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JP6948694B2 - Variable surface shape structure - Google Patents
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JP6948694B2 - Variable surface shape structure - Google Patents

Variable surface shape structure Download PDF

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JP6948694B2
JP6948694B2 JP2017104600A JP2017104600A JP6948694B2 JP 6948694 B2 JP6948694 B2 JP 6948694B2 JP 2017104600 A JP2017104600 A JP 2017104600A JP 2017104600 A JP2017104600 A JP 2017104600A JP 6948694 B2 JP6948694 B2 JP 6948694B2
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shape
internal space
surface portion
convex shape
concave
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JP2018199181A (en
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基之 村島
基之 村島
梅原 徳次
徳次 梅原
笙太 吉野
笙太 吉野
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Tokai National Higher Education and Research System NUC
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Description

本開示は、表面の形状が変化する表面形状可変構造に関する。 The present disclosure relates to a variable surface shape structure in which the shape of the surface changes.

ロボットハンドや、搬送用ベルト、建物の床など、用途や環境に応じて表面の摩擦特性を変えたい場合がある。摩擦制御に関して、外部からの力を受けて表面状態が変化する材料などの開発が進められている。 There are cases where you want to change the frictional characteristics of the surface of a robot hand, transport belt, building floor, etc., depending on the application and environment. Regarding friction control, the development of materials whose surface condition changes by receiving an external force is underway.

非特許文献1には、母材となるゴムの表面に織布を埋め込んだ複合材が開示されている。この複合材は、母材のゴムが圧縮されると、表面に発生するシワ構造に布繊維の構造変化が重なって表面の摩擦力が変化する。 Non-Patent Document 1 discloses a composite material in which a woven fabric is embedded in the surface of rubber as a base material. In this composite material, when the rubber of the base material is compressed, the structural change of the cloth fiber overlaps with the wrinkle structure generated on the surface, and the frictional force on the surface changes.

Kousuke Suzuki、 Yuji Hirai and Takuya Ohzono、“Oscillating Friction on Shape−Tunable Wrinkles”,Applied Materials and interfaces,2014年、Vol.6、No.13、p.10121−10131Kousuke Suzuki, Yuji Hirai and Takaya Ohzono, "Oscillating Friction on Shape-Tunable Wrinkles", Applied Materials and Interfaces, 20 years 6, No. 13, p. 10121-10131

非特許文献1に係る複合材は、母材として伸縮する柔軟材料を用いる必要があり、摩耗しやすく、環境温度の影響を受けやすいといったことから、用途が制限される可能性がある。また、一般的な機械部品は、組み付けなどで寸法精度が求められるので、母材の変形は許容されにくい。本発明者らは、摩擦制御に用いる表面形状可変構造について、汎用性という点で改善の余地があると考えるに至った。 The composite material according to Non-Patent Document 1 needs to use a flexible material that expands and contracts as a base material, is easily worn, and is easily affected by the environmental temperature, so that its use may be limited. Further, since general mechanical parts are required to have dimensional accuracy in assembly and the like, deformation of the base material is difficult to tolerate. The present inventors have come to think that there is room for improvement in terms of versatility of the variable surface shape structure used for friction control.

本開示は、こうした状況に鑑みてなされたものであり、その目的とするところの1つは、汎用性の高い表面形状可変構造を提供することにある。 The present disclosure has been made in view of such circumstances, and one of the purposes thereof is to provide a highly versatile surface shape variable structure.

上記課題を解決するために、本開示のある態様の表面形状可変構造は、部材に形成された内部空間と、内部空間の少なくとも一部を覆う表面部と、を備える。表面部は、内部空間側から力を受けて、内部空間に対して、凸形状から凹形状に、または、凹形状から凸形状に変化し、表面部は、凸形状の状態で部材の表面から突出しない位置に設けられ、部材の表面側が流体を介して他の部材と接触する。
本開示の別の態様もまた、表面形状可変構造である。この構造は、部材に形成された内部空間と、内部空間の少なくとも一部を覆う表面部と、を備える。表面部は、中央部と、内周縁が中央部の外周縁につながる環状部と、を備え、中央部および環状部がいずれも凹形状になっている状態において、内部空間側からの圧力が上がると、中央部が凹形状を維持しながら、環状部が凹形状から凸形状に変化し、中央部が凹形状になっており、かつ環状部が凸形状になっている状態において、内部空間側からの圧力が上がると、中央部が凹形状から凸形状に変化しながら、環状部が凸形状を維持する。
In order to solve the above problems, the surface shape variable structure of a certain aspect of the present disclosure includes an internal space formed in the member and a surface portion covering at least a part of the internal space. The surface portion receives a force from the internal space side and changes from a convex shape to a concave shape or from a concave shape to a convex shape with respect to the internal space, and the surface portion is in a convex shape from the surface of the member. It is provided at a position where it does not protrude, and the surface side of the member comes into contact with another member via a fluid.
Another aspect of the present disclosure is also a variable surface shape structure. This structure includes an internal space formed in the member and a surface portion that covers at least a part of the internal space. The surface portion includes a central portion and an annular portion in which the inner peripheral edge is connected to the outer peripheral edge of the central portion, and the pressure from the internal space side increases in a state where both the central portion and the annular portion have a concave shape. And, while maintaining the concave shape of the central part, the annular part changes from the concave shape to the convex shape, the central part is concave, and the annular part is convex, and the internal space side. When the pressure from is increased, the annular portion maintains the convex shape while the central portion changes from the concave shape to the convex shape.

本開示によれば、汎用性の高い表面形状可変構造を提供できる。 According to the present disclosure, it is possible to provide a highly versatile surface shape variable structure.

第1の実施の形態に係る表面形状可変構造を備える部材の斜視図である。It is a perspective view of the member provided with the surface shape variable structure which concerns on 1st Embodiment. 第1の実施の形態に係る表面形状可変構造を備える部材の平面図である。It is a top view of the member provided with the surface shape variable structure which concerns on 1st Embodiment. 図3(a)〜(b)は、図2のA−A断面図であり、表面部の形状が変化する様子を示す図である。3 (a) to 3 (b) are cross-sectional views taken along the line AA of FIG. 2 and show how the shape of the surface portion changes. 第1の実施の形態に係る表面部の高さを測定した結果を示す図である。It is a figure which shows the result of having measured the height of the surface part which concerns on 1st Embodiment. 第1の実施の形態に係る表面形状可変構造を備える部材の摩擦係数を測定した結果を示す図である。It is a figure which shows the result of having measured the friction coefficient of the member provided with the surface shape variable structure which concerns on 1st Embodiment. 図6(a)〜(b)は、第2の実施の形態に係る表面形状可変構造を備える部材の断面図であり、表面部の形状が変化する様子を示す図である。6 (a) to 6 (b) are cross-sectional views of a member having a surface shape variable structure according to a second embodiment, and are views showing how the shape of the surface portion changes. 図7(a)〜(b)は、第3の実施の形態に係る表面形状可変構造を備える部材の断面図であり、表面部の形状が変化する様子を示す図である。7 (a) to 7 (b) are cross-sectional views of the member provided with the surface shape variable structure according to the third embodiment, and are views showing how the shape of the surface portion changes. 第4の実施の形態に係る表面形状可変構造を備える部材の平面図である。It is a top view of the member provided with the surface shape variable structure which concerns on 4th Embodiment. 図9(a)〜(c)は、図8の部材の断面図であり、表面部の形状が変化する様子を示す図である。9 (a) to 9 (c) are cross-sectional views of the member of FIG. 8 and show how the shape of the surface portion changes. 表面形状可変構造の変形例を示す平面図である。It is a top view which shows the modification of the surface shape variable structure. 図10のB−B断面の概略図である。It is the schematic of the BB cross section of FIG.

以下の実施の形態では、同一の構成要素に同一の符号を付し、重複する説明を省略する。また、各図面では、説明の便宜のため、構成要素の一部を適宜省略する。 In the following embodiments, the same components are designated by the same reference numerals, and duplicate description will be omitted. Further, in each drawing, for convenience of explanation, some of the components are omitted as appropriate.

[第1の実施の形態]
第1の実施の形態に係る表面形状可変構造を具体的に説明する前に、概要を説明する。第1の実施の形態に係る表面形状可変構造は、部材に形成された内部空間と、内部空間の少なくとも一部を覆う表面部とを備え、部材の表面近傍に形成される。表面部は、内部空間において変化する圧力を受けて、内部空間に対して凸形状または凹形状に変化する。内部空間における圧力は、例えばポンプにより制御される。内部空間の圧力が所定値を越えると、表面部が凹形状から凸形状に変化して部材から突出した状態となり、部材表面の摩擦係数が上がる。また、内部空間の圧力が所定値を下回ると、表面部が凸形状から凹形状に変化して部材から窪んだ状態となり、部材表面の摩擦係数が下がる。こうした構造により、内部空間の圧力に応じて表面部の形状を変化させることで、部材表面の摩擦特性を制御できる。
[First Embodiment]
Before concretely explaining the variable surface shape structure according to the first embodiment, an outline will be described. The surface shape variable structure according to the first embodiment includes an internal space formed in the member and a surface portion covering at least a part of the internal space, and is formed in the vicinity of the surface of the member. The surface portion receives a changing pressure in the internal space and changes into a convex shape or a concave shape with respect to the internal space. The pressure in the interior space is controlled, for example, by a pump. When the pressure in the internal space exceeds a predetermined value, the surface portion changes from a concave shape to a convex shape and protrudes from the member, and the friction coefficient of the member surface increases. Further, when the pressure in the internal space falls below a predetermined value, the surface portion changes from a convex shape to a concave shape and becomes a recessed state from the member, and the friction coefficient of the member surface decreases. With such a structure, the frictional characteristics of the member surface can be controlled by changing the shape of the surface portion according to the pressure in the internal space.

図1は第1の実施の形態に係る表面形状可変構造10を備える部材12の斜視図、図2はその平面図である。図3(a)および(b)は、図2のA−A断面図であり、表面形状可変構造10の表面部22の形状が変化する様子を示す図である。各図に示すように、x軸、y軸、z軸からなる直交座標系が規定される。x軸、y軸は、部材12の底面内で互いに直交する。z軸は、x軸およびy軸に垂直な方向に延びる。x軸、y軸、z軸のそれぞれの正の方向は、各図における矢印の方向に規定され、負の方向は、矢印と逆向きの方向に規定される。以下の説明で、x軸に平行な方向を「左右方向」、x軸の正方向側を「右側」、およびx軸の負方向側を「左側」という場合がある。y軸に平行な方向を「前後方向」、y軸の正方向側を「前側」、およびy軸の負方向側を「後側」という場合がある。また、z軸に平行な方向を「上下方向」、z軸の正方向側を「上側」、およびz軸の負方向側を「下側」という場合がある。 FIG. 1 is a perspective view of a member 12 having a surface shape variable structure 10 according to the first embodiment, and FIG. 2 is a plan view thereof. 3A and 3B are cross-sectional views taken along the line AA of FIG. 2, showing how the shape of the surface portion 22 of the variable surface shape structure 10 changes. As shown in each figure, a Cartesian coordinate system including an x-axis, a y-axis, and a z-axis is defined. The x-axis and y-axis are orthogonal to each other within the bottom surface of the member 12. The z-axis extends in a direction perpendicular to the x-axis and the y-axis. The positive directions of the x-axis, y-axis, and z-axis are defined in the directions of the arrows in each figure, and the negative directions are defined in the directions opposite to the arrows. In the following description, the direction parallel to the x-axis may be referred to as "left-right direction", the positive direction side of the x-axis may be referred to as "right side", and the negative direction side of the x-axis may be referred to as "left side". The direction parallel to the y-axis may be referred to as the "front-back direction", the positive direction side of the y-axis may be referred to as the "front side", and the negative direction side of the y-axis may be referred to as the "rear side". Further, the direction parallel to the z-axis may be referred to as "vertical direction", the positive direction side of the z-axis may be referred to as "upper side", and the negative direction side of the z-axis may be referred to as "lower side".

部材12は、樹脂材料により直方体状に形成され、x軸に平行な方向およびy軸に平行な方向に3列ずつ並ぶ合計9個の表面形状可変構造10が設けられている。部材12を形成する樹脂材料は、JISK7161に準拠した引張強さが40〜55MPa、引張弾性率が1800〜2100MPa、および破壊伸び率が5〜35%であることが好ましい。また、JISK7171に準拠した曲げ強さが60〜80MPa、曲げ弾性率が1900〜2400MPaであることが好ましい。さらに、JISK7181に準拠した圧縮強さが70〜80MPaであることが好ましい。部材12を形成する樹脂材料の密度は、23℃で1111kg/mであった。部材12は、左右方向の幅および前後方向の奥行きを36mm、上下方向の高さを16mmとする。 The member 12 is formed of a resin material in a rectangular parallelepiped shape, and is provided with a total of nine surface shape variable structures 10 arranged in three rows in a direction parallel to the x-axis and a direction parallel to the y-axis. The resin material forming the member 12 preferably has a tensile strength of 40 to 55 MPa, a tensile elastic modulus of 1800 to 2100 MPa, and a fracture elongation rate of 5 to 35% in accordance with JIS K7161. Further, it is preferable that the bending strength according to JIS K7171 is 60 to 80 MPa and the flexural modulus is 1900 to 2400 MPa. Further, the compressive strength according to JIS K7181 is preferably 70 to 80 MPa. The density of the resin material forming the member 12 was 1111 kg / m 3 at 23 ° C. The member 12 has a width in the left-right direction and a depth in the front-rear direction of 36 mm, and a height in the up-down direction of 16 mm.

表面形状可変構造10は、図3に示すように、内部空間24を形成する窪み部20と、表面部22とを備える。窪み部20は、部材12の上面から下方に向かって円柱状に窪むように形成されている。表面部22は、z軸に平行な断面において湾曲形状、かつ、平面視で窪み部20と同径の円形状に形成されている。また、表面部22は、窪み部20の開口端に部材12と同じ樹脂材料で一体に形成され、窪み部20を覆って封止する。窪み部20および表面部22の平面視における直径は6mm、表面形状可変構造10の左右方向および前後方向の間隔は3mmとする。表面部22の厚さは0.2mm、中心を通る曲率半径は25mmとする。 As shown in FIG. 3, the surface shape variable structure 10 includes a recessed portion 20 forming an internal space 24 and a surface portion 22. The recessed portion 20 is formed so as to be recessed in a columnar shape from the upper surface of the member 12 downward. The surface portion 22 is formed in a curved shape in a cross section parallel to the z-axis and in a circular shape having the same diameter as the recessed portion 20 in a plan view. Further, the surface portion 22 is integrally formed with the same resin material as the member 12 at the open end of the recessed portion 20, and covers and seals the recessed portion 20. The diameter of the recess 20 and the surface 22 in a plan view is 6 mm, and the distance between the variable surface shape structure 10 in the left-right direction and the front-rear direction is 3 mm. The thickness of the surface portion 22 is 0.2 mm, and the radius of curvature passing through the center is 25 mm.

窪み部20と表面部22との間には内部空間24が形成される。部材12において隣り合う窪み部20の間には、内部空間24を連結する連結孔16が形成されている。また、右列中央の窪み部20から右側に向かって連結孔16が延びて、不図示のポンプに接続される接続口14が部材12の側面に形成される。こうした構成により、ポンプを接続口14に接続して各内部空間24の圧力を同時に調整できる。 An internal space 24 is formed between the recess 20 and the surface 22. A connecting hole 16 for connecting the internal space 24 is formed between the recessed portions 20 adjacent to each other in the member 12. Further, a connecting hole 16 extends from the recessed portion 20 in the center of the right column toward the right side, and a connecting port 14 connected to a pump (not shown) is formed on the side surface of the member 12. With such a configuration, the pump can be connected to the connection port 14 and the pressure in each internal space 24 can be adjusted at the same time.

接続口14に接続したポンプにより内部空間24の圧力を下げると、表面部22に下向きの力が作用し、図3(a)に示すように表面部22は内部空間24に対して凹形状となる。また、内部空間24の圧力を上げると、表面部22に上向きの力が作用し、図3(b)に示すように表面部22は内部空間24に対して凸形状となる。このように、表面部22は、内部空間24における所定の圧力値を境に凹形状または凸形状に変化する。内部空間24の圧力が所定値未満の状態から所定値以上になると、表面部22は凹形状から凸形状に変化する。また、内部空間24の圧力が所定値以上の状態から所定値未満になると、表面部22は凸形状から凹形状に変化する。 When the pressure in the internal space 24 is reduced by the pump connected to the connection port 14, a downward force acts on the surface portion 22, and as shown in FIG. 3A, the surface portion 22 has a concave shape with respect to the internal space 24. Become. Further, when the pressure in the internal space 24 is increased, an upward force acts on the surface portion 22, and the surface portion 22 has a convex shape with respect to the internal space 24 as shown in FIG. 3 (b). In this way, the surface portion 22 changes into a concave shape or a convex shape with a predetermined pressure value in the internal space 24 as a boundary. When the pressure in the internal space 24 changes from less than a predetermined value to a predetermined value or more, the surface portion 22 changes from a concave shape to a convex shape. Further, when the pressure in the internal space 24 changes from a state of being equal to or higher than a predetermined value to less than a predetermined value, the surface portion 22 changes from a convex shape to a concave shape.

図4は、第1の実施の形態に係る表面部22の高さを測定した結果を示す図である。図4のグラフは、横軸が左右方向における位置、縦軸が上下方向において部材12の上面位置をゼロとした表面部22の高さを示す。表面部22は、凸形状の状態で部材12の上面から約300μm突出する。この状態では、部材12の上面から表面部22が突出するので、部材12の上面の摩擦係数が凹形状の状態に比べて高くなる。また、表面部22は、凹形状の状態で部材12の上面から約300μm窪む。この状態では、部材12の上面から表面部22が窪むので、部材12の上面の摩擦係数が凸形状の状態に比べて低くなる。 FIG. 4 is a diagram showing the result of measuring the height of the surface portion 22 according to the first embodiment. In the graph of FIG. 4, the horizontal axis shows the position in the left-right direction, and the vertical axis shows the height of the surface portion 22 in which the upper surface position of the member 12 is zero in the vertical direction. The surface portion 22 projects about 300 μm from the upper surface of the member 12 in a convex shape. In this state, since the surface portion 22 protrudes from the upper surface of the member 12, the friction coefficient of the upper surface of the member 12 is higher than that in the concave state. Further, the surface portion 22 is recessed by about 300 μm from the upper surface of the member 12 in a concave shape. In this state, since the surface portion 22 is recessed from the upper surface of the member 12, the friction coefficient of the upper surface of the member 12 is lower than that in the convex state.

図5は、第1の実施の形態に係る表面形状可変構造10を備える部材12の摩擦係数を測定した結果を示す図である。ブロックオンディスク摩擦試験機を用いて、部材12の上面を一定の荷重でガラス板に押し当て、ガラス板を回転させたときの摩擦係数を測定した。図5のグラフは、横軸が測定時間、縦軸が摩擦係数μを示す。測定開始から約70秒付近で、内部空間24の圧力を変えて表面部22を凸形状から凹形状に変化させた。表面部22を凸形状とした状態での摩擦係数μの平均値は0.55であった。また、表面部22を凹形状とした状態での摩擦係数μの平均値は0.33であった。この結果から、内部空間24の圧力により表面部22を凸形状または凹形状に変化させ、部材12の上面における摩擦係数を制御できることが分かる。 FIG. 5 is a diagram showing the results of measuring the friction coefficient of the member 12 including the surface shape variable structure 10 according to the first embodiment. Using a block-on-disk friction tester, the upper surface of the member 12 was pressed against the glass plate with a constant load, and the friction coefficient when the glass plate was rotated was measured. In the graph of FIG. 5, the horizontal axis represents the measurement time and the vertical axis represents the friction coefficient μ. About 70 seconds after the start of measurement, the pressure in the internal space 24 was changed to change the surface portion 22 from a convex shape to a concave shape. The average value of the friction coefficient μ when the surface portion 22 had a convex shape was 0.55. Further, the average value of the friction coefficient μ in the state where the surface portion 22 was concave was 0.33. From this result, it can be seen that the surface portion 22 can be changed into a convex shape or a concave shape by the pressure of the internal space 24, and the friction coefficient on the upper surface of the member 12 can be controlled.

以上、第1の実施の形態に係る表面形状可変構造10を説明した。この表面形状可変構造10は、内部空間24の圧力に応じて表面部22が凸形状または凹形状に変化する。これにより、部材12の表面の摩擦係数を制御できる。表面形状可変構造10を含む部材12は、樹脂材料以外にも金属材料などを用いて形成可能であり、先行技術に比べて材料選択の自由度が高い。また、部材12の形状は変化しないので、さまざまな機械部品などに組み込み可能である。 The surface shape variable structure 10 according to the first embodiment has been described above. In the surface shape variable structure 10, the surface portion 22 changes into a convex shape or a concave shape according to the pressure in the internal space 24. Thereby, the friction coefficient of the surface of the member 12 can be controlled. The member 12 including the variable surface shape structure 10 can be formed by using a metal material or the like in addition to the resin material, and has a higher degree of freedom in material selection as compared with the prior art. Further, since the shape of the member 12 does not change, it can be incorporated into various mechanical parts and the like.

例えば、ロボットハンドの把持面に表面形状可変構造10を設けてもよい。滑りやすい物体を持つ場合、表面部22を凸形状として把持面の摩擦係数を上げる。これにより、物体を落としにくくなる。滑りにくい物体を持つ場合、表面部22を凹形状として摩擦係数を下げる。これにより、表面部22の摩耗を抑制できる。 For example, the surface shape variable structure 10 may be provided on the gripping surface of the robot hand. When holding a slippery object, the surface portion 22 is formed into a convex shape to increase the friction coefficient of the gripping surface. This makes it difficult to drop the object. If you have a non-slip object, make the surface 22 concave to reduce the coefficient of friction. As a result, wear of the surface portion 22 can be suppressed.

搬送ベルトの搬送面に表面形状可変構造10を設けてもよい。滑りやすい物体が置かれる場合、表面部22を凸形状として摩擦係数を上げる。これにより、搬送ベルトから物体が滑り落ちにくくなる。滑りにくい物体が置かれる場合、表面部22を凹形状として摩擦係数を下げる。これにより、表面部22の摩耗を抑制できる。 The surface shape variable structure 10 may be provided on the transport surface of the transport belt. When a slippery object is placed, the surface portion 22 is formed into a convex shape to increase the coefficient of friction. This makes it difficult for the object to slip off the transport belt. When a non-slip object is placed, the surface portion 22 is made concave to reduce the coefficient of friction. As a result, wear of the surface portion 22 can be suppressed.

床材や靴底の表面に表面形状可変構造10を設けてもよい。この場合、温度や湿度、天候に応じて表面の摩擦係数を最適化し、環境に関わらず滑りにくく歩きやすくできる。 The surface shape variable structure 10 may be provided on the surface of the floor material or the sole. In this case, the friction coefficient of the surface is optimized according to the temperature, humidity, and weather, so that it is not slippery and easy to walk regardless of the environment.

部品の表面や部品間に挿入されるスペーサの表面に表面形状可変構造10を設けてもよい。この場合、部品間の隙間に応じて表面部22を凸形状または凹形状に変化させ、部品の寸法公差を吸収できる。 The surface shape variable structure 10 may be provided on the surface of the component or the surface of the spacer inserted between the components. In this case, the surface portion 22 can be changed into a convex shape or a concave shape according to the gap between the parts, and the dimensional tolerance of the parts can be absorbed.

ドアストッパの表面に表面形状可変構造10を設けてもよい。この場合、例えばスイッチにより表面部22の形状が変化する構成とする。これにより、ドアの開閉制限や開放といった操作を簡単に実行可能になる。 The surface shape variable structure 10 may be provided on the surface of the door stopper. In this case, for example, the shape of the surface portion 22 is changed by a switch. This makes it possible to easily perform operations such as restricting the opening and closing of the door and opening the door.

家具などの転倒防止部材の表面に表面形状可変構造10を設けてもよい。この場合、設置した家具の天面と天井との間に転倒防止部材を挿入し、間隔に応じて表面部22の形状を変える。これにより、簡単に家具などの転倒を防ぐことができる。 The surface shape variable structure 10 may be provided on the surface of a fall prevention member such as furniture. In this case, a fall prevention member is inserted between the top surface and the ceiling of the installed furniture, and the shape of the surface portion 22 is changed according to the interval. As a result, furniture and the like can be easily prevented from tipping over.

シャフトを支持する軸受けの内周面に表面形状可変構造10を設けてもよい。この場合、使用状況に応じて、表面部22を凸形状としてシャフトの回転にブレーキをかけたり、凹形状としてシャフトとの摩擦力を低減できる。 The surface shape variable structure 10 may be provided on the inner peripheral surface of the bearing that supports the shaft. In this case, depending on the usage situation, the surface portion 22 can be formed into a convex shape to brake the rotation of the shaft, or the surface portion 22 can be formed into a concave shape to reduce the frictional force with the shaft.

流体が流れるパイプや流路の内周面に表面形状可変構造10を設けてもよい。この場合、表面部22の形状変化により流量を制御できる。 The surface shape variable structure 10 may be provided on the inner peripheral surface of the pipe or the flow path through which the fluid flows. In this case, the flow rate can be controlled by changing the shape of the surface portion 22.

アクチュエータの表面に表面形状可変構造10を設けてもよい。この場合、表面部22を凸形状としたときに他の部品を押し、精度良く微小距離だけ移動させることができる。 The surface shape variable structure 10 may be provided on the surface of the actuator. In this case, when the surface portion 22 has a convex shape, other parts can be pushed and moved with high accuracy by a minute distance.

なお、第1の実施の形態に係る部材12では、連結孔16により表面形状可変構造10の内部空間24が連結されるが、これに限らない。表面形状可変構造10のそれぞれまたは複数の構造群ごとに異なるポンプを接続し、内部空間の圧力を個別に変えてもよい。これにより、場所によって表面部22の形状を変えて、部材12の表面の摩擦係数を局所的に制御可能になる。 In the member 12 according to the first embodiment, the internal space 24 of the surface shape variable structure 10 is connected by the connecting hole 16, but the present invention is not limited to this. Different pumps may be connected to each or a plurality of structural groups of the variable surface shape structure 10 to individually change the pressure in the internal space. As a result, the shape of the surface portion 22 can be changed depending on the location, and the friction coefficient of the surface of the member 12 can be locally controlled.

第1の実施の形態に係る表面形状可変構造10では、ポンプを用いて内部空間24の圧力を調整したが、これに限らない。例えば、ポンプが水や油などの液体を流通させて内部空間24の圧力を調整してもよい。この場合にも同様に、表面部22の形状を変化させて、部材12の表面の摩擦係数を制御できる。 In the surface shape variable structure 10 according to the first embodiment, the pressure in the internal space 24 is adjusted by using a pump, but the pressure is not limited to this. For example, the pump may circulate a liquid such as water or oil to adjust the pressure in the internal space 24. In this case as well, the friction coefficient of the surface of the member 12 can be controlled by changing the shape of the surface portion 22.

第1の実施の形態に係る表面形状可変構造10では、表面部22を部材12と同じ材料で一体に形成したが、これに限らない。たとえば、表面部22を部材12とは異なる材料で形成して窪み部20の開口端に接合してもよい。この場合にも同様に、部材12の表面の摩擦係数を制御できる。部材12および表面部22の材料は樹脂材料に限られず、金属材料であってもよい。金属材料を用いた場合には、耐摩耗性が向上する。 In the surface shape variable structure 10 according to the first embodiment, the surface portion 22 is integrally formed of the same material as the member 12, but the present invention is not limited to this. For example, the surface portion 22 may be formed of a material different from that of the member 12 and joined to the open end of the recessed portion 20. In this case as well, the coefficient of friction on the surface of the member 12 can be controlled in the same manner. The material of the member 12 and the surface portion 22 is not limited to the resin material, and may be a metal material. When a metal material is used, wear resistance is improved.

第1の実施形態に係る表面形状可変構造10では、表面部22を湾曲形状としたが、これに限らない。表面部22は、平面視で多角形として、凸形状および凹形状で錐体状もしくは多面体形状であってもよい。 In the surface shape variable structure 10 according to the first embodiment, the surface portion 22 has a curved shape, but the present invention is not limited to this. The surface portion 22 may be polygonal in a plan view, convex or concave, and may be a cone or a polyhedron.

[第2の実施の形態]
図6(a)および(b)は、第2の実施の形態に係る表面形状可変構造30を備える部材12の断面図であり、表面部32の形状が変化する様子を示す図である。第2の実施の形態に係る表面形状可変構造30は、表面部32が凸形状の状態で窪み部20の開口および部材12の表面から突出しない位置に設けられている点で、第1の実施の形態と相違する。
[Second Embodiment]
6 (a) and 6 (b) are cross-sectional views of the member 12 including the surface shape variable structure 30 according to the second embodiment, and are views showing how the shape of the surface portion 32 changes. The surface shape variable structure 30 according to the second embodiment is provided in a position where the surface portion 32 does not protrude from the opening of the recessed portion 20 and the surface of the member 12 in a convex shape. It is different from the form of.

部材12の上面側が潤滑油により形成される油膜を介して他の部材と接触する場合、内部空間24の圧力を調整して表面部32を凸形状または凹形状に変化させると、部材間の油膜の厚さが変わる。表面部32が凸形状の状態では、潤滑油が窪み部20から押し出されるので、部材間の油膜が凹形状の状態より厚くなる。表面部32が凹形状の状態では、潤滑油が窪み部20に入り込むので、部材間の油膜が凸形状の状態より薄くなる。これにより、油膜厚さを調整して、部材間の接触状態を制御できる。 When the upper surface side of the member 12 comes into contact with another member via an oil film formed by the lubricating oil, when the pressure in the internal space 24 is adjusted to change the surface portion 32 into a convex or concave shape, an oil film between the members is formed. Thickness changes. When the surface portion 32 has a convex shape, the lubricating oil is pushed out from the recessed portion 20, so that the oil film between the members becomes thicker than when the surface portion 32 has a concave shape. When the surface portion 32 has a concave shape, the lubricating oil enters the recessed portion 20, so that the oil film between the members becomes thinner than when the surface portion 32 has a convex shape. Thereby, the oil film thickness can be adjusted to control the contact state between the members.

以上、第2の実施の形態を説明した。第2の実施の形態に係る表面形状可変構造30は、第1の実施の形態と同様に、流体が流れるパイプや流路の内周面に設けられてもよい。この場合、表面部32の形状変化によりパイプなどを流れる流体の流量を制御できる。 The second embodiment has been described above. The surface shape variable structure 30 according to the second embodiment may be provided on the inner peripheral surface of the pipe or the flow path through which the fluid flows, as in the first embodiment. In this case, the flow rate of the fluid flowing through the pipe or the like can be controlled by changing the shape of the surface portion 32.

また、吸着パッドの吸着面に表面形状可変構造30を設けてもよい。この場合、吸着面を物体に押し当てた状態で、表面部32を凸形状から凹形状に変化させると、窪み部20において発生する負圧により物体に吸着する。各表面形状可変構造30において発生する負圧を利用して一様な負荷での全面吸着が可能であり、シリコンウエハなどの薄いワークを保持する際に破損しにくくなる。 Further, the surface shape variable structure 30 may be provided on the suction surface of the suction pad. In this case, if the surface portion 32 is changed from a convex shape to a concave shape while the suction surface is pressed against the object, the surface portion 32 is attracted to the object due to the negative pressure generated in the recessed portion 20. By utilizing the negative pressure generated in each surface shape variable structure 30, the entire surface can be adsorbed under a uniform load, and it is less likely to be damaged when holding a thin work such as a silicon wafer.

[第3の実施の形態]
図7(a)および(b)は、第3の実施の形態に係る表面形状可変構造40を備える部材12の断面図であり、表面部42が変形する様子を示す図である。第3の実施の形態に係る表面形状可変構造40は、内部空間24に設けられて表面部42を上下方向に押し引きするアクチュエータ46を備える点で、第1および第2の実施の形態と相違する。
[Third Embodiment]
7 (a) and 7 (b) are cross-sectional views of the member 12 including the surface shape variable structure 40 according to the third embodiment, and are views showing how the surface portion 42 is deformed. The surface shape variable structure 40 according to the third embodiment is different from the first and second embodiments in that the surface shape variable structure 40 includes an actuator 46 provided in the internal space 24 and pushes and pulls the surface portion 42 in the vertical direction. do.

アクチュエータ46は、窪み部20の底部に設けられ、上端が表面部42の下側面に連結されたアーム48を備える。アクチュエータ46は、不図示の制御装置により制御され、アーム48を上下方向に移動させて表面部42を凸形状または凹形状に変化させる。アクチュエータ46がアーム48を上方に押し上げると、表面部42が凸形状となる。また、アーム48を下方に引き下げると、表面部42が凹形状となる。 The actuator 46 includes an arm 48 provided at the bottom of the recess 20 and having an upper end connected to the lower side surface of the surface 42. The actuator 46 is controlled by a control device (not shown) to move the arm 48 in the vertical direction to change the surface portion 42 into a convex shape or a concave shape. When the actuator 46 pushes up the arm 48 upward, the surface portion 42 becomes convex. Further, when the arm 48 is pulled downward, the surface portion 42 becomes concave.

以上、第3の実施の形態を説明した。アクチュエータ46を用いることで、ポンプにより内部空間24の圧力を変化させる場合に比べて、表面部42の形状変化の応答速度が向上する。 The third embodiment has been described above. By using the actuator 46, the response speed of the shape change of the surface portion 42 is improved as compared with the case where the pressure of the internal space 24 is changed by the pump.

[第4の実施の形態]
図8は、第4の実施の形態に係る表面形状可変構造50を備える部材12の平面図である。また、図9(a)〜(c)は、図8の部材12の断面図であり、表面部52が変形する様子を示す図である。第4の実施の形態に係る表面形状可変構造50は、表面部52が中央部54および環状部56を備える点で、第1から第3の実施の形態と相違する。
[Fourth Embodiment]
FIG. 8 is a plan view of the member 12 including the surface shape variable structure 50 according to the fourth embodiment. 9 (a) to 9 (c) are cross-sectional views of the member 12 of FIG. 8 and show how the surface portion 52 is deformed. The surface shape variable structure 50 according to the fourth embodiment is different from the first to third embodiments in that the surface portion 52 includes a central portion 54 and an annular portion 56.

中央部54および環状部56は、部材12と同じ樹脂材料により一体に形成されており、z軸に平行な断面においてそれぞれ湾曲形状を有する。中央部54は、円形状に形成されており、外周縁が環状部56の内周縁につながっている。環状部56は、円環状に形成されており、外周縁が窪み部20の開口端につながっている。中央部54の曲率半径は、環状部56の曲率半径より小さい。 The central portion 54 and the annular portion 56 are integrally formed of the same resin material as the member 12, and each has a curved shape in a cross section parallel to the z-axis. The central portion 54 is formed in a circular shape, and the outer peripheral edge is connected to the inner peripheral edge of the annular portion 56. The annular portion 56 is formed in an annular shape, and the outer peripheral edge is connected to the open end of the recessed portion 20. The radius of curvature of the central portion 54 is smaller than the radius of curvature of the annular portion 56.

図9(a)は、中央部54および環状部56が、いずれも凹形状になっている状態を示す。この状態から、内部空間24の圧力が上がると、図9(b)に示すように、まず環状部56が内部空間24に対して凸形状に変化する。環状部56が部材12の表面から上方に突出したことで、図9(a)の状態に比べて部材12の表面の摩擦係数が大きくなる。内部空間24の圧力がさらに上がると、図9(c)に示すように、中央部54が内部空間24に対して凸形状に変化する。中央部54が環状部56から上方に突出したことで、図9(b)の状態に比べて部材12の表面の摩擦係数がさらに大きくなる。このように、表面部52がそれぞれ異なる圧力で変形する中央部54および環状部56を備え、部材12の表面の摩擦係数を3段階で制御できる。 FIG. 9A shows a state in which both the central portion 54 and the annular portion 56 have a concave shape. When the pressure in the internal space 24 increases from this state, as shown in FIG. 9B, the annular portion 56 first changes to a convex shape with respect to the internal space 24. Since the annular portion 56 projects upward from the surface of the member 12, the friction coefficient of the surface of the member 12 becomes larger than that in the state of FIG. 9A. When the pressure in the internal space 24 is further increased, as shown in FIG. 9C, the central portion 54 changes to a convex shape with respect to the internal space 24. Since the central portion 54 protrudes upward from the annular portion 56, the friction coefficient on the surface of the member 12 is further increased as compared with the state shown in FIG. 9B. In this way, the surface portion 52 includes a central portion 54 and an annular portion 56 that are deformed by different pressures, and the friction coefficient of the surface of the member 12 can be controlled in three stages.

以上、第4の実施の形態を説明した。なお、環状部56の外周と窪み部20の開口端との間に1つ以上の環状部を設ければ、摩擦係数を4段階以上で制御できる。 The fourth embodiment has been described above. If one or more annular portions are provided between the outer circumference of the annular portion 56 and the open end of the recessed portion 20, the friction coefficient can be controlled in four or more steps.

以上、本開示を実施例をもとに説明した。この実施例は例示であり、それらの各構成要素や各処理プロセスの組合せにいろいろな変形例が可能なこと、またそうした変形例も本開示の範囲にあることは当業者に理解されるところである。例えば、図10示すように、表面形状可変構造60の間に柱体62を設け、複数の柱体62で表面部64を支持する構成であってもよい。図11は図10のB−B断面の概略図である。この場合、表面形状可変構造60をつなぐ連結孔が拡大した構成となり、内部空間24における圧力を均一に保ちやすくなるので、複数の表面形状可変構造60の同時制御を簡単にできる。 The present disclosure has been described above based on the examples. This embodiment is an example, and it will be understood by those skilled in the art that various modifications are possible for each of these components and combinations of each processing process, and that such modifications are also within the scope of the present disclosure. .. For example, as shown in FIG. 10, a pillar body 62 may be provided between the surface shape variable structures 60, and the surface portion 64 may be supported by a plurality of pillar bodies 62. FIG. 11 is a schematic view of a cross section taken along the line BB of FIG. In this case, since the connecting holes connecting the variable surface shape structures 60 are enlarged and the pressure in the internal space 24 can be easily maintained uniformly, the simultaneous control of the plurality of variable surface shape structures 60 can be easily performed.

本開示の一態様の概要は、次の通りである。本開示のある態様の表面形状可変構造は、部材に形成された内部空間と、内部空間の少なくとも一部を覆う表面部と、を備える。表面部は、内部空間側から力を受けて、内部空間に対して、凸形状から凹形状に、または、凹形状から凸形状に変化する。 The outline of one aspect of the present disclosure is as follows. The surface shape variable structure of an aspect of the present disclosure includes an internal space formed in the member and a surface portion covering at least a part of the internal space. The surface portion receives a force from the internal space side and changes from a convex shape to a concave shape or from a concave shape to a convex shape with respect to the internal space.

この態様によると、内部空間側から力を受けて表面部が凸形状または凹形状に変化する。表面形状可変構造が設けられる部材は、樹脂材料以外にも金属材料などを用いて形成可能であり、材料選択の自由度が高い。また、部材自体の形状は変化しないので、さまざまな機械部品などに組み込み可能であり汎用性が高い。 According to this aspect, the surface portion changes to a convex shape or a concave shape by receiving a force from the internal space side. The member provided with the variable surface shape structure can be formed by using a metal material or the like in addition to the resin material, and has a high degree of freedom in material selection. Moreover, since the shape of the member itself does not change, it can be incorporated into various machine parts and is highly versatile.

表面部は、内部空間において変化する圧力により形状が変化してもよい。この場合、簡易な構成で内部空間の圧力を変えて表面部の形状を制御できる。 The shape of the surface portion may change due to the changing pressure in the internal space. In this case, the shape of the surface portion can be controlled by changing the pressure in the internal space with a simple configuration.

内部空間に設けられて表面部を押し引きするアクチュエータをさらに備えてもよい。この場合、表面部を変形させる応答速度を上げることができる。 An actuator provided in the internal space to push and pull the surface portion may be further provided. In this case, the response speed for deforming the surface portion can be increased.

表面部は、凸形状の状態で部材の表面から突出してもよい。この場合、表面形状可変構造が設けられている部材表面の摩擦係数を制御できる。 The surface portion may protrude from the surface of the member in a convex shape. In this case, the coefficient of friction of the surface of the member provided with the variable surface shape structure can be controlled.

表面部は、凸形状の状態で部材の表面から突出しない位置に設けられてもよい。この場合、表面形状可変構造が設けられている部材が、潤滑油などの流体を介して他の部材と接触する構成において、表面部の形状変化により部材間の流体の厚さを調整して接触状態を制御できる。 The surface portion may be provided at a position where it does not protrude from the surface of the member in a convex shape. In this case, in a configuration in which a member provided with a variable surface shape structure comes into contact with another member via a fluid such as lubricating oil, the thickness of the fluid between the members is adjusted and contacted by changing the shape of the surface portion. You can control the state.

表面部は、中央部と、内周縁が中央部の外周縁につながる環状部とを備え、中央部および環状部は、それぞれ独立して内部空間に対して凸形状または凹形状に変化してもよい。この場合、表面部の形状が3段階で変化するので、表面の摩擦係数や部材間の流体の厚さを3段階以上で制御できる。 The surface portion includes a central portion and an annular portion in which the inner peripheral edge is connected to the outer peripheral edge of the central portion, and the central portion and the annular portion independently change to a convex shape or a concave shape with respect to the internal space. good. In this case, since the shape of the surface portion changes in three steps, the friction coefficient of the surface and the thickness of the fluid between the members can be controlled in three steps or more.

10、30、40、50、60 表面形状可変構造、 20 窪み部、 22、32、42、52、64 表面部、 46 アクチュエータ、 54 中央部、 56 環状部。 10, 30, 40, 50, 60 Surface shape variable structure, 20 recesses, 22, 32, 42, 52, 64 surface parts, 46 actuators, 54 central parts, 56 annular parts.

Claims (2)

部材に形成された内部空間と、
前記内部空間の少なくとも一部を覆う表面部と、を備え、
前記表面部は、前記内部空間側から力を受けて、前記内部空間に対して、凸形状から凹形状に、または、凹形状から凸形状に変化し、
前記表面部は、凸形状の状態で前記部材の表面から突出しない位置に設けられ、
前記部材の表面側が流体を介して他の部材と接触することを特徴とする表面形状可変構造。
The internal space formed in the member and
A surface portion that covers at least a part of the internal space is provided.
The surface portion receives a force from the internal space side and changes from a convex shape to a concave shape or from a concave shape to a convex shape with respect to the internal space.
The surface portion is provided at a position where it does not protrude from the surface of the member in a convex shape.
A variable surface shape structure characterized in that the surface side of the member comes into contact with another member via a fluid.
部材に形成された内部空間と、
前記内部空間の少なくとも一部を覆う表面部と、を備え、
前記表面部は、中央部と、内周縁が前記中央部の外周縁につながる環状部と、を備え、
前記中央部および前記環状部がいずれも凹形状になっている状態において、前記内部空間側からの圧力が上がると、前記中央部が凹形状を維持しながら、前記環状部が凹形状から凸形状に変化し、
前記中央部が凹形状になっており、かつ前記環状部が凸形状になっている状態において、前記内部空間側からの圧力が上がると、前記中央部が凹形状から凸形状に変化しながら、前記環状部が凸形状を維持することを特徴とする表面形状可変構造。
The internal space formed in the member and
A surface portion that covers at least a part of the internal space is provided.
The surface portion includes a central portion and an annular portion whose inner peripheral edge is connected to the outer peripheral edge of the central portion.
When the pressure from the internal space side increases in a state where both the central portion and the annular portion have a concave shape, the annular portion changes from a concave shape to a convex shape while maintaining the concave shape of the central portion. Changed to
When the pressure from the internal space side increases in a state where the central portion has a concave shape and the annular portion has a convex shape, the central portion changes from a concave shape to a convex shape while changing. A surface shape variable structure characterized in that the annular portion maintains a convex shape.
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