JP6948832B2 - Heat transfer plate for vacuum equipment and its manufacturing method - Google Patents

Description

The present invention relates to a heat transfer plate for a vacuum device, which is made of an aluminum alloy plate material and has a heat transfer medium flow path through which a heat transfer medium flows. The present invention also relates to a method for manufacturing a heat transfer plate for a vacuum device, which is a method for forming a heat transfer medium flow path in which a high vacuum sealability is ensured.

In the manufacture of liquid crystal panel displays (LCDs) and organic EL displays (OLEDs), there is a step of forming various thin films such as an electrode film and a coating film on a substrate glass. In the film forming process of this thin film, a heat transfer plate is used for controlling the temperature of the substrate. The structure of the heat transfer plate has a wide variety of shapes according to the purpose, but the heat transfer plate used for LCD and OLED is matched with the substrate glass from the viewpoint of ensuring the temperature uniformity of the substrate glass. A heat transfer plate made of aluminum alloy plate material of size is used.

The heat transfer plate made of an aluminum alloy plate is provided with a heat transfer medium flow path inside, and the size and shape of the heat transfer medium flow path are appropriately designed according to the object. The heat transfer plate provided with the heat transfer medium flow path includes an aluminum alloy plate material (base member) having a groove in consideration of the desired heat transfer medium flow path in advance and a lid (plug member) of the heat transfer medium flow path groove. It is composed of and. Then, the plug member is joined to the base member to form a sealed heat transfer medium flow path. It should be noted that the reason why the seal is used here is that the heat transfer plate used for film formation such as the above-mentioned LCD is used in a high vacuum environment in a vacuum device, and therefore airtightness corresponding to the heat transfer plate is required. Is.

Looking at the detailed configuration of the heat transfer plate made of an aluminum alloy plate material and the manufacturing process thereof, for example, in Patent Document 1, a concave groove is provided in the base member, a heat medium tube is inserted into the groove, and a lid plate (plug) is inserted. The member) is joined to the base member by welding. Further, it is a heat transfer material in which a plastic fluid material flows along the concave groove due to frictional heat by a rotating tool along the concave groove. Further, the heater plate of Patent Document 2 is composed of a pair of aluminum alloy members, and a heater circuit is arranged inside the heater plate over the entire heater plate. Grooves are provided on both sides of the outer periphery of the heater plate and the entire circumference of the heater circuit as fittings for joining. Further, a plurality of reinforcing fitting portions are provided.

Japanese Unexamined Patent Publication No. 2010-17739 Japanese Unexamined Patent Publication No. 2006-172970

In each of the heat transfer plates described in Patent Documents 1 and 2, independent members such as a pipe for a refrigerant body or a heater circuit as a heat transfer medium flow path are arranged in a base member. The heat transfer effect is ensured by bringing the heat transfer medium flow path into close contact with the base member and the lid member. As described above, when a pipe for a refrigerant body, a heater circuit, or the like is used as the heat transfer medium flow path, a cost is naturally generated for the member, and the cost of the entire heat transfer plate is increased.

Further, in recent years, in this type of heat transfer plate, there is a tendency to reduce the thickness of the member in order to reduce the material cost. Although thinning of the member is useful for heat transfer, a decrease in strength is unavoidable. In the conventional heat transfer plate that supplies the heat transfer medium flow path in the form of a pipe, the groove shape of the base member may be deformed when the pipe is embedded in the groove provided in the base member while being in close contact with the pipe. In the conventional heat transfer plate, if the pipe and the base member and the lid member surrounding the pipe are not in close contact with each other, the heat exchange efficiency is lowered. Therefore, it is not possible to set a clearance more than necessary between the pipe and the groove. Therefore, there is a risk of member deformation due to thermal expansion / contraction during fitting of the pipe or during use.

Further, the heat transfer plate described in Patent Document 1 is manufactured by arranging a pipe for a refrigerant body on a base member, arranging a lid body, welding the heat transfer plate, and then joining the heat transfer plate by frictional agitation. However, since the base member and the plug member are also thinned as the heat transfer plate is thinned, the members are liable to be deformed by heating at the time of joining. If the member is deformed, airtightness cannot be ensured due to a joining defect and refrigerant leaks. As a result, the function as a heat transfer plate is not exhibited, and the vacuum atmosphere may be destroyed, which may hinder the film forming process.

The present invention has been made based on the above background. Regarding a heat transfer plate for vacuum use made of an aluminum alloy plate material, the number of members is reduced to reduce the cost, and the heat transfer plate is also deformed during manufacturing due to thinning. Provide something that can be suppressed. In addition, consideration is given to the airtightness of the heat transfer medium path, and a heat transfer plate that does not leak the heat transfer medium and does not destroy the vacuum atmosphere during use is provided. Then, a method suitable as a method for manufacturing the heat transfer plate is also provided.

In order to solve the above problems, the present inventors have conducted diligent studies to form a heat transfer medium flow path without using piping, and suppress leakage of the heat transfer medium even in a flow path that does not use piping. I examined the means to do so. In this study, the present inventors have covered two members made of aluminum alloy, that is, a base member forming a heat transfer medium flow path, and a groove provided on the base member and having a shape along the heat transfer medium flow path. A plug member and a plug member for each of the above were manufactured. Then, the plug member was fitted into the groove of the base member so as to ensure airtightness, and the groove was used as it was as the heat transfer medium flow path to manufacture the heat transfer plate. In the following, the flow path shape formed by the heat transfer medium flow path may be referred to as a groove pattern.

In this way, when the heat transfer medium flow path is formed by combining the groove of the base member and the plug member, it is important to ensure the adhesion when joining both members in order to ensure the airtightness of the flow path. Become. Here, in the present invention, as a method of joining the base member and the plug member for ensuring airtightness, a forge welding method of heating and pressurizing both members is adopted as described later.

Here, in joining with heating such as the forge welding method, it is necessary to consider the difference in thermal expansion between the base member and the plug member. In this respect, the volume of the base member and the volume of the plug member are generally very different. In the base member provided with the heat transfer medium flow path, the volume of the base member and the plug member must be provided so as to have a depth for forming the heat transfer medium passage and a thickness capable of withstanding the pressure of the heat transfer medium. It can be said that the difference between the two becomes larger.

The difference in volume between the base member and the plug member causes a difference in the amount of heat stored during heating and causes deformation due to a difference in thermal expansion or the like. When joining the concave portion, which is the groove of the base member, and the plug member (convex portion), which is the lid material, simply fitting the plug member having the same shape as the groove pattern causes the plug member to be deformed due to the difference in thermal expansion. There is a high possibility that they will not be fixed or joined at the position as designed. This deviation becomes more remarkable as the size of the member increases and the volume difference between the base member and the plug member increases.

Therefore, the present inventors have further studied, and when fitting and joining a plug member having a volume difference to the base member, the base member and the plug member are prevented from being displaced in order to prevent the displacement due to deformation. I decided to partially set the section for this.

That is, the present invention is a plug member made of an aluminum alloy plate material having a flow path groove for forming a heat transfer medium flow path and an aluminum alloy plate material serving as a lid of the flow path groove of the base member. A heat transfer plate for a vacuum device including a heat transfer medium flow path formed by fitting the plug member into the flow path groove, wherein the flow is applied to the base member and the plug material. It is a heat transfer plate for a vacuum device, characterized in that it is provided with a slip prevention node that is wider than the width of the path groove.

Further, the method for manufacturing a heat transfer plate for a vacuum device according to the present invention is a step of fitting the plug member to the base member by a forge welding method in which the base member and the plug member are heated in the range of 250 ° C. to 400 ° C. and pressed. Is included.

The aluminum alloy heat transfer plate according to the present invention eliminates the piping that serves as the heat transfer medium flow path applied in the prior art, and provides the heat transfer medium flow path by combining the flow path groove of the base member and the plug member. Form. As a result, in addition to reducing the cost of the heat transfer plate, it is possible to suppress deformation of the base member during manufacturing and leakage of the heat transfer medium from the piping. Then, in the present invention, a deviation prevention section is appropriately set in the flow path to suppress the deviation between the plug member and the base member in the manufacturing process. Then, a heat transfer plate having excellent airtightness can be manufactured.

The figure which shows the specific example of the heat transfer plate which concerns on this invention. The figure which shows the specific example of the heat transfer plate which concerns on this invention. The figure explaining the example of the specific form of the deviation prevention section. The figure explaining the appearance of the base member of the heat transfer plate manufactured in this embodiment. The figure explaining the appearance of the plug member of the heat transfer plate manufactured in this embodiment. An example of a cross section of the heat transfer plate manufactured in the present embodiment, which is determined to be acceptable in cross-section observation.

Hereinafter, a heat transfer plate for a vacuum device made of an aluminum alloy plate material according to the present invention and a method for manufacturing the same will be specifically described. In the following description, first, the configuration of the heat transfer plate for a vacuum device according to the present invention will be described.

The present invention is composed of two members made of an aluminum alloy plate, that is, a base member in which a flow path groove for a heat transfer medium flow path is formed, and a plug member having a shape along the groove pattern. Then, the heat transfer medium flow path is formed by fitting and joining the plug member in the flow path groove of the base member to form a heat transfer plate. In the present invention, the piping for circulating the heat transfer medium such as the refrigerant is eliminated, and the flow path groove of the base member is used as it is as the heat transfer medium flow path. In this way, by not using the piping, the number of members can be reduced and the cost of the heat transfer plate can be reduced. In addition, there is no concern about deformation of the groove shape when the pipe is embedded in the base member and leakage of the heat transfer medium from the pipe, which may occur in the prior art. Further, if the piping is abolished and the flow path groove of the base member is used as it is as the heat transfer medium flow path, the heat transfer effect can be improved, and the deformation in the process of using the piping and the resulting deformation of the heat transfer plate can be suppressed.

Here, each component of the heat transfer plate for a vacuum device according to the present invention will be described. The base member is made of an aluminum alloy plate material, and a flow path groove for forming a heat transfer medium flow path is formed. The planar shape of the entire flow path groove for forming the heat transfer medium flow path, that is, the groove pattern is not particularly limited. In addition, the dimensions and cross-sectional shape of the flow path groove are not limited. The shape and dimensions of the groove pattern are arbitrarily formed according to the application, dimensions, heat capacity for heating (cooling), and the like.

The plug member, which is the other member of the heat transfer plate for a vacuum device according to the present invention, is made of an aluminum alloy plate and serves as a lid for a flow path groove formed in the base member. The planar shape of the plug member is the same as the groove pattern shape of the base member, except for the portion where the deviation prevention node is formed, which will be described later. The thickness of the plug member is not particularly limited, and the thickness is such that pressure resistance and airtightness are ensured in consideration of the pressure of the heat transfer medium flowing in the heat transfer medium flow path. Set.

Here, as an example of the configuration of the flow path groove of the base member, it is preferable to provide a joint groove wider than the flow path groove in the vicinity of the surface of the base member. By providing the plug member with a shape that matches the joint groove, the base member and the plug member are fitted and joined by pressurization at a predetermined temperature. Further, in the present invention, a slip prevention clause is set, and the base member is wider than the flow path groove of the base member in the portion corresponding to the slip prevention clause of the plug member and has a width substantially equal to the slip prevention clause. It is preferable to provide a slip prevention groove. That is, it is preferable that the cross-sectional shape around the flow path groove of the base member is a stepped shape (see the cross-sectional view of FIG. 4 showing the embodiment of the present invention). By setting the joining groove and the slip prevention groove, the plug member can be locked while securing the necessary flow path, and stable joining becomes possible. The joint groove is preferably a few millimeters (10 mm or less) wider than the width of the flow path groove. Further, the depth of the joint groove may be shallow, and it is preferable that the depth is substantially equal to the thickness of the plug member.

Then, with respect to the base member in which the flow path groove having the joint groove and the deviation prevention groove is formed as described above, the width of the plug member is the width of the flow path groove of the base member including the portion of the deviation prevention node. Those that are substantially the same are preferable.

The base member and the plug member are joined by heating to a predetermined temperature, which will be described later, and then applying pressure. Here, a deviation may occur in the heating process due to a volume difference between the base member and the plug member. Therefore, in the present invention, in order to prevent the groove pattern of the base member and the plug member from being displaced, the plug member is provided with a displacement prevention section. This deviation prevention section prevents the plug member from being displaced due to deformation during heating, and also acts as a positioning when the plug member is joined to the flow path groove of the base member.

The slip prevention section is a wide portion that is partially set for a plug member that originally has a uniform width. Specific examples of a heat transfer plate in which a plug member having the slip prevention section and a base member are combined are shown in FIGS. 1 and 2. As described above, the groove pattern of the base member is designed according to the required cooling / heating capacity, etc., but in many cases, it is composed of long and short flow paths. In a heat transfer plate having such a flow path, a long flow path and a short flow path are usually formed from the heat transfer medium inflow port as a starting point, and as shown in FIGS. 1 and 2, the heat transfer medium flow path is in the width direction. It is arranged so that it folds back.

Next, the shape of the slip prevention section will be described. In the present invention, the following description is merely an example thereof, and the present invention can be satisfied if it has a similar shape or the like. FIG. 3 shows a top view and a cross-sectional view of the joint portion between the base member and the plug member in the heat transfer plate. As shown in the cross-sectional view of FIG. 3, the width of the plug member acting as the lid of the groove is substantially equal to the joint groove slightly wider than the width of the flow path groove of the base member. However, it is permissible to make the width of the plug member slightly wider than the joint groove in order to strengthen the joint. The width of the slip prevention node is wider than the width of the flow path groove as shown in FIG.

As can be seen from the top view of FIG. 3, the planar shape of the slip prevention section is not particularly limited as various shapes can be set. Regarding the contours of these slip prevention nodes and the slip prevention grooves in the planar shape, it is desirable to connect the portions where the angle changes with R. This is to prevent material deformation due to friction between the base member and the plug member during joining and entrainment due to material catching. This R-shaped setting is particularly important at the portion where the deviation prevention groove rises from the normal flow path groove (joint groove) (the portion connecting the two). This R is preferably 20 to 30. If R is less than 20, when joining the base member and the plug member, friction increases on both sides with R as the apex, and the R portion is dragged in the joining direction, that is, in the groove depth direction, and joining such as leakage and flow path deformation. Cause a problem. Further, although the effect is maintained even if R exceeds 30, it is preferable to set the upper limit R to 30 in order to surely prevent the deviation.

As for the planar shape of the slip prevention node, it is desirable that the length (the length in the longitudinal direction of the flow path groove) is such that the node portions can be smoothly connected by R. Further, when the joint groove and the deviation prevention groove are formed in the base member as described above, the width of the deviation prevention groove, that is, the width of the deviation prevention node is 5 times or more wider than the width of the joint groove. It is preferable to have. The width of the misalignment prevention groove and the width of the joint groove are the sum of the widths of the grooves provided on both outer sides of the flow path groove, respectively. That is, the joint groove width is the difference between the total width of the joint groove and the groove width of the flow path, and the deviation prevention groove width is the difference between the total width of the deviation prevention groove and the width of the flow path groove. Usually, it is preferable that the joint groove width and the deviation prevention groove width are installed so as to be symmetrical with respect to the center of the flow path groove width.

Further, since the slip prevention node contributes to the bonding strength like the flow path groove forming the heat transfer medium flow path of the base member and the plug member, the flow path cross section is formed so as to remove the oxide film and give a new surface at the time of joining. A taper that widens in the depth direction of the above may be provided.

The number of slip prevention clauses installed is based on the shape and length of the heat transfer medium flow path, and the slip prevention clauses can be appropriately set while verifying their effects. However, according to the study by the present inventors, if the length of the straight portion exceeds 500 mm in the situation where the deviation prevention node is not provided for the groove pattern having the linear portion, due to thermal expansion at the time of temperature rise at the time of joining. The plug member may float from the base member, which may cause a joining failure. Therefore, it is preferable to set one or more slip prevention nodes within a length of 500 mm for the groove pattern composed of straight lines, whereby the slip prevention effect between the base member and the plug member is preferably exhibited. For example, as shown in FIGS. 1 and 2, a deviation prevention section is provided.

Further, regarding the setting position of the deviation prevention effect within the range of this suitable length of 500 mm, any position may be set as long as it is within 500 mm, but when even one deviation prevention node is set, the center thereof. That is, it is preferable to install the groove pattern at a position equal to the length of the groove pattern of 500 mm. When a plurality of slip prevention sections are installed, it is preferable to set them evenly with respect to the groove pattern length. It should be noted that one or more slip prevention clauses may be provided for the portion where the groove pattern length is less than 500 mm, but the slip prevention clause may not be provided. That is, the effect of the present invention can be confirmed if there is one or more deviation prevention nodes within the groove pattern length of 500 mm with respect to the groove pattern when the groove pattern length exceeds 500 mm. The setting of the deviation prevention node in the portion where the length of the flow path groove is short may be determined in consideration of the effect and the productivity of processing and the like.

Regarding the heat transfer plate according to the present invention described above, the materials of the base member and the plug member are not particularly limited as long as they are aluminum alloy plates. Preferred aluminum alloys include aluminum alloys such as JIS1050, 1100, 3003, 3004, 5052, 5005, 6061, 6063, 7003 and 7N01.

Next, a method for manufacturing a heat transfer plate for a vacuum device according to the present invention will be described. In the production of the heat transfer plate of the present invention, a forge welding method is adopted in which a base member provided with a heat transfer medium flow path and a plug member are combined, heated to a predetermined temperature, pressurized and joined.

The base member and the plug member are joined between the flow path groove provided in the base member and the plug member that matches the shape of the groove pattern. In the forge welding method, when a plug member is fitted to a base member and joined, the oxide film is destroyed by friction on the surface of the contact portion of each member, and further, the new aluminum surface is exposed on the surface, so that the joining proceeds. .. As a specific condition of the joining process by this forge welding, the base member and the plug member are heated at 250 ° C. to 500 ° C. in a fitted state, and the interface between the base member and the plug member has a heat deformation resistance or more. Pressurize with high pressure. Due to this heating, the deformation resistance at the joint surface between the base member and the plug member is reduced at the contact surface between the base member and the plug member, and the subsequent joint during pressurization, that is, the plug member is easily pushed into the base member. Then, in this way, a new surface is generated at each joint surface due to friction when the plug member is pushed into the base member, and metal bonding is performed by further pressurizing each member having the new surface. Here, the heating temperature is set to 250 ° C. to 500 ° C. when the temperature is less than 250 ° C., the deformation resistance of the joint surface between the base member and the plug member is small, a new surface is less likely to occur, and the base member and the plug member are joined. Is insufficient. If it exceeds 500 ° C., the deformation resistance becomes too small, and the deformation becomes too much, resulting in insufficient bonding. The heating temperature is preferably in the range of 300 ° C. to 450 ° C., more preferably 350 ° C. to 420 ° C.

When joining the base member and the plug member, it is preferable to adopt a heating rate as fast as possible in order to improve productivity. However, when the rate of temperature rise is high, thermal expansion is observed more remarkably in the plug member than in the base member. This is because the temperature rise of the plug member having a small volume is fast due to the volume difference between the base member and the plug member. Here, since the plug member has a shape along the groove pattern of the flow path groove of the base member, that is, a shape close to a linear shape, the expansion can be expressed as a linear expansion. The length change due to linear expansion is obtained by the product of the expansion coefficient peculiar to each material and the difference in temperature based on the original length. Here, the coefficient of linear expansion of the aluminum alloy is 23 × 10 ⁻⁶ / ° C., which is larger than the coefficient of linear expansion of other metals such as iron and copper. Further, in the groove pattern having long and short groove lengths as shown in FIGS. 1 and 2, there is a difference in length between the plug members that serve as the lids. In such a case, the length change due to thermal expansion becomes remarkable in the long portion. As a result, the long portion of the plug member may be displaced from the groove pattern of the base member, and may be lifted from the groove pattern or deviated from the groove pattern. The slip prevention section is particularly effective in preventing the plug member from slipping at a long portion. That is, the deviation prevention section contributes to quality assurance of prevention of deviation while increasing the rate of temperature rise to improve the productivity of the heat transfer plate.

To join the base member and the plug member, it is necessary to pressurize after heating both members to the above temperature or at the same time as heating. This pressing force requires a pressing force that causes the plug member to undergo plastic deformation inside the base member. That is, the pressing force is derived from the area where the plug member receives the pressure and the deformation resistance between the heat of the material.

Since an oxide film is usually formed on the surface of an aluminum material in the atmosphere, it is preferable to remove the oxide film in advance before joining the base member and the plug member. Examples of the method for removing the oxide film include cleaning the member by acid / alkali etching. By removing the oxide film, the joint strength of the joint surface between the base member and the plug member is further increased, and problems such as refrigerant leakage can be avoided.

Further, before joining the base member and the plug member, pre-operation such as positioning of both members is required, but in the present invention, temporary fixing welding such as positioning of both members is not necessary. In the present invention, the presence of the slip prevention node facilitates positioning, and since slip during heating is suppressed, welding becomes unnecessary. Therefore, the present invention can also contribute to the reduction of the number of heat transfer plate manufacturing steps.

Next, examples that are specific embodiments of the present invention will be described with reference to the drawings. The present embodiment is an example of the present invention, and is not limited thereto.

In this example, a heat transfer plate having a predetermined groove pattern was manufactured, and the effect of the slip prevention node was examined. First, a method of manufacturing a heat transfer plate will be described. A flow path groove having a groove pattern shown in FIG. 4 as a heat transfer medium flow path was formed on the base member, and a plug member having a shape matching the groove pattern was prepared. The size of the base member is 1000 mm in length × 1000 mm in width × 50 mm in height, and a flow path groove having a groove pattern having long and short straight lines as shown in FIG. 4 is formed by cutting. The cross-sectional dimension of this flow path groove is such that the width at the bottom is 20 mm, and the joint groove on the surface side is 6 mm wider (3 mm on each side) than the width at the bottom of the flow path groove, resulting in a stepped shape. .. Further, for the portion where the deviation prevention section of the flow path groove is provided, a deviation prevention groove 30 mm (15 mm on each side) wider than the width of the flow path groove is formed. The thickness (depth) of the joint groove and the misalignment prevention groove is 15 mm.

Then, an aluminum alloy of the same material was cut to manufacture a plug member. FIG. 5 is a top view and a cross-sectional view thereof. The planar shape of the plug member is the same as the groove pattern of the base member. The plug member is formed with a slip prevention section having a width of 50 mm. The width of the plug member and the width of the slip prevention node were the same as those of the joint groove and the slip prevention groove of the base member. The thickness of the plug member is 15 mm. In the deviation prevention node, an R is formed at a portion where an angle change occurs in the contour of the planar shape. In this embodiment, the R of the rising portion of the node is 25, and the R of the end portion in the width direction of the node is set. It was set to 25.

For joining the base member and the plug member, after positioning the member, the temperature was raised to a set joining temperature, and a load of 5000 tons was applied to fit the plug member into the base member for joining. The joining temperature here was set to a temperature between 200 ° C. and 500 ° C. In this embodiment, several heat transfer plates having different lengths of straight portions of the heat transfer medium flow path were manufactured. We also manufactured a heat transfer plate that does not have a slip prevention node. Then, the manufactured heat transfer plate was evaluated by observing the cross section of the heat transfer medium flow path portion and performing a leak test.

(1) Cross-section observation Regarding the longest flow path of the heat transfer medium flow path, the cross section at the center was observed and it was confirmed that the base member and the plug member were joined. After joining, the observation site was cut out, finished to a mirror surface by machining (Ra 3.2 or less), and visually observed. On the joint surface between the base member and the plug member, a pass "○" is given for a state without a gap, a "△" is given for a part with a gap but not connected to the outside, and a "×" is given for a part that is not completely joined. ". For reference, FIG. 6 shows an example of a cross section that was accepted in the cross-section observation after joining.

(2) Leak test In the leak test, one side of the flow path of the circuit of the completed heat transfer plate is closed, the other side is connected to the helium leak detector, and He is sprayed from the outer surface in a vacuumed state (vacuum spraying method). I confirmed that there was no such thing. If no leakage was confirmed, the result was "○", and if no leakage was confirmed, the result was "x".

Table 1 shows the evaluation results after joining. Test No. 1-No. Reference numeral 4 can be said to be an embodiment of the present invention. In these, the deviation prevention clause is set appropriately, and the joining temperature is within the appropriate range. In these examples, the cross-section observation and the leak test passed. On the other hand, Test No. In No. 6 (Comparative Example), although the length of the flow path exceeded 500 mm, a slip prevention node was not installed, so that a joint defect was observed in the cross-sectional observation, and a leak was observed by the leak test. In addition, the test No. In No. 7 (Comparative Example), the joining temperature was low, so that the joining was defective. In addition, No. No. 5 is outside the scope of the present invention because the deviation prevention clause is not set (reference example). Since this heat transfer plate has a flow path length of less than 500 mm, no joining failure occurred even if the deviation prevention node was not provided.

According to the present invention, a heat transfer plate having excellent airtightness in the heat transfer medium flow path can be efficiently manufactured at low cost. The present invention is useful as a heat transfer plate applied to a vacuum apparatus used in various film forming processes such as an electrode film in the manufacture of LCDs, OLEDs and the like.

Claims (4)

The plug is composed of a base member made of an aluminum alloy plate material having a flow path groove for forming a heat transfer medium flow path, and a plug member made of an aluminum alloy plate material serving as a lid of the flow path groove of the base member. A heat transfer plate for a vacuum device including a heat transfer medium flow path formed by fitting a member to the base member.
A part of the straight portion of the plug member in the length direction is provided with a slip prevention section which is a wide portion.
The deviation prevention section is wider than the portion of the straight portion of the plug member other than the deviation prevention section, and is wider than the flow path groove.
The base member is characterized in that a portion of the plug member corresponding to the deviation prevention section is provided with a deviation prevention groove that is wider than the flow path groove and has the same width as the deviation prevention node. Heat transfer plate for vacuum equipment. The surface of the base member is provided with a joint groove that is wider than the flow path groove and has a depth equal to the thickness of the plug member.
The first aspect of claim 1, wherein the width of a portion of the plug member other than the slip prevention node is equal to the width of the joint groove, and the width of the slip prevention groove and the slip prevention node of the plug member are equal. Heat transfer plate for vacuum equipment. The heat transfer plate for a vacuum device according to claim 1 or 2, wherein an R of 20 to 30 is formed in an angle changing portion in the contour of the planar shape of the slip prevention node. The method for manufacturing a heat transfer plate for a vacuum device according to any one of claims 1 to 3.
A method for manufacturing a heat transfer plate for a vacuum device, which comprises a step of fitting the plug member to the base member by a forge welding method in which the base member and the plug member are heated in the range of 250 ° C. to 400 ° C. and pressed.

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