JP6934811B2 - Three-dimensional measuring device - Google Patents

Description

The present invention relates to a three-dimensional measuring device that measures the three-dimensional shape of a work by irradiating the work with irradiation light and imaging an image of the irradiation light generated on the surface of the work.

A three-dimensional measuring device including a non-contact measuring probe is known. Such a non-contact measurement probe captures, for example, an irradiation device that irradiates a work with irradiation light along a plane and an image of the irradiation light generated on the surface of the work from a position different from the plane. It is provided with an image pickup device to be used.

In such a non-contact type measurement probe, the direction in which the irradiation light is irradiated intersects with the imaging direction of the imaging device. Therefore, in order to capture the image of the irradiation light, it is necessary to set the distance of the measurement probe to the work within the imageable range. Whether or not the distance of the measuring probe to the workpiece is within the imageable range can be confirmed, for example, from the display of a PC connected to the three-dimensional measuring device. However, in that case, the measurer must visually recognize both the display and the work, which causes a decrease in operability.

In order to solve such a problem, for example, in Patent Document 1, a non-contact measurement probe is provided with an instruction light emitting unit that irradiates an instruction light having a wavelength different from the irradiation light used for measurement, and the instruction light is provided. By irradiating the surface of the work with the indicated light from the light emitting part and changing the color of the indicated light according to the distance between the work and the measuring probe, is the distance between the work and the measuring probe within the imageable range? It is stated to confirm whether or not.

Japanese Unexamined Patent Publication No. 2012-127805

If the non-contact type measuring probe comes into contact with the work, the measuring probe may be damaged and the measurement accuracy may be deteriorated. Therefore, when the measurement probe comes close to the work by a certain amount or more, it is preferable to determine this and give a warning or the like. However, for example, in the technique described in Patent Document 1, when the distance to the workpiece of the measurement probe deviates from the imageable range, is this distance farther than the imageable range or closer to the imageable range? Cannot be determined.

The present invention has been made in view of these points, and an object of the present invention is to provide a three-dimensional measuring device capable of suppressing contact between a work and a measuring probe.

In order to solve such a problem, the three-dimensional measuring device according to the embodiment of the present invention displays an irradiation device that irradiates the work with irradiation light along a plane and an image of the irradiation light generated on the surface of the work. Is the distance between the non-contact measurement probe having the image pickup device that images from a position different from the above plane and the work of the measurement probe within the image pickup range in which the image of the irradiation light can be imaged by the image pickup device? , A discriminating device that discriminates whether it is within a remote range farther than the imageable range or within a close range closer than the imageable range, a notification device that notifies the discriminant result by this discriminant device, and a memory that stores the discriminant result. It is equipped with a device. Further, the discrimination device stores information indicating that the distance to the work is within the remote range as the discrimination result in the storage device at the timing when the irradiation of the irradiation light is started. Further, the discrimination device discriminates the range of the distance to the work by referring to the result of imaging by the imaging device and the discrimination result stored in the storage device, and updates the discrimination result stored in the storage device.

Further, the discriminating device determines whether or not an image of the irradiation light has been imaged by the imaging device when determining the range of the distance to the work of the measurement probe, and if it is determined that the image has been imaged, the work is up to the above. It can be determined that the distance is within the imageable range. Further, when the discrimination device does not determine that the image of the irradiation light has been captured by the imaging device, the discrimination device refers to the discrimination result stored in the storage device, and as a discrimination result, the distance to the work is within a remote range. When the indicated information is stored, the distance to the work is determined to be within the remote range, and as a result of the determination, when the information indicating that the distance to the work is within the close range is stored, the distance to the work is stored. The distance can be determined to be within the proximity range.

Further, the discriminating device calculates the distance to the work based on the image of the irradiation light when it is determined that the image of the irradiation light has been captured when discriminating the range of the distance to the work of the measurement probe. Can be memorized in. Further, when the discrimination device does not determine that the image of the irradiation light has been captured and the storage device stores information indicating that the distance to the work is within the imageable range as the discrimination result, the discriminating device stores the information. Based on the information indicating the distance to the work stored in the device, the distance to the work can be determined to be within the remote range or the close range.

Further, the measurement probe can be provided with a housing for accommodating the irradiation device and the imaging device, and the light emitting device provided on the surface of the housing can be provided as the notification device.

Further, as the notification device, a sounding device that generates a sound for notifying the discrimination result can be provided.

Further, the measurement probe can be provided with a grip portion to be gripped by the measurer at the time of measurement, and as the notification device, a vibration generator for notifying the discrimination result by vibration of the grip portion can be provided.

Further, a contact type measurement probe can be attached to the non-contact type measurement probe. Further, the discriminating device can discriminate the range of the distance to the work of the non-contact type measuring probe at the time of measurement using the contact type measuring probe.

According to the present invention, it is possible to provide a three-dimensional measuring device capable of suppressing contact between a work and a measuring probe.

It is a figure which shows the structure of the 3D measuring apparatus which concerns on 1st Embodiment of this invention. It is a figure for demonstrating the measurement probe 100. It is a block diagram for demonstrating the structure of the measurement probe 100. It is a figure for demonstrating the arrangement of the structure in the image pickup apparatus 120. It is a figure which shows the image pickup surface of the image pickup element 121, and the light receiving element 124 arranged on this image pickup surface. It is a figure which shows the image pickup surface of an image pickup element 121, and the measurement area 126 and observation area 127 provided on this image pickup surface. It is a block diagram for demonstrating the structure of the control device 130. It is a figure which shows the relationship between the image sensor 121 and the image L'when the distance to the work W of the measurement probe 100 is within a remote range. It is a figure which shows the relationship between the image pickup element 121 and the image L'when the distance of the measurement probe 100 to the work W is within the image pickup possible range. It is a figure which shows the relationship between the image sensor 121 and the image L'when the distance of the measurement probe 100 to the work W is within the proximity range. It is a flowchart which shows the discrimination process by a control device 130.

[Three-dimensional measuring device]
As shown in FIG. 1, the three-dimensional measuring device according to the first embodiment of the present invention supports the non-contact measuring probe 100 and the measuring probe 100 in a movable manner, and positions the measuring probe 100. The articulated arm 200 for measuring the angle and the measuring probe 100 and the arithmetic apparatus 300 for performing arithmetic processing on the output values from the articulated arm 200 and calculating the measured values are provided. Further, a contact type measurement probe 400 is attached to the measurement probe 100.

As shown in FIG. 2A, the measurement probe 100 displays an irradiation device 110 that irradiates the work W with irradiation light along the plane S and an image L of the irradiation light generated on the surface of the work W on the plane S. It has an image pickup apparatus 120 that takes an image from a position different from the above. The plane S is a plane that passes through the irradiation surface of the irradiation device 110 and is substantially perpendicular to the irradiation surface. Since the irradiation light is emitted along the plane S, a linear or curved image L of the irradiation light reflecting the unevenness of the surface of the work W is generated on the surface of the work W. When the image L of the irradiation light is imaged from a position different from the plane S, as shown in FIG. 2B, an image L'stretched in the X direction and having irregularities in the Y direction is formed on the light receiving surface of the image pickup apparatus 120. Image image. The positions of the points forming the image L'in the X direction correspond to the positions of the points forming the image L generated on the surface of the work W. Further, the positions of these points in the Y direction correspond to the distances of the points constituting the image L to the irradiation device 110, that is, the distances to the measurement probe 100. Among the points that make up an image L', the point closest to the near side of the light receiving surface is referred to as "proximity point P _L". Adjacent point P _L is information indicating a distance to the workpiece W of the measuring probe 100.

As shown in FIG. 1, the articulated arm 200 has a base 201, and a plurality of arm portions 202 and joint portions 203 alternately connected between the base 201 and the measurement probe 100. The arm portion 202 is formed, for example, in a substantially columnar shape. The joint portion 203 is provided at a connecting portion between the two arm portions 202, and includes an angle measuring device such as a rotary encoder that measures the relative angle between the arm portions 202. Although the three-dimensional measuring device according to the present embodiment includes the articulated arm 200, instead of the articulated arm 200, the sample table on which the work W is installed and the measuring probe 100 are driven three-dimensionally. Those provided with an axis, a Y-axis and a Z-axis, and a distance measuring device such as a linear encoder that is interlocked with the X-axis, the Y-axis and the Z-axis and measures the position of the measurement probe 100 and the like may be used. Further, a device that calculates the position and angle of the measurement probe 100 by an imaging means or the like may be used.

The arithmetic unit 300 is, for example, an arithmetic unit such as a PC. The calculation device 300 calculates the position data indicating the relative position and the relative angle of the measurement probe 100 with respect to the base 201 from the output value of the angle measurement device in the articulated arm 200, and calculates the position data and the output value of the measurement probe 100. The shape of the work W is calculated from.

[Measurement probe 100]
As shown in FIG. 3, the measurement probe 100 includes an irradiation device 110, an image pickup device 120, a control device 130 that controls the irradiation device 110 and the image pickup device 120, and the irradiation device 110, the image pickup device 120, and the control device 130. It includes a housing 140 for accommodating, a grip portion 150 that is gripped by the measurer during measurement, and a notification device 160 that performs notification processing to the measurer in response to a command from the control device 130.

The irradiation device 110 includes a light source 111 that generates light, and a beam expander 112 that widens the light in a direction orthogonal to the paper surface to provide irradiation light along the plane S (FIG. 2). The light source 111 is, for example, a laser light source, an LED, or another light source. The beam expander 112 is, for example, a rod lens, a cylindrical lens or other lens, or a galvano mirror, a polygon mirror or other scanning mirror. It should be noted that a plurality of light sources arranged in a straight line can also be used as the light source 111. In this case, an optical system such as frost can be used as the beam expander 112.

The image pickup device 120 selectively transmits the image pickup element 121, the imaging lens 122 that forms an image L'(FIG. 2) of the irradiation light on the image pickup surface of the image pickup element 121, and the light having the wavelength of the irradiation light. A band pass filter 123 and the like are provided.

The control device 130 is connected to the irradiation device 110, the image pickup device 120, and the notification device 160, and controls them. The control device 130 is, for example, a microprocessor or the like. Further, the control device 130 is connected to the arithmetic unit 300, and outputs an output value to the arithmetic unit 300 in response to a command from the arithmetic unit 300. The control device 130 also functions as a discriminating device for discriminating the range of the distance of the measuring probe 100 to the work W.

As shown in FIG. 2, the front surface of the housing 140 has a first window portion 141 for irradiating the work W with the irradiation light emitted from the irradiation device 110, and an image L of the irradiation light generated on the surface of the work W. A second window portion 142 is provided for taking an image of the image by the imaging device 120. Further, as shown in FIG. 3, a contact-type measurement probe 400 is attached to the housing 140. The contact-type measurement probe 400 projects, for example, in the front direction of the housing 140.

The grip portion 150 is provided on the back side of the housing 140.

The notification device 160 is, for example, a light emitting device 161 such as an LED provided on the back surface of the measurement probe 400, a vibration generator 162 provided inside the grip portion 150, and a vibration generator 162 provided outside the measurement probe 100 (not shown). It is equipped with a sounding device. The configuration of the notification device 160 can be changed as appropriate.

[Imaging device 120]
As shown in FIG. 4, a Scheimpflug optical system 128 can be adopted as the optical system of the image pickup apparatus 120. In the Scheimpflug optical system 128, the surface S1 parallel to the imaging surface of the imaging element 121, the surface S2 perpendicular to the optical axis of the imaging lens 122, and the plane S to which the irradiation light is irradiated are on a predetermined straight line P. Meet at. With such an arrangement, the entire image pickup surface of the image pickup device 121 is in focus with respect to the plane S. As the optical system of the image pickup apparatus 120, other optical systems such as a telecentric optical system can be adopted instead of the Scheimpflug optical system 128.

As shown in FIG. 5, the image pickup device 121 is an image pickup device including a plurality of light receiving elements 124 arranged in the X direction and the Y direction, and is, for example, a CMOS image sensor or the like. The image sensor 121 simultaneously reads data from, for example, rows 125 of a plurality of light receiving elements 124 arranged in the Y direction. Subsequently, for example, a column adjacent to this column 125 is selected, and data is simultaneously read from a plurality of light receiving elements 124 included in this column. Similarly, image data is generated by sequentially reading the data. As the image sensor 121, another image sensor such as a CCD image sensor can be used instead of the CMOS image sensor.

As shown in FIG. 6, the image pickup surface of the image pickup device 121 is provided with a measurement area 126 and an observation area 127 which is the maximum pixel range. The measurement area 126 is provided near the center of the imaging surface, for example. The measurement area 126 may be, for example, a rectangular area, or a circular or elliptical area. The measurement region 126 can be provided, for example, in an region of the image pickup surface of the image pickup device 121 that is particularly preferably in focus with respect to the plane S. The observation area 127 is the entire area of the imaging surface including the measurement area 126. For example, the image sensor 121 sets the read region (ROI: Region Of Interest) of the image sensor 121 to the measurement region 126 or the observation region 127 in response to a command from the control device 130. When the reading area is set to the measurement area 126, the number of light receiving elements 124 used for imaging decreases, and the data reading time decreases, so that the frame rate of the image sensor 121 increases. Further, when the reading area is set to the observation area 127, the number of light receiving elements 124 used for image pickup increases, and the data reading time increases, so that the frame rate of the image pickup element 121 decreases.

[Control device 130]
As shown in FIG. 7, the control device 130 includes a measurement start / end processing unit 131 that performs processing at the start / end of the measurement processing, and a coordinate processing unit 132 that performs coordinate processing on the image data received from the image pickup device 120. , The discrimination unit 133 that discriminates the range of the distance of the measurement probe 100 to the work W, the notification device control unit 134 that controls the notification device 160 based on the discrimination result by the discrimination unit 133, and the discrimination result by the discrimination unit 133. A storage unit 135 for storing is provided.

The measurement start / end processing unit 131 starts the non-contact measurement processing in response to a command from, for example, the arithmetic unit 300. In this case, the irradiation device 110 is controlled to start irradiating the irradiation light, and the imaging device 120 is controlled to start imaging. Further, the measurement start / end processing unit 131 ends the measurement processing in response to a command from, for example, the arithmetic unit 300.

The coordinate processing unit 132 receives image data as shown in FIG. 2B, for example, from the image pickup apparatus 120, and the Y direction of each point forming the image L'for each row 125 (FIG. 5) of the light receiving element 124. The coordinate value of the image L'is calculated to calculate the coordinate data of the image L'. Further, the distance of the measurement probe 100 to the work W is calculated from the coordinate data of the image L'. For example, in the coordinate data of the image L', the closest point to the near side, is acquired as the coordinate data of the adjacent point P _L. The coordinate processing unit 132 transmits to the arithmetic unit 300 causes stores the coordinate data of the adjacent point _{P L} in the storage unit 135. Further, the coordinate processing unit 132 determines, for example, whether or not the image L of the irradiation light is imaged in the measurement area 126 of the image sensor 121, and if it is determined that the image L is imaged, the read area of the image sensor 121 is set as the measurement area. If the determination is not made in 126, the read area is set in the observation area 127. Further, when the reading area of the image sensor 121 is set to the observation area 127, it is determined whether or not the image L of the irradiation light is imaged in the observation area 127 of the image sensor 121.

The determination unit 133 determines what range the distance of the measurement probe 100 to the work W is. For example, as shown in FIG. 8, when the distance is sufficiently large, the image L'is not formed on the image pickup surface of the image pickup device 121. Hereinafter, such a range of distance is referred to as a "remote range". Further, for example, as shown in FIG. 9, when the above distance is within a predetermined range, the image L'is formed on the image pickup surface of the image pickup device 121. Hereinafter, the range of such a distance is referred to as an "imaging range". Further, for example, as shown in FIG. 10, when the above distance is closer than the image pickup range, the image L'is not imaged on the image pickup surface of the image pickup device 121. Hereinafter, such a range of distance is referred to as a "proximity range".

As shown in FIG. 11, the discrimination unit 133 first determines whether or not the discrimination process by the discrimination unit 133 is the first process from the start of measurement (S101).

When it is determined to be the first process in step S101, the determination unit 133 stores information indicating that the distance of the measurement probe 100 to the work W is within a remote range in the storage unit 135 (S102).

If it is not determined to be the first process in step S101, or if step S102 is completed, the determination unit 133 determines whether or not the image L of the irradiation light has been imaged by the image pickup apparatus 120 (S103). This determination is performed, for example, based on the result of the determination by the coordinate processing unit 132.

When it is determined in step S103 that the image L of the irradiation light has been imaged, the discrimination unit 133 determines that the distance of the measurement probe 100 to the work W is within the imageable range (S104). Further, as a result of this determination, information indicating that the distance to the work W is within the imageable range is transmitted to the storage unit 135 for storage, transmitted to the notification device control unit 134, and the coordinate data of the image L'. Is transmitted to the arithmetic unit 300 in association with. After that, the discrimination process ends.

When it is not determined in step S103 that the image L of the irradiation light has been imaged, the discrimination unit 133 refers to the discrimination result stored in the storage unit 135 (S105). The discrimination result stored in the storage unit 135 is a remote range in the first process from the start of measurement, and is a discrimination result in the previous process in the second and subsequent processes.

When the storage unit 135 stores information indicating that the distance to the work W is within the imageable range as a determination result in step S105, the determination unit 133 further stores the proximity point P stored in the storage unit 135. _With reference to the coordinate data of L, it is determined whether the coordinate data is close to the near side or the remote side of the image pickup surface of the image pickup element 121 (S106).

If the distance to the workpiece W as a determination result in the storage unit 135 information indicating that it is in the remote range is stored in step S105, or imaging coordinate data of the near point P _L is the imaging device 121 in step S106 When it is determined that the surface is close to the remote side, the determination unit 133 determines that the distance of the measurement probe 100 to the work W is within the remote range (FIG. 8) (S107). Further, as a result of this determination, information indicating that the distance to the work W is within the remote range is transmitted to the storage unit 135 to be stored, transmitted to the notification device control unit 134, and the coordinate data of the image L'. It is associated and transmitted to the arithmetic unit 300. After that, the discrimination process ends.

If the distance to the workpiece W as a determination result in the storage unit 135 information indicating that it is within the proximity range is stored in step S105, or imaging coordinate data of the near point P _L is the imaging device 121 in step S106 When it is determined that the surface is close to the close side, the determination unit 133 determines that the distance of the measurement probe 100 to the work W is within the remote range (FIG. 10) (S108). Further, as a result of this determination, information indicating that the distance to the work W is within the proximity range is transmitted to the storage unit 135 to be stored, transmitted to the notification device control unit 134, and the coordinate data of the image L'. It is associated and transmitted to the arithmetic unit 300. After that, the discrimination process ends.

As shown in FIG. 7, the notification device control unit 134 receives the discrimination result from the discrimination unit 133 and controls the notification device 160 based on the discrimination result.

For example, when the discrimination result receives information indicating that the distance to the work W is within the remote range, it is preferable to perform low power consumption processing. For example, the LED of the light emitting device 161 (FIG. 3) can be blinked at a constant cycle.

Further, for example, when information indicating that the distance to the work W is within the imageable range is received as the discrimination result, it is conceivable to perform various processes. For example, depending on the distance from the end of the near side of the imaging surface of the imaging device 121 to the adjacent point P _L, also to be possible to adjust the period of the flashing, and controls the sound generating device according to this distance, warning It can also generate sound.

Further, for example, when information indicating that the distance to the work W is within the proximity range is received as the discrimination result, there is a possibility that the work W and the measurement probe 100 come into contact with each other by attracting the attention of the measurer. It is preferable to notify a certain point. For example, the LED of the light emitting device 161 (FIG. 3) can be blinked, the grip portion 150 of the measurement probe 100 can be vibrated by the vibration generator 162, and a warning sound can be generated by a sounding device (not shown).

Storage unit 135, the coordinate data of the adjacent point P _L calculated in the coordinate processing unit 132, and stores the discrimination result by the discrimination unit 133. The coordinate data and the discrimination result stored in the storage unit 135 are updated at any time according to the coordinate processing and the discrimination processing. The storage unit 135 can store only the immediately preceding data, and can also store the previous data depending on the configuration of, for example, a ring buffer.

[effect]
In the three-dimensional measuring device according to the present embodiment, the irradiation device 110 that irradiates the work W with the irradiation light along the plane S and the image L of the irradiation light generated on the surface of the work W are different from the plane S. It is provided with a non-contact measurement probe 100 having an imaging device 120 for imaging from a position.

As described above, in such a three-dimensional measuring device, when the distance to the work W of the measuring probe 100 is out of the imageable range, is this distance within a remote range farther than the imageable range? It was not possible to determine whether it was within a close range closer than the imageable range.

Here, as a result of the examination by the inventor, when measuring using such a three-dimensional measuring device, most measurers start the measurement from the remote range or the observable range for the convenience of operation. I found out.

Therefore, in the present embodiment, at the timing when the irradiation of the irradiation light is started, the distance between the work W and the measurement probe 100 is defined as within the remote range (FIG. 8) and stored in the storage unit 135 for discrimination processing. In, the range of the distance is discriminated with reference to the information stored in the storage unit 135, and the discriminant result stored in the storage unit 135 is updated. According to such a method, by continuously monitoring the range of the above distance, even if the distance to the work W of the measurement probe 100 deviates from the imageable range, this distance can be imaged. It is possible to determine whether it is within a remote range farther than the range or within a close range closer than the imageable range.

Further, in the three-dimensional measuring apparatus according to the present embodiment, the contact type measuring probe 400 is attached to the non-contact type measuring probe 100, and the touch measuring probe 400 can perform touch measurement and copy measurement. be. However, for example, when the work W has large irregularities, the non-contact measurement probe 100 may come into contact with the work W during touch measurement or copy measurement. In order to suppress this, even in the case of contact measurement using the contact type measurement probe 400, the control device 130 can perform the same control as in the non-contact measurement.

100 ... measurement probe, 110 ... irradiation device, 120 ... imaging device, 130 ... control device, 140 ... housing, 150 ... gripping part, 160 ... notification device, 200 ... articulated arm, 300 ... arithmetic unit, W ... work, S ... plane, L ... image of the irradiated light, P L _... proximity point.

Claims (7)

A non-contact type having an irradiation device that irradiates the work with irradiation light along a plane and an imaging device that images an image of the irradiation light generated on the surface of the work from a position different from the plane. With the measurement probe
The distance of the measurement probe to the work is within an image pickup range in which the image of the irradiation light can be imaged by the image pickup device, a remote range farther than the image capture range, or a proximity closer than the image capture range. A discriminator that determines whether it is within the range and
A notification device that notifies the discrimination result by the discrimination device, and
A storage device for storing the discrimination result is provided.
The discrimination device is
At the timing when the irradiation of the irradiation light is started, the storage device stores information indicating that the distance to the work is within the remote range as the determination result.
The feature is that the range of the distance to the work is discriminated by referring to the result of imaging by the imaging device and the discrimination result stored in the storage device, and the discrimination result stored in the storage device is updated. Three-dimensional measuring device. The discriminating device determines the range of the distance of the measuring probe to the work.
It is determined whether or not the image of the irradiation light has been captured by the imaging device, and the image is determined.
If it is determined that the image was taken
The distance to the work is determined to be within the imageable range, and
If it is not determined to have been imaged
With reference to the determination result stored in the storage device,
As a result of the determination, when information indicating that the distance to the work is within the remote range is stored, the distance to the work is determined to be within the remote range.
Claim 1 is characterized in that, as a result of the determination, when information indicating that the distance to the work is within the proximity range is stored, the distance to the work is determined to be within the proximity range. The described three-dimensional measuring device. The discriminating device determines the range of the distance of the measuring probe to the work.
When it is determined that the image of the irradiation light has been captured, the distance to the work is calculated based on the image of the irradiation light and stored in the storage device.
When it is not determined that the image of the irradiation light has been imaged and the storage device stores information indicating that the distance to the work is within the imageable range as the determination result, the storage The three-dimensional measuring device according to claim 2, wherein the distance to the work is determined to be within the remote range or within the close range based on the information indicating the distance to the work stored in the device. .. The measuring probe further includes a housing for accommodating the irradiation device and the imaging device.
The three-dimensional measuring device according to any one of claims 1 to 3, wherein the notification device includes a light emitting device provided on the surface of the housing. The three-dimensional measuring device according to any one of claims 1 to 4, wherein the notification device includes a sounding device that generates a sound for notifying the determination result. The measurement probe further includes a grip portion that is gripped by the measurer during measurement.
The three-dimensional measuring device according to any one of claims 1 to 5, wherein the notification device includes a vibration generator that notifies the determination result by vibration of the grip portion. A contact-type measuring probe attached to the non-contact-type measuring probe is further provided.
Any one of claims 1 to 6, wherein the discriminating device discriminates the range of the distance of the non-contact measuring probe to the work when measuring using the contact measuring probe. The described three-dimensional measuring device.

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