the through hole 34 is, for example, preferably 0.5 or more, and preferably 1 or more.

The aspect ratio h / w of the through hole 34 is the distance d from each light emitting device 22a to 22d to the opposing light receiving parts 24a to 24d, and the adjacent light receiving parts (for example, the first light receiving part 24a and the second light receiving part 24b). The pitch p ratio is preferably d / p or more. As a result, among the light output from each light emitting device, the light directed to the light receiving unit located next to the light receiving unit corresponding to each light emitting device can be suitably blocked.

The opening diameter w and pitch of the plurality of through holes 34 are preferably smaller than the size of the light emitting device 22 and the light receiving unit 24, and are 1/2 or less or 1/3 or less of the size of the light emitting device 22 or the light receiving unit 24. Is preferable. For example, when the size of the light emitting device 22 or the light receiving portion 24 is about 3 mm square to 5 mm square, the opening diameter w and the pitch of the through hole 34 are preferably 2 mm or less or 1 mm or less. In a certain embodiment, the opening diameter w of the through hole 34 is about 0.5 mm to 1.5 mm, and the pitch of the through hole 34 is about 1 mm to 2 mm. The thickness h of the shielding plate 30 is uniform, for example, about 0.5 mm to 2 mm.

By setting the opening diameters and pitches of the plurality of through holes 34 as described above, the through holes 34 are surely arranged on the optical path that substantially goes straight from each light emitting device 22a to 22d toward the corresponding light receiving portions 24a to 24d. can. If the opening diameter and pitch of the through hole 34 are about the same as the size of the light emitting device 22 and the light receiving unit 24, there is a possibility that the through hole 34 is not located in front of the light emitting device 22 and the light receiving unit 24. In that case, the arrangement of all the light emitting devices 22 must be finely adjusted according to the position of the through hole 34, which is very troublesome. On the other hand, if the opening diameter and pitch of the through hole 34 are sufficiently small, even if the relative positions of the light emitting device 22 and the light receiving portion 24 and the through hole 34 change, at least one through hole 34 can be used as the light emitting device 22 and the light receiving device 22 and the light receiving hole 34. It becomes easy to position it in front of the portion 24. As a result, a general-purpose punching metal or the like can be used as the shielding plate 30, and the test apparatus 10 can be constructed at low cost.

Next, a method of using the test apparatus 10 will be described. First, the light emitting device 22 is mounted on each of the plurality of holding portions 20. Next, using the first spacer 16 and the second spacer 18, the first substrate 12, the second substrate 14, and the shielding plate 30 are relatively fixed, and the test apparatus 10 is assembled. The light emitting device 22 is continuously energized for the time required for the test (for example, 100 hours, 1000 hours, 5000 hours, 10000 hours, 50,000 hours). The light receiving unit 24 measures the intensity of incident light over the time when the continuous energization test is executed. When conducting a high temperature test, a low temperature test, a high temperature high humidity test, a temperature cycle test, or the like, the test device 10 may be installed in the constant temperature device.

FIG. 3 is a diagram schematically showing the configuration of the test apparatus 110 according to the comparative example. The test apparatus 110 includes a first substrate 112, a second substrate 114, a spacer 116, a plurality of holding portions 120 (120a, 120b, 120c), and a plurality of light receiving portions 124 (124a, 124b, 124c). The shielding members 130a, 130b, 130c of the above are provided. The comparative example differs from the above-described embodiment in that tubular shielding members 130a to 130c are provided as the partition structure. The shielding members 130a to 130c are provided so that the plurality of light emitting devices 22 and the plurality of light receiving units 124 extend in the opposite directions.

In the comparative example, since the shielding members 130a to 130c are provided so as to surround the light receiving portions 124a to 124c, it is necessary to secure a space for attaching the shielding member between the adjacent light receiving portions. As a result, it becomes necessary to increase the pitch p of the adjacent light receiving parts as compared with the above-described embodiment, and the number of light emitting devices and light receiving parts that can be mounted per unit area is reduced. To put it the other way around, a larger installation area is required to simultaneously test a predetermined number of light emitting devices, and the cost of the test increases. For example, when a test device is used in a constant temperature device, a larger constant temperature device is required, which leads to an increase in test cost.

On the other hand, according to the present embodiment, a partition structure for simultaneously testing a plurality of light emitting devices 22 can be realized by a single shielding plate 30. As a result, it is not necessary to provide a shielding member extending in the opposite direction between the light emitting device 22 and the light receiving unit 24 between the adjacent light emitting devices 22 and the light receiving unit 24, and the number of light emitting devices that can be mounted per unit area can be increased. can. Therefore, according to the present embodiment, the partition structure can be simplified and the cost required for the test can be suppressed.

FIG. 4 is a diagram schematically showing the configuration of the test apparatus 210 according to the modified example. This modification differs from the above-described embodiment in that the two shielding plates 30 and 40 are used in combination. Hereinafter, the differences from the above-described embodiment will be mainly described.

The test apparatus 210 includes a first substrate 12, a second substrate 14, a first spacer 16, a second spacer 18, a plurality of holding portions 20, a plurality of light receiving portions 24, a first shielding plate 30, and the like. A second shielding plate 40 and a slide portion 50 are provided.

The second shielding plate 40 is provided between the plurality of light emitting devices 22 and the plurality of light receiving units 24, and is arranged so as to overlap the first shielding plate 30. The first shielding plate 30 has a plurality of first through holes 34, and the second shielding plate 40 has a plurality of second through holes 44. The plurality of second through holes 44 are provided so as to have the same opening diameter and pitch as the plurality of first through holes 34, so that the corresponding first through holes 34 and the second through holes 44 communicate with each other in the opposite direction. It is composed.

The second shielding plate 40 is attached to the slide portion 50. The slide portion 50 is fixed to the first spacer 16 or the second spacer 18 and supports the outer circumference of the second shielding plate 40. The slide portion 50 supports the second shielding plate 40 so that the second shielding plate 40 can slide in the direction orthogonal to the facing direction. FIG. 4 shows a second shielding plate 40 when the first through hole 34 and the second through hole 44 are arranged at an overlapping communication position.

FIG. 5 schematically shows the configuration of the test apparatus 210 according to the modified example, and shows a state when the second shielding plate 40 is slid and arranged in a non-communication position. By sliding the second shielding plate 40 with respect to the first shielding plate 30, the first through hole 34 and the second through hole 44 do not overlap from the communication position where the first through hole 34 and the second through hole 44 overlap. It can be displaced to a non-communication position. In this modification, by sliding the second shielding plate 40, the light incident on the light receiving portions 24a to 24d can be completely shielded during the energization test.

According to this modification, by combining the two shielding plates 30 and 40, it is possible to enhance the partitioning effect in which the output light of each of the light emitting devices 22a to 22d is incident only on the corresponding light receiving portion. By making the second shielding plate 40 displaceable between the communicating position and the non-communication position, light is incident on each of the light receiving portions 24a to 24d only during the period when the measurement of the light intensity is necessary, and during the period when the measurement is unnecessary. It is possible to prevent the light receiving portions 24a to 24d from being irradiated with light. For example, when measuring the light intensities of the light emitting devices 22a to 22d at intervals in the continuous energization test, the second shielding plate 40 is arranged at the communication position only at the time of measurement, and the second shielding plate 40 is placed at other periods. It may be placed in a non-communication position. Since the photodiode and the like included in the light receiving unit 24 may deteriorate as the integrated irradiation time of light increases, the light receiving unit 24 is irradiated with light for a shorter period of time during one continuous energization test. The deterioration of 24 can be suppressed. By suppressing the deterioration of the light receiving unit 24, the measurement accuracy of the test device 10 can be improved, and the device life of the test device 10 can be further extended.

The present invention has been described above based on examples. It is understood by those skilled in the art that the present invention is not limited to the above-described embodiment, various design changes are possible, various modifications are possible, and such modifications are also within the scope of the present invention. It is about to be.

In the above-described embodiment and modification, the case where one or two shielding plates are used is shown. In a further modification, three or more shielding plates provided with a plurality of through holes may be stacked and used.

In the above-described embodiment and modification, the case where the light emitting device 22 that outputs deep ultraviolet light is the test object is shown. In a further modification, the above-mentioned test device 10 may be used for a light emitting device that outputs light other than deep ultraviolet light. For example, a light emitting device that outputs ultraviolet light of 360 nm to 400 nm and a light emitting device that outputs blue light of 400 nm to 450 nm may be tested. A light emitting device that outputs visible light such as green, yellow, or red may be the test target, or a light emitting device that outputs infrared light may be the target.

10 ... test device, 20 ... holding part, 22 ... light emitting device, 24 ... light receiving part, 30 ... shielding plate (first shielding plate), 34 ... through hole (first through hole), 40 ... second shielding plate, 44 … Second through hole.

Claims (6)

A holding unit that holds multiple light emitting devices to be tested,
A plurality of light receiving units are provided correspondingly at positions facing each of the plurality of light emitting devices, and a plurality of light receiving units for measuring the intensity of light output from the plurality of light emitting devices, and a plurality of light receiving units.
A plurality of light emitting devices arranged between the plurality of light emitting devices and the plurality of light receiving units, and allowing light output from each of the plurality of light emitting devices to pass toward the light receiving units corresponding to each of the plurality of light emitting devices. With a shielding plate provided with a through hole,
The aspect ratio h / w of the opening depth h and the opening diameter w of the plurality of through holes is the distance d at which the plurality of light emitting devices and the plurality of light receiving portions face each other, and two adjacent light receiving portions among the plurality of light receiving portions. A test apparatus characterized in that the ratio of the pitch ps of the two light receiving portions is d / p or more. A holding unit that holds multiple light emitting devices to be tested,
A plurality of light receiving units are provided correspondingly at positions facing each of the plurality of light emitting devices, and a plurality of light receiving units for measuring the intensity of light output from the plurality of light emitting devices, and a plurality of light receiving units.
A plurality of light emitting devices arranged between the plurality of light emitting devices and the plurality of light receiving units, and allowing light output from each of the plurality of light emitting devices to pass toward the light receiving units corresponding to each of the plurality of light emitting devices. With a shielding plate provided with a through hole,
Opening diameter of the plurality of through-holes, the smaller than the respective sizes of a plurality of light emitting devices, rather smaller than a size of each of the multiple light receiving portions,
Wherein the plurality of pitch of the through hole, the smaller than the respective sizes of a plurality of light emitting devices, said plurality of test apparatus characterized by smaller Ikoto than each size of the light receiving portion. The shielding plate is characterized in that, of the light output from each of the plurality of light emitting devices, the light directed to a light receiving unit different from the light receiving unit corresponding to each of the plurality of light emitting devices is shielded. The test apparatus according to 1 or 2. The test apparatus according to any one of claims 1 to 3, wherein the shielding plate has a uniform thickness, and the plurality of through holes are provided at regular intervals. The shielding plate is a first shielding plate, and the through hole is a first through hole.
The test apparatus further includes a second shielding plate arranged between the plurality of light emitting devices and the plurality of light receiving portions and provided with a plurality of second through holes.
Each of the plurality of light receiving units is characterized in that, among the light output from each of the plurality of light emitting devices, the intensity of the light that has passed through both the first through hole and the second through hole is measured. The test apparatus according to any one of claims 1 to 4. The first shielding plate and the second shielding plate are between a communication position where the first through hole and the second through hole overlap and a non-communication position where the first through hole and the second through hole do not overlap. The test apparatus according to claim 5, wherein the test apparatus is configured so as to be relatively displaceable.

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