JP6947993B2 - Load port and transport room - Google Patents

Description

The present invention relates to a load port and a transfer chamber capable of circulating gas in the wafer transfer chamber so that the wafer being transferred is not exposed to the outside air.

Conventionally, semiconductors have been manufactured by performing various processing steps on a wafer as a substrate. In recent years, the integration of elements and the miniaturization of circuits have been progressing more and more, and it is required to maintain a high degree of cleanliness around the wafer so that oxygen, moisture and particles do not adhere to the wafer surface. ing. Further, the periphery of the wafer is made into a nitrogen atmosphere, which is an inert gas, or is put in a vacuum state so that the surface properties do not change such as oxidation of the wafer surface.

In order to properly maintain the atmosphere around the wafer, the wafer is managed by being placed inside a closed storage pod called FOUP (Front-Opening Unified Pod), and the inside is filled with nitrogen. Further, a processing device for processing the wafer and a load port for transferring the wafer to and from the FOUP are used. The load port constitutes a part of a wall that isolates the wafer processing apparatus from the external space, and functions as an interface portion between the processing apparatus and the FOUP. While the processing device and the load port may be directly connected, an EFEM (Equipment Front End Module) may be arranged between the processing device and the load port. The EFEM constitutes a wafer transfer chamber that is substantially closed inside the housing, and has a load port that functions as an interface with the FOUP on one of its facing walls, and a processing device and a transfer chamber on the other. A load lock chamber is connected to prevent direct communication with. A wafer transfer device for transporting wafers is provided in the wafer transfer chamber, and the wafer transfer device is used to transfer wafers between the FOUP connected to the load port and the load lock chamber. .. In the wafer transfer chamber, a downflow, which is a clean atmosphere, is constantly flowing from a fan filter unit arranged in the upper part of the transfer chamber.

Furthermore, in recent years, in the state-of-the-art wafer process, even oxygen and moisture contained in the clean atmosphere used as a downflow may change the properties of the wafer. Therefore, as in Patent Document 1, the practical application of a technique for circulating an inert gas in the EFEM is required.

Japanese Unexamined Patent Publication No. 2014-112631

In the practical application of the technique of circulating the inert gas in the EFEM, it is an issue to maintain a high degree of cleanliness in the transport chamber so that oxygen and moisture do not adhere to the wafer or the like which is the transport target.

The load port according to the present invention includes a base that forms a part of a wall that separates the transport space from the external space, an opening provided in the base, and a mounting table on which a container containing a container can be placed. ,
A door for opening and closing the opening and fixing and releasing the lid to the container on the above-mentioned stand, a container-side sealing member for sealing between the base and the container, and the base and the door. The transport space side sealing member that seals between the two, the clamp unit that presses the container against the base so as to enhance the sealing property between the base and the container by the container side sealing member, and the transport space side sealing member. A door clamp for pressing the door against the base is provided so as to enhance the sealing property between the base and the door. Further, the door may have an inert gas air supply unit on the surface facing the lid, and the inert gas air supply unit may pass through the inside of the door and be connected to the gas supply device. ..

Further, the transport chamber according to the present invention is provided with a transport space filled with an inert gas and circulated inside, a base forming a part of a wall that separates the transport space from the external space, and the base. A seal member that seals between the opening, the door that opens and closes the opening, and the door that faces the lid of the container that houses the container to fix and release the lid, and the base and the door. And a door clamp that presses the door against the base so as to enhance the sealing property between the base and the door by the sealing member.

The sealing property of the sealing member can be improved.

A side view showing a state in which the side wall of EFEM is removed. The perspective view of the load port shown in FIG. Side sectional view showing FOUP and load port. An enlarged perspective view of a main part showing an enlarged view of the window unit and the door part constituting the EFEM. FIG. 3 is a cross-sectional view of the first O-ring of the first embodiment. FIG. 3 is a cross-sectional view of the second O-ring of the first embodiment. Sectional drawing of each member forming a closed space. The block diagram which shows the connection state of a control part, each sensor and each drive part. The flowchart of 1st Embodiment at the time of taking out and taking in a wafer in FOUP. A cross-sectional view showing a state in which the FOUP is placed on a mounting table. FIG. 5 is a cross-sectional view showing a state in which the FOUP is advanced toward the load port from the state of FIG. 10 and the door portion is retracted. FIG. 5 is a cross-sectional view showing a state in which the door portion is advanced toward FOUP from the state of FIG. FIG. 2 is a cross-sectional view showing a state in which the opening of the load port is opened from the state of FIG. FIG. 3 is a cross-sectional view of the first O-ring of the second embodiment. FIG. 3 is a cross-sectional view of the second O-ring of the second embodiment. The flowchart of the 2nd Embodiment at the time of taking out and taking in the wafer in FOUP. FIG. 5 is a cross-sectional view showing a state when the FOUP is advanced to the retracted position. FIG. 5 is a cross-sectional view showing a state when the FOUP is further advanced from the state of FIG. 17 toward the door portion. FIG. 3 is a cross-sectional view of the first O-ring of the third embodiment. FIG. 3 is a cross-sectional view of the second O-ring of the third embodiment. The flowchart of the 3rd Embodiment at the time of taking out and taking in the wafer in FOUP. FIG. 5 is a cross-sectional view showing a state in which the FOUP is advanced to the retracted position and the door portion is retracted to the retracted position. FIG. 2 is a cross-sectional view showing a state in which the FOUP and the door portion are brought closer to each other from the state shown in FIG. The cross-sectional view which shows the modification of the 1st O ring and the 2nd O ring. FIG. 5 is a cross-sectional view showing a modified example in which the first O-ring and the second O-ring are integrated.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

<Embodiment I>
FIG. 1 is a side view in which the inside can be seen by removing the side wall of EFEM1. As shown in FIG. 1, the EFEM 1 includes a wafer transfer device 2 that transfers a wafer W between predetermined transfer positions, a box-shaped housing 3 provided so as to surround the wafer transfer device 2, and a housing. It is composed of a load port 4 connected to the outside of the wall on the front side of the third and a control means 5. Here, in the present application, the direction of the side to which the load port 4 is connected as viewed from the housing 3 is defined as the front, and the direction of the side opposite to the side to which the load port 4 is connected as viewed from the housing 3 is defined as the rear.

By controlling the operation of the wafer transfer device 2 by the control means 5, the wafer (container) W housed in the FOUP (container) 7 mounted on the load port 4 is transferred to the transfer space 9 inside the housing 3. It is possible to transfer the wafer W after each process has been performed and to transfer the wafer W into the FOUP 7 again.

The load port 4 is provided with a door portion 51 (see FIG. 2), and the door portion 51 is connected to the lid 32 provided on the FOUP 7 and moves together, so that the FOUP 7 is opened to the transport space 9. It has become so. A large number of mounting portions are provided in the FOUP 7 in the vertical direction, whereby a large number of wafers W can be accommodated. Further, the FOUP 7 is usually filled with nitrogen, and the atmosphere in the FOUP 7 can be replaced with nitrogen via the load port 4 under the control of the control means 5.

The control means 5 is configured as a controller unit provided in the upper space of the housing 3. Further, the control means 5 performs drive control of the wafer transfer device 2, nitrogen substitution control of FOUP 7 by the load port 4, opening / closing control of the door portion 51, nitrogen circulation control in the housing 3, and the like. The control means 5 is composed of a CPU, a memory, an ordinary microprocessor provided with an interface, and the like. Programs necessary for processing are stored in the memory in advance, and the CPU sequentially takes out and executes the necessary programs. However, it is designed to realize the desired function in cooperation with peripheral hardware resources. The nitrogen cycle control will be described later.

The internal space of the housing 3 is partitioned into a transport space 9 which is a space in which the wafer transfer device 2 is driven by the partition member 8 and a gas return path 10. The transport space 9 and the gas return path 10 are a gas outlet 11 extending in the width direction at the upper part of the transport space 9 and a gas suction extending at the lower part of the transport space 9 in the width direction. It communicates only with the mouth 12. Then, the gas outlet 11 and the gas suction port 12 generate a downdraft in the transport space 9, and an updraft is generated in the gas return path 10, so that the inert gas circulates. In the present embodiment, nitrogen is used as the inert gas, but the circulating gas is not limited to this, and other gases can also be used.

A gas supply means 16 for introducing nitrogen into the housing 3 is connected to the upper part on the back side of the return path 10. The gas supply means 16 can control the supply and stop of the supply of nitrogen based on the command from the control means 5. Therefore, when a part of nitrogen flows out to the outside of the housing 3, the gas supply means 16 supplies the nitrogen for the outflow, so that the nitrogen atmosphere in the housing 3 can be kept constant. Further, a gas discharging means 17 for discharging nitrogen gas in the housing 3 is connected to the lower portion on the back side. The gas discharge means 17 operates based on a command from the control means 5, and by opening a shutter (not shown), it is possible to communicate the inside of the housing 3 with the nitrogen gas discharge destination provided outside. It has become. Then, by using in combination with the supply of nitrogen by the gas supply means 16 described above, it is possible to replace the inside of the housing 3 with a nitrogen atmosphere and control the pressure inside the housing 3. In the present embodiment, since the gas to be circulated is nitrogen, the gas supply means 16 supplies nitrogen, but when another gas is circulated, the gas supply means 16 supplies the circulated gas.

Further, the gas outlet 11 is provided with a fan filter unit 13 (FFU13) including a fan 13a and a filter 13b as a first blowing means. The fan filter unit 13 removes particles contained in the nitrogen gas circulating in the housing 3 and blows downward air into the transport space 9 to generate a downdraft in the transport space 9. .. The FFU 13 is supported by a support member 18 which is connected to the partition member 8 and extends in the horizontal direction.

Then, by the fan 13a and the fan 15 of the FFU 13 described above, the nitrogen gas in the housing 3 descends in the transport space 9 and rises in the gas return path 10 to circulate. Since the gas outlet 11 is opened downward, nitrogen gas is sent downward by the FFU 13. Since the gas suction port 12 is opened upward, nitrogen gas can be sucked downward as it is without disturbing the downdraft generated by the FFU 13, and a smooth flow of nitrogen gas can be achieved by these. Can be created. Since the downdraft is generated in the transfer space 9, the particles adhering to the upper part of the wafer W and the discharged gas temporarily released from the processed wafer are removed, and the wafer transfer device 2 in the transfer space 9 is removed. It prevents the emitted gas and particles from floating due to the movement of such devices.

FIG. 2 shows a perspective view of the load port 4. The configuration of the load port 4 will be described below.

In the load port 4, the base 21 is vertically erected from the rear of the leg portion 25 to which the casters and the installation legs are attached, and the horizontal base portion 23 is provided toward the front from a height position of about 60% of the base 21. There is. Further, a mounting table 24 for mounting the FOUP 7 is provided on the upper portion of the horizontal base portion 23.

As schematically shown in FIG. 3, the FOUP 7 is provided on one surface of the main body 31 having an internal space Sf for accommodating the wafer W (see FIG. 1) and as a carry-in / out port of the wafer W. It is composed of a lid 32 that opens and closes the opening 31a. When the FOUP 7 is correctly mounted on the mounting table 24, the lid 32 faces the base 21.

Returning to FIG. 2, a positioning pin 24a for positioning the FOUP 7 is provided on the mounting table 24, and a lock claw 24b for fixing the FOUP 7 to the mounting table 24 is provided. The lock claw 24b is in a state in which the FOUP7 can be fixed by performing a locking operation after the FOUP7 is properly positioned on the mounting table 24, and the FOUP7 can be separated from the mounting table 24 by performing an unlocking operation. Can be. The mounting table 24 can be moved in the front-rear direction by the mounting table drive unit (not shown) with the FOUP 7 mounted.

Whether or not the FOUP 7 is positioned at an appropriate position is detected by a positioning sensor 60 arranged in the vicinity of the positioning pin 24a. It is preferable that the positioning sensor 60 is arranged in the vicinity of each positioning pin 24a. Here, properly positioned means that the height of the bottom surface of the FOUP 7 with respect to the mounting table 24 is within a predetermined range from the upper surface of the mounting table 24.

Further, the mounting table 24 is provided with a gas injection unit 70 for supplying nitrogen gas into the FOUP 7 and a gas exhaust unit 71 for discharging nitrogen gas from the FOUP 7 at two locations, respectively. The gas injection section 70 and the gas exhaust section 71 are usually located below the bottom surface of the FOUP 7 in an appropriately positioned state, and advance upward during use to provide a gas supply valve 33 provided in the FOUP 7 (see FIG. 3). ) And the gas discharge valve 34, respectively.

At the time of use, the upper end of the gas injection unit 70 contacts the gas supply valve 33 of the FOUP 7, and similarly, the upper end of the gas exhaust unit 71 contacts the gas exhaust valve 34 of the FOUP 7. Then, a gas such as dry nitrogen gas is supplied from the gas injection unit 70 to the internal space Sf of the FOUP 7 via the gas supply valve 33, and the nitrogen gas in the internal space Sf is discharged from the gas exhaust unit 71 through the gas exhaust valve 34. It is possible. Further, by making the amount of nitrogen gas supplied larger than the amount of nitrogen gas discharged, it is possible to set a positive pressure in which the pressure of the internal space Sf is increased with respect to the pressure of the transport space 9 of the outside or the housing 3.

The base 21 constituting the load port 4 constitutes a part of the front wall that isolates the transport space 9 from the external space. As shown in FIG. 2, the base 21 is attached to the columns 21a and 21a standing on both sides, the base main body 21b supported by these, and the window portion 21c opened in a substantially rectangular shape in the base main body 21b. It is composed of a window unit 40 and a window unit 40. Here, the substantially rectangular shape referred to in the present application means a shape in which four corners are smoothly connected by an arc while using a rectangle having four sides as a basic shape.

The window unit 40 is provided at a position facing the lid 32 (see FIG. 3) of the FOUP 7 described above. Since the window unit 40 is provided with a substantially rectangular opening 42 (see FIG. 4) as described in detail later, the transport space 9 of the housing 3 can be opened through the opening 42. can.

The window unit 40 is FOUP7 via a window frame portion 41, a first O-ring (first seal member) 43, a second O-ring (second seal member) 44, and a first O-ring 43 as elastic materials attached to the window frame portion 41. It is composed of a clamp unit 45 as a pull-in means for bringing the window frame portion 41 into close contact with the window frame portion 41.

The window frame portion 41 has a frame shape in which a substantially rectangular opening 42 is formed inside. Since the window frame portion 41 constitutes a part of the base 21 (see FIG. 2) described above as a component of the window unit 40, the opening 42 opens the front wall of the housing 3. Can be done.

A first O-ring 43 is arranged on the front surface of the window frame portion 41 so as to orbit around the periphery of the opening 42. A second O-ring 44 is arranged on the rear surface of the window frame portion 41 so as to orbit around the periphery of the opening 42.

FIG. 5 is a cross-sectional view of the first O-ring 43 cut in a direction orthogonal to the length direction of the first O-ring 43, and FIG. 6 is a cross-sectional view of the second O-ring 44 cut in a direction orthogonal to the length direction of the second O-ring 44. The cross-sectional view is shown. The cross-sectional shapes of the first O-ring 43 and the second O-ring 44 are convex. In the figure, the arrows indicate the front-rear direction of the window unit 40, that is, the advancing / retreating direction of the FOUP 9 and the door portion 51, which will be described later. The dimension L1 indicates the height dimension of the first O-ring 43 in the advancing / retreating direction of the door portion 51. The dimension L2 indicates the height dimension of the second O-ring 44 in the advancing / retreating direction of the door portion 51. That is, in the present embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43.

The opening 42 is slightly larger than the outer circumference of the lid 32 of the FOUP 7, and the lid 32 can move through the opening 42. Further, in a state where the FOUP 7 is mounted on the mounting table 24, as shown in FIG. 7, the front surface of the main body 31 forming the periphery of the lid 32 is a contact surface 31b, and the window frame portion 41 is passed through the first O-ring 43. It comes into contact with the front surface of (base 21). As a result, when the FOUP 7 is attached to the window unit 40, the first O-ring 43 seals (closes) between the peripheral edge of the opening 42 (base 21) and the FOUP 7.

Further, the door portion 51 described above comes into contact with the rear surface of the window frame portion 41 via the second O-ring 44. As a result, the second O-ring 44 seals between the peripheral edge of the opening 42 and the door 51.

Clamp units 45 are provided at a total of four locations arranged apart from each other in the vertical direction on both side portions of the window frame portion 41. Each clamp unit 45 is generally composed of an engaging piece 46 and a cylinder 47 for operating the engaging piece 46, and presses the FOUP 7 toward the base 21 side with the FOUP 7 attached to the window unit 40.

Then, when the engaging piece 46 protrudes forward, its tip faces upward, and when it is pulled backward, the tip faces the inner FOUP7. By the clamp operation, the engaging piece 46 can be engaged with the collar portion protruding laterally from the FOUP7 by turning the tip inward.

Further, the load port 4 is provided with an opening / closing mechanism 50 for opening / closing the window unit 40 configured so that the FOUP 7 can be attached.

As shown in FIG. 3, the opening / closing mechanism 50 includes a door portion 51 for opening / closing the opening 42, a support frame 52 for supporting the door portion 51, and the support frame 52 in the front-rear direction via the slide support means 53. It includes a movable block 54 that movably supports the movable block 54, and a slide rail 55 that movably supports the movable block 54 in the vertical direction with respect to the base body 21b.

The door portion 51 includes a suction portion 56 (see FIG. 4) that attracts the lid 32 of the FOUP 7, a latch operation for opening and closing the lid 32 of the FOUP 7, and a connecting means 57 for holding the lid 32. It has. The door portion 51 fixes and releases the lid body 32 so that the lid body 32 can be removed and attached from the FOUP 7. In the connecting means 57, the lid 32 can be opened by performing the unlatch operation of the lid 32, and the lid 32 can be connected to the door portion 51 to be integrated. On the contrary, in the connecting means 57, the connection between the lid 32 and the door portion 51 is released by performing the latch operation of the lid 32, and the lid 32 is attached to the main body 31 to be in the closed state. You can also.

As shown in FIG. 3, the door portion 51 includes a gas injection nozzle 73 that injects nitrogen gas between the FOUP 7 and the door portion 51 when the FOUP 7 is attached to the window unit 40, and the FOUP 7 and the door portion 51. A gas discharge nozzle 74 for discharging nitrogen gas between the doors is provided. The upper end of the gas injection nozzle 73 extends to the outer surface of the door portion 51, and the lower end is connected to a gas supply device (not shown). Similarly, the upper end of the gas discharge nozzle 74 extends to the outer surface of the door portion 51, and the lower end is connected to a gas discharge device (not shown). With the FOUP 7 and the door portion 51 integrated by the clamp unit 45, the gas injection nozzle 73 communicates with the closed space Sd (see FIG. 7) to supply nitrogen, and the gas discharge nozzle 74 communicates with the closed space Sd. By discharging nitrogen, the enclosed space Sd can be replaced and filled with nitrogen.

Further, actuators (not shown) for moving the door portion 51 in the front-rear direction and the up-down direction are provided for each direction, and a drive command is given to these from the control unit Cp. As a result, the door portion 51 can be moved in the front-rear direction and the up-down direction. In this way, the load port 4 operates by giving a drive command to each unit by the control unit Cp.

As shown in FIG. 8, the input side of the control unit Cp is connected to the positioning sensor 60, the door position detection sensor 81, the mounting table detection sensor 82, and the atmosphere sensor 83. Positioning sensor 6
0 detects whether or not the FOUP 7 is positioned at an appropriate position on the mounting table 24. The door position detection sensor 81 detects the advancing / retreating position of the door portion 51. The mounting table detection sensor 82 detects the position of the mounting table 24 in the advancing / retreating direction. The atmosphere sensor 83 detects the humidity and oxygen concentration in the closed space Sd, and detects whether or not the closed space Sd is replaced with nitrogen.

The output side of the control unit Cp is connected to the mounting base drive unit 85, the door drive unit 86, the clamp unit drive unit 87, the gas supply device 88, and the gas discharge device 89. The gas supply device 88 is connected to the gas injection nozzle 73 and supplies nitrogen to the closed space Sd. The gas discharge device 89 is connected to the gas discharge nozzle 74 and discharges nitrogen from the closed space Sd.

Hereinafter, the operation of the FOUP 7 and the door portion 51 when the load port 4 of the first embodiment is used will be described.

First, in step S1 shown in FIG. 9, an automatic guided vehicle (not shown) mounts the FOUP 7 at the container delivery position of the mounting table 24. The container delivery position refers to a position in which the FOUP 7 can be placed on the mounting table 24 within the moving range of the mounting table 24.

At this time, as shown in FIG. 10, the door portion 51 is arranged at the door closing position. The door closing position means that the door portion 51 is in contact with the second seal member 44, and the end surface 51a of the door portion 51 on the FOUP7 side is on the FOUP7 side of the contact surface between the door portion 51 and the second seal member 44. Refers to the initial position. Specifically, the end surface 51a of the door portion 51 is located on the FOUP7 side of the base 21 of the load port 4, and is within the range of the front-rear dimension of the first O-ring 43.

In step S2, the positioning sensor 60 detects whether or not the FOUP 7 is positioned at an appropriate position on the mounting table 24. If FOUP7 is not properly positioned, it sends an error to the host controller and repeats.

If the FOUP7 is properly positioned, the process proceeds to step S3, and the door drive unit 86 retracts the door unit 51 from the door closing position to the door retracting position in the direction opposite to the FOUP7 (see FIG. 11). The door retracting position refers to a position where the door portion 51 is retracted in the direction opposite to the FOUP 7 from the door closing position (initial position) and the door portion 51 is in contact with the second seal member 44. The door portion 51 advances from the rear to the front of the load port 4 and retracts from the front to the rear of the load port 4. These forward and backward directions are horizontal. By retracting the door portion 51, the second O-ring 44 extends as compared with FIG. Whether or not the door portion 51 has retracted to the door retracted position is detected by the door position detection sensor 81.

In step S4, the mounting table drive unit 85 advances the mounting table 24 and FOUP 7 from the container delivery position to the door opening / closing position (see FIG. 11). The door opening / closing position refers to a position in the moving range of the door portion 51 where the connecting means 57 fixes or releases the fixing of the lid 32 to the FOUP 7 and attaches / detaches the lid 32. The amount of movement of the FOUP 7 from the container delivery position to the door opening / closing position is 71 mm. Whether or not the mounting table 24 has moved to the door opening / closing position is detected by the mounting table detection sensor 82. When the mounting table detection sensor 82 detects that the mounting table 24 is in the door open / closed position, the clamp unit 45 operates in response to a signal from the clamp unit drive unit 87. As a result, the FOUP7 is attracted to the load port 4 side, and the sealing property between the FOUP7, the base 21, and the first O-ring 43 is improved. The FOUP 7 moves forward from the front of the load port 4 to the rear, and retracts (backs) from the rear of the load port 4 to the front. These forward and backward directions are horizontal.

When the door portion 51 is in the door retracting position and the FOUP 7 is in the door opening / closing position and comes into contact with the window frame portion 41 of the load port 4 via the first O ring 43, a closed space Sd is formed. The sealed space Sd is formed by a base 21, a first seal member 43, a second seal member 44, a lid 32, a FOUP 7, and a door portion 51. Further, in step S5, the closed space Sd is replaced with nitrogen gas from the atmosphere by the gas injection nozzle 73 and the gas discharge nozzle 74. The atmosphere sensor 83 detects whether or not the closed space Sd is replaced with nitrogen gas.

After that, in step S6, the door driving unit 86 advances the door unit 51 toward the FOUP 7 from the door retracting position to the door opening / closing position (door advancing position) (see FIG. 12). When the door portion 51 is in the door open / close position, the door portion 51 and the lid body 32 come into contact with each other, and the connecting means 57 releases the fixing of the lid body 32 to the FOUP 7 and holds the lid body 32. Further, the distance between the door retracting position and the door opening / closing position is set to 3 mm.

In step S7, the door drive unit 86 moves the door portion 51 and the lid 32 held by the door portion 51 from the door opening / closing position to the door opening position, and opens the opening 42 of the load port 4 (see FIG. 13). .. The door open position refers to a position where the opening 42 is opened and the wafer transfer device 2 can access the inside of the FOUP 7. In this state, the wafer transfer device 2 takes out and takes in the wafer W in the FOUP 7.

When the removal and incorporation of the wafer W are completed, the door drive unit 86 moves the door unit 51 from the door open position to the door open / close position in step S8. At this time, the connecting means 57 attaches and fixes the lid 32 to the FOUP 7. Then, the fixing of the FOUP 7 and the load port 4 by the clamp unit 45 is released, and in step S9, the mounting table drive unit 85 retracts the mounting table 24 and the FOUP 7 to the container delivery position.

[Characteristics of load port of this embodiment]
The load port 4 of this embodiment has the following features.

In the load port 4 of the present embodiment, after the FOUP 7 is mounted on the mounting table 24, the door portion 51 comes into contact with the second seal member 44, and the end surface 51a of the door portion 51 on the FOUP 7 side is the door portion 51 and the second. 2 The door portion 51 is retracted in the direction opposite to the FOUP7 from the initial position on the FOUP7 side of the contact surface with the seal member 43. As a result, when the FOUP 7 is moved toward the door portion 51 until it comes into contact with the first seal member 43, it is possible to prevent the FOUP 7 and the door portion 51 from coming into contact with each other. Therefore, even if the FOUP 7 or the door portion 51 is pushed out or tilted by the contact, it is possible to prevent the seal between the base 21 and the FOUP 7 or the door portion 51 from being released.

In the load port 4 of the present embodiment, the door portion 51 is in contact with the second seal member 44 at the door retracting position where the door portion 51 is retracted. As a result, the FOUP 7 is moved toward the door portion 51, and when the FOUP 7 comes into contact with the first seal member 43, at least the base, the first seal member 43, the second seal member 44, the lid 32, and the door portion A closed space Sd can be formed by 51.

In the load port 4 of the present embodiment, after the closed space Sd is filled with nitrogen gas, the door portion 51 is advanced from the retracted position toward the FOUP 7. As a result, the FOUP 7 and the door portion 51 are brought close to each other, the fixing of the lid body 32 to the FOUP 7 is released by the connecting means 57 of the door portion 51, and the lid body 32 can be removed from the FOUP 7.

In the load port 4 of the present embodiment, the door portion 51 is in contact with the lid 32 at the door advance position in which the door portion 51 is advanced. As a result, the connecting means 57 of the door portion 51 reliably releases the fixing of the lid body 32 to the FOUP 7, and the lid body 32 can be removed from the FOUP 7. Further, when the door portion 51 comes into contact with the lid body 32, the door portion 51 is temporarily tilted and the door portion 51 and the second door portion 51 are tilted.
Even if the seal between the seal member 44 and the seal member 44 is released, the air does not enter the transport space 9 because the sealed space Sd is filled with nitrogen gas.

In the load port 4 of the present embodiment, the dimension of the second seal member 44 in the direction in which the door portion 51 advances and retreats is larger than the dimension of the first seal member 43 in the direction in which the door portion 51 advances and retreats. As a result, a large advance / retreat (movement) distance of the door portion 51 can be secured in a state where the door portion 51 and the second seal member 44 are in contact with each other and sealed.

<Second Embodiment>
Since each configuration of the second embodiment, such as the load port 4, is the same as that of the first embodiment, the description thereof will be omitted. However, in the first embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43. However, as shown in FIGS. 14 and 15, the second embodiment differs from the first embodiment in that the dimension L1 of the first O-ring 43 is larger than the dimension L2 of the second O-ring 44.

Hereinafter, the operation of the FOUP 7 and the door portion 51 when the load port 4 of the second embodiment is used will be described. Since the definition of each position such as the container delivery position of FOUP7 and the door closing position of the door portion 51 is the same as that of the first embodiment, the description thereof will be omitted.

First, in step S1 shown in FIG. 16, an automatic guided vehicle (not shown) mounts the FOUP 7 at the container delivery position of the mounting table 24.

At this time, as shown in FIG. 17, the door portion 51 is arranged at the door closing position, and the door clamp by the door extrusion mechanism 90 is operating. A plurality of the door extrusion mechanisms 90 are arranged along the opening peripheral edge of the opening 42 on the wall surface of the base 21 on the transport space 9 side. The door extrusion mechanism 90 has a cylinder 91, a rod 92 that can be recessed from the cylinder 91, and a roller 93 that is rotatably provided at the tip of the rod 92 as main components. The cylinder 91 is attached to a pedestal 94 that can be arranged at an angle from the base 21 so that the roller 93 can be appropriately pressed against the door portion 51. By appropriately pressing the roller 93 against the door portion 51, the sealing property of the base 21, the door portion 51 and the second O-ring 44 can be improved.

In step S2, the positioning sensor 60 detects whether or not the FOUP 7 is positioned at an appropriate position on the mounting table 24. If FOUP7 is not properly positioned, repeat.

If the FOUP7 is properly positioned, the process proceeds to step S3. In step S3, the mounting table 24 and FOUP 7 advance from the container delivery position to the container retract position toward the door portion 51 (see FIG. 17). The container withdrawal position refers to a position where the end surface of the door portion 51 in contact with the first O-ring 43 and the second O-ring 44 on the FOUP7 side and the FOUP7 are separated by a predetermined distance. The container evacuation position is located between the container opening / closing position and the container delivery position, which will be described later.

At this time, since the closed space Sd is formed, the closed space Sd is filled with nitrogen gas from the atmosphere by the gas injection nozzle 73 and the gas discharge nozzle 74 in step S4.

In step S5, the mounting table drive unit 85 advances the mounting table 24 and FOUP 7 from the container retracting position to the container opening / closing position (container advancing position) toward the door portion 51 (see FIG. 18). The container opening / closing position refers to a position within the moving range of the mounting table 24 where the wafer transfer device 2 can take out the wafer W in the FOUP 7 through the opening 42. When the FOUP 7 is in the container opening / closing position, the door portion 51 and the lid 32 come into contact with each other, and the connecting means 57 releases the fixing of the lid 32 to the FOUP 7 and holds the lid 32. The amount of movement of the FOUP 7 from the container retracting position to the container opening / closing position is set to 8 mm.

After that, the door clamp is released, and in step S6, the door portion 51 and the lid 32 are moved from the door opening / closing position to the door opening position. In this state, the wafer transfer device 2 takes out and takes in the wafer W in the FOUP 7.

When the removal and incorporation of the wafer W are completed, the process proceeds to step S7. In step S7, the door drive unit 86 moves the door unit 51 from the door open position to the door open / close position. At this time, the connecting means 57 attaches the lid 32 to the FOUP 7 and operates the door clamp.

Then, the fixing of the FOUP 7 and the load port 4 by the clamp unit 45 is released, and in step S8, the mounting base drive unit 85 retracts the mounting base 24 and the FOUP 7 to the container delivery position.

[Characteristics of load port of this embodiment]
The load port 4 of this embodiment has the following features.

In the load port 4 of the present embodiment, after the FOUP7 is mounted on the mounting table 24 on which the FOUP7 is mounted, the FOUP7 comes into contact with the first O-ring 43 and the second O-ring 44 from the mounting position. The FOUP7 is advanced toward the door portion 51 until the end surface of the portion 51 on the FOUP7 side and the FOUP7 are separated from each other by a predetermined distance to the container retracting position. As a result, when the FOUP 7 is moved toward the door portion 51 until it comes into contact with the first O-ring 43, it is possible to prevent the FOUP 7 and the door portion 51 from coming into contact with each other. Therefore, even if the FOUP 7 or the door portion 51 is tilted due to the contact, it is possible to prevent the seal between the base 21 and the FOUP 7 or the door portion 51 from being released.

In the load port 4 of the present embodiment, after the closed space Sd is filled with nitrogen gas, the FOUP 7 is advanced from the container retracting position toward the door portion 51. As a result, the FOUP 7 and the door portion 51 are brought close to each other, and the suction portion 56 of the door portion 51 releases the fixing of the lid body 32 to the FOUP 7, so that the lid body 32 can be removed from the ROUP 7.

In the load port 4 of the present embodiment, the lid 32 is in contact with the door portion 51 at the container advancing position where the FOUP 7 is advanced. As a result, the suction portion 56 of the door portion 51 reliably releases the fixing of the lid body 32 to the FOUP 7, and the lid body 32 can be removed from the FOUP 7. Further, when the door portion 51 comes into contact with the lid body 32, even if the door portion 51 is tilted and the seal between the door portion 51 and the second O-ring 44 is released, the sealed space Sd is filled with nitrogen gas. Therefore, the air does not enter the transport space 9.

<Third Embodiment>
Since each configuration of the third embodiment, such as the load port 4, is the same as that of the first embodiment, the description thereof will be omitted. However, in the first embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43. However, the third embodiment shown in FIGS. 19 and 20 is different from the first embodiment in that the dimension L1 of the first O-ring 43 and the dimension L2 of the second O-ring 44 are substantially equal to each other.

Hereinafter, the operation of the FOUP 7 and the door portion 51 when the load port 4 of the third embodiment is used will be described. Since the definition of each position such as the container delivery position of FOUP7 and the door closing position of the door portion 51 is the same as that of the first embodiment, the description thereof will be omitted.

First, in step S1 shown in FIG. 21, a ceiling-traveling automatic guided vehicle (not shown) mounts the FOUP 7 at the container delivery position of the mounting table 24.

In step S2, the positioning sensor 60 detects whether or not the FOUP 7 is positioned at an appropriate position on the mounting table 24. If FOUP7 is not properly positioned, repeat.

If the FOUP 7 is properly positioned, the process proceeds to step S3, and the door portion 51 is retracted from the door closing position to the door retracting position (see FIG. 22). At the same time or later, in step S4, the mounting table 24 and the FOUP 7 are advanced from the container delivery position to the container retract position. Therefore, in a state where the door portion 51 is in contact with the second O-ring 44 and the FOUP 7 is in contact with the first O-ring 43, the contact between the door portion 51 and the lid 32 can be reliably prevented. The distance between the door closing position and the door retracting position is preferably 4 mm or less.

At this time, since the closed space Sd is formed, the closed space Sd is filled with nitrogen gas from the atmosphere by the gas injection nozzle 73 and the gas discharge nozzle 74 in step S5.

Next, in step S6, the mounting table 24 and FOUP 7 are brought closer to the door portion 51 from the container mounting position. In other words, the mounting table 24 and FOUP 7 are advanced toward the door portion 51. At the same time, in step S7, the door portion 51 is brought closer to FOUP7 from the door retracted position. In other words, the door portion 51 is advanced toward FOUP7.

In step S6 and step S7, as shown in FIG. 23, the lid 32 and the door portion 51 come into contact with each other. At this time, by setting the driving force of the mounting base drive unit 85 and the closing force of the door unit 51 of the door drive unit 86 to be equal, even if the lid body 32 and the door unit 51 come into contact with each other, the lid body 32 And one of the door portions 51 can be prevented from tilting.

In a state where the lid body 32 and the door portion 51 are in contact with each other, the connecting means 57 releases the fixing of the lid body 32 to the FOUP 7 and holds the lid body 32.

Then, in step S8, the door drive unit 86 moves the door unit 51 and the lid body 32 to the door open position. After the operation of step S8 is completed or in conjunction with the operation, the mounting table 24 is advanced toward the door portion 51 and moved to a predetermined position where the wafer W can be taken out. In this state, the wafer transfer device 2 takes out and takes in the wafer W in the FOUP 7.

When the removal and incorporation of the wafer W are completed, the process proceeds to step S9. In step S7, the door drive unit 86 moves the door unit 51 from the door open position to the door open / close position. At this time, the connecting means 57 attaches the lid 32 to the FOUP 7 and operates the door clamp.

Then, the fixing of the FOUP 7 and the load port 4 by the clamp unit 45 is released, and in step S10, the mounting table drive unit 85 retracts the mounting table 24 and the FOUP 7 to the container delivery position.

Although the embodiments of the present invention have been described above with reference to the drawings, it should be considered that the specific configuration is not limited to these embodiments. The scope of the present invention is shown not only by the description of the above-described embodiment but also by the scope of claims, and further includes all modifications within the meaning and scope equivalent to the scope of claims.

The load port 4 of the above embodiment is provided in EFEM1. However, the present invention is not limited to these, and a sorter device that directly applies to the processing device without going through EFEM1, replaces and rearranges the wafer W in the FOUP7, and a stocker device that temporarily stores the wafer W in the FOUP7. Can be applied to.

In the above embodiment, FOUP7 is exemplified as a container, but the present invention is not limited thereto. For example, a MAC (Multi Application Carrier) or FOSB (Front Opening Shipping Box) used for wafer transfer may be used as a container. In addition to wafer transfer, the present invention may be applied to a container that conveys an article that wants to maintain a predetermined environment rather than the outside air.

In the above embodiment, the wafer W is exemplified as a stored object to be stored in the container, but the present invention is not limited to this. For example, an electronic component, a substrate used for a flat panel display, a cell culture container for storing cells, or the like may be stored.

In the above embodiment, nitrogen is used as the gas, but the present invention is not limited to this. For example, a desired environmental gas such as dry gas or argon gas can be used.

In the above embodiment, whether or not the door portion 51 has retracted to the door retracted position is detected by the door position detection sensor 81. However, the present invention is not limited to this, and detection may be performed from the driving state of the door driving unit 86, or detection may be performed based on whether or not a predetermined time has elapsed by a timer.

In the above embodiment, the mounting table detection sensor 82 detects whether or not the mounting table 24 has moved to the dock position. However, the present invention is not limited to this, and the signal may be detected by the signal of the mounting table drive unit 85, or may be detected by the timer depending on whether or not a predetermined time has elapsed.

In the above embodiment, the atmosphere sensor 83 detects whether or not the closed space Sd is replaced with nitrogen gas. However, the present invention is not limited to this, and a timer may detect whether or not a predetermined time has elapsed.

In the above embodiment, immediately after the FOUP 7 is placed on the mounting table 24, nitrogen gas is ejected from the gas injection unit 70 while the mounting table 24 is advanced to the container opening / closing position or the container retracting position. However, the present invention is not limited to this, and the atmosphere around the door portion 51 may be exhausted from the gas exhaust portion 71 at the same time.

The materials of the first O-ring 43 and the second O-ring 44 are not particularly limited. The sealing member may be an elastic member such as an O-ring made of fluorine rubber or silicon rubber or a sponge made of ethylene propylene rubber such as EPDM (ethylene propylene diene monomer). In the case of an O-ring made of fluororubber or silicon rubber, a hollow structure may be used to provide elastic force. In the case of a hollow structure, the sealing property and the contact position of other members can be adjusted by supplying or discharging gas into the hollow portion.

In the above embodiment, the first O-ring 43 and the second O-ring 44 having a convex cross section are adopted. However, the present invention is not limited to this, and as shown in FIG. 24, a sealing member having a thin plate-like cross section that is gently curved may be used. As a result, the atmosphere in the closed space Sd is less likely to enter the transport space 9, and the air outside the FOUP 7 can be prevented from entering the closed space Sd.

In the above embodiment, the first O-ring 43 and the second O-ring 44, which are separate bodies, are adopted. However, as shown in FIG. 25, the integrated O-ring 4 which is attached to the opening edge portion of the base 21 and seals the closed space Sd by abutting one end with the FOUP 7 and the other end with the door portion 51.
3 may be adopted. At this time, the closed space Sd is formed by at least the O-ring 43 in which the first O-ring and the second O-ring are integrated, the lid 32, and the door portion 51.

In the above embodiment, the lid 32 projects from the contact surface 31b of the FOUP 7 toward the load port 4, and the amount of this protrusion is set to ± 5 mm with respect to the designed dimension, for example. Further, the amount of protrusion of the lid 32 when nitrogen gas is injected into FOUP 7 is set to about 3 mm.

In the above embodiment, the attachment / detachment of the lid 32 to the FOUP 7 is performed by moving the door 51 to the FOUP 7 while the door 51 holds the lid 32. However, the present invention is not limited to these, and the lid 32 can be attached to the FOUP 7 by moving the mounting table 24 and the FOUP 7 to the positions shown in FIG. 17 with the door portion 51 fixing the lid 32 (see FIG. 18). And may be removed. Further, both the mounting base 24 and the door portion 51 may be moved to attach or detach the lid 32 to the FOUP 7. That is, the lid 32 may be attached and detached by changing the relative distance between the FOUP 7 and the lid 32.

The present invention can also be applied to a load port not provided with the first O-ring 43 and the second O-ring 44. This load port has the same configuration as that of the above-described embodiment except that the first O-ring 43 and the second O-ring 44 are not provided, and thus the description thereof will be omitted. That is, when the door protrudes toward the external space side from the base surface of the load port as in Patent Document 1 exemplified as the prior document of the present application, or when the pressure in the FOUP becomes high, a part of the lid or a part of the lid or Even if everything is protruding to the load port side or inflated, when the door and the FOUP come into contact with each other and collide, either the door or the FOUP may be tilted, and the door latching operation is appropriate. There is a problem that it cannot be done. However, by applying the present invention, by moving at least one of the door and the FOUP to the shelter position, the distance between the door and the FOUP can be relatively adjusted before the latch operation. Of course, this effect also occurs in the above-described embodiment in which the first O-ring 43 and the second O-ring 44 are provided.

The present invention can also be applied to a load port provided with only one of the first O-ring 43 and the second O-ring 44.

The load port described in the above embodiment includes a base forming a part of a wall that separates the transport space from the external space, an opening provided in the base, opening and closing of the opening, and an container. A door capable of fixing and releasing the lid to the contained container, a first sealing member for sealing between the base and the container, and a second sealing member for sealing between the base and the door. After the container is placed on a mounting table on which the container is placed, the door comes into contact with the second seal member, and the end surface of the door on the container side is the door and the first. 2 The door can be retracted in the direction opposite to the container from the initial position on the container side of the contact surface with the seal member.

In this configuration, after the container is placed on the mounting table, the door comes into contact with the second seal member, and the end surface of the door on the container side is closer to the container side than the contact surface between the door and the second seal member. From the initial position, retract the door in the direction opposite to the container. This makes it possible to prevent the container from coming into contact with the door when the container is moved toward the door until it comes into contact with the first seal member. Therefore, it is possible to prevent the seal between the base and the container or door from being released.

Further, the door may be brought into contact with the second seal member at the door retracting position where the door is retracted.

In this configuration, the door is in contact with the second seal member at the door retracted position where the door is retracted. Thereby, when the container is moved toward the door and the container comes into contact with the first sealing member, a closed space can be formed by at least the base, the first sealing member, the second sealing member, the lid, and the door.

Further, when the door is in the door retracted position and the container is in contact with the opening via the first seal member, at least the first seal member, the second seal member, the lid body, and the like. And, after the closed space is formed by the door and the closed space is filled with gas, the door may be advanced from the retracted position toward the container.

In this configuration, after the enclosed space is filled with gas, the door is advanced from the retracted position toward the container. As a result, the container and the door are brought close to each other, the door releases the fixing of the lid to the container, and the lid can be removed from the container.

Further, the door may be brought into contact with the lid at the door advancing position where the door is advanced.

In this configuration, the door is in contact with the lid at the door forward position where the door is advanced. As a result, the door can reliably release the fixing of the lid to the container, and the lid can be removed from the container. Further, even if the door is tilted and the seal between the door and the second sealing member is released due to the contact of the door with the lid, the air enters the transport space because the sealed space is filled with gas. There is nothing to do.

Further, the dimension of the second seal member in the direction in which the door advances and retreats may be larger than the dimension of the first seal member in the direction in which the door advances and retreats.

In this configuration, the dimension of the second seal member in the direction in which the door advances and retreats is larger than the dimension of the first seal member in the direction in which the door advances and retreats. As a result, a large advance / retreat (movement) distance of the door can be secured in a state where the door and the second seal member are in contact with each other and sealed.

Further, the load port described in the above embodiment accommodates a base forming a part of a wall that separates the transport space from the external space, an opening provided in the base, opening and closing of the opening, and a container. A door capable of fixing and releasing the lid to the container, a first sealing member for sealing between the base and the container, and a second sealing member for sealing between the base and the door. The door is provided with, and after the container is placed on a mounting table on which the container is placed, the container comes into contact with the first sealing member and comes into contact with the second sealing member from the mounting position. The container can be advanced toward the door to a container retracting position where the end face on the container side and the container are separated by a predetermined distance.

In this configuration, after the container is placed on the mounting table on which the container is placed, the container comes into contact with the first sealing member and the end face on the container side of the door that comes into contact with the second sealing member from the mounting position. The container is advanced toward the door to the container retracting position where the container is separated from the container by a predetermined distance. This makes it possible to prevent the container from coming into contact with the door when the container is moved toward the door until it comes into contact with the first seal member. Therefore, it is possible to prevent the seal between the base and the container or door from being released.

Further, when the container is in the container retracting position, at least the first seal member, the second seal member, the lid, and the door form a closed space, and after the closed space is filled with gas, The container may be advanced from the container retracting position toward the door.

In this configuration, after the sealed space is filled with gas, the container is advanced from the container retract position toward the door. As a result, the container and the door are brought close to each other, the door releases the fixing of the lid to the container, and the lid can be removed from the container.

Further, the lid may be brought into contact with the door at the container advancing position where the container is advanced.

In this configuration, the lid is in contact with the door at the container advancing position where the container is advanced. As a result, the door can reliably release the fixing of the lid to the container, and the lid can be removed from the container. Further, even if the door is tilted and the seal between the door and the second sealing member is released due to the contact of the door with the lid, the air enters the transport space because the sealed space is filled with gas. There is nothing to do.

Further, the size of the first seal member in the direction in which the container moves forward and retracts in the direction opposite to the forward direction may be larger than the size of the second seal member in the direction in which the container moves forward and backward.

In this configuration, the size of the first seal member in the direction in which the container moves forward and retracts in the direction opposite to the forward direction is larger than the size of the second seal member in the direction in which the container moves forward and backward. As a result, a large advance / retreat (movement) distance of the container can be secured in a state where the container and the first seal member are in contact with each other and sealed.

4 Load port 7 FOUP (container)
9 Transport space 21 Base 32 Lid 42 Opening 43 1st O-ring (1st seal member)
44 2nd O-ring (2nd seal member)
51 Door part (door)
Sd enclosed space W wafer (container)

Claims (7)

The base that forms part of the wall that separates the transport space from the external space,
With the opening provided in the base
A mounting table on which a container containing the contents can be placed, and
A door for opening and closing the opening and fixing and releasing the lid to the container on the above-mentioned table.
A container-side sealing member that seals between the base and the container,
A transport space side sealing member that seals between the base and the door,
A clamp unit that presses the container against the base so as to enhance the sealing property between the base and the container by the container-side sealing member.
It is provided with a door clamp that presses the door against the base so as to enhance the sealing property between the base and the door by the transport space side sealing member.
The door has a first surface on the opening side and a second surface on the opposite side of the first surface.
The first surface has a central portion facing the lid body and a peripheral edge portion that comes into contact with the transport space side seal member at the peripheral edge of the central portion, and the peripheral edge portion is thinner than the central portion. It is formed and has an inert gas air supply portion in the central portion facing the lid body .
The door clamp is a load port characterized by pressing the second surface. The load port according to claim 1, wherein the inert gas air supply unit passes through the inside of the door and is connected to a gas supply device. The load port according to claim 1 or 2, wherein the door is provided so as to be movable in the front-rear direction with respect to the opening and is provided so as to be movable in the up-down direction intersecting the front-rear direction. A transport space filled with inert gas and circulated inside,
A base that forms a part of the wall that separates the transport space from the external space,
With the opening provided in the base
A door that opens and closes the opening and fixes and releases the lid so as to face the lid of the container that houses the container.
A sealing member that seals between the base and the door,
A door clamp that presses the door against the base so as to enhance the sealing property between the base and the door by the sealing member is provided.
The door has a first surface on the opening side and a second surface on the opposite side of the first surface.
The first surface has a central portion facing the lid and a peripheral edge portion that comes into contact with the transport space side seal member at the peripheral edge of the central portion, and the peripheral edge portion is thinner than the central portion. Formed,
The door clamp, transfer chamber, wherein the pressure to Rukoto the second surface. The door has an air supply portion at the central portion facing the lid body, the air supply portion passes through the inside of the door and is connected to a gas supply device, and the door is the central portion facing the lid body. The transport chamber according to claim 4, wherein the exhaust unit is connected to a gas discharge device through the inside of the door. The transport chamber according to claim 4 or 5, wherein the door is provided so as to be movable in the front-rear direction with respect to the opening and is provided so as to be movable in the up-down direction intersecting the front-rear direction. The transport chamber according to claim 6, which has a door position detection sensor and detects the front-rear position of the door.

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