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JP6934740B2 - Magnetization measurement method - Google Patents
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JP6934740B2 - Magnetization measurement method - Google Patents

Magnetization measurement method Download PDF

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JP6934740B2
JP6934740B2 JP2017077282A JP2017077282A JP6934740B2 JP 6934740 B2 JP6934740 B2 JP 6934740B2 JP 2017077282 A JP2017077282 A JP 2017077282A JP 2017077282 A JP2017077282 A JP 2017077282A JP 6934740 B2 JP6934740 B2 JP 6934740B2
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JP2018179660A (en
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直矢 冨田
直矢 冨田
太祐 永田
太祐 永田
堀 充孝
充孝 堀
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日本電磁測器株式会社
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Description

本発明は、磁化測定方法に関するものである。 The present invention relates to a method for measuring magnetization.

永久磁石等の磁性体よりなる被測定試料の飽和磁化、残留磁束密度又は保磁力等を評価するために、被測定試料の磁化−磁界曲線(J−H曲線)が測定される。このようなJ−H曲線の測定方法として、励磁コイルにより磁界を掃引しながら印加して被測定試料を磁化させ、被測定試料の周りに巻回された検出コイルに生じる誘導起電力から磁化を求める方法がある。 The magnetization-magnetic field curve (JH curve) of the sample to be measured is measured in order to evaluate the saturation magnetization, residual magnetic flux density, coercive force, etc. of the sample to be measured made of a magnetic material such as a permanent magnet. As a method for measuring such a JH curve, a magnetic field is applied while sweeping with an exciting coil to magnetize the sample to be measured, and magnetization is generated from an induced electromotive force generated in a detection coil wound around the sample to be measured. There is a way to ask.

特開2013−50390号公報(特許文献1)には、永久磁石の磁気特性を測定するための磁気特性測定センサーにおいて、永久磁石の磁束密度を測定するためのBコイルと、永久磁石の磁界強度の測定に用いるHコイル及び/又は永久磁石の磁化の測定に用いるMコイルとを、永久磁石の周囲に同軸上に巻回した技術が開示されている。 Japanese Patent Application Laid-Open No. 2013-50390 (Patent Document 1) describes a B coil for measuring the magnetic flux density of a permanent magnet and a magnetic field strength of the permanent magnet in a magnetic characteristic measuring sensor for measuring the magnetic characteristics of the permanent magnet. A technique is disclosed in which an H coil used for measuring the above and / or an M coil used for measuring the magnetization of a permanent magnet are wound coaxially around a permanent magnet.

一方、例えばネオジウム鉄ホウ素(NdFeB)磁石等の飽和磁化の大きな永久磁石よりなる被測定試料を磁気飽和させてJ−H曲線を測定する場合には、例えば鉄芯と電磁石を用いた閉磁気回路法では、被測定試料を磁気飽和させるために十分な強度の磁界を印加することができない。このような場合には、被測定試料にパルス磁界を印加してJ−H曲線を測定する。 On the other hand, when measuring the JH curve by magnetically saturationing a sample under test made of a permanent magnet having a large saturation magnetization such as a neodium iron boron (NdFeB) magnet, for example, a closed magnetic circuit using an iron core and an electromagnet. The method cannot apply a magnetic field of sufficient strength to magnetically saturate the sample under test. In such a case, a pulse magnetic field is applied to the sample to be measured to measure the JH curve.

特開2016−95264号公報(特許文献2)には、高磁界パルス励磁型磁気特性評価装置において、試料を一対の試料押さえ棒で挟んだ状態で、試料の周りに設けたコイルに磁界を印加して、試料の磁気特性を測定する技術が開示されている。 According to Japanese Patent Application Laid-Open No. 2016-95264 (Patent Document 2), in a high magnetic field pulse excitation type magnetic property evaluation device, a magnetic field is applied to a coil provided around a sample in a state where the sample is sandwiched between a pair of sample holding rods. Then, a technique for measuring the magnetic properties of a sample is disclosed.

特開2013−50390号公報Japanese Unexamined Patent Publication No. 2013-50390 特開2016−95264号公報Japanese Unexamined Patent Publication No. 2016-95264

しかし、励磁コイルにより磁界を掃引しながら印加して被測定試料を磁化させ、被測定試料の周りに巻回された検出コイルに生じる誘導起電力から磁化を求める場合、以下のような問題がある。 However, when the magnetic field is applied while being swept by the exciting coil to magnetize the sample to be measured and the magnetization is obtained from the induced electromotive force generated in the detection coil wound around the sample to be measured, there are the following problems. ..

例えば磁界を掃引しながら印加する際に被測定試料内に発生する渦電流の影響が無視できなくなる。或いは、被測定試料の周辺に強磁性金属よりなるヨークを設けることができない場合、被測定試料の周辺での反磁界の影響が大きくなる。或いは、磁化を検出するコイルと磁界の強度を検出するコイルとが、印加される磁界に沿った方向において互いに間隔を空けて配置されている場合、測定される磁界が被測定試料に実際に印加されている磁界と一致しなくなる。或いは、磁界の強度を検出するコイルが被測定試料の磁化の影響を受け、測定される磁界の強度が被測定試料に実際に印加されている磁界と一致しなくなる。そのため、被測定試料の磁化を高精度で測定することができず、被測定試料に印加された磁界の強度を高精度で測定することができない。 For example, the influence of the eddy current generated in the sample to be measured when the magnetic field is applied while being swept cannot be ignored. Alternatively, if a yoke made of a ferromagnetic metal cannot be provided around the sample to be measured, the influence of the demagnetic field around the sample to be measured becomes large. Alternatively, when the coil for detecting the magnetization and the coil for detecting the strength of the magnetic field are arranged at intervals in the direction along the applied magnetic field, the measured magnetic field is actually applied to the sample to be measured. It does not match the magnetic field being magnetized. Alternatively, the coil that detects the strength of the magnetic field is affected by the magnetization of the sample to be measured, and the strength of the measured magnetic field does not match the magnetic field actually applied to the sample to be measured. Therefore, the magnetization of the sample to be measured cannot be measured with high accuracy, and the strength of the magnetic field applied to the sample to be measured cannot be measured with high accuracy.

本発明は、上述のような従来技術の問題点を解決すべくなされたものであって、被測定試料の磁化を高精度で測定することができ、被測定試料に印加された磁界の強度を高精度で測定することができる磁化測定方法を提供することを目的とする。 The present invention has been made to solve the above-mentioned problems of the prior art, and can measure the magnetization of the sample to be measured with high accuracy, and can measure the strength of the magnetic field applied to the sample to be measured. It is an object of the present invention to provide a magnetization measuring method capable of measuring with high accuracy.

本願において開示される発明のうち、代表的なものの概要を簡単に説明すれば、次のとおりである。 A brief description of typical inventions disclosed in the present application is as follows.

本発明の一態様としての磁化測定方法は、磁性体の磁化を測定する磁化測定方法である。当該磁化測定方法は、第1方向に延在する第1軸上に、保持部により磁性体を保持する(a)ステップと、保持部に保持されている磁性体に、第1方向の第1磁界を、印加部により印加する(b)ステップと、を備えている。また、当該磁化測定方法は、印加部により印加される第1磁界を掃引部により掃引しながら(b)ステップを行う(c)ステップと、(c)ステップを行う際に、磁性体の磁化及び第1磁界の強度を、測定部により測定する(d)ステップと、を備えている。測定部は、第1軸の周りに、保持部に保持されている磁性体を囲むように巻回され、且つ、鎖交する磁束の変化により第1誘導起電力を発生する第1コイルと、第1軸の周りに、第1コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第2誘導起電力を発生する第2コイルと、を有する。また、測定部は、第1軸の周りに、第2コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第3誘導起電力を発生する第3コイルと、第1軸の周りに、第3コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第4誘導起電力を発生する第4コイルと、を有する。また、測定部は、第1誘導起電力の絶対値と第2誘導起電力の絶対値との差分である第1差分値に基づいて、保持部に保持されている磁性体の磁化を測定する磁化測定部と、第3誘導起電力の絶対値と第4誘導起電力の絶対値との差分である第2差分値に基づいて、第1磁界の強度を測定する磁界測定部と、を有する。第1コイルの巻き数をNとし、第2コイルの巻き数をNとし、第3コイルの巻き数をNとし、第4コイルの巻き数をNとし、第1コイルの第1軸に垂直な断面の面積をSとし、第2コイルの第1軸に垂直な断面の面積をSとしたとき、(N×S−N×S)/(N×S)の絶対値が0.02以下であり、(N−N)/Nの絶対値が0.02以下である。第1コイルの第1部分、第2コイルの第2部分、第3コイルの第3部分、及び、第4コイルの第4部分は、第1方向において、互いに同じ位置に配置されている。そして、第1方向における第1コイルの第1厚さ、第1方向における第2コイルの第2厚さ、第1方向における第3コイルの第3厚さ、及び、第1方向における第4コイルの第4厚さは、いずれも7mm未満であるか、又は、いずれも保持部に保持されている磁性体の第1方向における第5厚さよりも薄く、(c)ステップでは、第1磁界を、掃引部により正方向及び負方向の両方向に掃引しながら(b)ステップを行う。 The magnetization measuring method as one aspect of the present invention is a magnetization measuring method for measuring the magnetization of a magnetic material. The magnetization measuring method includes a step (a) of holding a magnetic material by a holding portion on a first axis extending in the first direction, and a first direction of the magnetic material held by the holding portion in the first direction. It includes a step (b) in which a magnetic field is applied by an application unit. Further, in the magnetization measurement method, the magnetization of the magnetic material and the magnetization of the magnetic material when the step (c) is performed while the first magnetic field applied by the application unit is swept by the sweep unit, and the step (c) is performed. It includes a step (d) of measuring the strength of the first magnetic field by a measuring unit. The measuring unit includes a first coil that is wound around the first axis so as to surround the magnetic material held by the holding unit and generates a first induced electromotive force due to a change in the interlinking magnetic flux. It has a second coil that is wound around the first axis so as to surround the first coil and generates a second induced electromotive force by a change in the interlinking magnetic flux. Further, the measuring unit is wound around the first axis so as to surround the second coil, and the third coil that generates the third induced electromotive force by the change of the interlinking magnetic flux, and the first axis. It has a fourth coil that is wound around the third coil and generates a fourth induced electromotive force due to a change in the interlinking magnetic flux. Further, the measuring unit measures the magnetization of the magnetic material held in the holding unit based on the first difference value, which is the difference between the absolute value of the first induced electromotive force and the absolute value of the second induced electromotive force. It has a magnetization measuring unit and a magnetic field measuring unit that measures the strength of the first magnetic field based on the second difference value, which is the difference between the absolute value of the third induced electromotive force and the absolute value of the fourth induced electromotive force. .. The number of turns of the first coil and N A, the number of turns of the second coil and N B, the number of turns of the third coil and N C, the number of turns of the fourth coil and N D, the first coil first the area of the cross section perpendicular to the axis and S a, when the area of the cross section perpendicular to the first axis of the second coil and the S B, (N a × S a -N B × S B) / (N a × S a absolute value of) is 0.02 or less, 0.02 or less the absolute value of (N C -N D) / N C. The first part of the first coil, the second part of the second coil, the third part of the third coil, and the fourth part of the fourth coil are arranged at the same position with each other in the first direction. Then, the first thickness of the first coil in the first direction, the second thickness of the second coil in the first direction, the third thickness of the third coil in the first direction, and the fourth coil in the first direction. The fourth thickness of each is less than 7 mm, or both are thinner than the fifth thickness of the magnetic material held in the holding portion in the first direction, and in the step (c), the first magnetic field is applied. , Step (b) is performed while sweeping in both the positive and negative directions by the sweeping portion.

本発明の一態様を適用することで、磁性体よりなる被測定試料の磁化を測定する磁化測定装置において、被測定試料の磁化を高精度で測定することができ、被測定試料に印加された磁界の強度を高精度で測定することができる。 By applying one aspect of the present invention, the magnetization of the sample to be measured can be measured with high accuracy in a magnetization measuring device for measuring the magnetization of the sample to be measured made of a magnetic material, and the sample is applied to the sample to be measured. The strength of the magnetic field can be measured with high accuracy.

実施の形態の磁化測定装置の全体構成を示す一部断面を含むブロック図である。It is a block diagram including a partial cross section which shows the whole structure of the magnetization measuring apparatus of embodiment. 実施の形態の磁化測定装置のうち被測定試料及びその周辺に配置された部分を模式的に示す図である。It is a figure which shows typically the part to be measured and the part arranged around it in the magnetization measuring apparatus of embodiment. 比較例の磁化測定装置のうち励磁コイル及びその周辺に配置された部分を模式的に示す一部断面を含む図である。It is a figure including a part cross section which shows typically the part arranged around the exciting coil in the magnetization measuring apparatus of a comparative example. 励磁コイルがパルス磁界を印加する場合の励磁電源の構成の一例を示す回路図である。It is a circuit diagram which shows an example of the structure of the exciting power source when the exciting coil applies a pulse magnetic field. 励磁コイルがパルス磁界を印加する際に被測定試料に印加される磁界の強度の時間依存性を模式的に示すグラフである。It is a graph which shows typically the time dependence of the strength of the magnetic field applied to the sample to be measured when the exciting coil applies a pulse magnetic field. 被測定試料の磁化ヒステリシス曲線を模式的に示すグラフである。It is a graph which shows typically the magnetization hysteresis curve of the sample to be measured.

以下に、本発明の実施の形態について、図面を参照しつつ説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

なお、開示はあくまで一例にすぎず、当業者において、発明の主旨を保っての適宜変更について容易に想到し得るものについては、当然に本発明の範囲に含有されるものである。また、図面は説明をより明確にするため、実施の態様に比べ、各部の幅、厚さ、形状等について模式的に表される場合があるが、あくまで一例であって、本発明の解釈を限定するものではない。 It should be noted that the disclosure is merely an example, and those skilled in the art can easily conceive of appropriate changes while maintaining the gist of the invention are naturally included in the scope of the present invention. Further, in order to clarify the description, the drawings may schematically represent the width, thickness, shape, etc. of each part as compared with the embodiment, but this is merely an example, and the interpretation of the present invention is used. It is not limited.

また本明細書と各図において、既出の図に関して前述したものと同様の要素には、同一の符号を付して、詳細な説明を適宜省略することがある。 Further, in the present specification and each figure, the same elements as those described above with respect to the above-mentioned figures may be designated by the same reference numerals, and detailed description thereof may be omitted as appropriate.

更に、実施の形態で用いる図面においては、構造物を区別するために付したハッチング(網掛け)を図面に応じて省略する場合もある。 Further, in the drawings used in the embodiments, hatching (shading) attached to distinguish the structures may be omitted depending on the drawings.

なお、以下の実施の形態においてA〜Bとして範囲を示す場合には、特に明示した場合を除き、A以上B以下を示すものとする。 In the following embodiments, when the range is indicated as A to B, A or more and B or less are indicated unless otherwise specified.

(実施の形態)
<磁化測定装置>
初めに、本発明の一実施形態である実施の形態の磁化測定装置について説明する。本実施の形態の磁化測定装置は、磁性体よりなる被測定試料の磁化を測定する磁化測定装置である。
(Embodiment)
<Magnetization measuring device>
First, the magnetization measuring device of the embodiment which is one embodiment of the present invention will be described. The magnetization measuring device of the present embodiment is a magnetization measuring device for measuring the magnetization of a sample to be measured made of a magnetic material.

図1は、実施の形態の磁化測定装置の全体構成を示す一部断面を含むブロック図である。図2は、実施の形態の磁化測定装置のうち被測定試料及びその周辺に配置された部分を模式的に示す図である。 FIG. 1 is a block diagram including a partial cross section showing the overall configuration of the magnetization measuring device of the embodiment. FIG. 2 is a diagram schematically showing a sample to be measured and a portion arranged around the sample to be measured in the magnetization measuring device of the embodiment.

図1に示すように、本実施の形態の磁化測定装置11は、保持部12と、印加部13と、掃引部14と、測定部15と、制御部16と、を備えている。保持部12は、例えば鉛直方向である方向DR1に延在する軸AX1上に、磁性体よりなる被測定試料MS1を保持する。印加部13は、保持部12に保持されている被測定試料MS1に、方向DR1の磁界MF1を印加する。掃引部14は、印加部13により印加される磁界MF1を掃引する。測定部15は、磁界MF1を掃引部14により掃引しながら印加部13により被測定試料MS1に磁界MF1を印加する際に、被測定試料MS1の磁化及び磁界MF1の強度を測定する。制御部16は、掃引部14による掃引、及び、測定部15による測定を、制御する。なお、測定部15の詳細については、後述する。 As shown in FIG. 1, the magnetization measuring device 11 of the present embodiment includes a holding unit 12, an applying unit 13, a sweeping unit 14, a measuring unit 15, and a control unit 16. The holding unit 12 holds the sample MS1 to be measured made of a magnetic material on the axis AX1 extending in the direction DR1 which is the vertical direction, for example. The application unit 13 applies the magnetic field MF1 in the direction DR1 to the sample MS1 to be measured held by the holding unit 12. The sweep unit 14 sweeps the magnetic field MF1 applied by the application unit 13. The measuring unit 15 measures the magnetization of the sample MS1 to be measured and the strength of the magnetic field MF1 when the magnetic field MF1 is applied to the sample MS1 to be measured by the applying unit 13 while sweeping the magnetic field MF1 by the sweeping unit 14. The control unit 16 controls the sweep by the sweep unit 14 and the measurement by the measurement unit 15. The details of the measuring unit 15 will be described later.

好適には、本実施の形態の磁化測定装置11に備えられた保持部12は、軸AX1に沿って、即ち方向DR1に延在し、且つ、筒状形状を有する筒状部材21と、柱状形状をそれぞれ有し、且つ、筒状部材21中で被測定試料MS1を上下から挟持する上側部材22及び下側部材23と、を有する。保持部12が、このような構成を有することにより、被測定試料MS1を軸AX1上に保持して固定することができる。 Preferably, the holding portion 12 provided in the magnetization measuring device 11 of the present embodiment has a cylindrical member 21 extending along the axis AX1, that is, in the direction DR1, and having a cylindrical shape, and a columnar shape. Each has a shape, and has an upper member 22 and a lower member 23 that sandwich the sample MS1 to be measured from above and below in the cylindrical member 21. Since the holding portion 12 has such a configuration, the sample MS1 to be measured can be held and fixed on the shaft AX1.

また、筒状部材21は、円筒形状を有することがより好ましく、上側部材22及び下側部材23は、円柱形状を有することがより好ましい。保持部12がこのような構成を有することにより、円柱形状を有する被測定試料MS1を、軸AX1上に、軸AX1を中心として軸対称に配置することができる。 Further, it is more preferable that the tubular member 21 has a cylindrical shape, and it is more preferable that the upper member 22 and the lower member 23 have a cylindrical shape. Since the holding portion 12 has such a configuration, the sample MS1 to be measured having a cylindrical shape can be arranged on the axis AX1 in an axially symmetrical manner with the axis AX1 as the center.

好適には、印加部13は、軸AX1の周りに、被測定試料MS1を囲むように巻回され、且つ、方向DR1に延在する円筒形状を有する励磁コイル31を有する。これにより、保持部12に保持されている被測定試料MS1に、方向DR1の磁界MF1を印加することができる。 Preferably, the application unit 13 has an exciting coil 31 that is wound around the shaft AX1 so as to surround the sample MS1 to be measured and has a cylindrical shape extending in the direction DR1. As a result, the magnetic field MF1 in the direction DR1 can be applied to the sample MS1 to be measured held in the holding unit 12.

好適には、掃引部14は、励磁コイル31に接続され、且つ、励磁コイル31に電流を流す励磁電源41と、励磁電源41が励磁コイル31に流す電流を掃引することにより、励磁コイル31が発生する磁界を掃引する制御盤42と、を有する。 Preferably, the sweep portion 14 is connected to the exciting coil 31, and the exciting coil 31 is operated by sweeping the exciting power supply 41 in which the current flows through the exciting coil 31 and the current flowing through the exciting coil 31 by the exciting power supply 41. It has a control panel 42 for sweeping the generated magnetic field.

好適には、測定部15は、コイル51と、コイル52と、コイル53と、コイル54と、磁化測定部55と、磁界測定部56と、を有する。即ち、測定部15は、コイル51、52、53及び54の4つのコイルを有する。配置の詳細については後述するものの、コイル51、52、53及び54は、軸AX1の周りに、軸AX1を中心として同心円状に配置されている。また、動作の詳細については後述するが、磁化測定部55は、コイル51及び52の各々の誘導起電力に基づいて、保持部12に保持されている被測定試料MS1の磁化を測定し、磁界測定部56は、コイル53及び54の各々の誘導起電力に基づいて、磁界MF1の強度を測定する。 Preferably, the measuring unit 15 has a coil 51, a coil 52, a coil 53, a coil 54, a magnetization measuring unit 55, and a magnetic field measuring unit 56. That is, the measuring unit 15 has four coils of coils 51, 52, 53 and 54. Although the details of the arrangement will be described later, the coils 51, 52, 53 and 54 are arranged concentrically around the shaft AX1 with the shaft AX1 as the center. Further, although the details of the operation will be described later, the magnetization measuring unit 55 measures the magnetization of the sample MS1 to be measured held in the holding unit 12 based on the induced electromotive force of each of the coils 51 and 52, and the magnetic field. The measuring unit 56 measures the strength of the magnetic field MF1 based on the induced electromotive force of each of the coils 53 and 54.

好適には、制御部16は、パーソナルコンピュータ61を有する。パーソナルコンピュータ61は、制御盤42に接続されている。パーソナルコンピュータ61に含まれる例えば中央演算装置(Central Processing Unit:CPU)等よりなる演算部が、パーソナルコンピュータ61に含まれる例えばメモリ等よりなる記憶部に記憶されたプログラムを実行し、制御盤42を制御することにより、励磁コイル31が発生する磁界を掃引する。 Preferably, the control unit 16 has a personal computer 61. The personal computer 61 is connected to the control panel 42. A calculation unit including, for example, a central processing unit (CPU) included in the personal computer 61 executes a program stored in a storage unit including, for example, a memory included in the personal computer 61, and controls the control panel 42. By controlling, the magnetic field generated by the exciting coil 31 is swept.

次に、本実施の形態の磁化測定装置11が備えた測定部15について、比較例の磁化測定装置が備えた測定部と比較しながら説明する。図3は、比較例の磁化測定装置のうち励磁コイル及びその周辺に配置された部分を模式的に示す一部断面を含む図である。 Next, the measuring unit 15 provided in the magnetization measuring device 11 of the present embodiment will be described while comparing with the measuring unit provided in the magnetization measuring device of the comparative example. FIG. 3 is a diagram including a partial cross section schematically showing an exciting coil and a portion arranged around the excitation coil in the magnetization measuring device of the comparative example.

図3に示すように、比較例の磁化測定装置111は測定部115を備えており、測定部115は、コイル151と、コイル152と、磁化測定部153と、磁界測定部154と、を有する。即ち、測定部115は、コイル151及び152の2つのコイルを有する。また、磁化測定部153は、コイル151の誘導起電力の絶対値とコイル152の誘導起電力の絶対値との差分である差分値に基づいて、保持部12に保持されている被測定試料MS1の磁化を測定し、磁界測定部154は、コイル152の誘導起電力に基づいて、磁界MF1の強度を測定する。なお、比較例の磁化測定装置111も、実施の形態の磁化測定装置11と同様に、保持部12と、印加部13と、を備えている。 As shown in FIG. 3, the magnetization measuring device 111 of the comparative example includes a measuring unit 115, and the measuring unit 115 includes a coil 151, a coil 152, a magnetization measuring unit 153, and a magnetic field measuring unit 154. .. That is, the measuring unit 115 has two coils, coils 151 and 152. Further, the magnetization measuring unit 153 is holding the sample MS1 to be measured held in the holding unit 12 based on a difference value which is a difference between the absolute value of the induced electromotive force of the coil 151 and the absolute value of the induced electromotive force of the coil 152. The magnetization of the magnetic field MF1 is measured by the magnetic field measuring unit 154 based on the induced electromotive force of the coil 152. The magnetization measuring device 111 of the comparative example also includes a holding unit 12 and an applying unit 13 as in the magnetization measuring device 11 of the embodiment.

比較例の磁化測定装置111では、コイル151は、軸AX1の周りに、保持部12に保持されている被測定試料MS1を囲むように巻回され、鎖交する磁束の変化により誘導起電力を発生する。しかし、コイル152は、コイル151と同様に、軸AX1の周りに巻回され、鎖交する磁束の変化により誘導起電力を発生するものの、コイル151とは異なり、保持部12に保持されている被測定試料MS1を囲むように巻回されてはいない。即ち、コイル151とコイル152とは、軸AX1に沿って、即ち方向DR1において、互いに間隔を空けて配置されている。 In the magnetization measuring device 111 of the comparative example, the coil 151 is wound around the axis AX1 so as to surround the sample MS1 to be measured held by the holding portion 12, and the induced electromotive force is generated by the change of the interlinking magnetic flux. appear. However, like the coil 151, the coil 152 is wound around the shaft AX1 and generates an induced electromotive force due to a change in the interlinking magnetic flux, but unlike the coil 151, it is held by the holding portion 12. It is not wound around the sample MS1 to be measured. That is, the coil 151 and the coil 152 are arranged along the axis AX1, that is, in the direction DR1, at intervals from each other.

比較例の磁化測定装置111では、磁化測定部153は、磁界MF1を掃引しながら印加する際のコイル151の誘導起電力の絶対値とコイル152の誘導起電力の絶対値との差分である差分値に基づいて、保持部12に保持されている被測定試料MS1の磁化を測定する。 In the magnetization measuring device 111 of the comparative example, the magnetization measuring unit 153 is a difference between the absolute value of the induced electromotive force of the coil 151 and the absolute value of the induced electromotive force of the coil 152 when the magnetic field MF1 is applied while being swept. Based on the value, the magnetization of the sample MS1 to be measured held in the holding unit 12 is measured.

しかし、比較例の磁化測定装置111では、被測定試料MS1が永久磁石の材料である例えば強磁性金属よりなる場合、被測定試料MS1の電気抵抗が小さいため、磁界を掃引しながら印加する際に被測定試料MS1内に発生する渦電流の影響が無視できなくなる。そのため、磁化測定部153により測定される磁化が、被測定試料MS1の真の磁化の値からずれる、という問題がある。 However, in the magnetization measuring device 111 of the comparative example, when the sample MS1 to be measured is made of, for example, a ferromagnetic metal which is a material of a permanent magnet, the electric resistance of the sample MS1 to be measured is small, so that when the magnetic field is swept and applied. The influence of the eddy current generated in the sample MS1 to be measured cannot be ignored. Therefore, there is a problem that the magnetization measured by the magnetization measuring unit 153 deviates from the true magnetization value of the sample MS1 to be measured.

或いは、被測定試料MS1の周辺に強磁性金属よりなるヨークを設けることができない場合、被測定試料MS1の周辺で形成される磁気回路が、所謂開磁気回路となり、被測定試料MS1の周辺での反磁界の影響が大きくなり、磁化測定部153により測定される磁化の値が、被測定試料MS1の真の磁化の値からずれる、という問題がある。 Alternatively, when a yoke made of ferromagnetic metal cannot be provided around the sample MS1 to be measured, the magnetic circuit formed around the sample MS1 to be measured becomes a so-called open magnetic circuit, and is located around the sample MS1 to be measured. There is a problem that the influence of the demagnetism becomes large and the magnetization value measured by the magnetization measuring unit 153 deviates from the true magnetization value of the sample MS1 to be measured.

或いは、励磁コイル31の内部では、方向DR1における互いに異なる位置間での、磁界の強度が不均一になりやすい。そのため、コイル151とコイル152とが、方向DR1において互いに間隔を空けて配置されている場合、コイル152により測定される磁界の強度が、被測定試料MS1に実際に印加されている磁界MF1の強度と一致しなくなる。従って、磁化測定部153により測定される磁化の値が、磁界測定部154により測定された磁界の強度に対応した磁化の値からずれる、という問題がある。 Alternatively, inside the exciting coil 31, the strength of the magnetic field tends to be non-uniform between different positions in the direction DR1. Therefore, when the coil 151 and the coil 152 are arranged at intervals in the direction DR1, the strength of the magnetic field measured by the coil 152 is the strength of the magnetic field MF1 actually applied to the sample MS1 to be measured. Does not match. Therefore, there is a problem that the magnetization value measured by the magnetization measuring unit 153 deviates from the magnetization value corresponding to the strength of the magnetic field measured by the magnetic field measuring unit 154.

或いは、被測定試料MS1の磁化により発生する磁束の一部がコイル152と鎖交することにより、コイル152に印加された磁界の強度が、励磁コイル31により印加された磁界の強度と一致しなくなる。即ち、コイル152が被測定試料MS1の影響を受ける。そのため、磁化測定部153により測定される磁化の値が、磁界測定部154により測定された磁界の強度に対応した磁化の値からずれる、という問題がある。 Alternatively, a part of the magnetic flux generated by the magnetization of the sample MS1 to be measured interlinks with the coil 152, so that the strength of the magnetic field applied to the coil 152 does not match the strength of the magnetic field applied by the exciting coil 31. .. That is, the coil 152 is affected by the sample MS1 to be measured. Therefore, there is a problem that the magnetization value measured by the magnetization measuring unit 153 deviates from the magnetization value corresponding to the strength of the magnetic field measured by the magnetic field measuring unit 154.

比較例の磁化測定装置111では、コイル151とコイル152とが、方向DR1において互いに間隔を空けて配置されているため、コイル152により測定される磁界の強度が、被測定試料MS1に実際に印加されている磁界MF1の強度と一致しなくなる。このような場合であって、且つ、被測定試料MS1の磁化が、磁化を測定するためのコイル151の誘導起電力の絶対値と磁界の強度を測定するためのコイル152の誘導起電力の絶対値との差分である差分値に基づいて測定される場合には、測定された被測定試料MS1の磁化が、磁界測定部154により測定された磁界の強度に対応した磁化の値から更にずれやすくなる。 In the magnetization measuring device 111 of the comparative example, since the coil 151 and the coil 152 are arranged at intervals in the direction DR1, the strength of the magnetic field measured by the coil 152 is actually applied to the sample MS1 to be measured. It does not match the strength of the magnetic field MF1. In such a case, the magnetization of the sample MS1 to be measured is the absolute value of the induced electromotive force of the coil 151 for measuring the magnetization and the absolute value of the induced electromotive force of the coil 152 for measuring the strength of the magnetic field. When measured based on the difference value, which is the difference from the value, the magnetization of the measured sample MS1 is more likely to deviate from the magnetization value corresponding to the strength of the magnetic field measured by the magnetic field measuring unit 154. Become.

一方、前述したように、本実施の形態の磁化測定装置11では、測定部15は、コイル51、52、53及び54の4つのコイルを有し、コイル51、52、53及び54は、軸AX1の周りに、軸AX1を中心として同心円状に配置されている。 On the other hand, as described above, in the magnetization measuring device 11 of the present embodiment, the measuring unit 15 has four coils of coils 51, 52, 53 and 54, and the coils 51, 52, 53 and 54 are shafts. Around AX1, they are arranged concentrically around the axis AX1.

コイル51は、軸AX1の周りに、保持部12に保持されている被測定試料MS1を囲むように巻回され、且つ、鎖交する磁束の変化により誘導起電力を発生する。コイル52は、軸AX1の周りに、コイル51を囲むように巻回され、且つ、鎖交する磁束の変化により誘導起電力を発生する。コイル53は、軸AX1の周りに、コイル52を囲むように巻回され、且つ、鎖交する磁束の変化により誘導起電力を発生する。コイル54は、軸AX1の周りに、コイル53を囲むように巻回され、且つ、鎖交する磁束の変化により誘導起電力を発生する。 The coil 51 is wound around the shaft AX1 so as to surround the sample MS1 to be measured held by the holding portion 12, and an induced electromotive force is generated by a change in the interlinking magnetic flux. The coil 52 is wound around the shaft AX1 so as to surround the coil 51, and an induced electromotive force is generated by a change in the interlinking magnetic flux. The coil 53 is wound around the shaft AX1 so as to surround the coil 52, and an induced electromotive force is generated by a change in the interlinking magnetic flux. The coil 54 is wound around the shaft AX1 so as to surround the coil 53, and an induced electromotive force is generated by a change in the interlinking magnetic flux.

磁化測定部55は、コイル51の誘導起電力の絶対値とコイル52の誘導起電力の絶対値との差分である差分値に基づいて、保持部12に保持されている被測定試料MS1の磁化を測定する。磁界測定部56は、コイル53の誘導起電力の絶対値とコイル54の誘導起電力の絶対値との差分である差分値に基づいて、磁界MF1の強度を測定する。 The magnetization measuring unit 55 magnetizes the sample MS1 to be measured held in the holding unit 12 based on the difference value which is the difference between the absolute value of the induced electromotive force of the coil 51 and the absolute value of the induced electromotive force of the coil 52. To measure. The magnetic field measuring unit 56 measures the strength of the magnetic field MF1 based on the difference value which is the difference between the absolute value of the induced electromotive force of the coil 53 and the absolute value of the induced electromotive force of the coil 54.

コイル51及び52については、コイル51の巻き数をNとし、コイル52の巻き数をNとし、コイル51の軸AX1に垂直な断面の面積をSとし、コイル52の軸AX1に垂直な断面の面積をSとしたとき、コイル51及び52の各々の巻き数と断面の面積との積が、N×S=N×Sを満たすようにする。 For coils 51 and 52, the number of turns of the coil 51 and N A, the number of turns of the coil 52 and N B, and S A the area of the cross section perpendicular to the axis AX1 of the coil 51, perpendicular to the axis AX1 of the coil 52 when the area of a cross section was S B, the product of the area of the turns and the cross section of each coil 51 and 52, to satisfy the N a × S a = N B × S B.

なお、コイル51の軸AX1に垂直な断面の面積とは、コイル51の導線(巻線)の中心が作る円の内側の面積、或いは、コイル51の中心から導線(巻線)の内端(導線のコイル中心側の側面)までの距離と、導線(巻線)の半径と、の和、を半径とする円の面積、を意味する。コイル52、53及び54についても、同様である。 The area of the cross section perpendicular to the axis AX1 of the coil 51 is the area inside the circle formed by the center of the wire (winding) of the coil 51, or the inner end of the wire (winding) from the center of the coil 51 (the winding). It means the area of a circle whose radius is the sum of the distance to the side surface of the lead wire on the coil center side) and the radius of the lead wire (winding). The same applies to the coils 52, 53 and 54.

また、N×SがN×Sと完全に等しくなくてもよく、N×SがN×Sと略等しければよい。従って、(N×S−N×S)/(N×S)の絶対値が0.02以下(2%以下)であればよい。これにより、N×SをN×Sと略等しくすることができる。或いは、(N×S−N×S)/(N×S)の絶対値が0.02以下であってもよく、2×(N×S−N×S)/(N×S+N×S)の絶対値が0.02以下であってもよい。なお、絶対値が0.02以下であるとは、絶対値が0であるか、又は、絶対値が0よりも大きく、且つ、0.02以下であることを意味する。 Further, N B × S B is may be no completely equal to the N A × S A, is N B × S B may be substantially equal to the N A × S A. Thus, it may be a (N A × S A -N B × S B) / absolute value (N A × S A) is 0.02 or less (2% or less). Thus, it is possible to substantially equalize the N B × S B and N A × S A. Alternatively, (N A × S A -N B × S B) / (N B × S B) of the absolute value may be 0.02 or less, 2 × (N A × S A -N B × S the absolute value of B) / (N a × S a + N B × S B) may be 0.02 or less. The absolute value of 0.02 or less means that the absolute value is 0, or the absolute value is larger than 0 and 0.02 or less.

また、被測定試料MS1の磁気モーメントをMとし、磁界MF1の強度をHとし、コイル51が検出する磁束密度をBとし、コイル52が検出する磁束密度をBとしたとき、磁束密度B及びBは、被測定試料MS1の磁気モーメントMと磁界Hとの和に比例するので、以下の数式(数1)で表される。 Moreover, the magnetic moment of the sample to be measured MS1 is M, the strength of the magnetic field MF1 and H, the magnetic flux density coil 51 is detected as B A, when the magnetic flux density coil 52 detects a B B, the magnetic flux density B a and B B is proportional to the sum of the magnetic moment M and the magnetic field H of the measured sample MS1, expressed by the following equation (equation 1).

Figure 0006934740
Figure 0006934740

ここで、コイル51に鎖交する磁束をφとし、コイル52に鎖交する磁束をφとし、被測定試料MS1の軸AX1に垂直な断面の面積をSとしたとき、磁束φは、以下の数式(数2)で表され、磁束φは、以下の数式(数3)で表される。 Here, when the magnetic flux interlinking with the coil 51 is φ A , the magnetic flux interlinking with the coil 52 is φ B, and the area of the cross section perpendicular to the axis AX1 of the sample MS1 to be measured is S S , the magnetic flux φ A. Is expressed by the following formula (Equation 2), and the magnetic flux φ B is expressed by the following formula (Equation 3).

Figure 0006934740
Figure 0006934740

Figure 0006934740
Figure 0006934740

また、コイル51の誘導起電力である誘起電圧をeJAとし、コイル52の誘導起電力である誘起電圧をeJBとし、コイル51とコイル52とを反直列に接続したときのコイル51及び52の誘導起電力である誘起電圧をeとしたとき、誘起電圧eは、以下の数式(数4)で表される。 The coil 51 and 52 when the induced voltage is induced electromotive force of the coils 51 and e EN, the induced voltage is induced electromotive force of the coil 52 and e JB, and connecting the coil 51 and the coil 52 in a counter-series When the induced voltage, which is the induced electromotive force of, is e J , the induced voltage e J is expressed by the following equation (Equation 4).

Figure 0006934740
Figure 0006934740

数式(数4)に示すように、N×SがN×Sと略等しい場合には、誘起電圧eは、磁界Hには影響を受けず、被測定試料MS1の磁気モーメントMにのみ影響を受ける。従って、誘起電圧eを時間積分することにより、磁気モーメントMを得ることができる。磁気モーメントMは、以下の数式(数5)で表される。 As shown in equation (Equation 4), when the N B × S B substantially equal to N A × S A is the induced voltage e J is unaffected by the magnetic field H, the magnetic moment of the sample to be measured MS1 Only affected by M. Therefore, by integrating the induced voltage e J time, it is possible to obtain a magnetic moment M. The magnetic moment M is expressed by the following mathematical formula (Equation 5).

Figure 0006934740
Figure 0006934740

また、被測定試料MS1の体積をVとしたとき、磁気モーメントMを被測定試料MS1の体積Vで割ることにより、磁化Jを求めることができる。磁化Jは、以下の数式(数6)で表される。 Further, when the volume of the sample MS1 to be measured is V, the magnetization J can be obtained by dividing the magnetic moment M by the volume V of the sample MS1 to be measured. Magnetization J is expressed by the following mathematical formula (Equation 6).

Figure 0006934740
Figure 0006934740

一方、コイル53及び54については、コイル53の巻き数をNとし、コイル54の巻き数をNとしたとき、コイル53及び54の各々の巻き数が、N=Nを満たすようにする。 On the other hand, as the coils 53 and 54, the number of turns of the coil 53 and N C, when the number of turns of the coil 54 was set to N D, the number of turns of each coil 53 and 54, meet N C = N D To.

また、NがNと完全に等しくなくてもよく、NがNと略等しければよい。従って、(N−N)/Nの絶対値が0.02以下(2%以下)であればよい。これにより、NをNと略等しくすることができる。或いは、(N−N)/Nの絶対値が0.02以下であってもよく、2×(N−N)/(N+N)の絶対値が0.02以下であってもよい。 Also, may be without N D is completely equal to the N C, N D may be substantially equal to the N C. Therefore, as long as the absolute value of (N C -N D) / N C is 0.02 or less (2% or less). Thus, it is possible to substantially equalize the N D and N C. Alternatively, (N C -N D) / N absolute value of D is may be 0.02 or less, the absolute value of the 2 × (N C -N D) / (N C + N D) is 0.02 or less It may be.

また、コイル53が検出する磁束密度をBとし、コイル54が検出する磁束密度をBとしたとき、磁束密度B及びBは、被測定試料MS1の磁気モーメントMと磁界Hとの和に比例するので、以下の数式(数7)で表される。 Further, the magnetic flux density coil 53 is detected as B C, when the magnetic flux density coil 54 is detected and a B D, the magnetic flux density B C and B D are the magnetic moment M and the magnetic field H of the measured sample MS1 Since it is proportional to the sum, it is expressed by the following formula (Equation 7).

Figure 0006934740
Figure 0006934740

ここで、コイル53の軸AX1に垂直な断面の面積をSとし、コイル54の軸AX1に垂直な断面の面積をSとし、コイル53に鎖交する磁束をφとし、コイル54に鎖交する磁束をφとしたとき、磁束φは、以下の数式(数8)で表され、磁束φは、以下の数式(数9)で表される。 Here, the S C the area of the cross section perpendicular to the axis AX1 of the coil 53, and S D of the area of the cross section perpendicular to the axis AX1 of the coil 54, the magnetic flux interlinking the coil 53 and phi C, the coil 54 When the interlinking magnetic flux is φ D , the magnetic flux φ C is expressed by the following formula (Equation 8), and the magnetic flux φ D is expressed by the following formula (Equation 9).

Figure 0006934740
Figure 0006934740

Figure 0006934740
Figure 0006934740

また、コイル53の誘導起電力である誘起電圧をeHCとし、コイル54の誘導起電力である誘起電圧をeHDとし、コイル53とコイル54とを反直列に接続したときのコイル53及び54の誘導起電力である誘起電圧をeとしたとき、誘起電圧eは、以下の数式(数10)で表される。 Further, the induced voltage is induced electromotive force of the coils 53 and e HC, the induced voltage is induced electromotive force of the coils 54 and e HD, coils 53 and 54 when connecting the coil 53 and the coil 54 in a counter-series When the induced voltage, which is the induced electromotive force of the above, is e H , the induced voltage e H is expressed by the following equation (Equation 10).

Figure 0006934740
Figure 0006934740

数式(数10)に示すように、NがNと略等しい場合には、誘起電圧eは、被測定試料MS1の磁気モーメントMには影響を受けず、磁界Hにのみ影響を受ける。従って、誘起電圧eを時間積分することにより、磁界Hを得ることができる。磁界Hは、以下の数式(数11)で表される。 As shown in equation (Equation 10), if N D is substantially equal to N C is the induced voltage e H is unaffected by the magnetic moment M of the measured sample MS1, only affected to a magnetic field H .. Therefore, the magnetic field H can be obtained by time-integrating the induced voltage e H. The magnetic field H is represented by the following mathematical formula (Equation 11).

Figure 0006934740
Figure 0006934740

図2に示すように、本実施の形態の磁化測定装置11では、コイル51の部分PR1、コイル52の部分PR2、コイル53の部分PR3、及び、コイル54の部分PR4は、方向DR1において、互いに同じ位置PS1に配置されている。これにより、コイル51、52、53及び54を、互いに同一の平面PL1上に配置することができる。 As shown in FIG. 2, in the magnetization measuring device 11 of the present embodiment, the partial PR1 of the coil 51, the partial PR2 of the coil 52, the partial PR3 of the coil 53, and the partial PR4 of the coil 54 are mutually arranged in the direction DR1. They are located at the same position PS1. As a result, the coils 51, 52, 53 and 54 can be arranged on the same plane PL1.

本実施の形態の磁化測定装置11では、方向DR1におけるコイル51の厚さTH1、方向DR1におけるコイル52の厚さTH2、方向DR1におけるコイル53の厚さTH3、及び、方向DR1におけるコイル54の厚さTH4は、いずれも保持部12(図1参照)に保持されている被測定試料MS1の方向DR1における厚さTHSよりも薄い。 In the magnetization measuring device 11 of the present embodiment, the thickness TH1 of the coil 51 in the direction DR1, the thickness TH2 of the coil 52 in the direction DR1, the thickness TH3 of the coil 53 in the direction DR1, and the thickness of the coil 54 in the direction DR1. TH4 is thinner than the thickness THS in the direction DR1 of the sample MS1 to be measured, which is held by the holding portion 12 (see FIG. 1).

ここで、厚さTHSが7mmである場合を考える。これは、日本電子材料工業会標準規格EMAS−7007のパルス磁界を用いた永久磁石測定方法において、印加される磁界に沿った方向における試験片の長さ、即ち印加される磁界MF1に沿った方向における被測定試料MS1の長さが7mmであることによる。 Here, consider the case where the thickness THS is 7 mm. This is the length of the test piece in the direction along the applied magnetic field, that is, the direction along the applied magnetic field MF1 in the permanent magnet measuring method using the pulsed magnetic field of the Japan Electronic Materials Industry Association standard EMAS-7007. This is because the length of the sample MS1 to be measured is 7 mm.

このような場合には、コイル51の厚さTH1、コイル52の厚さTH2、コイル53の厚さTH3、及び、コイル54の厚さTH4は、いずれも7mm未満である。これにより、コイル51、52、53及び54の各々の厚さを、日本電子材料工業会標準規格EMAS−7007のパルス磁界を用いた永久磁石測定方法により7mmと規定された試験片、即ち被測定試料MS1の方向DR1における厚さTHSよりも薄くすることができる。 In such a case, the thickness TH1 of the coil 51, the thickness TH2 of the coil 52, the thickness TH3 of the coil 53, and the thickness TH4 of the coil 54 are all less than 7 mm. As a result, the thickness of each of the coils 51, 52, 53 and 54 is defined as 7 mm by the permanent magnet measurement method using the pulse magnetic field of the Japan Electronic Materials Industry Association standard EMAS-7007, that is, the test piece to be measured. The thickness of the sample MS1 in the direction DR1 can be made thinner than the thickness THS.

このように、本実施の形態の磁化測定装置11では、方向DR1における厚さが薄いコイル51、52、53及び54を用いる。これにより、コイル51及び52に、方向DR1での被測定試料MS1の中心位置における磁束を鎖交させることができ、コイル51及び52の各々の誘起電圧に基づいて、被測定試料MS1の磁化を高精度で測定することができる。また、コイル53及び54に、方向DR1での被測定試料MS1の中心位置における磁界を印加することができ、コイル53及び54の各々の誘起電圧に基づいて、被測定試料MS1に印加されている磁界MF1の強度を高精度で測定することができる。 As described above, in the magnetization measuring device 11 of the present embodiment, the coils 51, 52, 53 and 54 having a thin thickness in the direction DR1 are used. As a result, the magnetic flux at the center position of the sample MS1 to be measured in the direction DR1 can be interlinked with the coils 51 and 52, and the magnetization of the sample MS1 to be measured is generated based on the induced voltage of each of the coils 51 and 52. It can be measured with high accuracy. Further, a magnetic field at the center position of the sample MS1 to be measured in the direction DR1 can be applied to the coils 53 and 54, and the magnetic field is applied to the sample MS1 to be measured based on the induced voltage of each of the coils 53 and 54. The strength of the magnetic field MF1 can be measured with high accuracy.

磁界を掃引しながら印加する際に被測定試料MS1内に流れる渦電流は、被測定試料MS1の方向DR1における中央部よりも、被測定試料MS1の方向DR1における両端部、即ち被測定試料MS1の上端部又は下端部に流れる。前述した比較例の磁化測定装置111では、方向DR1におけるコイル151の厚さTH101は、方向DR1における被測定試料MS1の厚さTHSよりも厚い。そのため、コイル151の誘導起電力に対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響が無視できないほど大きくなる。 The eddy current flowing in the sample MS1 to be measured when the magnetic field is applied while sweeping is not the central portion in the direction DR1 of the sample MS1 to be measured, but both ends in the direction DR1 of the sample MS1 to be measured, that is, the sample MS1 to be measured. It flows to the upper end or the lower end. In the magnetization measuring device 111 of the comparative example described above, the thickness TH101 of the coil 151 in the direction DR1 is thicker than the thickness THS of the sample MS1 to be measured in the direction DR1. Therefore, the influence of the eddy current flowing in the upper end portion or the lower end portion of the sample MS1 to be measured on the induced electromotive force of the coil 151 becomes so large that it cannot be ignored.

一方、本実施の形態の磁化測定装置11では、コイル51の厚さTH1、コイル52の厚さTH2、コイル53の厚さTH3、及び、コイル54の厚さTH4は、いずれも方向DR1における被測定試料MS1の厚さTHSよりも薄い。そのため、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響が無視できるほど小さくなる。従って、磁化測定部55により測定される磁化の値を、被測定試料MS1の真の磁化の値に近づけることができる。 On the other hand, in the magnetization measuring device 11 of the present embodiment, the thickness TH1 of the coil 51, the thickness TH2 of the coil 52, the thickness TH3 of the coil 53, and the thickness TH4 of the coil 54 are all covered in the direction DR1. The thickness of the measurement sample MS1 is thinner than the THS. Therefore, the induced voltage e J which is the difference between the absolute value of the induced electromotive force of each coil 51 and 52, the smaller the influence of the eddy currents flowing in the upper portion or a lower end portion of the sample to be measured MS1 is negligible. Therefore, the value of magnetization measured by the magnetization measuring unit 55 can be brought close to the true value of magnetization of the sample MS1 to be measured.

また、本実施の形態の磁化測定装置11では、厚さTH1、TH2、TH3及びTH4は、いずれも厚さTHSよりも薄い。そのため、コイルの厚さに対して被測定試料MS1の厚さが相対的に厚くなって被測定試料MS1の周辺での反磁界の影響が小さくなる。従って、磁化測定部55により測定される磁化の値を、被測定試料MS1の真の磁化の値に近づけることができる。 Further, in the magnetization measuring device 11 of the present embodiment, the thicknesses TH1, TH2, TH3 and TH4 are all thinner than the thickness THS. Therefore, the thickness of the sample MS1 to be measured becomes relatively thick with respect to the thickness of the coil, and the influence of the demagnetic field around the sample MS1 to be measured becomes small. Therefore, the value of magnetization measured by the magnetization measuring unit 55 can be brought close to the true value of magnetization of the sample MS1 to be measured.

また、本実施の形態の磁化測定装置11では、コイル51、52、53及び54が、互いに同一の平面PL1上に配置されている。これにより、コイル51、52、53及び54の各々に印加される磁界の強度が互いに等しくなる。そのため、磁化測定部55により測定される磁化の値を、磁界測定部56により測定された磁界の強度に対応した磁化の値に近づけることができる。 Further, in the magnetization measuring device 11 of the present embodiment, the coils 51, 52, 53 and 54 are arranged on the same plane PL1. As a result, the intensities of the magnetic fields applied to each of the coils 51, 52, 53 and 54 become equal to each other. Therefore, the value of magnetization measured by the magnetization measuring unit 55 can be brought close to the value of magnetization corresponding to the strength of the magnetic field measured by the magnetic field measuring unit 56.

また、本実施の形態の磁化測定装置11では、NをNと略等しくすることにより、コイル53及び54の誘起電圧eは、被測定試料MS1の磁気モーメントMには影響を受けず、磁界Hにのみ影響を受ける。そのため、コイル53及び54により測定される磁界の強度が、被測定試料MS1に実際に印加されている磁界MF1の強度と等しくなる。従って、磁化測定部55により測定される磁化の値を、磁界測定部56により測定された磁界の強度に対応した磁化の値に近づけることができる。 Further, the magnetization measuring apparatus 11 of the present embodiment, by substantially equal to N D and N C, the induced voltage e H coils 53 and 54 are not affected by the magnetic moment M of the measured sample MS1 , Affected only by the magnetic field H. Therefore, the strength of the magnetic field measured by the coils 53 and 54 becomes equal to the strength of the magnetic field MF1 actually applied to the sample MS1 to be measured. Therefore, the value of magnetization measured by the magnetization measuring unit 55 can be brought close to the value of magnetization corresponding to the strength of the magnetic field measured by the magnetic field measuring unit 56.

また、本実施の形態の磁化測定装置11では、被測定試料MS1の磁化を、磁界を測定する回路である磁界測定部56と別に設けられた回路である磁化測定部55により測定する。そのため、被測定試料MS1の磁化は、磁化を測定するためのコイルの誘導起電力の絶対値と磁界の強度を測定するためのコイルの誘導起電力の絶対値との差分である差分値に基づいて測定されるものではない。従って、測定される磁化の値の精度を向上させることができる。 Further, in the magnetization measuring device 11 of the present embodiment, the magnetization of the sample MS1 to be measured is measured by the magnetization measuring unit 55, which is a circuit provided separately from the magnetic field measuring unit 56, which is a circuit for measuring the magnetic field. Therefore, the magnetization of the sample MS1 to be measured is based on the difference value which is the difference between the absolute value of the induced electromotive force of the coil for measuring the magnetization and the absolute value of the induced electromotive force of the coil for measuring the strength of the magnetic field. It is not measured. Therefore, the accuracy of the measured magnetization value can be improved.

即ち、本実施の形態の磁化測定装置11によれば、被測定試料MS1の磁化を、磁化測定部55により高精度で測定することができ、被測定試料MS1に印加された磁界の強度を、磁界測定部56により高精度で測定することができる。 That is, according to the magnetization measuring device 11 of the present embodiment, the magnetization of the sample MS1 to be measured can be measured with high accuracy by the magnetization measuring unit 55, and the strength of the magnetic field applied to the sample MS1 to be measured can be measured. The magnetic field measuring unit 56 can measure with high accuracy.

図1に示す例では、磁化測定部55は、コイル51及び52とパーソナルコンピュータ61との間に設けられ、磁界測定部56は、コイル53及び54とパーソナルコンピュータ61との間に設けられている。しかし、磁化測定部55及び磁界測定部56は、制御部16が有するパーソナルコンピュータ61に含まれていてもよい。 In the example shown in FIG. 1, the magnetization measuring unit 55 is provided between the coils 51 and 52 and the personal computer 61, and the magnetic field measuring unit 56 is provided between the coils 53 and 54 and the personal computer 61. .. However, the magnetization measuring unit 55 and the magnetic field measuring unit 56 may be included in the personal computer 61 included in the control unit 16.

また、コイル51とコイル52とは、掃引部14により磁界MF1が掃引された場合に、コイル51の誘導起電力の絶対値と、コイル52の誘導起電力の絶対値との差分である差分値が磁化測定部55に出力されるように、反直列に接続されていてもよい。或いは、コイル51の誘導起電力及びコイル52の誘導起電力の各々が別々に磁化測定部55に出力され、磁化測定部55が、コイル51の誘導起電力の絶対値と、コイル52の誘導起電力の絶対値との差分(上記数式(数4)に示す誘起電圧eの絶対値)を、磁化測定部55内で算出してもよい。 Further, the coil 51 and the coil 52 have a difference value which is a difference between the absolute value of the induced electromotive force of the coil 51 and the absolute value of the induced electromotive force of the coil 52 when the magnetic field MF1 is swept by the sweep unit 14. May be connected in anti-series so that is output to the magnetization measuring unit 55. Alternatively, each of the induced electromotive force of the coil 51 and the induced electromotive force of the coil 52 is separately output to the magnetization measuring unit 55, and the magnetization measuring unit 55 determines the absolute value of the induced electromotive force of the coil 51 and the induced electromotive force of the coil 52. the difference between the absolute value of the power (the absolute value of the induced voltage e J shown in the equation (equation 4)), may be calculated in the magnetization measuring unit 55.

また、コイル53とコイル54とは、掃引部14により磁界MF1が掃引された場合に、コイル53の誘導起電力の絶対値と、コイル54の誘導起電力の絶対値との差分である差分値が磁界測定部56に出力されるように、反直列に接続されていてもよい。或いは、コイル53の誘導起電力及びコイル54の誘導起電力の各々が別々に磁界測定部56に出力され、磁界測定部56が、コイル53の誘導起電力の絶対値と、コイル54の誘導起電力の絶対値との差分(上記数式(数10)に示す誘起電圧eの絶対値)を、磁界測定部56内で算出してもよい。 Further, the coil 53 and the coil 54 have a difference value which is a difference between the absolute value of the induced electromotive force of the coil 53 and the absolute value of the induced electromotive force of the coil 54 when the magnetic field MF1 is swept by the sweep unit 14. May be connected in anti-series so that is output to the magnetic field measuring unit 56. Alternatively, each of the induced electromotive force of the coil 53 and the induced electromotive force of the coil 54 is separately output to the magnetic field measuring unit 56, and the magnetic field measuring unit 56 determines the absolute value of the induced electromotive force of the coil 53 and the induced electromotive force of the coil 54. the difference between the absolute value of the power (the absolute value of the induced voltage e H shown in the equation (equation 10)), may be calculated in the magnetic field measuring unit 56.

好適には、パーソナルコンピュータ61は、磁化測定部55が検出した誘起電圧eに基づいて、被測定試料MS1の磁化Jを算出し、磁界測定部56が検出した誘起電圧eに基づいて、被測定試料MS1に印加されている磁界MF1の強度(磁界H)を算出し、算出された磁化Jと磁界Hとからなる組データを、例えばメモリ等の記憶部に記憶する。そして、パーソナルコンピュータ61は、記憶部に記憶された複数の組データに基づいて、縦軸に磁化Jが表され、横軸に磁界Hが表されたグラフに磁化ヒステリシス曲線を表示する。 Preferably, the personal computer 61 calculates the magnetization J of the sample MS1 to be measured based on the induced voltage e J detected by the magnetization measuring unit 55, and based on the induced voltage e H detected by the magnetic field measuring unit 56, the personal computer 61 calculates the magnetization J of the sample MS1 to be measured. The strength (magnetic field H) of the magnetic field MF1 applied to the sample MS1 to be measured is calculated, and the set data including the calculated magnetization J and the magnetic field H is stored in a storage unit such as a memory. Then, the personal computer 61 displays the magnetization hysteresis curve in a graph in which the magnetization J is represented on the vertical axis and the magnetic field H is represented on the horizontal axis based on a plurality of sets of data stored in the storage unit.

好適には、コイル51の部分PR1、コイル52の部分PR2、コイル53の部分PR3、及び、コイル54の部分PR4の各々は、方向DR1において、保持部12に保持されている被測定試料MS1の方向DR1における中心位置CP1と同じ位置に配置されている。 Preferably, each of the partial PR1 of the coil 51, the partial PR2 of the coil 52, the partial PR3 of the coil 53, and the partial PR4 of the coil 54 of the sample MS1 to be measured held by the holding portion 12 in the direction DR1. It is arranged at the same position as the center position CP1 in the direction DR1.

これにより、コイル51、52、53及び54の各々が、方向DR1において、被測定試料MS1の上端部及び下端部のいずれからも遠くなるので、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響を更に小さくすることができる。 As a result, each of the coils 51, 52, 53 and 54 is far from both the upper end and the lower end of the sample MS1 to be measured in the direction DR1, so that the absolute value of the induced electromotive force of each of the coils 51 and 52 is the absolute value. of the induced voltage e J is a difference, the influence of the eddy currents flowing in the upper portion or a lower end portion of the sample to be measured MS1 can be further reduced.

コイル51の方向DR1における中心位置を位置CE1とし、コイル52の方向DR1における中心位置を位置CE2とし、コイル53の方向DR1における中心位置を位置CE3とし、コイル54の方向DR1における中心位置を位置CE4とする。このような場合、更に好適には、位置CE1、位置CE2、位置CE3及び位置CE4の各々は、方向DR1において、被測定試料MS1の方向DR1における中心位置CP1と同じ位置に配置されている。 The center position in the direction DR1 of the coil 51 is the position CE1, the center position in the direction DR1 of the coil 52 is the position CE2, the center position in the direction DR1 of the coil 53 is the position CE3, and the center position in the direction DR1 of the coil 54 is the position CE4. And. In such a case, more preferably, each of the position CE1, the position CE2, the position CE3 and the position CE4 is arranged at the same position in the direction DR1 as the center position CP1 in the direction DR1 of the sample MS1 to be measured.

これにより、コイル51、52、53及び54の各々が、方向DR1において、被測定試料MS1の上端部及び下端部のいずれからもより遠くなるので、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響を更により小さくすることができる。 As a result, each of the coils 51, 52, 53 and 54 is farther from both the upper end and the lower end of the sample MS1 to be measured in the direction DR1, so that the absolute electromotive force of each of the coils 51 and 52 is absolute. the induced voltage e J which is a difference value, can be reduced even more the influence of the eddy currents flowing in the upper portion or a lower end portion of the measured sample MS1.

なお、方向DR1において、位置CE1が中心位置CP1と同じ位置に配置されなくてもよく、方向DR1における被測定試料MS1の厚さTHSに対する、位置CE1と中心位置CP1との間の方向DR1における距離の比が、0.2以下であればよい。また、方向DR1において、位置CE2が中心位置CP1と同じ位置に配置されなくてもよく、厚さTHSに対する、位置CE2と中心位置CP1との間の方向DR1における距離の比が、0.2以下であればよい。また、方向DR1において、位置CE3が中心位置CP1と同じ位置に配置されなくてもよく、厚さTHSに対する、位置CE3と中心位置CP1との間の方向DR1における距離の比が、0.2以下であればよい。また、方向DR1において、位置CE4が中心位置CP1と同じ位置に配置されなくてもよく、厚さTHSに対する、位置CE4と中心位置CP1との間の方向DR1における距離の比が、0.2以下であればよい。 In the direction DR1, the position CE1 does not have to be arranged at the same position as the center position CP1, and the distance in the direction DR1 between the position CE1 and the center position CP1 with respect to the thickness THS of the sample MS1 to be measured in the direction DR1. The ratio of may be 0.2 or less. Further, in the direction DR1, the position CE2 does not have to be arranged at the same position as the center position CP1, and the ratio of the distance in the direction DR1 between the position CE2 and the center position CP1 to the thickness THS is 0.2 or less. It should be. Further, in the direction DR1, the position CE3 does not have to be arranged at the same position as the center position CP1, and the ratio of the distance in the direction DR1 between the position CE3 and the center position CP1 to the thickness THS is 0.2 or less. It should be. Further, in the direction DR1, the position CE4 does not have to be arranged at the same position as the center position CP1, and the ratio of the distance in the direction DR1 between the position CE4 and the center position CP1 to the thickness THS is 0.2 or less. It should be.

また、方向DR1において、位置CE2が位置CE1と同じ位置に配置されなくてもよく、厚さTH1、厚さTH2、又は、厚さTH1及びTH2の平均値に対する、位置CE1と位置CE2との間の方向DR1における距離の比が、0.2以下であればよい。また、方向DR1において、位置CE3が位置CE1と同じ位置に配置されなくてもよく、厚さTH1、厚さTH3、又は、厚さTH1及びTH3の平均値に対する、位置CE1と位置CE3との間の方向DR1における距離の比が、0.2以下であればよい。また、方向DR1において、位置CE4が位置CE1と同じ位置に配置されなくてもよく、厚さTH1、厚さTH4、又は、厚さTH1及びTH4の平均値に対する、位置CE1と位置CE4との間の方向DR1における距離の比が、0.2以下であればよい。また、位置CE2と位置CE3との間の関係、位置CE2と位置CE4との間の関係、及び、位置CE3と位置CE4との間の関係についても、前述した、位置CE1と位置CE2との間の関係、位置CE1と位置CE3との間の関係、及び、位置CE1と位置CE4との間の関係と同様である。 Further, in the direction DR1, the position CE2 does not have to be arranged at the same position as the position CE1, and is between the position CE1 and the position CE2 with respect to the average value of the thickness TH1, the thickness TH2, or the thickness TH1 and TH2. The ratio of the distances in the direction DR1 of is 0.2 or less. Further, in the direction DR1, the position CE3 does not have to be arranged at the same position as the position CE1, and is between the position CE1 and the position CE3 with respect to the average value of the thickness TH1, the thickness TH3, or the thickness TH1 and TH3. The ratio of the distances in the direction DR1 of is 0.2 or less. Further, in the direction DR1, the position CE4 does not have to be arranged at the same position as the position CE1, and is between the position CE1 and the position CE4 with respect to the average value of the thickness TH1, the thickness TH4, or the thickness TH1 and TH4. The ratio of the distances in the direction DR1 of is 0.2 or less. Further, regarding the relationship between the position CE2 and the position CE3, the relationship between the position CE2 and the position CE4, and the relationship between the position CE3 and the position CE4, the relationship between the position CE1 and the position CE2 is also described above. , The relationship between position CE1 and position CE3, and the relationship between position CE1 and position CE4.

好適には、励磁コイル31は、軸AX1の周りに、コイル54を囲むように巻回され、コイル51、52、53及び54は、方向DR1における励磁コイル31の中央部に囲まれている。 Preferably, the exciting coil 31 is wound around the shaft AX1 so as to surround the coil 54, and the coils 51, 52, 53 and 54 are surrounded by the central portion of the exciting coil 31 in the direction DR1.

このような場合、被測定試料MS1、並びに、コイル51、52、53及び54に印加される磁界MF1は、方向DR1に平行になるので、方向DR1に交差する成分の磁界の影響を排除することができ、平行磁界中における被測定試料MS1の磁化を測定することができる。また、方向DR1における励磁コイル31の中央部では、方向DR1における互いに異なる位置間での磁界の強度の均一性が高い(ばらつきが小さい)ので、方向DR1における被測定試料MS1の位置が被測定試料MS1ごとにずれた場合でも、被測定試料MS1の磁化を高精度で測定することができる。 In such a case, since the magnetic field MF1 applied to the sample MS1 to be measured and the coils 51, 52, 53 and 54 is parallel to the direction DR1, the influence of the magnetic field of the component intersecting the direction DR1 should be eliminated. The magnetization of the sample MS1 to be measured in a parallel magnetic field can be measured. Further, in the central portion of the excitation coil 31 in the direction DR1, the uniformity of the magnetic field strength between different positions in the direction DR1 is high (the variation is small), so that the position of the sample to be measured MS1 in the direction DR1 is the sample to be measured. The magnetization of the sample MS1 to be measured can be measured with high accuracy even when the MS1 is deviated from each other.

好適には、磁化測定装置11は、保持部12に保持されている被測定試料MS1の方向DR1における位置を調整する調整部17を備えている。調整部17は、コイル51の部分PR1、コイル52の部分PR2、コイル53の部分PR3、及び、コイル54の部分PR4の各々が、方向DR1において、保持部12に保持されている被測定試料MS1の方向DR1における中心位置CP1と同じ位置に配置されるように、位置を調整する。 Preferably, the magnetization measuring device 11 includes an adjusting unit 17 that adjusts the position of the sample MS1 to be measured held in the holding unit 12 in the direction DR1. The adjusting unit 17 is the sample MS1 to be measured in which each of the partial PR1 of the coil 51, the partial PR2 of the coil 52, the partial PR3 of the coil 53, and the partial PR4 of the coil 54 is held by the holding portion 12 in the direction DR1. The position is adjusted so that it is arranged at the same position as the center position CP1 in the direction DR1.

このような調整部17として、例えばモータ71と、モータ71と接続されたギア72と、ギア72とかみ合わされ、且つ、下側部材23に固定されたギア73と、を有する調整部17を用いることができる。これにより、例えば下側部材23を軸AX1に沿って方向DR1と同じ方向又は逆方向に移動させることができ、コイル51、52、53及び54の各々が、方向DR1において、被測定試料MS1の上端部及び下端部のいずれからも遠くなるように調整することができる。そのため、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響を更に小さくすることができる。 As such an adjusting unit 17, for example, an adjusting unit 17 having a motor 71, a gear 72 connected to the motor 71, and a gear 73 meshed with the gear 72 and fixed to the lower member 23 is used. be able to. Thereby, for example, the lower member 23 can be moved along the axis AX1 in the same direction as or in the opposite direction to the direction DR1, and each of the coils 51, 52, 53 and 54 in the direction DR1 of the sample MS1 to be measured. It can be adjusted so that it is far from both the upper end and the lower end. Therefore, the induced voltage e J which is the difference between the absolute value of the induced electromotive force of each coil 51 and 52, the influence of the eddy currents flowing in the upper portion or a lower end portion of the sample to be measured MS1 can be further reduced.

なお、前述したように、方向DR1において、位置CE1が中心位置CP1と同じ位置に配置されなくてもよく、方向DR1における被測定試料MS1の厚さTHSに対する、位置CE1と中心位置CP1との間の方向DR1における距離の比が、0.2以下になるように調整することができる。位置CE2、位置CE3及び位置CE4についても、位置CE1と同様である。 As described above, in the direction DR1, the position CE1 does not have to be arranged at the same position as the center position CP1, and between the position CE1 and the center position CP1 with respect to the thickness THS of the sample MS1 to be measured in the direction DR1. The ratio of the distances in the direction DR1 can be adjusted to be 0.2 or less. The position CE2, the position CE3, and the position CE4 are the same as those of the position CE1.

また、前述したように、方向DR1において、位置CE2が位置CE1と同じ位置に配置されなくてもよく、厚さTH1、厚さTH2、又は、厚さTH1及びTH2の平均値に対する、位置CE1と位置CE2との間の方向DR1における距離の比が、0.2以下になるように調整することができる。また、位置CE1と位置CE3との間の関係、位置CE1と位置CE4との間の関係、位置CE2と位置CE3との間の関係、位置CE2と位置CE4との間の関係、及び、位置CE3と位置CE4との間の関係についても、位置CE1と位置CE2との間の関係と同様である。 Further, as described above, in the direction DR1, the position CE2 does not have to be arranged at the same position as the position CE1, and the position CE1 and the average value of the thickness TH1, the thickness TH2, or the thickness TH1 and TH2 The ratio of the distance to the position CE2 in the direction DR1 can be adjusted to be 0.2 or less. Also, the relationship between position CE1 and position CE3, the relationship between position CE1 and position CE4, the relationship between position CE2 and position CE3, the relationship between position CE2 and position CE4, and position CE3. The relationship between the position CE4 and the position CE4 is the same as the relationship between the position CE1 and the position CE2.

好適には、励磁コイル31は、軸AX1の周りに、コイル54を囲むように巻回され、且つ、被測定試料MS1に、パルス磁界を印加する。また、掃引部14は、励磁コイル31にパルス電流を流すことにより、磁界MF1を掃引する。これにより、被測定試料が、例えばネオジウム鉄ホウ素(NdFeB)磁石等の飽和磁化の大きな永久磁石よりなる場合でも、被測定試料を磁気飽和させるために十分な強度の磁界を印加することができる。以下では、励磁コイル31がパルス磁界を印加する際に被測定試料MS1の磁化を測定する場合について説明する。図4は、励磁コイルがパルス磁界を印加する場合の励磁電源の構成の一例を示す回路図である。 Preferably, the exciting coil 31 is wound around the shaft AX1 so as to surround the coil 54, and a pulse magnetic field is applied to the sample MS1 to be measured. Further, the sweep unit 14 sweeps the magnetic field MF1 by passing a pulse current through the exciting coil 31. As a result, even when the sample to be measured is composed of a permanent magnet having a large saturation magnetization such as a neodymium iron boron (NdFeB) magnet, a magnetic field having sufficient strength to magnetically saturate the sample to be measured can be applied. Hereinafter, a case where the magnetization of the sample MS1 to be measured is measured when the exciting coil 31 applies a pulse magnetic field will be described. FIG. 4 is a circuit diagram showing an example of the configuration of an exciting power supply when the exciting coil applies a pulse magnetic field.

図4に示すように、掃引部14(図1参照)が有する励磁電源41は、充電部43と、コンデンサ44と、サイリスタ45及び46と、を有する。充電部43の一方の端子は、コンデンサ44の一方の端子に接続され、充電部43の他方の端子は、コンデンサ44の他方の端子に接続され、充電部43は、コンデンサ44を充電する。また、コンデンサ44の一方の端子は、互いに逆並列に接続されたサイリスタ45及び46を介して、励磁コイル31の一方の端子と接続され、コンデンサ44の他方の端子は、励磁コイル31の他方の端子と接続されている。サイリスタ45及び46は、例えばサイリスタ45がオン時にコンデンサ44の一方の端子から励磁コイル31の一方の端子に向かう方向に電流を流すように接続され、サイリスタ46がオン時に励磁コイル31の一方の端子からコンデンサ44の一方の端子に向かう方向に電流を流すように接続されている。 As shown in FIG. 4, the exciting power supply 41 included in the sweep unit 14 (see FIG. 1) includes a charging unit 43, a capacitor 44, and thyristors 45 and 46. One terminal of the charging unit 43 is connected to one terminal of the capacitor 44, the other terminal of the charging unit 43 is connected to the other terminal of the capacitor 44, and the charging unit 43 charges the capacitor 44. Further, one terminal of the capacitor 44 is connected to one terminal of the exciting coil 31 via thyristors 45 and 46 connected in antiparallel to each other, and the other terminal of the capacitor 44 is the other terminal of the exciting coil 31. It is connected to the terminal. The thyristors 45 and 46 are connected so that, for example, a current flows from one terminal of the capacitor 44 toward one terminal of the exciting coil 31 when the thyristor 45 is on, and one terminal of the exciting coil 31 when the thyristor 46 is on. It is connected so that a current flows from the capacitor 44 toward one terminal of the capacitor 44.

掃引部14としての制御盤42に含まれる演算処理部(図示は省略)が、充電部43のコンデンサ44への充電のオンオフ、並びに、サイリスタ45及び46のオンオフを制御する。これにより、励磁コイル31は、方向DR1に平行で且つ方向DR1と同じ向き(正方向)の磁界MF1の強度を、0から最大強度まで増加させた後、最大強度から0まで減少させることができる。即ち、励磁コイル31は、方向DR1に平行で且つ方向DR1と同じ向き(正方向)にパルス磁界を印加することができる。また、励磁コイル31は、方向DR1に平行で且つ方向DR1と逆向き(負方向)の磁界MF1の強度を、0から最大強度まで増加させた後、最大強度から0まで減少させることができる。即ち、励磁コイル31は、方向DR1に平行で且つ方向DR1と逆向き(負方向)にパルス磁界を印加することができる。その結果、励磁コイル31により被測定試料MS1に印加する磁界を、正方向及び負方向の両方向に掃引しながら、被測定試料MS1の磁化を測定することができる。 An arithmetic processing unit (not shown) included in the control panel 42 as the sweep unit 14 controls on / off of charging the capacitor 44 of the charging unit 43 and on / off of the thyristors 45 and 46. As a result, the exciting coil 31 can increase the strength of the magnetic field MF1 parallel to the direction DR1 and in the same direction (positive direction) as the direction DR1 from 0 to the maximum strength, and then decrease the strength from the maximum strength to 0. .. That is, the exciting coil 31 can apply a pulse magnetic field in the same direction (positive direction) as the direction DR1 and parallel to the direction DR1. Further, the exciting coil 31 can increase the strength of the magnetic field MF1 parallel to the direction DR1 and in the direction opposite to the direction DR1 (negative direction) from 0 to the maximum strength, and then decrease the strength from the maximum strength to 0. That is, the exciting coil 31 can apply a pulse magnetic field parallel to the direction DR1 and in the direction opposite to the direction DR1 (negative direction). As a result, the magnetization of the sample MS1 to be measured can be measured while sweeping the magnetic field applied to the sample MS1 to be measured by the exciting coil 31 in both the positive and negative directions.

パルス磁界のパルス幅を、例えば1〜200msec(ミリ秒)程度とすることができる。また、パルス磁界のパルス高さ(最大強度)を、例えば100〜10000kA/m程度とすることができる。 The pulse width of the pulse magnetic field can be, for example, about 1 to 200 msec (milliseconds). Further, the pulse height (maximum intensity) of the pulse magnetic field can be set to, for example, about 100 to 10,000 kA / m.

励磁コイル31がパルス磁界を印加する場合、励磁コイル31がパルス磁界の平均掃引速度よりも小さい掃引速度で磁界を印加する場合に比べて、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響が大きくなる。 When the exciting coil 31 applies a pulsed magnetic field, the absolute value of the induced electromotive force of each of the coils 51 and 52 is higher than when the exciting coil 31 applies a magnetic field at a sweeping speed smaller than the average sweeping speed of the pulsed magnetic field. the induced voltage e J which is a difference, the influence of the eddy currents flowing in the upper portion or a lower end portion of the measured sample MS1 increases.

一方、本実施の形態の磁化測定装置11では、コイル51の厚さTH1、コイル52の厚さTH2、コイル53の厚さTH3、及び、コイル54の厚さTH4は、いずれも方向DR1における被測定試料MS1の厚さTHSよりも薄い。そのため、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響を小さくすることができる。従って、励磁コイル31がパルス磁界を印加する場合、励磁コイル31がパルス磁界の平均掃引速度よりも小さい掃引速度で磁界を印加する場合に比べて、磁化測定部55により測定される磁化の値を被測定試料MS1の真の磁化の値に近づける効果が、大きくなる。 On the other hand, in the magnetization measuring device 11 of the present embodiment, the thickness TH1 of the coil 51, the thickness TH2 of the coil 52, the thickness TH3 of the coil 53, and the thickness TH4 of the coil 54 are all covered in the direction DR1. The thickness of the measurement sample MS1 is thinner than the THS. Therefore, it is possible to reduce the induced voltage e J which is the difference between the absolute value of the induced electromotive force of each coil 51 and 52, the influence of the eddy currents flowing in the upper portion or a lower end portion of the measured sample MS1. Therefore, when the exciting coil 31 applies a pulsed magnetic field, the magnetization value measured by the magnetization measuring unit 55 is set as compared with the case where the exciting coil 31 applies the magnetic field at a sweeping speed smaller than the average sweeping speed of the pulsed magnetic field. The effect of approaching the true magnetization value of the sample MS1 to be measured becomes large.

なお、励磁コイル31により被測定試料MS1に印加する磁界の強度を掃引部14が掃引する際に、コイル51、52、53及び54の各々の誘導起電力を測定できればよいので、励磁コイル31が印加する磁界は、パルス磁界でなくてもよい。励磁電源41として、直流電源を用い、掃引部14が、直流電源が励磁コイル31に流す電流を掃引することにより、励磁コイル31が発生する磁界が、例えば0から最大強度まで漸増した後、最大強度から0まで漸減するようにしてもよい。 It is only necessary that the induced electromotive force of each of the coils 51, 52, 53 and 54 can be measured when the sweep unit 14 sweeps the strength of the magnetic field applied to the sample MS1 to be measured by the exciting coil 31, so that the exciting coil 31 can be used. The applied magnetic field does not have to be a pulse magnetic field. A DC power supply is used as the exciting power supply 41, and the sweep unit 14 sweeps the current flowing through the exciting coil 31 so that the magnetic field generated by the exciting coil 31 gradually increases from 0 to the maximum strength, and then reaches the maximum. The strength may be gradually reduced to 0.

<磁化測定方法>
次に、図1及び図2を参照し、本実施の形態の磁化測定方法について説明する。本実施の形態の磁化測定方法は、磁性体よりなる被測定試料の磁化を測定する磁化測定方法である。
<Magnetization measurement method>
Next, the magnetization measuring method of the present embodiment will be described with reference to FIGS. 1 and 2. The magnetization measuring method of the present embodiment is a magnetization measuring method for measuring the magnetization of a sample to be measured made of a magnetic material.

本実施の形態の磁化測定方法では、方向DR1に延在する軸AX1上に、保持部12により、磁性体よりなる被測定試料MS1を保持する(ステップS11)。そして、保持部12に保持されている被測定試料MS1に、方向DR1の磁界MF1を、印加部13により印加する(ステップS12)。 In the magnetization measurement method of the present embodiment, the sample MS1 to be measured made of a magnetic material is held by the holding portion 12 on the axis AX1 extending in the direction DR1 (step S11). Then, the magnetic field MF1 in the direction DR1 is applied by the application unit 13 to the sample MS1 to be measured held in the holding unit 12 (step S12).

本実施の形態の磁化測定方法では、印加部13により印加される磁界MF1を掃引部14により掃引しながらステップS12を行う(ステップS13)。そして、ステップS13を行う際に、被測定試料MS1の磁化及び磁界の強度を、測定部15により測定する(ステップS14)。 In the magnetization measurement method of the present embodiment, step S12 is performed while sweeping the magnetic field MF1 applied by the application unit 13 by the sweep unit 14 (step S13). Then, when performing step S13, the magnetization and magnetic field strength of the sample to be measured MS1 are measured by the measuring unit 15 (step S14).

前述したように、測定部15は、コイル51、52、53及び54の4つのコイルを有し、コイル51、52、53及び54は、軸AX1の周りに、軸AX1を中心として同心円状に配置されている。また、測定部15は、磁化測定部55と、磁界測定部56と、を有する。磁化測定部55は、コイル51の誘導起電力の絶対値とコイル52の誘導起電力の絶対値との差分である差分値に基づいて、保持部12に保持されている被測定試料MS1の磁化を測定する。磁界測定部56は、コイル53の誘導起電力の絶対値とコイル54の誘導起電力の絶対値との差分である差分値に基づいて、磁界MF1の強度を測定する。 As described above, the measuring unit 15 has four coils of coils 51, 52, 53 and 54, and the coils 51, 52, 53 and 54 are concentric around the shaft AX1 with the shaft AX1 as the center. It is arranged. Further, the measuring unit 15 includes a magnetization measuring unit 55 and a magnetic field measuring unit 56. The magnetization measuring unit 55 magnetizes the sample MS1 to be measured held in the holding unit 12 based on the difference value which is the difference between the absolute value of the induced electromotive force of the coil 51 and the absolute value of the induced electromotive force of the coil 52. To measure. The magnetic field measuring unit 56 measures the strength of the magnetic field MF1 based on the difference value which is the difference between the absolute value of the induced electromotive force of the coil 53 and the absolute value of the induced electromotive force of the coil 54.

また、前述したように、方向DR1におけるコイル51の厚さTH1、方向DR1におけるコイル52の厚さTH2、方向DR1におけるコイル53の厚さTH3、及び、方向DR1におけるコイル54の厚さTH4は、いずれも7mm未満であるか、又は、いずれも保持部12に保持されている被測定試料MS1の方向DR1における厚さTHSよりも薄い。 Further, as described above, the thickness TH1 of the coil 51 in the direction DR1, the thickness TH2 of the coil 52 in the direction DR1, the thickness TH3 of the coil 53 in the direction DR1, and the thickness TH4 of the coil 54 in the direction DR1 are Both are less than 7 mm, or both are thinner than the thickness THS in the direction DR1 of the sample MS1 to be measured held in the holding portion 12.

このような本実施の形態の磁化測定方法によれば、被測定試料MS1の磁化を、磁化測定部55により高精度で測定することができ、被測定試料MS1に印加された磁界MF1の強度を、磁界測定部56により高精度で測定することができる。 According to the magnetization measuring method of the present embodiment as described above, the magnetization of the sample MS1 to be measured can be measured with high accuracy by the magnetization measuring unit 55, and the strength of the magnetic field MF1 applied to the sample MS1 to be measured can be measured. , The magnetic field measuring unit 56 can measure with high accuracy.

好適には、本実施の形態の磁化測定方法では、保持部12に保持されている被測定試料MS1の方向DR1における位置を調整部17により調整する(ステップS15)。そして、ステップS15では、コイル51の部分PR1、コイル52の部分PR2、コイル53の部分PR3、及び、コイル54の部分PR4の各々が、方向DR1において、保持部12に保持されている被測定試料MS1の方向DR1における中心位置CP1と同じ位置に配置されるように、被測定試料MS1の位置を調整部17により調整する。これにより、コイル51、52、53及び54の各々が、方向DR1において、被測定試料MS1の上端部及び下端部のいずれからも遠くなるので、コイル51及び52の各々の誘導起電力の絶対値の差分である誘起電圧eに対する、被測定試料MS1の上端部又は下端部に流れる渦電流の影響を小さくすることができる。 Preferably, in the magnetization measurement method of the present embodiment, the position of the sample MS1 to be measured held in the holding unit 12 in the direction DR1 is adjusted by the adjusting unit 17 (step S15). Then, in step S15, each of the partial PR1 of the coil 51, the partial PR2 of the coil 52, the partial PR3 of the coil 53, and the partial PR4 of the coil 54 is held by the holding portion 12 in the direction DR1. The position of the sample MS1 to be measured is adjusted by the adjusting unit 17 so that the sample MS1 to be measured is arranged at the same position as the center position CP1 in the direction DR1 of the MS1. As a result, each of the coils 51, 52, 53 and 54 is far from both the upper end and the lower end of the sample MS1 to be measured in the direction DR1, so that the absolute value of the induced electromotive force of each of the coils 51 and 52 is the absolute value. of the induced voltage e J is a difference, it is possible to reduce the influence of the eddy currents flowing in the upper portion or a lower end portion of the measured sample MS1.

次に、励磁コイル31がパルス磁界としての磁界MF1を印加する際に被測定試料MS1の磁化を測定する場合について説明する。図5は、励磁コイルがパルス磁界を印加する際に被測定試料に印加される磁界の強度の時間依存性を模式的に示すグラフである。図6は、被測定試料の磁化ヒステリシス曲線を模式的に示すグラフである。 Next, a case where the excitation coil 31 measures the magnetization of the sample MS1 to be measured when the magnetic field MF1 as a pulse magnetic field is applied will be described. FIG. 5 is a graph schematically showing the time dependence of the strength of the magnetic field applied to the sample to be measured when the exciting coil applies a pulsed magnetic field. FIG. 6 is a graph schematically showing the magnetization hysteresis curve of the sample to be measured.

掃引部14が、図4に示す励磁電源41を有する場合、前述したように、励磁コイル31により被測定試料MS1に印加する磁界を、正方向及び負方向の両方向に掃引しながら、被測定試料MS1の磁化を測定することができる。そこで、図5に示すように、まず方向DR1と同じ向き(正方向)に十分な強度を有するパルス磁界を印加し(図5の波形WF1参照)、被測定試料MS1の磁化が飽和するまで被測定試料MS1を磁化させながら磁化−磁界曲線(J−H曲線)の測定を行う。このとき、励磁コイル31に掃引部14によりパルス電流を流すことにより、磁界MF1を掃引部14により掃引しながら、励磁コイル31により磁界MF1を印加する。 When the sweeping unit 14 has the exciting power supply 41 shown in FIG. 4, as described above, the magnetic field applied to the sample to be measured MS1 by the exciting coil 31 is swept in both the positive and negative directions, and the sample to be measured is swept. The magnetization of MS1 can be measured. Therefore, as shown in FIG. 5, a pulse magnetic field having sufficient strength is first applied in the same direction (positive direction) as the direction DR1 (see the waveform WF1 in FIG. 5) until the magnetization of the sample MS1 to be measured is saturated. The magnetization-magnetic field curve (JH curve) is measured while magnetizing the measurement sample MS1. At this time, the magnetic field MF1 is applied by the exciting coil 31 while the magnetic field MF1 is swept by the sweeping portion 14 by passing a pulse current through the exciting coil 31.

次に、方向DR1と逆方向(負方向)に同じ強度を有するパルス磁界を印加し(図5の波形WF2参照)、被測定試料MS1の磁化が飽和するまで被測定試料MS1を磁化させながらJ−H曲線の測定を行う。次に、再び方向DR1と同じ向き(正方向)に同じ強度を有するパルス磁界を印加し(図5の波形WF3参照)、被測定試料MS1の磁化が飽和するまで被測定試料MS1を磁化させながらJ−H曲線の測定を行う。 Next, a pulse magnetic field having the same intensity is applied in the direction opposite to the direction DR1 (negative direction) (see the waveform WF2 in FIG. 5), and J while magnetizing the sample MS1 to be measured until the magnetization of the sample MS1 to be measured is saturated. -Measure the H curve. Next, a pulse magnetic field having the same intensity is applied again in the same direction (positive direction) as the direction DR1 (see the waveform WF3 in FIG. 5), and the sample MS1 to be measured is magnetized until the magnetization of the sample MS1 to be measured is saturated. Measure the JH curve.

その後、被測定試料MS1を取り出した状態で、方向DR1と同じ向き(正方向)、及び、方向DR1と逆方向(負方向)に、それぞれ同じ強度を有するパルス磁界を印加しながらJ−H曲線の測定を行う(図5の波形WF4及びWF5参照)。そして、波形WF2の際のJ−H曲線から波形WF5の際のJ−H曲線を差し引いたJ−H曲線を、縦軸に磁化Jが表され横軸に磁界Hが表されたグラフの第2象限と第3象限とに表し、波形WF3の際のJ−H曲線から波形WF4の際のJ−H曲線を差し引いたJ−H曲線を、同じグラフの第4象限と第1象限とに表す。これにより、図6に示すように、被測定試料MS1の磁化ヒステリシス曲線を得ることができる。 After that, with the sample MS1 to be measured taken out, the JH curve is applied in the same direction as the direction DR1 (positive direction) and in the direction opposite to the direction DR1 (negative direction) while applying pulse magnetic fields having the same intensity. (See waveforms WF4 and WF5 in FIG. 5). Then, the JH curve obtained by subtracting the JH curve for the waveform WF5 from the JH curve for the waveform WF2 is shown in the graph in which the magnetization J is represented on the vertical axis and the magnetic field H is represented on the horizontal axis. The JH curve, which is represented by the 2nd quadrant and the 3rd quadrant and is obtained by subtracting the JH curve of the waveform WF4 from the JH curve of the waveform WF3, is divided into the 4th quadrant and the 1st quadrant of the same graph. show. As a result, as shown in FIG. 6, the magnetization hysteresis curve of the sample MS1 to be measured can be obtained.

また、図6に示す磁化ヒステリシス曲線から、被測定試料MS1の残留磁化J、及び、保磁力HcJを求めることができる。残留磁化Jは、第1象限に表され、且つ、磁界Hを減少させる際の曲線、即ちJ−H減磁曲線のH=0に対応した磁化の値であり、保磁力HcJは、第2象限に表され、且つ、磁界Hを減少させる際の曲線、即ちJ−H減磁曲線のJ=0に対応した磁界の強度の値である。また、B=J+μHの関係により、残留磁化Jと残留磁束密度Bとは略等しいので、残留磁化Jから残留磁束密度Bを算出することができる。 Further, the magnetization hysteresis curve shown in FIG. 6, the residual magnetization J r of the measured sample MS1, and can determine the coercivity H cJ. Remanence J r is represented in the first quadrant, and, the value of magnetization corresponding to H = 0 of the curve, i.e. J-H demagnetization curve in reducing the magnetic field H, the coercivity H cJ can It is a value of the strength of the magnetic field represented in the second quadrant and corresponding to J = 0 of the curve when the magnetic field H is reduced, that is, the JH demagnetization curve. Further, since the residual magnetization Jr and the residual magnetic flux density Br are substantially equal to each other due to the relationship of B = J + μ 0 H, the residual magnetic flux density Br can be calculated from the residual magnetization Jr.

以下、実施例に基づいて本実施の形態を更に詳細に説明する。なお、本発明は以下の実施例によって限定されるものではない。 Hereinafter, the present embodiment will be described in more detail based on the examples. The present invention is not limited to the following examples.

実施例の磁化測定装置として、図1及び図2に示す磁化測定装置11を用意した。実施例の磁化測定装置11は、巻き数が350である励磁コイル31と、コイル51、52、53及び54と、を備えていた。このような実施例の磁化測定装置11において、励磁コイル31に流す電流を4250Aとしたときの、方向DR1における励磁コイル31の中心位置CP1における磁束密度、並びに、コイル51、52、53及び54の各々の内部の平均磁束密度を計算した。その結果を、表1に示す。なお、表1では、方向DR1における励磁コイル31の中心位置CP1を、「励磁コイル中心」と表記し、コイル51、52、53、54を、Jコイル内側、Jコイル外側、Hコイル内側、Hコイル外側と表記している。 As the magnetization measuring device of the example, the magnetization measuring device 11 shown in FIGS. 1 and 2 was prepared. The magnetization measuring device 11 of the embodiment includes an exciting coil 31 having 350 turns and coils 51, 52, 53 and 54. In the magnetization measuring device 11 of such an embodiment, the magnetic flux density at the center position CP1 of the exciting coil 31 in the direction DR1 and the magnetic flux densities of the coils 51, 52, 53 and 54 when the current flowing through the exciting coil 31 is 4250 A. The average magnetic flux density inside each was calculated. The results are shown in Table 1. In Table 1, the center position CP1 of the exciting coil 31 in the direction DR1 is referred to as “exciting coil center”, and the coils 51, 52, 53, 54 are referred to as J coil inside, J coil outside, H coil inside, and H. It is written as the outside of the coil.

Figure 0006934740
Figure 0006934740

表1に示すように、方向DR1における励磁コイル31の中心位置CP1における磁束密度と、コイル51、52、53及び54の各々の内部における平均磁束密度との差は、0.075%以下であった。そのため、励磁コイル31の中心位置CP1における磁界、並びに、コイル51、52、53及び54の内部に印加される磁界の強度は、一致しているとみなすことができた。 As shown in Table 1, the difference between the magnetic flux density at the center position CP1 of the exciting coil 31 in the direction DR1 and the average magnetic flux density inside each of the coils 51, 52, 53 and 54 is 0.075% or less. rice field. Therefore, the intensities of the magnetic field at the center position CP1 of the exciting coil 31 and the magnetic fields applied to the insides of the coils 51, 52, 53 and 54 can be considered to be the same.

次に、被測定試料MS1として、直径が10mmで、厚さが7mmのネオジウム鉄ホウ素(NdFeB)ボンド磁石及びNdFeB焼結磁石を用いた場合について、磁化ヒステリシス曲線を20回繰り返して測定し、得られた磁化ヒステリシス曲線から、残留磁束密度B及び保磁力HcJを求めた。その結果、被測定試料MS1としてNdFeBボンド磁石を用いた場合は、残留磁束密度Bの繰り返し精度は±0.38%であり、保磁力HcJの繰り返し精度は±0.19%であり、いずれも小さい値であった。また、被測定試料MS1としてNdFeB焼結磁石を用いた場合は、残留磁束密度Bの繰り返し精度は±0.30%であり、保磁力HcJの繰り返し精度は±0.20%であり、いずれも小さい値であった。 Next, when a neodymium iron boron (NdFeB) bonded magnet and an NdFeB sintered magnet having a diameter of 10 mm and a thickness of 7 mm are used as the sample MS1 to be measured, the magnetization hysteresis curve is repeatedly measured 20 times to obtain the result. from the magnetization hysteresis curves that are to determine the residual flux density B r and coercivity H cJ. As a result, in the case of using NdFeB bonded magnets as the measured sample MS1, repeatability of remanence B r is 0.38% ±, repeatability of coercivity H cJ is 0.19% ±, Both were small values. In the case of using the NdFeB sintered magnet as the measured sample MS1, repeatability of remanence B r is 0.30% ±, repeatability of coercivity H cJ is 0.20% ±, Both were small values.

以上、本発明者によってなされた発明をその実施の形態に基づき具体的に説明したが、本発明は前記実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることは言うまでもない。 Although the invention made by the present inventor has been specifically described above based on the embodiment thereof, the present invention is not limited to the embodiment and can be variously modified without departing from the gist thereof. Needless to say.

本発明の思想の範疇において、当業者であれば、各種の変更例及び修正例に想到し得るものであり、それら変更例及び修正例についても本発明の範囲に属するものと了解される。 Within the scope of the idea of the present invention, those skilled in the art can come up with various modified examples and modified examples, and it is understood that these modified examples and modified examples also belong to the scope of the present invention.

例えば、前述の各実施の形態に対して、当業者が適宜、構成要素の追加、削除若しくは設計変更を行ったもの、又は、工程の追加、省略若しくは条件変更を行ったものも、本発明の要旨を備えている限り、本発明の範囲に含まれる。 For example, a person skilled in the art appropriately adds, deletes, or changes the design of each of the above-described embodiments, or adds, omits, or changes the conditions of the process of the present invention. As long as it has a gist, it is included in the scope of the present invention.

11 磁化測定装置
12 保持部
13 印加部
14 掃引部
15 測定部
16 制御部
17 調整部
21 筒状部材
22 上側部材
23 下側部材
31 励磁コイル
41 励磁電源
42 制御盤
43 充電部
44 コンデンサ
45、46 サイリスタ
51〜54 コイル
55 磁化測定部
56 磁界測定部
61 パーソナルコンピュータ
71 モータ
72、73 ギア
AX1 軸
CE1〜CE4、PS1 位置
CP1 中心位置
DR1 方向
MF1 磁界
MS1 被測定試料
PL1 平面
PR1〜PR4 部分
WF1〜WF5 波形
11 Magnetization measuring device 12 Holding unit 13 Applying unit 14 Sweeping unit 15 Measuring unit 16 Control unit 17 Adjusting unit 21 Cylindrical member 22 Upper member 23 Lower member 31 Exciting coil 41 Exciting power supply 42 Control panel 43 Charging unit 44 Condenser 45, 46 Cylister 51-54 Coil 55 Magnetization measurement unit 56 Magnetic field measurement unit 61 Personal computer 71 Motor 72, 73 Gear AX1 Axis CE1 to CE4, PS1 Position CP1 Center position DR1 Direction MF1 Magnetic field MS1 Measured sample PL1 Plane PR1 to PR4 Part WF1 to WF5 Waveform

Claims (7)

磁性体の磁化を測定する磁化測定方法において、
(a)第1方向に延在する第1軸上に、保持部により前記磁性体を保持するステップ、
(b)前記保持部に保持されている前記磁性体に、前記第1方向の第1磁界を、印加部により印加するステップ、
(c)前記印加部により印加される前記第1磁界を掃引部により掃引しながら前記(b)ステップを行うステップ、
(d)前記(c)ステップを行う際に、前記磁性体の磁化及び前記第1磁界の強度を、測定部により測定するステップ、
を備え、
前記測定部は、
前記第1軸の周りに、前記保持部に保持されている前記磁性体を囲むように巻回され、且つ、鎖交する磁束の変化により第1誘導起電力を発生する第1コイルと、
前記第1軸の周りに、前記第1コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第2誘導起電力を発生する第2コイルと、
前記第1軸の周りに、前記第2コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第3誘導起電力を発生する第3コイルと、
前記第1軸の周りに、前記第3コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第4誘導起電力を発生する第4コイルと、
前記第1誘導起電力の絶対値と前記第2誘導起電力の絶対値との差分である第1差分値に基づいて、前記保持部に保持されている前記磁性体の磁化を測定する磁化測定部と、
前記第3誘導起電力の絶対値と前記第4誘導起電力の絶対値との差分である第2差分値に基づいて、前記第1磁界の強度を測定する磁界測定部と、
を有し、
前記第1コイルの巻き数をNとし、前記第2コイルの巻き数をNとし、前記第3コイルの巻き数をNとし、前記第4コイルの巻き数をNとし、前記第1コイルの前記第1軸に垂直な断面の面積をSとし、前記第2コイルの前記第1軸に垂直な断面の面積をSとしたとき、
(N×S−N×S)/(N×S)の絶対値が0.02以下であり、
(N−N)/Nの絶対値が0.02以下であり、
前記第1コイルの第1部分、前記第2コイルの第2部分、前記第3コイルの第3部分、及び、前記第4コイルの第4部分は、前記第1方向において、互いに同じ位置に配置され、
前記第1方向における前記第1コイルの第1厚さ、前記第1方向における前記第2コイルの第2厚さ、前記第1方向における前記第3コイルの第3厚さ、及び、前記第1方向における前記第4コイルの第4厚さは、いずれも7mm未満であり、
前記(c)ステップでは、前記第1磁界を、前記掃引部により正方向及び負方向の両方向に掃引しながら前記(b)ステップを行う
磁化測定方法。
In the magnetization measurement method for measuring the magnetization of a magnetic material,
(A) A step of holding the magnetic material by a holding portion on a first axis extending in the first direction.
(B) A step of applying a first magnetic field in the first direction to the magnetic material held by the holding portion by the applying portion.
(C) A step of performing the step (b) while sweeping the first magnetic field applied by the application unit by the sweep unit.
(D) A step of measuring the magnetization of the magnetic material and the strength of the first magnetic field by a measuring unit when performing the step (c).
With
The measuring unit
A first coil that is wound around the first axis so as to surround the magnetic material held by the holding portion and generates a first induced electromotive force by a change in magnetic flux interlinking with the first coil.
A second coil that is wound around the first axis so as to surround the first coil and generates a second induced electromotive force due to a change in the interlinking magnetic flux.
A third coil that is wound around the first axis so as to surround the second coil and generates a third induced electromotive force due to a change in the interlinking magnetic flux.
A fourth coil that is wound around the first axis so as to surround the third coil and generates a fourth induced electromotive force due to a change in the interlinking magnetic flux.
Magnetization measurement for measuring the magnetization of the magnetic material held in the holding portion based on the first difference value which is the difference between the absolute value of the first induced electromotive force and the absolute value of the second induced electromotive force. Department and
A magnetic field measuring unit that measures the strength of the first magnetic field based on the second difference value, which is the difference between the absolute value of the third induced electromotive force and the absolute value of the fourth induced electromotive force.
Have,
The number of turns of the first coil and N A, the number of turns of the second coil and N B, the number of turns of the third coil and N C, the number of windings of the fourth coil and N D, the first and S a the area of the cross section perpendicular to the first axis of first coil, when the area of the cross section perpendicular to the first axis of the second coil and the S B,
The absolute value of (N A × S A -N B × S B) / (N A × S A) is 0.02 or less,
The absolute value of (N C -N D) / N C is 0.02 or less,
The first part of the first coil, the second part of the second coil, the third part of the third coil, and the fourth part of the fourth coil are arranged at the same positions in the first direction. Being done
The first thickness of the first coil in the first direction, the second thickness of the second coil in the first direction, the third thickness of the third coil in the first direction, and the first thickness. The fourth thickness of the fourth coil in the direction is less than 7 mm in each case .
In the step (c), a magnetization measuring method in which the first magnetic field is swept in both positive and negative directions by the sweeping portion, and the step (b) is performed.
磁性体の磁化を測定する磁化測定方法において、
(a)第1方向に延在する第1軸上に、保持部により前記磁性体を保持するステップ、
(b)前記保持部に保持されている前記磁性体に、前記第1方向の第1磁界を、印加部により印加するステップ、
(c)前記印加部により印加される前記第1磁界を掃引部により掃引しながら前記(b)ステップを行うステップ、
(d)前記(c)ステップを行う際に、前記磁性体の磁化及び前記第1磁界の強度を、測定部により測定するステップ、
を備え、
前記測定部は、
前記第1軸の周りに、前記保持部に保持されている前記磁性体を囲むように巻回され、且つ、鎖交する磁束の変化により第1誘導起電力を発生する第1コイルと、
前記第1軸の周りに、前記第1コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第2誘導起電力を発生する第2コイルと、
前記第1軸の周りに、前記第2コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第3誘導起電力を発生する第3コイルと、
前記第1軸の周りに、前記第3コイルを囲むように巻回され、且つ、鎖交する磁束の変化により第4誘導起電力を発生する第4コイルと、
前記第1誘導起電力の絶対値と前記第2誘導起電力の絶対値との差分である第1差分値に基づいて、前記保持部に保持されている前記磁性体の磁化を測定する磁化測定部と、
前記第3誘導起電力の絶対値と前記第4誘導起電力の絶対値との差分である第2差分値に基づいて、前記第1磁界の強度を測定する磁界測定部と、
を有し、
前記第1コイルの巻き数をNとし、前記第2コイルの巻き数をNとし、前記第3コイルの巻き数をNとし、前記第4コイルの巻き数をNとし、前記第1コイルの前記第1軸に垂直な断面の面積をSとし、前記第2コイルの前記第1軸に垂直な断面の面積をSとしたとき、
(N×S−N×S)/(N×S)の絶対値が0.02以下であり、
(N−N)/Nの絶対値が0.02以下であり、
前記第1コイルの第1部分、前記第2コイルの第2部分、前記第3コイルの第3部分、及び、前記第4コイルの第4部分は、前記第1方向において、互いに同じ位置に配置され、
前記第1方向における前記第1コイルの第1厚さ、前記第1方向における前記第2コイルの第2厚さ、前記第1方向における前記第3コイルの第3厚さ、及び、前記第1方向における前記第4コイルの第4厚さは、いずれも前記保持部に保持されている前記磁性体の前記第1方向における第5厚さよりも薄く、
前記(c)ステップでは、前記第1磁界を、前記掃引部により正方向及び負方向の両方向に掃引しながら前記(b)ステップを行う
磁化測定方法。
In the magnetization measurement method for measuring the magnetization of a magnetic material,
(A) A step of holding the magnetic material by a holding portion on a first axis extending in the first direction.
(B) A step of applying a first magnetic field in the first direction to the magnetic material held by the holding portion by the applying portion.
(C) A step of performing the step (b) while sweeping the first magnetic field applied by the application unit by the sweep unit.
(D) A step of measuring the magnetization of the magnetic material and the strength of the first magnetic field by a measuring unit when performing the step (c).
With
The measuring unit
A first coil that is wound around the first axis so as to surround the magnetic material held by the holding portion and generates a first induced electromotive force by a change in magnetic flux interlinking with the first coil.
A second coil that is wound around the first axis so as to surround the first coil and generates a second induced electromotive force due to a change in the interlinking magnetic flux.
A third coil that is wound around the first axis so as to surround the second coil and generates a third induced electromotive force due to a change in the interlinking magnetic flux.
A fourth coil that is wound around the first axis so as to surround the third coil and generates a fourth induced electromotive force due to a change in the interlinking magnetic flux.
Magnetization measurement for measuring the magnetization of the magnetic material held in the holding portion based on the first difference value which is the difference between the absolute value of the first induced electromotive force and the absolute value of the second induced electromotive force. Department and
A magnetic field measuring unit that measures the strength of the first magnetic field based on the second difference value, which is the difference between the absolute value of the third induced electromotive force and the absolute value of the fourth induced electromotive force.
Have,
The number of turns of the first coil and N A, the number of turns of the second coil and N B, the number of turns of the third coil and N C, the number of windings of the fourth coil and N D, the first and S a the area of the cross section perpendicular to the first axis of first coil, when the area of the cross section perpendicular to the first axis of the second coil and the S B,
The absolute value of (N A × S A -N B × S B) / (N A × S A) is 0.02 or less,
The absolute value of (N C -N D) / N C is 0.02 or less,
The first part of the first coil, the second part of the second coil, the third part of the third coil, and the fourth part of the fourth coil are arranged at the same positions in the first direction. Being done
The first thickness of the first coil in the first direction, the second thickness of the second coil in the first direction, the third thickness of the third coil in the first direction, and the first thickness. The fourth thickness of the fourth coil in the direction is thinner than the fifth thickness of the magnetic material held in the holding portion in the first direction.
In the step (c), a magnetization measuring method in which the first magnetic field is swept in both positive and negative directions by the sweeping portion, and the step (b) is performed.
請求項2に記載の磁化測定方法において、
前記第1コイルの前記第1方向における中心位置を第1位置とし、前記第2コイルの前記第1方向における中心位置を第2位置とし、前記第3コイルの前記第1方向における中心位置を第3位置とし、前記第4コイルの前記第1方向における中心位置を第4位置とし、前記保持部に保持されている前記磁性体の前記第1方向における中心位置を第5位置とし、前記第1位置と前記第5位置との間の前記第1方向における距離を第1距離とし、前記第2位置と前記第5位置との間の前記第1方向における距離を第2距離とし、前記第3位置と前記第5位置との間の前記第1方向における距離を第3距離とし、前記第4位置と前記第5位置との間の前記第1方向における距離を第4距離としたとき、
前記第5厚さに対する前記第1距離の比は、0.2以下であり、
前記第5厚さに対する前記第2距離の比は、0.2以下であり、
前記第5厚さに対する前記第3距離の比は、0.2以下であり、
前記第5厚さに対する前記第4距離の比は、0.2以下である、磁化測定方法。
In the magnetization measuring method according to claim 2,
The center position of the first coil in the first direction is the first position, the center position of the second coil in the first direction is the second position, and the center position of the third coil in the first direction is the first position. The third position is set, the center position of the fourth coil in the first direction is set to the fourth position, the center position of the magnetic material held by the holding portion in the first direction is set to the fifth position, and the first position is set. The distance between the position and the fifth position in the first direction is defined as the first distance, and the distance between the second position and the fifth position in the first direction is defined as the second distance. When the distance between the position and the fifth position in the first direction is defined as the third distance, and the distance between the fourth position and the fifth position in the first direction is defined as the fourth distance.
The ratio of the first distance to the fifth thickness is 0.2 or less.
The ratio of the second distance to the fifth thickness is 0.2 or less.
The ratio of the third distance to the fifth thickness is 0.2 or less.
The method for measuring magnetization, wherein the ratio of the fourth distance to the fifth thickness is 0.2 or less.
請求項3に記載の磁化測定方法において、
(e)前記第5位置を、調整部により調整するステップ、
を備えている、磁化測定方法。
In the magnetization measuring method according to claim 3,
(E) A step of adjusting the fifth position by the adjusting unit,
A magnetization measurement method.
請求項1乃至4のいずれか一項に記載の磁化測定方法において、
前記(d)ステップでは、前記測定部の測定によりJ−H曲線を測定し、
(f)前記磁性体を取り出した状態で、前記第1磁界を、前記掃引部により正方向及び負方向の両方向に掃引しながら印加して、前記測定部によりJ−H曲線を測定するステップ、
(g)前記(d)ステップで測定したJ−H曲線から、前記(f)ステップで測定したJ−H曲線を差し引いたJ−H曲線を得るステップ、
を備えている、磁化測定方法。
In the magnetization measuring method according to any one of claims 1 to 4,
In the step (d), the JH curve is measured by the measurement of the measuring unit, and the JH curve is measured.
(F) With the magnetic material taken out, the first magnetic field is applied while being swept in both the positive and negative directions by the sweeping unit, and the JH curve is measured by the measuring unit.
(G) A step of obtaining a JH curve obtained by subtracting the JH curve measured in the step (f) from the JH curve measured in the step (d).
A magnetization measurement method.
請求項1乃至5のいずれか一項に記載の磁化測定方法において、
前記(b)ステップでは、前記第1軸の周りに、前記第4コイルを囲むように巻回され、且つ、前記第1方向に延在する円筒形状を有する第5コイルを有する前記印加部により、前記第1磁界を印加し、
前記第1コイル、前記第2コイル、前記第3コイル及び前記第4コイルは、前記第1方向における前記第5コイルの中央部に囲まれている、磁化測定方法。
In the magnetization measuring method according to any one of claims 1 to 5,
In step (b), the application portion has a fifth coil that is wound around the first axis so as to surround the fourth coil and has a cylindrical shape extending in the first direction. , The first magnetic field is applied,
A method for measuring magnetization, wherein the first coil, the second coil, the third coil, and the fourth coil are surrounded by a central portion of the fifth coil in the first direction.
請求項1乃至5のいずれか一項に記載の磁化測定方法において、
前記(b)ステップでは、前記第1軸の周りに、前記第4コイルを囲むように巻回され、且つ、前記磁性体に、パルス磁界としての前記第1磁界を印加する第6コイルを有する前記印加部により、前記第1磁界を印加し、
前記(c)ステップでは、前記第6コイルに前記掃引部によりパルス電流を流すことにより、前記第1磁界を前記掃引部により掃引しながら前記(b)ステップを行う、磁化測定方法。
In the magnetization measuring method according to any one of claims 1 to 5,
In the step (b), a sixth coil is wound around the first axis so as to surround the fourth coil, and the first magnetic field as a pulse magnetic field is applied to the magnetic material. The first magnetic field is applied by the application unit, and the first magnetic field is applied.
In the step (c), a magnetization measuring method is performed in which the step (b) is performed while the first magnetic field is swept by the sweeping portion by passing a pulse current through the sweeping portion through the sixth coil.
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