JP6941405B2 - Dividing method - Google Patents

Description

The present invention relates to a dividing method for dividing a plate-shaped workpiece and a dividing device used in this dividing method.

In order to divide a plate-shaped workpiece (work) represented by a wafer into a plurality of chips, a transmissive laser beam is focused inside the workpiece and modified by multiphoton absorption. A method of forming a modified layer (modified region) is known (see, for example, Patent Document 1). Since the modified layer is more brittle than other regions, the modified layer is formed along the planned division line (street) and then a force is applied to the workpiece to be processed starting from this modified layer. You can divide things into multiple chips.

When applying force to the work piece on which the modified layer is formed, for example, a method of attaching an stretchable expanding sheet (expanding tape) to the work piece to expand it is adopted (for example, Patent Document 2). reference). In this method, usually, before irradiating a laser beam to form a modified layer on a work piece, an expand sheet is attached to the work piece, and then a modified layer is formed and then the expanded sheet is expanded. The work piece is divided into a plurality of chips.

Japanese Unexamined Patent Publication No. 2002-192370 Japanese Unexamined Patent Publication No. 2010-206136

However, in the method of expanding the expanded sheet as described above, since the expanded sheet after use cannot be used again, the cost required for manufacturing the chip tends to be high. In particular, a high-performance expanded sheet in which the adhesive material does not easily remain on the chip is expensive, and therefore, using such an expanded sheet also increases the cost required for manufacturing the chip.

The present invention has been made in view of such problems, and an object of the present invention is a division method capable of dividing a plate-shaped workpiece without using an expand sheet, and a division device used in this division method. Is to provide.

According to one aspect of the present invention, the starting point of division along a plurality of first planned division lines extending in the first direction and a plurality of second planned division lines extending in the second direction intersecting the first direction. a plate-like workpiece which start region is formed to be along the said first dividing line and the second dividing line a dividing method for dividing into a plurality of small pieces,該被a force of static electricity workpiece using a long plurality of electrostatic attraction member in a predetermined direction to adsorb, first adsorbing multiple regions of the lower surface side of the workpiece which is defined by a plurality of first dividing lines respectively After performing the electrostatic attraction step and the first electrostatic attraction step, by applying a force to move each electrostatic attraction member perpendicular to the first direction and relatively away from each other. the force imparted to the workpiece through the respective electrostatic adsorption member, a first dividing step of split the workpiece along all of the first dividing lines, a first dividing step performed After that, a second electrostatic adsorption step of adsorbing a plurality of regions on the lower surface side of the work piece, which are partitioned by the plurality of second division scheduled lines, using the plurality of the electrostatic adsorption members, and the said. After performing the second electrostatic attraction step, by applying a force to move each electrostatic attraction member perpendicular to the second direction and relative to each other in a direction away from each other, the electrostatic attraction member is interposed. A division method including a second division step of applying a force to the work piece and dividing the work piece along all the second planned division lines is provided.

In the dividing method according to one aspect of the present invention, a plurality of regions on the lower surface side of the workpiece corresponding to each small piece after division are used by using a plurality of electrostatic adsorption members that attract the workpiece by the force of static electricity. Since the workpiece is divided into a plurality of small pieces by applying a force that attracts each of the electrostatic adsorption members and relatively moves each electrostatic attraction member in a direction away from each other, the workpiece is divided into a plurality of small pieces. There is no need to use an expanding sheet. Therefore, according to the dividing method according to one aspect of the present invention, the plate-shaped workpiece can be divided without using the expanding sheet.

Further, the dividing device according to another aspect of the present invention has a suction surface for adsorbing a plurality of regions on the lower surface side of the work piece corresponding to each small piece after division, and a predetermined division line extends. A plurality of electrostatic adsorption members arranged in a direction perpendicular to the direction, a power supply unit that applies a voltage to each of the plurality of electrostatic adsorption members, and a plurality of electrostatic adsorption members perpendicular to a predetermined direction. Moreover, since it is provided with an imparting mechanism that imparts a force for relatively moving in a direction away from each other, the above-mentioned division method can be appropriately performed using this division device.

It is a perspective view which shows the structural example of the division apparatus schematically. FIG. 2A is a cross-sectional view schematically showing a part of the dividing device, and FIG. 2B is an enlarged cross-sectional view showing a part of FIG. 2A. It is a perspective view which shows the structural example of the workpiece schematically. It is a perspective view for demonstrating the carry-in step. It is a perspective view for demonstrating the 1st electrostatic adsorption step. FIG. 6A is a cross-sectional view for explaining the first electrostatic adsorption step, and FIG. 6B is a cross-sectional view for explaining the first division step.

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing a configuration example of a dividing device 2 used in the dividing method of the present embodiment. FIG. 2A is a cross-sectional view schematically showing a part of the dividing device 2, and FIG. 2B is an enlarged cross-sectional view showing a part of FIG. 2A. Further, FIG. 3 is a perspective view schematically showing a configuration example of the workpiece 11 to be divided by the division method of the present embodiment.

As shown in FIG. 3, the workpiece 11 to be divided in the present embodiment is, for example, silicon (Si), gallium arsenide (GaAs), indium phosphide (InP), gallium nitride (GaN), silicon carbide ( SiC) or the like of the semiconductor, sapphire _{(Al 2 O} 3), soda glass, borosilicate glass, a dielectric such as quartz glass (insulator), or lithium tantalate (LiTa _3), lithium niobate (LiNb ₃₎ or the like It is a disk-shaped wafer (base) made of a ferroelectric substance (ferroelectric crystal).

The surface 11a side of the workpiece 11 is divided into a plurality of regions 15 by a plurality of intersecting planned division lines (streets) 13. In each region 15, IC (Integrated Circuit), MEMS (Micro Electro Mechanical Systems), LED (Light Emitting Diode), LD (Laser Diode), photodiode (Photodiode), SAW (Surface Acoustic Wave), if necessary. Devices such as filters and BAW (Bulk Acoustic Wave) filters are formed.

By dividing the workpiece 11 along the scheduled division line 13, a plurality of chips can be obtained. Specifically, when the workpiece 11 is a silicon wafer, for example, a chip that functions as a memory, a sensor, or the like can be obtained. When the workpiece 11 is a gallium arsenide substrate, an indium phosphide substrate, or a gallium nitride substrate, for example, a chip that functions as a light emitting element, a light receiving element, or the like can be obtained.

When the workpiece 11 is a silicon carbide substrate, for example, a chip that functions as a power device or the like can be obtained. When the workpiece 11 is a sapphire substrate, for example, a chip that functions as a light emitting element or the like can be obtained. When the workpiece 11 is a glass substrate made of soda glass, borosilicate glass, quartz glass, or the like, for example, a chip that functions as an optical component or a cover member (cover glass) can be obtained.

When the workpiece 11 is a ferroelectric substrate (ferroelectric crystal substrate) made of a ferroelectric substance such as lithium tantalate or lithium niobate, for example, a chip that functions as a filter, an actuator, or the like can be obtained. There are no restrictions on the material, shape, structure, size, thickness, etc. of the workpiece 11. Similarly, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the devices formed in the region 15. No device may be formed in the region 15.

A modified layer (starting point region) 17 serving as a starting point at the time of division is formed inside the workpiece 11. The modified layer 17 is formed along the planned division line 13 by, for example, condensing a laser beam having a wavelength exhibiting transparency with respect to the workpiece 11, and is compared with other regions of the workpiece 11. brittle. Instead of the modified layer 17, a groove (starting point region) or the like that serves as a starting point at the time of division may be formed by a method of half-cutting the workpiece 11 with a cutting blade or a laser beam.

In the present embodiment, the workpiece 11 is divided by the dividing device 2. As shown in FIGS. 1, 2 (A) and 2 (B), the dividing device 2 includes a plurality of electrostatic adsorption members 4 arranged at substantially equal intervals. Each electrostatic adsorption member 4 is formed in a rectangular parallelepiped shape (flat plate shape or rod shape) long in a predetermined direction, and the upper surface (adsorption surface) 4a side thereof is the lower surface side (for example, the back surface 11b side) of the workpiece 11. Adsorbs and holds.

The length of the upper surface 4a of the electrostatic adsorption member 4 (the length along the predetermined direction described above) is, for example, longer than the diameter of the workpiece 11. On the other hand, the width of the upper surface 4a of the electrostatic adsorption member 4 (the length in the direction perpendicular to the predetermined direction described above) is narrower than the distance between the two adjacent lines to be divided in the workpiece 11. .. Therefore, the area between the two adjacent lines 13 to be divided (the area corresponding to the small pieces after division) of the workpiece 11 can be attracted and held by the electrostatic adsorption member 4.

On the lower surface 4b of each electrostatic adsorption member 4, two strip-shaped elastic sheets (two sheets) extending in a direction perpendicular to the predetermined direction (that is, the longitudinal direction of each electrostatic adsorption member 4) described above (that is, the longitudinal direction of each electrostatic adsorption member 4). The applying mechanism) 6a and 6b are fixed by the adhesive 8 (FIG. 2B). Specifically, one elastic sheet 6a is fixed to one end side in the longitudinal direction of each electrostatic adsorption member 4.

Further, the other elastic sheet 6b is fixed to the other end side of each electrostatic adsorption member 4 in the longitudinal direction. Each elastic sheet 6a, 6b is made of a highly elastic material such as rubber and has a predetermined elasticity. The two elastic sheets 6a and 6b connect the electrostatic adsorption members 4 in a state of being arranged in a direction perpendicular to the longitudinal direction thereof.

However, there are no particular restrictions on the material, structure, quantity, arrangement, etc. of the elastic sheets 6a and 6b. For example, woven fabrics, knitted fabrics, and the like made of elastic or non-stretchable fibers may be used as the elastic sheets 6a and 6b. Further, in the present embodiment, a plurality of electrostatic adsorption members 4 are connected by two elastic sheets 6a and 6b, but one (one) or three (three) or more elastic sheets are used. It is also possible to connect a plurality of electrostatic adsorption members 4.

One end side of each of the elastic sheets 6a and 6b is fixed to a cylindrical (cylindrical) roller (giving mechanism) 10a having a rotation axis substantially parallel to the longitudinal direction of the electrostatic suction member 4. The roller 10a is connected to a rotation drive source (giving mechanism) 12a such as a motor, and rotates around a rotation shaft by a force generated by the rotation drive source 12a.

Similarly, the other end side of each of the elastic sheets 6a and 6b is fixed to a cylindrical (cylindrical) roller (giving mechanism) 10b having a rotation axis substantially parallel to the longitudinal direction of each electrostatic adsorption member 4. .. The roller 10b is connected to a rotation drive source (giving mechanism) 12b of a motor or the like, and rotates around a rotation shaft by a force generated by the rotation drive source 12b.

By rotating the rollers 10a and 10b with the rotation drive sources 12a and 12b, the elastic sheets 6a and 6b can be wound up by the rollers 10a and 10b, and the elastic sheets 6a and 6b can be unwound from the rollers 10a and 10b to have this elasticity. The tension applied to the sheets 6a and 6b can be adjusted.

In the partitioning device 2 of the present embodiment, two sets of rollers 10a and 10b and two sets of rotary drive sources 12a and 12b are used. For example, one set of rollers and one set of rotary drive sources are used. It can also be used to achieve equivalent functionality. In this case, for example, one end side (or the other end side) of each elastic sheet 6a, 6b is fixed, and one set of rollers and one set of rotational drive sources are connected to the other end side (or one end side). It's fine.

As shown in FIGS. 2 (A) and 2 (B), the electrostatic adsorption member 4 includes a columnar (rod-shaped) core material 14a extending in the longitudinal direction thereof and a conductive member 16a that covers the circumference of the core material 14a. I'm out. The conductive member 16a is made of, for example, a metal such as copper, and functions as one electrode of the electrostatic adsorption member 4. The material, shape, and the like of the core material 14a are not particularly limited, but in the present embodiment, a prismatic core material 14a made of silicon is used.

Further, the electrostatic adsorption member 4 includes a columnar (rod-shaped) core material 14b extending in the longitudinal direction thereof and a conductive member 16b that covers the periphery of the core material 14b. The material, shape, etc. of the core material 14b and the conductive member 16b may be the same as the material, shape, etc. of the core material 14a and the conductive member 16a. The conductive member 16b functions as the other electrode of the electrostatic adsorption member 4.

The core material 14a and the conductive member 16a, and the core material 14b and the conductive member 16b are arranged at a predetermined interval and are covered with the insulating member 18. As a result, a pair of electrodes parallel to each other is realized. The upper surface of the insulating member 18 is the upper surface 4a of the electrostatic adsorption member 4, and the lower surface of the insulating member 18 is the lower surface 4b of the electrostatic adsorption member 4.

As shown in FIG. 1, one electrode (conductive member 16a) of each electrostatic attraction member 4 is connected to the positive electrode of the DC power supply (power supply unit) 24 via the wiring 20, the switch 22, and the like. Further, the other electrode (conductive member 16b) of each electrostatic adsorption member 4 is connected to the negative electrode of the DC power supply 24 via wiring 20 or the like.

Therefore, by making the switch 22 conductive (ON) and applying the voltage of the DC power supply 24 to the electrodes of each electrostatic adsorption member 4, an electric field can be generated around each electrostatic adsorption member 4. A transport unit 26 is arranged above the plurality of electrostatic adsorption members 4 and the like. The transport unit 26 attracts and holds the upper surface side (for example, the surface 11a side) of the workpiece 11 to transport the workpiece 11.

The division method performed by using the division device 2 described above will be described. FIG. 4 is a perspective view for explaining a carry-in step in which the workpiece 11 is placed on the plurality of electrostatic adsorption members 4. As shown in FIG. 4, in this carry-in step, first, the upper surface side (in the present embodiment, the surface 11a side) of the workpiece 11 is attracted and held by the transport unit 26.

Next, the transport unit 26 is moved so that the lower surface side (in the present embodiment, the back surface 11b side) of the workpiece 11 is brought into contact with the upper surface 4a of the plurality of electrostatic suction members 4. At this time, a plurality of electrostatic suction members 4 so as to align the scheduled division line 13 (first scheduled division line) extending in the first direction of the workpiece 11 with the gaps between the two adjacent electrostatic suction members 4. The transfer unit 26 adjusts the relative position and orientation of the workpiece 11 and the workpiece 11.

After that, the work piece 11 can be placed on the plurality of electrostatic suction members 4 by releasing the suction and holding of the work piece 11 by the transport unit 26. In this carry-in step, the switch 22 is put into a non-conducting (OFF) state at least before the workpiece 11 is placed on the electrostatic adsorption member 4. Further, the tension applied to the elastic sheets 6a and 6b is adjusted by the rotation drive sources 12a and 12b, and the period in which the electrostatic adsorption members 4 are arranged (repetition period) is extended in the first direction. Set according to (repetition cycle).

After the carry-in step, a first electrostatic suction step of sucking and holding the workpiece 11 by the plurality of electrostatic suction members 4 is performed. FIG. 5 is a perspective view for explaining the first electrostatic adsorption step, and FIG. 6A is a cross-sectional view for explaining the first electrostatic adsorption step. As shown in FIG. 5, in the first electrostatic adsorption step, the switch 22 is switched from the non-conducting state to the conductive state, and the voltage of the DC power supply 24 is applied to the electrodes of each electrostatic adsorption member 4.

As a result, an electric field is generated around each electrostatic adsorption member 4, and as an effect, an electrostatic force acts between the workpiece 11 and each electrostatic adsorption member 4. As shown in FIG. 6A, the workpiece 11 is attracted and held by each electrostatic adsorption member 4 by the force of static electricity. The electrostatic force acting between the workpiece 11 and each electrostatic adsorption member 4 includes a Coulomb force, a Johnson-Labeck force, a gradient force, and the like.

In the present embodiment, in the carry-in step, the position of the scheduled division line 13 extending in the first direction is aligned with the position corresponding to the gap between the two adjacent electrostatic suction members 4. Therefore, when an electric field is generated around each electrostatic adsorption member 4, a plurality of regions (regions corresponding to small pieces after division) partitioned by a plurality of scheduled division lines 13 extending in the first direction are static. It is attracted and held by the electric suction member 4.

After the first electrostatic adsorption step, a first division step of dividing the workpiece 11 into a plurality of small pieces is performed along a plurality of planned division lines 13 extending in the first direction. FIG. 6B is a cross-sectional view for explaining the first division step. In this first division step, the rollers 10a and 10b are rotated in the direction of winding the elastic sheets 6a and 6b to increase the tension applied to the elastic sheets 6a and 6b (tension in the direction perpendicular to a predetermined direction). ..

That is, a pulling force is applied to the elastic sheets 6a and 6b in a direction perpendicular to a predetermined direction (in the first electrostatic adsorption step, a direction perpendicular to the first direction). As a result, a force is applied to each electrostatic adsorption member 4 so as to move each electrostatic adsorption member 4 perpendicularly to a predetermined direction and relatively away from each other.

As described above, the modified layer 17 serving as the starting point of division is formed on each of the plurality of planned division lines 13 extending in the first direction. The modified layer 17 is more brittle than the other regions of the workpiece 11. Therefore, as shown in FIG. 6B, the workpiece 11 is formed into a plurality of small pieces 19 along the plurality of scheduled division lines 13 extending in the first direction by the force transmitted through each electrostatic adsorption member 4. It is divided. When the workpiece 11 is divided into a plurality of small pieces 19 along all the planned division lines 13 extending in the first direction, the first division step ends.

After the first division step, a rotation step is performed in which the workpiece 11 is relatively rotated with respect to the plurality of electrostatic adsorption members 4. This rotation step is performed, for example, in a procedure similar to the transfer step described above. Specifically, first, the transport unit 26 sucks and holds the upper surface side (in this embodiment, the surface 11a side) of the workpiece 11 held by the plurality of electrostatic suction members 4. At the same time, the switch 22 is switched to the non-conducting state.

Next, the transport unit 26 is raised to relatively rotate each electrostatic adsorption member 4 and the workpiece 11. Specifically, two adjacent division scheduled lines 13 (second division scheduled lines) extending in a second direction (in the present embodiment, a direction perpendicular to the first direction) intersecting the first direction are provided. The plurality of electrostatic suction members 4 and the workpiece 11 are relatively rotated so as to fit in the gaps of the electrostatic suction members 4. Then, the transport unit 26 is lowered so that the lower surface side (in the present embodiment, the back surface 11b side) of the workpiece 11 is brought into contact with the upper surface 4a of the plurality of electrostatic suction members 4 again.

After that, the work piece 11 can be placed on the plurality of electrostatic suction members 4 by releasing the suction and holding of the work piece 11 by the transport unit 26. In this rotation step, the tension applied to the elastic sheets 6a and 6b is adjusted by the rotation drive sources 12a and 12b at least before the workpiece 11 is remounted on the electrostatic attraction member 4, and the electrostatic attraction members 4 are arranged. The cycle (repetition cycle) to be performed is set to match the cycle (repetition cycle) in which the scheduled division lines 13 extending in the second direction are arranged.

After the rotation step, a second electrostatic suction step of sucking and holding the workpiece 11 by the plurality of electrostatic suction members 4 is performed. This second electrostatic adsorption step is performed, for example, in the same procedure as the first electrostatic adsorption step described above. Specifically, the switch 22 is switched from the non-conducting state to the conductive state, and the voltage of the DC power supply 24 is applied to the electrodes of each electrostatic adsorption member 4.

As a result, an electric field is generated around each electrostatic adsorption member 4, and as an effect, an electrostatic force acts between the workpiece 11 and each electrostatic adsorption member 4. By the force of static electricity, the workpiece 11 is attracted and held by each electrostatic adsorption member 4.

In the present embodiment, in the rotation step, the position of the planned division line 13 extending in the second direction is aligned with the position corresponding to the gap between the two adjacent electrostatic suction members 4. Therefore, when an electric field is generated around each electrostatic adsorption member 4, a plurality of regions (regions corresponding to the small pieces after division) partitioned by the plurality of scheduled division lines 13 extending in the second direction are static. It is attracted and held by the electric suction member 4.

After the second electrostatic adsorption step, a second division step of dividing the workpiece 11 into a plurality of small pieces is performed along a plurality of planned division lines 13 extending in the second direction. This second division step is performed, for example, in the same procedure as the first division step described above. Specifically, the rollers 10a and 10b are rotated in the direction of winding the elastic sheets 6a and 6b to increase the tension applied to the elastic sheets 6a and 6b (tension in the direction perpendicular to a predetermined direction).

That is, a pulling force is applied to the elastic sheets 6a and 6b in a direction perpendicular to a predetermined direction (in the second electrostatic adsorption step, a direction perpendicular to the second direction). As a result, a force is applied to each electrostatic adsorption member 4 so as to move each electrostatic adsorption member 4 perpendicularly to a predetermined direction and relatively away from each other.

As described above, the modified layer 17 serving as the starting point of division is formed on each of the plurality of planned division lines 13 extending in the second direction. The modified layer 17 is more brittle than the other regions of the workpiece 11. Therefore, the workpiece 11 is divided into a plurality of small pieces along the plurality of scheduled division lines 13 extending in the second direction by the force transmitted through each electrostatic adsorption member 4. The second division step ends when the workpiece 11 is divided into a plurality of small pieces along all the planned division lines 13 extending in the second direction.

As described above, in the dividing method according to the present embodiment, the lower surface of the workpiece 11 corresponding to each small piece after division is used by using a plurality of electrostatic adsorption members 4 that attract the workpiece 11 by the force of static electricity. Since the workpiece 11 is divided into a plurality of small pieces by attracting each of the plurality of regions on the side and applying a force for relatively moving each electrostatic adsorption member 4 in the direction away from each other, the workpiece 11 It is not necessary to use an expanding sheet to divide the product into multiple small pieces.

Further, the dividing device 2 according to the present embodiment has an upper surface (adsorption surface) 4a for adsorbing a plurality of regions on the lower surface side of the workpiece 11 corresponding to each small piece after division, and has an upper surface (adsorption surface) 4a of the planned division line 13. A plurality of electrostatic adsorption members 4 arranged in a direction perpendicular to a predetermined extending direction, a DC power supply (power supply unit) 24 for applying a voltage to each of the plurality of electrostatic adsorption members 4, and a plurality of electrostatics. Elastic sheets (giving mechanism) 6a and 6b, rollers (giving mechanism) 10a and 10b, and a rotation drive source ( Since the applying mechanism) 12a and 12b are provided, the workpiece 11 can be appropriately divided by using the dividing device 2.

The present invention is not limited to the description of the above embodiment and can be implemented with various modifications. For example, in the partitioning device 2 of the above embodiment, the elastic sheets 6a and 6b, the rollers 10a and 10b, and the rotation drive sources 12a and 12b are used to apply a force to the plurality of electrostatic suction members 4. There are no particular restrictions on the structure of the applying mechanism that applies force.

Further, in the above embodiment, the back surface 11b side of the workpiece 11 is directed downward, and the back surface 11b side is attracted and held by the plurality of electrostatic adsorption members 4, but the front surface 11a side of the workpiece 11 is held. May be attracted and held by a plurality of electrostatic adsorption members 4 on the surface 11a side with the surface 11a facing downward.

Further, in the above embodiment, the workpiece 11 on which the modified layer (starting point region) 17 serving as the starting point of the division is formed is divided along the plurality of scheduled division lines 13, but the workpiece 11 is divided. It is sufficient that a starting point region serving as a starting point of division is formed along at least one scheduled division line 13.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

11 Work piece 11a Front surface 11b Back surface 13 Scheduled division line (street)
15 regions 17 Modified layer (starting region)
19 Small piece 2 Dividing device 4 Electrostatic adsorption member 4a Upper surface (adsorption surface)
4b Lower surface 6a, 6b Elastic sheet (giving mechanism)
8 Adhesive 10a, 10b Roller (giving mechanism)
12a, 12b Rotational drive source (giving mechanism)
14a, 14b Core material 16a, 16b Conductive member 18 Insulation member 20 Wiring 22 Switch 24 DC power supply (power supply unit)
26 Transport unit

Claims (1)

A plate in which a starting point region serving as a starting point of division is formed along a plurality of first scheduled division lines extending in the first direction and a plurality of second scheduled division lines extending in the second direction intersecting the first direction. the Jo workpiece along the said first dividing line and the second dividing line a dividing method for dividing into a plurality of small pieces,
In electrostatic force using a long plurality of electrostatic attraction member in a predetermined direction to adsorb the workpiece, the lower surface side multiple regions of the workpiece which is defined by a plurality of first dividing lines The first electrostatic adsorption step that adsorbs each
After performing the first electrostatic adsorption step, each electrostatic adsorption member is subjected to a force for moving each electrostatic adsorption member perpendicularly to the first direction and relatively away from each other. a first dividing step of split the workpiece by the force imparted to the workpiece, along all of the first dividing lines through,
After performing the first division step, the plurality of electrostatic adsorption members are used to adsorb a plurality of regions on the lower surface side of the work piece, which are partitioned by the plurality of second division scheduled lines, respectively. Electrostatic adsorption step and
After performing the second electrostatic adsorption step, each electrostatic adsorption member is subjected to a force for moving each electrostatic adsorption member perpendicularly to the second direction and relatively away from each other. A division method including a second division step of applying a force to the work piece through the work piece and dividing the work piece along all the planned second division lines.

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