JP6935602B2

JP6935602B2 - Torque sensor

Info

Publication number: JP6935602B2
Application number: JP2021010484A
Authority: JP
Inventors: 鈴木　隆史; 隆史鈴木; 池田　隆男; 隆男池田
Original assignee: Nidec Copal Electronics Corp
Current assignee: Nidec Copal Electronics Corp
Priority date: 2016-12-07
Filing date: 2021-01-26
Publication date: 2021-09-15
Anticipated expiration: 2036-12-07
Also published as: JP2021063844A

Description

本発明の実施形態は、例えばロボットアームの関節に設けられるトルクセンサに関する。 An embodiment of the present invention relates to, for example, a torque sensor provided at a joint of a robot arm.

この種のトルクセンサは、トルクが印加される第１の構造体と、トルクが出力される第２の構造体と、第１の構造体と第２の構造体とを連結する複数の起歪部を有し、これら起歪部に歪センサが配置されている（例えば特許文献１、２、３参照）。 In this type of torque sensor, a plurality of occurrences and strains connecting a first structure to which torque is applied, a second structure to which torque is output, and a first structure and a second structure are connected. A strain sensor is arranged in these strain-causing portions (see, for example, Patent Documents 1, 2 and 3).

特開２０１３−０９６７３５号公報Japanese Unexamined Patent Publication No. 2013-096735 特開２０１５−０４９２０９号公報Japanese Unexamined Patent Publication No. 2015-049209 特許第５６４０９０５号公報Japanese Patent No. 5640905

トルクセンサにおいて、歪センサの感度や許容トルク（最大トルク）、あるいはトルクセンサの機械的な強度を独立に設定することが困難であった。 In the torque sensor, it has been difficult to independently set the sensitivity and allowable torque (maximum torque) of the strain sensor, or the mechanical strength of the torque sensor.

本発明の実施形態は、歪センサの感度や許容トルク、あるいはトルクセンサの機械的な強度を独立に設定することが可能なトルクセンサを提供する。 An embodiment of the present invention provides a torque sensor capable of independently setting the sensitivity and allowable torque of the strain sensor or the mechanical strength of the torque sensor.

本実施形態のトルクセンサは、第１領域と、第２領域と、前記第１領域と前記第２領域を連結する複数の第３領域とを具備し、計測すべきトルクが前記第３領域を介して前記第１領域と前記第２領域間に伝達されるトルクセンサであって、前記第１領域と前記第２領域との間に設けられ、第１抵抗体が設けられた第１起歪部と、前記第１領域と前記第２領域との間で、前記第１起歪部から離れた位置に設けられ、第２抵抗体が設けられた第２起歪部と、を具備し、前記第１起歪部は、前記第１領域に設けられた第１突起と、前記第２領域に前記第１突起と対向して設けられた第２突起と、前記第１突起と前記第２突起の間に設けられ、前記第１抵抗体が配置された第１起歪体と、を具備し、前記第２起歪部は、前記第１領域に設けられた第３突起と、前記第２領域に前記第３突起と対向して設けられた第４突起と、前記第３突起と前記第４突起の間に設けられ、前記第２抵抗体が配置された第２起歪体と、を具備し、複数の前記第３領域は、第１の厚さを有し、前記第１起歪部の前記第１突起、前記第２突起、及び前記第２起歪部の前記第３突起、前記第４突起は、前記第１の厚さより薄い第２の厚さを有する。 The torque sensor of the present embodiment includes a first region, a second region, and a plurality of third regions connecting the first region and the second region, and the torque to be measured is the third region. A torque sensor transmitted between the first region and the second region via the first region, which is provided between the first region and the second region and is provided with a first resistor. A second strain-causing portion provided at a position away from the first strain-causing portion and provided with a second resistor between the first region and the second region is provided. The first strain generating portion includes a first protrusion provided in the first region, a second protrusion provided in the second region facing the first protrusion, and the first protrusion and the second protrusion. A first strain-generating body provided between the protrusions and on which the first resistor is arranged is provided, and the second strain-causing portion includes a third protrusion provided in the first region and the first strain. A fourth protrusion provided in the two regions facing the third protrusion, a second straining body provided between the third protrusion and the fourth protrusion and having the second resistor arranged therein, and The third region has a first thickness, and the first protrusion of the first strain portion, the second protrusion, and the third protrusion of the second strain portion. , The fourth protrusion has a second thickness that is thinner than the first thickness.

本実施形態に係るトルクセンサを示す平面図。The plan view which shows the torque sensor which concerns on this embodiment. 図１のＩＩ−ＩＩ線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 図１に示すトルクセンサを分解して示す斜視図。The perspective view which shows the torque sensor shown in FIG. 1 by disassembling. 図３に示すトルクセンサの組み立て状態を示す斜視図。The perspective view which shows the assembled state of the torque sensor shown in FIG. 抵抗体の一例を示す断面図。FIG. 5 is a cross-sectional view showing an example of a resistor. 図１に示すトルクセンサとロボットの関節との関係を示す斜視図。The perspective view which shows the relationship between the torque sensor shown in FIG. 1 and the joint of a robot. 図７（ａ）（ｂ）（ｃ）は、本実施形態のトルクセンサの異なる動作を説明するために示す図。7 (a), (b), and (c) are views for explaining different operations of the torque sensor of the present embodiment. 本実施形態のトルクセンサに適用されるブリッジ回路の一例を示す図。The figure which shows an example of the bridge circuit applied to the torque sensor of this embodiment. 図９（ａ）（ｂ）は、ブリッジ回路の動作を説明するために示す図。9 (a) and 9 (b) are views for explaining the operation of the bridge circuit. ブリッジ回路の異なる動作条件における出力電圧を説明するために示す図。The figure which shows to explain the output voltage under the different operating conditions of a bridge circuit.

以下、実施の形態について、図面を参照して説明する。図面において、同一部分には同一符号を付している。 Hereinafter, embodiments will be described with reference to the drawings. In the drawings, the same parts are designated by the same reference numerals.

図１、図２において、トルクセンサ１０は、第１構造体（第１領域）１１、第２構造体１２（第２領域）、複数の梁部（第３領域）１３、第１起歪部１４、第２起歪部１５を具備している。第１構造体１１、第２構造体１２、複数の梁部１３、第１起歪部１４、第２起歪部１５は、例えば金属により構成されるが、印加されるトルクに対して機械的な強度を十分に得ることができれば、金属以外の材料を使用することも可能である。 In FIGS. 1 and 2, the torque sensor 10 includes a first structure (first region) 11, a second structure 12 (second region), a plurality of beam portions (third region) 13, and a first strain generating portion. 14. It is provided with a second strain generating portion 15. The first structure 11, the second structure 12, the plurality of beam portions 13, the first strain generating portion 14, and the second strain generating portion 15 are made of, for example, metal, but are mechanically relative to the applied torque. It is also possible to use a material other than metal as long as sufficient strength can be obtained.

トルクが印加される第１構造体１１と、トルクを出力する第２構造体１２は、環状に形成され、第２構造体１２の径は、第１構造体１１の径より小さい。第２構造体１２は、第１構造体１１と同心状に配置され、第１構造体１１と第２構造体１２は、放射状に配置された複数の梁部１３と、第１起歪部１４及び第２起歪部１５により連結されている。また、第２構造体１２は、中空部１２ａを有している。 The first structure 11 to which torque is applied and the second structure 12 to output torque are formed in an annular shape, and the diameter of the second structure 12 is smaller than the diameter of the first structure 11. The second structure 12 is arranged concentrically with the first structure 11, and the first structure 11 and the second structure 12 are a plurality of beam portions 13 arranged radially and a first strain generating portion 14. And is connected by the second strain generating portion 15. Further, the second structure 12 has a hollow portion 12a.

第１起歪部１４と第２起歪部１５は、第１構造体１１及び第２構造体１２の中心（トルクの作用中心）に対して対称な位置に配置されている。 The first strain-causing portion 14 and the second strain-causing portion 15 are arranged at positions symmetrical with respect to the centers of the first structure 11 and the second structure 12 (the center of action of torque).

図２に示すように、第１起歪部１４は、第１突起１４ａと、第２突起１４ｂと、第１起歪体１６を具備している。第１突起１４ａは、第１構造体１１から突出され、第２突起１４ｂは、第２構造体１２から突出されている。第１突起１４ａと第２突起１４ｂとの相互間には、第１間隙が設けられ、第１突起１４ａと第２突起１４ｂは、第１起歪体１６により連結されている。第１起歪体１６は、後述する抵抗体としての例えば複数の歪センサ（以下、歪ゲージと称す）を具備している。 As shown in FIG. 2, the first strain generating portion 14 includes a first protrusion 14a, a second protrusion 14b, and a first strain generating body 16. The first protrusion 14a protrudes from the first structure 11, and the second protrusion 14b protrudes from the second structure 12. A first gap is provided between the first protrusion 14a and the second protrusion 14b, and the first protrusion 14a and the second protrusion 14b are connected by the first strain generating body 16. The first strain generating body 16 includes, for example, a plurality of strain sensors (hereinafter, referred to as strain gauges) as resistors described later.

第２起歪部１５は、第３突起１５ａと、第４突起１５ｂと、第２起歪体１７を具備している。第３突起１５ａは、第１構造体１１から突出され、第４突起１５ｂは、第２構造体１２から突出されている。第３突起１５ａと第４突起１５ｂとの相互間には、第２間隙が設けられ、第３突起１５ａと第４突起１５ｂは、第２起歪体１７により連結されている。第２起歪体１７は、後述する抵抗体として例えば複数の歪ゲージを具備している。 The second strain generating portion 15 includes a third protrusion 15a, a fourth protrusion 15b, and a second strain generating body 17. The third protrusion 15a protrudes from the first structure 11, and the fourth protrusion 15b protrudes from the second structure 12. A second gap is provided between the third protrusion 15a and the fourth protrusion 15b, and the third protrusion 15a and the fourth protrusion 15b are connected by the second strain generating body 17. The second strain generator 17 includes, for example, a plurality of strain gauges as resistors described later.

第１構造体１１、第２構造体１２及び梁部１３は、第１の厚さＴ１を有し、第１起歪部１４及び第２起歪部１５は、第１の厚さＴ１より薄い第２の厚さＴ２を有している。第１起歪部１４及び第２起歪部１５の剛性を得るための実質的な厚さ（第２の厚さＴ２）は、それぞれ第１起歪体１６及び第２起歪体１７の厚さに相当する。具体的には、第１の厚さＴ１が例えば１０ｍｍである場合、第２の厚さＴ１は、例えば０．７ｍｍ程度である。 The first structure 11, the second structure 12, and the beam portion 13 have a first thickness T1, and the first straining portion 14 and the second straining portion 15 are thinner than the first thickness T1. It has a second thickness T2. The actual thickness (second thickness T2) for obtaining the rigidity of the first strain-causing portion 14 and the second strain-causing portion 15 is the thickness of the first strain-causing body 16 and the second strain-causing body 17, respectively. Corresponds to. Specifically, when the first thickness T1 is, for example, 10 mm, the second thickness T1 is, for example, about 0.7 mm.

梁部１３の強度は、第１構造体１１及び第２構造体１２の厚さが等しいと仮定した場合、梁部１３の幅により規定される。複数の梁部１３の強度により、第１構造体１１に印加されたトルクに応じて、第２構造体１２に対する第１構造体１１の実質的な回転角が決定される。 The strength of the beam portion 13 is defined by the width of the beam portion 13 assuming that the thicknesses of the first structure 11 and the second structure 12 are equal. The strength of the plurality of beam portions 13 determines the substantial rotation angle of the first structure 11 with respect to the second structure 12 according to the torque applied to the first structure 11.

また、第２構造体１２に対する第１構造体１１の回転角に応じて第１起歪部１４、第２起歪部１５に発生した歪が第１起歪体１６及び第２起歪体１７に設けられた複数の歪ゲージにより検出される。 Further, the strain generated in the first strain-causing portion 14 and the second strain-causing portion 15 according to the rotation angle of the first structure 11 with respect to the second structure 12 is the strain generated in the first strain-causing body 16 and the second strain-causing body 17. It is detected by a plurality of strain gauges provided in.

第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ、第４突起１５ｂの厚さは、例えば第１の厚さＴ１より薄く、第２の厚さＴ２より厚い第３の厚さＴ３に設定されている。第１構造体１１、第２構造体１２の厚さＴ１に対する第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ、第４突起１５ｂの厚さは、変更可能である。これらの厚さＴ１、Ｔ２、Ｔ３を調整することにより、トルクセンサ１０の感度を調整することが可能である。 The thickness of the first protrusion 14a, the second protrusion 14b, the third protrusion 15a, and the fourth protrusion 15b is set to, for example, a third thickness T3 that is thinner than the first thickness T1 and thicker than the second thickness T2. Has been done. The thicknesses of the first protrusion 14a, the second protrusion 14b, the third protrusion 15a, and the fourth protrusion 15b with respect to the thickness T1 of the first structure 11 and the second structure 12 can be changed. By adjusting these thicknesses T1, T2, and T3, the sensitivity of the torque sensor 10 can be adjusted.

第１起歪部１４の第１突起１４ａと第２突起１４ｂの長さ、及び第２起歪部１５の第３突起１５ａと第４突起１５ｂの長さは、それぞれＬ１に設定され、第１突起１４ａと第２突起１４ｂとの間に設けられた第１間隙の長さと、第２起歪部１５の第３突起１５ａと第４突起１５ｂとの間に設けられた第２間隙の長さは、それぞれＬ１より短いＬ２に設定されている。さらに、第１突起１４ａと第２突起１４ｂの合計の長さ、及び第３突起１５ａと第４突起１５ｂの合計の長さ、２×Ｌ１は、複数の梁部１３のそれぞれの長さＬ３より短く設定されている（尚、図２には、第１起歪部１４側の長さＬ１、Ｌ２のみを示している）。 The lengths of the first protrusion 14a and the second protrusion 14b of the first strain-causing portion 14 and the lengths of the third protrusion 15a and the fourth protrusion 15b of the second strain-causing portion 15 are set to L1, respectively, and the first The length of the first gap provided between the protrusion 14a and the second protrusion 14b and the length of the second gap provided between the third protrusion 15a and the fourth protrusion 15b of the second strain generating portion 15. Are set to L2, which is shorter than L1 respectively. Further, the total length of the first protrusion 14a and the second protrusion 14b and the total length of the third protrusion 15a and the fourth protrusion 15b, 2 × L1, are derived from the respective lengths L3 of the plurality of beam portions 13. It is set short (in addition, FIG. 2 shows only the lengths L1 and L2 on the first strain generating portion 14 side).

これらの長さＬ１、Ｌ２、Ｌ３を調整することにより、第１構造体１１にトルクが印加された場合において、第１起歪部１４及び第２起歪部１５に発生される歪量を調整することができる。具体的には、第１間隙の長さＬ２と第２間隙の長さＬ２は、第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ及び第４突起１５ｂの長さＬ１より短く設定され、第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ及び第４突起１５ｂの長さＬ１は、複数の梁部１３の長さＬ３より短く設定されている。このため、第１構造体１１にトルクが印加された場合、第１起歪部１４及び第２起歪部１５の歪量は、梁部１３の歪量より大きくなる。このため、後述するブリッジ回路は、大きなゲインを得ることが可能である。 By adjusting these lengths L1, L2, and L3, the amount of strain generated in the first strain-causing portion 14 and the second strain-causing portion 15 when torque is applied to the first structure 11 is adjusted. can do. Specifically, the length L2 of the first gap and the length L2 of the second gap are set shorter than the length L1 of the first protrusion 14a, the second protrusion 14b, the third protrusion 15a, and the fourth protrusion 15b. The length L1 of the first protrusion 14a, the second protrusion 14b, the third protrusion 15a, and the fourth protrusion 15b is set shorter than the length L3 of the plurality of beam portions 13. Therefore, when torque is applied to the first structure 11, the strain amount of the first strain portion 14 and the second strain portion 15 becomes larger than the strain amount of the beam portion 13. Therefore, the bridge circuit described later can obtain a large gain.

また、トルクセンサ１０の許容トルク（最大トルク）及び機械的な強度は、第１起歪部１４及び第２起歪部１５とは、独立して第１構造体１１、第２構造体１２及び複数の梁部１３の例えば厚さ及び幅により設定することができる。 Further, the allowable torque (maximum torque) and mechanical strength of the torque sensor 10 are independent of the first strain-causing portion 14 and the second strain-causing portion 15, and the first structure 11, the second structure 12, and the second structure 12 It can be set by, for example, the thickness and width of the plurality of beam portions 13.

さらに、トルクセンサ１０の感度は、第１起歪体１６及び第２起歪体１７の厚さにより設定することができる。 Further, the sensitivity of the torque sensor 10 can be set by the thickness of the first strain generating body 16 and the second strain generating body 17.

図３、図４は、第１起歪部１４、第２起歪部１５を具体的に示している。第１起歪部１４は、第１起歪体１６を収容するための第１収容部１４ｃを有し、第２起歪部１５は、第２起歪体１７を収容する第２収容部１５ｃを有している。第１収容部１４ｃは、第１起歪部１４に対して第１起歪体１６を位置決めし、第２収容部１５ｃは、第２起歪部１５に対して第２起歪体１７を位置決めする。第１収容部１４ｃは、第１突起１４ａ及び第２突起１４ｂ上に設けられたほぼ枠状の突起により構成され、第２収容部１５ｃは、第３突起１５ａ及び第４突起１５ｂ上に設けられたほぼ枠状の突起により構成されている。第１収容部１４ｃは、第１突起１４ａと第２突起１４ｂとの間の間隙に対応した間隙を有し、第２収容部１５ｃは、第３突起１５ａと第４突起１５ｂとの間の間隙に対応した間隙を有している。 3 and 4 specifically show the first strain-causing portion 14 and the second strain-causing portion 15. The first strain-causing portion 14 has a first accommodating portion 14c for accommodating the first strain-causing body 16, and the second strain-causing portion 15 has a second accommodating portion 15c for accommodating the second strain-causing body 17. have. The first accommodating portion 14c positions the first strain-causing body 16 with respect to the first strain-causing portion 14, and the second accommodating portion 15c positions the second strain-causing body 17 with respect to the second strain-causing portion 15. do. The first accommodating portion 14c is composed of substantially frame-shaped projections provided on the first projection 14a and the second projection 14b, and the second accommodating portion 15c is provided on the third projection 15a and the fourth projection 15b. It is composed of almost frame-shaped protrusions. The first accommodating portion 14c has a gap corresponding to the gap between the first projection 14a and the second projection 14b, and the second accommodating portion 15c has a gap between the third projection 15a and the fourth projection 15b. It has a gap corresponding to.

図３に示すように、第１起歪体１６及び第２起歪体１７は、第１収容部１４ｃ及び第２収容部１５ｃの上方から第１収容部１４ｃ及び第２収容部１５ｃ内にそれぞれ収容される。図４に示すように、第１起歪体１６及び第２起歪体１７が第１収容部１４ｃ及び第２収容部１５ｃにそれぞれ収容された状態において、第１起歪体１６は、第１突起１４ａと第２突起１４ｂに例えば溶接により固定される。また、第２起歪体１７は、第３突起１５ａ、第４突起１５ｂに例えば溶接により固定される。第１起歪体１６及び第２起歪体１７の固定方法は、溶接に限定されるものではなく、第１起歪体１６及び第２起歪体１７に印加されるトルクに対して、十分な強度で、第１突起１４ａ乃至第４突起１５ｂに第１起歪体１６及び第２起歪体１７を固定できる方法であればよい。第１起歪体１６及び第２起歪体１７の図示せぬ配線は、絶縁部材３２（図６に示す）により覆われる。 As shown in FIG. 3, the first accommodating body 16 and the second accommodating body 17 are placed in the first accommodating portion 14c and the second accommodating portion 15c from above the first accommodating portion 14c and the second accommodating portion 15c, respectively. Be housed. As shown in FIG. 4, in a state where the first straining body 16 and the second straining body 17 are housed in the first accommodating portion 14c and the second accommodating portion 15c, respectively, the first straining body 16 is the first. It is fixed to the protrusion 14a and the second protrusion 14b by, for example, welding. Further, the second strain generating body 17 is fixed to the third protrusion 15a and the fourth protrusion 15b by welding, for example. The method of fixing the first strain-generating body 16 and the second strain-causing body 17 is not limited to welding, and is sufficient for the torque applied to the first strain-causing body 16 and the second strain-causing body 17. Any method may be used as long as it can fix the first strain-generating body 16 and the second strain-causing body 17 to the first protrusion 14a to the fourth protrusion 15b with sufficient strength. The wiring of the first strain generating body 16 and the second strain generating body 17 (not shown) is covered with an insulating member 32 (shown in FIG. 6).

図５は、第１起歪体１６及び第２起歪体１７に設けられた歪ゲージ２１の一例を示すものであり、歪ゲージ２１の端部の断面を示している。歪ゲージ２１は、例えば絶縁膜２１ａ、薄膜抵抗体（感歪膜）２１ｂ、接着膜２１ｃ、配線２１ｄ、接着膜２１ｅ、保護膜としてのガラス膜２１ｆを具備している。例えば金属製の第１起歪体１６（第２起歪体１７）上に絶縁膜２１ａが設けられ、絶縁膜２１ａ上に例えばＣｒ−Ｎ抵抗体により構成された薄膜抵抗体２１ｂが設けられる。薄膜抵抗体２１ｂは、直線状又は複数に屈曲された形状などが可能である。薄膜抵抗体２１ｂ上の端部に接着膜２１ｃを介在して、例えば銅（Ｃｕ）により構成された電極リードとしての配線２１ｄが設けられる。配線２１ｄ上には接着膜２１ｅが設けられる。絶縁膜２１ａ、薄膜抵抗体２１ｂ、及び接着膜２１ｅは、ガラス膜２１ｆにより覆われる。接着膜２１ｃは、配線２１ｄと薄膜抵抗体２１ｂとの密着性を高め、接着膜２１ｅは、配線２１ｄとガラス膜２１ｆとの密着性を高めている。接着膜２１ｃ、２１ｅは、例えばクロム（Ｃｒ）を含む膜である。歪ゲージ２１の構成は、これに限定されるものではない。 FIG. 5 shows an example of the strain gauge 21 provided on the first strain gauge 16 and the second strain gauge 17, and shows a cross section of an end portion of the strain gauge 21. The strain gauge 21 includes, for example, an insulating film 21a, a thin film resistor (distortion sensitive film) 21b, an adhesive film 21c, wiring 21d, an adhesive film 21e, and a glass film 21f as a protective film. For example, the insulating film 21a is provided on the metal first strain 16 (second strain 17), and the thin film resistor 21b composed of, for example, a Cr—N resistor is provided on the insulating film 21a. The thin film resistor 21b can have a linear shape or a shape bent in a plurality of shapes. A wiring 21d as an electrode lead made of, for example, copper (Cu) is provided at an end portion on the thin film resistor 21b with an adhesive film 21c interposed therebetween. An adhesive film 21e is provided on the wiring 21d. The insulating film 21a, the thin film resistor 21b, and the adhesive film 21e are covered with the glass film 21f. The adhesive film 21c enhances the adhesion between the wiring 21d and the thin film resistor 21b, and the adhesive film 21e enhances the adhesion between the wiring 21d and the glass film 21f. The adhesive films 21c and 21e are, for example, films containing chromium (Cr). The configuration of the strain gauge 21 is not limited to this.

第１起歪体１６及び第２起歪体１７のそれぞれは、図５に示す歪ゲージ２１を例えば２個ずつ具備し、４個の歪ゲージ２１により、後述するブリッジ回路が構成される。 Each of the first strain gauge 16 and the second strain gauge 17 includes, for example, two strain gauges 21 shown in FIG. 5, and the four strain gauges 21 constitute a bridge circuit described later.

図６は、上記トルクセンサ１０と、例えばロボットの関節の一方に設けられた減速機３０との関係を示している。トルクセンサ１０の第１構造体１１は、ボルト３１ａ、３１ｂ、３１ｃ、３１ｄにより減速機３０に取着される。減速機３０は図示せぬモータに連結されている。トルクセンサ１０の第２構造体１２には、複数の歪ゲージ２１の図示せぬリード線を覆う絶縁部材３２がボルト３１ｅ、３１ｆにより取着される。絶縁部材３２、第１起歪部１４及び第２起歪部１５は、蓋体３３により覆われる。蓋体３３は、ボルト３１ｇ、３１ｈにより第２構造体１２に取着される。さらに、第２構造体１２は、例えば図示せぬロボットの関節の他方に取着される。 FIG. 6 shows the relationship between the torque sensor 10 and the speed reducer 30 provided on one of the joints of the robot, for example. The first structure 11 of the torque sensor 10 is attached to the speed reducer 30 by bolts 31a, 31b, 31c, and 31d. The speed reducer 30 is connected to a motor (not shown). Insulating members 32 covering the lead wires (not shown) of the plurality of strain gauges 21 are attached to the second structure 12 of the torque sensor 10 by bolts 31e and 31f. The insulating member 32, the first strain generating portion 14 and the second strain generating portion 15 are covered with the lid 33. The lid 33 is attached to the second structure 12 by bolts 31g and 31h. Further, the second structure 12 is attached to, for example, the other of the joints of the robot (not shown).

図７（ａ）（ｂ）（ｃ）は、上記トルクセンサ１０の動作を示すものであり、図７（ａ）は、第１構造体１１にトルクが印加された場合を示し、図７（ｂ）は、第１構造体１１に図示Ｘ軸方向にスラスト力が印加された場合を示し、図７（ｃ）図示Ｙ軸方向に第１構造体１１にスラスト力が印加された場合を示している。 7 (a), (b), and (c) show the operation of the torque sensor 10, and FIG. 7 (a) shows a case where torque is applied to the first structure 11. FIG. 7 (a) shows the operation of the torque sensor 10. b) shows a case where a thrust force is applied to the first structure 11 in the illustrated X-axis direction, and FIG. 7C shows a case where a thrust force is applied to the first structure 11 in the illustrated Y-axis direction. ing.

図７（ａ）に示すように、第１構造体１１にトルクが印加された場合、複数の梁部１３、第１起歪部１４及び第２起歪部１５が弾性変形し、第１構造体１１は、第２構造体１２に対して回動される。第１起歪部１４及び第２起歪部１５の弾性変形に伴い、後述するブリッジ回路のバランスが崩れ、トルクが検出される。 As shown in FIG. 7A, when torque is applied to the first structure 11, the plurality of beam portions 13, the first strain generating portion 14 and the second strain generating portion 15 are elastically deformed, and the first structure is formed. The body 11 is rotated with respect to the second structure 12. With the elastic deformation of the first strain-causing portion 14 and the second strain-causing portion 15, the balance of the bridge circuit described later is lost, and torque is detected.

図７（ｂ）に示すように、第１構造体１１にＸ軸方向にスラスト力が印加された場合、複数の梁部１３、第１起歪部１４及び第２起歪部１５が弾性変形し、第１構造体１１は、第２構造体１２に対してＸ軸方向に移動される。第１起歪部１４及び第２起歪部１５の弾性変形に伴いブリッジ回路のバランスが崩れる。しかし、後述するようにトルク、及びスラスト力は検出されない。 As shown in FIG. 7B, when a thrust force is applied to the first structure 11 in the X-axis direction, the plurality of beam portions 13, the first strain generating portion 14 and the second strain generating portion 15 are elastically deformed. Then, the first structure 11 is moved in the X-axis direction with respect to the second structure 12. The balance of the bridge circuit is lost due to the elastic deformation of the first strain-causing portion 14 and the second strain-causing portion 15. However, as will be described later, torque and thrust force are not detected.

図７（ｃ）に示すように、第１構造体１１に図示Ｙ軸方向にスラスト力が印加された場合、複数の梁部１３、第１起歪部１４及び第２起歪部１５が弾性変形し、第１構造体１１は、第２構造体１２に対してＹ軸方向に移動される。第１起歪部１４及び第２起歪部１５の弾性変形に伴いブリッジ回路のバランスが崩れる。しかし、後述するようにトルク、及びスラスト力は検出されない。 As shown in FIG. 7 (c), when a thrust force is applied to the first structure 11 in the Y-axis direction shown in the drawing, the plurality of beam portions 13, the first strain generating portion 14 and the second strain generating portion 15 are elastic. It is deformed and the first structure 11 is moved in the Y-axis direction with respect to the second structure 12. The balance of the bridge circuit is lost due to the elastic deformation of the first strain-causing portion 14 and the second strain-causing portion 15. However, as will be described later, torque and thrust force are not detected.

図８は、本トルクセンサ１０に設けられたブリッジ回路４０を概略的に示している。前述したように、第１起歪部１４の第１起歪体１６、及び第２起歪部１５の第２起歪体１７は、それぞれ２つの歪ゲージ２１を具備している。具体的には、第１起歪体１６は、歪ゲージ２１−１、２１−２を具備し、第２起歪体１７は、歪ゲージ２１−３、２１−４を具備している。第１起歪体１６と第２起歪体１７は、第１構造体１１及び第２構造体１２の中心に対して対称に配置され、歪ゲージ２１−１、２１−２と、歪ゲージ２１−３、２１−４も第１構造体１１及び第２構造体１２の中心に対して対称に配置される。 FIG. 8 schematically shows a bridge circuit 40 provided in the torque sensor 10. As described above, the first straining body 16 of the first straining unit 14 and the second straining body 17 of the second straining unit 15 each include two strain gauges 21. Specifically, the first strain generating body 16 includes strain gauges 21-1 and 21-2, and the second strain generating body 17 includes strain gauges 21-3 and 21-4. The first strain gauge 16 and the second strain generator 17 are arranged symmetrically with respect to the centers of the first structure 11 and the second structure 12, and the strain gauges 21-1 and 21-2 and the strain gauge 21 are arranged. -3 and 21-4 are also arranged symmetrically with respect to the centers of the first structure 11 and the second structure 12.

ブリッジ回路４０において、歪ゲージ２１−１と歪ゲージ２１−３は直列接続され、歪ゲージ２１−２と歪ゲージ２１−４は直列接続される。直列接続された歪ゲージ２１−１、２１−３は、直列接続された歪ゲージ２１−２、２１−４と並列接続される。歪ゲージ２１−２と歪ゲージ２１−４の接続点に電源Ｖｏ、例えば５Ｖが供給され、歪ゲージ２１−１と歪ゲージ２１−３の接続点は、例えば接地される。歪ゲージ２１−１と歪ゲージ２１−２の接続点から出力電圧Ｖout+が出力され、歪ゲージ２１−３と歪ゲージ２１−４の接続点から出力電圧Ｖout-が出力される。出力電圧Ｖout+及び出力電圧Ｖout-から式（１）で示すトルクセンサ１０の出力電圧Ｖoutが得られる。 In the bridge circuit 40, the strain gauge 21-1 and the strain gauge 21-3 are connected in series, and the strain gauge 21-2 and the strain gauge 21-4 are connected in series. The strain gauges 21-1 and 21-3 connected in series are connected in parallel with the strain gauges 21-2 and 21-4 connected in series. A power supply Vo, for example 5V, is supplied to the connection point between the strain gauge 21-2 and the strain gauge 21-4, and the connection point between the strain gauge 21-1 and the strain gauge 21-3 is grounded, for example. The output voltage Vout + is output from the connection point between the strain gauge 21-1 and the strain gauge 21-2, and the output voltage Vout- is output from the connection point between the strain gauge 21-3 and the strain gauge 21-4. From the output voltage Vout + and the output voltage Vout-, the output voltage Vout of the torque sensor 10 represented by the equation (1) can be obtained.

Ｖout＝（Ｖout+−Ｖout-）
＝（Ｒ１／（Ｒ１＋Ｒ２）−Ｒ３／（Ｒ３＋Ｒ４））・Ｖｏ …（１）
ここで、
Ｒ１は、歪ゲージ２１−１の抵抗値
Ｒ２は、歪ゲージ２１−２の抵抗値
Ｒ３は、歪ゲージ２１−３の抵抗値
Ｒ４は、歪ゲージ２１−４の抵抗値
であり、トルクセンサ１０にトルクが印加されていない状態において、Ｒ１＝Ｒ２＝Ｒ３＝Ｒ４＝Ｒである。 Vout = (Vout + -Vout-)
= (R1 / (R1 + R2) -R3 / (R3 + R4)) · Vo ... (1)
here,
R1 is the resistance value of the strain gauge 21-1 R2 is the resistance value of the strain gauge 21-2 R3 is the resistance value of the strain gauge 21-3 R4 is the resistance value of the strain gauge 21-4, and the torque sensor 10 R1 = R2 = R3 = R4 = R in a state where no torque is applied to.

図９（ａ）は、図７（ａ）に示すように、トルクセンサ１０にトルクが印加された場合におけるブリッジ回路４０の抵抗値の変化を示し、図９（ｂ）は、図７（ｂ）に示すように、トルクセンサ１０に例えばＸ軸方向のスラスト力が印加された場合におけるブリッジ回路４０の抵抗値の変化を示している。図９（ａ）（ｂ）において、ΔＲは、抵抗値の変化の値である。 9 (a) shows the change in the resistance value of the bridge circuit 40 when torque is applied to the torque sensor 10, as shown in FIG. 7 (a), and FIG. 9 (b) shows FIG. 7 (b). ), For example, changes in the resistance value of the bridge circuit 40 when a thrust force in the X-axis direction is applied to the torque sensor 10. In FIGS. 9A and 9B, ΔR is a value of change in resistance value.

図１０は、（１）乃至（６）の異なる条件におけるトルクセンサ１０の出力電圧Ｖoutを式（１）から求めた結果を示すものである。 FIG. 10 shows the result of obtaining the output voltage Vout of the torque sensor 10 under the different conditions of (1) to (6) from the equation (1).

図１０において、
（１）は、トルクセンサ１０にトルク及びスラスト力のいずれもが印加されていない場合
（２）は、トルクセンサ１０にトルクを印加した場合
（３）は、トルクセンサ１０にスラスト力を印加した場合
（４）は、トルクセンサ１０の歪ゲージ２１−１、２１−２に温度変化ΔＴを与えた場合
（５）は、トルクセンサ１０にトルクを印加し、歪ゲージ２１−１、２１−２に温度変化ΔＴを与えた場合
（６）は、トルクセンサ１０にスラスト力を印加し、歪ゲージ２１−１、２１−２に温度変化ΔＴを与えた場合
図１０において、Ｒ・（１＋α・ΔＴ）は、抵抗の温度係数がα、温度変化ΔＴの時の抵抗値を示している。 In FIG.
In (1), when neither torque nor thrust force is applied to the torque sensor 10, when torque is applied to the torque sensor 10 in (2), thrust force is applied to the torque sensor 10 in (3). In the case (4), when the temperature change ΔT is applied to the strain gauges 21-1 and 21-2 of the torque sensor 10, torque is applied to the torque sensor 10 and the strain gauges 21-1 and 21-2 are applied. When the temperature change ΔT is applied to (6), a thrust force is applied to the torque sensor 10 and the temperature change ΔT is applied to the strain gauges 21-1 and 21-2. ) Indicates the resistance value when the temperature coefficient of the resistance is α and the temperature change ΔT.

（１）（３）（４）（６）に示す条件の場合、トルクセンサ１０の出力電圧Ｖoutは、いずれも０Ｖである。すなわち、第１構造体１１、第２構造体１２にスラスト力が印加された場合、及び／又は歪ゲージ２１−１、２１−２に温度変化を与えられた場合、スラスト力や温度変化が相殺され、トルクセンサ１０の出力電圧Ｖoutは、いずれも０Ｖとなる。 Under the conditions shown in (1), (3), (4), and (6), the output voltage Vout of the torque sensor 10 is 0V. That is, when a thrust force is applied to the first structure 11 and the second structure 12, and / or when a temperature change is applied to the strain gauges 21-1 and 21-2, the thrust force and the temperature change cancel each other out. The output voltage Vout of the torque sensor 10 is 0V.

また、（２）に示すトルクセンサ１０にトルクを印加した場合、及び（５）に示すトルクセンサ１０にトルクを印加し、歪ゲージ２１−１、２１−２に温度変化を与えた場合、トルクセンサ１０の出力電圧Ｖoutとして、−ΔＲ／Ｒ・Ｖｏが出力される。この出力電圧Ｖoutは、抵抗の温度係数αや温度変化ΔＴを含まない値である。したがって、上記トルクセンサ１０は、スラスト力や温度変化を相殺してトルクのみを検出することが可能である。 Further, when a torque is applied to the torque sensor 10 shown in (2) and when a torque is applied to the torque sensor 10 shown in (5) to change the temperature of the strain gauges 21-1 and 21-2, the torque is applied. -ΔR / R · Vo is output as the output voltage Vout of the sensor 10. This output voltage Vout is a value that does not include the temperature coefficient α of the resistor and the temperature change ΔT. Therefore, the torque sensor 10 can detect only the torque by canceling the thrust force and the temperature change.

（実施形態の効果）
上記本実施形態によれば、第１構造体１１と第２構造体１２は、複数の梁部１３によって連結され、さらに、第１構造体１１と第２構造体１２は、第１起歪部１４及び第２起歪部１５により連結されている。複数の梁部１３の厚さＴ１は、第１起歪部１４及び第２起歪部１５の剛性を得るための実質的な厚さ（第１起歪体１６及び第２起歪体１７の厚さ）Ｔ２より厚く設定されている。このため、トルクセンサ１０の許容トルクやトルクセンサ１０の機械的な強度は、第１構造体１１、第２構造体１２及び梁部１３により規定され、第１構造体１１、第２構造体１２及び梁部１３の厚さＴ１を変えたり、梁部１３の数を変えたりすることにより、必要に応じて自由に設定することが可能である。 (Effect of embodiment)
According to the present embodiment, the first structure 11 and the second structure 12 are connected by a plurality of beam portions 13, and the first structure 11 and the second structure 12 are formed by a first strain generating portion. It is connected by 14 and the second strain generating portion 15. The thickness T1 of the plurality of beam portions 13 is a substantial thickness for obtaining the rigidity of the first strain generating portion 14 and the second strain generating portion 15 (of the first straining body 16 and the second straining body 17). Thickness) It is set thicker than T2. Therefore, the permissible torque of the torque sensor 10 and the mechanical strength of the torque sensor 10 are defined by the first structure 11, the second structure 12, and the beam portion 13, and the first structure 11 and the second structure 12 are defined. By changing the thickness T1 of the beam portion 13 and changing the number of the beam portions 13, it can be freely set as needed.

また、第１起歪部１４は、第１構造体１１、第２構造体１２にそれぞれ設けられた第１突起１４ａ及び第２突起１４ｂと、第１突起１４ａと第２突起１４ｂを連結する歪ゲージ２１−１、２１−２を有する第１起歪体１６により構成され、第２起歪部１５は、第１構造体１１、第２構造体１２にそれぞれ設けられた第３突起１５ａ及び第４突起１５ｂと、第３突起１５ａと第４突起１５ｂを連結する歪ゲージ２１−３、２１−４が設けられた第２起歪体１７により構成されている。第１起歪体１６及び第２起歪体１７は、第１構造体１１、第２構造体１２、複数の梁部１３、第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ及び第４突起１５ｂから独立しているため、第１起歪体１６及び第２起歪体１７の形状や厚さ及び／又は幅を含むサイズを自由に設定することが可能である。 Further, the first strain generating portion 14 is a strain that connects the first protrusion 14a and the second protrusion 14b provided on the first structure 11 and the second structure 12, respectively, and the first protrusion 14a and the second protrusion 14b. It is composed of a first strain-generating body 16 having gauges 21-1 and 21-2, and the second strain-causing portion 15 is a third protrusion 15a and a third protrusion 15a provided on the first structure 11 and the second structure 12, respectively. It is composed of four protrusions 15b and a second strain generating body 17 provided with strain gauges 21-3 and 21-4 for connecting the third protrusion 15a and the fourth protrusion 15b. The first strain 16 and the second strain 17 include a first structure 11, a second structure 12, a plurality of beam portions 13, a first protrusion 14a, a second protrusion 14b, a third protrusion 15a, and a fourth. Since it is independent of the protrusion 15b, it is possible to freely set the size including the shape, thickness and / or width of the first strain generating body 16 and the second strain generating body 17.

さらに、第１起歪体１６及び第２起歪体１７が第１構造体１１、第２構造体１２、複数の梁部１３、第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ及び第４突起１５ｂから独立しているため、第１起歪体１６及び第２起歪体１７に設けられる歪ゲージ２１−１、２１−２、２１−３、２１−４の感度やサイズも、第１起歪体１６及び第２起歪体１７のサイズに応じて設定することが可能である。したがって、歪ゲージ２１−１、２１−２、２１−３、２１−４の感度やサイズを容易に設定することが可能である。 Further, the first strain-generating body 16 and the second strain-causing body 17 are the first structure 11, the second structure 12, a plurality of beam portions 13, the first protrusion 14a, the second protrusion 14b, the third protrusion 15a, and the first. Since it is independent of the four protrusions 15b, the sensitivity and size of the strain gauges 21-1, 21-2, 21-3, and 21-4 provided on the first strain 16 and the second strain 17 are also the first. It can be set according to the size of the 1st strain 16 and the 2nd strain 17. Therefore, the sensitivity and size of the strain gauges 21-1, 21-2, 21-3, and 21-4 can be easily set.

また、第１起歪部１４の第１突起１４ａと第２突起１４ｂとの間に設けられた第１間隙の長さＬ１と、第２起歪部１５の第３突起１５ａと第４突起１５ｂとの間に設けられた第２間隙の長さＬ１は、第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ及び第４突起１５ｂの長さＬ２より短く設定され、第１突起１４ａ、第２突起１４ｂ、第３突起１５ａ及び第４突起１５ｂの長さＬ２は、複数の梁部１３の長さＬ３より短く設定されている。このため、第１起歪部１４及び第２起歪部１５は、梁部１３より大きな歪を発生することができる。 Further, the length L1 of the first gap provided between the first protrusion 14a and the second protrusion 14b of the first straining portion 14, and the third protrusion 15a and the fourth protrusion 15b of the second straining portion 15 The length L1 of the second gap provided between the first protrusion 14a, the second protrusion 14b, the third protrusion 15a, and the fourth protrusion 15b is set to be shorter than the length L2 of the first protrusion 14a, the first protrusion 14a, and the fourth protrusion 15b. The length L2 of the two protrusions 14b, the third protrusion 15a, and the fourth protrusion 15b is set shorter than the length L3 of the plurality of beam portions 13. Therefore, the first strain-causing portion 14 and the second strain-causing portion 15 can generate a strain larger than that of the beam portion 13.

しかも、第１起歪体１６及び第２起歪体１７は、梁部１３と比較して大きな歪を発生することができるため、第１起歪体１６及び第２起歪体１７に設けられた歪ゲージ２１−１、２１−２、２１−３、２１−４のゲインを大きくすることが可能である。したがって、ノイズに強く、トルクの検出精度を向上させることが可能である。 Moreover, since the first strain-causing body 16 and the second strain-causing body 17 can generate a large strain as compared with the beam portion 13, they are provided in the first strain-generating body 16 and the second strain-causing body 17. It is possible to increase the gain of the strain gauges 21-1, 21-2, 21-3, and 21-4. Therefore, it is resistant to noise and can improve the torque detection accuracy.

また、第１起歪体１６は、第１突起１４ａ及び第２突起１４ｂと別体に構成され、第２起歪体１７は、第３突起１５ａ及び第４突起１５ｂと別体に構成されている。このため、第１起歪体１６及び第２起歪体１７に微細な歪ゲージ２１−１、２１−２、２１−３、２１−４を容易に形成することができる。 Further, the first strain generating body 16 is configured separately from the first projection 14a and the second projection 14b, and the second strain generating body 17 is configured separately from the third projection 15a and the fourth projection 15b. There is. Therefore, fine strain gauges 21-1, 21-2, 21-3, and 21-4 can be easily formed on the first strain 16 and the second strain 17.

さらに、歪ゲージ２１−１、２１−２が設けられた第１起歪体１６を第１起歪部１４の第１突起１４ａ及び第２突起１４ｂに取着し、歪ゲージ２１−３、２１−４が設けられた第２起歪体１７を第２起歪部１５の第３突起１５ａ及び第４突起１５ｂ取着することによりトルクセンサ１０を構成できる。このため、トルクセンサ１０の製造が容易である。 Further, the first strain gauge 16 provided with the strain gauges 21-1 and 21-2 is attached to the first protrusion 14a and the second protrusion 14b of the first strain gauge 14, and the strain gauges 21-3 and 21 The torque sensor 10 can be configured by attaching the third protrusion 15a and the fourth protrusion 15b of the second strain 15 to the second strain 17 provided with -4. Therefore, the torque sensor 10 can be easily manufactured.

また、第１起歪体１６が設けられた第１起歪部１４と、第２起歪体１７が設けられた第２起歪部１５は、第１構造体１１及び第２構造体１２の中心に対して対称な位置に配置されている。このため、スラスト力を相殺でき、トルクのみを検出することが可能である。 Further, the first strain-causing portion 14 provided with the first strain-causing body 16 and the second strain-causing portion 15 provided with the second strain-causing body 17 are the first structure 11 and the second structure 12. It is arranged symmetrically with respect to the center. Therefore, the thrust force can be offset and only the torque can be detected.

さらに、第１起歪体１６に一対の歪ゲージ２１−１、２１−２が設けられ、第２起歪体１７に一対の歪ゲージ２１−３、２１−４が設けられ、これら歪ゲージ２１−１、２１−２、２１−３、２１−４によりブリッジ回路４０が構成されている。このため、歪ゲージ２１−１、２１−２、２１−３、２１−４の温度係数の影響を相殺することが可能である。 Further, the first strain gauge 16 is provided with a pair of strain gauges 21-1 and 21-2, and the second strain gauge 17 is provided with a pair of strain gauges 21-3 and 21-4, and these strain gauges 21 are provided. The bridge circuit 40 is composed of -1, 21-2, 21-3, and 21-4. Therefore, it is possible to cancel the influence of the temperature coefficients of the strain gauges 21-1, 21-2, 21-3, and 21-4.

また、同心状に配置された第１構造体１１及び第２構造体１２において、第２構造体１２は、中空部１２ａを有している。このため、中空部１２ａに複数の歪ゲージの配線やロボットの制御に必要な配線を通すことが可能であり、スペースの有効利用が可能である。 Further, in the first structure 11 and the second structure 12 arranged concentrically, the second structure 12 has a hollow portion 12a. Therefore, it is possible to pass the wiring of a plurality of strain gauges and the wiring necessary for controlling the robot through the hollow portion 12a, and the space can be effectively used.

尚、本実施形態において、第１構造体１１及び第２構造体１２は同心状に配置され、第１構造体１１と第２構造体１２が複数の梁部１３により連結されていた。しかし、これに限定されるものではなく、次のような構成とすることも可能である。 In the present embodiment, the first structure 11 and the second structure 12 are arranged concentrically, and the first structure 11 and the second structure 12 are connected by a plurality of beam portions 13. However, the present invention is not limited to this, and the following configuration is also possible.

例えば第１構造体及び第２構造体を直線状として第１構造体と第２構造体を平行に配置し、複数の梁部により第１構造体と第２構造体を連結し、さらに、第１構造体と第２構造体の長手方向中央部に第１構造体と第２構造体を連結する抵抗体が設けられた起歪体を設けた第１センサ部と、第１センサ部と同一構成の第２センサ部を用意する。第１センサ部の第２構造体と第２センサ部の第２構造体の長手方向中央部がトルクの作用中心から等距離で、第１センサ部と第２センサ部が互いに平行にとなるような位置に第１センサ部と第２センサ部を配置する。すなわち、第１センサ部の起歪体と第２センサ部の起歪体をトルクの作用中心に対して対称の位置に配置する。この構成によっても、上記実施形態と同様の効果を得ることが可能である。 For example, the first structure and the second structure are made linear, the first structure and the second structure are arranged in parallel, the first structure and the second structure are connected by a plurality of beam portions, and further, the first structure is connected. The same as the first sensor unit and the first sensor unit provided with a strain generating body provided with a resistor for connecting the first structure and the second structure in the central portion of the first structure and the second structure in the longitudinal direction. Prepare the second sensor unit of the configuration. The second structure of the first sensor part and the central part of the second structure of the second sensor part in the longitudinal direction are equidistant from the center of action of torque, and the first sensor part and the second sensor part are parallel to each other. The first sensor unit and the second sensor unit are arranged at various positions. That is, the strain-causing body of the first sensor unit and the strain-causing body of the second sensor unit are arranged at positions symmetrical with respect to the center of action of the torque. With this configuration, it is possible to obtain the same effect as that of the above embodiment.

その他、本発明は上記各実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、上記各実施形態に開示されている複数の構成要素の適宜な組み合わせにより、種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。さらに、異なる実施形態にわたる構成要素を適宜組み合わせてもよい。 In addition, the present invention is not limited to each of the above embodiments as it is, and at the implementation stage, the components can be modified and embodied within a range that does not deviate from the gist thereof. In addition, various inventions can be formed by an appropriate combination of the plurality of components disclosed in each of the above embodiments. For example, some components may be removed from all the components shown in the embodiments. In addition, components across different embodiments may be combined as appropriate.

１０…トルクセンサ、１１…第１構造体、１２…第２構造体、１３…梁部、１４…第１起歪部、１４ａ…第１突起、１４ｂ…第２突起、１５…第２起歪部、１５ａ…第３突起、１５ｂ…第４突起、１６…第１起歪体、１７…第２起歪体、２１、２１−１、２１−２、２１−３、２１−４…歪ゲージ。
10 ... Torque sensor, 11 ... 1st structure, 12 ... 2nd structure, 13 ... Beam part, 14 ... 1st distortion part, 14a ... 1st protrusion, 14b ... 2nd protrusion, 15 ... 2nd distortion Part, 15a ... 3rd protrusion, 15b ... 4th protrusion, 16 ... 1st strain generator, 17 ... 2nd strain generator, 21, 21-1, 21-2, 21-3, 21-4 ... strain gauge ..

Claims

A first region, a second region, and a plurality of third regions connecting the first region and the second region are provided, and the torque to be measured is the first region and the said via the third region. A torque sensor transmitted between the second regions
A first strain generating portion provided between the first region and the second region and provided with a first resistor,
A second straining portion provided between the first region and the second region at a position away from the first straining portion and provided with a second resistor, and a second straining portion.
Equipped with
The first strain generating portion is
With the first protrusion provided in the first region,
A second protrusion provided in the second region so as to face the first protrusion,
A first strain-generating body provided between the first protrusion and the second protrusion and on which the first resistor is arranged is provided.
The second strain generating portion is
With the third protrusion provided in the first region,
A fourth protrusion provided in the second region so as to face the third protrusion,
A second strain-generating body provided between the third protrusion and the fourth protrusion and on which the second resistor is arranged is provided.
The plurality of third regions have a first thickness, and the first protrusion, the second protrusion, and the third protrusion of the second strain portion, and the fourth protrusion of the first strain portion. A torque sensor characterized in that the protrusion has a second thickness thinner than the first thickness.

The first aspect of claim 1 is characterized in that the first strain-causing portion and the second strain-causing portion are arranged at positions symmetrical with respect to the center of action of the torque in the first region and the second region. Torque sensor.

The torque according to claim 1, wherein the first strain-generating body and the second strain-causing body have a third thickness, and the third thickness is thinner than the second thickness. Sensor.

The first resistor provided on the first strain gauge includes a first strain gauge and a second strain gauge, and the second resistor provided on the second strain gauge is a third strain gauge. The torque sensor according to claim 3, further comprising a fourth strain gauge and a bridge circuit composed of the first strain gauge, the second strain gauge, the third strain gauge, and the fourth strain gauge.

A claim, wherein the total length of the first protrusion and the second protrusion and the total length of the third protrusion and the fourth protrusion are shorter than the length of the plurality of third regions, respectively. 3. The torque sensor according to 3.

The torque sensor according to claim 1, wherein the first region and the second region are annular, and the second region includes a hollow portion.

The length between the first protrusion and the second protrusion and the length between the third protrusion and the fourth protrusion are the first protrusion, the second protrusion, the third protrusion, and the said. The torque sensor according to claim 5, wherein the torque sensor is shorter than the length of each of the fourth protrusions.